WO2023085841A1 - Filtre de couleur plasmonique de fabry-perot - Google Patents

Filtre de couleur plasmonique de fabry-perot Download PDF

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Publication number
WO2023085841A1
WO2023085841A1 PCT/KR2022/017723 KR2022017723W WO2023085841A1 WO 2023085841 A1 WO2023085841 A1 WO 2023085841A1 KR 2022017723 W KR2022017723 W KR 2022017723W WO 2023085841 A1 WO2023085841 A1 WO 2023085841A1
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WO
WIPO (PCT)
Prior art keywords
color filter
plasmonic color
layer
reflective layer
fabricated
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Application number
PCT/KR2022/017723
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English (en)
Korean (ko)
Inventor
도윤선
조효종
Original Assignee
경북대학교 산학협력단
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Publication of WO2023085841A1 publication Critical patent/WO2023085841A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters

Definitions

  • the present invention relates to a plasmonic color filter, and more particularly, to a plasmonic color filter using a Fabrit Farat interference phenomenon.
  • Another object of the present invention is to provide a plasmonic color filter with improved color purity.
  • an object of the present invention is to provide a plasmonic color filter using the fabrit farat interference phenomenon.
  • the first reflective layer may be formed of a metal layer including at least one of noble metals such as aluminum (Al), gold (Au), silver (Ag), and copper (Cu).
  • noble metals such as aluminum (Al), gold (Au), silver (Ag), and copper (Cu).
  • the first reflective layer may have a thickness ranging from 30 nm to 100 nm.
  • the cavity layer may be formed of a transparent dielectric including at least one of LiF, SiO 2 , Al 2 O 3 , M g O, Z n O, Z n S, and ITO.
  • the dielectric may be formed through a vacuum process such as deposition or sputtering or a solution process.
  • the cavity layer may have a thickness ranging from 10 nm to 1 um.
  • the second reflective layer may be formed of a metal including at least one of aluminum (Al), gold (Au), silver (Ag), and copper (Cu).
  • a substrate formed under the first reflective layer may be further included.
  • a dielectric layer formed on top of the second reflective layer may be further included.
  • a substrate a second reflective layer formed on the substrate; a cavity layer formed on the second reflective layer; a first reflective layer having a plurality of holes formed on the cavity layer; and a dielectric layer formed on the first reflective layer.
  • filter performance of a color filter may be improved.
  • color purity of the plasmonic color filter may be improved.
  • a plasmonic color filter using a fabrit farat interference phenomenon is provided.
  • FIG. 1A and 1B are diagrams for explaining a conventional plasmonic color filter.
  • FIG. 2B is a diagram showing light transmittance according to a fabricated Parrot plasmonic color filter according to an embodiment of the present invention.
  • FIG. 3 is a diagram for explaining fabret farat interference of a fabret farat plasmonic color filter according to an embodiment of the present invention.
  • FIG. 4 is a diagram for explaining the effect of the fabricated Parrot plasmonic color filter according to an embodiment of the present invention.
  • 5A to 5C are diagrams for explaining the structure of a phablet Farad plasmonic color filter according to another embodiment of the present invention.
  • 6A and 6B are diagrams for explaining an example to which a fabrit Parrot plasmonic color filter according to an embodiment of the present invention is applied.
  • a (e.g., first) element When a (e.g., first) element is referred to as being "(functionally or communicatively) coupled to" or “connected to" another (e.g., second) element, that element refers to the other (e.g., second) element. It may be directly connected to the component or connected through another component (eg, a third component).
  • the expression “device configured to” can mean that the device is “capable of” in conjunction with other devices or components.
  • a processor configured (or configured) to perform A, B, and C may include a dedicated processor (eg, embedded processor) to perform the operation, or by executing one or more software programs stored in a memory device.
  • a dedicated processor eg, embedded processor
  • a general-purpose processor eg, CPU or application processor
  • FIG. 1A and 1B are diagrams for explaining a conventional plasmonic color filter.
  • a conventional plasmonic color filter includes a substrate 1100, a metal layer 1200 formed on the substrate 1100 and including a plurality of holes, and a dielectric layer 1300 formed on the metal layer 1200. ) may be included.
  • the wavelength at which surface plasmon resonance occurs is determined by the material properties of the metal layer 1200 and the dielectric layer 1300 and the size, shape, and arrangement pattern of holes formed in the metal layer.
  • FIG. 1B light transmittance according to a conventional plasmonic color filter is shown. Specifically, FIG. 1B shows peaks and wide half widths at resonance wavelengths (475 nm, 530 nm, and 635 nm) of RGB, that is, red, green, and blue. It can be confirmed that the conventional plasmonic color filter has a transmittance spectrum in the form of a long tail in the red wavelength band. This means low color purity (low Q factor).
  • FIG. 2A is a diagram for explaining the structure of a fabricated Farrot plasmonic color filter according to an embodiment of the present invention.
  • a fabricated farad plasmonic color filter 2000 includes a first reflective layer 2100, a cavity layer 2200, a second reflective layer 2300, and a substrate 2400. can include
  • the first reflective layer 2100 may be a metal layer including a plurality of holes.
  • the first reflective layer 2100 may include at least one of aluminum (Al), noble metals such as gold (Au), silver (Ag), and copper (Cu).
  • the first reflective layer 2100 may be formed to a thickness ranging from 30 nm to 300 nm. In this case, the thickness of the first reflective layer 2100 may be determined according to the purpose of use of the fabricated Parrot plasmonic color filter 2000, that is, the wavelength of light to be transmitted.
  • the first reflective layer 2100 may include a plurality of holes.
  • the hole may be formed to pass through the upper and lower surfaces of the first reflective layer 2100 .
  • the hole may have at least one shape of a circle, an oval, a rectangle, or a triangle.
  • the arrangement period of the plurality of holes eg, 50 nm or more and 1 ⁇ m or less), shape and size (diameter of the hole is smaller than the period) may be determined according to the wavelength of light to be transmitted.
  • the cavity layer 2200 is formed on the first reflective layer 2100 and may be a dielectric layer including a dielectric material. In this case, the cavity layer 2200 may fill the inside of the hole of the first reflective layer 2100 .
  • the cavity layer 2200 is a general dielectric (dielectric material) such as LiF or SiO 2 , Al 2 O 3 , M g O, Z n O, Z n S, or a conductive material such as indium tin oxide (ITO). and at least one dielectric that is an oxide (transparent conductive oxide).
  • dielectric material such as LiF or SiO 2 , Al 2 O 3 , M g O, Z n O, Z n S, or a conductive material such as indium tin oxide (ITO).
  • ITO indium tin oxide
  • the cavity layer 2200 may be formed to a thickness ranging from 10 nm to 1 um.
  • the thickness of the cavity layer 2200 may be determined according to the purpose of use of the fabricated Farat plasmonic color filter 2000, that is, the wavelength of light to be transmitted.
  • the second reflective layer 2300 may be a translucent metal layer formed on the cavity layer 2200 .
  • the second reflective layer 2300 may include at least one of aluminum (Al), noble metals such as gold (Au), silver (Ag), and copper (Cu).
  • the second reflective layer 2300 may be formed to a thickness ranging from 5 nm to 30 nm.
  • the second reflective layer 2300 may have a thickness of 5 nm to 30 nm in order to partially transmit and partially reflect light.
  • the substrate 2400 is formed under the first reflective layer 2100, and is formed of a transparent flat substrate such as a glass substrate, plastic including polyethylene terephthalate (PET) and polyethylene naphthalate (PEN). It may be a flexible substrate such as a substrate (transparent plastic substrate).
  • a transparent flat substrate such as a glass substrate, plastic including polyethylene terephthalate (PET) and polyethylene naphthalate (PEN).
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • It may be a flexible substrate such as a substrate (transparent plastic substrate).
  • FIG. 2B is a diagram showing light transmittance according to a fabricated Parrot plasmonic color filter according to an embodiment of the present invention.
  • the RGB resonance wavelength is blue-shifted in the case of the fabricated Parrot plasmonic color filter 2000 according to an embodiment of the present invention, compared to FIG. 1B. Specifically, it can be seen that the wavelength region shared with the blue wavelength in FIG. 2B is greatly reduced in the red wavelength band in comparison with FIG. 1B. This indicates that the color purity of the fabricated Parrot plasmonic color filter 2000 according to an embodiment of the present invention is improved.
  • the interference condition is determined according to Equation 1 below.
  • n is the refractive index
  • K 0 is , m is 0, 1, 2, 3, ..., d is the thickness of the cavity layer, is the phase change between the first reflective layer and the cavity layer, is the phase change between the second reflective layer and the cavity layer
  • the wavelength of light to be transmitted can be adjusted by adjusting the thickness d of the cavity layer 2200. It can be confirmed from Equation 1.
  • FIG. 4 is a diagram for explaining the effect of the fabricated Parrot plasmonic color filter according to an embodiment of the present invention.
  • a CIE 1931 color coordinate system representation of a conventional plasmonic color filter (PCF) and a fabricated Parrot plasmonic color filter 2000 (FPCF) according to an embodiment of the present invention is shown.
  • the width of the space formed by the blue peak (FPCF B ), the red peak (FPCF R ), and the green peak (FPCF G ) of the fabricated Parrot plasmonic color filter 2000 according to an embodiment of the present invention is the conventional plasmonic color
  • the size of the blue peak (PCF B ), the red peak (PCF R ), and the green peak (PCF G ) in the filter are widened compared to the width of the space formed. That is, it can be confirmed that the filter performance of the fabricated Farrot plasmonic color filter 2000 according to the present invention is greatly improved compared to the conventional plasmonic color filter.
  • 5A to 5C are diagrams for explaining the structure of a phablet Farad plasmonic color filter according to another embodiment of the present invention.
  • the phablet Farad plasmonic color filter includes a substrate 5100, a first reflective layer 2100 formed on the substrate 5100, a cavity layer 2200 formed on the first reflective layer 2100, and A second reflective layer 2300 formed on the cavity layer 2200 may be included.
  • the substrate 5100 is flexible such as a transparent flat substrate such as a glass substrate, a plastic substrate (transparent plastic substrate) including polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polyethylene naphthalate (PEN). It may be a substrate.
  • transparent plastic substrate including polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polyethylene naphthalate (PEN). It may be a substrate.
  • first reflective layer 2100, the cavity layer 2200, and the second reflective layer 2300 are the same as those in FIG. 2A, detailed descriptions thereof will be omitted.
  • the fabricated Parrot plasmonic color filter 2000 includes a substrate 5100, a first reflective layer 2100 formed on the substrate 5100, and a cavity layer formed on the first reflective layer 2100 ( 2200), a second reflective layer 2300 formed on the cavity layer 2200, and a dielectric layer 5200 formed on the second reflective layer 2300.
  • the dielectric layer 5200 may be a general dielectric (dielectric material) such as LiF or SiO 2 , or a conductive oxide (transparent conductive oxide) such as Al 2 O3, M g O, Z n O, Z n S, or indium tin oxide (ITO). ) may include a dielectric. Since the first reflective layer 2100, the cavity layer 2200, the second reflective layer 2300, and the substrate 5100 are the same as those in FIGS. 2A and 5A, detailed description thereof will be omitted.
  • dielectric material such as LiF or SiO 2
  • a conductive oxide transparent conductive oxide
  • ITO indium tin oxide
  • the fabrit Farat plasmonic color filter 2000 has a structure in which the positions of the dielectric layer 5200 and the substrate 5100 are exchanged from the structure of the fabrit Farat plasmonic color filter 2000 of FIG. 5B.
  • the FPCF is a passive element that performs an independent optical function, so it is irrelevant even if the position of the two layers is changed when integrating into another device.
  • 6A and 6B are diagrams for explaining an example to which a fabrit Parrot plasmonic color filter according to an embodiment of the present invention is applied.
  • a fabrit Parrot plasmonic color filter 2000 is applied to an optical detector
  • the fabrit Parrot plasmonic color filter 2000 FPCF
  • FPCF fabrit Parrot plasmonic color filter 2000
  • FIG. 6B an example in which the Fabret Farat Plasmonic Color Filter 2000 (FPCF) is applied to a display device is shown. It may be provided between (glass).
  • FPCF Fabret Farat Plasmonic Color Filter 2000

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Filters (AREA)

Abstract

La présente invention concerne un filtre coloré plasmonique, et plus spécifiquement, un filtre coloré plasmonique utilisant une interférence de Fabry-Perot. Selon un aspect de la présente invention, l'invention concerne un filtre de couleur plasmonique de Fabry-Perot comprenant : une première couche réfléchissante ayant une pluralité de trous; une couche de cavité formée sur la première couche réfléchissante ; et une seconde couche réfléchissante formée sur la couche de cavité.
PCT/KR2022/017723 2021-11-11 2022-11-11 Filtre de couleur plasmonique de fabry-perot WO2023085841A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020210154814A KR20230068719A (ko) 2021-11-11 2021-11-11 패브릿 패럿 플라즈모닉 컬러 필터
KR10-2021-0154814 2021-11-11

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WO2023085841A1 true WO2023085841A1 (fr) 2023-05-19

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Citations (5)

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KR20110030588A (ko) * 2008-06-18 2011-03-23 쓰리엠 이노베이티브 프로퍼티즈 컴파니 광학적 및 전기적 성능이 개선된 전도성 필름 또는 전극
KR20140107488A (ko) * 2011-12-16 2014-09-04 시몬 프레이저 유니버스티 표면 플라즈몬 구조를 구비한 유기 광전자 디바이스 및 그것의 제조방법
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KR20200098242A (ko) * 2019-02-12 2020-08-20 한국과학기술원 적외선 방사의 가변 투과율용 나노 필터 및 그 제조 방법

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KR101510725B1 (ko) 2012-11-30 2015-04-10 한국과학기술원 비등방성 패턴을 포함하는 능동형 표면 플라즈모닉 컬러 필터, 및 능동형 표면 플라즈모닉 컬러필터를 포함하는 디스플레이 소자

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110030588A (ko) * 2008-06-18 2011-03-23 쓰리엠 이노베이티브 프로퍼티즈 컴파니 광학적 및 전기적 성능이 개선된 전도성 필름 또는 전극
KR20140107488A (ko) * 2011-12-16 2014-09-04 시몬 프레이저 유니버스티 표면 플라즈몬 구조를 구비한 유기 광전자 디바이스 및 그것의 제조방법
KR101674562B1 (ko) * 2015-05-21 2016-11-09 광운대학교 산학협력단 유전체 덮개층을 갖는 나노공진기 기반의 전방향 컬러 필터
KR20190124234A (ko) * 2017-03-15 2019-11-04 꼼미사리아 아 레네르지 아토미끄 에뜨 옥스 에너지스 앨터네이티브즈 플라즈몬의 가둠에 의해 최적화된 출력을 갖는 유기 발광 다이오드 및 복수의 이러한 다이오드들을 포함하는 디스플레이 디바이스
KR20200098242A (ko) * 2019-02-12 2020-08-20 한국과학기술원 적외선 방사의 가변 투과율용 나노 필터 및 그 제조 방법

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