WO2023059228A1 - Source de lumière à plasma à pompage laser à large bande - Google Patents

Source de lumière à plasma à pompage laser à large bande Download PDF

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Publication number
WO2023059228A1
WO2023059228A1 PCT/RU2022/050311 RU2022050311W WO2023059228A1 WO 2023059228 A1 WO2023059228 A1 WO 2023059228A1 RU 2022050311 W RU2022050311 W RU 2022050311W WO 2023059228 A1 WO2023059228 A1 WO 2023059228A1
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WO
WIPO (PCT)
Prior art keywords
chamber
light source
plasma
window
source according
Prior art date
Application number
PCT/RU2022/050311
Other languages
English (en)
Inventor
Dmitriy Borisovich ABRAMENKO
Robert Rafilevich Gayasov
Denis Alexandrovich Glushkov
Vladimir Mikhailovich KRIVTSUN
Aleksandr Andreevich LASH
Original Assignee
Isteq B.V.
Isteq Group Holding B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from RU2021129398A external-priority patent/RU2780202C1/ru
Priority claimed from US17/514,178 external-priority patent/US11503696B2/en
Application filed by Isteq B.V., Isteq Group Holding B.V. filed Critical Isteq B.V.
Publication of WO2023059228A1 publication Critical patent/WO2023059228A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/302—Vessels; Containers characterised by the material of the vessel

Definitions

  • the invention relates to high-brightness broadband light sources with continuous optical discharge, to the gas-filled chamber used therein and to the method of its manufacture.
  • COD continuous optical discharge
  • a COD, sustained in the gas-filled chamber by a focused beam of a continuous wave (CW) laser, is realized in various gases, in particular, in Xe at a high gas pressure of up to 200 atm (Carlhoff et al., “Continuous Optical Discharges at Very High Pressure,” Physica 103C, 1981, pp. 439-447).
  • COD-based light sources with a plasma temperature of about 20,000 K are among the highest brightness continuous light sources in a wide spectral range from the vacuum ultraviolet (VUV) to the nearinfrared.
  • One of the challenges related to creation of high-brightness COD-based light sources relates to increasing the output of vacuum ultraviolet radiation which, in particular, results in special requirements to short-wave boundary kb and to transparency of optical materials used for outputting the COD plasma broadband radiation from the chamber.
  • LiF u MgF2 have the shortest-wave boundary of transparency, around 110 nm. Further, among the latter two, MgF2 is the material with better mechanical and thermal properties, as well as producibility, therefore its use is preferable for expanding the radiation spectrum as far as 100 nm in the VUV range.
  • the optimum continuous generation of COD plasma radiation characterized by a spectral brightness of over 50 mW/(mm2 nm avg) and a relative brightness instability ⁇ 5 of less than 0.1 %, is achieved by preferably having the highest possible operating temperature of the chamber internal surface, 600 to 900 K or higher, at an optimum gas pressure in the chamber above 50 atm or higher, while the chamber walls are located from the region of radiating plasma at a distance of less than 5 mm, preferably no more than 3 mm.
  • the sealed-off bulbs made of fused quartz and used as the chamber meet these criteria at least partially.
  • this solution mainly relates to using sapphire windows with kb ⁇ 145 nm.
  • the application of MgF2 windows with this type of seal is problematic due to their insufficient mechanical strength.
  • the laser-pumped plasma light source comprises a gas-filled chamber with a metal column-shaped housing which consists of two housing parts and with coaxial inlet and exit windows sealingly installed on the housing ends.
  • Each window whose side cylindrical surface is nickel -plated, is positioned inside a circular nickel- plated kovar sleeve and soldered to the sleeve’s internal surface using Ag solder. Further, each circular sleeve with the window soldered to it is soldered or welded to one of the housing parts on the outside seam.
  • the housing After welding, the housing is vacuumed and filled with gas through a nozzle which is welded or sealed under pressure.
  • CLTE coefficient of linear thermal expansion
  • the said light source is characterized by a broader spectrum of radiation in the VUV range, if sapphire windows are used (/T> ⁇ 145 nm). Besides, it features a stronger chamber which allows to increase the power of laser pumping and, consequently, raise the power of output radiation, including in the UV and VUV ranges.
  • the technical problem and the technical result of the invention consist in expanding the radiation spectrum of laser-pumped plasma light sources in the VUV range while providing for high brightness and stability of their broadband radiation.
  • the invention essentially consists in using a high-technology optical material with the minimum boundary of transparency (Xb ⁇ l lO nm), namely, MgF2 as material of the window for outputting the beam of plasma radiation from the chamber. This allows for expanding the radiation spectrum of laser-pumped plasma light sources in the VUV range.
  • the gas in the chamber belongs to inert gases with a purity of at least 99.99 % in order to eliminate the self-absorption of VUV radiation by impurities.
  • the crystalline magnesium fluoride is anisotropic and is characterized by weak double refraction.
  • the surface of the end of the axisymmetric sleeve and the surface of the MgF2 exit window adjacent to it are essentially perpendicular to the optical axis of the MgF2 crystal.
  • the possibility of operating at high temperatures, at least 600 K, and pressures of around 50 atm and higher, in order to provide for high brightness and stability of the light source is achieved by sealing the chamber windows by means of their soldering with glass cement.
  • the process of glass cement soldering involves the application of single-stage annealing of the joint at a temperature of at least 400°C, which results in the possibility of operating the joint at temperatures of up to 900 K.
  • the window is soldered to the separate metal part of the housing designed as a sleeve. After annealing, the metal parts of the chamber housing are joined together by welding in a manner which does not expose the sealed joint to another annealing, capable of reducing the sealed joint reliability.
  • the sleeve and housing are made of iron-nickel alloy with a predefined CLTE, matched with the CLTE of the crystal magnesium fluoride in the direction perpendicular to the optical axis of the crystal, such as 47ND alloy.
  • the windows are soldered on the ends of axisymmetric metal sleeves around 1 cm long or longer. Soldering is performed with the sealed joint components having matched coefficients of linear thermal expansion (CLTE) arranged in the optimum manner in terms of the force of gravity. Then the sleeves with the soldered windows are welded to the housing on the outside seam. In another embodiment the sleeves with the soldered windows are welded to the housing parts, and the housing is permanently welded together after the internal chamber elements have been mounted. At the same time, the axisymmetric sleeves cancel out the irregularity of heating and cooling of the assembled chamber structure.
  • CLTE linear thermal expansion
  • the windows are installed on the inside of the gas-filled chamber.
  • it improves the seal reliability due to the high pressure of gas in the chamber which compresses the sealing elements.
  • the possibility is realized to manufacture a chamber with optimally minimized dimensions, when the chamber walls, including its optical elements, are located at a distance of less than 5 mm from the region of radiating plasma. This suppresses the turbulence of convective flows in the chamber and provides for high stability of the radiation source.
  • the internal chamber elements include the lens which focuses the CW laser beam.
  • the focusing lens preferably has an aspherical design, and is located between the inlet window and the region of radiating plasma, which, due to the sharpest possible focusing of the CW laser beam, improves the brightness of the light source.
  • at least one retroreflector for example, in the form of a spherical mirror with the center in the radiating plasma region, can be placed in the chamber, located opposite the exit window and/or on the axis of the focused laser beam.
  • the exit window can also be a lens designed with the function of reducing aberrations which distort the path of beams of plasma radiation passing through the exit window, and/or with the function of reducing the angular aperture of the exiting plasma radiation beam.
  • a vacuum or gas environment which does not absorb VUV radiation with the wavelength of 110 nm and higher, can be located outside the MgF2 exit window.
  • the chamber can be sealingly connected to an outside chamber with objects which the beam of plasma radiation is carried to, filled with a vacuum or gas environment which does not absorb the plasma radiation exiting the chamber through the MgF2 window.
  • the chamber can be sealingly connected to the outside chamber by means of a branch pipe made with the function of a thermal bridge between the chamber and the outside chamber.
  • the branch pipe can be equipped with a cooling radiator to prevent heating of the outside chamber.
  • FIG. 1 Fig. 1, Fig. 2 - cross-section of the broadband laser-pumped light source according to embodiments of this invention.
  • FIG. 3 external view of the broadband laser-pumped light source.
  • FIG. 4 Fig. 5 - diagram of the broadband laser-pumped light source according to embodiments of this invention.
  • the broadband laser- pumped light source comprises a chamber 1 filled with gas at high pressure, with a region of radiating plasma 2 sustained in the chamber by a focused beam 3 of a continuous wave (CW) laser 4.
  • the chamber 1 contains a metal housing 5 comprising a window 6a for introducing the CW laser beam into the chamber and at least one window 6b for outputting a plasma radiation beam 8 intended for subsequent use from the chamber.
  • the light source also contains a means for starting plasma ignition.
  • a pulsed laser system 9 can be used generating at least one pulsed laser beam 10 focused in the chamber region designed for sustenance of the radiating plasma 2.
  • igniting electrodes can be used as the means for plasma ignition.
  • the CW laser beam can be directed into the chamber by means of a dichroic mirror 11 and focused by means of a lens 12 placed in the chamber between the window 6a and the region of radiating plasma 2, which provides for sharper focusing of the CW laser beam and thereby increases the light source brightness.
  • the lens 12 can be simultaneously used to focus the pulsed laser beam 10 at the time of starting plasma ignition.
  • the light source brightness is increased by ensuring the sharpest possible focus of the CW laser beam using an optical system which comprises the window 6a and the focusing lens 12, preferably with an aspherical design, in order to minimize total aberrations of the said optical system.
  • the focusing lens 12 is preferably positioned at the smallest possible distance from the region of radiating plasma 2, the distance not exceeding 5 mm.
  • the window 6a can be made using a simple manufacturing technique, for example, in the shape of a plate or lens with a spherical surface.
  • the aspherical lens 12 can be made of glass or quartz to facilitate its manufacturing.
  • At least one window 6b for outputting the beam of plasma radiation 8 from the chamber is made of crystal magnesium fluoride (MgF2).
  • MgF2 is characterized by high producibility and, at the same time, has the shortest-wave boundary of transparency among the optical materials. Accordingly, the short-wave boundary of the spectrum in the beam of plasma radiation exiting the chamber is determined by the MgF2 transmission limit in the vacuum ultraviolet (VUV) region, which is approximately 110 nm.
  • the gas belongs to inert gases with a purity of at least 99.99 % or is a mixture thereof in order to eliminate the self-absorption of VUV radiation by gas impurities. This allows expanding the radiation spectrum of the light source into the vacuum ultraviolet region.
  • Fig. 1 the beam of plasma radiation 8 is directed from the region of radiating plasma 2 into the window 6b made of MgF2 straight and without reflections.
  • Each of the windows 6a, 6b is located on the inside of the chamber on the end of one of the sleeves 7a, 7b closest to the region of radiating plasma 2.
  • Each of the windows 6a, 6b is soldered to one of the sleeves 7a, 7b using glass cement 13.
  • the windows soldering performed in the process of annealing ensures the possibility of operating the sealed joint and the chamber assembly at temperatures of up to 900 K which is optimal for achieving high brightness and stability of the light source.
  • Each of the sleeves 7a, 7b with the soldered window 6a, 6b is positioned in one of the holes in the housing 5 and is welded into the hole of the housing 5 on the outside welding seams 14. Further, the internal parts of the axisymmetric sleeves 6a, 6b are the external part of the chamber which is not in contact with the gas it is filled with. Along with the placement of windows on the chamber inside, this improves reliability of the sealed joint due to the high pressure of gas in the chamber which compresses the sealing material (glass cement 13) and facilitates the sealing of optical elements.
  • the surface of the end of sleeve 7b and the surface of the MgF2 exit window 6b adjacent to it are essentially perpendicular to the optical axis of the MgF2 crystal.
  • the coefficients of linear thermal expansion (CLTE) of the glass cement 13, material of the sleeves 7a, 7b and the housing 5 are matched with the CLTE of the crystal magnesium fluoride in the direction perpendicular to the optical axis of the MgF2 crystal. All of the mentioned above provides for high reliability and longer lifetime of the windows and the chamber assembly.
  • the sleeves and the chamber housing are made of the 47 ND iron-nickel alloy which meets these requirements.
  • the chamber 1 is filled with high-pressure gas either through a soldered welded tubulation or through a gas port 15 designed to control the pressure and/or composition of gas in the chamber.
  • the present invention provides for manufacturing highly reliable chambers with MgF2 windows to operate at high pressures (around 50 atm) and temperatures (around 900° K) and for creating brighter and more stable COD-based light sources with the broadest spectrum of radiation in the VUV range.
  • a vacuum or gas environment such as helium, argon, etc., which does not absorb VUV radiation with wavelengths of 110 nm and higher, is located outside the MgF2 exit window 6b intended for outputting the beam of plasma radiation 8 from the chamber.
  • the chamber 1 can be sealingly connected to an outside chamber 17 with objects which the beam of plasma radiation 8 is carried to, by means of a branch pipe 16.
  • the beam is carried without generation of ozone and without losses of the VUV component of plasma radiation.
  • the branch pipe 16 is designed with the function of a thermal bridge between the chamber 1 and the outside chamber 17.
  • the branch pipe 16 is made with a low thermal conductivity, for example, of thin stainless steel.
  • a cooling radiator 18 which prevents heating of the outside chamber 17.
  • the sealed joint of the branch pipe 16 to the chamber 1 and the outside chamber 17 can be provided using sealing gaskets 19 which can be made of copper, at least, on the side of the heated chamber 1.
  • Fig. 1 all the axisymmetric sleeves 7a, 7b with the windows 6a, 6b soldered to them, are welded to the single common housing part 5. Further, the region of radiating plasma 2 is positioned in the cavity of housing 5 formed by the intersection of at least two holes, in each of which one of the sleeves 7a, 7b with one of the windows 6a, 6b is located.
  • the sleeves 7a, 7b have a variable outside diameter, while the windows 6a, 6b are located on the end of sleeves with the smaller outside diameter.
  • the broadband laser-pumped light source is operated as described below.
  • the chamber 1 of the light source is manufactured, comprising the metal housing 5, with at least two windows 6, 6b, Fig. 1.
  • At least one window 6b is made of MgF2.
  • the material of at least one of the windows 6a can be glass with a CLTE matched with the CLTE of MgF2.
  • the chamber housing is manufactured from the 47 ND precision alloy with a CLTE also matched with the CLTE of MgF2.
  • Each of the windows 6a, 6b is soldered to one of the sleeves 7a, 7b, using glass cement 13 with the application of annealing at the temperature of at least 400 °C.
  • Each sleeve with the window soldered to it is welded into the hole of metal housing 5.
  • the chamber is filled with gas at high pressure either through the sealed tubulation or through the gas port 15.
  • Broadband radiation of COD plasma is generated as described below.
  • the focused beam 3 of the CW laser 4 is directed into the region 2 of the chamber intended for sustaining the radiating plasma.
  • inert gases of high purity and mixtures thereof are used as the gas.
  • the pulsed laser system 9 at least one pulsed laser beam 10 is generated.
  • the beam of CW laser and the pulsed laser beam are introduced into the chamber 1 through the window 6a.
  • the optical system comprising the window 6a and the focusing lens 12 provides for sharp focusing of the laser beams.
  • the pulsed laser system 9 is used to provide the optical breakdown and to generate the starting plasma with a density which exceeds the threshold density of COD plasma having a value of around 1018 electrons/cm3.
  • the concentration and volume of the starting plasma are sufficient for reliable sustenance of a continuous optical discharge by the focused beam of CW laser 3 with a relatively low power not exceeding 300 W.
  • broadband high-brightness radiation is output from the region of radiating plasma 2 of the continuous optical discharge using at least one beam 8 of plasma radiation.
  • the short-wave boundary of the spectrum of plasma radiation exiting the chamber is determined by the MgF2 transmission limit which is approximately 110 nm.
  • the beam 8 exiting the chamber through the MgF2 exit window 7b is intended for subsequent use, for example, in the outside chamber 17.
  • the chamber 1 can be sealingly connected to the outside chamber 17 filled with a vacuum or gas environment which does not absorb the VUV radiation exiting the chamber 1.
  • the temperature of chamber 1 is preferably around 600 K or higher.
  • thermal isolation between the chamber 1 and the external chamber 17 is provided by means of the branch pipe 17 which is designed with the thermal bridge function and equipped with the cooling radiator 19.
  • the chamber 1 contains the welded metal housing 5 comprising at least two housing parts 5a, 5b, to each of which the sleeve 7a, 7b is welded with the window 6a, 6b soldered to it.
  • the housing parts 5a, 5b with the windows 6a, 6b are welded together with a welding seam 22.
  • the axisymmetric sleeves 7a, 7b welded to them with the windows 6a, 6b cancel out the irregular heating and cooling of the assembled chamber 1.
  • the external view of the welded housing of the light source is schematically shown in Fig. 3.
  • the welds 14, 22 are located on the external surface of housing 5.
  • Fig. 4 another embodiment is schematically shown where the MgF2 window 6b for outputting the beam of plasma radiation 8 from the chamber is a lens designed with the function of reducing the angular aperture of the beam of plasma radiation or reducing the aberrations which distort the path of rays of plasma radiation when they pass through the window 6b.
  • the window 6b is designed as a meniscus or another type of matching lens. This increases the brightness of radiation source, minimizes the dimensions of light source and improves its ease of operation.
  • retroreflectors 23, 24 designed as spherical mirrors with the center in the region of radiating plasma 2 are placed in the light source chamber, Fig. 4.
  • the retroreflectors 23 and 24 are positioned opposite the MgF2 window 6b and on the axis of the focused laser beam 3.
  • the direction of the beam of plasma radiation 8 is different from the direction of the beam of CW laser 3 having passed through the region of radiating plasma 2. This prerequisite is easily implemented in the design of chamber 1 the housing of which, as shown in Fig. 1, Fig. 2, Fig. 3, Fig. 4 is designed as a cube or rectangular prism, in which case the focused beam of CW laser 3 and each beam of plasma radiation 8 are located on mutually orthogonal axes which intersect in the region of radiating plasma 2.
  • the axis of the focused beam of CW laser 3 is directed vertically upwards, i.e. against the force of gravity, Fig. 1, Fig. 2, Fig. 4, or close to vertical.
  • the proposed design achieves the highest stability of the power of laser-pumped light source radiation. This is due to the fact that typically the region of radiating plasma 2 is slightly shifted from the focal point towards the focused beam 3 of CW laser up to the cross-section of focused laser beam where the intensity of the focused beam 3 of CW laser is still sufficient to sustain the region of radiating plasma 2.
  • the region of radiating plasma 2 that contains the hottest plasma with the lowest mass density tends to float under the influence of the buoyant force.
  • the rising region of radiating plasma 2 ends up in the location closest to the focal point where the cross-section of the focused beam 3 of CW laser is smaller, and the laser radiation intensity is higher.
  • this increases the brightness of plasma radiation, and on the other hand, it equalizes the forces acting on the region of radiating plasma, which ensures high stability of radiation power of the high-brightness laser-pumped light source.
  • the stability of output characteristics of the laser-pumped light source is also influenced by the size of the pulse acquired under the action of the buoyant force by the gas heated in the region of radiating plasma 2.
  • the pulse acquired by the gas and the turbulence of convective flows are the less, the closer the region of radiating plasma 2 to the top chamber wall. Consequently, to ensure more stable output characteristics of the light source the top wall of chamber housing is positioned at a distance of no more than 5 mm from the region of radiating plasma 2.
  • the suppression of convective flow turbulence in the chamber and improvement of stability of the light source output characteristics is achieved by reducing the internal volume of the chamber.
  • the chamber walls, as well as the focusing lens 13 and each window 6b for outputting the beam of plasma radiation are positioned at a distance of no more than 5 mm from the region of radiating plasma.
  • FIG. 5 One more embodiment of the light source according to the present invention is schematically shown in Fig. 5.
  • the chamber housing contains several windows 6b, 6c for outputting several beams of plasma radiation 8 from the chamber 1 which is required for certain applications of the light source.
  • a high-efficiency diode near-infrared laser with the output of radiation to an optical fiber 25 is used as the CW laser 4.
  • the expanding laser beam is directed to the collimator 26, for example, in the form of a collecting lens.
  • the collimator 26 and the dichroic deflecting mirror 11 the expanded beam of CW laser is directed into the chamber 1.
  • the optical system, window 6a and focusing lens 12 ensure sharp focusing of the beam 3 of CW laser required to achieve a high brightness of the light source.
  • the starting ignition of plasma is provided by a solid-state laser system which contains a first laser 27 for generating the first laser beam 28 in Q- switching mode and a second laser 29 for generating the second laser beam 30 in free-running mode.
  • Pulsed lasers with active elements 31 are equipped with optical pumping sources, for example, in the form of flash lamps 32 and preferably have the common mirrors 33, 34 of the cavity.
  • the first laser 27 is equipped with a Q-switch 35.
  • Two pulsed laser beams 28, 30 are directed into the chamber and focused in the region intended for the sustenance of radiating plasma 2, Fig. 5.
  • the first laser beam 28 is intended for starting plasma ignition or for optical breakdown.
  • the second laser beam 30 is intended to create plasma, the volume and density of which are high enough for stationary sustenance of the region of radiating plasma 2 by the focused beam 3 of the CW laser.
  • the CW laser wavelength XCW is different from wavelengths I, X2 of the first and second pulsed laser beams 28, 30.
  • This embodiment of invention provides for reliability of laser ignition and for user- friendliness of the light source.
  • the possibility is achieved to optimize chamber geometry, reduce turbulence of convective flows in the chamber and minimize optical aberrations.
  • the proposed invention allows for expanding the radiation spectrum in the VUV spectral region and ensuring high brightness and stability of the laser-pumped plasma radiation source.
  • High-brightness high-stability laser-pumped light sources designed according to the present invention can be used in a variety of projection systems, for spectrochemical analysis, spectral microanalysis of bio objects in biology and medicine, microcapillary liquid chromatography, for inspection of the optical lithography process, for spectrophotometry and for other purposes.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)

Abstract

La présente invention concerne une source de lumière à plasma rayonnant qui est maintenue dans une chambre remplie de gaz par un faisceau focalisé de laser CW. Le gaz est un gaz inerte d'une pureté supérieure ou égale à 99,99 %. La chambre contient un boîtier métallique avec au moins une fenêtre constituée de MgF2 destinée à délivrer un rayonnement plasma. Chaque fenêtre est située dans un trou du boîtier à l'extrémité d'un manchon et est soudée au manchon au moyen d'une colle à verre, et chaque manchon est soudé au trou du boîtier métallique sur le joint extérieur. Les manchons et le boîtier sont constitués d'un alliage dont le coefficient de dilatation thermique linéaire (CLTE) correspond au CLTE du cristal de MgF2 dans la direction perpendiculaire à l'axe optique du cristal de MgF2. Le résultat technique consiste à élargir le spectre de rayonnement de la source lumineuse dans la zone des VUV.
PCT/RU2022/050311 2021-10-08 2022-10-05 Source de lumière à plasma à pompage laser à large bande WO2023059228A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
RU2021129398A RU2780202C1 (ru) 2021-10-08 Широкополосный плазменный источник света с лазерной накачкой
RU2021129398 2021-10-08
US17/514,178 US11503696B2 (en) 2020-03-05 2021-10-29 Broadband laser-pumped plasma light source
US17/514,178 2021-10-29

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WO2023059228A1 true WO2023059228A1 (fr) 2023-04-13

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006010675A (ja) * 2004-05-27 2006-01-12 National Institute Of Advanced Industrial & Technology 紫外光の発生方法および紫外光源装置
WO2014168519A1 (fr) * 2013-04-11 2014-10-16 Общество с ограниченной ответственностью "РнД-ИСАН" Source lumineuse à pompage laser et procédé de génération de rayonnement
US20150262808A1 (en) * 2014-03-17 2015-09-17 Weifeng Wang Light Source Driven by Laser
US20160086788A1 (en) * 2014-05-15 2016-03-24 Excelitas Technologies Corp. Elliptical and dual parabolic laser driven sealed beam lamps
US10109473B1 (en) * 2018-01-26 2018-10-23 Excelitas Technologies Corp. Mechanically sealed tube for laser sustained plasma lamp and production method for same
US10609804B2 (en) * 2017-08-02 2020-03-31 Ushio Denki Kabushiki Kaisha Laser driven lamp
RU2732999C1 (ru) * 2020-03-05 2020-09-28 Общество с ограниченной ответственностью "РнД-ИСАН" Источник света с лазерной накачкой и способ зажигания плазмы
RU2742506C1 (ru) * 2020-03-04 2021-02-08 Федеральное государственное унитарное предприятие «Всероссийский научно-исследовательский институт автоматики им.Н.Л.Духова» (ФГУП «ВНИИА») Сверхвысоковакуумное термостойкое смотровое окно

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006010675A (ja) * 2004-05-27 2006-01-12 National Institute Of Advanced Industrial & Technology 紫外光の発生方法および紫外光源装置
WO2014168519A1 (fr) * 2013-04-11 2014-10-16 Общество с ограниченной ответственностью "РнД-ИСАН" Source lumineuse à pompage laser et procédé de génération de rayonnement
US20150262808A1 (en) * 2014-03-17 2015-09-17 Weifeng Wang Light Source Driven by Laser
US20160086788A1 (en) * 2014-05-15 2016-03-24 Excelitas Technologies Corp. Elliptical and dual parabolic laser driven sealed beam lamps
US10609804B2 (en) * 2017-08-02 2020-03-31 Ushio Denki Kabushiki Kaisha Laser driven lamp
US10109473B1 (en) * 2018-01-26 2018-10-23 Excelitas Technologies Corp. Mechanically sealed tube for laser sustained plasma lamp and production method for same
RU2742506C1 (ru) * 2020-03-04 2021-02-08 Федеральное государственное унитарное предприятие «Всероссийский научно-исследовательский институт автоматики им.Н.Л.Духова» (ФГУП «ВНИИА») Сверхвысоковакуумное термостойкое смотровое окно
RU2732999C1 (ru) * 2020-03-05 2020-09-28 Общество с ограниченной ответственностью "РнД-ИСАН" Источник света с лазерной накачкой и способ зажигания плазмы

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