WO2023045397A1

WO2023045397A1 - Resonator and electronic component

Info

Publication number: WO2023045397A1
Application number: PCT/CN2022/096637
Authority: WO
Inventors: 曾晓意; 伍伟; 郭凯洲; 李�浩; 王锦辉
Original assignee: 华为技术有限公司
Priority date: 2021-09-23
Filing date: 2022-06-01
Publication date: 2023-03-30
Also published as: CN115865032A

Abstract

The present application relates to the technical field of communications, and discloses a resonator and an electronic component. The resonator comprises a substrate and a resonant layer, and the resonant layer is located on a first surface of the substrate; at least one of the first surface and a second surface of the substrate comprises an inclined surface, and the positions of the first surface and the second surface are opposite; the inclined surface is configured to reflect acoustic waves incident onto the inclined surface in a direction close to a side of the resonator. By using the present application, the inclined surface is not parallel to other surfaces, and then the acoustic waves between the inclined surface and the other surfaces will be reflected to the side of the resonator after transmitted multiple times and leak, thereby effectively suppressing the spurious vibration mode generated by these acoustic waves. Moreover, once the spurious vibration mode is effectively suppressed, the interference caused by the spurious vibration mode on an effective vibration mode can be weakened, so that the frequency hopping of the resonator can be alleviated or even avoided.

Description

Resonators and Electronic Components

This disclosure claims the priority of the Chinese patent application with the application number 202111116400.5 and the title of the invention "resonator and electronic components" filed on September 23, 2021, the entire contents of which are incorporated in this application by reference.

technical field

The present application relates to the technical field of communication, in particular to a resonator and electronic components.

Background technique

A resonator is a component used to generate a resonant frequency and is widely used in electronic components related to frequency, for example, it is applied to electronic components such as clock oscillators and filters.

The working principle of the resonator is that its piezoelectric layer will undergo mechanical vibration under the action of a driving voltage, and will output an electrical signal under the mechanical vibration. For example, in the mechanical vibration of the piezoelectric layer, the mechanical vibration whose vibration frequency is far from the natural frequency (also called resonance frequency) is gradually attenuated, and the mechanical vibration whose vibration frequency is close to the natural frequency is gradually retained, and finally by this part The mechanical vibration outputs an electrical signal with a relatively stable frequency.

However, when the resonator is in operation, frequency hopping may occur, which leads to poor stability of the frequency of the electrical signal output by the resonator.

Contents of the invention

The present application provides a resonator and electronic components, which can alleviate the problem of frequency hopping of the resonator in the related art, and the technical solution is as follows:

In one aspect, a resonator is provided, the resonator includes a base and a resonant layer, the resonant layer is located on a first surface of the base;

At least one of the first surface and the second surface of the substrate includes a slope, and the first surface and the second surface are opposite to each other;

The slope is configured to reflect sound waves incident on the slope toward a direction closer to a side of the resonator.

For example, the first surface of the substrate includes a slope, or the second surface of the substrate includes a slope, or both the first surface and the second surface of the substrate include a slope.

In the solution shown in the present application, at least one of the first surface and the second surface of the substrate includes a slope, and the slope is not parallel to other surfaces, for example, the slope is not parallel to the piezoelectric layer, and the slope is not parallel to the electrode layer. Then, the sound waves between the inclined plane and other surfaces will be reflected to the side of the resonator and leak after multiple transmissions, so that the spurious vibration modes generated by these sound waves can be effectively suppressed. Once the spurious vibration mode is effectively suppressed, the interference caused by the spurious vibration mode to the effective vibration mode can be weakened, so that the frequency jump of the resonator can be alleviated or even avoided.

In a possible implementation manner, at least one of the first surface and the second surface of the substrate is a slope at a position corresponding to the resonant layer.

For example, if the second surface of the base is an inclined plane, then the two sides of the inclined plane having a height difference are respectively located on opposite sides of the base. Or, the second surface of the base is an inclined plane at the position corresponding to the resonant layer, while it is a plane at other positions. is a plane, and the plane is a plane parallel to the upper surface of the resonant layer, then, the two sides with height difference of the inclined plane are respectively located in the plane where the first side of the resonant layer is located and the plane where the second side of the resonant layer is located, and the first side of the resonant layer Opposite to the position of the second side.

Wherein, the first surface of the base is inclined, or the second surface is inclined, or both the first surface and the second surface are inclined, which facilitates processing and improves the processing efficiency of the resonator.

In a possible implementation manner, at least one of the first surface and the second surface of the substrate includes a first slope and a second slope at a position corresponding to the resonant layer;

The first side of the first slope and the first side of the second slope intersect on a first intersection line, and the first intersection line is close to the resonant layer, the second side of the first slope and the second slope The second side of each is far away from the resonant layer, and the second side is the side opposite to the position of the first intersection line.

In the solution shown in this application, the sound waves incident on the first slope are gradually reflected to the position of the second side of the first slope and attenuated, and the sound waves incident to the second slope are gradually reflected to the position of the second side of the second slope And attenuation, so that the effect of suppressing the spurious vibration modes generated by these sound waves can be achieved.

In a possible implementation manner, at least one of the first surface and the second surface of the substrate includes a third slope and a first plane at a position corresponding to the resonant layer;

The third side of the third slope and the third side of the first plane intersect at a second intersection line, and the second intersection line is close to the resonant layer, and the fourth side of the third slope is far away from the In the resonant layer, the fourth side is the side opposite to the position of the second intersection line.

In the solution shown in the present application, the sound waves incident on the third slope can be reflected to the fourth side close to the third slope to be leaked and attenuated, so that the spurious vibration modes generated by these sound waves can be suppressed.

In a possible implementation manner, the resonance layer includes a piezoelectric layer and two electrode layers, and the piezoelectric layer is located between the two electrode layers.

In the solution shown in this application, the piezoelectric layer can also be called a piezoelectric film, and the electrode layer can also be called a metal electrode. Since one of the two electrode layers is located above the piezoelectric layer, and the other is located below the piezoelectric layer, so The two electrode layers may also be referred to as upper and lower electrodes.

In this way, the substrate, one of the electrode layers, the piezoelectric layer and the other electrode layer are stacked and arranged in sequence.

In a possible implementation manner, at least one of the first surface and the second surface of the substrate may include a slope and an arc at a position corresponding to the resonant layer.

For example, either the first surface or the second surface of the substrate includes slopes and arcs. For another example, the first surface of the base includes a slope, and the second surface of the base includes an arc. For another example, the first surface of the base includes a curved surface, and the second surface of the base includes a slope.

Whether it is an inclined surface or an arc surface, it can encourage the incident sound wave to reflect toward the side of the resonator, so that the sound wave leaks or diffuses, and gradually attenuates. Once these sound waves are attenuated, the spurious vibration modes generated by these sound waves can be effectively suppressed, thereby alleviating the interference of the parasitic vibration modes on the effective vibration modes, thereby alleviating the frequency hopping of the resonator during operation.

In another aspect, a resonator is provided, the resonator includes a substrate and a resonant layer, the resonant layer is located on the first surface of the substrate;

At least one of the first surface and the second surface of the base includes an arc surface, and the positions of the first surface and the second surface are opposite;

The arcuate surface is configured to reflect sound waves incident on the arcuate surface in a direction close to the side of the resonator.

In the solution shown in the present application, at least one of the first surface and the second surface of the substrate of the resonator includes an arc surface, and the arc surface is not parallel to other surfaces, for example, the arc surface and the piezoelectric layer are not parallel, and the arc surface is not parallel to the piezoelectric layer. If the surface and the electrode layer are not parallel, the sound waves between the arc surface and other surfaces will be reflected to the side of the resonator and leak after multiple transmissions, and the spurious vibration modes generated by these sound waves can be effectively suppressed. Once the spurious vibration mode is effectively suppressed, the interference caused by the spurious vibration mode to the effective vibration mode can be weakened, so that the frequency jump of the resonator can be alleviated or even avoided.

In a possible implementation manner, at least one of the first surface and the second surface of the substrate is an arc surface at a position corresponding to the resonant layer.

In the solution shown in this application, the center of the arc surface protrudes toward the resonator layer, and the edge of the arc surface away from the center is away from the resonance layer, so that the sound waves incident on the arc surface are reflected to the side of the resonator and leak.

In a possible implementation manner, at least one of the first surface and the second surface of the substrate includes an arc surface and a second plane at a position corresponding to the resonant layer;

The fifth side of the arcuate surface and the fifth side of the second plane intersect at a third intersection line, the third intersection line is close to the resonant layer, and the sixth side of the arcuate surface is far away from the resonant layer , the sixth side is the side opposite to the position of the third intersection line.

For example, the second surface of the substrate includes an arc surface and a second plane directly below the resonant layer, the arc surface and the second plane intersect at a third intersection line, the third intersection line is close to the resonator layer and parallel to the resonator layer, and the arc The side of the surface opposite to the position of the third intersection line is away from the resonant layer and parallel to the resonant layer.

In this way, the sound waves incident on the arc surface are reflected to the position away from the center of the resonator on the arc surface to be leaked and attenuated, so that the spurious vibration modes generated by these sound waves can be suppressed.

In a possible implementation manner, the curved surface is a spherical surface or a parabolic surface, and may also be an arched surface or the like.

In a possible implementation manner, at least one of the first surface and the second surface of the substrate includes an inclined surface and an arc surface at a position corresponding to the resonant layer, and both the inclined surface and the arc surface are used to make the incident sound wave approach the resonance direction reflection from the side of the device.

Whether it is an inclined surface or an arc surface, it can promote the reflection of the incident sound wave to the direction close to the side of the resonator, so that the sound wave leaks or diffuses, and gradually attenuates. Once these sound waves are attenuated, the spurious vibration modes generated by these sound waves can be effectively suppressed, thereby alleviating the interference of the parasitic vibration modes on the effective vibration modes, thereby alleviating the frequency hopping of the resonator during operation.

In another aspect, an electronic component is provided, and the electronic component includes the above-mentioned resonator.

In the solution shown in this application, the electronic component includes the above-mentioned resonator, at least one of the first surface and the second surface of the substrate includes a slope, and the slope is not parallel to other surfaces, for example, the slope and the pressure The electric layer is not parallel, and the slope and the electrode layer are not parallel, so the sound waves between the slope and other surfaces will reflect to the side of the resonator after multiple transmissions and leak, which can effectively suppress the spurious vibration modes generated by these sound waves . Once the spurious vibration mode is effectively suppressed, the interference caused by the spurious vibration mode to the effective vibration mode can be weakened, so that the frequency jump of the resonator can be alleviated or even avoided.

Description of drawings

Fig. 1 is a structural schematic diagram of a conventional resonator;

Fig. 2 is a structural schematic diagram of a conventional resonator;

Fig. 3 is a schematic structural diagram of a resonator provided by the present application;

Fig. 4 is a schematic structural diagram of a resonator provided by the present application;

FIG. 5 is a schematic structural diagram of a resonator provided by the present application;

FIG. 6 is a schematic structural diagram of a resonator provided by the present application;

Fig. 7 is a schematic diagram of a sound wave propagating in a resonator provided by the present application;

Fig. 8 is a schematic structural diagram of a resonator provided by the present application;

FIG. 9 is a schematic structural diagram of a resonator provided by the present application;

FIG. 10 is a schematic structural diagram of a resonator provided by the present application;

FIG. 11 is a schematic structural diagram of a resonator provided by the present application;

Fig. 12 is a schematic structural diagram of a resonator provided by the present application;

Fig. 13 is a schematic structural diagram of a resonator provided by the present application;

Fig. 14 is a schematic diagram of a sound wave propagating in a resonator provided by the present application;

Fig. 15 is a schematic structural diagram of a resonator provided by the present application.

illustration

1. Base; 11. Slope; 12. First plane; 13. Arc; 14. Second plane;

11a, the first slope; 11b, the second slope; 11c, the third slope;

111, the first intersection line; 112, the second side; 113, the fourth side;

131, the sixth side; 11-12, the second intersection line; 13-14, the third intersection line;

2. Resonant layer; 21. Piezoelectric layer; 22. Electrode layer;

3. Reflective layer.

Detailed ways

The embodiment of the present application provides a resonator. A resonator is a component used to generate a resonant frequency. For example, it can use acoustic resonance to realize electrical frequency selection, and can be widely used in electronic components related to frequency. For example, It can be used in electronic components such as clock oscillators and filters.

The resonator may be a bulk acoustic wave (bulk acoustic wave, BAW) resonator, and the BAW resonator is a device that generates frequencies using bulk acoustic wave resonance. Bulk acoustic wave is an acoustic wave that propagates inside an object, such as an acoustic wave that travels back and forth between two opposite surfaces of an object. Bulk acoustic wave is opposite to the concept of surface acoustic wave (SAW), and surface acoustic wave is a kind of Acoustic waves propagating along a solid surface, devices that generate frequencies through surface acoustic wave resonance can be called SAW resonators.

The most basic structure of the resonator is, as shown in FIG. 1 , mainly including a base 1 and a resonant layer 2. The resonant layer 2 is located on the surface of the base 1. The base 1 can also be called a substrate for supporting the resonant layer 2. The resonant layer 2 mainly includes a piezoelectric layer 21 and two electrode layers 22, and the piezoelectric layer 21 is located between the two electrode layers 22, forming a similar sandwich structure.

Wherein, the piezoelectric layer 21 may also be called a piezoelectric film (piezo layer). The electrode layer 22 can also be referred to as a metal electrode, and one of the two electrode layers 22 is used as a positive electrode, and the other is used as a negative electrode. Since one of the two electrode layers 22 is located above the piezoelectric layer 21 and the other is located below the piezoelectric layer 21, the two electrode layers can also be called top electrode and bottom electrode respectively.

In this way, as shown in FIG. 1 , the substrate 1 , one of the electrode layers 22 , the piezoelectric layer 22 and the other electrode layer 22 are stacked and arranged in sequence.

In one example, regarding the area relationship between the substrate 1 and the resonant layer 2 , in one example, the area of the substrate 1 may be equal to the area of the resonant layer 2 . In another example, as shown in FIG. 1 , the area of the substrate 1 may also be much larger than the area of the resonant layer 2 . Wherein, the relationship between the area of the substrate 1 and the area of the resonant layer 2 is not limited, and can be flexibly designed.

Regarding the area relationship between the piezoelectric layer 21 and the electrode layer 22 of the resonance layer 2 , in an example, the areas of the piezoelectric layer 21 and the two electrode layers 22 may be equal. In another example, as shown in FIG. 1, the area of the piezoelectric layer 21 is equal to the area of the electrode layer 22 away from the substrate 1, and the area of the piezoelectric layer 21 is smaller than the area of the electrode layer 22 close to the substrate 1, and The area of the electrode layer 22 close to the substrate 1 may be equal to or smaller than the area of the substrate 1 .

Wherein, this embodiment does not specifically limit the specific relationship among the area of the substrate 1 , the area of the piezoelectric layer 21 and the areas of the two electrode layers 22 , and it can be flexibly designed.

In one example, the piezoelectric layer 21, as the core component of the resonator, is made of piezoelectric material and has a piezoelectric effect. The piezoelectric effect is that when a voltage is applied to the two opposite surfaces of the piezoelectric layer 21 , a slight deformation will occur to generate sound waves, on the contrary, when the piezoelectric layer 21 is under pressure, a voltage will be generated. For example, the principle of the piezoelectric layer 21 generating sound waves and voltages can be as follows:

When there is an electric field between the two electrode layers 22, since the piezoelectric layer 21 is subjected to a voltage, in order to maintain charge balance, the atoms inside vibrate back and forth to deform the shape of the piezoelectric layer 21, thereby generating Sound waves, a process that can be called the inverse piezoelectric effect, realize the conversion of electrical energy into mechanical energy. When the sound wave propagates inside the piezoelectric layer 21, the distance between some atoms will become closer or farther, disturbing the original balance, and a net charge will appear. If the charges are offset, positive and negative charges will appear on the surface of the piezoelectric layer 21, thereby generating electrical signals. This process can be called piezoelectric effect, which realizes the conversion of mechanical energy into electrical energy.

As mentioned above, a wave resonator is a device that uses acoustic resonance to achieve electrical frequency selection. Its principle can be as follows. Among them, resonance is also called resonance. , the phenomenon that the amplitude of the object increases sharply, and the frequency at which resonance occurs can be called the resonance frequency. Then, when the piezoelectric layer 21 vibrates under the action of voltage, the vibrations that are far from the natural frequency are gradually attenuated, while the vibrations that are the same or close to the fixed frequency are retained, and finally the piezoelectric layer 21 vibrates at the resonant frequency , then the electrical signal generated at the resonant frequency is also an electrical signal with a relatively pure frequency, and then the acoustic resonance realizes electrical frequency selection.

In one example, in order to promote sound waves to propagate back and forth in the piezoelectric layer 21 , as shown in FIG. 2 , the resonator may further include a reflective layer 3 located between the substrate 1 and the resonant layer 2 . The reflective layer 3 is used to reflect the incident sound wave to the piezoelectric layer 21, so as to confine the sound wave in the piezoelectric layer 21 as much as possible, so as to improve the quality factor (quality factor, Q) of the resonator.

Wherein, the reflective layer 3 may be a Bragg reflective layer, and the Bragg reflective layer is a structure formed by adopting a series of high and low impedance acoustic reflective layers alternately, so that the sound wave can be well reflected to the piezoelectric layer 21, and the sound wave is limited to the piezoelectric layer. 21 for internal spread.

Wherein, the reflective layer 3 can also be a structure with a cavity. There is a vacuum or air in the cavity, and the acoustic resistance is relatively large. During the transmission, the sound wave encounters the cavity of the reflective layer 3 and can also be well reflected to the piezoelectric layer. In 21, the acoustic wave is confined inside the piezoelectric layer 21 to propagate.

Wherein, the resonator including the Bragg reflection layer can be called a solid mounted resonator (solid mounted resonator, SMR), and the resonator including a reflection layer with a cavity can be called a film bulk acoustic resonator (film bulk acoustic resonator, FBAR).

Wherein, this embodiment does not limit the specific form of the reflective layer 3, which can be flexibly selected according to the situation.

In an example, the number of reflective layers 3 may also be two, one reflective layer 3 is located between the base 1 and the resonant layer 2, and the other reflective layer 3 is located on the upper surface of the resonant layer 2 away from the base 1, that is Yes, the resonant layer 2 is located between two reflective layers 3 .

Wherein, this embodiment does not limit whether the resonator includes the reflective layer 3 or not, and how many reflective layers 3 it includes, which can be flexibly selected according to the situation.

In one example, when the resonator is working, the frequency of the resonance output generated by the sound wave propagating in the piezoelectric layer 21 is the desired frequency, which can be called the working frequency, and the vibration mode generated by the sound wave can be called is an effective vibration mode. The frequency of the vibration generated by the sound wave propagating between the other two surfaces is an unwanted frequency, which can be called a spurious frequency, and the vibration mode generated by this sound wave can be called a parasitic vibration mode. For example, vibration modes generated by sound waves propagating between the lower surface of the substrate 1 and the upper surface of the resonant layer 2 may be referred to as spurious vibration modes.

When the resonator is working, if the parasitic vibration mode interferes with the effective vibration mode, the working frequency will jump.

In one example, when making a resonator, the interference of the parasitic vibration mode to the effective vibration mode can be weakened or even avoided as much as possible by controlling the thickness of the substrate 1, the reflective layer 3 and the resonance layer 2, etc., but the processed When the resonator is working, the ambient temperature will change. Once the ambient temperature changes, it will affect the thickness of the substrate 1, reflective layer 3 and resonant layer 2, causing the parasitic vibration mode to interfere with the effective vibration mode, further causing The operating frequency of the resonator jumps.

The resonator of this solution can reduce or even avoid the interference of the parasitic vibration mode on the effective vibration mode by effectively suppressing the parasitic vibration mode, thereby alleviating the occurrence of frequency jump of the resonator.

As shown in Fig. 3 and with reference to Fig. 4, this resonator comprises base 1 and resonant layer 2, and resonant layer 2 is positioned at the surface of base 1, for example, can be marked as the first surface with resonant layer 2 place surface, so, resonant layer 2 is located on the first surface of the substrate 1. The first surface of the substrate 1 may be the upper surface or the lower surface of the substrate 1. In the examples of this application, the first surface may be used as the upper surface of the substrate 1 for example.

As shown in FIG. 3 , at least one of the opposite first and second surfaces of the substrate 1 includes a slope 11 . Wherein, the slope 11 may be a plane not parallel to the piezoelectric layer 21 of the resonance layer 2 . For example, as shown in FIG. 3, the slope 11 may be a plane that is not parallel to the upper surface of the piezoelectric layer 21 away from the substrate 1, wherein the upper surface of the piezoelectric layer 21 away from the substrate 1 and the lower surface close to the substrate 1 are connected to each other. for parallel. For example, as shown in FIG. 3 and referring to FIG. 4 , the angle between the slope 11 and the piezoelectric layer 21 is α.

In one example, as shown in FIG. 4, the second surface of the base 1 may include a slope 11. In another example, as shown in FIG. 5, the first surface of the base 1 may also include a slope 11. In some cases, since the electrode layer 22 located below is bonded to the substrate 1 , the lower surface of the electrode layer 22 located below, away from the piezoelectric layer 21 , is an inclined plane matching the first surface of the substrate 1 . In another example, both the first surface and the second surface of the substrate 1 may include a slope 11 .

Since the plane that is not parallel to the piezoelectric layer 21 can be called an inclined plane, then, as shown in FIG. , the plane where the piezoelectric layer 21 is located is parallel to the horizontal plane, but as shown in FIG. 6 , the plane where the piezoelectric layer 21 is located is not parallel to the horizontal plane.

Wherein, in this embodiment, which surface of the substrate 1 includes the slope 11 is not limited, and it can be flexibly selected so that at least one of the first surface and the second surface of the substrate 1 is not parallel to the piezoelectric layer 21. For example, in the embodiment, the second surface of the base 1 , that is, the lower surface of the base 1 including the slope 11 may be used as an example.

As shown in FIG. 7 , the inclined surface 11 is configured to encourage the reflection of sound waves incident on the inclined surface 11 towards the side of the resonator, for example, the reflected sound waves are directed towards the peripheral edge of the substrate 1 .

As shown in Figure 7, the lower surface of the substrate 1 includes a slope 11, then, the sound waves (which may be called clutter) between the lower surface of the substrate 1 and other surfaces will be reflected to the side of the resonator after multiple transmissions. part, leaks out through the sides of the resonator and is attenuated. Once these clutters are attenuated, the spurious vibration modes generated by these clutters can be effectively suppressed. Once the spurious vibration mode is suppressed, the interference of the spurious vibration mode to the effective vibration mode can be weakened, and then the frequency hopping of the resonator can be alleviated or even avoided.

Wherein, among Fig. 7, solid line arrow represents the acoustic wave propagating in piezoelectric layer 21, is the sound wave that does not need attenuation, and dotted line arrow among Fig. 7 represents on inclined plane 11 and other surfaces (such as the upper surface of electrode layer 22 being positioned at above) The sound waves propagating between are the sound waves that need to be attenuated.

Based on the fact that the slope 11 can attenuate the incident sound waves, the larger the angle α between the slope 11 and the upper surface of the resonance layer 2, the better the attenuation effect on clutter, but if α is too large, the manufacturing of the resonator will be increased. Difficulty, so the appropriate α can be selected according to the suppression of the spurious vibration mode and the manufacturing situation of the resonator. For example, α can be about one degree.

In an example, at least one of the first surface and the second surface of the substrate 1 may be a slope 11 at a position corresponding to the resonant layer 2 . As shown in Figure 3 and with reference to Figure 4, the slope 11 intersects the plane where the first side of the resonant layer 1 is located and the plane where the second side is located, and the lines of intersection are all parallel to the upper surface of the resonant layer 2, wherein the resonant layer 2 The positions of the first side and the second side are opposite.

The second surface (i.e. the lower surface) of the base 1 can be used as an example. In one case, the second surface of the base 1 is a slope 11, as shown in FIG. Located on opposite sides of the base 1. Another situation can be that the second surface of the base 1 is a slope 11 at the position corresponding to the resonant layer 2, and is a plane at other positions. For example, the second surface of the base 1 has a relatively large area, and can 2 is an inclined plane, and other positions are planes, and the plane is a plane parallel to the upper surface of the resonant layer 2. Then, the two sides of the inclined plane 11 with a height difference are respectively located on the plane where the first side of the resonant layer 2 is located and the resonant layer. In the plane where the second side of the resonant layer 2 is located, the positions of the first side and the second side of the resonant layer 2 are opposite.

The first surface of the base 1 is an inclined plane 11, or the second surface is an inclined plane 11, or the first surface and the second surface are both inclined planes 11, which is convenient for processing, for example, after the base 1 is processed, the base 1 can be processed The surface is ground to grind out the bevel 11 . The shape of such a base 1 including the slope 11 may be wedge-shaped.

Wherein, if the first surface of the substrate 1 is the slope 11 , the first surface of the substrate 1 can be ground to form the slope 11 before depositing the resonant layer 2 , for example, before depositing the electrode layer 22 . And if the second surface of the substrate 1 is a bevel, the bevel 11 can be ground out before the resonant layer 2 is deposited, or the bevel 11 can be ground after the resonant layer 2 is deposited.

At least one of the first surface and the second surface of the substrate 1, in the scheme where the position corresponding to the resonator layer 2 is an inclined plane 11, as shown in FIG. Close to one side, attenuated by side leakage of the resonator. For example, an acoustic wave between the inclined plane 11 and the upper surface of the electrode layer 22 away from the substrate 1, an acoustic wave between the inclined plane 11 and the upper surface of the piezoelectric layer 21, an acoustic wave between the inclined plane 11 and the lower surface of the piezoelectric layer 21, The sound waves between the slope 11 and the lower surface of the electrode layer 22 close to the substrate 1, and the sound waves between the slope 11 and the upper surface of the substrate 1 can be gradually attenuated, so that the spurious vibration modes generated by these sound waves can be suppressed.

In one example, at least one of the first surface and the second surface of the substrate 1 may also include a plurality of slopes at the position corresponding to the resonant layer 2, and each slope of the multiple slopes is close to the resonator. The distance between the edge of the central axis and the resonant layer 2 is relatively short, while the distance between the edge far away from the central axis of the resonator and the resonant layer 2 is relatively long. In this way, the sound waves incident on each slope can be reflected toward the side of the resonator, and then leak and diffuse outward through the side, so that the spurious vibration modes generated by these sound waves can be effectively suppressed.

For example, the number of slopes 11 included in at least one of the first surface and the second surface of the substrate 1 may be two, which are respectively denoted as the first slope 11a and the second slope 11b, as shown in FIGS. 8 and 9 , the first side of the first slope 11a and the first side of the second slope 11b intersect at the first intersection line 111, the first intersection line 111 is parallel to the upper surface of the resonance layer 2, and is close to the resonance layer 2, the first slope 11a Both the second side 112 of the second slope 11b and the second side of the second slope 11b are far away from the resonant layer 2 , wherein the second side 112 is the side opposite to the position of the first intersection line 111 .

As shown in FIGS. 8 and 9 , the second surface (i.e., the lower surface) of the substrate 1 includes a first slope 11a and a second slope 11b directly below the resonant layer 2, and the first slope 11a and the second slope 11b intersect at the first slope 11b. A line of intersection 111, the first line of intersection 111 is parallel and close to the resonant layer 2, and the side of the first slope 11a away from the first line of intersection 111 is far away from the resonant layer 2, and the side of the second slope 11b away from the first line of intersection 111 is also Away from the resonant layer 2, the second surface of the substrate 1 constitutes a herringbone surface.

As shown in Figure 8 and with reference to Figure 9, the sound wave incident on the first slope 11a is gradually reflected to the position of the second edge 112 of the first slope 11a and attenuated, and the sound wave incident on the second slope 11b is gradually reflected to the second slope Attenuation at the position of the second side 112 of 11b. Therefore, the effect of suppressing the spurious vibration modes generated by these sound waves can be achieved.

In one example, at least one of the first surface and the second surface of the substrate 1 may also include a third slope 11c and a first plane 12 at a position corresponding to the resonant layer 2, that is, the surface of the substrate 1 Directly below the resonant layer 2 includes not only a slope but also a plane. As shown in Figure 10, the third side of the third slope 11c and the third side of the first plane 12 intersect at the second intersection line 11-12, and the second intersection line 11-12 is close to the resonant layer 2, the third slope 11c The fourth side 113 is far away from the resonant layer 2, and the fourth side 113 is the side opposite to the position of the second intersection line 11-12.

For example, as shown in FIG. 10, the second surface of the substrate 1 includes a third slope 11c and a first plane 12 at a position directly below the resonant layer 2, and the third slope 11c and the first plane 12 are compared to the second intersection line 11-12, the second intersection line 11-12 is parallel and close to the resonant layer 2, and the side of the third slope 11c opposite to the second intersection line 11-12 is parallel and away from the resonant layer 2.

In this way, the sound waves incident on the third slope 11c are reflected to the fourth side 113 close to the third slope 11c to be leaked and attenuated, so that the spurious vibration modes generated by these sound waves can be suppressed.

As mentioned above, the resonator can alleviate or even avoid the problem of frequency hopping, and improve the frequency stability of the resonator. Once the frequency stability of the resonator is high, the output frequency of the resonator can be locked near the target frequency, wherein the target frequency is the frequency that technicians expect the resonator to output.

For example, a phase locked loop (PLL) is integrated in the circuit of the resonator. The phase locked loop is a phase error control circuit, which can obtain the frequency adjustment value by comparing the output frequency with the target frequency, and adjust the next output frequency. Adjust the frequency of the resonator so that the output frequency of the resonator can be locked near the target frequency.

And if the frequency of the resonator jumps, because the frequency after the jump is far from the target frequency, then the phase-locked loop needs a relatively long time to lock the frequency output by the resonator near the target frequency, or even phase-lock The ring cannot lock the frequency output by the resonator near the target frequency, thus causing interruption of the communication service of the device where the resonator is located.

The resonator in this solution can alleviate or even avoid frequency hopping, which is conducive to quickly locking the output frequency of the resonator near the target frequency, so as to ensure the normal operation of the communication service of the device where the resonator is located, and can also reduce or even avoid resonance. The phase-locked loop of the device loses lock.

In the embodiment of the present application, at least one of the first surface and the second surface of the substrate of the resonator includes a slope, and the slope is not parallel to other surfaces, for example, the slope and the piezoelectric layer are not parallel, and the slope and the electrode layer are also not parallel. If they are not parallel, the sound waves between the slope and other surfaces will be reflected to the side of the resonator and leak after multiple transmissions, so that the spurious vibration modes generated by these sound waves can be effectively suppressed. Once the spurious vibration mode is effectively suppressed, the interference caused by the spurious vibration mode to the effective vibration mode can be weakened, so that the frequency jump of the resonator can be alleviated or even avoided.

The embodiment of the present application also provides a resonator. As shown in FIG. 11 and FIG. Wherein, the resonant layer 2 may include a piezoelectric layer 21 and two electrode layers 22 as described above, and the piezoelectric layer 21 is located between the two electrode layers 22 .

As mentioned above, the resonator may also include a reflective layer 3 located between the substrate 1 and the resonant layer 2 . Alternatively, the upper surface of the resonant layer 2 away from the base 1 may also be covered with a reflective layer.

As shown in FIG. 11 , at least one of the first surface and the second surface of the substrate 1 includes a curved surface 13, wherein the first surface and the second surface are opposite to each other, and the curved surface 13 can promote sound waves incident on the curved surface 13. The poly is reflected in a direction close to the side of the resonator.

Wherein, the arc surface 13 may be a curved surface not parallel to the piezoelectric layer 21, for example, the upper surface of the piezoelectric layer 21 away from the substrate 1 is parallel to the lower surface close to the substrate 1, and the upper surface of the arc surface 13 and the piezoelectric layer 21 The surfaces are not parallel.

For example, as shown in Figure 11 and with reference to Figure 12, the second surface of the base 1 includes an arc 13, and for example, as shown in Figure 13, the first surface of the base 1 includes an arc 13, in this case, due to the The electrode layer 22 is in contact with the substrate 1 , so the lower surface of the electrode layer 22 below is a curved surface matching the first surface of the substrate 1 .

In this embodiment, there is no limitation on whether the first surface or the second surface of the substrate 1 includes the curved surface 13 , and the second surface including the curved surface 13 may be used as an example.

As shown in Figure 11, the second surface (i.e. the lower surface) of the substrate 1 includes a curved surface 13, and the curved surface 13 is not parallel to other layers of the resonator, so, as shown in Figure 14, the curved surface 13 and other layers After multiple transmissions, the sound waves between the surfaces will be reflected to the side of the resonator, leak outward through the side of the resonator, and be attenuated, making it difficult to communicate between the arc surface 13 and other layers of the resonator. Standing waves are formed, and the spurious vibration modes generated by these standing waves can be effectively suppressed. Once the spurious vibration mode is effectively suppressed, the interference of the spurious vibration mode on the effective vibration mode can be weakened, so that the frequency jump of the resonator can be alleviated or even avoided.

Wherein, among Fig. 14, solid line arrow represents the acoustic wave propagating in piezoelectric layer 21, is the sound wave that does not need attenuation, and dotted line arrow among Fig. ) The sound wave propagating between is the sound wave that needs to be attenuated.

In one example, at least one of the first surface and the second surface of the substrate 1 may be an arc surface 13, or, at least one of the first surface and the second surface of the substrate 1, on the corresponding resonant layer 2 The position of the arc surface 13 is the arc surface 13, for example, the position directly below the resonant layer 2 is the arc surface 13, while other positions can be an arc surface or a plane.

Wherein, the arc surface 13 may be a spherical surface or a parabolic surface, and may also be an arched surface or the like.

In one example, the center of the arc surface 13 protrudes toward the resonator layer 2, and the edge of the arc surface 13 away from the center is away from the resonance layer 2, so that the sound wave incident on the arc surface 13 is reflected to the side of the resonator and leaks. .

In an example, at least one of the first surface and the second surface of the substrate 1 may also include a curved surface and a flat surface at a position corresponding to the resonant layer 2 . For example, as shown in FIG. 15 , at least one of the first surface and the second surface of the substrate 1 includes an arc surface 13 and a second plane 14 at a position corresponding to the resonant layer 2 . As shown in Figure 15, the fifth side of the arc surface 13 and the fifth side of the second plane 14 intersect at the third intersection line 13-14, the third intersection line 13-14 is close to the resonant layer 2, and the sixth side of the arc surface 13 The side 131 is away from the resonant layer 2, and the sixth side 131 is the side opposite to the position of the third intersection line 13-14.

For example, the second surface of the substrate 1 includes an arc surface 13 and a second plane 14 directly below the resonant layer 2, and the arc surface 13 and the second plane 14 intersect at a third intersection line 13-14, and the third intersection line 13- 14 is close to the resonant layer 2 and parallel to the resonant layer 2 , while the side of the arc surface 13 opposite to the third intersection line 13 - 14 is far away from the resonant layer 2 and parallel to the resonant layer 2 .

In this embodiment, whether the surface of the substrate 1 at the position corresponding to the resonant layer 2 is an arc surface 13 or includes an arc surface 13 and a second plane 14 is not specifically limited, and can be flexibly selected.

In one example, at least one of the first surface and the second surface of the substrate 1 may include the aforementioned inclined surface 11 and arc surface 13 at a position corresponding to the resonant layer 2 . For example, the same surface of the base 1 includes both the inclined surface 11 and the curved surface 13 . For another example, one surface of the substrate 1 includes a slope 11, and the other surface includes a curved surface 13. For example, the first surface of the substrate 1 includes a slope 11 at a position corresponding to the resonant layer 2, and the second surface of the substrate 1 is at a position corresponding to the resonant layer 2. The location includes arcuate surface 13 .

Whether it is the inclined surface 11 or the curved surface 13, they can encourage the incident sound wave to reflect toward the side close to the resonator, so that the sound wave leaks or diffuses, and gradually attenuates. Once these sound waves are attenuated, the spurious vibration modes generated by these sound waves can be effectively suppressed, thereby alleviating the interference of the parasitic vibration modes on the effective vibration modes, thereby alleviating the frequency hopping of the resonator during operation.

In the embodiment of the present application, at least one of the first surface and the second surface of the substrate of the resonator includes an arc surface, and the arc surface is not parallel to other surfaces, for example, the arc surface and the piezoelectric layer are not parallel, and the arc surface is not parallel to the piezoelectric layer. If the surface and the electrode layer are not parallel, the sound waves between the arc surface and other surfaces will be reflected to the side of the resonator and leak after multiple transmissions, and the spurious vibration modes generated by these sound waves can be effectively suppressed. Once the spurious vibration mode is effectively suppressed, the interference caused by the spurious vibration mode to the effective vibration mode can be weakened, so that the frequency jump of the resonator can be alleviated or even avoided.

The embodiment of the present application also provides an electronic component. The electronic component may be any component related to frequency, for example, it may be a clock oscillator or a filter.

The electronic component includes the above-mentioned resonator, at least one of the first surface and the second surface of the substrate includes a slope, and the slope is not parallel to other surfaces, for example, the slope is not parallel to the piezoelectric layer, and the slope and the piezoelectric layer are not parallel. If the electrode layers are not parallel, the sound waves between the inclined plane and other surfaces will be reflected to the side of the resonator and leak after multiple transmissions, and the spurious vibration modes generated by these sound waves can be effectively suppressed. Once the spurious vibration mode is effectively suppressed, the interference caused by the spurious vibration mode to the effective vibration mode can be weakened, so that the frequency jump of the resonator can be alleviated or even avoided.

The above is only an embodiment of the application, and is not intended to limit the application. Any modification, equivalent replacement, improvement, etc. made within the principles of the application shall be included in the protection scope of the application.

Claims

A resonator, characterized in that the resonator comprises a substrate (1) and a resonant layer (2), and the resonant layer (2) is located on the first surface of the substrate (1);

At least one of the first surface and the second surface of the substrate (1) includes a slope (11), and the first surface and the second surface are opposite to each other;

The slope (11) is configured to reflect the sound wave incident on the slope (11) toward a direction close to the side of the resonator.
The resonator according to claim 1, characterized in that at least one of the first surface and the second surface of the substrate (1) is a slope (11) at a position corresponding to the resonant layer (2) .
The resonator according to claim 1, characterized in that at least one of the first surface and the second surface of the substrate (1) includes a first slope ( 11a) and a second slope (11b);

The first side of the first slope (11a) and the first side of the second slope (11b) intersect at a first line of intersection (111), and the first line of intersection (111) is close to the resonance layer (2), the second side (112) of the first slope (11a) and the second side (112) of the second slope (11b) are far away from the resonant layer (2), and the second side (112) is The side opposite to the location of the first line of intersection (111).
The resonator according to claim 1, characterized in that at least one of the first surface and the second surface of the substrate (1) includes a third slope ( 11c) and the first plane (12);

The third side of the third slope (11c) and the third side of the first plane (12) intersect at a second line of intersection (11-12), and the second line of intersection (11-12) is close to In the resonant layer (2), the fourth side (113) of the third slope (11c) is far away from the resonant layer (2), and the fourth side (113) is the line of intersection with the second (11c) -12) The position opposite the side.
The resonator according to any one of claims 1 to 4, characterized in that, the resonant layer (2) comprises a piezoelectric layer (21) and two electrode layers (22), and the piezoelectric layer (21) is located between the two electrode layers (22).
A resonator, characterized in that the resonator comprises a substrate (1) and a resonant layer (2), and the resonant layer (2) is located on the first surface of the substrate (1);

At least one of the first surface and the second surface of the substrate (1) includes an arc surface (13), and the positions of the first surface and the second surface are opposite;

The arc surface (13) is configured to reflect the sound wave incident on the arc surface (13) toward a direction close to the side of the resonator.
The resonator according to claim 6, characterized in that at least one of the first surface and the second surface of the substrate (1) is an arc surface (13) at a position corresponding to the resonant layer (2) ).
The resonator according to claim 6, characterized in that at least one of the first surface and the second surface of the substrate (1) includes an arc surface (13) at a position corresponding to the resonant layer (2) ) and the second plane (14);

The fifth side of the arc surface (13) and the fifth side of the second plane (14) intersect at a third line of intersection (13-14), and the third line of intersection (13-14) is close to the In the resonant layer (2), the sixth side (131) of the arc surface (13) is far away from the resonant layer (2), and the sixth side (131) is the intersection with the third line (13-14) The opposite side of the position.
The resonator according to any one of claims 6 to 8, characterized in that, the arc surface (13) is a spherical surface or a parabolic surface.
An electronic component, characterized in that the electronic component comprises the resonator described in any one of claims 1-9.