WO2023033612A1 - 이물 제거 장치 - Google Patents
이물 제거 장치 Download PDFInfo
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- WO2023033612A1 WO2023033612A1 PCT/KR2022/013234 KR2022013234W WO2023033612A1 WO 2023033612 A1 WO2023033612 A1 WO 2023033612A1 KR 2022013234 W KR2022013234 W KR 2022013234W WO 2023033612 A1 WO2023033612 A1 WO 2023033612A1
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- WIPO (PCT)
- Prior art keywords
- electrode
- removal device
- angle
- foreign matter
- suction
- Prior art date
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- 238000002347 injection Methods 0.000 claims description 45
- 239000007924 injection Substances 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 38
- 238000005507 spraying Methods 0.000 claims description 24
- 238000012546 transfer Methods 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 7
- 230000001154 acute effect Effects 0.000 claims description 6
- 239000007921 spray Substances 0.000 abstract description 12
- 230000000694 effects Effects 0.000 description 13
- 238000007664 blowing Methods 0.000 description 9
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- 238000013461 design Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/04—Construction or manufacture in general
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates to a foreign material removal device, and more particularly, to a foreign material removal device for removing foreign materials on the surface of an electrode in a battery manufacturing process.
- secondary batteries are attracting much attention as energy sources for power devices such as electric bicycles, electric vehicles, and hybrid electric vehicles as well as mobile devices such as mobile phones, digital cameras, laptops, and wearable devices.
- the secondary battery includes a cylindrical battery and a prismatic battery in which an electrode assembly having a laminated structure of a positive electrode, a negative electrode, and a separator interposed between the positive electrode and the negative electrode is embedded in a cylindrical or prismatic metal can, and an electrode It is classified as a pouch-type battery in which the assembly is built in a pouch-type case of an aluminum laminate sheet.
- secondary batteries are also classified according to the structure of the electrode assembly having a laminated structure of a positive electrode, a negative electrode, and a separator interposed between the positive electrode and the negative electrode.
- a jelly-roll type (wound type) electrode assembly having a structure in which long sheet-type positive and negative electrodes are wound with a separator interposed therebetween, a plurality of positive and negative electrodes cut in units of a predetermined size with a separator interposed therebetween and stacked (stacked) electrode assemblies sequentially stacked.
- a stack/folding type electrode assembly which is a mixture of the jelly-roll type and stack type, has been developed.
- Such electrode assemblies can generally be combined or manufactured through a semi-automated or automated manufacturing line.
- the electrodes or separators constituting the electrode assembly are transported along a guide member such as a rail or a rotating roll to devices performing processing such as a cutting process, an adhesion process, a lamination process, and a winding process, and the devices It can be combined or manufactured in the form of an electrode assembly through operation.
- FIG. 1 is a cross-sectional view showing a conventional foreign material removal device.
- the foreign matter removal device 10 includes a spraying part 12 for spraying air toward the surface of an electrode E moving along a transport direction p1 and a suction part for sucking foreign matter separated from the electrode surface. (14), through which foreign substances on the surface of the electrode (E) are removed.
- the air injected from the ejection part 12 extends between the ejection part 12 and the suction part 14 rather than the electrode E due to the Coanda effect.
- the flow rate/flow rate was increased to solve this problem, air consumption increased and noise was increased.
- An object to be solved by the present invention is to provide a foreign matter removal device capable of improving foreign matter removal efficiency and minimizing a product defect rate by concentrating the injected air on the surface of an electrode.
- An apparatus for removing foreign matter from a surface of an electrode that is continuously transported in one direction includes a spraying unit for blowing air toward the surface of an electrode, and a suction unit for sucking in foreign matter separated from the surface of the electrode. and an extension part extending between the injection part and the suction part, and an adjustment part recessed in a direction away from the surface of the electrode is formed in the extension part.
- the injection part and the suction part are formed as slits forming an angle with the conveying direction of the electrode, the air injected from the ejection part moves in a direction opposite to the conveying direction of the electrode, and the air sucked by the suction part may move in the same direction as the direction of movement of the injected air.
- An acute angle formed by the spraying part with the conveying direction of the electrode may have substantially the same value as an acute angle formed by the suction part with the conveying direction of the electrode.
- An angle at which air is blown to the jetting unit may form an angle of 35 degrees to 55 degrees with respect to the transport direction of the electrode.
- the spraying part is formed of a slit forming an angle with the transfer direction of the electrode, and the width of the slit may be 0.03 mm to 0.07 mm.
- the injection part may be formed of a slit forming an angle with the transport direction of the electrode, and a protrusion protruding toward an air flow space may be positioned at an end of the injection part, and the flow space may refer to a space formed on an upper surface of an electrode. there is.
- the protruding portion may form an angle with a conveying direction of the electrode, and an angle formed between the protruding portion and a conveying direction of the electrode may correspond to an angle formed by the spraying part and a conveying direction of the electrode.
- the protrusion length of the protrusion may be 2 mm to 3 mm.
- An angle at which the suction unit sucks foreign substances may be 33 degrees to 55 degrees.
- the suction part is formed of a slit forming an angle with the transfer direction of the electrode
- the width of the slit may be 1.0 mm to 3.0 mm.
- the extension part may have a length of 20 mm to 35 mm.
- the depth of the adjusting part is 3 mm to 5 mm, and the depth of the adjusting part may be calculated based on one side of the extension part on which the adjusting part is not formed.
- FIG. 1 is a cross-sectional view showing a conventional foreign material removal device.
- FIG. 2 is a cross-sectional view of a foreign material removal device according to an embodiment of the present invention.
- FIG. 3 is an experimental result for optimizing the protrusion of the foreign matter removal device according to FIG. 2 .
- 4 and 5 are designs and results of optimization experiments of the foreign matter removal device according to FIG. 2 .
- FIGS. 6 to 9 are graphs analyzing the experimental results of FIGS. 4 and 5 .
- 11 is a comparison of foreign material removal rates of a conventional foreign material removal device and a foreign material removal device according to an embodiment of the present invention.
- planar it means when the corresponding part is viewed from above, and when it is referred to as “cross-section”, it means when the cross section of the corresponding part cut vertically is viewed from the side.
- the foreign material removal device 100 described below will mainly be used to remove foreign materials on the surface of the electrode E in the secondary battery manufacturing process. However, this is not necessarily the case, and it is obvious that it can be used in various processes requiring the removal of foreign substances on the surface in addition to the secondary battery manufacturing process.
- FIG. 2 is a cross-sectional view of a foreign material removal device according to an embodiment of the present invention.
- the foreign material removal device 100 has two body parts 110 that are symmetrical about the electrode E crossing the center of the foreign material removal device 100. can
- the main body portion 110 located on the upper side of the electrode E is mainly described, but these descriptions also apply to the body portion 110 located on the lower side of the electrode E. Make it clear in advance that it can be applied.
- the foreign matter removal device 100 includes a spraying unit 120 for spraying air toward the surface of the electrode E moving along the transport direction p1 between the two body parts 110, and sucking foreign matter separated from the electrode surface. It includes an extension part 160 extending between the suction part 140, the injection part 120, and the suction part 140, and the extension part 160 may be formed with a control part 180 having a recessed shape. there is.
- the electrode E may be an object of the foreign material removal device 100 .
- the electrode E may be provided in the form of a long rectangular sheet in which an electrode slurry is applied to a current collector.
- the current collector may be made of stainless steel, aluminum, copper, nickel, titanium, calcined carbon, or the like, and may be provided in various forms such as a film, sheet, foil, net, porous material, foam, or nonwoven fabric.
- the electrode slurry may typically include an electrode active material, a conductive material, a binder, and a solvent, but is not limited thereto.
- the electrode E may be moved in one direction by the rotational force of the roller that winds or unwinds the electrode.
- the electrode E may be continuously moved by the rotational force of the roller that winds or unwinds the electrode.
- the electrode E may be moved between the two body parts 110 inside the foreign material removal device 100 by the roller.
- the spraying unit 120 may be configured to spray air to remove foreign matter attached to the surface of the electrode E.
- the injection unit 120 is configured so that the electrode E faces the electrode E later than the suction unit 140 based on the transfer direction p1 of the electrode E in the foreign material removal device 100. ) may be located far from the inlet to pass through.
- the injection unit 120 may be formed in a slit shape in the body unit 110 .
- the flow rate and velocity of the air injected from the jetting unit 120 may be determined according to the width of the slit of the jetting unit 120 .
- the width of the slit of the injection unit 120 according to the present embodiment may be smaller than the width of the slit of the general injection unit 120 .
- the width of the slit of the injection unit 120 may be less than 0.5 mm.
- the width of the slit of the injection unit 120 may be 0.1 mm or less, 0.07 mm or less, 0.01 mm or more, or 0.03 mm or more, and in detail, the error range may be 0.005 mm or less, 0.05 mm. This may be to maximize the flow rate at the same flow rate by making the width of the slit smaller than in the prior art.
- the spraying angle a1 of the air discharged by the spraying unit 120 may form an angle with the transfer direction p1 of the electrode E.
- the spraying angle a1 may be determined according to the shape of the slit of the spraying unit 120 .
- the blowing angle a1 may refer to an acute angle among angles formed between the transport direction p1 of the electrode E and the air blowing path.
- the injection unit 120 may be formed in an oblique line toward the surface of the electrode E from the inside of the body unit 110 .
- the jetting unit 120 may be formed in an oblique shape so that the air discharged from the jetting unit 120 moves in a direction opposite to the transfer direction p1 of the electrode. Since the pressure applied to the surface of the electrode E by the air ejected from the jetting unit 120 may vary depending on the jetting angle a1 of the jetting unit 120, the jetting angle a1 of the jetting unit 120 is appropriately designed It can be. A detailed description of the spray angle a1 will be described later through experimental data.
- a protrusion 122 may be formed at an end of the injection unit 120 .
- the protruding portion 122 may refer to a portion extending from the spraying portion 120 and protruding into an air flow space.
- the 'flow space' refers to a space formed above the surface of the electrode E, and may mean a space formed between the foreign material removal device 100 and the surface of the electrode E.
- the 'flow space' may be formed larger by the control unit 180, and at this time, the 'flow space' refers to the space between the recessed surface of the control unit 180 and the surface of the electrode E. it could be
- the protruding part 122 is located at the end of the direction in which the air discharged from the spraying part 120 travels, so that the flow direction of the sprayed air can be adjusted.
- the flow direction of air may vary according to the angle of the protrusion 122 .
- the angle of the protruding part 122 may correspond to the spraying angle a1 of the spraying part 120 .
- the flow direction of air may vary depending on the size of the protruding portion 122 .
- the effect of the protruding portion 122 on the air may vary.
- the suction unit 140 may be configured to remove foreign substances separated from the surface of the electrode E by the injection unit 120 by suctioning them.
- the suction part 140 passes through the part of the foreign matter removal device 100 so that the electrode E meets the electrode E before the injection part 120 based on the transfer direction p1 in the foreign matter removal device 100. It can be located close to the inflow point.
- the suction part 140 may be formed in a slit shape in the body part 110 .
- the flow rate and velocity of air sucked by the suction unit 140 may be determined according to the width of the slit of the suction unit 140 . It may be preferable that the suction part 140 has a larger slit width than the injection part 120 in terms of its function.
- the width of the slit of the suction part 140 may be 1.0 to 3.0 mm, and in detail, may be 2.0 mm within an error range of 0.2 mm or less.
- An angle at which the suction unit 140 sucks in air may form an angle with the transfer direction p1 of the electrode E.
- the suction part 140 may be formed in an oblique direction from the surface of the electrode E toward the inside of the body part 110 .
- the suction part 140 may be formed in an oblique direction so that the sucked air is directed from the front to the rear based on the transfer direction p1 of the electrode.
- the spray angle of the suction unit 140 may need to be properly designed.
- the spray angle of the suction unit 140 may be 35 to 55 degrees, which may mean an acute angle formed with the transfer direction p1 of the electrode E.
- the end of the injection unit 120 and the end of the suction unit 160 may be positioned toward each other. This may be for the suction part 160 to effectively collect the air ejected from the ejection part 120 .
- the end may refer to a part located closest to the electrode E in the injection part 120 and the suction part 160 .
- the extension part 160 may refer to a part extending from the injection part 120 to the suction part 140 .
- the air injected from the jetting unit 120 may flow in a space between the extension unit 160 and the electrode E, and then may be sucked in by the suction unit 140.
- the length w1 of the extension part 160 may affect the foreign matter removal efficiency.
- the length w1 of the extension part 160 may be set differently according to the flow rate and velocity of the air discharged from the injection part 120 and the suction power of the suction part 140 .
- the length w1 of the extension part 160 means the length between the end of the spray part 120 and the suction part 140, and when the protrusion 122 is formed at the end of the spray part 120, the extension part (
- the length w1 of 160 may mean a length extending from the end of the protruding part 122 to the suction part 140 .
- the length w1 of the extension 160 may be calculated based on a straight line parallel to the transport direction p1. A detailed description of the length w1 of the extension part 160 that improves the foreign matter removal effect will be described later through experimental data.
- the control unit 180 may be a part for adjusting the flow of air injected from the spray unit 120 .
- the adjusting part 180 may be formed on the extension part 160 .
- the control unit 180 may be referred to as an 'air flow control unit' or the like.
- the control part 180 may be for concentrating the air injected from the injection part 120 on the surface of the electrode E.
- the control unit 180 may be for minimizing the Coanda effect.
- the control unit 180 may have a recessed shape in a direction away from the surface of the electrode E.
- the control unit 180 may have a recessed shape in a direction away from the surface of the electrode E.
- the control unit 180 may be a part removed from the extension unit 160 to expand an air flow space.
- a space in which the air sprayed on the surface of the electrode E flows may be formed between the injection unit 120 and the suction unit 140 through the control unit 180 . By forming the control unit 180, the air flow space can be expanded.
- the degree of indentation of the adjusting unit 180 may be expressed as a maximum depth or height of the adjusting unit 180 calculated based on one surface of the extension 160 before the adjusting unit 180 is formed.
- the depth d1 of the control unit 180 may be set differently depending on the length w1 of the extension unit 160, the flow rate and flow rate of air discharged from the jetting unit 120, and the suction power of the suction unit 140. there is. A detailed description of the depth d1 of the control unit 180 that improves the foreign matter removal effect will be described later through experimental data.
- FIG. 3 is an experimental result for optimizing the protrusion of the foreign matter removal device according to FIG. 2 .
- the injection unit 120 is provided in the form of a slit formed in the body portion 110, and at this time, according to the shape of the corner 162 of the extension portion 160, the protrusion of the injection unit 120 ( 122) may have different effects.
- Case 1 may be a case in which the controller 180 is not formed in the foreign material removal device 100.
- the air discharged from the injection unit 120 exhibits the fastest flow rate around the extension 160 and shows a low flow rate around the electrode E.
- the controller 180 when the controller 180 is not formed in the foreign material removal device 100, it may be difficult to form a large flow rate/flow rate of the gas passing around the electrode E, and accordingly, the foreign material removal efficiency may decrease. .
- Case 2 may be a case in which the control unit 180 is formed in the foreign matter removal device 100 and the corner 162 has a symmetrical shape with the protrusion 122. That is, the protrusion 122 may not protrude into the air flow space. This may be referred to as a case in which the protrusion 122 is not formed.
- the flow rate of the air discharged from the injection unit 120 around the extension 160 is somewhat lower than that of FIG. 3(a), the flow rate around the electrode E It was confirmed that it did not improve the flow rate.
- Case 3 is a case where the control unit 180 is formed in the foreign matter removal device 100 and a part of the protruding part 122 protrudes into the air flow space by removing a part of the end of the edge 162.
- the air discharged from the injection unit 120 rather flows out to the left side, so the effect of improving the flow rate around the electrode E is not shown.
- Case 4 shows that the control unit 180 is formed in the foreign matter removal device 100, and the protruding part 122 is formed by removing the end of the corner 162 according to the indented shape of the control unit 180. It may be a case where it protrudes into the flow space. Referring to FIG. 3(d) , the air discharged from the injection unit 120 is concentrated in the downward direction, so that the flow rate around the electrode E is higher than the flow rate around the extension part 160 or the control part 180. You can check. That is, since the size of the protruding portion 122 is formed sufficiently large, it seems that the effect of concentrating the air discharged from the spraying portion 120 around the electrode E appears.
- the protrusion part 122 can be positioned in a protruding state toward the flow space, and through this, the protrusion part 122 can be involved in the flow direction of air.
- the size of the protruding portion 122 is sufficiently large.
- WSS is an abbreviation of wall shear stress, and means stress generated on a corresponding surface, and leftward flow refers to a phenomenon in which air does not flow in the designed direction but flows in the opposite direction.
- Test factor/level a1(deg) d1(mm) w1(mm) One 45 3 50 2 35 5 35 3 55 10 20
- FIGS. 6 to 9 are graphs analyzing the experimental results of FIGS. 4 and 5 .
- Tables 3 to 6 are tables in which Taguchi analysis was performed with respect to four variables: electrode surface flow rate, WSS, left outflow, and suction flow rate.
- Table 7 is a table in which the main factors are selected based on the results analyzed through the above tables and drawings, mainly the occupancy values described in Tables 3 to 6.
- the injection angle (a1) of the injection part 120 has a great influence on the electrode surface flow rate and WSS, and the length (w1) of the extension part 160 is WSS, left outflow, suction It was found to have a significant effect on both flow rates. In addition, it was found that the depth d1 of the control unit 180 was not significantly involved in left air leakage.
- the injection angle a1 of the injection unit 120 is 45 degrees within the error range of 0.5 degrees
- the depth d1 value of the control unit 180 is 3 to 5 mm, in more detail. is 5 mm within the error range of 0.2 mm
- the value of the length (w1) of the extension part 160 is 20 to 35 mm, more specifically, when it is 20 mm within the error range of 0.2 mm, it is found to be advantageous in terms of suction consumption.
- Table 8 described below is an optimal condition derived by synthesizing the above results. Specifically, the spray angle (a1) of the spraying part 120, the length (w1) of the extension part 160, and the depth (d1) of the adjusting part 180 according to each characteristic are the values shown in FIGS. 6 to 9 was based on In addition, optimal condition values were selected based on the results of the main factors in each Table 7.
- the CFD simulation results of the foreign material removal device 100 of this embodiment are compared with the results of the conventional foreign material removal device 10 in which the adjusting unit 180 is not formed.
- the foreign matter removal device 100 of this embodiment reflects the optimal conditions of Table 8 derived through the above-described experiments.
- the slit widths of the spraying part 12 and the spraying part 120 were different, but the flow rate of the air injected from them was the same (the flow rate of the injected air was different), the slit angle of the suction part 160 was 45 degrees, and the flow rate of the suction was the minimum flow rate value at which air did not flow out.
- the moving speed of the electrode was 110 m/min, and the distance h1 between the body part 110 and the electrode E was 5 mm. For other conditions of this experiment, see Table 9 below.
- the foreign matter removal device 100 of this embodiment to which the optimal condition of FIG. 10(b) is applied is compared to the conventional foreign matter removal device 100 of FIG. It can be seen that the flow rate of was improved by 800%. Through these results, it can be confirmed that the foreign material removal device 100 of the present embodiment can more efficiently remove the foreign matter attached to the surface of the electrode E than the conventional device.
- 11 is a comparison of foreign material removal rates of a conventional foreign material removal device and a foreign material removal device according to an embodiment of the present invention.
- FIG. 11 shows the results of the foreign matter removal device 100 of this embodiment and the conventional foreign matter removal device 10 together for clearer comparison.
- the optimum conditions of Table 8 derived through the above-described experiments were reflected in the foreign matter removal device 100 of this embodiment.
- the flow rate of the suction was the minimum flow rate value at which no air flow occurred, and the flow rate of the injection unit 120 was 77 LPM.
- the separation distance h1 between the body part 110 and the electrode E was 5 mm. See Table 10 below for the evaluation conditions and procedures of this experiment.
- the removal rate of foreign matter in the foreign matter removal device 100 of this embodiment, to which the optimal conditions are applied, is improved by about 5000% compared to the conventional foreign matter removal device 100 .
- this is because the control unit 180 is formed in the foreign matter removal device 100 and the numerical values of each component are appropriately adjusted so that the air injected from the injection unit 120 is directed to the surface of the electrode E. This may be because it collides sufficiently with the foreign body to separate the foreign matter.
- the foreign matter removal device of the present invention can improve the foreign matter removal rate by concentrating the blown air on the electrode surface, thereby reducing the product defect rate due to foreign matter on the electrode surface, and improving product uniformity to Reliability can be improved.
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Abstract
Description
Slit size(mm) | slit 유속(m/s) | Suction 각도(deg) | h1(mm) | Blow slit(mm) | |||
Blowing | suction | blowing | suction | 돌출 길이 | R값 | ||
0.05 | 2.0 | 100 | 15이하 | 45 | 5 | 3.0 | 0.2 |
실험인자/수준 | a1(deg) | d1(mm) | w1(mm) |
1 | 45 | 3 | 50 |
2 | 35 | 5 | 35 |
3 | 55 | 10 | 20 |
특성 | 수준 | a1(deg) | d1(mm) | w1(mm) |
전극면 유속 | 1 | 12.24 | 13.29 | 14.01 |
2 | 15.31 | 14.66 | 13.40 | |
3 | 14.73 | 14.32 | 14.86 | |
델타 | 3.07 | 1.37 | 1.46 | |
점유율 | 52% | 23% | 25% |
특성 | 수준 | a1(deg) | d1(mm) | w1(mm) |
WSS | 1 | 2.23 | 2.65 | 2.23 |
2 | 3.17 | 3.03 | 3.01 | |
3 | 3.40 | 3.11 | 3.55 | |
델타 | 1.17 | 0.47 | 1.32 | |
점유율 | 39% | 16% | 45% |
특성 | 수준 | a1(deg) | d1(mm) | w1(mm) |
좌측 유출 | 1 | 1.35 | 1.04 | 2.94 |
2 | 0.98 | 0.89 | -0.14 | |
3 | -0.34 | 0.06 | -0.80 | |
델타 | 1.69 | 0.97 | 3.74 | |
점유율 | 26% | 15% | 58% |
특성 | 수준 | a1(deg) | d1(mm) | w1(mm) |
Suction 유속 | 1 | -11.00 | -10.33 | -10.33 |
2 | -10.00 | -9.67 | -8.33 | |
3 | -12.67 | -13.67 | -15.00 | |
델타 | 2.67 | 4.00 | 6.67 | |
점유율 | 20% | 30% | 50% |
◎상 ○중 △하 | |||
특성 | a1(deg) | d1(mm) | w1(mm) |
전극면 유속 | ◎ | ○ | ○ |
WSS | ◎ | ○ | ◎ |
좌측 유출 | ○ | △ | ◎ |
Suction 유속 | ○ | ○ | ◎ |
No. | 특성 | a1(deg) | d1(mm) | w1(mm) |
1 | 전극면 유속 | 45/55 | 5/10 | 50 |
2 | WSS | 55/45 | 10/5 | 50 |
3 | 좌측 유출 | 35/45 | 3/5 | 20 |
4 | Suction 유속 | 45 | 5/3 | 35/20 |
최적 조건 | 45 | 5 | 20 |
Case | Slit size(mm) | slit 유속 (m/s) |
a1 (deg) |
d1 (mm) |
w1 (mm) |
Blow slit(mm) | ||
blowing | suction | blowing | blowing | 돌출 길이 | R값 | |||
도 10 (a) | 0.5 | 2.0 | 10 | 45 | 50 | |||
도 10 (b) | 0.05 | 2.0 | 100 | 45 | 5 | 20 | 3.0 | 0.2 |
No. | 평가 절차 | Tool | 세부사항 |
1 | 이물 선정 | - | 종류 SUS304L, 사이즈 50㎛ |
2 | 이물 투입 | Particle Trap, Tweezer | 이물 약 10,000~17,000ea/Trap, 각 5회 진행 |
3 | 이물 제거 조건 설정 | 유량계 | 동일 유량 선정 (77LPM) |
4 | 제거 전 검사 | JOMESA 현미경 | Auto 측정 |
5 | 이물 제거 | 이물 제거 강치 | 종래 및 최적 조건 반영된 장치 이용 |
6 | 제거 후 검사 | JOMESA 현미경 | Auto 측정 |
Claims (12)
- 일 방향을 따라 연속적으로 이송되는 전극 표면의 이물을 제거하는 이물질 제거 장치에 있어서,전극 표면을 향해 에어를 분사하는 분사부,상기 전극 표면으로부터 분리된 이물을 흡입하는 흡입부 및상기 분사부 및 상기 흡입부 사이에서 연장되는 연장부를 포함하고,상기 연장부에는 상기 전극 표면과 멀어지는 방향으로 만입된 조절부가 형성된 이물 제거 장치.
- 제1항에서,상기 분사부와 상기 흡입부는 상기 전극의 이송 방향과 각을 이루는 슬릿으로 형성되고,상기 분사부로부터 분사된 에어는 상기 전극의 이송 방향과 반대 방향으로 향해 이동하고,상기 흡입부에 의해 흡입된 에어는 상기 분사된 에어의 이동 방향과 동일한 방향으로 이동하는 이물 제거 장치.
- 제2항에서,상기 분사부가 상기 전극의 이송 방향과 이루는 예각은, 상기 흡입부가 상기 전극의 이송 방향과 이루는 예각과 실질적으로 동일한 값을 가지는 이물 제거 장치.
- 제1항에서,상기 분사부에 에어를 분사하는 각도는 상기 전극의 이송 방향과 35도 내지 55도를 이루는 이물 제거 장치.
- 제1항에서,상기 분사부는 상기 전극의 이송 방향과 각을 이루는 슬릿으로 형성되고,상기 슬릿의 폭은 0.03mm 내지 0.07mm인이물 제거 장치.
- 제1항에서,상기 분사부는 상기 전극의 이송 방향과 각을 이루는 슬릿으로 형성되고, 상기 분사부의 말단에는 에어의 유동 공간을 향해 돌출된 돌출부가 위치하며,상기 유동 공간은 전극 표면 상부에 형성된 공간을 지칭하는 것인 이물 제거 장치.
- 제6항에서,상기 돌출부는 상기 전극의 이송 방향과 각을 이루고,상기 돌출부와 상기 전극의 이송 방향과 이루는 각은 상기 분사부가 상기 전극의 이송 방향과 이루는 각과 대응되는 이물 제거 장치.
- 제6항에서,상기 돌출부의 돌출 길이는 2mm 내지 3mm인 가지는 이물 제거 장치.
- 제1항에서,상기 흡입부가 이물을 흡입하는 각도는 35도 내지 55도를 이루는 이물 제거 장치.
- 제1항에서,상기 흡입부는 상기 전극의 이송 방향과 각을 이루는 슬릿으로 형성되고,상기 슬릿의 폭은 1.0mm 내지 3.0mm인 이물 제거 장치.
- 제1항에서,상기 연장부의 길이는 20mm 내지 35mm인 가지는 이물 제거 장치.
- 제1항에서,상기 조절부의 깊이는 3mm 내지 5mm이고, 상기 조절부의 깊이는 상기 조절부가 형성되지 않은 연장부의 일면을 기준으로 산출되는 이물 제거 장치.
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CN202280029130.0A CN117177822A (zh) | 2021-09-03 | 2022-09-02 | 异物移除装置 |
EP22865114.7A EP4309810A1 (en) | 2021-09-03 | 2022-09-02 | Foreign matter removal device |
JP2023560153A JP2024513379A (ja) | 2021-09-03 | 2022-09-02 | 異物除去装置 |
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KR10-2021-0117897 | 2021-09-03 | ||
KR1020220111454A KR20230034919A (ko) | 2021-09-03 | 2022-09-02 | 이물 제거 장치 |
KR10-2022-0111454 | 2022-09-02 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0937178B1 (en) * | 1996-10-25 | 2002-04-03 | Metso Paper, Inc. | Method and device in a paper machine or equivalent or in a finishing device of same for removal of dust |
JP2004195399A (ja) * | 2002-12-19 | 2004-07-15 | Sony Corp | 帯状体のクリーニング装置及びクリーニング方法 |
KR20080005630A (ko) * | 2006-07-10 | 2008-01-15 | 삼성전자주식회사 | 반도체 제조 설비의 먼지 제거 장치 |
KR20080017768A (ko) * | 2006-08-22 | 2008-02-27 | 삼성전자주식회사 | 기판 상의 파티클 제거 장치 |
KR101025325B1 (ko) * | 2010-10-20 | 2011-03-29 | (주)엠티알 | 에어블로잉을 이용하여 평판디스플레이의 백라이트유닛의 표면의 파티클을 제거하는 장치 |
-
2022
- 2022-09-02 JP JP2023560153A patent/JP2024513379A/ja active Pending
- 2022-09-02 WO PCT/KR2022/013234 patent/WO2023033612A1/ko active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0937178B1 (en) * | 1996-10-25 | 2002-04-03 | Metso Paper, Inc. | Method and device in a paper machine or equivalent or in a finishing device of same for removal of dust |
JP2004195399A (ja) * | 2002-12-19 | 2004-07-15 | Sony Corp | 帯状体のクリーニング装置及びクリーニング方法 |
KR20080005630A (ko) * | 2006-07-10 | 2008-01-15 | 삼성전자주식회사 | 반도체 제조 설비의 먼지 제거 장치 |
KR20080017768A (ko) * | 2006-08-22 | 2008-02-27 | 삼성전자주식회사 | 기판 상의 파티클 제거 장치 |
KR101025325B1 (ko) * | 2010-10-20 | 2011-03-29 | (주)엠티알 | 에어블로잉을 이용하여 평판디스플레이의 백라이트유닛의 표면의 파티클을 제거하는 장치 |
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