WO2023032814A1 - Electric discharge charge amount measuring device - Google Patents

Electric discharge charge amount measuring device Download PDF

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Publication number
WO2023032814A1
WO2023032814A1 PCT/JP2022/032087 JP2022032087W WO2023032814A1 WO 2023032814 A1 WO2023032814 A1 WO 2023032814A1 JP 2022032087 W JP2022032087 W JP 2022032087W WO 2023032814 A1 WO2023032814 A1 WO 2023032814A1
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Prior art keywords
voltage
capacitor
terminal
value
peak
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PCT/JP2022/032087
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French (fr)
Japanese (ja)
Inventor
輝夫 鈴木
光石 崔
裕生 長田
善也 宮林
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春日電機株式会社
独立行政法人労働者健康安全機構
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Priority to CN202280053473.0A priority Critical patent/CN117751293A/en
Priority to KR1020237043783A priority patent/KR20240010024A/en
Publication of WO2023032814A1 publication Critical patent/WO2023032814A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/30—Measuring the maximum or the minimum value of current or voltage reached in a time interval
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/24—Arrangements for measuring quantities of charge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0084—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring voltage only

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  • the present invention relates to a discharge charge amount measuring device that measures the discharge charge amount when a charged object is discharged.
  • the discharge charge amount measuring device shown in FIG. the voltage detected by the voltage measuring unit 4 is converted into a charge amount by conversion means (not shown).
  • the voltage detected by the voltage measuring unit 4 is converted into a charge amount by conversion means (not shown).
  • the tip 2a of the detection terminal 2 is brought close to the charged object 1, the electric field between the tip 2a and the charged object 1 increases.
  • a discharge is generated from 1 to the detection terminal 2 .
  • the capacitor 3 is charged with the charge that has flowed from the charged object 1 to the detection terminal 2 side.
  • the charge amount is detected by measuring the voltage V across the terminals 3a and 3b of the capacitor 3.
  • FIG. Specifically, the detected inter-terminal voltage is multiplied by the capacitance of the capacitor 3 to calculate the discharge charge amount.
  • an induced voltage is generated in the capacitor 3 due to the charge of the charged object 1 in the process of bringing the tip 2a of the detection terminal 2 closer to the charged object 1 .
  • the charged object 1 is positively charged
  • the tip 2 a approaches the charged object 1
  • the negative charge in the detection terminal 2 is attracted to the positive charge of the charged object 1 . Therefore, a positive charge is induced to one terminal 3a side of the capacitor 3.
  • FIG. Therefore, a positive induced voltage is generated between the terminals 3 a and 3 b of the capacitor 3 .
  • an induced voltage is generated between the terminals 3a and 3b of the capacitor 3 even if the charged object 1 does not discharge. Therefore, the voltage between the terminals 3a and 3b of the capacitor generated by the discharge charge amount when the discharge actually occurs is affected by the above induced voltage, and as a result, the discharge charge amount cannot be measured accurately. .
  • An object of the present invention is to provide a discharge charge amount measuring device that can accurately and easily measure the discharge charge amount of an object to be measured.
  • a first invention comprises a detection terminal brought close to an electrostatically charged object to be measured, a capacitor having one terminal connected to the detection terminal and the other terminal grounded, and a resistor connected in parallel to the capacitor.
  • voltage measuring means for measuring the voltage across the terminals of the capacitor; peak detecting means for detecting a peak value of the voltage value measured by the voltage measuring means; and detecting the peak value detected by the peak detecting means.
  • the peak detecting means samples the inter-terminal voltage measured by the voltage measuring means every preset sampling time ⁇ t, and peaks the highest sampled voltage value.
  • the capacitance C of the capacitor, the resistance value R of the resistor, and the sampling time ⁇ t are each set within a range that satisfies C ⁇ R> ⁇ t.
  • a second invention comprises a detection terminal that is brought into contact with an electrostatically charged object to be measured, a capacitor that is connected to the detection terminal and stores the discharge charge from the object to be measured, and a resistor that is connected in parallel to the capacitor.
  • a voltage measuring means for measuring the voltage across the terminals of the capacitor; a converting means for converting the voltage value measured by the voltage measuring means into a charge amount; and a peak value of the charge amount converted by the converting means.
  • peak detection means wherein the peak detection means has a function of sampling the charge amount converted by the conversion means at each preset sampling time ⁇ t and specifying the maximum value of the sampled charge amount as the peak value.
  • each of the capacitance C of the capacitor, the resistance value R of the resistor, and the sampling time ⁇ t is set within a range that satisfies CR> ⁇ t.
  • the capacitance C, the resistance value R, and the sampling time ⁇ t satisfy C ⁇ R ⁇ 50 ⁇ t.
  • the capacitance C and the resistance value R satisfy ⁇ C ⁇ R, and ⁇ satisfies 10 ⁇ 3 [seconds] ⁇ 1 [seconds].
  • the electric charge induced in the process of bringing the detection terminal close to the charged object can be released to the ground through the resistor. can be prevented from being affected by Furthermore, since the capacitance C of the capacitor and the resistance value R of the resistor are set so that the attenuation time constant of the voltage across the capacitor is greater than the sampling time ⁇ t, the peak value of the voltage across the capacitor can be specified more accurately. As a result, the amount of charge stored in the capacitor can be accurately measured.
  • the voltage peak value can be detected more accurately, and the discharge charge amount can be accurately measured.
  • the charge accumulated in the capacitor is rapidly attenuated, enabling continuous measurement.
  • FIG. 1 is a circuit diagram of a discharge charge amount measuring device according to an embodiment.
  • FIG. 2 is a graph showing changes in voltage between terminals of a capacitor.
  • FIG. 3 is a graph showing the results of charge amount measurement using the discharge charge amount measuring device of the embodiment.
  • FIG. 4 is a circuit diagram of a conventional electric charge measuring device.
  • FIG. 1 is a circuit diagram of a discharge charge amount measuring device according to an embodiment
  • FIG. 2 is a graph showing changes in voltage between terminals of a capacitor according to an embodiment
  • FIG. is a graph showing the measurement results of
  • the discharge charge amount measuring apparatus of this embodiment includes a detection terminal 2 having a tip 2a shaped to prevent corona discharge. is provided with a capacitor 3 whose terminal 3b is grounded. And, as in the conventional case, a voltage measuring section 4, which is voltage measuring means for measuring the voltage across the terminals of the capacitor 3, is provided. However, in this embodiment, a resistor 5 is connected in parallel with the capacitor 3 .
  • the capacitance of the capacitor 3 is C [F], and the resistance value of the resistor 5 is R [ ⁇ ].
  • the shape in which the corona discharge is unlikely to occur is a shape in which the discharge from the charged object 1 does not become a corona discharge that persists around a tip or the like. Specifically, it is spherical with a diameter of 20 [mm] or more. By increasing the diameter of the tip 2a of the detection terminal 2 in this way, the curvature of the spherical surface is reduced, and even if the tip 2a of the detection terminal 2 is brought close to the charged object 1, the electric field from the charged object 1 is generated at the tip 2a. It is no longer concentrated on one point on the spherical surface. Therefore, corona discharge is less likely to occur near the tip 2a of the detection terminal 2, and a pulsed discharge is generated from the charged object 1.
  • the tip 2a of the detection terminal 2 has a shape that makes it difficult for corona discharge to occur in order to enable measurement of the discharge charge amount of one pulse-like discharge generated from the charged object 1. be. Therefore, the tip 2a of the detection terminal 2 does not have to be spherical unless the surface facing the charged object 1 has a curved surface with a small curvature and does not have a sharp portion.
  • the voltage measurement unit 4 is connected to a peak detection unit 6 which is a peak detection means for detecting and holding the peak value of the voltage value measured by the voltage measurement unit 4.
  • a conversion unit 7 conversion means that converts the peak value of the voltage into the amount of charge is connected.
  • an output unit 8 is provided for outputting the value of the amount of charge converted by the conversion unit 7 .
  • the voltage measuring section 4 has a function of continuously detecting the voltage between the terminals 3 a and 3 b of the capacitor 3 .
  • the peak detection unit 6 has a function of repeatedly sampling the voltage value detected by the voltage measurement unit 4 at a sampling time ⁇ t and specifying the highest value as the peak value Vp. Specifically, the peak detector 6 samples the voltage value V1 at the start of measurement, holds the voltage value V1, samples the voltage value V2 again after the sampling time ⁇ t, and also samples the voltage value V2 . The process of comparing V2 and V1 , holding the larger value and erasing the other is repeated for a certain period of time, and the maximum value during that period is specified as the peak value Vp.
  • C ⁇ R ⁇ sampling time ⁇ t C ⁇ R ⁇ sampling time ⁇ t.
  • the above C ⁇ R corresponds to the time constant ⁇ [S] when the voltage across the terminals of the capacitor 3, which has increased due to the charging of the discharged electric charge, attenuates from the maximum voltage V0.
  • the time constant ⁇ is the time for the exponentially decaying voltage across the terminals of the capacitor 3 to decay from the maximum voltage V0 to the voltage V1 of 36.8% (see FIG. 2).
  • the output unit 8 has a function of displaying and recording the input charge amount Q value.
  • the capacitance C of the capacitor 3 is 1 [ ⁇ F]
  • the resistance value R of the resistor 5 is 100 [k ⁇ ]
  • the peak detector 6 detects and holds the peak value Vp of the voltage between the terminals of the capacitor 3 as follows.
  • the peak detection unit 6 samples the voltage V across the terminals of the capacitor 3 measured by the voltage measurement unit 4 every sampling time ⁇ t, here 2 [mS]. Then, the sampled inter-terminal voltage V is compared, the peak value Vp is specified, and the peak value Vp is input to the conversion unit 7 .
  • a value of the capacitance C of the capacitor 3 is preset in the conversion unit 7 .
  • the induced charge is allowed to flow through the resistor 5 to ground, so that the measured terminal voltage is not affected by the induced charge as in the prior art.
  • FIG. 2 is a graph of changes in the voltage V across the terminals of the capacitor 3. As shown in FIG. At the instant t0 when the discharge from the charged object 1 occurs, the discharged charge flows into the capacitor 3 at once, and the voltage across the terminals rises to V0. After that, charges flow from the capacitor 3 to the ground through the resistor 5, and the inter-terminal voltage V is attenuated. At time t1 , the voltage is attenuated to 36.8[%] of the maximum voltage V0. The time from time t0 to t1 is the time constant ⁇ .
  • the peak value Vp is specified and held based on 50 samplings within the time constant ⁇ . become.
  • the peak detector 6 detects the peak value Vp by sampling 50 times until the maximum voltage V0 attenuates to V1, so the detected Vp is close to the maximum voltage V0. becomes.
  • the charge amount measurement result using the discharge charge amount measuring device of this embodiment will be described below.
  • a commercially available film capacitor was charged with a known charge amount and used.
  • the amount of charge used in the experiment was -10000 [nC] to +10000 [nC], and the film capacitor was given ⁇ 500 [nC] and ⁇ 1000 [nC] to 1000 [nC] each.
  • the tip 2a of the detection terminal 2 was brought into contact with the charged film capacitor to discharge it, and the amount of discharged charge at that time was measured.
  • the measurement results are as shown in the graph of FIG.
  • the horizontal axis is the charge amount Q1 of the film capacitor
  • the vertical axis is the measured value Qm .
  • the measured value Qm obtained by the discharge charge amount measuring device of the embodiment coincides with the charge amount Q1 of the film capacitor, confirming the reliability of this discharge charge amount measurement device.
  • the discharge charge measuring device of the embodiment since the resistor 5 connected to the ground is provided in parallel with the capacitor 3 and the sampling time ⁇ t is set smaller than the time constant ⁇ , the discharge charge amount can be accurately measured. It became possible. The smaller the sampling time ⁇ t, the closer the value to the maximum voltage V0, that is, the more accurate peak value Vp can be identified. However, if the sampling time ⁇ t is less than the time constant ⁇ , sampling is performed at least once within the time constant ⁇ , and it is considered that sufficient detection accuracy can be obtained. , the accuracy will be further improved. Also, since the time constant ⁇ can be set by the capacitance C and the resistance value R, the time constant ⁇ can be adjusted according to the sampling time ⁇ of the peak detector 6 .
  • the capacitance C of the capacitor 3 must be increased. However, if the capacitance C is too large compared to the amount of discharged charge, the voltage across the terminals may be too small and the detection accuracy may drop. Also, depending on the magnitude of the absolute value of the voltage across the terminals of the capacitor 3, the peak detector 6, the converter 7, and the output unit 8 having corresponding capabilities are required.
  • the capacitance C of the capacitor 3, the resistance value R of the resistor 5, and the sampling time .DELTA.t may be set within a range that satisfies C.times.R>.DELTA.t according to the purpose of use.
  • the peak detector 6 specifies and holds the peak value Vp of the terminal voltage, and then converts that value into the charge amount.
  • the charge amount may be converted as it is, and then the peak value of the charge amount may be detected and held.
  • the conversion section 7 is connected between the voltage measurement section 4 and the peak detection section 6 shown in FIG.
  • the amount of electric charge discharged from a charged object can be measured simply and accurately.
  • Measurement object 2a Tip 3 (of detection terminal) Capacitors 3a, 3b (Capacitor) terminal 4 (Voltage measurement means) Voltage measurement part 5 Resistor 6 (Peak detection means) Peak detection part 7 Conversion part

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Relating To Insulation (AREA)

Abstract

[Problem] To provide a device capable of measuring an electric discharge charge amount more accurately by reducing the impact of an induced voltage. [Solution] This electric discharge charge amount measuring device comprises a detection terminal 2 which is brought into contact with a measurement target object 1, a capacitor 3 having one terminal 3a connected to the detection terminal 2 and another terminal 3b grounded, a resistor 5 connected in parallel with the capacitor 3, a voltage measuring means 4 for measuring a terminal-to-terminal voltage of the capacitor 3, a peak detecting means 6 for detecting a peak value of a voltage value measured by the voltage measuring means 4, and a converting means 7 for converting the peak value detected by the peak detecting means 6 into a charge amount, wherein: the peak detecting means 6 has a function of sampling the terminal-to-terminal voltage measured by the voltage measuring means 4 at each predetermined sampling time Δt, and identifying the maximum value of the sampled voltage value as the peak value; and a capacitance C of the condenser 3, a resistance value R of the resistor 5, and the sampling time Δt are each set so as to satisfy the relationship C×R>Δt.

Description

放電電荷量測定装置Discharge charge measurement device
　この発明は、帯電物体が放電したときの、放電電荷量を測定する放電電荷量測定装置に関する。 The present invention relates to a discharge charge amount measuring device that measures the discharge charge amount when a charged object is discharged.
　従来から、静電気が帯電した物体から放電が発生したときの電荷量を測定する装置が知られている。
　例えば、図４に示す放電電荷量測定装置は、帯電物体１に接近させる検出端子２にコンデンサ３を直列に接続するとともに、コンデンサ３の端子３ａ，３ｂ間の電圧を測定する電圧測定部４を備え、この電圧測定部４が検出した電圧を図示しない変換手段で電荷量に変換している。このような測定装置では、帯電物体１に検出端子２の先端２ａを接近させると、先端２ａと帯電物体１との間の電界が大きくなり、この電界が放電開始電界強度を超えると、帯電物体１から検出端子２に向かう放電が発生する。
　この放電により帯電物体１から検出端子２側へ流れ込んだ電荷はコンデンサ３に充電される。この充電電荷量をコンデンサ３の端子３ａ，３ｂ間の電圧Ｖを測定して検出するようにしている。具体的には、検出された端子間電圧にコンデンサ３の静電容量を掛けて、放電電荷量を算出する。 2. Description of the Related Art Conventionally, there has been known a device for measuring the amount of electric charge when a discharge occurs from an object charged with static electricity.
For example, the discharge charge amount measuring device shown in FIG. In addition, the voltage detected by the voltage measuring unit 4 is converted into a charge amount by conversion means (not shown). In such a measuring device, when the tip 2a of the detection terminal 2 is brought close to the charged object 1, the electric field between the tip 2a and the charged object 1 increases. A discharge is generated from 1 to the detection terminal 2 .
Due to this discharge, the capacitor 3 is charged with the charge that has flowed from the charged object 1 to the detection terminal 2 side. The charge amount is detected by measuring the voltage V across the terminals 3a and 3b of the capacitor 3. FIG. Specifically, the detected inter-terminal voltage is multiplied by the capacitance of the capacitor 3 to calculate the discharge charge amount.
特開２００７－２１２２０８号公報Japanese Patent Application Laid-Open No. 2007-212208
　上記した測定装置は、検出端子２の先端２ａを、帯電物体１に接近させる過程で、帯電物体１の電荷によってコンデンサ３に誘導電圧が発生する。
　例えば、帯電物体１がプラスに帯電していた場合、先端２ａが帯電物体１に近づくと、検出端子２内のマイナス電荷が帯電物体１のプラス電荷に引き付けられる。したがって、コンデンサ３の一方の端子３ａ側にプラスの電荷が誘導されることになる。そのため、コンデンサ３の端子３ａ，３ｂ間にはプラスの誘導電圧が発生する。
　このように、帯電物体１からの放電が発生しなくても、コンデンサ３の端子３ａ，３ｂ間に誘導電圧が発生してしまう。そのため、実際に放電が発生したときの、放電電荷量によって発生するコンデンサの端子３ａ，３ｂ間の電圧が、上記誘導電圧の影響を受け、その結果、放電電荷量を正確に測定できなくなってしまう。 In the measuring apparatus described above, an induced voltage is generated in the capacitor 3 due to the charge of the charged object 1 in the process of bringing the tip 2a of the detection terminal 2 closer to the charged object 1 .
For example, when the charged object 1 is positively charged, when the tip 2 a approaches the charged object 1 , the negative charge in the detection terminal 2 is attracted to the positive charge of the charged object 1 . Therefore, a positive charge is induced to one terminal 3a side of the capacitor 3. FIG. Therefore, a positive induced voltage is generated between the terminals 3 a and 3 b of the capacitor 3 .
In this way, an induced voltage is generated between the terminals 3a and 3b of the capacitor 3 even if the charged object 1 does not discharge. Therefore, the voltage between the terminals 3a and 3b of the capacitor generated by the discharge charge amount when the discharge actually occurs is affected by the above induced voltage, and as a result, the discharge charge amount cannot be measured accurately. .
　この発明の目的は、測定対象物の放電電荷量を正確、簡単に測定できる放電電荷量測定装置を提供することである。 An object of the present invention is to provide a discharge charge amount measuring device that can accurately and easily measure the discharge charge amount of an object to be measured.
　第１の発明は、静電気帯電した測定対象物に接近させる検出端子と、一方の端子が上記検出端子に接続されるとともに他方の端子が接地されたコンデンサと、上記コンデンサに並列に接続された抵抗体と、上記コンデンサの端子間電圧を測定する電圧測定手段と、上記電圧測定手段で測定された電圧値のピーク値を検出するピーク検出手段と、上記ピーク検出手段で検出された上記ピーク値を電荷量に変換する変換手段とを備え、上記ピーク検出手段は、予め設定されたサンプリング時間Δｔごとに上記電圧測定手段で測定された端子間電圧をサンプリングし、サンプリングした電圧値の最高値をピーク値として特定する機能を備えるとともに、上記コンデンサの静電容量Ｃ、上記抵抗体の抵抗値Ｒ、及び上記サンプリング時間Δｔのそれぞれは、Ｃ×Ｒ＞Δｔを満足する範囲で設定されている。 A first invention comprises a detection terminal brought close to an electrostatically charged object to be measured, a capacitor having one terminal connected to the detection terminal and the other terminal grounded, and a resistor connected in parallel to the capacitor. voltage measuring means for measuring the voltage across the terminals of the capacitor; peak detecting means for detecting a peak value of the voltage value measured by the voltage measuring means; and detecting the peak value detected by the peak detecting means. The peak detecting means samples the inter-terminal voltage measured by the voltage measuring means every preset sampling time Δt, and peaks the highest sampled voltage value. The capacitance C of the capacitor, the resistance value R of the resistor, and the sampling time Δt are each set within a range that satisfies C×R>Δt.
　第２の発明は、静電気帯電した測定対象物に接触させる検出端子と、上記検出端子に接続され、上記測定対象物からの放電電荷を蓄積するコンデンサと、上記コンデンサに並列に接続された抵抗体と、上記コンデンサの端子間電圧を測定する電圧測定手段と、上記電圧測定手段で測定された電圧値を電荷量に変換する変換手段と上記変換手段で変換された電荷量のピーク値を検出するピーク検出手段とを備え、上記ピーク検出手段は、予め設定されたサンプリング時間Δｔごとに上記変換手段で変換された電荷量をサンプリングし、サンプリングした電荷量の最高値をピーク値として特定する機能を備えるとともに、上記コンデンサの静電容量Ｃ、上記抵抗体の抵抗値Ｒ、及び上記サンプリング時間Δｔのそれぞれは、Ｃ・Ｒ＞Δｔを満足する範囲で設定されている。 A second invention comprises a detection terminal that is brought into contact with an electrostatically charged object to be measured, a capacitor that is connected to the detection terminal and stores the discharge charge from the object to be measured, and a resistor that is connected in parallel to the capacitor. a voltage measuring means for measuring the voltage across the terminals of the capacitor; a converting means for converting the voltage value measured by the voltage measuring means into a charge amount; and a peak value of the charge amount converted by the converting means. peak detection means, wherein the peak detection means has a function of sampling the charge amount converted by the conversion means at each preset sampling time Δt and specifying the maximum value of the sampled charge amount as the peak value. In addition, each of the capacitance C of the capacitor, the resistance value R of the resistor, and the sampling time Δt is set within a range that satisfies CR>Δt.
　第３の発明は、上記静電容量Ｃと上記抵抗値Ｒ、及び上記サンプリング時間Δｔが、Ｃ・Ｒ≧５０×Δｔを満足する。 In the third invention, the capacitance C, the resistance value R, and the sampling time Δt satisfy C·R≧50×Δt.
　第４の発明は、上記静電容量Ｃ及び上記抵抗値Ｒがβ≧Ｃ×Ｒであり、上記βが１０－3［秒］≦β≦１［秒］である。 In a fourth invention, the capacitance C and the resistance value R satisfy β≧C×R, and β satisfies 10 −3 [seconds]≦β≦1 [seconds].
　第１，２の発明によれば、帯電物体に検出端子を近づける過程で誘導される電荷を、抵抗体を介してアースへ逃がすことができるので、放電によって発生するコンデンサの端子間電圧が誘導電圧の影響を受けることを防止できる。さらに、コンデンサの静電容量Ｃ及び抵抗体の抵抗値Ｒを、コンデンサの端子間電圧の減衰時定数が、サンプリング時間Δｔより大きくなるように設定しているので、コンデンサの端子間電圧のピーク値をより正確に特定することができる。その結果、コンデンサに蓄積された電荷量を正確に測定することができる。 According to the first and second inventions, the electric charge induced in the process of bringing the detection terminal close to the charged object can be released to the ground through the resistor. can be prevented from being affected by Furthermore, since the capacitance C of the capacitor and the resistance value R of the resistor are set so that the attenuation time constant of the voltage across the capacitor is greater than the sampling time Δt, the peak value of the voltage across the capacitor can be specified more accurately. As a result, the amount of charge stored in the capacitor can be accurately measured.
　第３の発明によれば、電圧のピーク値をより正確に検出でき、放電電荷量を正確に測定できる。 According to the third invention, the voltage peak value can be detected more accurately, and the discharge charge amount can be accurately measured.
　第４の発明によれば、コンデンサに蓄積された電荷が速やかに減衰し、連続的な測定が可能になる。 According to the fourth invention, the charge accumulated in the capacitor is rapidly attenuated, enabling continuous measurement.
図１は、実施形態の放電電荷量測定装置の回路図である。FIG. 1 is a circuit diagram of a discharge charge amount measuring device according to an embodiment. 図２は、コンデンサの端子間電圧の変化を示したグラフである。FIG. 2 is a graph showing changes in voltage between terminals of a capacitor. 図３は、実施形態の放電電荷量測定装置を用いた電荷量の測定結果を示したグラフである。FIG. 3 is a graph showing the results of charge amount measurement using the discharge charge amount measuring device of the embodiment. 図４は、従来の電荷量測定装置の回路図である。FIG. 4 is a circuit diagram of a conventional electric charge measuring device.
［実施形態］
　この発明の一実施形態を説明する。図１は、実施形態の放電電荷量測定装置の回路図、図２は実施形態のコンデンサの端子間電圧の変化を示すグラフ、図３は、実施形態の放電電荷量測定装置を用いた電荷量の測定結果を示したグラフである。 [Embodiment]
An embodiment of the invention will be described. FIG. 1 is a circuit diagram of a discharge charge amount measuring device according to an embodiment, FIG. 2 is a graph showing changes in voltage between terminals of a capacitor according to an embodiment, and FIG. is a graph showing the measurement results of
　この実施形態の放電電荷量測定装置は、図１に示すように、先端２ａをコロナ放電が発生しにくい形状にした検出端子２を備え、この検出端子２に一方の端子３ａを接続するとともに他方の端子３ｂを接地させたコンデンサ３を備えている。そして、従来と同様に、コンデンサ３の端子間電圧を測定する電圧測定手段である電圧測定部４を備えている。ただし、この実施形態では、コンデンサ３に並列に抵抗体５が接続されている。 As shown in FIG. 1, the discharge charge amount measuring apparatus of this embodiment includes a detection terminal 2 having a tip 2a shaped to prevent corona discharge. is provided with a capacitor 3 whose terminal 3b is grounded. And, as in the conventional case, a voltage measuring section 4, which is voltage measuring means for measuring the voltage across the terminals of the capacitor 3, is provided. However, in this embodiment, a resistor 5 is connected in parallel with the capacitor 3 .
　そして、上記コンデンサ３の静電容量はＣ［Ｆ］、抵抗体５の抵抗値はＲ［Ω］である。
　なお、上記コロナ放電が発生しにくい形状とは、帯電物体１からの放電が尖端などの周りで持続するコロナ放電にならないような形状である。具体的には、直径が２０［ｍｍ］以上の球形である。このように検出端子２の先端２ａの直径を大きくすることで球表面の曲率が小さくなり、検出端子２の先端２ａを帯電物体１に接近させても、帯電物体１からの電界が先端２ａの球形表面の一箇所に集中しなくなる。そのため、検出端子２の先端２ａ付近でコロナ放電が発生しにくくなり、帯電物体１からはパルス状の放電が発生する。 The capacitance of the capacitor 3 is C [F], and the resistance value of the resistor 5 is R [Ω].
The shape in which the corona discharge is unlikely to occur is a shape in which the discharge from the charged object 1 does not become a corona discharge that persists around a tip or the like. Specifically, it is spherical with a diameter of 20 [mm] or more. By increasing the diameter of the tip 2a of the detection terminal 2 in this way, the curvature of the spherical surface is reduced, and even if the tip 2a of the detection terminal 2 is brought close to the charged object 1, the electric field from the charged object 1 is generated at the tip 2a. It is no longer concentrated on one point on the spherical surface. Therefore, corona discharge is less likely to occur near the tip 2a of the detection terminal 2, and a pulsed discharge is generated from the charged object 1. FIG.
　もし、検出端子２の曲率を大きくすると、帯電物体１からの電界が検出端子２の球面の一箇所に集中して、パルス状の放電が発生する前にコロナ放電が発生してしまう。このような場合には、帯電物体１の帯電電荷をコロナ放電によって逃がした後に発生したパルス状の放電の放電電荷量を測定することになるため、帯電物体１が保持していた電荷量に相当する、パルス状の放電の放電電荷量を正確に測定できない。つまり、この実施形態で、検出端子２の先端２ａをコロナ放電が発生し難い形状にしたのは、帯電物体１から発生する一つのパルス状の放電の放電電荷量の測定を可能にするためである。したがって、帯電物体１と対向する側の面が、曲率が小さい曲面などでとがった部分を持たなければ、検出端子２の先端２ａは球形でなくてもよい。 If the curvature of the detection terminal 2 is increased, the electric field from the charged object 1 will be concentrated at one point on the spherical surface of the detection terminal 2, and corona discharge will occur before the pulse-like discharge occurs. In such a case, since the amount of pulsed discharge generated after the charged charge of the charged object 1 is released by corona discharge is measured, it corresponds to the amount of charge held by the charged object 1. However, it is not possible to accurately measure the discharge charge amount of the pulsed discharge. In other words, in this embodiment, the tip 2a of the detection terminal 2 has a shape that makes it difficult for corona discharge to occur in order to enable measurement of the discharge charge amount of one pulse-like discharge generated from the charged object 1. be. Therefore, the tip 2a of the detection terminal 2 does not have to be spherical unless the surface facing the charged object 1 has a curved surface with a small curvature and does not have a sharp portion.
　また、上記電圧測定部４には、電圧測定部４が測定した電圧値のピーク値を検出して保持するピーク検出手段であるピーク検出部６が接続され、このピーク検出部６で検出された電圧のピーク値を電荷量に変換する変換部７（変換手段）が接続されている。さらに、変換部７が変換した電荷量の値を出力する出力部８を備えている。 Further, the voltage measurement unit 4 is connected to a peak detection unit 6 which is a peak detection means for detecting and holding the peak value of the voltage value measured by the voltage measurement unit 4. A conversion unit 7 (conversion means) that converts the peak value of the voltage into the amount of charge is connected. Further, an output unit 8 is provided for outputting the value of the amount of charge converted by the conversion unit 7 .
　上記電圧測定部４は、コンデンサ３の端子３ａ，３ｂ間の電圧を連続して検出する機能を備えている。ピーク検出部６は、電圧測定部４で検出された電圧値をサンプリング時間Δｔで繰り返しサンプリングし、最高値をピーク値Ｖｐとして特定する機能を備えている。具体的には、ピーク検出部６は、測定開始時に電圧値Ｖ１をサンプリングしてその電圧値Ｖ１を保持し、そのサンプリング時間Δｔ後に再度、電圧値Ｖ２をサンプリングするとともに、この電圧値Ｖ２とＶ１とを比較して、大きい方の値を保持し、他方を消去することを一定時間繰り返し、その間の最大値をピーク値Ｖｐとして特定する。 The voltage measuring section 4 has a function of continuously detecting the voltage between the terminals 3 a and 3 b of the capacitor 3 . The peak detection unit 6 has a function of repeatedly sampling the voltage value detected by the voltage measurement unit 4 at a sampling time Δt and specifying the highest value as the peak value Vp. Specifically, the peak detector 6 samples the voltage value V1 at the start of measurement, holds the voltage value V1, samples the voltage value V2 again after the sampling time Δt, and also samples the voltage value V2 . The process of comparing V2 and V1 , holding the larger value and erasing the other is repeated for a certain period of time, and the maximum value during that period is specified as the peak value Vp.
　そして、この実施形態の放電電荷量測定装置においては、Ｃ×Ｒ≧サンプリング時間Δｔとなるようにしている。
　上記Ｃ×Ｒは、放電電荷が充電されることによって上昇したコンデンサ３の端子間電圧が、最大電圧Ｖ０から減衰する際の時定数τ［Ｓ］に相当する。時定数τは、指数関数的に減衰するコンデンサ３の端子間電圧が最大電圧Ｖ０から、その３６．８％の電圧Ｖ１まで減衰する時間である（図２参照）。 In the discharge charge amount measuring device of this embodiment, C×R≧sampling time Δt.
The above C×R corresponds to the time constant τ [S] when the voltage across the terminals of the capacitor 3, which has increased due to the charging of the discharged electric charge, attenuates from the maximum voltage V0. The time constant τ is the time for the exponentially decaying voltage across the terminals of the capacitor 3 to decay from the maximum voltage V0 to the voltage V1 of 36.8% (see FIG. 2).
　また、上記変換部７は、ピーク検出部６で特定し保持された電圧のピーク値Ｖｐを電荷量Ｑに変換して出力部８に対して出力する。変換部７は、上記ピーク値Ｖｐと上記コンデンサ３の静電容量Ｃとに基づいて、電荷量Ｑ＝Ｃ×Ｖｐを算出する。
　出力部８は、入力された電荷量Ｑの値を表示したり、記録したりする機能を備えている。
　なお、この実施形態では、コンデンサ３の静電容量Ｃ＝１［μＦ］、抵抗体５の抵抗値Ｒ＝１００［ｋΩ］、サンプリング時間Δｔ＝２［ｍＳ］とする。つまり、この実施形態では、時定数τ＝Ｃ×Ｒが、サンプリング時間Δｔの５０倍にしている。 Further, the conversion section 7 converts the voltage peak value Vp specified and held by the peak detection section 6 into a charge amount Q and outputs the charge amount Q to the output section 8 . Based on the peak value Vp and the capacitance C of the capacitor 3, the conversion unit 7 calculates the amount of charge Q=C×Vp.
The output unit 8 has a function of displaying and recording the input charge amount Q value.
In this embodiment, the capacitance C of the capacitor 3 is 1 [μF], the resistance value R of the resistor 5 is 100 [kΩ], and the sampling time Δt is 2 [mS]. That is, in this embodiment, the time constant τ=C×R is 50 times the sampling time Δt.
［作用・効果等］
　上記のように構成されたこの実施形態の放電電荷量測定装置の作用等を説明する。
　帯電物体１の放電電荷量を測定する際には、帯電物体１からの放電が発生する距離まで、検出端子２の先端２ａを帯電物体１の表面に近づける。
　この過程で、帯電物体１の電荷によって、検出端子２内において帯電物体１と逆極性の電荷が引き付けられ、コンデンサ３の一方の端子３ａには帯電物体１と同極性の電荷が誘導される。しかし、この実施形態では、コンデンサ３に並列に抵抗体５が接続されているので、コンデンサ３に蓄積された電荷は抵抗体５を介して接地へ流れる。
　このように誘導電荷は接地へ流れるので、誘導電荷によるコンデンサ３の端子３ａ，３ｂ間の電圧はほとんど上昇せず、ほぼゼロに保たれる。 [Action, effect, etc.]
The operation and the like of the discharge charge amount measuring device of this embodiment configured as described above will be described.
When measuring the discharge charge amount of the charged object 1, the tip 2a of the detection terminal 2 is brought close to the surface of the charged object 1 to a distance at which the discharge from the charged object 1 occurs.
In this process, the charge of the charged object 1 attracts the charge of the opposite polarity to that of the charged object 1 in the detection terminal 2 , and the charge of the same polarity as that of the charged object 1 is induced to one terminal 3 a of the capacitor 3 . However, in this embodiment, since the resistor 5 is connected in parallel with the capacitor 3, the charge accumulated in the capacitor 3 flows through the resistor 5 to the ground.
Since the induced charge thus flows to the ground, the voltage between the terminals 3a and 3b of the capacitor 3 due to the induced charge hardly rises and is kept substantially zero.
　上記先端２ａが一定以上近づくと、帯電物体１からパルス状の放電が発生し、瞬間的に放電電荷が検出端子２から流れ込んでコンデンサ３が充電される。このときコンデンサ３に蓄積された電荷は放電によるもので、誘導電荷による誘導電圧の影響をほとんど受けない。したがって、コンデンサ３の端子間電圧を測定することで、対応する放電電荷量を特定することができる。 When the tip 2a approaches more than a certain amount, a pulsed discharge is generated from the charged object 1, and the discharged charge instantaneously flows from the detection terminal 2 to charge the capacitor 3. The charge accumulated in the capacitor 3 at this time is due to the discharge, and is hardly affected by the induced voltage due to the induced charge. Therefore, by measuring the voltage across the terminals of the capacitor 3, the corresponding discharge charge amount can be specified.
　また、コンデンサ３に一旦蓄積された放電電荷も、時間とともに抵抗体５を介して接地へ流れてしまうため、コンデンサ３の端子間電圧Ｖは、図２のように減衰してしまう。そこで、ピーク検出部６は、次のようにしてコンデンサ３の端子間電圧のピーク値Ｖｐを検出して保持する。
　ピーク検出部６は、上記電圧測定部４が測定したコンデンサ３の端子間電圧Ｖを、サンプリング時間Δｔ、ここでは２［ｍＳ］ごとにサンプリングする。そして、サンプリングした端子間電圧Ｖを対比し、ピーク値Ｖｐを特定して変換部７へ入力する。 Moreover, the discharge charge once accumulated in the capacitor 3 also flows to the ground via the resistor 5 over time, so the voltage V across the terminals of the capacitor 3 attenuates as shown in FIG. Therefore, the peak detector 6 detects and holds the peak value Vp of the voltage between the terminals of the capacitor 3 as follows.
The peak detection unit 6 samples the voltage V across the terminals of the capacitor 3 measured by the voltage measurement unit 4 every sampling time Δt, here 2 [mS]. Then, the sampled inter-terminal voltage V is compared, the peak value Vp is specified, and the peak value Vp is input to the conversion unit 7 .
　ピーク検出部６が特定して保持したピーク値Ｖｐが入力された変換部７は、上記ピーク値Ｖｐにコンデンサ３の静電容量Ｃを掛けて電荷量を算出し、出力部８に出力させる。上記変換部７には、コンデンサ３の静電容量Ｃの値が予め設定されている。
　この実施形態では、誘導電荷が抵抗体５を介して接地へ流れるようにしているので、測定される端子間電圧が、従来のように誘導電荷の影響を受けない。 The conversion unit 7, to which the peak value Vp specified and held by the peak detection unit 6 is input, multiplies the peak value Vp by the capacitance C of the capacitor 3 to calculate the amount of charge, and causes the output unit 8 to output the charge amount. A value of the capacitance C of the capacitor 3 is preset in the conversion unit 7 .
In this embodiment, the induced charge is allowed to flow through the resistor 5 to ground, so that the measured terminal voltage is not affected by the induced charge as in the prior art.
　また、ピーク検出部６のサンプリング時間Δｔを、コンデンサ３の静電容量Ｃと抵抗体５の抵抗値Ｒとの積である時定数τの５０分の１にしているので、ピーク値Ｖｐを正確に検出できる。
　その理由を以下に説明する。
　図２は、コンデンサ３の端子間電圧Ｖの変化のグラフである。帯電物体１からの放電が発生した瞬間ｔ０に、放電電荷がコンデンサ３に一気に流れ込んで端子間の電圧がＶ０まで上昇する。その後、コンデンサ３から抵抗体５を介して電荷が接地へ流れて、端子間電圧Ｖが減衰する。そして、時刻ｔ１で、最大電圧Ｖ０の３６．８［％］まで減衰する。この時刻ｔ０からｔ１までの時間が、上記時定数τである。 Further, since the sampling time Δt of the peak detector 6 is set to 1/50 of the time constant τ which is the product of the capacitance C of the capacitor 3 and the resistance value R of the resistor 5, the peak value Vp can be accurately detected. can be detected.
The reason is explained below.
FIG. 2 is a graph of changes in the voltage V across the terminals of the capacitor 3. As shown in FIG. At the instant t0 when the discharge from the charged object 1 occurs, the discharged charge flows into the capacitor 3 at once, and the voltage across the terminals rises to V0. After that, charges flow from the capacitor 3 to the ground through the resistor 5, and the inter-terminal voltage V is attenuated. At time t1 , the voltage is attenuated to 36.8[%] of the maximum voltage V0. The time from time t0 to t1 is the time constant τ.
　このように端子間電圧Ｖが減衰する過程で、ピーク検出部６がサンプリング時間Δｔ＝２［ｍＳ］ごとに端子間電圧Ｖをサンプリングする。
　一方、コンデンサ３の端子間電圧が減衰する時定数は、τ＝１００［ｍＳ］である。これに対し、ピーク検出部６は、上記サンプリング時間Δｔ＝２［ｍＳ］でサンプリングを実行するため、時定数τの時間内に５０回のサンプリングに基づいてピーク値Ｖｐが特定され保持されることになる。
　このように、最大電圧Ｖ０がＶ１まで減衰するまでの間に５０回のサンプリングを行なってピーク検出部６がピーク値Ｖｐを検出することになるので、検出されたＶｐは最大電圧Ｖ０に近いものとなる。 While the terminal voltage V is attenuating in this manner, the peak detector 6 samples the terminal voltage V every sampling time Δt=2 [mS].
On the other hand, the time constant at which the voltage across the terminals of the capacitor 3 attenuates is τ=100 [mS]. On the other hand, since the peak detection unit 6 performs sampling at the sampling time Δt=2 [mS], the peak value Vp is specified and held based on 50 samplings within the time constant τ. become.
Thus, the peak detector 6 detects the peak value Vp by sampling 50 times until the maximum voltage V0 attenuates to V1, so the detected Vp is close to the maximum voltage V0. becomes.
　以下に、この実施形態の放電電荷量測定装置を用いた電荷量測定結果を説明する。
　この実験では、上記帯電物体１の代わりに、市販のフィルムコンデンサに既知の値の電荷量を充電して用いた。実験で用いた電荷量は－１００００［ｎＣ］～＋１００００［ｎＣ］で、フィルムコンデンサには、±５００［ｎＣ］と、±１０００［ｎＣ］から１０００［ｎＣ］ずつを与えた。
　そして、充電したフィルムコンデンサに検出端子２の先端２ａを接触させて放電させ、その時の放電電荷量を測定した。 The charge amount measurement result using the discharge charge amount measuring device of this embodiment will be described below.
In this experiment, instead of the charged object 1, a commercially available film capacitor was charged with a known charge amount and used. The amount of charge used in the experiment was -10000 [nC] to +10000 [nC], and the film capacitor was given ±500 [nC] and ±1000 [nC] to 1000 [nC] each.
Then, the tip 2a of the detection terminal 2 was brought into contact with the charged film capacitor to discharge it, and the amount of discharged charge at that time was measured.
　この測定結果は、図３のグラフに示すとおりである。このグラフは、横軸をフィルムコンデンサの充電電荷量Ｑ１とし、縦軸を測定値Ｑｍとしている。
　図３に示すように、実施形態の放電電荷量測定装置による測定値Ｑｍとフィルムコンデンサの充電電荷量Ｑ１とは一致し、この放電電荷量測定装置の信頼性が確認できた。 The measurement results are as shown in the graph of FIG. In this graph, the horizontal axis is the charge amount Q1 of the film capacitor, and the vertical axis is the measured value Qm .
As shown in FIG. 3, the measured value Qm obtained by the discharge charge amount measuring device of the embodiment coincides with the charge amount Q1 of the film capacitor, confirming the reliability of this discharge charge amount measurement device.
　実施形態の放電電荷測定装置では、コンデンサ３と並列に、接地に接続された抵抗体５を設けるとともに、時定数τに比べてサンプリング時間Δｔを小さくしているため、放電電荷量を精度よく測定できるようになった。
　サンプリング時間Δｔは、小さければ小さいほどより最大電圧Ｖ０に近い値、つまり正確なピーク値Ｖｐを特定できることになる。ただし、サンプリング時間Δｔが時定数τ未満であれば、少なくとも１回は時定数τ内でのサンプリングが実行され、十分な検出精度が得られると考えられるが、上記のように５０分の１ならば、さらに精度が上がる。
　また、時定数τは、静電容量Ｃ及び抵抗値Ｒによって設定できるので、ピーク検出部６のサンプリング時間Δτに応じて時定数τを調整することもできる。 In the discharge charge measuring device of the embodiment, since the resistor 5 connected to the ground is provided in parallel with the capacitor 3 and the sampling time Δt is set smaller than the time constant τ, the discharge charge amount can be accurately measured. It became possible.
The smaller the sampling time Δt, the closer the value to the maximum voltage V0, that is, the more accurate peak value Vp can be identified. However, if the sampling time Δt is less than the time constant τ, sampling is performed at least once within the time constant τ, and it is considered that sufficient detection accuracy can be obtained. , the accuracy will be further improved.
Also, since the time constant τ can be set by the capacitance C and the resistance value R, the time constant τ can be adjusted according to the sampling time Δτ of the peak detector 6 .
　ただし、繰り返し電荷量を測定する際には、コンデンサ３に蓄積された電荷をその都度すべて接地へ流さなければならない。したがって、時定数τが大きすぎて、上記端子間電圧の減衰時間を長く設定された測定装置は、繰り返しの電荷量測定には適さない。
　上記端子間電圧Ｖが最大電圧Ｖ０からほぼゼロになるまでの時間は、時定数τの約５倍であるので、例えば、上記のように時定数τ＝１００［ｍＳ］ならば、約５００［ｍＳ］でコンデンサ３が空になる。また、時定数τ＝２００［ｍＳ］でも、約１［Ｓ］で、コンデンサ３が空になるので、１［Ｓ］間隔での測定も可能になる。 However, when repeatedly measuring the amount of electric charge, the electric charge accumulated in the capacitor 3 must all flow to the ground each time. Therefore, the measuring device in which the time constant τ is too large and the attenuation time of the terminal voltage is set long is not suitable for repeated charge measurement.
Since the time required for the voltage V between the terminals to become substantially zero from the maximum voltage V0 is about five times the time constant τ, for example, if the time constant τ=100 [mS] as described above, then about 500 [ mS], the capacitor 3 is emptied. Also, even with the time constant τ=200 [mS], the capacitor 3 becomes empty at about 1 [S], so measurement at intervals of 1 [S] is possible.
　さらに、大きな放電電荷量を測定するためには、コンデンサ３の静電容量Ｃを大きくしなければならない。しかし、静電容量Ｃが放電電荷量と比べて大きすぎる場合には、端子間電圧が小さすぎて、検出精度が落ちてしまうこともある。また、コンデンサ３の端子間電圧の絶対値の大きさによって、対応する能力を有するピーク検出部６や変換部７、出力部８が必要になる。 Furthermore, in order to measure a large discharge charge amount, the capacitance C of the capacitor 3 must be increased. However, if the capacitance C is too large compared to the amount of discharged charge, the voltage across the terminals may be too small and the detection accuracy may drop. Also, depending on the magnitude of the absolute value of the voltage across the terminals of the capacitor 3, the peak detector 6, the converter 7, and the output unit 8 having corresponding capabilities are required.
　したがって、上記コンデンサ３の静電容量Ｃ、上記抵抗体５の抵抗値Ｒ、及び上記サンプリング時間Δｔのそれぞれは、使用目的などに応じ、Ｃ×Ｒ>Δｔを満足する範囲で設定すればよい。
　なお、上記実施形態では、ピーク検出部６が、端子間電圧のピーク値Ｖｐを特定して保持した後に、その値を電荷量に変換するようにしているが、電圧測定部４の測定値をそのまま電荷量に変換し、その後、電荷量のピーク値を検出して保持するようにしてもよい。
　この場合には、図１に示す電圧測定部４とピーク検出部６との間に変換部７が接続される。 Therefore, the capacitance C of the capacitor 3, the resistance value R of the resistor 5, and the sampling time .DELTA.t may be set within a range that satisfies C.times.R>.DELTA.t according to the purpose of use.
In the above embodiment, the peak detector 6 specifies and holds the peak value Vp of the terminal voltage, and then converts that value into the charge amount. Alternatively, the charge amount may be converted as it is, and then the peak value of the charge amount may be detected and held.
In this case, the conversion section 7 is connected between the voltage measurement section 4 and the peak detection section 6 shown in FIG.
　帯電物体からの放電電荷量を、簡単かつ正確に測定することができる。 The amount of electric charge discharged from a charged object can be measured simply and accurately.
１　　測定対象物
２　　検出端子
２ａ　　（検出端子の）先端
３　　コンデンサ
３ａ，３ｂ　　（コンデンサの）端子
４　　（電圧測定手段）電圧測定部
５　　抵抗体
６　　（ピーク検出手段）ピーク検出部
７　　変換部 1 Measurement object 2 Detection terminal 2a Tip 3 (of detection terminal) Capacitors 3a, 3b (Capacitor) terminal 4 (Voltage measurement means) Voltage measurement part 5 Resistor 6 (Peak detection means) Peak detection part 7 Conversion part

Claims (4)

  1. 　静電気帯電した測定対象物に接触させる検出端子と、
    一方の端子が上記検出端子に接続されるとともに他方の端子が接地されたコンデンサと、
    上記コンデンサに並列に接続された抵抗体と、
    上記コンデンサの端子間電圧を測定する電圧測定手段と、
    上記電圧測定手段で測定された電圧値のピーク値を検出するピーク検出手段と、
    上記ピーク検出手段で検出された上記ピーク値を電荷量に変換する変換手段と
    を備え、
    上記ピーク検出手段は、予め設定されたサンプリング時間Δｔごとに上記電圧測定手段で測定された端子間電圧をサンプリングし、サンプリングした電圧値の最高値をピーク値として特定する機能を備えるとともに、
    上記コンデンサの静電容量Ｃ、上記抵抗体の抵抗値Ｒ、及び上記サンプリング時間Δｔのそれぞれは、Ｃ×Ｒ＞Δｔを満足する範囲で設定された放電電荷量測定装置。     a detection terminal that is brought into contact with an electrostatically charged object to be measured;
    a capacitor having one terminal connected to the detection terminal and the other terminal grounded;
    a resistor connected in parallel with the capacitor;
    voltage measuring means for measuring the voltage across the terminals of the capacitor;
    a peak detection means for detecting a peak value of the voltage value measured by the voltage measurement means;
    conversion means for converting the peak value detected by the peak detection means into a charge amount,
    The peak detection means has a function of sampling the inter-terminal voltage measured by the voltage measurement means at each preset sampling time Δt and specifying the maximum value of the sampled voltage values as a peak value,
    A discharge charge amount measuring device, wherein each of the capacitance C of the capacitor, the resistance value R of the resistor, and the sampling time Δt is set within a range satisfying C×R>Δt.
  2. 　静電気帯電した測定対象物に接触させる検出端子と、
    一方の端子が上記検出端子に接続されるとともに他方の端子が接地されたコンデンサと、
    上記コンデンサに並列に接続された抵抗体と、
    上記コンデンサの端子間電圧を測定する電圧測定手段と、
    上記電圧測定手段で測定された電圧値を電荷量に変換する変換手段と
    上記変換手段で変換された電荷量のピーク値を検出するピーク検出手段と
    を備え、
    上記ピーク検出手段は、予め設定されたサンプリング時間Δｔごとに上記変換手段で変換された電荷量をサンプリングし、サンプリングした電荷量の最高値をピーク値として特定する機能を備えるとともに、
    上記コンデンサの静電容量Ｃ、上記抵抗体の抵抗値Ｒ、及び上記サンプリング時間Δｔのそれぞれは、Ｃ・Ｒ＞Δｔを満足する範囲で設定された放電電荷量測定装置。     a detection terminal that is brought into contact with an electrostatically charged object to be measured;
    a capacitor having one terminal connected to the detection terminal and the other terminal grounded;
    a resistor connected in parallel with the capacitor;
    voltage measuring means for measuring the voltage across the terminals of the capacitor;
    conversion means for converting the voltage value measured by the voltage measurement means into a charge amount; and peak detection means for detecting a peak value of the charge amount converted by the conversion means,
    The peak detection means has a function of sampling the amount of charge converted by the conversion means every preset sampling time Δt and specifying the maximum value of the sampled amount of charge as a peak value,
    The discharge charge amount measuring device, wherein each of the capacitance C of the capacitor, the resistance value R of the resistor, and the sampling time Δt is set within a range satisfying C·R>Δt.
  3. 　上記静電容量Ｃと上記抵抗値Ｒ、及び上記サンプリング時間Δｔは、
    Ｃ・Ｒ≧５０×Δｔを満足する請求項１又は２に記載の放電電荷量測定装置。     The capacitance C, the resistance value R, and the sampling time Δt are
    3. The discharge charge measuring device according to claim 1, wherein C·R≧50×Δt is satisfied.
  4. 　上記静電容量Ｃ及び上記抵抗値Ｒとはβ≧Ｃ×Ｒであり、
    上記βは１０－3［秒］≦β≦１［秒］である請求項１～３のいずれか１に記載の放電電荷力測定装置。     The capacitance C and the resistance value R are β≧C×R,
    4. The discharge charge force measuring device according to any one of claims 1 to 3, wherein said β satisfies 10 -3 [seconds] ≤ β ≤ 1 [seconds].
PCT/JP2022/032087 2021-08-30 2022-08-25 Electric discharge charge amount measuring device WO2023032814A1 (en)

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08304500A (en) * 1995-05-15 1996-11-22 Shishido Seidenki Kk Charged voltage meter
US5754056A (en) * 1996-04-23 1998-05-19 David Sarnoff Research Center, Inc. Charge detector with long integration time
JPH10197482A (en) * 1997-01-07 1998-07-31 Toto Ltd Ion detector
JP2000081468A (en) * 1998-09-07 2000-03-21 Nec Corp Electrostatic breakdown test device
JP2001042644A (en) * 1999-07-30 2001-02-16 Hitachi Ltd Image forming device and method
JP2007212208A (en) * 2006-02-08 2007-08-23 Kasuga Electric Works Ltd Apparatus for measuring charge quantity
JP2008076213A (en) * 2006-09-21 2008-04-03 Denki Kagaku Kogyo Kk Charging potential measuring probe, and charging potential distribution measuring system and charging potential distribution measuring device using probe
JP2016017873A (en) * 2014-07-09 2016-02-01 早田　裕 Discharge current measuring device
CN111766458A (en) * 2020-06-03 2020-10-13 国网山东省电力公司莱芜供电公司 Current integration-based method for measuring accumulated charges of insulating materials of direct-current high-voltage equipment

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08304500A (en) * 1995-05-15 1996-11-22 Shishido Seidenki Kk Charged voltage meter
US5754056A (en) * 1996-04-23 1998-05-19 David Sarnoff Research Center, Inc. Charge detector with long integration time
JPH10197482A (en) * 1997-01-07 1998-07-31 Toto Ltd Ion detector
JP2000081468A (en) * 1998-09-07 2000-03-21 Nec Corp Electrostatic breakdown test device
JP2001042644A (en) * 1999-07-30 2001-02-16 Hitachi Ltd Image forming device and method
JP2007212208A (en) * 2006-02-08 2007-08-23 Kasuga Electric Works Ltd Apparatus for measuring charge quantity
JP2008076213A (en) * 2006-09-21 2008-04-03 Denki Kagaku Kogyo Kk Charging potential measuring probe, and charging potential distribution measuring system and charging potential distribution measuring device using probe
JP2016017873A (en) * 2014-07-09 2016-02-01 早田　裕 Discharge current measuring device
CN111766458A (en) * 2020-06-03 2020-10-13 国网山东省电力公司莱芜供电公司 Current integration-based method for measuring accumulated charges of insulating materials of direct-current high-voltage equipment

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