WO2023026990A1 - Filter device and composite filter device - Google Patents

Filter device and composite filter device Download PDF

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Publication number
WO2023026990A1
WO2023026990A1 PCT/JP2022/031418 JP2022031418W WO2023026990A1 WO 2023026990 A1 WO2023026990 A1 WO 2023026990A1 JP 2022031418 W JP2022031418 W JP 2022031418W WO 2023026990 A1 WO2023026990 A1 WO 2023026990A1
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WIPO (PCT)
Prior art keywords
filter device
arm resonator
ground
wiring
parallel arm
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PCT/JP2022/031418
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French (fr)
Japanese (ja)
Inventor
直樹 大島
直人 吉田
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株式会社村田製作所
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Publication of WO2023026990A1 publication Critical patent/WO2023026990A1/en

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72—Networks using surface acoustic waves

Definitions

  • the present invention relates to a filter device and a composite filter device.
  • Ladder filters are used as a transmission filter and a reception filter in the duplexer described in Patent Document 1 below.
  • the shield electrode extends to near the antenna port.
  • the shield electrode is connected to the ground electrode.
  • the shield electrode extends to the vicinity of the antenna port, thereby improving isolation characteristics.
  • the duplexer deteriorates in pass characteristics.
  • An object of the present invention is to provide a filter device and a composite filter device capable of improving isolation characteristics without deteriorating pass characteristics.
  • a filter device includes an input terminal and an output terminal, input/output terminal side signal wiring connected to the input terminal or the output terminal, at least one series arm resonator, and at least one parallel arm resonator. a plurality of ground terminals; and a first ground wiring and a second ground wiring connected to the different ground terminals, wherein the input/output terminal side signal wiring is connected to the first ground wiring. and a portion extending alongside and adjacent to the second ground wiring.
  • a plurality of filter devices sharing a common connection terminal are provided, and at least one filter device is a filter device configured according to the present invention. be.
  • a common connection terminal is shared for at least one series arm resonator, at least one parallel arm resonator, and at least one ground terminal, respectively.
  • a first filter device and a second filter device a common connection terminal side signal wiring connected to the common connection terminal; and a third ground wiring and a fourth ground wiring connected to the different ground terminals.
  • the common connection terminal side signal wiring extends along and adjacent to the third ground wiring and extends along and adjacent to the fourth ground wiring.
  • the present invention it is possible to provide a filter device and a composite filter device capable of improving isolation characteristics without deteriorating pass characteristics.
  • FIG. 1 is a circuit diagram of a filter device according to a first embodiment of the invention.
  • FIG. 2 is a schematic plan view of the filter device according to the first embodiment of the invention.
  • FIG. 3 is a diagram showing attenuation frequency characteristics of the filter devices of the first embodiment and the first comparative example of the present invention.
  • FIG. 4 is a diagram showing, in a wide range, the attenuation frequency characteristics of the filter devices of the first embodiment and the first comparative example of the present invention.
  • FIG. 5 is a circuit diagram of a composite filter device according to a second embodiment of the invention.
  • FIG. 6 is a schematic plan view of a composite filter device according to a second embodiment of the invention.
  • FIG. 1 is a circuit diagram of a filter device according to a first embodiment of the invention.
  • FIG. 2 is a schematic plan view of the filter device according to the first embodiment of the invention.
  • FIG. 3 is a diagram showing attenuation frequency characteristics of the filter devices of the first embodiment and the first
  • FIG. 7 is a diagram showing attenuation frequency characteristics of the first filter device in the second embodiment and the second comparative example of the present invention.
  • FIG. 8 is a diagram showing, in a wide range, attenuation frequency characteristics of the first filter device in the second embodiment and the second comparative example of the present invention.
  • FIG. 9 is a diagram showing isolation characteristics of the composite filter devices of the second embodiment and the second comparative example of the present invention.
  • FIG. 10 is a circuit diagram of a composite filter device according to a third embodiment of the invention.
  • FIG. 11 is a schematic plan view of a composite filter device according to a third embodiment of the invention.
  • FIG. 12 is a circuit diagram of a composite filter device according to a fourth embodiment of the invention.
  • FIG. 13 is a schematic plan view of a composite filter device according to a fourth embodiment of the invention.
  • FIG. 14 is a circuit diagram of a composite filter device according to a modification of the fourth embodiment of the invention.
  • FIG. 15 is a schematic diagram of a composite filter device according to a fifth embodiment of the invention.
  • FIG. 1 is a circuit diagram of a filter device according to the first embodiment of the present invention.
  • each resonator group surrounded by a dashed line is shown as one resonator.
  • a group of resonators surrounded by a dashed line is a series-divided resonator or a parallel-divided resonator. The same applies to other circuit diagrams.
  • the filter device 1 is a ladder filter.
  • Filter device 1 is used, for example, in a composite filter device such as a duplexer or multiplexer.
  • the filter device 1 is a transmission filter.
  • the pass band of the filter device 1 is the transmission band of Band 30 .
  • the pass band of the filter device 1 is 2305-2315 MHz. Note that the passband of the filter device 1 is not limited to the above.
  • the filter device 1 may be a receive filter.
  • the filter device 1 has an input terminal 3, an output terminal 4, a plurality of series arm resonators and a plurality of parallel arm resonators.
  • the input terminal 3 and the output terminal 4 are configured as electrode pads. These electrode pads are provided with connection members for connecting the filter device 1 and circuits and devices outside the filter device 1 . A solder bump, a conductive adhesive, or the like is used as the connection member.
  • the input terminal 3 and the output terminal 4 may be configured as wiring.
  • the plurality of series arm resonators and the plurality of parallel arm resonators include series-divided resonators or parallel-divided resonators. It should be noted that none of the series arm resonators and parallel arm resonators may be divided in series or parallel.
  • the plurality of series arm resonators of the filter device 1 are a series arm resonator S1, a series arm resonator S2, a series arm resonator S3, and a series arm resonator S4.
  • the plurality of parallel arm resonators of the filter device 1 are a parallel arm resonator P1, a parallel arm resonator P2, and a parallel arm resonator P3.
  • both the series arm resonators and the parallel arm resonators are elastic wave resonators.
  • Each elastic wave resonator has an IDT (Interdigital Transducer) electrode.
  • the IDT electrode has a plurality of electrode fingers.
  • the elastic wave resonators are arranged such that the directions in which the plurality of electrode fingers of each elastic wave resonator extend are parallel.
  • a series arm resonator S1 is connected between the connection point between the series arm resonators S1 and S2 and the ground potential.
  • a parallel arm resonator P2 is connected between the connection point between the series arm resonators S2 and S3 and the ground potential.
  • a parallel arm resonator P3 is connected between the connection point between the series arm resonators S3 and S4 and the ground potential.
  • a ground potential is a potential that serves as a reference when operating a device such as a filter device.
  • the ground potential is usually set to 0V in many cases. However, the ground potential is not limited to 0V.
  • the circuit configuration of the filter device 1 is not limited to the above.
  • the filter device 1 may have at least one series arm resonator and at least one parallel arm resonator.
  • FIG. 2 is a schematic plan view of the filter device according to the first embodiment.
  • the acoustic wave resonator is shown schematically by adding two diagonal lines to a rectangle.
  • wirings forming a capacitor portion, and terminals connected to the wirings are hatched. is emphasized by . Hatching may be attached to a part of the wiring or terminal in some cases. The same applies to other schematic plan views.
  • the filter device 1 has a piezoelectric substrate 5 .
  • Each elastic wave resonator is formed on the piezoelectric substrate 5 .
  • the piezoelectric substrate 5 is provided with an input terminal 3, an output terminal 4, a plurality of ground terminals 6, a plurality of signal wirings, and a plurality of ground wirings.
  • the plurality of signal wirings include an input/output terminal side signal wiring 7A and an input/output terminal side signal wiring 7B.
  • the input/output terminal side signal wiring 7A is connected to the input terminal 3.
  • the input/output terminal side signal wiring 7B is connected to the output terminal 4 .
  • the plurality of signal wirings includes signal wirings connecting acoustic wave resonators.
  • each of the plurality of ground wirings is connected to the ground terminal 6 .
  • Each ground terminal 6 is connected to a ground potential outside the filter device 1 . Therefore, each parallel arm resonator is connected to ground potential through each ground terminal 6 .
  • An inductor may be provided between the parallel arm resonator and the ground terminal 6, although it is omitted in FIG. In this case, the inductor may be, for example, a wiring pattern provided on the piezoelectric substrate 2 .
  • ground terminal 6 may be connected to ground potential via an inductor.
  • the inductor may be, for example, an inductor element or a conductor pattern. Then, as shown in FIG.
  • the plurality of ground wirings includes first ground wiring 8 and second ground wiring 9 . More specifically, the first ground wiring 8 is indirectly connected to the parallel arm resonator P1 via the ground terminal 6. As shown in FIG. The parallel arm resonator P1 is the first parallel arm resonator in the present invention. A second ground wiring 9 is indirectly connected to the parallel arm resonator P3 via the ground terminal 6 . The parallel arm resonator P3 is the second parallel arm resonator in the present invention. The first ground wiring 8 and the second ground wiring 9 are connected to ground terminals 6 different from each other.
  • portions of the first ground wiring 8 and the second ground wiring 9 are arranged so as to sandwich a portion of the input/output terminal side signal wiring 7A.
  • a portion of the input/output terminal side signal wiring 7A and a portion of the first ground wiring 8 face each other. More specifically, in a plan view, a part of one side that constitutes the input/output terminal side signal wiring 7A and a part of one side that constitutes the first ground wiring 8 are spaced apart from each other at a constant interval. have a part Thus, the capacitor section C2 shown in FIG. 1 is configured.
  • a portion of the input/output terminal side signal wiring 7A and a portion of the second ground wiring 9 face each other.
  • plan view a part of one side of the input/output terminal side signal wiring 7A and a part of one side of the second ground wiring 9 are separated from each other without any other wiring therebetween. have portions spaced apart at regular intervals.
  • the capacitor C1 shown in FIG. 1 is configured.
  • planar view refers to a direction in which a plan view such as FIG. 2 is viewed in the depth direction of the page.
  • the feature of this embodiment is that the input/output terminal side signal wiring 7A extends side by side with the first ground wiring 8 and extends side by side with the second ground wiring 9, and also extends side by side with the second ground wiring 9. to have More specifically, the portion of the input/output terminal side signal wiring 7A having the length direction and the portion of the first ground wiring 8 having the length direction are opposed to each other without interposing other electrodes. there is The positional relationship between the input/output terminal side signal wiring 7A and the second ground wiring 9 is the same. With the filter device 1 configured as described above, it is possible to improve the isolation characteristics without degrading the pass characteristics. Details of this will be shown below by comparing the present embodiment and the first comparative example.
  • the first comparative example differs from the first embodiment in that the first ground wiring 8 is not provided.
  • the attenuation frequency characteristics of the filter devices of the first embodiment and the first comparative example were compared.
  • the passband of the filter devices of the first embodiment and the first comparative example was the transmission band of Band30.
  • FIG. 3 is a diagram showing attenuation frequency characteristics of the filter devices of the first embodiment and the first comparative example.
  • FIG. 4 is a diagram showing attenuation frequency characteristics of the filter devices of the first embodiment and the first comparative example over a wide range.
  • Band W1 in FIG. 3 is the passband of the filter device.
  • Band W2 is the reception band of Band30.
  • the attenuation in the band W2 is greater in the filter device 1 of the first embodiment than in the first comparative example. Therefore, in the filter device 1, attenuation can be increased in the passband of the reception filter of Band 30. FIG. Therefore, when the filter device 1 of the first embodiment is used for the duplexer of Band 30, isolation characteristics can be improved. Furthermore, it can be seen that the pass characteristics of the filter device 1 in the first embodiment are almost the same as the pass characteristics in the first comparative example.
  • the attenuation can be increased not only in the band W2 but also over a wide band. Therefore, isolation characteristics can be improved regardless of the communication band of the duplexer. From the above, it can be seen that in the first embodiment, the isolation characteristic can be improved without deteriorating the pass characteristic. This is for the following reasons.
  • the input/output terminal side signal wiring 7A extends along and adjacent to the first ground wiring 8, and extends along the second ground wiring 9. and have portions that extend contiguously with.
  • adjacent means that there are no elements such as resonators or wiring between them.
  • the capacitive section C1 and the capacitive section C2 are configured. More specifically, in the filter device 1, a first sub-circuit including a capacitive section C1 is provided between the input terminal 3 and the parallel arm resonator P3. The end of the first sub-circuit on the input terminal 3 side is connected to the series arm resonator S1.
  • the provision of the first sub-circuit changes the capacitance of the series arm resonator S1. Thereby, the attenuation of the filter device 1 can be increased in a wide band.
  • the distance between the input/output terminal side signal wiring 7A and the first ground wiring 8 in the portion where the capacitance section C1 is formed is preferably 50 ⁇ m or less. More preferably, the distance is 3 ⁇ m or more and 30 ⁇ m or less. In the present invention, the distance between the signal wiring and the ground wiring in the portion where the capacitive section other than the capacitive section C1 is formed is also preferably 50 ⁇ m or less. More preferably, the distance is 3 ⁇ m or more and 30 ⁇ m or less.
  • a second sub-circuit including a capacitance section C2 is provided between the input terminal 3 and the parallel arm resonator P1.
  • the capacitance section C2 acts as a parallel capacitance for the series arm resonator S1 and the parallel arm resonator P1.
  • capacitance is added to the series arm resonator S1 and the parallel arm resonator P1.
  • the frequencies of the anti-resonance points of the series arm resonator S1 and the parallel arm resonator P1 are lowered. This changes the frequency of the attenuation pole. Therefore, the attenuation on the high frequency side of the passband of the filter device 1 can be locally increased.
  • the first sub-circuit and the second sub-circuit hardly affect the transmission characteristics. Therefore, in the first embodiment, the isolation characteristic can be improved without deteriorating the pass characteristic.
  • the input/output terminal side signal wiring 7A preferably has a portion sandwiched between the first ground wiring 8 and the second ground wiring 9 .
  • the first ground wiring 8 and the second ground wiring 9 function as electromagnetic shields. Therefore, the influence of an electric field from the outside can be suppressed, and the filter characteristics are less likely to deteriorate.
  • one end of the first sub-circuit is connected to a parallel arm resonator P3 as a second parallel arm resonator.
  • One end of the second subcircuit is connected to a parallel arm resonator P1 as a first parallel arm resonator.
  • at least one series arm resonator is connected between the first parallel arm resonator and the second parallel arm resonator.
  • each of the first sub-circuit and the second sub-circuit does not necessarily have to be connected to the parallel arm resonator.
  • At least one of the first ground wiring 8 and the second ground wiring 9 may be connected to the parallel arm resonator.
  • at least one of the first ground wiring 8 and the second ground wiring 9 may not be connected to the parallel arm resonator.
  • at least one of the first ground wiring 8 and the second ground wiring 9 should be connected to the ground terminal 6 that is not connected to the parallel arm resonator. Even in these cases, the attenuation outside the passband can be increased.
  • FIG. 5 is a circuit diagram of a composite filter device according to the second embodiment.
  • the composite filter device 10 is a duplexer.
  • the composite filter device 10 has a first filter device 11A and a second filter device 11B.
  • the first filter device 11A is a transmission filter and the second filter device 11B is a reception filter.
  • the communication band of the composite filter device 10 is Band30. Therefore, the pass band of the first filter device 11A is 2305-2315 MHz.
  • the pass band of the second filter device 11B is 2350-2360 MHz. Note that the communication band of the composite filter device 10 is not limited to the above.
  • the first filter device 11A and the second filter device 11B share a common connection terminal 12.
  • the common connection terminal 12 is not included in the first filter device 11A and the second filter device 11B for the sake of clarity.
  • the common connection terminal 12 is an antenna terminal. An antenna terminal is connected to the antenna. Therefore, the first filter device 11A and the second filter device 11B are commonly connected to the antenna through the common connection terminal 12 .
  • the common connection terminal 12 functions as an output terminal of the first filter device 11A.
  • the common connection terminal 12 also functions as an input terminal of the second filter device 11B.
  • the common connection terminal 12 is configured as an electrode pad. However, the common connection terminal 12 may be configured as wiring.
  • the first filter device 11A has the same configuration as the filter device 1 of the first embodiment.
  • the second filter device 11B is not a filter device according to the invention.
  • the second filter device 11B may also be the filter device of the present invention.
  • the composite filter device 10 need only have at least one filter device according to the invention.
  • Composite filter device 10 may be a multiplexer.
  • the second filter device 11B is a ladder filter.
  • the second filter device 11B has a common connection terminal 12 as an input terminal, an output terminal 14, a plurality of series arm resonators, and a plurality of parallel arm resonators.
  • the plurality of series arm resonators of the second filter device 11B are a series arm resonator S11, a series arm resonator S12, a series arm resonator S13, a series arm resonator S14, a series arm resonator S15, and a series arm resonator S16. and a series arm resonator S17.
  • the plurality of parallel arm resonators of the second filter device 11B are a parallel arm resonator P11, a parallel arm resonator P12, a parallel arm resonator P13, a parallel arm resonator P14 and a parallel arm resonator P15.
  • both the series arm resonators and the parallel arm resonators are elastic wave resonators.
  • a series arm resonator S11, a series arm resonator S13, a series arm resonator S14, a series arm resonator S15, and a series arm resonator S16 are connected in series between a common connection terminal 12 as an input terminal and an output terminal 14. It is The series arm resonator S11 and the series arm resonator S12 are connected in parallel between the common connection terminal 12 and the series arm resonator S13. A series arm resonator S16 and a series arm resonator S17 are connected in parallel between the series arm resonator S15 and the output terminal 14 .
  • a parallel arm resonator P11 is connected between the connection point between the series arm resonators S11 and S13 and the ground potential.
  • a parallel arm resonator P12 and a parallel arm resonator P13 are connected in series between a connection point between the series arm resonator S13 and the series arm resonator S14 and the ground potential.
  • a parallel arm resonator P14 is connected between the connection point between the series arm resonator S14 and the series arm resonator S15 and the ground potential.
  • a parallel arm resonator P15 is connected between the connection point between the series arm resonator S15 and the series arm resonator S16 and the ground potential.
  • the circuit configuration of the second filter device 11B is not limited to the above.
  • a capacitive element C is provided between the connection point between the series arm resonator S11 and the series arm resonator S13 in the second filter device 11B and the parallel arm resonator P3 of the first filter device 11A. It is In this embodiment, one end of the capacitive section C1 in the first filter device 11A is connected to a connection point between the parallel arm resonator P3 and the capacitive element C. As shown in FIG. However, the capacitive part C1 is connected to the ground potential as in the first embodiment. Note that the capacitive element C may not be provided. The first filter device 11A and the second filter device 11B may not be connected at a portion other than the common connection terminal 12. FIG.
  • FIG. 6 is a schematic plan view of the composite filter device according to the second embodiment.
  • the elastic wave resonator and the capacitive element C are shown by a schematic diagram of a rectangle with two diagonal lines added.
  • the first filter device 11A and the second filter device 11B are shown without including the common connection terminal 12 for the sake of clarity. These are the same for other schematic plan views.
  • the piezoelectric substrate 5 is shared by the first filter device 11A and the second filter device 11B. Each elastic wave resonator is formed on the piezoelectric substrate 5 .
  • Each wiring of the first filter device 11A is provided in the same manner as in the first embodiment except for the common connection terminal 12 and the common connection terminal side signal wiring 17C.
  • the common connection terminal side signal wiring 17C is a signal wiring connected to the common connection terminal 12.
  • each wiring of the second filter device 11B is also provided appropriately.
  • the parallel arm resonator P11 and the parallel arm resonator P13 are commonly connected to the same ground terminal 6 .
  • the parallel arm resonator P14 and the parallel arm resonator P15 are commonly connected to the same ground terminal 6 .
  • the second filter device 11B has an input/output terminal side signal wiring 17B.
  • the input/output terminal side signal wiring 17B is connected to the output terminal 14 .
  • the capacitive element C is of the IDT type. Therefore, the capacitive element C has a plurality of electrode fingers.
  • the capacitive element C is arranged such that the direction in which the electrode fingers of the capacitive element C extend is orthogonal to the direction in which the electrode fingers of each elastic wave resonator extend. Note that the direction in which the plurality of electrode fingers of the capacitive element C extend is not limited to the above.
  • the second comparative example differs from the second embodiment in that the first ground wiring 8 is not provided.
  • the attenuation frequency characteristics of the first filter device in the second embodiment and the second comparative example were compared. Furthermore, the isolation characteristics of the composite filter devices of the second embodiment and the second comparative example were compared.
  • FIG. 7 is a diagram showing attenuation frequency characteristics of the first filter device in the second embodiment and the second comparative example.
  • FIG. 8 is a diagram showing the attenuation frequency characteristics of the first filter device in the second embodiment and the second comparative example over a wide range.
  • FIG. 9 is a diagram showing isolation characteristics of the composite filter devices of the second embodiment and the second comparative example.
  • the maximum attenuation in the band W2 is larger than that of the second comparative example. Furthermore, it can be seen that the pass characteristic of the first filter device 11A in the second embodiment is almost the same as the pass characteristic in the second comparative example. As shown in FIG. 8, in the first filter device 11A of the second embodiment, the attenuation can be increased not only in the band W2 but also over a wide band. As shown in FIG. 9, in the composite filter device 10 of the second embodiment, the isolation characteristics can be significantly improved as compared with the second comparative example. As described above, in the second embodiment, the isolation characteristic can be improved without deteriorating the pass characteristic.
  • FIG. 10 is a circuit diagram of a composite filter device according to the third embodiment.
  • FIG. 11 is a schematic plan view of a composite filter device according to a third embodiment;
  • this embodiment differs from the second embodiment in that the second filter device 21B is the filter device according to the present invention. Except for the above points, the composite filter device of this embodiment has the same configuration as the composite filter device 10 of the second embodiment.
  • the second filter device 21B has a first ground wiring 28 and a second ground wiring 29.
  • the first ground wiring 28 is indirectly connected to the parallel arm resonator P11 and the parallel arm resonator P13 via the ground terminal 6 .
  • the second ground wiring 29 is connected to the parallel arm resonator P14 and the parallel arm resonator P15. Parts of the first ground wiring 28 and the second ground wiring 29 are arranged so as to sandwich a part of the input/output terminal side signal wiring 17B.
  • the capacitor section C3 shown in FIG. 10 is configured.
  • the capacitor section C4 shown in FIG. 10 is configured. More specifically, in the second filter device 21B, a third sub-circuit including the capacitance section C3 is provided between the output terminal 14 and the parallel arm resonators P11 and P13. .
  • a fourth sub-circuit including a capacitance section C4 is provided between the output terminal 14 and the parallel arm resonators P14 and P15.
  • the third sub-circuit and the fourth sub-circuit hardly affect the transmission characteristics.
  • the attenuation amount outside the passband can be increased without deteriorating the pass characteristics. Therefore, also in this embodiment, the isolation characteristic can be improved without degrading the pass characteristic.
  • first ground wiring 28 and the second ground wiring 29 do not necessarily have to sandwich the input/output terminal side signal wiring 17B. It is sufficient that the input/output terminal side signal wiring 17B has a portion extending side by side with the first ground wiring 28 and a portion extending side by side with the second ground wiring 29. .
  • the capacitance section C1 and the capacitance section C2 may not necessarily be provided in the first filter device 11A.
  • FIG. 12 is a circuit diagram of a composite filter device according to the fourth embodiment.
  • FIG. 13 is a schematic plan view of a composite filter device according to a fourth embodiment;
  • this embodiment differs from the third embodiment in that a capacitive section C5 and a capacitive section C6 are provided. One end of each of the capacitance section C5 and the capacitance section C6 is connected to the common connection terminal 12 .
  • Capacitor C6 is included in first filter device 11A.
  • Capacitor C5 is included in second filter device 21B.
  • the composite filter device 30 of this embodiment has the same configuration as the composite filter device of the third embodiment.
  • a third ground wiring 38 and a fourth ground wiring 39 are provided. More specifically, the third ground wiring 38 is connected to the parallel arm resonator P11 and the parallel arm resonator P13 of the second filter device 21B.
  • the fourth ground wiring 39 is indirectly connected via the ground terminal 6 to the parallel arm resonator P2 of the first filter device 11A.
  • the third ground wiring 38 and the fourth ground wiring 39 are connected to ground terminals 6 different from each other.
  • the third ground wiring 38 and the fourth ground wiring 39 are arranged so as to sandwich the common connection terminal side signal wiring 17C. As described above, the common connection terminal side signal wiring 17C is a signal wiring connected to the common connection terminal 12 .
  • the composite filter device 30 is provided with first to fourth sub-circuits similar to those of the third embodiment. Furthermore, in the composite filter device 30, a fifth sub-circuit including a capacitance section C5 is provided between the common connection terminal 12 and the parallel arm resonators P11 and P13. Furthermore, a sixth sub-circuit including a capacitance section C6 is provided between the common connection terminal 12 and the parallel arm resonator P2. As a result, isolation characteristics can be improved without deteriorating pass characteristics.
  • the third ground wiring 38 and the fourth ground wiring 39 do not necessarily have to sandwich the common connection terminal side signal wiring 17C. It is sufficient that the common connection terminal side signal wiring 17C has a portion extending side by side with the third ground wiring 38 and a portion extending side by side with the fourth ground wiring 39. .
  • each of the first filter device 11A and the second filter device 21B should have at least one ground terminal 6. . This allows the first filter device 11A to include the capacitance section C6 and the second filter device 11B to include the capacitance section C5.
  • the first filter device 11A should have a plurality of ground terminals 6 and the second filter device 21B should have at least one ground terminal 6.
  • the first filter device 11A may include both the capacitive section C5 and the capacitive section C6.
  • each of the fifth sub-circuit and the sixth sub-circuit does not necessarily have to be connected to the parallel arm resonator.
  • At least one of the third ground wiring 38 and the fourth ground wiring 39 may be connected to the parallel arm resonator.
  • at least one of the third ground wiring 38 and the fourth ground wiring 39 may not be connected to the parallel arm resonator.
  • at least one of the third ground wiring 38 and the fourth ground wiring 39 should be connected to the ground terminal 6 that is not connected to the parallel arm resonator. Also in these cases, the isolation characteristics can be improved.
  • one end of each of the second sub-circuit, the third sub-circuit and the fifth sub-circuit is not connected to the parallel arm resonator.
  • the capacitance section C2 of the first filter device 41A and the capacitance sections C3 and C5 of the second filter device 41B are not connected to the parallel arm resonator and are connected to the ground terminal 6.
  • the capacitance section C4 of the second filter device 41B is indirectly connected to the parallel arm resonator P11, the parallel arm resonator P13, the parallel arm resonator P14, and the parallel arm resonator P15 via the ground terminal 6.
  • the isolation characteristic can be improved without deteriorating the pass characteristic.
  • the composite filter device was a duplexer.
  • the composite filter device according to the invention may also be a multiplexer.
  • a multiplexer refers to a composite filter device having three or more filter devices and having the function of separating signals.
  • the filter device may be a receive filter or a transmit filter.
  • the filter device includes a notch filter. In the following an example is given where the composite filter device is a multiplexer.
  • FIG. 15 is a schematic diagram of a composite filter device according to the fifth embodiment.
  • the composite filter device 50 is a multiplexer.
  • Composite filter device 50 has common connection terminal 12 and a plurality of filter devices. More specifically, the multiple filter devices of composite filter device 50 include first filter device 51A, second filter device 51B, third filter device 51C, and other filter devices. The number of filter devices in composite filter device 50 is not particularly limited. A plurality of filter devices share a common connection terminal 12 .
  • the first filter device 51A is a filter device according to the present invention.
  • a composite filter device 50 need only comprise at least one filter device according to the invention. Also in the present embodiment, similarly to the second embodiment, etc., the isolation characteristics between the first filter device 51A and other filter devices can be improved without deteriorating the filter characteristics of the first filter device 51A. can be improved.

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Abstract

Provided are a filter device and a composite filter device that have achieved improved isolation characteristics without degradation in pass characteristics.　This filter device is provided with: an input terminal 3 and an output terminal 4; an input/output terminal-side signal wire 7A connected to the input terminal 3 or the output terminal 4; at least one series arm resonator; at least one parallel arm resonator; a plurality of ground terminals 6; and a first ground wire 8 and a second ground wire 9 that are connected to mutually different ground terminals 6. The input/output terminal-side signal wire 7A includes a portion extending alongside and adjacent to the first ground wire 8, and a portion extending alongside and adjacent to the second ground wire 9.

Description

フィルタ装置及び複合フィルタ装置Filter device and composite filter device
　本発明は、フィルタ装置及び複合フィルタ装置に関する。 The present invention relates to a filter device and a composite filter device.
　従来、フィルタ装置は携帯電話機などに広く用いられている。下記の特許文献１に記載のデュプレクサでは、送信フィルタ及び受信フィルタとして、ラダー型フィルタが用いられている。このデュプレクサにおいては、シールド電極がアンテナポート付近まで延ばされている。シールド電極は接地電極に接続されている。 Conventionally, filter devices have been widely used in mobile phones and the like. Ladder filters are used as a transmission filter and a reception filter in the duplexer described in Patent Document 1 below. In this duplexer, the shield electrode extends to near the antenna port. The shield electrode is connected to the ground electrode.
特開２０１２－０９５２６８号公報JP 2012-095268 A
　送信フィルタ及び受信フィルタの通過特性と、アイソレーション特性とはトレードオフの関係にある。そのため、これらを両立することは困難である。例えば、特許文献１に記載のデュプレクサでは、シールド電極がアンテナポート付近まで延ばされていることにより、アイソレーション特性の改善は図られる。一方で、該デュプレクサにおいては、通過特性は劣化する。 There is a trade-off between the pass characteristics of the transmission filter and the reception filter and the isolation characteristics. Therefore, it is difficult to achieve both of these. For example, in the duplexer disclosed in Patent Literature 1, the shield electrode extends to the vicinity of the antenna port, thereby improving isolation characteristics. On the other hand, the duplexer deteriorates in pass characteristics.
　本発明の目的は、通過特性の劣化を招かずして、アイソレーション特性を改善することができる、フィルタ装置及び複合フィルタ装置を提供することにある。 An object of the present invention is to provide a filter device and a composite filter device capable of improving isolation characteristics without deteriorating pass characteristics.
　本発明に係るフィルタ装置は、入力端子及び出力端子と、前記入力端子または前記出力端子に接続されている入出力端子側信号配線と、少なくとも１つの直列腕共振子と、少なくとも１つの並列腕共振子と、複数のグラウンド端子と、互いに異なる前記グラウンド端子に接続されている、第１のグラウンド配線及び第２のグラウンド配線とを備え、前記入出力端子側信号配線が、前記第１のグラウンド配線と並んで隣接して延びている部分、及び前記第２のグラウンド配線と並んで隣接して延びている部分を有する。 A filter device according to the present invention includes an input terminal and an output terminal, input/output terminal side signal wiring connected to the input terminal or the output terminal, at least one series arm resonator, and at least one parallel arm resonator. a plurality of ground terminals; and a first ground wiring and a second ground wiring connected to the different ground terminals, wherein the input/output terminal side signal wiring is connected to the first ground wiring. and a portion extending alongside and adjacent to the second ground wiring.
　本発明に係る複合フィルタ装置のある広い局面では、共通接続端子を共有している複数のフィルタ装置が備えられており、少なくとも１個の前記フィルタ装置が、本発明に従い構成されているフィルタ装置である。 In a broad aspect of the composite filter device according to the present invention, a plurality of filter devices sharing a common connection terminal are provided, and at least one filter device is a filter device configured according to the present invention. be.
　本発明に係る複合フィルタ装置の他の広い局面では、共通接続端子を共有しており、少なくとも１つの直列腕共振子と、少なくとも１つの並列腕共振子と、少なくとも１つのグラウンド端子と、をそれぞれ有する第１のフィルタ装置及び第２のフィルタ装置と、前記共通接続端子に接続されている共通接続端子側信号配線と、互いに異なる前記グラウンド端子に接続されている、第３のグラウンド配線及び第４のグラウンド配線とが備えられており、前記共通接続端子側信号配線が、前記第３のグラウンド配線と並んで隣接して延びている部分、及び前記第４のグラウンド配線と並んで隣接して延びている部分を有する。 In another broad aspect of the composite filter device according to the present invention, a common connection terminal is shared for at least one series arm resonator, at least one parallel arm resonator, and at least one ground terminal, respectively. a first filter device and a second filter device; a common connection terminal side signal wiring connected to the common connection terminal; and a third ground wiring and a fourth ground wiring connected to the different ground terminals. wherein the common connection terminal side signal wiring extends along and adjacent to the third ground wiring and extends along and adjacent to the fourth ground wiring. have a part that
　本発明によれば、通過特性の劣化を招かずして、アイソレーション特性を改善することができる、フィルタ装置及び複合フィルタ装置を提供することができる。 According to the present invention, it is possible to provide a filter device and a composite filter device capable of improving isolation characteristics without deteriorating pass characteristics.
図１は、本発明の第１の実施形態に係るフィルタ装置の回路図である。FIG. 1 is a circuit diagram of a filter device according to a first embodiment of the invention. 図２は、本発明の第１の実施形態に係るフィルタ装置の略図的平面図である。FIG. 2 is a schematic plan view of the filter device according to the first embodiment of the invention. 図３は、本発明の第１の実施形態及び第１の比較例のフィルタ装置の減衰量周波数特性を示す図である。FIG. 3 is a diagram showing attenuation frequency characteristics of the filter devices of the first embodiment and the first comparative example of the present invention. 図４は、本発明の第１の実施形態及び第１の比較例のフィルタ装置の減衰量周波数特性を、広い範囲において示す図である。FIG. 4 is a diagram showing, in a wide range, the attenuation frequency characteristics of the filter devices of the first embodiment and the first comparative example of the present invention. 図５は、本発明の第２の実施形態に係る複合フィルタ装置の回路図である。FIG. 5 is a circuit diagram of a composite filter device according to a second embodiment of the invention. 図６は、本発明の第２の実施形態に係る複合フィルタ装置の略図的平面図である。FIG. 6 is a schematic plan view of a composite filter device according to a second embodiment of the invention. 図７は、本発明の第２の実施形態及び第２の比較例における第１のフィルタ装置の減衰量周波数特性を示す図である。FIG. 7 is a diagram showing attenuation frequency characteristics of the first filter device in the second embodiment and the second comparative example of the present invention. 図８は、本発明の第２の実施形態及び第２の比較例における第１のフィルタ装置の減衰量周波数特性を、広い範囲において示す図である。FIG. 8 is a diagram showing, in a wide range, attenuation frequency characteristics of the first filter device in the second embodiment and the second comparative example of the present invention. 図９は、本発明の第２の実施形態及び第２の比較例の複合フィルタ装置のアイソレーション特性を示す図である。FIG. 9 is a diagram showing isolation characteristics of the composite filter devices of the second embodiment and the second comparative example of the present invention. 図１０は、本発明の第３の実施形態に係る複合フィルタ装置の回路図である。FIG. 10 is a circuit diagram of a composite filter device according to a third embodiment of the invention. 図１１は、本発明の第３の実施形態に係る複合フィルタ装置の略図的平面図である。FIG. 11 is a schematic plan view of a composite filter device according to a third embodiment of the invention. 図１２は、本発明の第４の実施形態に係る複合フィルタ装置の回路図である。FIG. 12 is a circuit diagram of a composite filter device according to a fourth embodiment of the invention. 図１３は、本発明の第４の実施形態に係る複合フィルタ装置の略図的平面図である。FIG. 13 is a schematic plan view of a composite filter device according to a fourth embodiment of the invention. 図１４は、本発明の第４の実施形態の変形例に係る複合フィルタ装置の回路図である。FIG. 14 is a circuit diagram of a composite filter device according to a modification of the fourth embodiment of the invention. 図１５は、本発明の第５の実施形態に係る複合フィルタ装置の模式図である。FIG. 15 is a schematic diagram of a composite filter device according to a fifth embodiment of the invention.
　以下、図面を参照しつつ、本発明の具体的な実施形態を説明することにより、本発明を明らかにする。 Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention with reference to the drawings.
　なお、本明細書に記載の各実施形態は、例示的なものであり、異なる実施形態間において、構成の部分的な置換または組み合わせが可能であることを指摘しておく。 It should be noted that each embodiment described in this specification is an example, and partial replacement or combination of configurations is possible between different embodiments.
　図１は、本発明の第１の実施形態に係るフィルタ装置の回路図である。図１においては、一点鎖線により囲まれた各共振子群それぞれを、１つの共振子として示している。一点鎖線により囲まれた共振子群は、直列分割または並列分割された共振子である。他の回路図においても同様である。 FIG. 1 is a circuit diagram of a filter device according to the first embodiment of the present invention. In FIG. 1, each resonator group surrounded by a dashed line is shown as one resonator. A group of resonators surrounded by a dashed line is a series-divided resonator or a parallel-divided resonator. The same applies to other circuit diagrams.
　フィルタ装置１はラダー型フィルタである。フィルタ装置１は、例えば、デュプレクサやマルチプレクサなどの複合フィルタ装置に用いられる。本実施形態では、フィルタ装置１は送信フィルタである。フィルタ装置１の通過帯域は、Ｂａｎｄ３０の送信帯域である。具体的には、フィルタ装置１の通過帯域は２３０５～２３１５ＭＨｚである。なお、フィルタ装置１の通過帯域は上記に限定されない。さらに、フィルタ装置１は受信フィルタであってもよい。 The filter device 1 is a ladder filter. Filter device 1 is used, for example, in a composite filter device such as a duplexer or multiplexer. In this embodiment, the filter device 1 is a transmission filter. The pass band of the filter device 1 is the transmission band of Band 30 . Specifically, the pass band of the filter device 1 is 2305-2315 MHz. Note that the passband of the filter device 1 is not limited to the above. Furthermore, the filter device 1 may be a receive filter.
　フィルタ装置１は入力端子３及び出力端子４と、複数の直列腕共振子及び複数の並列腕共振子とを有する。入力端子３及び出力端子４は電極パッドとして構成されている。これらの電極パッドには、フィルタ装置１と、フィルタ装置１の外部の回路や装置とを接続する、接続部材が設けられる。接続部材には、はんだバンプや導電性接着剤などが用いられる。もっとも、入力端子３及び出力端子４は配線として構成されていてもよい。本実施形態では、複数の直列腕共振子及び複数の並列腕共振子は、直列分割または並列分割された共振子を含む。なお、いずれの直列腕共振子及び並列腕共振子も、直列分割及び並列分割されていなくともよい。 The filter device 1 has an input terminal 3, an output terminal 4, a plurality of series arm resonators and a plurality of parallel arm resonators. The input terminal 3 and the output terminal 4 are configured as electrode pads. These electrode pads are provided with connection members for connecting the filter device 1 and circuits and devices outside the filter device 1 . A solder bump, a conductive adhesive, or the like is used as the connection member. However, the input terminal 3 and the output terminal 4 may be configured as wiring. In this embodiment, the plurality of series arm resonators and the plurality of parallel arm resonators include series-divided resonators or parallel-divided resonators. It should be noted that none of the series arm resonators and parallel arm resonators may be divided in series or parallel.
　フィルタ装置１の複数の直列腕共振子は、直列腕共振子Ｓ１、直列腕共振子Ｓ２、直列腕共振子Ｓ３及び直列腕共振子Ｓ４である。フィルタ装置１の複数の並列腕共振子は、並列腕共振子Ｐ１、並列腕共振子Ｐ２、並列腕共振子Ｐ３である。本実施形態では、複数の直列腕共振子及び複数の並列腕共振子はいずれも弾性波共振子である。各弾性波共振子は、ＩＤＴ（Ｉｎｔｅｒｄｉｇｉｔａｌ　Ｔｒａｎｓｄｕｃｅｒ）電極を有する。ＩＤＴ電極は複数の電極指を有する。本実施形態では、各弾性波共振子の複数の電極指が延びる方向が平行となるように、各弾性波共振子が配置されている。 The plurality of series arm resonators of the filter device 1 are a series arm resonator S1, a series arm resonator S2, a series arm resonator S3, and a series arm resonator S4. The plurality of parallel arm resonators of the filter device 1 are a parallel arm resonator P1, a parallel arm resonator P2, and a parallel arm resonator P3. In this embodiment, both the series arm resonators and the parallel arm resonators are elastic wave resonators. Each elastic wave resonator has an IDT (Interdigital Transducer) electrode. The IDT electrode has a plurality of electrode fingers. In this embodiment, the elastic wave resonators are arranged such that the directions in which the plurality of electrode fingers of each elastic wave resonator extend are parallel.
　入力端子３及び出力端子４の間に、直列腕共振子Ｓ１、直列腕共振子Ｓ２、直列腕共振子Ｓ３及び直列腕共振子Ｓ４が互いに直列に接続されている。直列腕共振子Ｓ１及び直列腕共振子Ｓ２の間の接続点とグラウンド電位との間に、並列腕共振子Ｐ１が接続されている。直列腕共振子Ｓ２及び直列腕共振子Ｓ３の間の接続点とグラウンド電位との間に、並列腕共振子Ｐ２が接続されている。直列腕共振子Ｓ３及び直列腕共振子Ｓ４の間の接続点とグラウンド電位との間に、並列腕共振子Ｐ３が接続されている。グラウンド電位は、フィルタ装置などの装置を動作させるときの基準となる電位である。グラウンド電位は、通常、０Ｖとされることが多い。もっとも、グラウンド電位は、０Ｖには限定されない。なお、フィルタ装置１の回路構成は上記に限定されない。フィルタ装置１は、少なくとも１つの直列腕共振子及び少なくとも１つの並列腕共振子を有していればよい。 Between the input terminal 3 and the output terminal 4, a series arm resonator S1, a series arm resonator S2, a series arm resonator S3, and a series arm resonator S4 are connected in series. A parallel arm resonator P1 is connected between the connection point between the series arm resonators S1 and S2 and the ground potential. A parallel arm resonator P2 is connected between the connection point between the series arm resonators S2 and S3 and the ground potential. A parallel arm resonator P3 is connected between the connection point between the series arm resonators S3 and S4 and the ground potential. A ground potential is a potential that serves as a reference when operating a device such as a filter device. The ground potential is usually set to 0V in many cases. However, the ground potential is not limited to 0V. Note that the circuit configuration of the filter device 1 is not limited to the above. The filter device 1 may have at least one series arm resonator and at least one parallel arm resonator.
　図２は、第１の実施形態に係るフィルタ装置の略図的平面図である。図２においては、弾性波共振子を、矩形に２本の対角線を加えた略図により示す。さらに、図２においては、後述する入出力端子側信号配線、第１のグラウンド配線及び第２のグラウンド配線のうち容量部を形成している配線、及び該配線に接続されている端子を、ハッチングにより強調して示す。ハッチングを、配線や端子の一部に付す場合もある。他の略図的平面図においても同様である。 FIG. 2 is a schematic plan view of the filter device according to the first embodiment. In FIG. 2, the acoustic wave resonator is shown schematically by adding two diagonal lines to a rectangle. Further, in FIG. 2, among input/output terminal-side signal wirings, first ground wirings, and second ground wirings, which will be described later, wirings forming a capacitor portion, and terminals connected to the wirings are hatched. is emphasized by . Hatching may be attached to a part of the wiring or terminal in some cases. The same applies to other schematic plan views.
　フィルタ装置１は圧電性基板５を有する。圧電性基板５上において、各弾性波共振子が構成されている。さらに、圧電性基板５上には、入力端子３と、出力端子４と、複数のグラウンド端子６と、複数の信号配線と、複数のグラウンド配線とが設けられている。複数の信号配線は、入出力端子側信号配線７Ａ及び入出力端子側信号配線７Ｂを含む。入出力端子側信号配線７Ａは入力端子３に接続されている。入出力端子側信号配線７Ｂは出力端子４に接続されている。さらに、複数の信号配線は、弾性波共振子同士を接続している信号配線を含む。 The filter device 1 has a piezoelectric substrate 5 . Each elastic wave resonator is formed on the piezoelectric substrate 5 . Furthermore, the piezoelectric substrate 5 is provided with an input terminal 3, an output terminal 4, a plurality of ground terminals 6, a plurality of signal wirings, and a plurality of ground wirings. The plurality of signal wirings include an input/output terminal side signal wiring 7A and an input/output terminal side signal wiring 7B. The input/output terminal side signal wiring 7A is connected to the input terminal 3. As shown in FIG. The input/output terminal side signal wiring 7B is connected to the output terminal 4 . Furthermore, the plurality of signal wirings includes signal wirings connecting acoustic wave resonators.
　他方、複数のグラウンド配線はそれぞれ、グラウンド端子６に接続されている。各グラウンド端子６は、フィルタ装置１の外部のグラウンド電位に接続される。そのため、各並列腕共振子は、各グラウンド端子６を介してグラウンド電位に接続される。なお、図１などにおいては省略しているが、並列腕共振子及びグラウンド端子６の間には、インダクタが設けられていてもよい。この場合、インダクタは、例えば、圧電性基板２上に設けられた配線バターンであってもよい。同様に、グラウンド端子６は、インダクタを介してグラウンド電位に接続されてもよい。この場合、インダクタは、例えば、インダクタ素子や、導体パターンであってもよい。そして、図２に示すように、複数のグラウンド配線は、第１のグラウンド配線８及び第２のグラウンド配線９を含む。より具体的には、第１のグラウンド配線８は、グラウンド端子６を介して間接的に並列腕共振子Ｐ１に接続されている。並列腕共振子Ｐ１は、本発明における第１の並列腕共振子である。第２のグラウンド配線９は、グラウンド端子６を介して間接的に並列腕共振子Ｐ３に接続されている。並列腕共振子Ｐ３は、本発明における第２の並列腕共振子である。なお、第１のグラウンド配線８及び第２のグラウンド配線９は、互いに異なるグラウンド端子６に接続されている。 On the other hand, each of the plurality of ground wirings is connected to the ground terminal 6 . Each ground terminal 6 is connected to a ground potential outside the filter device 1 . Therefore, each parallel arm resonator is connected to ground potential through each ground terminal 6 . An inductor may be provided between the parallel arm resonator and the ground terminal 6, although it is omitted in FIG. In this case, the inductor may be, for example, a wiring pattern provided on the piezoelectric substrate 2 . Similarly, ground terminal 6 may be connected to ground potential via an inductor. In this case, the inductor may be, for example, an inductor element or a conductor pattern. Then, as shown in FIG. 2 , the plurality of ground wirings includes first ground wiring 8 and second ground wiring 9 . More specifically, the first ground wiring 8 is indirectly connected to the parallel arm resonator P1 via the ground terminal 6. As shown in FIG. The parallel arm resonator P1 is the first parallel arm resonator in the present invention. A second ground wiring 9 is indirectly connected to the parallel arm resonator P3 via the ground terminal 6 . The parallel arm resonator P3 is the second parallel arm resonator in the present invention. The first ground wiring 8 and the second ground wiring 9 are connected to ground terminals 6 different from each other.
　図２に示すように、第１のグラウンド配線８及び第２のグラウンド配線９の一部は、入出力端子側信号配線７Ａの一部を挟むように配置されている。入出力端子側信号配線７Ａの一部及び第１のグラウンド配線８の一部が互いに対向している。より具体的には、平面視において、入出力端子側信号配線７Ａを構成する一辺の一部と、第１のグラウンド配線８を構成する一辺の一部とが、一定の間隔を隔てて離れている部分を有する。これにより、図１に示す容量部Ｃ２が構成されている。入出力端子側信号配線７Ａの一部及び第２のグラウンド配線９の一部が互いに対向している。より具体的には、平面視において、入出力端子側信号配線７Ａを構成する一辺の一部と、第２のグラウンド配線９を構成する一辺の一部とが、間に他の配線を介さずに、一定の間隔を隔てて離れている部分を有する。これにより、図１に示す容量部Ｃ１が構成されている。なお、本明細書において平面視とは、図２などの平面図における紙面奥行き方向に向かい見る方向をいう。 As shown in FIG. 2, portions of the first ground wiring 8 and the second ground wiring 9 are arranged so as to sandwich a portion of the input/output terminal side signal wiring 7A. A portion of the input/output terminal side signal wiring 7A and a portion of the first ground wiring 8 face each other. More specifically, in a plan view, a part of one side that constitutes the input/output terminal side signal wiring 7A and a part of one side that constitutes the first ground wiring 8 are spaced apart from each other at a constant interval. have a part Thus, the capacitor section C2 shown in FIG. 1 is configured. A portion of the input/output terminal side signal wiring 7A and a portion of the second ground wiring 9 face each other. More specifically, in a plan view, a part of one side of the input/output terminal side signal wiring 7A and a part of one side of the second ground wiring 9 are separated from each other without any other wiring therebetween. have portions spaced apart at regular intervals. Thus, the capacitor C1 shown in FIG. 1 is configured. In this specification, the term “planar view” refers to a direction in which a plan view such as FIG. 2 is viewed in the depth direction of the page.
　本実施形態の特徴は、入出力端子側信号配線７Ａが、第１のグラウンド配線８と並んで隣接して延びている部分、及び第２のグラウンド配線９と並んで隣接して延びている部分を有することにある。なお、より具体的には、入出力端子側信号配線７Ａにおける長さ方向を有する部分と、第１のグラウンド配線８における長さ方向を有する部分とが、他の電極を介さず互いに対向している。入出力端子側信号配線７Ａ及び第２のグラウンド配線９の位置関係も同様である。フィルタ装置１が上記の構成を有することにより、フィルタ装置１において、通過特性の劣化を招かずして、アイソレーション特性を改善することができる。この詳細を、本実施形態及び第１の比較例を比較することにより、以下において示す。 The feature of this embodiment is that the input/output terminal side signal wiring 7A extends side by side with the first ground wiring 8 and extends side by side with the second ground wiring 9, and also extends side by side with the second ground wiring 9. to have More specifically, the portion of the input/output terminal side signal wiring 7A having the length direction and the portion of the first ground wiring 8 having the length direction are opposed to each other without interposing other electrodes. there is The positional relationship between the input/output terminal side signal wiring 7A and the second ground wiring 9 is the same. With the filter device 1 configured as described above, it is possible to improve the isolation characteristics without degrading the pass characteristics. Details of this will be shown below by comparing the present embodiment and the first comparative example.
　第１の比較例は、第１のグラウンド配線８が設けられていない点において、第１の実施形態と異なる。第１の実施形態及び第１の比較例のフィルタ装置の減衰量周波数特性を比較した。なお、第１の実施形態及び第１の比較例のフィルタ装置の通過帯域は、Ｂａｎｄ３０の送信帯域とした。 The first comparative example differs from the first embodiment in that the first ground wiring 8 is not provided. The attenuation frequency characteristics of the filter devices of the first embodiment and the first comparative example were compared. The passband of the filter devices of the first embodiment and the first comparative example was the transmission band of Band30.
　図３は、第１の実施形態及び第１の比較例のフィルタ装置の減衰量周波数特性を示す図である。図４は、第１の実施形態及び第１の比較例のフィルタ装置の減衰量周波数特性を、広い範囲において示す図である。図３における帯域Ｗ１は、フィルタ装置の通過帯域である。帯域Ｗ２は、Ｂａｎｄ３０の受信帯域である。 FIG. 3 is a diagram showing attenuation frequency characteristics of the filter devices of the first embodiment and the first comparative example. FIG. 4 is a diagram showing attenuation frequency characteristics of the filter devices of the first embodiment and the first comparative example over a wide range. Band W1 in FIG. 3 is the passband of the filter device. Band W2 is the reception band of Band30.
　図３に示すように、第１の実施形態のフィルタ装置１においては、第１の比較例よりも、帯域Ｗ２における減衰量が大きいことがわかる。よって、フィルタ装置１においては、Ｂａｎｄ３０の受信フィルタの通過帯域において、減衰量を大きくすることができる。従って、第１の実施形態のフィルタ装置１をＢａｎｄ３０のデュプレクサに用いる場合に、アイソレーション特性を改善することができる。さらに、第１の実施形態におけるフィルタ装置１の通過特性は、第１の比較例における通過特性とほぼ変わらないことがわかる。 As shown in FIG. 3, it can be seen that the attenuation in the band W2 is greater in the filter device 1 of the first embodiment than in the first comparative example. Therefore, in the filter device 1, attenuation can be increased in the passband of the reception filter of Band 30. FIG. Therefore, when the filter device 1 of the first embodiment is used for the duplexer of Band 30, isolation characteristics can be improved. Furthermore, it can be seen that the pass characteristics of the filter device 1 in the first embodiment are almost the same as the pass characteristics in the first comparative example.
　図４に示すように、第１の実施形態のフィルタ装置１においては、上記帯域Ｗ２だけではなく、広い帯域にわたり減衰量を大きくできることがわかる。従って、デュプレクサの通信バンドに関わらず、アイソレーション特性を改善することができる。以上より、第１の実施形態においては、通過特性の劣化を招かずして、アイソレーション特性を改善できることがわかる。これは以下の理由による。 As shown in FIG. 4, in the filter device 1 of the first embodiment, the attenuation can be increased not only in the band W2 but also over a wide band. Therefore, isolation characteristics can be improved regardless of the communication band of the duplexer. From the above, it can be seen that in the first embodiment, the isolation characteristic can be improved without deteriorating the pass characteristic. This is for the following reasons.
　図２に示すように、第１の実施形態においては、入出力端子側信号配線７Ａが、第１のグラウンド配線８と並んで隣接して延びている部分、及び第２のグラウンド配線９と並んで隣接して延びている部分を有する。本明細書において、隣接するとは、間に共振子などの素子や配線が存在しないことをいう。これにより、図１に示すように、容量部Ｃ１及び容量部Ｃ２が構成されている。より詳細には、フィルタ装置１においては、入力端子３及び並列腕共振子Ｐ３の間において、容量部Ｃ１を含む第１のサブ回路が設けられている。なお、第１のサブ回路の入力端子３側の端部は、直列腕共振子Ｓ１に接続されている。第１のサブ回路が設けられていることによって、直列腕共振子Ｓ１の静電容量が変化する。それによって、フィルタ装置１の減衰量を広い帯域において大きくすることができる。容量部Ｃ１が構成されている部分における、入出力端子側信号配線７Ａ及び第１のグラウンド配線８の間の距離は、５０μｍ以下であることが好ましい。該距離が、３μｍ以上、３０μｍ以下であることがより好ましい。本発明においての、容量部Ｃ１以外の容量部が構成されている部分における、信号配線及びグラウンド配線の間の距離も同様に、５０μｍ以下であることが好ましい。該距離が、３μｍ以上、３０μｍ以下であることがより好ましい。 As shown in FIG. 2, in the first embodiment, the input/output terminal side signal wiring 7A extends along and adjacent to the first ground wiring 8, and extends along the second ground wiring 9. and have portions that extend contiguously with. In this specification, "adjacent" means that there are no elements such as resonators or wiring between them. Thereby, as shown in FIG. 1, the capacitive section C1 and the capacitive section C2 are configured. More specifically, in the filter device 1, a first sub-circuit including a capacitive section C1 is provided between the input terminal 3 and the parallel arm resonator P3. The end of the first sub-circuit on the input terminal 3 side is connected to the series arm resonator S1. The provision of the first sub-circuit changes the capacitance of the series arm resonator S1. Thereby, the attenuation of the filter device 1 can be increased in a wide band. The distance between the input/output terminal side signal wiring 7A and the first ground wiring 8 in the portion where the capacitance section C1 is formed is preferably 50 μm or less. More preferably, the distance is 3 μm or more and 30 μm or less. In the present invention, the distance between the signal wiring and the ground wiring in the portion where the capacitive section other than the capacitive section C1 is formed is also preferably 50 μm or less. More preferably, the distance is 3 μm or more and 30 μm or less.
　さらに、入力端子３及び並列腕共振子Ｐ１の間において、容量部Ｃ２を含む第２のサブ回路が設けられている。容量部Ｃ２は、直列腕共振子Ｓ１及び並列腕共振子Ｐ１の並列容量として作用する。それによって、直列腕共振子Ｓ１及び並列腕共振子Ｐ１に静電容量が付加される。これと共に、直列腕共振子Ｓ１及び並列腕共振子Ｐ１の反共振点の周波数が低くなる。これにより、減衰極の周波数が変化する。そのため、フィルタ装置１の通過帯域の高域側の減衰量を局所的に大きくすることができる。しかも、第１のサブ回路及び第２のサブ回路は、通過特性には影響を与え難い。従って、第１の実施形態においては、通過特性の劣化を招かずして、アイソレーション特性を改善することができる。 Furthermore, a second sub-circuit including a capacitance section C2 is provided between the input terminal 3 and the parallel arm resonator P1. The capacitance section C2 acts as a parallel capacitance for the series arm resonator S1 and the parallel arm resonator P1. Thereby, capacitance is added to the series arm resonator S1 and the parallel arm resonator P1. Along with this, the frequencies of the anti-resonance points of the series arm resonator S1 and the parallel arm resonator P1 are lowered. This changes the frequency of the attenuation pole. Therefore, the attenuation on the high frequency side of the passband of the filter device 1 can be locally increased. Moreover, the first sub-circuit and the second sub-circuit hardly affect the transmission characteristics. Therefore, in the first embodiment, the isolation characteristic can be improved without deteriorating the pass characteristic.
　入出力端子側信号配線７Ａは、第１のグラウンド配線８及び第２のグラウンド配線９に挟まれている部分を有することが好ましい。それによって、第１のグラウンド配線８及び第２のグラウンド配線９は電磁シールドとしての機能を果たす。従って、外部からの電界の影響などを抑制することができ、フィルタ特性が劣化し難い。 The input/output terminal side signal wiring 7A preferably has a portion sandwiched between the first ground wiring 8 and the second ground wiring 9 . Thereby, the first ground wiring 8 and the second ground wiring 9 function as electromagnetic shields. Therefore, the influence of an electric field from the outside can be suppressed, and the filter characteristics are less likely to deteriorate.
　本実施形態では、第１のサブ回路の一方端は、第２の並列腕共振子としての並列腕共振子Ｐ３に接続されている。第２のサブ回路の一方端は、第１の並列腕共振子としての並列腕共振子Ｐ１に接続されている。この場合、第１の並列腕共振子及び第２の並列腕共振子の間には、少なくとも１つの直列腕共振子が接続されていることが好ましい。それによって、通過帯域外の減衰量を効果的に大きくすることができる。 In this embodiment, one end of the first sub-circuit is connected to a parallel arm resonator P3 as a second parallel arm resonator. One end of the second subcircuit is connected to a parallel arm resonator P1 as a first parallel arm resonator. In this case, it is preferable that at least one series arm resonator is connected between the first parallel arm resonator and the second parallel arm resonator. As a result, attenuation outside the passband can be effectively increased.
　なお、第１のサブ回路及び第２のサブ回路におけるそれぞれの一方端は、必ずしも並列腕共振子に接続されていなくともよい。第１のグラウンド配線８及び第２のグラウンド配線９のうち少なくとも一方が、並列腕共振子に接続されていてもよい。あるいは、第１のグラウンド配線８及び第２のグラウンド配線９のうち少なくとも一方が、並列腕共振子に接続されていなくてもよい。この場合、第１のグラウンド配線８及び第２のグラウンド配線９のうち少なくとも一方が、並列腕共振子に接続されていないグラウンド端子６に接続されていればよい。これらの場合においても、通過帯域外の減衰量を大きくすることができる。 It should be noted that one end of each of the first sub-circuit and the second sub-circuit does not necessarily have to be connected to the parallel arm resonator. At least one of the first ground wiring 8 and the second ground wiring 9 may be connected to the parallel arm resonator. Alternatively, at least one of the first ground wiring 8 and the second ground wiring 9 may not be connected to the parallel arm resonator. In this case, at least one of the first ground wiring 8 and the second ground wiring 9 should be connected to the ground terminal 6 that is not connected to the parallel arm resonator. Even in these cases, the attenuation outside the passband can be increased.
　以下において、本発明に係る複合フィルタ装置の例を示す。 An example of a composite filter device according to the present invention is shown below.
　図５は、第２の実施形態に係る複合フィルタ装置の回路図である。 FIG. 5 is a circuit diagram of a composite filter device according to the second embodiment.
　複合フィルタ装置１０はデュプレクサである。複合フィルタ装置１０は、第１のフィルタ装置１１Ａと、第２のフィルタ装置１１Ｂとを有する。第１のフィルタ装置１１Ａは送信フィルタであり、第２のフィルタ装置１１Ｂは受信フィルタである。本実施形態では、複合フィルタ装置１０の通信バンドはＢａｎｄ３０である。よって、第１のフィルタ装置１１Ａの通過帯域は２３０５～２３１５ＭＨｚである。第２のフィルタ装置１１Ｂの通過帯域は、２３５０～２３６０ＭＨｚである。なお、複合フィルタ装置１０の通信バンドは上記に限定されない。 The composite filter device 10 is a duplexer. The composite filter device 10 has a first filter device 11A and a second filter device 11B. The first filter device 11A is a transmission filter and the second filter device 11B is a reception filter. In this embodiment, the communication band of the composite filter device 10 is Band30. Therefore, the pass band of the first filter device 11A is 2305-2315 MHz. The pass band of the second filter device 11B is 2350-2360 MHz. Note that the communication band of the composite filter device 10 is not limited to the above.
　第１のフィルタ装置１１Ａ及び第２のフィルタ装置１１Ｂは共通接続端子１２を共有している。図５においては、わかり易くするために、第１のフィルタ装置１１Ａ及び第２のフィルタ装置１１Ｂに、共通接続端子１２を含めずに記載している。図５以外の複合フィルタ装置の回路図においても同様である。本実施形態では、共通接続端子１２はアンテナ端子である。アンテナ端子はアンテナに接続される。よって、第１のフィルタ装置１１Ａ及び第２のフィルタ装置１１Ｂは、共通接続端子１２を介してアンテナに共通接続される。共通接続端子１２は、第１のフィルタ装置１１Ａの出力端子として機能する。一方で、共通接続端子１２は、第２のフィルタ装置１１Ｂの入力端子としても機能する。共通接続端子１２は電極パッドとして構成されている。もっとも、共通接続端子１２は配線として構成されていてもよい。 The first filter device 11A and the second filter device 11B share a common connection terminal 12. In FIG. 5, the common connection terminal 12 is not included in the first filter device 11A and the second filter device 11B for the sake of clarity. The same applies to the circuit diagrams of the composite filter device other than FIG. In this embodiment, the common connection terminal 12 is an antenna terminal. An antenna terminal is connected to the antenna. Therefore, the first filter device 11A and the second filter device 11B are commonly connected to the antenna through the common connection terminal 12 . The common connection terminal 12 functions as an output terminal of the first filter device 11A. On the other hand, the common connection terminal 12 also functions as an input terminal of the second filter device 11B. The common connection terminal 12 is configured as an electrode pad. However, the common connection terminal 12 may be configured as wiring.
　第１のフィルタ装置１１Ａは、第１の実施形態のフィルタ装置１と同様の構成を有する。他方、第２のフィルタ装置１１Ｂは、本発明に係るフィルタ装置ではない。なお、第２のフィルタ装置１１Ｂも本発明のフィルタ装置であってもよい。複合フィルタ装置１０は、少なくとも１個の本発明に係るフィルタ装置を有していればよい。複合フィルタ装置１０はマルチプレクサであってもよい。 The first filter device 11A has the same configuration as the filter device 1 of the first embodiment. On the other hand, the second filter device 11B is not a filter device according to the invention. The second filter device 11B may also be the filter device of the present invention. The composite filter device 10 need only have at least one filter device according to the invention. Composite filter device 10 may be a multiplexer.
　第２のフィルタ装置１１Ｂはラダー型フィルタである。第２のフィルタ装置１１Ｂは、入力端子としての共通接続端子１２と、出力端子１４と、複数の直列腕共振子と、複数の並列腕共振子とを有する。第２のフィルタ装置１１Ｂの複数の直列腕共振子は、直列腕共振子Ｓ１１、直列腕共振子Ｓ１２、直列腕共振子Ｓ１３、直列腕共振子Ｓ１４、直列腕共振子Ｓ１５、直列腕共振子Ｓ１６及び直列腕共振子Ｓ１７である。第２のフィルタ装置１１Ｂの複数の並列腕共振子は、並列腕共振子Ｐ１１、並列腕共振子Ｐ１２、並列腕共振子Ｐ１３、並列腕共振子Ｐ１４及び並列腕共振子Ｐ１５である。本実施形態では、複数の直列腕共振子及び複数の並列腕共振子はいずれも弾性波共振子である。 The second filter device 11B is a ladder filter. The second filter device 11B has a common connection terminal 12 as an input terminal, an output terminal 14, a plurality of series arm resonators, and a plurality of parallel arm resonators. The plurality of series arm resonators of the second filter device 11B are a series arm resonator S11, a series arm resonator S12, a series arm resonator S13, a series arm resonator S14, a series arm resonator S15, and a series arm resonator S16. and a series arm resonator S17. The plurality of parallel arm resonators of the second filter device 11B are a parallel arm resonator P11, a parallel arm resonator P12, a parallel arm resonator P13, a parallel arm resonator P14 and a parallel arm resonator P15. In this embodiment, both the series arm resonators and the parallel arm resonators are elastic wave resonators.
　入力端子としての共通接続端子１２及び出力端子１４の間に、直列腕共振子Ｓ１１、直列腕共振子Ｓ１３、直列腕共振子Ｓ１４、直列腕共振子Ｓ１５及び直列腕共振子Ｓ１６が互いに直列に接続されている。なお、共通接続端子１２及び直列腕共振子Ｓ１３の間において、直列腕共振子Ｓ１１及び直列腕共振子Ｓ１２が互いに並列に接続されている。直列腕共振子Ｓ１５及び出力端子１４の間において、直列腕共振子Ｓ１６及び直列腕共振子Ｓ１７が互いに並列に接続されている。 A series arm resonator S11, a series arm resonator S13, a series arm resonator S14, a series arm resonator S15, and a series arm resonator S16 are connected in series between a common connection terminal 12 as an input terminal and an output terminal 14. It is The series arm resonator S11 and the series arm resonator S12 are connected in parallel between the common connection terminal 12 and the series arm resonator S13. A series arm resonator S16 and a series arm resonator S17 are connected in parallel between the series arm resonator S15 and the output terminal 14 .
　直列腕共振子Ｓ１１及び直列腕共振子Ｓ１３の間の接続点とグラウンド電位との間に、並列腕共振子Ｐ１１が接続されている。直列腕共振子Ｓ１３及び直列腕共振子Ｓ１４の間の接続点とグラウンド電位との間に、並列腕共振子Ｐ１２及び並列腕共振子Ｐ１３が互いに直列に接続されている。直列腕共振子Ｓ１４及び直列腕共振子Ｓ１５の間の接続点とグラウンド電位との間に、並列腕共振子Ｐ１４が接続されている。直列腕共振子Ｓ１５及び直列腕共振子Ｓ１６の間の接続点とグラウンド電位との間に、並列腕共振子Ｐ１５が接続されている。もっとも、第２のフィルタ装置１１Ｂの回路構成は上記に限定されない。 A parallel arm resonator P11 is connected between the connection point between the series arm resonators S11 and S13 and the ground potential. A parallel arm resonator P12 and a parallel arm resonator P13 are connected in series between a connection point between the series arm resonator S13 and the series arm resonator S14 and the ground potential. A parallel arm resonator P14 is connected between the connection point between the series arm resonator S14 and the series arm resonator S15 and the ground potential. A parallel arm resonator P15 is connected between the connection point between the series arm resonator S15 and the series arm resonator S16 and the ground potential. However, the circuit configuration of the second filter device 11B is not limited to the above.
　さらに、第２のフィルタ装置１１Ｂにおける、直列腕共振子Ｓ１１及び直列腕共振子Ｓ１３の間の接続点と、第１のフィルタ装置１１Ａの並列腕共振子Ｐ３との間に、容量素子Ｃが設けられている。本実施形態では、第１のフィルタ装置１１Ａにおける容量部Ｃ１の一端は、並列腕共振子Ｐ３及び容量素子Ｃの間の接続点に接続されている。もっとも、容量部Ｃ１は、第１の実施形態と同様に、グラウンド電位に接続される。なお、容量素子Ｃは設けられていなくともよい。第１のフィルタ装置１１Ａ及び第２のフィルタ装置１１Ｂは、共通接続端子１２以外の部分では接続されていなくともよい。 Furthermore, a capacitive element C is provided between the connection point between the series arm resonator S11 and the series arm resonator S13 in the second filter device 11B and the parallel arm resonator P3 of the first filter device 11A. It is In this embodiment, one end of the capacitive section C1 in the first filter device 11A is connected to a connection point between the parallel arm resonator P3 and the capacitive element C. As shown in FIG. However, the capacitive part C1 is connected to the ground potential as in the first embodiment. Note that the capacitive element C may not be provided. The first filter device 11A and the second filter device 11B may not be connected at a portion other than the common connection terminal 12. FIG.
　図６は、第２の実施形態に係る複合フィルタ装置の略図的平面図である。図６においては、弾性波共振子及び容量素子Ｃを、矩形に２本の対角線を加えた略図により示す。さらに、図６においては、わかり易くするために、第１のフィルタ装置１１Ａ及び第２のフィルタ装置１１Ｂに、共通接続端子１２を含めずに記載している。これらは、他の略図的平面図においても同様である。 FIG. 6 is a schematic plan view of the composite filter device according to the second embodiment. In FIG. 6, the elastic wave resonator and the capacitive element C are shown by a schematic diagram of a rectangle with two diagonal lines added. Furthermore, in FIG. 6, the first filter device 11A and the second filter device 11B are shown without including the common connection terminal 12 for the sake of clarity. These are the same for other schematic plan views.
　第１のフィルタ装置１１Ａ及び第２のフィルタ装置１１Ｂは圧電性基板５を共有している。圧電性基板５上において、各弾性波共振子が構成されている。第１のフィルタ装置１１Ａの各配線は、共通接続端子１２及び共通接続端子側信号配線１７Ｃの部分を除き、第１の実施形態と同様に設けられている。なお、共通接続端子側信号配線１７Ｃは、共通接続端子１２に接続されている信号配線である。他方、第２のフィルタ装置１１Ｂの各配線も適宜設けられている。本実施形態では、並列腕共振子Ｐ１１及び並列腕共振子Ｐ１３は、同じグラウンド端子６に共通接続されている。並列腕共振子Ｐ１４及び並列腕共振子Ｐ１５は、同じグラウンド端子６に共通接続されている。さらに、第２のフィルタ装置１１Ｂは入出力端子側信号配線１７Ｂを有する。入出力端子側信号配線１７Ｂは出力端子１４に接続されている。ところで、容量素子ＣはＩＤＴ型である。よって、容量素子Ｃは複数の電極指を有する。容量素子Ｃの複数の電極指が延びる方向が、各弾性波共振子の複数の電極指が延びる方向と直交するように、容量素子Ｃが配置されている。なお、容量素子Ｃの複数の電極指が延びる方向は上記に限定されない。 The piezoelectric substrate 5 is shared by the first filter device 11A and the second filter device 11B. Each elastic wave resonator is formed on the piezoelectric substrate 5 . Each wiring of the first filter device 11A is provided in the same manner as in the first embodiment except for the common connection terminal 12 and the common connection terminal side signal wiring 17C. The common connection terminal side signal wiring 17C is a signal wiring connected to the common connection terminal 12. As shown in FIG. On the other hand, each wiring of the second filter device 11B is also provided appropriately. In this embodiment, the parallel arm resonator P11 and the parallel arm resonator P13 are commonly connected to the same ground terminal 6 . The parallel arm resonator P14 and the parallel arm resonator P15 are commonly connected to the same ground terminal 6 . Further, the second filter device 11B has an input/output terminal side signal wiring 17B. The input/output terminal side signal wiring 17B is connected to the output terminal 14 . By the way, the capacitive element C is of the IDT type. Therefore, the capacitive element C has a plurality of electrode fingers. The capacitive element C is arranged such that the direction in which the electrode fingers of the capacitive element C extend is orthogonal to the direction in which the electrode fingers of each elastic wave resonator extend. Note that the direction in which the plurality of electrode fingers of the capacitive element C extend is not limited to the above.
　本実施形態においても、第１の実施形態と同様に、通過特性の劣化を招かずして、アイソレーション特性を改善することができる。これを、本実施形態及び第２の比較例を比較することにより、以下において示す。 Also in this embodiment, similarly to the first embodiment, it is possible to improve the isolation characteristic without deteriorating the pass characteristic. This is shown below by comparing the present embodiment and the second comparative example.
　第２の比較例は、第１のグラウンド配線８が設けられていない点において、第２の実施形態と異なる。第２の実施形態及び第２の比較例における第１のフィルタ装置の減衰量周波数特性を比較した。さらに、第２の実施形態及び第２の比較例の複合フィルタ装置のアイソレーション特性を比較した。 The second comparative example differs from the second embodiment in that the first ground wiring 8 is not provided. The attenuation frequency characteristics of the first filter device in the second embodiment and the second comparative example were compared. Furthermore, the isolation characteristics of the composite filter devices of the second embodiment and the second comparative example were compared.
　図７は、第２の実施形態及び第２の比較例における第１のフィルタ装置の減衰量周波数特性を示す図である。図８は、第２の実施形態及び第２の比較例における第１のフィルタ装置の減衰量周波数特性を、広い範囲において示す図である。図９は、第２の実施形態及び第２の比較例の複合フィルタ装置のアイソレーション特性を示す図である。 FIG. 7 is a diagram showing attenuation frequency characteristics of the first filter device in the second embodiment and the second comparative example. FIG. 8 is a diagram showing the attenuation frequency characteristics of the first filter device in the second embodiment and the second comparative example over a wide range. FIG. 9 is a diagram showing isolation characteristics of the composite filter devices of the second embodiment and the second comparative example.
　図７に示すように、第２の実施形態の第１のフィルタ装置１１Ａにおいては、第２の比較例よりも、帯域Ｗ２における最大の減衰量が大きいことがわかる。さらに、第２の実施形態における第１のフィルタ装置１１Ａの通過特性は、第２の比較例における通過特性とほぼ変わらないことがわかる。図８に示すように、第２の実施形態の第１のフィルタ装置１１Ａにおいては、上記帯域Ｗ２だけではなく、広い帯域にわたり減衰量を大きくできることがわかる。図９に示すように、第２の実施形態の複合フィルタ装置１０においては、第２の比較例よりも、アイソレーション特性を大幅に改善できている。以上より、第２の実施形態においては、通過特性の劣化を招かずして、アイソレーション特性を改善することができる。 As shown in FIG. 7, in the first filter device 11A of the second embodiment, the maximum attenuation in the band W2 is larger than that of the second comparative example. Furthermore, it can be seen that the pass characteristic of the first filter device 11A in the second embodiment is almost the same as the pass characteristic in the second comparative example. As shown in FIG. 8, in the first filter device 11A of the second embodiment, the attenuation can be increased not only in the band W2 but also over a wide band. As shown in FIG. 9, in the composite filter device 10 of the second embodiment, the isolation characteristics can be significantly improved as compared with the second comparative example. As described above, in the second embodiment, the isolation characteristic can be improved without deteriorating the pass characteristic.
　図１０は、第３の実施形態に係る複合フィルタ装置の回路図である。図１１は、第３の実施形態に係る複合フィルタ装置の略図的平面図である。 FIG. 10 is a circuit diagram of a composite filter device according to the third embodiment. FIG. 11 is a schematic plan view of a composite filter device according to a third embodiment;
　図１０に示すように、本実施形態は、第２のフィルタ装置２１Ｂが本発明に係るフィルタ装置である点において第２の実施形態と異なる。上記の点以外においては、本実施形態の複合フィルタ装置は第２の実施形態の複合フィルタ装置１０と同様の構成を有する。 As shown in FIG. 10, this embodiment differs from the second embodiment in that the second filter device 21B is the filter device according to the present invention. Except for the above points, the composite filter device of this embodiment has the same configuration as the composite filter device 10 of the second embodiment.
　図１１に示すように、第２のフィルタ装置２１Ｂは、第１のグラウンド配線２８及び第２のグラウンド配線２９を有する。第１のグラウンド配線２８は、グラウンド端子６を介して間接的に並列腕共振子Ｐ１１及び並列腕共振子Ｐ１３と接続されている。第２のグラウンド配線２９は、並列腕共振子Ｐ１４及び並列腕共振子Ｐ１５と接続されている。第１のグラウンド配線２８及び第２のグラウンド配線２９の一部は、入出力端子側信号配線１７Ｂの一部を挟むように配置されている。 As shown in FIG. 11, the second filter device 21B has a first ground wiring 28 and a second ground wiring 29. The first ground wiring 28 is indirectly connected to the parallel arm resonator P11 and the parallel arm resonator P13 via the ground terminal 6 . The second ground wiring 29 is connected to the parallel arm resonator P14 and the parallel arm resonator P15. Parts of the first ground wiring 28 and the second ground wiring 29 are arranged so as to sandwich a part of the input/output terminal side signal wiring 17B.
　入出力端子側信号配線１７Ｂの一部及び第１のグラウンド配線２８の一部が互いに対向している。これにより、図１０に示す容量部Ｃ３が構成されている。入出力端子側信号配線１７Ｂの一部及び第２のグラウンド配線２９の一部が互いに対向している。これにより、図１０に示す容量部Ｃ４が構成されている。より詳細には、第２のフィルタ装置２１Ｂにおいては、出力端子１４と、並列腕共振子Ｐ１１及び並列腕共振子Ｐ１３との間において、容量部Ｃ３を含む第３のサブ回路が設けられている。さらに、出力端子１４と、並列腕共振子Ｐ１４及び並列腕共振子Ｐ１５との間において、容量部Ｃ４を含む第４のサブ回路が設けられている。それによって、第２のフィルタ装置２１Ｂにおいては、通過帯域外の減衰量が大きくなっている。しかも、第３のサブ回路及び第４のサブ回路は、通過特性には影響を与え難い。 A portion of the input/output terminal side signal wiring 17B and a portion of the first ground wiring 28 face each other. Thus, the capacitor section C3 shown in FIG. 10 is configured. A portion of the input/output terminal side signal wiring 17B and a portion of the second ground wiring 29 face each other. Thereby, the capacitor section C4 shown in FIG. 10 is configured. More specifically, in the second filter device 21B, a third sub-circuit including the capacitance section C3 is provided between the output terminal 14 and the parallel arm resonators P11 and P13. . Furthermore, a fourth sub-circuit including a capacitance section C4 is provided between the output terminal 14 and the parallel arm resonators P14 and P15. As a result, the amount of attenuation outside the passband is increased in the second filter device 21B. Moreover, the third sub-circuit and the fourth sub-circuit hardly affect the transmission characteristics.
　以上のように、第１のフィルタ装置１１Ａに加えて、第２のフィルタ装置２１Ｂにおいても、通過特性の劣化を招かずして、通過帯域外の減衰量を大きくすることができる。従って、本実施形態においても、通過特性の劣化を招かずして、アイソレーション特性を改善することができる。 As described above, in addition to the first filter device 11A, also in the second filter device 21B, the attenuation amount outside the passband can be increased without deteriorating the pass characteristics. Therefore, also in this embodiment, the isolation characteristic can be improved without degrading the pass characteristic.
　なお、第１のグラウンド配線２８及び第２のグラウンド配線２９は、必ずしも入出力端子側信号配線１７Ｂを挟んでいなくともよい。入出力端子側信号配線１７Ｂが、第１のグラウンド配線２８と並んで隣接して延びている部分、及び第２のグラウンド配線２９と並んで隣接して延びている部分を有していればよい。 Note that the first ground wiring 28 and the second ground wiring 29 do not necessarily have to sandwich the input/output terminal side signal wiring 17B. It is sufficient that the input/output terminal side signal wiring 17B has a portion extending side by side with the first ground wiring 28 and a portion extending side by side with the second ground wiring 29. .
　第２のフィルタ装置２１Ｂにおいて容量部Ｃ３及び容量部Ｃ４が設けられている場合には、第１のフィルタ装置１１Ａにおいては、容量部Ｃ１及び容量部Ｃ２は必ずしも設けられていなくともよい。 When the capacitance section C3 and the capacitance section C4 are provided in the second filter device 21B, the capacitance section C1 and the capacitance section C2 may not necessarily be provided in the first filter device 11A.
　図１２は、第４の実施形態に係る複合フィルタ装置の回路図である。図１３は、第４の実施形態に係る複合フィルタ装置の略図的平面図である。 FIG. 12 is a circuit diagram of a composite filter device according to the fourth embodiment. FIG. 13 is a schematic plan view of a composite filter device according to a fourth embodiment;
　図１２に示すように、本実施形態は、容量部Ｃ５及び容量部Ｃ６が設けられている点において第３の実施形態と異なる。容量部Ｃ５及び容量部Ｃ６のそれぞれの一方端は、共通接続端子１２に接続されている。容量部Ｃ６は第１のフィルタ装置１１Ａに含まれる。容量部Ｃ５は第２のフィルタ装置２１Ｂに含まれる。上記の点以外においては、本実施形態の複合フィルタ装置３０は第３の実施形態の複合フィルタ装置と同様の構成を有する。 As shown in FIG. 12, this embodiment differs from the third embodiment in that a capacitive section C5 and a capacitive section C6 are provided. One end of each of the capacitance section C5 and the capacitance section C6 is connected to the common connection terminal 12 . Capacitor C6 is included in first filter device 11A. Capacitor C5 is included in second filter device 21B. Except for the above points, the composite filter device 30 of this embodiment has the same configuration as the composite filter device of the third embodiment.
　図１３に示すように、本実施形態においては、第３のグラウンド配線３８及び第４のグラウンド配線３９が設けられている。より具体的には、第３のグラウンド配線３８は、第２のフィルタ装置２１Ｂの並列腕共振子Ｐ１１及び並列腕共振子Ｐ１３に接続されている。第４のグラウンド配線３９は、グラウンド端子６を介して間接的に、第１のフィルタ装置１１Ａの並列腕共振子Ｐ２に接続されている。なお、第３のグラウンド配線３８及び第４のグラウンド配線３９は、互いに異なるグラウンド端子６に接続されている。第３のグラウンド配線３８及び第４のグラウンド配線３９は、共通接続端子側信号配線１７Ｃを挟むように配置されている。上記のように、共通接続端子側信号配線１７Ｃは、共通接続端子１２に接続された信号配線である。 As shown in FIG. 13, in this embodiment, a third ground wiring 38 and a fourth ground wiring 39 are provided. More specifically, the third ground wiring 38 is connected to the parallel arm resonator P11 and the parallel arm resonator P13 of the second filter device 21B. The fourth ground wiring 39 is indirectly connected via the ground terminal 6 to the parallel arm resonator P2 of the first filter device 11A. The third ground wiring 38 and the fourth ground wiring 39 are connected to ground terminals 6 different from each other. The third ground wiring 38 and the fourth ground wiring 39 are arranged so as to sandwich the common connection terminal side signal wiring 17C. As described above, the common connection terminal side signal wiring 17C is a signal wiring connected to the common connection terminal 12 .
　図１２に戻り、複合フィルタ装置３０においては、第３の実施形態と同様の第１～第４のサブ回路が設けられている。さらに、複合フィルタ装置３０においては、共通接続端子１２と、並列腕共振子Ｐ１１及び並列腕共振子Ｐ１３との間において、容量部Ｃ５を含む第５のサブ回路が設けられている。さらに、共通接続端子１２及び並列腕共振子Ｐ２の間において、容量部Ｃ６を含む第６のサブ回路が設けられている。それによって、通過特性の劣化を招かずして、アイソレーション特性を改善することができる。 Returning to FIG. 12, the composite filter device 30 is provided with first to fourth sub-circuits similar to those of the third embodiment. Furthermore, in the composite filter device 30, a fifth sub-circuit including a capacitance section C5 is provided between the common connection terminal 12 and the parallel arm resonators P11 and P13. Furthermore, a sixth sub-circuit including a capacitance section C6 is provided between the common connection terminal 12 and the parallel arm resonator P2. As a result, isolation characteristics can be improved without deteriorating pass characteristics.
　なお、第３のグラウンド配線３８及び第４のグラウンド配線３９は、必ずしも共通接続端子側信号配線１７Ｃを挟んでいなくともよい。共通接続端子側信号配線１７Ｃが、第３のグラウンド配線３８と並んで隣接して延びている部分、及び第４のグラウンド配線３９と並んで隣接して延びている部分を有していればよい。 It should be noted that the third ground wiring 38 and the fourth ground wiring 39 do not necessarily have to sandwich the common connection terminal side signal wiring 17C. It is sufficient that the common connection terminal side signal wiring 17C has a portion extending side by side with the third ground wiring 38 and a portion extending side by side with the fourth ground wiring 39. .
　複合フィルタ装置３０において容量部Ｃ５及び容量部Ｃ６が設けられている場合には、第１のフィルタ装置１１Ａ及び第２のフィルタ装置２１Ｂにおいては、容量部Ｃ１及び容量部Ｃ２並びに容量部Ｃ３及び容量部Ｃ４は必ずしも設けられていなくともよい。容量部Ｃ１及び容量部Ｃ２並びに容量部Ｃ３及び容量部Ｃ４設けられていない場合、第１のフィルタ装置１１Ａ及び第２のフィルタ装置２１Ｂはそれぞれ、少なくとも１つのグラウンド端子６を有していればよい。これにより、第１のフィルタ装置１１Ａが容量部Ｃ６を含み、かつ第２のフィルタ装置１１Ｂが容量部Ｃ５を含む構成とすることができる。他方、例えば、容量部Ｃ１及び容量部Ｃ２並びに容量部Ｃ５及び容量部Ｃ６が設けられており、容量部Ｃ３及び容量部Ｃ４が設けられていない構成であってもよい。この場合には、第１のフィルタ装置１１Ａが複数のグラウンド端子６を有し、かつ第２のフィルタ装置２１Ｂが少なくとも１つのグラウンド端子６を有していればよい。あるいは、例えば、第１のフィルタ装置１１Ａが、容量部Ｃ５及び容量部Ｃ６の双方を含んでいても構わない。 When the capacitor C5 and the capacitor C6 are provided in the composite filter device 30, in the first filter device 11A and the second filter device 21B, the capacitor C1 and the capacitor C2 and the capacitor C3 and the capacitor The part C4 may not necessarily be provided. When the capacitive section C1 and the capacitive section C2 and the capacitive section C3 and the capacitive section C4 are not provided, each of the first filter device 11A and the second filter device 21B should have at least one ground terminal 6. . This allows the first filter device 11A to include the capacitance section C6 and the second filter device 11B to include the capacitance section C5. On the other hand, for example, a configuration in which the capacitance units C1 and C2 and the capacitance units C5 and C6 are provided and the capacitance units C3 and C4 are not provided may be employed. In this case, the first filter device 11A should have a plurality of ground terminals 6 and the second filter device 21B should have at least one ground terminal 6. FIG. Alternatively, for example, the first filter device 11A may include both the capacitive section C5 and the capacitive section C6.
　なお、第５のサブ回路及び第６のサブ回路におけるそれぞれの一方端は、必ずしも並列腕共振子に接続されていなくともよい。第３のグラウンド配線３８及び第４のグラウンド配線３９のうち少なくとも一方が、並列腕共振子に接続されていてもよい。あるいは、第３のグラウンド配線３８及び第４のグラウンド配線３９のうち少なくとも一方が、並列腕共振子に接続されていなくてもよい。この場合、第３のグラウンド配線３８及び第４のグラウンド配線３９のうち少なくとも一方が、並列腕共振子に接続されていないグラウンド端子６に接続されていればよい。これらの場合においても、アイソレーション特性を改善することができる。 It should be noted that one end of each of the fifth sub-circuit and the sixth sub-circuit does not necessarily have to be connected to the parallel arm resonator. At least one of the third ground wiring 38 and the fourth ground wiring 39 may be connected to the parallel arm resonator. Alternatively, at least one of the third ground wiring 38 and the fourth ground wiring 39 may not be connected to the parallel arm resonator. In this case, at least one of the third ground wiring 38 and the fourth ground wiring 39 should be connected to the ground terminal 6 that is not connected to the parallel arm resonator. Also in these cases, the isolation characteristics can be improved.
　例えば、図１４に示す第４の実施形態の変形例においては、第２のサブ回路、第３のサブ回路及び第５のサブ回路のそれぞれの一方端は、並列腕共振子に接続されていない。すなわち、第１のフィルタ装置４１Ａの容量部Ｃ２と、第２のフィルタ装置４１Ｂの容量部Ｃ３及び容量部Ｃ５とは、並列腕共振子に接続されておらず、かつグラウンド端子６に接続されている。なお、第２のフィルタ装置４１Ｂの容量部Ｃ４は、グラウンド端子６を介して間接的に、並列腕共振子Ｐ１１、並列腕共振子Ｐ１３、並列腕共振子Ｐ１４及び並列腕共振子Ｐ１５に接続されている。本変形例においても、通過特性の劣化を招かずして、アイソレーション特性を改善することができる。 For example, in the modification of the fourth embodiment shown in FIG. 14, one end of each of the second sub-circuit, the third sub-circuit and the fifth sub-circuit is not connected to the parallel arm resonator. . That is, the capacitance section C2 of the first filter device 41A and the capacitance sections C3 and C5 of the second filter device 41B are not connected to the parallel arm resonator and are connected to the ground terminal 6. there is Note that the capacitance section C4 of the second filter device 41B is indirectly connected to the parallel arm resonator P11, the parallel arm resonator P13, the parallel arm resonator P14, and the parallel arm resonator P15 via the ground terminal 6. ing. Also in this modified example, the isolation characteristic can be improved without deteriorating the pass characteristic.
　第２～第４の実施形態においては、複合フィルタ装置がデュプレクサである場合の例を示した。もっとも、本発明に係る複合フィルタ装置は、マルチプレクサであってもよい。本明細書においてマルチプレクサとは、３つ以上のフィルタ装置を有し、信号を分離する機能を有する複合フィルタ装置をいう。フィルタ装置は、受信フィルタであってもよく、送信フィルタであってもよい。フィルタ装置はノッチフィルタを含む。以下において、複合フィルタ装置がマルチプレクサである場合の例を示す。 In the second to fourth embodiments, examples were shown in which the composite filter device was a duplexer. However, the composite filter device according to the invention may also be a multiplexer. As used herein, a multiplexer refers to a composite filter device having three or more filter devices and having the function of separating signals. The filter device may be a receive filter or a transmit filter. The filter device includes a notch filter. In the following an example is given where the composite filter device is a multiplexer.
　図１５は、第５の実施形態に係る複合フィルタ装置の模式図である。 FIG. 15 is a schematic diagram of a composite filter device according to the fifth embodiment.
　複合フィルタ装置５０はマルチプレクサである。複合フィルタ装置５０は、共通接続端子１２と、複数のフィルタ装置とを有する。より具体的には、複合フィルタ装置５０の複数のフィルタ装置は、第１のフィルタ装置５１Ａ、第２のフィルタ装置５１Ｂ及び第３のフィルタ装置５１Ｃと、他のフィルタ装置とを含む。複合フィルタ装置５０のフィルタ装置の個数は特に限定されない。複数のフィルタ装置は共通接続端子１２を共有している。 The composite filter device 50 is a multiplexer. Composite filter device 50 has common connection terminal 12 and a plurality of filter devices. More specifically, the multiple filter devices of composite filter device 50 include first filter device 51A, second filter device 51B, third filter device 51C, and other filter devices. The number of filter devices in composite filter device 50 is not particularly limited. A plurality of filter devices share a common connection terminal 12 .
　第１のフィルタ装置５１Ａは本発明に係るフィルタ装置である。複合フィルタ装置５０は、少なくとも１個の本発明に係るフィルタ装置を有していればよい。本実施形態においても、第２の実施形態などと同様に、第１のフィルタ装置５１Ａのフィルタ特性の劣化を招くことなく、第１のフィルタ装置５１Ａと他のフィルタ装置との間のアイソレーション特性を改善することができる。 The first filter device 51A is a filter device according to the present invention. A composite filter device 50 need only comprise at least one filter device according to the invention. Also in the present embodiment, similarly to the second embodiment, etc., the isolation characteristics between the first filter device 51A and other filter devices can be improved without deteriorating the filter characteristics of the first filter device 51A. can be improved.
１…フィルタ装置
３…入力端子
４…出力端子
５…圧電性基板
６…グラウンド端子
７Ａ，７Ｂ…入出力端子側信号配線
８，９…第１，第２のグラウンド配線
１０…複合フィルタ装置
１１Ａ，１１Ｂ…第１，第２のフィルタ装置
１２…共通接続端子
１４…出力端子
１７Ｂ…入出力端子側信号配線
１７Ｃ…共通接続端子側信号配線
２１Ｂ…第２のフィルタ装置
２８，２９…第１，第２のグラウンド配線
３０…複合フィルタ装置
３８，３９…第３，第４のグラウンド配線
４１Ａ，４１Ｂ…第１，第２のフィルタ装置
５０…複合フィルタ装置
５１Ａ～５１Ｃ…第１～第３のフィルタ装置
Ｃ…容量素子
Ｃ１～Ｃ６…容量部
Ｐ１～Ｐ３，Ｐ１１～Ｐ１５…並列腕共振子
Ｓ１～Ｓ４，Ｓ１１～Ｓ１７…直列腕共振子 REFERENCE SIGNS LIST 1 filter device 3 input terminal 4 output terminal 5 piezoelectric substrate 6 ground terminals 7A, 7B input/output terminal side signal wirings 8, 9 first and second ground wirings 10 composite filter device 11A, 11B First and second filter devices 12 Common connection terminal 14 Output terminal 17B Input/output terminal side signal wiring 17C Common connection terminal side signal wiring 21B Second filter devices 28 and 29 First and second filter devices 2 ground wiring 30 ... composite filter devices 38, 39 ... third and fourth ground wiring 41A, 41B ... first and second filter devices 50 ... composite filter devices 51A to 51C ... first to third filter devices C: Capacitance elements C1 to C6: Capacitance units P1 to P3, P11 to P15: Parallel arm resonators S1 to S4, S11 to S17: Series arm resonators

Claims (12)

  1. 　入力端子及び出力端子と、
    　前記入力端子または前記出力端子に接続されている入出力端子側信号配線と、
    　少なくとも１つの直列腕共振子と、
    　少なくとも１つの並列腕共振子と、
    　複数のグラウンド端子と、
    　互いに異なる前記グラウンド端子に接続されている、第１のグラウンド配線及び第２のグラウンド配線と、
    を備え、
    　前記入出力端子側信号配線が、前記第１のグラウンド配線と並んで隣接して延びている部分、及び前記第２のグラウンド配線と並んで隣接して延びている部分を有する、フィルタ装置。     an input terminal and an output terminal;
    an input/output terminal side signal wiring connected to the input terminal or the output terminal;
    at least one series arm resonator;
    at least one parallel arm resonator;
    a plurality of ground terminals;
    a first ground wiring and a second ground wiring connected to the different ground terminals;
    with
    A filter device, wherein the input/output terminal side signal wiring has a portion that extends alongside and adjacent to the first ground wiring and a portion that extends alongside and adjacent to the second ground wiring.
  2. 　前記入出力端子側信号配線が、前記第１のグラウンド配線及び前記第２のグラウンド配線に挟まれている部分を有する、請求項１に記載のフィルタ装置。 2. The filter device according to claim 1, wherein said input/output terminal side signal wiring has a portion sandwiched between said first ground wiring and said second ground wiring.
  3. 　前記第１のグラウンド配線及び前記第２のグラウンド配線のうち少なくとも一方が、前記並列腕共振子に接続されている、請求項１または２に記載のフィルタ装置。 3. The filter device according to claim 1, wherein at least one of said first ground wiring and said second ground wiring is connected to said parallel arm resonator.
  4. 　複数の前記並列腕共振子を備え、
    　前記複数の並列腕共振子が、第１の並列腕共振子及び第２の並列腕共振子を含み、
    　前記第１のグラウンド配線が前記第１の並列腕共振子に接続されており、前記第２のグラウンド配線が前記第２の並列腕共振子に接続されている、請求項３に記載のフィルタ装置。     comprising a plurality of parallel arm resonators,
    the plurality of parallel arm resonators includes a first parallel arm resonator and a second parallel arm resonator;
    4. The filter device according to claim 3, wherein said first ground wiring is connected to said first parallel arm resonator, and said second ground wiring is connected to said second parallel arm resonator. .
  5. 　前記第１の並列腕共振子及び前記第２の並列腕共振子の間に、少なくとも１つの前記直列腕共振子が接続されている、請求項４に記載のフィルタ装置。 5. The filter device according to claim 4, wherein at least one said series arm resonator is connected between said first parallel arm resonator and said second parallel arm resonator.
  6. 　前記第１のグラウンド配線及び前記第２のグラウンド配線のうち少なくとも一方が、前記並列腕共振子に接続されていない前記グラウンド端子に接続されている、請求項１または２に記載のフィルタ装置。 3. The filter device according to claim 1, wherein at least one of said first ground wiring and said second ground wiring is connected to said ground terminal that is not connected to said parallel arm resonator.
  7. 　共通接続端子を共有している複数のフィルタ装置を備え、
    　少なくとも１個の前記フィルタ装置が、請求項１～６のいずれか１項に記載のフィルタ装置である、複合フィルタ装置。     comprising a plurality of filter devices sharing a common connection terminal,
    A composite filter device, wherein at least one said filter device is a filter device according to any one of claims 1-6.
  8. 　前記複数のフィルタ装置のうち少なくとも１個のフィルタ装置が複数のグラウンド端子を有し、かつ他の少なくとも１個のフィルタ装置が少なくとも１つのグラウンド端子を有し、
    　前記共通接続端子に接続されている共通接続端子側信号配線と、
    　互いに異なる前記グラウンド端子に接続されている、第３のグラウンド配線及び第４のグラウンド配線と、
    をさらに備え、
    　前記共通接続端子側信号配線が、前記第３のグラウンド配線と並んで隣接して延びている部分、及び前記第４のグラウンド配線と並んで隣接して延びている部分を有する、請求項７に記載の複合フィルタ装置。     at least one filter device of the plurality of filter devices has a plurality of ground terminals, and at least one other filter device has at least one ground terminal;
    a common connection terminal side signal wiring connected to the common connection terminal;
    a third ground wiring and a fourth ground wiring connected to the different ground terminals;
    further comprising
    8. The signal wiring according to claim 7, wherein said common connection terminal side signal wiring has a portion that extends alongside and adjacent to said third ground wiring and a portion that extends alongside and adjacent to said fourth ground wiring. A composite filter device as described.
  9. 　共通接続端子を共有しており、少なくとも１つの直列腕共振子と、少なくとも１つの並列腕共振子と、少なくとも１つのグラウンド端子と、をそれぞれ有する第１のフィルタ装置及び第２のフィルタ装置と、
    　前記共通接続端子に接続されている共通接続端子側信号配線と、
    　互いに異なる前記グラウンド端子に接続されている、第３のグラウンド配線及び第４のグラウンド配線と、
    を備え、
    　前記共通接続端子側信号配線が、前記第３のグラウンド配線と並んで隣接して延びている部分、及び前記第４のグラウンド配線と並んで隣接して延びている部分を有する、複合フィルタ装置。     a first filter device and a second filter device sharing a common connection terminal and each having at least one series arm resonator, at least one parallel arm resonator, and at least one ground terminal;
    a common connection terminal side signal wiring connected to the common connection terminal;
    a third ground wiring and a fourth ground wiring connected to the different ground terminals;
    with
    The composite filter device according to claim 1, wherein the common connection terminal side signal wiring has a portion extending adjacently alongside the third ground wiring and a portion extending adjacently adjacent to the fourth ground wiring.
  10. 　前記第１のフィルタ装置が送信フィルタであり、前記第２のフィルタ装置が受信フィルタである、請求項９に記載の複合フィルタ装置。 The composite filter device according to claim 9, wherein said first filter device is a transmit filter and said second filter device is a receive filter.
  11. 　前記第３のグラウンド配線及び前記第４のグラウンド配線のうち少なくとも一方が、前記並列腕共振子に接続されている、請求項８～１０のいずれか１項に記載の複合フィルタ装置。 The composite filter device according to any one of claims 8 to 10, wherein at least one of said third ground wiring and said fourth ground wiring is connected to said parallel arm resonator.
  12. 　前記第３のグラウンド配線及び前記第４のグラウンド配線のうち少なくとも一方が、前記並列腕共振子に接続されていない前記グラウンド端子に接続されている、請求項８～１０のいずれか１項に記載の複合フィルタ装置。 11. The device according to any one of claims 8 to 10, wherein at least one of said third ground wiring and said fourth ground wiring is connected to said ground terminal not connected to said parallel arm resonator. composite filter device.
PCT/JP2022/031418 2021-08-24 2022-08-19 Filter device and composite filter device WO2023026990A1 (en)

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Publication number Priority date Publication date Assignee Title
JP2017085262A (en) * 2015-10-26 2017-05-18 株式会社村田製作所 Band pass type filter and duplexer
JP2017204827A (en) * 2016-05-13 2017-11-16 太陽誘電株式会社 Acoustic wave device
WO2019131533A1 (en) * 2017-12-27 2019-07-04 株式会社村田製作所 Elastic wave filter, multiplexer, high-frequency front end circuit, and communication device
JP2021034959A (en) * 2019-08-28 2021-03-01 株式会社村田製作所 Filter module

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017085262A (en) * 2015-10-26 2017-05-18 株式会社村田製作所 Band pass type filter and duplexer
JP2017204827A (en) * 2016-05-13 2017-11-16 太陽誘電株式会社 Acoustic wave device
WO2019131533A1 (en) * 2017-12-27 2019-07-04 株式会社村田製作所 Elastic wave filter, multiplexer, high-frequency front end circuit, and communication device
JP2021034959A (en) * 2019-08-28 2021-03-01 株式会社村田製作所 Filter module

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