WO2023013316A1 - Capteur - Google Patents

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Publication number
WO2023013316A1
WO2023013316A1 PCT/JP2022/026047 JP2022026047W WO2023013316A1 WO 2023013316 A1 WO2023013316 A1 WO 2023013316A1 JP 2022026047 W JP2022026047 W JP 2022026047W WO 2023013316 A1 WO2023013316 A1 WO 2023013316A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
strain
sensor elements
torque
elements
Prior art date
Application number
PCT/JP2022/026047
Other languages
English (en)
Japanese (ja)
Inventor
ありさ 大竹
Original Assignee
日本電産コパル電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産コパル電子株式会社 filed Critical 日本電産コパル電子株式会社
Priority to CN202280043948.8A priority Critical patent/CN117529641A/zh
Publication of WO2023013316A1 publication Critical patent/WO2023013316A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/14—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges

Definitions

  • Embodiments of the present invention relate to sensors that detect force.
  • a torque sensor is known in which a bridge circuit including a plurality of strain sensors detects force transmitted between a first structure and a second structure.
  • a torque sensor that detects an abnormality based on the difference in output voltages of two bridge circuits including a plurality of strain sensors has been disclosed (see, for example, Patent Document 1).
  • An object of the present embodiment is to provide a sensor that reduces the difference in detection accuracy between duplicated detection circuits.
  • a sensor according to an embodiment of the present invention comprises: a first structure formed in a ring shape; a second structure formed in a ring shape on an inner peripheral side of the first structure; A strain-generating body provided between the strain-generating body and a duplicated first-system detection circuit and second-system detection circuit are configured to detect strain arranged line-symmetrically on one side of the strain-generating body. and a plurality of sensor elements.
  • FIG. 1 is an enlarged perspective view of the vicinity of the sensor portion of the torque sensor according to the first embodiment.
  • FIG. 2 is a top view showing the configuration of the torque sensor according to the first embodiment.
  • FIG. 3 is a top view showing the configuration of the sensor section provided with one terminal section according to the first embodiment.
  • FIG. 4 is a top view showing the configuration of a sensor section provided with two terminal sections according to the first embodiment.
  • FIG. 5 is a front view showing the mounting state of the torque sensor according to the first embodiment.
  • FIG. 6 is a cross-sectional view of the torque sensor mounting plate shown in FIG. 5 taken along line AA.
  • FIG. 7 is a simplified diagram showing the state of the torque sensor when an external load is applied to the torque sensor mounting plate according to the first embodiment.
  • FIG. 8 is a top view showing the configuration of the sensor section according to the second embodiment.
  • FIG. 9 is a top view showing the configuration of the sensor section according to the third embodiment.
  • FIG. 1 is an enlarged perspective view of the vicinity of the sensor section 14 of the torque sensor 10 according to the first embodiment.
  • FIG. 2 is a top view showing the configuration of the torque sensor 10 according to this embodiment.
  • the same parts are given the same reference numerals.
  • the torque sensor 10 is not limited to the one described here, and may be changed into various shapes or configurations.
  • the torque sensor 10 may be a sensor with another name such as a force sensor as long as it detects at least torque (z-axis moment Mz).
  • the force sensor detects translational forces Fx, Fy, Fz and moments Mx, My, Mz of the three orthogonal axes (x-axis, y-axis, z-axis) shown in FIG.
  • the torque sensor 10 includes a first structure 11, a second structure 12, a plurality of third structures 13, a plurality of sensor units 14, a case 15, and a cable 16.
  • the first structure 11, the second structure 12 and the third structure 13 are integrally formed as one elastic body.
  • the first structure 11, the second structure 12 and the third structure 13 are made of metal such as stainless steel. Materials other than metal (resin, etc.) may also be used.
  • the first structure 11 and the second structure 12 are formed in an annular shape.
  • the diameter of the second structure 12 is smaller than the diameter of the first structure 11 .
  • the second structure 12 is arranged on the inner peripheral side concentrically with the first structure 11 .
  • a plurality of third structures 13 are radially arranged and provided as beams connecting the first structures 11 and the second structures 12 . Any number of third structures 13 may be provided.
  • the thickness (the length in the z-axis direction) of the third structure 13 is thinner than the thicknesses of the first structure 11 and the second structure 12 .
  • the thickness of the third structure 13 is inclined so as to become thinner toward the center from both ends connected to the first structure 11 or the second structure 12, and the central portion has a uniform thickness. It is flat.
  • the thickness (length in the z-axis direction) of the third structure 13 is made longer than the width (length in the circumferential direction) to facilitate torque detection.
  • the thickness and width of body 13 may be arbitrarily determined.
  • the case 15 is provided so as to cover the hollow portion provided in the central portion of the second structure 12 .
  • a data processing circuit for processing data detected by each sensor unit 14 is provided in the hollow portion.
  • the data processing circuit is electrically connected to each sensor unit 14 via a flexible printed circuit board.
  • the data processing circuit is supplied with power through the cable 16 and outputs the data-processed sensor signal to the outside.
  • the sensor unit 14 detects strain caused by relative movement of the first structure 11 and the second structure 12 . Data indicating the strain detected by the sensor unit 14 is transmitted to the data processing circuit as an electrical signal. The data processing circuit detects the applied force such as torque based on the strain detected by the sensor section 14 . Although four sensor units 14 are provided at equal intervals (90 degree intervals) in the circumferential direction here, any number of sensor units 14 may be provided.
  • the sensor unit 14 includes a strain body 20, four A-system sensor elements 21a, 21b, 21c, and 21d, and four B-system sensor elements 22a, 22b, 22c, and 22d.
  • the sensor section 14 is provided so as to span between the first structure 11 and the second structure 12 . Both ends of the sensor section 14 are fixed to the first structure 11 and the second structure 12, respectively.
  • the first structure 11 and the second structure 12 are formed with recesses 11a and 12a that are thinner than the other portions in order to fix both ends of the sensor section 14 .
  • a cover for protecting the sensor section 14 from external factors such as waterproofing and dustproofing is fitted into the concave portions 11a and 12a on the upper surface of the sensor section 14 .
  • the lower surface of the sensor section 14 may be similarly provided with a cover.
  • the sensor section 14 is attached.
  • a fixing plate 31 is arranged so as to hold both ends of the strain body 20 from above, and both ends of the strain body 20 together with the fixing plate 31 are screwed to the first structure 11 and the second structure 12, respectively. 32 to fix.
  • the sensor unit 14 may be attached in any way.
  • the A system sensor elements 21 a to 21 d and the B system sensor elements 22 a to 22 d are arranged between the first structure 11 and the second structure 12 on the upper surface of the strain body 20 .
  • the A-system sensor elements 21a-21d and the B-system sensor elements 22a-22d are wired to form an A-system detection circuit and a B-system detection circuit, respectively.
  • the two detection circuits are redundant detection circuits for detecting torque and the like, and detect torque and the like independently.
  • the torque sensor 10 outputs torque or the like as a detection result based on detection data from the two detection circuits. Note that the torque sensor 10 may determine the torque or the like as the detection result based on the detection data of one of the two detection circuits.
  • the A system sensor elements 21a to 21d and the B system sensor elements 22a to 22d are strain gauges, and the detection circuit is a full bridge circuit, but the present invention is not limited to this.
  • the detection circuit of each system includes two strain gauges provided on the strain generating body 20, and a portion that does not substantially deform due to the application of torque (for example, the data processing circuit provided on the second structure 12). ) may be a bridge circuit composed of reference resistors provided in the .
  • the four sensor elements 21a to 21d of each system, two sensor elements arbitrarily selected from the sensor elements 22a to 22d, and two reference resistors provided in the data processing circuit form a bridge circuit.
  • the following embodiments are not limited to full bridge circuits, and similar bridge circuits may be configured.
  • FIG. 3 is a top view showing the configuration of the sensor section 14a provided with a terminal section T1 in which the terminals of the sensor elements 21a to 21d and 22a to 22d are gathered in one place.
  • FIG. 4 is a top view showing the configuration of the sensor section 14b provided with terminal sections Ta and Tb in which the terminals of the sensor elements 21a to 21d and 22a to 22d are grouped at two locations for each system. Note that the wiring of the sensor elements 21a to 21d and 22a to 22d is not limited to the configuration described here. For example, the sensor elements 21a to 21d and 22a to 22d may have three or more terminal portions.
  • the strain-generating body 20 has a plate-like shape with a rectangular upper surface and a lower surface.
  • the sensor elements 21a to 21d and 22a to 22d are plate-shaped with rectangular upper and lower surfaces.
  • the arrangement of the sensor elements 21a to 21d and 22a to 22d in the strain generating bodies 20 of the sensor portions 14a and 14b is substantially the same.
  • the A-system sensor elements 21a to 21d are arranged on the strain body 20 on the first structure 11 side (left side in the figure).
  • the B-system sensor elements 22a to 22d are arranged on the strain body 20 on the second structure 12 side (on the right side in the figure).
  • the first A-system sensor element 21a and the second A-system sensor element 21b of the first set are provided close to each other within a non-contact range so as to maintain an electrical insulation distance.
  • the first set of A-system sensor elements 21a and 21b are arranged in substantially the same direction and inclined with respect to the longitudinal direction of the strain generating body 20 so that the ends on the first structure 11 side face outward. be.
  • the third A-system sensor element 21c and the fourth A-system sensor element 21d of the second set are oriented in substantially the same direction and do not contact so as to maintain an electrical insulation distance. are provided in close proximity to each other.
  • the second set of A-system sensor elements 21c and 21d are arranged so as to be symmetrical to the first set of A-system sensor elements 21a and 21b with respect to the center line that halves the strain-generating body 20 in the longitudinal direction. be.
  • the four B-system sensor elements 22a to 22d are line-symmetrical to the four A-system sensor elements 21a to 21d with respect to the center line that halves the strain-generating body 20 in the transverse direction (perpendicular to the longitudinal direction). are arranged so that
  • the terminal portion T1 shown in FIG. 3 is arranged in the center of the strain generating body 20 in the longitudinal direction, and each terminal is arranged adjacent to each other in the lateral direction.
  • Each terminal of the A-system sensor elements 21a to 21d is electrically connected to a terminal located in the center of the terminal portion T1 by two wirings W1.
  • Each terminal of the B-system sensor elements 22a to 22d is electrically connected to terminals located at both ends of the terminal portion T1 by two wirings W1.
  • Each terminal of the sensor elements 21a to 21d and 22a to 22d may be connected to any terminal of the terminal portion T1.
  • Terminal portions Ta and Tb shown in FIG. 4 are configured by dividing the terminal portion T1 shown in FIG. 3 into two.
  • Each terminal of the A-system sensor elements 21a to 21d is electrically connected to the A-system terminal portion Ta by two wires Wa.
  • Each terminal of the B system sensor elements 22a to 22d is electrically connected to the B system terminal portion Tb by two wirings Wb.
  • FIG. 5 is a front view showing the mounting state of the torque sensor 10.
  • FIG. FIG. 6 is a cross-sectional view of the torque sensor mounting plate 41 shown in FIG. 5 taken along line AA.
  • the adapter 42, the speed reducer 43, and the motor 44 are shown simply.
  • the torque sensor 10 is attached to the torque sensor mounting plate 41 . Thereby, the first structure 11 of the torque sensor 10 is fixed to the torque sensor mounting plate 41 .
  • the torque sensor attachment plate 41 is a member attached to a structure to which torque or the like is applied.
  • the second structure 12 of the torque sensor 10 is fixed to a speed reducer 43 connected to a motor 44 via an adapter 42 .
  • torque output from the motor 44 is applied to the torque sensor mounting plate 41 via the reduction gear 43 , the adapter 42 and the torque sensor 10 .
  • the torque sensor mounting plate 41 and the structure to which it is mounted are operated by torque output from the motor 44 .
  • the second structure 12 of the torque sensor 10 is attached to the side to which torque or the like is applied (torque sensor mounting plate 41 or the like), and the first structure 11 of the torque sensor 10 is attached to the side to which torque or the like is applied (motor 44 etc.).
  • FIG. 7 is a simplified diagram showing the state of the torque sensor 10 when an external load is applied to the torque sensor mounting plate 41.
  • FIG. 5 and 7 show two layout patterns P1 and P2 of the four sensor units 14, and the sensor units 14 are attached in one of the two layout patterns P1 and P2. Note that the sensor unit 14 is not limited to these two layout patterns P1 and P2, and other layout patterns may be employed.
  • each sensor unit 14 of both arrangement patterns P1 and P2 is also deformed from the rectangle indicated by the dotted line to the quadrangle indicated by the solid line.
  • the stress received by the external load Fw differs depending on the position where the sensor section 14 is arranged in any of the arrangement patterns P1 and P2.
  • each sensor unit 14 is provided with A-system sensor elements 21a to 21d and B-system sensor elements 22a to 22d that respectively constitute a duplicated A-system detection circuit and B-system detection circuit. Therefore, even if the stress received by each sensor unit 14 is different, the detection accuracy of each detection circuit of each system is substantially the same.
  • the sensor unit 14 having only the A system detection circuit is arranged in the layout pattern P1
  • the sensor unit 14 having only the B system detection circuit is arranged in the layout pattern P2.
  • the redundant 2 it is possible to suppress the difference in detection accuracy between the two detection circuits.
  • A-system sensor elements 21a to 21d and B-system sensor elements 22a to 22d in line symmetry on one side surface (front surface or back surface) of one strain generating body 20, the A-system detection circuit and the B-system detection The data representing the distortion detected by each of the circuits can be approximated to be the same.
  • the A-system sensor elements 21a to 21d and the B-system sensor elements 22a to 22d may be arranged line-symmetrically with respect to the center line that halves the strain-generating body 20 in the longitudinal direction.
  • FIG. 8 is a top view showing the configuration of the sensor section 14A according to the second embodiment.
  • the sensor section 14A is obtained by changing the arrangement of the sensor elements 21a to 21d and 22a to 22d and their wiring in the sensor section 14a according to the first embodiment shown in FIG. Other points are the same as those of the torque sensor 10 according to the first embodiment.
  • the sensor section 14A includes one terminal section T1, similar to the sensor section 14a shown in FIG.
  • the terminal portion T1 is arranged in the center of the strain generating body 20 in the longitudinal direction, and each terminal is arranged adjacent to each other in the lateral direction.
  • Each terminal of the A-system sensor elements 21a to 21d is electrically connected to terminals located at both ends of the terminal portion T1 by two wirings W1A.
  • Each terminal of the B-system sensor elements 22a to 22d is electrically connected to a terminal located in the center of the terminal portion T1 by two wirings W1A.
  • Each terminal of the sensor elements 21a to 21d and 22a to 22d may be connected to any terminal of the terminal portion T1.
  • the first A-system sensor element 21a is inclined with respect to the longitudinal direction of the strain body 20 so that the end on the first structure 11 side of the strain body 20 faces outward. are placed.
  • the fourth A-system sensor element 21d is arranged on the first structural body 11 side of the strain-generating body 20 with respect to the center line that halves the strain-generating body 20 in the longitudinal direction. arranged symmetrically.
  • the second A-system sensor element 21b and the third A-system sensor element 21c are arranged with respect to the center line that halves the strain-generating body 20 in the transverse direction. They are arranged so as to be line-symmetrical with the system sensor element 21d.
  • the B-system sensor elements 22a to 22d are provided in close proximity to the corresponding A-system sensor elements 21a to 21d within a range of non-contact so as to maintain an electrical insulation distance, and are oriented in substantially the same direction.
  • the correspondence between the A system sensor elements 21a to 21d and the B system sensor elements 22a to 22d is determined by the electric circuit positional relationship between the A system detection circuit and the B system detection circuit.
  • the arrangement of the sensor elements 21a to 21d and 22a to 22d in the sensor section 14A is such that in the sensor section 14a shown in FIG.
  • the positions of the B-system sensor element 22a and the fourth B-system sensor element 22d are interchanged.
  • the sensor elements 21a to 21d and 22a to 22d corresponding to each other are arranged in close proximity to each other on the strain generating body 20 between the two duplicated detection circuits, as in the first embodiment. It is possible to obtain the effects of
  • FIG. 9 is a top view showing the configuration of the sensor section 14B according to the third embodiment.
  • the sensor section 14B is obtained by changing the arrangement of the A-system sensor elements 21a to 21d and their wiring in the sensor section 14a according to the first embodiment shown in FIG. Other points are the same as those of the torque sensor 10 according to the first embodiment.
  • the arrangement and wiring of the B-system sensor elements 22a to 22d in the sensor section 14B are the same as those of the sensor section 14a shown in FIG.
  • the A system sensor elements 21a to 21d and the B system sensor elements 22a to 22d are arranged on the strain body 20 on the second structure 12 side.
  • the sensor section 14B includes one terminal section T1, like the sensor section 14a shown in FIG.
  • the terminal portion T1 is arranged in the center of the strain generating body 20 in the longitudinal direction, and each terminal is arranged adjacent to each other in the lateral direction.
  • Each terminal of the A-system sensor elements 21a to 21d is electrically connected to a terminal located in the center of the terminal portion T1 by two wirings W1B.
  • Each terminal of the B-system sensor elements 22a to 22d is electrically connected to terminals located at both ends of the terminal portion T1 by two wirings W1B.
  • Each terminal of the sensor elements 21a to 21d and 22a to 22d may be connected to any terminal of the terminal portion T1.
  • the first A-system sensor element 21a is closer to the second B-system sensor element 22b than the second B-system sensor element 22b inside the strain-generating body 20 so as to maintain an electrical insulation distance within a non-contact range. provided.
  • the first A system sensor element 21a is oriented in substantially the same direction as the second B system sensor element 22b. placed at an angle to the
  • the second A-system sensor element 21b is closer to the first A-system sensor element 21a than the first A-system sensor element 21a on the inner side of the strain generating body 20 within a range of non-contact so as to maintain an electrical insulation distance.
  • the second A system sensor element 21b is oriented in substantially the same direction as the first A system sensor element 21a. placed at an angle to the
  • the third A-system sensor element 21c and the fourth A-system sensor element 21d are arranged relative to the center line that halves the strain-generating body 20 in the longitudinal direction. They are arranged line-symmetrically with the sensor element 21a.
  • the fourth A-system sensor element 21d is located inside the strain-generating body 20 relative to the third B-system sensor element 22c, within a range where it does not come into contact with the third B-system sensor element 22c so as to maintain an electrical insulation distance. provided in close proximity.
  • the third A-system sensor element 21c is closer to the fourth A-system sensor element 21d than the fourth A-system sensor element 21d on the inner side of the strain generating body 20 so as to maintain an electrical insulation distance within a non-contact range. provided.
  • all the sensor elements 21a to 21d and 22a to 22d of the two duplicated detection circuits are arranged on the second structure 12 side of the strain body 20, which is the same as in the first embodiment. It is possible to obtain the effects of
  • the sensor elements 21a to 21d and 22a to 22d may be arranged on the first structure 11 side of the strain body 20 so as to be symmetrical with the arrangement shown in FIG. Even in this way, it is possible to obtain the same effect as in the first embodiment.
  • the present invention is not limited to the above-described embodiments as they are, and can be embodied by modifying the constituent elements without departing from the gist of the present invention at the implementation stage.
  • various inventions can be formed by appropriate combinations of the plurality of constituent elements disclosed in the above embodiments. For example, some components may be omitted from all components shown in the embodiments. Furthermore, components across different embodiments may be combined as appropriate.

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  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

L'invention concerne un capteur (10) comprenant : une première structure (11) qui est formée de manière annulaire ; une seconde structure (12) qui est formée de manière annulaire sur le côté circonférentiel interne de la première structure (11) ; un corps de génération de distorsion (20) qui est disposé entre la première structure (11) et la seconde structure (12) ; et une pluralité d'éléments de capteur (21a-21d, 22a-22d) qui constituent des circuits de détection duplex de premier système et de second système, qui sont disposés symétriquement par rapport à une surface du corps de génération de distorsion (20), et qui détectent la distorsion.
PCT/JP2022/026047 2021-08-03 2022-06-29 Capteur WO2023013316A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202280043948.8A CN117529641A (zh) 2021-08-03 2022-06-29 传感器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021127540A JP2023022592A (ja) 2021-08-03 2021-08-03 センサ
JP2021-127540 2021-08-03

Publications (1)

Publication Number Publication Date
WO2023013316A1 true WO2023013316A1 (fr) 2023-02-09

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JP (1) JP2023022592A (fr)
CN (1) CN117529641A (fr)
WO (1) WO2023013316A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018159715A (ja) * 2018-07-11 2018-10-11 株式会社レプトリノ 力覚センサ及び力覚センサのブリッジ回路構成方法
CN110514341A (zh) * 2019-08-30 2019-11-29 中国科学院长春光学精密机械与物理研究所 一种航天机械臂用具有容错能力的六维力和力矩传感器
JP2020118645A (ja) * 2019-01-28 2020-08-06 日本電産コパル電子株式会社 弾性体とそれを用いた力覚センサ
JP2021503082A (ja) * 2017-11-14 2021-02-04 インテュイティブ サージカル オペレーションズ， インコーポレイテッド 分割ブリッジ回路力センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021503082A (ja) * 2017-11-14 2021-02-04 インテュイティブ サージカル オペレーションズ， インコーポレイテッド 分割ブリッジ回路力センサ
JP2018159715A (ja) * 2018-07-11 2018-10-11 株式会社レプトリノ 力覚センサ及び力覚センサのブリッジ回路構成方法
JP2020118645A (ja) * 2019-01-28 2020-08-06 日本電産コパル電子株式会社 弾性体とそれを用いた力覚センサ
CN110514341A (zh) * 2019-08-30 2019-11-29 中国科学院长春光学精密机械与物理研究所 一种航天机械臂用具有容错能力的六维力和力矩传感器

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CN117529641A (zh) 2024-02-06

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