WO2023008301A1 - 光学積層体、およびその製造方法 - Google Patents
光学積層体、およびその製造方法 Download PDFInfo
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- WO2023008301A1 WO2023008301A1 PCT/JP2022/028322 JP2022028322W WO2023008301A1 WO 2023008301 A1 WO2023008301 A1 WO 2023008301A1 JP 2022028322 W JP2022028322 W JP 2022028322W WO 2023008301 A1 WO2023008301 A1 WO 2023008301A1
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Images
Classifications
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- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
- B32B7/023—Optical properties
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- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/225—Nitrides
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
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- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
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- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
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- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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Definitions
- the adhesion layer is a layer formed to improve the adhesion between the transparent substrate 11 or hard coat layer, which is an organic material film, and the optical function layer 12, which is an inorganic material film.
- the adhesion layer is preferably made of, for example, an oxygen-deficient metal oxide or metal.
- oxygen-deficient metal oxide refers to a metal oxide in which the number of oxygen atoms is less than the stoichiometric composition. Examples of oxygen-deficient metal oxides include SiOx, AlOx, TiOx, ZrOx, CeOx, MgOx, ZnOx, TaOx, SbOx, SnOx, and MnOx.
- a hard coat layer forming step of forming a hard coat layer on the transparent base material 11 and an adhesion layer forming step of forming an adhesion layer may be further provided. .
- a predetermined target (not shown) is installed in each film forming unit 41 .
- a voltage is applied to the target by a known structure.
- a gas supply unit (not shown) that supplies a predetermined reactive gas and a carrier gas to the target at a predetermined flow rate, and a known magnetic field generation source that forms a magnetic field on the surface of the target ( (not shown) are provided.
- an optical monitor constituting the defect detection unit 42 for example, an optical head capable of scanning in the width direction perpendicular to the extension direction of the optical layered body 10 is used to detect the optical functional layer 12 formed on the one surface 11a of the optical layered body 10.
- the defect location D can be detected by measuring the optical characteristics in the width direction of the film, for example, the change in reflectance.
- the defect detection unit 42 detects the defect location D, the defect detection unit 42 outputs the position information of the defect location D to the control unit (not shown).
- an optical function layer formation process a defect inspection process, and, if necessary, a defect area display process are performed. Specifically, while the film forming roll 25 and the guide roll 22 are rotated and the transparent substrate 11 is conveyed at a predetermined conveying speed, the surface 11a of the transparent substrate 11 running on the film forming roll 25 is covered with , forming the optical function layer 12 .
- the high refractive index layers 12a are alternately laminated by the film forming section 41A, and the low refractive index layers 12b are laminated by the film forming section 41B.
- an optical function layer 12 which is an antireflection layer, for example, is formed.
- glow discharge treatment for example, glow discharge treatment, plasma treatment, ion etching, alkali treatment, etc. can be used. Among these, it is preferable to use glow discharge treatment because it is possible to treat a large area.
- various layers may be provided on the other side of the transparent substrate 11 opposite to the one side 11a on which the optical function layer 12 and the like are formed, if necessary.
- a pressure-sensitive adhesive layer used for bonding with other members may be provided.
- another optical film may be provided via this pressure-sensitive adhesive layer.
- Other optical films include, for example, films functioning as polarizing films, retardation compensation films, half-wave plates, and quarter-wave plates.
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- Chemical & Material Sciences (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Pathology (AREA)
- Signal Processing (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Polymers & Plastics (AREA)
- Analytical Chemistry (AREA)
- Medicinal Chemistry (AREA)
- Ceramic Engineering (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202280047466.XA CN117597463A (zh) | 2021-07-26 | 2022-07-21 | 光学层叠体及其制造方法 |
| KR1020237036219A KR20230160878A (ko) | 2021-07-26 | 2022-07-21 | 광학 적층체, 및 그 제조 방법 |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2021121879A JP7203915B1 (ja) | 2021-07-26 | 2021-07-26 | 光学積層体、およびその製造方法 |
| JP2021-121879 | 2021-07-26 |
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| WO2023008301A1 true WO2023008301A1 (ja) | 2023-02-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| PCT/JP2022/028322 WO2023008301A1 (ja) | 2021-07-26 | 2022-07-21 | 光学積層体、およびその製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (2) | JP7203915B1 (ko) |
| KR (1) | KR20230160878A (ko) |
| CN (1) | CN117597463A (ko) |
| TW (1) | TW202314343A (ko) |
| WO (1) | WO2023008301A1 (ko) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014016217A (ja) * | 2012-07-09 | 2014-01-30 | Okura Ind Co Ltd | 欠陥マーキング方法、光学フィルムの製造方法および欠陥マーキング装置 |
| JP2017137527A (ja) * | 2016-02-02 | 2017-08-10 | 日東電工株式会社 | マーキング形成方法およびマーキング装置、ならびにフィルムの製造方法および真空成膜装置 |
| JP2017227898A (ja) * | 2016-06-17 | 2017-12-28 | 日東電工株式会社 | 反射防止フィルムおよびその製造方法、ならびに反射防止層付き偏光板 |
| JP2019173061A (ja) * | 2018-03-27 | 2019-10-10 | 日東電工株式会社 | フィルム製造装置および両面積層フィルムの製造方法 |
| JP2021085760A (ja) * | 2019-11-28 | 2021-06-03 | 住友化学株式会社 | 光学フィルムの製造方法 |
-
2021
- 2021-07-26 JP JP2021121879A patent/JP7203915B1/ja active Active
-
2022
- 2022-07-21 CN CN202280047466.XA patent/CN117597463A/zh active Pending
- 2022-07-21 KR KR1020237036219A patent/KR20230160878A/ko unknown
- 2022-07-21 WO PCT/JP2022/028322 patent/WO2023008301A1/ja active Application Filing
- 2022-07-26 TW TW111127896A patent/TW202314343A/zh unknown
- 2022-12-26 JP JP2022207865A patent/JP2023038209A/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014016217A (ja) * | 2012-07-09 | 2014-01-30 | Okura Ind Co Ltd | 欠陥マーキング方法、光学フィルムの製造方法および欠陥マーキング装置 |
| JP2017137527A (ja) * | 2016-02-02 | 2017-08-10 | 日東電工株式会社 | マーキング形成方法およびマーキング装置、ならびにフィルムの製造方法および真空成膜装置 |
| JP2017227898A (ja) * | 2016-06-17 | 2017-12-28 | 日東電工株式会社 | 反射防止フィルムおよびその製造方法、ならびに反射防止層付き偏光板 |
| JP2019173061A (ja) * | 2018-03-27 | 2019-10-10 | 日東電工株式会社 | フィルム製造装置および両面積層フィルムの製造方法 |
| JP2021085760A (ja) * | 2019-11-28 | 2021-06-03 | 住友化学株式会社 | 光学フィルムの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7203915B1 (ja) | 2023-01-13 |
| CN117597463A (zh) | 2024-02-23 |
| JP2023038209A (ja) | 2023-03-16 |
| KR20230160878A (ko) | 2023-11-24 |
| JP2023017544A (ja) | 2023-02-07 |
| TW202314343A (zh) | 2023-04-01 |
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