WO2023002794A1 - Optical element driving device, camera module, and camera-mounted device - Google Patents

Abstract

This optical element driving device comprises: a movable part that can hold an optical element and has a circuit for driving the optical element; a fixing part that is disposed via a support member at a position spaced apart from the movable part in an optical axis direction and that oscillatably supports the movable part by the support member in an optical axis orthogonal direction orthogonal to the optical axis direction; a connection member that elastically connects the movable part and the fixing part so as to hold a state where the movable part and the fixing part hold the support member therebetween and that forms a conductive path between the circuit and the fixing part; and a non-conductive member that is formed from a non-conductive material and that is disposed so as to surround at least a portion of the periphery of the connection member such that the connection member opposes a portion elastically deformed in the optical axis orthogonal direction.

Description

Optical element driving device, camera module and camera mounting device

The present invention relates to an optical element driving device, a camera module, and a camera mounting device.

In general, mobile terminals such as smartphones are equipped with a small camera module. An optical element driving device for driving an optical element is used in such a camera module.

The optical element driving device has an autofocus function (hereinafter referred to as "AF function", AF: Auto Focus) and a shake correction function (hereinafter referred to as "OIS function", OIS: Optical Image Stabilization) (for example, Patent document 1). The optical element driving device uses the AF function to automatically adjust the focus when shooting a subject, and the OIS function optically corrects shake (vibration) that occurs during shooting to reduce image distortion. .

The optical element driving device as described above includes an AF driving section for moving the lens section in the optical axis direction, and an OIS driving section for swinging the lens section in a plane orthogonal to the optical axis direction. . In Japanese Unexamined Patent Application Publication No. 2002-100001, a supporting member that supports the lens unit in a swingable manner drives the lens unit in a floating state in a direction perpendicular to the optical axis direction. Further, in Patent Document 1, a wall-shaped housing that positions the components of the OIS driving section extends along the outer circumference of the base substrate so as to cover the intervals between the components of the OIS driving section.

U.S. Pat. No. 8,611,734

By the way, in the configuration as described above, if the mobile terminal is carelessly dropped and an impact is applied to the mobile terminal from the outside, the parts in the optical element driving device will shake. At this time, when the lens section shakes, parts that directly or indirectly support the lens section (for example, the above-described support member, etc.) also shake. If the impact is greater than expected and the shaking is greater than expected, the position of the parts that directly or indirectly support the lens may shift or come into contact with other parts, causing malfunctions. have a nature. Moreover, in the above-described configuration, the wall-like housing provided for positioning the components of the OIS driving section extends along the outer periphery of the base, which may increase the size of the device.

An object of the present invention is to provide an optical element driving device, a camera module, and a camera-mounted device that can prevent problems from occurring even if a large impact is applied while suppressing an increase in device size.

An optical element driving device according to the present invention includes:
a movable part capable of holding an optical element and having a circuit for driving the optical element;
A fixed portion arranged at a position spaced from the movable portion in the optical axis direction via a support member, and supporting the movable portion by the support member so as to be swingable in a direction perpendicular to the optical axis, which is perpendicular to the optical axis direction. When,
a connection member that elastically connects the movable portion and the fixed portion so as to maintain a state in which the movable portion and the fixed portion sandwich the support member, and forms a conductive path between the circuit and the fixed portion;
a non-conductive member made of a non-conductive material arranged to surround at least a portion of the periphery of the connection member so as to face the portion of the connection member that elastically deforms in the direction orthogonal to the optical axis;
Prepare.

A camera module according to the present invention includes:
the optical element driving device;
an imaging unit configured to capture a subject image formed by the optical element.

A camera-equipped device according to the present invention includes:
A camera-equipped device that is information equipment or transportation equipment,
the above camera module;
an image processing unit that processes image information obtained by the camera module.

According to the present invention, it is possible to prevent problems from occurring even if a large impact is applied while suppressing an increase in device size.

1 is a front view showing a smartphone equipped with a camera module according to an embodiment of the present invention; FIG. Rear view of the smartphone shown in FIG. 1A A perspective view showing a camera module and an imaging unit 3 is an exploded perspective view of the camera module shown in FIG. 2; FIG. A perspective view of the main body of the optical element driving device shown in FIG. Side view of the main body of the optical element driving device shown in FIG. A plan view of the main body of the optical element driving device shown in FIG. 3 is an exploded perspective view of the main body of the optical element driving device shown in FIG. FIG. 7 is an exploded perspective view of the OIS fixing portion shown in FIG. FIG. 8 is an enlarged view showing an enlarged and disassembled part of the OIS fixing portion shown in FIG. Exploded perspective view of OIS drive unit FIG. 7 is an exploded perspective view of the OIS movable portion shown in FIG. FIG. 11 is an exploded perspective view of the AF section shown in FIG. FIG. 12 is an exploded perspective view of the first stage shown in FIG. FIG. 12 is an enlarged view showing an enlarged and disassembled part of the first stage shown in FIG. 12 ; A perspective view of the AF movable part and the AF driving part shown in FIG. 16 is an exploded perspective view in which the AF drive section is separated from the AF movable section shown in FIG. 15. FIG. FIG. 16 is an exploded perspective view of the AF drive unit shown in FIG. The figure which looked at the AF movable part, the 1st stage, and the 2nd stage which are shown in FIG. 7 from the diagonally downward side. 15A and 15B are diagrams for explaining the positional relationship among the AF resonance section, the plate, and the leaf spring section of the AF power transmission section at the infinite position of the AF drive section shown in FIG. FIG. 16 is a diagram for explaining the positional relationship among the AF resonance section, the plate, and the leaf spring section of the AF power transmission section in the macro position of the AF driving section shown in FIG. 15; FIG. 10 is a diagram showing an example of a non-conductive member provided inside the cover in place of the wall portions provided at the four corners of the fixed portion; FIG. 11 is a diagram showing another example of non-conductive members provided inside the cover in place of the wall portions provided at the four corners of the fixed portion; Front view showing an automobile as a camera-equipped device equipped with an in-vehicle camera module The perspective view which looked at the motor vehicle shown to FIG. 22A from the diagonal rear side

Hereinafter, embodiments of the present invention will be described in detail based on the drawings.

[smartphone]
1A and 1B are diagrams showing a smartphone M (an example of a camera-equipped device) equipped with a camera module A according to the present embodiment. 1A is a front view of the smartphone M, and FIG. 1B is a rear view of the smartphone M. FIG.

Smartphone M has a dual camera consisting of two rear cameras OC1 and OC2. In this embodiment, the camera module A is applied to the rear cameras OC1 and OC2.

Camera module A is equipped with AF and OIS functions, and automatically adjusts the focus when shooting a subject. can do.

[The camera module]
FIG. 2 is a perspective view showing the camera module A and the imaging section 5. As shown in FIG. 3 is an exploded perspective view of the camera module A shown in FIG. 2. FIG. As shown in FIGS. 2 and 3, this embodiment will be described using an orthogonal coordinate system (X, Y, Z). The drawings to be described later are also shown in a common orthogonal coordinate system (X, Y, Z).

For example, when photographing is performed by the smartphone M, the camera module A is mounted so that the X direction is the up-down direction (or the left-right direction), the Y direction is the left-right direction (or the up-down direction), and the Z direction is the front-back direction. . That is, the Z direction is the optical axis direction, and in FIGS. 2 and 3, the upper side (+Z side) is the optical axis direction light receiving side, and the lower side (−Z side) is the optical axis direction imaging side. Further, hereinafter, the X direction and the Y direction orthogonal to the Z axis are referred to as "optical axis orthogonal direction", and the XY plane is referred to as "optical axis orthogonal plane". Also, the direction orthogonal to the optical axis is referred to as "radial direction".

As shown in FIGS. 2 and 3, the camera module A includes an optical element driving device 1 that realizes an AF function and an OIS function, a lens unit 2 having a cylindrical lens barrel housing a lens, and a lens unit 2. An imaging unit 5 for capturing an image of the subject is provided. That is, the optical element driving device 1 is a so-called lens driving device that drives the lens portion 2 as an optical element.

[cover]
In the optical element driving device 1, the optical element driving device main body 4 is covered with a cover 3 on the outside. The cover 3 is a lidded quadrangular cylinder having a rectangular shape in a plan view seen from the optical axis direction. In this embodiment, the cover 3 has a square shape in plan view. The cover 3 has a substantially circular opening 301 on its upper surface. The lens unit 2 is accommodated in the opening 401 of the optical element driving device main body 4 and faces the outside through the opening 301 of the cover 3. For example, as it moves in the optical axis direction, the lens unit 2 moves toward the light receiving side of the opening surface of the cover 3 in the optical axis direction. is configured to protrude into the The inner wall 3a of the cover 3 is fixed to the base 21 (see FIG. 7) of the OIS fixing portion 20 of the optical element driving device main body 4, for example, by adhesion, and the OIS movable portion 10 etc. (see FIG. see).

The cover 3 has a member that blocks electromagnetic waves from the outside of the optical element driving device 1, for example, a shield member made of a conductive material.

[Imaging unit]
The imaging unit 5 is arranged on the imaging side of the optical element driving device 1 in the optical axis direction. The imaging unit 5 has, for example, an image sensor substrate 501 , an imaging device 502 mounted on the image sensor substrate 501 , and a control unit 503 . The imaging device 502 is configured by, for example, a CCD (charge-coupled device) image sensor, a CMOS (complementary metal oxide semiconductor) image sensor, or the like, and captures an object image formed by the lens unit 2 .

The control unit 503 is composed of, for example, a control IC, and controls driving of the optical element driving device 1 . The optical element driving device 1 is mounted on the image sensor substrate 501 and mechanically and electrically connected. Note that the control unit 503 may be provided on the image sensor substrate 501, or may be provided on a camera-equipped device (in this embodiment, the smart phone M) on which the camera module A is mounted.

[Main body of optical element driving device]
4 to 7 are diagrams showing the main body 4 of the optical element driving device. FIG. 4 is a perspective view of the main body 4 of the optical element driving device. FIG. 4 is a diagram of the optical element driving device main body 4 shown in FIG. 3 rotated by 180° around the Z-axis. FIG. 5 is a side view of the main body 4 of the optical element driving device. FIG. 6 is a plan view of the main body 4 of the optical element driving device. FIG. 7 is an exploded perspective view of the main body 4 of the optical element driving device.

The optical element driving device main body 4 includes an OIS movable portion 10, an OIS fixed portion 20, an OIS driving portion 30, an OIS supporting portion 40, and an OIS biasing member 50, as shown in FIG.

The OIS movable portion 10 is a portion that can hold the lens portion 2 and that swings within a plane perpendicular to the optical axis during shake correction. Although details will be described later, the OIS movable section 10 has an AF section 11, a second stage 14, and an OIS support section 40 (X-direction reference ball 42) (see FIG. 11, etc.). Similarly, the AF section 11 has an AF movable section 12, a first stage 13, an AF drive section 15, and an AF support section 16 (see FIG. 12 and the like), although the details will be described later.

The OIS fixing section 20 is arranged at a position separated from the OIS movable section 10 in the optical axis direction via the OIS support section 40, and the OIS support section 40 allows the OIS movable section 10 to swing in the direction perpendicular to the optical axis. This is the supporting part. As shown in FIG. 7, the OIS fixing section 20 has a base 21 and an OIS support section 40 (Y-direction reference ball 41). The OIS movable part 10 is arranged apart from the base 21 in the optical axis direction via the Y-direction reference ball 41 , and the base 21 swings the OIS movable part 10 via the Y-direction reference ball 41 . Support possible. Details of the OIS fixing unit 20 will be described later with reference to FIG.

In addition, although the details will be described later, the OIS movable portion 10 and the OIS fixed portion 20 are biased toward each other, in other words, the OIS supporting portion 40 is held between them. It is elastically connected by a biasing member 50 (see FIG. 7). The OIS urging member 50 is made of a conductive material, and is between a circuit for driving the lens section 2 (wirings 18A, 18B, etc., which will be described later) and a wiring (partially omitted from the drawing) on the OIS fixing section 20 side. It also functions as a connection member that forms a conductive path of In the present embodiment, the OIS biasing members 50 are arranged at the four corner portions (corner portions) of the optical element driving device main body 4 in plan view (see FIG. 6).

The OIS driving section 30 has a first OIS driving section 30X that drives the OIS movable section 10 in the X direction, and a second OIS driving section 30Y that drives the OIS movable section 10 in the Y direction.

In the present embodiment, the entire OIS movable section 10 including the AF section 11 moves as a movable body with respect to movement in the Y direction. In other words, regarding movement in the Y direction, the base 21 of the OIS fixing portion 20 constitutes a fixed body, and the Y direction reference ball 41 functions as an OIS support portion 40 that supports the OIS movable portion 10 so that it can swing in the Y direction. do.

On the other hand, although the details will be described later with reference to FIG. 11, the AF section 11 moves as a movable body with respect to movement in the X direction. That is, with respect to movement in the X direction, the second stage 14 constitutes a fixed body together with the base 21, and the X direction reference ball 42 functions as an OIS support portion 40 that supports the AF portion 11 so as to be swingable in the X direction. do.

[OIS fixing part]
8 is an exploded perspective view of the OIS fixing portion 20. FIG. In FIG. 7, the OIS fixing section 20 has the second OIS driving section 30Y and the sensor substrate 22 attached, whereas in FIG. state.

The OIS fixing section 20 has a base 21, a sensor substrate 22, terminals 23A to 23C, wiring, a wall section 24, a second OIS driving section 30Y, and a Y-direction reference ball 41.

[base]
The base 21 is formed of, for example, polyarylate (PAR), a PAR alloy (for example, PAR/PC) obtained by mixing a plurality of resin materials including PAR, or a molding material made of liquid crystal polymer. The base 21 is a rectangular member in plan view and has a circular opening 211 in the center.

The base 21 has a first base portion 212 forming the main surface of the base 21 and second base portions 213 a and 213 b recessed from the first base portion 212 .

The second base portion 213a corresponds to the portion of the OIS movable portion 10 protruding toward the imaging side in the optical axis direction, that is, the AF motor fixing portion 135 of the first stage 13 (see FIGS. 12 and 13 described later). is provided. Specifically, the second base portion 213a is formed to be one size larger than the AF motor fixing portion 135 in plan view so that interference does not occur during shake correction. A plurality of terminals 23A and wires 23Aa are arranged on the second base portion 213b, and a sensor substrate 22 having magnetic sensors 221X, 221Y, and 221Z is arranged on the plurality of wires 23Aa.

In this manner, the second base portions 213a and 213b are recessed with respect to the first base portion 212, thereby ensuring a movement stroke of the AF movable portion 12, which will be described later. , the height of the optical element driving device 1 can be reduced.

The base 21 also has an OIS motor fixing portion 217 on which the second OIS driving portion 30Y is arranged. The OIS motor fixing portion 217 is provided, for example, near one corner of the base 21, protrudes from the first base portion 212 toward the light receiving side in the optical axis direction, and can hold the second OIS driving portion 30Y. have a shape.

The base 21 also has a Y-direction reference ball holding portion 218 that holds the Y-direction reference ball 41 that constitutes the OIS support portion 40 . The Y-direction reference ball 41 is sandwiched between the Y-direction reference ball holding portion 218 and the Y-direction reference ball holding portion 144 (see FIG. 18 described later) of the second stage 14 facing each other in the Z direction.

The Y-direction reference ball holding portion 218 and the Y-direction reference ball holding portion 144 are recesses having rectangular openings extending in the Y direction. The Y-direction reference ball holding portion 218 and the Y-direction reference ball holding portion 144 have, for example, a substantially V-shaped (tapered) or substantially U-shaped cross section so that the groove width becomes narrower toward the bottom surface of the recess. formed to be

The groove formed by the concave portion having the cross-sectional shape described above is formed parallel to the Y direction, so that the Y direction reference ball holding portion 218 and the Y direction reference ball holding portion 144 are sandwiched. The ball 41 can roll in the Y direction within the recess. That is, the base 21 supports the OIS movable section 10 (second stage 14) through the Y-direction reference ball 41 so as to be movable in the Y-direction.

The Y-direction reference ball holding portion 218 and the Y-direction reference ball holding portion 144 are arranged at four corners of the rectangular base 21 and the second stage 14, and the OIS movable portion 10 (second stage 14) has four It is supported on the base 21 by the Y-direction reference ball 41, that is, at four points. In this way, the Y-direction reference ball 41 is sandwiched by multi-point contact, so that it rolls stably in the Y-direction.

It should be noted that the OIS movable section 10 (second stage 14) should be supported by the base 21 at least at three points or more. For example, when supporting at three points, the Y-direction reference ball holding portion 218 and the Y-direction reference ball holding portion 218 and The Y-direction reference ball holding portion 144 may be arranged.

[Sensor substrate]
The sensor substrate 22 has an area where the AF driving section 15 and the OIS driving section 30 (the first OIS driving section 30X and the second OIS driving section 30Y) are not arranged, that is, the area corresponding to one side of the rectangular planar shape of the base 21. is provided in Accordingly, the power supply lines and signal lines for the magnetic sensors 221X, 221Y, and 221Z can be consolidated, and the wiring structure in the base 21 can be simplified.

The sensor substrate 22 has wiring including power supply lines and signal lines for the magnetic sensors 221X, 221Y, and 221Z (not shown). Magnetic sensors 221X, 221Y, and 221Z are mounted on the sensor substrate 22 . The magnetic sensors 221X, 221Y, and 221Z are composed of, for example, Hall elements or TMR (Tunnel Magneto Resistance) sensors, etc., and are electrically connected to the wiring 23Aa and the terminals 23A via wiring formed on the sensor substrate 22. .

Although details will be described later with reference to FIG. 18, a magnet 17X is arranged at a position facing the magnetic sensor 221X on the first stage 13 that moves in the X direction. The position of the first stage 13 in the X direction, that is, the position of the OIS movable part 10 in the X direction is detected by an X-direction position detection unit including the magnetic sensor 221X and the magnet 17X.

Also, on the second stage 14 that moves in the Y direction, a magnet 17Y is arranged at a position facing the magnetic sensor 221Y (see FIG. 18). A Y-direction position detection unit including the magnetic sensor 221Y and the magnet 17Y detects the Y-direction position of the second stage 14, that is, the Y-direction position of the OIS movable unit 10. FIG.

Also, in the AF movable portion 12 that moves in the Z direction, a magnet 17Z is arranged at a position facing the magnetic sensor 221Z (see FIG. 18). The Z-direction position of the AF movable section 12 is detected by a Z-direction position detection section including the magnetic sensor 221Z and the magnet 17Z.

Instead of the magnets 17X, 17Y, 17Z and the magnetic sensors 221X, 221Y, 221Z, an optical sensor such as a photoreflector is used to detect the position of the OIS movable portion 10 in the X and Y directions and the position of the AF movable portion 12 in the Z direction. may be detected.

[Terminals and wiring]
Wires are embedded in the base 21 by, for example, insert molding, and ends of the wires are exposed as terminals 23A to 23C. The terminal 23A is the end of the wiring 23Aa that serves as power supply lines (for example, 4 lines) and signal lines (for example, 6 lines) to the magnetic sensors 221X, 221Y, and 221Z of the sensor substrate 22. FIG. The terminal 23A is electrically connected to wiring (not shown) formed on the sensor substrate 22 via wiring 23Aa.

The terminal 23B is the end of a wiring (not shown) that serves as a power supply line to the AF driving section 15 and the first OIS driving section 30X. The wiring is exposed from, for example, openings 214 formed at the four corners of the base 21 and electrically connected to the OIS biasing member 50 . Power is supplied to the AF driving section 15 and the first OIS driving section 30X via the OIS biasing member 50 .

The terminal 23C is the end of the wiring 23Ca that serves as a power supply line to the second OIS driving section 30Y. The wiring 23Ca is exposed from openings 215 and 216 formed in the base 21 at the portion where the OIS motor fixing portion 217 is arranged, and is electrically connected to the second OIS driving portion 30Y.

[OIS drive unit]
The OIS driving section 30 is an actuator that moves the OIS movable section 10 in the X direction and the Y direction. Specifically, the OIS driving section 30 includes a first OIS driving section 30X that moves a part (AF section 11) of the OIS movable section 10 in the X direction, and a second OIS driving section 30X that moves the entire OIS movable section 10 in the Y direction. and a portion 30Y.

The OIS drive unit 30 will be described with reference to FIGS. 9 to 14 together with FIG. FIG. 9 is an enlarged view showing an enlarged and exploded part of the OIS fixing portion 20. As shown in FIG. FIG. 10 is an exploded perspective view of the OIS driving section 30. FIG. 11 is an exploded perspective view of the OIS movable part 10. FIG. 12 is an exploded perspective view of the AF section 11. FIG. FIG. 13 is an exploded perspective view of the first stage 13. FIG. FIG. 14 is an enlarged view showing an enlarged and exploded part of the first stage 13. As shown in FIG.

Note that FIG. 10 shows a state in which each member of the second OIS driving section 30Y as the OIS driving section 30 is disassembled. The first OIS driving section 30X has the same configuration as the second OIS driving section 30Y, although there is a difference in the direction in which it is arranged. Therefore, in FIG. explain.

The first OIS drive section 30X and the second OIS drive section 30Y have ultrasonic motors that serve as drive sources for moving the OIS movable section 10. The first OIS driving section 30X is fixed to the OIS motor fixing section 134 along the X direction of the first stage 13 (see FIG. 13). In addition, the second OIS driving section 30Y is fixed to the OIS motor fixing section 217 along the Y direction of the base 21 (see FIG. 8). That is, the first OIS driving section 30X and the second OIS driving section 30Y are arranged along sides orthogonal to each other.

The OIS drive section 30 has an OIS resonance section 31, an OIS piezoelectric element 32, and an OIS power transmission section 34, as shown in FIG. The driving force of the OIS drive section 30 is transmitted to other members via the OIS power transmission section 34 . Specifically, the first OIS driving section 30X is connected to the second stage 14 via the OIS power transmission section 34, and the driving force thereof is transmitted. Also, the second OIS drive section 30Y is connected to the second stage 14 via the OIS power transmission section 34, and the driving force thereof is transmitted. In the OIS drive section 30, the OIS resonance section 31 constitutes an active element, and the OIS power transmission section 34 constitutes a passive element.

The OIS resonance part 31 is made of a conductive material, resonates with the vibration of the OIS piezoelectric element 32, which will be described later, and converts the vibrational motion into linear motion. The OIS resonator 31 is formed by, for example, laser processing, etching processing, press processing, or the like of a metal plate.

The OIS resonance section 31 has a trunk section 311, two arm sections 312, a protruding section 313 and a conducting section 314, as shown in FIG.

In the OIS resonance part 31 , the trunk part 311 is a substantially rectangular part sandwiched between the OIS piezoelectric elements 32 .

The arm part 312 extends in the X direction or the Y direction from the upper and lower parts of the body part 311 . The two arm portions 312 have symmetrical shapes, and their free ends abut the OIS power transmission portion 34 and resonate with the vibration of the OIS piezoelectric element 32 to deform symmetrically.

The projecting portion 313 extends from the central portion of the body portion 311 in the X direction or the Y direction. A through hole 313 a through which the rivet 35 is inserted is formed in the projecting portion 313 .

Here, the OIS motor fixing portion 134 of the first stage 13 is formed with a rivet mounting portion 134a having a through hole through which the rivet 37 is inserted (see FIGS. 13 and 14). The rivet 37 is inserted through the through-hole 313a of the projecting portion 313 and the through-hole of the rivet mounting portion 134a from the outside to the inside of the optical element driving device main body 4 (see FIG. 14). is stopped by In addition, the outside of the rivet 37 is covered with a resin member 39 . The OIS resonance section 31 of the first OIS driving section 30X is fixed to the OIS motor fixing section 134 (first stage 13 side) by the rivet 37 and the fastener 38 .

The OIS motor fixing portion 217 of the base 21 is also formed with a rivet mounting portion 217a having a through-hole for inserting the rivet 35 (see FIGS. 8 and 9). The rivet 35 is inserted through the through hole of the rivet mounting portion 217a and the through hole 313a of the projecting portion 313 from the inside to the outside of the optical element driving device main body 4 (see FIG. 9), and the tip of the rivet 35 is attached to the fastener 36. is stopped by The OIS resonance section 31 of the second OIS driving section 30Y is fixed to the OIS motor fixing section 217 (on the side of the base 21) by the rivet 35 and the fastener 36. As shown in FIG.

By using the rivets 35 and 37 and the fasteners 36 and 38 in this manner, the OIS resonators 31 of the first OIS driving section 30X and the second OIS driving section 30Y can be firmly fixed to the OIS motor fixing sections 217 and 134. can. Therefore, even if a large impact is applied from the outside, the OIS resonance section 31 will not come off or shift from the OIS motor fixing sections 217 and 134, and the reliability of the OIS drive section 30 can be improved.

Here, the OIS resonance units 31 of the first OIS drive unit 30X and the second OIS drive unit 30Y are fixed to the OIS motor fixing units 217 and 134 using the rivets 35 and 37 and the fasteners 36 and 38. You may fix using another member. For example, it may be fixed using a fixing material such as a resin-based adhesive.

The conducting portion 314 extends from the central portion of the body portion 311 to the side opposite to the projecting portion 313 . In the first OIS driving section 30X, the conducting section 314 is electrically connected to the wiring 18A of the first stage 13 by, for example, solder (not shown). In the second OIS driving section 30Y, the conducting section 314 is electrically connected to the wiring 23Ca exposed from the opening 215 of the base 21, for example, by soldering (not shown).

The OIS piezoelectric element 32 is, for example, a plate-like element made of ceramic material, and generates vibration by applying a high-frequency voltage. The two OIS piezoelectric elements 32 are attached and arranged so as to sandwich the trunk portion 311 of the OIS resonance portion 31 .

Here, in the first OIS driving section 30X, the OIS piezoelectric element 32 is electrically connected to the wiring 18B of the first stage 13 by, for example, an electrode member (not shown). In addition, in the second OIS driving section 30Y, the OIS piezoelectric element 32 is electrically connected to part of the wiring 23Ca by, for example, an electrode member (not shown).

Thus, the OIS piezoelectric element 32 of the first OIS driving section 30X is electrically connected to the wiring 18A and wiring 18B of the first stage 13 via the conducting section 314 and the electrode member. Further, the OIS piezoelectric element 32 of the second OIS driving section 30Y is electrically connected to the wiring 23Ca of the base 21 via the conducting section 314 and the electrode member. Therefore, voltage can be applied to the OIS piezoelectric elements 32 of the first OIS driving section 30X and the second OIS driving section 30Y, and the OIS piezoelectric elements 32 vibrate by applying the voltage.

The OIS resonance section 31 described above has at least two resonance frequencies, and deforms with different behavior for each resonance frequency. In other words, the overall shape of the OIS resonator 31 is set so that it deforms with different behaviors for the two resonance frequencies. The different behaviors are the behavior of advancing the OIS power transmission section 34 in the X direction or the Y direction and the behavior of retreating. Therefore, by vibrating the OIS piezoelectric element 32 at a desired resonance frequency, the OIS power transmission section 34 can be moved forward or backward in the X direction or the Y direction.

The OIS power transmission section 34 is a chucking guide extending in the X direction or the Y direction, one end of which is in contact with the arm section 312 of the OIS resonance section 31 and the other end of which is connected to the second stage 14 . The OIS power transmission section 34 has an OIS motor contact section 341 , a connecting section 342 and a stage fixing section 343 .

The OIS motor contact portion 341 contacts the free end portion of the arm portion 312 of the OIS resonance portion 31 . The stage fixing portion 343 is arranged at the end portion of the OIS power transmission portion 34 and fixed to the OIS chucking guide fixing portions 145X and 145Y (see FIG. 11) of the second stage 14 . The connecting portion 342 is a portion that connects the OIS motor contact portion 341 and the stage fixing portion 343 , and is formed so as to branch from the stage fixing portion 343 into two.

The width between the OIS motor contact portions 341 is set wider than the width between the free ends of the arm portions 312 of the OIS resonance portion 31 . For example, at the connecting portion between the connecting portion 342 and the stage fixing portion 343 , the OIS motor contact portion 341 is formed by interposing a separation portion 344 larger than the width of the connection end portion between the two connecting portions 342 . You can widen the gap. The separating portion 344 is formed integrally with the stage fixing portion 343, for example.

By making the width between the OIS motor contact portions 341 wider than the width between the free ends of the arm portions 312, when the OIS power transmission portion 34 is attached between the arm portions 312, the connecting portion 342 acts as a plate spring. , and an urging force acts in the direction of pushing the arm portion 312 apart. This urging force holds the OIS power transmission section 34 between the free ends of the arm section 312 , and efficiently transmits the driving force from the OIS resonance section 31 to the OIS power transmission section 34 .

In the example shown in FIG. 10, in the stage fixing portion 343, one side (the front side in the drawing) of the mounting portion of the connecting portion 342 is open. It may be structured such that it is sandwiched between (back side and front side in the figure). In this case, it is possible to prevent the connecting portion 342 from slipping and dropping over time, and the reliability of the OIS driving portion 30 is improved.

The OIS resonance portion 31 and the OIS power transmission portion 34 are in contact with each other while being biased. Therefore, the movement stroke of the OIS movable portion 10 can be lengthened without enlarging the outer shape of the optical element driving device 1 simply by enlarging this contact portion in the X direction or the Y direction.

The first OIS driving section 30X is fixed to the first stage 13 (on the side of the OIS movable section 10) via the OIS motor fixing section 134 (see FIGS. 13 and 14), and is connected via the OIS power transmission section 34 to the first stage 13. 2 stage 14 (see FIG. 11). The first OIS driving section 30X is driven during shake correction in the X direction, and drives the first stage 13 (OIS movable section 10) with respect to the second stage 14 so as to move in the X direction. Note that the first OIS driving section 30X moves together with the first stage 13 (OIS movable section 10) when the second OIS driving section 30Y corrects the shake in the Y direction.

Further, the second OIS driving section 30Y is fixed to the base 21 (on the side of the OIS fixing section 20) via the OIS motor fixing section 217 (see FIG. 8), and is connected to the second stage 14 via the OIS power transmission section . (see FIG. 7). The second OIS driving section 30Y is driven during shake correction in the Y direction, and drives the second stage 14 to move in the Y direction with respect to the base 21 (OIS fixing section 20). In this way, the second OIS driving section 30Y moves the second stage 14 in the Y direction with respect to the base 21 (OIS fixing section 20), and therefore is affected by the shake correction in the X direction by the first OIS driving section 30X. Absent.

That is, the movement by one OIS drive unit 30 is not hindered by the structure of the other OIS drive unit 30. Therefore, it is possible to prevent the rotation of the OIS movable part 10 around the Z axis, and it is possible to precisely swing the OIS movable part 10 within the XY plane.

[OIS support part]
The OIS supporting portion 40 (supporting member) supports the OIS movable portion 10 with respect to the OIS fixed portion 20 so as to be swingable in the direction perpendicular to the optical axis while being spaced apart in the optical axis direction. In this embodiment, the OIS support section 40 has four Y-direction reference balls 41 interposed between the OIS movable section 10 (second stage 14) and the base 21 (see FIGS. 7 and 8). Also, the OIS support section 40 has four X-direction reference balls 42 interposed between the first stage 13 and the second stage 14 in the OIS movable section 10 (see FIG. 11).

In the present embodiment, as described above, the four Y-direction reference balls 41 are rollable in the Y-direction, and the rollable direction is restricted to the Y-direction. As will be described later with reference to FIG. 11, the four X-direction reference balls 42 can roll in the X direction, and the direction in which they can roll is restricted to the X direction. By restricting the rolling directions of the Y-direction reference ball 41 and the X-direction reference ball 42 in this manner, the OIS movable portion 10 can be oscillated accurately within the XY plane. The number of Y-direction reference balls 41 and X-direction reference balls 42 that constitute the OIS support portion 40 can be changed as appropriate.

[Wall and OIS biasing member]
OIS biasing members 50 are arranged at four corners (corners) of the rectangular OIS movable portion 10 and the OIS fixed portion 20, respectively. The OIS biasing member 50 is composed of, for example, an extension coil spring, and connects the OIS movable section 10 and the OIS fixed section 20 . The end portion of the OIS biasing member 50 on the imaging side in the optical axis direction is connected to wiring (not shown) exposed from the opening 214 of the base 21 and connected to the terminal 23B. On the other hand, the ends on the light receiving side in the optical axis direction are connected to wirings 18A, 18B, 18C, and 18D of the first stage 13 (see FIGS. 3 to 6).

The OIS biasing member 50 receives a tensile load when the OIS movable part 10 and the OIS fixed part 20 are connected, and acts so that the OIS movable part 10 and the OIS fixed part 20 come closer to each other. That is, the OIS movable section 10 is held so as to be able to swing within the XY plane while being biased toward the imaging side in the optical axis direction (pressed against the base 21) by the OIS biasing member 50. there is As a result, the OIS movable portion 10 can be held in a stable state without rattling.

Also, the OIS biasing member 50 is made of a conductive material and functions as a power supply line (conductive path) to the AF driving section 15 and the first OIS driving section 30X.

In this way, the OIS biasing member 50 functions as a power supply line, so when a large impact is applied from the outside, the OIS biasing member 50 shakes and comes into contact with other members, causing a short circuit. there is a possibility. Therefore, a wall portion 24 made of a non-conductive material (non-conductive material) is formed locally at a position corresponding to the OIS biasing member 50 in the OIS fixing portion 20 so as to surround at least a part of the periphery of the OIS biasing member 50 . conductive member) is provided.

In the case of the present embodiment, the cover 3 is a member made of a conductive material and close to the position of the OIS biasing member 50 . Therefore, the wall portion 24 is arranged so as to be interposed between the cover 3 and the OIS biasing member 50 . For example, it is arranged so as to surround the radially outer portion of the OIS movable portion 10 in the periphery of the OIS biasing member 50 . Since the wall portion 24 is interposed between the cover 3 and the OIS biasing member 50, even if the OIS biasing member 50 shakes when a large external impact is applied, the wall portion 24 prevents the OIS biasing member from It is possible to prevent the force member 50 from coming into contact with the cover 3 (inner wall 3a). As a result, short circuits can be prevented.

In addition, the OIS biasing member 50 is arranged in notches 137 and 147 obtained by notching the four corners (corner portions) of the first stage 13 and the second stage 14 (see FIGS. 3 to 7). reference). Since the notches 137 and 147 are formed by notching the four corners of the first stage 13 and the second stage 14, the wall portions 24 can be arranged at the four corners of the base 21 facing the four notched corners. More specifically, it does not extend so as to face the forming surfaces forming the notches 137 and 147 and not so as to face the edge portions of the first stage 13 and the second stage 14 excluding the notches 137 and 147. As such, the wall portion 24 is formed. By forming and arranging the wall portion 24 in this manner, the wall portion 24 can be arranged in the vicinity of the OIS biasing member 50 arranged in the notches 137 and 147 . Therefore, it is not necessary to increase the size of the base 21, and it is possible to reduce the size of the optical element driving device 1 while suppressing an increase in the size of the device.

The wall portion 24 is formed so as to surround the OIS biasing member 50 together with the cutout portions 137 and 147, and is, for example, substantially L-shaped in plan view. In this way, by surrounding the OIS biasing member 50 with the wall portion 24 together with the notches 137 and 147, even if the OIS biasing member 50 shakes when a large impact is applied from the outside, the OIS biasing member 50 is It is possible to prevent the biasing member 50 from coming into contact with other members. Note that the wall portions 24 need only extend from the four corners of the base 21 in the X direction and the Y direction so as not to interfere with the movement of the OIS movable portion 10 .

In addition, the wall portion 24 extends from the base 21 toward the light receiving side in the optical axis direction in the Z direction. As described above, the end of the OIS biasing member 50 on the imaging side (−Z side) in the optical axis direction is connected to the wiring (not shown) exposed through the opening 214 of the base 21, The ends on the light receiving side (+Z side) are connected to wirings 18A, 18B, 18C, and 18D. When the OIS biasing member 50 is displaced by shaking, it elastically deforms in the direction orthogonal to the optical axis with the connection portions to the wirings 18A, 18B, 18C, 18D, etc. as two fixed ends on the -Z side and the +Z side. In that case, the portion where the OIS biasing member 50 undergoes large elastic deformation due to shaking is the central portion between the two fixed ends.

Therefore, the wall portion 24 has a height so as to cover, including the position facing the central portion, that is, to cover more than half of the length between the two fixed ends of the OIS biasing member 50. In addition, it is desirable to stand upright from the base 21 toward the light receiving side in the optical axis direction. In this embodiment, the wall portion 24 is formed integrally with the base 21 and extends from the base 21 toward the light receiving side in the optical axis direction.

Note that the wall portion 24 may be provided on the first stage 13 instead of the base 21 as long as it can be arranged so as not to affect the movement of the first stage 13 in the direction perpendicular to the optical axis (the X direction and the Y direction). In this case, for example, the wall portion 24 is formed integrally with the first stage 13, extends from the first stage 13 toward the imaging side in the optical axis direction, and extends between the two fixed ends of the OIS biasing member 50. It is desirable to have a length that covers more than half of the length. Furthermore, the wall portion 24 may be provided on both the base 21 and the first stage 13 . That is, a plurality of wall portions 24 may be arranged along the longitudinal direction of the OIS biasing member 50 . In this case, a gap is provided between both wall portions 24 so that the wall portion 24 on the base 21 side and the wall portion 24 on the first stage 13 side do not contact each other.

Also, the wall portion 24 may be provided so as to surround the entire circumference of the OIS biasing member 50 in the Z direction instead of a part of the circumference of the OIS biasing member 50 . In this case, even if there is a conductive material around the OIS biasing member 50 other than the cover 3, the occurrence of a short circuit can be prevented.

Further, the inside of the wall portion 24 provided so as to surround the entire circumference of the OIS biasing member 50 in the Z direction is filled with a damper material, and the damper material is filled between the wall portion 24 and the OIS biasing member 50 . may be placed. With such a configuration, the occurrence of a short circuit is prevented, and the occurrence of unnecessary resonance (higher-order resonance mode) of the OIS biasing member 50 is suppressed by the damper material, so that operational stability can be ensured. As the damper material, for example, an ultraviolet curable silicone gel is used and cured by irradiating ultraviolet rays. The damper material is not limited to ultraviolet curable resin such as ultraviolet curable silicone gel, and any material having a damper effect can be applied.

[OIS moving part]
The OIS movable section 10 will be described with reference to FIGS. 11 to 13. FIG. The OIS movable section 10 is configured to be able to hold the lens section 2, and has an AF section 11, a second stage 14, etc., as shown in FIGS. The AF section 11 also includes an AF movable section 12, a first stage 13, an AF drive section 15, an AF support section 16, and the like.

Regarding movement in the Y direction, the entire OIS movable section 10 including the first stage 13 and the second stage 14 is a movable body. On the other hand, with respect to movement in the X direction, the second stage 14 functions as a fixed body together with the OIS fixed section 20, and only the AF section 11 (AF movable section 12 and first stage 13) functions as a movable body. The first stage 13 also functions as an AF fixed section that supports the AF movable section 12 .

[AF moving part]
The AF movable portion 12 will be described with reference to FIGS. 15 to 18. FIG. 15 is a perspective view of the AF movable section 12 and the AF driving section 15. FIG. FIG. 16 is an exploded perspective view in which the AF driving section 15 is separated from the AF movable section 12. FIG. 17 is an exploded perspective view of the AF driving section 15. FIG. FIG. 18 is a diagram of the AF movable section 12, the first stage 13, and the second stage 14 as seen obliquely from below.

The AF movable part 12 is a lens holder capable of holding the lens part 2 (see FIG. 3), and moves in the optical axis direction during focusing. The AF movable part 12 is arranged radially inward (on the side of the lens part 2) with a gap from the first stage 13 (AF fixed part), and is supported by the first stage 13 via an AF support part 16, which will be described later. be done.

The AF movable part 12 is made of, for example, polyarylate (PAR), a PAR alloy obtained by mixing a plurality of resin materials including PAR, liquid crystal polymer, or the like. The AF movable portion 12 has a cylindrical lens housing portion 121 . The lens portion 2 is fixed to the inner peripheral surface of the lens accommodating portion 121 by, for example, adhesion.

The AF movable portion 12 has a flange portion 122 protruding radially outward from the outer peripheral surface of the lens accommodating portion 121 on the light receiving side (upper side) in the optical axis direction. The image formation side (lower side) of the flange portion 122 in the optical axis direction is in contact with a flange receiving portion 131a of the first stage 13, which will be described later, thereby restricting the movement of the AF movable portion 12 toward the image formation side in the optical axis direction. . In the present embodiment, the flange portion 122 abuts on the flange receiving portion 131a in a reference state in which the AF driving portion 15 is not driven.

The AF movable portion 12 also has a projecting portion 123 that projects radially outward from a portion of the outer peripheral surface of the flange portion 122 . The protrusions 123 are preferably arranged at regular intervals around the optical axis in plan view. In this embodiment, four protruding portions 123 are provided at equal intervals of 90° around the optical axis.

One protrusion 123a of the four protrusions 123 extends toward the imaging side in the optical axis direction, and a magnet 17Z for detecting the Z position is provided inside the extended portion. . As described above, the magnet 17Z is arranged at a position facing the magnetic sensor 221Z for detecting the Z position of the sensor substrate 22 in the optical axis direction (see FIG. 7).

The protrusion 123 described above is inserted into a guide groove 132 of the first stage 13, which will be described later, and moves along the guide groove 132 when the AF movable section 12 moves in the Z direction. Thus, the guide groove 132 functions as a guide mechanism for the projection 123 in the Z direction.

When a large impact is applied from the outside, in some cases, part of the AF movable part 12 may be greatly lifted (AF movable part 12 is tilted), and the lifted part of the AF movable part 12 may become the inner wall of the cover 3 (light receiving in the optical axis direction). side wall).

However, in the present embodiment, as described above, a plurality of protrusions 123 and guide grooves 132 are provided, and the guide grooves 132 function as a guide mechanism for the protrusions 123 in the Z direction. Therefore, when a part of the AF movable part 12 tries to float up significantly (when the AF movable part 12 tries to tilt), the projecting part 123 comes into contact with the guide groove 132 and the AF movable part 12 tilts over a certain angle. It will be regulated so that it does not occur. As a result, even if a large impact is applied from the outside, part of the AF movable part 12 is prevented from being greatly lifted by the first stage 13 (AF fixed part), and the AF movable part 12 is prevented from being attached to the inner wall of the cover 3 (light inner wall on the axial light receiving side).

By adjusting the distance between the projecting portion 123 and the guide groove 132, it is possible to obtain the same effect as described above even with three projecting portions 123 and the guide groove 132. However, as in the present embodiment, The above effect is greater when four or more protrusions 123 and guide grooves 132 are provided.

Further, in the present embodiment, the projecting portion 123 has an arc shape in plan view, and the guide groove 132 also has an arc shape in plan view. In the case of such an arc shape, the area in a plan view is smaller than that of a rectangular shape having the same length in the circumferential direction and the same length in the radial direction. Space saving can be achieved.

Further, the AF movable section 12 has a driving section accommodating section 124 that accommodates the AF driving section 15 (see FIG. 16). The driving unit accommodating portion 124 is provided on the outer peripheral surface of the lens accommodating portion 121 . Further, the AF movable portion 12 has a pair of plate housing portions 125 and 126 that protrude radially outward from the outer peripheral surface of the lens housing portion 121 and extend in the optical axis direction so as to sandwich the driving portion housing portion 124 therebetween. have. The pair of plate accommodating portions 125 and 126 has opposing surfaces 125a and 126a that are arranged to face the outer peripheral surface of the lens accommodating portion 121, and the opposing surfaces 125a and 126a extend in the direction of approaching each other in the X direction. exist. That is, the plate accommodating portions 125 and 126 are substantially L-shaped in plan view.

Although details will be described later with reference to FIG. 17, an AF power transmission section 154, which is a passive element of the AF drive section 15, is arranged in the drive section accommodation section 124, and a plate 155 of the AF drive section 15 is arranged in the plate accommodation sections 125 and 126. is placed. In addition, the driving unit accommodating portion 124 and the pair of plate accommodating portions 125 and 126 are accommodated in an AF motor fixing portion 135 of the first stage 13, which will be described later, and are supported by the AF support portion 16 so as to be movable in the Z direction (Fig. 12, see FIG. 13).

[1st stage]
The first stage 13 supports the AF movable section 12 via the AF support section 16 (see FIG. 12). The second stage 14 is arranged on the imaging side of the first stage 13 in the optical axis direction via the X-direction reference ball 42 (see FIG. 11). The first stage 13 moves in the X and Y directions during shake correction, and the second stage 14 moves only in the Y direction during shake correction.

The first stage 13 is a member having a substantially rectangular shape in a plan view seen from the optical axis direction, and is made of liquid crystal polymer, for example. The first stage 13 has a substantially circular opening 131 in a portion corresponding to the AF movable portion 12 (see FIG. 12). A flange receiving portion 131 a corresponding to the flange portion 122 of the AF movable portion 12 is formed in the opening 131 so as to protrude radially inward. A guide groove 132 corresponding to the projecting portion 123 of the AF movable portion 12 is formed in the opening 131 .

The first stage 13 has, on its lower surface, an X-direction reference ball holding portion 133 that holds the X-direction reference ball 42 that constitutes the OIS support portion 40 (see FIG. 18). The X-direction reference ball 42 is sandwiched between the X-direction reference ball holding portion 133 and the X-direction reference ball holding portion 143 of the second stage 14 facing in the Z direction (see FIGS. 11 and 18).

The X-direction reference ball holding portion 133 and the X-direction reference ball holding portion 143 are recesses having rectangular openings extending in the X direction. The X-direction reference ball holding portion 133 and the X-direction reference ball holding portion 143 have, for example, a substantially V-shaped (tapered) or substantially U-shaped cross section so that the width of the groove becomes narrower toward the bottom surface of the recess. formed to be

The groove formed by the concave portion having the cross-sectional shape described above is formed parallel to the X direction. The ball 42 can roll in the X direction within the recess. That is, the OIS movable section 10 (second stage 14) supports the first stage 13 through the X-direction reference ball 42 so as to be movable in the X-direction.

The X-direction reference ball holding portion 133 and the X-direction reference ball holding portion 143 are arranged at the four corners of the rectangular first stage 13 and second stage 14. The first stage 13 holds four X-direction reference balls. It is supported by the second stage 14 at 42, that is, at four points. In this manner, the X-direction reference ball 42 is sandwiched by multi-point contact, so that it rolls stably in the X-direction.

It should be noted that the first stage 13 may be supported by the second stage 14 at least three points. For example, when supporting at three points, the X-direction reference ball holders are placed at three points in total: two points on one side of the first stage 13 and second stage 14 and one point on the side opposite to the side. 133 and the X-direction reference ball holding portion 143 may be arranged.

In the first stage 13, the portion where the first OIS driving section 30X is arranged (the outer surface of the side wall of the first stage 13) is arranged radially inward so that the first OIS driving section 30X can be arranged without protruding radially outward. (OIS motor fixing portion 134). Similarly, in the first stage 13, the portion where the second OIS driving portion 30Y is arranged is also formed to be recessed inward in the radial direction, and is formed integrally with the portion where the corner portion is cut out ( Notch 137a).

In the first stage 13, an AF motor fixing portion 135 is formed inside one side wall along the X direction, in which the AF driving portion 15 is arranged and fixed. The AF motor fixing portion 135 has a rivet mounting portion 135a having a through hole for a rivet and a lower fixing plate 135b having an insertion hole for the AF resonance portion 151 of the AF driving portion 15. An AF resonance unit 151 is attached.

Specifically, the rivet 156 is inserted through the through hole of the rivet attachment portion 135a and through the through hole 151f of the conducting portion 151c, and the tip thereof is fastened with a fastener 157 (see FIG. 18), whereby the AF resonance portion 151 is rivet-mounted. It is attached to the attachment portion 135a. Further, the lower end of the AF resonator 151 (on the imaging side in the optical axis direction) is inserted into an insertion hole (not shown) provided in the lower fixing plate 135b and fixed by adhesion, thereby fixing the AF resonator 151 to the lower part. Attach to plate 135b. In this manner, the AF driving section 15 is fixed to the AF motor fixing section 135 of the first stage 13 so that the arm section 151b extends in the Z direction.

Also, in the first stage 13, a magnet 17X for detecting the X position is arranged on one side wall along the Y direction (see FIG. 18). For example, magnet 17X is magnetized in the X direction. As described above, on the sensor substrate 22, the magnetic sensor 221X for detecting the X position is arranged at a position facing the magnet 17X in the optical axis direction (see FIG. 7).

Also, wirings 18A, 18B, 18C, and 18D are embedded in the first stage 13 by, for example, insert molding. The wirings 18A, 18B, 18C, and 18D are arranged along the X direction, for example, on the sidewalls along the X direction. The wirings 18A, 18B, 18C, and 18D are exposed from notches 137 obtained by notching the four corners of the first stage 13, and one end of the OIS biasing member 50 is connected to these portions. Electric power is supplied to the first OIS driving section 30X that moves the first stage 13 constituting the OIS movable section 10 via the wirings 18A and 18B. In addition, power is supplied to the AF drive section 15 that moves the AF movable section 12 constituting the OIS movable section 10 via the wirings 18C and 18D. Thus, the first stage 13 has wirings 18A, 18B, 18C, and 18D that serve as circuits for driving the first OIS driving section 30X and the AF driving section 15 .

[Second stage]
The second stage 14 is a member having a substantially rectangular shape in plan view seen from the optical axis direction, and is made of liquid crystal polymer, for example. An inner peripheral surface 141 of the second stage 14 is formed corresponding to the outer shape of the AF movable section 12 (see FIG. 11). In the second stage 14 , the portion (outer side surface of the side wall) where the first OIS driving section 30X and the second OIS driving section 30Y are arranged is recessed radially inward similarly to the first stage 13 . The portion where the second OIS driving portion 30Y is arranged is formed integrally with the portion where the corner portion is cut (notch portion 147a).

The second stage 14 has, on its upper surface, an X-direction reference ball holding portion 143 that holds the X-direction reference ball 42 that constitutes the OIS support portion 40 (see FIG. 11). The X-direction reference ball holding portion 143 may have the same configuration as the above-described X-direction reference ball holding portion 133 arranged to face the X-direction reference ball holding portion 143, so redundant description will be omitted here. .

In addition, the second stage 14 has a Y-direction reference ball holding portion 144 that holds the Y-direction reference ball 41 constituting the OIS support portion 40 on its lower surface (see FIG. 18). The Y-direction reference ball holding portion 144 may have the same configuration as the above-described Y-direction reference ball holding portion 218 arranged to face the Y-direction reference ball holding portion 144, so redundant description will be omitted here as well. .

Also, in the second stage 14, a magnet 17Y for Y position detection is arranged on one side wall along the Y direction (see FIG. 18). For example, the magnet 17Y is magnetized in the Y direction. On the sensor substrate 22, a magnetic sensor 221Y for Y position detection is arranged at a position facing the magnet 17Y in the optical axis direction (see FIG. 7).

As described above, in the present embodiment, the magnet 17X is arranged on the first stage 13 that moves in the X direction, the magnet 17Y is arranged on the second stage 14 that moves in the Y direction, and the AF movable body moves in the Z direction. A magnet 17Z is arranged in the portion 12 (see FIG. 18). Since the first stage 13 moves in the XY directions, it is conceivable to dispose the magnets 17X and 17Y on the first stage 13. FIG. However, in this case, a space for arranging the magnet 17Y is required in the first stage 13, and a part of the side wall of the second stage 14 needs to be cut in order to secure the space. In this case, since the wall thickness of a portion of the side wall of the second stage 14 is reduced, there is a concern that the portion may be deformed when a large impact is applied from the outside.

On the other hand, in the present embodiment, the magnet 17X is arranged on the first stage 13 and the magnet 17Y is arranged on the second stage 14, as described above. Therefore, it is not necessary to cut out part of the side wall of the second stage 14 to secure the installation space, and the thickness of the part of the side wall of the second stage 14 is not reduced. As a result, even if a large impact is applied from the outside, the second stage and the like will not be deformed, and the durability of the parts can be improved.

Also, when moving only in the X direction, the first stage 13 moves, but the second stage 14 does not move, and the magnet 17Y arranged on the second stage 14 does not move either. Therefore, the influence of the magnet 17Y is eliminated when the magnet 17X detects the position in the X direction, and the detection accuracy can be improved.

[AF drive part]
The AF driving section 15 is an actuator that moves the AF movable section 12 in the Z direction. The AF driving section 15 has an ultrasonic motor that serves as a driving source for moving the AF movable section 12, similarly to the OIS driving section 30. As shown in FIG. The configuration of the AF driving section 15 will be described with reference to FIG. 17 . FIG. 17 shows a state in which each member of the AF driving section 15 is disassembled.

As shown in FIG. 17, the AF drive section 15 has an AF resonance section 151, an AF piezoelectric element 152, an AF electrode 153, an AF power transmission section 154 and a plate 155. The driving force of the AF drive section 15 is transmitted to the AF movable section 12 via the AF power transmission section 154 . That is, in the AF driving section 15, the AF resonance section 151 constitutes an active element, and the AF power transmission section 154 constitutes a passive element.

The AF resonance section 151 is made of a conductive material, resonates with the vibration of the AF piezoelectric element 152, and converts the vibrational motion into linear motion. The AF resonance section 151 is formed by, for example, laser processing, etching processing, press processing, or the like of a metal plate.

The AF resonance section 151 has a trunk section 151a, two arm sections 151b, a conducting section 151c, a projecting section 151d, and the like.

In the AF resonance section 151, a trunk section 151a is a section sandwiched between the AF piezoelectric elements 152. As shown in FIG.

The two arm portions 151b extend in the Z direction from both sides of the trunk portion 151a. The two arm portions 151b have symmetrical shapes, and are arranged so that their free ends 151e are sandwiched by the AF power transmission portion 154 via the plate 155 . The two arm portions 151b resonate with the vibration of the AF piezoelectric element 152 and deform symmetrically.

The conducting portion 151c extends in the Z direction from the central portion of the body portion 151a and is electrically connected to the wiring 18C of the first stage 13, which is the power supply line. A through hole 151f through which the rivet 156 is inserted is formed in the conducting portion 151c.

Here, the AF motor fixing portion 135 of the first stage 13 is formed with a rivet mounting portion 135a having a through-hole for inserting the rivet 156 (see FIGS. 12 and 13). The rivet 156 is inserted through the through hole 151f of the conducting portion 151c and the through hole of the rivet mounting portion 135a from the outside to the inside of the optical element driving device main body 4, and the tip of the rivet 156 is attached to the fastener 157 (see FIG. 18). is stopped by The AF resonance section 151 of the AF driving section 15 is fixed to the AF motor fixing section 135 (first stage 13 side) by the rivet 156 and the fastener 157 .

By using the rivet 156 and the fastener 157 in this manner, the AF resonance section 151 of the AF driving section 15 can be firmly fixed to the AF motor fixing section 135 . Therefore, even if a large impact is applied from the outside, the AF resonance section 151 will not come off or shift from the AF motor fixing section 135, and the reliability of the AF driving section 15 can be improved.

Note that here, the rivet 156 and the fastener 157 are used to fix the AF resonance unit 151 of the AF driving unit 15 to the AF motor fixing unit 135, but other members such as a fixing material such as a resin adhesive may be used. can be fixed using

The projecting portion 151d extends from the central portion of the body portion 151a to the side opposite to the conducting portion 151c. The projecting portion 151d is inserted into an insertion hole (not shown) provided in the lower fixing plate 135b and fixed by, for example, adhesion.

The AF piezoelectric element 152 is, for example, a plate-shaped element made of ceramic material, and generates vibration by applying a high-frequency voltage. The two AF piezoelectric elements 152 are bonded together so as to sandwich the trunk portion 151a of the AF resonance portion 151 .

The AF electrode 153 is arranged so as to sandwich two AF piezoelectric elements 152 that sandwich the trunk portion 151a of the AF resonance portion 151 therebetween.

In this way, the two AF piezoelectric elements 152 are attached to the trunk portion 151a of the AF resonance portion 151 and sandwiched by the AF electrodes 153, thereby electrically connecting them to each other. By connecting the conducting part 151c of the AF resonance part 151 to the wiring 18C of the first stage 13 and connecting the AF electrode 153 to the wiring 18D of the first stage 13, a voltage is applied to the AF piezoelectric element 152, and vibration occurs. Occur.

The AF resonance section 151 has at least two resonance frequencies, similar to the OIS resonance section 31, and deforms with different behaviors for each resonance frequency. In other words, the overall shape of the AF resonance section 151 is set so that it deforms in different behaviors with respect to two resonance frequencies. The different behaviors are the behavior of advancing the AF power transmission unit 154 in the Z direction and the behavior of retreating. Therefore, by vibrating the AF resonance section 151 at a desired resonance frequency, the AF power transmission section 154 can be moved forward or backward in the Z direction.

The AF power transmission section 154 is a chucking guide having a predetermined length in the Z direction. The AF power transmission section 154 is a member that biases the plate 155 toward the arm section 151 b of the AF resonance section 151 . Although the structure of the AF power transmission portion 154 can be changed as appropriate, here, as an example, the AF power transmission portion 154 includes a pair of side wall portions 154a, a pair of plate spring portions 154b, a connecting portion 154c, a mounting portion 154d, It has a pair of mounting holes 154e and the like.

The pair of side wall portions 154a are opposed to each other in the X direction, and each extend to the negative side in the Y direction and downward (to the negative side) in the Z direction. The pair of leaf spring portions 154b bends the Z-direction lower end of the side wall portion 154a inward in a hairpin shape, and pushes the plate 155 inward against the arm portion 151b with the same biasing force. It is formed in a sloping manner. The connecting portion 154c extends in the X direction and connects the pair of side wall portions 154a at the upper end in the Z direction. The mounting portion 154d extends downward in the Z direction from the connecting portion 154c along the outer peripheral surface of the lens accommodating portion 121 . The attachment hole 154e is a hole provided in the attachment portion 154d and penetrating in the Y direction.

The arm portion 151b of the AF resonance portion 151 abuts on the leaf spring portion 154b via the plate 155 so as to spread the plate spring portion 154b, and the driving force of the AF drive portion 15 is transmitted to the AF movable portion 12. Since the plate spring portion 154b of the AF power transmission portion 154 functions as a plate spring when the two arm portions 151b are brought into contact with each other, the driving force generated by the deformation of the AF resonance portion 151 is efficiently transmitted. Since the leaf spring portion 154b of the AF power transmission portion 154 exerts a biasing force in the direction of pushing back the arm portion 151b of the AF driving portion 15, the driving force generated by the deformation of the AF resonance portion 151 is applied to the AF power transmission portion 154 more. Efficiently transmitted.

In the present embodiment, the AF power transmission section 154 is configured as a separate member from the AF movable section 12 . The AF power transmission section 154 has, for example, a substantially U-shape in plan view, and the mounting section 154d is fixed to the outer peripheral surface of the lens accommodating section 121 with the side wall section 154a facing in the X direction. Specifically, the mounting hole 154e of the mounting portion 154d is inserted into the protrusion 124a provided in the drive portion accommodating portion 124, and the side wall portions 154a are arranged in the concave portions 125b and 126b of the plate accommodating portions 125 and 126. . Thereby, the AF power transmission section 154 is fixed to the outer peripheral surface of the lens housing section 121 , that is, to the AF movable section 12 .

The AF power transmission section 154 is made of a metal material such as titanium copper, nickel copper, stainless steel, or the like. Note that the AF power transmission section 154 may be molded integrally with the AF movable section 12 .

The plate 155 is arranged so as to be interposed between the arm portion 151 b of the AF resonance portion 151 and the plate spring portion 154 b of the AF power transmission portion 154 . The driving force from the AF resonance section 151 is transmitted to the AF power transmission section 154 (AF movable section 12 side) via two plates 155 . That is, the two plates 155 function as passive elements of the AF drive section 15 together with the AF power transmission section 154 .

The plate 155 is a hard plate-like member made of a metal material such as titanium copper, nickel copper, stainless steel, or the like. The plate 155 is arranged in the driving unit accommodating unit 124 of the AF movable unit 12 along the movement direction (Z direction) so that the main surface abuts the arm unit 151b of the AF resonance unit 151, and is integrated with the AF movable unit 12. can be moved freely.

The plate 155 is housed in the plate housing sections 125 and 126 of the AF movable section 12 without being adhered to other members. Specifically, the plate 155 is arranged and housed between the bottoms (not shown) of the plate housing sections 125 and 126 and the connecting section 154c of the AF power transmission section 154 in the Z direction. In the Y direction, the plate 155 has guide grooves (not shown) formed on the Y direction inner side (back side in FIG. 16) of the facing surfaces 125a and 126a and the outer peripheral surface of the lens accommodating portion 121 in the drive portion accommodating portion 124. It is arranged and accommodated between the notch 124b formed in the . In this manner, the plate 155 is physically locked in the Z and Y directions within the plate housing portions 125 and 126 in which it is housed.

On the other hand, the plate 155 is arranged in the plate housing portions 125 and 126 so that it can follow the vibration and displacement of the contact portion (free end portion 151e) of the plate spring portion 154b that contacts the plate 155 in the X direction. are movably arranged in the

As described above, the AF driving section 15 has the AF piezoelectric element 152 that generates vibration by voltage application, and the two arm sections 151b that resonate with the vibration of the AF piezoelectric element 152 and deform. The portion 151b converts vibration of the AF piezoelectric element 152 into linear motion. In the AF drive section 15, an AF resonance section 151 having two arm sections 151b functions as an active element.

Further, the AF drive unit 15 is arranged in the drive unit accommodating unit 124 along the moving direction (Z direction), contacts the two arm units 151b, receives the driving force of the arm units 151b, and moves to the AF resonance unit 151. It has two plates 155 that move relative to each other. In the AF drive section 15, the two plates 155 function as passive elements.

The AF driving section 15 also has two plate spring sections 154b that bias the two plates 155 toward the two arm sections 151b. In the AF drive section 15, an AF power transmission section 154 having two plate spring sections 154b functions as a biasing member.

A leaf spring portion 154b of the AF power transmission portion 154 applies a biasing force to the arm portion 151b via the plate 155. Therefore, even if the AF movable portion 12 moves in the optical axis direction, that is, even if the position of the arm portion 151b in contact with the plate 155 moves, the arm portion 151b of the AF resonance portion 151, which is the active element, and the passive element , does not change. Therefore, the driving force from the AF resonance section 151 can be stably transmitted to the AF power transmission section 154 (AF movable section 12 side) via the plate 155 .

Here, FIG. 19A is a diagram for explaining the positional relationship among the AF resonance section 151, the plate 155, and the leaf spring section 154b of the AF power transmission section 154 at the infinite position of the AF drive section 15. FIG. 19B is a diagram for explaining the positional relationship among the AF resonance section 151, the plate 155, and the leaf spring section 154b of the AF power transmission section 154 at the macro position of the AF driving section 15. FIG.

In FIGS. 19A and 19B, position P1 is the position where the arm portion 151b (free end portion 151e) of the AF resonance portion 151 indicated by the dashed line contacts the plate 155 indicated by the dashed line. Two positions P2 are positions where the plate 155 is fixed to the lens accommodating section 121 side of the AF movable section 12 indicated by the dashed line. A position P3 is a position where the leaf spring portion 154b of the AF power transmission portion 154, indicated by the solid line, contacts the plate 155. As shown in FIG.

As shown in FIG. 19A, at the infinite position of the AF drive unit 15, the AF resonance unit 151, the plate 155, and the AF driving unit 151, the plate 155, and the AF driving unit 15 are arranged so that the position P3 is arranged inside the triangle formed by the position P1 and the two positions P2. A transmission unit 154 is arranged. This is the same even if the position of the AF driving section 15 changes. For example, as shown in FIG. 19B, the AF resonator 151, the plate 155, and the AF resonator 151, the plate 155, and the AF resonator 151, the plate 155, and the AF drive unit 15 are arranged so that the position P3 is arranged inside the triangle formed by the position P1 and the two positions P2 in the macro position of the AF driving unit 15. As shown in FIG. A power transmission unit 154 is arranged.

If the position P3 is arranged outside the triangle formed by the position P1 and the two positions P2, the contact state between the arm portion 151b of the AF resonance section 151 and the plate 155 is likely to become unstable. On the other hand, as shown in FIGS. 19A and 19B, when the position P3 is arranged inside the triangle formed by the position P1 and the two positions P2, the arm portion 151b of the AF resonance section 151 and the plate 155 are in contact with each other. stabilizes. Therefore, the driving force from the AF resonance section 151 can be stably transmitted to the AF power transmission section 154 (AF movable section 12 side) via the plate 155 .

Also, since the power transmission path from the AF resonance section 151 to the AF movable section 12 is relatively short, the power transmission efficiency from the AF resonance section 151 to the AF movable section 12 can be improved.

By making the AF power transmission section 154 having the plate spring section 154b and the plate 155 separate members, materials suitable for each can be used. For example, a highly rigid material can be used for the plate 155. In this case, the driving force of the arm portion 151b of the AF driving portion 15 can be efficiently transmitted to the AF power transmission portion 154 (AF movable portion 12 side). can be done.

In addition, since the plate 155 has a flat surface, arbitrary surface treatment can be performed appropriately. For example, when a coating layer such as diamond-like carbon (DLC) or ceramic is formed on the surface, wear resistance is remarkably improved.

Also, the AF resonance portion 151 (active element) and the two plates 155 (passive elements) are sandwiched by the two leaf spring portions 154b of the AF power transmission portion 154. As a result, the AF resonance section 151 and the two plates 155 are sandwiched in a state in which the biasing forces of the two plate spring portions 154b are balanced, so that a uniform biasing force can be easily applied to the two plates 155. can be done.

The structure of the AF driving section 15 described above can also be applied to the OIS driving section 30. For example, by applying a combination of the AF power transmission portion 154 and the plate 155 instead of the OIS power transmission portion 34 of the OIS drive portion 30, it is possible to easily cope with a long stroke and improve the operational stability.

[AF support part]
As shown in FIGS. 12 and 13, the first stage 13 includes a first Z-direction reference ball holding portion 136a holding a first Z-direction reference ball 16A and a second Z-direction reference ball 16B, which constitute the AF support portion 16, and a second Z-direction reference ball holding portion 136a. It has a direction reference ball holding portion 136b.

As described above, the first stage 13 is formed with the AF motor fixing section 135 that accommodates the driving section accommodating section 124 of the AF movable section 12 and the pair of plate accommodating sections 125 and 126 . The first Z-direction reference ball holding portion 136a and the second Z-direction reference ball holding portion 136b are formed at both ends of the AF motor fixing portion 135 in the X direction.

The first Z-direction reference ball holding portion 136a is a groove formed toward the + side in the X direction, and has a cross-sectional shape along the plane orthogonal to the optical axis (XY plane) that is approximately V, with the width of the groove narrowing toward the bottom of the groove. It is formed in a letter shape (tapered shape) (see FIGS. 6, 12 and 13). The first Z-direction reference ball 16A is arranged in the first Z-direction reference ball holding portion 136a.

The second Z-direction reference ball holding portion 136b is a groove that is inclined with respect to the X direction and formed toward the - side in the X direction, and has a substantially U-shaped cross section along the plane orthogonal to the optical axis. (see Figures 6, 12 and 13). In the second Z-direction reference ball holding portion 136b, together with the second Z-direction reference ball 16B, a leaf spring 191 and A spacer (not shown) is placed.

As described above, the AF movable section 12 has the plate accommodating sections 125 and 126. A first Z-direction reference ball holding portion 125c that holds the first Z-direction reference ball 16A is formed on the X direction + side of the plate accommodating portion 125 (see FIG. 16). The first Z-direction reference ball holding portion 125c is a groove formed toward the X-direction - side, and has a cross-sectional shape along the plane perpendicular to the optical axis (XY plane) that is approximately V in which the width of the groove becomes narrower toward the bottom of the groove. It is formed in a letter shape (taper shape).

Similarly, a second Z-direction reference ball holding portion 126c that holds the second Z-direction reference ball 16B is formed on the X-direction - side of the plate accommodating portion 126 (see FIG. 16). The second Z-direction reference ball holding portion 126c is a groove formed toward the + side in the X direction, and has a cross-sectional shape along the plane perpendicular to the optical axis (XY plane) that is approximately V, with the width of the groove narrowing toward the bottom of the groove. It is formed in a letter shape (taper shape).

As described above, the second Z-direction reference ball holding portion 136b is a groove formed to be inclined with respect to the X direction, and the biasing portion 19 accommodated in the second Z-direction reference ball holding portion 136b to bias the second Z-direction reference ball 16B. As a result, the AF movable part 12 is pressed in the X direction and the Y direction, which are two orthogonal directions, via the second Z-direction reference ball 16B, and is held in a stable posture within the plane orthogonal to the optical axis.

The inclination angle θ of the second Z-direction reference ball holding portion 136b with respect to the X direction and the preload F of the leaf spring 191 are set so that rotation of the AF movable portion 12 around the optical axis is restricted. The inclination angle θ is, for example, 0° to 45° (excluding 0°). If the inclination angle θ is increased, the preload F can be decreased, and if the preload F is increased, the inclination angle θ is decreased. can be done.

The first Z-direction reference ball 16A is rotatably held between the first Z-direction reference ball holding portion 125c of the plate housing portion 125 of the AF movable portion 12 and the first Z-direction reference ball holding portion 136a of the first stage 13. be. The second Z-direction reference ball 16B is a spacer (not shown) arranged in the second Z-direction reference ball holding portion 126c of the plate housing portion 126 of the AF movable portion 12 and the second Z-direction reference ball holding portion 136b of the first stage 13. ) and is rollably held between

The AF movable part 12 is supported by the first stage 13 in a urged state via the first Z-direction reference ball 16A and the second Z-direction reference ball 16B, and is held in a stable posture. The second Z-direction reference ball 16B also functions as a preload ball.

The first Z-direction reference ball 16A is sandwiched between the AF movable section 12 and the first stage 13, and movement in the direction orthogonal to the optical axis (rotation of the AF movable section 12) is restricted. Thereby, the AF movable part 12 can be moved in the optical axis direction with stable behavior.

On the other hand, the second Z-direction reference ball 16B is held between the AF movable section 12 and the first stage 13 via a leaf spring 191 and a spacer (not shown), and is allowed to move in the direction orthogonal to the optical axis. Thereby, the dimensional tolerance of the AF movable part 12 and the first stage 13 can be absorbed, and the stability when the AF movable part 12 moves is improved.

Also, the first Z-direction reference ball 16A and the second Z-direction reference ball 16B are each composed of two balls. When each of the first Z-direction reference ball 16A and the second Z-direction reference ball 16B is composed of three or more balls, the diameter of the balls can be increased when two balls are used. , the rolling resistance of the ball can be reduced.

Here, the plate accommodating portions 125 and 126 of the AF movable portion 12 where the AF driving portion 15 is arranged are sandwiched between the first Z-direction reference ball 16A and the second Z-direction reference ball 16B, and the second Z-direction reference ball 16B is inserted. It is configured to apply preload to That is, the AF movable portion 12 is supported at one point with respect to the first stage 13 .

This makes it easier to reduce the distance from the force point receiving the driving force of the AF drive unit 15 (the point of contact between the AF resonance unit 151 and the plate 155) to the rotation axis (the center of the first Z-direction reference ball 16A), thereby reducing the moment. preload can be reduced. Also, since the second Z-direction reference ball 16B functions as a preloaded ball and there is no other preloaded ball, the rolling resistance can be reduced. Therefore, the driving efficiency of the AF driving section 15 is improved, and the lens driving device is also suitable for a large-aperture lens. Also, if the preload is the same, the tilt resistance is improved.

[Operation of optical element driving device]
In the optical element driving device 1, when a voltage is applied to the AF driving section 15, the AF piezoelectric element 152 vibrates, and the AF resonance section 151 deforms with behavior according to the frequency. The driving force of the AF drive unit 15 causes the AF power transmission unit 154 to slide in the Z direction. Along with this, the AF movable portion 12 moves in the Z direction, and focusing is performed. Since the AF support portion 16 is composed of a ball, the AF movable portion 12 can move smoothly in the Z direction. In addition, since the AF drive unit 15 and the AF power transmission unit 154 are only in contact with each other while being biased, simply enlarging the contact portion in the Z direction impairs the reduction in the height of the optical element driving device 1. Therefore, the movement stroke of the AF movable section 12 can be easily lengthened.

Also, in the optical element driving device 1, when a voltage is applied to the OIS driving section 30, the OIS piezoelectric element 32 vibrates, and the OIS resonance section 31 deforms with behavior according to the frequency. The driving force of the OIS drive unit 30 causes the OIS power transmission unit 34 to slide in the X direction or the Y direction. Accordingly, the OIS movable portion 10 moves in the X direction or the Y direction, and shake correction is performed. Since the OIS support part 40 is composed of a ball, the OIS movable part 10 can move smoothly in the X direction or the Y direction.

Specifically, when the first OIS drive unit 30X is driven and the OIS power transmission unit 34 moves in the X direction, power is transmitted from the first stage 13 on which the first OIS drive unit 30X is arranged to the second stage 14. be done. At this time, since the Y-direction reference ball 41 sandwiched between the second stage 14 and the base 21 cannot roll in the X-direction, the position of the second stage 14 with respect to the base 21 in the X-direction is maintained. On the other hand, since the X-direction reference ball 42 sandwiched between the first stage 13 and the second stage 14 can roll in the X direction, the first stage 13 moves in the X direction with respect to the second stage 14 . That is, the second stage 14 serves as a fixed body for the OIS function, and the first stage 13 serves as a movable body for the OIS function.

Further, when the second OIS drive unit 30Y is driven and the OIS power transmission unit 34 moves in the Y direction, power is transmitted from the base 21 on which the second OIS drive unit 30Y is arranged to the second stage 14. At this time, since the X-direction reference ball 42 sandwiched between the first stage 13 and the second stage 14 cannot roll in the Y direction, the position of the first stage 13 in the Y direction with respect to the second stage is maintained. . On the other hand, since the Y-direction reference ball 41 sandwiched between the second stage 14 and the base 21 can roll in the Y-direction, the second stage 14 moves in the Y-direction with respect to the base 21 . The first stage 13 also follows the second stage 14 and moves in the Y direction. That is, the base 21 serves as a fixed body for the OIS function, and the AF section 11 including the first stage 13 and the second stage 14 serve as movable bodies for the OIS function.

In this way, the OIS movable section 10 swings within the XY plane, and shake correction is performed. Specifically, the first OIS driving unit 30X and the second OIS driving unit 30Y are controlled based on the detection signal indicating the angular shake from the shake detection unit (for example, the gyro sensor) so that the angular shake of the camera module A is offset. is controlled. At this time, the translational movement of the OIS movable section 10 can be accurately controlled by feeding back the detection results of the XY position detection section composed of the magnets 17X and 17Y and the magnetic sensors 221X and 221Y.

According to the optical element driving device 1 of the present embodiment, since the AF driving section 15 as well as the OIS driving section 30 are composed of ultrasonic motors, the influence of external magnetism can be reduced, and the size and height can be reduced. can be achieved.

Even if the camera module A having the optical element driving device 1 is placed close to the smartphone M, there is no magnetic influence, so it is extremely suitable for a dual camera.

Further, since the arm portion 151b of the AF driving portion 15 extends in the optical axis direction and is sandwiched by the AF power transmission portion 154, the driving force of the AF driving portion 15 is transmitted to the AF movable portion 12 at the maximum. , the driving force for moving the AF movable portion 12 can be efficiently obtained. In addition, by bringing the positions of the AF drive unit 15 and the AF support unit 16 close to each other, the rotational moment with respect to the support position is suppressed, so that the moving operation of the AF movable unit 12 is stabilized. Therefore, the driving performance of the optical element driving device 1 is remarkably improved.

[Other embodiments]
The present invention is not limited to the above embodiments, and can be modified without departing from the scope of the invention.

For example, in the above embodiment, the wall portions 24 are provided at the four corners of the base 21 in order to prevent contact with the cover 3 (inner wall 3a). As shown in 21 , insulating members 302 (non-conductive members) may be provided at the four corners of the inner wall 3 a of the cover 3 .

In FIG. 20, insulating members 302 extending in the direction along the longitudinal direction of the OIS biasing member 50 (see FIG. 3 etc.), that is, in the direction along the Z direction are provided at each of the four corners of the inner wall 3a of the cover 3. is provided. The insulating member 302 can be provided at the four corners of the inner wall 3a of the cover 3 so as to include positions (positions where there is a high possibility of contact) facing the portion of the OIS biasing member 50 that is displaced (elastically deformed) by shaking. desirable. Here, as an example, the insulating member 302 is arranged so as to face the central portion of the OIS biasing member 50 in the longitudinal direction. Thus, by arranging the insulating members 302 at the four corners of the inner wall 3a of the cover 3, contact with the inner wall 3a can be prevented.

In FIG. 21, a plurality of insulating members 302 extending along the Z direction are provided at each of the four corners of the inner wall 3a of the cover 3 along the Z direction. In this manner, a plurality of insulating members 302 may be arranged along the Z direction. In this case, for example, by adjusting the distance between the insulating members 302 and the thickness of the insulating member 302 itself (the thickness from the inner wall 3a side to the inner side), the OIS biasing member 50 is prevented from contacting the inner wall 3a. do. In this way, as shown in FIG. 21, a gap is provided in the portion facing the central portion of the OIS biasing member 50 in the longitudinal direction, and the insulating members 302 are provided on the −Z side and the +Z side of the gap, respectively. Even if it is arranged, contact with the inner wall 3a can be prevented.

When a plurality of insulation members 302 are arranged along the Z direction, the insulation member 302 on the −Z side and the insulation member 302 on the +Z side may have the same length along the Z direction, or may have different lengths. can be In addition, although FIG. 21 illustrates a case where two insulating members 302 are arranged along the Z direction, more insulating members 302 may be arranged.

The insulating members 302 are made of, for example, resin members made of a non-conductive insulating material, and attached to the four corners of the inner wall 3a of the cover 3. Alternatively, the insulating member 302 may be formed by coating the four corners of the inner wall 3a of the cover 3 with a coating layer of an insulating material.

Further, for example, in the above embodiment, the smartphone M was described as an example, but the present invention is applied to a camera-equipped device having a camera module and an image processing unit that processes image information obtained by the camera module. can. Camera-equipped devices include information equipment and transportation equipment. Information devices include, for example, camera-equipped mobile phones, laptop computers, tablet terminals, portable game machines, web cameras, and camera-equipped in-vehicle devices (eg, back monitor devices, drive recorder devices). Transportation equipment also includes, for example, automobiles.

FIGS. 22A and 22B are diagrams showing an automobile V as a camera-equipped device equipped with an in-vehicle camera module VC (Vehicle Camera). 22A is a front view of automobile V, and FIG. 22B is a rear perspective view of automobile V. FIG. An automobile V is equipped with the camera module A described in the above embodiment as an in-vehicle camera module VC. As shown in FIGS. 22A and 22B, the in-vehicle camera module VC is attached to the windshield facing forward, or attached to the rear gate facing rearward, for example. This in-vehicle camera module VC is used for a back monitor, drive recorder, collision avoidance control, automatic driving control, and the like.

In addition, in the above embodiment, both the AF movable section 12 and the first stage 13 are provided with the Z-direction reference ball holders. may be provided in either one of

In the above embodiment, the first Z-direction reference ball 16A and the second Z-direction reference ball 16B are arranged symmetrically in the circumferential direction with respect to the AF driving section 15. However, they may be arranged asymmetrically. good. In this case, in order to stabilize the moving operation of the AF movable section 12, it is preferable that the first Z-direction reference ball 16A is on the AF drive section 15 side.

Further, in the above-described embodiment, the AF drive unit 15 is arranged along the X direction, but the arrangement mode of the AF drive unit 15 is not limited to this, and may be arranged along the Y direction, for example. and may be arranged obliquely with respect to the X and Y directions.

Further, in the above embodiment, the optical element driving device 1 that drives the lens unit 2 as an optical element has been described, but the optical element to be driven may be an optical element other than a lens such as a mirror or a prism. .

In addition, the present invention can be applied not only to autofocus but also to zoom and the like when moving the movable part in the optical axis direction. Furthermore, the AF driving unit 15 and the OIS driving unit 30 are not limited to the case where the driving source is an ultrasonic motor, and the driving source other than the ultrasonic motor (for example, an optical element driving device provided with a voice coil motor (VCM)) It can also be applied to devices.

The embodiments disclosed this time should be considered illustrative in all respects and not restrictive. The scope of the present invention is indicated by the scope of the claims rather than the above description, and is intended to include all modifications within the meaning and range of equivalents of the scope of the claims.

The entire disclosure of the specification, drawings and abstract contained in US Provisional Patent Application No. 63/224,438, filed July 22, 2021, is hereby incorporated by reference.

1 optical element driving device 2 lens part (an example of an optical element)
3 cover 3a inner wall 4 main body of optical element driving device 5 imaging unit 10 OIS movable unit (an example of a movable unit)
11 AF section 12 AF movable section 13 First stage 14 Second stage 15 AF driving section 16 AF support section 16A First Z-direction reference ball 16B Second Z- direction reference ball 17X, 17Y, 17Z Magnet 18A, 18B, 18C, 18D Wiring ( Example of circuit)
19 biasing portion 20 OIS fixing portion (an example of a fixing portion)
21 base 22 sensor substrate 23A, 23B, 23C terminals 23Aa, 23Ca wiring 24 wall (an example of a non-conductive member)
30 OIS drive section 30X first OIS drive section 30Y second OIS drive section 31 OIS resonance section 32 OIS piezoelectric element 34 OIS power transmission section 35, 37 rivet 36, 38 fastener 39 resin member 40 OIS support section (an example of a support member)
41 Y-direction reference ball 42 X-direction reference ball 50 OIS biasing member (an example of a connection member)
121 lens accommodating portion 122 flange portion 123, 123a protruding portion 124 driving portion accommodating portion 124a protruding portion 124b notch portion 125, 126 plate accommodating portion 125a, 126a facing surface 125b, 126b concave portion 125c 1st Z direction reference ball holding portion 126c 2nd Z direction Reference ball holding portion 131 Opening 131a Flange receiving portion 132 Guide groove 133 X-direction reference ball holding portion 134 OIS motor fixing portion 134a Rivet mounting portion 135 AF motor fixing portion 135a Rivet mounting portion 135b Lower fixing plate 136a First Z-direction reference ball holding portion 136b Second Z-direction reference ball holding portion 137, 137a Notch 141 Inner peripheral surface 143 X-direction reference ball holding portion 144 Y-direction reference ball holding portion 145X, 145Y OIS chucking guide fixing portion 147, 147a Notch 151 AF resonance portion 151a Body portion 151b Arm portion 151c Conducting portion 151d Protruding portion 151e Free end portion 151f Through hole 152 AF piezoelectric element 153 AF electrode 154 AF power transmission portion 154a Side wall portion 154b Leaf spring portion 154c Connecting portion 154d Mounting portion 154e Mounting hole 155 Plate 156 Rivet 157 fastener 191 leaf spring 211 opening 212 first base portion 213a, 213b second base portion 214, 215, 216 opening 217 OIS motor fixing portion 217a rivet attaching portion 218 Y-direction reference ball holding portion 221X, 221Y, 221Z magnetic sensor 301 opening 302 insulating member (an example of a non-conductive member)
311 Body 312 Arm 313 Projection 313a Through hole 314 Conducting part 341 OIS motor contact part 342 Connecting part 343 Stage fixing part 344 Separating part 401 Opening 501 Image sensor substrate 502 Imaging element 503 Control part A Camera module M Smartphone (camera equipment)

Claims (15)

1. a movable part capable of holding an optical element and having a circuit for driving the optical element;
   A fixed portion arranged at a position spaced from the movable portion in the optical axis direction via a support member, and supporting the movable portion by the support member so as to be swingable in a direction perpendicular to the optical axis, which is perpendicular to the optical axis direction. When,
   a connection member that elastically connects the movable portion and the fixed portion so as to maintain a state in which the movable portion and the fixed portion sandwich the support member, and forms a conductive path between the circuit and the fixed portion;
   a non-conductive member made of a non-conductive material arranged to surround at least a portion of the periphery of the connection member so as to face the portion of the connection member that elastically deforms in the direction orthogonal to the optical axis;
   An optical element driving device comprising:
2. The non-conductive member is arranged so as to be interposed between the connection member and a cover that accommodates the movable portion inside together with the fixed portion.
   The optical element driving device according to claim 1.
3. The non-conductive member is arranged so that the connection member faces a central portion between connection portions connected to the movable portion and the fixed portion,
   The optical element driving device according to claim 1.
4. The non-conductive member is a wall portion arranged on the fixed portion,
   The optical element driving device according to claim 1.
5. The wall portion is erected from the fixed portion with a height that covers more than half of the length between the connecting portion where the connecting member is connected to the movable portion and the fixed portion.
   5. The optical element driving device according to claim 4.
6. The non-conductive member is arranged on the inner wall of a cover that accommodates the movable part inside together with the fixed part,
   The optical element driving device according to claim 1.
7. The non-conductive member has a resin member made of an insulating material or a coating layer made of an insulating material,
   7. The optical element driving device according to claim 6.
8. A plurality of the non-conductive members are arranged along the longitudinal direction of the connecting member,
   The optical element driving device according to claim 1.
9. The non-conductive member is arranged so as to surround a radially outer portion of the movable portion in the periphery of the connection member.
   The optical element driving device according to claim 1.
10. The non-conductive member is arranged to surround the connection member,
    A damper material that suppresses unnecessary resonance of the connection member is arranged between the non-conductive member and the connection member.
    The optical element driving device according to claim 1.
11. The connection member is arranged in a notch portion obtained by notching a corner portion of the movable portion,
    The non-conductive member is formed so as to surround the connection member together with the notch,
    The optical element driving device according to claim 1.
12. The connection member is arranged in a notch portion obtained by notching a corner portion of the movable portion,
    The non-conductive member is formed so as to face the formation surface forming the notch,
    The optical element driving device according to claim 1.
13. A driving unit having an ultrasonic motor for moving the movable unit,
    The optical element driving device according to claim 1.
14. The optical element driving device according to claim 1;
    an imaging unit that captures a subject image formed by the optical element,
    The camera module.
15. A camera-equipped device that is information equipment or transportation equipment,
    a camera module according to claim 14;
    an image processing unit that processes image information obtained by the camera module;
    Device with camera.

Images