WO2024048011A1 - Optical element driving device, camera module, and camera mounting device - Google Patents

Optical element driving device, camera module, and camera mounting device Download PDF

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Publication number
WO2024048011A1
WO2024048011A1 PCT/JP2023/022281 JP2023022281W WO2024048011A1 WO 2024048011 A1 WO2024048011 A1 WO 2024048011A1 JP 2023022281 W JP2023022281 W JP 2023022281W WO 2024048011 A1 WO2024048011 A1 WO 2024048011A1
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WO
WIPO (PCT)
Prior art keywords
ois
axis direction
section
optical element
passive
Prior art date
Application number
PCT/JP2023/022281
Other languages
French (fr)
Japanese (ja)
Inventor
智之 村上
Original Assignee
ミツミ電機株式会社
智之 村上
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミツミ電機株式会社, 智之 村上 filed Critical ミツミ電機株式会社
Publication of WO2024048011A1 publication Critical patent/WO2024048011A1/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B30/00—Camera modules comprising integrated lens units and imaging units, specially adapted for being embedded in other devices, e.g. mobile phones or vehicles
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/57—Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices

Definitions

  • the present invention relates to an optical element driving device, a camera module, and a camera mounting device.
  • AF function autofocus function
  • OIS function optical image stabilization
  • An optical element drive device having an AF function and an OIS function includes an autofocus drive unit (hereinafter referred to as "AF drive unit”) for moving the lens part in the optical axis direction, and a plane perpendicular to the optical axis direction to move the lens part. and an image stabilization drive unit (hereinafter referred to as "OIS drive unit”) for moving the camera within the camera.
  • AF drive unit autofocus drive unit
  • OIS drive unit image stabilization drive unit
  • the ultrasonic motor type drive unit includes a resonator, which is an active element.
  • a resonant part is arranged in an active side member consisting of either a movable part or a fixed part
  • a resonance part is arranged in an active side member consisting of either a movable part or a fixed part, and the resonance part is transmitted from the other of the movable part or the fixed part via a power transmission part which is a passive element. Power is transmitted to the passive side member.
  • the resonance part and the power transmission part are in contact with each other in a biased state and slide against each other when driven.
  • the "active member” is a member on which the drive unit is arranged
  • the “passive member” is a member connected to the drive unit via the power transmission section.
  • the active element, passive element, movable part, fixed part, etc. are designed so that the moving direction of the movable part and the power transmission direction match.
  • a deviation may occur between the mounting angle of the passive element to the active element and the mounting angle of the movable part to the fixed part. This deviation also affects the contact state between the active element and the passive element, making it difficult for both members to slide, which may lead to unstable generation of power transmitted to the movable part.
  • An object of the present invention is to provide a highly reliable optical element drive device, camera module, and camera mounting device that can stabilize the movement operation of a movable part.
  • the optical element driving device includes: A fixed part, a movable part including an optical element; an ultrasonic motor-type drive unit that is disposed on an active side member consisting of either the fixed part or the movable part and moves the movable part with respect to the fixed part; a power transmission section that connects the drive section and a passive side member consisting of the other of the fixed section and the movable section, and transmits the power of the drive section to the passive side member; Equipped with The driving section has a resonating section having a pair of vibrating arms, The power transmission section is a passive member held between the pair of arms in a biased state; a connecting member that connects the passive member and the passive side member, The connecting member is elastically deformable.
  • the camera module includes: The above optical element driving device, an optical element attached to the movable part; An imaging unit that captures a subject image formed by the optical element.
  • the camera mounting device includes: A camera-equipped device that is an information device or a transportation device, The above camera module, An image processing unit that processes image information obtained by the camera module.
  • a highly reliable optical element drive device, camera module, and camera mounting device are provided that can stabilize power transmission from an active element to a passive element and improve drive performance.
  • FIG. 1A and FIG. 1B are diagrams showing a smartphone equipped with a camera module according to an embodiment of the present invention.
  • FIG. 2 is an external perspective view of the camera module.
  • FIG. 3 is an external perspective view of the optical element driving device.
  • FIG. 4 is an external perspective view of the optical element driving device.
  • FIG. 5 is an exploded perspective view of the optical element driving device.
  • FIG. 6 is an exploded perspective view of the optical element driving device.
  • FIG. 7 is an exploded perspective view of the AF unit.
  • FIG. 8 is an exploded perspective view of the AF unit.
  • 9A and 9B are enlarged views of the OIS drive unit.
  • 10A and 10B are schematic diagrams of the power transmission mechanism in the OIS drive unit.
  • 11A and 11B are enlarged views of the AF drive unit.
  • 12A and 12B are diagrams showing an automobile as a camera mounting device equipped with an on-vehicle camera module.
  • FIG. 1A and 1B are diagrams showing a smartphone M (an example of a camera-equipped device) equipped with a camera module A according to an embodiment of the present invention.
  • FIG. 1A is a front view of the smartphone M
  • FIG. 1B is a rear view of the smartphone M.
  • the smartphone M has a dual camera consisting of two rear cameras OC1 and OC2.
  • camera module A is applied to rear cameras OC1 and OC2.
  • Camera module A is equipped with an AF function and an OIS function, and not only automatically focuses when photographing a subject, but also optically corrects shake (vibration) that occurs during photographing to photograph images without image blur. be able to.
  • FIG. 2 is an external perspective view of the camera module A.
  • 3 and 4 are external perspective views of the optical element driving device 1 according to the embodiment.
  • FIG. 4 shows a state in which FIG. 3 is rotated by 90 degrees around the Z axis.
  • the embodiment will be described using an orthogonal coordinate system (X, Y, Z).
  • the figures to be described later are also shown using a common orthogonal coordinate system (X, Y, Z).
  • the X-axis direction is the up-down direction (or the left-right direction)
  • the Y-axis direction is the left-right direction (or the up-down direction)
  • the Z-axis direction is the front-back direction. It will be installed as follows. That is, the Z-axis direction is the optical axis direction, the upper side (+Z side) in the figure is the light receiving side in the optical axis direction, and the lower side ( ⁇ Z side) is the imaging side in the optical axis direction.
  • optical axis orthogonal directions X-axis direction and the Y-axis direction orthogonal to the Z-axis
  • XY plane optical axis orthogonal plane
  • the camera module A includes an optical element drive device 1 that realizes an AF function and an OIS function, a lens section 2 in which a lens is housed in a cylindrical lens barrel, and a lens section 2. It includes an imaging unit 3 and the like that captures the captured image of the subject. That is, the optical element driving device 1 is a lens driving device that drives the lens section 2 as an optical element.
  • the imaging unit 3 is arranged on the imaging side of the optical element driving device 1 in the optical axis direction.
  • the imaging unit 3 includes, for example, an image sensor board 301, an image sensor 302 mounted on the image sensor board 301, and a control unit 303.
  • the image sensor 302 is configured with, for example, a CCD (charge-coupled device) type image sensor, a CMOS (complementary metal oxide semiconductor) type image sensor, or the like, and captures a subject image formed by the lens unit 2.
  • the control unit 303 is composed of, for example, a control IC, and controls the drive of the optical element drive device 1 .
  • the optical element driving device 1 is mounted on the image sensor substrate 301 and mechanically and electrically connected to it. Note that the control unit 303 may be provided on the image sensor board 301 or may be provided on a camera-equipped device (in the embodiment, the smartphone M) on which the camera module A is mounted.
  • the optical element driving device 1 is covered with a cover 24 on the outside.
  • the cover 24 is a rectangular lidded square cylinder when viewed from above in the optical axis direction. In the embodiment, the cover 24 has a square shape in plan view.
  • the cover 24 has a substantially circular opening 241 on the light receiving side surface (upper surface) in the optical axis direction.
  • the lens portion 2 faces the outside through the opening 241 of the cover 24.
  • the lens portion 2 may be arranged so as to protrude from the opening surface of the cover 24 toward the light receiving side.
  • the cover 24 is fixed to the base 21 (see FIG. 5) of the OIS fixing section 20 of the optical element driving device 1, for example, by adhesive.
  • FIG. 5 and 6 are exploded perspective views of the optical element driving device 1 according to the embodiment.
  • 7 and 8 are exploded perspective views of the AF unit 10A. 6 and 8 respectively show the state in which FIG. 5 and FIG. 7 are rotated by 90 degrees around the Z axis.
  • the optical element driving device 1 includes an OIS movable section 10, an OIS fixed section 20, an X-axis direction drive unit 50X, a Y-axis direction drive unit 50Y, and an OIS support. It includes sections 41 and 42.
  • the OIS movable part 10 is a part that moves in a plane perpendicular to the optical axis during shake correction.
  • the OIS movable section 10 includes an AF unit 10A and a second stage 13.
  • the OIS fixed part 20 is a part to which the OIS movable part 10 is connected via the OIS support part 41.
  • the OIS movable part 10 is arranged apart from the OIS fixed part 20 in the optical axis direction, and is connected to the OIS fixed part 20 via the OIS support parts 41 and 42.
  • the OIS movable section 10 and the OIS fixed section 20 are urged toward each other by an OIS urging member 30.
  • the OIS biasing members 30 are arranged, for example, at the four corners of the optical element driving device 1 in a plan view.
  • the OIS biasing member 30 is composed of, for example, a tension coil spring, and connects the OIS movable part 10 and the OIS fixed part 20.
  • one end of the OIS biasing member 30 is connected to wiring (not shown) of the base 21, and the other end is connected to the terminal fitting 162 of the first stage 12.
  • the OIS biasing member 30 functions as a power supply line to the AF drive unit 70 and the Y-axis direction drive unit 50Y.
  • the OIS biasing member 30 receives a tensile load when the OIS movable part 10 and the OIS fixed part 20 are connected, and acts so that the OIS movable part 10 and the OIS fixed part 20 approach each other. Thereby, the OIS movable part 10 is held movably within the XY plane while being biased in the optical axis direction (pressed against the base 21) by the OIS biasing member 30. Therefore, the OIS movable part 10 can be held in a stable state without rattling.
  • a damper material (not shown) that suppresses vibration may be disposed on the OIS biasing member 30.
  • the OIS support section 41 supports the second stage 13, which functions as the OIS movable section 10, with respect to the base 21, which functions as the OIS fixed section 20, while being spaced apart in the optical axis direction.
  • the OIS support section 41 is composed of four balls that are rotatably interposed between the base 21 and the second stage 13. Note that the number of balls forming the OIS support section 41 can be changed as appropriate.
  • the OIS support section 42 supports the first stage 12, which functions as the OIS movable section 10, with respect to the second stage 13, which functions as the OIS fixed section 20, while being spaced apart in the optical axis direction.
  • the OIS support section 42 is composed of four balls that are rotatably interposed between the second stage 13 and the first stage 12. Note that the number of balls forming the OIS support section 42 can be changed as appropriate.
  • the entire OIS movable section 10 including the AF unit 10A moves as a movable body.
  • the AF unit 10A moves as a movable body. That is, regarding movement in the Y-axis direction, the second stage 13 and the base 21 constitute the OIS fixing part 20.
  • the base 21 is formed of, for example, polyarylate (PAR), a PAR alloy (for example, PAR/PC) that is a mixture of a plurality of resin materials containing PAR, or a molding material made of a liquid crystal polymer.
  • the base 21 is a rectangular member in plan view, and has a circular opening 211 in the center.
  • the base 21 has an OIS motor fixing part 212 in which the X-axis direction drive unit 50X is placed.
  • the OIS motor fixing part 212 is formed, for example, on one side of the outer peripheral edge of the base 21 along the X-axis so as to protrude toward the light receiving side in the optical axis direction, and has a shape capable of holding the X-axis direction drive unit 50X. There is.
  • the base 21 functions as an active member regarding the movement of the OIS movable section 10 in the X-axis direction.
  • the base 21 supports the second stage 13 of the OIS movable section 10 via the OIS support section 41 so as to be movable in the X-axis direction.
  • the base 21 has an OIS ball holding part 214 on the light receiving side surface in the optical axis direction, on which the OIS supporting part 41 is arranged.
  • the OIS ball holding portion 214 is, for example, a groove having a rectangular shape extending in the X-axis direction in plan view.
  • the OIS ball holding portion 214 is formed to have a substantially V-shaped (tapered) cross-sectional shape so that the groove width becomes narrower toward the bottom side.
  • the OIS ball holding section 214 is provided near the four corners of the base 21, and the OIS movable section 10 (second stage 13) is is supported by 4 points.
  • a terminal fitting 22 and wiring (not shown) connected to the terminal fitting 22 are arranged on the base 21, for example, by insert molding.
  • the terminal fitting 22 is exposed from the base 21 and is electrically connected to the image sensor board 301. Further, the wiring is electrically connected to the OIS biasing member 30. Power is supplied to the AF drive unit 70 of the AF drive unit 70 and the Y-axis direction drive unit 50Y of the Y-axis direction drive unit 50Y via the OIS biasing member 30.
  • a sensor board may be placed on the base 21 and the wiring of the sensor board and the terminal fittings 22 may be electrically connected.
  • a position detection sensor may be arranged on the base 21 to detect the position of the OIS movable part 10 in the X-axis direction and the Y-axis direction, and the position of the AF movable part 11 in the Z-axis direction.
  • a Hall element or a magnetic sensor such as a TMR (Tunnel Magneto Resistance) sensor can be applied to the position detection sensor.
  • magnets are arranged in the OIS movable section 10 (for example, the first stage 12) and the AF movable section 11 so as to face the magnetic sensor.
  • the position of the OIS movable section 10 in the X-axis direction and the Y-axis direction, and the position of the AF movable section 11 in the Z-axis direction may be detected by an optical sensor such as a photoreflector.
  • the second stage 13 is a member that has a substantially rectangular shape in plan view from the optical axis direction, and is formed of, for example, a liquid crystal polymer.
  • the second stage 13 has an opening 131 in a portion corresponding to the AF movable section 11.
  • a portion 132 corresponding to the X-axis drive unit 50X is recessed inward in the radial direction so that the X-axis drive unit 50X can be placed without protruding outward in the radial direction. Furthermore, in the second stage 13, a portion 133 corresponding to the Y-axis direction drive unit 50Y is similarly formed to be recessed inward in the radial direction (hereinafter referred to as "OIS motor fixing portions 132, 133").
  • An X-axis direction power transmission section 60X is fixed to the OIS motor fixing section 132.
  • a Y-axis direction power transmission section 60Y is fixed to the OIS motor fixing section 133.
  • the second stage 13 functions as a passive member with respect to the movement of the OIS movable section 10 in the X-axis direction and the Y-axis direction.
  • the second stage 13 supports the first stage 12 of the AF unit 10A via the OIS support part 42 so as to be movable in the Y-axis direction.
  • the second stage 13 has an OIS ball holder 134 on the light-receiving side surface (upper surface) in the optical axis direction, on which the OIS support section 42 is arranged.
  • the OIS ball holding portion 134 is, for example, a groove having a rectangular shape extending in the Y-axis direction in plan view.
  • the OIS ball holding portion 134 has a substantially V-shaped (tapered) cross-sectional shape so that the groove width becomes narrower toward the bottom side.
  • the OIS ball holding section 134 is provided near the four corners of the second stage 13, and the four OIS supporting sections 42 arranged on the OIS ball holding section 134 support the AF unit 10A (the first stage 12 ) is supported by 4 points.
  • the second stage 13 On the surface (lower surface) of the second stage 13 on the imaging side in the optical axis direction, there is a ball holding part (not shown) that holds the OIS support part 41 at a position facing the OIS ball holding part 214 of the base 21 in the Z-axis direction. ) is formed.
  • the OIS support section 41 is held between the base 21 and the OIS ball holding section of the first stage 12 with multi-point contact. Therefore, the balls forming the OIS support portion 41 stably roll in the X-axis direction.
  • the AF unit 10A includes an AF movable section 11, a first stage 12, an AF drive unit 70, and an AF support section 15.
  • the first stage 12 is a member having a substantially rectangular shape when viewed from above in the optical axis direction, and is formed of, for example, a liquid crystal polymer.
  • the first stage 12 has a substantially circular opening 121 in a portion corresponding to the AF movable section 11 .
  • a portion 122 corresponding to the X-axis direction drive unit 50X is formed to be recessed inward in the radial direction so that the X-axis direction drive unit 50X can be placed without protruding outward in the radial direction. Furthermore, in the first stage 12, a portion 123 corresponding to the Y-axis direction drive unit 50Y is similarly formed to be recessed inward in the radial direction (hereinafter referred to as "OIS motor fixing portions 122, 123").
  • a Y-axis direction drive unit 50Y is fixed to the OIS motor fixing part 123.
  • the first stage 12 functions as an active member regarding the movement of the OIS movable section 10 in the Y-axis direction.
  • the first stage 12 supports the AF movable section 11 via the AF support section 15 so as to be movable in the optical axis direction.
  • the first stage 12 has an AF ball holding part 124 on the inner circumferential surface of the opening 121, in which the AF support part 15 is arranged.
  • the AF ball holding portions 124 are provided at two diagonally located locations among the four corners of the first stage 12 in plan view.
  • the AF ball holding portion 124 extends along the optical axis direction, and has a substantially V-shaped (tapered) cross-sectional shape so that the groove width becomes narrower toward the groove bottom.
  • the OIS ball holding part that holds the OIS support part 42 at a position facing the OIS ball holding part 134 of the second stage 13 in the Z-axis direction. (not shown) is formed.
  • the OIS support part 42 is held between the OIS ball holding parts of the first stage 12 and the second stage 13 with multi-point contact. Therefore, the balls forming the OIS support portion 42 stably roll in the Y-axis direction.
  • the first stage 12 has an AF motor fixing part 125 on the inner peripheral surface of the opening 121, in which the AF drive unit 70 is disposed.
  • the AF motor fixing portions 125 are provided, for example, at two diagonally located locations among the four corners of the first stage 12 in plan view.
  • an AF motor fixture 126 (see FIG. 11) is attached to the AF motor fixture 125, and the AF resonator 71 of the AF drive unit 70 is held by the AF motor fixture 126.
  • the first stage 12 functions as an active member regarding the movement of the AF movable section 11 in the Z-axis direction.
  • a power supply line to the AF drive unit 70 and the Y-axis direction drive unit 50Y is arranged on the first stage 12.
  • four metal plates 161 are physically separated and arranged on the light-receiving side surface of the first stage 12 in the optical axis direction.
  • the four metal plates 161 are respectively connected to terminal fittings 162 exposed from the four corners of the first stage 12.
  • Power is supplied from wiring (not shown) of the base 21 to the AF drive unit 70 and the Y-axis direction drive unit 50Y via the OIS biasing member 30, the terminal fittings 162, and the metal plate 161.
  • the AF movable part 11 is a lens holder that holds the lens part 2 (see FIG. 2), and moves in the optical axis direction during focusing.
  • the AF movable section 11 is arranged radially inwardly and spaced apart from the first stage 12 (AF fixed section), and is supported while being biased by the first stage 12 via the AF support section 15 .
  • the AF movable part 11 is formed of, for example, polyarylate (PAR), a PAR alloy that is a mixture of a plurality of resin materials including PAR, a liquid crystal polymer, or the like.
  • the AF movable section 11 has a cylindrical lens housing section 111.
  • the lens portion 2 is fixed to the inner circumferential surface of the lens housing portion 111 by, for example, adhesive.
  • the AF movable section 11 has an AF motor fixing section 112 on the outer peripheral surface of the lens housing section 111 at a position corresponding to the AF drive unit 70 to which the AF power transmission section 80 is fixed.
  • the AF movable section 11 functions as a passive member regarding movement of the AF movable section 11 in the Z-axis direction.
  • the AF movable section 11 has an AF ball holding section 114 that holds the AF support section 15 on the outer peripheral surface of the lens housing section 111 at a position facing the AF ball holding section 124 of the first stage 12 in the radial direction.
  • the AF support section 15 is held between the first stage 12 and the AF ball holding section of the AF movable section 11 with multi-point contact. Therefore, the balls forming the AF support section 15 stably roll in the Z-axis direction.
  • the AF support part 15 supports the AF movable part 11 in a radially spaced state with respect to the first stage 12 (AF fixed part).
  • the AF support section 15 is composed of four balls that are rotatably interposed between the first stage 12 and the AF movable section 11. Note that the number of balls constituting the AF support section 15 can be changed as appropriate.
  • the X-axis direction drive unit 50X and the Y-axis direction drive unit 50Y are ultrasonic motor-type actuators that move the OIS movable section 10 in the X-axis direction and the Y-axis direction.
  • the X-axis direction drive unit 50X is arranged on the base 21, which is an active side member, and is connected to the second stage 13, which is a passive side element, via the X-axis direction power transmission section 60X.
  • the Y-axis direction drive unit 50Y is arranged on the first stage 12, which is an active side member, and is connected to the second stage 13, which is a passive side element, via the Y-axis direction power transmission section 60Y.
  • the X-axis direction drive unit 50X and the X-axis direction power transmission section 60X, and the Y-axis direction drive unit 50Y and the Y-axis direction power transmission section 60Y are arranged along mutually orthogonal sides.
  • the X-axis direction drive unit 50X and the X-axis direction power transmission section 60X are arranged to extend along the X-axis, and move the entire OIS movable section 10 in the X-axis direction.
  • the X-axis direction drive unit 50X is fixed to the OIS motor fixing part 212 of the base 21, and the X-axis direction power transmission part 60X is fixed to the OIS motor fixing part 132 of the second stage 13.
  • the Y-axis direction drive unit 50Y is arranged to extend along the Y-axis, and moves only the AF unit 10A of the OIS movable section 10 in the Y-axis direction.
  • the Y-axis direction drive unit 50Y is fixed to the OIS motor fixing part 123 of the first stage 12, and the Y-axis direction power transmission part 60Y is fixed to the OIS motor fixing part 133 of the second stage 13. .
  • the X-axis direction drive unit 50X and the Y-axis direction drive unit 50Y are collectively referred to as “OIS drive units 50X, 50Y.” Furthermore, the X-axis direction power transmission section 60X and the Y-axis direction power transmission section 60Y are collectively referred to as “OIS power transmission sections 60X, 60Y.”
  • the OIS drive units 50X and 50Y each have an OIS resonance section 51 and an OIS piezoelectric element 52.
  • the OIS power transmission sections 60X and 60Y each include a passive member 61 and a connecting member 62.
  • the OIS piezoelectric element 52 is, for example, a plate-shaped element made of a ceramic material, and generates vibration by applying a high-frequency voltage. Two OIS piezoelectric elements 52 are arranged so as to sandwich the body (not shown) of the OIS resonator 51 .
  • the OIS resonator 51 is formed of a conductive material and resonates in response to the vibration of the OIS piezoelectric element 52.
  • the OIS resonator 51 may be made of a metal having predetermined conductivity, shear strength, hardness, specific gravity, Young's modulus, etc., and is preferably made of stainless steel, for example.
  • the OIS resonator 51 and the OIS piezoelectric element 52 of the X-axis direction drive unit 50X are electrically connected to wiring (not shown) of the base 21.
  • the OIS resonator 51 and the OIS piezoelectric element 52 of the Y-axis direction drive unit 50Y are electrically connected to a metal plate 161 that functions as a power supply line.
  • the OIS resonator 51 includes a substantially rectangular body (not shown) held between the OIS piezoelectric elements 52 and two arms 511 and 512 extending from the upper and lower parts of the body in the X-axis direction or the Y-axis direction. have The two arms 511 and 512 have a substantially symmetrical shape, and their respective free ends abut the passive members 61 of the OIS power transmission sections 60X and 60Y, resonate with the vibration of the OIS piezoelectric element 52, and move symmetrically. transform.
  • the two arms 511 and 512 are formed so that the contact surfaces that contact the passive members 61 of the OIS power transmission sections 60X and 60Y face inward and face each other.
  • the vibration motion of the OIS piezoelectric element 52 is caused by the vibration motion of the OIS power transmission sections 60X, 60Y. converted into linear motion.
  • the OIS resonator 51 has at least two resonant frequencies, and deforms with different behavior for each resonant frequency.
  • the overall shape of the OIS resonant section 51 is set so that it deforms with different behaviors for two resonant frequencies.
  • the different behaviors are a behavior in which the OIS power transmission units 60X and 60Y are moved forward in the X-axis direction or the Y-axis direction, and a behavior in which they are moved backward.
  • the passive member 61 is held between the arms 511 and 512 of the OIS resonator 51 while being biased.
  • the passive member 61 is made of a rigid body and is less likely to deform than the arms 511 and 512.
  • the passive member 61 is, for example, a block member made of a ceramic material such as zirconia.
  • the passive member 61 may be a member in which a coating layer made of a ceramic material is formed on the surface of a block made of a metal material such as stainless steel (at least the surface that comes into contact with the OIS resonator 51).
  • the width of the passive member 61 in the direction in which it is sandwiched by the arms 511 and 512 is larger than the width of separation between the tips of the arms 511 and 512 (portions that come into contact with the passive member 61).
  • the passive member 61 When the passive member 61 is composed of two plate-like members and the passive member 61 is urged against the arms 511 and 512 using the restoring force generated in the passive member 61, the passive member 61 and the arms 511 and 512 The contact state changes as the passive member 61 moves, and there is a possibility that the driving performance may become unstable. In contrast, in the present embodiment, the state of contact between the passive member 61 and the arms 511, 512 does not change even if the passive member 61 moves, so that stable driving performance can be obtained.
  • the connecting member 62 connects the passive member 61 and the second stage 13, which is a passive member.
  • the connecting member 62 is made of a metal material such as stainless steel, for example.
  • the connecting member 62 includes a fixed part 62 a fixed to the passive member 61 and an elastic part 62 b extending from the fixed part 62 a and coupled to the second stage 13 .
  • the elastic portion 62b is elastically deformable and is formed of, for example, a plate spring.
  • the connecting member 62 is arranged such that the elastic portion 62b extends in the moving direction of the movable portion.
  • the elastic portion 62b can be deformed (flexed) in the thickness direction, but is difficult to deform in the direction of movement of the movable portion.
  • the elastic portion 62b absorbs a positional deviation between the moving direction D1 of the movable portion and the power transmission direction D2 that may occur due to mounting tolerances or the like.
  • the active part is moved so that the moving direction D1 of the movable part (the relative moving direction of the second stage 13 with respect to the base 21 or the first stage 12) matches the power transmission direction D2.
  • Elements OIS resonance part 51
  • passive elements OIS power transmission parts 60X, 60Y
  • a deviation may occur between the mounting angle of the passive element to the active element and the mounting angle of the movable part to the fixed part.
  • the OIS power transmission parts 60X and 60Y are formed of rigid bodies, the power transmission direction D2 is inclined with respect to the moving direction D1 of the movable part, and the OIS resonance part 51 and the OIS power transmission part 60X , 60Y become difficult to slide. As a result, the generation of power transmitted to the movable part may become unstable (see FIG. 10B).
  • the OIS drive units 50X and 50Y arranged on the base 21 and the first stage 12, which are active side members, and the second stage 13, which is a passive side member, are connected to the connecting member 62. They are connected via OIS power transmission sections 60X and 60Y.
  • the positional deviation is absorbed by the elastic part 62b of the connecting member 62, so that the movable part can move.
  • the direction D1 and the power transmission direction D2 match (see FIG. 10A). Therefore, the sliding movement between the OIS resonance part 51 and the OIS power transmission parts 60X, 60Y is maintained, the rolling motion of the balls of the OIS support parts 41, 42 is performed smoothly, and the moving operation of the movable part is stabilized.
  • the AF drive unit 70 is an ultrasonic motor type actuator that moves the AF movable section 11 in the Z-axis direction. As shown in FIGS. 11A and 11B, the AF drive unit 70 is arranged on the first stage 12, which is an active side member, and is connected to the AF movable section 11, which is a passive element, via the AF power transmission section 80. . FIG. 11A shows a state in which the AF drive unit 70 is attached to the AF movable section 11.
  • two AF drive units 70 are arranged between the AF movable section 11 and the first stage 12.
  • the AF drive unit 70 is fixed to the AF motor fixing part 125 of the first stage 12 so that arms 711 and 712 extend in the Z-axis direction.
  • the AF drive unit 70 has an AF resonance section 71 and an AF piezoelectric element 72.
  • the AF power transmission section 80 includes two AF plates 81 having a predetermined length in the optical axis direction.
  • the AF piezoelectric element 72 is, for example, a plate-shaped element made of a ceramic material, and generates vibration by applying a high-frequency voltage. Two AF piezoelectric elements 72 are arranged so as to sandwich the body (not shown) of the AF resonator 71 .
  • the AF resonance part 71 is formed of a conductive material and resonates in response to the vibration of the AF piezoelectric element 72.
  • the AF resonator 71 may be made of metal having predetermined conductivity, shear strength, hardness, specific gravity, Young's modulus, etc.
  • stainless steel is suitable.
  • the AF resonator 71 and the AF piezoelectric element 72 are electrically connected to a metal plate 161 that functions as a power supply line.
  • the AF resonator 71 has a substantially rectangular body (not shown) held between the AF piezoelectric elements 72 and two arms 711 and 712 extending from the body in the Z-axis direction.
  • the two arms 711 and 712 have a substantially symmetrical shape, and their respective free ends abut against the AF plate 81 of the AF power transmission unit 80, and are deformed symmetrically by resonating with the vibration of the AF piezoelectric element 72. .
  • the two arms 711 and 712 are formed such that the surfaces that contact the AF plate 81 face outward, and are arranged so that their free ends are sandwiched between the AF plate 81.
  • the AF resonance part 71 resonates when the AF resonance part 71 and the AF power transmission part 80 (AF plate 81) are in contact with each other, the vibration motion of the AF piezoelectric element 72 is converted into the linear motion of the AF power transmission part 80. be done.
  • the AF resonance section 71 has at least two resonance frequencies, and deforms with different behavior for each resonance frequency.
  • the overall shape of the AF resonance section 71 is set so that it deforms with different behaviors for two resonance frequencies.
  • the AF plate 81 is a hard plate-shaped member made of a metal material such as titanium copper, nickel copper, or stainless steel.
  • the AF plate 81 is arranged on the AF motor fixing part 112 of the AF movable part 11 along the moving direction so as to come into contact with the arms 711 and 712 of the AF resonating part 71 .
  • the AF plate 81 is fixed to the AF movable section 11 and is movable integrally with the AF movable section 11.
  • the AF plate 81 is interposed between the biasing member 82 disposed on the AF motor fixed part 112 of the AF movable part 11 and the AF resonance part 71.
  • the AF plate 81 is held in a biased state toward the arms 711 and 712 of the AF resonator 71 by the biasing member 82 .
  • the biasing member 82 may be composed of, for example, a plate spring, or may be made of an elastic body such as a coil spring or hard rubber.
  • the AF piezoelectric element 72 vibrates, and the AF resonant section 71 deforms in a manner that corresponds to the frequency.
  • the AF power transmission section 80 is slid in the Z-axis direction by the driving force of the AF drive unit 70.
  • the AF movable section 11 moves in the Z-axis direction, and focusing is performed. Since the AF support part 15 is made of a ball, the AF movable part 11 can move smoothly in the Z-axis direction.
  • the height of the optical element drive device 1 can be reduced by simply increasing the size of the contact portion in the Z-axis direction.
  • the movement stroke of the AF movable section 11 can be easily lengthened without damage.
  • the OIS piezoelectric element 52 vibrates, and the OIS resonator 51 deforms in a manner that corresponds to the frequency.
  • the OIS power transmission sections 60X, 60Y are slid in the X-axis direction or the Y-axis direction by the driving force of the OIS drive units 50X, 50Y.
  • the OIS movable section 10 moves in the X-axis direction or the Y-axis direction, and shake correction is performed. Since the OIS support parts 41 and 42 are formed of balls, the OIS movable part 10 can move smoothly in the X-axis direction or the Y-axis direction.
  • the power is transferred from the first stage 12 where the Y-axis direction drive unit 50Y is disposed to the second stage 13. is transmitted.
  • the OIS support part 41 held between the second stage 13 and the base 21 cannot roll in the Y-axis direction, the position of the second stage 13 in the X-axis direction with respect to the base 21 is maintained.
  • the OIS support part 42 held between the first stage 12 and the second stage 13 can roll in the Y-axis direction, the first stage 12 moves in the Y-axis direction with respect to the second stage 13. It turns out.
  • the X-axis direction drive unit is operated based on a detection signal indicating angular shake from a shake detection section (for example, a gyro sensor, not shown) so that the angular shake of the camera module A is canceled out.
  • the voltage applied to the drive unit 50X and Y-axis direction drive unit 50Y is controlled.
  • the translational movement of the OIS movable section 10 may be controlled by feeding back the detection result of the position detection section.
  • the optical element driving device 1 has the following features singly or in appropriate combinations.
  • the optical element driving device 1 includes a base 21 (fixed part), a second stage 13 (movable part) including the lens part 2 (optical element), and a base 21 (an active side member consisting of either a fixed part or a movable part) and an ultrasonic motor-type X-axis direction drive unit 50X (drive part) that moves the second stage 13 with respect to the base 21; , the second stage 13 (passive side member consisting of the other of a fixed part and a movable part) and the X-axis direction drive unit 50X are connected, and the power of the X-axis direction drive unit 50X is transmitted to the second stage 13.
  • the X-axis direction drive unit 50X has an OIS resonance section 51 having a pair of vibrating arms 511 and 512, and the X-axis direction power transmission section 60X is held between the two arms 511 and 512 while being biased.
  • the connecting member 62 includes a passive member 61 that connects the passive member 61 and the second stage 13, and the connecting member 62 is elastically deformable.
  • the optical element driving device 1 includes a second stage 13 (fixed part), a first stage 12 (movable part) including the lens part 2 (optical element), An ultrasonic motor-type Y-axis direction drive unit that is disposed on the first stage 12 (active side member consisting of either a fixed part or a movable part) and moves the first stage 12 with respect to the second stage 13 50Y (driving section), the second stage 13 (passive side member consisting of the other of a fixed section and a movable section), and the Y-axis direction drive unit 50Y, and the power of the Y-axis direction drive unit 50Y is connected.
  • a Y-axis direction power transmission section 60Y that transmits to the second stage 13 is provided.
  • the Y-axis direction drive unit 50Y has an OIS resonance section 51 having a pair of vibrating arms 511 and 512, and the Y-axis direction power transmission section 60Y is held between the pair of arms 511 and 512 while being biased.
  • the connecting member 62 includes a passive member 61 that connects the passive member 61 and the second stage 13, and the connecting member 62 is elastically deformable. As a result, even if a positional deviation occurs between the mounting angle of the passive element to the active element and the mounting angle of the movable part to the fixed part, the positional deviation is absorbed by the connecting member 62.
  • the moving direction D1 and the power transmission direction D2 match (see FIG. 10A). Therefore, the sliding movement between the OIS resonance part 51 and the OIS power transmission parts 60X and 60Y is maintained, and the OIS movable part 10 including the first stage 12 is moved in the Y-axis direction with respect to the OIS fixed part 20 including the second stage 13.
  • the moving operation is stabilized, driving performance can be improved, and the reliability of the optical element driving device 1, camera module A, and smartphone M (camera-equipped device) is improved.
  • the connecting member 62 is made of a metal material. Thereby, it is possible to easily absorb a positional deviation between the attachment angle of the passive element to the active element and the attachment angle of the movable part to the fixed part.
  • the connecting member 62 of the X-axis direction power transmission unit 60X includes a fixed part 62a fixed to the passive member 61, and an elastic part 62b extending from the fixed part 62a and connected to the second stage 13 (movable part).
  • the elastic portion 62b is arranged so as to extend in the X-axis direction (the moving direction of the movable portion). As a result, elastic deformation of the elastic portion 62b in the X-axis direction is reduced, so power transmission in the X-axis direction from the X-axis drive unit 50X to the second stage 13 is not impaired, and appropriate drive performance is ensured. can do.
  • the connecting member 62 of the Y-axis direction power transmission unit 60Y includes a fixed part 62a fixed to the passive member 61, and an elastic part 62b extending from the fixed part 62a and connected to the first stage 12 (movable part).
  • the elastic portion 62b is arranged so as to extend in the Y-axis direction (the moving direction of the movable portion). This reduces elastic deformation of the elastic portion 62b in the Y-axis direction, so transmission of power in the Y-axis direction from the Y-axis drive unit 50Y to the second stage 13 is not impaired, ensuring appropriate drive performance. can do.
  • the base 21 (active side member) and the second stage 13 (passive side member) are supported by an OIS support part 41 (ball) so as to be relatively movable.
  • the first stage 12 (active side member) and the second stage 13 (passive side member) are directed to be relatively movable by the OIS support part 42 (ball). ing. Thereby, the OIS movable section 10 can be smoothly moved by utilizing the rolling motion of the ball.
  • the passive member 61 is less deformable than the pair of arms 511, 512, and the passive member 61 in the direction sandwiched by the pair of arms 511, 512.
  • the width is larger than the separation width between the pair of arms 511 and 512.
  • the power transmission structure characteristic of the present invention is applied to the X-axis direction drive unit 50X and the Y-axis direction drive unit 50Y, but it may also be applied to the AF drive unit 70. It may be applied only to either the X-axis direction drive unit 50X or the Y-axis direction drive unit 50Y.
  • the X-axis direction drive unit 50X, the Y-axis direction drive unit 50Y, and the AF drive unit 70 are all configured with ultrasonic motor type actuators, but the power transmission characteristic of the present invention is The drive unit to which this structure is not applicable does not need to be of the ultrasonic motor type.
  • the optical element driving device 1 having the AF function and the OIS function has been described as an example, but the present invention is applicable to an optical element driving device having one of the AF function and the OIS function. You can also.
  • the smartphone M which is a camera-equipped mobile terminal
  • the present invention provides a camera module that processes image information obtained by the camera module. It can be applied to a camera-equipped device having an image processing section.
  • Camera-equipped devices include information equipment and transportation equipment.
  • Information devices include, for example, a camera-equipped mobile phone, a notebook computer, a tablet terminal, a portable game machine, a web camera, and a camera-equipped vehicle-mounted device (for example, a back monitor device, a drive recorder device).
  • transportation equipment includes, for example, automobiles and drones (unmanned aerial vehicles).
  • FIGS. 12A and 12B are diagrams showing a vehicle V as a camera mounting device equipped with a vehicle camera module VC (Vehicle Camera).
  • 12A is a front view of the automobile V
  • FIG. 12B is a rear perspective view of the automobile V.
  • the automobile V is equipped with the camera module A described in the embodiment as the in-vehicle camera module VC.
  • the in-vehicle camera module VC is attached, for example, to a windshield facing forward, or to a rear gate facing rearward.
  • This in-vehicle camera module VC is used for back monitors, drive recorders, collision avoidance control, automatic driving control, and the like.
  • the optical element driving device 1 that drives the lens section 2 as an optical element has been described, but the optical element to be driven may be an optical element other than a lens, such as a mirror or a prism.
  • Optical element drive device 10 OIS movable part (movable part) 12 1st stage (active side member) 13 2nd stage (passive side member) 20 OIS fixed part (fixed part) 21 Base (active side member) 50X X-axis direction drive unit (drive unit) 50Y Y-axis direction drive unit (drive unit) 51 OIS resonance part (resonance part) 511, 512 Arm 60X X-axis direction power transmission section (power transmission section) 60Y Y-axis direction power transmission section (power transmission section) 61 Passive member 62 Connecting member A Camera module M Smartphone (camera mounted device)

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Abstract

Provided are an optical element driving device, a camera module, and a camera mounting device that are highly reliable and are capable of achieving stable movement actions of a movable unit. The optical element driving device comprises: a fixed part; a movable part that includes an optical element; an ultrasonic motor-type driving part that is disposed on an active-side member made up of any one among the fixed part and the movable part, and causes the movable part to move with respect to the fixed part; and a power transmitting part that couples a passive-side member made up of the other among the fixed part and the movable part, and the driving part, and transmits the power of the driving part to the passive-side member. The driving part has a resonating part that has a pair of arms that vibrate. The motive power transmitting part has a passive member that is gripped while being urged by the pair of arms, and a coupling member that couples the passive member and the passive-side member. The coupling member is elastically deformable.

Description

光学素子駆動装置、カメラモジュール、及びカメラ搭載装置Optical element drive device, camera module, and camera mounting device
　本発明は、光学素子駆動装置、カメラモジュール、及びカメラ搭載装置に関する。 The present invention relates to an optical element driving device, a camera module, and a camera mounting device.
　一般に、スマートフォン等の携帯端末には、小型のカメラモジュールが搭載されている。このようなカメラモジュールには、被写体を撮影するときのピント合わせを自動的に行うオートフォーカス機能（以下「ＡＦ機能」と称する、ＡＦ：Auto Focus）及び撮影時に生じる振れ（振動）を光学的に補正して画像の乱れを軽減する振れ補正機能（以下「ＯＩＳ機能」と称する、ＯＩＳ：Optical Image Stabilization）を有する光学素子駆動装置が適用される（例えば特許文献１）。 Generally, mobile terminals such as smartphones are equipped with a small camera module. These camera modules have an autofocus function (hereinafter referred to as "AF function") that automatically adjusts the focus when photographing a subject, and an optical system that automatically reduces shake (vibration) that occurs during shooting. An optical element driving device having an optical image stabilization (OIS) function (hereinafter referred to as "OIS function") that corrects and reduces image disturbance is applied (for example, Patent Document 1).
　ＡＦ機能及びＯＩＳ機能を有する光学素子駆動装置は、レンズ部を光軸方向に移動させるためのオートフォーカス駆動ユニット（以下「ＡＦ駆動ユニット」と称する）と、レンズ部を光軸方向に直交する平面内で移動させるための振れ補正駆動ユニット（以下「ＯＩＳ駆動ユニット」と称する）と、を備える。特許文献１では、ＡＦ駆動ユニット及びＯＩＳ駆動ユニットに、超音波モーター型の駆動ユニットが適用されている。 An optical element drive device having an AF function and an OIS function includes an autofocus drive unit (hereinafter referred to as "AF drive unit") for moving the lens part in the optical axis direction, and a plane perpendicular to the optical axis direction to move the lens part. and an image stabilization drive unit (hereinafter referred to as "OIS drive unit") for moving the camera within the camera. In Patent Document 1, an ultrasonic motor type drive unit is applied to the AF drive unit and the OIS drive unit.
　超音波モーター型の駆動ユニットは、能動要素である共振部（レゾネーター）を含む。超音波モーター型駆動ユニットは、可動部及び固定部の何れか一方からなる能動側部材に共振部が配置され、受動要素である動力伝達部を介して、可動部及び固定部の何れか他方からなる受動側部材に動力が伝達される。共振部及び動力伝達部は、付勢された状態で接触し、駆動時に互いに摺動する。「能動側部材」とは、駆動ユニットが配置される部材であり、［受動側部材］とは、動力伝達部を介して駆動ユニットと連結される部材である。 The ultrasonic motor type drive unit includes a resonator, which is an active element. In an ultrasonic motor type drive unit, a resonant part is arranged in an active side member consisting of either a movable part or a fixed part, and a resonance part is arranged in an active side member consisting of either a movable part or a fixed part, and the resonance part is transmitted from the other of the movable part or the fixed part via a power transmission part which is a passive element. Power is transmitted to the passive side member. The resonance part and the power transmission part are in contact with each other in a biased state and slide against each other when driven. The "active member" is a member on which the drive unit is arranged, and the "passive member" is a member connected to the drive unit via the power transmission section.
国際公開第２０１５／１２３７８７号International Publication No. 2015/123787
　一般に、超音波モーター型の駆動ユニットにおいては、可動部の移動方向と、動力の伝達方向とが一致するように、能動要素、受動要素、可動部及び固定部等の設計が行われる。しかしながら、取付公差等によって、能動要素に対する受動要素の取付角度と、固定部に対する可動部の取付角度とにずれが生じることがある。このずれは、能動要素及び受動要素の接触状態にも影響を与え、両部材が摺動し難い状態となるため、可動部へ伝達する動力の発生が不安定になる虞がある。 In general, in an ultrasonic motor type drive unit, the active element, passive element, movable part, fixed part, etc. are designed so that the moving direction of the movable part and the power transmission direction match. However, due to mounting tolerances and the like, a deviation may occur between the mounting angle of the passive element to the active element and the mounting angle of the movable part to the fixed part. This deviation also affects the contact state between the active element and the passive element, making it difficult for both members to slide, which may lead to unstable generation of power transmitted to the movable part.
　本発明の目的は、可動部の移動動作の安定化を図ることができる、信頼性の高い光学素子駆動装置、カメラモジュール及びカメラ搭載装置を提供することである。 An object of the present invention is to provide a highly reliable optical element drive device, camera module, and camera mounting device that can stabilize the movement operation of a movable part.
　本発明に係る光学素子駆動装置は、
　固定部と、
　光学素子を含む可動部と、
　前記固定部及び前記可動部のうちの何れか一方からなる能動側部材に配置され、前記固定部に対して前記可動部を移動させる超音波モーター型の駆動部と、
　前記固定部及び前記可動部のうちの何れか他方からなる受動側部材と前記駆動部とを連結し、前記駆動部の動力を前記受動側部材に伝達する動力伝達部と、
　を備え、
　前記駆動部は、振動する一対のアームを有する共振部を有し、
　前記動力伝達部は、
　一対の前記アームに付勢された状態で挟持される受動部材と、
　前記受動部材と前記受動側部材とを連結する連結部材と、を有し、
　前記連結部材は、弾性変形可能である。 The optical element driving device according to the present invention includes:
A fixed part,
a movable part including an optical element;
an ultrasonic motor-type drive unit that is disposed on an active side member consisting of either the fixed part or the movable part and moves the movable part with respect to the fixed part;
a power transmission section that connects the drive section and a passive side member consisting of the other of the fixed section and the movable section, and transmits the power of the drive section to the passive side member;
Equipped with
The driving section has a resonating section having a pair of vibrating arms,
The power transmission section is
a passive member held between the pair of arms in a biased state;
a connecting member that connects the passive member and the passive side member,
The connecting member is elastically deformable.
　本発明に係るカメラモジュールは、
　上記の光学素子駆動装置と、
　前記可動部に装着される光学素子と、
　前記光学素子により結像された被写体像を撮像する撮像部と、を備える。 The camera module according to the present invention includes:
The above optical element driving device,
an optical element attached to the movable part;
An imaging unit that captures a subject image formed by the optical element.
　本発明に係るカメラ搭載装置は、
　情報機器又は輸送機器であるカメラ搭載装置であって、
　上記のカメラモジュールと、
　前記カメラモジュールで得られた画像情報を処理する画像処理部と、を備える。 The camera mounting device according to the present invention includes:
A camera-equipped device that is an information device or a transportation device,
The above camera module,
An image processing unit that processes image information obtained by the camera module.
　本発明によれば、能動要素から受動要素への動力伝達を安定化し、駆動性能の向上を図ることができる、信頼性の高い光学素子駆動装置、カメラモジュール及びカメラ搭載装置が提供される。 According to the present invention, a highly reliable optical element drive device, camera module, and camera mounting device are provided that can stabilize power transmission from an active element to a passive element and improve drive performance.
図１Ａ、図１Ｂは、本発明の一実施の形態に係るカメラモジュールを搭載するスマートフォンを示す図である。FIG. 1A and FIG. 1B are diagrams showing a smartphone equipped with a camera module according to an embodiment of the present invention. 図２は、カメラモジュールの外観斜視図である。FIG. 2 is an external perspective view of the camera module. 図３は、光学素子駆動装置の外観斜視図である。FIG. 3 is an external perspective view of the optical element driving device. 図４は、光学素子駆動装置の外観斜視図である。FIG. 4 is an external perspective view of the optical element driving device. 図５は、光学素子駆動装置の分解斜視図である。FIG. 5 is an exploded perspective view of the optical element driving device. 図６は、光学素子駆動装置の分解斜視図である。FIG. 6 is an exploded perspective view of the optical element driving device. 図７は、ＡＦユニットの分解斜視図である。FIG. 7 is an exploded perspective view of the AF unit. 図８は、ＡＦユニットの分解斜視図である。FIG. 8 is an exploded perspective view of the AF unit. 図９Ａ、図９Ｂは、ＯＩＳ駆動ユニットの拡大図である。9A and 9B are enlarged views of the OIS drive unit. 図１０Ａ、図１０Ｂは、ＯＩＳ駆動ユニットにおける動力伝達機構の模式図である。10A and 10B are schematic diagrams of the power transmission mechanism in the OIS drive unit. 図１１Ａ、図１１Ｂは、ＡＦ駆動ユニットの拡大図である。11A and 11B are enlarged views of the AF drive unit. 図１２Ａ、図１２Ｂは、車載用カメラモジュールを搭載するカメラ搭載装置としての自動車を示す図である。12A and 12B are diagrams showing an automobile as a camera mounting device equipped with an on-vehicle camera module.
　以下、本発明の実施の形態を図面に基づいて詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail based on the drawings.
　図１Ａ、図１Ｂは、本発明の一実施の形態に係るカメラモジュールＡを搭載するスマートフォンＭ（カメラ搭載装置の一例）を示す図である。図１ＡはスマートフォンＭの正面図であり、図１ＢはスマートフォンＭの背面図である。 1A and 1B are diagrams showing a smartphone M (an example of a camera-equipped device) equipped with a camera module A according to an embodiment of the present invention. FIG. 1A is a front view of the smartphone M, and FIG. 1B is a rear view of the smartphone M.
　スマートフォンＭは、２つの背面カメラＯＣ１、ＯＣ２からなるデュアルカメラを有する。本実施の形態では、背面カメラＯＣ１、ＯＣ２に、カメラモジュールＡが適用されている。 The smartphone M has a dual camera consisting of two rear cameras OC1 and OC2. In this embodiment, camera module A is applied to rear cameras OC1 and OC2.
　カメラモジュールＡは、ＡＦ機能及びＯＩＳ機能を備え、被写体を撮影するときのピント合わせを自動的に行うとともに、撮影時に生じる振れ（振動）を光学的に補正して像ぶれのない画像を撮影することができる。 Camera module A is equipped with an AF function and an OIS function, and not only automatically focuses when photographing a subject, but also optically corrects shake (vibration) that occurs during photographing to photograph images without image blur. be able to.
　図２は、カメラモジュールＡの外観斜視図である。図３及び図４は、実施の形態に係る光学素子駆動装置１の外観斜視図である。図４は、図３をＺ軸周りに９０°回転した状態を示す。図２～４に示すように、実施の形態では、直交座標系（Ｘ，Ｙ，Ｚ）を使用して説明する。後述する図においても共通の直交座標系（Ｘ，Ｙ，Ｚ）で示している。 FIG. 2 is an external perspective view of the camera module A. 3 and 4 are external perspective views of the optical element driving device 1 according to the embodiment. FIG. 4 shows a state in which FIG. 3 is rotated by 90 degrees around the Z axis. As shown in FIGS. 2 to 4, the embodiment will be described using an orthogonal coordinate system (X, Y, Z). The figures to be described later are also shown using a common orthogonal coordinate system (X, Y, Z).
　カメラモジュールＡは、例えば、スマートフォンＭで実際に撮影が行われる場合に、Ｘ軸方向が上下方向（又は左右方向）、Ｙ軸方向が左右方向（又は上下方向）、Ｚ軸方向が前後方向となるように搭載される。すなわち、Ｚ軸方向が光軸方向であり、図中上側（＋Ｚ側）が光軸方向受光側、下側（－Ｚ側）が光軸方向結像側である。また、Ｚ軸に直交するＸ軸方向及びＹ軸方向を「光軸直交方向」と称し、ＸＹ面を「光軸直交面」と称する。 For example, when the camera module A actually takes a picture with the smartphone M, the X-axis direction is the up-down direction (or the left-right direction), the Y-axis direction is the left-right direction (or the up-down direction), and the Z-axis direction is the front-back direction. It will be installed as follows. That is, the Z-axis direction is the optical axis direction, the upper side (+Z side) in the figure is the light receiving side in the optical axis direction, and the lower side (−Z side) is the imaging side in the optical axis direction. Further, the X-axis direction and the Y-axis direction orthogonal to the Z-axis are referred to as "optical axis orthogonal directions", and the XY plane is referred to as "optical axis orthogonal plane".
　図２～４に示すように、カメラモジュールＡは、ＡＦ機能及びＯＩＳ機能を実現する光学素子駆動装置１、円筒形状のレンズバレルにレンズが収容されてなるレンズ部２、及びレンズ部２により結像された被写体像を撮像する撮像部３等を備える。すなわち、光学素子駆動装置１は、光学素子としてレンズ部２を駆動するレンズ駆動装置である。 As shown in FIGS. 2 to 4, the camera module A includes an optical element drive device 1 that realizes an AF function and an OIS function, a lens section 2 in which a lens is housed in a cylindrical lens barrel, and a lens section 2. It includes an imaging unit 3 and the like that captures the captured image of the subject. That is, the optical element driving device 1 is a lens driving device that drives the lens section 2 as an optical element.
　撮像部３は、光学素子駆動装置１の光軸方向結像側に配置される。撮像部３は、例えば、イメージセンサー基板３０１、イメージセンサー基板３０１に実装される撮像素子３０２及び制御部３０３を有する。撮像素子３０２は、例えば、ＣＣＤ（charge-coupled device）型イメージセンサー、ＣＭＯＳ（complementary metal oxide semiconductor）型イメージセンサー等により構成され、レンズ部２により結像された被写体像を撮像する。制御部３０３は、例えば、制御ＩＣで構成され、光学素子駆動装置１の駆動制御を行う。光学素子駆動装置１は、イメージセンサー基板３０１に搭載され、機械的かつ電気的に接続される。なお、制御部３０３は、イメージセンサー基板３０１に設けられてもよいし、カメラモジュールＡが搭載されるカメラ搭載機器（実施の形態では、スマートフォンＭ）に設けられてもよい。 The imaging unit 3 is arranged on the imaging side of the optical element driving device 1 in the optical axis direction. The imaging unit 3 includes, for example, an image sensor board 301, an image sensor 302 mounted on the image sensor board 301, and a control unit 303. The image sensor 302 is configured with, for example, a CCD (charge-coupled device) type image sensor, a CMOS (complementary metal oxide semiconductor) type image sensor, or the like, and captures a subject image formed by the lens unit 2. The control unit 303 is composed of, for example, a control IC, and controls the drive of the optical element drive device 1 . The optical element driving device 1 is mounted on the image sensor substrate 301 and mechanically and electrically connected to it. Note that the control unit 303 may be provided on the image sensor board 301 or may be provided on a camera-equipped device (in the embodiment, the smartphone M) on which the camera module A is mounted.
　光学素子駆動装置１は、外側をカバー２４で覆われている。カバー２４は、光軸方向から見た平面視で矩形状の有蓋四角筒体である。実施の形態では、カバー２４は、平面視で正方形状を有している。カバー２４は、光軸方向受光側の面（上面）に略円形の開口２４１を有する。レンズ部２は、カバー２４の開口２４１から外部に臨む。レンズ部２は、カバー２４の開口面よりも受光側に突出するように配置されてもよい。カバー２４は、光学素子駆動装置１のＯＩＳ固定部２０のベース２１（図５参照）に、例えば、接着により固定される。 The optical element driving device 1 is covered with a cover 24 on the outside. The cover 24 is a rectangular lidded square cylinder when viewed from above in the optical axis direction. In the embodiment, the cover 24 has a square shape in plan view. The cover 24 has a substantially circular opening 241 on the light receiving side surface (upper surface) in the optical axis direction. The lens portion 2 faces the outside through the opening 241 of the cover 24. The lens portion 2 may be arranged so as to protrude from the opening surface of the cover 24 toward the light receiving side. The cover 24 is fixed to the base 21 (see FIG. 5) of the OIS fixing section 20 of the optical element driving device 1, for example, by adhesive.
　図５、図６は、実施の形態に係る光学素子駆動装置１の分解斜視図である。図７、図８は、ＡＦユニット１０Ａの分解斜視図である。図６、図８は、それぞれ、図５、図７をＺ軸周りに９０°回転させた状態を示す。 5 and 6 are exploded perspective views of the optical element driving device 1 according to the embodiment. 7 and 8 are exploded perspective views of the AF unit 10A. 6 and 8 respectively show the state in which FIG. 5 and FIG. 7 are rotated by 90 degrees around the Z axis.
　図５～図８に示すように、本実施の形態に係る光学素子駆動装置１は、ＯＩＳ可動部１０、ＯＩＳ固定部２０、Ｘ軸方向駆動ユニット５０Ｘ、Ｙ軸方向駆動ユニット５０Ｙ、及びＯＩＳ支持部４１、４２を備える。 As shown in FIGS. 5 to 8, the optical element driving device 1 according to the present embodiment includes an OIS movable section 10, an OIS fixed section 20, an X-axis direction drive unit 50X, a Y-axis direction drive unit 50Y, and an OIS support. It includes sections 41 and 42.
　ＯＩＳ可動部１０は、振れ補正時に光軸直交面内で移動する部分である。ＯＩＳ可動部１０は、ＡＦユニット１０Ａ及び第２ステージ１３を含む。ＯＩＳ固定部２０は、ＯＩＳ支持部４１を介してＯＩＳ可動部１０が接続される部分である。 The OIS movable part 10 is a part that moves in a plane perpendicular to the optical axis during shake correction. The OIS movable section 10 includes an AF unit 10A and a second stage 13. The OIS fixed part 20 is a part to which the OIS movable part 10 is connected via the OIS support part 41.
　ＯＩＳ可動部１０は、ＯＩＳ固定部２０に対して光軸方向に離間して配置され、ＯＩＳ支持部４１、４２を介してＯＩＳ固定部２０と連結される。ＯＩＳ可動部１０とＯＩＳ固定部２０は、ＯＩＳ用付勢部材３０によって、互いに近づく方向に付勢されている。ＯＩＳ用付勢部材３０は、例えば、光学素子駆動装置１の平面視における四隅に配置される。 The OIS movable part 10 is arranged apart from the OIS fixed part 20 in the optical axis direction, and is connected to the OIS fixed part 20 via the OIS support parts 41 and 42. The OIS movable section 10 and the OIS fixed section 20 are urged toward each other by an OIS urging member 30. The OIS biasing members 30 are arranged, for example, at the four corners of the optical element driving device 1 in a plan view.
　ＯＩＳ用付勢部材３０は、例えば、引張コイルバネで構成され、ＯＩＳ可動部１０とＯＩＳ固定部２０を連結する。本実施の形態では、ＯＩＳ用付勢部材３０の一端は、ベース２１の配線（図示略）に接続され、他端は、第１ステージ１２の端子金具１６２に接続されている。ＯＩＳ用付勢部材３０は、ＡＦ駆動ユニット７０及びＹ軸方向駆動ユニット５０Ｙへの給電ラインとして機能する。 The OIS biasing member 30 is composed of, for example, a tension coil spring, and connects the OIS movable part 10 and the OIS fixed part 20. In this embodiment, one end of the OIS biasing member 30 is connected to wiring (not shown) of the base 21, and the other end is connected to the terminal fitting 162 of the first stage 12. The OIS biasing member 30 functions as a power supply line to the AF drive unit 70 and the Y-axis direction drive unit 50Y.
　ＯＩＳ用付勢部材３０は、ＯＩＳ可動部１０とＯＩＳ固定部２０を連結したときの引張荷重を受けて、ＯＩＳ可動部１０とＯＩＳ固定部２０が互いに近づくように作用する。これにより、ＯＩＳ可動部１０は、ＯＩＳ用付勢部材３０によって、光軸方向に付勢された状態（ベース２１に押し付けられた状態）で、ＸＹ面内で移動可能に保持される。したがって、ＯＩＳ可動部１０をがたつきのない安定した状態で保持することができる。なお、ＯＩＳ用付勢部材３０には、振動を抑制するダンパー材（図示略）が配置されてもよい。 The OIS biasing member 30 receives a tensile load when the OIS movable part 10 and the OIS fixed part 20 are connected, and acts so that the OIS movable part 10 and the OIS fixed part 20 approach each other. Thereby, the OIS movable part 10 is held movably within the XY plane while being biased in the optical axis direction (pressed against the base 21) by the OIS biasing member 30. Therefore, the OIS movable part 10 can be held in a stable state without rattling. Note that a damper material (not shown) that suppresses vibration may be disposed on the OIS biasing member 30.
　ＯＩＳ支持部４１は、ＯＩＳ固定部２０として機能するベース２１に対して、ＯＩＳ可動部１０として機能する第２ステージ１３を、光軸方向に離間した状態で支持する。本実施の形態では、ＯＩＳ支持部４１は、ベース２１と第２ステージ１３の間に転動可能な状態で介在する４個のボールで構成されている。なお、ＯＩＳ支持部４１を構成するボールの数は、適宜変更することができる。 The OIS support section 41 supports the second stage 13, which functions as the OIS movable section 10, with respect to the base 21, which functions as the OIS fixed section 20, while being spaced apart in the optical axis direction. In this embodiment, the OIS support section 41 is composed of four balls that are rotatably interposed between the base 21 and the second stage 13. Note that the number of balls forming the OIS support section 41 can be changed as appropriate.
　ＯＩＳ支持部４２は、ＯＩＳ固定部２０として機能する第２ステージ１３に対して、ＯＩＳ可動部１０として機能する第１ステージ１２を、光軸方向に離間した状態で支持する。本実施の形態では、ＯＩＳ支持部４２は、第２ステージ１３と第１ステージ１２の間に転動可能な状態で介在する４個のボールで構成されている。なお、ＯＩＳ支持部４２を構成するボールの数は、適宜変更することができる。 The OIS support section 42 supports the first stage 12, which functions as the OIS movable section 10, with respect to the second stage 13, which functions as the OIS fixed section 20, while being spaced apart in the optical axis direction. In this embodiment, the OIS support section 42 is composed of four balls that are rotatably interposed between the second stage 13 and the first stage 12. Note that the number of balls forming the OIS support section 42 can be changed as appropriate.
　本実施の形態では、Ｘ軸方向の移動に関しては、ＡＦユニット１０Ａを含むＯＩＳ可動部１０の全体が可動体として移動する。一方、Ｙ軸方向の移動に関しては、ＡＦユニット１０Ａだけが可動体として移動する。つまり、Ｙ軸方向の移動に関しては、第２ステージ１３は、ベース２１とともにＯＩＳ固定部２０を構成する。 In this embodiment, regarding movement in the X-axis direction, the entire OIS movable section 10 including the AF unit 10A moves as a movable body. On the other hand, regarding movement in the Y-axis direction, only the AF unit 10A moves as a movable body. That is, regarding movement in the Y-axis direction, the second stage 13 and the base 21 constitute the OIS fixing part 20.
　ベース２１は、例えば、ポリアリレート（ＰＡＲ）、ＰＡＲを含む複数の樹脂材料を混合したＰＡＲアロイ（例えば、ＰＡＲ／ＰＣ）、又は液晶ポリマーからなる成形材料で形成される。ベース２１は、平面視で矩形状の部材であり、中央に円形の開口２１１を有する。 The base 21 is formed of, for example, polyarylate (PAR), a PAR alloy (for example, PAR/PC) that is a mixture of a plurality of resin materials containing PAR, or a molding material made of a liquid crystal polymer. The base 21 is a rectangular member in plan view, and has a circular opening 211 in the center.
　ベース２１は、Ｘ軸方向駆動ユニット５０Ｘが配置されるＯＩＳモーター固定部２１２を有する。ＯＩＳモーター固定部２１２は、例えば、ベース２１の外周縁のＸ軸に沿う一辺に、光軸方向受光側に向けて突出して形成され、Ｘ軸方向駆動ユニット５０Ｘを保持可能な形状を有している。ベース２１は、ＯＩＳ可動部１０のＸ軸方向の移動に関して、能動側部材として機能する。 The base 21 has an OIS motor fixing part 212 in which the X-axis direction drive unit 50X is placed. The OIS motor fixing part 212 is formed, for example, on one side of the outer peripheral edge of the base 21 along the X-axis so as to protrude toward the light receiving side in the optical axis direction, and has a shape capable of holding the X-axis direction drive unit 50X. There is. The base 21 functions as an active member regarding the movement of the OIS movable section 10 in the X-axis direction.
　ベース２１は、ＯＩＳ支持部４１を介して、ＯＩＳ可動部１０の第２ステージ１３をＸ軸方向に移動可能に支持する。ベース２１は、光軸方向受光側の面に、ＯＩＳ支持部４１が配置されるＯＩＳボール保持部２１４を有する。ＯＩＳボール保持部２１４は、例えば、平面視でＸ軸方向に延びる矩形形状を有する溝である。ＯＩＳボール保持部２１４は、例えば、底面側に向けて溝幅が狭くなるように断面形状が略Ｖ字状（テーパー形状）に形成される。本実施の形態では、ＯＩＳボール保持部２１４は、ベース２１の四隅の近傍に設けられ、ＯＩＳボール保持部２１４に配置された４つのＯＩＳ支持部４１によって、ＯＩＳ可動部１０（第２ステージ１３）が４点で支持されている。 The base 21 supports the second stage 13 of the OIS movable section 10 via the OIS support section 41 so as to be movable in the X-axis direction. The base 21 has an OIS ball holding part 214 on the light receiving side surface in the optical axis direction, on which the OIS supporting part 41 is arranged. The OIS ball holding portion 214 is, for example, a groove having a rectangular shape extending in the X-axis direction in plan view. For example, the OIS ball holding portion 214 is formed to have a substantially V-shaped (tapered) cross-sectional shape so that the groove width becomes narrower toward the bottom side. In this embodiment, the OIS ball holding section 214 is provided near the four corners of the base 21, and the OIS movable section 10 (second stage 13) is is supported by 4 points.
　ベース２１には、例えば、インサート成形により、端子金具２２及び端子金具２２に接続された配線（図示略）が配置される。端子金具２２は、ベース２１から露出し、イメージセンサー基板３０１と電気的に接続される。また、配線は、ＯＩＳ用付勢部材３０と電気的に接続される。ＡＦ駆動ユニット７０のＡＦ駆動ユニット７０及びＹ軸方向駆動ユニット５０ＹのＹ軸方向駆動ユニット５０Ｙへの給電は、ＯＩＳ用付勢部材３０を介して行われる。なお、ベース２１にセンサー基板を配置し、センサー基板の配線と端子金具２２とが電気的に接続されてもよい。 A terminal fitting 22 and wiring (not shown) connected to the terminal fitting 22 are arranged on the base 21, for example, by insert molding. The terminal fitting 22 is exposed from the base 21 and is electrically connected to the image sensor board 301. Further, the wiring is electrically connected to the OIS biasing member 30. Power is supplied to the AF drive unit 70 of the AF drive unit 70 and the Y-axis direction drive unit 50Y of the Y-axis direction drive unit 50Y via the OIS biasing member 30. Note that a sensor board may be placed on the base 21 and the wiring of the sensor board and the terminal fittings 22 may be electrically connected.
　ベース２１には、ＯＩＳ可動部１０のＸ軸方向及びＹ軸方向における位置、並びに、ＡＦ可動部１１のＺ軸方向における位置を検出する位置検出センサーが配置されてもよい。位置検出センサーには、例えば、ホール素子又はＴＭＲ（Tunnel Magneto Resistance）センサー等の磁気センサーを適用できる。この場合、磁気センサーに対向するようにＯＩＳ可動部１０（例えば、第１ステージ１２）及びＡＦ可動部１１にマグネットが配置される。なお、フォトリフレクター等の光センサーによりＯＩＳ可動部１０のＸ軸方向及びＹ軸方向の位置、並びに、ＡＦ可動部１１のＺ軸方向の位置を検出するようにしてもよい。 A position detection sensor may be arranged on the base 21 to detect the position of the OIS movable part 10 in the X-axis direction and the Y-axis direction, and the position of the AF movable part 11 in the Z-axis direction. For example, a Hall element or a magnetic sensor such as a TMR (Tunnel Magneto Resistance) sensor can be applied to the position detection sensor. In this case, magnets are arranged in the OIS movable section 10 (for example, the first stage 12) and the AF movable section 11 so as to face the magnetic sensor. Note that the position of the OIS movable section 10 in the X-axis direction and the Y-axis direction, and the position of the AF movable section 11 in the Z-axis direction may be detected by an optical sensor such as a photoreflector.
　第２ステージ１３は、光軸方向から見た平面視において略矩形状を有する部材であり、例えば、液晶ポリマーで形成される。第２ステージ１３は、ＡＦ可動部１１に対応する部分に開口１３１を有する。 The second stage 13 is a member that has a substantially rectangular shape in plan view from the optical axis direction, and is formed of, for example, a liquid crystal polymer. The second stage 13 has an opening 131 in a portion corresponding to the AF movable section 11.
　第２ステージ１３において、Ｘ軸方向駆動ユニット５０Ｘに対応する部分１３２は、径方向外側にはみ出すことなくＸ軸方向駆動ユニット５０Ｘを配置できるように、径方向内側に凹んで形成されている。また、第２ステージ１３において、Ｙ軸方向駆動ユニット５０Ｙに対応する部分１３３も同様に、径方向内側に凹んで形成されている（以下、「ＯＩＳモーター固定部１３２、１３３」と称する）。 In the second stage 13, a portion 132 corresponding to the X-axis drive unit 50X is recessed inward in the radial direction so that the X-axis drive unit 50X can be placed without protruding outward in the radial direction. Furthermore, in the second stage 13, a portion 133 corresponding to the Y-axis direction drive unit 50Y is similarly formed to be recessed inward in the radial direction (hereinafter referred to as "OIS motor fixing portions 132, 133").
　ＯＩＳモーター固定部１３２には、Ｘ軸方向動力伝達部６０Ｘが固定される。ＯＩＳモーター固定部１３３には、Ｙ軸方向動力伝達部６０Ｙが固定される。第２ステージ１３は、ＯＩＳ可動部１０のＸ軸方向及びＹ軸方向の移動に関して、受動側部材として機能する。 An X-axis direction power transmission section 60X is fixed to the OIS motor fixing section 132. A Y-axis direction power transmission section 60Y is fixed to the OIS motor fixing section 133. The second stage 13 functions as a passive member with respect to the movement of the OIS movable section 10 in the X-axis direction and the Y-axis direction.
　第２ステージ１３は、ＯＩＳ支持部４２を介して、ＡＦユニット１０Ａの第１ステージ１２をＹ軸方向に移動可能に支持する。第２ステージ１３は、光軸方向受光側の面（上面）に、ＯＩＳ支持部４２が配置されるＯＩＳボール保持部１３４を有する。ＯＩＳボール保持部１３４は、例えば、平面視でＹ軸方向に延びる矩形形状を有する溝である。ＯＩＳボール保持部１３４は、例えば、底面側に向けて溝幅が狭くなるように断面形状が略Ｖ字状（テーパー形状）に形成される。本実施の形態では、ＯＩＳボール保持部１３４は、第２ステージ１３の四隅の近傍に設けられ、ＯＩＳボール保持部１３４に配置された４つのＯＩＳ支持部４２によって、ＡＦユニット１０Ａ（第１ステージ１２）が４点で支持されている。 The second stage 13 supports the first stage 12 of the AF unit 10A via the OIS support part 42 so as to be movable in the Y-axis direction. The second stage 13 has an OIS ball holder 134 on the light-receiving side surface (upper surface) in the optical axis direction, on which the OIS support section 42 is arranged. The OIS ball holding portion 134 is, for example, a groove having a rectangular shape extending in the Y-axis direction in plan view. For example, the OIS ball holding portion 134 has a substantially V-shaped (tapered) cross-sectional shape so that the groove width becomes narrower toward the bottom side. In this embodiment, the OIS ball holding section 134 is provided near the four corners of the second stage 13, and the four OIS supporting sections 42 arranged on the OIS ball holding section 134 support the AF unit 10A (the first stage 12 ) is supported by 4 points.
　第２ステージ１３の光軸方向結像側の面（下面）には、ベース２１のＯＩＳボール保持部２１４とＺ軸方向において対向する位置に、ＯＩＳ支持部４１を保持するボール保持部（図示略）が形成されている。ＯＩＳ支持部４１は、ベース２１及び第１ステージ１２のＯＩＳボール保持部により、多点接触で挟持される。したがって、ＯＩＳ支持部４１を構成するボールは、安定してＸ軸方向に転動する。 On the surface (lower surface) of the second stage 13 on the imaging side in the optical axis direction, there is a ball holding part (not shown) that holds the OIS support part 41 at a position facing the OIS ball holding part 214 of the base 21 in the Z-axis direction. ) is formed. The OIS support section 41 is held between the base 21 and the OIS ball holding section of the first stage 12 with multi-point contact. Therefore, the balls forming the OIS support portion 41 stably roll in the X-axis direction.
　ＡＦユニット１０Ａは、ＡＦ可動部１１、第１ステージ１２、ＡＦ駆動ユニット７０及びＡＦ支持部１５を含む。 The AF unit 10A includes an AF movable section 11, a first stage 12, an AF drive unit 70, and an AF support section 15.
　第１ステージ１２は、光軸方向から見た平面視において略矩形状を有する部材であり、例えば、液晶ポリマーで形成される。第１ステージ１２は、ＡＦ可動部１１に対応する部分に略円形状の開口１２１を有する。 The first stage 12 is a member having a substantially rectangular shape when viewed from above in the optical axis direction, and is formed of, for example, a liquid crystal polymer. The first stage 12 has a substantially circular opening 121 in a portion corresponding to the AF movable section 11 .
　第１ステージ１２において、Ｘ軸方向駆動ユニット５０Ｘに対応する部分１２２は、径方向外側にはみ出すことなくＸ軸方向駆動ユニット５０Ｘを配置できるように、径方向内側に凹んで形成されている。また、第１ステージ１２において、Ｙ軸方向駆動ユニット５０Ｙに対応する部分１２３も同様に、径方向内側に凹んで形成されている（以下、「ＯＩＳモーター固定部１２２、１２３」と称する）。 In the first stage 12, a portion 122 corresponding to the X-axis direction drive unit 50X is formed to be recessed inward in the radial direction so that the X-axis direction drive unit 50X can be placed without protruding outward in the radial direction. Furthermore, in the first stage 12, a portion 123 corresponding to the Y-axis direction drive unit 50Y is similarly formed to be recessed inward in the radial direction (hereinafter referred to as "OIS motor fixing portions 122, 123").
　ＯＩＳモーター固定部１２３には、Ｙ軸方向駆動ユニット５０Ｙが固定される。第１ステージ１２は、ＯＩＳ可動部１０のＹ軸方向の移動に関して、能動側部材として機能する。 A Y-axis direction drive unit 50Y is fixed to the OIS motor fixing part 123. The first stage 12 functions as an active member regarding the movement of the OIS movable section 10 in the Y-axis direction.
　第１ステージ１２は、ＡＦ支持部１５を介して、ＡＦ可動部１１を光軸方向に移動可能に支持する。第１ステージ１２は、開口１２１の内周面に、ＡＦ支持部１５が配置されるＡＦボール保持部１２４を有する。本実施の形態では、ＡＦボール保持部１２４は、平面視における第１ステージ１２の四隅のうちの対角に位置する２箇所に設けられている。ＡＦボール保持部１２４は、光軸方向に沿って延在し、溝底に向かって溝幅が狭くなるように断面形状が略Ｖ字状（テーパー形状）に形成されている。 The first stage 12 supports the AF movable section 11 via the AF support section 15 so as to be movable in the optical axis direction. The first stage 12 has an AF ball holding part 124 on the inner circumferential surface of the opening 121, in which the AF support part 15 is arranged. In this embodiment, the AF ball holding portions 124 are provided at two diagonally located locations among the four corners of the first stage 12 in plan view. The AF ball holding portion 124 extends along the optical axis direction, and has a substantially V-shaped (tapered) cross-sectional shape so that the groove width becomes narrower toward the groove bottom.
　第１ステージ１２の光軸方向結像側の面（下面）には、第２ステージ１３のＯＩＳボール保持部１３４とＺ軸方向において対向する位置に、ＯＩＳ支持部４２を保持するＯＩＳボール保持部（図示略）が形成されている。ＯＩＳ支持部４２は、第１ステージ１２及び第２ステージ１３のＯＩＳボール保持部により、多点接触で挟持される。したがって、ＯＩＳ支持部４２を構成するボールは、安定してＹ軸方向に転動する。 On the surface (lower surface) of the first stage 12 on the imaging side in the optical axis direction, there is an OIS ball holding part that holds the OIS support part 42 at a position facing the OIS ball holding part 134 of the second stage 13 in the Z-axis direction. (not shown) is formed. The OIS support part 42 is held between the OIS ball holding parts of the first stage 12 and the second stage 13 with multi-point contact. Therefore, the balls forming the OIS support portion 42 stably roll in the Y-axis direction.
　第１ステージ１２は、開口１２１の内周面に、ＡＦ駆動ユニット７０が配置されるＡＦモーター固定部１２５を有する。ＡＦモーター固定部１２５は、例えば、平面視における第１ステージ１２の四隅のうちの対角に位置する２箇所に設けられる。ＡＦモーター固定部１２５には、例えば、ＡＦモーター固定金具１２６（図１１参照）が取り付けられ、ＡＦモーター固定金具１２６によってＡＦ駆動ユニット７０のＡＦ共振部７１が保持される。第１ステージ１２は、ＡＦ可動部１１のＺ軸方向の移動に関して、能動側部材として機能する。 The first stage 12 has an AF motor fixing part 125 on the inner peripheral surface of the opening 121, in which the AF drive unit 70 is disposed. The AF motor fixing portions 125 are provided, for example, at two diagonally located locations among the four corners of the first stage 12 in plan view. For example, an AF motor fixture 126 (see FIG. 11) is attached to the AF motor fixture 125, and the AF resonator 71 of the AF drive unit 70 is held by the AF motor fixture 126. The first stage 12 functions as an active member regarding the movement of the AF movable section 11 in the Z-axis direction.
　第１ステージ１２には、ＡＦ駆動ユニット７０及びＹ軸方向駆動ユニット５０Ｙへの給電ラインが配置される。本実施の形態では、第１ステージ１２の光軸方向受光側の面に、４つの金属板１６１が物理的に分離した状態で配置されている。４つの金属板１６１は、それぞれ、第１ステージ１２の四隅から露出している端子金具１６２と接続される。ベース２１の配線（図示略）からＯＩＳ用付勢部材３０、端子金具１６２及び金属板１６１を介して、ＡＦ駆動ユニット７０及びＹ軸方向駆動ユニット５０Ｙへの給電が行われる。 A power supply line to the AF drive unit 70 and the Y-axis direction drive unit 50Y is arranged on the first stage 12. In this embodiment, four metal plates 161 are physically separated and arranged on the light-receiving side surface of the first stage 12 in the optical axis direction. The four metal plates 161 are respectively connected to terminal fittings 162 exposed from the four corners of the first stage 12. Power is supplied from wiring (not shown) of the base 21 to the AF drive unit 70 and the Y-axis direction drive unit 50Y via the OIS biasing member 30, the terminal fittings 162, and the metal plate 161.
　ＡＦ可動部１１は、レンズ部２（図２参照）を保持するレンズホルダーであり、ピント合わせ時に光軸方向に移動する。ＡＦ可動部１１は、第１ステージ１２（ＡＦ固定部）に対して径方向内側に離間して配置され、ＡＦ支持部１５を介して第１ステージ１２に付勢された状態で支持される。 The AF movable part 11 is a lens holder that holds the lens part 2 (see FIG. 2), and moves in the optical axis direction during focusing. The AF movable section 11 is arranged radially inwardly and spaced apart from the first stage 12 (AF fixed section), and is supported while being biased by the first stage 12 via the AF support section 15 .
　ＡＦ可動部１１は、例えば、ポリアリレート（ＰＡＲ）、ＰＡＲを含む複数の樹脂材料を混合したＰＡＲアロイ、液晶ポリマー等で形成される。ＡＦ可動部１１は、筒状のレンズ収容部１１１を有する。レンズ収容部１１１の内周面には、レンズ部２が、例えば、接着により固定される。 The AF movable part 11 is formed of, for example, polyarylate (PAR), a PAR alloy that is a mixture of a plurality of resin materials including PAR, a liquid crystal polymer, or the like. The AF movable section 11 has a cylindrical lens housing section 111. The lens portion 2 is fixed to the inner circumferential surface of the lens housing portion 111 by, for example, adhesive.
　ＡＦ可動部１１は、レンズ収容部１１１の外周面において、ＡＦ駆動ユニット７０に対応する位置に、ＡＦ動力伝達部８０が固定されるＡＦモーター固定部１１２を有する。ＡＦ可動部１１は、ＡＦ可動部１１のＺ軸方向の移動に関して、受動側部材として機能する。 The AF movable section 11 has an AF motor fixing section 112 on the outer peripheral surface of the lens housing section 111 at a position corresponding to the AF drive unit 70 to which the AF power transmission section 80 is fixed. The AF movable section 11 functions as a passive member regarding movement of the AF movable section 11 in the Z-axis direction.
　ＡＦ可動部１１は、レンズ収容部１１１の外周面において、第１ステージ１２のＡＦボール保持部１２４と径方向において対向する位置に、ＡＦ支持部１５を保持するＡＦボール保持部１１４を有する。ＡＦ支持部１５は、第１ステージ１２及びＡＦ可動部１１のＡＦボール保持部により、多点接触で挟持される。したがって、ＡＦ支持部１５を構成するボールは、安定してＺ軸方向に転動する。 The AF movable section 11 has an AF ball holding section 114 that holds the AF support section 15 on the outer peripheral surface of the lens housing section 111 at a position facing the AF ball holding section 124 of the first stage 12 in the radial direction. The AF support section 15 is held between the first stage 12 and the AF ball holding section of the AF movable section 11 with multi-point contact. Therefore, the balls forming the AF support section 15 stably roll in the Z-axis direction.
　ＡＦ支持部１５は、第１ステージ１２（ＡＦ固定部）に対して、ＡＦ可動部１１を径方向に離間した状態で支持する。本実施の形態では、ＡＦ支持部１５は、第１ステージ１２とＡＦ可動部１１の間に転動可能な状態で介在する４個のボールで構成されている。なお、ＡＦ支持部１５を構成するボールの数は、適宜変更することができる。 The AF support part 15 supports the AF movable part 11 in a radially spaced state with respect to the first stage 12 (AF fixed part). In this embodiment, the AF support section 15 is composed of four balls that are rotatably interposed between the first stage 12 and the AF movable section 11. Note that the number of balls constituting the AF support section 15 can be changed as appropriate.
　Ｘ軸方向駆動ユニット５０Ｘ及びＹ軸方向駆動ユニット５０Ｙは、ＯＩＳ可動部１０をＸ軸方向及びＹ軸方向に移動させる、超音波モーター型のアクチュエーターである。図９Ａに示すように、Ｘ軸方向駆動ユニット５０Ｘは、能動側部材であるベース２１に配置され、Ｘ軸方向動力伝達部６０Ｘを介して、受動側要素である第２ステージ１３と連結される。また、図９Ｂに示すように、Ｙ軸方向駆動ユニット５０Ｙは、能動側部材である第１ステージ１２に配置され、Ｙ軸方向動力伝達部６０Ｙを介して、受動側要素である第２ステージ１３と連結される。Ｘ軸方向駆動ユニット５０Ｘ及びＸ軸方向動力伝達部６０Ｘと、Ｙ軸方向駆動ユニット５０Ｙ及びＹ軸方向動力伝達部６０Ｙとは、互いに直交する辺に沿って配置される。 The X-axis direction drive unit 50X and the Y-axis direction drive unit 50Y are ultrasonic motor-type actuators that move the OIS movable section 10 in the X-axis direction and the Y-axis direction. As shown in FIG. 9A, the X-axis direction drive unit 50X is arranged on the base 21, which is an active side member, and is connected to the second stage 13, which is a passive side element, via the X-axis direction power transmission section 60X. . Further, as shown in FIG. 9B, the Y-axis direction drive unit 50Y is arranged on the first stage 12, which is an active side member, and is connected to the second stage 13, which is a passive side element, via the Y-axis direction power transmission section 60Y. is connected with. The X-axis direction drive unit 50X and the X-axis direction power transmission section 60X, and the Y-axis direction drive unit 50Y and the Y-axis direction power transmission section 60Y are arranged along mutually orthogonal sides.
　Ｘ軸方向駆動ユニット５０Ｘ及びＸ軸方向動力伝達部６０Ｘは、Ｘ軸に沿って延在するように配置され、ＯＩＳ可動部１０全体をＸ軸方向に移動させる。本実施の形態では、Ｘ軸方向駆動ユニット５０Ｘがベース２１のＯＩＳモーター固定部２１２に固定され、Ｘ軸方向動力伝達部６０Ｘが第２ステージ１３のＯＩＳモーター固定部１３２に固定されている。 The X-axis direction drive unit 50X and the X-axis direction power transmission section 60X are arranged to extend along the X-axis, and move the entire OIS movable section 10 in the X-axis direction. In this embodiment, the X-axis direction drive unit 50X is fixed to the OIS motor fixing part 212 of the base 21, and the X-axis direction power transmission part 60X is fixed to the OIS motor fixing part 132 of the second stage 13.
　Ｙ軸方向駆動ユニット５０Ｙは、Ｙ軸に沿って延在するように配置され、ＯＩＳ可動部１０のＡＦユニット１０ＡのみをＹ軸方向に移動させる。本実施の形態では、Ｙ軸方向駆動ユニット５０Ｙが第１ステージ１２のＯＩＳモーター固定部１２３に固定され、Ｙ軸方向動力伝達部６０Ｙが第２ステージ１３のＯＩＳモーター固定部１３３に固定されている。 The Y-axis direction drive unit 50Y is arranged to extend along the Y-axis, and moves only the AF unit 10A of the OIS movable section 10 in the Y-axis direction. In this embodiment, the Y-axis direction drive unit 50Y is fixed to the OIS motor fixing part 123 of the first stage 12, and the Y-axis direction power transmission part 60Y is fixed to the OIS motor fixing part 133 of the second stage 13. .
　以下において、Ｘ軸方向駆動ユニット５０Ｘ及びＹ軸方向駆動ユニット５０Ｙを合わせて、「ＯＩＳ駆動ユニット５０Ｘ、５０Ｙ」と称する。また、Ｘ軸方向動力伝達部６０Ｘ及びＹ軸方向動力伝達部６０Ｙを合わせて、「ＯＩＳ動力伝達部６０Ｘ、６０Ｙ」と称する。 Hereinafter, the X-axis direction drive unit 50X and the Y-axis direction drive unit 50Y are collectively referred to as "OIS drive units 50X, 50Y." Furthermore, the X-axis direction power transmission section 60X and the Y-axis direction power transmission section 60Y are collectively referred to as "OIS power transmission sections 60X, 60Y."
　ＯＩＳ駆動ユニット５０Ｘ、５０Ｙは、それぞれ、ＯＩＳ共振部５１及びＯＩＳ圧電素子５２を有する。ＯＩＳ動力伝達部６０Ｘ、６０Ｙは、それぞれ、受動部材６１及び連結部材６２を有する。 The OIS drive units 50X and 50Y each have an OIS resonance section 51 and an OIS piezoelectric element 52. The OIS power transmission sections 60X and 60Y each include a passive member 61 and a connecting member 62.
　ＯＩＳ圧電素子５２は、例えば、セラミック材料で形成された板状素子であり、高周波電圧を印加することにより振動を発生する。ＯＩＳ共振部５１の胴部（符号略）を挟み込むように、２枚のＯＩＳ圧電素子５２が配置される。 The OIS piezoelectric element 52 is, for example, a plate-shaped element made of a ceramic material, and generates vibration by applying a high-frequency voltage. Two OIS piezoelectric elements 52 are arranged so as to sandwich the body (not shown) of the OIS resonator 51 .
　ＯＩＳ共振部５１は、導電性材料で形成され、ＯＩＳ圧電素子５２の振動を受けて共振する。ＯＩＳ共振部５１は、所定の導電性、せん断強度、硬度、比重、ヤング率等を有する金属であればよく、例えば、ステンレス綱が好適である。 The OIS resonator 51 is formed of a conductive material and resonates in response to the vibration of the OIS piezoelectric element 52. The OIS resonator 51 may be made of a metal having predetermined conductivity, shear strength, hardness, specific gravity, Young's modulus, etc., and is preferably made of stainless steel, for example.
　Ｘ軸方向駆動ユニット５０ＸのＯＩＳ共振部５１及びＯＩＳ圧電素子５２は、ベース２１の配線（図示略）と電気的に接続される。Ｙ軸方向駆動ユニット５０ＹのＯＩＳ共振部５１及びＯＩＳ圧電素子５２は、給電ラインとして機能する金属板１６１と電気的に接続される。 The OIS resonator 51 and the OIS piezoelectric element 52 of the X-axis direction drive unit 50X are electrically connected to wiring (not shown) of the base 21. The OIS resonator 51 and the OIS piezoelectric element 52 of the Y-axis direction drive unit 50Y are electrically connected to a metal plate 161 that functions as a power supply line.
　ＯＩＳ共振部５１は、ＯＩＳ圧電素子５２に挟持される略矩形状の胴部（符号略）及び胴部の上部及び下部からＸ軸方向又はＹ軸方向に延在する２つのアーム５１１、５１２を有する。２つのアーム５１１、５１２は略対称的な形状を有し、それぞれの自由端部がＯＩＳ動力伝達部６０Ｘ、６０Ｙの受動部材６１に当接し、ＯＩＳ圧電素子５２の振動に共振して対称的に変形する。 The OIS resonator 51 includes a substantially rectangular body (not shown) held between the OIS piezoelectric elements 52 and two arms 511 and 512 extending from the upper and lower parts of the body in the X-axis direction or the Y-axis direction. have The two arms 511 and 512 have a substantially symmetrical shape, and their respective free ends abut the passive members 61 of the OIS power transmission sections 60X and 60Y, resonate with the vibration of the OIS piezoelectric element 52, and move symmetrically. transform.
　本実施の形態では、２つのアーム５１１、５１２は、ＯＩＳ動力伝達部６０Ｘ、６０Ｙの受動部材６１と当接する当接面が内側を向き、対向するように形成されている。ＯＩＳ共振部５１とＯＩＳ動力伝達部６０Ｘ、６０Ｙ（受動部材６１）とが当接した状態でＯＩＳ共振部５１が共振することにより、ＯＩＳ圧電素子５２の振動運動がＯＩＳ動力伝達部６０Ｘ、６０Ｙの直線運動に変換される。 In this embodiment, the two arms 511 and 512 are formed so that the contact surfaces that contact the passive members 61 of the OIS power transmission sections 60X and 60Y face inward and face each other. When the OIS resonance section 51 resonates with the OIS power transmission sections 60X, 60Y (passive member 61) in contact with each other, the vibration motion of the OIS piezoelectric element 52 is caused by the vibration motion of the OIS power transmission sections 60X, 60Y. converted into linear motion.
　ＯＩＳ共振部５１は、少なくとも２つの共振周波数を有し、それぞれの共振周波数に対して、異なる挙動で変形する。言い換えると、ＯＩＳ共振部５１は、２つの共振周波数に対して異なる挙動で変形するように、全体の形状が設定されている。異なる挙動とは、ＯＩＳ動力伝達部６０Ｘ、６０ＹをＸ軸方向又はＹ軸方向に前進させる挙動と、後退させる挙動である。 The OIS resonator 51 has at least two resonant frequencies, and deforms with different behavior for each resonant frequency. In other words, the overall shape of the OIS resonant section 51 is set so that it deforms with different behaviors for two resonant frequencies. The different behaviors are a behavior in which the OIS power transmission units 60X and 60Y are moved forward in the X-axis direction or the Y-axis direction, and a behavior in which they are moved backward.
　受動部材６１は、ＯＩＳ共振部５１の一対のアーム５１１、５１２に付勢された状態で挟持される。受動部材６１は、剛体で構成されており、アーム５１１、５１２よりも変形しにくい。受動部材６１は、例えば、ジルコニア等のセラミック材料からなるブロック部材である。なお、受動部材６１は、ステンレス等の金属材料からなるブロックの表面（少なくともＯＩＳ共振部５１と接触する面）に、セラミック材料からなるコーティング層を形成した部材であってもよい。 The passive member 61 is held between the arms 511 and 512 of the OIS resonator 51 while being biased. The passive member 61 is made of a rigid body and is less likely to deform than the arms 511 and 512. The passive member 61 is, for example, a block member made of a ceramic material such as zirconia. The passive member 61 may be a member in which a coating layer made of a ceramic material is formed on the surface of a block made of a metal material such as stainless steel (at least the surface that comes into contact with the OIS resonator 51).
　また、受動部材６１において、アーム５１１、５１２によって挟持される方向の幅は、アーム５１１、５１２の先端（受動部材６１と当接する部分）の離間幅よりも大きい。アーム５１１、５１２の間に受動部材６１を嵌め込むと、アーム５１１、５１２が押し拡げられるように変形するため、アーム５１１、５１２に復元力が生じる。アーム５１１、５１２に生じた復元力によって、アーム５１１、５１２の間に受動部材６１が付勢された状態で保持される。 Furthermore, the width of the passive member 61 in the direction in which it is sandwiched by the arms 511 and 512 is larger than the width of separation between the tips of the arms 511 and 512 (portions that come into contact with the passive member 61). When the passive member 61 is fitted between the arms 511 and 512, the arms 511 and 512 are deformed so as to be pushed apart, so that a restoring force is generated in the arms 511 and 512. The restoring force generated in the arms 511 and 512 holds the passive member 61 between the arms 511 and 512 in a biased state.
　受動部材６１が２つの板状部材で構成され、受動部材６１に生じる復元力を利用してアーム５１１、５１２に対して受動部材６１が付勢される場合、受動部材６１とアーム５１１、５１２との当接状態は、受動部材６１の移動に伴い変化し、駆動性能が不安定となる虞がある。これに対して、本実施の形態では、受動部材６１とアーム５１１、５１２との当接状態は、受動部材６１が移動しても変化しないので、安定した駆動性能を得ることができる。 When the passive member 61 is composed of two plate-like members and the passive member 61 is urged against the arms 511 and 512 using the restoring force generated in the passive member 61, the passive member 61 and the arms 511 and 512 The contact state changes as the passive member 61 moves, and there is a possibility that the driving performance may become unstable. In contrast, in the present embodiment, the state of contact between the passive member 61 and the arms 511, 512 does not change even if the passive member 61 moves, so that stable driving performance can be obtained.
　連結部材６２は、受動部材６１と受動側部材である第２ステージ１３とを連結する。連結部材６２は、例えば、ステンレス材等の金属材料で形成される。連結部材６２は、受動部材６１に固定される固定部６２ａと、固定部６２ａから延びて第２ステージ１３に連結する弾性部６２ｂとを有する。 The connecting member 62 connects the passive member 61 and the second stage 13, which is a passive member. The connecting member 62 is made of a metal material such as stainless steel, for example. The connecting member 62 includes a fixed part 62 a fixed to the passive member 61 and an elastic part 62 b extending from the fixed part 62 a and coupled to the second stage 13 .
　弾性部６２ｂは、弾性変形可能であり、例えば、板バネで形成される。連結部材６２は、弾性部６２ｂが可動部の移動方向に延在するように配置される。弾性部６２ｂは、板厚方向に変形（撓み）可能で、可動部の移動方向には変形困難である。弾性部６２ｂは、取付公差等によって生じうる可動部の移動方向Ｄ１と動力の伝達方向Ｄ２の位置ずれを吸収する。 The elastic portion 62b is elastically deformable and is formed of, for example, a plate spring. The connecting member 62 is arranged such that the elastic portion 62b extends in the moving direction of the movable portion. The elastic portion 62b can be deformed (flexed) in the thickness direction, but is difficult to deform in the direction of movement of the movable portion. The elastic portion 62b absorbs a positional deviation between the moving direction D1 of the movable portion and the power transmission direction D2 that may occur due to mounting tolerances or the like.
　一般に、光学素子駆動装置１では、可動部の移動方向Ｄ１（ベース２１又は第１ステージ１２に対する第２ステージ１３の相対的な移動方向）と、動力の伝達方向Ｄ２とが一致するように、能動要素（ＯＩＳ共振部５１）、受動要素（ＯＩＳ動力伝達部６０Ｘ、６０Ｙ）等の設計が行われる。しかしながら、取付公差等によって、例えば、能動要素に対する受動要素の取付角度と、固定部に対する可動部の取付角度とにずれが生じることがある。この場合、ＯＩＳ動力伝達部６０Ｘ、６０Ｙが剛体で形成されていると、可動部の移動方向Ｄ１に対して、動力の伝達方向Ｄ２が傾斜することとなり、ＯＩＳ共振部５１とＯＩＳ動力伝達部６０Ｘ、６０Ｙが摺動し難い状態となる。その結果、可動部へ伝達する動力の発生が不安定となる虞がある（図１０Ｂ参照）。 Generally, in the optical element driving device 1, the active part is moved so that the moving direction D1 of the movable part (the relative moving direction of the second stage 13 with respect to the base 21 or the first stage 12) matches the power transmission direction D2. Elements (OIS resonance part 51), passive elements (OIS power transmission parts 60X, 60Y), etc. are designed. However, due to mounting tolerances and the like, for example, a deviation may occur between the mounting angle of the passive element to the active element and the mounting angle of the movable part to the fixed part. In this case, if the OIS power transmission parts 60X and 60Y are formed of rigid bodies, the power transmission direction D2 is inclined with respect to the moving direction D1 of the movable part, and the OIS resonance part 51 and the OIS power transmission part 60X , 60Y become difficult to slide. As a result, the generation of power transmitted to the movable part may become unstable (see FIG. 10B).
　これに対して、本実施の形態では、能動側部材であるベース２１及び第１ステージ１２に配置されたＯＩＳ駆動ユニット５０Ｘ、５０Ｙと、受動側部材である第２ステージ１３とが、連結部材６２を有するＯＩＳ動力伝達部６０Ｘ、６０Ｙを介して接続されている。これにより、能動要素に対する受動要素の取付角度と、固定部に対する可動部の取付角度とに位置ずれが生じても、連結部材６２の弾性部６２ｂによって位置ずれが吸収されるので、可動部の移動方向Ｄ１と動力の伝達方向Ｄ２とが一致する（図１０Ａ参照）。したがって、ＯＩＳ共振部５１とＯＩＳ動力伝達部６０Ｘ、６０Ｙとの摺動が維持され、ＯＩＳ支持部４１、４２のボールの転動動作がスムーズに行われ、可動部の移動動作が安定する。 In contrast, in the present embodiment, the OIS drive units 50X and 50Y arranged on the base 21 and the first stage 12, which are active side members, and the second stage 13, which is a passive side member, are connected to the connecting member 62. They are connected via OIS power transmission sections 60X and 60Y. As a result, even if a positional deviation occurs between the mounting angle of the passive element to the active element and the mounting angle of the movable part to the fixed part, the positional deviation is absorbed by the elastic part 62b of the connecting member 62, so that the movable part can move. The direction D1 and the power transmission direction D2 match (see FIG. 10A). Therefore, the sliding movement between the OIS resonance part 51 and the OIS power transmission parts 60X, 60Y is maintained, the rolling motion of the balls of the OIS support parts 41, 42 is performed smoothly, and the moving operation of the movable part is stabilized.
　ＡＦ駆動ユニット７０は、ＡＦ可動部１１をＺ軸方向に移動させる、超音波モーター型のアクチュエーターである。図１１Ａ、図１１Ｂに示すように、ＡＦ駆動ユニット７０は、能動側部材である第１ステージ１２に配置され、ＡＦ動力伝達部８０を介して、受動要素であるＡＦ可動部１１と連結される。図１１Ａは、ＡＦ駆動ユニット７０をＡＦ可動部１１に取り付けた状態を示す。 The AF drive unit 70 is an ultrasonic motor type actuator that moves the AF movable section 11 in the Z-axis direction. As shown in FIGS. 11A and 11B, the AF drive unit 70 is arranged on the first stage 12, which is an active side member, and is connected to the AF movable section 11, which is a passive element, via the AF power transmission section 80. . FIG. 11A shows a state in which the AF drive unit 70 is attached to the AF movable section 11.
　本実施の形態では、ＡＦ可動部１１と第１ステージ１２との間に、２つのＡＦ駆動ユニット７０が配置されている。ＡＦ駆動ユニット７０は、アーム７１１、７１２がＺ軸方向に延在するように、第１ステージ１２のＡＦモーター固定部１２５に固定される。 In this embodiment, two AF drive units 70 are arranged between the AF movable section 11 and the first stage 12. The AF drive unit 70 is fixed to the AF motor fixing part 125 of the first stage 12 so that arms 711 and 712 extend in the Z-axis direction.
　ＡＦ駆動ユニット７０は、ＡＦ共振部７１及びＡＦ圧電素子７２を有する。ＡＦ動力伝達部８０は、光軸方向に所定の長さを有する２枚のＡＦプレート８１を有する。 The AF drive unit 70 has an AF resonance section 71 and an AF piezoelectric element 72. The AF power transmission section 80 includes two AF plates 81 having a predetermined length in the optical axis direction.
　ＡＦ圧電素子７２は、例えば、セラミック材料で形成された板状素子であり、高周波電圧を印加することにより振動を発生する。ＡＦ共振部７１の胴部（符号略）を挟み込むように、２枚のＡＦ圧電素子７２が配置される。 The AF piezoelectric element 72 is, for example, a plate-shaped element made of a ceramic material, and generates vibration by applying a high-frequency voltage. Two AF piezoelectric elements 72 are arranged so as to sandwich the body (not shown) of the AF resonator 71 .
　ＡＦ共振部７１は、導電性材料で形成され、ＡＦ圧電素子７２の振動を受けて共振する。ＡＦ共振部７１は、所定の導電性、せん断強度、硬度、比重、ヤング率等を有する金属であればよく、例えば、ＯＩＳ共振部５１と同様に、ステンレス綱が好適である。 The AF resonance part 71 is formed of a conductive material and resonates in response to the vibration of the AF piezoelectric element 72. The AF resonator 71 may be made of metal having predetermined conductivity, shear strength, hardness, specific gravity, Young's modulus, etc. For example, like the OIS resonator 51, stainless steel is suitable.
　ＡＦ共振部７１及びＡＦ圧電素子７２は、給電ラインとして機能する金属板１６１と電気的に接続される。 The AF resonator 71 and the AF piezoelectric element 72 are electrically connected to a metal plate 161 that functions as a power supply line.
　ＡＦ共振部７１は、ＡＦ圧電素子７２に挟持される略矩形状の胴部（符号略）及び胴部からＺ軸方向に延在する２つのアーム７１１、７１２を有する。２つのアーム７１１、７１２は略対称的な形状を有し、それぞれの自由端部がＡＦ動力伝達部８０のＡＦプレート８１に当接し、ＡＦ圧電素子７２の振動に共振して対称的に変形する。 The AF resonator 71 has a substantially rectangular body (not shown) held between the AF piezoelectric elements 72 and two arms 711 and 712 extending from the body in the Z-axis direction. The two arms 711 and 712 have a substantially symmetrical shape, and their respective free ends abut against the AF plate 81 of the AF power transmission unit 80, and are deformed symmetrically by resonating with the vibration of the AF piezoelectric element 72. .
　本実施の形態では、２つのアーム７１１、７１２は、ＡＦプレート８１と当接する面が外側を向いて形成されており、自由端部がＡＦプレート８１で挟持されるように配置されている。ＡＦ共振部７１とＡＦ動力伝達部８０（ＡＦプレート８１）とが当接した状態でＡＦ共振部７１が共振することにより、ＡＦ圧電素子７２の振動運動がＡＦ動力伝達部８０の直線運動に変換される。 In this embodiment, the two arms 711 and 712 are formed such that the surfaces that contact the AF plate 81 face outward, and are arranged so that their free ends are sandwiched between the AF plate 81. When the AF resonance part 71 resonates when the AF resonance part 71 and the AF power transmission part 80 (AF plate 81) are in contact with each other, the vibration motion of the AF piezoelectric element 72 is converted into the linear motion of the AF power transmission part 80. be done.
　ＡＦ共振部７１は、ＯＩＳ共振部５１と同様に、少なくとも２つの共振周波数を有し、それぞれの共振周波数に対して、異なる挙動で変形する。言い換えると、ＡＦ共振部７１は、２つの共振周波数に対して異なる挙動で変形するように、全体の形状が設定されている。 Similar to the OIS resonance section 51, the AF resonance section 71 has at least two resonance frequencies, and deforms with different behavior for each resonance frequency. In other words, the overall shape of the AF resonance section 71 is set so that it deforms with different behaviors for two resonance frequencies.
　ＡＦプレート８１は、例えば、チタン銅、ニッケル銅、ステンレス等の金属材料からなる硬質の板状部材である。ＡＦプレート８１は、ＡＦ共振部７１のアーム７１１、７１２と当接するように、移動方向に沿ってＡＦ可動部１１のＡＦモーター固定部１１２に配置される。ＡＦプレート８１は、ＡＦ可動部１１に固定され、ＡＦ可動部１１と一体的に移動可能となっている。 The AF plate 81 is a hard plate-shaped member made of a metal material such as titanium copper, nickel copper, or stainless steel. The AF plate 81 is arranged on the AF motor fixing part 112 of the AF movable part 11 along the moving direction so as to come into contact with the arms 711 and 712 of the AF resonating part 71 . The AF plate 81 is fixed to the AF movable section 11 and is movable integrally with the AF movable section 11.
　ＡＦプレート８１は、ＡＦ可動部１１のＡＦモーター固定部１１２に配置された付勢部材８２とＡＦ共振部７１との間に介在する。ＡＦプレート８１は、付勢部材８２によって、ＡＦ共振部７１のアーム７１１、７１２に向けて付勢された状態で保持される。なお、付勢部材８２は、例えば、板バネで構成されてもよいし、コイルバネや硬質ゴムなどの弾性体を適用してもよい。 The AF plate 81 is interposed between the biasing member 82 disposed on the AF motor fixed part 112 of the AF movable part 11 and the AF resonance part 71. The AF plate 81 is held in a biased state toward the arms 711 and 712 of the AF resonator 71 by the biasing member 82 . Note that the biasing member 82 may be composed of, for example, a plate spring, or may be made of an elastic body such as a coil spring or hard rubber.
　光学素子駆動装置１において、ＡＦ駆動ユニット７０に電圧を印加すると、ＡＦ圧電素子７２が振動し、ＡＦ共振部７１が周波数に応じた挙動で変形する。ＡＦ駆動ユニット７０の駆動力により、ＡＦ動力伝達部８０がＺ軸方向に摺動される。これに伴い、ＡＦ可動部１１がＺ軸方向に移動し、ピント合わせが行われる。ＡＦ支持部１５がボールで構成されているので、ＡＦ可動部１１はＺ軸方向にスムーズに移動することができる。また、ＡＦ駆動ユニット７０とＡＦ動力伝達部８０は、付勢された状態で当接しているだけなので、当接部分をＺ軸方向に大きくするだけで、光学素子駆動装置１の低背化を損なうことなく、ＡＦ可動部１１の移動ストロークを容易に長くすることができる。 In the optical element drive device 1, when a voltage is applied to the AF drive unit 70, the AF piezoelectric element 72 vibrates, and the AF resonant section 71 deforms in a manner that corresponds to the frequency. The AF power transmission section 80 is slid in the Z-axis direction by the driving force of the AF drive unit 70. Along with this, the AF movable section 11 moves in the Z-axis direction, and focusing is performed. Since the AF support part 15 is made of a ball, the AF movable part 11 can move smoothly in the Z-axis direction. Furthermore, since the AF drive unit 70 and the AF power transmission section 80 are only in contact with each other in a biased state, the height of the optical element drive device 1 can be reduced by simply increasing the size of the contact portion in the Z-axis direction. The movement stroke of the AF movable section 11 can be easily lengthened without damage.
　光学素子駆動装置１において、ＯＩＳ駆動ユニット５０Ｘ、５０Ｙに電圧を印加すると、ＯＩＳ圧電素子５２が振動し、ＯＩＳ共振部５１が周波数に応じた挙動で変形する。ＯＩＳ駆動ユニット５０Ｘ、５０Ｙの駆動力により、ＯＩＳ動力伝達部６０Ｘ、６０ＹがＸ軸方向又はＹ軸方向に摺動される。これに伴い、ＯＩＳ可動部１０がＸ軸方向又はＹ軸方向に移動し、振れ補正が行われる。ＯＩＳ支持部４１、４２がボールで構成されているので、ＯＩＳ可動部１０はＸ軸方向又はＹ軸方向にスムーズに移動することができる。 In the optical element drive device 1, when a voltage is applied to the OIS drive units 50X and 50Y, the OIS piezoelectric element 52 vibrates, and the OIS resonator 51 deforms in a manner that corresponds to the frequency. The OIS power transmission sections 60X, 60Y are slid in the X-axis direction or the Y-axis direction by the driving force of the OIS drive units 50X, 50Y. Along with this, the OIS movable section 10 moves in the X-axis direction or the Y-axis direction, and shake correction is performed. Since the OIS support parts 41 and 42 are formed of balls, the OIS movable part 10 can move smoothly in the X-axis direction or the Y-axis direction.
　具体的には、Ｘ軸方向駆動ユニット５０Ｘが駆動され、Ｘ軸方向動力伝達部６０ＸがＸ軸方向に移動する場合、Ｘ軸方向駆動ユニット５０Ｘが配置されているベース２１から第２ステージ１３に動力が伝達される。このとき、第１ステージ１２と第２ステージ１３とで挟持されているＯＩＳ支持部４２は、Ｘ軸方向に転動できないので、第２ステージ１３に対する第１ステージ１２のＸ軸方向の位置は維持される。一方、第２ステージ１３とベース２１とで挟持されているＯＩＳ支持部４１は、Ｘ軸方向に転動できるので、ベース２１に対して第２ステージ１３がＸ軸方向に移動する。第１ステージ１２も第２ステージ１３に追従してＸ軸方向に移動することになる。 Specifically, when the X-axis direction drive unit 50X is driven and the X-axis direction power transmission section 60X moves in the X-axis direction, from the base 21 where the X-axis direction drive unit 50X is arranged to the second stage 13. Power is transmitted. At this time, since the OIS support part 42 held between the first stage 12 and the second stage 13 cannot roll in the X-axis direction, the position of the first stage 12 in the X-axis direction with respect to the second stage 13 is maintained. be done. On the other hand, since the OIS support portion 41 held between the second stage 13 and the base 21 can roll in the X-axis direction, the second stage 13 moves in the X-axis direction with respect to the base 21. The first stage 12 also follows the second stage 13 and moves in the X-axis direction.
　また、Ｙ軸方向駆動ユニット５０Ｙが駆動され、Ｙ軸方向動力伝達部６０ＹがＹ軸方向に移動する場合、Ｙ軸方向駆動ユニット５０Ｙが配置されている第１ステージ１２から第２ステージ１３に動力が伝達される。このとき、第２ステージ１３とベース２１とで挟持されているＯＩＳ支持部４１は、Ｙ軸方向に転動できないので、ベース２１に対する第２ステージ１３のＸ軸方向の位置は維持される。一方、第１ステージ１２と第２ステージ１３とで挟持されているＯＩＳ支持部４２は、Ｙ軸方向に転動できるので、第２ステージ１３に対して第１ステージ１２がＹ軸方向に移動することになる。 Further, when the Y-axis direction drive unit 50Y is driven and the Y-axis direction power transmission section 60Y moves in the Y-axis direction, the power is transferred from the first stage 12 where the Y-axis direction drive unit 50Y is disposed to the second stage 13. is transmitted. At this time, since the OIS support part 41 held between the second stage 13 and the base 21 cannot roll in the Y-axis direction, the position of the second stage 13 in the X-axis direction with respect to the base 21 is maintained. On the other hand, since the OIS support part 42 held between the first stage 12 and the second stage 13 can roll in the Y-axis direction, the first stage 12 moves in the Y-axis direction with respect to the second stage 13. It turns out.
　光学素子駆動装置１では、例えば、カメラモジュールＡの角度振れが相殺されるように、振れ検出部（例えばジャイロセンサー、図示略）からの角度振れを示す検出信号に基づいて、Ｘ軸方向駆動ユニット５０Ｘ及びＹ軸方向駆動ユニット５０Ｙへの通電電圧が制御される。このとき、位置検出部の検出結果をフィードバックして、ＯＩＳ可動部１０の並進移動を制御してもよい。 In the optical element drive device 1, for example, the X-axis direction drive unit is operated based on a detection signal indicating angular shake from a shake detection section (for example, a gyro sensor, not shown) so that the angular shake of the camera module A is canceled out. The voltage applied to the drive unit 50X and Y-axis direction drive unit 50Y is controlled. At this time, the translational movement of the OIS movable section 10 may be controlled by feeding back the detection result of the position detection section.
　このように、実施の形態に係る光学素子駆動装置１は、以下の特徴事項を単独で、又は、適宜組み合わせて備えている。 As described above, the optical element driving device 1 according to the embodiment has the following features singly or in appropriate combinations.
　すなわち、ＯＩＳ可動部１０のＸ軸方向の移動に関して、光学素子駆動装置１は、ベース２１（固定部）と、レンズ部２（光学素子）を含む第２ステージ１３（可動部）と、ベース２１（固定部及び可動部のうちの何れか一方からなる能動側部材）に配置され、ベース２１に対して第２ステージ１３を移動させる超音波モーター型のＸ軸方向駆動ユニット５０Ｘ（駆動部）と、第２ステージ１３（固定部及び可動部のうちの何れか他方からなる受動側部材）とＸ軸方向駆動ユニット５０Ｘとを連結し、Ｘ軸方向駆動ユニット５０Ｘの動力を第２ステージ１３に伝達するＸ軸方向動力伝達部６０Ｘと、を備える。Ｘ軸方向駆動ユニット５０Ｘは、振動する一対のアーム５１１、５１２を有するＯＩＳ共振部５１を有し、Ｘ軸方向動力伝達部６０Ｘは、一対のアーム５１１、５１２に付勢された状態で挟持される受動部材６１と、受動部材６１と第２ステージ１３とを連結する連結部材６２と、を有し、連結部材６２は、弾性変形可能である。これにより、能動要素に対する受動要素の取付角度と、固定部に対する可動部の取付角度とに位置ずれが生じても、連結部材６２によって位置ずれが吸収されるので、可動部である第２ステージ１３の移動方向Ｄ１と動力の伝達方向Ｄ２とが一致する（図１０Ａ参照）。したがって、ＯＩＳ共振部５１とＯＩＳ動力伝達部６０Ｘ、６０Ｙとの摺動が維持され、第２ステージ１３を含むＯＩＳ可動部１０の、ベース２１を含むＯＩＳ固定部２０に対するＸ軸方向への移動動作が安定し、駆動性能の向上を図ることができ、光学素子駆動装置１、カメラモジュールＡ及びスマートフォンＭ（カメラ搭載装置）の信頼性が向上する。 That is, regarding the movement of the OIS movable part 10 in the X-axis direction, the optical element driving device 1 includes a base 21 (fixed part), a second stage 13 (movable part) including the lens part 2 (optical element), and a base 21 (an active side member consisting of either a fixed part or a movable part) and an ultrasonic motor-type X-axis direction drive unit 50X (drive part) that moves the second stage 13 with respect to the base 21; , the second stage 13 (passive side member consisting of the other of a fixed part and a movable part) and the X-axis direction drive unit 50X are connected, and the power of the X-axis direction drive unit 50X is transmitted to the second stage 13. An X-axis direction power transmission section 60X is provided. The X-axis direction drive unit 50X has an OIS resonance section 51 having a pair of vibrating arms 511 and 512, and the X-axis direction power transmission section 60X is held between the two arms 511 and 512 while being biased. The connecting member 62 includes a passive member 61 that connects the passive member 61 and the second stage 13, and the connecting member 62 is elastically deformable. As a result, even if a positional deviation occurs between the mounting angle of the passive element to the active element and the mounting angle of the movable part to the fixed part, the positional deviation is absorbed by the connecting member 62, so that the second stage 13 which is the movable part The moving direction D1 and the power transmission direction D2 match (see FIG. 10A). Therefore, the sliding movement between the OIS resonance part 51 and the OIS power transmission parts 60X and 60Y is maintained, and the movement operation of the OIS movable part 10 including the second stage 13 in the X-axis direction with respect to the OIS fixed part 20 including the base 21 is maintained. is stabilized, drive performance can be improved, and the reliability of the optical element drive device 1, camera module A, and smartphone M (camera-equipped device) is improved.
　また、ＯＩＳ可動部１０のＹ軸方向の移動に関して、光学素子駆動装置１は、第２ステージ１３（固定部）と、レンズ部２（光学素子）を含む第１ステージ１２（可動部）と、第１ステージ１２（固定部及び可動部のうちの何れか一方からなる能動側部材）に配置され、第２ステージ１３に対して第１ステージ１２を移動させる超音波モーター型のＹ軸方向駆動ユニット５０Ｙ（駆動部）と、第２ステージ１３（固定部及び可動部のうちの何れか他方からなる受動側部材）とＹ軸方向駆動ユニット５０Ｙとを連結し、Ｙ軸方向駆動ユニット５０Ｙの動力を第２ステージ１３に伝達するＹ軸方向動力伝達部６０Ｙと、を備える。Ｙ軸方向駆動ユニット５０Ｙは、振動する一対のアーム５１１、５１２を有するＯＩＳ共振部５１を有し、Ｙ軸方向動力伝達部６０Ｙは、一対のアーム５１１、５１２に付勢された状態で挟持される受動部材６１と、受動部材６１と第２ステージ１３とを連結する連結部材６２と、を有し、連結部材６２は、弾性変形可能である。これにより、能動要素に対する受動要素の取付角度と、固定部に対する可動部の取付角度とに位置ずれが生じても、連結部材６２によって位置ずれが吸収されるので、可動部である第１ステージ１２の移動方向Ｄ１と動力の伝達方向Ｄ２とが一致する（図１０Ａ参照）。したがって、ＯＩＳ共振部５１とＯＩＳ動力伝達部６０Ｘ、６０Ｙとの摺動が維持され、第１ステージ１２を含むＯＩＳ可動部１０の、第２ステージ１３を含むＯＩＳ固定部２０に対するＹ軸方向への移動動作が安定し、駆動性能の向上を図ることができ、光学素子駆動装置１、カメラモジュールＡ及びスマートフォンＭ（カメラ搭載装置）の信頼性が向上する。 Regarding the movement of the OIS movable part 10 in the Y-axis direction, the optical element driving device 1 includes a second stage 13 (fixed part), a first stage 12 (movable part) including the lens part 2 (optical element), An ultrasonic motor-type Y-axis direction drive unit that is disposed on the first stage 12 (active side member consisting of either a fixed part or a movable part) and moves the first stage 12 with respect to the second stage 13 50Y (driving section), the second stage 13 (passive side member consisting of the other of a fixed section and a movable section), and the Y-axis direction drive unit 50Y, and the power of the Y-axis direction drive unit 50Y is connected. A Y-axis direction power transmission section 60Y that transmits to the second stage 13 is provided. The Y-axis direction drive unit 50Y has an OIS resonance section 51 having a pair of vibrating arms 511 and 512, and the Y-axis direction power transmission section 60Y is held between the pair of arms 511 and 512 while being biased. The connecting member 62 includes a passive member 61 that connects the passive member 61 and the second stage 13, and the connecting member 62 is elastically deformable. As a result, even if a positional deviation occurs between the mounting angle of the passive element to the active element and the mounting angle of the movable part to the fixed part, the positional deviation is absorbed by the connecting member 62. The moving direction D1 and the power transmission direction D2 match (see FIG. 10A). Therefore, the sliding movement between the OIS resonance part 51 and the OIS power transmission parts 60X and 60Y is maintained, and the OIS movable part 10 including the first stage 12 is moved in the Y-axis direction with respect to the OIS fixed part 20 including the second stage 13. The moving operation is stabilized, driving performance can be improved, and the reliability of the optical element driving device 1, camera module A, and smartphone M (camera-equipped device) is improved.
　連結部材６２は、金属材料で形成されている。これにより、能動要素に対する受動要素の取付角度と、固定部に対する可動部の取付角度との位置ずれを容易に吸収することができる。 The connecting member 62 is made of a metal material. Thereby, it is possible to easily absorb a positional deviation between the attachment angle of the passive element to the active element and the attachment angle of the movable part to the fixed part.
　Ｘ軸方向動力伝達部６０Ｘの連結部材６２は、受動部材６１に固定される固定部６２ａと、固定部６２ａから延在して第２ステージ１３（可動部）に連結する弾性部６２ｂと、を有し、弾性部６２ｂがＸ軸方向（可動部の移動方向）に延在するように配置される。これにより、Ｘ軸方向における弾性部６２ｂの弾性変形が低減されるため、Ｘ軸方向駆動ユニット５０Ｘから第２ステージ１３へのＸ軸方向への動力の伝達が損なわれず、適正な駆動性能を確保することができる。 The connecting member 62 of the X-axis direction power transmission unit 60X includes a fixed part 62a fixed to the passive member 61, and an elastic part 62b extending from the fixed part 62a and connected to the second stage 13 (movable part). The elastic portion 62b is arranged so as to extend in the X-axis direction (the moving direction of the movable portion). As a result, elastic deformation of the elastic portion 62b in the X-axis direction is reduced, so power transmission in the X-axis direction from the X-axis drive unit 50X to the second stage 13 is not impaired, and appropriate drive performance is ensured. can do.
　Ｙ軸方向動力伝達部６０Ｙの連結部材６２は、受動部材６１に固定される固定部６２ａと、固定部６２ａから延在して第１ステージ１２（可動部）に連結する弾性部６２ｂと、を有し、弾性部６２ｂがＹ軸方向（可動部の移動方向）に延在するように配置される。これにより、Ｙ軸方向における弾性部６２ｂの弾性変形が低減されるため、Ｙ軸方向駆動ユニット５０Ｙから第２ステージ１３へのＹ軸方向への動力の伝達が損なわれず、適正な駆動性能を確保することができる。 The connecting member 62 of the Y-axis direction power transmission unit 60Y includes a fixed part 62a fixed to the passive member 61, and an elastic part 62b extending from the fixed part 62a and connected to the first stage 12 (movable part). The elastic portion 62b is arranged so as to extend in the Y-axis direction (the moving direction of the movable portion). This reduces elastic deformation of the elastic portion 62b in the Y-axis direction, so transmission of power in the Y-axis direction from the Y-axis drive unit 50Y to the second stage 13 is not impaired, ensuring appropriate drive performance. can do.
　ＯＩＳ可動部１０のＸ軸方向の移動に関して、ベース２１（能動側部材）及び第２ステージ１３（受動側部材）は、ＯＩＳ支持部４１（ボール）によって、相対的に移動可能に支持されている。ＯＩＳ可動部１０のＹ軸方向の移動に関して、第１ステージ１２（能動側部材）及び第２ステージ１３（受動側部材）は、ＯＩＳ支持部４２（ボール）によって、相対的に移動可能に指示されている。これにより、ボールの転動を利用して、ＯＩＳ可動部１０をスムーズに移動させることができる。 Regarding the movement of the OIS movable part 10 in the X-axis direction, the base 21 (active side member) and the second stage 13 (passive side member) are supported by an OIS support part 41 (ball) so as to be relatively movable. . Regarding the movement of the OIS movable part 10 in the Y-axis direction, the first stage 12 (active side member) and the second stage 13 (passive side member) are directed to be relatively movable by the OIS support part 42 (ball). ing. Thereby, the OIS movable section 10 can be smoothly moved by utilizing the rolling motion of the ball.
　Ｘ軸方向動力伝達部６０Ｘ及びＹ軸方向動力伝達部６０Ｙにおいて、受動部材６１は、一対のアーム５１１、５１２よりも変形しにくく、一対のアーム５１１、５１２によって挟持される方向における受動部材６１の幅は、一対のアーム５１１、５１２の離間幅よりも大きい。これにより、受動部材６１とアーム５１１、５１２との当接状態は、受動部材６１が移動しても保持される。受動部材６１が２つの板状部材で構成され受動部材６１に生じる復元力を利用してアーム５１１、５１２に対して受動部材６１が付勢される場合に比較して、駆動性能が向上する。 In the X-axis direction power transmission section 60X and the Y-axis direction power transmission section 60Y, the passive member 61 is less deformable than the pair of arms 511, 512, and the passive member 61 in the direction sandwiched by the pair of arms 511, 512. The width is larger than the separation width between the pair of arms 511 and 512. Thereby, the state of contact between the passive member 61 and the arms 511, 512 is maintained even if the passive member 61 moves. The driving performance is improved compared to a case where the passive member 61 is composed of two plate-like members and the restoring force generated in the passive member 61 is used to urge the arms 511 and 512.
　以上、本発明者によってなされた発明を実施の形態に基づいて具体的に説明したが、本発明は上記実施の形態に限定されるものではなく、その要旨を逸脱しない範囲で変更可能である。 Although the invention made by the present inventor has been specifically explained based on the embodiments above, the present invention is not limited to the above embodiments, and can be modified without departing from the gist thereof.
　例えば、実施の形態では、本発明に特徴的な動力伝達構造を、Ｘ軸方向駆動ユニット５０Ｘ及びＹ軸方向駆動ユニット５０Ｙに適用しているが、ＡＦ駆動ユニット７０に適用してもよいし、Ｘ軸方向駆動ユニット５０Ｘ及びＹ軸方向駆動ユニット５０Ｙの何れか一方にだけ適用してもよい。 For example, in the embodiment, the power transmission structure characteristic of the present invention is applied to the X-axis direction drive unit 50X and the Y-axis direction drive unit 50Y, but it may also be applied to the AF drive unit 70. It may be applied only to either the X-axis direction drive unit 50X or the Y-axis direction drive unit 50Y.
　また、実施の形態では、Ｘ軸方向駆動ユニット５０Ｘ、Ｙ軸方向駆動ユニット５０Ｙ及びＡＦ駆動ユニット７０は、いずれも超音波モーター型のアクチュエーターで構成されているが、本発明に特徴的な動力伝達構造が適用されない駆動ユニットについては、超音波モーター型でなくてもよい。 In addition, in the embodiment, the X-axis direction drive unit 50X, the Y-axis direction drive unit 50Y, and the AF drive unit 70 are all configured with ultrasonic motor type actuators, but the power transmission characteristic of the present invention is The drive unit to which this structure is not applicable does not need to be of the ultrasonic motor type.
　また、実施の形態では、ＡＦ機能及びＯＩＳ機能を備える光学素子駆動装置１を例示して説明したが、本発明は、ＡＦ機能及びＯＩＳ機能のうちの一方を備える光学素子駆動装置に対して適用することもできる。 Further, in the embodiment, the optical element driving device 1 having the AF function and the OIS function has been described as an example, but the present invention is applicable to an optical element driving device having one of the AF function and the OIS function. You can also.
　実施の形態では、カメラモジュールＡを備えるカメラ搭載装置の一例として、カメラ付き携帯端末であるスマートフォンＭを挙げて説明したが、本発明は、カメラモジュールとカメラモジュールで得られた画像情報を処理する画像処理部を有するカメラ搭載装置に適用できる。カメラ搭載装置は、情報機器及び輸送機器を含む。情報機器は、例えば、カメラ付き携帯電話機、ノート型パソコン、タブレット端末、携帯型ゲーム機、ｗｅｂカメラ、カメラ付き車載装置（例えば、バックモニター装置、ドライブレコーダー装置）を含む。また、輸送機器は、例えば、自動車、ドローン（無人航空機）を含む。 In the embodiment, the smartphone M, which is a camera-equipped mobile terminal, has been described as an example of a camera-equipped device equipped with a camera module A. However, the present invention provides a camera module that processes image information obtained by the camera module. It can be applied to a camera-equipped device having an image processing section. Camera-equipped devices include information equipment and transportation equipment. Information devices include, for example, a camera-equipped mobile phone, a notebook computer, a tablet terminal, a portable game machine, a web camera, and a camera-equipped vehicle-mounted device (for example, a back monitor device, a drive recorder device). Furthermore, transportation equipment includes, for example, automobiles and drones (unmanned aerial vehicles).
　図１２Ａ、図１２Ｂは、車載用カメラモジュールＶＣ（Vehicle Camera）を搭載するカメラ搭載装置としての自動車Ｖを示す図である。図１２Ａは自動車Ｖの正面図であり、図１２Ｂは自動車Ｖの後方斜視図である。自動車Ｖは、車載用カメラモジュールＶＣとして、実施の形態で説明したカメラモジュールＡを搭載する。図１２Ａ、図１２Ｂに示すように、車載用カメラモジュールＶＣは、例えば前方に向けてフロントガラスに取り付けられたり、後方に向けてリアゲートに取り付けられたりする。この車載用カメラモジュールＶＣは、バックモニター用、ドライブレコーダー用、衝突回避制御用、自動運転制御用等として使用される。 FIGS. 12A and 12B are diagrams showing a vehicle V as a camera mounting device equipped with a vehicle camera module VC (Vehicle Camera). 12A is a front view of the automobile V, and FIG. 12B is a rear perspective view of the automobile V. The automobile V is equipped with the camera module A described in the embodiment as the in-vehicle camera module VC. As shown in FIGS. 12A and 12B, the in-vehicle camera module VC is attached, for example, to a windshield facing forward, or to a rear gate facing rearward. This in-vehicle camera module VC is used for back monitors, drive recorders, collision avoidance control, automatic driving control, and the like.
　また、実施の形態では、光学素子としてレンズ部２を駆動する光学素子駆動装置１について説明したが、駆動対象となる光学素子は、ミラーやプリズムなどのレンズ以外の光学素子であってもよい。 Further, in the embodiment, the optical element driving device 1 that drives the lens section 2 as an optical element has been described, but the optical element to be driven may be an optical element other than a lens, such as a mirror or a prism.
　今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 The embodiments disclosed this time should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is indicated by the claims rather than the above description, and it is intended that all changes within the meaning and range equivalent to the claims are included.
　２０２２年８月３１日出願の特願２０２２－１３８０８５の日本出願に含まれる明細書、図面および要約書の開示内容は、すべて本願に援用される。 The disclosure contents of the specification, drawings, and abstract included in the Japanese patent application No. 2022-138085 filed on August 31, 2022 are all incorporated into this application.
　１　光学素子駆動装置
　１０　ＯＩＳ可動部（可動部）
　１２　第１ステージ（能動側部材）
　１３　第２ステージ（受動側部材）
　２０　ＯＩＳ固定部（固定部）
　２１　ベース（能動側部材）
　５０Ｘ　Ｘ軸方向駆動ユニット（駆動部）
　５０Ｙ　Ｙ軸方向駆動ユニット（駆動部）
　５１　ＯＩＳ共振部（共振部）
　５１１、５１２　アーム
　６０Ｘ　Ｘ軸方向動力伝達部（動力伝達部）
　６０Ｙ　Ｙ軸方向動力伝達部（動力伝達部）
　６１　受動部材
　６２　連結部材
　Ａ　カメラモジュール
　Ｍ　スマートフォン（カメラ搭載装置） 1 Optical element drive device 10 OIS movable part (movable part)
12 1st stage (active side member)
13 2nd stage (passive side member)
20 OIS fixed part (fixed part)
21 Base (active side member)
50X X-axis direction drive unit (drive unit)
50Y Y-axis direction drive unit (drive unit)
51 OIS resonance part (resonance part)
511, 512 Arm 60X X-axis direction power transmission section (power transmission section)
60Y Y-axis direction power transmission section (power transmission section)
61 Passive member 62 Connecting member A Camera module M Smartphone (camera mounted device)

Claims (7)

  1. 　固定部と、
    　光学素子を含む可動部と、
    　前記固定部及び前記可動部のうちの何れか一方からなる能動側部材に配置され、前記固定部に対して前記可動部を移動させる超音波モーター型の駆動部と、
    　前記固定部及び前記可動部のうちの何れか他方からなる受動側部材と前記駆動部とを連結し、前記駆動部の動力を前記受動側部材に伝達する動力伝達部と、
    　を備え、
    　前記駆動部は、振動する一対のアームを有する共振部を有し、
    　前記動力伝達部は、
    　一対の前記アームに付勢された状態で挟持される受動部材と、
    　前記受動部材と前記受動側部材とを連結する連結部材と、を有し、
    　前記連結部材は、弾性変形可能である、
    　光学素子駆動装置。     A fixed part,
    a movable part including an optical element;
    an ultrasonic motor-type drive unit that is disposed on an active side member consisting of either the fixed part or the movable part and moves the movable part with respect to the fixed part;
    a power transmission section that connects the drive section and a passive side member consisting of the other of the fixed section and the movable section, and transmits the power of the drive section to the passive side member;
    Equipped with
    The driving section has a resonating section having a pair of vibrating arms,
    The power transmission section is
    a passive member held between the pair of arms in a biased state;
    a connecting member that connects the passive member and the passive side member,
    the connecting member is elastically deformable;
    Optical element drive device.
  2. 　前記連結部材は、金属材料で形成される、
    　請求項１に記載の光学素子駆動装置。     The connecting member is made of a metal material.
    The optical element driving device according to claim 1.
  3. 　前記連結部材は、
    　前記受動部材に固定される固定部と、
    　前記固定部から延在して前記可動部に連結する弾性部と、を有し、
    　前記弾性部が前記可動部の移動方向に延在するように配置される、
    　請求項１又は２に記載の光学素子駆動装置。     The connecting member is
    a fixing part fixed to the passive member;
    an elastic part extending from the fixed part and connected to the movable part,
    the elastic part is arranged to extend in the moving direction of the movable part;
    The optical element driving device according to claim 1 or 2.
  4. 　前記能動側部材及び前記受動側部材は、ボールによって、相対的に移動可能に支持されている、
    　請求項１又は２に記載の光学素子駆動装置。     The active side member and the passive side member are supported by a ball so as to be relatively movable.
    The optical element driving device according to claim 1 or 2.
  5. 　前記受動部材は、一対の前記アームよりも変形しにくく、
    　一対の前記アームによって挟持される方向における前記受動部材の幅は、一対の前記アームの離間幅よりも大きい、
    　請求項１又は２に記載の光学素子駆動装置。     The passive member is less deformable than the pair of arms,
    The width of the passive member in the direction sandwiched by the pair of arms is larger than the width of separation between the pair of arms.
    The optical element driving device according to claim 1 or 2.
  6. 　請求項１に記載の光学素子駆動装置と、
    　前記可動部に装着される光学素子と、
    　前記光学素子により結像された被写体像を撮像する撮像部と、を備える、
    　カメラモジュール。     The optical element driving device according to claim 1;
    an optical element attached to the movable part;
    an imaging unit that captures a subject image formed by the optical element;
    The camera module.
  7. 　情報機器又は輸送機器であるカメラ搭載装置であって、
    　請求項６に記載のカメラモジュールと、
    　前記カメラモジュールで得られた画像情報を処理する画像処理部と、を備える、
    　カメラ搭載装置。     A camera-equipped device that is an information device or a transportation device,
    A camera module according to claim 6;
    an image processing unit that processes image information obtained by the camera module;
    Camera-equipped device.
PCT/JP2023/022281 2022-08-31 2023-06-15 Optical element driving device, camera module, and camera mounting device WO2024048011A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1944639A1 (en) * 2007-01-11 2008-07-16 STMicroelectronics (Research & Development) Limited Focussing apparatus
JP2021092726A (en) * 2019-12-12 2021-06-17 ミツミ電機株式会社 Lens drive device, camera module, and camera mounting device
WO2021200980A1 (en) * 2020-03-30 2021-10-07 ミツミ電機株式会社 Optical element actuation device, camera module, and camera-equipped device
JP7075030B1 (en) * 2020-11-24 2022-05-25 ミツミ電機株式会社 Optical element drive device, camera module, and camera mount device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1944639A1 (en) * 2007-01-11 2008-07-16 STMicroelectronics (Research & Development) Limited Focussing apparatus
JP2021092726A (en) * 2019-12-12 2021-06-17 ミツミ電機株式会社 Lens drive device, camera module, and camera mounting device
WO2021200980A1 (en) * 2020-03-30 2021-10-07 ミツミ電機株式会社 Optical element actuation device, camera module, and camera-equipped device
JP7075030B1 (en) * 2020-11-24 2022-05-25 ミツミ電機株式会社 Optical element drive device, camera module, and camera mount device

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