WO2022254857A1

WO2022254857A1 - Optical module

Info

Publication number: WO2022254857A1
Application number: PCT/JP2022/010159
Authority: WO
Inventors: 勇貴中村; 孝史京野
Original assignee: 住友電気工業株式会社
Priority date: 2021-06-04
Filing date: 2022-03-09
Publication date: 2022-12-08
Also published as: JPWO2022254857A1

Abstract

This optical module comprises a base part and a filter. A first main surface includes a first region and a second region. A first light, a second light, and a third light are multiplexed into a first multiplexed light in the first region. The directions of linearly polarized light of the first light and the second light included in the first multiplexed light are orthogonal. A fourth light and a fifth light are multiplexed into a second multiplexed light in the second region. The filter multiplexes the first multiplexed light and the second multiplexed light into a third multiplexed light by reflecting the first multiplexed light and transmitting the second multiplexed light, or by transmitting the first multiplexed light and reflecting the second multiplexed light. The directions of the linearly polarized light of the third light and the fourth light included in the third multiplexed light are orthogonal.

Description

optical module

The present disclosure relates to optical modules. This application claims priority based on Japanese application No. 2021-094293 filed on June 4, 2021, and incorporates all the descriptions described in the Japanese application.

An optical module may include a plurality of, for example, five semiconductor light emitting elements, and may combine and emit light emitted from each semiconductor light emitting element (see Patent Document 1, for example).

Japanese Patent Application Laid-Open No. 2018-22840

An optical module according to the present disclosure includes a base portion including a first main surface, a first laser diode that emits a first light, a second laser diode that emits a second light, and a third light. , a fourth laser diode that emits fourth light, a fifth laser diode that emits fifth light, and a filter. The first main surface includes a first region where the first laser diode, the second laser diode and the third laser diode are provided, and a position different from the first region, where the fourth laser diode and the fifth laser diode are provided. and a second region. The first light, the second light, and the third light are combined into the first combined light in the first area. The first light and the second light are of the same color. The directions of the linearly polarized light of the first light and the second light included in the first combined light are orthogonal to each other. The fourth light and the fifth light are combined into the second combined light in the second area. The third light and the fourth light are of the same color. The filter reflects the first combined light and transmits the second combined light, or transmits the first combined light and reflects the second combined light, thereby combining the first combined light and the second combined light into a third combination. Combine with wave light. The directions of the linearly polarized light of the third light and the fourth light included in the third combined light are orthogonal to each other.

FIG. 1 is an external perspective view showing the structure of an optical module according to Embodiment 1. FIG. FIG. 2 is an external perspective view of the optical module shown in FIG. 1 with a cap described later removed. 3 is a schematic plan view of the optical module shown in FIG. 2. FIG. FIG. 4 is an external perspective view of the optical module according to Embodiment 2, showing a state in which a later-described cap is removed. FIG. 5 is a schematic plan view of an optical module according to Embodiment 2. FIG. FIG. 6 is a schematic cross-sectional view of an optical module according to Embodiment 3. FIG.

[Problems to be Solved by the Present Disclosure]
In an optical module, a plurality of semiconductor light emitting elements may be arranged in the optical module in order to increase brightness, that is, to improve light output. Here, when arranging a plurality of semiconductor light emitting devices in an optical module, it is desirable that the size of the optical module can be made compact. Of course, it is also required to reduce costs.

Therefore, one object of the present disclosure is to provide an optical module that can increase the amount of light while making the size compact and that can be constructed at a low cost.

[Effect of the present disclosure]
According to the optical module of the present disclosure, it is possible to increase the amount of light while making the size compact, and to construct the module at a low cost.

[Description of Embodiments of the Present Disclosure]
First, the embodiments of the present disclosure are listed and described. An optical module according to the present disclosure includes a base portion including a first main surface, a first laser diode that emits first light, a second laser diode that emits second light, and a third light. A third laser diode that emits light, a fourth laser diode that emits fourth light, a fifth laser diode that emits fifth light, and a filter. The first main surface includes a first region where the first laser diode, the second laser diode and the third laser diode are provided, and a position different from the first region, where the fourth laser diode and the fifth laser diode are provided. and a second region. The first light, the second light, and the third light are combined into the first combined light in the first area. The first light and the second light are of the same color. The directions of the linearly polarized light of the first light and the second light included in the first combined light are orthogonal to each other. The fourth light and the fifth light are combined into the second combined light in the second area. The third light and the fourth light are of the same color. The filter reflects the first combined light and transmits the second combined light, or transmits the first combined light and reflects the second combined light, thereby combining the first combined light and the second combined light into a third combination. Combine with wave light. The directions of the linearly polarized light of the third light and the fourth light included in the third combined light are orthogonal to each other. The same color means that the difference between the central wavelength bands is within 10 nm.

The optical module according to the present disclosure includes a first laser diode, a second laser diode, a third laser diode, a fourth laser diode and a fifth laser diode. The first light and the second light are of the same color. The third light and the fourth light are of the same color. The filter reflects the first combined light and transmits the second combined light, or transmits the first combined light and reflects the second combined light, thereby converting the first combined light and the second combined light into the third combined light. combined with By adding the output of the second light to the output of the first light in the first combined light, and adding the output of the fourth light to the output of the third light in the third combined light, It is possible to improve the optical output of the optical module. In the first combined light and the second combined light combined by the filter, the first light and the second light whose linear polarization directions are orthogonal to each other are included in the first combined light, and the linear polarization directions are mutually orthogonal. The orthogonal third light and fourth light are included separately in the first combined light and the second combined light. By adopting a method that uses both polarization and wavelength to combine waves in this way, it is possible to combine waves relatively easily. Only a plate-like optical member such as the filter described above can be used instead of an expensive optical member that uses only a single filter, and can be manufactured at a relatively low cost. Therefore, by adopting such a configuration, the cost of the optical module can be reduced. A first laser diode, a second laser diode and a third laser diode are mounted in the first region, and a fourth laser diode and a fifth laser diode are mounted in the second region. This reduces the necessity of arranging the laser diodes side by side in one direction. Therefore, it becomes easy to reduce the footprint size of the optical module and make it compact. As described above, according to such an optical module, it is possible to increase the amount of light while making the size compact, and to construct the module at a low cost.

In the above optical module, each of the first light, the second light, the third light, the fourth light, and the fifth light may be red, green, or blue visible light. good. By doing so, it is possible to easily output the color desired by the user.

In the above optical module, the first light and the second light may be red, the third light and the fourth light may be green, and the fifth light may be blue. By doing so, it is possible to easily increase the amounts of red and green light.

The optical module may include a third area arranged adjacent to the first area. The optical module may further include a mirror driving mechanism provided in the third area and scanning the third combined light. By doing so, the mirror drive mechanism scans the third combined light by periodically swinging the mirror that reflects the third combined light. By including the mirror driving mechanism in the optical module, the third combined light can be scanned and emitted out of the optical module. Therefore, it is possible to appropriately perform drawing by the optical module desired by the user.

In the above optical module, the base portion may include an electronic cooling module for adjusting temperatures of the first laser diode, the second laser diode, the third laser diode, the fourth laser diode and the fifth laser diode. The power of light emitted from a laser diode is temperature dependent. Therefore, it is desirable to stabilize the temperature as much as possible during the operation of the optical module in order to suppress color shift and insufficient light intensity during drawing by light. The inclusion of such an electronic cooling module facilitates keeping the temperature of each laser diode constant. Therefore, a more stable output can be obtained.

In the above optical module, the electronic cooling module may include a radiator plate, a heat absorption plate, and a plurality of semiconductor columns. The plurality of semiconductor pillars may be arranged only in the first region and the second region when viewed in a direction perpendicular to the first main surface. By doing so, the temperature of each laser diode can be easily adjusted. Also, the effect of temperature change upon adjustment of each laser diode can be reduced for the mirror driving mechanism. The oscillating motion of the mirror is dependent on temperature, and if the temperature of the mirror driving mechanism is not constant, the deflection angle of the mirror will change greatly. Then, the third combined light cannot be scanned properly. According to the above optical module, the plurality of semiconductor columns are arranged only in the first region and the second region, and thus are not arranged in the third region where the mirror driving mechanism is provided. Therefore, it is possible to reduce the influence of the electronic cooling module that is driven when adjusting the temperature of each laser diode. Also, each laser diode and the mirror drive mechanism can be separated to increase the distance from each laser diode to the mirror drive mechanism. By doing so, the influence of each laser diode that generates heat during operation can be reduced, the temperature of the mirror driving mechanism can be easily kept constant, and the change in the deflection angle of the mirror depending on the temperature can be suppressed. Therefore, it is possible to emit light that has been scanned with higher accuracy.

In the above optical module, the base portion may further include a support plate and a base plate including the first region and the second region. The electronic cooling module may be arranged between the support plate and the base plate. A first thermistor may be provided on the support plate and a second thermistor may be provided on the base plate. By doing so, the temperature of the support plate corresponding to the ambient temperature and the temperature of the base plate, which changes due to the heat generated by the laser diode, are detected, and the difference between them is obtained, so that temperature control by the electronic cooling module can be performed accurately and efficiently. can be done systematically.

The above optical module may further include a cap that hermetically seals the first region and the second region and has an exit window that transmits the third combined light. By doing so, the cap can improve the airtightness of the space in which each laser diode is arranged, making it easier to keep the temperature of each laser diode constant. In this case, since the cap has an exit window through which the third combined light is transmitted, the light can be output to the outside of the optical module through this exit window.

In the above optical module, the filter may be provided in the first area or the second area. By doing so, the size of the optical module can be reduced.

[Details of the embodiment of the present disclosure]
Next, one embodiment of the optical module of the present disclosure will be described with reference to the drawings. In the following drawings, the same reference numerals are given to the same or corresponding parts, and the description thereof will not be repeated.

(Embodiment 1)
An optical module according to Embodiment 1 of the present disclosure will be described. FIG. 1 is an external perspective view showing the structure of an optical module according to Embodiment 1. FIG. FIG. 2 is an external perspective view of the optical module shown in FIG. 1 with a cap described later removed. 3 is a schematic plan view of the optical module shown in FIG. 2. FIG.

1, 2 and 3, an optical module 10a includes a light forming portion 11 that forms light, a base portion 12 that includes a first principal surface 20a, and a protective member that protects the light forming portion 11. and cap 14 as. In this embodiment, the base portion 12 includes a flat support plate 13 , a flat base plate 20 , and an electronic cooling module 30 . The cap 14 is a lid welded to the support plate 13 . The light forming portion 11 is surrounded and sealed by a support plate 13 and a cap 14 . The support plate 13 has a rectangular shape when viewed from the Z-axis direction (the direction perpendicular to the first main surface), and has rounded corners. Specifically, the support plate 13 is configured such that the length in the X-axis direction is longer than the length in the Y-axis direction. The support plate 13 includes a first surface 13a perpendicular to the Z-axis direction and a second surface 13b perpendicular to the Z-axis direction. The light forming section 11 is arranged on the first surface 13a. The cap 14 is placed in contact with the first surface 13 a so as to cover the light forming section 11 . The cap 14 is provided with an emission window 15 made of glass through which the light formed by the light forming section 11 is transmitted. The light forming portion 11 is hermetically sealed with a cap 14 . That is, the cap 14 is welded to the support plate 13, hermetically sealed so as to surround a first region 81, a second region 82 and a third region 83, which will be described later, and an exit window through which the third combined light _L8 , which will be described later, is transmitted. 15. The exit window 15 is provided above the cap 14 , that is, at a position facing the first surface 13 a when the cap 14 is attached to the support plate 13 . A plurality of lead pins 16 penetrate the support plate 13 from the second surface 13b side to the first surface 13a side, and protrude to both the first surface 13a side and the second surface 13b side. is installed in

The light forming portion 11 includes a first block portion 21, a second block portion 22, a third block portion 23, a fourth block portion 24, and a fifth block portion 25 each having a rectangular parallelepiped shape. The light forming section 11 further includes a first laser diode 41 as a first semiconductor light emitting element, a second laser diode 42 as a second semiconductor light emitting element, and a third laser diode 43 as a third semiconductor light emitting element. , a fourth laser diode 44 as a fourth semiconductor light emitting device, and a fifth laser diode 45 as a fifth semiconductor light emitting device. The light forming section 11 further includes a first lens 51, a second lens 52, a third lens 53, a fourth lens 54, a fifth lens 55, a first filter 61, a second filter 62, and a third lens. 3 filters 63, a fourth filter 64, a fifth filter 65, a sixth filter 66, a wave plate 56 that is a half-wave plate, a wave plate 57 that is a half-wave plate, and a mirror driving mechanism 70 and . That is, in this embodiment, the optical module 10a includes a plurality of semiconductor light emitting devices. Specifically, the optical module 10a includes five laser diodes as five semiconductor light emitting elements. The first laser diode 41 emits a linearly polarized first light _L1 in the Y-axis direction. The second laser diode 42 emits the linearly polarized second light _L2 in the Y-axis direction. The first light _L1 and the second light _L2 have the same color and are red visible light. The wavelength range for red is, for example, 610 nm to 670 nm. The third laser diode 43 emits linearly polarized third light _L3 in the Y-axis direction. The fourth laser diode 44 emits linearly polarized fourth light _L4 in the X-axis direction. The third light _L3 and the fourth light _L4 have the same color and are green visible light. The wavelength range of the green laser light L2 is, for example, 500 nm to 550 nm. The fifth laser diode 45 emits linearly polarized fifth light _L5 in the X-axis direction. The fifth light _L5 is blue visible light. The blue wavelength range is, for example, 410 nm to 460 nm. Each of the first filter 61, the second filter 62, the third filter 63, the fourth filter 64, the fifth filter 65 and the sixth filter 66 is, for example, a dielectric multilayer filter.

The base plate 20 includes a first main surface 20a perpendicular to the Z-axis direction and a second main surface 20b facing the first main surface 20a and perpendicular to the Z-axis direction. The first principal surface 20 a includes a first region 81 and a second region 82 . The optical module 10a also includes a third region 83 arranged adjacent to the first region 81 and the second region 82 when viewed from the Z-axis direction. The third area 83 is included in the first surface 32a of the heat absorbing plate 32 of the electronic cooling module 30, which will be described later. In FIG. 3, the first region 81 is indicated by a one-dot chain line, the second region 82 is indicated by a two-dot chain line, and the third region 83 is indicated by a broken line. The first area 81, the second area 82, and the third area 83 are provided at different positions without overlapping each other. The first area 81 and the second area 82 are arranged side by side in the Y-axis direction. The first area 81 and the third area 83, and the second area 82 and the third area 83 are arranged side by side in the X-axis direction. A first filter 61 , a second filter 62 , a third filter 63 , and a sixth filter 66 are provided along the side facing the second region 82 among the sides surrounding the first region 81 .

The electronic cooling module 30 adjusts the temperatures of the first laser diode 41 , the second laser diode 42 , the third laser diode 43 , the fourth laser diode 44 and the fifth laser diode 45 . The electronic cooling module 30 is also called a TEC (Thermo-Electric Cooler) and includes a radiator plate 31 , a heat absorption plate 32 and a plurality of semiconductor columns 33 . The electronic cooling module 30 is arranged between the support plate 13 and the base plate 20 .
The heat sink 31 is arranged on the first surface 13 a of the support plate 13 . The heat absorbing plate 32 is arranged so as to be in contact with the second major surface 20b of the base plate 20 . That is, the base plate 20 is arranged on the first surface 32 a of the heat absorbing plate 32 . The support plate 13 and the heat radiation plate 31, and the base plate 20 and the heat absorption plate 32 are respectively bonded with a bonding material (not shown). The plurality of semiconductor pillars 33 are composed of Peltier elements, and are arranged side by side at intervals in the X-axis direction and the Y-axis direction, respectively, between the radiator plate 31 and the heat absorption plate 32 . A plurality of semiconductor columns 33 are connected to the radiator plate 31 and the heat absorbing plate 32 . By energizing the electronic cooling module 30, the members arranged in the area above the electronic cooling module 30, in this embodiment, the first laser diode 41, the second laser diode 42, the third laser diode 43, and the fourth laser The temperature of diode 44 and fifth laser diode 45 can be adjusted. By adjusting the current supplied to the electronic cooling module 30, it becomes easy to keep the temperature of the area on the electronic cooling module 30 constant over the long term, specifically at 35° C., for example.

The optical module 10a includes a first thermistor 36 and a pedestal 37. The first thermistor 36 is arranged on the support plate 13 . Specifically, the first thermistor 36 is arranged on a pedestal 37 arranged on the support plate 13 . The pedestal 37 is arranged so as to be adjacent to the radiator plate 31 when viewed from the Z-axis direction. Specifically, the pedestal 37 is arranged at a position close to the fourth laser diode 44 when viewed in the Z-axis direction. A first thermistor 36 is provided on the base 37 . The temperature detected by the first thermistor 36 is used for temperature control by the electronic cooling module 30 .

The optical module 10a also includes a second thermistor 38 and a pedestal 39. A second thermistor 38 is arranged on the base plate 20 . Specifically, the second thermistor 38 is arranged on the first main surface 20a of the base plate 20 at a position close to the third block portion 23, that is, the third laser diode 43 when viewed in the Z-axis direction. ing. The temperature detected by the second thermistor 38 is used for temperature control by the electronic cooling module 30 .

The first block portion 21, the second block portion 22, and the third block portion 23 are arranged side by side on the first region 81 with a space therebetween in the X-axis direction. A first laser diode 41 is arranged on the first block portion 21 . A second laser diode 42 is arranged on the second block portion 22 . A third laser diode 43 is arranged on the third block portion 23 . The first laser diode 41, the second laser diode 42, and the third laser diode 43 are arranged to emit light in the Y-axis direction.

On the second region 82, the fourth block portion 24 and the fifth block portion 25 are arranged side by side with a gap in the Y-axis direction. A fourth laser diode 44 is arranged on the fourth block portion 24 . A fifth laser diode 45 is arranged on the fifth block portion 25 . The fourth laser diode 44 and the fifth laser diode 45 are arranged to emit light in the X-axis direction.

A first lens 51, a second lens 52, and a third lens 53 for converting the spot size of light are arranged side by side in the X-axis direction on the first region 81 of the base plate 20, respectively. The first lens 51, the second lens 52 and the third lens 53 convert the spot size of the light emitted from the first laser diode 41, the second laser diode 42 and the third laser diode 43 respectively. The light emitted from the first laser diode 41, the second laser diode 42 and the third laser diode 43 are converted into collimated light by the first lens 51, the second lens 52 and the third lens 53, respectively. A wave plate 56 is arranged between the second laser diode 42 and the second lens 52 . The wave plate 56 can rotate the polarization direction of the second light _L2 emitted from the second laser diode 42 by 90 degrees.

On the second area 82 of the base plate 20, a fourth lens 54 and a fifth lens 55 for converting the spot size of light are arranged side by side with a gap in the Y-axis direction. A fourth lens 54 and a fifth lens 55 convert the spot size of the light emitted from the fourth laser diode 44 and the fifth laser diode 45, respectively. The light emitted from the fourth laser diode 44 and the fifth laser diode 45 is converted into collimated light by the fourth lens 54 and the fifth lens 55 . A wave plate 57 is arranged between the fourth laser diode 44 and the fourth lens 54 . The wave plate 57 can rotate the polarization direction of the fourth light _L4 emitted from the fourth laser diode 44 by 90 degrees.

On the first region 81 of the base plate 20, a first filter 61, a second filter 62 and a third filter 63 are arranged side by side at intervals in the X-axis direction. The first filter 61, the second filter 62, and the third filter 63 are arranged so that their reflecting surfaces are inclined 45 degrees with respect to the X-axis direction and the Y-axis direction when viewed in the Z-axis direction. The first filter 61 reflects the first light _L1 emitted from the first laser diode 41 . The second filter 62 transmits the first light L ₁ reflected by the first filter 61 and reflects the second light L ₂ emitted from the second laser diode 42 . The polarization direction of the second light L ₂ incident on the second filter 62 is rotated by 90 degrees compared to the second light L ₂ immediately after being emitted from the second laser diode 42 . The third filter 63 transmits the first light L1 reflected by the first filter 61 and transmitted through the second filter ₆₂ , transmits the second light L2 reflected by the second filter 62, and transmits the _third light L2. It reflects the third light emitted from the laser diode 43 . Thus, the first filter 61, the second filter 62 and the third filter 63 selectively transmit and reflect light of specific wavelengths or polarization directions. As a result, the first filter 61, the second filter 62 and the third filter 63 combine the lights emitted from the first laser diode 41, the second laser diode 42 and the third laser diode 43 in the first region 81. do. The combined first combined light L ₆ travels in the X-axis direction and reaches the sixth filter 66 . The directions of linear polarization of the first light _L1 and the second light _L2 included in the first combined light _L6 are orthogonal to each other.

A fourth filter 64 and a fifth filter 65 are arranged side by side on the second region 82 of the base plate 20 with a space therebetween in the Y-axis direction. The fourth filter 64 and the fifth filter 65 are arranged so that their reflecting surfaces are inclined 45 degrees with respect to the X-axis direction and the Y-axis direction when viewed in the Z-axis direction. The fourth filter 64 reflects the fourth light _L4 that is emitted from the fourth laser diode 44 and whose polarization direction is rotated by 90 degrees. The fifth filter 65 transmits the fourth light L ₄ reflected by the fourth filter 64 and reflects the fifth light L ₅ emitted from the fifth laser diode 45 . The polarization direction of the fourth light _L4 incident on the fifth filter 65 is rotated by 90 degrees compared to the fourth light _L4 immediately after being emitted from the fourth laser diode 44 . Thus, the fourth filter 64 and the fifth filter 65 selectively transmit and reflect light of specific wavelengths or polarization directions. As a result, the fourth filter 64 and the fifth filter 65 combine the lights emitted from the fourth laser diode 44 and the fifth laser diode 45 in the second region 82 . The combined second combined light L ₇ travels in the Y-axis direction and reaches the sixth filter 66 .

A sixth filter 66 is arranged on the first region 81 of the base plate 20 . The sixth filter 66 is arranged adjacent to the third filter 63 in the X-axis direction and adjacent to the fifth filter 65 in the Y-axis direction. The sixth filter 66 is arranged such that the reflecting surface is inclined 45 degrees with respect to the X-axis direction and the Y-axis direction when viewed in the Z-axis direction. The direction in which the sixth filter 66 inclines is the same as that of the fourth filter 64 and the fifth filter 65, and the first filter 61, the second filter 62 and the third filter 63 are arranged with the imaginary axis extending in the Y-axis direction as the axis of symmetry. and in the opposite direction. The sixth filter 66 transmits the first combined light _L6 traveling in the X-axis direction and reflects the second combined light _L7 traveling in the Y-axis direction. Thus, the sixth filter 66 selectively transmits and reflects light of specific wavelengths or polarization directions. As a result, the sixth filter 66 filters the light emitted from the first laser diode 41, the second laser diode 42, the third laser diode 43, the fourth laser diode 44, and the fifth laser diode 45 in the first region 81. combine waves. The combined third combined light travels in the X-axis direction and reaches the mirror drive mechanism 70 . The directions of linear polarization of the third light _L3 and the fourth light _L4 included in the third combined light _L8 are orthogonal to each other.

The mirror driving mechanism 70 is configured by MEMS (Micro Electro Mechanical System) and includes a mirror 72 capable of rocking motion. The mirror driving mechanism 70 is supported by a triangular prism-shaped stage 71 arranged on the heat absorbing plate 32 . The third combined light L ₈ reaches the mirror 72 . The mirror drive mechanism 70 emits and combines the third combined light _L8 emitted from the first laser diode 41, the second laser diode 42, the third laser diode 43, the fourth laser diode 44 and the fifth laser diode 45. By periodically oscillating the reflecting mirror 72 at a high speed, the first laser diode 41, the second laser diode 42, the third laser diode 43, the fourth laser diode 44 and the fifth laser diode 45 emit light and combine them. The waved third combined light _L8 is scanned. By emitting the scanned light from the emission window 15 to the outside of the optical module 10a, an image can be projected and drawn.

The optical module 10 a includes a first laser diode 41 , a second laser diode 42 , a third laser diode 43 , a fourth laser diode 44 and a fifth laser diode 45 . The first light L ₁ and the second light L ₂ , the third light L ₃ and the fourth light L ₄ are of the same color. That is, the difference between the central wavelength bands of the first light _L1 and the second light _L2 is within 10 nm. Also, the difference in the central wavelength band between the third light _L3 and the fourth light _L4 is within 10 nm. The filter, specifically the sixth filter 66, transmits the first combined light L6 _and reflects the second combined light _L7 , thereby separating the first combined light _L6 and the second combined light _L7 into a third filter. The combined light _L8 is combined. In the first combined light _L6 , the output of the first light _L1 is added to the output of the second light _L2 , and in the third combined light _L8 , the output of the third light _L3 is added to the fourth light L2. By adding the outputs of the light _L4 , it is possible to improve the optical output of the optical module 10a. In the first combined light _L6 and the second combined light _L7 combined by the sixth filter 66, the first light _L1 and the second light L2 whose linear polarization directions are orthogonal to each other are the first combined light L6 and the second combined light _L2 . The third light _L3 and the fourth light _L4 , which are included in the wave light _L6 and whose directions of linear polarization are orthogonal to each other, are divided and included in the first combined light _L6 and the second combined light _L7 . By adopting such a method of multiplexing using both polarization and wavelength, multiplexing can be performed relatively easily. For this reason, it is not necessary to use an expensive optical member such as a polarizing beam splitter cube, in which triangular prismatic optical members are joined together and beams are combined using only the difference in polarization. Only a plate-shaped optical member such as the above filter is required, and can be manufactured at a relatively low cost. Therefore, by adopting such a configuration, the cost of the optical module 10a can be reduced. A first laser diode 41, a second laser diode 42 and a third laser diode 43 are provided in the first region 81, and a fourth laser diode 44 and a fifth laser diode 45 are provided in the second region 82. be done. This reduces the necessity of arranging the laser diodes side by side in one direction. Therefore, it becomes easy to reduce the footprint of the optical module 10a and make it compact. As described above, according to such an optical module 10a, it is possible to increase the amount of light while making the size compact, and to construct the module at a low cost.

In this embodiment, the first light _L1 and the second light _L2 , the third light _L3 and the fourth light _L4 , and the fifth light _L5 are respectively red, green, Although blue visible light, the above color selection is exemplary. The selection of colors should be the same for the first light _L1 and the second light _L2 , and the third light _L3 and the _fourth light _L4 . light _L2 , third light _L3 and fourth light _L4 , and fifth light _L5 may be selected from different colors, i.e. red, green, or blue visible light. . Therefore, it is possible to easily output colors desired by the user.

In this embodiment, the optical module 10a includes a third region 83 arranged adjacent to the first region 81 and the second region 82 . The optical module 10 a includes a mirror driving mechanism 70 that is provided in the third area 83 and scans the third combined light L ₈ combined by the sixth filter 66 . Therefore, the mirror drive mechanism 70 scans the third combined light _L8 by periodically swinging the mirror that reflects the third combined light _L8 . Since the optical module 10a includes the mirror drive mechanism 70, the third combined light _L8 can be scanned and emitted to the outside of the optical module 10a. Therefore, it is possible to appropriately perform drawing by the optical module 10a desired by the user.

In this embodiment, the base portion 12 includes a first laser diode 41, a second laser diode 42 and a third laser diode 43 provided in the first region 81, and a fourth laser diode 44 and a fifth laser diode 44 provided in the second region 82. It includes an electronic cooling module 30 that regulates the temperature of the laser diode 45 . The power of light emitted from a laser diode is temperature dependent. Therefore, it is desirable to stabilize the temperature as much as possible during the operation of the optical module 10a in order to suppress color shift and insufficient light intensity during drawing by light. By including such an electronic cooling module 30, it becomes easy to keep the temperature of each laser diode constant. Therefore, a more stable output can be obtained.

(Embodiment 2)
Next, Embodiment 2, which is another embodiment, will be described. FIG. 4 is an external perspective view showing a state in which the cap of the optical module according to Embodiment 2 is removed. FIG. 5 is a schematic plan view of an optical module according to Embodiment 2. FIG. The optical module of the second embodiment differs from that of the first embodiment in that the

wave plates

56 and 57 are not included.

Referring to FIGS. 4 and 5, second laser diode 42 and fourth laser diode 44 included in optical module 10b of the second embodiment are rotated by 90 degrees.
Specifically, the second laser diode 42 is provided in the second block portion 22 . Here, the second block part 22 is mounted on the first area 81 by rotating it by 90 degrees in the Y-axis direction. Similarly, a fourth laser diode 44 is provided on the fourth block portion 24 . Here, the fourth block portion 24 is mounted on the second region 82 by rotating it 90 degrees in the X-axis direction.

By doing so, the direction of linear polarization of the first light _L1 emitted from the first laser diode 41 and the direction of linear polarization of the second light _L2 emitted from the second laser diode 42 are changed. are orthogonal. Therefore, the wavelength plate 56 can be eliminated, and further cost reduction can be achieved. Similarly, the direction of linear polarization of the third light _L3 emitted from the third laser diode 43 and the direction of linear polarization of the fourth light L4 emitted from the fourth laser diode ₄₄ are orthogonal. Therefore, the wavelength plate 57 can be eliminated, and further cost reduction can be achieved. In this case, a space for arranging the

wave plates

56 and 57 is left, so that the device can be made more compact.

(Embodiment 3)
Next, Embodiment 3, which is still another embodiment, will be described. FIG. 6 is a schematic cross-sectional view of an optical module according to Embodiment 3. FIG. The optical module of the third embodiment differs from that of the first embodiment in that the configuration of the electronic cooling module is different.

Referring to FIG. 6, in optical module 10c of the third embodiment, semiconductor columns 33 are arranged only in first region 81 and second region 82 when viewed in the Z-axis direction. That is, the semiconductor column 33 is not arranged in the third region 83 where the mirror drive mechanism 70 is provided. With such a configuration, it is possible to easily adjust the temperature of each laser diode. In addition, it is possible to reduce the effect of temperature changes on the mirror driving mechanism 70 when adjusting each laser diode. The oscillating motion of the mirror 72 is dependent on temperature, and if the temperature of the mirror drive mechanism 70 is not constant, the deflection angle of the mirror 72 will change greatly. If so, the third combined light _L8 cannot be scanned properly. According to the optical module 10c, the plurality of semiconductor columns 33 are arranged only in the first region 81 and the second region 82, and therefore are not arranged in the third region 83 where the mirror drive mechanism 70 is provided. Therefore, it is possible to reduce the influence of the electronic cooling module 30 that is driven when adjusting the temperature of each laser diode. Further, each laser diode and the mirror drive mechanism 70 can be separated to increase the distance from each laser diode to the mirror drive mechanism 70 . By doing so, the influence of each laser diode that generates heat during operation can be reduced, making it easier to keep the temperature of the mirror drive mechanism 70 constant, and suppressing the change in the deflection angle of the mirror 72 depending on the temperature. can. Therefore, it is possible to emit light that has been scanned with higher accuracy.

(Other embodiments)
In the above embodiment, the optical module includes two red laser diodes, two green laser diodes and one blue laser diode, but the configuration is not limited to this. A configuration including one laser diode of any one of the red laser diode, the green laser diode, and the blue laser diode and two laser diodes of the other colors may be used. Also, the number of laser diodes is not limited to five in total, and may be configured to include two red laser diodes, two green laser diodes and two blue laser diodes. Furthermore, laser diodes associated with a plurality of color combinations may be used.

In the above embodiment, the sixth filter transmits the first combined light and reflects the second combined light, thereby combining the first combined light and the second combined light with the third combined light. However, not limited to this, the sixth filter combines the first combined light and the second combined light into the third combined light by reflecting the first combined light and transmitting the second combined light. You can do it.

In the above embodiment, in the case of the electronic cooling module, if the ambient environment where the optical module is arranged is extremely low temperature, the heat absorption plate may release heat and the heat dissipation plate may absorb the heat. .

In the above embodiment, the base plate included in the base portion may be omitted, and the first surface of the heat absorbing plate of the electronic cooling module may be applied as the first main surface. Furthermore, the base plate and electronic cooling module included in the base portion may be omitted, and the first surface of the support plate may be used as the first main surface.

In the above embodiment, the fourth filter and the fifth filter may be provided along the side facing the first area among the sides surrounding the second area. In other words, while the first region and the second region of the above embodiment are interchanged, three laser diodes are arranged in the first region and two laser diodes are arranged in the second region. . At this time, the sixth filter is located in the second area.

It should be understood that the embodiments disclosed this time are illustrative in all respects and not restrictive in any aspect. The scope of the present invention is defined by the scope of the claims rather than the above description, and is intended to include all changes within the meaning and scope of equivalence to the scope of the claims.

10a, 10b, 10c Optical module 11 Light forming part 12 Base part 13

Support plate

13a, 13b, 32a Surface 14 Cap 15 Output window 16 Lead pin 20 Base plate 20a First main surface, 20b Second main surface 21 First block Part 22 Second block part 23 Third block part 24 Fourth block part 25 Fifth block part 30 Electronic cooling module 31 Radiator plate 32 Heat absorption plate 33 Semiconductor column 36

First thermistors

37, 39 Pedestal 38 Second thermistor 41 First laser Diode 42 Second laser diode 43 Third laser diode 44 Fourth laser diode 45 Fifth laser diode 51 First lens 52 Second lens 53 Third lens 54 Fourth lens 55

Fifth lenses

56 and 57 Wave plate 61 First filter 62 second filter 63 third filter 64 fourth filter 65 fifth filter 66 sixth filter 70 mirror driving mechanism 71 stage 72 mirror 81 first region, 82 second region, 83 third region L ₁ first light L ₂ Second light L ₃ Third light L ₄ Fourth light L ₅ Fifth light L ₆ First combined light L ₇ Second combined light L ₈ Third combined light X, Y, Z Arrows

Claims

a base portion including a first major surface;
a first laser diode that emits a first light;
a second laser diode that emits a second light;
a third laser diode that emits a third light;
a fourth laser diode that emits a fourth light;
a fifth laser diode that emits a fifth light;
a filter and
The first main surface is
a first region in which the first laser diode, the second laser diode and the third laser diode are provided;
a second region different from the first region and provided with the fourth laser diode and the fifth laser diode;
the first light, the second light, and the third light are combined in the first region with a first combined light;
the first light and the second light are of the same color;
directions of linearly polarized light of the first light and the second light included in the first combined light are orthogonal;
the fourth light and the fifth light are combined in the second region with second combined light;
the third light and the fourth light are of the same color;
The filter reflects the first combined light and transmits the second combined light, or transmits the first combined light and reflects the second combined light so that the first combined light and the second combined light are filtered. combining the combined light with the third combined light,
The optical module, wherein directions of linearly polarized light of the third light and the fourth light included in the third combined light are orthogonal to each other.
the first light and the second light;
the third light and the fourth light;
Each of the fifth light is
2. The optical module according to claim 1, wherein the visible light is one of red, green, and blue.
the first light and the second light are red;
the third light and the fourth light are green;
3. The optical module according to claim 2, wherein said fifth light is blue.
The optical module includes a third region arranged adjacent to the first region,
4. The optical module according to any one of claims 1 to 3, further comprising a mirror drive mechanism provided in said third area and scanning said third combined light.
13. The base portion includes an electronic cooling module for adjusting the temperature of the first laser diode, the second laser diode, the third laser diode, the fourth laser diode and the fifth laser diode. Item 5. The optical module according to any one of Item 4.
The electronic cooling module is
a heat sink;
a heat absorbing plate;
a plurality of semiconductor pillars;
6. The optical module according to claim 5, wherein said plurality of semiconductor pillars are arranged only in said first region and said second region when viewed in a direction perpendicular to said first main surface.
The base portion further includes a support plate and a base plate including the first region and the second region,
the electronic cooling module is disposed between the support plate and the base plate;
7. The optical module according to claim 5, wherein a first thermistor is provided on said support plate and a second thermistor is provided on said base plate.
8. The cap according to any one of claims 1 to 7, further comprising a cap that hermetically seals the first region and the second region and has an exit window that transmits the third combined light. optical module.
The optical module according to any one of claims 1 to 8, wherein the filter is provided in the first area or the second area.