WO2022246908A1 - 一种手持式测漏仪 - Google Patents

一种手持式测漏仪 Download PDF

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Publication number
WO2022246908A1
WO2022246908A1 PCT/CN2021/098731 CN2021098731W WO2022246908A1 WO 2022246908 A1 WO2022246908 A1 WO 2022246908A1 CN 2021098731 W CN2021098731 W CN 2021098731W WO 2022246908 A1 WO2022246908 A1 WO 2022246908A1
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Prior art keywords
detection
leak detector
hand
temperature
comparison
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PCT/CN2021/098731
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English (en)
French (fr)
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王帅
龚新
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长鑫存储技术有限公司
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Publication of WO2022246908A1 publication Critical patent/WO2022246908A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means

Definitions

  • the present application relates to the technical field of detection, in particular to a hand-held leak detector.
  • the existing leak detector uses a helium gas leak detector, which has a large volume, is inconvenient to operate, and has hidden dangers in use. Specifically, when the helium leak detector is used, when the helium leak detector reaches a vacuum, it is connected to the same vacuum chamber, but if the vacuum degree of the helium leak detector and the chamber are not the same, there will be a pressure difference, directly There will be an instantaneous pressure drop in the connection, which will damage the instrument and the chamber; the volume of the helium side leakage instrument is too large, and the length of the connecting pipe and the helium gun is limited, so it is difficult to detect some corners and remote positions of the machine; The leak detector has a long service life, and there will be some dust and other substances inside. When it is connected to the chamber, the dust and the like will be introduced into the chamber, causing the pollution of the chamber.
  • the application discloses a hand-held leak detector, which has the characteristics of simple structure, easy operation and portability, and can avoid the safety hazards of traditional helium leak detectors.
  • a handheld leak detector comprising:
  • the detection body has a detection surface
  • the heating assembly is used to provide a heat source for the detection surface
  • a temperature collection component the temperature collection component includes several first detection parts located on the detection surface, and the first detection parts are used to collect the temperature of the air on the side of the detection body facing the detection surface information.
  • the above-mentioned hand-held leak detector can detect the air flow in a relatively stable air environment, so the hand-held leak detector can detect the airflow at this position , so that it can be judged that there is a leak point at this position.
  • the heating of an object will cause the temperature of the surrounding air to rise, and the flow of air will take away the heat, causing the temperature of the air to drop.
  • the heating component provides a heat source for the detection surface of the detection body, so that the temperature of the air on the side of the detection body facing the detection surface rises, and several first detection parts of the temperature collection component can collect the detection body.
  • the temperature information of the air on one side of the surface when the detection body is placed on the possible leakage position, that is, the detection surface is facing the possible leakage position, if there is a leak, the leakage position will generate airflow, and the airflow will take away the side of the detection surface
  • the heat of the air will lower the air temperature, and the temperature of the air collected by the temperature collection component will change in real time, so whether there is a leak can be judged based on the temperature information of the air on the side of the detection body facing the detection surface collected by the temperature collection component.
  • the hand-held leak detector has a simple and compact structure, and can detect places that cannot be detected by helium leak detectors; and it has no pollution to the chamber during application, no hidden danger of pressure drop, and is safer; in addition, the hand-held leak detector
  • the principle of the leak meter is simple and easy to operate, so it is more convenient to use and faster to detect leaks.
  • the detection body further includes a contrast surface, the contrast surface is located on the side of the detection body away from the detection surface, and the heating assembly is also used to provide a heat source for the contrast surface;
  • the temperature collection component also includes several second detection parts located on the comparison surface, and the second detection parts are used to collect temperature information of the detection body on the side facing the comparison surface.
  • the first detection part and/or the second detection part includes a thermistor and a circuit component electrically connected to the thermistor.
  • the heating assembly includes several first heaters and several second heaters, the first heaters divide the detection surface into multiple detection areas; the second heaters The contrast surface is divided into a plurality of contrast regions, and the contrast regions correspond to the detection regions one by one.
  • a plurality of the detection areas are uniformly distributed on the detection surface.
  • the first detection part is set corresponding to the detection area
  • the second detection part is set corresponding to the comparison area.
  • a plurality of the first detection parts are evenly distributed on the detection surface, and the second detection parts correspond to the first detection parts one by one.
  • a heat shield is provided between the comparison surface and the detection surface.
  • the hand-held leak detector also includes a handle and a connection mechanism connecting the detection body and the handle, and the connection mechanism is used to adjust the distance between the detection body and the handle .
  • connection mechanism is a foldable link structure or a telescopic rod.
  • the handheld leak detector further includes a data processing module and a display, and the display is signal-connected to the temperature acquisition component through the data processing module.
  • the hand-held leak detector further includes an alarm signal connected to the data processing module.
  • FIG. 1 is a schematic structural view of the detection surface of a hand-held leak detector provided in an embodiment of the present application
  • Fig. 2 is a schematic structural view of another hand-held leak detector provided in the embodiment of the present application.
  • Fig. 3 is the structural representation of comparison surface in Fig. 2;
  • FIG. 4 is a schematic diagram of the overall structure of a hand-held leak detector provided in the embodiment of the present application.
  • Fig. 5 is a control schematic diagram of a hand-held leak detector provided in the embodiment of the present application.
  • Fig. 6 is a schematic diagram of the operation of a hand-held leak detector provided in the embodiment of the present application.
  • Icons 100-detection body; 110-detection surface; 120-contrast surface; 130-heat shield; 200-heating component; 210-first heater; 220-second heater; 300-temperature acquisition component; 310-first detection part; 320-second detection part; 400-connection mechanism; 500-handle; 600-display; 700-data processing module; 800-alarm.
  • the embodiment of the present application provides a hand-held leak detector, including: a detection body 100, the detection body 100 has a detection surface 110; a heating assembly 200, the heating assembly 200 is used for the detection surface 110 provides a heat source; a temperature collection component 300, the temperature collection component 300 includes several first detection parts 310 located on the detection surface 110, the first detection part 310 is used to collect the air from the side of the detection body 100 facing the detection surface 110 temperature information.
  • the above-mentioned hand-held leak detector can detect the air flow in a relatively stable air environment, so the hand-held leak detector can detect the airflow at this position , so that it can be judged that there is a leak point at this position. It is understandable that the heating of an object will cause the temperature of the surrounding air to rise, and the flow of air will take away the heat, causing the temperature of the air to drop.
  • the heating assembly 200 provides a heat source for the detection surface 110 of the detection body 100, so that the temperature of the air on the side of the detection body 100 facing the detection surface 110 rises, and the several first detection parts 310 of the temperature collection assembly 300 can Collect the temperature information of the air on the side of the detection body 100 facing the detection surface 110.
  • the detection body 100 is placed in a possible leak position, that is, the detection surface 110 is facing the possible leak position.
  • the leak position will be The airflow is generated, and the airflow takes away the heat of the air on one side of the detection surface 110, so that the air temperature drops, and the air temperature collected by the temperature collection component 300 in real time will change, so that the detection body 100 collected by the temperature collection component 300 faces the detection surface
  • the temperature information of the air on one side of 110 judges whether there is leakage.
  • the hand-held leak detector has a simple and compact structure, and can detect places that cannot be detected by helium leak detectors; and it has no pollution to the chamber during application, no hidden danger of pressure drop, and is safer; in addition, the hand-held leak detector
  • the principle of the leak meter is simple and easy to operate, so it is more convenient to use and faster to detect leaks.
  • the detection body 100 also includes a contrast surface 120, the contrast surface 120 is located on the side of the detection body 100 away from the detection surface 110, and the heating assembly 200 is also used to provide the contrast surface 120 Heat source;
  • the temperature collection assembly 300 also includes several second detection parts 320 located on the comparison surface 120 , and the second detection parts 320 are used to collect temperature information on the side of the detection body 100 facing the comparison surface 120 .
  • the detection surface 110 of the detection body 100 is used to detect the location of the leak
  • the contrast surface 120 of the detection body 100 is used to detect whether there is airflow in other positions in the same environment. If there is a leak at the detected position, an airflow will be generated at the position, and the airflow will take away the heat of the air, causing the temperature information collected by the first detection part 310 to change. As the contrast surface 120, there is no airflow, so the temperature collected by the second detection part 320 The information does not change, so there is a difference between the detection surface 110 and the comparison surface 120, thereby detecting the position of the leakage point.
  • the detection body 100 is a panel structure, such as a circular panel as shown in FIG. 1 .
  • Two surfaces of the panel of the hand-held leak detector simultaneously detect the surrounding airflow, one is the detection surface 110 and the other is the comparison surface 120 .
  • the results measured by the first detection portion 310 of the detection surface 110 and the second detection portion 320 of the comparison surface 120 are different, it can also be determined that there is a leak at the detection position, and the judgment result is more accurate, reducing the air environment. destabilizing effects.
  • the main function of the first detection part 310 and the second detection part 320 is to collect the temperature information of the air, so any structure that can realize the above functions can be called the first detection part 310 in this embodiment. and the second detection part 320, such as a thermistor or an infrared probe or a sensitive thermometer.
  • the first detection part 310 and/or the second detection part 320 includes a thermistor and a circuit component electrically connected to the thermistor.
  • the first detection part 310 and/or the second detection part 320 includes a thermistor and the circuit components electrically connected with the thermistor include at least the following methods:
  • the first detection part 310 includes a thermistor and a circuit component electrically connected to the thermistor, and the second detection part 320 has other structures;
  • the second detection part 320 includes a thermistor and a circuit component electrically connected to the thermistor, and the first detection part 310 has other structures;
  • both the first detection part 310 and the second detection part 320 include a thermistor and a circuit component electrically connected to the thermistor.
  • the thermistor will change the resistance value according to the temperature change, thus causing the current change.
  • the detection body 100 with a circular panel structure is heated by the heating element 200 to increase the temperature of the surrounding air, and the thermistor forms a certain resistance due to the temperature of the air at this time, and generates a corresponding current value.
  • the detection surface 110 and the comparison surface 120 of the detection body 100 are simultaneously detecting the surrounding airflow.
  • the current value of the detection surface 110 and the comparison surface 120 are different, it can also be determined that there is a leak at the detection position, and use The judgment result is more accurate.
  • the first detection part 310 and the second detection part 320 adopt the same structure, which improves the contrast reliability between the detection surface 110 and the contrast surface 120, and then Improve the accuracy of detection results.
  • Both the first detection part 310 and the second detection part 320 adopt a thermistor structure.
  • the detection principle of the hand-held leak detector is: the heating component 200 heats the surrounding air, and the thermistor generates a corresponding resistance value due to the air temperature, thereby A corresponding stable current is formed; when there is airflow around, the heat of the air is taken away, the temperature of the surrounding air drops, the resistance of the thermistor changes, and the current changes, and the data of the current change is collected and analyzed in real time, according to the detection surface 110 The detection result is obtained by analyzing and comparing with the data of the comparison surface 120 .
  • the heating assembly 200 includes several first heaters 210 and several second heaters 220, the first heaters 210 divide the detection surface 110 into multiple detection areas; 120 is divided into multiple comparison areas, and the comparison areas correspond to the detection areas one by one.
  • the first heater 210 and/or the second heater 220 can specifically be a strip or strip structure, and the first heater 210 and the second heater 220 can be the same structure, also can be different structures, the first heater 210 separates the detection surface 110 into multiple detection areas; the second heater 220 separates the contrast surface 120 into multiple contrast areas, in order to improve the detection
  • the comparison reliability between the surface 110 and the comparison surface 120, the comparison area corresponds to the detection area one by one, thereby ensuring that the air temperature on the side of the detection surface 110 is consistent with the air temperature on the side of the comparison surface 120, when the detection surface 110 When there is a leakage point on one side, the air temperature change on the side of the detection surface 110 is significantly different from that on the side of the comparison surface 120 .
  • multiple detection areas are evenly distributed on the detection surface 110 .
  • multiple detection areas are evenly distributed on the detection surface 110, that is, the first heater 210 can uniform the temperature of the entire detection surface 110, so that the temperature of the air on one side of the detection surface 110 Homogenization for easy detection.
  • the contrast area corresponding to the detection area one by one is evenly distributed on the contrast surface 120, that is, the second heater 220 can uniformize the temperature of the entire contrast surface 120, thereby making the temperature of the air on one side of the contrast surface 120 uniform, which is convenient Compared.
  • the first detection part 310 is set corresponding to the detection area; the second detection part 320 is set corresponding to the comparison area.
  • the first detection part 310 is set corresponding to the detection area, specifically including: there is a detection area corresponding to each first detection part 310, that is, the first detection part 310 and the detection area are one-to-many Correspondence: there is a first detection part 310 corresponding to each detection area, that is, a many-to-one correspondence between the first detection part 310 and the detection area; the first detection part 310 is in one-to-one correspondence with the detection areas.
  • the second detection part 320 is set corresponding to the comparison area, specifically including: there is a comparison area corresponding to each second detection part 320, that is, the second detection part 320 and the comparison area are one-to-many correspondence; The second detection part 320 corresponding to each comparison area, that is, the second detection part 320 has a many-to-one correspondence relationship with the comparison area; the first detection part 310 has a one-to-one correspondence with the detection areas.
  • the first detection part 310 is in one-to-one correspondence with the detection area
  • the second detection part 320 is in one-to-one correspondence with the comparison area, according to the temperature information collected by the first detection part 310 in each detection area Referring to the temperature information collected by the second detection part 320 in the corresponding comparison area, the specific location of the leak point can be quickly judged, which is convenient for detection; Move direction, improve detection efficiency and improve detection accuracy.
  • a plurality of first detection portions 310 are evenly distributed on the detection surface 110 , and the second detection portions 320 correspond to the first detection portions 310 one-to-one.
  • multiple first detection parts 310 are evenly distributed on the detection surface 110, and the acquisition range of multiple first detection parts 310 can better cover the entire detection surface 110, allowing faster and more accurate judgments.
  • the second detection part 320 has a one-to-one correspondence with the first detection part 310.
  • the acquisition range of the second detection part 320 can better cover the entire comparison surface 120, which is convenient for comparison with the temperature information collected by the first detection part 310. The influence of other parameters on the results is reduced, the contrast accuracy is improved, and the detection structure is more accurate.
  • a heat shield 130 is disposed between the comparison surface 120 and the detection surface 110 .
  • a heat shield 130 is provided between the comparison surface 120 and the detection surface 110 .
  • the second heater 220 used to heat the contrast surface 120 will not affect the temperature of the detection surface 110, therefore, Only the temperature information collected by the first detection part 310 of the detection surface 110 can be more accurate.
  • the handheld leak detector further includes a handle 500 and a connection mechanism 400 connecting the detection body 100 and the handle 500 , and the connection mechanism 400 is used to adjust the distance between the detection body 100 and the handle 500 .
  • the hand-held leak detector also includes a handle 500 and a connection mechanism 400 connecting the detection body 100 and the handle 500.
  • the handle 500 is used for holding the instrument, and the connection mechanism 400 can adjust the detection body 100 and the handle 500. Measuring the distance between the body 100 and the handle 500 facilitates the use of the leak detector in places that are difficult to detect.
  • connection mechanism 400 is to connect the detection body 100 and the handle 500, and to adjust the distance between the detection body 100 and the handle 500. Therefore, any structure that can realize the above functions can be called this
  • the connection mechanism 400 referred to in the embodiment is, for example, a foldable link, a telescopic rod, a flexible rod or a flexible tube, and the like.
  • connection mechanism 400 is a foldable link structure or a telescopic rod.
  • the connecting mechanism 400 is a foldable connecting rod structure, which can fold the connecting rod between the detection body 100 and the handle 500, so that it is not easy to use the leak detector. detection place.
  • the handheld leak detector further includes a data processing module 700 and a display 600 , and the display 600 is connected to the temperature acquisition component 300 through the data processing module 700 .
  • the data processing module 700 can control the working status of the first heater 210 and the second heater 220, that is, switch and heating. Temperature setting, etc., can also receive the air temperature information data collected by the first detection part 310 on the detection surface 110 side and the air temperature information data on the comparison surface 120 side collected by the second detection part 320, and then analyze and compare the data , get the detection result, and display the result and related data on the display.
  • the hand-held leak detector further includes an alarm 800 signal-connected to the data processing module 700 .
  • the data processing module 700 when the data processing module 700 analyzes that there is a leakage point, the data processing module 700 controls the alarm device 800 to give an alarm.
  • the alarm 800 may specifically be an audible and visual alarm 800 .
  • the chamber when detecting whether there is a leak in a certain position of the chamber (at A in Figure 6), the chamber is placed in a vacuum state through operation, and due to the difference in air pressure inside and outside the chamber, the leaking position will produce inward blowing. of airflow, place the hand-held leak detector at the location of the leak.
  • the first heater 210 on the detection surface 110 panel of the leak detector heats up, and the air around the detection surface 110 heats up, and the thermistor generates a corresponding resistance, thereby forming a current, but there is air flow at the leakage position, which will take away the heat, and the heat sensitive As the resistance value of the resistor changes, the current also changes accordingly.
  • the contrasting surface 120 also forms a current of the same principle, but because the contrasting surface 120 has no air flow, the current formed is different from that of the detecting surface 110 .
  • the current data of the detection surface 110 and the comparison surface 120 are compared and analyzed, so as to determine that there is leakage at this position. In addition, if there is no leakage at this position, there is no significant difference between the currents on the detection surface 110 and the comparison surface 120 , and it can be concluded that this position is not a leakage point.
  • the thermistor’s accuracy level should be high, the heating power of the heater should be constant, the overall structure of the leak detector should be light and easy to hold, and the data analysis system of the data processing module 700 can conduct real-time analysis to quickly obtain
  • the data system of the data processing module 700 must be accurate and be able to feed back information in a timely manner.
  • the data system needs to integrate a large amount of data to standardize the accuracy range of the judgment.
  • the embodiments of the present application may be provided as methods, systems, or computer program products. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.
  • computer-usable storage media including but not limited to disk storage, CD-ROM, optical storage, etc.
  • These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing apparatus to operate in a specific manner, such that the instructions stored in the computer-readable memory produce an article of manufacture comprising instruction means, the instructions
  • the device realizes the function specified in one or more procedures of the flowchart and/or one or more blocks of the block diagram.

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Abstract

一种手持式测漏仪，涉及检测领域，包括：侦测本体（100），其具有侦测面（110）；加热组件（200），其用于为侦测面（110）提供热源；温度采集组件（300），其包括位于侦测面（110）上的若干个第一探测部（310），第一探测部（310）用于采集侦测本体（100）朝向侦测面（110）一侧空气的温度信息。当把侦测本体（100）放在可能的泄漏位置，如存在泄漏，则泄漏位置会产生气流，气流带走侦测面（110）一侧的空气热量，使空气温度下降，温度采集组件（300）实时采集的空气温度会存在变化，从而依据温度采集组件采集的侦测本体（100）朝向侦测面（110）一侧空气的温度信息判断是否存在泄漏。

Description

一种手持式测漏仪
相关申请的交叉引用
本申请要求在2021年05月26日提交中国专利局、申请号为202110576206.9、申请名称为“一种手持式测漏仪”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及检测技术领域，特别涉及一种手持式测漏仪。
背景技术
现有测漏仪使用的是氦气测漏仪，体积较大，存在操作不方便、使用有隐患的现象。具体地，氦气测漏仪使用时，当氦气测漏仪达到真空时，连接同是真空的腔室，但若氦气测漏仪和腔室真空度不一样，会存在压力差，直接连接会存在瞬间压降，对仪器和腔室会有损害；氦气侧漏仪的体积过大，连通管及氦气枪的长度有限，所以导致机台的一些拐角及偏僻位置难以检测；氦气测漏仪使用周期长，内部会存在一些灰尘等物质，当与腔室连通时会将灰尘等传入腔室，造成腔室的污染。
因此，提供一种方便检测的测漏仪变得尤为重要。
发明内容
本申请公开了一种手持式测漏仪，结构简单，操作简便，便于携带的特点，同时能规避传统氦气测漏仪的安全隐患。
为达到上述目的，本申请提供以下技术方案：
一种手持式测漏仪，包括：
侦测本体，所述侦测本体具有侦测面；
加热组件，所述加热组件用于为所述侦测面提供热源；
温度采集组件，所述温度采集组件包括位于所述侦测面上的若干个第一探测部，所述第一探测部用于采集所述侦测本体朝向所述侦测面一侧空气的温度信息。
当处于真空的腔室存在泄漏点时，会在泄漏点产生气流，上述手持式测漏仪可以侦测相对稳定的空气环境的空气流动，故手持式测漏仪可以通过测出该位置存在气流，从而判断出该位置有泄漏点。可以理解的是，物体发热会使周围空气温度上升，空气流动会带走热量，造成空气温度下降。依据此原理，加热组件为侦测本体的侦测面提供热源，使侦测本体朝向侦测面一侧的空气温度上升，温度采集组件的若干个第一探测部可以采集侦测本体朝向侦测面一侧空气的温度信息，当把侦测本体放在可能的泄漏位置，即侦测面正对可能的泄漏位置，如存在泄漏，则泄漏位置会产生气流，气流带走侦测面一侧的空气热量，使空气温度下降，温度采集组件实时采集的空气温度会存在变化，从而依据温度采集组件采集的侦测本体朝向侦测面一侧空气的温度信息判断是否存在泄漏。该手持式测漏仪结构简单、小巧，可以检测到氦气测漏仪测不到的地方；并且在应用时对腔室无污染，没有压降的隐患，更安全；此外，该手持式测漏仪原理简明，操作简单，所以使用更方便，测漏更快速。
可选地，所述侦测本体还包括对比面，所述对比面位于所述侦测本体背离所述侦测面一侧，所述加热组件还用于为所述对比面提供热源；所述温度采集组件还包括位于所述对比面上的若干个第二探测部，所述第二探测部用于采集所述侦测本体朝向所述对比面一侧的温度信息。
可选地，所述第一探测部和/或所述第二探测部包括热敏电阻以及与所述热敏电阻电连接的电路组件。
可选地，所述加热组件包括若干个第一加热器以及若干个第二加热器，所述第一加热器将所述侦测面分隔为多个侦测区域；所述第二加热器将所述对比面分隔为多个对比区域，且所述对比区域与所述侦测区域一一对应。
可选地，多个所述侦测区域在所述侦测面均匀分布。
可选地，所述第一探测部与所述侦测区域对应设置；
所述第二探测部与所述对比区域对应设置。
可选地，多个所述第一探测部在所述侦测面均匀分布，且所述第二探测部与所述第一探测部一一对应。
可选地，所述对比面与所述侦测面之间设置有隔热板。
可选地，所述手持式测漏仪还包括手柄以及连接所述侦测本体和所述手柄的连接机构，且所述连接机构用于调节所述侦测本体与所述手柄之间的距离。
可选地，所述连接机构为可折叠的连杆结构或者伸缩杆。
可选地，所述手持式测漏仪还包括数据处理模块和显示器，所述显示器通过所述数据处理模块与所述温度采集组件信号连接。
可选地，所述手持式测漏仪还包括与所述数据处理模块信号连接的报警器。
附图说明
图1为本申请实施例提供的一种手持式测漏仪的侦测面的结构示意图；
图2为本申请实施例提供的另一种手持式测漏仪的结构示意图；
图3为图2中对比面的结构示意图；
图4为本申请实施例提供的一种手持式测漏仪的整体结构示意图；
图5为本申请实施例提供的一种手持式测漏仪的控制原理图；
图6为本申请实施例提供的一种手持式测漏仪的操作示意图。
图标：100-侦测本体；110-侦测面；120-对比面；130-隔热板；200-加热组件；210-第一加热器；220-第二加热器；300-温度采集组件；310-第一探测部；320-第二探测部；400-连接机构；500-手柄；600-显示器；700-数据处理模块；800-报警器。
具体实施方式
下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本申请一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本申请保护的范围。
如图1所示，本申请实施例提供了一种手持式测漏仪，包括：侦测本体100，侦测本体100具有侦测面110；加热组件200，加热组件200用于为侦测面110提供热源；温度采集组件300，温度采集组件300包括位于侦测面110上的若干个第一探测部310，第一探测部310用于采集侦测本体100朝向侦测面110一侧空气的温度信息。
当处于真空的腔室存在泄漏点时，会在泄漏点产生气流，上述手持式测漏仪可以侦测相对稳定的空气环境的空气流动，故手持式测漏仪可以通过测出该位置存在气流，从而判断出该位置有泄漏点。可以理解的是，物体发热会使周围空气温度上升，空气流动会带走热量，造成空气温度下降。依据此原理，加热组件200为侦测本体100的侦测面110提供热源，使侦测本体100朝向侦测面110一侧的空气温度上升，温度采集组件300的若干个第一探测部310可以采集侦测本体100朝向侦测面110一侧空气的温度信息，当把侦测本体100放在可能的泄漏位置，即侦测面110正对可能的泄漏位置，如存在泄漏，则泄漏位置会产生气流，气流带走侦测面110一侧的空气热量，使空气温度下降，温度采集组件300实时采集的空气温度会存在变化，从而依据温度采集组件300采集的侦测本体100朝向侦测面110一侧空气的温度信息判断是否存在泄漏。该手持式测漏仪结构简单、小巧，可以检测到氦气测漏仪测不到的地方；并且在应用时对腔室无污染，没有压降的隐患，更安全；此外，该手持式测漏仪原理简明，操作简单，所以使用更方便，测漏更快速。
可选地，如图2和图3所示，侦测本体100还包括对比面120，对比面120位于侦测本体100背离侦测面110一侧，加热组件200还用于为对比面120提供热源；温度采集组件300还包括位于对比面120上的若干个第二探测 部320，第二探测部320用于采集侦测本体100朝向对比面120一侧的温度信息。
需要说明的是，侦测本体100的侦测面110用于侦测泄漏位置，侦测本体100的对比面120用于检测相同环境的其它位置是否有气流，起对比作用，如果侦测面110侦测的位置有漏点，则该位置产生气流，气流带走空气热量，使第一探测部310采集的温度信息发生变化，作为对比面120，无气流，所以第二探测部320采集的温度信息不发生变化，这样侦测面110与对比面120存在差异，从而侦测出泄漏点位置。
一种可能实现的方式中，侦测本体100为面板结构，如图1中圆形面板。手持式测漏仪面板的两个面同时侦测周围气流，一个是侦测面110，一个是对比面120。当侦测面110的第一探测部310与对比面120的第二探测部320测得的结果有差异时，同样也可以判定侦测位置有泄漏，并且使判断结果更加准确，降低了空气环境不稳定的影响。
可以理解的是，第一探测部310和第二探测部320的主要作用均是采集空气的温度信息，故凡是能实现上述功能的结构均可称作本实施例所称的第一探测部310和第二探测部320，例如热敏电阻或者红外探头或者精敏的温度计等。
可选地，第一探测部310和/或第二探测部320包括热敏电阻以及与热敏电阻电连接的电路组件。
可以理解的是，第一探测部310和/或第二探测部320包括热敏电阻以及与热敏电阻电连接的电路组件至少包括以下几种方式：
方式一，第一探测部310包括热敏电阻以及与热敏电阻电连接的电路组件，第二探测部320为其它结构；
方式二，第二探测部320包括热敏电阻以及与热敏电阻电连接的电路组件，第一探测部310为其它结构；
方式三，第一探测部310和第二探测部320均包括热敏电阻以及与热敏电阻电连接的电路组件。
需要说明的是，热敏电阻会根据温度的变化而改变阻值，从而造成电流变化。在圆形面板结构的侦测本体100上利用加热组件200加热，使周围空气温度上升，热敏电阻因为此时空气的温度而形成一定的电阻，产生相对应的电流值。把侦测本体100放在可能的泄漏位置，如是有泄漏，则会产生气流，气流带走热量，使空气温度下降，造成面板热敏电阻阻值下降，使得与热敏电阻电连接的电路组件中电流变化，发生电流异常，通过数据分析出异常，从而来判断出是否泄漏。另外侦测本体100的侦测面110和对比面120两个面同时在侦测周围气流，当侦测面110与对比面120电流值差异时，同样也可以判定侦测位置有泄漏，并且使判断结果更加准确。
一种可能实现的方式中，继续参照图1和图3，第一探测部310和第二探测部320采用相同的结构，提高了侦测面110与对比面120之间的对比可靠性，进而提高侦测结果的准确性。第一探测部310与第二探测部320均采用热敏电阻结构，手持式测漏仪的检测原理为：加热组件200加热周围空气，同时热敏电阻因为空气温度而产生相应电阻阻值，从而形成相应的稳定电流；当周围有气流时，带走空气热量，周围空气温度下降，热敏电阻阻值发生变化，从而电流发生变化，将电流变化的数据实时收集与分析，依据侦测面110与对比面120的数据分析、对比，得出侦测结果。
可选地，加热组件200包括若干个第一加热器210以及若干个第二加热器220，第一加热器210将侦测面110分隔为多个侦测区域；第二加热器220将对比面120分隔为多个对比区域，且对比区域与侦测区域一一对应。
一种可能实现的方式中，继续参照图1和图3，第一加热器210和/或第二加热器220具体可以为条状或者带状结构，且第一加热器210和第二加热器220可以为相同结构，也可以为不同结构，第一加热器210将侦测面110分隔为多个侦测区域；第二加热器220将对比面120分隔为多个对比区域，为提高侦测面110与对比面120之间的对比可靠性，对比区域与侦测区域一一对应，从而保障侦测面110一侧的空气温度与对比面120一侧的空气温度一致，当侦测面110一侧存在泄漏点时，侦测面110一侧的空气温度变化与 对比面120一侧的空气温度变化对比明显。
可选地，多个侦测区域在侦测面110均匀分布。
一种可能实现的方式中，多个侦测区域在侦测面110均匀分布，即第一加热器210可将整个侦测面110的温度均匀化，从而使侦测面110一侧空气的温度均匀化，便于检测。同时，与侦测区域一一对应的对比区域在对比面120均匀分布，即第二加热器220可将整个对比面120的温度均匀化，从而使对比面120一侧空气的温度均匀化，便于对比。
可选地，第一探测部310与侦测区域对应设置；第二探测部320与对比区域对应设置。
可以理解的是，第一探测部310与侦测区域对应设置，具体包括：存在与每个第一探测部310对应的侦测区域，即第一探测部310与侦测区域是一对多的对应关系；存在与每个侦测区域对应的第一探测部310，即第一探测部310与侦测区域是多对一的对应关系；第一探测部310与侦测区域一一对应。同样地，第二探测部320与对比区域对应设置，具体包括：存在与每个第二探测部320对应的对比区域，即第二探测部320与对比区域是一对多的对应关系；存在与每个对比区域对应的第二探测部320，即第二探测部320与对比区域是多对一的对应关系；第一探测部310与侦测区域一一对应。
一种可能实现的方式中，第一探测部310与侦测区域一一对应，第二探测部320与对比区域一一对应，根据每个侦测区域内的第一探测部310采集的温度信息参照对应的对比区域内的第二探测部320采集的温度信息可以快速判断泄漏点的具体位置，便于检测；且当泄漏点的具体位置位于侦测面110边缘部位时能指导侦测本体100的移动方向，提高检测效率并提高检测的准确率。
可选地，多个第一探测部310在侦测面110均匀分布，且第二探测部320与第一探测部310一一对应。
一种可能实现的方式中，多个第一探测部310在侦测面110均匀分布，多个第一探测部310的采集范围能更好的覆盖整个侦测面110，更快且精准的 判断侧漏点的位置。第二探测部320与第一探测部310一一对应，同样地，第二探测部320的采集范围能更好的覆盖整个对比面120，便于与第一探测部310采集温度的信息进行对比，减少了其它参数对结果的影响，提高对比精确度，进而使检测结构更加精准。
可选地，对比面120与侦测面110之间设置有隔热板130。
需要说明的是，为避免对比面120与侦测面110之间的温度互相干扰，对比面120与侦测面110之间设置有隔热板130。特别是当侦测面110对应的位置存在泄漏点时，由于隔热板130的存在，用于给对比面120加热的第二加热器220不会对侦测面110的温度造成影响，因此，侦测面110第一探测部310采集的温度信息才能更精准。
可选地，手持式测漏仪还包括手柄500以及连接侦测本体100和手柄500的连接机构400，且连接机构400用于调节侦测本体100与手柄500之间的距离。
一种可能实现的方式中，如图4所示，手持式测漏仪还包括手柄500以及连接侦测本体100和手柄500的连接机构400，手柄500用于手持仪器，连接机构400能够调节侦测本体100与手柄500之间的距离，便于测漏仪用于比较不易侦测的地方。
需要说明的是，上述连接机构400的主要作用是连接侦测本体100和手柄500，以及调节侦测本体100与手柄500之间的距离，因此，凡是能实现上述功能的结构均可称作本实施例所称的连接机构400，例如可折叠连杆、伸缩杆、挠性杆或挠性管等。
可选地，连接机构400为可折叠的连杆结构或者伸缩杆。
一种可能实现的方式中，如图4所示，连接机构400为可折叠的连杆结构，可以使侦测本体100和手柄500之间的连接杆发生折叠，便于测漏仪用于比较不易侦测的地方。
可选地，手持式测漏仪还包括数据处理模块700和显示器600，显示器600通过数据处理模块700与温度采集组件300信号连接。
一种可能实现的方式中，如图5所示，数据处理模块700作为整个手持式测漏仪的数据处理中心，可以控制第一加热器210和第二加热器220的工作状态即开关以及加热温度的设置等，还可以接收第一探测部310采集侦测面110一侧的空气温度信息数据以及第二探测部320采集对比面120一侧的空气温度信息数据，再将数据进行分析、对比，得出侦测结果，并在显示屏显示结果和相关数据。
可选地，手持式测漏仪还包括与数据处理模块700信号连接的报警器800。
一种可能实现的方式中，继续参照图5，当数据处理模块700分析出存在泄漏点时，数据处理模块700控制报警器800报警。报警器800具体可以为声光报警器800。
如图6所示，当侦测腔室某一位置(如图6中A处)是否泄漏时，通过操作使腔室处于真空状态，由于腔室内外气压不同，泄漏的位置会产生向内吹的气流，将手持式测漏仪放在泄漏的位置。测漏仪的侦测面110面板上第一加热器210加热，侦测面110周围空气升温，热敏电阻产生相应的电阻，从而形成电流，但泄漏位置有气流，会带走热量，热敏电阻阻值发生变化，电流也相应变化。对比面120也会形成相同原理的电流，但因为对比面120无气流，所以形成的电流与侦测面110不同。将侦测面110与对比面120的电流数据进行对比、分析，从而得出该位置存在泄漏的判断。此外，如果该位置不存在泄漏，则侦测面110与对比面120的电流不存在明显差异，可得出该位置不是泄漏点的判断结果。
需要说明的是，为保证侦测精度，热敏电阻精度等级要高，加热器加热功率要恒定，测漏仪整体结构要轻便，便于手持，数据处理模块700的数据分析系统实时分析，快速得出判断结果，且数据处理模块700的数据系统要精准，能够及时反馈信息，数据系统需要整合大量数据，规范出判断的精度范围。
本领域内的技术人员应明白，本申请的实施例可提供为方法、系统、或计算机程序产品。因此，本申请可采用完全硬件实施例、完全软件实施例、 或结合软件和硬件方面的实施例的形式。而且，本申请可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质(包括但不限于磁盘存储器、CD-ROM、光学存储器等)上实施的计算机程序产品的形式。
本申请是参照根据本申请实施例的方法、设备(系统)、和计算机程序产品的流程图和/或方框图来描述的。应理解可由计算机程序指令实现流程图和/或方框图中的每一流程和/或方框、以及流程图和/或方框图中的流程和/或方框的结合。可提供这些计算机程序指令到通用计算机、专用计算机、嵌入式处理机或其他可编程数据处理设备的处理器以产生一个机器，使得通过计算机或其他可编程数据处理设备的处理器执行的指令产生用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的装置。
这些计算机程序指令也可存储在能引导计算机或其他可编程数据处理设备以特定方式工作的计算机可读存储器中，使得存储在该计算机可读存储器中的指令产生包括指令装置的制造品，该指令装置实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能。
这些计算机程序指令也可装载到计算机或其他可编程数据处理设备上，使得在计算机或其他可编程设备上执行一系列操作步骤以产生计算机实现的处理，从而在计算机或其他可编程设备上执行的指令提供用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的步骤。
尽管已描述了本申请的优选实施例，但本领域内的技术人员一旦得知了基本创造性概念，则可对这些实施例作出另外的变更和修改。所以，所附权利要求意欲解释为包括优选实施例以及落入本申请范围的所有变更和修改。
显然，本领域的技术人员可以对本申请实施例进行各种改动和变型而不脱离本申请实施例的精神和范围。这样，倘若本申请实施例的这些修改和变型属于本申请权利要求及其等同技术的范围之内，则本申请也意图包含这些改动和变型在内。

Claims (12)

  1. 一种手持式测漏仪，其中，包括：
    侦测本体，所述侦测本体具有侦测面；
    加热组件，所述加热组件用于为所述侦测面提供热源；
    温度采集组件，所述温度采集组件包括位于所述侦测面上的若干个第一探测部，所述第一探测部用于采集所述侦测本体朝向所述侦测面一侧空气的温度信息。
  2. 根据权利要求1所述的手持式测漏仪，其中，所述侦测本体还包括对比面，所述对比面位于所述侦测本体背离所述侦测面一侧，所述加热组件还用于为所述对比面提供热源；所述温度采集组件还包括位于所述对比面上的若干个第二探测部，所述第二探测部用于采集所述侦测本体朝向所述对比面一侧的温度信息。
  3. 根据权利要求2所述的手持式测漏仪，其中，所述第一探测部和/或所述第二探测部包括热敏电阻以及与所述热敏电阻电连接的电路组件。
  4. 根据权利要求2所述的手持式测漏仪，其中，所述加热组件包括若干个第一加热器以及若干个第二加热器，所述第一加热器将所述侦测面分隔为多个侦测区域；所述第二加热器将所述对比面分隔为多个对比区域，且所述对比区域与所述侦测区域一一对应。
  5. 根据权利要求4所述的手持式测漏仪，其中，多个所述侦测区域在所述侦测面均匀分布。
  6. 根据权利要求5所述的手持式测漏仪，其中，所述第一探测部与所述侦测区域对应设置；
    所述第二探测部与所述对比区域对应设置。
  7. 根据权利要求6所述的手持式测漏仪，其中，多个所述第一探测部在所述侦测面均匀分布，且所述第二探测部与所述第一探测部一一对应。
  8. 根据权利要求2所述的手持式测漏仪，其中，所述对比面与所述侦测 面之间设置有隔热板。
  9. 根据权利要求1-8中任一项所述的手持式测漏仪，其中，所述手持式测漏仪还包括手柄以及连接所述侦测本体和所述手柄的连接机构，且所述连接机构用于调节所述侦测本体与所述手柄之间的距离。
  10. 根据权利要求9所述的手持式测漏仪，其中，所述连接机构为可折叠的连杆结构或者伸缩杆。
  11. 根据权利要求1-8中任一项所述的手持式测漏仪，其中，所述手持式测漏仪还包括数据处理模块和显示器，所述显示器通过所述数据处理模块与所述温度采集组件信号连接。
  12. 根据权利要求11所述的手持式测漏仪，其中，所述手持式测漏仪还包括与所述数据处理模块信号连接的报警器。
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4818976A (en) * 1987-02-26 1989-04-04 Mine Safety Appliances Company Device for monitoring hydrocarbons in groundwater
CN102162765A (zh) * 2011-01-26 2011-08-24 南京航空航天大学 飞机高温高压导管中高温气体泄漏探测系统及方法
CN106153265A (zh) * 2016-06-20 2016-11-23 清华大学 一种手持式气体泄漏快速检测装置
CN208366939U (zh) * 2018-04-23 2019-01-11 北京宝德仪器有限公司 具有漏液检测功能的流动分析仪
CN211518416U (zh) * 2019-11-08 2020-09-18 广州市香港科大霍英东研究院 一种注塑机漏胶检测控制仪

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4818976A (en) * 1987-02-26 1989-04-04 Mine Safety Appliances Company Device for monitoring hydrocarbons in groundwater
CN102162765A (zh) * 2011-01-26 2011-08-24 南京航空航天大学 飞机高温高压导管中高温气体泄漏探测系统及方法
CN106153265A (zh) * 2016-06-20 2016-11-23 清华大学 一种手持式气体泄漏快速检测装置
CN208366939U (zh) * 2018-04-23 2019-01-11 北京宝德仪器有限公司 具有漏液检测功能的流动分析仪
CN211518416U (zh) * 2019-11-08 2020-09-18 广州市香港科大霍英东研究院 一种注塑机漏胶检测控制仪

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