WO2022231111A1 - Raman spectrometer for focus scanning and measurement method using raman spectrometer - Google Patents

Abstract

The present invention relates to a Raman spectrometer for focus scanning and a measurement method using the Raman spectrometer. The objective of the present invention is to provide a Raman spectrometer for focus scanning and a measurement method using the Raman spectrometer, which may obtain more accurate and reliable results only by adding a simple configuration within a range that does not adversely affect device miniaturization in a handheld small Raman spectrometer for measuring an object to be measured in the form of a SERS strip. More particularly, the objective of the present invention is to provide a Raman spectrometer for focus scanning and a measurement method using the Raman spectrometer, which significantly improve the reliability of measurement results by measuring Raman spectra at a plurality of stages of a focal plane, using the Raman spectra to obtain a representative spectrum such as a maximum value, and using the representative spectrum as data used for identification.

Description

Focus scanning Raman spectrometer and measuring method using the Raman spectrometer

The present invention relates to a focus scanning Raman spectrometer and a measuring method using the Raman spectrometer, and more particularly, to obtain more accurate and reliable results in a handheld small Raman spectrometer for measuring a measurement object in the form of a SERS strip. which relates to a focus scanning Raman spectrometer and a measurement method using the Raman spectrometer.

The Raman spectroscopy technique is an analysis technique that irradiates a laser onto a target sample and discriminates material components from a spectrum obtained therefrom. When a sample is irradiated with a laser, which is a monochromatic light source, light is scattered. Most of the scattered light is a signal corresponding to the wavelength of the laser, but some of the scattered light is a Raman shift (Raman shift) corresponding to the frequency of the vibration mode of the sample at the wavelength of the laser. ), there is a signal coming out. By analyzing this signal, information on the shape and symmetry of molecules or crystals can be obtained, and the degree of crystallization of a sample can be determined. This change in wavelength appears differently depending on the structural characteristics of the material and appears as a unique characteristic for each specific material, so the Raman spectrum is called the fingerprint of the material. In particular, recently, various Raman signal amplification techniques such as surface enhanced Raman scattering (SERS) have been actively studied, and the Raman spectroscopy technique is attracting attention as an excellent technique for discriminating ultrafine concentration components. 1 illustrates the principle of Raman spectroscopy and an example of Raman spectrum as an example.

2 shows the structure of a conventional basic Raman spectrometer. As shown, the basic Raman spectrometer irradiates the laser light output from the short-wavelength light source 110' to the specimen 500' through the objective lens 130', and the light scattered from the specimen 500'. Among them, only the component corresponding to the Raman shift is selected by the filter 140', and then the spectrum is obtained by the spectrometer 160'. In this case, a dichroic mirror or a dichroic beam splitter 120 ′ is used for splitting light by wavelength. In addition, a light receiving lens 150' is provided in front of the spectrometer 160' in order to smoothly enter the light into the spectrometer 160'.

Raman spectroscopy has been commercialized in various forms depending on the purpose of use and environment, and if we look at it broadly, it is a general microscope type for research and analysis used in a fixed state in laboratories, etc. It can be classified for field use.

As mentioned above, the Raman spectrometer for research and analysis is used in a stable and fully controllable environment such as a laboratory, and considering that the measurement results should be used for more in-depth analysis, it is designed for various functions and high performance. tends to happen. That is, an optical configuration such as using multiple filters is added, or a specimen stage, beam scanning mechanism, etc. are added so that a signal can be received from several points instead of only from one point of the specimen. Even if it becomes complicated, the focus tends to be on diversifying functions or improving performance. Of course, even if the overall device configuration of the Raman spectrometer for research and analysis becomes very complicated, it is natural that the structure of its core part is based on FIG. 2 .

In the case of on-site Raman spectroscopy, miniaturization is essential because the device itself must be portable and portable in the field. Accordingly, a laser light source also typically uses one wavelength, and additional components such as a specimen stage and a beam scanning mechanism are excluded. In fact, in the case of on-site Raman spectroscopy, the user holds the device by hand and approaches the device to the specimen to perform measurement. In the case of a field-use Raman spectrometer, it tends to have a simple and relatively low-spec configuration, and almost follows the configuration of FIG. 2 as it is.

On the other hand, the SERS technique briefly introduced above has a characteristic that can effectively amplify the Raman signal so that even a very low concentration signal can be detected. Accordingly, it is expected that by introducing SERS into a relatively low-spec Raman spectrometer, that is, a Raman spectrometer for the field, its utility can be further improved. That is, it is a method of detecting a Raman signal after preparing a SERS signal amplification reaction material in the form of a strip or a substrate in advance, applying a target sample to be tested on it and reacting it. As shown in FIG. 3 , the method of using a handheld Raman spectrometer together with the SERS substrate is spotlighted as a potential technology that can satisfy both portability and sensitivity.

A method of using a handheld type small Raman spectrometer and a SERS substrate together is briefly described as follows. First, the sample to be measured is coated on the surface of the SERS substrate, and the intensity of the Raman spectrum generated therefrom is read with a handheld type small Raman spectrometer to enable detection of the sample. In addition, the result to be determined can be derived through this. For example, if Raman spectrum signal intensity data for each concentration of a specific chemical component measured in advance is secured to obtain a reference value, the signal measured for the actual target sample is obtained from this. Concentrations can be calculated from the data. Furthermore, when the target sample is a hazardous substance, various applications can be made, such as determining whether the target sample is safe from the concentration value converted from the data value.

On the other hand, in the case of a handheld-type small Raman spectrometer, as described above, design for miniaturization and portability is prioritized over high functionality, and thus various functions are given up and the configuration is simplified as much as possible in many cases. Accordingly, performance limitations inevitably occur, and in some cases, a simple additional configuration is provided to solve such performance limitations. In the case of Korean Patent No. 1965803 ("Raman spectrometer with laser power regulator", March 29, 2019), in the process of miniaturizing the Raman spectrometer, the sensitivity of the spectrometer is inevitably lowered, so it is used by relatively increasing the intensity of the laser. In the process of measuring, in order to prevent damage to the sample by laser irradiation during measurement, a technique for adding a component capable of adjusting the laser output intensity is disclosed which is simple enough not to affect the miniaturization. In this way, even in small Raman spectrometers for handheld use, many efforts are being made to improve the performance limit by adding a simple but essential configuration.

In the case of the handheld Raman spectrometer and the SERS substrate utilization method as described above, the following performance limitations are pointed out. In the process of performing the detection in the above-described manner, it is necessary that all but the target sample be the same condition in order for the result to be reliable. In general, the optical device itself, which can be viewed as fixed hardware, can be regarded as the same condition if it operates normally, and the performance state of the SERS substrate itself can be assumed to be uniform if it is a mass-produced product. However, there is a high possibility that the focus position will be changed due to the application state of the sample, the difference in the flatness of the strip, and the thickness error of the slide glass. That is, when the intensity of the spectrum is weakened, it is difficult to determine whether this is because the concentration of the sample is lowered or whether the sample plane and the focal plane are separated due to the occurrence of a thickness error. There is a risk of being sensitively reflected in the results because the change in the focal position can directly affect the value.

In the case of the Raman spectrometer for research and analysis described above, in order to eliminate the risk of such an error, the measurement is performed after confirming that the substrate surface is in focus using an optical microscope image. However, it is cumbersome to repeat this process every time, and since a separate focusing device is not provided in the case of a handheld small Raman spectrometer, it is impossible to check if an error occurs in the initially designed focal length.

[Prior art literature]

[Patent Literature]

1. Korean Patent No. 1965803 ("Raman Spectrometer with Laser Power Regulator", 2019.03.29.)

Therefore, the present invention has been devised to solve the problems of the prior art as described above, and an object of the present invention is to have a negative effect on device miniaturization in a handheld small Raman spectrometer for measuring a measurement object in the form of a SERS strip. An object of the present invention is to provide a focus scanning Raman spectrometer and a measurement method using the Raman spectrometer that allow more accurate and reliable results to be obtained only by adding a simple configuration within a range not provided. More specifically, an object of the present invention is to measure the Raman spectrum in a focal plane of several stages, obtain a representative spectrum such as a maximum value by using it, and use it as data used for determination, so that the reliability of the measurement result An object of the present invention is to provide a focus scanning Raman spectrometer and a measurement method using the Raman spectrometer that greatly improves the

The focus scanning Raman spectrometer 100 of the present invention for achieving the above object includes: a light source 110 for irradiating laser light; a light splitter 120 formed to reflect the laser light irradiated from the light source 110 and make it incident toward the sample 500 or transmit the light scattered from the sample 500; an objective lens 130 for condensing the light scattered by the light splitter 120 and irradiating it to the sample 500; a filter 140 that filters and transmits a component corresponding to a Raman shift among the light scattered from the sample 500 and transmitted through the light splitter 120; a light receiving lens 150 for receiving the light transmitted through the filter 140; a spectrometer 160 that receives the light received by the light receiving lens 150 and measures a spectrum; an actuator 170 for adjusting the relative distance between the sample 500 and the objective lens 130 in a plurality of steps at predetermined equal intervals along the optical axis direction; may include.

At this time, the focus scanning Raman spectrometer 100 is a Raman spectrum generated in each of a plurality of focal planes formed as the actuator 170 adjusts the relative distance between the sample 500 and the objective lens 130 . Each of the signals may be acquired, but a Raman spectrum signal in a focal plane at which the signal intensity becomes a maximum value may be selected as a measurement value.

In addition, the focus scanning Raman spectrometer 100 is within the range of a plurality of focal planes formed as the actuator 170 adjusts the relative distance between the sample 500 and the objective lens 130. The sample ( 500) may be formed to be completely included.

In addition, the focus scanning Raman spectrometer 100 includes the light source 110 , the light splitter 120 , the objective lens 130 , the filter 140 , the light receiving lens 150 , and the spectrometer 160 . a module 180 that is integrally formed; a case 190 accommodating the module 180 and the actuator 170 and having a sample inlet 195 through which the sample 500 can be entered and exited on one side; may include.

At this time, the actuator 170 may be formed to move the module 180 in the optical axis direction.

Alternatively, the actuator 170 may be formed to move the sample 500 in the optical axis direction.

Alternatively, the actuator 170 may be formed to move the objective lens 130 in the optical axis direction.

Also, the focus scanning Raman spectrometer 100 may be a handheld type that a user can carry and use while moving.

In addition, the sample 500 may be applied on the SERS substrate or the base 550 in the form of a SERS strip.

Also, the actuator 170 may be implemented with at least one selected from a motorized stage, a piezoelectric actuator, and a voice coil motor (VCM).

Also, in the measuring method using the focus scanning Raman spectrometer of the present invention, in the measuring method using the focus scanning Raman spectrometer 100 configured as described above, the sample 500 is positioned below the objective lens 130 . a sample arrangement step to be arranged; The actuator 170 adjusts the relative distance between the sample 500 and the objective lens 130 in a plurality of steps at predetermined equal intervals along the optical axis direction, and occurs in each of a plurality of focal planes formed for each step. Step measuring step of obtaining each of the Raman spectrum signals; a signal determination step of selecting a Raman spectrum signal in a focal plane having a maximum signal intensity among Raman spectrum signals generated in each of a plurality of focal planes as a measurement value; may include.

According to the present invention, in a handheld Raman spectrometer, when measuring a measurement object in the form of a SERS strip, it is possible to obtain more accurate and reliable results by improving the conventional problem that the focus position could not be uniformly focused during each measurement. has a great effect. Specifically, in the present invention, the Raman spectrum in the focal plane of various stages is measured while changing the distance in the optical axis direction of the measuring device and the measurement target to a predetermined interval step by step during measurement, and the signal strength is maximized by using this. By determining the signal in the step as a representative value, there is an effect that data processing and calculation can be performed quickly. Of course, since only the data in the portion with the strongest signal strength is acquired, adverse effects such as noise can be reduced, and as a result, accuracy and reliability can be improved.

In particular, according to the present invention, since an actuator that enables only a predetermined step-by-step movement is used without requiring complicated operation and control such as automatic focusing for movement in the optical axis direction, the device volume, specifications, manufacturing cost, etc. are excessively There is no factor to increase. Therefore, when the present invention is applied to a small Raman spectrometer for a handheld that is aimed at low-spec miniaturization, it is economical and has a great effect of maximizing performance.

1 is an example of the principle of Raman spectroscopy and Raman spectrum.

Figure 2 is the structure of a conventional basic Raman spectrometer.

Figure 3 is a handheld small Raman spectrometer and an example of using a SERS substrate.

Figure 4 is an embodiment of the measurement process of the focus scanning Raman spectrometer of the present invention.

5 is an embodiment of the measurement result of the focus scanning Raman spectrometer of the present invention.

6 to 8 are structural embodiments of the focus scanning Raman spectrometer of the present invention.

** Explanation of symbols **

100: focus scanning Raman spectroscopy

110: light source 120: light splitter

130: objective lens 140: filter

150: light receiving lens 160: spectrometer

170: actuator 180: module

190: case 195: sample inlet

500: sample 550: base

Hereinafter, a focus scanning Raman spectrometer and a measuring method using the Raman spectrometer according to the present invention having the configuration as described above will be described in detail with reference to the accompanying drawings.

[1] Technical purpose and principle of focus scanning Raman spectrometer of the present invention

The conventional problems described above are briefly summarized as follows. The Raman spectrometer irradiates light on the surface of the sample and receives the scattered light from the sample to obtain a spectral signal. At this time, it can be considered that the measured result has sufficient reliability when all other conditions such as the optical device, the SERS performance state, and the focal position are the same in addition to the target sample. However, the optical device or SERS performance state can be regarded as the same condition in most cases. However, in the case of the focal position, there is considerable variation due to the sample coating state, the difference in the flatness of the strip, and the thickness error of the slide glass substrate. In the case of Raman spectrometers for research and analysis used in laboratories, etc., since high performance is pursued as much as possible without considering economic feasibility or volume. The problem does not have a significant adverse effect on the results. However, in the case of a small handheld Raman spectrometer used in the field, it is a high-performance device that operates precisely like an automatic focusing function because it seeks to be miniaturized and low-cost as much as possible in consideration of portability, convenience, and economic feasibility rather than performance. and control algorithms are difficult to be provided.

The present invention is a technology for improving the reliability of results measured by a handheld small Raman spectrometer without requiring a complicated device configuration such as automatic focusing in such a limited situation. In the present invention, the measurement is performed while adjusting the relative distance between the sample and the objective lens in a Raman spectrometer in a plurality of steps at predetermined equal intervals along the optical axis direction, and the maximum value is selected as the measurement value. solve it The principle of the present invention will be described in detail as follows.

4 shows an embodiment of the measurement process of the focus scanning Raman spectrometer of the present invention. As described above, it is preferable that the sample 500 is coated on the SERS substrate or the base 550 in the form of a SERS strip. Accordingly, as shown in FIG. 4 , the surface of the sample 500 has significant irregularities due to various factors such as a difference in flatness of the strip and an error in the thickness of the slide glass substrate. Therefore, when the focal position of the Raman spectrometer objective lens 130 is fixed at any one position, there is a high probability that the surface of the sample 500 is not in focus, and accordingly, the reliability of the result value of the measured Raman spectrum signal is quite high. will fall In addition, as described above, in the case of a handheld small Raman spectrometer, there is a limitation in terms of economic feasibility and the like to apply the automatic focusing function to focus on the sample surface by adjusting the focal position in the optical axis direction.

In the present invention, the relative distance between the sample 500 and the objective lens 130 is measured along the optical axis direction, instead of having a high-performance driving device and sensor for realizing precise optical axis movement necessary for the automatic focusing function. An actuator 170 (shown in FIGS. 6 to 8 hereinafter) that adjusts to a plurality of steps at predetermined equal intervals is used. As the actuator 170 adjusts the relative distance between the sample 500 and the objective lens 130 , a plurality of focal planes are formed as shown in FIG. 4 . 4 shows four focal planes formed at equal intervals in the optical axis direction. In the embodiment of FIG. 4 , an example in which the surface of the sample 500 is accurately focused on the focal plane 3 is shown.

In the present invention, Raman spectral signals generated in each of these plurality of focal planes are respectively acquired once. 5 shows an embodiment of the measurement result of the focus scanning Raman spectrometer of the present invention, and shows the measurement result of the Raman spectrum signal generated in each of the focal planes (1) to (4) of FIG. 4 in one graph, have. Theoretically, it is self-evident that the scattered Raman spectrum signal will come out the most when the surface of the sample 500 is well focused. Recalling that the surface of the sample 500 was accurately focused on the focal plane 3 in FIG. 4 , it is a very natural result that the signal strength of the result value measured on the focal plane 3 in FIG. 5 becomes the maximum value. to be.

Conversely, even if you don't know which stage of the focal plane actually focused on the sample surface, when all the signals generated from several focal planes are compared, the signal intensity is at the maximum value. or closest to exact). That is, if the Raman spectrum signal in the focal plane where the signal strength becomes the maximum value is selected as the measurement value, the measurement value in the state in which the focus is accurately (or closest to accuracy) is obtained, so the reliability of the result value is greatly improved. will be able to improve it.

That is, to summarize: In the present invention, in the case of a handheld small Raman spectrometer used in the field, it is difficult to provide high-performance parts that require precise operation such as an automatic focusing function due to various problems such as portability and economic feasibility, so that the focus is precisely on the sample surface. This is to solve the problem of decreasing the reliability of the result value that occurs in the process of performing measurement in a state where it is unknown.

At this time, in the present invention, it is not possible to check whether the sample surface is in focus, but all signals generated in each step are acquired while adjusting the relative distance between the sample and the objective lens at a predetermined equal interval. Among them, the Raman spectrum signal in the focal plane where the signal strength is the maximum is the measurement value in the state that the sample surface is in focus (or closest to accuracy). can be greatly improved.

The actuator 170 of the present invention used in this process does not need to implement the precise operation required for the automatic focusing function, but only moves at predetermined equal intervals. At this time, the movement range of the actuator 170 may be determined in advance in an appropriate range in consideration of the thickness of the sample 500 or the thickness of the SERS strip or substrate. Of course, since the focal plane formed while the actuator 170 moves must not meet the surface of the sample 500, more precisely, the actuator 170 is positioned between the sample 500 and the objective lens 130. It may be formed so that the sample 500 is completely included within the formation range of the plurality of focal planes formed by adjusting the relative distance. A relatively low-spec motorized stage, piezoelectric actuator, and VCM (Voice coil motor) can be easily utilized to implement movement with this level of precision, and parts of this level can be used to manufacture devices. It does not significantly affect cost or volume.

That is, if the principle of the present invention is used, the automatic focusing function that requires an expensive and precise operation is not applied, and a relatively low-cost and low-performance actuator only needs to be provided. also rarely occurs. Accordingly, ultimately, it is possible to dramatically improve the accuracy and reliability of the measurement values while maintaining the portability, convenience, and economical efficiency of the handheld small Raman spectrometer.

[2] Construction of the focus scanning Raman spectrometer of the present invention

6 to 8 show a configuration embodiment of the focus scanning Raman spectrometer of the present invention. In the focus scanning Raman spectrometer 100 of the present invention, the optical system itself for measuring the Raman spectrum signal follows the basic configuration of the Raman spectrometer shown in FIG. 2 as it is. That is, the focus scanning Raman spectrometer 100 is basically a light source 110 irradiating laser light, reflects the laser light irradiated from the light source 110 and makes it incident toward the sample 500 , or the sample 500 . ) a light splitter 120 that is formed to transmit the scattered light, an objective lens 130 that collects the light scattered from the light splitter 120 and irradiates it to the sample 500, the sample 500 A filter 140 that filters and transmits a component corresponding to a Raman shift among the light scattered from the light splitter 120 and transmitted through the light splitter 120, a light receiving lens 150 that receives the light transmitted through the filter 140, and a spectrometer 160 that receives the light received by the light receiving lens 150 and measures a spectrum.

At this time, as described above, the focus scanning Raman spectrometer 100 of the present invention adjusts the relative distance between the sample 500 and the objective lens 130 in a plurality of steps at predetermined equal intervals along the optical axis direction. An actuator 170 is provided for Depending on where the actuator 170 is actually provided, various exemplary configurations as shown in FIGS. 6 to 8 have come out.

FIG. 6 shows an embodiment of the actuator 170 applied to a more specific configuration in the case where the focus scanning Raman spectrometer 100 is a handheld compact Raman spectrometer.

In the case of a handheld small Raman spectrometer, in order to minimize the change in conditions of the optical system, the light source 110 , the light splitter 120 , the objective lens 130 , the filter 140 , and the light receiving lens 150 ) , the spectrometer 160 is integrally modularized. That is, the various parts described above are accommodated or supported in a certain container or frame. In this way, the above-mentioned respective parts are accommodated or supported in a certain container or frame, and the integrated body is called a module 180 .

The small-sized Raman spectrometer for handheld also includes a case 190 that protects the module 180 from the external environment and includes a handle so that a user can easily carry it and use it. That is, the case 190 basically serves to accommodate the module 180 and the actuator 170 . At this time, of course, the sample 500 enters and exits one side of the case 190 for a smooth measurement operation. Possible sample inlet 195 is formed.

In the embodiment of FIG. 6 , the actuator 170 is formed to move the module 180 in the optical axis direction. In the case of a small Raman spectrometer for handheld use, the module 180 and the case 190 are basically provided as shown in FIG. 6, so the configuration shown in FIG. 6 can be the most intuitively designed and implemented configuration have. However, there is a slight disadvantage that the performance of the actuator 170 should be higher as the target to which the actuator 170 should move becomes the entire module 180 .

In the embodiment of FIG. 7 , the actuator 170 is formed to move the sample 500 in the optical axis direction. In this case, since the sample 500 is substantially light in the form of a SERS strip or a substrate, the actuator 170 can be implemented as a device with a lower specification compared to the embodiment of FIG. 6 . However, in this case, since the sample 500 is not stably fixed, there is a concern that the possibility of error occurrence is slightly increased.

In the embodiment of FIG. 8 , the actuator 170 is formed to move the objective lens 130 in the optical axis direction. In this case, a condition must be added that the incident light to the objective lens 130 is configured to be a parallel light, but it is not necessary to move the entire module 180, so that the device specification can be further lowered, and the sample 500 It has the advantage of more firmly securing the positional stability of

[3] Measurement method using focus scanning Raman spectrometer of the present invention

The measurement method using the focus scanning Raman spectrometer 100 of the present invention will be described in stages as follows. The measuring method using the focus scanning Raman spectrometer 100 of the present invention includes a sample arrangement step, a step measurement step, and a signal determination step.

In the sample arrangement step, the sample 500 is disposed below the objective lens 130 . In an actual field, it would be an operation of pushing the SERS strip or substrate into the sample inlet 195 of the handheld small Raman spectrometer case 190 .

In the step measuring step, the actuator 170 adjusts the relative distance between the sample 500 and the objective lens 130 in a plurality of steps at predetermined equal intervals along the optical axis direction, and a plurality of steps formed at each step Raman spectral signals generated in each of the focal planes are respectively acquired. That is, as the actuator 170 implements the stepwise operation as shown in FIG. 4 , a plurality of Raman spectrum signals as shown in FIG. 5 are obtained.

In the signal determination step, a Raman spectrum signal in a focal plane having a maximum signal intensity among Raman spectrum signals generated in each of a plurality of focal planes is selected as a measurement value. As described above, since it is a well-known theoretical fact that the signal strength is the strongest when the sample 500 is precisely focused on the surface, the signal strength is the maximum value even if it is not known whether the focus is achieved. If is selected, the signal can be sufficiently regarded as a signal obtained when the focus is precisely or close to accurate. Accordingly, the reliability of the selected signal is improved.

The present invention is not limited to the above-described embodiments, and the scope of application is varied, and anyone with ordinary knowledge in the field to which the present invention pertains without departing from the gist of the present invention as claimed in the claims It goes without saying that various modifications are possible.

According to the present invention, in a handheld small Raman spectrometer for measuring a measurement object in the form of a SERS strip, more accurate and reliable results can be obtained just by adding a simple configuration within a range that does not adversely affect device miniaturization. It has a huge effect on making it happen. Accordingly, it is possible to improve overall work efficiency by enabling field workers to obtain more accurate Raman spectroscopy results using light and inexpensive portable equipment.

Claims (11)

1. a light source 110 for irradiating laser light;

   a light splitter 120 formed to reflect the laser light irradiated from the light source 110 and make it incident toward the sample 500 or transmit the light scattered from the sample 500;

   an objective lens 130 for condensing the light scattered by the light splitter 120 and irradiating it to the sample 500;

   a filter 140 that filters and transmits a component corresponding to a Raman shift among the light scattered from the sample 500 and transmitted through the light splitter 120;

   a light receiving lens 150 for receiving the light transmitted through the filter 140;

   a spectrometer 160 that receives the light received by the light receiving lens 150 and measures a spectrum;

   an actuator 170 for adjusting the relative distance between the sample 500 and the objective lens 130 in a plurality of steps at predetermined equal intervals along the optical axis direction;

   A focus scanning Raman spectrometer comprising a.
2. According to claim 1, wherein the focus scanning Raman spectrometer (100),

   Raman spectrum signals generated in each of a plurality of focal planes formed as the actuator 170 adjusts the relative distance between the sample 500 and the objective lens 130 are respectively acquired,

   A focus-scanning Raman spectrometer, characterized in that a Raman spectrum signal in a focal plane at which signal intensity becomes a maximum value is selected as a measurement value.
3. According to claim 1, wherein the focus scanning Raman spectrometer (100),

   The actuator 170 adjusts the relative distance between the sample 500 and the objective lens 130 so that the sample 500 is completely included within the forming range of a plurality of focal planes, characterized in that Focus scanning Raman spectroscopy.
4. According to claim 1, wherein the focus scanning Raman spectrometer (100),

   a module 180 in which the light source 110, the light splitter 120, the objective lens 130, the filter 140, the light receiving lens 150, and the spectrometer 160 are integrally formed;

   a case 190 accommodating the module 180 and the actuator 170 and having a sample inlet 195 through which the sample 500 can be entered and exited on one side;

   A focus scanning Raman spectrometer comprising a.
5. According to claim 4, wherein the actuator 170,

   Focus scanning Raman spectrometer, characterized in that it is formed to move the module (180) in the optical axis direction.
6. According to claim 1, wherein the actuator 170,

   Focus scanning Raman spectrometer, characterized in that it is formed to move the sample (500) in the optical axis direction.
7. According to claim 1, wherein the actuator 170,

   Focus scanning Raman spectrometer, characterized in that it is formed to move the objective lens (130) in the optical axis direction.
8. According to claim 4, wherein the focus scanning Raman spectrometer (100),

   A focus scanning Raman spectrometer, characterized in that it is for handheld use that can be carried and moved by a user.
9. According to claim 1, wherein the sample 500,

   Focus scanning Raman spectrometer, characterized in that it is applied on the SERS substrate or the base 550 in the form of a SERS strip.
10. According to claim 1, wherein the actuator 170,

    A focus scanning Raman spectrometer, characterized in that it is implemented with at least one selected from a motorized stage, a piezoelectric actuator, and a voice coil motor (VCM).
11. In the measuring method using the focus scanning Raman spectrometer 100 according to claim 1,

    a sample arrangement step in which the sample 500 is disposed under the objective lens 130;

    The actuator 170 adjusts the relative distance between the sample 500 and the objective lens 130 in a plurality of steps at predetermined equal intervals along the optical axis direction, and occurs in each of a plurality of focal planes formed for each step. Step measuring step of obtaining each of the Raman spectrum signals;

    a signal determination step of selecting a Raman spectrum signal in a focal plane having a maximum signal intensity among Raman spectrum signals generated in each of a plurality of focal planes as a measurement value;

    A measurement method using a focus scanning Raman spectrometer, comprising:

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