WO2022230279A1 - Dispositif de capture d'image - Google Patents

Dispositif de capture d'image Download PDF

Info

Publication number
WO2022230279A1
WO2022230279A1 PCT/JP2022/003861 JP2022003861W WO2022230279A1 WO 2022230279 A1 WO2022230279 A1 WO 2022230279A1 JP 2022003861 W JP2022003861 W JP 2022003861W WO 2022230279 A1 WO2022230279 A1 WO 2022230279A1
Authority
WO
WIPO (PCT)
Prior art keywords
voltage
transistor
circuit
pixel
switch
Prior art date
Application number
PCT/JP2022/003861
Other languages
English (en)
Japanese (ja)
Inventor
啓悟 中澤
Original Assignee
ソニーセミコンダクタソリューションズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ソニーセミコンダクタソリューションズ株式会社 filed Critical ソニーセミコンダクタソリューションズ株式会社
Publication of WO2022230279A1 publication Critical patent/WO2022230279A1/fr

Links

Images

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/60Noise processing, e.g. detecting, correcting, reducing or removing noise
    • H04N25/62Detection or reduction of noise due to excess charges produced by the exposure, e.g. smear, blooming, ghost image, crosstalk or leakage between pixels
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith

Definitions

  • the present disclosure relates to an imaging device that captures an image of a subject.
  • Japanese Patent Laid-Open No. 2002-200002 discloses a technique for suppressing such blackening at high luminance by clipping the voltage of a vertical signal line in an imaging device in which a plurality of pixels are connected to the vertical signal line.
  • some imaging devices perform AD (Analog to Digital) conversion on each of a plurality of pixels. Also in such an imaging device, it is desired to suppress degradation of image quality by suppressing blackening at high brightness.
  • AD Analog to Digital
  • An imaging device includes a pixel circuit.
  • the pixel circuit has a first light receiving element, a first storage section, a first transfer switch, a voltage limiting circuit, and a comparing circuit.
  • the first light receiving element generates an electric charge according to the amount of light received.
  • the first accumulation section is configured to be capable of accumulating charges generated by the first light receiving element.
  • the first transfer switch is configured to be able to connect the first light receiving element and the first storage unit when turned on.
  • the voltage limiting circuit is configured to be capable of generating a pixel signal corresponding to the voltage accumulated in the first accumulation unit and limiting the voltage of the pixel signal so as not to exceed the limit voltage.
  • the comparison circuit is configured to be able to compare a reference signal having a ramp waveform and a pixel signal.
  • the first light receiving element generates an electric charge corresponding to the amount of light received, and the first transfer switch is turned on, whereby the electric charge generated by the first light receiving element is The charged charges are transferred to the first storage unit and stored in the first storage unit.
  • the voltage limiting circuit generates a pixel signal corresponding to the accumulated voltage in the first accumulation section. The voltage of this pixel signal is limited by this voltage limiting circuit so as not to exceed the limit voltage.
  • a comparison circuit then compares the reference signal having a ramp waveform with this pixel signal.
  • FIG. 1 is a block diagram showing a configuration example of an imaging device according to an embodiment of the present disclosure
  • FIG. FIG. 2 is a schematic diagram showing an implementation example of the imaging device shown in FIG. 1
  • FIG. 2 is an explanatory diagram showing one configuration example of a cluster shown in FIG. 1
  • 2 is a circuit diagram showing a configuration example of a pixel circuit corresponding to the pixel shown in FIG. 1
  • FIG. 5 is a circuit diagram showing a configuration example of a voltage limiting circuit shown in FIG. 4
  • FIG. 5 is a timing waveform diagram showing an operation example of the pixel circuit shown in FIG. 4
  • FIG. 5 is a timing waveform diagram showing another operation example of the pixel circuit shown in FIG. 4
  • FIG. 11 is a circuit diagram showing a configuration example of a light receiving circuit according to another modified example;
  • FIG. 11 is a circuit diagram showing a configuration example of a light receiving circuit according to another modified example;
  • FIG. 11 is a circuit diagram showing a configuration example of a voltage limiting circuit according to another modified example;
  • FIG. 11 is a circuit diagram showing a configuration example of a light receiving circuit according to another modified example;
  • FIG. 11 is a circuit diagram showing a configuration example of a pixel circuit according to another modified example; It is explanatory drawing showing the usage example of an imaging device.
  • 1 is a block diagram showing an example of a schematic configuration of a vehicle control system;
  • FIG. FIG. 4 is an explanatory diagram showing an example of an installation position of an imaging unit;
  • FIG. 1 shows a configuration example of an imaging device (imaging device 1) according to an embodiment.
  • the imaging device 1 includes a pixel array 11, a reference signal generator 12, a time code generator 13, a bias generator 14, a pixel driver 15, a signal processor 16, and a timing generator 17. there is The imaging device 1 is formed on two semiconductor substrates in this example.
  • FIG. 2 shows an implementation example of the imaging device 1.
  • FIG. The imaging device 1 is formed on two semiconductor substrates 101 and 102 in this example.
  • the semiconductor substrate 101 is arranged on the imaging surface S side of the imaging device 1
  • the semiconductor substrate 102 is arranged on the side opposite to the imaging surface S of the imaging device 1 .
  • Semiconductor substrates 101 and 102 are overlaid on each other.
  • the wiring of the semiconductor substrate 101 and the wiring of the semiconductor substrate 102 are connected by the wiring 103 .
  • metal bonding such as Cu--Cu can be used.
  • the pixel array 11 (Fig. 1) has a plurality of pixels P arranged in a matrix.
  • the pixel P has a photodiode PD, generates a pixel signal SIG1 corresponding to the amount of light received, and is configured to perform AD conversion based on this pixel signal SIG1.
  • a predetermined number of pixels P constitute one cluster CL.
  • each of the plurality of clusters CL in this example, four pixels P are arranged side by side in the horizontal direction and several tens of pixels P are arranged side by side in the vertical direction.
  • Such clusters CL are arranged vertically and horizontally in the pixel array 11 .
  • FIG. 3 shows a configuration example of the cluster CL.
  • the cluster CL has a plurality of pixel circuits 20 corresponding to a plurality of pixels P and repeaters 29 .
  • FIG. 4 shows a configuration example of the pixel circuit 20.
  • the pixel circuit 20 has a light receiving circuit 21 , a comparison circuit 22 and a latch 23 .
  • the light receiving circuit 21 is configured to generate a pixel signal SIG1 corresponding to the amount of light received.
  • the light receiving circuit 21 has a photodiode PD, transistors MN1 to MN4, a floating diffusion FD, and a voltage limiting circuit 30.
  • FIG. The transistors MN1 to MN4 are N-type MOS (Metal Oxide Semiconductor) transistors. As shown in FIG. 4, the photodiode PD, the transistors MN1 to MN4, and the floating diffusion FD are provided on the semiconductor substrate 101, and the voltage limiting circuit 30 is provided on the semiconductor substrate .
  • the photodiode PD is a photoelectric conversion element that generates an amount of charge corresponding to the amount of light received and accumulates it inside.
  • the photodiode PD has an anode grounded and a cathode connected to the sources of the transistors MN1 and MN2.
  • the gate of the transistor MN1 is supplied with the control signal OFG from the pixel driving section 15 (FIG. 1), the drain is supplied with the voltage VOFG, and the source is connected to the cathode of the photodiode PD and the source of the transistor MN2.
  • the gate of the transistor MN2 is supplied with a control signal TX from the pixel driving section 15 (FIG. 1), the source is connected to the cathode of the photodiode PD and the source of the transistor MN1, and the drain is connected to the floating diffusion FD and the source of the transistor MN3. and connected to the input terminal of the voltage limiting circuit 30 via the wiring 103 between the semiconductor substrates 101 and 102 .
  • the floating diffusion FD is configured to accumulate charges transferred from the photodiode PD.
  • the floating diffusion FD is configured using a diffusion layer formed on the surface of the semiconductor substrate 101, for example. In FIG. 4, the floating diffusion FD is shown using a capacitor symbol.
  • the gate of the transistor MN3 is supplied with the control signal RST from the pixel driving section 15 (FIG. 1), the drain is connected to the drain of the transistor MN11 (described later) of the comparison circuit 22, and the source is connected to the floating diffusion FD and the drain of the transistor MN2. In addition to being connected, it is connected to the input terminal of the voltage limiting circuit 30 via the wiring 103 between the semiconductor substrates 101 and 102 .
  • the light receiving circuit 21 the charge accumulated in the photodiode PD is discharged by turning on the transistor MN1 based on the control signal OFG. Then, when the transistor MN1 is turned off, an exposure period is started, and an amount of charge corresponding to the amount of light received is accumulated in the photodiode PD. After the exposure period ends, the light receiving circuit 21 supplies the pixel signal SIG including the reset voltage and the pixel voltage to the voltage limiting circuit 30 . Specifically, the light receiving circuit 21 resets the voltage of the floating diffusion FD by turning on the transistor MN3, as will be described later.
  • the light receiving circuit 21 supplies the voltage (reset voltage) of the floating diffusion FD at that time to the voltage limiting circuit 30 in the P-phase (Pre-charge phase) period TP after the voltage of the floating diffusion FD is reset. Also, the light receiving circuit 21 transfers the charge from the photodiode PD to the floating diffusion FD by turning on the transistor MN2. Then, the light receiving circuit 21 supplies the voltage (pixel voltage) of the floating diffusion FD at that time to the voltage limiting circuit 30 in the D phase (Data phase) period TD after the charge is transferred.
  • the voltage limiting circuit 30 is configured to generate a pixel signal SIG1 corresponding to the pixel signal SIG and limit the pixel signal SIG1 so as not to exceed the limit voltage.
  • the voltage limiting circuit 30 supplies the generated pixel signal SIG1 to the gate of the transistor MN11 (described later) of the comparator circuit 22 via the wiring 103 between the semiconductor substrates 101 and 102. FIG. This voltage limiting circuit 30 will be described later.
  • the gate of the transistor MN4 is supplied with the control signal RST from the pixel driving section 15 (FIG. 1), the drain is connected to the drain of the transistor MN11 (described later) of the comparison circuit 22, and the source is connected to the gate of the transistor MN11 of the comparison circuit 22. In addition to being connected, it is connected to the output terminal of the voltage limiting circuit 30 via the wiring 103 between the semiconductor substrates 101 and 102 .
  • the comparison circuit 22 (FIGS. 3 and 4) is configured to generate the signal CMP by comparing the voltage of the reference signal REF and the voltage of the pixel signal SIG1.
  • the comparison circuit 22 sets the signal CMP to high level when the voltage of the reference signal REF is higher than the voltage of the pixel signal SIG, and sets the signal CMP to low level when the voltage of the reference signal REF is lower than the voltage of the pixel signal SIG.
  • the comparison circuit 22 has transistors MN11 to MN13, MP14 and MP15, and an amplifier AMP.
  • the transistors MN11 to MN13 are N-type MOS transistors, and the transistors MP14 and MP15 are P-type MOS transistors. As shown in FIG. 4, the transistors MN11 to MN13 are provided on the semiconductor substrate 101, and the transistors MP14 and MP15 are provided on the semiconductor substrate .
  • the pixel signal SIG1 is supplied to the gate of the transistor MN11, the drain is connected to the drains of the transistors MN3 and MN4 in the light receiving circuit 21, and the drain of the transistor MP14 and the amplifier AMP are connected via the wiring 103 between the semiconductor substrates 101 and 102. and its source is connected to the source of transistor MN12 and the drain of transistor MN13.
  • the gate of the transistor MN12 is supplied with the reference signal REF from the reference signal generator 12 through the wiring 103 between the semiconductor substrates 101 and 102, and the drain of the transistor MN12 is supplied through the wiring 103 between the semiconductor substrates 101 and 102 to the drain of the transistor MP15. and the gates of transistors MP14 and MP15, and the source is connected to the source of transistor MN11 and the drain of transistor MN13.
  • the reference signal REF is a signal having a so-called ramp waveform in which the voltage level gradually changes over time in the P-phase period TP and the D-phase period TD.
  • a bias voltage Vb is supplied from the bias generator 14 (FIG.
  • Transistors MN11 and MN12 form a differential pair, and transistor MN13 forms a constant current source.
  • the gate of the transistor MP14 is connected to the gate and drain of the transistor MP15, and is also connected to the drain of the transistor MN12 through the wiring 103 between the semiconductor substrates 101 and 102.
  • the source is supplied with the power supply voltage VDD, and the drain is connected to the amplifier AMP. , and is connected to the drain of the transistor MN11 and the drains of the transistors MN3 and MN4 in the light receiving circuit 21 through the wiring 103 between the semiconductor substrates 101 and 102.
  • the gate of the transistor MP15 is connected to the gate of the transistor MP14 and the drain of the transistor MP15, and is also connected to the drain of the transistor MN12 via the wiring 103 between the semiconductor substrates 101 and 102. is connected to the gates of the transistors MP14 and MP15 and to the drain of the transistor MN12 through the wiring 103 between the semiconductor substrates 101 and 102.
  • Transistors MP14 and MP15 constitute active loads for transistors MN11 and MN12.
  • the comparison circuit 22 generates the signal CMP by comparing the voltage of the reference signal REF and the voltage of the pixel signal SIG1.
  • the latch 23 (FIGS. 3 and 4) is configured to latch the time code TC, which is supplied from the repeater 29 and changes with time, based on the signal CMP.
  • the time code TC is a multi-bit code, and can use, for example, a Gray code.
  • Latch 23 is connected to repeater 29 via a bus line having a bit width of multiple bits. As will be described later, the latch 23 latches the time code TC at the transition timing of the signal CMP during the P-phase period TP, thereby determining the time (code value CP) from the start of the P-phase period TP to the transition timing.
  • the latch 23 acquires the time (code value CD) from the start of the D-phase period TD to the transition timing by latching the time code TC at the transition timing of the signal CMP during the D-phase period TD. .
  • the latch 23 then supplies these two code values CP and CD to the repeater 29 .
  • Latch 23 is located on semiconductor substrate 102 as shown in FIG.
  • the repeater 29 (FIGS. 3 and 4) supplies the time code TC supplied from the time code generator 13 to the latches 23 of the plurality of pixels P belonging to the cluster CL in the P-phase period TP and the D-phase period TD. configured to Also, the repeater 29 supplies the code values CP and CD supplied from these latches 23 to the signal processing section 16 after the P-phase period TP and the D-phase period TD are completed.
  • a repeater 29 is connected to these latches 23 via a bus line having a bit width of multiple bits. Repeater 29 is disposed on semiconductor substrate 102 as shown in FIG.
  • the reference signal generation section 12 (FIG. 1) is configured to generate the reference signal REF based on the instruction from the timing generation section 17 .
  • the reference signal REF has a so-called ramp waveform in which the voltage level gradually changes over time in the P-phase period TP and the D-phase period TD.
  • the reference signal generator 12 then supplies the generated reference signal REF to the plurality of pixel circuits 20 in the pixel array 11 .
  • the reference signal generator 12 is arranged on the semiconductor substrate 102 as shown in FIG.
  • the time code generator 13 is configured to generate the time code TC based on the instruction from the timing generator 17 .
  • the time code TC is a multi-bit code that changes with the passage of time, and can use, for example, a Gray code.
  • the time code generator 13 then supplies the generated time code TC to the repeaters 29 in a plurality of clusters CL.
  • the time code generator 13 is arranged, for example, on the semiconductor substrate 102 (FIG. 2).
  • the bias generator 14 is configured to generate various bias voltages and bias currents used in the imaging device 1 . Specifically, the bias generation unit 14 generates, for example, a bias voltage Vb and voltages V1 to V3 (described later), and supplies these voltages to the plurality of pixel circuits 20, respectively.
  • the pixel driving section 15 is configured to control operations of the plurality of pixel circuits 20 in the pixel array 11 . Specifically, the pixel drive unit 15 generates control signals OFG, TX, RST, and control signals CTL1 to CTL3 (described later), and supplies these control signals to the pixel circuit 20, thereby causing the pixel circuit 20 to operate. It is designed to control the action.
  • the pixel driving section 15 is arranged, for example, on the semiconductor substrate 102 (FIG. 2).
  • the signal processing unit 16 is configured to generate the image signal Spic by performing predetermined image processing based on the code values CP and CD generated by each of the plurality of pixel circuits 20 .
  • the predetermined image processing includes, for example, a process of generating a pixel value using the principle of correlated double sampling (CDS) based on two code values CP and CD, and a process of generating a black level for correcting the black level. Including correction processing.
  • the signal processing unit 16 is arranged, for example, on a semiconductor substrate 102 (FIG. 2).
  • the timing generation unit 17 generates various timing signals and supplies the generated various timing signals to the reference signal generation unit 12, the time code generation unit 13, the pixel drive unit 15, and the signal processing unit 16. 1 is configured to control the operation of The timing generator 17 is arranged, for example, on the semiconductor substrate 102 (FIG. 2).
  • FIG. 5 shows a configuration example of the voltage limiting circuit 30. As shown in FIG. In FIG. 5, not only the voltage limiting circuit 30 but also circuits around the voltage limiting circuit 30 are drawn.
  • the voltage limiting circuit 30 has transistors MN21 and MN22, a constant current source CUR, a switch SW1, a capacitor C1, and switches SW2 and SW3.
  • the transistors MN21 and MN22 are N-type MOS transistors.
  • the transistor MN21 has a gate connected to the input terminal IN of the voltage limiting circuit 30, a drain supplied with the power supply voltage VDD, and a source connected to the node N1.
  • the transistor MN22 has a gate connected to the node N2, a drain supplied with the power supply voltage VDD, and a source connected to the node N1.
  • the size of transistor MN21 and the size of transistor MN22 are equal to each other.
  • the gate width of the transistor MN21 and the gate width of the transistor MN22 are equal to each other, and the gate length of the transistor MN21 and the gate length of the transistor MN22 are equal to each other.
  • Transistor MN21 and transistor MN22 are arranged close to each other.
  • Node N1 is connected to output terminal OUT of voltage limiting circuit 30 .
  • the switch SW1 is configured to connect the node N1 and the node N2 to each other based on the control signal CTL1 supplied from the pixel driving section 15 (FIG. 1).
  • the switch SW1 is configured using, for example, one or more MOS transistors.
  • a first terminal of the capacitor C1 is connected to the node N2, and a second terminal is connected to the switch SW2.
  • the switch SW2 supplies one of the voltage V1 and the voltage V2 generated by the bias generating section 14 to the second terminal of the capacitor C1 based on the control signal CTL2 supplied from the pixel driving section 15 (FIG. 1). configured to In this example, voltage V1 is a higher voltage than voltage V2.
  • Switch SW2, in this example, provides voltage V1 to the second terminal of capacitor C1 when control signal CTL1 is high, and voltage V2 to capacitor C1 when control signal CTL1 is low. It feeds the second terminal of C1.
  • the switch SW3 is configured to supply the voltage V3 generated by the bias generating section 14 to the node N2 based on the control signal CTL3 supplied from the pixel driving section 15 (FIG. 1).
  • the voltage limiting circuit 30 when normal light enters the imaging device 1, the transistor MN21 and the constant current source CUR operate as a so-called source follower circuit. As a result, the voltage limiting circuit 30 outputs from the output terminal OUT a pixel signal SIG1 corresponding to the pixel signal SIG input to the input terminal IN. Further, for example, when strong light such as sunlight enters the imaging device 1 and the voltage in the floating diffusion FD (the voltage of the pixel signal SIG) becomes extremely low, the gate voltage of the transistor MN21 becomes lower than the gate voltage of In this case, transistor MN22 and constant current source CUR operate as a so-called source follower circuit.
  • the voltage limiting circuit 30 outputs the pixel signal SIG1 having a voltage (limiting voltage) corresponding to the gate voltage of the transistor MN22 from the output terminal OUT. That is, the voltage limiting circuit 30 can limit the voltage of the pixel signal SIG1 so as not to fall below the limit voltage even when the voltage of the pixel signal SIG input to the input terminal IN becomes low. As a result, the imaging apparatus 1 can suppress blackening at high brightness.
  • the pixel circuit 20 corresponds to a specific example of "pixel circuit” in the present disclosure.
  • the photodiode PD corresponds to a specific example of "first light receiving element” and “second light receiving element” in the present disclosure.
  • the floating diffusion FD corresponds to a specific example of the "first storage section” and the “second storage section” in the present disclosure.
  • the transistor MN2 corresponds to a specific example of "first transfer switch” and “second transfer switch” in the present disclosure.
  • the pixel signal SIG1 corresponds to a specific example of "pixel signal” in the present disclosure.
  • the voltage limiting circuit 30 corresponds to a specific example of “voltage limiting circuit” in the present disclosure.
  • the reference signal REF corresponds to a specific example of "reference signal” in the present disclosure.
  • the comparison circuit 22 corresponds to a specific example of the "comparison circuit” in the present disclosure.
  • the transistor MN21 corresponds to a specific example of "first transistor” in the present disclosure.
  • the transistor MN22 corresponds to a specific example of “second transistor” in the present disclosure.
  • the constant current source CUR corresponds to a specific example of "first current source” in the present disclosure.
  • the switch SW1 corresponds to a specific example of "first switch” in the present disclosure.
  • Capacitor C1 corresponds to a specific example of “capacitor” in the present disclosure.
  • the switch SW2 corresponds to a specific example of the "voltage setting circuit” in the present disclosure.
  • Voltage V1 corresponds to a specific example of "first voltage” in the present disclosure.
  • Voltage V2 corresponds to a specific example of "second voltage” in the present disclosure.
  • the transistor MN11 corresponds to a specific example of "fourth transistor” in the present disclosure.
  • the transistor MN12 corresponds to a specific example of the "fifth transistor” in the present disclosure.
  • the transistor MN13 corresponds to a specific example of "third current source” in the present disclosure.
  • the transistor MN3 corresponds to a specific example of "third switch” in the present disclosure.
  • the transistor MN4 corresponds to a specific example of "fourth switch” in the present disclosure.
  • the pixel drive section 15 corresponds to a specific example of the "control section” in the present disclosure.
  • the switch SW3 corresponds to a specific example of the "fifth switch” in the present disclosure.
  • the semiconductor substrate 101 corresponds to a specific example of "first substrate” in the present disclosure.
  • the semiconductor substrate 102 corresponds to a specific example of “second substrate” in the present disclosure.
  • the time code generator 13 corresponds to a specific example of the "time code generation circuit” in the present disclosure.
  • the latch 23 corresponds to a specific example of "latch circuit” in the present disclosure.
  • the reference signal generator 12 generates a reference signal REF.
  • the time code generator 13 generates a time code TC.
  • the repeater 29 supplies the timecode TC to the latches 23 of the pixels P belonging to the cluster CL.
  • the pixel drive section 15 controls operations of the plurality of pixel circuits 20 in the pixel array 11 .
  • Each of the plurality of pixel circuits 20 in the pixel array 11 generates a pixel signal SIG including a reset voltage and a pixel voltage, and generates a pixel signal SIG1 based on this pixel signal SIG.
  • each of the plurality of pixel circuits 20 generates code values CP and CD by performing AD conversion based on this pixel signal SIG1.
  • the repeater 29 supplies the code values CP and CD to the signal processor 16 .
  • the signal processing unit 16 generates an image signal Spic by performing predetermined image processing based on the code values CP and CD generated by each of the plurality of pixel circuits 20 .
  • the timing generation unit 17 generates various timing signals and supplies the generated various timing signals to the reference signal generation unit 12, the time code generation unit 13, the pixel drive unit 15, and the signal processing unit 16. 1 operation.
  • the charge accumulated in the photodiode PD is discharged by turning on the transistor MN1 based on the control signal OFG. Then, when the transistor MN1 is turned off, an exposure period is started, and an amount of charge corresponding to the amount of light received is accumulated in the photodiode PD. After the exposure period ends, the pixel circuit 20 generates a pixel signal SIG including a reset voltage and a pixel voltage, and generates a pixel signal SIG1 based on this pixel signal SIG. Then, the pixel circuit 20 performs AD conversion based on this pixel signal SIG1. Focusing on a certain pixel circuit 20, AD conversion in this pixel circuit 20 will be described in detail below.
  • FIG. 6 shows an operation example of AD conversion in the pixel circuit 20 when normal light is incident on the image pickup device 1.
  • A shows the waveform of the control signal RST
  • B shows the control signal RST.
  • C shows the waveform of the control signal CTL1
  • D shows the waveform of the control signal CTL2
  • E shows the waveform of the control signal CTL3
  • F shows the waveform of the pixel signal SIG.
  • G shows the waveform of the voltage VN2 at the node N2 of the voltage limiting circuit 30
  • H shows the waveform of the reference signal REF
  • I shows the waveform of the pixel signal SIG1
  • J indicates the waveform of the signal CMP.
  • the waveforms of the pixel signal SIG and the voltage VN2 are shown on the same voltage axis.
  • the waveforms of the reference signal REF and the pixel signal SIG1 are shown on the same voltage axis.
  • the reference signal generator 12 changes the voltage of the reference signal REF to the voltage Vx ((H) in FIG. 6).
  • the pixel driving section 15 changes the control signal RST from low level to high level ((A) in FIG. 6).
  • the transistors MN3 and MN4 are turned on.
  • the voltage of the floating diffusion FD (the voltage of the pixel signal SIG) is set to the voltage Vx ((F) in FIG. 6).
  • the voltage of the pixel signal SIG1 is set to the voltage Vx by turning on the transistor MN4 ((I) in FIG. 6). In this manner, both the gate voltage (the voltage of the pixel signal SIG) and the source voltage (the voltage of the pixel signal SIG1) of the transistor MN21 are set to the voltage Vx, so the transistor MN21 is in an off state.
  • the pixel driving section 15 changes the control signal CTL1 from low level to high level ((C) in FIG. 6).
  • the switch SW1 is turned on, and the node N1 and the node N2 are connected to each other. Since the voltage of the node N1 (the voltage of the pixel signal SIG1) is the voltage Vx, the voltage VN2 of the node N2 is set to the voltage Vx ((G) in FIG. 6).
  • the pixel driving section 15 changes the control signal CTL2 from low level to high level ((D) in FIG. 6). Accordingly, in the pixel circuit 20, the switch SW2 supplies the voltage V1 to the second terminal of the capacitor C1. Since the voltage VN2 at the first terminal of the capacitor C1 is the voltage Vx, the capacitor C1 is charged and a voltage difference (Vx-V1) is established between the first and second terminals of the capacitor C1.
  • the reference signal generator 12 changes the voltage of the reference signal REF to the voltage VA (FIG. 6(H)).
  • the pixel driving section 15 changes the control signal RST from high level to low level ((A) in FIG. 6).
  • the transistors MN3 and MN4 are turned off.
  • the floating diffusion FD becomes electrically floating.
  • the voltage of the floating diffusion FD (the voltage of the pixel signal SIG) is maintained at the voltage Vx ((F) in FIG. 6).
  • the constant current source CUR causes the current to flow from the node N1 toward the ground due to the transistor MN4 being turned off, the voltage of the node N1 (the voltage of the pixel signal SIG1) decreases ((I) in FIG. 6). .
  • the voltage VN2 of the node N2 also drops (FIG. 6(G)).
  • the source voltage of the transistor MN21 (the voltage of the pixel signal SIG1) becomes lower than the gate voltage of the transistor MN21 (the voltage of the pixel signal SIG) by a voltage ⁇ V21 due to the drop in the voltage of the node N1, the transistor MN21, the node N1, A current flows through the path of the constant current source CUR.
  • the voltage ⁇ V21 is a drop in the gate-source voltage Vgs of the transistor MN21, and is the sum of the threshold voltage Vth of the transistor MN21 and the so-called overdrive voltage Vov for operating the transistor MN21 in the saturation region ( Vth+Vov).
  • the transistor MN21 and the constant current source CUR operate as a so-called source follower.
  • the voltage limiting circuit 30 generates the pixel signal SIG1, which is lower than the pixel signal SIG by the voltage ⁇ V21, based on the input pixel signal SIG ((F), (I) in FIG. 6).
  • the voltage of the pixel signal SIG1 becomes "Vx- ⁇ V21" ((F) in FIG. 6).
  • the voltage VN2 of the node N2 also becomes "Vx- ⁇ V21" (FIG. 6(G)).
  • the pixel driving section 15 changes the control signal CTL1 from high level to low level (FIG. 6(C)).
  • the switch SW1 is turned off, and the node N1 and the node N2 are disconnected from each other.
  • the pixel driving section 15 changes the control signal CTL2 from high level to low level ((D) in FIG. 6).
  • the voltage VN2 at the node N2 becomes "Vx- ⁇ V21- ⁇ V" (FIG. 6(G)).
  • the pixel circuit 20 performs AD conversion based on the voltage of the pixel signal SIG1 corresponding to the voltage (reset voltage) of the pixel signal SIG. Specifically, at timing t14, the reference signal generator 12 starts to lower the voltage of the reference signal REF from the voltage VA by a predetermined degree of change ((H) in FIG. 6). Also, the time code generator 13 starts the increment operation of the time code TC at this timing t14. Repeater 29 supplies this time code TC to latch 23 . As a result, the latch 23 is supplied with the time code TC that changes with the passage of time.
  • the comparison circuit 22 changes the signal CMP from high level to low level (FIG. 6(J)).
  • the latch 23 latches the time code TC based on the transition of this signal CMP.
  • the code value CP of the time code TC latched by the latch 23 is a code value corresponding to the length of time between timings t14 and t15.
  • the code value CP is a code value corresponding to the voltage of the pixel signal SIG1 during the P-phase period TP.
  • the time code generator 13 ends the increment operation of the time code TC as the P-phase period TP ends.
  • the reference signal generator 12 stops changing the voltage of the reference signal REF and changes the voltage of the reference signal REF to the voltage VA ((H) in FIG. 6).
  • the voltage of the reference signal REF becomes higher than the voltage of the pixel signal SIG1 ((H), (I) in FIG. 6), and the comparison circuit 22 changes the signal CMP from low level to high level (( J)).
  • the pixel driving section 15 changes the control signal CTL3 from low level to high level ((E) in FIG. 6).
  • the switch SW3 is turned on, and the voltage VN2 of the node N2 is set to the voltage V3 ((G) in FIG. 6).
  • the pixel driving section 15 changes the control signal TX from low level to high level ((B) in FIG. 6).
  • the transistor MN2 is turned on, the charge generated in the photodiode PD is transferred to the floating diffusion FD, and the voltage of the floating diffusion FD (the voltage of the pixel signal SIG) changes according to the amount of received light. It becomes the pixel voltage (FIG. 6(F)).
  • the voltage of this pixel signal SIG is higher than the voltage VN2 at the node N2 ((F), (G) in FIG. 6).
  • the voltage limiting circuit 30 generates the pixel signal SIG1 that is lower than the pixel signal SIG by voltage ⁇ V21 ((I) in FIG. 6).
  • the pixel driving section 15 changes the control signal TX from high level to low level ((B) in FIG. 6). This turns off the transistor MN2.
  • the pixel circuit 20 performs AD conversion based on the voltage of the pixel signal SIG1 corresponding to the voltage of the pixel signal SIG (pixel voltage). Specifically, at timing t19, the reference signal generation unit 12 starts lowering the voltage of the reference signal REF from the voltage VA at a predetermined degree of change ((H) in FIG. 6). Also, the time code generator 13 starts the increment operation of the time code TC at this timing t19. Repeater 29 supplies this time code TC to latch 23 . As a result, the latch 23 is supplied with the time code TC that changes with the passage of time.
  • the comparison circuit 22 changes the signal CMP from high level to low level (FIG. 6(J)).
  • the latch 23 latches the time code TC based on the transition of this signal CMP.
  • the code value CD of the time code TC latched by the latch 23 is a code value corresponding to the length of time from timing t19 to t20.
  • the code value CD is a code value corresponding to the voltage of the pixel signal SIG1 during the D-phase period TD.
  • the time code generator 13 ends the increment operation of the time code TC as the D-phase period TD ends.
  • the reference signal generator 12 stops changing the voltage of the reference signal REF and changes it to the voltage VA ((H) in FIG. 6).
  • the voltage of the reference signal REF becomes higher than the voltage of the pixel signal SIG1 ((H), (I) in FIG. 6), and the comparison circuit 22 changes the signal CMP from low level to high level (( J)).
  • the plurality of pixel circuits 20 in the cluster CL sequentially supply the code values CP and CD to the repeater 29, and the repeater 29 sends these code values CP and CD to the signal processing unit 16. Sequential supply.
  • the signal processing unit 16 performs predetermined image processing based on the code values CP and CD generated by each of the plurality of pixel circuits 20 . For example, the signal processing unit 16 generates pixel values using the principle of correlated double sampling based on the code values CP and CD. Specifically, the signal processing unit 16 generates a pixel value by, for example, subtracting the code value CP from the code value CD. The signal processing unit 16 also performs black level correction processing for correcting the black level. Thus, the signal processing unit 16 generates the image signal Spic.
  • FIG. 7 shows an operation example of AD conversion in the pixel circuit 20 when strong light such as sunlight is incident on the imaging device 1 .
  • the reference signal generator 12 changes the voltage of the reference signal REF to the voltage Vx ((H) in FIG. 7).
  • the pixel driving section 15 changes the control signal RST from low level to high level ((A) in FIG. 7).
  • the transistors MN3 and MN4 are turned on.
  • the voltage of the floating diffusion FD (the voltage of the pixel signal SIG) is set to the voltage Vx ((F) in FIG. 7).
  • the voltage of the pixel signal SIG1 is set to the voltage Vx by turning on the transistor MN4 ((I) in FIG. 7). In this manner, both the gate voltage (the voltage of the pixel signal SIG) and the source voltage (the voltage of the pixel signal SIG1) of the transistor MN21 are set to the voltage Vx, so the transistor MN21 is in an off state.
  • the pixel driving section 15 changes the control signal CTL1 from low level to high level (FIG. 7(C)).
  • the switch SW1 is turned on, and the node N1 and the node N2 are connected to each other. Since the voltage of the node N1 (the voltage of the pixel signal SIG1) is the voltage Vx, the voltage VN2 of the node N2 is set to the voltage Vx ((G) in FIG. 7).
  • the pixel driving section 15 changes the control signal CTL2 from low level to high level ((D) in FIG. 7). Accordingly, in the pixel circuit 20, the switch SW2 supplies the voltage V1 to the second terminal of the capacitor C1. Since the voltage VN2 at the first terminal of the capacitor C1 is the voltage Vx, the capacitor C1 is charged and a voltage difference (Vx-V1) is established between the first and second terminals of the capacitor C1.
  • the reference signal generator 12 changes the voltage of the reference signal REF to the voltage VA ((H) in FIG. 7).
  • the pixel driving section 15 changes the control signal RST from high level to low level ((A) in FIG. 7).
  • the transistors MN3 and MN4 are turned off.
  • the floating diffusion FD becomes electrically floating.
  • strong light such as sunlight is incident on the imaging device 1, from the photodiodes PD of the plurality of pixel circuits 20 including the pixel circuit 20 of interest to the floating diffusion FD of the pixel circuit 20 of interest. Electrons leak.
  • the voltage of the floating diffusion FD (the voltage of the pixel signal SIG) gradually decreases ((F) in FIG. 7).
  • the constant current source CUR causes the current to flow from the node N1 toward the ground by turning off the transistor MN4, the voltage of the node N1 (the voltage of the pixel signal SIG1) decreases ((I) in FIG. 7). . Since the nodes N1 and N2 are connected to each other via the switch SW1, the voltage VN2 of the node N2 also drops (FIG. 7(G)).
  • the voltage limiting circuit 30 When the source voltage of the transistor MN21 (the voltage of the pixel signal SIG1) becomes lower than the gate voltage of the transistor MN21 (the voltage of the pixel signal SIG) by a voltage ⁇ V21 due to the drop in the voltage of the node N1, the voltage limiting circuit 30: A current flows through the path of the transistor MN21, the node N1, and the constant current source CUR. Thereby, the transistor MN21 and the constant current source CUR operate as a so-called source follower. In this manner, the voltage limiting circuit 30 generates the pixel signal SIG1, which is lower than the pixel signal SIG by the voltage ⁇ V21, based on the input pixel signal SIG ((I) in FIG. 7).
  • the voltage of the pixel signal SIG gradually decreases and becomes "Vx- ⁇ Vz" immediately before the timing t33 ((F) in FIG. 7).
  • the voltage ⁇ Vz is the voltage drop caused by electron leakage to the floating diffusion FD. Therefore, since the voltage of the pixel signal SIG1 is lower than the voltage of the pixel signal SIG by the voltage ⁇ V21, it becomes “Vx ⁇ V21 ⁇ Vz” (FIG. 7(I)). Similarly, the voltage VN2 of the node N2 becomes "Vx- ⁇ V21- ⁇ Vz" (FIG. 7(G)).
  • the pixel driving section 15 changes the control signal CTL1 from high level to low level ((C) in FIG. 7).
  • the switch SW1 is turned off, and the node N1 and the node N2 are disconnected from each other.
  • the pixel driving section 15 changes the control signal CTL2 from high level to low level ((D) in FIG. 7).
  • the voltage at the first terminal also increases by the voltage ⁇ V, since the voltage between the first and second terminals of capacitor C1 is maintained. descend.
  • the voltage VN2 at the node N2 becomes "Vx- ⁇ V21- ⁇ Vz- ⁇ V" (FIG. 7(G)).
  • the pixel signal SIG continues to drop ((F) in FIG. 7). Accordingly, the pixel signal SIG1 also continues to drop (FIG. 7(I)).
  • the pixel signal SIG falls below the voltage VN2 ((F), (G) in FIG. 7).
  • the voltage limiting circuit 30 generates the pixel signal SIG1 that is lower than the voltage VN2 of the node N2 by the voltage ⁇ V22 ((I) in FIG. 7).
  • the voltage ⁇ V22 is a drop in the gate-source voltage Vgs of the transistor MN22, and is the sum of the threshold voltage Vth of the transistor MN22 and the so-called overdrive voltage Vov for operating the transistor MN22 in the saturation region ( Vth+Vov).
  • the voltage of the pixel signal SIG1 becomes "Vx- ⁇ V21- ⁇ Vz- ⁇ V- ⁇ V22". That is, the voltage of the pixel signal SIG1 does not become a low voltage corresponding to the pixel signal SIG, but is limited to "Vx- ⁇ V21- ⁇ Vz- ⁇ V- ⁇ V22" (limit voltage).
  • the pixel circuit 20 performs AD conversion based on the voltage of the pixel signal SIG1. Specifically, at timing t35, the reference signal generation unit 12 starts lowering the voltage of the reference signal REF from the voltage VA at a predetermined degree of change ((H) in FIG. 7). Also, the time code generator 13 starts the increment operation of the time code TC at this timing t35. Repeater 29 supplies this time code TC to latch 23 . As a result, the latch 23 is supplied with the time code TC that changes with the passage of time.
  • the comparison circuit 22 changes the signal CMP from high level to low level (FIG. 7(J)).
  • the latch 23 latches the time code TC based on the transition of this signal CMP.
  • the code value CP of the time code TC latched by the latch 23 is a code value corresponding to the length of time between timings t35 and t36.
  • the code value CP is a code value corresponding to the voltage of the pixel signal SIG1 during the P-phase period TP.
  • the time code generator 13 ends the increment operation of the time code TC as the P-phase period TP ends.
  • the reference signal generator 12 stops changing the voltage of the reference signal REF and changes the voltage of the reference signal REF to the voltage VA ((H) in FIG. 7).
  • the voltage of the reference signal REF becomes higher than the voltage of the pixel signal SIG1 ((H) and (I) in FIG. 7), so the comparison circuit 22 changes the signal CMP from low level to high level (( J)).
  • the pixel driving section 15 changes the control signal CTL3 from low level to high level (FIG. 7(E)).
  • the switch SW3 is turned on, and the voltage VN2 of the node N2 is set to the voltage V3 ((G) in FIG. 7).
  • the pixel driving section 15 changes the control signal TX from low level to high level ((B) in FIG. 7).
  • the transistor MN2 is turned on, and charges generated in the photodiode PD are transferred to the floating diffusion FD.
  • the charge corresponding to the amount of received light is transferred from the photodiode PD of the pixel circuit 20 of interest to the floating diffusion FD.
  • the voltage of the floating diffusion FD (the voltage of the pixel signal SIG) is lowered ((F) in FIG. 7).
  • the voltage of this pixel signal SIG is lower than the voltage VN2 at the node N2 (FIGS. 7(F) and (G)). Therefore, in voltage limiting circuit 30, current continues to flow through the path of transistor MN22, node N1, and constant current source CUR, so transistor MN22 and constant current source CUR continue to operate as a so-called source follower. As a result, the voltage limiting circuit 30 generates the pixel signal SIG1 that is lower than the voltage VN2 of the node N2 by the voltage ⁇ V22 ((I) in FIG. 7). Thus, the voltage of the pixel signal SIG1 becomes "V3- ⁇ V22". That is, the voltage of the pixel signal SIG1 does not become a low voltage corresponding to the pixel signal SIG, but is limited to "V3- ⁇ V22" (limit voltage).
  • the pixel driving section 15 changes the control signal TX from high level to low level ((B) in FIG. 7). This turns off the transistor MN2.
  • the pixel circuit 20 performs AD conversion based on the voltage of the pixel signal SIG1. Specifically, at timing t40, the reference signal generator 12 starts to lower the voltage of the reference signal REF from the voltage VA by a predetermined degree of change ((H) in FIG. 7). Also, the time code generator 13 starts the increment operation of the time code TC at this timing t40. Repeater 29 supplies this time code TC to latch 23 . As a result, the latch 23 is supplied with the time code TC that changes with the passage of time.
  • the voltage of the pixel signal SIG1 is lower than the voltage range of the reference signal REF during the D-phase period TD (FIGS. 7(H) and (I)). Therefore, the voltage of the reference signal REF does not fall below the voltage of the pixel signal SIG1. Therefore, the signal CMP remains high level without transition ((J) in FIG. 7).
  • the latch 23 latches the time code TC, for example, at timing t41, which is the end timing of the D-phase period TD.
  • the code value CD of the time code TC latched by the latch 23 is a code value corresponding to the length of time between timings t40 and t41, and is the maximum possible code value.
  • the time code generator 13 ends the increment operation of the time code TC with the end of the D-phase period TD. Then, the reference signal generator 12 stops changing the voltage of the reference signal REF and changes it to the voltage VA ((H) in FIG. 7).
  • the plurality of pixel circuits 20 in the cluster CL sequentially supply the code values CP and CD to the repeater 29, and the repeater 29 sends these code values CP and CD to the signal processing unit 16. Sequential supply.
  • the signal processing unit 16 performs predetermined image processing based on the code values CP and CD generated by each of the plurality of pixel circuits 20 .
  • the code value CD is the maximum value, so the signal processing unit 16 can, for example, generate no pixel value.
  • the pixel circuit 20 includes the photodiode PD, the floating diffusion FD capable of accumulating the charge generated by the photodiode PD, and the photodiode PD and the floating diffusion FD when turned on.
  • a voltage limiting circuit 30 capable of generating a pixel signal SIG1 corresponding to the voltage in the floating diffusion FD and limiting the voltage of the pixel signal SIG1 so that it does not exceed the limit voltage, a reference signal REF and the pixel signal SIG1 are provided.
  • the voltage limiting circuit 30 includes, for example, a transistor MN21 having a gate connected to the floating diffusion FD, a transistor MN22 having a gate to which a voltage VN2 corresponding to the limiting voltage can be supplied, It may have a constant current source CUR connected to the sources of transistors MN21, MN22. Accordingly, in the pixel circuit 20, the reference signal REF is compared with the pixel signal SIG1 that is limited so as not to exceed the limit voltage. can be reduced. As a result, the imaging device 1 can suppress degradation in image quality at high brightness.
  • the voltage limiting circuit 30 is turned on so that the source of the first transistor (transistor MN21), the source of the second transistor (transistor MN2), and the second transistor (transistor MN22) are connected.
  • a switch SW1 connectable to the gate of a second transistor (transistor MN22); a capacitor C1 having a first terminal and a second terminal connected to the gate of a second transistor (transistor MN22); and a voltage setting circuit (switch SW2) that can change the .
  • the node N1 and the node N2 are connected to each other by turning on the switch SW1 during the period from timing t31 to t33, and the switch SW1 is turned off at timing t33.
  • the imaging device 1 can operate based on the voltage variation. It is possible to suppress the black subsidence.
  • the voltage of the pixel signal SIG which is the voltage of the floating diffusion FD
  • the voltage of the pixel signal SIG1 and the voltage VN2 of the node N2 may vary.
  • the imaging device 1 operates with such a voltage variation as a reference.
  • the voltage VN2 at the node N2 changes by a voltage ⁇ V with reference to the varied voltage.
  • the voltage limiting circuit 30 generates the pixel signal SIG1 based on the voltage of the pixel signal SIG and this voltage VN2.
  • the comparison circuit 22 generates the signal CMP by comparing the voltage of the reference signal REF and the voltage of the pixel signal SIG1. As a result, it is less likely to be affected by variations in these voltages, so it is possible to effectively suppress deterioration in image quality at high brightness.
  • the voltage limiting circuit 30 has a switch SW3 that can supply the voltage V3 to the gate of the second transistor (transistor MN22) when turned on.
  • the imaging device 1 can limit the voltage of the pixel signal SIG1 in, for example, the D-phase period TD to prevent it from becoming too low, thereby suppressing deterioration in image quality. That is, when the pixel signal SIG1 becomes too low, the pixel signal SIG1 causes a change in the power supply voltage and the ground voltage, and as a result, the pixel values in the plurality of pixel circuits 20 may change. As a result, so-called streaking, which is a deterioration in image quality, can occur.
  • the imaging device 1 by applying the voltage V3 to the gate of the transistor MN22 in the D-phase period TD, the voltage of the pixel signal SIG1 can be limited and prevented from becoming too low. As a result, in the imaging device 1, the influence on the power supply voltage and the ground voltage can be suppressed, so that deterioration of image quality at high brightness can be suppressed.
  • the pixel circuit includes a photodiode, a floating diffusion capable of accumulating charges generated by the photodiode, and a floating diffusion capable of connecting the photodiode and floating diffusion when turned on.
  • a voltage limiting circuit that can generate a pixel signal according to the voltage in the transistor and the floating diffusion FD, and can limit the voltage of the pixel signal so that the voltage of the pixel signal does not exceed the limit voltage, and the reference signal REF and the pixel signal SIG1 can be compared. Since the comparator circuit is provided, it is possible to suppress the deterioration of the image quality at the time of high brightness.
  • a switch that can connect the source of the first transistor, the source of the second transistor, and the gate of the second transistor and the gate of the second transistor are connected. and a voltage setting circuit capable of changing the voltage of the second terminal of the capacitor. can be suppressed.
  • a switch that can supply a voltage to the gate of the second transistor when turned on is provided, so deterioration in image quality at high luminance can be suppressed.
  • the switch SW2 switches the voltage supplied to the capacitor C1 from the voltage V1 to the voltage V2, but it is not limited to this.
  • the switch SW2 may switch the voltage supplied to the capacitor C1 from the voltage of the reference signal REF to the voltage V2.
  • the imaging device according to this modified example has a light receiving circuit 21A.
  • the light receiving circuit 21A has a voltage limiting circuit 30A.
  • the switch SW2 of the voltage limiting circuit 30A supplies one of the reference signal REF and the voltage V2 to the second terminal of the capacitor C1 based on the control signal CTL2 supplied from the pixel driving section 15 (FIG. 1). configured to In the example of FIG.
  • the switch SW2 supplies the voltage of the reference signal REF to the capacitor C1 during the period from timing t11 to t13.
  • the period of timings t11 to t13 is a part of the periods other than the period of the ramp waveform in the reference signal REF (the period of timings t14 to t16 and the period of timings t19 to t21).
  • the voltage of the reference signal REF is the voltage Vx or the voltage VA. For example, by setting the voltage V2 to a voltage lower than the voltage VA, it is possible to operate in the same manner as in the above embodiment.
  • the voltage VN2 at the first terminal of the capacitor C1 is near the voltage Vx. That is, the voltage difference across the capacitor C1 is sufficiently low during the period from timing t11 to t13. Therefore, in this modification, the charging time of the capacitor C1 can be shortened.
  • the size of the transistor MN21 and the size of the transistor MN22 are equal to each other in the above embodiment, the size of the transistor MN21 and the size of the transistor MN22 are not limited to this. may differ from each other in size.
  • the imaging device according to this modified example has a light receiving circuit 21B.
  • the light receiving circuit 21B has a voltage limiting circuit 30B.
  • the size of the transistor MN22 is made larger than the size of the transistor MN21.
  • the gate width of the transistor MN22 can be made larger than the gate width of the transistor MN21.
  • the voltage limiter circuit 30B can shorten the time until the voltage of the pixel signal SIG1 is set to the limit voltage based on the voltage VN2 of the node N2.
  • the size of the transistor MN22 is larger than the size of the transistor MN21, but instead of this, for example, the size of the transistor MN21 may be larger than the size of the transistor MN22.
  • the imaging device has a light receiving circuit 21C.
  • the light receiving circuit 21C has a voltage limiting circuit 30C.
  • This voltage limiting circuit 30C has transistors MP23 and MP24.
  • the transistors MP23 and MP24 are P-type MOS transistors.
  • the transistor MP23 has a gate supplied with a bias voltage Vb2 from, for example, the bias generator 14 (FIG. 1), a source supplied with the power supply voltage VDD, and a drain connected to the drain of the transistor MN22 and the gate of the transistor MP24.
  • This transistor MP23 constitutes a constant current source.
  • the current value of the current supplied by the transistor MP23 is set to a value smaller than the current value of the current supplied by the constant current source CUR.
  • the transistor MP24 has a gate connected to the drains of the transistors MN22 and MP23, a source supplied with the power supply voltage VDD, and a drain connected to the node N1.
  • the transistor MP23 corresponds to a specific example of "second current source” in the present disclosure.
  • Transistor MP24 corresponds to a specific example of the "third transistor” in the present disclosure.
  • the voltage limiting circuit 30 is provided with the transistor MN21 to which the pixel signal SIG is supplied and the transistor MN22 to which the voltage VN2 of the node N2 is supplied. not something.
  • a plurality of transistors are provided, some of the plurality of transistors are used as transistors to which the pixel signal SIG is supplied, and the other one of the plurality of transistors is used as a transistor to which the pixel signal SIG is supplied. may be used as a transistor to which the voltage VN2 is supplied.
  • the imaging device according to this modification has a voltage limiting circuit 30D.
  • This voltage limiting circuit 30D has transistors MN31, MN32, MN33, and MN34 and a selection circuit 31.
  • the transistors MN31 to MN34 are N-type MOS transistors. In this example, the sizes of transistors MN31-MN34 are equal to each other.
  • the transistor MN31 has a gate supplied with the voltage VG1, a drain supplied with the power supply voltage VDD, and a source connected to the node N1.
  • the transistor MN32 has a gate supplied with the voltage VG2, a drain supplied with the power supply voltage VDD, and a source connected to the node N1.
  • the transistor MN33 has a gate supplied with the voltage VG3, a drain supplied with the power supply voltage VDD, and a source connected to the node N1.
  • the transistor MN34 has a gate supplied with the voltage VG4, a drain supplied with the power supply voltage VDD, and a source connected to the node N1.
  • the selection circuit 31 supplies the pixel signal SIG to the gates of one or more of the four transistors MN31 to MN34 based on, for example, the control signal SEL supplied from the pixel drive section 15 (FIG. 1), and the voltage VN2. to the gates of one or more of the four transistors MN31-MN34.
  • the transistors MN31 to MN34 correspond to a specific example of "a plurality of transistors” in the present disclosure.
  • the selection circuit 31 corresponds to a specific example of "first selection circuit” in the present disclosure.
  • the selection circuit 31 can supply the pixel signal SIG to the gates of the transistors MN31 and MN32 and the voltage VN2 to the gates of the transistors MN33 and MN34.
  • the transistors MN31 and MN32 correspond to the transistor MN21 according to the above embodiment
  • the transistors MN33 and MN34 correspond to the transistor MN22 according to the above embodiment. Therefore, the sizes of the transistors MN21 and MN22 are equal to each other.
  • the selection circuit 31 can supply the pixel signal SIG to the gate of the transistor MN31 and the voltage VN2 to the gates of the transistors MN32 to MN34.
  • the transistor MN31 corresponds to the transistor MN21 according to the above embodiment
  • the transistors MN32 to MN34 correspond to the transistor MN22 according to the above embodiment. Therefore, the size of the transistor MN22 is larger than the size of the transistor MN21.
  • the voltage limiting circuit 30D can shorten the time until the voltage of the pixel signal SIG1 is set to the limiting voltage based on the voltage VN2 of the node N2.
  • the selection circuit 31 can supply the pixel signal SIG to the gates of the transistors MN31 and MN32, and the voltage VN2 to the gate of the transistor MN34.
  • the transistors MN31 and MN32 correspond to the transistor MN21 according to the above embodiment
  • the transistor MN34 corresponds to the transistor MN22 according to the above embodiment.
  • transistor MN33 is not used.
  • the selection circuit 31 can supply "0 V" to the gate of this transistor MN33.
  • the imaging device can adjust the characteristics of the voltage limiting circuit 30D.
  • the light receiving circuit 21 has one photodiode PD, but it is not limited to this.
  • a plurality of photodiodes PD may be provided.
  • the imaging device according to this modification has a light receiving circuit 21E.
  • the light receiving circuit 21E has three circuits 32, three transistors MN3, a pixel selection circuit 33, a voltage limiting circuit 30, and a transistor MN4.
  • Each of the three circuits 32 has a photodiode PD, transistors MN1 and MN2, and a floating diffusion FD.
  • Three transistors MN3 are provided corresponding to these three circuits 32, respectively.
  • the pixel selection circuit 33 connects one of the three circuits 32 to the gate of the transistor MN21 of the voltage limiting circuit 30 based on, for example, the control signal SEL2 supplied from the pixel driving section 15 (FIG. 1). Configured.
  • the pixel selection circuit 33 corresponds to a specific example of the "second selection circuit" in the present disclosure.
  • the voltage limiting circuit 30, the comparing circuit 22, and the latch 23 are controlled by the three circuits 32 based on the three pixel signals SIG generated by the three circuits 32. can generate three pixel values corresponding respectively to .
  • this image pickup apparatus it is not necessary to provide three voltage limiting circuits 30, three comparison circuits 22, and three latches 23, so that the circuit configuration can be simplified.
  • the voltage limiting circuit 30 is provided on the semiconductor substrate 102, but the present invention is not limited to this.
  • the voltage limiting circuit 30 may be provided on a semiconductor substrate 113 different from the semiconductor substrates 101 and 102.
  • FIG. 13 the voltage limiting circuit 30 may be provided on a semiconductor substrate 113 different from the semiconductor substrates 101 and 102.
  • FIG. 14 shows a usage example of the imaging device 1 according to the above embodiment.
  • the imaging device 1 described above can be used in various cases for sensing light such as visible light, infrared light, ultraviolet light, and X-rays as follows.
  • ⁇ Devices that capture images for viewing purposes, such as digital cameras and mobile devices with camera functions
  • Devices used for transportation such as in-vehicle sensors that capture images behind, around, and inside the vehicle, surveillance cameras that monitor running vehicles and roads, and ranging sensors that measure the distance between vehicles.
  • Devices used in home appliances such as televisions, refrigerators, air conditioners, etc., endoscopes, and devices that perform angiography by receiving infrared light to capture images and operate devices according to gestures.
  • Devices used for medical and health care such as equipment used for security purposes such as monitoring cameras for crime prevention and cameras used for personal authentication, skin measuring instruments for photographing the skin, scalp Equipment used for beauty, such as a microscope for photographing Equipment used for sports, such as action cameras and wearable cameras for sports, etc. Cameras for monitoring the condition of fields and crops, etc. of agricultural equipment
  • the technology (the present technology) according to the present disclosure can be applied to various products.
  • the technology according to the present disclosure can be realized as a device mounted on any type of moving body such as automobiles, electric vehicles, hybrid electric vehicles, motorcycles, bicycles, personal mobility, airplanes, drones, ships, and robots. may
  • FIG. 15 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a mobile control system to which the technology according to the present disclosure can be applied.
  • a vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001.
  • vehicle control system 12000 includes drive system control unit 12010 , body system control unit 12020 , vehicle exterior information detection unit 12030 , vehicle interior information detection unit 12040 , and integrated control unit 12050 .
  • integrated control unit 12050 As the functional configuration of the integrated control unit 12050, a microcomputer 12051, an audio/image output unit 12052, and an in-vehicle network I/F (interface) 12053 are illustrated.
  • the drive system control unit 12010 controls the operation of devices related to the drive system of the vehicle according to various programs.
  • the driving system control unit 12010 includes a driving force generator for generating driving force of the vehicle such as an internal combustion engine or a driving motor, a driving force transmission mechanism for transmitting the driving force to the wheels, and a steering angle of the vehicle. It functions as a control device such as a steering mechanism to adjust and a brake device to generate braking force of the vehicle.
  • the body system control unit 12020 controls the operation of various devices equipped on the vehicle body according to various programs.
  • the body system control unit 12020 functions as a keyless entry system, a smart key system, a power window device, or a control device for various lamps such as headlamps, back lamps, brake lamps, winkers or fog lamps.
  • the body system control unit 12020 can receive radio waves transmitted from a portable device that substitutes for a key or signals from various switches.
  • the body system control unit 12020 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, etc. of the vehicle.
  • the vehicle exterior information detection unit 12030 detects information outside the vehicle in which the vehicle control system 12000 is installed.
  • the vehicle exterior information detection unit 12030 is connected with an imaging section 12031 .
  • the vehicle exterior information detection unit 12030 causes the imaging unit 12031 to capture an image of the exterior of the vehicle, and receives the captured image.
  • the vehicle exterior information detection unit 12030 may perform object detection processing or distance detection processing such as people, vehicles, obstacles, signs, or characters on the road surface based on the received image.
  • the imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal according to the amount of received light.
  • the imaging unit 12031 can output the electric signal as an image, and can also output it as distance measurement information.
  • the light received by the imaging unit 12031 may be visible light or non-visible light such as infrared rays.
  • the in-vehicle information detection unit 12040 detects in-vehicle information.
  • the in-vehicle information detection unit 12040 is connected to, for example, a driver state detection section 12041 that detects the state of the driver.
  • the driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 detects the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041. It may be calculated, or it may be determined whether the driver is dozing off.
  • the microcomputer 12051 calculates control target values for the driving force generator, the steering mechanism, or the braking device based on the information inside and outside the vehicle acquired by the vehicle exterior information detection unit 12030 or the vehicle interior information detection unit 12040, and controls the drive system control unit.
  • a control command can be output to 12010 .
  • the microcomputer 12051 realizes the functions of ADAS (Advanced Driver Assistance System) including collision avoidance or shock mitigation, follow-up driving based on inter-vehicle distance, vehicle speed maintenance driving, vehicle collision warning, or vehicle lane deviation warning. Cooperative control can be performed for the purpose of ADAS (Advanced Driver Assistance System) including collision avoidance or shock mitigation, follow-up driving based on inter-vehicle distance, vehicle speed maintenance driving, vehicle collision warning, or vehicle lane deviation warning. Cooperative control can be performed for the purpose of ADAS (Advanced Driver Assistance System) including collision avoidance or shock mitigation, follow-up driving based on inter-vehicle distance, vehicle speed maintenance driving, vehicle collision warning, or vehicle
  • the microcomputer 12051 controls the driving force generator, the steering mechanism, the braking device, etc. based on the information about the vehicle surroundings acquired by the vehicle exterior information detection unit 12030 or the vehicle interior information detection unit 12040, so that the driver's Cooperative control can be performed for the purpose of autonomous driving, etc., in which vehicles autonomously travel without depending on operation.
  • the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information outside the vehicle acquired by the information detection unit 12030 outside the vehicle.
  • the microcomputer 12051 controls the headlamps according to the position of the preceding vehicle or the oncoming vehicle detected by the vehicle exterior information detection unit 12030, and performs cooperative control aimed at anti-glare such as switching from high beam to low beam. It can be carried out.
  • the audio/image output unit 12052 transmits at least one of audio and/or image output signals to an output device capable of visually or audibly notifying the passengers of the vehicle or the outside of the vehicle.
  • an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are illustrated as output devices.
  • the display unit 12062 may include at least one of an on-board display and a head-up display, for example.
  • FIG. 16 is a diagram showing an example of the installation position of the imaging unit 12031.
  • the vehicle 12100 has imaging units 12101, 12102, 12103, 12104, and 12105 as the imaging unit 12031.
  • the imaging units 12101, 12102, 12103, 12104, and 12105 are provided at positions such as the front nose of the vehicle 12100, the side mirrors, the rear bumper, the back door, and the upper part of the windshield in the vehicle interior, for example.
  • An image pickup unit 12101 provided in the front nose and an image pickup unit 12105 provided above the windshield in the passenger compartment mainly acquire images in front of the vehicle 12100 .
  • Imaging units 12102 and 12103 provided in the side mirrors mainly acquire side images of the vehicle 12100 .
  • An imaging unit 12104 provided in the rear bumper or back door mainly acquires an image behind the vehicle 12100 .
  • Forward images acquired by the imaging units 12101 and 12105 are mainly used for detecting preceding vehicles, pedestrians, obstacles, traffic lights, traffic signs, lanes, and the like.
  • FIG. 16 shows an example of the imaging range of the imaging units 12101 to 12104.
  • the imaging range 12111 indicates the imaging range of the imaging unit 12101 provided in the front nose
  • the imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided in the side mirrors, respectively
  • the imaging range 12114 The imaging range of an imaging unit 12104 provided on the rear bumper or back door is shown. For example, by superimposing the image data captured by the imaging units 12101 to 12104, a bird's-eye view image of the vehicle 12100 viewed from above can be obtained.
  • At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information.
  • at least one of the imaging units 12101 to 12104 may be a stereo camera composed of a plurality of imaging elements, or may be an imaging element having pixels for phase difference detection.
  • the microcomputer 12051 determines the distance to each three-dimensional object within the imaging ranges 12111 to 12114 and changes in this distance over time (relative velocity with respect to the vehicle 12100). , it is possible to extract, as the preceding vehicle, the closest three-dimensional object on the course of the vehicle 12100, which runs at a predetermined speed (for example, 0 km/h or more) in substantially the same direction as the vehicle 12100. can. Furthermore, the microcomputer 12051 can set the inter-vehicle distance to be secured in advance in front of the preceding vehicle, and perform automatic brake control (including following stop control) and automatic acceleration control (including following start control). In this way, cooperative control can be performed for the purpose of automatic driving in which the vehicle runs autonomously without relying on the operation of the driver.
  • automatic brake control including following stop control
  • automatic acceleration control including following start control
  • the microcomputer 12051 converts three-dimensional object data related to three-dimensional objects to other three-dimensional objects such as motorcycles, ordinary vehicles, large vehicles, pedestrians, and utility poles. It can be classified and extracted and used for automatic avoidance of obstacles. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into those that are visible to the driver of the vehicle 12100 and those that are difficult to see. Then, the microcomputer 12051 judges the collision risk indicating the degree of danger of collision with each obstacle, and when the collision risk is equal to or higher than the set value and there is a possibility of collision, an audio speaker 12061 and a display unit 12062 are displayed. By outputting an alarm to the driver via the drive system control unit 12010 and performing forced deceleration and avoidance steering via the drive system control unit 12010, driving support for collision avoidance can be performed.
  • At least one of the imaging units 12101 to 12104 may be an infrared camera that detects infrared rays.
  • the microcomputer 12051 can recognize a pedestrian by determining whether or not the pedestrian exists in the captured images of the imaging units 12101 to 12104 .
  • recognition of a pedestrian is performed by, for example, a procedure for extracting feature points in images captured by the imaging units 12101 to 12104 as infrared cameras, and performing pattern matching processing on a series of feature points indicating the outline of an object to determine whether or not the pedestrian is a pedestrian.
  • the audio image output unit 12052 outputs a rectangular outline for emphasis to the recognized pedestrian. is superimposed on the display unit 12062 . Also, the audio/image output unit 12052 may control the display unit 12062 to display an icon or the like indicating a pedestrian at a desired position.
  • the technology according to the present disclosure can be applied to the imaging unit 12031 among the configurations described above.
  • the image quality of the captured image obtained by the imaging unit 12031 can be improved when the luminance is high.
  • the vehicle control system 12000 realizes a vehicle collision avoidance or collision mitigation function, a follow-up driving function based on the distance between vehicles, a vehicle speed maintenance driving function, a vehicle collision warning function, a vehicle lane deviation warning function, etc. with high accuracy. can.
  • the imaging device 1 is provided on two semiconductor substrates 101 and 102, but it is not limited to this, and the imaging device 1 may be provided on one semiconductor substrate.
  • This technology can be configured as follows. According to the present technology having the following configuration, deterioration in image quality can be suppressed at high luminance.
  • a first light-receiving element that generates a charge corresponding to the amount of received light
  • a first storage unit that can store the charge generated by the first light-receiving element
  • a first transfer switch capable of connecting the element and the first storage section, and capable of generating a pixel signal corresponding to the voltage stored in the first storage section, wherein the voltage of the pixel signal does not exceed a limit voltage.
  • a comparison circuit capable of comparing a reference signal having a ramp waveform with the pixel signal.
  • the limit circuit is a first transistor having a gate connected to the first storage, a drain, and a source; a second transistor having a gate to which a voltage corresponding to the limiting voltage can be supplied, a drain and a source; and a first current source connected to the source of the first transistor and the source of the second transistor.
  • the first transistor and the second transistor are transistors of a first conductivity type;
  • the limit circuit is a second current source connected to the drain of the second transistor; a third transistor of a second conductivity type having a gate connected to the drain of the second transistor, a drain connected to the source of the second transistor, and a source;
  • the imaging device according to any one of (2) to (4).
  • the limit circuit is a plurality of transistors; A first selection circuit capable of using one or more transistors out of the plurality of transistors as the first transistor and using another one or more transistors out of the plurality of transistors as the second transistor and The imaging device according to (2) or (3) above.
  • the imaging device is a second light receiving element; a second accumulation unit capable of accumulating charges generated by the second light receiving element; a second transfer switch that can connect the second light receiving element and the second storage unit by turning on; any one of (2) to (7) above, further comprising: a second selection circuit that connects one of the first storage unit and the second storage unit to the gate of the first transistor; The imaging device described.
  • the limit circuit is a first switch that can connect the source of the first transistor, the source of the second transistor, and the gate of the second transistor by turning on; a capacitor having a first terminal connected to the gate of the second transistor and a second terminal;
  • the imaging device according to any one of (2) to (8), further comprising: a voltage setting circuit capable of changing the voltage of the second terminal of the capacitor.
  • the voltage setting circuit includes a second switch that selectively supplies one of a first DC voltage and a second DC voltage to the second terminal of the capacitor.
  • the voltage setting circuit includes a second switch that selectively supplies one of the reference signal and a second DC voltage to the second terminal of the capacitor;
  • the second switch selectively supplies the reference signal to the second terminal of the capacitor during a part of the period other than the period in which the reference signal exhibits a ramp waveform.
  • the comparison circuit is a fourth transistor having a gate to which the pixel signal can be supplied, a drain and a source; a fifth transistor having a gate to which the reference signal can be supplied, a drain and a source; a third current source connected to the source of the fourth transistor and the source of the fifth transistor;
  • the pixel circuit is a third switch that can connect the drain of the fourth transistor and the first storage unit by turning on; any one of (9) to (11) above, further comprising: a fourth switch capable of connecting the drain of the fourth transistor and the gate of the fourth transistor when turned on; imaging device.
  • the imaging device according to (12) above.
  • the imaging device according to any one of (9) to (13), wherein the limiting circuit further includes a fifth switch capable of supplying a predetermined voltage to the gate of the second transistor when turned on. .
  • the first light receiving element, the first storage unit, the first transfer switch, and the comparison circuit are provided on a first substrate, The imaging device according to any one of (1) to (14), wherein the limiting circuit is provided on a second substrate overlaid on the first substrate. (16) Further equipped with a time code generation circuit that generates a time code that changes with the passage of time, The imaging device according to any one of (1) to (15), wherein the pixel circuit further includes a latch circuit that latches the time code based on the comparison result of the comparison circuit.

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

Selon la présente divulgation, un dispositif de capture d'image comprend un circuit de pixel comprenant : un premier élément de réception de lumière qui génère une charge en fonction d'une quantité de lumière reçue ; une première unité de stockage qui peut stocker la charge générée par le premier élément de réception de lumière ; un premier commutateur de transfert qui peut être activé pour connecter le premier élément de réception de lumière à la première unité de stockage ; un circuit de limitation de tension qui peut générer un signal de pixel en fonction d'une tension stockée dans la première unité de stockage et qui peut limiter la tension du signal de pixel à une tension limite ou en dessous de celle-ci ; et un circuit de comparaison qui peut comparer le signal de pixel à un signal de référence ayant une forme d'onde de rampe.
PCT/JP2022/003861 2021-04-26 2022-02-01 Dispositif de capture d'image WO2022230279A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021074358A JP2022168704A (ja) 2021-04-26 2021-04-26 撮像装置
JP2021-074358 2021-04-26

Publications (1)

Publication Number Publication Date
WO2022230279A1 true WO2022230279A1 (fr) 2022-11-03

Family

ID=83848231

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2022/003861 WO2022230279A1 (fr) 2021-04-26 2022-02-01 Dispositif de capture d'image

Country Status (2)

Country Link
JP (1) JP2022168704A (fr)
WO (1) WO2022230279A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009194569A (ja) * 2008-02-13 2009-08-27 Canon Inc 光電変換装置及び撮像システム
WO2019239887A1 (fr) * 2018-06-12 2019-12-19 ソニーセミコンダクタソリューションズ株式会社 Élément d'imagerie, procédé de commande, et appareil électronique
WO2020179302A1 (fr) * 2019-03-07 2020-09-10 ソニーセミコンダクタソリューションズ株式会社 Dispositif d'imagerie

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009194569A (ja) * 2008-02-13 2009-08-27 Canon Inc 光電変換装置及び撮像システム
WO2019239887A1 (fr) * 2018-06-12 2019-12-19 ソニーセミコンダクタソリューションズ株式会社 Élément d'imagerie, procédé de commande, et appareil électronique
WO2020179302A1 (fr) * 2019-03-07 2020-09-10 ソニーセミコンダクタソリューションズ株式会社 Dispositif d'imagerie

Also Published As

Publication number Publication date
JP2022168704A (ja) 2022-11-08

Similar Documents

Publication Publication Date Title
CN112640428B (zh) 固态成像装置、信号处理芯片和电子设备
CN113396579B (zh) 事件信号检测传感器和控制方法
US20200228738A1 (en) Solid-state imaging apparatus and electronic equipment
US11937001B2 (en) Sensor and control method
US11381764B2 (en) Sensor element and electronic device
WO2019239887A1 (fr) Élément d'imagerie, procédé de commande, et appareil électronique
US11889212B2 (en) Comparator and imaging device
WO2022153746A1 (fr) Dispositif d'imagerie
WO2022230279A1 (fr) Dispositif de capture d'image
US20230217135A1 (en) Imaging device
US20230254604A1 (en) Photodetection device and electronic apparatus
US20230108619A1 (en) Imaging circuit and imaging device
US20230336894A1 (en) Imaging device and electronic apparatus
WO2022230272A1 (fr) Dispositif d'imagerie à semi-conducteurs, son procédé de commande, et appareil électronique
WO2022215334A1 (fr) Dispositif d'imagerie et circuit de conversion analogique/numérique
CN111742546A (zh) 放大电路、摄像装置和放大电路的控制方法
US20230232128A1 (en) Photodetection device and electronic apparatus
US20240205557A1 (en) Imaging device, electronic apparatus, and imaging method
WO2022254832A1 (fr) Appareil de capture d'image, dispositif électronique et procédé de capture d'image
WO2022014222A1 (fr) Dispositif d'imagerie et procédé d'imagerie
US20240089637A1 (en) Imaging apparatus

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22795202

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 22795202

Country of ref document: EP

Kind code of ref document: A1