WO2022223315A3 - Vapor cell device for a sensor device, and method for producing a vapor cell device for a sensor device - Google Patents

Vapor cell device for a sensor device, and method for producing a vapor cell device for a sensor device Download PDF

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Publication number
WO2022223315A3
WO2022223315A3 PCT/EP2022/059371 EP2022059371W WO2022223315A3 WO 2022223315 A3 WO2022223315 A3 WO 2022223315A3 EP 2022059371 W EP2022059371 W EP 2022059371W WO 2022223315 A3 WO2022223315 A3 WO 2022223315A3
Authority
WO
WIPO (PCT)
Prior art keywords
vapor cell
sensor device
base
recess
wafer
Prior art date
Application number
PCT/EP2022/059371
Other languages
German (de)
French (fr)
Other versions
WO2022223315A2 (en
Inventor
Peter Frey
Marc Schmid
Tino Fuchs
Janine Riedrich-Moeller
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to CN202280030049.4A priority Critical patent/CN117203491A/en
Priority to DE112022000887.3T priority patent/DE112022000887A5/en
Publication of WO2022223315A2 publication Critical patent/WO2022223315A2/en
Publication of WO2022223315A3 publication Critical patent/WO2022223315A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58—Turn-sensitive devices without moving masses
    • G01C19/60—Electronic or nuclear magnetic resonance gyrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58—Turn-sensitive devices without moving masses
    • G01C19/60—Electronic or nuclear magnetic resonance gyrometers
    • G01C19/62—Electronic or nuclear magnetic resonance gyrometers with optical pumping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/20—Arrangements or instruments for measuring magnetic variables involving magnetic resonance
    • G01R33/24—Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/26—Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Micromachines (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention relates to a vapor cell device (10) for a sensor device (SV), comprising a base wafer (GF) that comprises at least one recess (A) in which a sample substance (PS) is enclosed; an upper cap wafer (OKW) which is arranged on the upper face (OS) of the base wafer (GF) and completely covers at least the recess (A); a base (BD) which completely covers the recess (A) from a lower face (US); and at least one first bonding layer (BS1) which is located between the upper cap wafer (OKW) and the base wafer (GF), wherein the first bonding layer (BS1) extends to the recess (A) at least in some regions, and the upper cap wafer (OKW) and the base (BD) can be permeated by a first radiation (ST1).
PCT/EP2022/059371 2021-04-21 2022-04-08 Vapor cell device for a sensor device, and method for producing a vapor cell device for a sensor device WO2022223315A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202280030049.4A CN117203491A (en) 2021-04-21 2022-04-08 Steam unit for a sensor device and method for producing a steam unit for a sensor device
DE112022000887.3T DE112022000887A5 (en) 2021-04-21 2022-04-08 Steam cell device for a sensor device and method for producing a steam cell device for a sensor device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021203953.7A DE102021203953A1 (en) 2021-04-21 2021-04-21 Vapor cell assembly for a sensor device and method of manufacturing a vapor cell assembly for a sensor device
DE102021203953.7 2021-04-21

Publications (2)

Publication Number Publication Date
WO2022223315A2 WO2022223315A2 (en) 2022-10-27
WO2022223315A3 true WO2022223315A3 (en) 2022-12-15

Family

ID=81585478

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2022/059371 WO2022223315A2 (en) 2021-04-21 2022-04-08 Vapor cell device for a sensor device, and method for producing a vapor cell device for a sensor device

Country Status (3)

Country Link
CN (1) CN117203491A (en)
DE (2) DE102021203953A1 (en)
WO (1) WO2022223315A2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060132130A1 (en) * 2004-12-20 2006-06-22 Abbink Henry C Micro-cell for NMR gyroscope
WO2019020708A1 (en) * 2017-07-28 2019-01-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mems mirror assembly and method for producing a mems mirror assembly
US20200002802A1 (en) * 2018-07-02 2020-01-02 Government Of The United States Of America, As Represented By The Secretary Of Commerce Alkali metal vapor cell apparatus and process for making alkali metal vapor cells

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060132130A1 (en) * 2004-12-20 2006-06-22 Abbink Henry C Micro-cell for NMR gyroscope
WO2019020708A1 (en) * 2017-07-28 2019-01-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mems mirror assembly and method for producing a mems mirror assembly
US20200002802A1 (en) * 2018-07-02 2020-01-02 Government Of The United States Of America, As Represented By The Secretary Of Commerce Alkali metal vapor cell apparatus and process for making alkali metal vapor cells

Also Published As

Publication number Publication date
DE112022000887A5 (en) 2023-11-30
DE102021203953A1 (en) 2022-10-27
CN117203491A (en) 2023-12-08
WO2022223315A2 (en) 2022-10-27

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