WO2022175320A1 - Vakuumventil mit funkanordnung - Google Patents
Vakuumventil mit funkanordnung Download PDFInfo
- Publication number
- WO2022175320A1 WO2022175320A1 PCT/EP2022/053809 EP2022053809W WO2022175320A1 WO 2022175320 A1 WO2022175320 A1 WO 2022175320A1 EP 2022053809 W EP2022053809 W EP 2022053809W WO 2022175320 A1 WO2022175320 A1 WO 2022175320A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- valve
- closure
- vacuum
- opening
- arrangement
- Prior art date
Links
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
- F16K31/042—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves with electric means, e.g. for controlling the motor or a clutch between the valve and the motor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04W—WIRELESS COMMUNICATION NETWORKS
- H04W4/00—Services specially adapted for wireless communication networks; Facilities therefor
- H04W4/80—Services using short range communication, e.g. near-field communication [NFC], radio-frequency identification [RFID] or low energy communication
Definitions
- the invention relates to a vacuum valve with a radio system, which radio system is able to provide or store information about a current valve status.
- Valves are generally intended to make a flow rate, in particular of a fluid, adjustable. With a valve, the flow can be permitted over a maximum valve opening cross-section or completely shut off. In addition, certain valve types offer the possibility of regulating a flow rate per unit of time, ie they provide controllability of a fluid flow.
- Vacuum valves form a specific type of valve. These are known in various embodiments from the prior art for regulating a volume or mass flow and/or for essentially gas-tight closing of a flow path that leads through an opening formed in a valve housing and are used in particular in vacuum chamber systems in the field of IC, Semiconductor or substrate fabrication, which must take place in a protected atmosphere with as few contaminating particles as possible.
- Such vacuum chamber systems include, in particular, at least one evacuatable vacuum chamber provided for receiving semiconductor elements or substrates to be processed or produced, which has at least one vacuum chamber opening through which the semiconductor elements or other substrates can be guided into and out of the vacuum chamber, and at least one Vacuum pump to evacuate the vacuum chamber.
- the highly sensitive semiconductor or liquid crystal elements sequentially pass through a number of process vacuum chambers in which the parts located within the process vacuum chambers are each processed using a processing device.
- the highly sensitive semiconductor elements or substrates must always be in a protected atmosphere - especially in an airless environment - both during the processing process within the process vacuum chambers and during transport from chamber to chamber.
- peripheral valves are used to open and close a gas inlet or outlet
- transfer valves are used to open and close the transfer openings of the vacuum chambers for inserting and removing the parts.
- the vacuum valves through which semiconductor parts pass are used as vacuum transfer valves due to the described area of application and the associated dimensioning, due to their mostly rectangular shape
- Opening cross-section also referred to as a rectangular valve and due to their usual mode of operation also as a slide valve, rectangular slide or transfer slide valve.
- Peripheral valves are used in particular to control or regulate the gas flow between a vacuum chamber and a vacuum pump or another vacuum chamber. Peripheral valves are located, for example, within a pipe system between a process vacuum chamber or a transfer chamber and a vacuum pump, the atmosphere or another process vacuum chamber .
- the opening cross section of such valves also known as pump valves, is generally smaller than that of a vacuum transfer valve. Since peripheral valves, depending on the area of application, are not only used to completely open and close an opening, but also to control or regulate a flow rate by continuously adjusting the opening cross section between a completely open position and a gas-tight closed position, they are also referred to as control valves.
- a possible peripheral valve for controlling or regulating the gas flow is the pendulum valve.
- a generally round valve disk is pivoted in a rotary manner via a generally also round opening from a position releasing the opening into an intermediate position covering the opening.
- a slide valve as described, for example, in US Pat. No. 6,416,037 (Geiser) or US Pat pushed the opening overlapping intermediate position. In this intermediate position, the valve disk of the pendulum or slide valve is located at a distance opposite the valve seat surrounding the opening.
- a second step the distance between the valve disk and the valve seat is reduced, so that the valve disk and the valve seat are evenly pressed against one another and the opening is closed in a substantially gas-tight manner.
- This second movement is preferably substantially in a direction perpendicular to the valve seat.
- the seal can be made, for example, either by a sealing ring on the closing side of the valve disk, which is pressed onto the valve seat surrounding the opening, or by a sealing ring on the valve seat, against which the closing side of the valve disk is pressed. Due to the two-step closing process, the sealing ring between the valve disk and the valve seat is hardly subjected to shearing forces that would destroy the sealing ring, since the movement of the valve disk in the second step takes place essentially in a straight line perpendicular to the valve seat.
- Different sealing devices are known from the prior art, for example from US Pat. No. 6,629,682 B2 (Duelli).
- a suitable material for sealing rings and seals in vacuum valves is, for example, fluororubber, also known as FKM, in particular the fluoroelastomer known under the trade name "Viton", and perfluororubber, FFKM for short.
- valves provide contact pressure regulation of the valve disk, which is regulated as a function of the pressure difference prevailing between the two sides of the valve disk.
- the aim is to decouple the sealing ring from supporting forces that result from the pressure applied to the valve.
- valves mentioned above are used, among other things, in the production of highly sensitive semiconductor elements in a vacuum chamber, a corresponding sealing effect must also be reliably guaranteed for such vacuum chambers.
- the condition of the entire valve or in particular of a sealing material or a sealing surface that is in contact with the sealing material during compression is of importance.
- valve components can typically change due to wear and tear on the sealing material or the sealing surfaces, as well as structural changes to the valve components, e.g. drive unit or valve rod, due to environmental influences (temperature, humidity, impacts, etc.).
- a valve closure is typically replaced or renewed at certain time intervals.
- Such a maintenance interval is usually measured by the number of opening and closing cycles to be expected in a specific period of time or also by the number and characteristics of environmental influences that occur. Maintenance is typically carried out as a precaution in order to be able to rule out the occurrence of a leak as far as possible in advance.
- Such a maintenance requirement is not limited solely to the sealing material or the valve disk, but also extends in particular to other valve components such as the drive unit or the valve seat, which forms a part of the vacuum valve that corresponds to the valve disk.
- the structure of a sealing surface on the valve seat side e.g. a groove embedded in the valve seat, is also affected by mechanical stress. Therefore, a structural change in the groove or the valve seat resulting from operation of the valve can also cause impairment of the seal. Appropriate maintenance intervals are also usually defined for this.
- the invention is therefore based on the object of providing an improved vacuum valve which reduces or avoids the disadvantages mentioned above.
- a further object of the invention is to provide an improved vacuum valve which provides information relating to a need for maintenance or makes it readable.
- the basic idea of the present invention is to combine a vacuum valve with a radio system, eg an RFID tag, with at least one memory and to enable the vacuum valve (or by means of a valve control) to read or write to the memory.
- a radio system eg an RFID tag
- operational integrity can be monitored and/or operational information can be processed or stored for the valve.
- Such an arrangement can be used to develop a vacuum valve into a "smart valve", for example, i.e. the vacuum valve can no longer just implement simple closing and opening commands, but can also provide additional functions and/or information.
- the invention thus relates to a vacuum valve, in particular a vacuum slide valve, pendulum valve or monovalve, for controlling a volume or mass flow and/or for closing and opening a valve opening.
- the vacuum valve has a valve seat, which in turn has the valve opening defining an opening axis and a first sealing surface surrounding the valve opening.
- the vacuum valve also has a valve closure, in particular a valve disk, for regulating the volume or mass flow and/or for sealing the valve opening in a substantially gas-tight manner.
- the valve closure has a second sealing surface that corresponds to the first sealing surface.
- a drive unit coupled to the valve closure is provided, which is used to provide a movement of the valve closure in this way is set up and/or designed such that the valve closure moves from an open position, in which the valve closure at least partially uncovers the valve opening, into a closed position, in which there is sealing contact between the first sealing surface and the second sealing surface with a sealing material present in between and the valve opening as a result is sealed gas-tight, and is adjustable back.
- the vacuum valve also has a radio arrangement with at least one coupling element and one storage element. Information relating to a valve state can be provided by means of the memory element.
- RFID radio-frequency identification
- NFC near field communication
- eng. near field communication
- RFID generally refers to a technology for transmitter-receiver systems for, for example, automatic and contactless identification and localization of objects and living beings with radio waves.
- An RFID system can, for example, have an RFID transponder (colloquially also called a radio tag), which is located on or in an object or living being and can contain an identifying code, as well as a communication arrangement (e.g. reader) for reading out this identifier.
- RFID transponder colloquially also called a radio tag
- a communication arrangement e.g. reader
- RFID transponders can be made comparatively small (e.g. the size of a grain of rice).
- an RFID transponder can be printed using a special printing process more stable circuits can be made from polymers. As a result, a small-size transponder can be provided with moderate production costs.
- Coupling between the RFIF transponder provided according to the invention and the communication arrangement, which has an antenna and/or a reading device, for example, can be established by short-range alternating magnetic fields generated by the communication arrangement or by high-frequency radio waves. This means that not only can data be transmitted, but the transponder can also be supplied with energy. Active RFID transponders can be used to achieve greater ranges.
- the RFID transponder can be connected to an energy source.
- the communication arrangement may include a computer program (software or microprogram), which computer program may be configured to control a reading or writing process.
- the communication arrangement can also have an interface (e.g. RFID middleware) for connecting to other EDP systems.
- the RFID transponder can be specified with regard to its transmission frequency.
- the RFID transponder has at least one antenna and one memory.
- an analog circuit for receiving and transmitting as well as a digital circuit can be provided.
- the digital circuit will be a microcontroller.
- the memory element of the RFID transponder can be a memory that can be written at least once. This one can provide an unchangeable identity of the transponder, ie the data present in the memory are retained.
- a memory that can be written to several times can also be provided. This can be described with additional information, updated or deleted.
- the RFID transponder can be designed as a passive, active or semi-active RFID transponder.
- the passive RFID transponder can be supplied with energy by means of radio signals from the communication arrangement.
- a coil can be provided as a receiving antenna. This can be charged by induction and thus enables a response to be sent.
- a response signal can be received undisturbed by reflections of a
- Query signal are provided by other objects.
- the range is typically limited due to the low power of the response signal.
- the RFID transponder with its own power supply can provide a greater range but also a larger range of functions (e.g. temperature measurement).
- the RFID transponder connected to an energy source can be in an idle state and in particular does not send out any information as long as it is not activated (triggered) by a special activation signal. This can significantly extend the life of the energy source.
- the RFID transponder connected to the energy source can be designed as an active RFID transponder.
- the energy source can be used both to supply a transponder's own microchip and to generate a modulated return signal. The range can be kilometers in particular.
- the RFID transponder connected to the energy source can also be in the form of a semi-active RFID transponder or a semi-passive RFID transponder. This typically does not have an integrated transmitter, but only modulates a backscatter coefficient. Depending on the power and antenna gain of the transmitter, the range can be limited to approx. 100 m.
- the RFID transponder can be designed for communication with a specific frequency.
- Long waves e.g. 30-500 kHz
- short waves e.g. 3-30 MHz
- very high frequencies e.g. 433 - 950 MHz
- microwave frequencies e.g. > 2.4 GHz
- the coupling between the RFIF transponder provided according to the invention and the communication arrangement can be realized by means of magnetic fields for an inductive coupling or near-field coupling (NFC).
- the coupling can be implemented using electromagnetic dipole fields for far-field coupling.
- the radio system e.g. an RFID or NFC transponder
- the radio system can be arranged on the valve closure (valve disk) or integrated into the valve closure.
- the radio arrangement can be on a movable and comparatively high-maintenance component of the valve to be appropriate.
- the radio arrangement is thus able to provide information to be assigned according to the valve closure. This can include, for example, a part or serial number of the valve closure or the provision of a closure position. Further examples of information regarding the valve closure or a valve state are described below.
- valve closure, the valve seat and/or the drive unit can have a transmission window, which is designed to provide, in particular bidirectional, wireless communication of the radio system through the transmission window.
- the valve closure can be made predominantly of aluminum or another metal.
- This choice of material can (strongly) impair, limit or make impossible the propagation or transmission of the radio waves required for communication.
- the radio arrangement is to be integrated into the valve closure (ie at least partially enclosed by the valve closure), it can therefore be advantageous to form an area near or around the radio arrangement with improved transmission properties.
- this transmission window can in particular be non-metallic, e.g. polymer-based.
- the radio arrangement can be cast into a recess provided for this purpose on the valve closure.
- the recess and / or the cast material used form the transmission window.
- the valve can have a communication arrangement designed to establish a coupling with the coupling element of the radio arrangement.
- the communication arrangement can be arranged and designed in such a way that wireless communication between the communication arrangement and the coupling element can be provided at least in the open position and/or the closed position.
- Communication arrangement has in particular at least one antenna.
- the communication arrangement can be arranged on the valve seat, on the drive unit or on a valve housing or can be integrated into the valve seat, the drive unit or the valve housing.
- the valve can accordingly have a component (communication arrangement) which interacts with the radio arrangement.
- This communication arrangement can be attached, for example, to a non-moving part of the valve and positioned in such a way that a radio link can be established with the radio arrangement and a data or data link can be transmitted via this link
- the transmission can be bidirectional, i.e. data and/or information can be transmitted towards the radio arrangement or received by the radio arrangement.
- Communication arrangement can be chosen so that a communication due to the range only in one certain valve position, for example the open position, is made possible.
- the vacuum valve can be a read/write arrangement or an interface for communication with a write
- the read/write arrangement can be designed in such a way that communication can be provided between the read/write arrangement and the memory element.
- the read/write arrangement can be part of the communication arrangement, for example, and can be programmed and configured in such a way that it can be used to write data (information regarding the valve status) and/or read data to or from the memory element of an RFID tag .
- the read/write arrangement can be embodied separately from the valve, for example as a portable reading device, and establish a communication connection with the memory element via the interface of the valve.
- the read/write arrangement can be embodied, for example, by a tablet PC, a smartphone or another portable, data-processing device and can be provided with appropriate software (e.g. an app).
- the communication between the radio arrangement and the communication arrangement or the read/write arrangement can at least include reading out the information regarding the valve status from the memory element and/or storing the information regarding the valve status in the memory element.
- the information regarding the valve status can include at least one of the following information:
- valve plug type or a part and/or serial number of the valve plug
- Manufacturing information in particular a production date and/or a production location, and/or
- a valve status can be logged or monitored, for example. Furthermore, an operation of the valve can be adjusted or controlled depending on this information.
- the vacuum valve can have a control and processing unit with a control functionality and a monitoring functionality.
- the control functionality can be set up to control the movement of the valve closure and the monitoring functionality can be configured in such a way that when it is executed, the information relating to the valve status is recorded and compared with a setpoint value and an output dependent on the comparison is generated.
- the output can be provided acoustically, optically or as a signal, for example.
- the output can be made available to a user, thereby giving the user of the valve a decision-making aid for operation. Such a decision can be made, for example, whether the vacuum valve should (continue to) operate in its current state.
- the output can be in the form of a warning signal, for example.
- the monitoring functionality can include at least monitoring, continuous monitoring, checking, verifying and/or comparing the information relating to the valve state.
- control functionality can be adjusted, in particular the control of the movement of the valve closure can be adjusted, or the movement of the valve closure can be adjusted, restricted or suspended.
- Such an adjustment of the control functionality can in particular take place automatically.
- a corresponding algorithm can be provided for this purpose, for example, by means of which the monitoring functionality can be controlled and/or executed and the control functionality can be adapted and/or executed.
- the monitoring functionality can be set up in particular for the optional adaptation of the control functionality.
- the target value can have or embody, for example, permissible part identification information, in particular part number of the valve closure.
- the setpoint can also specify a maximum allowable number of operating cycles or a maximum allowable age of the closure or its seal.
- the adaptation of the control functionality can in particular include switching off or activating the drive unit.
- activation or activation of the drive unit can be prevented until the drive unit is released again by another execution of the monitoring functionality, i.e. the drive unit can be put out of operation and kept until a specific release signal is generated, for example.
- a release can, for example, take place when a specific target value is met as part of the monitoring or checking.
- information regarding an open or closed state of the valve can be provided as a function of the output.
- the monitoring function can be used to determine whether the valve closure has reached a specific position or when the valve closure will reach a specific position during a planned movement.
- Position information required for this can, for example, be generated directly with the radio system.
- the position information can be generated using a further sensor unit, e.g. encoder or limit switch, and further processed and/or transmitted using the radio system.
- a further sensor unit e.g. encoder or limit switch
- information relating to maintenance at least one valve component are provided.
- a current service life of a valve part can be logged by means of and/or on the radio system and thus continuously monitored.
- a (continuous) check is thus made possible as to whether a valve part in question, for example the valve disk, has reached its intended service life (actuating cycles) or will soon reach it. It can also be estimated when the maximum uptime for the part will be reached.
- maintenance of the valve can be planned or implemented. For example, a point in time for replacing the valve disk can be determined (in advance) and a corresponding procurement of a spare part can be initiated or also planned.
- the monitoring functionality can be set up for the optional provision of information depending on the output.
- control and processing unit can have a memory functionality configured in such a way that when it is executed, the information relating to the valve state is stored or updated on the memory element.
- the radio system can become the carrier of current valve information, e.g. the number of closing processes currently being carried out with the installed valve disk can be continuously updated on the radio system.
- a counter-element interacting with the radio arrangement can be arranged on the valve seat, e.g. provided in
- the valve can be a separating device for separating a process atmosphere area from a
- valve has outside atmosphere area.
- this relates to an embodiment of the valve as a vacuum valve.
- the process atmosphere area is to be understood in particular as an area that can be defined by a process chamber.
- a process atmosphere in particular a vacuum, can be created in this area for processing substrates. Components intended for this area must, for example, meet increased material durability and requirements.
- the external atmosphere area is to be understood in particular as an area in which normal atmospheric conditions prevail, e.g. room air.
- the drive unit can be assigned here at least partially, in particular completely, to the outside atmosphere area and the valve closure in particular to the process atmosphere area.
- the separating device of the valve can be formed by a bellows, for example.
- the bellows can be provided within the valve housing or the drive unit.
- a valve known from the prior art and described, for example, in US Pat. No. 6,772,989 has a valve body with two ports, a valve seat arranged in a flow path in the flow chamber connecting the two ports, and an opening opposite the valve seat.
- a piston of a pneumatic cylinder system that closes the valve cover is arranged, which drives a valve plate, which opens and closes the valve seat, via a valve rod.
- the valve cover is attached to the opening in a gas-tight manner by means of a bellows plate.
- the two ends of a bellows, which surrounds the valve rod, are attached in a gas-tight manner to the inner peripheral surface of the bellows plate and to the valve disk.
- the valve disk On the surface facing the valve seat, the valve disk has an annular retaining groove in which a sealing ring is arranged.
- a valve body is made of aluminum or stainless steel, for example, or is coated on the inside with aluminum or another suitable material, while the valve disk and the bellows are usually made of steel.
- the bellows which can be expanded and compressed in its longitudinal axis within the range of the adjustment path of the plate, seals the flow space from the valve rod and the drive in an airtight manner.
- Two types of bellows are mainly used.
- the membrane bellows on the other hand the corrugated bellows, which is distinguished from the membrane bellows in that it has no weld seams and can be cleaned more easily, but has a lower maximum stroke.
- the invention also relates to a valve closure, in particular a valve disk, in particular a vacuum valve disk, for a vacuum valve, the valve closure being designed to regulate a volume or mass flow and/or to close and open a valve opening defined by a valve seat of the valve in a gas-tight manner by means of interaction with the valve opening.
- the valve closure has a second sealing surface which is mated with a first which is the Valve opening circumferential sealing surface of the valve seat corresponds and also has a arranged on the second sealing surface, in particular vulcanized, sealing material.
- the valve closure has a radio system, in particular an RFID transponder, with at least one coupling element and one memory element, the memory element providing information regarding a valve status and/or being designed so that such valve-specific information can be stored on the memory element.
- a radio system in particular an RFID transponder, with at least one coupling element and one memory element, the memory element providing information regarding a valve status and/or being designed so that such valve-specific information can be stored on the memory element.
- An advantage of such an arrangement of a radio system on or in a valve closure is the associated possibility of detecting a current valve status and, based on this detected valve status, making a decision for the further operation of the valve, for example an adjustment of the closing movement (speed, contact pressure, etc .) or plan to replace the valve closure.
- the memory element of the radio system can provide information regarding the valve closure as the valve state, in particular at least one of the following items of information:
- identification information in particular a valve closure type or a part number and/or serial number of the valve closure
- production information in particular production date and/or production location
- the invention also relates to a method for controlling a valve as described above.
- the procedure comprises at least the following steps:
- the invention also relates to a
- Computer program product with program code stored on a machine-readable medium, in particular a control and processing unit of a valve described above, or computer data signal, embodied by an electromagnetic wave, for carrying out or controlling the steps of the above method.
- 1a-c a first embodiment of a valve according to the invention with an RFID transponder
- 2a-b show a further embodiment of a valve according to the invention as a pendulum valve
- 3a-b show a further embodiment of a valve according to the invention as a monovalve
- FIG. 5 shows a further embodiment of an RFID arrangement of a valve according to the invention.
- Figures la-lc show an embodiment of a valve 1 according to the invention, which is designed as a vacuum transfer valve 1, shown in different closed positions.
- the vacuum valve 1 has a rectangular, plate-shaped valve closure 4 (valve disk), which has a sealing surface 6 (second sealing surface) for sealing an opening 2 in a gas-tight manner.
- the opening 2 has a dem
- Valve closure 4 corresponding cross-section and is formed in a wall 12.
- the wall 12 can be the wall of a vacuum process chamber, for example.
- the opening 2 is surrounded by a valve seat, which in turn also provides a sealing surface 3 (first sealing surface) corresponding to the sealing surface 6 of the valve closure 4 .
- the sealing surface 6 of the valve closure 4 runs around the valve closure 4 and has a sealing material (seal). In a Closed position S ( Figure lc), the seal between the sealing surfaces 6 and 3 is pressed.
- the opening 2 connects a first gas region L, which is to the left of the wall 12, with a second gas region R, to the right of the wall 12.
- the wall 12 is formed, for example, by a chamber wall of a vacuum chamber.
- the vacuum valve 1 is then formed by the chamber wall 12 interacting with the valve closure 4 .
- valve seat together with the first sealing surface 3 can alternatively be designed as a valve component which is structurally firmly connected to the valve 1 and can be arranged, e.g. screwed, on a chamber opening, for example.
- valve closure 4 can be arranged on an adjustment arm 5, which is rod-shaped here, for example, and extends along a geometric adjustment axis V.
- the adjusting arm 5 is mechanically coupled to a drive unit 7, by means of which the closure member 4 in the first gas region L to the left of the wall 12 by adjusting the adjusting arm 5 by means of the
- valve closure 4 In the open position 0, the valve closure 4 is outside a projection area of the opening 2 and completely releases it, as shown in FIG.
- Valve closure 4 By linearly adjusting the valve closure 4 in the axial direction in a plane parallel to or coaxial with the adjustment axis V and parallel to the wall 12 Valve closure 4 can be adjusted from the open position 0 to the intermediate position Z by means of the drive unit 7 .
- valve closure 4 By adjusting in the direction of the opening axis A defined by the opening 2 (here: transverse to the adjustment axis V), e.g. perpendicular to the wall 12 and to the valve seat, the valve closure 4 can be adjusted from the intermediate position Z to the closed position S ( Figure 1c).
- the valve disk 4 closes the opening 2 in a gas-tight manner and separates the first gas region L from the second gas region R in a gas-tight manner.
- the vacuum valve is opened and closed by means of the drive unit 7, here by an L-shaped movement in two, for example, mutually perpendicular directions H and A of the valve closure 4.
- the valve shown is therefore also called an L-type valve.
- a transfer valve 1 as shown is typically used for
- the vacuum valve 1 also has a radio system 10 with a coupling element, for example an antenna, and a storage element.
- the radio arrangement 10 is arranged on the valve closure 4 .
- Information can be stored on the storage element, for example, which allows an identification of a version (type) of the valve closure 4 and/or enables a position determination.
- the radio arrangement 10 can in particular be in the form of an RFID transponder (RFID tag).
- RFID tag RFID transponder
- the valve 1 has a communication arrangement that interacts with the radio arrangement 10 , here in the form of an antenna 11 .
- the antenna 11 is arranged on the drive unit 7 .
- the antenna 11 is also coupled to a read/write unit.
- the read/write unit can also be arranged on the side of the valve 1 or can alternatively be designed separately from it, in particular as part of a control unit.
- the antenna 11 can form a unit with the read/write unit.
- the antenna 11 can be coupled to the read/write unit, for example, by cable or inductively.
- the radio arrangement 10 and the antenna 11 are arranged and designed in such a way that at least in the open position 0 information transmission or communication between the radio arrangement 10 and the antenna 11 can be carried out.
- the open position 0 there is a minimal distance between radio arrangement 10 and antenna 11 due to the construction, as a result of which communication is best possible in this position.
- radio system 10 and antenna 11 (or the downstream read/write unit) can be designed in such a way that due to the transmission and reception ranges of these components is only possible in the open position 0.
- the read/write unit can be controlled in such a way that it attempts to establish a connection with the transponder 10 only when the open position 0 is reached or is close to the open position 0.
- a corresponding signal for activating the read/write unit can be triggered, for example, by the drive unit 7, e.g. by triggering a limit switch when the open position 0 is reached.
- the communication between the radio arrangement 10 and the read/write unit can, for example, provide a confirmation that the open position 0 has been reached.
- a type identification it can be verified whether a valve closure suitable for the valve 1 is installed.
- a corresponding signal can be generated and output.
- a user can be warned based on the signal or the controller (control and processing unit) can be prompted to adapt its functionality.
- the controller can prevent further operation of the drive unit in the event of a corresponding warning signal in order to avoid potential damage to the valve 1 if it continues to be operated.
- the memory of the radio device may contain 10 calibration data as part of a Precalibration of the valve closure 4 were determined on a similar valve 1 for precisely this valve closure 4, ie data, for example, with respect to a specific target positioning and / or with respect to a specific contact pressure to provide a desired seal.
- This data can, for example, be read out after the valve disk 4 has been replaced and taken over and/or further processed by a control and processing unit that controls the drive 7 of the valve 1 .
- the closing movement for the respectively installed valve closure 4 can be individually adjusted and thus optimized.
- information can be stored on the radio arrangement 10 by the read/write unit.
- a current number of closing processes that have already been carried out with the installed valve disk 4 can be updated in the memory continuously with each operating cycle.
- an actual service life for the disk 4 can thus be read out and the maintenance work can be adapted to the service life. For example, it can be decided depending on whether a complete replacement of the plate 4 is necessary or replacement of the seal (on the sealing surface 6) seems sufficient.
- the RFID tag 10 of the valve disk 4 can contain programming data which embody programming of a valve-side control and processing unit.
- the tag 10 may provide firmware or firmware update configuring the valve to operate is.
- This provided programming can be read out via the antenna 11 and further processed in such a way that the programming is stored (installed) as the current controller and is provided and/or executed on the valve-side control and processing unit for operating the valve.
- FIG. 2a and FIG. 2b schematically show a further possible embodiment of the vacuum valve according to the invention in the form of a pendulum valve 20.
- the opening 22 here has, for example, a circular cross section.
- the opening 22 is surrounded by a valve seat.
- This valve seat is formed by a (first) sealing surface 23 which points axially in the direction of a valve disk 24 (valve closure) and runs transversely to the opening axis A and has the shape of a circular ring, which is formed in the valve housing.
- the valve disk 24 can be pivoted about an axis of rotation R and can be adjusted essentially parallel to the axis A of opening.
- valve disk 24 In a closed position S (FIG. 2b) of the valve disk 24 (valve closure), the opening 22 is closed gas-tight by means of the valve disk 24, which has a second sealing surface 26 with sealing material.
- An open position of the valve disk 24 is illustrated in FIG. 2a.
- the valve disk 24 is connected to a drive unit 27 via an adjustment element 25 (arm) which is arranged laterally on the disk and extends perpendicularly to the opening axis A.
- This arm 25 is in the closed position of the valve plate 24 outside of the opening cross-section of the opening 22 geometrically projected along the opening axis A.
- the drive 27 is designed by using a motor and a corresponding gear in such a way that the valve disk 24 - as is usual with a pendulum valve - by means of a transverse movement x of the drive 27 transverse to the opening axis A and essentially parallel over the cross section of the opening 22 and perpendicular to the
- the opening axis A can be pivoted in the form of a pivoting movement about the pivot axis R between an open position and an intermediate position and can be linearly displaced by means of a longitudinal movement of the drive 27 parallel to the opening axis A.
- the valve disk 24 In the open position, the valve disk 24 is positioned in a dwell section arranged laterally next to the opening 222, so that the opening 22 and the flow path are released.
- valve disk 24 In the intermediate position, the valve disk 24 is positioned at a distance above the opening 22 and covers the opening cross section of the opening 22. In the closed position S, the opening 22 is closed in a gas-tight manner and the flow path is interrupted by a gas-tight contact between the sealing surface 26 of the valve closure 24 (valve disk) and the sealing surface 23 of the valve seat by means of a sealing material.
- valve 20 is provided, for example, with an electronic regulation and control unit (control and processing unit) (not shown), which is designed in this way and is connected in this way to the drive 27 That the valve disk 24 to close a process volume or is correspondingly adjustable for controlling an internal pressure of this volume.
- control and processing unit control and processing unit
- the drive 27 is designed as an electric motor, the transmission being switchable in such a way that driving the drive 27 causes either the transverse movement x or the longitudinal movement.
- the drive including the gearbox is electronically controlled by the controller. Transmissions of this type, in particular with link gears, are known from the prior art. Furthermore, it is possible to use several drives to bring about the rotational movement and the linear movement, with the controller taking over the actuation of the drives.
- the precise control or setting of the flow rate with the pendulum valve 20 described is not only possible by pivoting the valve disk 24 between the open position 0 and the intermediate position by means of the transverse movement, but above all by linearly adjusting the valve disk 24 along the opening axis A or R between the intermediate position and the closed position S possible by means of the longitudinal movement.
- the pendulum valve described can be used for precise control tasks.
- Both the valve disk 24 and the valve seat each have a sealing surface—a first and a second sealing surface 23 and 26.
- the second sealing surface 26 of the valve disk 24 also has the seal 28.
- This seal 28 can, for example, be vulcanized as a polymer onto the valve disk 24 by means of vulcanization.
- the seal 28 can be designed, for example, as an O-ring in a groove of the valve seat.
- a Sealing material may be glued to the valve disk 24 or the valve seat and thereby embody the seal 28.
- the seal 28 can be arranged on the side of the valve seat, in particular on the first sealing surface 23 . Combinations of these versions are also conceivable.
- such seals 28 are not limited to the valve 20 described in the example, but can also be used in the other valve embodiments described.
- the valve plate 24 is variably adjusted, for example, based on controlled variables and an output control signal. For example, information about a current pressure state in a process volume connected to the valve 20 is obtained as an input signal.
- the controller can be provided with another input variable, e.g. a mass inflow into the volume.
- the valve 20 is then adjusted in a controlled manner over the time of a control cycle, so that a mass outflow from the volume is controlled over time by means of the valve 20 can.
- a vacuum pump can be provided behind the valve 20, i.e. the valve 20 is arranged between the process chamber and the pump. A desired pressure profile can thus be regulated.
- valve closure 24 By adjusting the valve closure 24, a respective opening cross-section for the valve opening 22 is adjusted and the possible amount of gas that can be evacuated from the process volume per unit time is adjusted.
- the valve closure 24 can have a shape that deviates from a circular shape, in particular to achieve a media flow that is as laminar as possible.
- the valve 20 also has two RFID transponders 10 and 10' and forms a respective radio arrangement.
- a first of the RFID transponders 10 is arranged on the valve disk 24 in the area of the second sealing surface 26 .
- a second of the RFID transponders 10 ′ is arranged on the adjustment arm 25 .
- the RFID transponders 10 and 10' are integrated into the respective components.
- valve 20 has two
- Communication arrangements 11 and 11' A first of the communication arrangements 11 is arranged on the valve seat in the area of the first sealing surface 23 .
- a second of the communication arrangements 11' is arranged on the valve housing.
- the communication arrangements 11 and 11' are integrated into the respective components.
- the communication arrangements 11 and 11' each have an antenna, a read/write unit and optionally an integrated energy source or a connection to an energy supply.
- the RFID transponder 10 and the communication arrangement 11 are designed and arranged in such a way that corresponding communication in the intermediate position and/or in the closed position S is possible. On the other hand, an exchange of information is not possible in the open position 0. The components are thus matched to each other with a small range.
- This combination of RFID transponders 10 and communication arrangement 11 can be used, for example, to determine whether the valve disk 24 is in the closed position S, and to generate appropriate feedback.
- the RFID transponder 10′ and the communication arrangement 11′ are designed and arranged in such a way that these components are opposite each other only in the open position 0 and corresponding communication is only possible in the open position 0.
- the communication arrangement 11' is arranged in such a way that it is covered by the arm 25 in FIG. 2a. With this combination, it is also possible to determine when a specific position (open position 0) has been reached. In addition, closing and opening cycles of the valve 20 are counted and a corresponding number is continuously stored directly on the RFID transponder 10' (RFID
- the transponder 10 can alternatively or additionally contain identification information.
- identification information For example, a disk type or a part and/or serial number of the valve disk 24 can be stored. The same also applies to the transponder 10' with regard to information about the adjustment arm 25.
- the transponder 10 can also provide information about a quality and/or a condition of the valve closure 24 or the sealing material 28 present.
- information about a quality and/or a condition of the valve closure 24 or the sealing material 28 present can be stored that specifies a size of the valve disk 24, for example a thickness of the disk 24, describe as well as a used sealing material.
- the control of the valve 20 can be adapted on the basis of this information in such a way that a desired contact pressure is generated when the valve 20 is closed.
- At least one of the RFID transponders 10 and 10' can provide production information, in particular a production date and/or a production location. In the event of a breakdown, this makes it possible to determine quickly, reliably and efficiently where and under what conditions the component in question was manufactured. Troubleshooting in the production process is thus significantly simplified.
- FIGs 3a and 3b schematically show another embodiment of a vacuum valve 30 according to the invention.
- the valve 30 is designed as a so-called monovalve and shown in cross section in an open position 0 (Fig. 3a) and a closed position S (Fig. 3b).
- the valve 30 for gas-tight closing of a flow path by means of a linear movement has a valve housing 39 with an opening 32 for the flow path, the opening 32 having a geometric opening axis A along the flow path.
- the opening 32 connects a first gas area L, which is located to the left of the valve 30 or a partition wall (not shown) in the drawing, with a second gas area R to the right of it.
- a partition is formed, for example, by a chamber wall of a vacuum chamber.
- the closure element 34 (valve disk) is linear along a geometric adjustment axis V running transversely to the opening axis H in a closure element plane from an open position 0 releasing the opening 32 to a closed position S linearly pushed over the opening 32 in a closing direction and vice versa back in an opening direction by means of a drive unit 37 with a movable actuating element 35, in the example an adjusting arm, displaceable.
- a (curved) first sealing surface 33 surrounds the opening 32 of the valve housing 39 along a first portion 33a in a first plane 38a and along a second portion 33b in a second plane 38b.
- the first plane 38a and the second plane 38b are spaced apart from one another, parallel to one another and parallel to the closure element plane.
- the first section 33a and the opposite second section 33b have a geometric offset to one another transversely to the adjustment axis V and in the direction of the opening axis A.
- the opening 32 is arranged between the two opposing sections 33a and 33b in the area extending along the adjustment axis V.
- the closure element 34 has a second sealing surface 36 which corresponds to the first sealing surface 33 and runs along sections which correspond to the first and second sections 33a, 33b.
- a sealing material forming a seal is provided on the first sealing surface 33 of the valve seat.
- the seal the second sealing surface 36 of the valve closure.
- the seal can, for example, be vulcanized as a polymer onto the valve seat by means of vulcanization.
- the seal can be designed, for example, as an O-ring in a groove in the valve seat.
- a sealing material can also be glued onto the valve seat and thereby embody the seal.
- seals are not limited to the valve 1 described in the example, but can also be used in the other valve embodiments described.
- Monovalves i.e. vacuum valves that can be closed by means of a single linear movement
- the closure element can also be designed in one piece, it can be exposed to high acceleration forces, so that this valve can also be used for quick and emergency closures.
- the closing and sealing can take place by means of a single linear movement, so that the valve 30 can be closed and opened very quickly.
- one advantage of monovalves is, for example, that the seal is not subject to any transverse loading in the transverse direction to the longitudinal extension of the seal due to its course when it is closed.
- the seal due to its transverse extent to the opening axis A, the seal is hardly able to withstand the forces occurring on the closure element 34 along the opening axis H, which in particular are large differential pressure can act on the closure element 34, which means that the structure of the
- the vacuum valve 30 also has a bellows 31 .
- the bellows 31 is connected to the valve closure 34 on the one hand and to the valve housing 39 on the other hand. In this way, an atmospheric separation of the drive unit 37 and the adjustment arm 35 from a process volume can be provided.
- Fig. 1 When the valve is open (Fig.
- the vacuum valve 30 shown in FIGS. 3a and 3b comprises a radio arrangement 10 and a communication arrangement 11 interacting with the radio arrangement 10.
- the two arrangements can be moved towards and away from one another using the drive unit 37 along a direct axis.
- This constellation can make a distance determination between the radio arrangement 10 and the communication arrangement 11 accessible.
- the distance can be determined, for example, by measuring the signal strength or by superimposing an additional localization signal on the normal radio signal of the communication arrangement 11 .
- the localization signal can be designed in such a way that it is repeated periodically.
- the signal selected is so weak that it remains undetected by the RFID transponder.
- the tag's response to the actual radio signal remains unaffected, the ones read out So data is transferred as usual.
- the RFID tag reflects back parts of the localization signal.
- the radio system 10 can have identification information for the valve disk 34 and the communication system 11 can be configured to read out this information.
- FIG. 4 shows a radio arrangement 10 and a communication arrangement 11 of a valve according to the invention.
- the radio arrangement 10 is in the form of an RFID transponder (RFID tag) and has a coupling element 42 and a memory element 41 .
- the coupling element 42 can be embodied as an antenna, for example.
- the communication arrangement 11 also has a coupling element, here in the form of an antenna 43, and a read/write arrangement 44. According to another embodiment that is not shown, the communication arrangement 11 can only have an antenna 43 or can be designed as an antenna.
- the RFID tag 10 also has a microchip, which provides data management for the memory element 41 .
- the coupling element 42 of the RFID tag 10 and the antenna 43 of the communication arrangement 11 are in a coupled communication state, ie the two components are coupled and information is exchanged.
- the coupling is by means of a
- the coupling can be established in particular when the distance between the two coupling elements falls below a certain minimum. Such a minimum distance depends, for example, on a signal strength that can be generated and/or on a transmission frequency that is used.
- FIG. 5 shows a further embodiment of a radio arrangement 10 and a communication arrangement 11 of a vacuum valve according to the invention.
- the radio arrangement 10 and a communication arrangement 11 of a vacuum valve according to the invention.
- the communication arrangement 11 has a circuit 44' designed for internal coupling to the antenna 43, as well as a reading chip 45.
- the circuit 44 'and the reading chip 45 thus form a reading unit for reading the tag 10.
- Microprocessor 46 provided for control and data processing with the reading unit.
Abstract
Description
Claims
Priority Applications (3)
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JP2023549590A JP2024506411A (ja) | 2021-02-17 | 2022-02-16 | 無線アセンブリを備えた真空バルブ |
CN202280013227.2A CN116848345A (zh) | 2021-02-17 | 2022-02-16 | 具有无线电装置的真空阀 |
KR1020237026793A KR20230145341A (ko) | 2021-02-17 | 2022-02-16 | 무선 장치가 있는 진공 밸브 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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DE102021000787.5A DE102021000787A1 (de) | 2021-02-17 | 2021-02-17 | Ventil mit Funkanordnung |
DE102021000787.5 | 2021-02-17 |
Publications (1)
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WO2022175320A1 true WO2022175320A1 (de) | 2022-08-25 |
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PCT/EP2022/053809 WO2022175320A1 (de) | 2021-02-17 | 2022-02-16 | Vakuumventil mit funkanordnung |
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Country | Link |
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JP (1) | JP2024506411A (de) |
KR (1) | KR20230145341A (de) |
CN (1) | CN116848345A (de) |
DE (1) | DE102021000787A1 (de) |
TW (1) | TW202248556A (de) |
WO (1) | WO2022175320A1 (de) |
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DE102021002577A1 (de) | 2021-05-18 | 2022-11-24 | Vat Holding Ag | Hochfrequenz-Erdungsvorrichtung und Vakuumventil mit Hochfrequenz-Erdungsvorrichtung |
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JP2024506411A (ja) | 2024-02-13 |
KR20230145341A (ko) | 2023-10-17 |
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