WO2022168262A1 - 羽根部材、構造部材 - Google Patents

羽根部材、構造部材 Download PDF

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Publication number
WO2022168262A1
WO2022168262A1 PCT/JP2021/004308 JP2021004308W WO2022168262A1 WO 2022168262 A1 WO2022168262 A1 WO 2022168262A1 JP 2021004308 W JP2021004308 W JP 2021004308W WO 2022168262 A1 WO2022168262 A1 WO 2022168262A1
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WO
WIPO (PCT)
Prior art keywords
groove
groove structure
structures
region
groove structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/004308
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
雅之 白石
高広 倉島
麦 小笠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2022579260A priority Critical patent/JPWO2022168262A1/ja
Priority to CN202180096705.6A priority patent/CN117157451A/zh
Priority to EP21924657.6A priority patent/EP4290049A4/en
Priority to PCT/JP2021/004308 priority patent/WO2022168262A1/ja
Priority to US18/275,367 priority patent/US12607125B2/en
Publication of WO2022168262A1 publication Critical patent/WO2022168262A1/ja
Anticipated expiration legal-status Critical
Priority to JP2025028807A priority patent/JP2025100532A/ja
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/14—Form or construction
    • F01D5/141—Shape, i.e. outer, aerodynamic form
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/14—Form or construction
    • F01D5/141—Shape, i.e. outer, aerodynamic form
    • F01D5/145—Means for influencing boundary layers or secondary circulations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03D—WIND MOTORS
    • F03D1/00—Wind motors with rotation axis substantially parallel to the air flow entering the rotor 
    • F03D1/06—Rotors
    • F03D1/0608—Rotors characterised by their aerodynamic shape
    • F03D1/0633—Rotors characterised by their aerodynamic shape of the blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F15D1/002—Influencing flow of fluids by influencing the boundary layer
    • F15D1/0025—Influencing flow of fluids by influencing the boundary layer using passive means, i.e. without external energy supply
    • F15D1/003—Influencing flow of fluids by influencing the boundary layer using passive means, i.e. without external energy supply comprising surface features, e.g. indentations or protrusions
    • F15D1/0035—Influencing flow of fluids by influencing the boundary layer using passive means, i.e. without external energy supply comprising surface features, e.g. indentations or protrusions in the form of riblets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F15D1/002—Influencing flow of fluids by influencing the boundary layer
    • F15D1/0025—Influencing flow of fluids by influencing the boundary layer using passive means, i.e. without external energy supply
    • F15D1/003—Influencing flow of fluids by influencing the boundary layer using passive means, i.e. without external energy supply comprising surface features, e.g. indentations or protrusions
    • F15D1/0035—Influencing flow of fluids by influencing the boundary layer using passive means, i.e. without external energy supply comprising surface features, e.g. indentations or protrusions in the form of riblets
    • F15D1/004—Influencing flow of fluids by influencing the boundary layer using passive means, i.e. without external energy supply comprising surface features, e.g. indentations or protrusions in the form of riblets oriented essentially parallel to the direction of flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2230/00—Manufacture
    • F05B2230/30—Manufacture with deposition of material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/10—Manufacture by removing material
    • F05D2230/13—Manufacture by removing material using lasers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/30—Manufacture with deposition of material
    • F05D2230/31—Layer deposition
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/60—Structure; Surface texture
    • F05D2250/61—Structure; Surface texture corrugated

Definitions

  • a blade member having a groove structure formed on its surface, the groove structure comprising a plurality of first groove structures, a plurality of second groove structures and a third groove structure.
  • the plurality of first groove structures are formed to extend in a first direction
  • the plurality of second groove structures are formed to extend in a second direction different from the first direction
  • the third groove structure extends along a third direction different from the first and second directions, and includes one first groove structure among the plurality of first groove structures and the plurality of second grooves.
  • a vane member is provided that is formed between the second channel structure of one of the structures.
  • a vane member having a groove structure formed on its surface, said groove structure comprising a plurality of first groove structures, a plurality of second groove structures and a third groove structure.
  • the plurality of first groove structures have a first wavy shape extending in a first direction, and are formed to line up at a first arrangement pitch along a direction intersecting the first direction
  • the plurality of second groove structures have a second wavy shape extending in a second direction, and have a second arrangement pitch different from the first arrangement pitch along a direction intersecting the second direction.
  • the third groove structure has a third wave shape extending in a third direction, and one first groove structure among the plurality of first groove structures and the plurality of groove structures A vane member is provided that is formed between one of the second groove structures.
  • the blade member has a groove structure formed on the surface thereof, the first region having the groove structure extending in the first direction and the second region having no groove structure. , a third region located between the first region and the second region and formed with a groove structure connected to the groove structure of the first region, and formed in the third region.
  • a blade member is provided in which the depth of the groove structure becomes shallower from the first area toward the second area.
  • a structural member having a groove structure formed on its surface, said groove structure comprising a plurality of first groove structures, a plurality of second groove structures and a third groove structure.
  • the plurality of first groove structures are formed to extend in a first direction
  • the plurality of second groove structures are formed to extend in a second direction
  • the third groove structure is formed to: extending along a third direction and formed between a first groove structure of the plurality of first groove structures and a second groove structure of the plurality of second groove structures;
  • a structural member having a groove structure formed on its surface, said groove structure comprising a plurality of first groove structures, a plurality of second groove structures and a third groove structure.
  • the plurality of first groove structures have a first wavy shape extending in a first direction, and are formed to line up at a first arrangement pitch along a direction intersecting the first direction
  • the plurality of second groove structures have a second wavy shape extending in a second direction, and are formed so as to be arranged at a second arrangement pitch along a direction intersecting the second direction
  • the third groove structure has a third wave shape extending in a third direction, and is one of the plurality of first groove structures and one of the plurality of second groove structures.
  • a structural member is provided that is formed between the second channel structure.
  • a structural member having a groove structure formed on its surface, the groove structure comprising a plurality of first groove structures, a plurality of second groove structures and a third groove structure.
  • the plurality of first groove structures have a first wavy shape extending in a first direction, and are formed to line up at a first arrangement pitch along a direction intersecting the first direction
  • the plurality of second groove structures extend in a second direction and are arranged at a second arrangement pitch along a direction intersecting the second direction.
  • a third wave shape extending in three directions, and between one first groove structure of the plurality of first groove structures and one second groove structure of the plurality of second groove structures;
  • FIG. 1 is a cross-sectional view schematically showing the overall structure of the processing system of this embodiment.
  • FIG. 2 is a system configuration diagram showing the system configuration of the processing system of this embodiment.
  • FIG. 3 is a perspective view showing the appearance of the turbine.
  • FIG. 4 is a perspective view showing the appearance of a turbine blade.
  • FIG. 5 is a perspective view showing the appearance of a turbine blade.
  • FIG. 6(a) is a perspective view showing the riblet structure
  • FIG. 6(b) is a cross-sectional view showing the riblet structure (cross-sectional view of FIG. 6(a) VI-VI′)
  • FIG. ) is a top view showing the riblet structure.
  • FIG. 1 is a cross-sectional view schematically showing the overall structure of the processing system of this embodiment.
  • FIG. 2 is a system configuration diagram showing the system configuration of the processing system of this embodiment.
  • FIG. 3 is a perspective view showing the appearance of the turbine.
  • FIG. 4 is
  • Embodiments of the blade member, the structural member, the processing system, and the processing method will be described below with reference to the drawings. Embodiments of a blade member, a structural member, a processing system, and a processing method will be described below using a processing system SYS that performs processing using processing light EL. However, the present invention is not limited to the embodiments described below.
  • the processing apparatus 1 may perform removal processing to remove a part of the work W by irradiating the work W with the processing light EL.
  • the processing apparatus 1 forms a riblet structure RB on the surface of the work W by performing removal processing, which will be described in detail later with reference to FIG. 6 .
  • the riblet structure RB may include a structure capable of reducing the resistance of the surface of the workpiece W to fluid (particularly, at least one of frictional resistance and turbulent frictional resistance).
  • the riblet structure RB may include a structure capable of reducing noise generated when the fluid moves relative to the surface of the workpiece W.
  • the term "fluid" used herein means a medium (for example, at least one of gas and liquid) flowing on the surface of the workpiece W.
  • the turbine T is rotatable using the flow of fluid supplied to it.
  • the turbine T is supplied with a fluid (eg, at least one of water, steam, air, and gas). Fluid supplied to the turbine T flows along the surface of each of the plurality of turbine blades BL. For this reason, the turbine blade BL is used in fluid. As a result, the kinetic energy of the fluid is converted into rotational energy of the turbine T by the plurality of turbine blades BL.
  • a turbine T is at least one of a steam turbine using steam as a fluid and a gas turbine using gas as a fluid.
  • Another example of such a turbine T is at least one of a water turbine using water as a fluid and a buoyancy turbine using air as a fluid.
  • the turbine T may also generate a fluid flow by its rotation.
  • the turbine T shown in FIGS. 3 and 4 has axial-flow turbine blades BL. That is, the turbine T shown in FIGS. 3 and 4 is an axial turbine. However, turbine T may also be a radial turbine, as shown in FIG. In a radial turbine, the fluid enters the turbine blades BL parallel to the axis of rotation 120 of the turbine blade BL and crosses the axis of rotation 120 from the exit portion 160, as indicated by arrows F1 and F2 in FIG. flow in the direction
  • a propeller is, for example, a member (typically a rotating body) that converts the rotational force output from a prime mover, including at least one of an engine and a motor, into the propulsion force of a moving object, including at least one of an airplane and a ship.
  • the workpiece W may be at least a portion of an impeller (for example, a member forming blades of a fan or propeller).
  • An impeller is, for example, a member used in a pump, and is an impeller that can rotate so that the pump generates a force that pumps (or draws) fluid.
  • the work W may be at least part of a stationary splitter plate that is arranged around the impeller.
  • the workpiece W may be a blade of a wind turbine used for wind power generation (that is, a blade). That is, the riblet structure RB may be formed on the blade of the wind turbine. In particular, the riblet structure RB may be formed in a windmill blade for obtaining clean energy (or natural energy or renewable energy) with low environmental impact. In this case, energy efficiency can be improved.
  • the processing apparatus 1 includes a processing head 11, a head drive system 12, a stage 13, and a stage drive system 14.
  • the machining head 1 irradiates the workpiece W with machining light EL from the machining light source 2 .
  • the processing head 11 includes a processing optical system 111 .
  • the processing head 11 irradiates the work W with the processing light EL through the processing optical system 111 .
  • the processing optical system 111 may focus the processing light EL on the surface of the workpiece W, for example.
  • the processing optical system 111 may control, for example, optical characteristics of the processing light EL.
  • the stage drive system 14 moves the stage 13 under the control of the control device 3 . Specifically, the stage drive system 14 moves the stage 13 with respect to the processing head 11 .
  • the stage drive system 14 may move the stage 13 along at least one of the X-axis direction, Y-axis direction, Z-axis direction, ⁇ X direction, ⁇ Y direction, and ⁇ Z direction under the control of the control device 3. good. It should be noted that moving the stage 13 along at least one of the ⁇ X direction, ⁇ Y direction, and ⁇ Z direction corresponds to the X-axis, Y-axis, and Z-axis of the stage 13 (furthermore, the workpiece W placed on the stage 13).
  • the control device 3 does not have to be provided inside the processing system SYS.
  • the control device 3 may be provided as a server or the like outside the machining system SYS.
  • the control device 3 and the processing system SYS may be connected by a wired and/or wireless network (or data bus and/or communication line).
  • a wired network a network using a serial bus interface represented by at least one of IEEE1394, RS-232x, RS-422, RS-423, RS-485 and USB may be used.
  • a network using a parallel bus interface may be used as the wired network.
  • each process and function included in the computer program may be realized by a logical processing block realized in the control device 3 by the control device 3 (that is, computer) executing the computer program, It may be implemented by hardware such as a predetermined gate array (FPGA, ASIC) provided in the control device 3, or a mixture of logical processing blocks and partial hardware modules that implement some hardware elements. It can be implemented in the form of
  • the mountain structure 8 may be regarded as a structure protruding from the groove structure 9.
  • the mountain structure 8 may be regarded as a structure that forms at least one of a projection-shaped structure, a convex-shaped structure, and a mountain-shaped structure between two adjacent groove structures 9 .
  • the groove structure 9 may be regarded as a structure recessed from the mountain structure 8 .
  • the groove structure 9 may be regarded as a structure that forms a groove-shaped structure between two adjacent mountain structures 8 .
  • the processing system SYS may form the riblet structure RB such that at least part of one mountain structure 8 extends along the streamline.
  • the processing system SYS may form the riblet structure RB such that at least one of the plurality of groove structures 9 extends along the direction determined based on the streamline.
  • the processing system SYS may form the riblet structure RB such that at least part of one groove structure 9 extends along a direction determined based on the streamline.
  • the processing system SYS may form the riblet structure RB such that at least one of the plurality of mountain structures 8 extends along the direction determined based on the streamline.
  • the processing system SYS may form the riblet structure RB such that at least part of one mountain structure 8 extends along a direction determined based on the streamline.
  • the control device 3 acquires information about streamlines (hereinafter referred to as "streamline information") (step S101).
  • the streamline information may include information indicating the direction of the streamline (that is, the direction of the velocity vector of the flow field).
  • FIG. 10 schematically shows an example of streamline information.
  • the streamline information may include information indicating the direction of the streamline at each position on the surface of the turbine blade BL.
  • the streamline information may include information indicating the direction of the streamline at each of multiple locations (ie, at least two locations) on the surface of the turbine blade BL. For example, as shown in FIG.
  • the control device 3 may read the streamline information stored in the storage device.
  • the control device 3 may acquire streamline information from a recording medium that can be externally attached to the processing system SYS using a recording medium reading device (not shown) provided in the processing system SYS.
  • the control device 3 uses a communication device included in the processing system SYS to acquire (that is, download) streamline information from a device external to the processing system SYS that can communicate with the processing system SYS via a communication network.
  • the control device 3 may acquire streamline information by generating streamline information. Specifically, for example, based on the model information indicating the three-dimensional model of the turbine blade BL and the characteristic information regarding the characteristics of the fluid flowing on the surface of the turbine blade BL, the control device 3 causes the viscosity of the fluid to cause A shear stress (for example, a wall shear stress) acting on the surface of the turbine blade BL may be calculated. After that, the control device 3 may calculate the streamline at each position on the surface of the turbine blade BL based on the calculated wall shear stress.
  • a shear stress for example, a wall shear stress
  • the control device 3 may read the pitch information stored in the storage device. For example, the control device 3 may acquire pitch information from a recording medium that can be externally attached to the processing system SYS using a recording medium reading device (not shown) provided in the processing system SYS. For example, the control device 3 uses a communication device provided in the processing system SYS to acquire (that is, download) pitch information from a device external to the processing system SYS that can communicate with the processing system SYS via a communication network. good too.
  • the control device 3 sets (that is, determines or calculates) the position where the groove structure 9 is formed on the surface of the turbine blade BL (step S103).
  • the groove structure 9 extends linearly on the surface of the turbine blade BL. Therefore, the control device 3 may set a line representing the trajectory along which the groove structure 9 extends as the position where the groove structure 9 is formed.
  • the line representing the trajectory along which the groove structure 9 extends will be referred to as a "riblet line RL".
  • the riblet line RL may be a line representing the trajectory along which the mountain structure 8 extends.
  • the control device 3 may set the riblet line RL, which is the line representing the locus along which the mountain structure 8 extends, in addition to or instead of the riblet line RL, which is the line representing the locus along which the groove structure 9 extends.
  • the riblet line RL which is a line representing the trajectory along which the groove structure 9 extends, will be explained below.
  • the following description can be used as a description of the riblet line RL corresponding to the line representing the trajectory of the mountain structure 8 by replacing the term "groove structure 9" with the term "mountain structure 8".
  • the control device 3 sets the riblet line RL based on the streamline information acquired in step S101 and the pitch information acquired in step S102. Specifically, the control device 3 identifies the direction of the streamline at each position on the surface of the turbine blade BL based on the streamline information. Furthermore, based on the pitch information, the control device 3 specifies the arrangement pitch of the groove structures 9 formed at each position on the surface of the turbine blade BL. After that, the control device 3 creates a plurality of riblet lines RL that extend along the specified direction of the streamline and are arranged parallel to each other at the specified arrangement pitch along the direction that intersects the specified direction of the streamline, It is set at each position on the surface of the turbine blade BL.
  • control device 3 ensures that the direction in which the plurality of riblet lines RL extends matches the direction of the streamlines indicated by the streamline information, and the arrangement pitch of the riblet lines RL is , a plurality of parallel riblet lines RL are set so as to match the arrangement pitch indicated by the pitch information.
  • the control device 3 controls that the extending direction of the plurality of riblet lines RL is the streamline at the first position P11 on the surface of the turbine blade BL.
  • a plurality of riblet lines parallel to each other such that the direction of the streamline at the first position P11 indicated by the information matches the arrangement pitch of the riblet lines RL and the arrangement pitch at the first position P11 indicated by the pitch information.
  • Set RL For example, in the region on the surface of the turbine blade BL including the first position P11, the control device 3 determines that the direction in which the plurality of riblet lines RL extend matches the direction of the streamlines at the first position P11 indicated by the streamline information.
  • a plurality of parallel riblet lines RL may be set such that the arrangement pitch of the riblet lines RL matches the arrangement pitch at the first position P11 indicated by the pitch information.
  • the control device 3 controls that, at a second position P12 on the surface of the turbine blade BL, the extending direction of the plurality of riblet lines RL matches the direction of the streamlines at the second position P12 indicated by the streamline information, and , a plurality of parallel riblet lines RL are set such that the arrangement pitch of the riblet lines RL matches the arrangement pitch at the second position P12 indicated by the pitch information.
  • the control device 3 determines that the direction in which the plurality of riblet lines RL extend matches the direction of the streamlines at the second position P12 indicated by the streamline information. Also, a plurality of parallel riblet lines RL may be set such that the arrangement pitch of the riblet lines RL matches the arrangement pitch at the second position P12 indicated by the pitch information. However, the control device 3 may set a plurality of riblet lines RL including at least two riblet lines RL that are not parallel to each other (that is, non-parallel).
  • the control device 3 controls the size of the line segment forming the riblet line RL (specifically, the size of the line segment of the riblet line RL in the extending direction of the riblet line RL, which is substantially the length) to match the length of the groove.
  • the riblet lines RL may be set to be larger than the arrangement pitch of the structure 9 (that is, the arrangement pitch of the riblet lines RL).
  • the control device 3 arranges the riblet lines RL such that the length of the line segments forming the riblet lines RL is several times to several tens of times the arrangement pitch of the groove structures 9 (that is, the arrangement pitch of the riblet lines RL). May be set.
  • the control device 3 adjusts the riblets such that the length of the line segment that constitutes the riblet line RL is several hundred micrometers to several millimeters.
  • a line RL may be set.
  • each position on the surface of the turbine blade BL is composed of a plurality of line segments extending along the direction of the streamline at each position indicated by the streamline information.
  • a plurality of riblet lines RL arranged at an arrangement pitch are set. Therefore, at each position on the surface of the turbine blade BL, the control device 3 determines the line segments that are longer than the arrangement pitch at each position indicated by the pitch information and extend along the direction of the streamline at each position indicated by the streamline information.
  • Configured riblet lines RL may be set.
  • the control device 3 moves in the direction of the streamline longer than the arrangement pitch of the first position P11 indicated by the pitch information and in the direction of the streamline of the first position P11 indicated by the streamline information.
  • a riblet line RL composed of line segments extending along may be set.
  • the control device 3 moves in the direction of the streamline longer than the arrangement pitch of the second position P12 indicated by the pitch information and in the direction of the streamline at the second position P12 indicated by the streamline information.
  • a riblet line RL composed of line segments extending along may be set.
  • the direction of the streamlines in the first region on the surface of the turbine blade BL does not necessarily match the direction of the streamlines in the second region on the surface of the turbine blade BL adjacent to the first region. Therefore, if the direction in which the riblet lines RL set in the first region on the surface of the turbine blade BL extend coincides with the direction in which the riblet lines RL set in the second region on the surface of the turbine blade BL extend. is not limited.
  • FIG. 12 shows that the direction in which the riblet line RL set in the first region (the region including the first position P11 in the example shown in FIG. 12) on the surface of the turbine blade BL extends is the first region on the surface of the turbine blade BL.
  • FIG. 12 shows an example in which the riblet line RL set in the first region on the surface of the turbine blade BL is not parallel to the riblet line RL set in the second region on the surface of the turbine blade BL. showing.
  • the direction in which the riblet line RL set in the first region on the surface of the turbine blade BL extends matches the direction in which the riblet line RL set in the second region on the surface of the turbine blade BL extends. may That is, the riblet line RL set in the first region on the surface of the turbine blade BL and the riblet line RL set in the first region on the surface of the turbine blade BL may be parallel.
  • the arrangement pitch of the groove structures 9 formed in the first region on the surface of the turbine blade BL is the arrangement pitch of the groove structures 9 formed in the second region on the surface of the turbine blade BL adjacent to the first region. does not necessarily match Therefore, it is assumed that the arrangement pitch of the riblet lines RL set within the first region on the surface of the turbine blade BL matches the arrangement pitch of the riblet lines RL set within the second region on the surface of the turbine blade BL. is not limited.
  • FIG. 12 shows that the arrangement pitch of the riblet lines RL set in the first region on the surface of the turbine blade BL is different from the arrangement pitch of the riblet lines RL set in the second region on the surface of the turbine blade BL. shows an example.
  • At least one of the plurality of riblet lines RL set in the first region on the surface of the turbine blade BL is the plurality of riblet lines set in the second region on the surface of the turbine blade BL. It does not have to be connected to any of the RLs. However, the arrangement pitch of the riblet lines RL set within the first region on the surface of the turbine blade BL matches the arrangement pitch of the riblet lines RL set within the second region on the surface of the turbine blade BL.
  • the processing apparatus 1 processes the turbine blade BL (that is, the workpiece W) so as to form the riblet structure RB extending along the set riblet line RL based on the processing control information generated in step S104. (Step S105).
  • the riblet structure RB extending along the set riblet line RL is formed. That is, a riblet structure RB is formed that includes a plurality of groove structures 9 that extend along the direction in which the set riblet lines RL extend and are arranged at the same array pitch as the set riblet lines RL.
  • the first position P11 indicated by the pitch information extends along the direction of the streamline at the first position P11 indicated by the streamline information.
  • a plurality of groove structures 9 are formed to be arranged at an arrangement pitch of .
  • a plurality of groove structures 9 are formed that extend and are arranged at an arrangement pitch at the second position P12 indicated by the pitch information.
  • the groove structure 9 formed at the first position P11 is referred to as "groove structure 9#1”
  • the groove structure 9 formed at the second position P12 is referred to as "groove structure 9#2". called.
  • a riblet structure RB may be formed that includes a third groove structure 9 that together constitutes a series of groove structures 9 .
  • the third groove structure 9 for connecting the first and second groove structures 9 respectively formed in two adjacent regions is referred to as "groove structure 9_connect”.
  • the processing system SYS may form a riblet structure RB including a groove structure 9_connect that connects the groove structure 9#1 and the groove structure 9#2.
  • the direction in which the groove structure 9_connect extends may be different from the direction in which the two groove structures 9 connected by the groove structure 9_connect extend.
  • the processing system SYS includes a groove structure 9#1, a groove structure 9#2 extending in a direction different from the direction in which the groove structure 9#1 extends, and groove structures 9#1 and 9#.
  • a riblet structure RB including a groove structure 9_connect extending along a direction different from the direction in which #2 extends may be formed.
  • the processing system SYS may determine the groove structure 9#1, the groove structure 9#2 extending in the same direction as the groove structure 9#1, and the groove structures 9#1 and 9#2 extending in the same direction.
  • the angle ⁇ 1 is the larger angle (for example, 90 degrees or more) of two angles (for example, an angle of 90 degrees or more and an angle of 90 degrees or less) formed by the groove structure 9#1 and the groove structure 9_connect. angle).
  • the angle ⁇ 2 may be an angle between an axis along the extending direction of the groove structure 9#2 and an axis along the extending direction of the groove structure 9_connect.
  • the angle ⁇ 2 is the larger angle (for example, 90 degrees or more) of two angles (for example, an angle of 90 degrees or more and an angle of 90 degrees or less) formed by the groove structure 9#2 and the groove structure 9_connect. angle).
  • the angle ⁇ 3 may be an angle formed by an axis along the extending direction of the groove structure 9#1 and an axis along the extending direction of the groove structure 9#2.
  • the angle ⁇ 3 is the larger angle (for example, 90 degrees) of the two angles (for example, an angle of 90 degrees or more and an angle of 90 degrees or less) formed by the groove structure 9#1 and the groove structure 9#2. or more) may be used.
  • the angle condition may include a condition that each of the angles ⁇ 1 and ⁇ 2 is greater than the angle ⁇ 3.
  • the angle condition may include a condition that the sum of the angles ⁇ 1 and ⁇ 2 is an angle obtained by adding 180 degrees to the angle ⁇ 3.
  • the arrangement pitch of the plurality of first groove structures 9 formed within a first region on the surface of the turbine blade BL is within a second region on the surface of the turbine blade BL adjacent to the first region.
  • the riblet structure RB may be formed so as to be different from the arrangement pitch of the plurality of second groove structures 9 formed in .
  • the processing system SYS is configured such that the arrangement pitch PT1#1 of the plurality of groove structures 9#1 is different from the arrangement pitch PT1#2 of the plurality of groove structures 9#2.
  • RB may be formed.
  • a plurality of first groove structures 9 (for example, a plurality of groove structures 9#1 in FIG.
  • the plurality of first groove structures 9 for example, the plurality of groove structures 9#1 in FIG. 15
  • the plurality of second groove structures 9 for example, the plurality of groove structures 9#2 in FIG. 15
  • a plurality of connecting trench structures 9_connect may extend in different directions.
  • the arrangement pitch of the groove structures 9_connect for example, the arrangement pitch PT1_connect shown in FIG.
  • the following description can be used as a description of the mountain structure 8 extending in a wave shape by replacing the term "groove structure 9" with the term "mountain structure 8". Further, in the following description, for convenience of explanation, the groove structure 9 extending so as to have a wavy shape is referred to as a "wavy groove structure 9w”.
  • the riblet structure RB may include a plurality of wavy groove structures 9w arranged at a first arrangement pitch and a plurality of wavy groove structures 9w arranged at a second arrangement pitch.
  • each of the plurality of wavy groove structures 9w arranged at the first arrangement pitch is referred to as "wavy groove structure 9w#a", and the plurality of wavy groove structures 9w arranged at the second arrangement pitch. are referred to as "wavy groove structure 9w#b".
  • the riblet structure RB When the riblet structure RB includes wavy groove structures 9w#a and 9w#b, the riblet structure RB includes a wavy groove structure 9w connecting the wavy groove structure 9w#a and the wavy groove structure 9w#b.
  • the wavy groove structure 9w that connects the wavy groove structure 9w#a and the wavy groove structure 9w#b is referred to as "wavy groove structure 9w_connect”.
  • the wavy groove structure 9w_connect is typically formed between the wavy groove structure 9w#a and the wavy groove structure 9w#b.
  • the arrangement pitch PT2#a of the wavy groove structures 9w#a may change according to the position in the extending direction of the wavy groove structures 9w#a.
  • the arrangement pitch PT2#a may be constant regardless of the position in the extending direction of the wavy groove structure 9w#a.
  • the arrangement pitch PT2#b of the wavy groove structures 9w#b may change according to the position in the extending direction of the wavy groove structures 9w#b.
  • the arrangement pitch PT2#b may be constant regardless of the position in the extending direction of the wavy groove structure 9w#b.
  • the amplitude of the wavy groove structure 9w_connect is equal to that of the wavy groove structure 9w_connect at the boundary BD#a. #a and even if the wavy groove structure 9w_connect changes along the extending direction so that the amplitude of the wavy groove structure 9w_connect matches the amplitude of the wavy groove structure 9w#b at the boundary BD#b. good.
  • the amplitude of the wavy groove structure 9w_connect may be constant regardless of the position in the extending direction of the wavy groove structure 9w_connect.
  • the processing system SYS may form the riblet structure RB including the groove structure 9 subjected to termination processing. good.
  • An example of the riblet structure RB including the terminated groove structure 9 will be described below with reference to FIGS. 20(a) and 20(b).
  • 20(a) is a perspective view showing a riblet structure RB including a terminated groove structure 9
  • FIG. 20(b) is a perspective view showing a riblet structure RB including a terminated groove structure 9.
  • FIG. 20(a) is a cross-sectional view (in particular, a cross-sectional view taken along the line AA' in FIG. 20(a)).
  • the processing system SYS moves the irradiation area EA in the formation area W12 closer to the non-formation area W2.
  • the forming region W12 may be irradiated with the processing light EL so as to increase the moving speed.
  • the processing apparatus 1 may use a work W having a film on its surface to form the riblet structure RB on the surface of the film.
  • the film may be a resinous film, a metallic film, or a film made of other materials.
  • a blade member having a groove structure formed on its surface, the groove structure comprises a plurality of first groove structures, a plurality of second groove structures, and a third groove structure;
  • the plurality of first groove structures have a first wavy shape extending in a first direction, and are formed so as to be arranged at a first arrangement pitch along a direction intersecting the first direction,
  • the plurality of second groove structures have a second wavy shape extending in a second direction, and have a second arrangement pitch different from the first arrangement pitch along a direction intersecting the second direction. are formed side by side
  • the third groove structure has a third wave shape extending in a third direction, and is one of the plurality of first groove structures and one of the plurality of second groove structures.
  • the one first groove structure is arranged such that the tangential direction of the one first groove structure and the tangential direction of the third groove structure are aligned. and the third groove structure are connected, The one second groove structure such that the tangential direction of the one second groove structure and the tangential direction of the third groove structure are aligned at the boundary between the one second groove structure and the third groove structure.
  • 55 The structural member of clause 54, wherein the third channel structure is connected to the third channel structure.
  • a structural member having a groove structure formed on its surface, the groove structure comprises a plurality of third groove structures; one third groove structure among the plurality of third groove structures has a third wave shape extending in a third direction; another third groove structure among the plurality of third groove structures has a fourth wave shape extending in a fourth direction different from the third direction;
  • the first region is formed with the groove structure including two grooves arranged along a second direction crossing the first direction so as to form at least one of a projection shape, a convex shape, and a mountain shape.
  • the groove structure including two grooves aligned along the second direction intersecting the first direction so as to form at least one of a projection shape, a convex shape, and a mountain shape in at least a part of the third region. 69.
  • Appendix 72 72.
  • first groove structure intersects the first axis along the first direction at first to third positions and a fourth position between the first position and the second position of the first groove structure. is located on the fourth direction side of the first axis, and a fifth position between the second position and the third position of the first groove structure is opposite the fourth direction with respect to the first axis.
  • the second groove structure intersects a second axis along the second direction at sixth to eighth positions, and a ninth position between the sixth and seventh positions of the second groove structure. is located on the sixth direction side of the second axis, and a tenth position between the seventh position and the eighth position of the second groove structure is opposite the sixth direction with respect to the second axis. located on the seventh direction side of the side,
  • the third groove structure intersects a third axis along the third direction at eleventh to thirteenth positions, and a fourteenth position between the eleventh and twelfth positions of the third groove structure.
  • processing system located on the ninth direction side of the side.
  • Appendix 77 a processing device capable of processing the object by irradiating the object with an energy beam; a control device that controls the processing device so as to form a groove structure on the surface of the object by processing the object;
  • the control device includes a plurality of first groove structures extending in a first direction and arranged at a first arrangement pitch along a direction intersecting the first direction, and a plurality of first groove structures extending in a second direction and intersecting the second direction.
  • first groove structure intersects the first axis along the first direction at first to third positions and a fourth position between the first position and the second position of the first groove structure. is located on the fourth direction side of the first axis, and a fifth position between the second position and the third position of the first groove structure is opposite the fourth direction with respect to the first axis.
  • the third groove structure intersects the second axis along the third direction at sixth to eighth positions, and a ninth position between the sixth and seventh positions of the third groove structure. is located on the sixth direction side of the second axis, and a tenth position between the seventh position and the eighth position of the third groove structure is opposite the sixth direction with respect to the second axis.
  • processing system located on the seventh direction side of the side.
  • a processing device capable of processing the object by irradiating the object with an energy beam; a control device that controls the processing device so as to form a groove structure on the surface of the object by processing the object;
  • the control device includes a plurality of first groove structures that have a first wave shape extending in a first direction and are arranged at a first arrangement pitch along a direction intersecting the first direction; one third groove structure that is a third wave shape extending and another third groove structure that is a fourth wave shape that extends in a fourth direction different from the third direction; a processing system for controlling the processing device to form the groove structure comprising a plurality of third groove structures connected to one groove structure.
  • Appendix 80 a processing device capable of processing the object by irradiating the object with an energy beam; a control device that controls the processing device so as to form a groove structure on the surface of the object by processing the object;
  • the controller forms a groove structure extending in a first direction in a first region of the surface, the surface being positioned between the first region and a second region of the surface in which the groove structure is not formed.
  • controlling the processing device to form a groove structure connected to the groove structure of the first area in the third area; The depth of the groove structure formed in the third region becomes shallower from the first region toward the second region. Processing system.
  • a processing method for processing an object to form a groove structure on the surface of the object by irradiating the object with an energy beam the groove structure comprises a plurality of first groove structures, a plurality of second groove structures, and a third groove structure; forming the plurality of first trench structures extending in a first direction; forming the plurality of second trench structures extending in a second direction different from the first direction; The first groove structure extending along a third direction and formed between a first groove structure of the plurality of first groove structures and a second groove structure of the plurality of second groove structures.
  • a processing method comprising: forming a three-groove structure.
  • a processing method for processing an object to form a groove structure on the surface of the object by irradiating the object with an energy beam the groove structure comprises a plurality of first groove structures, a plurality of second groove structures, and a third groove structure; forming the plurality of first groove structures that have a first wave shape extending in a first direction and are arranged at a first arrangement pitch along a direction intersecting the first direction; forming the plurality of second groove structures that have a second wave shape extending in a second direction and are arranged at a second arrangement pitch along a direction intersecting the second direction; A third groove structure extending in a third direction and formed between a first groove structure of the plurality of first groove structures and a second groove structure of the plurality of second groove structures.
  • a processing method comprising forming a [Appendix 83] A processing method for processing an object to form a groove structure on the surface of the object by irradiating the object with an energy beam, the groove structure comprises a plurality of first groove structures, a plurality of second groove structures, and a third groove structure; forming the plurality of first groove structures extending in a first direction and arranged at a first arrangement pitch along a direction intersecting the first direction; forming the plurality of second groove structures extending in a second direction and arranged at a second arrangement pitch along a direction intersecting the second direction; a third groove structure extending along a third direction and formed between a first groove structure of the plurality of first groove structures and a second groove structure of the plurality of second groove structures; forming a groove structure; The first groove structure intersects the first axis along the first direction at first to third positions and a fourth position between the first position and the second position of the first groove structure.
  • a processing method for processing an object to form a groove structure on the surface of the object by irradiating the object with an energy beam the groove structure comprises a plurality of first groove structures, a plurality of second groove structures, and a third groove structure; forming the plurality of first groove structures extending in a first direction and arranged at a first arrangement pitch along a direction intersecting the first direction; forming the plurality of second groove structures extending in a second direction and arranged at a second arrangement pitch along a direction intersecting the second direction; a third groove structure extending along a third direction and formed between a first groove structure of the plurality of first groove structures and a second groove structure of the plurality of second groove structures; forming a groove structure; The first groove structure intersects the first axis along the first direction at first to third positions and a fourth position between the first position and the second position of the first groove structure.
  • a processing method for processing an object to form a groove structure on the surface of the object by irradiating the object with an energy beam the groove structure comprises a plurality of third groove structures;
  • One third groove structure among the plurality of third groove structures is a third wave shape extending in a third direction
  • another third groove structure among the plurality of third groove structures is , a fourth wavy shape extending in a fourth direction different from the third direction
  • the plurality of third groove structures are arranged such that the arrangement pitch of the plurality of third groove structures varies depending on the position.
  • a processing method for processing an object to form a groove structure on the surface of the object by irradiating the object with an energy beam the groove structure comprises a plurality of first groove structures and a plurality of third groove structures; forming the plurality of first groove structures that have a first wave shape extending in a first direction and are arranged at a first arrangement pitch along a direction intersecting the first direction; one third groove structure having a third wave shape extending in a third direction and another third groove structure having a fourth wave shape extending in a fourth direction different from the third direction, and forming said plurality of third groove structures each connected to said first groove structure.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Laser Beam Processing (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
PCT/JP2021/004308 2021-02-05 2021-02-05 羽根部材、構造部材 Ceased WO2022168262A1 (ja)

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JP2022579260A JPWO2022168262A1 (https=) 2021-02-05 2021-02-05
CN202180096705.6A CN117157451A (zh) 2021-02-05 2021-02-05 叶片部件、结构部件
EP21924657.6A EP4290049A4 (en) 2021-02-05 2021-02-05 BLADE ELEMENT AND STRUCTURAL ELEMENT
PCT/JP2021/004308 WO2022168262A1 (ja) 2021-02-05 2021-02-05 羽根部材、構造部材
US18/275,367 US12607125B2 (en) 2021-02-05 2021-02-05 Blade member and structural member
JP2025028807A JP2025100532A (ja) 2021-02-05 2025-02-26 羽根部材、構造部材

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US20240102389A1 (en) 2024-03-28
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EP4290049A1 (en) 2023-12-13
CN117157451A (zh) 2023-12-01
EP4290049A4 (en) 2024-12-04

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