WO2022163341A1 - Pompe à vide et élément d'espacement - Google Patents

Pompe à vide et élément d'espacement Download PDF

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Publication number
WO2022163341A1
WO2022163341A1 PCT/JP2022/000593 JP2022000593W WO2022163341A1 WO 2022163341 A1 WO2022163341 A1 WO 2022163341A1 JP 2022000593 W JP2022000593 W JP 2022000593W WO 2022163341 A1 WO2022163341 A1 WO 2022163341A1
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WO
WIPO (PCT)
Prior art keywords
spacer
vacuum pump
blades
spacers
fixed
Prior art date
Application number
PCT/JP2022/000593
Other languages
English (en)
Japanese (ja)
Inventor
春樹 鈴木
Original Assignee
エドワーズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エドワーズ株式会社 filed Critical エドワーズ株式会社
Priority to US18/261,032 priority Critical patent/US20240318666A1/en
Publication of WO2022163341A1 publication Critical patent/WO2022163341A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes

Definitions

  • the present invention relates to vacuum pumps and spacers used in vacuum pumps.
  • a vacuum pump such as a turbomolecular pump is used for the exhaust process in the vacuum chamber provided in the semiconductor manufacturing equipment.
  • various process gases are applied to the semiconductor substrate.
  • Vacuum pumps are used not only to evacuate the chamber of the semiconductor device, but also to exhaust the process gas from the chamber. Also used when
  • the process gas solidifies and deposits on the inner wall surface of the channel at the point where the relationship between the pressure and temperature indicated by the vapor pressure curve shifts from the gas phase to the solid phase.
  • a vacuum having a turbo-molecular pump mechanism composed of fixed blades and rotary blades on the intake side, and a thread groove pump mechanism composed of the cylindrical portion of the rotating body and the screw groove of the threaded spacer on the exhaust side.
  • the process gas pressure increases at the thread groove pump mechanism.
  • the solidified product accumulates on the wall surface of the flow path, particularly on the exhaust side, and the performance of the pump may deteriorate.
  • the heat from the heat source is also transmitted to the fixed blades adjacent to the exhaust side peripheral portion and the fixed blade spacers (hereinafter sometimes referred to as spacers) that hold the fixed blades in a predetermined position, so that the process gas is heated. extra energy is required to do so.
  • the durability may be impaired due to creep phenomenon. be.
  • the temperature of the fixed blades and the fixed blade spacers rises due to the heat from the heat source, the heat cannot be efficiently dissipated from the rotary blades to the fixed blades, and the temperature of the rotary blades may rise excessively.
  • the vacuum pump of Patent Document 1 has been proposed for the purpose of solving such problems.
  • a plurality of heat insulating members are intermittently arranged in the circumferential direction at the connecting portion between the upper casing that covers the outer periphery of the turbomolecular pump mechanism and the intermediate casing that is provided with a heater and connected to the upper casing. This suppresses the heat from the heater from being transferred to the fixed blades via the upper casing, thereby suppressing the temperature of the fixed blades.
  • the vacuum pump of Patent Document 1 requires a separate heat insulating member, which increases the cost of parts.
  • the number of parts increases, the number of assembling man-hours also increases, resulting in an increase in manufacturing cost.
  • the present invention provides a vacuum pump capable of suppressing the temperature rise of the fixed blade due to heat from a heating source without increasing the number of parts, and a spacer used in such a vacuum pump. for the purpose.
  • the present invention comprises a casing, a rotating shaft rotatably supported inside the casing, a plurality of rotating blades provided in multiple stages on the outer periphery of the rotating shaft and rotating together with the rotating shaft, and a space between the rotating blades. and a plurality of spacers provided in multiple stages inside the casing to hold the fixed blades at predetermined positions, the vacuum pump holding the fixed blades At least one spacer among the plurality of spacers has a concave surface on a contact surface that contacts the stationary blade.
  • the concave surface is preferably provided on the contact surface located on the exhaust side.
  • the spacer positioned closest to the exhaust side among the plurality of spacers has the concave surface.
  • the spacer having the concave surface is made by cutting a wrought material.
  • the wrought material is preferably an aluminum alloy.
  • the present invention includes a casing, a rotating shaft rotatably supported inside the casing, a plurality of rotating blades provided in multiple stages on the outer periphery of the rotating shaft and rotating together with the rotating shaft, and the rotating blades. and a plurality of stationary blades arranged in multiple stages between them. At least one spacer among the plurality of spacers to be held is also characterized by having a concave surface on a contact surface that contacts with the fixed wing.
  • the spacer that holds the fixed blades in place has a concave surface on the contact surface that contacts the fixed blades. Since the heat resistance is increased, the heat transfer between the spacer and the fixed blade is suppressed, and the temperature rise of the fixed blade can be suppressed. In addition, the provision of the concave surface narrows the heat path of the spacer and prevents the heat transfer, so that it is possible to suppress the temperature drop in the portion such as the thread groove pump mechanism portion where the temperature should be maintained.
  • FIG. 1 is a longitudinal sectional view schematically showing an embodiment of a vacuum pump according to the invention
  • FIG. 2 is a circuit diagram of an amplifier circuit of the vacuum pump shown in FIG. 1
  • FIG. 4 is a time chart showing control when a current command value is greater than a detected value
  • 4 is a time chart showing control when a current command value is smaller than a detected value
  • 2 is a partially enlarged view of a portion A and a partially enlarged view of a spacer shown in FIG. 1
  • 7 is a diagram relating to a method of manufacturing the spacer shown in FIG. 6
  • FIG. 6 is a diagram relating to a method of manufacturing the spacer shown in FIG. 5;
  • turbo-molecular pump 100 which is an embodiment of a vacuum pump according to the present invention, will be described below with reference to the drawings.
  • the overall configuration of the turbo-molecular pump 100 will be described with reference to FIGS. 1 to 4.
  • FIG. 1 the overall configuration of the turbo-molecular pump 100 will be described with reference to FIGS. 1 to 4.
  • FIG. the above-described “casing” according to the present invention is composed of the main body casing portion 114 having the outer cylinder 127 and the base portion 129 .
  • the "rotating shaft” according to the present invention is composed of the rotating body 103 and the rotor shaft 113, which will be described below.
  • FIG. 1 A longitudinal sectional view of this turbo-molecular pump 100 is shown in FIG.
  • the turbo-molecular pump 100 has an intake port 101 at the upper end of a cylindrical outer cylinder 127 .
  • a rotating body 103 having a plurality of rotating blades 102 (102a, 102b, 102c, . is provided inside the outer cylinder 127.
  • a rotor shaft 113 is attached to the center of the rotor 103, and the rotor shaft 113 is levitated in the air and position-controlled by, for example, a 5-axis control magnetic bearing.
  • the rotor 103 is generally made of metal such as aluminum or aluminum alloy.
  • the upper radial electromagnet 104 has four electromagnets arranged in pairs on the X-axis and the Y-axis.
  • Four upper radial sensors 107 are provided adjacent to the upper radial electromagnets 104 and corresponding to the upper radial electromagnets 104, respectively.
  • the upper radial sensor 107 is, for example, an inductance sensor or an eddy current sensor having a conductive winding, and detects the position of the rotor shaft 113 based on the change in the inductance of this conductive winding, which changes according to the position of the rotor shaft 113 .
  • This upper radial sensor 107 is configured to detect the radial displacement of the rotor shaft 113 , ie the rotor 103 fixed thereto, and send it to the controller 200 .
  • a compensation circuit having a PID adjustment function generates an excitation control command signal for the upper radial electromagnet 104 based on the position signal detected by the upper radial sensor 107, as shown in FIG.
  • An amplifier circuit 150 controls the excitation of the upper radial electromagnet 104 based on the excitation control command signal, thereby adjusting the upper radial position of the rotor shaft 113 .
  • the rotor shaft 113 is made of a high magnetic permeability material (iron, stainless steel, etc.) or the like, and is attracted by the magnetic force of the upper radial electromagnet 104 . Such adjustments are made independently in the X-axis direction and the Y-axis direction.
  • the lower radial electromagnet 105 and the lower radial sensor 108 are arranged in the same manner as the upper radial electromagnet 104 and the upper radial sensor 107 so that the lower radial position of the rotor shaft 113 is set to the upper radial position. adjusted in the same way.
  • the axial electromagnets 106A and 106B are arranged so as to vertically sandwich a disk-shaped metal disk 111 provided below the rotor shaft 113 .
  • the metal disk 111 is made of a high magnetic permeability material such as iron.
  • An axial sensor 109 is provided to detect axial displacement of the rotor shaft 113 and is configured to transmit its axial position signal to the controller 200 .
  • a compensation circuit having, for example, a PID adjustment function generates excitation control command signals for the axial electromagnets 106A and 106B based on the axial position signal detected by the axial sensor 109. Based on these excitation control command signals, the amplifier circuit 150 controls the excitation of the axial electromagnets 106A and 106B, respectively. , the axial electromagnet 106B attracts the metal disk 111 downward, and the axial position of the rotor shaft 113 is adjusted.
  • control device 200 appropriately adjusts the magnetic force exerted on the metal disk 111 by the axial electromagnets 106A and 106B, magnetically levitates the rotor shaft 113 in the axial direction, and holds the rotor shaft 113 in the space without contact. ing.
  • the amplifier circuit 150 that controls the excitation of the upper radial electromagnet 104, the lower radial electromagnet 105, and the axial electromagnets 106A and 106B will be described later.
  • the motor 121 has a plurality of magnetic poles circumferentially arranged to surround the rotor shaft 113 .
  • Each magnetic pole is controlled by the control device 200 so as to rotationally drive the rotor shaft 113 via an electromagnetic force acting between the magnetic poles and the rotor shaft 113 .
  • the motor 121 incorporates a rotation speed sensor (not shown) such as a Hall element, resolver, encoder, etc., and the rotation speed of the rotor shaft 113 is detected by the detection signal of this rotation speed sensor.
  • phase sensor (not shown) is attached, for example, near the lower radial direction sensor 108 to detect the phase of rotation of the rotor shaft 113 .
  • the control device 200 detects the position of the magnetic pole using both the detection signals from the phase sensor and the rotational speed sensor.
  • a plurality of fixed wings 123 (123a, 123b, 123c%) are arranged with a slight gap from the rotary wings 102 (102a, 102b, 102c).
  • the rotor blades 102 (102a, 102b, 102c, . . . ) are inclined at a predetermined angle from a plane perpendicular to the axis of the rotor shaft 113 in order to move molecules of the exhaust gas downward by collision.
  • the fixed wings 123 (123a, 123b, 123c, . . . ) are made of metal such as aluminum, iron, stainless steel, or copper, or metal such as an alloy containing these metals as components.
  • the fixed blades 123 are also inclined at a predetermined angle from a plane perpendicular to the axis of the rotor shaft 113, and are arranged inwardly of the outer cylinder 127 in a staggered manner with the stages of the rotary blades 102. ing.
  • the outer peripheral end of the fixed wing 123 is supported by being inserted between a plurality of stacked fixed wing spacers 125 (125a, 125b, 125c, . . . ).
  • the fixed wing spacer 125 is a ring-shaped member, and is made of metal such as aluminum, iron, stainless steel, copper, or an alloy containing these metals as components.
  • An outer cylinder 127 is fixed to the outer circumference of the stationary blade spacer 125 with a small gap therebetween.
  • a base portion 129 is provided at the bottom of the outer cylinder 127 .
  • An exhaust port 133 is formed in the base portion 129 and communicates with the outside. Exhaust gas that has entered the intake port 101 from the chamber (vacuum chamber) side and has been transferred to the base portion 129 is sent to the exhaust port 133 .
  • a threaded spacer 131 is provided between the lower portion of the stationary blade spacer 125 and the base portion 129 depending on the application of the turbomolecular pump 100 .
  • the threaded spacer 131 is a cylindrical member made of a metal such as aluminum, copper, stainless steel, iron, or an alloy containing these metals, and has a plurality of helical thread grooves 131a on its inner peripheral surface. It is stipulated.
  • the spiral direction of the thread groove 131 a is the direction in which the molecules of the exhaust gas move toward the exhaust port 133 when they move in the rotation direction of the rotor 103 .
  • a cylindrical portion 102d is suspended from the lowermost portion of the rotor 103 following the rotor blades 102 (102a, 102b, 102c, . . . ).
  • the outer peripheral surface of the cylindrical portion 102d is cylindrical and protrudes toward the inner peripheral surface of the threaded spacer 131, and is adjacent to the inner peripheral surface of the threaded spacer 131 with a predetermined gap therebetween.
  • the exhaust gas transferred to the screw groove 131a by the rotary blade 102 and the fixed blade 123 is sent to the base portion 129 while being guided by the screw groove 131a.
  • the base portion 129 is a disk-shaped member that constitutes the base portion of the turbomolecular pump 100, and is generally made of metal such as iron, aluminum, or stainless steel.
  • the base portion 129 physically holds the turbo-molecular pump 100 and also functions as a heat conduction path. Therefore, a metal having high rigidity and high thermal conductivity such as iron, aluminum, or copper is used. is desirable.
  • the temperature of the rotor blades 102 rises due to frictional heat generated when the exhaust gas contacts the rotor blades 102, conduction of heat generated by the motor 121, and the like. It is transmitted to the stationary blade 123 side by conduction by molecules or the like.
  • the fixed blade spacers 125 are joined to each other at their outer peripheral portions, and transfer the heat received by the fixed blades 123 from the rotary blades 102 and the frictional heat generated when the exhaust gas contacts the fixed blades 123 to the main casing portion 114. do.
  • an annular water-cooling pipe 115 is wound around the outer peripheral surface of the upper portion of the outer cylinder 127 in order to efficiently release the heat transferred to the main body casing portion 114 .
  • the threaded spacer 131 is arranged on the outer circumference of the cylindrical portion 102d of the rotating body 103, and the inner peripheral surface of the threaded spacer 131 is provided with the thread groove 131a.
  • a thread groove is formed on the outer peripheral surface of the cylindrical portion 102d, and a spacer having a cylindrical inner peripheral surface is arranged around it.
  • the gas sucked from the intake port 101 may move the upper radial electromagnet 104, the upper radial sensor 107, the motor 121, the lower radial electromagnet 105, the lower radial sensor 108, the shaft
  • the electrical section is surrounded by a stator column 122 so as not to intrude into the electrical section composed of the directional electromagnets 106A and 106B, the axial direction sensor 109, etc., and the interior of the stator column 122 is maintained at a predetermined pressure with purge gas. It may drip.
  • a pipe (not shown) is arranged in the base portion 129, and the purge gas is introduced through this pipe.
  • the introduced purge gas is delivered to the exhaust port 133 through gaps between the protective bearing 120 and the rotor shaft 113 , between the rotor and stator of the motor 121 , and between the stator column 122 and the inner cylindrical portion of the rotor blade 102 .
  • the turbo-molecular pump 100 requires model identification and control based on individually adjusted unique parameters (eg, various characteristics corresponding to the model).
  • the turbomolecular pump 100 has an electronic circuit section 141 in its body.
  • the electronic circuit section 141 includes a semiconductor memory such as an EEP-ROM, electronic components such as semiconductor elements for accessing the same, a board 143 for mounting them, and the like.
  • the electronic circuit section 141 is accommodated, for example, below a rotational speed sensor (not shown) near the center of a base section 129 that constitutes the lower portion of the turbo-molecular pump 100 and is closed by an airtight bottom cover 145 .
  • some of the process gases introduced into the chamber have the property of becoming solid when their pressure exceeds a predetermined value or their temperature falls below a predetermined value. be.
  • the pressure of the exhaust gas is lowest at the inlet 101 and highest at the outlet 133 .
  • the process gas becomes solid and turbo molecules are formed. It adheres and deposits inside the pump 100 .
  • a solid product eg, AlCl3
  • the deposits narrow the pump flow path and cause the performance of the turbo-molecular pump 100 to deteriorate.
  • the above-described product is likely to solidify and adhere to portions near the exhaust port 133 and near the threaded spacer 131 where the pressure is high.
  • the heater 116 is arranged around the outer circumference of the main body casing portion 114, the base portion 129, etc., and the annular water-cooled pipe 115 and the water-cooled pipe 149 are wound around the base portion 129, for example.
  • a temperature sensor for example, a thermistor (not shown) is embedded, and based on the signal of this temperature sensor, the temperature of the base portion 129 is kept at a constant high temperature (set temperature). It is called TMS.TMS (Temperature Management System) is being carried out.
  • the amplifier circuit 150 that controls the excitation of the upper radial electromagnet 104, the lower radial electromagnet 105, and the axial electromagnets 106A and 106B will be described.
  • a circuit diagram of this amplifier circuit 150 is shown in FIG.
  • an electromagnet winding 151 that constitutes the upper radial electromagnet 104 and the like has one end connected to a positive electrode 171a of a power supply 171 via a transistor 161, and the other end connected to a current detection circuit 181 and a transistor 162. is connected to the negative electrode 171b of the power source 171 via the .
  • the transistors 161 and 162 are so-called power MOSFETs and have a structure in which a diode is connected between their source and drain.
  • the transistor 161 has its diode cathode terminal 161 a connected to the positive electrode 171 a and anode terminal 161 b connected to one end of the electromagnet winding 151 .
  • the transistor 162 has a diode cathode terminal 162a connected to the current detection circuit 181 and an anode terminal 162b connected to the negative electrode 171b.
  • the diode 165 for current regeneration has a cathode terminal 165a connected to one end of the electromagnet winding 151 and an anode terminal 165b connected to the negative electrode 171b.
  • the current regeneration diode 166 has its cathode terminal 166a connected to the positive electrode 171a and its anode terminal 166b connected to the other end of the electromagnet winding 151 via the current detection circuit 181. It has become so.
  • the current detection circuit 181 is composed of, for example, a Hall sensor type current sensor or an electric resistance element.
  • the amplifier circuit 150 configured as described above corresponds to one electromagnet. Therefore, if the magnetic bearing is controlled by five axes and there are a total of ten electromagnets 104, 105, 106A, and 106B, a similar amplifier circuit 150 is configured for each of the electromagnets, and ten amplifier circuits are provided for the power supply 171. 150 are connected in parallel.
  • the amplifier control circuit 191 is configured by, for example, a digital signal processor section (hereinafter referred to as a DSP section) not shown in the control device 200, and this amplifier control circuit 191 switches the transistors 161 and 162 on/off. It's like
  • the amplifier control circuit 191 compares the current value detected by the current detection circuit 181 (a signal reflecting this current value is called a current detection signal 191c) and a predetermined current command value. Then, based on this comparison result, the magnitude of the pulse width (pulse width times Tp1, Tp2) to be generated within the control cycle Ts, which is one cycle of PWM control, is determined. As a result, the gate drive signals 191 a and 191 b having this pulse width are output from the amplifier control circuit 191 to the gate terminals of the transistors 161 and 162 .
  • a high voltage of about 50 V is used as the power source 171 so that the current flowing through the electromagnet winding 151 can be rapidly increased (or decreased).
  • a capacitor is usually connected between the positive electrode 171a and the negative electrode 171b of the power source 171 for stabilizing the power source 171 (not shown).
  • electromagnet current iL the current flowing through the electromagnet winding 151
  • electromagnet current iL the current flowing through the electromagnet winding 151
  • flywheel current is held.
  • the hysteresis loss in the amplifier circuit 150 can be reduced, and the power consumption of the entire circuit can be suppressed.
  • high-frequency noise such as harmonics generated in the turbo-molecular pump 100 can be reduced.
  • the electromagnet current iL flowing through the electromagnet winding 151 can be detected.
  • the transistors 161 and 162 are turned off only once during the control cycle Ts (for example, 100 ⁇ s) for the time corresponding to the pulse width time Tp1. turn on both. Therefore, the electromagnet current iL during this period increases from the positive electrode 171a to the negative electrode 171b toward a current value iLmax (not shown) that can flow through the transistors 161,162.
  • both the transistors 161 and 162 are turned off only once in the control cycle Ts for the time corresponding to the pulse width time Tp2 as shown in FIG. . Therefore, the electromagnet current iL during this period decreases from the negative electrode 171b to the positive electrode 171a toward a current value iLmin (not shown) that can be regenerated via the diodes 165,166.
  • either one of the transistors 161 and 162 is turned on after the pulse width times Tp1 and Tp2 have elapsed. Therefore, the flywheel current is held in the amplifier circuit 150 during this period.
  • the turbo-molecular pump 100 of the present embodiment includes, as the stator wing spacers 125, first stator wing spacers 125a, 125b, 125c and second stator wing spacers 125d, 125e.
  • the first stator wing spacers 125a, 125b, 125c are, as shown in FIGS. 1 and 5, ring-shaped members centered on the central axis CA.
  • the first stator spacers 125a, 125b, 125c have flat upper surfaces 125a1, 125b1, 125c1 extending horizontally.
  • First positioning portions 125a2, 125b2, and 125c2 that are recessed downward are provided on the outer edge portions of the upper surfaces 125a1, 125b1, and 125c1.
  • the first stator spacers 125a, 125b, 125c also have planar lower surfaces 125a3, 125b3, 125c3 extending parallel to the upper surfaces 125a1, 125b1, 125c1.
  • Second positioning portions 125a5, 125b5, and 125c5 having a shape projecting downward are provided on the outer edge portions of the lower surfaces 125a3, 125b3, and 125c3.
  • the second stator wing spacers 125d and 125e are also ring-shaped members centering on the central axis CA, and include flat upper surfaces 125d1 and 125e1 extending in the horizontal direction, First positioning portions 125d2 and 125e2 are provided on the outer edge portions of the upper surfaces 125d1 and 125e1 and are recessed downward.
  • the second stator spacers 125d and 125e have lower surfaces 125d3 and 125e3 extending parallel to the upper surfaces 125d1 and 125e1. Concave surfaces 125d4 and 125e4 are provided.
  • Second positioning portions 125d5 and 125e5 that protrude downward are provided on the outer edges of the lower surfaces 125d3 and 125e3.
  • first stationary wing spacers 125a, 125b, 125c and the second stationary wing spacers 125d, 125e having such a configuration are arranged inside the outer cylinder 127 as shown in FIGS.
  • first stationary wing spacers 125a, 125b, 125c, second The stationary wing spacers 125d and 125e are arranged in multiple stages in this order.
  • the outer peripheral ends of the fixed blades 123 (123a, 123b, 123c, . . . ) are inserted between the stacked fixed blade spacers 125 .
  • the lower surfaces 125a3, 125b3, 125c3, 125d3, 125e3 such as the first stator wing spacer 125a are in contact with the upper surface of the outer peripheral end of the fixed wing 123 (123a, 123b, 123c, . . . ).
  • the upper surfaces 125b1, 125c1, 125d1, 125e1 of the first stationary wing spacer 125b, etc., or the upper surface of the threaded spacer 131 are in contact with the bottom surface of the end, and the stationary wing 123 is held therebetween. That is, the fixed wing 123 is held at a predetermined vertical position by the first fixed wing spacer 125a and the like.
  • the outer peripheral surface of the fixed blade 123 is in contact with the inner peripheral surfaces of the second positioning portions 125a5, 125b5, 125c5, 125d5, 125e5 such as the first fixed blade spacer 125a.
  • the inner peripheral surfaces of the second positioning portions 125a5, 125b5, 125c5, 125d5 and 125e5 are also in contact with the inner peripheral surfaces of the first positioning portions 125a2, 125b2, 125c2, 125d2 and 125e2. That is, the fixed blades 123 (123a, 123b, 123c, . . . ) are held at predetermined radial positions by the first fixed blade spacers 125a and the like.
  • the threaded spacer 131 is provided with the heater 116 to heat the threaded spacer 131 in order to suppress deposition of precipitates on the threaded spacer 131 .
  • This heat is also transmitted to the lowermost fixed wing 123 e that contacts the threaded spacer 131 .
  • the heater 116 may be provided on the base portion 129 as described above.
  • a concave surface 125e4 is provided on the lower surface 125e3 of the second stationary wing spacer 125e that contacts the lowermost stationary wing 123e.
  • the contact area between the fixed blade 123 and the second fixed blade spacer 125e is reduced and the thermal resistance at the contact surface is increased, the heat transfer from the lowermost fixed blade 123e to the second fixed blade spacer 125e is reduced. It is possible to suppress the temperature rise of the fixed blades 123 (123a, 123b, 123c%) above the lowest stage.
  • the heat path of the second stator blade spacer 125e is narrowed by providing the concave surface 125e4, the transfer of heat from the threaded spacer 131 is prevented, and the temperature drop of the threaded spacer 131 can be suppressed.
  • the second stator wing spacer 125d positioned one step above the second stator wing spacer 125e also has a concave surface 125d4 on its lower surface 125d3. Therefore, the temperature rise of the fixed blade 123 and the temperature drop of the threaded spacer 131 can be suppressed more effectively.
  • second stator wing spacers 125d and 125e there are two second stator wing spacers 125d and 125e in this embodiment, they may be one or three or more. Further, the positions at which the second stator wing spacers 125d are arranged are not limited to the illustrated example, and may be arranged, for example, at the second stage, the third stage, and so on from the bottom. If the second stator blade spacer 125e of the present embodiment is arranged at the lowest stage, the number of the stator blades 123 that can suppress the temperature rise increases, and the temperature rise of the rotor blades 102 (102a, 102b, 102c, . . . ) increases. can be effectively suppressed, which is more preferable.
  • the second stator wing spacers 125d and 125e described above have the concave surfaces 125d4 and 125e4 on the bottom surfaces 125d3 and 125e3, like the second stator wing spacers 125d and 125e shown in FIG. , 125e4 may be provided.
  • the second stator wing spacers 125d and 125e can be formed by casting or by cutting a wrought material. are preferably provided on the lower surfaces 125d3, 125e3 of the second stator spacers 125d, 125e. This point will be described with reference to FIGS. 7 and 8. FIG.
  • FIG. 7 shows a case where the concave surfaces 125d4 and 125e4 are provided on the upper surfaces 125d1 and 125e1 in forming the second stationary blade spacers 125d and 125e by cutting from the wrought material.
  • the expanded material is a pipe material P that becomes cylindrical.
  • the material of the wrought material is not particularly limited, it is preferable to use an aluminum alloy in consideration of the easiness of processing when the wrought material is formed into a cylindrical shape and the ease of subsequent cutting.
  • one end of the pipe material P is held by a chuck C or the like as shown in the figure, and the hatched h1 portion at the other end is held.
  • the h2 portion is cut with a cutting tool T.
  • the cutting tool T cuts off the other end of the pipe material P along the line L, and the h3 portion is cut with the cutting tool T from the cut off portion. That is, when cutting the h3 portion, it is necessary to hold the separated portion again with the chuck C or the like.

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  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
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Abstract

L'invention concerne : une pompe à vide qui peut supprimer une augmentation de température d'une pale fixe provoquée par la chaleur provenant d'une source de chauffage sans augmentation du nombre de composants ; et un espaceur utilisé dans ladite pompe à vide. La présente invention est une pompe à vide comprenant : une pluralité de pales rotatives (102) qui tournent conjointement avec des arbres rotatifs (103, 113) ; une pluralité de pales fixes (123) qui sont disposées en plusieurs étages entre les pales rotatives (102) ; et une pluralité d'éléments d'espacement (125) qui sont disposés en plusieurs étages à l'intérieur de boîtiers (114, 129) et maintiennent les pales fixes (123) dans des positions prédéterminées, la pompe à vide étant caractérisée en ce qu'au moins un élément d'espacement (125d, 125e) parmi la pluralité d'éléments d'espacement (125) qui maintiennent les pales fixes (123) présente une surface en retrait (125d4, 125e4) dans une surface de contact (125d3 125e3) venant en contact avec les pales fixes (123).
PCT/JP2022/000593 2021-01-27 2022-01-11 Pompe à vide et élément d'espacement WO2022163341A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US18/261,032 US20240318666A1 (en) 2021-01-27 2022-01-11 Vacuum pump and spacer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-010866 2021-01-27
JP2021010866A JP2022114559A (ja) 2021-01-27 2021-01-27 真空ポンプ及びスペーサ

Publications (1)

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WO2022163341A1 true WO2022163341A1 (fr) 2022-08-04

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PCT/JP2022/000593 WO2022163341A1 (fr) 2021-01-27 2022-01-11 Pompe à vide et élément d'espacement

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US (1) US20240318666A1 (fr)
JP (1) JP2022114559A (fr)
WO (1) WO2022163341A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006152958A (ja) * 2004-11-30 2006-06-15 Shimadzu Corp ターボ分子ポンプ
JP2016176340A (ja) * 2015-03-18 2016-10-06 株式会社島津製作所 ターボ分子ポンプ
WO2020195943A1 (fr) * 2019-03-26 2020-10-01 エドワーズ株式会社 Pompe à vide et composant constitutif de pompe à vide

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8591204B2 (en) * 2008-03-31 2013-11-26 Shimadzu Corporation Turbo-molecular pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006152958A (ja) * 2004-11-30 2006-06-15 Shimadzu Corp ターボ分子ポンプ
JP2016176340A (ja) * 2015-03-18 2016-10-06 株式会社島津製作所 ターボ分子ポンプ
WO2020195943A1 (fr) * 2019-03-26 2020-10-01 エドワーズ株式会社 Pompe à vide et composant constitutif de pompe à vide

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JP2022114559A (ja) 2022-08-08
US20240318666A1 (en) 2024-09-26

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