WO2022159804A1 - Générateur de gaz plasma - Google Patents

Générateur de gaz plasma Download PDF

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Publication number
WO2022159804A1
WO2022159804A1 PCT/US2022/013488 US2022013488W WO2022159804A1 WO 2022159804 A1 WO2022159804 A1 WO 2022159804A1 US 2022013488 W US2022013488 W US 2022013488W WO 2022159804 A1 WO2022159804 A1 WO 2022159804A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
power
electrode
tube
input
Prior art date
Application number
PCT/US2022/013488
Other languages
English (en)
Inventor
Thomas J. SHEPERAK
Original Assignee
Sheperak Thomas J
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sheperak Thomas J filed Critical Sheperak Thomas J
Priority to EP22743317.4A priority Critical patent/EP4280987A1/fr
Priority to CA3209128A priority patent/CA3209128A1/fr
Priority to CN202280023426.1A priority patent/CN118302124A/zh
Publication of WO2022159804A1 publication Critical patent/WO2022159804A1/fr
Priority to US18/223,924 priority patent/US20240189012A1/en
Priority to IL304647A priority patent/IL304647A/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
    • A61B18/04—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
    • A61B18/042—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating using additional gas becoming plasma
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/0005—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor for pharmaceuticals, biologicals or living parts
    • A61L2/0082—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor for pharmaceuticals, biologicals or living parts using chemical substances
    • A61L2/0094—Gaseous substances
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2101/00—Chemical composition of materials used in disinfecting, sterilising or deodorising
    • A61L2101/02—Inorganic materials
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/44—Applying ionised fluids

Definitions

  • This invention relates generally to producing useful gases with a plasma directed electron beam, and, more specifically, to a method and apparatus for producing nitric oxides using a plasma directed electron beam.
  • Nitric oxides are known as antimicrobial and sterilization agents, and have many applications in the life sciences. However, due to their often toxic nature and short shelf life, their availability is limited. What is needed is a means of generating NxOx, as needed, to avoid problems with their limited shelf-life, and avoid/reduce the need to inventory/ stock toxic gases.
  • the present invention fulfills this need among others.
  • the Coaxial Energy Delivery System described in US Patent No. 9,993,282 utilizes the insulating properties of plasma as a waveguide to confine and direct a coherent electromagnetic wave of electrical energy at Radio Frequency (RF).
  • RF Radio Frequency
  • the system uses plasma to provide a path for the delivery of the electromagnetic wave to a target material. This can be described as plasma “sheath” on the outside and beam on the inside, the plasma and the electromagnetic wave travelling coaxially from the point of emission to a target material and, as such, define a Plasma Directed Electron Beam (PDEB).
  • PDEB Plasma Directed Electron Beam
  • the electrons from a power source are accelerated to the point wherein the electrons, as a compressed wave, are spontaneously emitted from a metallic conductor surrounded by a tubular or columnar flow of a gas, such as helium, argon, and other Nobel gases, and/or atmospheric air.
  • the electrons are accelerated to sufficient speed to energize the tubular or columnar flow of gas to the plasma state which, using the radio frequency insulating properties of plasma, confines and directs the electromagnetic wave, as a visible beam, coaxially, to a target material some distance away from the emitter. Neither the emission of the wave nor coupling of the wave to a target material requires a physical ground path return.
  • the relationship between the coaxial flow of the electromagnetic wave and the tubular or columnar flow of the gas energized to plasma state is symbiotic.
  • the flow of gas depends upon the electromagnetic wave as its energy source to reach the plasma state, and the electromagnetic wave depends upon the plasma to guide its travel to reach a target.
  • the electromagnetic wave energy creates its own conduit or waveguide as it propagates along its axis, coaxially with the plasma column.
  • the outside portion of the plasma column serves as an insulator to confine and compress the electromagnetic wave at radio frequency, but, paradoxically, on the inside, the plasma column serves as a super conductor to direct the electromagnetic wave to a target material. Therefore, unlike a conventional radio station broadcast antenna in which the RF energy emanates in an ever expanding sphere, the PDEB surrounds the RF energy with a column of gas and creates a waveguide that prevents the radio frequency from expanding as a sphere.
  • the compressed radio frequency can be directed with high energy density from the RF emitter to point to a target material which can be a liquid, a solid or a gas.
  • the electromagnetic wave delivered to a target in this coaxial system is at such a frequency so as to resonate either at the primary or at a harmonic frequency thereof, thereby elevating the electrons of such material to a higher energy state which, among other things, results in the emission of photons.
  • This causes the target materials to more easily and efficiently melt, vaporize, dissociate, or otherwise be modified, depending upon the desired outcome.
  • This coaxial energy delivery system provides a reliable means to electro-chemically manipulate and alter matter.
  • the PDEB not only melts, vaporizes, or dissociates target materials, but also dissociates gas molecules used to form the plasma in a selective and predictable way. Without being tied to a particular theory, Applicant believes that the PDEB provides a consistent and predictable radial power density through the plasma sheath as the PDEB propagates from the electrode. In other words, because the plasma sheath has a thin annular profile, the electron beam within the beam is able to uniformly excite the beam radially.
  • the PDEB may be energized to disassociate the diatomic molecules N2 and 02 found in air to their monatomic units - i.e., N and O.
  • atoms- e.g., nitrogen and oxygen will combine in predictable ways based on the consistent radio power density. More specifically, in this particular example, because nitrogen is in abundance and oxygen scarce, and because the eV for nitrogen is considerably higher than that of oxygen, as the radial power density across the plasma sheath drops, the abundant nitrogen will be more likely to combine with the scarce oxygen to form NO rather than other combinations - e.g. nitrogen dioxide (NO2).
  • NO2 nitrogen dioxide
  • one important feature of the PDEB is its ability to consistently energize the plasma beam radially. This means that elements are ionized consistently near the tip of the electrode radially across the plasma beam, and then, as the power of the electron beam diminishes as the beam propagates way form the electrode tip, the ionized elements combined with other elements in a predictable way due to the consistent radial energy across the plasma beam.
  • Prokaryotic organisms for the sterilization of surfaces, including mammalian cells at surgical sites, without harm to the mammalian cells.
  • the acceleration of wound healing by stimulating blood flow to the wound site and by stimulating fibroblasts which release collagen, among other things, to accelerate such wound healing.
  • the invention comprises a method of generating an output gas, comprising: (a) plasmatizing an input gas with RF power propagating from a tip of an electrode to form an annular plasma sheath constrained by a tube with the RF power propagating within the annular plasma sheath; and (b) forming the output gas as the annular plasma sheath propagates away from the tip of the electrode.
  • the invention comprises gas generator system, comprising: (a) a radio frequency (RF) power source; (b) at least one reactor having a first end and a second end, the reactor comprising at least, (i) a gas input at the first end for receiving an input gas from a gas source; (ii) an elongated tube having an axis; (iii) an electrode disposed at the first end with at least a portion of the electrode axially disposed within the tube, the electrode operatively connected to the RF power source, the electrode having a tip configured to emit the RF power such the RF power propagates axially along the tube, the electrode defining a channel for receiving the input gas from the gas input and for exhausting the input gas into the tube such that the input gas flows axially and laminarly along the tube; and (iv) a gas output in fluid communication with the tube to receive an output gas from the tube; wherein the RF power from the electrode and the flow of the input gas along the tube are sufficient for
  • Fig. 1 shows one embodiment of the system of the present invention for generating nitric oxide.
  • Fig. 2 shows a top view of the embodiment of Fig. 1.
  • FIG. 3 shows a cross-sectional view of a plurality of reactors of the system of
  • Fig. 1 with an outlet manifold.
  • Fig. 4 shows the art of connection between one of the reactors and the RF coil.
  • FIG. 5 shows an embodiment in which a plurality of igniters 501 are shown for igniting the annular plasma sheath.
  • Fig. 6 shows the embodiment of Fig. 5 with the covers over the first and second ends of the reactors.
  • Fig. 7 shows a top view of the reactors.
  • the present invention refers to any one of the embodiments of the invention described herein, and any equivalents. Furthermore, reference to various feature(s) of the “present invention” throughout this document does not mean that all claimed embodiments or methods must include the referenced feature(s). [0021] Referring to Figs. 1 - 7, one embodiment of the gas producing system 100 is shown. The system may be used for ionizing elements of one gas or a combination of gases, and then facilitating their controlled combination to form a new gas.
  • the system produces nitric oxides (NxOx) and other gases.
  • the output gases including one or more of the following: NO, NO2, NO3, N2O, N2O2, N2O3, N2O4, N2O5, N4O, N4O6, HNO3, H2O2 and 03.
  • system 100 is shown in perspective view.
  • system 100 has a plurality of reactors 101, each having a first end 101a and the second end 101b. It should be understood that, in these figures, various hoses and conductors connecting inputs and outputs are eliminated for simplicity/clarity.
  • each reactor comprises at least a gas input 102 at the first end for receiving the input gas from the gas source, an elongated tube 103 having an axis 103a, an electrode 104.
  • the electrode is operatively connected to the RF power source, and is disposed at the first end with at least a portion of the electrode axially disposed within the tube.
  • the electrode has a tip 104a configured to emit the RF power such the RF power propagates axially along the tube.
  • the electrode defines a channel 104b for receiving the input gas from the gas input and for exhausting the input gas into the tube such that the input gas flows axially and laminarly along the tube.
  • a gas output 105 is in fluid communication with the tube to receive an output gas from the tube.
  • the input gas comprises an ionization gas, and, optionally reactant gases, depending on the desired output gas.
  • NO is produced, and air is used not only as the ionization gas, but also as the primary reactant gas.
  • an additional reactant gases are added to the input gas to improve yields and/or to vary the output gas/gases.
  • the input gas and output gas may be single component gases or may be a mixture of gases.
  • a noble gas such as helium and argon, can be added to an oxygen stream to ensure ionization produces essentially 100% NO as opposed to NOx.
  • reactant gases may include, for example, oxygen, nitrogen, carbon dioxide, hydrogen, argon, methane, helium, krypton, neon, and other gases including water vapor, just to name a few.
  • the input gas including the ionization gas and additional reactant gases, if any, is drawn into the system using a vacuum pump, and the gas flow is controlled by a flowmeter.
  • a positive pressure pump can be used to essentially pump the gas to the system.
  • Still other means of introducing the gas into the system will be obvious to those of skill in the art in light of this disclosure.
  • the flow of the input gas can be optimized by one of skill in the art in light of this disclosure without undue experimentation. For example, in one embodiment, in which the input gas is air, and the output gas is nitric oxide (NO), a flow rate for the air was 30 ft. 3 per hour at 32 psi has been shown to provide suitable results.
  • NO nitric oxide
  • nitric oxide or other gas produced by the system of the present invention can be used as it exits the reaction chamber, or it can be stored/compressed for later use.
  • the electrode can be configured in different ways and may comprise different materials.
  • the electrode is tungsten, although other materials may be used, such as silver or iridium.
  • the tube may also be configured in different ways and may comprise different materials.
  • the tube comprises a chemically non- reactive, heat-resistant material, such as glass, quartz, fused silica and mullite, although other more durable/tougher materials like heat-resistant polymers may be preferred.
  • the system 100 is configured to produce nitric oxide.
  • Applicant has found that suitable results have been achieved with a 6” long quartz tube, having an OD of 0.25”, and an ID of 0.17”, and with a 2” long tungsten electrode, having an OD of 0.17” and an ID of 0.05”. It should be understood that these dimensions are provided just for illustration, and that those of skill in the art will be able to optimize the tube in the electrode for a given application in light of this disclosure.
  • Fig. 2 shows a top perspective of the system 100.
  • the RF tuning system 110 is shown, which, in this particular embodiment, comprises a coil and capacitor(s) for increasing the RF power (e.g. voltage) received from an RF power generator (not shown).
  • the RF power generator is described in Applicant’s US Patent No. 9,993,282 mentioned above.
  • the RF power is connected to the electrode at RF connector 401 as shown in Fig. 4.
  • the RF power used to ionize the gas should be higher than the electron volt (eV) of gas molecules.
  • Air is roughly 1 part Oxygen (02) and 4 parts Nitrogen (N2).
  • the RF power is preferably greater than 30W, or greater than 50W, or greater than 75W, or greater than 100W or greater than 120W or greater than 150W or greater than 175W.
  • the RF power coupled to the electrode is around 130W.
  • the RF power has a frequency of 13.56 mHz, although other frequencies can be used.
  • the primary frequency being radio frequency as the preferred embodiment herein, can be used as a carrier wave onto which an additional frequency or additional frequencies can be added. These additional frequencies would be the primary or a harmonic to the resonating frequency of the target material.
  • the coaxial energy delivery system can operate using alternative wave forms from a power generator, including but not limited to square wave, sinusoidal wave, triangular wave, saw tooth wave, pulsed direct current, direct current, or other wave forms.
  • the RF power from the electrode and the flow of the input gas along the tube are sufficient for the RF power to plasmatize the input gas to form an annular plasma sheath constrained by the tube with the RF power propagating within the sheath.
  • the output gas forms from the annular plasma sheath as the annular plasma sheath propagates away from the tip of the electrode.
  • the coaxial energy delivery system is scalable and is not limited to a single point of energy emission.
  • the high potential can be time-shared over a large area.
  • the linear path represented by the sinusoidal wave has a measurable length along which additional energy emitters can be fabricated to provide gas flow needed to form a columnar plasma at a point of electrical discharge, each of which emitter will cause a visible beam, each being comprised of plasma on the outside and beam (electromagnetic wave) on the inside.
  • the means to create each additional beams can be as simple as drilling numerous holes in an electrically conductive tube, sealed at one end and with fittings provided at the other end to allow for the introduction of a flow of gas to be used to form the plasma waveguide.
  • the conductive tube can be a length of several feet or there can be several tubes of shorter lengths with such holes and which tubes can be placed such as to form any geometric pattern to suit coverage of the coaxial energy delivery systems for an intended use.
  • the electrode has an orifice axially defined at the tip. Applicant has found that the laminar exhausting of gas from an axially disposed orifice in the electrode facilitates plasmatization of a gas into an annular configuration.
  • air is the feedstock. Since air tends to be difficult to ionize, in one embodiment, a plasma starter is used.
  • the plasma starter may vary according to application.
  • an easily-ionized gas such as, as helium, is briefly introduced in the input gas to start the ionization of air.
  • an igniter can be used to initially ionize the gas.
  • each of the reactors comprises an igniter 501.
  • the igniter is a known igniter such as those used to ignite electric grills.
  • the igniter is a known igniter such as those used to ignite electric grills.
  • scrubbers can be used to remove unwanted impurities such as NO2 from the desired NO product stream.
  • Such scrubbers are well-known and tend to utilize alkali solutions/solids (e.g., potassium, sodium, calcium — hydroxides).
  • converters may be used to convert one form NxOx to another desired form.
  • molybdenum converters or stainless converters are used to convert NO2 to NO Still other means of purifying the output stream will be obvious to those of skill the art in light of this disclosure.

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  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Veterinary Medicine (AREA)
  • General Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Public Health (AREA)
  • Animal Behavior & Ethology (AREA)
  • Chemical & Material Sciences (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Epidemiology (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Otolaryngology (AREA)
  • Electromagnetism (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)

Abstract

L'invention concerne un procédé de génération d'un gaz de sortie, comprenant la plasmatisation d'un gaz d'entrée avec une puissance RF se propageant à partir d'une pointe d'une électrode pour former une gaine de plasma annulaire contrainte par un tube avec ladite puissance RF se propageant à l'intérieur de ladite gaine de plasma annulaire; et la formation dudit gaz de sortie lorsque ladite gaine de plasma annulaire se propage à l'opposé de ladite pointe de ladite électrode.
PCT/US2022/013488 2011-05-13 2022-01-24 Générateur de gaz plasma WO2022159804A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP22743317.4A EP4280987A1 (fr) 2021-01-23 2022-01-24 Générateur de gaz plasma
CA3209128A CA3209128A1 (fr) 2021-01-23 2022-01-24 Generateur de gaz plasma
CN202280023426.1A CN118302124A (zh) 2021-01-23 2022-01-24 等离子气体发生器
US18/223,924 US20240189012A1 (en) 2011-05-13 2023-07-19 Plasma gas generator
IL304647A IL304647A (en) 2021-01-23 2023-07-23 Plasma gas generator

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202163140852P 2021-01-23 2021-01-23
US63/140,852 2021-01-23
US202163141416P 2021-01-25 2021-01-25
US63/141,416 2021-01-25

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US18/223,924 Continuation US20240189012A1 (en) 2011-05-13 2023-07-19 Plasma gas generator

Publications (1)

Publication Number Publication Date
WO2022159804A1 true WO2022159804A1 (fr) 2022-07-28

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Application Number Title Priority Date Filing Date
PCT/US2022/013488 WO2022159804A1 (fr) 2011-05-13 2022-01-24 Générateur de gaz plasma

Country Status (4)

Country Link
EP (1) EP4280987A1 (fr)
CA (1) CA3209128A1 (fr)
IL (1) IL304647A (fr)
WO (1) WO2022159804A1 (fr)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3947654A (en) * 1973-10-24 1976-03-30 Sirius Corporation Method of generating laser-radio beam
US5618382A (en) * 1989-10-03 1997-04-08 Applied Materials, Inc. High-frequency semiconductor wafer processing apparatus and method
US5830329A (en) * 1994-05-06 1998-11-03 Medtronic, Inc. Plasma process for reducing friction within the lumen of polymeric tubing
US20030150560A1 (en) * 2002-02-08 2003-08-14 Kinnard David William Reactor assembly and processing method
US20090165954A1 (en) * 2004-12-30 2009-07-02 Lam Research Corporation Electrically enhancing the confinement of plasma
US20140361690A1 (en) * 2011-12-27 2014-12-11 Tokyo Electron Limited Plasma processing apparatus
US20150332893A1 (en) * 1999-12-07 2015-11-19 Komatsu Ltd. Surface Treatment Apparatus
US20170018411A1 (en) * 2015-07-13 2017-01-19 Lam Research Corporation Extreme edge sheath and wafer profile tuning through edge-localized ion trajectory control and plasma operation
US20190133669A1 (en) * 2011-05-13 2019-05-09 Thomas J. Sheperak Plasma Directed Electron Beam Wound Care System Apparatus and Method
US20200139072A1 (en) * 2017-02-27 2020-05-07 Third Pole, Inc. Systems and Methods for Ambulatory Generation of Nitric Oxide

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3947654A (en) * 1973-10-24 1976-03-30 Sirius Corporation Method of generating laser-radio beam
US5618382A (en) * 1989-10-03 1997-04-08 Applied Materials, Inc. High-frequency semiconductor wafer processing apparatus and method
US5830329A (en) * 1994-05-06 1998-11-03 Medtronic, Inc. Plasma process for reducing friction within the lumen of polymeric tubing
US20150332893A1 (en) * 1999-12-07 2015-11-19 Komatsu Ltd. Surface Treatment Apparatus
US20030150560A1 (en) * 2002-02-08 2003-08-14 Kinnard David William Reactor assembly and processing method
US20090165954A1 (en) * 2004-12-30 2009-07-02 Lam Research Corporation Electrically enhancing the confinement of plasma
US20190133669A1 (en) * 2011-05-13 2019-05-09 Thomas J. Sheperak Plasma Directed Electron Beam Wound Care System Apparatus and Method
US20140361690A1 (en) * 2011-12-27 2014-12-11 Tokyo Electron Limited Plasma processing apparatus
US20170018411A1 (en) * 2015-07-13 2017-01-19 Lam Research Corporation Extreme edge sheath and wafer profile tuning through edge-localized ion trajectory control and plasma operation
US20200139072A1 (en) * 2017-02-27 2020-05-07 Third Pole, Inc. Systems and Methods for Ambulatory Generation of Nitric Oxide

Also Published As

Publication number Publication date
CA3209128A1 (fr) 2022-07-28
IL304647A (en) 2023-09-01
EP4280987A1 (fr) 2023-11-29

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