WO2022156019A1 - 一种具有泄压功能的石英真空吸附装置 - Google Patents

一种具有泄压功能的石英真空吸附装置 Download PDF

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Publication number
WO2022156019A1
WO2022156019A1 PCT/CN2021/076903 CN2021076903W WO2022156019A1 WO 2022156019 A1 WO2022156019 A1 WO 2022156019A1 CN 2021076903 W CN2021076903 W CN 2021076903W WO 2022156019 A1 WO2022156019 A1 WO 2022156019A1
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Prior art keywords
air
pipe
pressure relief
way joint
joint
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PCT/CN2021/076903
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English (en)
French (fr)
Inventor
胡龙辉
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宁波云德半导体材料有限公司
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Publication of WO2022156019A1 publication Critical patent/WO2022156019A1/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B47/00—Suction cups for attaching purposes; Equivalent means using adhesives
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F17D1/065—Arrangements for producing propulsion of gases or vapours
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00—Arrangements for supervising or controlling working operations
    • F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D5/00—Protection or supervision of installations

Definitions

  • the invention belongs to the technical field of vacuum adsorption devices, and in particular relates to a quartz vacuum adsorption device with a pressure relief function.
  • Vacuum adsorption device is a commonly used object adsorption and fixing device, which generally includes vacuum equipment, connecting pipes, and vacuum suction cups.
  • the existing vacuum suction device has problems such as inconvenient disassembly, assembly and replacement of the whole, and difficulty in taking the article because the vacuum suction cup and the article are sometimes kept in a vacuum state when taking the article.
  • the purpose of the present invention is to solve the problems in the prior art, and propose a quartz vacuum adsorption device with a pressure relief function, which can effectively relieve the pressure by blowing air to facilitate the taking of quartz products, facilitate disassembly, maintenance and replacement, and vacuum adsorption and blowing. Air pressure relief control is convenient.
  • the present invention proposes a quartz vacuum adsorption device with a pressure relief function, which includes a vacuum suction cup, an air intake pipe, an air blowing pipe, a three-way joint, a four-way joint and several connecting pipes, and the vacuum suction cup is provided with air holes,
  • the vacuum suction cup is provided with an annular groove, the air hole is located in the annular groove, the outer wall of the vacuum suction cup is provided with a joint communicating with the air hole at the position corresponding to the air hole, and the air intake pipe is provided with a vacuum generator and a suction device.
  • Air control switch the air intake pipe and the air blow pipe are both connected to the air pump, the air blow pipe is provided with an air blow pressure relief control switch, the four connection ports of the four-way joint can be detachably connected with connecting pipes, and three of them are connected
  • the pipes are respectively detachably connected with the corresponding joints, and the three-way joints are respectively detachably connected with the air intake pipe, the blowing pipe and one of the connecting pipes.
  • connecting pipe and the three-way joint between the connecting pipe and the three-way joint, between the connecting pipe and the joint, between the connecting pipe and the four-way joint, between the air inlet pipe and the three-way joint, and between the blowing pipe and the three-way joint
  • the connecting ends of the connecting pipe, the air inlet pipe and the air blowing pipe are all stepped, and are connected by a plug connection, which is convenient for the staff to plug, remove and assemble.
  • the surface of the connecting port of the joint, the three-way joint, the four-way joint and the connecting end surfaces of the connecting pipe, the air inlet pipe and the air blowing pipe are all provided with annular recesses, and the longitudinal section of the annular recess is semicircular, so An annular cavity is formed after the connection between the connecting pipe and the three-way joint, between the connecting pipe and the joint, between the connecting pipe and the four-way joint, between the air inlet pipe and the three-way joint, and between the blowing pipe and the three-way joint, An annular sealing ring is fitted in the annular cavity, the arrangement of the annular sealing ring improves the sealing performance of the overall pipeline connection, and the annular sealing ring is easy to install.
  • threads are used between the connecting pipe and the three-way joint, between the connecting pipe and the joint, between the connecting pipe and the four-way joint, between the air inlet pipe and the three-way joint, and between the blowing pipe and the three-way joint
  • the connection method is connected by thread connection, which is convenient for the staff to manually screw and disassemble.
  • a pressure regulating valve with a gauge is installed on the air intake pipe and the air blowing pipe, the pressure regulating valve with a gauge on the air intake pipe is located between the vacuum generator and the air pump, and the pressure regulating valve with a gauge on the air blowing pipe is located between the vacuum generator and the air pump.
  • the valve is located between the air blowing and pressure relief control switch and the air pump.
  • the pressure regulating valve with a gauge can directly read the pressure value in the pipe, so that the staff can effectively adjust the pressure value in the air inlet pipe and the air blowing pipe according to the needs.
  • the pressure value in the blowing pipe is basically stable, thereby ensuring the stability of the vacuum suction cup adsorption.
  • the working air pressure of the air intake pipe and the air blowing pipe is controlled at 0.05-0.1 Bar to ensure that the quartz product is effectively vacuum adsorbed or blown up.
  • the longitudinal section of the annular groove is in the shape of an isosceles trapezoid, and rounded corners are provided on both sides of the top port of the annular groove to avoid damage to the quartz product.
  • the number of the air holes is 3 and the three air holes form a 120° angle with each other, so that the adsorption force of the vacuum suction cup on the quartz product is relatively uniform, ensuring the adsorption stability of the quartz product and the smooth surface of the quartz product after adsorption Spend.
  • the inhalation control switch and the air blowing pressure relief control switch are both manual switches or electrical switches, and the gas circulation in the air intake pipe or the air blow pipe can be controlled manually or electrically.
  • the suction control switch and the blowing pressure relief control switch are all electrical switches, and the suction control switch, the blowing pressure relief control switch and the vacuum generator are all connected to the PLC control device, which can be automatically Control the opening and closing of the suction control switch and the blowing pressure relief control switch.
  • the present invention provides an air intake pipe with an air suction control switch and an air blow pipe with a blow air pressure relief control switch, so that the air intake pipe and the air blow pipe can be independently controlled, and the air intake pipe can be used for the vacuum suction cup to vacuum adsorb the quartz product, the air blowing pipe can be used to blow air to release the adsorption pressure between the vacuum suction cup and the quartz product, and it is convenient for users to take the quartz product; between the connecting pipe and the joint, the four-way joint, the three-way joint, and the air inlet pipe, the blowing pipe and the three-way joint
  • the joints can be disassembled and connected, which is convenient for the disassembly, maintenance and replacement of the whole pipeline, and the length of the pipe body can be replaced according to the needs.
  • FIG. 1 is a schematic structural diagram of an embodiment of the present invention
  • FIG. 2 is a top view of an embodiment of the present invention
  • Fig. 3 is the A-A plane sectional view in Fig. 2 of an embodiment of the present invention.
  • Fig. 4 is an enlarged view of part B in Fig. 3 of an embodiment of the present invention.
  • FIG. 5 is a schematic diagram of a connecting end of a connecting pipe according to an embodiment of the present invention.
  • Embodiment 1 Referring to FIGS. 1 to 7, this embodiment provides a quartz vacuum adsorption device with a pressure relief function, including a vacuum suction cup 3, an air intake pipe 1, an air blowing pipe 2, a three-way joint 6, a four-way joint 51 and Several connecting pipes 5, the vacuum suction cup 3 is provided with three air holes 32, the three air holes 32 form a 120° angle with each other, the vacuum suction cup 3 is provided with an annular groove 31, and the air hole 32 is located in the annular groove 31, The outer wall of the vacuum suction cup 3 is provided with a joint 33 communicating with the air hole 32 at the position corresponding to the air hole 32. The joint 33 is hollow inside.
  • the air intake pipe 1 is provided with a vacuum generator 11 and an inhalation control switch 12.
  • the air blowing pipe 2 is provided with an air blowing pressure relief control switch 21, and the four connection ports of the four-way joint 51 can be detachably connected to the connecting pipe 5, and the three connecting pipes 5 are respectively detachable from the corresponding joint 33.
  • the tee joint 6 is detachably connected with the air inlet pipe 1, the blowing pipe 2 and one of the connecting pipes 5, the air hole 32 and the joint 33 are connected vertically, and the notch of the annular groove 31 is level with the vacuum suction cup 3
  • the joint 33 is integrally connected with the vacuum suction cup 3 .
  • connection ends of the connecting pipe 5, the air inlet pipe 1 and the air blowing pipe 2 are all stepped, and the connecting ends of the connecting pipe 5, the air inlet pipe 1 and the air blowing pipe 2 refer to the connection ends that can be connected with the three.
  • the connecting port surfaces of the joint 33, the three-way joint 6, the four-way joint 51 and the connecting end surfaces of the connecting pipe 5, the air inlet pipe 1 and the air blowing pipe 2 are all provided with an annular recess 8, and the longitudinal section of the annular recess 8 is provided. It is semicircular, between the connecting pipe 5 and the tee joint 6, between the connecting pipe 5 and the joint 33, between the connecting pipe 5 and the four-way joint 51, between the air inlet pipe 1 and the tee joint 6, between the blowing pipe 2 After connecting with the tee joint 6, an annular cavity is formed, the longitudinal section of the annular cavity is circular, and an annular sealing ring 7 is fitted in the annular cavity.
  • both the air intake pipe 1 and the air blowing pipe 2 are equipped with a pressure regulating valve 4 with a gauge, and the pressure regulating valve 4 with a gauge on the air intake pipe 1 is located between the vacuum generator 11 and the air pump, and the gauge pressure regulating valve on the air blowing pipe 2 is adjusted.
  • the pressure valve 4 is located between the blow-off pressure control switch 21 and the air pump.
  • the working air pressures of the air intake pipe 1 and the air blowing pipe 2 are both controlled at 0.05-0.1 Bar.
  • the longitudinal section of the annular groove 31 is in the shape of an isosceles trapezoid, and rounded corners are provided on both sides of the top port of the annular groove 31 .
  • suction control switch 12 and the blowing pressure relief control switch 21 are both manual switches.
  • Example 2 except between the connecting pipe 5 and the three-way joint 6, between the connecting pipe 5 and the joint 33, between the connecting pipe 5 and the four-way joint 51, between the air inlet pipe 1 and the three-way joint 6, and the blowing pipe 2
  • the rest of the structure is the same as that of Embodiment 1 except that it is connected with the tee joint 6 by means of threaded connection.
  • Embodiment 3 except that the suction control switch 12 and the blowing pressure relief control switch 21 are all electrical switches, and the suction control switch 12, the blowing pressure relief control switch 21 and the vacuum generator 11 are all connected to the PLC control device. , and the rest of the structure is the same as that of Embodiment 1, wherein the PLC control device can control the switching conditions of the air pump, the suction control switch 12 , the blowing and pressure relief control switch 21 and the vacuum generator 11 .
  • Embodiment 4 except that the suction control switch 12 and the blowing pressure relief control switch 21 are all electrical switches, and the suction control switch 12, the blowing pressure relief control switch 21 and the vacuum generator 11 are all connected to the PLC control device. , the rest of the structure is the same as the second embodiment, wherein the PLC control device can control the switching conditions of the air pump, the suction control switch 12 , the blowing and pressure relief control switch 21 and the vacuum generator 11 .
  • the suction control switch 12 is turned on, and the blowing pressure relief control switch 21 is turned off. , at this time, the air pump supplies air to the intake pipe 1. Under the action of the vacuum generator 11, a negative pressure is generated between the intake pipe 1, the connecting pipe 5, the connecting head 33, the air hole 32 and the annular groove 31, so that the vacuum suction cup 3 can be firmly Adsorb the surface of the quartz product.
  • the air pump supplies air to the air blowing pipe 2, and the air in the air blowing pipe 2 passes through the connecting pipe 5.
  • the connecting head 33, the air hole 32 and the annular groove 31 are blown upward to the surface of the quartz product, so that the quartz product is effectively blown and easy to take.
  • the connecting pipe 5 can be removed from the three-way joint 6, the four-way joint 51 and the joint 33.
  • the pressure regulating valve 4 with a gauge can adjust the intake pipe 1 And the pressure value in the blowing pipe 2, the working air pressure in the pipe can be controlled at 0.05 ⁇ 0.1Bar, so as to ensure the vacuum adsorption or blowing of the quartz product.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Manipulator (AREA)
  • Jigs For Machine Tools (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)

Abstract

本发明公开了一种具有泄压功能的石英真空吸附装置，包括真空吸盘、进气管、吹气管、三通接头、四通接头和若干连接管，真空吸盘上设有气孔，所述真空吸盘上设有环形凹槽，所述气孔位于环形凹槽内，所述真空吸盘外壁对应气孔位置处设有与气孔相连通的接头，所述进气管上设有真空发生器和吸气控制开关，所述进气管和吹气管均与气泵相连，吹气管上设有吹气泄压控制开关，所述四通接头的四个连接端口均可拆卸连接有连接管，且其中三根连接管分别与相应的接头可拆卸连接，所述三通接头分别与进气管、吹气管和其中一根所述的连接管可拆卸相连。本发明具有通过吹气有效泄压便于石英产品的拿取，拆装维护更换方便，真空吸附和吹气泄压控制便捷等优点。

Description

一种具有泄压功能的石英真空吸附装置 【技术领域】
本发明属于真空吸附装置的技术领域，尤其涉及一种具有泄压功能的石英真空吸附装置。
【背景技术】
真空吸附装置是一种常用的物品吸附固定装置，一般包括抽真空设备、连接管、真空吸盘几部分。现有的真空吸附装置存在整体拆装更换不便，拿取物品时由于真空吸盘和物品之间有时还保持真空状态导致物品拿取难度大等问题。
【发明内容】
本发明的目的就是解决现有技术中的问题，提出一种具有泄压功能的石英真空吸附装置，能够通过吹气有效泄压便于石英产品的拿取，拆装维护更换方便，真空吸附和吹气泄压控制便捷。
为实现上述目的，本发明提出了一种具有泄压功能的石英真空吸附装置，包括真空吸盘、进气管、吹气管、三通接头、四通接头和若干连接管，真空吸盘上设有气孔，所述真空吸盘上设有环形凹槽，所述气孔位于环形凹槽内，所述真空吸盘外壁对应气孔位置处设有与气孔相连通的接头，所述进气管上设有真空发生器和吸气控制开关，所述进气管和吹气管均与气泵相连，吹气管上设有吹气泄压控制开关，所述四通接头的四个连接端口均可拆卸连接有连接管，且其中三根连接管分别与相应的接头可拆卸连接，所述三通接头分别与进气管、吹气管和其中一根所述的连接管可拆卸相连。
作为优选，所述连接管和三通接头之间、连接管和接头之间、连接管和四 通接头之间、进气管和三通接头之间、吹气管和三通接头之间均采用插接方式相连，所述连接管、进气管和吹气管的连接端均呈阶梯状，通过插接方式相连，方便工作人员进行插拔拆装。
作为优选，所述接头、三通接头、四通接头的连接端口表面以及连接管、进气管和吹气管的连接端表面均设有环形凹口，环形凹口的纵截面呈半圆形，所述连接管和三通接头之间、连接管和接头之间、连接管和四通接头之间、进气管和三通接头之间、吹气管和三通接头之间连接后形成一个环形腔，环形腔内配合安装有环形密封圈，环形密封圈的设置提高了整体管路连接密封性，环形密封圈安装方便。
作为优选，所述连接管和三通接头之间、连接管和接头之间、连接管和四通接头之间、进气管和三通接头之间、吹气管和三通接头之间均采用螺纹连接方式相连，通过螺纹连接，方便工作人员手动旋拧拆装。
作为优选，所述进气管和吹气管上均安装有带表调压阀，所述进气管上的带表调压阀位于真空发生器和气泵之间，所述吹气管上的带表调压阀位于吹气泄压控制开关和气泵之间，带表调压阀可直观读取管内压力值，进而方便工作人员根据需求有效对进气管和吹气管内的压力值进行调节，使得进气管和吹气管内压力值基本保持稳定，进而保证真空吸盘吸附的稳定性。
作为优选，所述进气管和吹气管的工作气压均控制在0.05～0.1Bar，保证石英产品被有效真空吸附住或吹起。
作为优选，所述环形凹槽的纵截面呈等腰梯形形状，环形凹槽的顶部端口两侧设置倒圆角，倒圆角处理避免损伤石英产品。
作为优选，所述气孔的数量为3且三个气孔两两之间互成120°夹角，使得真空吸盘对石英产品吸附作用力相对均匀，保证石英产品吸附稳固性和吸附后石英产品表面平整度。
作为优选，所述吸气控制开关和吹气泄压控制开关均为手动开关或电性开关，可通过手动或电动控制进气管或吹气管内气体流通情况。
作为优选，所述吸气控制开关和吹气泄压控制开关均为电性开关，所述吸气控制开关、吹气泄压控制开关和真空发生器均与PLC控制装置相连，可通过PLC自动控制吸气控制开关和吹气泄压控制开关的开闭情况。
本发明的有益效果：本发明通过设置带吸气控制开关的进气管和带吹气泄压控制开关的吹气管，使得进气管和吹气管可独立控制，进气管可用于真空吸盘真空吸附住石英产品，吹气管可用于吹气泄去真空吸盘和石英产品之间的吸附压力方便用户拿取石英产品；连接管与接头、四通接头、三通接头之间以及进气管、吹气管和三通接头之间均可拆卸连接，方便整体管路的拆装维护更换，管体长度可根据需求进行更换。
本发明的特征及优点将通过实施例结合附图进行详细说明。
【附图说明】
图1是本发明一种实施例的结构示意图；
图2是本发明一种实施例的俯视图；
图3是本发明一种实施例的图2中A-A面剖视图；
图4是本发明一种实施例的图3中B部放大图；
图5是本发明一种实施例的连接管的连接端示意图。
图中：1-进气管、2-吹气管、3-真空吸盘、4-带表调压阀、5-连接管、6-三通接头、7-环形密封圈、8-环形凹口、11-真空发生器、12-吸气控制开关、21-吹气泄压控制开关、31-环形凹槽、32-气孔、33-接头、51-四通接头。
【具体实施方式】
实施例1参阅图1至图7，本实施例提供了一种具有泄压功能的石英真空吸附装置，包括真空吸盘3、进气管1、吹气管2、三通接头6、四通接头51和若 干连接管5，真空吸盘3上设有三个气孔32，三个气孔32两两之间互成120°夹角，真空吸盘3上设有环形凹槽31，气孔32位于环形凹槽31内，真空吸盘3外壁对应气孔32位置处设有与气孔32相连通的接头33，接头33内部中空，进气管1上设有真空发生器11和吸气控制开关12，进气管1和吹气管2均与气泵相连，吹气管2上设有吹气泄压控制开关21，四通接头51的四个连接端口均可拆卸连接有连接管5，且其中三根连接管5分别与相应的接头33可拆卸连接，三通接头6分别与进气管1、吹气管2和其中一根所述的连接管5可拆卸相连，气孔32和接头33垂直连通，环形凹槽31的槽口与真空吸盘3相平齐，接头33与真空吸盘3一体相连。
进一步地，连接管5和三通接头6之间、连接管5和接头33之间、连接管5和四通接头51之间、进气管1和三通接头6之间、吹气管2和三通接头6之间均采用插接方式相连，连接管5、进气管1和吹气管2的连接端均呈阶梯状，连接管5、进气管1和吹气管2的连接端是指可与三通接头6、接头33或四通接头51相连的一端。
进一步地，接头33、三通接头6、四通接头51的连接端口表面以及连接管5、进气管1和吹气管2的连接端表面均设有环形凹口8，环形凹口8的纵截面呈半圆形，连接管5和三通接头6之间、连接管5和接头33之间、连接管5和四通接头51之间、进气管1和三通接头6之间、吹气管2和三通接头6之间连接后形成一个环形腔，环形腔纵截面呈圆形，环形腔内配合安装有环形密封圈7。
进一步地，进气管1和吹气管2上均安装有带表调压阀4，进气管1上的带表调压阀4位于真空发生器11和气泵之间，吹气管2上的带表调压阀4位于吹气泄压控制开关21和气泵之间。
进一步地，进气管1和吹气管2的工作气压均控制在0.05～0.1Bar。
进一步地，环形凹槽31的纵截面呈等腰梯形形状，环形凹槽31的顶部端口两侧设置倒圆角。
进一步地，吸气控制开关12和吹气泄压控制开关21均为手动开关。
实施例2，除连接管5和三通接头6之间、连接管5和接头33之间、连接管5和四通接头51之间、进气管1和三通接头6之间、吹气管2和三通接头6之间均采用螺纹连接方式相连之外，其余结构同实施例1相同。
实施例3，除吸气控制开关12和吹气泄压控制开关21均为电性开关，吸气控制开关12、吹气泄压控制开关21和真空发生器11均与PLC控制装置相连之外，其余结构同实施例1相同，其中，PLC控制装置可控制气泵、吸气控制开关12、吹气泄压控制开关21和真空发生器11的开关情况。
实施例4，除吸气控制开关12和吹气泄压控制开关21均为电性开关，吸气控制开关12、吹气泄压控制开关21和真空发生器11均与PLC控制装置相连之外，其余结构同实施例2相同，其中，PLC控制装置可控制气泵、吸气控制开关12、吹气泄压控制开关21和真空发生器11的开关情况。
本发明工作过程：
该具有泄压功能的石英真空吸附装置在工作过程中，将石英产品表面与真空吸盘3相接触，当需要真空吸附住石英产品时，打开吸气控制开关12，关闭吹气泄压控制开关21，此时，气泵向进气管1供气，在真空发生器11作用下，进气管1、连接管5、连接头33、气孔32和环形凹槽31之间产生负压使得真空吸盘3可牢固吸附住石英产品表面，当需要拿取石英产品时，关闭吸气控制开关12，打开吹气泄压控制开关21，此时，气泵向吹气管2供气，吹气管2内的气流经连接管5、连接头33、气孔32和环形凹槽31后向上吹向石英产品表面使得石英产品被有效吹气便于拿取，吹气管2吹气时可有效泄去之前抽真空时 真空吸盘3和石英产品表面的真空吸附压力，当需要更换连接管5长度时，将连接管5从三通接头6、四通接头51和接头33处拆下即可，带表调压阀4可调节进气管1和吹气管2内的压力值使得管内工作气压可控制在0.05～0.1Bar，保证真空吸附住或吹起石英产品。
上述实施例是对本发明的说明，不是对本发明的限定，任何对本发明简单变换后的方案均属于本发明的保护范围。

Claims (10)

  1. 一种具有泄压功能的石英真空吸附装置，包括真空吸盘、进气管，真空吸盘上设有气孔，其特征在于：还包括吹气管、若干连接管、三通接头和四通接头，所述真空吸盘上设有环形凹槽，所述气孔位于环形凹槽内，所述真空吸盘外壁对应气孔位置处设有与气孔相连通的接头，所述进气管上设有真空发生器和吸气控制开关，所述进气管和吹气管均与气泵相连，吹气管上设有吹气泄压控制开关，所述四通接头的四个连接端口均可拆卸连接有连接管，且其中三根连接管分别与相应的接头可拆卸连接，所述三通接头分别与进气管、吹气管和其中一根所述的连接管可拆卸相连。
  2. 如权利要求1所述的具有泄压功能的石英真空吸附装置，其特征在于：所述连接管和三通接头之间、连接管和接头之间、连接管和四通接头之间、进气管和三通接头之间、吹气管和三通接头之间均采用插接方式相连，所述连接管、进气管和吹气管的连接端均呈阶梯状。
  3. 如权利要求1所述的具有泄压功能的石英真空吸附装置，其特征在于：所述接头、三通接头、四通接头的连接端口表面以及连接管、进气管和吹气管的连接端表面均设有环形凹口，环形凹口的纵截面呈半圆形，所述连接管和三通接头之间、连接管和接头之间、连接管和四通接头之间、进气管和三通接头之间、吹气管和三通接头之间连接后形成一个环形腔，环形腔内配合安装有环形密封圈。
  4. 如权利要求1或3所述的具有泄压功能的石英真空吸附装置，其特征在于：所述连接管和三通接头之间、连接管和接头之间、连接管和四通接头之间、进气管和三通接头之间、吹气管和三通接头之间均采用螺纹连接方式相连。
  5. 如权利要求1所述的具有泄压功能的石英真空吸附装置，其特征在于：所述进气管和吹气管上均安装有带表调压阀，所述进气管上的带表调压阀位于真空发生器和气泵之间，所述吹气管上的带表调压阀位于吹气泄压控制开关和 气泵之间。
  6. 如权利要求1所述的具有泄压功能的石英真空吸附装置，其特征在于：所述进气管和吹气管的工作气压均控制在0.05～0.1Bar。
  7. 如权利要求1所述的具有泄压功能的石英真空吸附装置，其特征在于：所述环形凹槽的纵截面呈等腰梯形形状，环形凹槽的顶部端口两侧设置倒圆角。
  8. 如权利要求1所述的具有泄压功能的石英真空吸附装置，其特征在于：所述气孔的数量为3且三个气孔两两之间互成120°夹角。
  9. 如权利要求1所述的具有泄压功能的石英真空吸附装置，其特征在于：所述吸气控制开关和吹气泄压控制开关均为手动开关或电性开关。
  10. 如权利要求9所述的具有泄压功能的石英真空吸附装置，其特征在于：所述吸气控制开关和吹气泄压控制开关均为电性开关，所述吸气控制开关、吹气泄压控制开关和真空发生器均与PLC控制装置相连。
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