WO2022148034A1

WO2022148034A1 - Ceramic transfer tube and fabrication method therefor

Info

Publication number: WO2022148034A1
Application number: PCT/CN2021/115971
Authority: WO
Inventors: 黄翌敏
Original assignee: 上海奕瑞光电子科技股份有限公司
Priority date: 2021-01-07
Filing date: 2021-09-01
Publication date: 2022-07-14
Also published as: CN112802732A; CN112802732B

Abstract

The present application relates to the technical field of trace detection, and in particular relates to a ceramic transfer tube and a fabrication method therefor. The ceramic transfer tube comprises: a transfer chamber; an ionization chamber, which is disposed at one end of the transfer chamber; a Faraday cup assembly, which is disposed at the other end of the transfer chamber; an ion gate assembly, which is disposed between the ionization chamber and the transfer chamber; and a suppressor grid, which is disposed between the transfer chamber and the Faraday cup assembly, wherein the transfer chamber comprises a plurality of annular insulating ceramic sheets and a plurality of annular metal electrode sheets, the annular insulating ceramic sheets and the annular metal electrode sheets are alternately arranged in sequence, and adjacent annular insulating ceramic sheets and annular metal electrode sheets are sealed and welded. Compared to the prior art, the annular insulating ceramic sheets and the annular metal electrode sheets in the transfer chamber are alternately arranged in sequence, and the adjacent annular insulating ceramic sheets and annular metal electrode sheets are sealed and welded, which is convenient for installation and allows for low fabrication costs, good sealing performance, a reliable and firm connection, high mechanical strength, and strong shock resistance, which thus improves system stability.

Description

A kind of ceramic transfer tube and its making method

technical field

The present application relates to the technical field of trace detection, and in particular, to a ceramic migration tube and a manufacturing method thereof.

Background technique

Ion mobility spectrometer has the advantages of sensitivity, rapidity, low power consumption and portability. The use of ion migration detection technology has greatly strengthened the monitoring of personnel and luggage at important borders such as border defense, customs, and civil aviation, and effectively combated the implementation of smuggling, drug trafficking and terrorist attacks.

The migration tube is the core component of the ion mobility spectrometer, and it is also the key factor determining the separation and detection of the mobility spectrometer. The migration tube of the existing commercial ion mobility spectrometer is mainly made of insulating materials such as polyimide/polytetrafluoro/peak and metal electrodes by crimping with nuts, springs and O-rings.

The migration tube of the existing commercial ion mobility spectrometer is difficult to assemble and seal, time-consuming and laborious, and has a high manufacturing cost, which is not conducive to the mass production of the ion mobility spectrometer and the improvement of system stability.

In addition, most drugs and explosives have relatively high boiling points (above 250°C), and to obtain better detection effect and faster cleaning speed during the detection process, the temperature of the migration tube needs to be set at a higher working temperature. However, whether it is polyimide, polytetrafluoroethylene or peak, it is difficult to work at a working temperature of more than 200 °C, and this type of migration tube will produce trace releases at high temperatures, and multiple thermal shocks will also affect the migration tube. The tightness will affect the normal use of the ion mobility spectrometer.

SUMMARY OF THE INVENTION

In view of this, the present application provides a ceramic transfer tube and a manufacturing method thereof, so as to solve the problems of difficult assembly and sealing of the existing transfer tube, time-consuming and labor-intensive, and high manufacturing cost.

According to a first aspect of the present application, a ceramic migration tube is provided. The ceramic transfer tube includes:

migration room;

an ionization chamber, the ionization chamber is arranged at one end of the migration chamber;

a Faraday cup assembly, the Faraday cup assembly is disposed at the other end of the migration chamber;

an ion gate assembly disposed between the ionization chamber and the migration chamber; and

a suppression grid disposed between the migration chamber and the Faraday cup assembly;

Wherein, the migration chamber includes a plurality of annular insulating ceramic sheets and a plurality of annular metal electrode sheets, the annular insulating ceramic sheets and the annular metal electrode sheets are alternately arranged in sequence, and the adjacent annular insulating ceramic sheets and the The annular metal electrode sheet is sealed and welded.

Optionally, the annular insulating ceramic sheet and the annular metal electrode sheet are fixed by soldering, and the expansion coefficient of the annular metal electrode sheet is equal to or close to the expansion coefficient of the annular insulating ceramic sheet.

Optionally, the annular insulating ceramic sheet is made of 95 porcelain or 99 porcelain, and the annular insulating ceramic sheet has a thickness of 1 mm-3 mm; and/or,

The annular metal electrode sheet adopts Kovar alloy, the thickness of the annular metal electrode sheet is 1mm-3mm, and/or,

The solder is silver-copper alloy.

Optionally, the surface of the annular insulating ceramic sheet is metallized and treated with hydrogen burning, and the surface of the annular metal electrode sheet is cleaned and nickel-plated and treated with hydrogen burning.

Optionally, the ionization chamber includes a source seat, a C-shaped shrapnel, and a sheet-shaped ionization source, the source seat is provided with a hollow hole therethrough, and the C-shaped shrapnel is fixed in the hollow hole with an interference fit, and the The flake ionization source is deposited on the inner wall of the C-shaped shrapnel by sputtering or evaporation;

A limiting boss is protrudingly arranged on the inner wall of the hollow hole for axially blocking the C-shaped shrapnel;

A clamping groove is provided on the radial side of the hollow hole for clamping, installing or dismounting the C-shaped elastic piece.

Optionally, the ion gate assembly includes a first ion gate grid, a ceramic spacer, and a second ion gate; the ceramic spacer is arranged between the first ion gate and the second ion gate is used to separate the first ion gate and the second ion gate by a set distance; the ceramic spacer is sealed and welded with the first ion gate and the second ion gate.

Optionally, the Faraday cup assembly includes a Faraday cup and a ceramic shielding cover sleeved on the Faraday cup; the surface of the Faraday cup is polished and plated with gold to reduce detector noise; the ceramic shielding cover has a metal outer ring After welding, it is equipotential with the suppression grid to shield the interference of external signals to the Faraday cup signal; the Faraday cup is sealed and welded with the ceramic shielding cover through a connecting rod.

According to a second aspect of the present application, a method for manufacturing a ceramic transfer tube is provided. The manufacturing method of the ceramic migration tube includes:

A ceramic migration tube preform to be welded is provided, the ceramic migration tube preform to be welded includes a plurality of annular insulating ceramic sheets and a plurality of annular metal electrode sheets, the annular insulating ceramic sheets and the annular metal electrode sheets are alternately arranged in sequence, Solder is arranged between the adjacent annular insulating ceramic sheet and the annular metal electrode sheet;

The ceramic migration tube preform to be welded is placed in a hydrogen brazing furnace, and the hydrogen brazing furnace is heated to a first preset temperature at a first preset heating rate under a hydrogen protective atmosphere, and the first preset temperature is maintained. setting a time period, wherein the first preset temperature is less than the melting point of the solder;

The hydrogen brazing furnace is heated to a second preset temperature at a second preset heating rate, and maintained for a second preset time period, wherein the second preset temperature is greater than or equal to the melting point of the solder, and the first preset temperature is greater than or equal to the melting point of the solder. 2. The preset heating rate is less than the first preset heating rate;

cooling the hydrogen brazing furnace to a third preset temperature at a third preset cooling rate;

The temperature of the hydrogen brazing furnace is lowered to a fourth preset temperature, and the hydrogen supply in the hydrogen brazing furnace is stopped.

Optionally, the surface of the annular insulating ceramic sheet in the preform of the ceramic migration tube to be welded is metallized and hydrogen-fired, and the surface of the annular metal electrode sheet in the preform of the ceramic migration tube to be welded is cleaned and plated. Nickel and hydrogen-burning treatment, the solder uses a silver-copper alloy.

Optionally, a mounting tool is also provided, and the mounting tool coaxially fixes the plurality of annular insulating ceramic sheets and the plurality of annular metal electrode sheets in the ceramic migration tube preform to be welded.

It is to be understood that the foregoing general description and the following detailed description are exemplary only and do not limit the application.

Description of drawings

In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the accompanying drawings required in the description of the specific embodiments or the prior art will be briefly introduced below. The drawings are some embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort.

FIG. 1 is a cross-sectional view of a ceramic migration tube provided by an embodiment of the present application.

FIG. 2 is a schematic structural diagram of the ionization chamber in FIG. 1 .

FIG. 3 is an exploded schematic view of the ion gate assembly in FIG. 1 .

FIG. 4 is a schematic structural diagram of the annular insulating ceramic sheet in FIG. 1 .

FIG. 5 is a schematic structural diagram of the annular metal electrode sheet in FIG. 1 .

FIG. 6 is a schematic structural diagram of the suppression grid and the Faraday cup assembly in FIG. 1 .

Reference number:

1 - ionization chamber;

11 - source seat;

111-Hollow hole;

112-Limiting boss;

113-Clamping groove;

12-C-shaped shrapnel;

13- Flake ionization source;

2- ion gate assembly;

21-The first ion gate;

22-ceramic spacer;

23 - the second ion gate;

3- Migration room;

31-ring insulating ceramic sheet;

32-ring metal electrode sheet;

4-Suppression grid;

5- Faraday cup assembly;

51 - Faraday Cup;

52-Ceramic shield.

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description serve to explain the principles of the application.

Detailed ways

The technical solutions of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. As used in the embodiments of this application and the appended claims, the singular forms "a," "the," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise.

It should be understood that the term "and/or" used in this document is only an association relationship to describe the associated objects, indicating that there may be three kinds of relationships, for example, A and/or B, which may indicate that A exists alone, and A and B exist at the same time. B, there are three cases of B alone. In addition, the character "/" in this document generally indicates that the related objects are an "or" relationship.

It should be noted that the directional words such as "up", "down", "left", and "right" described in the embodiments of the present application are described from the angles shown in the drawings, and should not be construed as implementing the present application. Example limitation. Also, in this context, it should also be understood that when an element is referred to as being "on" or "under" another element, it can not only be directly connected "on" or "under" the other element, but also Indirectly connected "on" or "under" another element through intervening elements.

As shown in FIG. 1 , an embodiment of the present application provides a ceramic migration tube. The ceramic migration tube includes a migration chamber 3 , an ionization chamber 1 , a Faraday cup assembly 5 , an ion gate assembly 2 and a suppression grid 4 .

The migration chamber 3 is used to provide a uniform weak drift electric field and an electrically neutral reverse flow field so that the mobility and different ion groups are separated in the region of the migration chamber 3 .

The ionization chamber 1 is arranged at one end of the migration chamber 3, and the ionization chamber 1 is used for providing ionization energy and ionization space for ionizing sample molecules or other molecules.

The ion gate assembly 2 is arranged between the ionization chamber 1 and the migration chamber 3, and the ion gate assembly 2 is used to provide an acceleration electric field/cut-off electric field of the ions and a migration clock signal.

The Faraday cup assembly 5 is disposed at the other end of the migration chamber 3, and the Faraday cup assembly 5 is used to detect ions and generate ion signals. The ion groups separated by the migration chamber 3 reach the Faraday cup assembly successively to generate ion signals.

The suppression grid 4 is arranged between the migration chamber 3 and the Faraday cup assembly 5, and the suppression grid 4 is used to shield the interference of the ion gate pulse voltage to the signal of the Faraday cup assembly.

As shown in FIGS. 1 , 4 and 5 , the migration chamber 3 includes a plurality of annular insulating ceramic sheets 31 and a plurality of annular metal electrode sheets 32 . The annular insulating ceramic sheets 31 and the annular metal electrode sheets 32 are arranged alternately in sequence. The adjacent annular insulating ceramic sheets 31 are sealed and welded to the annular metal electrode sheet 32 . Specifically, a plurality of annular insulating ceramic sheets 31 are arranged at intervals in sequence, and an annular metal electrode sheet 32 is disposed between every two annular insulating ceramic sheets 31 , and the annular metal electrode sheet 32 is adjacent to two annular insulating ceramic sheets 31 . Seal welded together.

The annular insulating ceramic sheets 31 and the annular metal electrode sheets 32 in the migration chamber 3 are arranged alternately in turn, and the adjacent annular insulating ceramic sheets 31 and the annular metal electrode sheet 32 are sealed and welded, which is convenient for installation and low in manufacturing cost; good sealing performance and reliable connection Firm, high mechanical strength, strong shock resistance, improve system stability. The annular insulating ceramic sheet 31 in the migration chamber 3 has a high thermal conductivity, which can shorten the cold start time of the machine.

The sealing and welding structure between the adjacent annular insulating ceramic sheets 31 and the annular metal electrode sheet 32 can be specifically set as required. Preferably, the annular insulating ceramic sheet 31 and the annular metal electrode sheet 32 can be fixed by soldering. The expansion coefficient of the annular metal electrode sheet 32 may be equal to or close to the expansion coefficient of the annular insulating ceramic sheet 31 .

Solder can be made of high melting point solder, which eliminates the use of non-heat-resistant materials and high-temperature trace volatile materials. Therefore, the migration tube can work at a temperature of 250 ° C and above, which can more effectively deal with the detection of high-boiling prohibited items such as drugs and explosives. , and can improve the cleaning speed of the system.

The materials and thicknesses of the annular insulating ceramic sheet 31 , the annular metal electrode sheet 32 and the solder should be selected in consideration of their weldability and welding stability.

More preferably, as shown in FIG. 4 , the annular insulating ceramic sheet 31 adopts 95 porcelain or 99 porcelain. Specifically, the annular insulating ceramic sheet 31 may have a thickness of 1mm-3mm.

As shown in FIG. 5 , the annular metal electrode sheet 32 can be made of Kovar alloy. The coefficient of expansion of the Kovar alloy is close to that of the annular insulating ceramic sheet 31 . The thickness of Kovar alloy can be set to 1mm-3mm. For example, the annular metal electrode sheet 32 can be made of 4J33 Kovar alloy.

The solder can be silver-copper alloy. The high melting point of copper-silver alloy allows the migration tube to work at a higher temperature, which can more effectively deal with the detection of high-boiling prohibited items such as drugs and explosives, and can improve the cleaning speed of the system. Specifically, a 72:8 silver-copper alloy was used as the solder, the ratio of silver to copper was 72:8, the solidus was 779°C, and the melting point was 810°C.

The specific structure of the ionization chamber can be set as required, as long as it can provide ionization energy and ionization space for ionizing sample molecules or other molecules. Preferably, as shown in FIG. 2 , the ionization chamber 13 includes an ionization source and a source base 11 . The source seat 11 is used for installing and fixing the ionization source 13 , and its specific structure can be set according to the specific structure of the ionization source 13 . The ionization source 13 can use radioactive sources such as 63Ni, 3H, or non-radioactive sources such as UV, DBD (Dielectric Barrier Discharge) and corona discharge ionization sources.

Specifically, as shown in FIG. 2 , the ionization chamber 1 may include a source seat 11 , a C-shaped elastic sheet 12 and a sheet-shaped ionization source 13 . The source seat 11 is an annular structure, and a hollow hole 111 is formed therethrough. The C-shaped elastic piece 12 has elasticity, and can be elastically deformed when it is stressed. The C-shaped elastic piece 12 is fixed in the hollow hole 111 by interference fit. The C-shaped elastic piece 12 can be elastically deformed toward the inner side of the radial direction thereof, and abuts against the inner wall of the hollow hole 111 of the source seat 11 . The sheet-shaped ionization source 13 can be deposited on the inner wall of the C-shaped elastic sheet 12 by sputtering, vapor deposition or other methods.

A limiting boss 112 can be protruded from the inner wall of the hollow hole 111 for axially topping off the C-shaped elastic piece 12 . When the C-shaped shrapnel 12 is placed in the hollow hole 111 of the source base 11, the limiting boss 112 can block the C-shaped shrapnel 12 to prevent the C-shaped shrapnel 12 from continuing to be inserted and prompt the C-shaped shrapnel 12 and the ionization source 13 to be installed In-place restrictions and prompts for radioactive sources to be installed in place.

A clamping groove 113 may be provided on the radial side of the hollow hole 111 , and the clamping groove 113 communicates with the hollow hole 111 and can be used for clamping, installing or removing the C-shaped elastic piece 12 .

More specifically, the sheet-shaped ionization source 13 may use a 63Ni source. The C-shaped elastic pieces 12 are correspondingly arranged as C-shaped nickel-based elastic pieces. The sheet-shaped ionization source 13 of the 63Ni source can be evaporated on the inner wall of the C-shaped nickel-based elastic sheet.

The specific structure of the ion gate assembly can be set as required, as long as it can provide the acceleration electric field/cut-off electric field and the migration clock signal of the ions. Preferably, as shown in FIG. 2 , the ion gate assembly 2 may include a first ion gate grid 21 , a ceramic spacer 22 and a second ion gate grid 23 . The ceramic spacer 22 is disposed between the first ion gate grid 21 and the second ion gate grid 23 , and is used to space the first ion gate grid 21 and the second ion gate grid 23 by a predetermined distance. The ceramic spacer 22 is sealed and welded with the first ion gate grid 21 and the second ion gate grid 23, which can prevent the molten solder from spattering/overflowing and reducing the insulation between the ion gates. More preferably, the ceramic spacer 22 is not more than 0.7 mm for isolating the first ion gate 21 and the second ion gate 23 . Correspondingly, the distance between the first ion gate grid 21 and the second ion gate grid 23 is not more than 0.7 mm.

The specific structure of the Faraday cup assembly can be set as required, as long as it can detect ions and generate ion signals. Preferably, as shown in FIG. 6 , the Faraday cup assembly 5 may include a Faraday cup 51 and a ceramic shield 52 . The Faraday cup 51 is sealed and welded to the ceramic shield 52 through a connecting rod. For example, as shown in FIG. 1 , the ceramic shield 52 can be fitted over the connecting rod of the Faraday cup 51 . The Faraday cup 51 is polished and gold plated to reduce detector noise. The outer ring of the ceramic shielding cover 52 is metallized, and after welding, it is equipotential with the suppression grid 4, which is used to shield the interference of the external signal to the signal of the Faraday cup 51.

The Faraday cup 51 is hermetically welded to the ceramic shield 52 . For example, the Faraday cup 51 can be sealed with the shielding cover by nesting the metallized annular ceramic shielding cover 52 on the inner and outer rings on the connecting rod connecting the Faraday cup 51, and sealing with double-layer casing.

The specific structure of the suppression gate can be set as required, as long as it can shield the interference of the pulse voltage of the ion gate to the signal of the Faraday cup 51 . Preferably, the suppression grid 4 can be configured as a sheet-like grid structure, and the sheet-like grid structure can be specifically configured as a hexagon, a circle, or the like.

According to the same inventive concept, the present application also provides a method for manufacturing a ceramic transfer tube. As shown in Figure 1, the manufacturing method of the ceramic migration tube includes:

First, a preform of a ceramic migration tube to be welded is provided. The ceramic migration tube preform to be welded includes a plurality of annular insulating ceramic sheets 31 and a plurality of annular metal electrode sheets 32 . Solder is provided between the electrode pads 32 .

Then, the ceramic migration tube preform to be welded is placed in a hydrogen brazing furnace, and the hydrogen brazing furnace is heated to a first preset temperature at a first preset heating rate under a hydrogen protective atmosphere, and maintained for a first preset time. section to ensure that the weldment temperature is uniform. The first preset temperature is less than the melting point of the solder.

After that, the hydrogen brazing furnace is heated to a second preset temperature at a second preset heating rate, and maintained for a second preset time period to ensure that the solder of each welding seam is fully melted and the welding interface is well infiltrated. Wherein the second preset temperature is greater than or equal to the melting point of the solder, and the second preset heating rate is less than the first preset heating rate;

After that, the hydrogen brazing furnace is cooled to a third preset temperature at a third preset cooling rate to slowly release the sealing stress of the welding seam between the annular insulating ceramic sheet 31 and the annular metal electrode sheet 32 to prevent the ceramic from bursting.

After that, the temperature of the hydrogen brazing furnace is lowered to the fourth preset temperature, and the hydrogen supply in the hydrogen brazing furnace is stopped.

In this embodiment, the annular insulating ceramic sheets 31 and the annular metal electrode sheets 32 in the migration chamber 3 are alternately arranged in sequence, and the adjacent annular insulating ceramic sheets 31 and the annular metal electrode sheet 32 are sealed and welded by solder, which is integrally formed and easy to install. Low manufacturing cost; good sealing performance, reliable and firm connection, high mechanical strength, strong shock resistance, and improved system stability. The annular insulating ceramic sheet 31 in the migration chamber 3 has a high thermal conductivity, which can shorten the cold start time of the machine.

In order to make the annular insulating ceramic sheet 31 and the annular metal electrode sheet 32 better sealed and welded together, preferably, before welding, the surface of the annular insulating ceramic sheet 31 in the preform of the ceramic migration tube to be welded is metallized and treated with hydrogen. The surface of the annular metal electrode sheet 32 in the preform of the ceramic migration tube to be welded is cleaned and nickel-plated and treated with hydrogen. In this way, the annular insulating ceramic sheet 31 and the annular metal electrode sheet 32 are easily welded together by solder.

In order to achieve welding stability, the method for manufacturing a ceramic migration tube can also be provided with a mounting tool. The mounting tool coaxially fixes the plurality of annular insulating ceramic sheets 31 and the plurality of annular metal electrode sheets 32 in the preform of the ceramic migration tube to be welded. Specifically, a suitable width and thickness of solder is placed between the annular insulating ceramic sheet 31 and the annular metal electrode sheet 32, and a mounting tool is used to position it to ensure that the annular insulating ceramic sheet 31 and the annular metal electrode sheet 32 are coaxial during the mounting process. Fasten.

Preferably, a silver-copper alloy can be used as the solder. For example, a 72:8 silver-copper alloy can be used for the solder, the ratio of silver and copper is 72:8, the solidus is 779°C, and the melting point is 810°C.

The first preset heating rate may be equal to or less than 20°C/min. The first preset temperature may be set to 780°C. The first preset time period may be set to 20min.

The second preset heating rate may be set to 1-4°C/min. The second preset temperature may be set as the melting point temperature of 810°C. The second preset time period may be set to 1 min.

The third preset cooling rate may be equal to or less than 30°C/min. The third preset temperature is 500°C.

The hydrogen brazing furnace can naturally cool down to the fourth preset temperature. The fourth preset temperature may be equal to or less than 200°C.

Preferably, after the hydrogen brazing furnace is cooled to the fourth preset temperature and the hydrogen supply in the hydrogen brazing furnace is stopped, pressure resistance and air tightness testing of the obtained ceramic migration tube can be performed. If the leakage rate of the tube body is not higher than 1.5×10 ^-8 Pa·m3/s, and the withstand voltage value between electrodes is better than 5×10 ⁵ V/cm, the leakage and withstand voltage requirements of the mobility spectrometer equipment are met.

The above are only preferred embodiments of the present application, and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the protection scope of this application.

Claims

A ceramic migration tube, characterized in that, comprising:

Migration room (3);

an ionization chamber (1), the ionization chamber (1) is arranged at one end of the migration chamber (3);

a Faraday cup assembly (5), the Faraday cup assembly (5) is arranged at the other end of the migration chamber (3);

an ion gate assembly (2), the ion gate assembly (2) being arranged between the ionization chamber (1) and the migration chamber (3); and

a suppression grid (4), the suppression grid (4) is arranged between the migration chamber (3) and the Faraday cup assembly (5);

Wherein, the migration chamber (3) includes a plurality of annular insulating ceramic sheets (31) and a plurality of annular metal electrode sheets (32), and the annular insulating ceramic sheets (31) and the annular metal electrode sheets (32) are in sequence Alternately arranged, the adjacent annular insulating ceramic sheets (31) are sealed and welded to the annular metal electrode sheet (32).
The ceramic migration tube according to claim 1, characterized in that, the annular insulating ceramic sheet (31) and the annular metal electrode sheet (32) are fixed by soldering, and the expansion of the annular metal electrode sheet (32) The coefficient is equal to or close to the expansion coefficient of the annular insulating ceramic sheet (31).
The ceramic migration tube according to claim 2, characterized in that, the annular insulating ceramic sheet (31) adopts 95 porcelain or 99 porcelain, and the annular insulating ceramic sheet (31) has a thickness of 1 mm-3 mm; and/or,

The annular metal electrode sheet (32) adopts Kovar alloy, the thickness of the annular metal electrode sheet (32) is 1 mm-3 mm, and/or,

The solder is silver-copper alloy.
The ceramic transfer tube according to claim 2, characterized in that the surface of the annular insulating ceramic sheet (31) is metallized and subjected to hydrogen-burning treatment, and the surface of the annular metal electrode sheet (32) is cleaned and nickel-plated and subjected to hydrogen-burning treatment .
The ceramic transfer tube according to claim 1, characterized in that, the ionization chamber (1) comprises a source seat (11), a C-shaped elastic piece (12) and a sheet-shaped ionization source (13), the source seat (11) ) is provided with a hollow hole (111) through it, the C-shaped elastic sheet (12) is fixed in the hollow hole (111) with interference fit, and the sheet-shaped ionization source (13) is deposited by sputtering or evaporation on the inner wall of the C-shaped shrapnel (12);

A limiting boss (112) is protruded on the inner wall of the hollow hole (111) for axially blocking the C-shaped elastic piece (12);

A clamping groove (113) is provided on the radial side of the hollow hole (111) for clamping, installing or dismounting the C-shaped elastic piece (12).
The ceramic migration tube according to claim 1, wherein the ion gate assembly (2) comprises a first ion gate grid (21), a ceramic spacer (22) and a second ion gate grid (23); the The ceramic spacer (22) is arranged between the first ion gate grid (21) and the second ion gate grid (23), and is used for connecting the first ion gate grid (21) and the second ion gate grid (21) with the second ion gate grid (23). The two ion gate grids (23) are separated by a set distance; the ceramic spacer (22) is sealed and welded with the first ion gate grid (21) and the second ion gate grid (23).
The ceramic migration tube according to claim 1, wherein the Faraday cup assembly (5) comprises a Faraday cup (51) and a ceramic shield (52) sleeved on the Faraday cup (51); the The surface of the Faraday cup (51) is polished and plated with gold to reduce the noise of the detector; the outer ring of the ceramic shield (52) is metallized, and after welding, it is equipotential with the suppression grid (4) to shield the external signal against the The interference of the Faraday cup signal; the Faraday cup (51) is sealed and welded with the ceramic shielding cover (52) through a connecting rod.
A method for manufacturing a ceramic transfer tube, comprising:

A ceramic migration tube preform to be welded is provided, the ceramic migration tube preform to be welded includes a plurality of annular insulating ceramic sheets (31) and a plurality of annular metal electrode sheets (32), the annular insulating ceramic sheet (31) and the The annular metal electrode sheets (32) are alternately arranged in sequence, and solder is provided between the adjacent annular insulating ceramic sheets (31) and the annular metal electrode sheet (32);

The ceramic migration tube preform to be welded is placed in a hydrogen brazing furnace, and the hydrogen brazing furnace is heated to a first preset temperature at a first preset heating rate under a hydrogen protective atmosphere, and the first preset temperature is maintained. setting a time period, wherein the first preset temperature is less than the melting point of the solder;

The hydrogen brazing furnace is heated to a second preset temperature at a second preset heating rate, and maintained for a second preset time period, wherein the second preset temperature is greater than or equal to the melting point of the solder, and the first preset temperature is greater than or equal to the melting point of the solder. 2. The preset heating rate is less than the first preset heating rate;

cooling the hydrogen brazing furnace to a third preset temperature at a third preset cooling rate;

The temperature of the hydrogen brazing furnace is lowered to a fourth preset temperature, and the hydrogen supply in the hydrogen brazing furnace is stopped.
The method for manufacturing a ceramic migration tube according to claim 8, characterized in that, the surface of the annular insulating ceramic sheet (31) in the preform of the ceramic migration tube to be welded is metallized and hydrogen-fired, and the ceramic to be welded The surface of the annular metal electrode sheet (32) in the migration tube preform is cleaned and nickel-plated and treated with hydrogen, and the solder is silver-copper alloy.
The method for manufacturing a ceramic migration tube according to claim 8, characterized in that a mounting tool is further provided, and the mounting tool is used to mount the plurality of annular insulating ceramic sheets ( 31) and the plurality of annular metal electrode sheets (32) are coaxially fixed.