WO2022144519A1

WO2022144519A1 - Solar control glazing comprising a thin film of nickel-chromium alloy and a thin film of sub-stoichiometric silicon nitride in nitrogen

Info

Publication number: WO2022144519A1
Application number: PCT/FR2021/052430
Authority: WO
Inventors: Vinicius DA SILVA BALANI; Jean LORENZZI
Original assignee: Saint-Gobain Glass France
Priority date: 2020-12-31
Filing date: 2021-12-22
Publication date: 2022-07-07
Also published as: MX2023007895A; FR3118441B1; CO2023008679A2; FR3118441A1

Abstract

The present invention relates to a glazing article comprising at least one clear glass substrate on which a stack of films is deposited, said stack of films comprising the succession of the following films from the surface of said clear glass substrate: a first film comprising silicon nitride in which the atomic ratio N/Si is greater than 1.25, the physical thickness of said film being between 5 and 100 nm, a film comprising nickel-chromium having the formula NiCr, optionally nitrided, the physical thickness of said NiCr film being between 2 and 12 nm, a second film comprising silicon nitride in which the atomic ratio N/Si is less than 1.25, the physical thickness of said film being between 2 and 15 nm, and a third film comprising silicon nitride in which the atomic ratio N/Si is greater than 1.25, the physical thickness of said film being between 5 and 100 nm. The present invention also relates to a glazing panel for the construction industry, in particular a solar control glazing panel, comprising a glazing article as described above.

Description

DESCRIPTION

TITLE OF THE INVENTION: Sunscreen glazing comprising a thin layer of nichrome and a thin layer of silicon nitride substoichiometric in nitrogen

The present invention relates to glass articles for solar control glazing and said glazing, provided with coatings or stacks of layers, at least one of which is "functional", that is to say that it acts on the radiation solar and/or thermal essentially by reflection and/or absorption of near infrared (solar) or far (thermal) radiation.

The present invention relates more particularly to a glass article, preferably so-called “sunscreen” glazing, comprising at least one clear glass substrate on which is deposited a stack of specific layers with specific thicknesses. One of the layers of said stack is a thin layer comprising nichrome, from the glass substrate, above which is deposited at least one thin layer comprising silicon nitride sub-stoichiometric in nitrogen.

Thus, the glass article according to the invention is used as building or automobile glazing, preferably as building glazing, and its main function is to protect buildings from solar radiation in order to avoid overheating; such glazing being qualified in the trade of solar protection.

The term "functional" or even "active" layer(s), within the meaning of the present application, means the layer(s) of the stack which confers on the stack the essential to its thermal properties. Most often, the stacks of thin layers equipping the glazing give it improved solar control properties essentially by the intrinsic properties of this or these active layer(s). For so-called sunscreen glazing, said layer acts on the flow of solar radiation passing through said glazing, as opposed to the other layers, generally made of dielectric material and essentially having the function of chemical or mechanical protection of the said layer(s). s) functional.

Such glazing provided with stacks of thin layers act on the incident solar radiation either essentially by absorption of the incident radiation by the functional layer, or essentially by reflection by this same layer. By "sunscreen" is meant within the meaning of the present invention the ability of the glazing or glass article to limit the energy flow, in particular the solar infrared radiation (1RS) passing through it from the outside to the inside of the dwelling or passenger compartment. To measure the energy insulation properties of glazing, the solar factor denoted “FS” or “g” is used in the field.

In known manner, the solar factor is equal to the ratio of the energy passing through the glazing (that is to say entering the room) and the incident solar energy. More specifically, it corresponds to the sum of the flux transmitted directly through the glazing and the flux absorbed by the glazing (including the stacks of layers possibly present on one of its surfaces) then re-emitted inwards (towards the room) through the glazing. Thus, low solar factor values indicate good solar protection against undesirable heating due to solar radiation of the room equipped with said glazing. In other words, a low value of the solar factor indicates that a glass article coated with a stack of layers is capable of keeping a room (a room) relatively cool during the summer months in hot ambient conditions. This is why a low solar factor is desired, particularly in countries with a hot climate.

Good solar control properties are conditioned by a low resistivity of the functional layer, which explains the frequent use of functional layers made of metal such as an alloy of nickel and chromium or of niobium. However, such a property also results in greater light absorption, which tends to substantially reduce the light transmission within the glazing.

A good compromise between its light transmission in the visible range (called "T _L ") and its thermal insulation properties is therefore usually measured by the selectivity "S" corresponding to the ratio between the light transmission and the solar factor defined above ( S = T _L /g).

In general, all the light characteristics presented in this description, in particular the light transmission "T _L " and the light reflection "RL", as well as the factor g, are obtained according to the principles and methods described in the standard NF EN 410 (2011) relating to the determination of the light and energy characteristics in the visible range of glazing used in glass for construction. Antisun glazing is known comprising as functional layer: a layer of silicon oxycarbide deposited on a clear glass substrate. Such a layer allows the glazing to strongly reflect the visible light on the exterior side (side of the glass substrate not coated with layer(s) and which is directed towards the exterior environment). However, such glazing also has a strong reflection of the visible light on the interior side "RL _int " (coated side, towards the interior of the dwelling or the passenger compartment), which is responsible for the mirror appearance of such glazing. These glazings have the additional drawback of exhibiting low selectivity.

In addition, this layer of silicon oxycarbide is conventionally deposited on the clear glass substrate by CVD (chemical vapor deposition) methods which pose various problems, among which the following may be mentioned in particular:

- an inhomogeneity of the coating, both in composition and in thickness,

- increased risks, due to the flammability of the gases used during deposition and their toxicity, and

- Since the deposition of the active layer is carried out on the very production line of the glass substrate, a difficulty is posed by the flexibility of such a process and the significant loss of glass during each start-up and/or adjustment of the CVD deposition.

The main drawback of such glazings based on silicon oxycarbide is moreover that it is not possible to obtain color in external reflection on said clear glass substrate, ie d. on the side of the glazing not covered with layers.

There are other coatings based on reflective silicon oxycarbide which are similar to the aforementioned coatings, but which are deposited on tinted glass substrates, in order to modify the aesthetics of such glazing by giving them a color in external reflection. . However, the use of tinted glass has a direct impact on light transmission because it is greatly reduced, also inducing a drop in selectivity. In addition, the silicon oxycarbide layer is deposited in these cases on the tinted glass substrate by CVD methods, which poses various problems such as those stated above.

Metal layers with an antisolar function have also been reported in the field. These layers are in particular based on nickel denoted Ni or of nichrome denoted NiCr and are positioned between two layers of stoichiometric silicon nitride of formula Si ₃ N ₄ . Single glazing (also called monolithic) equipped with these layers generally has good resistance to attacks mechanical and chemical properties compared to single glazing fitted with a stack of silver-based layers.

The tests carried out by the applicant company have however shown that a layer comprising nichrome placed between two layers of silicon nitride gave the glazing a very pronounced red coloring in internal reflection (that is to say on the side of the face of the glazing on which the stack of layers is deposited), and in particular values of the parameter b*int (in internal reflection) greater than 30, or even greater than 40, in the international La*b* system. Such coloring is considered more and more unacceptable nowadays, from an aesthetic point of view.

The Applicant has therefore sought to provide a durable glass article, in particular a glazing, having solar protection properties and good selectivity, the color of which in external reflection is adjustable, by using a clear glass substrate. Advantageously, the applicant has optionally sought to provide a glass article having a good compromise between external reflection and internal reflection (in the visible range) and whose color in internal reflection is acceptable from an aesthetic point of view. Even more preferentially, the applicant has sought to provide a glass article having improved durability and more particularly better resistance to corrosion, especially after tempering.

Thus, the object of the present invention is first of all to propose a glass article provided with a stack of layers having a good compromise between its light transmission and its thermal insulation properties, which results in good selectivity. .

Another objective of the present invention is to be able to provide the glass article on its exterior face with an adjustable exterior color (that is to say on the face facing the outside of the building that it equips), c. i.e. values of the parameters a* _ext and b*ext adjustable in the international La*b* system. In other words, one of the aims of the present invention is to obtain a specific color in external reflection (glass side), in particular a blue, gray or bronze coloration. According to the invention and advantageously in particular economically, it becomes possible to modify at will said colors in external reflection of a glass article by simply varying the thicknesses of the layers constituting a stack as described in the remainder of this request, in particular in the same sputtering device. According to the invention, in order to further maximize the solar protection effect, essential in very sunny countries, a glass article is sought having good reflection on the side intended to be exposed towards the outside of the building (called external reflection in the present description), that is to say on the face of the glass article not covered with the stack of thin layers acting on solar radiation.

In addition to the antisun properties previously explained, in the field of construction, in night vision, that is to say when the exterior luminosity is lower than the interior luminosity, the glazing may have the disadvantage of presenting a mirror effect for a observer placed inside the building, if the internal reflection of the glazing is too important and much higher than the external reflection. Such a mirror effect is undesirable because it prevents the observer placed inside the building from seeing the outside of the building. Thus, another advantage of the present invention is to be able to provide a glass article limiting the mirror effect indoors, in particular thanks to a limited reflection on the interior side (face of the glazing on which the stack is deposited) and in particular preferably lower or at least close to that of the exterior side (face of the glazing not covered). It is thus, according to the invention, to provide a glass article having a good compromise between the external reflection and the internal reflection.

To solve the aforementioned technical problems, it was surprisingly observed by the inventors that a stack of layers deposited on a clear glass substrate and specifically comprising the following succession of layers from the surface of said clear glass substrate made it possible to impart to the glass article the desired optical and thermal properties, said layers being the following:

- a first layer comprising silicon nitride in which the N/Si atomic ratio is greater than 1.25 and having a physical thickness of between 5 and 100 nm,

- a layer comprising nichrome of formula NiCr, having a physical thickness of between 2 and 12 nm,

- a second layer comprising silicon nitride in which the N/Si atomic ratio is less than 1.25 and having a physical thickness of between 2 and 15 nm, and

- a third layer comprising silicon nitride in which the ratio atomic N/Si is greater than 1.25 and has a physical thickness between 5 and 100 nm.

Thus, the problems described above could be solved, according to the invention, thanks to the development of glass articles having all or part of the following characteristics:

- a solar factor "g" less than 0.5, preferably less than 0.46,

- a light transmission "T _L " greater than or equal to 25%, preferably greater than 30%, and more preferably greater than 35%,

- a K/g selectivity greater than 0.7, preferably greater than 0.8,

- an exterior light reflection "RLext" in the visible (glass side, exterior face) greater than or equal to 10%, preferably greater than or equal to 15%,

- preferably an internal light reflection "RLint" in the visible (stack side, on the inside face) less than or equal to 30%, preferably less than 20%,

- values of a* _ext and b* _ext in external reflection adjustable as previously described,

- values of b*int in internal reflection lower than 40 and preferably lower than 30, and

- more preferably an exterior light reflection “RLext” greater than the interior light reflection “RLint”.

According to the invention, by external light reflection "RLext" in the visible range, is meant the light reflected towards the external environment and by internal light reflection "RLint" in the visible range, the light reflected towards the interior of a building or a vehicle. Thus, in the present application, a reflection on the exterior side (or called "exterior reflection") corresponds to the reflection on the face of the uncovered glass article and a reflection on the interior side (or called "interior reflection") corresponds to the reflection on the face of the glass article on which the stack of layers is deposited. The terms "external face" (or "external") and "inner face" or ("internal") therefore refer to the position of the glass article or glazing when it equips the building or the vehicle that it equips, within the meaning of the present invention. And, by “stack side” or “layer side”, is meant the face of the glass article on which the stack is deposited. By “glass side”, is meant the face of the glass article opposite to that on which the stack is deposited, in principle not covered. The object of the present invention is to propose a glass article making it possible to solve the technical problems described above.

More specifically, the present invention relates to a glass article comprising at least one clear glass substrate on which is deposited a stack of layers, said stack of layers comprising the succession of the following layers from the surface of said clear glass substrate:

- a first layer comprising silicon nitride, said layer possibly comprising at least one other element chosen from Al, Zr and B, in which the atomic ratio N/Si is greater than 1.25, the physical thickness of said layer being between 5 and 100 nm,

- a layer comprising nichrome of formula NiCr, optionally nitrided, the physical thickness of said NiCr layer being between 2 and 12 nm,

- a second layer comprising silicon nitride, said layer optionally comprising at least one other element chosen from Al, Zr and B, in which the atomic ratio N/Si is less than 1.25, the physical thickness of said layer being between 2 and 15 nm, and

- a third layer comprising silicon nitride, said layer optionally comprising at least one other element chosen from Al, Zr and B, in which the atomic ratio N/Si is greater than 1.25, the physical thickness of said layer being between 5 and 100 nm.

Advantageously, each of said layers is in direct contact with the previous one.

According to the invention, said first and third layers in which the N/Si ratio is greater than 1.25 are layers based on silicon nitride which are substantially stoichiometric or over-stoichiometric in nitrogen. Moreover, the N/Si ratio of said first and third layers comprising silicon nitride of the glass article according to the invention may be greater than or equal to 1.33, and preferably is between 1.33 and 1, 60, terminals included. Preferably, said first and third layers are substantially stoichiometric in silicon nitride. By “stoichiometric”, it is meant that the N/Si ratio is equal to 1.33 for these silicon-based nitride layers, corresponding to the Si ₃ N ₄ compound. By “substantially stoichiometric”, it is meant for example that the value measured for this Si ₃ N ₄ compound differs by less than 5% from this theoretical value. Indeed, it should be noted that the layers comprising silicon nitride according to the invention are obtained by a magnetron-assisted sputtering process from a metallic silicon target which may comprise a minor quantity of another element such as aluminium, most often around 8 atomic %, in a reactive atmosphere containing nitrogen. In such a case, the N/Si ratio can vary significantly from the theoretical value 1.33 (= 4/3) (corresponding to the defined compound Si ₃ N ₄ ) taking into account the stoichiometries of the defined compounds AIN and Si ₃ N ₄ . By way of example, for a silicon nitride layer comprising a little aluminum, obtained with the target described above (8% aluminum), the N/Si ratio of the stoichiometric layer theoretically corresponds to a formulation: 92 % (SiNi .33) / 8% (AIN) i.e. an N/Si ratio of 1.41 (based on a theoretical formula 0.92 SiNi.33 0.08 AIN, i.e. a ratio: N/Si = [(0.92x1, 33+0, 08x1)/(0, 92)] = 1,41).

Said second layer in which the N/Si ratio is less than 1.25 is itself a layer based on silicon nitride substoichiometric in nitrogen. The N/Si ratio of said second layer comprising silicon nitride of the glass article according to the invention may be less than or equal to 1.00, preferably less than or equal to 0.80 and more preferably between 0.20 and 1.00, terminals included.

According to the invention, said second layer comprising silicon nitride substoichiometric in nitrogen is deposited specifically above the layer comprising nichrome, in the stack of layers. Preferably, the layer comprising silicon nitride substoichiometric in nitrogen is in direct contact with said layer comprising nichrome.

The addition of said second layer comprising silicon nitride substoichiometric in nitrogen placed above the layer comprising nichrome allows the glass article to be more durable, in particular to be more resistant to mechanical and chemical attack. , especially more resistant to corrosion. The inventors have also found that the use of this second layer comprising silicon nitride substoichiometric in nitrogen deposited above the layer comprising nichrome also made it possible to greatly reduce the unpleasant red coloration of the glass article in interior reflection .

The first, second and third layers comprising silicon nitride mainly comprise silicon and nitrogen as main constituents. In particular silicon and nitrogen together represent more than 50%, more than 60% or even more than 70% or even more than 80% of the atoms present in the layer, or even more than 90% of the atoms present in the layer. Preferably, said layers comprising silicon nitride consist essentially of silicon and nitrogen and optionally of at least one element chosen from among aluminum, boron or zirconium, preferably aluminum, apart from the inevitable impurities. Said layers comprising silicon nitride are in principle free of oxygen except for inevitable impurities, for example they comprise less than 5% molar of elemental oxygen, in particular less than 1% molar of elemental oxygen.

Preferably, the stack of layers according to the invention does not comprise layers based on Ag, Au, Pt, Cu, or stainless steel.

The contents of the various elements present in the layers described previously and in particular the N/Si ratio, can be measured according to any known technique. By way of example, mention may be made of energy-dispersive X-ray spectroscopy (or Energy-dispersive X-ray Spectroscopy: EDS or EDXS, in English) or the technique of photoelectron spectrometry by X-rays (or X- Ray Photoelectron Spectrometry: XPS, in English).

The nichrome of the layer, according to the invention, is preferably an alloy of nickel and chromium, comprising between 70% and 90% nickel and between 30% and 10% chromium. The layer comprising nichrome may also comprise nitrogen, preferably in an amount less than or equal to 20 atomic % of the sum of the nickel and chromium atoms, more preferably still less than 10 atomic % and more preferably less than 5 atomic % of the sum of nickel and chromium atoms. However, it has been shown that the additional presence of nitrogen in the layer comprising nichrome could affect the resistance of the glass article, in particular its chemical resistance, in particular if the glazing had to be subjected to a heat treatment such as quench. Thus, preferably, the layer comprising nichrome according to the invention does not in principle comprise nitrogen or else in the form of unavoidable impurities.

In addition, it was surprisingly observed by the inventors that by varying the thickness of the layers of the stack according to the invention, as described above, it was possible to adjust the color of the glass article on the glass side (external side). In other words, it was possible to provide glass articles of different colors in external reflection, while maintaining the desired optical and thermal properties (stated previously), in particular a good light transmission and good selectivity, and this by using a clear glass substrate.

Thus in a preferred embodiment:

- the first layer comprising silicon nitride has a physical thickness of between 70 and 100 nm, preferably between 75 and 90 nm,

- the layer comprising nichrome of formula NiCr has a physical thickness comprised between 4 and 12 nm, preferably comprised between 6.5 and 9.5 nm,

- the second layer comprising silicon nitride has a physical thickness comprised between 6 and 14 nm, preferably comprised between 8 and 12 nm, and

- the third layer comprising silicon nitride has a physical thickness comprised between 10 and 50 nm, preferably comprised between 15 and 35 nm.

The combination of these three layer thicknesses makes it possible to obtain a blue color in external reflection of the glass article (glass side) according to the invention, ie. a value of b* in external reflection lower than -15.

In another preferred embodiment:

- the first layer comprising silicon nitride has a physical thickness of between 5 and 25 nm, preferably between 10 and 20 nm,

- the layer comprising nichrome of formula NiCr has a physical thickness comprised between 4 and 10 nm, preferably comprised between 5.5 and 8 nm,

- the second layer comprising silicon nitride has a physical thickness comprised between 2 and 10 nm, preferably comprised between 2 and 6 nm, and

- the third layer comprising silicon nitride has a physical thickness comprised between 10 and 40 nm, preferably comprised between 15 and 30 nm.

The combination of these three layer thicknesses makes it possible to obtain a gray color in external reflection of the glass article according to the invention, ie. a value of a* in external reflection comprised between -4 and 4 and a value of b* in external reflection comprised between -4 and 4, preferably greater than 0.

Yet in another particular embodiment:

- the first layer comprising silicon nitride has a physical thickness comprised between 15 and 45 nm, preferably comprised between 25 and 35 nm,

- the layer comprising nichrome of formula NiCr has a physical thickness of between 5 and 10 nm, preferably between 6.5 and 8.5 nm,

- the second layer comprising silicon nitride has a physical thickness comprised between 6 and 11 nm, preferably comprised between 8 and 10 nm, and - the third layer comprising silicon nitride has a physical thickness comprised between 70 and 100 nm, preferably comprised between 75 and 85 nm.

The combination of these three layer thicknesses makes it possible to obtain a bronze color in external reflection of the glass article according to the invention, ie. a value of a* in external reflection greater than 5, preferably between 5 and 10 and a value of b* in external reflection greater than 10, preferably between 10 and 25.

Thus, advantageously, the layer comprising nichrome and the second layer comprising silicon nitride, of the glass article according to the invention, have a cumulative thickness of between 6 and 25 nm, preferably between 10 and 20 nm.

According to particular and preferred embodiments of the present invention, which can be combined with each other if necessary:

- the first layer comprising silicon nitride is deposited directly on the glass substrate and is in contact with it,

- at least one protective layer comprising a metal oxide is present above said succession of layers, said protective layer preferably consisting essentially of a material chosen from titanium oxide, zirconium oxide or oxide titanium and zirconium. Thus even more advantageously, the stack is formed by the succession of said first layer comprising silicon nitride, of the layer comprising nichrome, of said second and third layers comprising silicon nitride, and optionally of said outer protective layer .

The layers or coatings according to the invention are deposited by deposition techniques of the magnetic field-assisted vacuum sputtering type of a cathode of the material or of a precursor of the material to be deposited, often called the technique of magnetron sputtering in the field. . Such a technique is conventionally used today, in particular when the coating to be deposited consists of a stack of successive layers with thicknesses of a few nanometers or a few tens of nanometers. This layer deposition technique makes it possible to avoid the problems existing with the other CVD deposition techniques set out above.

In particular, the glass articles according to the invention are durable over time, in the sense that their initial properties, in particular their coloring and their properties optical, vary only very slightly under chemical attack, such as corrosion, or under the mechanical attack to which they are subjected during their intended use.

They can thus be advantageously used as single or monolithic glazing (a single glass substrate), or as multiple glazing, for example double or else as laminated or laminated glazing. Laminated or laminated glazing conventionally means glazing comprising at least two glass substrates united by a plastic sheet, for example of the polyvinyl butyral (PVB) or polyurethane (PU) type.

Thus, the glass article, according to the invention, comprises a stack of layers capable of undergoing a heat treatment such as tempering, bending or more generally a heat treatment at temperatures between 600° C. and 750° C., preferably between 680°C and 715°C, without loss of its optical and thermal properties. The glass article, according to the invention, can thus be heat-tempered and/or bent.

The invention also relates to building glazing comprising a glass article as defined above.

If the application more particularly targeted by the invention is glazing for the building, it is clear that other applications are possible, in particular in the glazing of vehicles (apart from the windshield where one requires a very high light transmission), such as the side windows, the car roof or the rear window.

The invention also relates to a method for manufacturing a glass article according to the invention, comprising for example the following steps:

- fabrication of a clear glass substrate, and

- deposition on said clear glass substrate of a stack of layers as described above by a vacuum sputtering technique, preferably magnetron-assisted, by adapting the thickness of each of said layers, in order to obtain a specific coloring of the glass article in external reflection, measured from the glass substrate side.

According to the invention, the level of nitrogen present in the second layer comprising silicon nitride is controlled in particular, by limiting the percentage of the nitrogen gas introduced into the sputtering chamber in the ixh/gas mixture, serving as plasma gas. It is particularly understood within the meaning of the present invention that all the layers comprising silicon nitride, according to the invention, can comprise a minimal part of another element, in particular aluminum, useful during the process from vacuum deposition to sputtering of the silicon layer forming the cathodic target in the installation. By way of example, silicon targets comprising 8 atomic % aluminum are conventionally used at present to improve their conductivity. The invention and its advantages are described in more detail, below, by means of the non-limiting examples below, according to the invention and comparative. Throughout the examples and the description, the thicknesses given are physical. All the substrates are made of 4 mm thick glass of the Planilux® type marketed by the company Saint-Gobain Glass France. Examples 1a, 2a, 3a (prior art, clear glass substrate) In the following examples 1a, 2a and 3a, according to the prior art, the properties of highly reflective sunscreen glazings currently marketed by the applicant company under the reference Reflectasol®. These are glazings for buildings comprising a clear glass substrate on which is deposited by CVD deposition a stack of layers based on silicon oxycarbide. Examples 1b, 2b, 3b (prior art, tinted glass substrate) In the following examples 1b, 2b and 3b, according to the prior art, the properties of reflective sunscreen glazings currently marketed by the applicant company under the reference Reflectasol were measured. ®. These are windows for buildings comprising a tinted glass substrate: either blue (1b), gray (2b), or bronze (3b) on which is deposited by CVD deposition a stack of layers based on silicon oxycarbide. Example 1c, 2c, 3c (according to the invention) In examples 1c, 2c, 3c, according to the invention, which follow, the clear glass substrate was covered with a stack of layers comprising the succession of the following layers to from the surface of said clear glass substrate: - a first layer comprising so-called "substantially stoichiometric" silicon nitride (N/Si ratio ~ 1.33 > 1.25), denoted Si ₃ N ₄ , - a layer comprising nichrome, which is an alloy of nickel and chromium comprising 80% nickel and 20% chromium, denoted NiCr, - a second layer comprising silicon nitride called "sub- stoichiometric” in nitrogen (N/Si ratio < 1.25), denoted SiN _y and

- a third layer comprising silicon nitride called "substantially stoichiometric" (N/Si ratio ~ 1.33 > 1.25), denoted Si ₃ N ₄ ,

The layer stack sequence is therefore as follows: Clear glass / Si ₃ N ₄ (1 ^st layer) / NiCr / SiN _y (2 ^nd layer) / Si ₃ N ₄ (3 ^rd layer)

• In example 1c, the thicknesses of the different layers are adjusted so as to obtain a building glazing with a blue color in external reflection in the visible range (glass side), which results in a value of b* in external reflection less than -15.

• In example 2c, the thicknesses of the different layers are adjusted so as to obtain a building glazing with a gray color in external reflection in the visible range (glass side), which results in a value of a* in external reflection between -4 and 4 and a value of b* in external reflection greater than 0.

• In example 3c, the thicknesses of the different layers are adjusted so as to obtain building glazing with a bronze color in external reflection in the visible range (glass side), which results in an a* value in reflection between 5 and 10 and a value of b* in external reflection between 10 and 25.

Table 0 below groups together the information concerning the constitution of the solar protection stacks 1c, 2c, 3c, according to the invention:

[Table 0]

All the layers according to these examples are deposited by sputtering assisted by magnetic field (often called magnetron), on a clear glass substrate.

In a well-known way, the different successive layers are deposited in the successive compartments of the sputtering device, each compartment being provided with a specific metal target in Si, or in NiCr, under conditions chosen for the deposition of a specific layer of the stack.

The first and the third layer comprising silicon nitride, according to the invention, called “substantially stoichiometric” (N/Si ratio ~ 1.33 > to 1.25) are deposited in compartments of the device from silicon targets metal (doped with 8% aluminum mole), in a reactive atmosphere containing argon and nitrogen (60% Ar and 40% N2 by volume). These silicon nitride layers therefore contain a little aluminum, and are denoted Si ₃ N ₄ for convenience, knowing that the actual stoichiometry may be significantly different, in particular due to this doping (see the explanations previously provided in the description of the this application).

The layer comprising nichrome is deposited from the sputtering of a target of an alloy of nickel and metallic chromium (80% Ni and 20% Cr) in a reactive atmosphere containing 100% argon.

The second layer comprising silicon nitride called "sub-stoichiometric" in nitrogen (N/Si ratio<1.25) is deposited above the layer comprising nichrome by means of another compartment of the device from the same target of metallic silicon doped with 8% by mole of aluminum, in a reactive atmosphere depleted in nitrogen and containing 95% Ar and 5% N2 by volume. This layer is denoted SiN _y for convenience.

The magnetron deposition conditions of such layers are technically well known in the field.

The N/Si ratio in the layers comprising substantially stoichiometric silicon nitride Si ₃ N ₄ , as evaluated by X-ray photoelectron spectrometry (XPS) is of the order of 1.4, on the basis of the compounds defined AIN and Si ₃ N ₄ , and close to the theoretical value. The N/Si ratio in the layer comprising silicon nitride sub-stoichiometric in nitrogen SiN _y is of the order of 0.6.

A-Measurement of glazing characteristics

The optical and thermal characteristics of the glazing were measured according to the following principles and standards:

1°) Optical properties:

The measurements are carried out in accordance with the European standard NF EN 410 (2011). More precisely, light transmissions T _L , light reflections exterior RLext on the side of the face of the glazing with the glass not covered with layers and the interior light reflections RLint on the side of the face of the glazing supporting the stack of layers, are measured in the range of the visible spectrum: wavelengths between 380 nm and 780 nm, depending on the illuminant Des.

The colorimetry parameters a* _ext and b* _ext in exterior reflection as well as the colorimetry parameters a*int and b*int in interior reflection are measured according to the international colorimetry model (L, a*, b*).

2°) Thermal properties:

The thermal insulation properties of the glazing are evaluated by determining the solar factor g, according to the conditions described in standard NF EN 410 (2011), and the selectivity S being the Ti_/g ratio.

B -Results

The results obtained for monolithic (simple) glazing according to the examples described above are grouped together in Tables 1, 2 and 3 below: [Table 1]

The results reported in this table show that it is not possible to obtain the blue color in external reflection with glazing according to the prior art (i.e. on the side of the glazing not covered with layers) by the CVD deposition process (cf. example 1a with a b* _ext = at -0.3 and not < at -15 as for examples 1b and 1c). It is observed that the glazing according to the invention 1c has a higher light transmission and better selectivity (S > 0.8) compared to the glazing according to the prior art 1a and 1b, while maintaining good reflection. outside (RLext > 15%). In addition, example 1c according to the invention has a lower interior light reflection (RLint = 21.1%) compared to the glazing according to the prior art 1a and 1b, which limits the mirror effect glazing for interior night vision. Such a characteristic makes such glazing suitable for use allowing vision from the interior to the exterior of the building, whatever the exterior lighting conditions. It can also be noted that the glazing according to the invention 1c has a slightly red coloring in internal reflection.

[Table 2]

The results reported in this table show that a gray color in external reflection is indeed obtained for the glazing according to the invention 2c since a value a*ext = -0.37 and a value of b* _ext = 1, 5 therefore > 0 are obtained.

It is observed that the glazing according to the invention 2c has a higher light transmission and better selectivity (S > 0.8) compared to the glazing according to the prior art 2a and 2b, while maintaining good external reflection (RLext > 20%). In addition, example 2c according to the invention has a much lower interior light reflection (RLint = 18%), which limits a mirror effect of the glazing in vision interior and at night, compared with the interior reflections obtained with the glazing according to the prior art 2a and 2b (RLint > 50%). It can also be noted that the color of the glazing according to the invention 2c in internal reflection is not red, but slightly blue.

[Table 3]

The results reported in this table show that it is not possible to obtain the bronze color in external reflection with glazing according to the prior art (i.e. on the side of the glazing not covered with layers) by the CVD deposition process (cf. example 3a with a b*ext=at −0.3). It is observed that the glazing according to the invention 3c has a higher light transmission and better selectivity (S > 0.8) compared to the glazing according to the prior art 3a and 3b, while maintaining good external reflection (RLext > 20%). In addition, example 3c according to the invention has a much lower interior light reflection (RLint = 6.8%), which limits a mirror effect of the glazing in interior and night vision, compared to the interior reflections obtained with the glazing according to the prior art 3a and 3b (RLint > 50%). It can also be noted that the color of the glazing according to the invention 3c in internal reflection is not red, but rather blue in color, which is more pleasant from an aesthetic point of view. Example 4 (comparative)

In Example 4, which follows, is deposited, according to the conventional magnetron technique described above, on a clear glass substrate of the Planilux® type marketed by the applicant company, the following stack of layers from the glass substrate clear: Si ₃ N ₄ (85 nm) / NiCr (10.6 nm) / Si ₃ N ₄ (30 nm).

Example 1c (according to the invention)

Example 1c (according to the invention) is identical to Example 4, except that an additional layer comprising silicon nitride called sub-stoichiometric in nitrogen (N/Si ratio <1.25), denoted SiN _y is deposited above the NiCr layer by means of another compartment of the device from the same metallic silicon target doped with 8% by mole of aluminum, in a reactive atmosphere depleted in nitrogen and containing 95% of Ar and 5% of N2, by volume (as indicated previously).

Thus, the sequence of the layer stacks according to the invention is as follows starting from the clear glass substrate: Si ₃ N ₄ (1 ^st layer of 80 nm) / NiCr (8.0 nm) / SiN _y (2 ^nd layer of 10 nm) / Si ₃ N ₄ (3rd ^layer of 25 nm).

In particular, the N/Si ratio in the layers comprising substantially stoichiometric silicon nitride Si ₃ N ₄ ( ^1st layer and 3rd ^layer ), as evaluated by X-ray photoelectron spectrometry (XPS), is order of 1.4 (based on the defined compounds AIN and Si ₃ N ₄ ) and close to the theoretical value. The N/Si ratio in the layer comprising silicon nitride sub-stoichiometric in nitrogen SiN _y (2 ^nd layer) is of the order of 0.6.

The optical and thermal characteristics of the glazing, of examples 4 and 1 c, were measured according to the principles and standards described above and the results obtained are grouped together in table 4 below:

[Table 4]

It can be seen that the single glazing prepared in accordance with the invention (example 1c) has thermal properties equivalent to those of the glazing of the comparative example (example 4) (same order of magnitude for g and S), as well as properties optics such as equivalent light transmission and exterior reflection.

However, the use of an additional layer based on silicon nitride substoichiometric in nitrogen (deposited above the layer comprising nichrome) according to the invention makes it possible to lower the values of the parameters a*int and b*int in internal reflection (side of the glazing on which the stack of layers is deposited), and in particular the value of the parameter b*int, which makes it possible to obtain glazing that does not exhibit an intense red coloring in internal reflection.

In order to evaluate the chemical resistance and more particularly the resistance to corrosion, a monolithic solar glazing according to example 4: clear glass/Si ₃ N ₄ /NiCr/Si ₃ N ₄ (comparative example) and a monolithic solar glazing according to example 1 c (example according to the invention): clear glass/Si ₃ N ₄ /NiCr/SiN _y /Si ₃ N ₄ , are subjected to the Cupro-acetic Salt Spray test “BSC” (or “CASS”: Copper Accelerated Salt Spray test, in English) according to the conditions described in standard EN ISO 9227: 2017. The results of the test show corrosion after 56 days almost 4 times higher for a glazing according to example 4, in particular on the coating side, in comparison with a glazing according to the invention (example 1 c).

In addition, in the colorimetric system L*, a*, b* and under normal incidence, the color variation in interior reflection at the end of the saline cupro-acetic treatment was quantified for the two types of glazing using the quantity AE conventionally used in the international L*, a*, b* system and defined by the relationship: (Δa* ² + Δb* ² + ΔL* ² ) ^1/2 .

After 56 days, a colorimetric variation “AE” equal to 29.9 was obtained within a glazing according to example 4, whereas a much lower colorimetric variation equal to 9 was obtained within a glazing according to the invention (example 1 c). These tests show that the addition of said second layer comprising silicon nitride sub-stoichiometric in nitrogen SiN placed _there above the layer comprising nichrome allows the glazing to be more resistant to corrosion. In addition, additional tests have shown a decrease in the durability of the glass article, an increase in internal reflection and a lower neutralization of the red color on the stack side if the layer comprising silicon nitride is sub-stoichiometric in nitrogen SiN was placed _there below the nichrome layer and not above as in the present invention.

Claims

1 . Glass article comprising at least one clear glass substrate on which is deposited a stack of layers, said stack of layers comprising the succession of the following layers starting from the surface of said clear glass substrate:

- a first layer comprising silicon nitride, in which the N/Si atomic ratio is greater than 1.25, the physical thickness of said layer being between 5 and 100 nm,

- a second layer comprising silicon nitride, in which the N/Si atomic ratio is less than 1.25, the physical thickness of said layer being between 2 and 15 nm, and

- a third layer comprising silicon nitride, in which the N/Si atomic ratio is greater than 1.25, the physical thickness of said layer being between 5 and 100 nm.

2. Glass article according to claim 1, wherein each of said layers is in direct contact with the previous one.

3. Glass article according to any one of the preceding claims, in which the N/Si ratio of said first and third layers comprising silicon nitride is greater than or equal to 1.33, and preferably is between 1.33 and 1. .60, terminals included.

4. Article according to any one of the preceding claims, in which the N/Si ratio of said second layer comprising silicon nitride is less than or equal to 1.00, preferably less than or equal to 0.80 and more preferably comprised between 0.20 and 1.00, limits included.

5. Glass article according to any one of the preceding claims, in which the layer comprising NiCr and the second layer comprising nitride of silicon have a cumulative thickness of between 6 and 25 nm, preferably between 10 and 20 nm.

6. Glass article according to any one of the preceding claims, in which:

- the layer comprising nichrome of formula NiCr has a physical thickness of between 4 and 12 nm, preferably between 6.5 and 9.5 nm,

7. Glass article according to one of the preceding claims 1 to 5, in which:

- the first layer comprising silicon nitride has a physical thickness comprised between 5 and 25 nm, preferably comprised between 10 and 20 nm,

8. Glass article according to one of the preceding claims 1 to 5, in which:

9. Glass article according to any one of the preceding claims, in which the nichrome is an alloy of nickel and chromium, comprising between 70% and 90% nickel and between 30% and 10% chromium.

10. Glass article according to any one of the preceding claims, in which the layer comprising nichrome NiCr further comprises nitrogen.

11 . Glass article according to any one of the preceding claims, in which the stack also comprises a protective layer above the said succession of layers, the said protective layer preferably consisting essentially of a material chosen from titanium oxide , zirconium oxide or titanium zirconium oxide.

12. Glass article according to any one of the preceding claims, in which the selectivity of the glass article is greater than 0.7, preferably greater than 0.8.

13. Glass article according to any one of the preceding claims, characterized in that it is heat-tempered and/or curved.

14. Building glazing, in particular solar protection, comprising a glass article according to any one of the preceding claims.