WO2022134303A1 - Device and method for optically driving liquid metal micro-droplet - Google Patents

Device and method for optically driving liquid metal micro-droplet Download PDF

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Publication number
WO2022134303A1
WO2022134303A1 PCT/CN2021/078032 CN2021078032W WO2022134303A1 WO 2022134303 A1 WO2022134303 A1 WO 2022134303A1 CN 2021078032 W CN2021078032 W CN 2021078032W WO 2022134303 A1 WO2022134303 A1 WO 2022134303A1
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liquid metal
light
solution
container
driving
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PCT/CN2021/078032
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French (fr)
Chinese (zh)
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杨浩
蔡逸凡
程亮
李相鹏
孙妍珺
朱铭杰
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苏州大学
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Publication of WO2022134303A1 publication Critical patent/WO2022134303A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00Micromanipulators

Definitions

  • the invention relates to the technical field of liquid metal, in particular to a device and method for driving liquid metal micro-droplets by light.
  • Liquid metal usually refers to a metal that is liquid at room temperature.
  • Common liquid metals include gallium indium tin alloy.
  • Gallium indium tin alloy is an eutectic alloy of metal gallium, metal indium and metal tin. It is liquid at room temperature and has a strong Mobility and Adsorption.
  • Gallium-indium-tin alloys have many excellent properties, such as high electrical and thermal conductivity, high surface tension, extremely low vapor pressure, melting point below room temperature, and most importantly, good biocompatibility, which is suitable for human body. harmless.
  • the methods of driving liquid metal microdroplets are mainly chemical driving, electric field driving and magnetic field driving.
  • Chemical driving is through the mixing of liquid metal and aluminum and other metals.
  • aluminum and the solution chemically react to generate a large number of bubbles. These bubbles will become the thrust of the droplets to drive the liquid metal, but due to the instability of the bubbles
  • the actuation of microdroplets cannot be precisely controlled.
  • the electric field drive can realize the directional movement of the droplet between the two fixed electrodes, but it can only move in a certain direction, and the movement position of the liquid metal droplet cannot be precisely controlled, thus greatly limiting its application range.
  • Magnetic field drive means that the liquid metal microdroplets can be made magnetic by mixing with iron or nickel. Metal separation makes it impossible to drive liquid metal droplets for a long time.
  • the purpose of the present invention is to provide a device and method for driving liquid metal microdroplets by light.
  • a device for driving liquid metal microdroplets by light which is characterized in that it comprises a substrate, a conductive film, a photosensitive film, a container, a DC power supply and a driving light source, the substrate, the conductive film and the photosensitive film are arranged in sequence, and the container is arranged in the The photosensitive film is on and not in contact with the conductive film, the container is provided with a solution, the liquid metal microdroplets are placed in the solution, and the driving light source can irradiate light on the photosensitive film .
  • the conductive film is an indium tin oxide conductive film.
  • the material of the photosensitive film is oxytitanium phthalocyanine.
  • the substrate is boron-silicon-based substrate glass.
  • the container is a hollow cuboid channel.
  • the material of the container is polydimethylsiloxane.
  • the solution is sodium hydroxide solution.
  • the driving light source adopts a laser pointer with a wavelength of 650 nm.
  • a method for light-driven liquid metal microdroplets, using the device comprising the following steps:
  • the distance between the negative electrode of the DC power supply and the light spot is in the range of 4-10 cm.
  • the invention can free the liquid metal micro-droplet from moving only between two fixed electrodes, greatly enhances the flexibility of the movement of the liquid metal micro-droplet, and increases its application range.
  • the invention can precisely control the liquid metal micro-droplet. position of the droplet and apply it as a microrobot, which is recyclable and low-cost.
  • FIG. 1 is a schematic structural diagram of a substrate, a conductive film, and a photosensitive film according to a preferred embodiment of the present invention
  • FIG. 2 is a schematic structural diagram of a container according to a preferred embodiment of the present invention.
  • FIG. 3 is a schematic structural diagram of a preferred embodiment of the present invention.
  • FIG. 4 is a schematic structural diagram of a liquid metal microdroplet placed in a solution according to a preferred embodiment of the present invention
  • FIG. 5 is a schematic structural diagram showing that the positive electrode and the negative electrode of the DC power supply are respectively connected to the conductive film and the solution according to the preferred embodiment of the present invention
  • Liquid metal droplets 10, substrate, 12, conductive film, 14, photosensitive film, 16, container, 18, DC power supply, 20, driving light source, 22, solution, 24, light spot.
  • the present invention can be used to optically actuate liquid metal microdroplets. Not limited to this, the present invention has application potential for more experiments based on the closed electric field driving principle.
  • a device for light-driven liquid metal microdroplets 8 includes a substrate 10, a conductive film 12, a photosensitive film 14, a container 16, a DC power supply 18 and a driving light source 20, the substrate 10, the conductive film 12.
  • the photosensitive films 14 are arranged in sequence, the container 16 is arranged on the photosensitive film 14 and not in contact with the conductive film 12, the container 16 is provided with a solution 22, the liquid metal droplets 8 are placed in the solution 22, and the driving light source 20 can irradiate light on the photosensitive film 14 .
  • the substrate 10 is preferably a silicon boron-based substrate glass, but is not limited to a silicon-boron-based substrate glass, and can also be a silicon substrate or a mica sheet.
  • the conductive film 12 is preferably an indium tin oxide (ITO) conductive film, but is not limited to an indium tin oxide (ITO) conductive film, and can also be a gold film or a platinum film.
  • ITO indium tin oxide
  • the size of the conductive thin film 12 is 10 cm ⁇ 10 cm.
  • the material of the photosensitive film 14 is preferably oxytitanium phthalocyanine (TiOPc), but it is not limited to oxytitanium phthalocyanine (TiOPc), and can also be hydrogenated amorphous silicon (a-Si:H) thin film or other photosensitive materials.
  • TiOPc oxytitanium phthalocyanine
  • a-Si:H hydrogenated amorphous silicon
  • the container 16 is preferably a hollow cuboid channel. Further preferably, the inner wall size of the cuboid channel is 7cm ⁇ 7cm ⁇ 4cm.
  • the material of the container 16 is polydimethylsiloxane (PDMS), which is low in cost and easy to use, but is not limited to polydimethylsiloxane (PDMS), and can also be polymethyl methacrylate ( PMMA).
  • PDMS polydimethylsiloxane
  • PMMA polymethyl methacrylate
  • the container 16 is made by 3D printing technology.
  • the preferred solution 22 of the present invention is a sodium hydroxide solution, but it is not limited to a sodium hydroxide solution, and can also be a calcium hydroxide solution, or other alkaline solutions that do not react strongly with the liquid metal droplets 8.
  • the driving light source 20 preferably adopts a laser pointer with a wavelength of 650 nm to provide optical signals for driving the liquid metal microdroplets 8, but is not limited to a laser pointer with a wavelength of 650 nm, but can also be a light source with a wavelength of 650-800 nm.
  • the method of the present invention a method for driving liquid metal microdroplets 8 by light, using the above-mentioned device, includes the following steps:
  • the conductive film 12 and the substrate 10 form an indium tin oxide (ITO) conductive glass, which is a layer of indium tin oxide (ITO) plated on the basis of silicon boron-based substrate glass by sputtering, evaporation and other methods.
  • ITO indium tin oxide
  • the photosensitive film 14 is prepared by the following steps:
  • TiOPc oxytitanium phthalocyanine
  • the mixed solution was spin-coated on the indium tin oxide (ITO) conductive film at 1000-1500 rpm for 20-30s, and dried and cured at 100-130 °C;
  • ITO indium tin oxide
  • TiOPc oxytitanium phthalocyanine
  • the solution 22 is a sodium hydroxide solution, including 100 ml of deionized water and 2 g of sodium hydroxide.
  • the distance D between the negative electrode of the DC power supply 18 and the light spot 24 is in the range of 4-10 cm.

Abstract

Disclosed is a device for optically driving a liquid metal micro-droplet. The device comprises a substrate, a conductive film, a photosensitive film, a container, a direct-current power supply and a driving light source, wherein the substrate, the conductive film and the photosensitive film are sequentially arranged; the container is arranged on the photosensitive film and is not in contact with the conductive film; a solution is provided in the container; a liquid metal micro-droplet is placed in the solution; and the driving light source can irradiate the photosensitive film with light. Further disclosed is a method for optically driving a liquid metal micro-droplet. According to the present invention, the liquid metal micro-droplet cannot be limited to only moving between two fixed electrodes, such that the flexibility of the movement of the liquid metal micro-droplet is greatly enhanced, and the application range of the liquid metal micro-droplet is enlarged. According to the present invention, the position of the liquid metal micro-droplet can be accurately controlled, and the device can be applied as a micro-robot, can be recycled, and is low in cost.

Description

一种光驱动液态金属微液滴的装置及方法Device and method for light-driven liquid metal microdroplets 技术领域technical field
本发明涉及液态金属技术领域,尤其涉及一种光驱动液态金属微液滴的装置及方法。The invention relates to the technical field of liquid metal, in particular to a device and method for driving liquid metal micro-droplets by light.
背景技术Background technique
液态金属通常是指室温下呈液态的金属,常见的液态金属有镓铟锡合金,镓铟锡合金是金属镓、金属铟和金属锡的共熔合金,在常温下呈液态,有很强的流动性和吸附性。镓铟锡合金具有许多优异特性,例如高的电导率和热导率、高的表面张力、极低的蒸汽压、熔点低于室温,最重要的是具有较好的生物相容性,对人体无害。Liquid metal usually refers to a metal that is liquid at room temperature. Common liquid metals include gallium indium tin alloy. Gallium indium tin alloy is an eutectic alloy of metal gallium, metal indium and metal tin. It is liquid at room temperature and has a strong Mobility and Adsorption. Gallium-indium-tin alloys have many excellent properties, such as high electrical and thermal conductivity, high surface tension, extremely low vapor pressure, melting point below room temperature, and most importantly, good biocompatibility, which is suitable for human body. harmless.
目前,驱动液态金属微液滴的方法主要是化学驱动、电场驱动以及磁场驱动。化学驱动是通过液态金属与铝等金属混合,在溶液中,铝与溶液发生化学反应从而产生大量气泡,这些气泡会成为微液滴的推力从而驱动液态金属,但由于产生气泡的不稳定性从而无法精准控制微液滴的驱动。电场驱动可实现微液滴在两固定电极之间的定向移动,但是只能向一个确定的方向运动,无法精准控制液态金属微液滴的运动位置,因而大大限制了其应用范围。磁场驱动是指液态金属微液滴通过与铁或镍的混合,可使其具有磁性,在磁场的操控下可实现微液滴在二维平面上的移动,但混合的铁或镍会与液态金属分离进而无法实现长时间地驱动液态金属微液滴。At present, the methods of driving liquid metal microdroplets are mainly chemical driving, electric field driving and magnetic field driving. Chemical driving is through the mixing of liquid metal and aluminum and other metals. In the solution, aluminum and the solution chemically react to generate a large number of bubbles. These bubbles will become the thrust of the droplets to drive the liquid metal, but due to the instability of the bubbles The actuation of microdroplets cannot be precisely controlled. The electric field drive can realize the directional movement of the droplet between the two fixed electrodes, but it can only move in a certain direction, and the movement position of the liquid metal droplet cannot be precisely controlled, thus greatly limiting its application range. Magnetic field drive means that the liquid metal microdroplets can be made magnetic by mixing with iron or nickel. Metal separation makes it impossible to drive liquid metal droplets for a long time.
技术解决方案technical solutions
针对现有技术不足,本发明的目的在于提供一种光驱动液态金属微液滴的装置及方法。In view of the deficiencies of the prior art, the purpose of the present invention is to provide a device and method for driving liquid metal microdroplets by light.
为了实现上述目的,本发明一实施例提供的技术方案如下:In order to achieve the above purpose, the technical solution provided by an embodiment of the present invention is as follows:
一种光驱动液态金属微液滴的装置,其特征在于,包括基底、导电薄膜、光敏薄膜、容器、直流电源和驱动光源,所述基底、导电薄膜、光敏薄膜依次设置,所述容器设于所述光敏薄膜上且不与所述导电薄膜接触,所述容器内设置有溶液,所述液态金属微液滴放置在所述溶液内,所述驱动光源能够将光照射在所述光敏薄膜上。A device for driving liquid metal microdroplets by light, which is characterized in that it comprises a substrate, a conductive film, a photosensitive film, a container, a DC power supply and a driving light source, the substrate, the conductive film and the photosensitive film are arranged in sequence, and the container is arranged in the The photosensitive film is on and not in contact with the conductive film, the container is provided with a solution, the liquid metal microdroplets are placed in the solution, and the driving light source can irradiate light on the photosensitive film .
作为本发明的进一步改进,所述导电薄膜为氧化铟锡导电膜。As a further improvement of the present invention, the conductive film is an indium tin oxide conductive film.
作为本发明的进一步改进,所述光敏薄膜的材料采用氧钛酞菁。As a further improvement of the present invention, the material of the photosensitive film is oxytitanium phthalocyanine.
作为本发明的进一步改进,所述基底为硅硼基基片玻璃。As a further improvement of the present invention, the substrate is boron-silicon-based substrate glass.
作为本发明的进一步改进,所述容器为中空的长方体通道。As a further improvement of the present invention, the container is a hollow cuboid channel.
作为本发明的进一步改进,所述容器的材质为聚二甲基硅氧烷。As a further improvement of the present invention, the material of the container is polydimethylsiloxane.
作为本发明的进一步改进,所述溶液为氢氧化钠溶液。As a further improvement of the present invention, the solution is sodium hydroxide solution.
作为本发明的进一步改进,所述驱动光源采用波长为650nm的激光笔。As a further improvement of the present invention, the driving light source adopts a laser pointer with a wavelength of 650 nm.
一种光驱动液态金属微液滴的方法,使用所述的装置,包括以下步骤:A method for light-driven liquid metal microdroplets, using the device, comprising the following steps:
(1)将液态金属微液滴放置于容器内,在容器内倒入溶液,溶液的液面高度能够使得溶液浸没液态金属微液滴;(1) Place the liquid metal microdroplets in a container, pour the solution into the container, and the liquid level of the solution can make the solution immerse the liquid metal microdroplets;
(2)将直流电源的正极、负极分别与导电薄膜、溶液相连;(2) Connect the positive and negative electrodes of the DC power supply to the conductive film and the solution respectively;
(3)使用驱动光源照射在光敏薄膜上,产生一个光斑,液态金属微液滴向光斑处移动。(3) Use the driving light source to illuminate the photosensitive film to generate a light spot, and the liquid metal droplet moves to the light spot.
作为本发明的进一步改进,所述直流电源的负极与光斑之间的距离范围在4-10cm。As a further improvement of the present invention, the distance between the negative electrode of the DC power supply and the light spot is in the range of 4-10 cm.
本发明的有益效果是:The beneficial effects of the present invention are:
本发明能够使液态金属微液滴摆脱只能在两个固定电极之间的移动,大大增强了液态金属微液滴运动的灵活性,增大了其应用范围,本发明可精准控制液态金属微液滴的位置,并将其作为微机器人应用,可回收利用,成本低。The invention can free the liquid metal micro-droplet from moving only between two fixed electrodes, greatly enhances the flexibility of the movement of the liquid metal micro-droplet, and increases its application range. The invention can precisely control the liquid metal micro-droplet. position of the droplet and apply it as a microrobot, which is recyclable and low-cost.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明中记载的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to illustrate the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that are used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments described in the present invention. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.
图1为本发明的优选实施例的基底、导电薄膜、光敏薄膜的结构示意图;1 is a schematic structural diagram of a substrate, a conductive film, and a photosensitive film according to a preferred embodiment of the present invention;
图2为本发明的优选实施例的容器的结构示意图;FIG. 2 is a schematic structural diagram of a container according to a preferred embodiment of the present invention;
图3为本发明的优选实施例的结构示意图;3 is a schematic structural diagram of a preferred embodiment of the present invention;
图4为本发明的优选实施例的液态金属微液滴放置在溶液中的结构示意图;4 is a schematic structural diagram of a liquid metal microdroplet placed in a solution according to a preferred embodiment of the present invention;
图5为本发明的优选实施例的直流电源的正极、负极分别与导电薄膜、溶液连接的结构示意图;FIG. 5 is a schematic structural diagram showing that the positive electrode and the negative electrode of the DC power supply are respectively connected to the conductive film and the solution according to the preferred embodiment of the present invention;
图6为本发明的优选实施例的实验图;6 is an experimental diagram of a preferred embodiment of the present invention;
图中:8、液态金属微液滴,10、基底,12、导电薄膜,14、光敏薄膜,16、容器,18、直流电源,20、驱动光源,22、溶液,24、光斑。In the figure: 8. Liquid metal droplets, 10, substrate, 12, conductive film, 14, photosensitive film, 16, container, 18, DC power supply, 20, driving light source, 22, solution, 24, light spot.
本发明的实施方式Embodiments of the present invention
为了使本技术领域的人员更好地理解本发明中的技术方案,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本发明保护的范围。In order to make those skilled in the art better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described The embodiments are only some of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
本发明可以用来对液态金属微液滴进行光学驱动。不仅限于此,更多的基于闭合电场驱动原理的实验,本发明都具有应用潜力。The present invention can be used to optically actuate liquid metal microdroplets. Not limited to this, the present invention has application potential for more experiments based on the closed electric field driving principle.
如图1-图5所示,一种光驱动液态金属微液滴8的装置,包括基底10、导电薄膜12、光敏薄膜14、容器16、直流电源18和驱动光源20,基底10、导电薄膜12、光敏薄膜14依次设置,容器16设于光敏薄膜14且不与导电薄膜12接触,容器16内设置有溶液22,液态金属微液滴8放置在溶液22内,驱动光源20能够将光照射在光敏薄膜14上。As shown in FIG. 1-FIG. 5, a device for light-driven liquid metal microdroplets 8 includes a substrate 10, a conductive film 12, a photosensitive film 14, a container 16, a DC power supply 18 and a driving light source 20, the substrate 10, the conductive film 12. The photosensitive films 14 are arranged in sequence, the container 16 is arranged on the photosensitive film 14 and not in contact with the conductive film 12, the container 16 is provided with a solution 22, the liquid metal droplets 8 are placed in the solution 22, and the driving light source 20 can irradiate light on the photosensitive film 14 .
本发明优选基底10为硅硼基基片玻璃,但并不局限于硅硼基基片玻璃,也可以为硅基底或云母片。In the present invention, the substrate 10 is preferably a silicon boron-based substrate glass, but is not limited to a silicon-boron-based substrate glass, and can also be a silicon substrate or a mica sheet.
本发明优选导电薄膜12为氧化铟锡(ITO)导电膜,但并不局限于氧化铟锡(ITO)导电膜,也可以为金薄膜或铂薄膜。In the present invention, the conductive film 12 is preferably an indium tin oxide (ITO) conductive film, but is not limited to an indium tin oxide (ITO) conductive film, and can also be a gold film or a platinum film.
进一步优选导电薄膜12的大小为10cm×10cm。More preferably, the size of the conductive thin film 12 is 10 cm×10 cm.
本发明优选光敏薄膜14的材料采用氧钛酞菁(TiOPc),但并不局限于氧钛酞菁(TiOPc),也可以为氢化非晶硅(a-Si:H)薄膜或其它光敏材料。In the present invention, the material of the photosensitive film 14 is preferably oxytitanium phthalocyanine (TiOPc), but it is not limited to oxytitanium phthalocyanine (TiOPc), and can also be hydrogenated amorphous silicon (a-Si:H) thin film or other photosensitive materials.
本发明优选容器16为中空的长方体通道。进一步优选长方体通道的内壁尺寸为7cm×7cm×4cm。In the present invention, the container 16 is preferably a hollow cuboid channel. Further preferably, the inner wall size of the cuboid channel is 7cm×7cm×4cm.
进一步优选容器16的材质为聚二甲基硅氧烷(PDMS),成本低廉,使用简单,但并不局限于聚二甲基硅氧烷(PDMS),也可以为聚甲基丙烯酸甲酯(PMMA)。Further preferably, the material of the container 16 is polydimethylsiloxane (PDMS), which is low in cost and easy to use, but is not limited to polydimethylsiloxane (PDMS), and can also be polymethyl methacrylate ( PMMA).
进一步优选容器16采用3D打印技术制作而成。Further preferably, the container 16 is made by 3D printing technology.
本发明优选溶液22为氢氧化钠溶液,但并不局限于氢氧化钠溶液,也可以为氢氧化钙溶液,或者其它不与液态金属微液滴8发生强反应的碱性溶液。The preferred solution 22 of the present invention is a sodium hydroxide solution, but it is not limited to a sodium hydroxide solution, and can also be a calcium hydroxide solution, or other alkaline solutions that do not react strongly with the liquid metal droplets 8.
本发明优选驱动光源20采用波长为650nm的激光笔,为驱动液态金属微液滴8提供光信号,但并不局限于波长为650nm的激光笔,也可以为650-800nm的光源。In the present invention, the driving light source 20 preferably adopts a laser pointer with a wavelength of 650 nm to provide optical signals for driving the liquid metal microdroplets 8, but is not limited to a laser pointer with a wavelength of 650 nm, but can also be a light source with a wavelength of 650-800 nm.
以下介绍本发明的方法,一种光驱动液态金属微液滴8的方法,使用上述装置,包括以下步骤:The method of the present invention, a method for driving liquid metal microdroplets 8 by light, using the above-mentioned device, includes the following steps:
(1)将液态金属微液滴8放置于容器16内,在容器16内倒入溶液22,溶液22的液面高度能够使得溶液22浸没液态金属微液滴8;(1) Place the liquid metal droplets 8 in the container 16, pour the solution 22 into the container 16, and the liquid level of the solution 22 can make the solution 22 immerse the liquid metal droplets 8;
(2)将直流电源18的正极、负极分别与导电薄膜12、溶液22相连;(2) Connect the positive and negative electrodes of the DC power supply 18 to the conductive film 12 and the solution 22 respectively;
(3)使用驱动光源20照射在光敏薄膜14上,产生一个光斑24,液态金属微液滴8向光斑24处移动。(3) Using the driving light source 20 to illuminate the photosensitive film 14 to generate a light spot 24 , and the liquid metal droplet 8 moves to the light spot 24 .
作为优选方案,导电薄膜12与基底10构成氧化铟锡(ITO)导电玻璃,其是在硅硼基基片玻璃的基础上,利用溅射、蒸发等多种方法镀上一层氧化铟锡(简称ITO)导电膜加工制作成的。As a preferred solution, the conductive film 12 and the substrate 10 form an indium tin oxide (ITO) conductive glass, which is a layer of indium tin oxide (ITO) plated on the basis of silicon boron-based substrate glass by sputtering, evaporation and other methods. Referred to as ITO) conductive film processing.
作为优选方案,光敏薄膜14采用以下步骤制备:As a preferred solution, the photosensitive film 14 is prepared by the following steps:
使用3-5 ml的丁酮和3-5 ml的环己酮混合搅拌,丁酮和环己酮等体积混合搅拌;Mix and stir with 3-5 ml of butanone and 3-5 ml of cyclohexanone, and mix and stir in equal volumes of butanone and cyclohexanone;
加入0.9-1.5 g的氧钛酞菁(TiOPc)粉末以及0.45-0.75 g的聚乙烯醇缩丁醛,混合后避光磁搅拌7-10h,得到混合溶液;Add 0.9-1.5 g of oxytitanium phthalocyanine (TiOPc) powder and 0.45-0.75 g of polyvinyl butyral, mix and stir for 7-10 hours in the dark to obtain a mixed solution;
把混合溶液以1000-1500 rpm、20-30s旋涂于氧化铟锡(ITO)导电膜上,并在100-130 ℃下烘干固化;The mixed solution was spin-coated on the indium tin oxide (ITO) conductive film at 1000-1500 rpm for 20-30s, and dried and cured at 100-130 °C;
在氧化铟锡(ITO)导电膜上沉积1μm厚的氧钛酞菁(TiOPc)层。A 1 μm thick layer of oxytitanium phthalocyanine (TiOPc) was deposited on the indium tin oxide (ITO) conductive film.
作为优选方案,溶液22为氢氧化钠溶液,包括100ml去离子水、2g氢氧化钠。As a preferred solution, the solution 22 is a sodium hydroxide solution, including 100 ml of deionized water and 2 g of sodium hydroxide.
作为优选方案,直流电源18的负极与光斑24之间的距离D范围在4-10cm。As a preferred solution, the distance D between the negative electrode of the DC power supply 18 and the light spot 24 is in the range of 4-10 cm.
如图6所示,为了更进一步的说明本发明的方法,作为优选方案,包括以下步骤:As shown in Figure 6, in order to further illustrate the method of the present invention, as a preferred solution, the following steps are included:
(1)将液态金属微液滴8放置于容器16内,在容器16内倒入溶液22,溶液22的液面高度能够使得溶液22浸没液态金属微液滴8,如图6-(a)所示;(1) Place the liquid metal droplet 8 in the container 16, and pour the solution 22 into the container 16. The liquid level of the solution 22 can make the solution 22 immerse the liquid metal droplet 8, as shown in Figure 6-(a) shown;
(2)将直流电源18的正极、负极分别与导电薄膜12、溶液22相连,使得液态金属微液滴8处于导电环境,如图6-(a)所示;(2) Connect the positive and negative electrodes of the DC power supply 18 to the conductive film 12 and the solution 22 respectively, so that the liquid metal droplets 8 are in a conductive environment, as shown in Figure 6-(a);
(3)使用驱动光源20照射在光敏薄膜14上,产生一个光斑24,如图6-(b)所示,由于氧钛酞菁的光敏特性,光斑24处的电阻急剧下降,从而形成闭合回路,此时光斑24处相当于正极,之后,在光场和电场的共同作用下,液态金属微液滴8受到电毛细现象驱动会向光斑7处移动。电毛细现象:由于通电后产生电荷转移,大量阳离子积聚在阴极附近,反之亦然。因此,在靠近阴极和阳极的液态金属微液滴8表面上分别存在大量阳离子和阴离子。靠近阴极的液态金属微液滴8表面由于电荷交换而发生氧化反应,从而形成局部氧化层。相反,由于靠近阳极一侧的液态金属微液滴8表面上积累的阴离子和液态金属微液滴8的电荷具有相同的极性,这引发相互排斥而导致界面张力减小,液态金属微液滴8为了在通电后维持系统的最小自由能,它增加了与溶液的界面面积。从宏观上看,这种现象看起来像液态金属微液滴8被拉伸。假如液态金属体积较小,可以向阳极运动。(3) Using the driving light source 20 to illuminate the photosensitive film 14 to generate a light spot 24, as shown in Figure 6-(b), due to the photosensitive properties of oxytitanium phthalocyanine, the resistance at the light spot 24 drops sharply, thereby forming a closed loop , at this time, the spot 24 is equivalent to the positive electrode, and then, under the combined action of the light field and the electric field, the liquid metal droplet 8 is driven by the electrocapillary phenomenon and moves to the spot 7 . Electrocapillarity: Due to charge transfer after energization, a large number of cations accumulate near the cathode and vice versa. Therefore, a large number of cations and anions are present on the surface of the liquid metal droplets 8 near the cathode and anode, respectively. The surface of the liquid metal droplets 8 close to the cathode undergoes an oxidation reaction due to charge exchange, thereby forming a local oxide layer. On the contrary, since the anions accumulated on the surface of the liquid metal droplet 8 near the anode side and the charge of the liquid metal droplet 8 have the same polarity, which induces mutual repulsion and leads to a decrease in the interfacial tension, the liquid metal droplet 8 has the same polarity. 8 To maintain the minimum free energy of the system after energization, it increases the interfacial area with the solution. Macroscopically, this phenomenon looks like the liquid metal microdroplets 8 are stretched. If the liquid metal is small, it can move towards the anode.
通过一系列实验,我们得出:当直流电源18的负极与光斑24之间的距离D很近(小于4 cm),且直流电源18的电压为5V以上时,便可实现对液态金属微液滴8的驱动,并且响应速度很快。而随着增大直流电源18的负极与光斑24之间的距离,可通过加大直流电源18的电压实现驱动,但灵敏度会降低,当增大直流电源18的负极与光斑24之间的距离至10 cm后,液态金属微液滴8将很难驱动。Through a series of experiments, we found that when the distance D between the negative electrode of the DC power supply 18 and the light spot 24 is very close (less than 4 cm), and the voltage of the DC power supply 18 is above 5V, the liquid metal microfluid The Drop 8 is driven and responsive. As the distance between the negative electrode of the DC power supply 18 and the light spot 24 increases, driving can be achieved by increasing the voltage of the DC power supply 18, but the sensitivity will decrease. When the distance between the negative electrode of the DC power supply 18 and the light spot 24 is increased, After reaching 10 cm, the liquid metal droplet 8 will be difficult to drive.
对于本领域技术人员而言,显然本发明不限于上述示范性实施例的细节,而且在不背离本发明的精神或基本特征的情况下,能够以其他的具体形式实现本发明。因此,无论从哪一点来看,均应将实施例看作是示范性的,而且是非限制性的,本发明的范围由所附权利要求而不是上述说明限定,因此旨在将落在权利要求的等同要件的含义和范围内的所有变化囊括在本发明内。不应将权利要求中的任何附图标记视为限制所涉及的权利要求。It will be apparent to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiments, but that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments are to be regarded in all respects as illustrative and not restrictive, and the scope of the invention is to be defined by the appended claims rather than the foregoing description, which are therefore intended to fall within the scope of the claims. All changes within the meaning and scope of the equivalents of , are included in the present invention. Any reference signs in the claims shall not be construed as limiting the involved claim.
此外,应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。In addition, it should be understood that although this specification is described in terms of embodiments, not each embodiment only includes an independent technical solution, and this description in the specification is only for the sake of clarity, and those skilled in the art should take the specification as a whole , the technical solutions in each embodiment can also be appropriately combined to form other implementations that can be understood by those skilled in the art.

Claims (10)

  1. 一种光驱动液态金属微液滴的装置,其特征在于,包括基底、导电薄膜、光敏薄膜、容器、直流电源和驱动光源,所述基底、导电薄膜、光敏薄膜依次设置,所述容器设于所述光敏薄膜上且不与所述导电薄膜接触,所述容器内设置有溶液,所述液态金属微液滴放置在所述溶液内,所述驱动光源能够将光照射在所述光敏薄膜上。A device for driving liquid metal microdroplets by light, which is characterized in that it comprises a substrate, a conductive film, a photosensitive film, a container, a DC power supply and a driving light source, the substrate, the conductive film and the photosensitive film are arranged in sequence, and the container is arranged in the The photosensitive film is on and not in contact with the conductive film, the container is provided with a solution, the liquid metal microdroplets are placed in the solution, and the driving light source can irradiate light on the photosensitive film .
  2. 根据权利要求1所述的一种光驱动液态金属微液滴的装置,其特征在于,所述导电薄膜为氧化铟锡导电膜。A device for light-driven liquid metal microdroplets according to claim 1, wherein the conductive film is an indium tin oxide conductive film.
  3. 根据权利要求1所述的一种光驱动液态金属微液滴的装置,其特征在于,所述光敏薄膜的材料采用氧钛酞菁。The device for light-driven liquid metal microdroplets according to claim 1, wherein the material of the photosensitive film is oxytitanium phthalocyanine.
  4. 根据权利要求1所述的一种光驱动液态金属微液滴的装置,其特征在于,所述基底为硅硼基基片玻璃。A device for light-driven liquid metal microdroplets according to claim 1, wherein the substrate is a boron-silicon-based substrate glass.
  5. 根据权利要求1所述的一种光驱动液态金属微液滴的装置,其特征在于,所述容器为中空的长方体通道。A device for light-driven liquid metal microdroplets according to claim 1, wherein the container is a hollow cuboid channel.
  6. 根据权利要求1或5所述的一种光驱动液态金属微液滴的装置,其特征在于,所述容器的材质为聚二甲基硅氧烷。A device for light-driven liquid metal microdroplets according to claim 1 or 5, wherein the material of the container is polydimethylsiloxane.
  7. 根据权利要求1所述的一种光驱动液态金属微液滴的装置,其特征在于,所述溶液为氢氧化钠溶液。A device for light-driven liquid metal microdroplets according to claim 1, wherein the solution is a sodium hydroxide solution.
  8. 根据权利要求1所述的一种光驱动液态金属微液滴的装置,其特征在于,所述驱动光源采用波长为650nm的激光笔。The device for optically driving liquid metal microdroplets according to claim 1, wherein the driving light source adopts a laser pointer with a wavelength of 650 nm.
  9. 一种光驱动液态金属微液滴的方法,其特征在于,使用如权利要求1-8中任一项所述的装置,包括以下步骤:A method of light-driven liquid metal microdroplets, characterized in that, using the device according to any one of claims 1-8, comprising the following steps:
    (1)将液态金属微液滴放置于容器内,在容器内倒入溶液,溶液的液面高度能够使得溶液浸没液态金属微液滴;(1) Place the liquid metal microdroplets in a container, pour the solution into the container, and the liquid level of the solution can make the solution immerse the liquid metal microdroplets;
    (2)将直流电源的正极、负极分别与导电薄膜、溶液相连;(2) Connect the positive and negative electrodes of the DC power supply to the conductive film and the solution respectively;
    (3)使用驱动光源照射在光敏薄膜上,产生一个光斑,液态金属微液滴向光斑处移动。(3) Use the driving light source to illuminate the photosensitive film to generate a light spot, and the liquid metal droplet moves to the light spot.
  10. 根据权利要求9所述的一种光驱动液态金属微液滴的方法,其特征在于,所述直流电源的负极与光斑之间的距离范围在4-10cm。The method for driving liquid metal microdroplets by light according to claim 9, wherein the distance between the negative electrode of the DC power supply and the light spot is in the range of 4-10 cm.
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