WO2022095597A1 - Alumina composite ceramic, preparation method therefor, and application therefor - Google Patents

Alumina composite ceramic, preparation method therefor, and application therefor Download PDF

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WO2022095597A1
WO2022095597A1 PCT/CN2021/117498 CN2021117498W WO2022095597A1 WO 2022095597 A1 WO2022095597 A1 WO 2022095597A1 CN 2021117498 W CN2021117498 W CN 2021117498W WO 2022095597 A1 WO2022095597 A1 WO 2022095597A1
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composite
particles
alumina
parts
aln
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伍尚华
张威
郭伟明
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广东工业大学
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  • the application belongs to the technical field of ceramic materials, and in particular relates to an alumina composite ceramic and a preparation method and application thereof.
  • PCB printed circuit board
  • the inorganic substrates are mostly made of Al 2 O 3 ceramic materials. Since the sintering temperature of pure alumina ceramics is above 1800°C, the sintering cost is relatively high; in order to reduce the sintering cost, a sintering aid is usually added to reduce the sintering However, the thermal conductivity of these sintering aids is relatively low, and at the same time, a thicker grain boundary phase is formed after sintering, which leads to the thermal conductivity of Al 2 O 3 ceramic substrates mostly in the range of 20-26W ⁇ m-1 ⁇ K-1 ; In order to improve the thermal conductivity of the Al 2 O 3 ceramic substrate, in the sintering process, AlN particles are usually added as a high thermal conductivity phase, but the sintered AlN grains are wrapped by Al 2 O 3 grains, and the AlN particles are The role of AlN particles is limited, and it is often necessary to add a large amount (>30wt%) of AlN particles to improve the thermal conductivity of Al 2 O 3 ceramic
  • the sintering temperature of AlN particles is also above 1800 ° C.
  • This kind of alumina ceramics with a large amount of AlN particles added It is difficult to sinter and densify below 1700 °C, resulting in a still high sintering cost of alumina ceramics.
  • the room temperature bending strength of alumina ceramics is between 300 and 450MPa, and the mechanical properties are not high.
  • the present application provides an alumina composite ceramic and a preparation method and application thereof, which are used to solve the technical problems of high sintering cost caused by low mechanical properties, low thermal conductivity and high sintering temperature of alumina ceramics.
  • a first aspect of the present application provides an alumina composite ceramic, which is composed of composite particles and AlN particles;
  • the particle size of the composite particles is 50 ⁇ m-70 ⁇ m, and the particle size of the AlN particles is 0.5 ⁇ m;
  • the composite particles are composed of Al 2 O 3 , Y 2 O 3 and m-ZrO 2 ;
  • the AlN particles are distributed on the surface of the composite particles.
  • the AlN particles are distributed on the surface of the composite particles in a three-dimensional network structure.
  • each part of the alumina composite ceramic is composed of the following proportions;
  • the composite particles are composed of the following raw materials;
  • a second aspect of the present application provides a method for preparing an alumina composite ceramic, comprising the steps of:
  • Step 1 adding Al 2 O 3 , Y 2 O 3 and m-ZrO 2 to a solvent, performing ball milling and mixing, and drying to obtain a first composite powder;
  • Step 2 spray granulating the first composite powder to obtain first composite particles
  • Step 3 Dry ball milling the first composite particles and AlN particles to obtain second composite particles;
  • Step 4 molding the second composite particles to obtain an alumina ceramic body
  • Step 5 sintering the alumina ceramic body at a high temperature under a protective atmosphere to obtain the alumina ceramic
  • the particle size of the first composite particles is 50 ⁇ m-70 ⁇ m, and the particle size of the AlN particles is 0.5 ⁇ m.
  • the solvent is one or more of ethanol, propanol, methanol or acetone.
  • step 1 the ball-milling mixing is performed on a roller ball mill for 1-48 hours, and the first composite powder is obtained after drying;
  • the ball-milling and mixing in step 3 is ball-milling and mixing on a planetary ball mill for 2 to 12 hours to obtain second composite particles.
  • the heating rate of the high-temperature sintering is 5-10°C/min
  • the temperature of the high-temperature sintering is 1200-1700°C
  • the pressure of the high-temperature sintering is 0.1-1MPa
  • the time of the high-temperature sintering is 1- 4h.
  • the ball milling speed of the planetary ball mill is 250 r/min.
  • a third aspect of the present application provides the application of alumina composite ceramics as electronic component materials.
  • the first composite particles are obtained by spray granulation of the first composite powder mixed with Al 2 O 3 , Y 2 O 3 and m-ZrO 2 , and the first composite particles are obtained by dry ball milling of the first composite particles and AlN particles.
  • the second composite particle the particle size of the first composite particle is 50 ⁇ m-70 ⁇ m, the particle size of the AlN particle is 0.5 ⁇ m, the particle size of the composite particle is much larger than that of the AlN particle, so adding a small amount of AlN particle can make the AlN particle distribution
  • the AlN particles are prevented from being wrapped by the composite particles, so that the AlN can fully exert its thermal conductivity; further, the present application also attaches the AlN particles to the surface of the second composite particles, and molds them on the alumina composite ceramics.
  • the three-dimensional network structure distribution of AlN is formed in the composite, which reduces the scattering of heat in the ceramic, thereby further improving the thermal conductivity of the alumina composite ceramic.
  • the first composite particles are obtained by spray granulation of the first composite powder after mixing Al 2 O 3 , Y 2 O 3 and m-ZrO 2 , and the first composite particles are obtained by dry ball milling of the first composite particles and AlN particles.
  • the second composite particle; the particle size of the first composite particle is 50 ⁇ m-70 ⁇ m, the particle size of the AlN particle is 0.5 ⁇ m, and the particle size of the composite particle is much larger than that of the AlN particle, which avoids the AlN particle being compounded when a small amount of AlN is added.
  • Powder wrapping reduces the addition amount of aluminum nitride in the alumina composite ceramic, thereby reducing the sintering temperature and sintering cost of the alumina composite ceramic.
  • Fig. 1 is the sample crystal phase microscope photograph prepared by the embodiment of the application.
  • Fig. 2 is the SEM photo of the sample prepared by the embodiment of the application and the corresponding element distribution diagram
  • FIG. 3 is a black-and-white comparison of the SEM photo and the corresponding element distribution diagram shown in FIG. 2 .
  • the present application provides an alumina composite ceramic and a preparation method and application thereof, which are used to solve the problems of high sintering cost caused by low mechanical properties, low thermal conductivity and high sintering temperature of alumina ceramics.
  • the particle size of Al 2 O 3 used in the following examples is 1 ⁇ m, the particle size of m-ZrO 2 is 1 ⁇ m, the particle size of Y 2 O 3 is 2 ⁇ m, and the particle size of AlN is 0.5 ⁇ m. More than 99%.
  • Embodiment 1 of the present application provides the first alumina composite ceramic, and its specific preparation method is as follows:
  • Embodiment 2 of the present application provides a second alumina composite ceramic, and its specific preparation method is as follows:
  • Embodiment 3 of the present application provides a third alumina composite ceramic, and its specific preparation method is as follows:
  • Embodiment 4 of the present application provides the fourth alumina composite ceramic, and its specific preparation method is as follows:
  • Comparative example 1 of the present application provides a kind of alumina ceramics, and its concrete preparation method is as follows:
  • alumina ceramic body into the boron nitride crucible, then put the boron nitride crucible into the sintering furnace, fill the sintering furnace with N 2 as a protective gas, under the sintering pressure of 0.1MPa, with 10 After heating to 1800°C for 2 hours at a rate of °C/min, alumina ceramics were obtained.
  • Comparative example 2 of the present application provides a kind of alumina composite ceramics, and its concrete preparation method is as follows:
  • the composite powder body is molded to obtain the alumina composite ceramic body
  • Example 5 of the present application is to conduct room temperature bending strength, fracture toughness and thermal conductivity tests on the alumina composite ceramics and alumina ceramics prepared in Examples 1-4 and Comparative Example 1.
  • Room temperature flexural strength test use ASTM C 1684-2008 "Standard Test Method for Flexural Strength of Advanced Ceramics at Room Temperature" for testing;
  • Fracture toughness test use ASTM C 1421-2009 "Fracture Toughness Test of Advanced Ceramics at Room Temperature” for testing;
  • Al 2 O 3 , Y 2 O 3 and m-ZrO 2 are mixed by ball milling and then spray granulated into composite particles with a particle size of 50 ⁇ m-70 ⁇ m, and then the The composite particles are ball - milled with AlN with a particle size of 0.5 ⁇ m, so that the small AlN particles are distributed on the surface of the large composite particles.
  • the present application also attaches AlN particles to the surface of the second composite particles, and forms a three-dimensional AlN in the material by molding
  • the distribution of the network structure shows that the Al, O, Zr elements are evenly distributed, while the N element distribution is approximately circular, which proves that AlN forms a three-dimensional network structure in the matrix.
  • the connected three-dimensional network AlN can reduce the heat scattering between Al 2 O 3 grains and Al 2 O 3 grains, and between Al 2 O 3 grains and AlN grains, thereby further improving the thermal conductivity of alumina composite ceramics .

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Abstract

The present application pertains to the technical field of ceramic materials, and in particular relates to an alumina composite ceramic, a preparation method therefor, and an application thereof. The present application provides an alumina composite ceramic. The alumina composite ceramic is composed of composite particles and AlN particles. The composite particles are composed of Al 2O 3, Y 2O 3, and m-ZrO 2. The AlN particles are attached to the surface of the composite particles. A three-dimensional network distribution of AlN is formed by molding in the alumina composite ceramic. By means of the above structure and composition, the alumina composite ceramic, the preparation method therefor, and the application thereof provided by the present application provides can effectively solve the technical problem of high sintering costs caused by low mechanical properties, low thermal conductivity, and high sintering temperatures of existing alumina ceramics.

Description

一种氧化铝复合陶瓷及其制备方法和应用A kind of alumina composite ceramic and its preparation method and application 技术领域technical field
本申请属于陶瓷材料的技术领域,尤其涉及一种氧化铝复合陶瓷及其制备方法和应用。The application belongs to the technical field of ceramic materials, and in particular relates to an alumina composite ceramic and a preparation method and application thereof.
背景技术Background technique
随着科技的发展,印刷电路板(PCB)已经成为一种不可或缺的电子部件。自20世纪90年代以来,世界各国已逐渐将印刷电路板改称为电子基板(Electronic Substrate),标志着传统的印刷电路板已进入了多层基板时代。电子线路日益趋向密集化与微型化,导热问题已成为妨碍印刷电路板进一步发展的瓶颈之一。With the development of science and technology, the printed circuit board (PCB) has become an indispensable electronic component. Since the 1990s, countries around the world have gradually renamed printed circuit boards as electronic substrates, marking that traditional printed circuit boards have entered the era of multi-layer substrates. Electronic circuits are increasingly dense and miniaturized, and thermal conductivity has become one of the bottlenecks hindering the further development of printed circuit boards.
现有技术中,无机基板多以Al 2O 3陶瓷材料为基材,由于纯氧化铝陶瓷的烧结温度在1800℃以上,烧结成本较高;为了降低烧结成本,通常会加入烧结助剂降低烧结温度,可这些烧结助剂的导热性能较低,同时在烧结后形成较厚的晶界相,这导致Al 2O 3陶瓷基板的热导率大多在20~26W·m-1·K-1;为提高Al 2O 3陶瓷基板的热导率,在烧结过程中,通常会进一步添加AlN微粒作为高热导相,但烧结后的AlN晶粒被Al 2O 3晶粒所包裹住,AlN微粒的作用有限,往往需要添加大量(>30wt%)的AlN微粒才能提高Al 2O 3陶瓷的热导率,可AlN微粒的烧结温度也在1800℃以上,这种添加大量AlN微粒的氧化铝陶瓷很难在1700℃以下烧结致密,造成氧化铝陶瓷烧结成本依然很高。同时,氧化铝陶瓷的室温弯曲强度在300~450MPa之间,力学性能不高。 In the prior art, the inorganic substrates are mostly made of Al 2 O 3 ceramic materials. Since the sintering temperature of pure alumina ceramics is above 1800°C, the sintering cost is relatively high; in order to reduce the sintering cost, a sintering aid is usually added to reduce the sintering However, the thermal conductivity of these sintering aids is relatively low, and at the same time, a thicker grain boundary phase is formed after sintering, which leads to the thermal conductivity of Al 2 O 3 ceramic substrates mostly in the range of 20-26W·m-1·K-1 ; In order to improve the thermal conductivity of the Al 2 O 3 ceramic substrate, in the sintering process, AlN particles are usually added as a high thermal conductivity phase, but the sintered AlN grains are wrapped by Al 2 O 3 grains, and the AlN particles are The role of AlN particles is limited, and it is often necessary to add a large amount (>30wt%) of AlN particles to improve the thermal conductivity of Al 2 O 3 ceramics. The sintering temperature of AlN particles is also above 1800 ° C. This kind of alumina ceramics with a large amount of AlN particles added It is difficult to sinter and densify below 1700 °C, resulting in a still high sintering cost of alumina ceramics. At the same time, the room temperature bending strength of alumina ceramics is between 300 and 450MPa, and the mechanical properties are not high.
发明内容SUMMARY OF THE INVENTION
有鉴于此,本申请提供了一种氧化铝复合陶瓷及其制备方法和应用,用于解决氧化铝陶瓷力学性能低、热导率低、烧结温度高导致的烧结成本高的技术问题。In view of this, the present application provides an alumina composite ceramic and a preparation method and application thereof, which are used to solve the technical problems of high sintering cost caused by low mechanical properties, low thermal conductivity and high sintering temperature of alumina ceramics.
本申请第一方面提供了一种氧化铝复合陶瓷,由复合微粒和AlN微粒组成;A first aspect of the present application provides an alumina composite ceramic, which is composed of composite particles and AlN particles;
所述复合微粒的粒径为50μm-70μm,所述AlN微粒的粒径为0.5μm;The particle size of the composite particles is 50 μm-70 μm, and the particle size of the AlN particles is 0.5 μm;
所述复合微粒由Al 2O 3、Y 2O 3、m-ZrO 2组成; The composite particles are composed of Al 2 O 3 , Y 2 O 3 and m-ZrO 2 ;
所述AlN微粒分布在所述复合微粒的表面。The AlN particles are distributed on the surface of the composite particles.
作为优选,所述AlN微粒成三维网状结构分布在所述复合微粒表面。Preferably, the AlN particles are distributed on the surface of the composite particles in a three-dimensional network structure.
作为优选,以质量份计,所述氧化铝复合陶瓷各部分按以下配比组成;Preferably, in parts by mass, each part of the alumina composite ceramic is composed of the following proportions;
复合微粒  85-95份;Composite particles 85-95 copies;
AlN微粒   5-15份。AlN particles 5-15 parts.
作为优选,以质量份计,所述复合微粒由以下原料组成;Preferably, in parts by mass, the composite particles are composed of the following raw materials;
Al 2O 3       80.7-84.5份; Al 2 O 3 80.7-84.5 parts;
m-ZrO 2      12.7-14.6份; 12.7-14.6 parts of m-ZrO 2 ;
Y 2O 3        0.7-2.7份。 Y 2 O 3 0.7-2.7 parts.
本申请第二方面提供了一种氧化铝复合陶瓷的制备方法,包括步骤:A second aspect of the present application provides a method for preparing an alumina composite ceramic, comprising the steps of:
步骤1、将Al 2O 3、Y 2O 3和m-ZrO 2加入溶剂进行球磨混合,干燥后获得第一复合粉体; Step 1, adding Al 2 O 3 , Y 2 O 3 and m-ZrO 2 to a solvent, performing ball milling and mixing, and drying to obtain a first composite powder;
步骤2、将所述第一复合粉体喷雾造粒得到第一复合微粒;Step 2, spray granulating the first composite powder to obtain first composite particles;
步骤3、将所述第一复合微粒与AlN微粒干法球磨混合得到第二复合微粒;Step 3. Dry ball milling the first composite particles and AlN particles to obtain second composite particles;
步骤4、将所述第二复合微粒模压得到氧化铝陶瓷胚体;Step 4, molding the second composite particles to obtain an alumina ceramic body;
步骤5、将所述氧化铝陶瓷胚体在保护气氛下进行高温烧结,得到所述氧化铝陶瓷;Step 5, sintering the alumina ceramic body at a high temperature under a protective atmosphere to obtain the alumina ceramic;
所述第一复合颗粒的粒径为50μm-70μm,所述AlN微粒的粒径为0.5μm。The particle size of the first composite particles is 50 μm-70 μm, and the particle size of the AlN particles is 0.5 μm.
作为优选,所述溶剂为乙醇、丙醇、甲醇或丙酮中的一种或多种。Preferably, the solvent is one or more of ethanol, propanol, methanol or acetone.
作为优选,步骤1中所述球磨混合为在辊式球磨机上球磨混合1~48h,干燥后获得第一复合粉体;Preferably, in step 1, the ball-milling mixing is performed on a roller ball mill for 1-48 hours, and the first composite powder is obtained after drying;
步骤3中所述球磨混合为在行星式球磨机上球磨混合2~12h,得第二复合微粒。The ball-milling and mixing in step 3 is ball-milling and mixing on a planetary ball mill for 2 to 12 hours to obtain second composite particles.
作为优选,所述高温烧结的升温速率为5-10℃/min,所述高温烧结的温度为1200-1700℃,所述高温烧结的压力为0.1-1MPa,所述高温烧结的时间为1-4h。Preferably, the heating rate of the high-temperature sintering is 5-10°C/min, the temperature of the high-temperature sintering is 1200-1700°C, the pressure of the high-temperature sintering is 0.1-1MPa, and the time of the high-temperature sintering is 1- 4h.
作为优选,所述行星式球磨机的球磨转速为250r/min。Preferably, the ball milling speed of the planetary ball mill is 250 r/min.
本申请第三方面提供了氧化铝复合陶瓷作为电子元器件材料的应用。A third aspect of the present application provides the application of alumina composite ceramics as electronic component materials.
与现有技术相比,本申请具有以下有益效果:Compared with the prior art, the present application has the following beneficial effects:
1、本申请通过将Al 2O 3和m-ZrO 2、Y 2O 3混合后高温烧结,AlN与Al 2O 3在烧结时,会生成少量的Al 6O 3N 4、Al 7O 3N 5、Al 8O 3N 6作为增强相,可显著提高氧化铝陶瓷的力学性能。 1. In the present application, by mixing Al 2 O 3 with m-ZrO 2 and Y 2 O 3 and then sintering at high temperature, when AlN and Al 2 O 3 are sintered, a small amount of Al 6 O 3 N 4 and Al 7 O 3 will be formed N 5 and Al 8 O 3 N 6 as reinforcing phases can significantly improve the mechanical properties of alumina ceramics.
2、本申请通过将Al 2O 3、Y 2O 3和m-ZrO 2混合后的第一复合粉体喷雾造粒得到第一复合微粒,将第一复合微粒与AlN微粒干法球磨混合得到第二复合微粒,第一复合微粒的粒径为50μm-70μm,AlN微粒的粒径为0.5μm,复合微粒的粒径远大于AlN颗粒的粒径,从而添加少量AlN颗粒便可使AlN颗粒分布在复合微粒的表面,避免了AlN颗粒被复合微粒包裹,进而使AlN能充分发挥其导热性能;进一步的,本申请还通过将AlN微粒附着在第二复合微粒表面,通过模压在氧化铝复合陶瓷中形成AlN的三维网状结构分布,降低了热量在陶瓷中的散射,从而进一步提高了氧化铝复合陶瓷的热导性能。 2. In the present application, the first composite particles are obtained by spray granulation of the first composite powder mixed with Al 2 O 3 , Y 2 O 3 and m-ZrO 2 , and the first composite particles are obtained by dry ball milling of the first composite particles and AlN particles. The second composite particle, the particle size of the first composite particle is 50μm-70μm, the particle size of the AlN particle is 0.5μm, the particle size of the composite particle is much larger than that of the AlN particle, so adding a small amount of AlN particle can make the AlN particle distribution On the surface of the composite particles, the AlN particles are prevented from being wrapped by the composite particles, so that the AlN can fully exert its thermal conductivity; further, the present application also attaches the AlN particles to the surface of the second composite particles, and molds them on the alumina composite ceramics. The three-dimensional network structure distribution of AlN is formed in the composite, which reduces the scattering of heat in the ceramic, thereby further improving the thermal conductivity of the alumina composite ceramic.
3、本申请通过将Al 2O 3、Y 2O 3和m-ZrO 2混合后的第一复合粉体喷雾造粒得到第一复合微粒,将第一复合微粒与AlN微粒干法球磨混合得到第二复合微粒;第一复合微粒的粒径为50μm-70μm,AlN微粒的粒径为0.5μm,复合微粒的粒径远大于AlN颗粒的粒径,避免了添加少量AlN时,AlN颗粒被复合粉体包裹,降低了氧化铝复合陶瓷中氮化铝的添加量,进而降低了氧化铝复合陶瓷的烧结温度和烧结成本。 3. In the present application, the first composite particles are obtained by spray granulation of the first composite powder after mixing Al 2 O 3 , Y 2 O 3 and m-ZrO 2 , and the first composite particles are obtained by dry ball milling of the first composite particles and AlN particles. The second composite particle; the particle size of the first composite particle is 50 μm-70 μm, the particle size of the AlN particle is 0.5 μm, and the particle size of the composite particle is much larger than that of the AlN particle, which avoids the AlN particle being compounded when a small amount of AlN is added. Powder wrapping reduces the addition amount of aluminum nitride in the alumina composite ceramic, thereby reducing the sintering temperature and sintering cost of the alumina composite ceramic.
附图说明Description of drawings
为了更清楚地说明本申请实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍。In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the accompanying drawings that are required to be used in the description of the embodiments or the prior art.
图1为本申请实施例制备得到的样品晶相显微镜照片;Fig. 1 is the sample crystal phase microscope photograph prepared by the embodiment of the application;
图2为本申请实施例制备得到的样品SEM照片及相应的元素分布图;Fig. 2 is the SEM photo of the sample prepared by the embodiment of the application and the corresponding element distribution diagram;
图3为附图2所示SEM照片及相应的元素分布图的黑白对照图。FIG. 3 is a black-and-white comparison of the SEM photo and the corresponding element distribution diagram shown in FIG. 2 .
具体实施方式Detailed ways
本申请提供了一种氧化铝复合陶瓷及其制备方法和应用,用于解决氧化 铝陶瓷力学性能低、导热性能低、烧结温度高导致的烧结成本高的问题。The present application provides an alumina composite ceramic and a preparation method and application thereof, which are used to solve the problems of high sintering cost caused by low mechanical properties, low thermal conductivity and high sintering temperature of alumina ceramics.
下面将对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。The technical solutions in the embodiments of the present application will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.
以下实施例所使用的原料Al 2O 3的粒径为1μm、m-ZrO 2的粒径为1μm、Y 2O 3的粒径为2μm、AlN的粒径为0.5μm,上述原料纯度均为99%以上。 The particle size of Al 2 O 3 used in the following examples is 1 μm, the particle size of m-ZrO 2 is 1 μm, the particle size of Y 2 O 3 is 2 μm, and the particle size of AlN is 0.5 μm. More than 99%.
实施例1Example 1
本申请实施例1提供了第一种氧化铝复合陶瓷,其具体制备方法如下:Embodiment 1 of the present application provides the first alumina composite ceramic, and its specific preparation method is as follows:
1、以质量份计,将80.7份Al 2O 3、13.6份m-ZrO 2、0.7份Y 2O 3混合,以乙醇为溶剂,以Al 2O 3为球磨介质,在辊式球磨机上混合12h,经混料、干燥后获得第一复合粉体; 1. In parts by mass, mix 80.7 parts of Al 2 O 3 , 13.6 parts of m-ZrO 2 , and 0.7 parts of Y 2 O 3 , use ethanol as a solvent, and use Al 2 O 3 as a ball milling medium, and mix on a roller ball mill 12h, the first composite powder is obtained after mixing and drying;
2、将第一复合粉体放入喷雾造粒机中,喷雾造粒得到粒径为50μm的第一复合微粒;2. Put the first composite powder into a spray granulator, and spray granulation to obtain a first composite particle with a particle size of 50 μm;
3、以质量份计,将95份的第一复合微粒、5份AlN微粒在行星式球磨机上以250r/min的转速,球磨12h,得到第二复合微粒;3. In parts by mass, ball mill 95 parts of the first composite particles and 5 parts of AlN particles on a planetary ball mill at a rotational speed of 250 r/min for 12 hours to obtain the second composite particles;
4、将第二复合微粒模压得到氧化铝复合陶瓷胚体;4. Molding the second composite particles to obtain an alumina composite ceramic embryo;
5、将氧化铝复合陶瓷胚体放入氮化硼坩埚中,再将氮化硼坩埚放入烧结炉中,在烧结炉中充入N 2作为保护气体,在0.1MPa的烧结压力下,以5℃/min的速率升温至1200℃保温4h后,得到致密度为98%的氧化铝陶瓷。 5. Put the alumina composite ceramic body into the boron nitride crucible, then put the boron nitride crucible into the sintering furnace, fill the sintering furnace with N2 as a protective gas, and under the sintering pressure of 0.1MPa, to After heating at a rate of 5°C/min to 1200°C for 4 hours, an alumina ceramic with a density of 98% was obtained.
实施例2Example 2
本申请实施例2提供了第二种氧化铝复合陶瓷,其具体制备方法如下:Embodiment 2 of the present application provides a second alumina composite ceramic, and its specific preparation method is as follows:
1、以质量份计,将80.7份Al 2O 3、14.6份m-ZrO2、2.7份Y 2O 3混合,以乙醇为溶剂,以Al 2O 3为球磨介质,在辊式球磨机上混合24h,经混料、干燥后获得第一复合粉体; 1. In parts by mass, mix 80.7 parts of Al 2 O 3 , 14.6 parts of m-ZrO 2 and 2.7 parts of Y 2 O 3 , use ethanol as a solvent, and use Al 2 O 3 as a ball milling medium, and mix on a roller ball mill for 24 hours , the first composite powder is obtained after mixing and drying;
2、将第一复合粉体放入喷雾造粒机中,喷雾造粒得到粒径为50μm的第一复合微粒;2. Put the first composite powder into a spray granulator, and spray granulation to obtain a first composite particle with a particle size of 50 μm;
3、以质量份计,将92份的第一复合微粒、8份AlN微粒在行星式球磨机上以250r/min的转速,球磨8h,得到第二复合粉体;3. In parts by mass, ball mill 92 parts of the first composite particles and 8 parts of AlN particles on a planetary ball mill at a rotational speed of 250 r/min for 8 hours to obtain a second composite powder;
4、将第二复合微粒模压得到氧化铝复合陶瓷胚体;4. Molding the second composite particles to obtain an alumina composite ceramic embryo;
5、将氧化铝复合陶瓷胚体放入氮化硼坩埚中,再将氮化硼坩埚放入烧结炉中,在烧结炉中充入N 2作为保护气体,在0.1MPa的烧结压力下,以10℃/min的速率升温至1400℃保温2h后,得到致密度为98.2%的氧化铝陶瓷。 5. Put the alumina composite ceramic body into the boron nitride crucible, then put the boron nitride crucible into the sintering furnace, fill the sintering furnace with N2 as a protective gas, and under the sintering pressure of 0.1MPa, to After heating at a rate of 10°C/min to 1400°C for 2 hours, an alumina ceramic with a density of 98.2% was obtained.
实施例3Example 3
本申请实施例3提供了第三种氧化铝复合陶瓷,其具体制备方法如下:Embodiment 3 of the present application provides a third alumina composite ceramic, and its specific preparation method is as follows:
1、以质量份计,将82.5份Al 2O 3、12.3份m-ZrO2、1.2份Y 2O 3混合,以乙醇为溶剂,以Al 2O 3为球磨介质,在辊式球磨机上混合48h,经混料、干燥后获得第一复合粉体; 1. In parts by mass, mix 82.5 parts of Al 2 O 3 , 12.3 parts of m-ZrO 2 and 1.2 parts of Y 2 O 3 , use ethanol as the solvent, and use Al 2 O 3 as the ball milling medium, and mix on a roller ball mill for 48 hours , the first composite powder is obtained after mixing and drying;
2、将第一复合粉体放入喷雾造粒机中,喷雾造粒得到粒径为60μm的第一复合微粒;2. Put the first composite powder into a spray granulator, and spray granulation to obtain a first composite particle with a particle size of 60 μm;
3、以质量份计,将88份的第一复合颗粒、12份AlN微粒在行星式球磨机上以250r/min的转速,球磨6h,得到第二复合微粒;3. In parts by mass, ball mill 88 parts of the first composite particles and 12 parts of AlN particles on a planetary ball mill at a rotational speed of 250 r/min for 6 hours to obtain the second composite particles;
4、将第二复合微粒模压得到氧化铝复合陶瓷胚体;4. Molding the second composite particles to obtain an alumina composite ceramic embryo;
5、将氧化铝复合陶瓷胚体放入氮化硼坩埚中,再将氮化硼坩埚放入烧结炉中,在烧结炉中充入N 2作为保护气体,在0.1MPa的烧结压力下,以10℃/min的速率升温至1600℃保温2h后,得到致密度为99%的氧化铝陶瓷。 5. Put the alumina composite ceramic body into the boron nitride crucible, then put the boron nitride crucible into the sintering furnace, fill the sintering furnace with N2 as a protective gas, and under the sintering pressure of 0.1MPa, to After heating at a rate of 10°C/min to 1600°C for 2 hours, an alumina ceramic with a density of 99% was obtained.
实施例4Example 4
本申请实施例4提供了第四种氧化铝复合陶瓷,其具体制备方法如下:Embodiment 4 of the present application provides the fourth alumina composite ceramic, and its specific preparation method is as follows:
1、以质量份计,将82.5份Al 2O 3、14.4份m-ZrO2、2.1份Y 2O 3混合,以乙醇为溶剂,以Al 2O 3为球磨介质,在辊式球磨机上混合48h,经混料、干燥后获得第一复合粉体; 1. In parts by mass, mix 82.5 parts of Al 2 O 3 , 14.4 parts of m-ZrO 2 and 2.1 parts of Y 2 O 3 , use ethanol as the solvent, and use Al 2 O 3 as the ball milling medium, and mix on a roller ball mill for 48 hours , the first composite powder is obtained after mixing and drying;
2、将第一复合粉体放入喷雾造粒机中,喷雾造粒得到粒径为60μm的第一复合微粒;2. Put the first composite powder into a spray granulator, and spray granulation to obtain a first composite particle with a particle size of 60 μm;
3、以质量份计,将85份的第一复合微粒、15份AlN微粒在行星式球磨机上以250r/min的转速,球磨12h,得到第二复合微粒;3. In parts by mass, ball mill 85 parts of the first composite particles and 15 parts of AlN particles on a planetary ball mill at a rotational speed of 250 r/min for 12 hours to obtain the second composite particles;
4、将第二复合微粒模压得到氧化铝复合陶瓷胚体;4. Molding the second composite particles to obtain an alumina composite ceramic embryo;
5、将氧化铝复合陶瓷胚体放入氮化硼坩埚中,再将氮化硼坩埚放入烧结炉中,在烧结炉中充入N 2作为保护气体,在0.1MPa的烧结压力下,以10℃/min 的速率升温至1700℃保温2h后,得到致密度为97.2%的氧化铝陶瓷。 5. Put the alumina composite ceramic body into the boron nitride crucible, then put the boron nitride crucible into the sintering furnace, fill the sintering furnace with N2 as a protective gas, and under the sintering pressure of 0.1MPa, to After heating at a rate of 10°C/min to 1700°C for 2 hours, an alumina ceramic with a density of 97.2% was obtained.
对比例1:Comparative Example 1:
本申请对比例1提供了一种氧化铝陶瓷,其具体制备方法如下:Comparative example 1 of the present application provides a kind of alumina ceramics, and its concrete preparation method is as follows:
1、将Al 2O 3微粒模压得到氧化铝陶瓷胚体; 1. Molding Al 2 O 3 particles to obtain an alumina ceramic body;
2、将氧化铝陶瓷胚体放入氮化硼坩埚中,再将氮化硼坩埚放入烧结炉中,在烧结炉中充入N 2作为保护气体,在0.1MPa的烧结压力下,以10℃/min的速率升温至1800℃保温2h后,得到氧化铝陶瓷。 2. Put the alumina ceramic body into the boron nitride crucible, then put the boron nitride crucible into the sintering furnace, fill the sintering furnace with N 2 as a protective gas, under the sintering pressure of 0.1MPa, with 10 After heating to 1800°C for 2 hours at a rate of ℃/min, alumina ceramics were obtained.
对比例2:Comparative Example 2:
本申请对比例2提供了一种氧化铝复合陶瓷,其具体制备方法如下:Comparative example 2 of the present application provides a kind of alumina composite ceramics, and its concrete preparation method is as follows:
1、以质量份计,将82.5份Al 2O 3、14.4份m-ZrO2、3.1份Y 2O 3,以乙醇为溶剂,以Al 2O 3为球磨介质,在辊式球磨机上混合24h,经混料、干燥后获得复合粉体; 1. In parts by mass, 82.5 parts of Al 2 O 3 , 14.4 parts of m-ZrO 2 and 3.1 parts of Y 2 O 3 were mixed on a roller ball mill for 24 hours using ethanol as a solvent and Al 2 O 3 as a ball milling medium. The composite powder is obtained after mixing and drying;
2、复合粉体模压得到氧化铝复合陶瓷胚体;2. The composite powder body is molded to obtain the alumina composite ceramic body;
3、将氧化铝复合陶瓷胚体放入氧化铝坩埚中,再将氧化铝坩埚放入马弗炉中,以10℃/min的速率升温至1800℃保温2h后,得到氧化铝陶瓷。3. Put the alumina composite ceramic embryo into an alumina crucible, then put the alumina crucible into a muffle furnace, and heat up to 1800°C at a rate of 10°C/min for 2 hours to obtain alumina ceramics.
实时例5:Real time example 5:
本申请实施例5是对实施例1-4、对比例1制备的氧化铝复合陶瓷和氧化铝陶瓷进行室温抗弯强度、断裂韧性、热导率试验。Example 5 of the present application is to conduct room temperature bending strength, fracture toughness and thermal conductivity tests on the alumina composite ceramics and alumina ceramics prepared in Examples 1-4 and Comparative Example 1.
1、室温抗弯强度测试:采用ASTM C 1684-2008《室温下高级陶瓷抗弯强度的标准试验方法》进行测试;1. Room temperature flexural strength test: use ASTM C 1684-2008 "Standard Test Method for Flexural Strength of Advanced Ceramics at Room Temperature" for testing;
2、断裂韧性测试:采用ASTM C 1421-2009《室温下高级陶瓷断裂韧性测》进行测试;2. Fracture toughness test: use ASTM C 1421-2009 "Fracture Toughness Test of Advanced Ceramics at Room Temperature" for testing;
3、热导率测试:采用ASTM D 5470-2012《热导性电绝缘材料的热传输特性的标准试验方法》进行测试。3. Thermal conductivity test: ASTM D 5470-2012 "Standard Test Method for Heat Transfer Characteristics of Thermally Conductive Electrical Insulating Materials" is used for testing.
试验结果表1所示:The test results are shown in Table 1:
表1Table 1
Figure PCTCN2021117498-appb-000001
Figure PCTCN2021117498-appb-000001
从本申请实施例1-4和对比例1可以理解的是,通过在氧化铝中添加烧结助剂和氮化铝,可以生成Al 6O 3N 4、Al 7O 3N 5、Al 8O 3N 6作为增强相,进而提高氧化铝陶瓷的室内抗弯强度、断裂韧性等力学性能;通过将Al 2O 3、Y 2O 3和m-ZrO 2混合后的第一复合粉体喷雾造粒得到复合微粒,将复合微粒与AlN颗粒干法球磨混合得到第二复合微粒,使添加少量的AlN便可使AlN颗粒分布在复合微粒的表面,降低了氧化铝陶瓷中AlN的添加量,进而降低了氧化铝复合陶瓷的烧结温度和烧结成本。 It can be understood from Examples 1-4 of the present application and Comparative Example 1 that, by adding a sintering aid and aluminum nitride to alumina, Al 6 O 3 N 4 , Al 7 O 3 N 5 , and Al 8 O can be generated 3 N 6 is used as a reinforcing phase to improve the mechanical properties such as indoor bending strength and fracture toughness of alumina ceramics ; The composite particles are obtained by dry ball milling the composite particles and AlN particles to obtain the second composite particles, so that adding a small amount of AlN can make the AlN particles distribute on the surface of the composite particles, reducing the amount of AlN added in the alumina ceramics, and then The sintering temperature and sintering cost of alumina composite ceramics are reduced.
从上述实施例及附图可以理解的是,本申请通过将Al 2O 3、Y 2O 3和m-ZrO 2球磨混合后喷雾造粒成粒径为50μm-70μm的复合颗粒,再将该复合颗粒与粒径为0.5μm的AlN球磨,使小颗粒的AlN颗粒分布在大颗粒的复合微粒的表面,如附图1所示的晶相显微镜照片,白色相AlN包裹了浅灰色Al 2O 3复合相,进而使AlN能够发挥其高导热性能,提高了氧化铝复合陶瓷的导热性能;进一步的,本申请还将AlN微粒附着在第二复合微粒表面,通过模压在材料中形成AlN的三维网状结构分布,如附图2所示的SEM照片及相应的元素分布图,Al、O、Zr元素分布均匀,而N元素分布近似圆形,证明AlN在基体中形成了三维网络状结构,由于热量在AlN晶粒与AlN晶粒之间发生的散射要远远小于热量在AlN晶粒与Al 2O 3晶粒、Al 2O 3晶粒与Al 2O 3晶粒之间的散射,联通的三维网络状AlN可以减少热量在Al 2O 3晶粒与Al 2O 3晶粒、Al 2O 3晶粒与AlN晶粒之间的散射,从而进一步提高了氧化铝复合陶瓷的导热效果。 It can be understood from the above examples and accompanying drawings that in the present application, Al 2 O 3 , Y 2 O 3 and m-ZrO 2 are mixed by ball milling and then spray granulated into composite particles with a particle size of 50 μm-70 μm, and then the The composite particles are ball - milled with AlN with a particle size of 0.5 μm, so that the small AlN particles are distributed on the surface of the large composite particles. 3 composite phases, so that AlN can exert its high thermal conductivity and improve the thermal conductivity of alumina composite ceramics; further, the present application also attaches AlN particles to the surface of the second composite particles, and forms a three-dimensional AlN in the material by molding The distribution of the network structure, as shown in the SEM photo and the corresponding element distribution diagram in Figure 2, shows that the Al, O, Zr elements are evenly distributed, while the N element distribution is approximately circular, which proves that AlN forms a three-dimensional network structure in the matrix. Since the heat scattering between AlN grains and AlN grains is much smaller than the heat scattering between AlN grains and Al 2 O 3 grains, Al 2 O 3 grains and Al 2 O 3 grains, The connected three-dimensional network AlN can reduce the heat scattering between Al 2 O 3 grains and Al 2 O 3 grains, and between Al 2 O 3 grains and AlN grains, thereby further improving the thermal conductivity of alumina composite ceramics .
以上所述仅是本申请的优选实施方式,应当指出,对于本技术领域的普 通技术人员来说,在不脱离本申请原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本申请的保护范围。The above are only the preferred embodiments of the present application. It should be pointed out that for those skilled in the art, without departing from the principles of the present application, several improvements and modifications can be made. It should be regarded as the protection scope of this application.

Claims (10)

  1. 一种氧化铝复合陶瓷,其特征在于,由复合微粒和AlN微粒组成;An alumina composite ceramic, characterized in that it is composed of composite particles and AlN particles;
    所述复合微粒的粒径为50μm-70μm,所述AlN微粒的粒径为0.5μm;The particle size of the composite particles is 50 μm-70 μm, and the particle size of the AlN particles is 0.5 μm;
    所述复合微粒由Al 2O 3、Y 2O 3、m-ZrO 2组成; The composite particles are composed of Al 2 O 3 , Y 2 O 3 and m-ZrO 2 ;
    所述AlN微粒分布在所述复合微粒的表面。The AlN particles are distributed on the surface of the composite particles.
  2. 根据权利要求1所述的氧化铝复合陶瓷,其特征在于,所述AlN微粒成三维网状结构分布在所述复合微粒表面。The alumina composite ceramic according to claim 1, wherein the AlN particles are distributed on the surface of the composite particles in a three-dimensional network structure.
  3. 根据权利要求1所述的氧化铝复合陶瓷,其特征在于,以质量份计,所述氧化铝复合陶瓷各部分按以下配比组成;The alumina composite ceramic according to claim 1, wherein, in parts by mass, each part of the alumina composite ceramic is composed of the following proportions;
    复合微粒      85-95份;85-95 copies of composite particles;
    AlN微粒       5-15份;5-15 AlN particles;
    以质量份计,所述复合微粒由以下原料组成;In parts by mass, the composite particles are composed of the following raw materials;
    Al 2O 3       80.7-84.5份; Al 2 O 3 80.7-84.5 parts;
    m-ZrO 2     12.7-14.6份; 12.7-14.6 parts of m-ZrO 2 ;
    Y 2O 3         0.7-2.7份。 Y 2 O 3 0.7-2.7 parts.
  4. 一种氧化铝复合陶瓷的制备方法,其特征在于,包括步骤:A preparation method of alumina composite ceramics, characterized in that, comprising the steps of:
    步骤1、将Al 2O 3、Y 2O 3和m-ZrO 2加入溶剂进行球磨混合,干燥后获得第一复合粉体,按质量份计,Al2O3、Y2O3和m-ZrO2的原料配比分别为:Al2O3为80.7-84.5份;m-ZrO2为12.7-14.6份;Y2O3为0.7-2.7份; Step 1. Add Al 2 O 3 , Y 2 O 3 and m-ZrO 2 into a solvent for ball milling and mixing, and obtain a first composite powder after drying. In parts by mass, the raw material ratios of Al 2 O 3 , Y 2 O 3 and m-ZrO 2 are respectively It is: Al2O3 is 80.7-84.5 parts; m-ZrO2 is 12.7-14.6 parts; Y2O3 is 0.7-2.7 parts;
    步骤2、将所述第一复合粉体喷雾造粒得到第一复合微粒;Step 2, spray granulating the first composite powder to obtain first composite particles;
    步骤3、将所述第一复合微粒与AlN微粒干法球磨混合得到第二复合微粒;Step 3. Dry ball milling the first composite particles and AlN particles to obtain second composite particles;
    步骤4、将所述第二复合微粒在保护气氛下进行高温烧结,得到所述氧化铝复合陶瓷;Step 4, sintering the second composite particles at a high temperature under a protective atmosphere to obtain the alumina composite ceramic;
    所述第一复合颗粒的粒径为50μm-70μm,所述AlN微粒的粒径为0.5μm。The particle size of the first composite particles is 50 μm-70 μm, and the particle size of the AlN particles is 0.5 μm.
  5. 根据权利要求4所述的一种氧化铝复合陶瓷的制备方法,其特征在于,所述步骤3之后具体包括:A kind of preparation method of alumina composite ceramics according to claim 4, is characterized in that, after described step 3 specifically comprises:
    将所述第二复合微粒模压得到氧化铝复合陶瓷胚体,将所述氧化铝复合陶瓷胚体在保护气氛下进行高温烧结,得到所述氧化铝复合陶瓷。The alumina composite ceramic body is obtained by molding the second composite particles, and the alumina composite ceramic body is sintered at a high temperature under a protective atmosphere to obtain the alumina composite ceramic body.
  6. 根据权利要求4或5所述的氧化铝复合陶瓷的制备方法,其特征在于, 所述溶剂为乙醇、丙醇、甲醇或丙酮中的一种或多种。The method for preparing alumina composite ceramics according to claim 4 or 5, wherein the solvent is one or more of ethanol, propanol, methanol or acetone.
  7. 根据权利要求4或5所述的氧化铝复合陶瓷的制备方法,其特征在于,The preparation method of alumina composite ceramics according to claim 4 or 5, wherein,
    步骤1中所述球磨混合为在辊式球磨机上球磨混合1~48h,干燥后获得第一复合粉体;In step 1, the ball-milling mixing is performed on a roller ball mill for 1-48 hours, and the first composite powder is obtained after drying;
    步骤3中所述球磨混合为在行星式球磨机上球磨混合2~12h,获得第二复合微粒。The ball-milling and mixing in step 3 is ball-milling and mixing on a planetary ball mill for 2 to 12 hours to obtain second composite particles.
  8. 根据权利要求4或5所述的氧化铝复合陶瓷的制备方法,其特征在于,所述高温烧结的升温速率为5-10℃/min,所述高温烧结的温度为1200-1700℃,所述高温烧结的压力为0.1-1MPa,所述高温烧结的时间为1-4h。The preparation method of alumina composite ceramics according to claim 4 or 5, characterized in that, the heating rate of the high-temperature sintering is 5-10°C/min, the temperature of the high-temperature sintering is 1200-1700°C, and the The pressure of high temperature sintering is 0.1-1MPa, and the time of the high temperature sintering is 1-4h.
  9. 根据权利要求7所述的氧化铝复合陶瓷的制备方法,其特征在于,所述行星式球磨机的球磨转速为250r/min。The method for preparing alumina composite ceramics according to claim 7, wherein the ball milling speed of the planetary ball mill is 250 r/min.
  10. 根据权利要求1-3任一项所述的氧化铝复合陶瓷或权利要求4-9任一项所述的氧化铝复合陶瓷的制备方法制备的氧化铝复合陶瓷作为电子元器件材料的应用。Application of the alumina composite ceramic according to any one of claims 1-3 or the preparation method of the alumina composite ceramic according to any one of claims 4-9 as an electronic component material.
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