WO2022093147A3 - System and method for increasing the performance and safety coefficients by applying homogeneous heating structures to micro/nano devices - Google Patents

System and method for increasing the performance and safety coefficients by applying homogeneous heating structures to micro/nano devices Download PDF

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Publication number
WO2022093147A3
WO2022093147A3 PCT/TR2021/050084 TR2021050084W WO2022093147A3 WO 2022093147 A3 WO2022093147 A3 WO 2022093147A3 TR 2021050084 W TR2021050084 W TR 2021050084W WO 2022093147 A3 WO2022093147 A3 WO 2022093147A3
Authority
WO
WIPO (PCT)
Prior art keywords
micro
homogeneous heating
nano devices
dimensional
performance
Prior art date
Application number
PCT/TR2021/050084
Other languages
French (fr)
Other versions
WO2022093147A2 (en
Inventor
Hasan GÖKTAŞ
Original Assignee
Goektas Hasan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Goektas Hasan filed Critical Goektas Hasan
Publication of WO2022093147A2 publication Critical patent/WO2022093147A2/en
Publication of WO2022093147A3 publication Critical patent/WO2022093147A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0083—Temperature control
    • B81B7/009—Maintaining a constant temperature by heating or cooling
    • B81B7/0096—Maintaining a constant temperature by heating or cooling by heating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0252—Constructional arrangements for compensating for fluctuations caused by, e.g. temperature, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a photometer; Purge systems, cleaning devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/38—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids
    • G01J5/44—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids using change of resonant frequency, e.g. of piezoelectric crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0207—Bolometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • G01J2005/063—Heating; Thermostating

Abstract

This invention is used in night vision technology, agriculture and food industries, gas detection technology, medical imaging, and pollution detection, temperature sensor in micro/nano devices, infrared detection (IR) applications, portable biosensors, any system using micro/nano devices (resonators, filters, sensors, actuators, etc.) are about the system and method to increase the performance and safety coefficients by applying homogeneous heating structures to micro/nano devices characterized in that it comprises of; a homogeneous heating system (1) that can be of any shape such as triangular and/or square and/or ring and/or circle and/or rectangle and can be produced from alloy and/or composite and/or any material and can be a 3-dimensional or 2-dimensional or 1-dimensional or 0-dimensional structure or formed by the merger of these structures and connecting the voltage (v) to one end of the sidebar and the ground (gnd) to the other end (10), determining the points where the temperature of the side connections is highest (20), creation of a homogeneous heating system (1) by connecting it to the structure or system at the points where the temperatures of one or more sidebars are the highest, depending on the shape of any structure or system, and thus homogeneously heating (30).
PCT/TR2021/050084 2020-10-28 2021-01-29 System and method for increasing the performance and safety coefficients by applying homogeneous heating structures to micro/nano devices WO2022093147A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TR2020/17251A TR202017251A1 (en) 2020-10-28 2020-10-28 SYSTEM AND METHOD TO INCREASE PERFORMANCE AND SAFETY COEFFICIENTS BY APPLICATION OF HOMOGENEOUS HEATING STRUCTURES TO MICRO/NANO DEVICES
TR2020/17251 2020-10-28

Publications (2)

Publication Number Publication Date
WO2022093147A2 WO2022093147A2 (en) 2022-05-05
WO2022093147A3 true WO2022093147A3 (en) 2022-06-02

Family

ID=81384205

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/TR2021/050084 WO2022093147A2 (en) 2020-10-28 2021-01-29 System and method for increasing the performance and safety coefficients by applying homogeneous heating structures to micro/nano devices

Country Status (2)

Country Link
TR (1) TR202017251A1 (en)
WO (1) WO2022093147A2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050195050A1 (en) * 2004-03-04 2005-09-08 Markus Lutz Temperature controlled mems resonator and method for controlling resonator frequency
US20050242904A1 (en) * 2004-04-28 2005-11-03 Markus Lutz Method for adjusting the frequency of a MEMS resonator
US20150214956A1 (en) * 2014-01-24 2015-07-30 Harmony Electronics Corp. Temperature compensated mems oscillator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050195050A1 (en) * 2004-03-04 2005-09-08 Markus Lutz Temperature controlled mems resonator and method for controlling resonator frequency
US20050242904A1 (en) * 2004-04-28 2005-11-03 Markus Lutz Method for adjusting the frequency of a MEMS resonator
US20150214956A1 (en) * 2014-01-24 2015-07-30 Harmony Electronics Corp. Temperature compensated mems oscillator

Also Published As

Publication number Publication date
WO2022093147A2 (en) 2022-05-05
TR202017251A1 (en) 2022-05-23

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