TR202017251A1 - SYSTEM AND METHOD TO INCREASE PERFORMANCE AND SAFETY COEFFICIENTS BY APPLICATION OF HOMOGENEOUS HEATING STRUCTURES TO MICRO/NANO DEVICES - Google Patents

SYSTEM AND METHOD TO INCREASE PERFORMANCE AND SAFETY COEFFICIENTS BY APPLICATION OF HOMOGENEOUS HEATING STRUCTURES TO MICRO/NANO DEVICES

Info

Publication number
TR202017251A1
TR202017251A1 TR2020/17251A TR202017251A TR202017251A1 TR 202017251 A1 TR202017251 A1 TR 202017251A1 TR 2020/17251 A TR2020/17251 A TR 2020/17251A TR 202017251 A TR202017251 A TR 202017251A TR 202017251 A1 TR202017251 A1 TR 202017251A1
Authority
TR
Turkey
Prior art keywords
homogeneous heating
micro
nano devices
side connections
application
Prior art date
Application number
TR2020/17251A
Other languages
Turkish (tr)
Inventor
Göktaş Hasan
Original Assignee
Harran Ueniversitesi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harran Ueniversitesi filed Critical Harran Ueniversitesi
Priority to TR2020/17251A priority Critical patent/TR202017251A1/en
Priority to PCT/TR2021/050084 priority patent/WO2022093147A2/en
Publication of TR202017251A1 publication Critical patent/TR202017251A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0083—Temperature control
    • B81B7/009—Maintaining a constant temperature by heating or cooling
    • B81B7/0096—Maintaining a constant temperature by heating or cooling by heating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0252—Constructional arrangements for compensating for fluctuations caused by, e.g. temperature, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a photometer; Purge systems, cleaning devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/38—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids
    • G01J5/44—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids using change of resonant frequency, e.g. of piezoelectric crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0207—Bolometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • G01J2005/063—Heating; Thermostating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Resistance Heating (AREA)
  • Radiation Pyrometers (AREA)
  • Catching Or Destruction (AREA)

Abstract

Bu buluş, gece görüşü teknolojisinde, tarım ve gıda endüstrisinde, gaz algılama teknolojisinde, tıbbi görüntülemede ve kirlilik tespitinde, mikro/nano cihazlarda sıcaklık sensörü, kızılötesi algılama (IR) uygulamalarında, portatif biyosensörlerde, mikro/nano cihazların kullanıldığı herhangi bir uygulamalarında (rezonatörler, filtreler, sensörler, actuator (aktüatör) v.b.) kullanılan mikro/nano cihazlara homojen ısıtma yapılarının uygulanması ile performans ve güvenlik katsayılarının artırılmasına yönelik sistem ve yöntem ile ilgili olup, özelliği; üçgen ve/veya kare ve/veya halka ve/veya daire ve/veya dikdörtgen gibi herhangi bir şekilde olabilen, alaşım ve/veya kompozitten ve/veya herhangi bir malzemeden üretilebilen ve 3 boyutlu veya 2 boyutlu veya 1 boyutlu veya 0 boyutlu yapıda veya bu tür yapıların birleşmesi ile oluşan yapıda homojen ısıtma sisteminden (1) ve yan bağlantıların bir ucuna Voltaj (v) diğer ucuna toprak (gnd ) verilmesi (10), yan bağlantıların sıcaklığının en yüksek olduğu noktaların belirlenmesi (20), herhangi bir yapının ya da sistemin şekline bağlı olarak bir veya daha fazla yan bağlantıların sıcaklıklarının en yüksek olduğu noktalardan yapıya veya sisteme bağlayarak, homojen ısıtma sisteminin (1) oluşturulması ve dolayısıyla homojen olarak ısıtılması işlem basamaklarında meydana gelmesidir.This invention is applicable in night vision technology, agriculture and food industry, gas detection technology, medical imaging and pollution detection, temperature sensor in micro/nano devices, infrared sensing (IR) applications, portable biosensors, any applications where micro/nano devices are used (resonators, It is related to the system and method for increasing the performance and safety coefficients by applying homogeneous heating structures to micro/nano devices used in filters, sensors, actuators, etc. which can be of any shape such as triangle and/or square and/or ring and/or circle and/or rectangle, which can be produced from alloy and/or composite and/or any material, and which is 3D or 2D or 1D or 0D In the structure formed by the combination of such structures, from the homogeneous heating system (1) and voltage (v) to one end of the side connections and earth (gnd) to the other end (10), determination of the points where the temperature of the side connections is highest (20), any structure or system It is the creation of a homogeneous heating system (1) by connecting one or more side connections to the structure or system from the points where the temperatures are highest, depending on the shape, and thus, homogeneous heating occurs in the process steps.

TR2020/17251A 2020-10-28 2020-10-28 SYSTEM AND METHOD TO INCREASE PERFORMANCE AND SAFETY COEFFICIENTS BY APPLICATION OF HOMOGENEOUS HEATING STRUCTURES TO MICRO/NANO DEVICES TR202017251A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TR2020/17251A TR202017251A1 (en) 2020-10-28 2020-10-28 SYSTEM AND METHOD TO INCREASE PERFORMANCE AND SAFETY COEFFICIENTS BY APPLICATION OF HOMOGENEOUS HEATING STRUCTURES TO MICRO/NANO DEVICES
PCT/TR2021/050084 WO2022093147A2 (en) 2020-10-28 2021-01-29 System and method for increasing the performance and safety coefficients by applying homogeneous heating structures to micro/nano devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TR2020/17251A TR202017251A1 (en) 2020-10-28 2020-10-28 SYSTEM AND METHOD TO INCREASE PERFORMANCE AND SAFETY COEFFICIENTS BY APPLICATION OF HOMOGENEOUS HEATING STRUCTURES TO MICRO/NANO DEVICES

Publications (1)

Publication Number Publication Date
TR202017251A1 true TR202017251A1 (en) 2022-05-23

Family

ID=81384205

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2020/17251A TR202017251A1 (en) 2020-10-28 2020-10-28 SYSTEM AND METHOD TO INCREASE PERFORMANCE AND SAFETY COEFFICIENTS BY APPLICATION OF HOMOGENEOUS HEATING STRUCTURES TO MICRO/NANO DEVICES

Country Status (2)

Country Link
TR (1) TR202017251A1 (en)
WO (1) WO2022093147A2 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7068125B2 (en) * 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
US7102467B2 (en) * 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator
TWI558096B (en) * 2014-01-24 2016-11-11 加高電子股份有限公司 Temperature compensated mems oscillator

Also Published As

Publication number Publication date
WO2022093147A2 (en) 2022-05-05
WO2022093147A3 (en) 2022-06-02

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