WO2022077875A1 - Electron beam oscilloscope having improved temporal resolution, and measurement system thereof - Google Patents
Electron beam oscilloscope having improved temporal resolution, and measurement system thereof Download PDFInfo
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- WO2022077875A1 WO2022077875A1 PCT/CN2021/084873 CN2021084873W WO2022077875A1 WO 2022077875 A1 WO2022077875 A1 WO 2022077875A1 CN 2021084873 W CN2021084873 W CN 2021084873W WO 2022077875 A1 WO2022077875 A1 WO 2022077875A1
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- 238000010894 electron beam technology Methods 0.000 title claims abstract description 102
- 238000005259 measurement Methods 0.000 title claims abstract description 32
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- G—PHYSICS
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R13/00—Arrangements for displaying electric variables or waveforms
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- the invention relates to the field of oscilloscopes, and more particularly, to an electron beam time amplification oscilloscope and a measurement system thereof.
- ICF Inertial confinement fusion
- MCP microchannel plate
- the framing camera In recent years, a new type of framing camera has been developed at home and abroad that uses magnetic focusing imaging electron beam time magnification. For example, the Lawrence Livermore National Laboratory (LLNL) in the United States proposed to use electron beam time magnification technology to improve the time resolution, and successfully obtained an X-ray framing camera with a time resolution of 5ps.
- the framing camera first uses the electron pulse time amplification technology to expand the time width of the electron beam cluster, and then uses the traditional MCP image tube to measure the time-amplified electron beam cluster, so as to obtain high time resolution.
- the framing camera can be used as an oscilloscope to measure the waveform of electrical pulses.
- the technical problem to be solved by the present invention is to provide an electron beam time amplification oscilloscope and a measurement system thereof, aiming at the existing electron beam time amplification technology and applying it to the field of oscilloscope.
- the technical solution adopted by the present invention to solve the technical problem is: constructing an electron beam time amplification oscilloscope, which includes a microstrip cathode, an anode grid, a magnetic focusing lens, an MCP image tube, a CCD and a high-voltage pulse generator.
- the positive output terminal of the pulse generator is connected to the microstrip cathode, the negative output terminal of the high-voltage pulse generator is connected to the MCP video tube, and the anode grid is grounded; the microstrip cathode and the anode grid are connected to the ground.
- the MCP image tube and the CCD are arranged in sequence, and the microstrip cathode, the anode grid, the MCP image tube and the CCD are placed coaxially; the magnetic focusing lens is located at the anode between the grid and the MCP image tube;
- the microstrip cathode generates photoelectrons under the irradiation of incident light, a negative DC bias voltage is applied to the microstrip cathode and a high voltage ramp pulse is superimposed, and the optical pulse is synchronized on the rising edge of the high voltage ramp pulse; the generated photoelectrons pass through the anode After the grid, it enters the drift region between the anode grid and the MCP image tube, and the electron beam formed by the expansion of the photoelectrons under the action of the magnetic field of the magnetic focusing lens is imaged on the MCP image tube.
- the CCD records the visible light output by the MCP image changing tube, and then obtains the detection waveform by analyzing and processing the light spot image.
- the microstrip cathode includes a quartz glass plate and three gold cathode microstrip lines evaporated on the quartz glass plate, each of the gold cathode microstrips
- the thickness of the line is 80 nm and the width is 8 mm; the three gold cathode microstrip lines are arranged in parallel, and the interval between the adjacent gold cathode microstrip lines is 2.8 mm.
- the magnetic focusing lens includes soft iron and 1200 turns of copper coil, the outer diameter of the magnetic focusing lens is 256mm, and the inner diameter of the magnetic focusing lens is 160mm,
- the length of the magnetic focusing lens in the axial direction is 100 mm; the inner side of the circular ring of the magnetic focusing lens has a circle with a width of 4 mm.
- the MCP picture tube includes an impedance gradient line, a microchannel plate, three microstrip lines evaporated on the microchannel plate, and a phosphor screen fabricated on the fiber optic panel.
- the microstrip line faces the anode grid side
- the fluorescent screen is located between the microchannel plate and the CCD;
- the negative output end of the high voltage pulse generator is connected to the microstrip through the impedance gradient line with line;
- the outer diameter of the microchannel plate is 56mm, the thickness is 0.5mm, the channel diameter is 12 ⁇ m, and the chamfer angle is 6°; the width of the microstrip line is 8mm, and the three microstrip lines are arranged in parallel and adjacent to each other.
- the interval between the two microstrip lines is 2.8mm; the microchannel plate and the phosphor screen are placed in parallel, and the distance between the microchannel plate and the phosphor screen is 0.5mm.
- the high-voltage pulse generator includes an avalanche triode circuit and a diode pulse circuit, and the high-voltage ramp pulse generated by the avalanche triode circuit is divided into two parts, and one part passes through the impedance gradient line. Input to the microstrip cathode, and the other part is used to drive the diode pulse circuit to generate the MCP strobe.
- the microstrip cathode is connected to a first attenuator, and the first attenuator absorbs the high-voltage ramp pulse after passing through the microstrip cathode;
- the MCP becomes The microstrip line of the tube is connected to a second attenuator, and the second attenuator absorbs the MCP strobe pulse after passing through the microstrip line;
- the microstrip cathode generates photoelectrons after receiving incident light, and the photoelectrons fly to the MCP image tube under the confinement of the magnetic field of the magnetic focusing lens;
- the moment when the photoelectron with time t i reaches the MCP picture tube is:
- L is the length of the drift region
- VB is the cathode bias voltage
- VP (t) is the voltage value of the cathode pulse synchronized with the light pulse at time t;
- the electron beam time magnification M can be expressed as:
- T MCP is the time resolution of the MCP imaging tube
- the time resolution of the electron beam time amplification oscilloscope is:
- T phys is the physical time resolution, which depends on the electron transit time dispersion between the microstrip cathode and the anode grid:
- the unit of T phys is ps, where ⁇ is the initial energy distribution of photoelectrons, and the unit is eV.
- ⁇ is the initial energy distribution of photoelectrons, and the unit is eV.
- E is the The electric field strength between the microstrip cathode and the anode grid, in kV/mm;
- Lpa is the distance between the microstrip cathode and the anode grid.
- the present invention also provides an electron beam time amplification oscilloscope measurement system, including the above electron beam time amplification oscilloscope, the system further includes a laser light source, a photodetector, a delay circuit, an optical fiber bundle and a collimator, so The optical fiber bundle includes a plurality of optical fibers, and the lengths of the plurality of optical fibers are distributed in an arithmetic progression;
- the laser light source includes a first output end for outputting laser light of a first wavelength and a second output end for outputting laser light of a second wavelength, and the laser light emitted by the first output end enters the parallel light through the fiber bundle After being transmitted by the parallel light tube, it is incident on the microstrip cathode of the electron beam time amplification oscilloscope; the laser light emitted by the second output end is input to the photodetector, and the generated electrical signal is passed through the delay circuit Input the input terminal of the high voltage pulse generator of the electron beam time amplification oscilloscope after the delay.
- the optical fiber bundle includes 30 multimode optical fibers, and the 30 multimode optical fibers are arranged in a rectangle adjacent to each other, and the rectangle includes 3 rows of multimode optical fibers, and each row There are 10 multimode fibers; the lengths of 30 multimode fibers increase in arithmetic progression according to the arrangement order, and the tolerance of arithmetic progression is 2mm.
- the first wavelength laser is a 266 nm laser
- the second wavelength laser is an 800 nm laser
- an electron beam time magnifying oscilloscope and its measurement system implemented in the present invention have the following beneficial effects: the electron beam time magnifying oscilloscope of the present invention uses pulse voltage to generate electron energy dispersion, the energy dispersion obtains electron beam time magnification, and uses a magnetic focusing lens to generate Gaussian-shaped magnetic field, the magnetic field images the photoelectrons on the microstrip cathode on the microchannel plate, which improves the imaging quality of the oscilloscope, and can measure the electrical pulse waveform at the same time.
- FIG. 1 is a schematic structural diagram of an electron beam time amplification oscilloscope provided by an embodiment
- FIG. 2 is a schematic structural diagram of a high-voltage pulse generator provided by an embodiment
- FIG. 3 is a schematic structural diagram of an electron beam time amplification oscilloscope measurement system provided by an embodiment
- FIG. 4 is a schematic structural diagram of an optical fiber bundle provided by an embodiment
- Figure 5(a) is a dynamic image when only a DC voltage is applied to the microstrip cathode provided by an embodiment
- Figure 5(b) is a static image of a 10ps interval optical fiber provided by an embodiment
- Fig. 6 is the time resolution T MCP measurement result of the MCP image tube when the microstrip cathode provided by one embodiment is not pulsed;
- FIG. 7 is a schematic diagram of synchronizing the optical pulses sequentially with the ramps of the microstrip cathode pulses at different points according to an embodiment
- 11 is a measurement result of a microstrip cathode pulse waveform provided by an embodiment
- FIG. 12 shows the relationship between the limit time resolution, the theoretical value of the maximum bandwidth and the voltage between cathode and gate provided by an embodiment.
- the electron beam time amplification oscilloscope of the present embodiment includes a microstrip cathode 101 , an anode grid 102 , a magnetic focusing lens 103 , an MCP picture tube 104 , a CCD and a high-voltage pulse generator 105 , and the positive electrode of the high-voltage pulse generator 105
- the output terminal is connected to the microstrip cathode 101, the negative output terminal of the high-voltage pulse generator 105 is connected to the MCP imaging tube 104, and the anode grid 102 is grounded; the microstrip cathode 101, the anode grid 102, the MCP imaging tube 104 and the CCD are arranged in sequence, And the microstrip cathode 101 , the anode grid 102 , the MCP picture tube 104 and the CCD are placed coaxially; the magnetic focusing lens 103 is located between the anode grid 102 and the MCP picture tube 104 .
- the microstrip cathode 101 generates photoelectrons under the irradiation of incident light, and a negative DC bias voltage is applied to the microstrip cathode 101 and a high voltage ramp pulse is superimposed. Gain more energy, thereby making the electrons in front faster.
- the generated photoelectrons pass through the anode grid 102 and then enter the drift region between the anode grid 102 and the MCP image tube 104, and the electron beam formed by the photoelectrons expanded under the action of the magnetic field of the magnetic focusing lens 103 is imaged on the MCP image tube 104, and the CCD
- the visible light output by the MCP picture tube 104 is recorded. That is, the time width of the electron beam is widened to realize the time amplification of the electron beam.
- a magnetic focusing lens 103 is used to image the broadened electron beam on a microstrip line corresponding to the input surface of the MCP image tube 104 .
- the electron beam is gated and enhanced by the MCP, and hits the phosphor screen 1044 to form a visible light image, and the output visible light image is recorded and processed by a CCD. Since the electron beam is temporally broadened, a very high system temporal resolution can be obtained by using a lower temporal resolution MCP picture tube.
- the microstrip cathode 101 in the electron beam time amplification oscilloscope of this embodiment includes a quartz glass plate and three gold cathode microstrip lines evaporated on the quartz glass plate, and the positive output end of the high-voltage pulse generator 105 passes through the impedance gradient line 1041 are respectively connected to three gold cathode microstrip lines.
- the thickness of each gold cathode microstrip line is 80nm and the width is 8mm; three gold cathode microstrip lines are arranged in parallel, and the interval between adjacent gold cathode microstrip lines is 2.8mm.
- the microstrip cathode has two functions: one is the function of photocathode, which converts incident light into photoelectrons; the other is the function of microstrip line, which transmits high-voltage ramp pulses, so that there is a gap between the microstrip cathode 101 and the anode grid 102.
- the time-varying electric field realizes the time amplification of the electron beam.
- the magnetic focusing lens 103 includes soft iron and 1200 turns of copper coils, the outer diameter of the magnetic focusing lens 103 is 256 mm, the inner diameter of the magnetic focusing lens 103 is 160 mm, and the magnetic focusing lens
- the axial length of 103 is 100mm; the inner side of the ring of the magnetic focusing lens 103 has a circle with a width of 4mm, and the magnetic field enters the drift region through the 4mm slit.
- the magnetic focusing lens 103 images the photoelectrons on the cathode surface of the microstrip on the input surface of the MCP, and the imaging magnification is 1:1.
- the MCP image tube 104 in the electron beam time amplification oscilloscope of this embodiment includes an impedance gradient line 1041, a microchannel plate 1042, three microstrip lines 1043 evaporated on the microchannel plate 1042, and a
- the fluorescent screen 1044, the microstrip line 1043 faces the anode grid 102 side, and the fluorescent screen 1044 is located between the microchannel plate 1042 and the CCD;
- the outer diameter of the microchannel plate 1042 is 56mm, the thickness is 0.5mm, the channel diameter is 12 ⁇ m, and the chamfer angle is 6°;
- the width of the microstrip line 1043 is 8mm, and the three microstrip lines 1043 are arranged in parallel, and two adjacent microstrip lines 1043 are arranged in parallel.
- the interval between the strip lines 1043 is 2.8 mm; the microchannel plate 1042 and the phosphor screen 1044 are placed in parallel, and the distance between the microchannel plate 1042 and the phosphor screen 1044 is 0.5 mm.
- the microstrip cathode 101 is connected to the first attenuator 1061, and the first attenuator 1061 absorbs the high-voltage ramp pulse after passing through the microstrip cathode 101;
- the strip line 1043 is connected to the second attenuator 1062 , and the second attenuator 1062 absorbs the MCP gate pulse after passing through the microstrip line 1043 .
- the high-voltage pulse generator 105 in the electron beam time-amplified oscilloscope of the present embodiment includes an avalanche triode circuit 1051 and a diode pulse circuit 1052 .
- Input to the microstrip cathode 101, the other part is used to drive the diode pulse circuit 1052 to generate the MCP strobe.
- the time resolution of the electron beam time amplification oscilloscope in this embodiment mainly depends on the following four aspects: cathode bias voltage, cathode pulse slope, drift region length and time resolution of the MCP picture tube.
- the microstrip cathode 101 generates photoelectrons after receiving the incident light, and the photoelectrons are imaged to the MCP picture tube 104 under the action of the magnetic field of the magnetic focusing lens 103 . Ignoring the distance of 1.8 mm between the cathode grids and the photoelectron emission energy distribution, the photoelectron emission time t i arrives at the MCP image tube 104 at the moment:
- L is the length of the drift region
- VB is the cathode bias voltage
- VP (t) is the voltage value of the cathode pulse synchronized with the optical pulse at time t;
- the electron beam time magnification M can be expressed as:
- T MCP is the time resolution of the MCP imaging tube 104
- the time resolution of the electron beam time amplification oscilloscope is:
- T phys is the physical time resolution, which depends on the electron transit time dispersion between the microstrip cathode 101 and the anode grid 102:
- the unit of T phys is ps, where ⁇ is the initial energy distribution of photoelectrons, and the unit is eV.
- ⁇ is the initial energy distribution of photoelectrons
- the unit is eV.
- the initial energy distribution of photoelectrons generated by the microstrip cathode 101 is 0.5 eV
- E is the microstrip cathode.
- the electric field strength between 101 and the anode grid 102 is in kV/mm
- L pa is the distance between the microstrip cathode 101 and the anode grid 102 .
- the time resolution T MCP of the MCP camera tube 104 is experimentally measured.
- the optoelectronic synchronization sequentially increases ⁇ t at the ramp position of the cathode pulse.
- Each synchronization is at a certain position of the cathode pulse slope, and the time resolution T of the electron beam time amplification oscilloscope at this time is measured, and the T of different synchronization positions t 1 , t 2 , t 3 . . . can be obtained in turn.
- L, e, m are constants
- V B is the set cathode bias voltage, which is a known quantity.
- the unknown quantities in the above formula (2) are VP (t) and VP '(t), and VP (t) and VP '(t) have the following relationship:
- T in the above formula (4) can be measured experimentally, then the unknowns in formulas (2)-(6) are only VP (t) and VP '(t).
- the relationship between VP (t) and VP '(t) can be given by equation (7), so VP (t) can be obtained from equations (4) and (7).
- VP (t) is the difference between time t and
- the voltage value of the cathode pulse synchronized by the optical pulse that is, the voltage value of the cathode pulse at different times can be obtained by using the electron beam time amplification oscilloscope, thereby obtaining the cathode pulse waveform and realizing the oscilloscope function of the oscilloscope.
- the difference between the electron beam time magnifying oscilloscope of this embodiment and the American time stretching framing camera is that the United States uses a solenoid long magnetic focusing lens to generate a uniform magnetic field, and the magnetic field converts the photoelectrons on the microstrip cathode into a reduced image.
- MCP the imaging magnification is 3:1
- the spatial resolution of the acquired camera is 510 ⁇ m.
- a large-diameter short magnetic focusing lens is used to generate an axisymmetric non-uniform magnetic field with Gaussian distribution, and the magnetic field converts the photoelectrons on the microstrip cathode into an equal-sized image on the MCP, and the imaging magnification is 1:1.
- Short magnetic focusing lenses are often used in electron microscopes or streak cameras to improve the imaging quality of the system.
- the American camera uses four magnetic coils with a diameter of 40 cm, each of which is 8 cm long in the axial direction, and the distance between two adjacent magnetic coils is 15 cm; the oscilloscope in this embodiment uses a A short magnetic focusing lens with a direction length of 10 cm.
- the oscilloscope of this embodiment is smaller than the American camera, so it is more convenient to send it into the ICF target chamber to diagnose the plasma.
- There are also differences in the measurement method of time resolution In the United States, the time resolution of the camera is obtained from six dynamic images. Due to the trigger shaking in the experiment, there is a measurement error in this method. In this embodiment, the fiber bundle method is used, and one measurement can be Obtain the time resolution of the oscilloscope and avoid measurement errors caused by trigger shake.
- the electron beam time magnification oscilloscope measurement system of this embodiment includes an electron beam time magnification oscilloscope, and the electron beam time magnification oscilloscope includes a microstrip cathode 101, an anode grid 102, a magnetic focusing lens 103, and an MCP image.
- Tube 104, CCD and high voltage pulse generator 105 the positive output end of the high voltage pulse generator 105 is connected to the microstrip cathode 101, the negative output end of the high voltage pulse generator 105 is connected to the MCP image tube 104, and the anode grid 102 is grounded;
- the cathode 101, the anode grid 102, the MCP image tube 104 and the CCD are arranged in sequence, and the microstrip cathode 101, the anode grid 102, the MCP image tube 104 and the CCD are placed coaxially; the magnetic focusing lens 103 is located between the anode grid 102 and the CCD. Between the MCP image tubes 104 .
- the microstrip cathode 101 generates photoelectrons under the irradiation of incident light, and a negative DC bias voltage is applied to the microstrip cathode 101 and a high voltage ramp pulse is superimposed. Gain more energy, thereby making the electrons in front faster.
- the generated photoelectrons pass through the anode grid 102 and then enter the drift region between the anode grid 102 and the MCP image tube 104, and the electron beam formed by the photoelectrons expanded under the action of the magnetic field of the magnetic focusing lens 103 is imaged on the MCP image tube 104, and the CCD
- the visible light output by the MCP picture tube 104 is recorded. That is, the time width of the electron beam is widened to realize the time amplification of the electron beam.
- a magnetic focusing lens 103 is used to image the broadened electron beam on a microstrip line corresponding to the input surface of the MCP image tube 104 .
- the electron beam is gated and enhanced by the MCP, and hits the phosphor screen 1044 to form a visible light image, and the output visible light image is recorded and processed by a CCD. Since the electron beam is temporally broadened, by using a lower temporal resolution MCP picture tube 104, a very high oscilloscope temporal resolution can be obtained.
- the electron beam time amplification oscilloscope measurement system also includes a laser light source 201, a photodetector 202, a delay circuit 203, an optical fiber bundle 204 and a collimator light pipe 205.
- the optical fiber bundle 204 includes a plurality of optical fibers, and the lengths of the plurality of optical fibers are equal to each other. Difference series distribution.
- Collimator 205 includes lens L 1 and lens L 2 .
- the laser light source 201 includes a first output end for outputting the first wavelength laser light and a second output end for outputting the second wavelength laser light.
- the laser light emitted by the first output end enters the collimator light pipe 205 through the fiber bundle 204, After transmission, the tube 205 is incident on the microstrip cathode 101 of the electron beam time amplification oscilloscope; the laser light emitted by the second output end is input to the photodetector 202, and the generated electrical signal is delayed by the delay circuit 203 and then input to the high voltage of the electron beam time amplification oscilloscope.
- the input of the pulse generator 105 is performed by the pulse generator 105.
- the first output end adjusts the optical path through the mirror M2, so that the first wavelength laser light can smoothly enter the input end of the fiber bundle 204, and the second output end adjusts the optical path through the reflector M1, so that the second wavelength laser light can smoothly enter the photodetector the input of the device 202.
- the fiber bundle 204 in the electron beam time amplification oscilloscope measurement system of the present embodiment includes 30 multimode fibers, and the 30 multimode fibers are arranged in a rectangular shape, and the rectangle contains 3 rows of multimode fibers, and each row has more than 10 multimode fibers.
- the numbers of the 30 multimode fibers in Figure 4 are 1, 2...
- the transmission time is increased by 10ps, so that the arrival times of these 30 light spots increase uniformly.
- the first wavelength laser is a 266 nm laser
- the second wavelength laser is an 800 nm laser
- the electron beam time magnification oscilloscope measurement system of this embodiment is used to detect the parameters of the electron beam time magnification oscilloscope.
- the electron beam time magnification oscilloscope uses a magnetic focusing lens to generate a Gaussian magnetic field, and the magnetic field images the photoelectrons on the microstrip cathode on the microchannel plate. Improve the imaging quality of the oscilloscope, while being able to measure the electrical pulse waveform.
- Example 2 On the basis of Example 2, in the experiment, DC voltage was first applied to the microstrip cathode 101 and the MCP image tube 104 to measure the static image of the optical fiber, and then the static distribution of the incident light was obtained.
- the light pulse with a wavelength of 266 nm and a width of 130 fs outputted by the first output end of the laser light source 201 uniformly illuminates the input surface of the optical fiber beam transmission after being delayed, and the ultraviolet light is transmitted through the optical fiber bundle 204 to form 30 adjacent time intervals of 10 ps.
- the light spots are imaged on the microstrip line 1043 of the MCP picture tube 104 after passing through the collimator 205 .
- the second output end of the laser light source 201 outputs a light pulse with a wavelength of 800 nm and sends it to the photodetector 202 to generate a trigger pulse for triggering the high-voltage pulse generator.
- T MCP time resolution of the MCP camcorder tube 104
- only DC voltage is applied to the microstrip cathode 101
- the MCP camcorder tube 104 is loaded with a strobe pulse, and the optical pulse and the MCP strobe pulse are synchronized to obtain a time amplification without electron beams dynamic images.
- the dynamic image is normalized, and the normalized dynamic image light intensity spatial distribution is converted into a time distribution according to the time delay difference of the light spots in the optical fiber bundle 204, and Gaussian fitting is performed on it, and the fitting curve FWHM is T MCP .
- the microstrip cathode 101 and the MCP picture tube 104 are both loaded with pulse voltage, and the optical pulse, cathode pulse and MCP strobe pulse are synchronized to obtain a dynamic image after the electron beam time is broadened , normalize the dynamic image, convert the normalized dynamic image light intensity spatial distribution into time distribution, and perform Gaussian fitting on it, and the fitting curve FWHM is T.
- the microstrip cathode 101 only applies -3kV DC voltage, and the MCP is loaded with -300V DC bias voltage and a gate pulse with an amplitude of -1.8kV and a width of 225ps, and the delay of the delay circuit is adjusted to make the electronic pulse and the gate pulse reach the MCP.
- the time synchronization of the microstrip line 1043 of the tube 104 produces a dynamic image, as shown in FIG. 5(a).
- the normalized dynamic image light intensity spatial distribution is converted into a time distribution, the result is shown in Figure 6, the FWHM of the Gaussian fitting curve in the figure is 78ps, which is the time resolution of the oscilloscope without electron beam time amplification, that is, the time resolution T MCP of the MCP picture tube.
- the optical pulse is synchronized at t 12 about 1200 ps after the onset of the cathode pulse, the dynamic image is shown in Fig. 8(l).
- the time resolution of the electron beam time amplification oscilloscope corresponding to the cathode pulse slopes t 2 , t 3 . . . t 12 can be obtained.
- the relationship between the time resolution corresponding to each point of the cathode pulse ramp and the ramp synchronization position is shown in Figure 10.
- the cathode bias voltage VB set the cathode bias voltage VB to be -3kV.
- a short magnetic focusing lens is used to image the electron beam, and a certain magnetic lens current can only make the photoelectrons with a certain energy clearly image on the MCP.
- VP (t 1 ), T (t2), T MCP , equations (4) and (7) VP (t 2 ) and VP ′(t 2 ) are 199 V and 1.26 V/ ps , respectively . From this, the VP (t) and VP '(t) of each ramp position of the cathode pulse can be obtained in turn, as shown in Table 1.
- the limit time resolution of the electron beam time amplification oscilloscope depends on the physical time resolution T phys .
- the limit time resolution of the oscilloscope is related to the voltage of the microstrip cathode 101 and the anode grid 102 The relationship between (voltage between cathode and grid) is shown in the red curve in Figure 12. The higher the voltage between the microstrip cathode 101 and the anode grid 102, the smaller the electron transit time dispersion and the higher the limit time resolution.
- a software module can be placed in random access memory (RAM), internal memory, read only memory (ROM), electrically programmable ROM, electrically erasable programmable ROM, registers, hard disk, removable disk, CD-ROM, or any other in the technical field. in any other known form of storage medium.
- RAM random access memory
- ROM read only memory
- electrically programmable ROM electrically erasable programmable ROM
- registers hard disk, removable disk, CD-ROM, or any other in the technical field. in any other known form of storage medium.
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Abstract
An electron beam oscilloscope having improved temporal resolution, and a measurement system thereof. The oscilloscope has a high-voltage pulse generator (105) having a positive output end connected to a microstrip cathode (101). A negative output end of the high-voltage pulse generator (105) is connected to an MCP image intensifier tube (104). An anode mesh (102) is grounded. The microstrip cathode (101), the anode mesh (102), the MCP image intensifier tube (104), and a CCD are sequentially arranged, and the microstrip cathode (101), the anode mesh (102), the MCP image intensifier tube (104), and the CCD are coaxially arranged. A magnetic focusing lens (103) is located between the anode mesh (102) and the MCP image intensifier tube (104). The CCD is used to display a measurement light spot image, and analyzes and processes the measurement light spot image to obtain a detection waveform. The electron beam oscilloscope having improved temporal resolution uses a pulse voltage to cause electron energy dispersion, and the energy dispersion improves the temporal resolution of electron beams. The magnetic focusing lens (103) is utilized to generate a Gauss magnetic field, and the magnetic field forms images of the photoelectrons on the microstrip cathode (101) at the MCP image intensifier tube (104), thereby improving the imaging quality of the oscilloscope while enabling the measurement of electrical pulse waveforms.
Description
本发明涉及示波器领域,更具体地说,涉及一种电子束时间放大示波器及其测量系统。The invention relates to the field of oscilloscopes, and more particularly, to an electron beam time amplification oscilloscope and a measurement system thereof.
惯性约束聚变(inertial confinement fusion,ICF)持续时间极短,仅为1-2ns,需要采用超快诊断技术对等离子体温度、密度及其随时间的变化过程进行测量。微通道板(microchannel plate,MCP)选通X射线分幅相机是一种具有二维空间分辨和一维时间分辨的超快诊断设备。随着ICF研究的深入,要求使用优于30ps时间分辨率的分幅相机来测量等离子体的时空演化过程。而目前实用化分幅相机时间分辨率一般在60-100ps,无法满足上述实验测量要求。Inertial confinement fusion (ICF) has an extremely short duration of only 1-2 ns, and requires ultrafast diagnostic techniques to measure plasma temperature, density, and their time-dependent changes. The microchannel plate (MCP) gated X-ray framing camera is an ultrafast diagnostic device with two-dimensional spatial resolution and one-dimensional time resolution. With the deepening of ICF research, it is required to use a framing camera with a time resolution better than 30ps to measure the spatiotemporal evolution of plasma. However, the time resolution of the current practical framing camera is generally 60-100ps, which cannot meet the above-mentioned experimental measurement requirements.
近几年,国内外发展了以磁聚焦成像电子束时间放大的新型分幅相机。例如美国Lawrence Livermore National Laboratory(LLNL)提出采用电子束时间放大技术来提高时间分辨率,成功地获得了具有5ps时间分辨率的X射线分幅相机。该分幅相机首先利用电子脉冲时间放大技术对电子束团进行时间宽度展宽,再用传统的MCP变像管对时间放大后的电子束团进行测量,从而获得高的时间分辨率。同时,经研究发现,该分幅相机可以作为示波器使用,用于测量电脉冲波形。In recent years, a new type of framing camera has been developed at home and abroad that uses magnetic focusing imaging electron beam time magnification. For example, the Lawrence Livermore National Laboratory (LLNL) in the United States proposed to use electron beam time magnification technology to improve the time resolution, and successfully obtained an X-ray framing camera with a time resolution of 5ps. The framing camera first uses the electron pulse time amplification technology to expand the time width of the electron beam cluster, and then uses the traditional MCP image tube to measure the time-amplified electron beam cluster, so as to obtain high time resolution. At the same time, after research, it is found that the framing camera can be used as an oscilloscope to measure the waveform of electrical pulses.
发明内容SUMMARY OF THE INVENTION
本发明要解决的技术问题在于,针对现有的电子束时间放大技术,将其应用于示波器领域,提供一种电子束时间放大示波器及其测量系统。The technical problem to be solved by the present invention is to provide an electron beam time amplification oscilloscope and a measurement system thereof, aiming at the existing electron beam time amplification technology and applying it to the field of oscilloscope.
本发明解决其技术问题所采用的技术方案是:构造一种电子束时间放大示波器,包括微带阴极、阳极栅网、磁聚焦透镜、MCP变像管、CCD和高压脉冲发生器,所述高压脉冲发生器的正极输出端连接所述微带阴极,所述高压 脉冲发生器的负极输出端连接所述MCP变像管,所述阳极栅网接地;所述微带阴极、所述阳极栅网、所述MCP变像管和所述CCD依次排列,且所述微带阴极、所述阳极栅网、所述MCP变像管和所述CCD同轴放置;所述磁聚焦透镜位于所述阳极栅网和所述MCP变像管之间;The technical solution adopted by the present invention to solve the technical problem is: constructing an electron beam time amplification oscilloscope, which includes a microstrip cathode, an anode grid, a magnetic focusing lens, an MCP image tube, a CCD and a high-voltage pulse generator. The positive output terminal of the pulse generator is connected to the microstrip cathode, the negative output terminal of the high-voltage pulse generator is connected to the MCP video tube, and the anode grid is grounded; the microstrip cathode and the anode grid are connected to the ground. , the MCP image tube and the CCD are arranged in sequence, and the microstrip cathode, the anode grid, the MCP image tube and the CCD are placed coaxially; the magnetic focusing lens is located at the anode between the grid and the MCP image tube;
所述微带阴极在入射光照射下产生光电子,所述微带阴极上加负直流偏置电压并叠加上高压斜坡脉冲,光脉冲同步在高压斜坡脉冲的上升沿;产生的光电子经过所述阳极栅网后进入所述阳极栅网和所述MCP变像管之间的漂移区,所述光电子在所述磁聚焦透镜磁场作用下展宽形成的电子束成像在所述MCP变像管上,所述CCD记录所述MCP变像管输出的可见光,再通过分析处理光点图像获得检测波形。The microstrip cathode generates photoelectrons under the irradiation of incident light, a negative DC bias voltage is applied to the microstrip cathode and a high voltage ramp pulse is superimposed, and the optical pulse is synchronized on the rising edge of the high voltage ramp pulse; the generated photoelectrons pass through the anode After the grid, it enters the drift region between the anode grid and the MCP image tube, and the electron beam formed by the expansion of the photoelectrons under the action of the magnetic field of the magnetic focusing lens is imaged on the MCP image tube. The CCD records the visible light output by the MCP image changing tube, and then obtains the detection waveform by analyzing and processing the light spot image.
进一步,在本发明所述的电子束时间放大示波器中,所述微带阴极包括石英玻璃板和蒸镀在所述石英玻璃板上的三条黄金阴极微带线,每条所述黄金阴极微带线的厚度为80nm,宽度为8mm;三条所述黄金阴极微带线平行排列,相邻所述黄金阴极微带线的间隔为2.8mm。Further, in the electron beam time amplification oscilloscope of the present invention, the microstrip cathode includes a quartz glass plate and three gold cathode microstrip lines evaporated on the quartz glass plate, each of the gold cathode microstrips The thickness of the line is 80 nm and the width is 8 mm; the three gold cathode microstrip lines are arranged in parallel, and the interval between the adjacent gold cathode microstrip lines is 2.8 mm.
进一步,在本发明所述的电子束时间放大示波器中,所述磁聚焦透镜包括软铁和1200匝铜线圈,所述磁聚焦透镜的外径为256mm,所述磁聚焦透镜的内径为160mm,所述磁聚焦透镜的轴线方向长度为100mm;所述磁聚焦透镜的圆环内侧有一圈宽度为4mm的缝隙。Further, in the electron beam time magnification oscilloscope of the present invention, the magnetic focusing lens includes soft iron and 1200 turns of copper coil, the outer diameter of the magnetic focusing lens is 256mm, and the inner diameter of the magnetic focusing lens is 160mm, The length of the magnetic focusing lens in the axial direction is 100 mm; the inner side of the circular ring of the magnetic focusing lens has a circle with a width of 4 mm.
进一步,在本发明所述的电子束时间放大示波器中,所述MCP变像管包括阻抗渐变线、微通道板、蒸镀在微通道板上的三条微带线和制作在光纤面板上的荧光屏,所述微带线朝向所述阳极栅网侧,所述荧光屏位于所述微通道板和所述CCD之间;所述高压脉冲发生器的负极输出端通过所述阻抗渐变线连接所述微带线;Further, in the electron beam time-amplifying oscilloscope of the present invention, the MCP picture tube includes an impedance gradient line, a microchannel plate, three microstrip lines evaporated on the microchannel plate, and a phosphor screen fabricated on the fiber optic panel. , the microstrip line faces the anode grid side, the fluorescent screen is located between the microchannel plate and the CCD; the negative output end of the high voltage pulse generator is connected to the microstrip through the impedance gradient line with line;
所述微通道板的外径为56mm,厚度为0.5mm,通道直径为12μm,斜切角为6°;所述微带线的宽度为8mm,三条所述微带线平行排列,且相邻两条所述微带线的间隔为2.8mm;所述微通道板和所述荧光屏平行放置,所述微通道板和所述荧光屏之间的距离为0.5mm。The outer diameter of the microchannel plate is 56mm, the thickness is 0.5mm, the channel diameter is 12μm, and the chamfer angle is 6°; the width of the microstrip line is 8mm, and the three microstrip lines are arranged in parallel and adjacent to each other. The interval between the two microstrip lines is 2.8mm; the microchannel plate and the phosphor screen are placed in parallel, and the distance between the microchannel plate and the phosphor screen is 0.5mm.
进一步,在本发明所述的电子束时间放大示波器中,所述高压脉冲发生 器包括雪崩三极管电路和二极管脉冲电路,所述雪崩三极管电路产生的高压斜坡脉冲分为两部分,一部分通过阻抗渐变线输入到所述微带阴极,另一部分用于驱动所述二极管脉冲电路以产生MCP选通脉冲。Further, in the electron beam time amplification oscilloscope of the present invention, the high-voltage pulse generator includes an avalanche triode circuit and a diode pulse circuit, and the high-voltage ramp pulse generated by the avalanche triode circuit is divided into two parts, and one part passes through the impedance gradient line. Input to the microstrip cathode, and the other part is used to drive the diode pulse circuit to generate the MCP strobe.
进一步,在本发明所述的电子束时间放大示波器中,所述微带阴极连接第一衰减器,所述第一衰减器吸收掉经过所述微带阴极之后的高压斜坡脉冲;所述MCP变像管的微带线连接第二衰减器,所述第二衰减器吸收掉经过所述微带线之后的MCP选通脉冲;Further, in the electron beam time amplification oscilloscope of the present invention, the microstrip cathode is connected to a first attenuator, and the first attenuator absorbs the high-voltage ramp pulse after passing through the microstrip cathode; the MCP becomes The microstrip line of the tube is connected to a second attenuator, and the second attenuator absorbs the MCP strobe pulse after passing through the microstrip line;
进一步,在本发明所述的电子束时间放大示波器中,所述微带阴极接收入射光照后产生光电子,所述光电子在所述磁聚焦透镜的磁场约束下飞行至所述MCP变像管;发射时间为t
i的光电子到达所述MCP变像管的时刻为:
Further, in the electron beam time amplification oscilloscope of the present invention, the microstrip cathode generates photoelectrons after receiving incident light, and the photoelectrons fly to the MCP image tube under the confinement of the magnetic field of the magnetic focusing lens; The moment when the photoelectron with time t i reaches the MCP picture tube is:
其中,L为所述漂移区的长度,e为光电子电荷量,e=1.6×10
-19C;m为光电子质量,m=9.1×10
-31kg;
是所述微带阴极和所述阳极栅网之间的电压差,V
B是阴极偏置电压,V
P(t)是t时刻与光脉冲同步的阴极脉冲的电压值;
Wherein, L is the length of the drift region, e is the photoelectron charge, e=1.6×10 -19 C; m is the photoelectron mass, m=9.1×10 -31 kg; is the voltage difference between the microstrip cathode and the anode grid, VB is the cathode bias voltage, and VP (t) is the voltage value of the cathode pulse synchronized with the light pulse at time t;
电子束时间放大倍率M可表示为:The electron beam time magnification M can be expressed as:
则电子束时间放大示波器的技术时间分辨率为:Then the technical time resolution of the electron beam time amplification oscilloscope is:
其中,T
MCP为所述MCP变像管的时间分辨率;
Wherein, T MCP is the time resolution of the MCP imaging tube;
电子束时间放大示波器的时间分辨率为:The time resolution of the electron beam time amplification oscilloscope is:
T
phys为物理时间分辨率,取决于所述微带阴极和所述阳极栅网之间电子渡越时间弥散:
T phys is the physical time resolution, which depends on the electron transit time dispersion between the microstrip cathode and the anode grid:
E=[-V
B-V
P(t)]/L
pa (6)
E=[-V B -V P (t)]/L pa (6)
T
phys的单位为ps,其中δε是光电子的初能量分布,单位是eV,在波长为260nm的紫外激光照射下,所述微带阴极产生的光电子的初能量分布是0.5eV;E是所述微带阴极和所述阳极栅网之间的电场强度,单位是kV/mm;L
pa是所述微带阴极和所述阳极栅网之间的距离。
The unit of T phys is ps, where δε is the initial energy distribution of photoelectrons, and the unit is eV. Under the irradiation of ultraviolet laser with a wavelength of 260 nm, the initial energy distribution of photoelectrons generated by the microstrip cathode is 0.5 eV; E is the The electric field strength between the microstrip cathode and the anode grid, in kV/mm; Lpa is the distance between the microstrip cathode and the anode grid.
另外,本发明还提供一种电子束时间放大示波器测量系统,包括如上述的电子束时间放大示波器,所述系统还包括激光光源、光电探测器、延时电路、光纤束和平行光管,所述光纤束包括多根光纤,且多根光纤的长度呈等差数列分布;In addition, the present invention also provides an electron beam time amplification oscilloscope measurement system, including the above electron beam time amplification oscilloscope, the system further includes a laser light source, a photodetector, a delay circuit, an optical fiber bundle and a collimator, so The optical fiber bundle includes a plurality of optical fibers, and the lengths of the plurality of optical fibers are distributed in an arithmetic progression;
所述激光光源包括用于输出第一波长激光的第一输出端和用于输出第二波长激光的第二输出端,所述第一输出端发射的激光经过所述光纤束入射所述平行光管,经所述平行光管传输后入射至所述电子束时间放大示波器的微带阴极;所述第二输出端发射的激光输入所述光电探测器,生成的电信号经所述延时电路延时后输入所述电子束时间放大示波器的高压脉冲发生器的输入端。The laser light source includes a first output end for outputting laser light of a first wavelength and a second output end for outputting laser light of a second wavelength, and the laser light emitted by the first output end enters the parallel light through the fiber bundle After being transmitted by the parallel light tube, it is incident on the microstrip cathode of the electron beam time amplification oscilloscope; the laser light emitted by the second output end is input to the photodetector, and the generated electrical signal is passed through the delay circuit Input the input terminal of the high voltage pulse generator of the electron beam time amplification oscilloscope after the delay.
进一步,在本发明所述的电子束时间放大示波器测量系统中,所述光纤束包括30根多模光纤,30根多模光纤紧邻排列为矩形,所述矩形包含3行多模光纤,每行有10根多模光纤;30根多模光纤的长度依据排列顺序呈等差数列递增,等差数列的公差为2mm。Further, in the electron beam time amplification oscilloscope measurement system of the present invention, the optical fiber bundle includes 30 multimode optical fibers, and the 30 multimode optical fibers are arranged in a rectangle adjacent to each other, and the rectangle includes 3 rows of multimode optical fibers, and each row There are 10 multimode fibers; the lengths of 30 multimode fibers increase in arithmetic progression according to the arrangement order, and the tolerance of arithmetic progression is 2mm.
进一步,在本发明所述的电子束时间放大示波器测量系统中,所述第一波长激光为266nm激光,所述第二波长激光为800nm激光。Further, in the electron beam time amplification oscilloscope measurement system of the present invention, the first wavelength laser is a 266 nm laser, and the second wavelength laser is an 800 nm laser.
实施本发明的一种电子束时间放大示波器及其测量系统,具有以下有益效果:本发明的电子束时间放大示波器采用脉冲电压产生电子能量弥散,能量弥散获得电子束时间放大,利用磁聚焦透镜产生高斯形磁场,磁场将微带阴极上的光电子成像在微通道板,提高示波器的成像质量,同时能够测量电脉冲波形。An electron beam time magnifying oscilloscope and its measurement system implemented in the present invention have the following beneficial effects: the electron beam time magnifying oscilloscope of the present invention uses pulse voltage to generate electron energy dispersion, the energy dispersion obtains electron beam time magnification, and uses a magnetic focusing lens to generate Gaussian-shaped magnetic field, the magnetic field images the photoelectrons on the microstrip cathode on the microchannel plate, which improves the imaging quality of the oscilloscope, and can measure the electrical pulse waveform at the same time.
下面将结合附图及实施例对本发明作进一步说明,附图中:The present invention will be further described below in conjunction with the accompanying drawings and embodiments, in which:
图1是一实施例提供的电子束时间放大示波器的结构示意图;1 is a schematic structural diagram of an electron beam time amplification oscilloscope provided by an embodiment;
图2是一实施例提供的高压脉冲发生器的结构示意图;2 is a schematic structural diagram of a high-voltage pulse generator provided by an embodiment;
图3是一实施例提供的电子束时间放大示波器测量系统的结构示意图;3 is a schematic structural diagram of an electron beam time amplification oscilloscope measurement system provided by an embodiment;
图4是一实施例提供的光纤束的结构示意图;4 is a schematic structural diagram of an optical fiber bundle provided by an embodiment;
图5(a)是一实施例提供的微带阴极仅加直流电压时动态图像;Figure 5(a) is a dynamic image when only a DC voltage is applied to the microstrip cathode provided by an embodiment;
图5(b)是一实施例提供的10ps间隔光纤静态图像;Figure 5(b) is a static image of a 10ps interval optical fiber provided by an embodiment;
图6是一实施例提供的微带阴极未加脉冲时MCP变像管的时间分辨率T
MCP测量结果;
Fig. 6 is the time resolution T MCP measurement result of the MCP image tube when the microstrip cathode provided by one embodiment is not pulsed;
图7一实施例提供的光脉冲依次与微带阴极脉冲斜坡不同点同步示意图;FIG. 7 is a schematic diagram of synchronizing the optical pulses sequentially with the ramps of the microstrip cathode pulses at different points according to an embodiment;
图8是一实施例提供的微带阴极加载脉冲,光脉冲同步阴极脉冲t
1、t
2、t
3……t
11、t
12点时动态图像;
8 is a dynamic image at t 1 , t 2 , t 3 . . . t 11 , t 12 when the light pulse is synchronized with the cathode pulses t 1 , t 2 , t 3 . . . , provided by an embodiment;
图9是一实施例提供的光脉冲同步在阴极脉冲t
1点时,时间放大示波器时间分辨率T(t
1)测量结果;
9 is a measurement result of the time resolution T(t 1 ) of the time amplification oscilloscope when the optical pulse is synchronized at the cathode pulse t 1 point according to an embodiment;
图10是一实施例提供的微带阴极脉冲斜坡各点对应的时间分辨率与斜坡同步位置的关系;10 is a relationship between the time resolution corresponding to each point of the microstrip cathode pulse ramp and the ramp synchronization position provided by an embodiment;
图11是一实施例提供的微带阴极脉冲波形测量结果;11 is a measurement result of a microstrip cathode pulse waveform provided by an embodiment;
图12是一实施例提供的极限时间分辨率、最高带宽理论值与阴栅极间电压的关系。FIG. 12 shows the relationship between the limit time resolution, the theoretical value of the maximum bandwidth and the voltage between cathode and gate provided by an embodiment.
为了对本发明的技术特征、目的和效果有更加清楚的理解,现对照附图详细说明本发明的具体实施方式。In order to have a clearer understanding of the technical features, objects and effects of the present invention, the specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings.
实施例1Example 1
参考图1,本实施例的电子束时间放大示波器包括微带阴极101、阳极栅网102、磁聚焦透镜103、MCP变像管104、CCD和高压脉冲发生器105,高压脉冲发生器105的正极输出端连接微带阴极101,高压脉冲发生器105的负极输出端连接MCP变像管104,阳极栅网102接地;微带阴极101、阳极栅网102、MCP变像管104和CCD依次排列,且微带阴极101、阳极栅网102、MCP变像 管104和CCD同轴放置;磁聚焦透镜103位于阳极栅网102和MCP变像管104之间。Referring to FIG. 1 , the electron beam time amplification oscilloscope of the present embodiment includes a microstrip cathode 101 , an anode grid 102 , a magnetic focusing lens 103 , an MCP picture tube 104 , a CCD and a high-voltage pulse generator 105 , and the positive electrode of the high-voltage pulse generator 105 The output terminal is connected to the microstrip cathode 101, the negative output terminal of the high-voltage pulse generator 105 is connected to the MCP imaging tube 104, and the anode grid 102 is grounded; the microstrip cathode 101, the anode grid 102, the MCP imaging tube 104 and the CCD are arranged in sequence, And the microstrip cathode 101 , the anode grid 102 , the MCP picture tube 104 and the CCD are placed coaxially; the magnetic focusing lens 103 is located between the anode grid 102 and the MCP picture tube 104 .
微带阴极101在入射光照射下产生光电子,微带阴极101上加负直流偏置电压并叠加上高压斜坡脉冲,光脉冲同步在高压斜坡脉冲的上升沿,这样先发射的光电子较后面的光电子获得更大的能量,从而使得前面的电子速度更快。产生的光电子经过阳极栅网102后进入阳极栅网102和MCP变像管104之间的漂移区,光电子在磁聚焦透镜103磁场作用下展宽形成的电子束成像在MCP变像管104上,CCD记录MCP变像管104输出的可见光。即电子束的时间宽度被展宽,实现电子束的时间放大,由于漂移区传输距离较大,电子束将在空间发散。为了提高空间分辨率,采用磁聚焦透镜103将展宽后的电子束成像在MCP变像管104的输入面对应的微带线上。当选通脉冲沿微带线1043在MCP上传输时,电子束被MCP选通、增强,并打到荧光屏1044上形成可见光图像,输出的可见光图像用CCD进行记录处理。由于电子束在时间上展宽,通过使用较低时间分辨率的MCP变像管,就可以获得很高的系统时间分辨率。The microstrip cathode 101 generates photoelectrons under the irradiation of incident light, and a negative DC bias voltage is applied to the microstrip cathode 101 and a high voltage ramp pulse is superimposed. Gain more energy, thereby making the electrons in front faster. The generated photoelectrons pass through the anode grid 102 and then enter the drift region between the anode grid 102 and the MCP image tube 104, and the electron beam formed by the photoelectrons expanded under the action of the magnetic field of the magnetic focusing lens 103 is imaged on the MCP image tube 104, and the CCD The visible light output by the MCP picture tube 104 is recorded. That is, the time width of the electron beam is widened to realize the time amplification of the electron beam. Due to the large transmission distance of the drift region, the electron beam will diverge in space. In order to improve the spatial resolution, a magnetic focusing lens 103 is used to image the broadened electron beam on a microstrip line corresponding to the input surface of the MCP image tube 104 . When the strobe pulse is transmitted on the MCP along the microstrip line 1043, the electron beam is gated and enhanced by the MCP, and hits the phosphor screen 1044 to form a visible light image, and the output visible light image is recorded and processed by a CCD. Since the electron beam is temporally broadened, a very high system temporal resolution can be obtained by using a lower temporal resolution MCP picture tube.
作为选择,本实施例的电子束时间放大示波器中微带阴极101包括石英玻璃板和蒸镀在石英玻璃板上的三条黄金阴极微带线,高压脉冲发生器105的正极输出端通过阻抗渐变线1041分别连接三条黄金阴极微带线。每条黄金阴极微带线的厚度为80nm,宽度为8mm;三条黄金阴极微带线平行排列,相邻黄金阴极微带线的间隔为2.8mm。微带阴极具有两方面的作用:一是具有光电阴极的功能,将入射光转换为光电子;二是具有微带线的作用,传输高压斜坡脉冲,使得微带阴极101和阳极栅网102间存在时变电场,实现电子束的时间放大。Alternatively, the microstrip cathode 101 in the electron beam time amplification oscilloscope of this embodiment includes a quartz glass plate and three gold cathode microstrip lines evaporated on the quartz glass plate, and the positive output end of the high-voltage pulse generator 105 passes through the impedance gradient line 1041 are respectively connected to three gold cathode microstrip lines. The thickness of each gold cathode microstrip line is 80nm and the width is 8mm; three gold cathode microstrip lines are arranged in parallel, and the interval between adjacent gold cathode microstrip lines is 2.8mm. The microstrip cathode has two functions: one is the function of photocathode, which converts incident light into photoelectrons; the other is the function of microstrip line, which transmits high-voltage ramp pulses, so that there is a gap between the microstrip cathode 101 and the anode grid 102. The time-varying electric field realizes the time amplification of the electron beam.
作为选择,在本实施例的电子束时间放大示波器中,磁聚焦透镜103包括软铁和1200匝铜线圈,磁聚焦透镜103的外径为256mm,磁聚焦透镜103的内径为160mm,磁聚焦透镜103的轴线方向长度为100mm;磁聚焦透镜103的圆环内侧有一圈宽度为4mm的缝隙,磁场经4mm狭缝进入漂移区。磁聚焦透镜103使微带阴极面上的光电子成像在MCP输入面,成像倍数为1:1。Alternatively, in the electron beam time magnification oscilloscope of this embodiment, the magnetic focusing lens 103 includes soft iron and 1200 turns of copper coils, the outer diameter of the magnetic focusing lens 103 is 256 mm, the inner diameter of the magnetic focusing lens 103 is 160 mm, and the magnetic focusing lens The axial length of 103 is 100mm; the inner side of the ring of the magnetic focusing lens 103 has a circle with a width of 4mm, and the magnetic field enters the drift region through the 4mm slit. The magnetic focusing lens 103 images the photoelectrons on the cathode surface of the microstrip on the input surface of the MCP, and the imaging magnification is 1:1.
作为选择,本实施例的电子束时间放大示波器中MCP变像管104包括阻 抗渐变线1041、微通道板1042、蒸镀在微通道板1042上的三条微带线1043和制作在光纤面板上的荧光屏1044,微带线1043朝向阳极栅网102侧,荧光屏1044位于微通道板1042和CCD之间;高压脉冲发生器105的负极输出端通过阻抗渐变线1041连接微带线1043。微通道板1042的外径为56mm,厚度为0.5mm,通道直径为12μm,斜切角为6°;微带线1043的宽度为8mm,三条微带线1043平行排列,且相邻两条微带线1043的间隔为2.8mm;微通道板1042和荧光屏1044平行放置,微通道板1042和荧光屏1044之间的距离为0.5mm。Alternatively, the MCP image tube 104 in the electron beam time amplification oscilloscope of this embodiment includes an impedance gradient line 1041, a microchannel plate 1042, three microstrip lines 1043 evaporated on the microchannel plate 1042, and a The fluorescent screen 1044, the microstrip line 1043 faces the anode grid 102 side, and the fluorescent screen 1044 is located between the microchannel plate 1042 and the CCD; The outer diameter of the microchannel plate 1042 is 56mm, the thickness is 0.5mm, the channel diameter is 12μm, and the chamfer angle is 6°; the width of the microstrip line 1043 is 8mm, and the three microstrip lines 1043 are arranged in parallel, and two adjacent microstrip lines 1043 are arranged in parallel. The interval between the strip lines 1043 is 2.8 mm; the microchannel plate 1042 and the phosphor screen 1044 are placed in parallel, and the distance between the microchannel plate 1042 and the phosphor screen 1044 is 0.5 mm.
作为选择,本实施例的电子束时间放大示波器中,微带阴极101连接第一衰减器1061,第一衰减器1061吸收掉经过微带阴极101之后的高压斜坡脉冲;MCP变像管104的微带线1043连接第二衰减器1062,第二衰减器1062吸收掉经过微带线1043之后的MCP选通脉冲。Alternatively, in the electron beam time amplification oscilloscope of this embodiment, the microstrip cathode 101 is connected to the first attenuator 1061, and the first attenuator 1061 absorbs the high-voltage ramp pulse after passing through the microstrip cathode 101; The strip line 1043 is connected to the second attenuator 1062 , and the second attenuator 1062 absorbs the MCP gate pulse after passing through the microstrip line 1043 .
参考图2,本实施例的电子束时间放大示波器中高压脉冲发生器105包括雪崩三极管电路1051和二极管脉冲电路1052,雪崩三极管电路1051产生的高压斜坡脉冲分为两部分,一部分通过阻抗渐变线1041输入到微带阴极101,另一部分用于驱动二极管脉冲电路1052以产生MCP选通脉冲。Referring to FIG. 2 , the high-voltage pulse generator 105 in the electron beam time-amplified oscilloscope of the present embodiment includes an avalanche triode circuit 1051 and a diode pulse circuit 1052 . Input to the microstrip cathode 101, the other part is used to drive the diode pulse circuit 1052 to generate the MCP strobe.
电子束时间放大示波器的示波原理:The oscillometric principle of the electron beam time amplification oscilloscope:
本实施例的电子束时间放大示波器的时间分辨率主要取决于以下四个方面:阴极偏置电压、阴极脉冲斜率、漂移区长度和MCP变像管时间分辨率。微带阴极101接收入射光照后产生光电子,光电子在磁聚焦透镜103的磁场作用下成像至MCP变像管104。忽略阴栅极间这1.8mm的距离和光电子发射能量分布,发射时间为t
i的光电子到达MCP变像管104的时刻为:
The time resolution of the electron beam time amplification oscilloscope in this embodiment mainly depends on the following four aspects: cathode bias voltage, cathode pulse slope, drift region length and time resolution of the MCP picture tube. The microstrip cathode 101 generates photoelectrons after receiving the incident light, and the photoelectrons are imaged to the MCP picture tube 104 under the action of the magnetic field of the magnetic focusing lens 103 . Ignoring the distance of 1.8 mm between the cathode grids and the photoelectron emission energy distribution, the photoelectron emission time t i arrives at the MCP image tube 104 at the moment:
其中,L为漂移区的长度,e为光电子电荷量,e=1.6×10
-19C;m为光电子质量,m=9.1×10
-31kg;
是微带阴极101和阳极栅网102之间的电压差,V
B是阴极偏置电压,V
P(t)是t时刻与光脉冲同步的阴极脉冲的电压值;
Among them, L is the length of the drift region, e is the photoelectron charge, e=1.6×10 -19 C; m is the photoelectron mass, m=9.1×10 -31 kg; is the voltage difference between the microstrip cathode 101 and the anode grid 102, VB is the cathode bias voltage, and VP (t) is the voltage value of the cathode pulse synchronized with the optical pulse at time t;
电子束时间放大倍率M可表示为:The electron beam time magnification M can be expressed as:
则电子束时间放大示波器的技术时间分辨率为:Then the technical time resolution of the electron beam time amplification oscilloscope is:
其中,T
MCP为MCP变像管104的时间分辨率;
Wherein, T MCP is the time resolution of the MCP imaging tube 104;
电子束时间放大示波器的时间分辨率为:The time resolution of the electron beam time amplification oscilloscope is:
T
phys为物理时间分辨率,取决于微带阴极101和阳极栅网102之间电子渡越时间弥散:
T phys is the physical time resolution, which depends on the electron transit time dispersion between the microstrip cathode 101 and the anode grid 102:
E=[-V
B-V
P(t)]/L
pa (6)
E=[-V B -V P (t)]/L pa (6)
T
phys的单位为ps,其中δε是光电子的初能量分布,单位是eV,在波长为260nm的紫外激光照射下,微带阴极101产生的光电子的初能量分布是0.5eV;E是微带阴极101和阳极栅网102之间的电场强度,单位是kV/mm;L
pa是微带阴极101和阳极栅网102之间的距离。
The unit of T phys is ps, where δε is the initial energy distribution of photoelectrons, and the unit is eV. Under the irradiation of ultraviolet laser with a wavelength of 260 nm, the initial energy distribution of photoelectrons generated by the microstrip cathode 101 is 0.5 eV; E is the microstrip cathode. The electric field strength between 101 and the anode grid 102 is in kV/mm; L pa is the distance between the microstrip cathode 101 and the anode grid 102 .
首先,实验测量MCP变像管104的时间分辨率T
MCP。
First, the time resolution T MCP of the MCP camera tube 104 is experimentally measured.
其次,改变阴极脉冲到达微带阴极101的时间,使得光电子同步在阴极脉冲不同斜坡位置,即改变光脉冲同步上阴极脉冲时,对光电子作用的阴极脉冲电压值V
P(t)。
Next, change the time when the cathode pulse reaches the microstrip cathode 101, so that the photoelectrons are synchronized at different slope positions of the cathode pulse, that is, change the cathode pulse voltage value VP (t) acting on the photoelectrons when the optical pulse is synchronized with the cathode pulse.
光电子同步在阴极脉冲的斜坡位置依次增加Δt。每同步在阴极脉冲斜坡某一位置,测量此时的电子束时间放大示波器时间分辨率T,则可依次获得不同同步位置t
1、t
2、t
3……的T。上式(2)中,L、e、m是常数,
V
B是设置的阴极偏置电压,为已知量。上式(2)中未知量为V
P(t)和V
P′(t),V
P(t)和V
P′(t)有如下关系:
The optoelectronic synchronization sequentially increases Δt at the ramp position of the cathode pulse. Each synchronization is at a certain position of the cathode pulse slope, and the time resolution T of the electron beam time amplification oscilloscope at this time is measured, and the T of different synchronization positions t 1 , t 2 , t 3 . . . can be obtained in turn. In the above formula (2), L, e, m are constants, V B is the set cathode bias voltage, which is a known quantity. The unknown quantities in the above formula (2) are VP (t) and VP '(t), and VP (t) and VP '(t) have the following relationship:
上式(4)中T可由实验测出,则式(2)-(6)中未知量仅为V
P(t)和V
P′(t)。而V
P(t)和V
P′(t)的关系可由式(7)给出,故由式(4)和(7)可获得V
P(t),V
P(t)是t时刻与光脉冲同步的阴极脉冲的电压值,即采用电子束时间放大示波器可获得不同时刻阴极脉冲电压值,从而获得了阴极脉冲波形,实现了示波器的示波功能。
T in the above formula (4) can be measured experimentally, then the unknowns in formulas (2)-(6) are only VP (t) and VP '(t). The relationship between VP (t) and VP '(t) can be given by equation (7), so VP (t) can be obtained from equations (4) and (7). VP (t) is the difference between time t and The voltage value of the cathode pulse synchronized by the optical pulse, that is, the voltage value of the cathode pulse at different times can be obtained by using the electron beam time amplification oscilloscope, thereby obtaining the cathode pulse waveform and realizing the oscilloscope function of the oscilloscope.
综上所述,本实施例的电子束时间放大示波器与美国时间展宽分幅相机区别一是美国采用螺线管长磁聚焦透镜产生均匀磁场,磁场将微带阴极上的光电子成缩小的像在MCP,成像倍率为3:1,获得相机的空间分辨率为510μm。本实施例采用大口径短磁聚焦透镜产生轴对称的具有高斯分布的非均匀磁场,磁场将微带阴极上的光电子成等大的像在MCP,成像倍率为1:1。短磁聚焦透镜常用于电子显微镜或条纹相机来提高系统的成像质量。区别之二是美国相机采用了四个直径40cm的磁线圈,每个磁线圈轴线方向长8cm,相邻两个磁线圈间距15cm;本实施例的示波器采用一个内径16cm,外径25.6cm,轴线方向长10cm的短磁聚焦透镜。在体积和重量上,本实施例示波器比美国相机要小,从而更便于送入ICF靶室内部对等离子体进行诊断。在时间分辨率的测量方法上也有不同,美国由六幅动态图像获得相机的时间分辨率,由于实验中存在触发晃动使得这种方法存在测量误差,本实施例采用光纤束法,一次测量就能获得示波器的时间分辨率,避免了触发晃动带来的测量误差。To sum up, the difference between the electron beam time magnifying oscilloscope of this embodiment and the American time stretching framing camera is that the United States uses a solenoid long magnetic focusing lens to generate a uniform magnetic field, and the magnetic field converts the photoelectrons on the microstrip cathode into a reduced image. MCP, the imaging magnification is 3:1, and the spatial resolution of the acquired camera is 510 μm. In this embodiment, a large-diameter short magnetic focusing lens is used to generate an axisymmetric non-uniform magnetic field with Gaussian distribution, and the magnetic field converts the photoelectrons on the microstrip cathode into an equal-sized image on the MCP, and the imaging magnification is 1:1. Short magnetic focusing lenses are often used in electron microscopes or streak cameras to improve the imaging quality of the system. The second difference is that the American camera uses four magnetic coils with a diameter of 40 cm, each of which is 8 cm long in the axial direction, and the distance between two adjacent magnetic coils is 15 cm; the oscilloscope in this embodiment uses a A short magnetic focusing lens with a direction length of 10 cm. In terms of volume and weight, the oscilloscope of this embodiment is smaller than the American camera, so it is more convenient to send it into the ICF target chamber to diagnose the plasma. There are also differences in the measurement method of time resolution. In the United States, the time resolution of the camera is obtained from six dynamic images. Due to the trigger shaking in the experiment, there is a measurement error in this method. In this embodiment, the fiber bundle method is used, and one measurement can be Obtain the time resolution of the oscilloscope and avoid measurement errors caused by trigger shake.
实施例2Example 2
参考图1和图3,本实施例的电子束时间放大示波器测量系统包括电子束时间放大示波器,该电子束时间放大示波器包括微带阴极101、阳极栅网102、磁聚焦透镜103、MCP变像管104、CCD和高压脉冲发生器105,高压脉冲发生器105的正极输出端连接微带阴极101,高压脉冲发生器105的负极输出端连接MCP变像管104,阳极栅网102接地;微带阴极101、阳极栅网102、MCP变像管104和CCD依次排列,且微带阴极101、阳极栅网102、MCP变像管104 和CCD同轴放置;磁聚焦透镜103位于阳极栅网102和MCP变像管104之间。Referring to FIG. 1 and FIG. 3 , the electron beam time magnification oscilloscope measurement system of this embodiment includes an electron beam time magnification oscilloscope, and the electron beam time magnification oscilloscope includes a microstrip cathode 101, an anode grid 102, a magnetic focusing lens 103, and an MCP image. Tube 104, CCD and high voltage pulse generator 105, the positive output end of the high voltage pulse generator 105 is connected to the microstrip cathode 101, the negative output end of the high voltage pulse generator 105 is connected to the MCP image tube 104, and the anode grid 102 is grounded; The cathode 101, the anode grid 102, the MCP image tube 104 and the CCD are arranged in sequence, and the microstrip cathode 101, the anode grid 102, the MCP image tube 104 and the CCD are placed coaxially; the magnetic focusing lens 103 is located between the anode grid 102 and the CCD. Between the MCP image tubes 104 .
微带阴极101在入射光照射下产生光电子,微带阴极101上加负直流偏置电压并叠加上高压斜坡脉冲,光脉冲同步在高压斜坡脉冲的上升沿,这样先发射的光电子较后面的光电子获得更大的能量,从而使得前面的电子速度更快。产生的光电子经过阳极栅网102后进入阳极栅网102和MCP变像管104之间的漂移区,光电子在磁聚焦透镜103磁场作用下展宽形成的电子束成像在MCP变像管104上,CCD记录MCP变像管104输出的可见光。即电子束的时间宽度被展宽,实现电子束的时间放大,由于漂移区传输距离较大,电子束将在空间发散。为了提高空间分辨率,采用磁聚焦透镜103将展宽后的电子束成像在MCP变像管104的输入面对应的微带线上。当选通脉冲沿微带线1043在MCP上传输时,电子束被MCP选通、增强,并打到荧光屏1044上形成可见光图像,输出的可见光图像用CCD进行记录处理。由于电子束在时间上展宽,通过使用较低时间分辨率的MCP变像管104,就可以获得很高的示波器时间分辨率。The microstrip cathode 101 generates photoelectrons under the irradiation of incident light, and a negative DC bias voltage is applied to the microstrip cathode 101 and a high voltage ramp pulse is superimposed. Gain more energy, thereby making the electrons in front faster. The generated photoelectrons pass through the anode grid 102 and then enter the drift region between the anode grid 102 and the MCP image tube 104, and the electron beam formed by the photoelectrons expanded under the action of the magnetic field of the magnetic focusing lens 103 is imaged on the MCP image tube 104, and the CCD The visible light output by the MCP picture tube 104 is recorded. That is, the time width of the electron beam is widened to realize the time amplification of the electron beam. Due to the large transmission distance of the drift region, the electron beam will diverge in space. In order to improve the spatial resolution, a magnetic focusing lens 103 is used to image the broadened electron beam on a microstrip line corresponding to the input surface of the MCP image tube 104 . When the strobe pulse is transmitted on the MCP along the microstrip line 1043, the electron beam is gated and enhanced by the MCP, and hits the phosphor screen 1044 to form a visible light image, and the output visible light image is recorded and processed by a CCD. Since the electron beam is temporally broadened, by using a lower temporal resolution MCP picture tube 104, a very high oscilloscope temporal resolution can be obtained.
进一步,电子束时间放大示波器测量系统还包括激光光源201、光电探测器202、延时电路203、光纤束204和平行光管205,光纤束204包括多根光纤,且多根光纤的长度呈等差数列分布。平行光管205包括透镜L
1和透镜L
2。激光光源201包括用于输出第一波长激光的第一输出端和用于输出第二波长激光的第二输出端,第一输出端发射的激光经过光纤束204入射平行光管205,经平行光管205传输后入射至电子束时间放大示波器的微带阴极101;第二输出端发射的激光输入光电探测器202,生成的电信号经延时电路203延时后输入电子束时间放大示波器的高压脉冲发生器105的输入端。作为选择,第一输出端通过反射镜M2调节光路,使第一波长激光顺利入射到光纤束204的输入端,第二输出端通过反射镜M1调节光路,使第二波长激光顺利入射到光电探测器202的输入端。
Further, the electron beam time amplification oscilloscope measurement system also includes a laser light source 201, a photodetector 202, a delay circuit 203, an optical fiber bundle 204 and a collimator light pipe 205. The optical fiber bundle 204 includes a plurality of optical fibers, and the lengths of the plurality of optical fibers are equal to each other. Difference series distribution. Collimator 205 includes lens L 1 and lens L 2 . The laser light source 201 includes a first output end for outputting the first wavelength laser light and a second output end for outputting the second wavelength laser light. The laser light emitted by the first output end enters the collimator light pipe 205 through the fiber bundle 204, After transmission, the tube 205 is incident on the microstrip cathode 101 of the electron beam time amplification oscilloscope; the laser light emitted by the second output end is input to the photodetector 202, and the generated electrical signal is delayed by the delay circuit 203 and then input to the high voltage of the electron beam time amplification oscilloscope. The input of the pulse generator 105. Alternatively, the first output end adjusts the optical path through the mirror M2, so that the first wavelength laser light can smoothly enter the input end of the fiber bundle 204, and the second output end adjusts the optical path through the reflector M1, so that the second wavelength laser light can smoothly enter the photodetector the input of the device 202.
参考图4,本实施例的电子束时间放大示波器测量系统中光纤束204包括30根多模光纤,30根多模光纤紧邻排列为矩形,矩形包含3行多模光纤,每行有10根多模光纤;30根多模光纤的长度依据排列顺序呈等差数列递增,等 差数列的公差为2mm。图4中30根多模光纤的编号依次为1、2···29、30,最短的多模光纤编号为1,编号每增加1,多模光纤长度增加2mm,则多模光纤中紫外光的传输时间就增加10ps,从而使得这30个光点的到达时间均匀地增加。Referring to FIG. 4 , the fiber bundle 204 in the electron beam time amplification oscilloscope measurement system of the present embodiment includes 30 multimode fibers, and the 30 multimode fibers are arranged in a rectangular shape, and the rectangle contains 3 rows of multimode fibers, and each row has more than 10 multimode fibers. Mode fiber; the length of 30 multimode fibers increases in arithmetic progression according to the arrangement order, and the tolerance of arithmetic progression is 2mm. The numbers of the 30 multimode fibers in Figure 4 are 1, 2... The transmission time is increased by 10ps, so that the arrival times of these 30 light spots increase uniformly.
作为选择,本实施例的电子束时间放大示波器测量系统中第一波长激光为266nm激光,第二波长激光为800nm激光。Alternatively, in the electron beam time amplification oscilloscope measurement system of this embodiment, the first wavelength laser is a 266 nm laser, and the second wavelength laser is an 800 nm laser.
本实施例的电子束时间放大示波器测量系统用于检测电子束时间放大示波器的参数,电子束时间放大示波器采用磁聚焦透镜产生高斯形磁场,磁场将微带阴极上的光电子成像在微通道板,提高示波器的成像质量,同时能够测量电脉冲波形。The electron beam time magnification oscilloscope measurement system of this embodiment is used to detect the parameters of the electron beam time magnification oscilloscope. The electron beam time magnification oscilloscope uses a magnetic focusing lens to generate a Gaussian magnetic field, and the magnetic field images the photoelectrons on the microstrip cathode on the microchannel plate. Improve the imaging quality of the oscilloscope, while being able to measure the electrical pulse waveform.
实施例3Example 3
在实施例2的基础上,实验时首先在微带阴极101、MCP变像管104上加直流电压,测量光纤的静态像,进而得到入射光的静态分布。激光光源201的第一输出端输出的波长为266nm、宽度为130fs的光脉冲经延时后均匀照射光纤传光束输入面,紫外光经光纤束204传输后形成相邻时间间隔为10ps的30个光点,这些光点经平行光管205后成像在MCP变像管104的微带线1043上。激光光源201的第二输出端输出波长为800nm的光脉冲送入光电探测器202,产生一个触发脉冲,用于触发高压脉冲发生器。测量MCP变像管104的时间分辨率T
MCP时,微带阴极101仅加直流电压,MCP变像管104加载选通脉冲,光脉冲和MCP选通脉冲同步上时获得无电子束时间放大时的动态图像。对动态图像进行归一化处理,根据光纤束204中光点延时差将归一化的动态像光强空间分布换算成时间分布,并对其进行高斯拟合,拟合曲线FWHM为T
MCP。测量电子束时间放大示波器时间分辨率T时,微带阴极101和MCP变像管104均加载了脉冲电压,同步光脉冲、阴极脉冲和MCP选通脉冲,获得电子束时间被展宽后的动态图像,对动态图像进行归一化处理,将归一化的动态像光强空间分布换算成时间分布,并对其进行高斯拟合,拟合曲线FWHM为T。
On the basis of Example 2, in the experiment, DC voltage was first applied to the microstrip cathode 101 and the MCP image tube 104 to measure the static image of the optical fiber, and then the static distribution of the incident light was obtained. The light pulse with a wavelength of 266 nm and a width of 130 fs outputted by the first output end of the laser light source 201 uniformly illuminates the input surface of the optical fiber beam transmission after being delayed, and the ultraviolet light is transmitted through the optical fiber bundle 204 to form 30 adjacent time intervals of 10 ps. The light spots are imaged on the microstrip line 1043 of the MCP picture tube 104 after passing through the collimator 205 . The second output end of the laser light source 201 outputs a light pulse with a wavelength of 800 nm and sends it to the photodetector 202 to generate a trigger pulse for triggering the high-voltage pulse generator. When measuring the time resolution T MCP of the MCP camcorder tube 104, only DC voltage is applied to the microstrip cathode 101, the MCP camcorder tube 104 is loaded with a strobe pulse, and the optical pulse and the MCP strobe pulse are synchronized to obtain a time amplification without electron beams dynamic images. The dynamic image is normalized, and the normalized dynamic image light intensity spatial distribution is converted into a time distribution according to the time delay difference of the light spots in the optical fiber bundle 204, and Gaussian fitting is performed on it, and the fitting curve FWHM is T MCP . When measuring the time resolution T of the electron beam time amplification oscilloscope, the microstrip cathode 101 and the MCP picture tube 104 are both loaded with pulse voltage, and the optical pulse, cathode pulse and MCP strobe pulse are synchronized to obtain a dynamic image after the electron beam time is broadened , normalize the dynamic image, convert the normalized dynamic image light intensity spatial distribution into time distribution, and perform Gaussian fitting on it, and the fitting curve FWHM is T.
测量结果:Measurement result:
(1)MCP变像管时间分辨率T
MCP实验测量结果
(1) The time resolution T MCP experimental measurement results of the MCP variable image tube
微带阴极101仅加-3kV直流电压,MCP加载-300V直流偏置电压和幅值-1.8kV、宽度225ps的选通脉冲,调节延时电路延迟,使得电子脉冲和选通脉冲到达MCP变像管104的微带线1043的时间同步,从而产生动态图像,如图5(a)所示。对动态图像和静态图像(5(b))进行归一化处理后,将归一化的动态像光强空间分布换算成时间分布,结果如图6所示,图中高斯拟合曲线的FWHM为78ps,此为无电子束时间放大时示波器的时间分辨率,即MCP变像管的时间分辨率T
MCP。
The microstrip cathode 101 only applies -3kV DC voltage, and the MCP is loaded with -300V DC bias voltage and a gate pulse with an amplitude of -1.8kV and a width of 225ps, and the delay of the delay circuit is adjusted to make the electronic pulse and the gate pulse reach the MCP. The time synchronization of the microstrip line 1043 of the tube 104 produces a dynamic image, as shown in FIG. 5(a). After normalizing the dynamic image and the static image (5(b)), the normalized dynamic image light intensity spatial distribution is converted into a time distribution, the result is shown in Figure 6, the FWHM of the Gaussian fitting curve in the figure is 78ps, which is the time resolution of the oscilloscope without electron beam time amplification, that is, the time resolution T MCP of the MCP picture tube.
(2)电子束时间放大示波器时间分辨率T实验测量结果(2) The experimental measurement results of the time resolution T of the electron beam time amplification oscilloscope
将光脉冲同步在阴极脉冲起始后约200ps的t
1点(如图7所示),微带阴极101和MCP变像管104均加载脉冲电压,同步光脉冲、阴极脉冲和MCP选通脉冲,获得电子束时间被展宽后的动态图像,如图8(a)所示。对动态图像8(a)和静态图像(图5(b))进行归一化处理后,将归一化的动态像光强空间分布换算成时间分布,结果如图9所示,图中高斯拟合曲线的FWHM为39ps,此为阴极脉冲斜坡t
1点对应的电子束时间放大示波器时间分辨率。
Synchronize the light pulse at t1 point about 200ps after the start of the cathode pulse (as shown in Figure 7), load the pulse voltage on both the microstrip cathode 101 and the MCP picture tube 104, and synchronize the light pulse, cathode pulse and MCP strobe pulse , a dynamic image of the time-stretched electron beam is obtained, as shown in Fig. 8(a). After normalizing the dynamic image 8(a) and the static image (Fig. 5(b)), the normalized dynamic image light intensity spatial distribution is converted into a temporal distribution. The result is shown in Fig. 9, in which the Gaussian The FWHM of the fitted curve is 39ps, which is the time resolution of the electron beam time amplification oscilloscope corresponding to the cathode pulse ramp t1 .
调节电路延时,光脉冲依次同步在阴极脉冲斜坡起始后约262.5ps的t
2点、325ps的t
3……825ps的t
11点,每相邻两点之间的时间间隔Δt=62.5ps,获得阴极脉冲斜坡t
2、t
3……t
11点对应的动态图像分别如图8(b)-(k)所示。光脉冲同步在阴极脉冲起始后约1200ps的t
12点时,动态图像如图8(l)所示。由上述动态图像可获得阴极脉冲斜坡t
2、t
3……t
12点对应的电子束时间放大示波器时间分辨率。阴极脉冲斜坡各点对应的时间分辨率与斜坡同步位置的关系如图10所示。
Adjusting the circuit delay, the optical pulses are synchronized sequentially at t 2 at about 262.5ps, t 3 at 325ps... t 11 at 825ps after the start of the cathode pulse ramp, and the time interval between each adjacent two points Δt=62.5ps , the dynamic images corresponding to the cathode pulse slopes t 2 , t 3 ...... t 11 points are obtained as shown in Fig. 8(b)-(k), respectively. When the optical pulse is synchronized at t 12 about 1200 ps after the onset of the cathode pulse, the dynamic image is shown in Fig. 8(l). From the above dynamic images, the time resolution of the electron beam time amplification oscilloscope corresponding to the cathode pulse slopes t 2 , t 3 . . . t 12 can be obtained. The relationship between the time resolution corresponding to each point of the cathode pulse ramp and the ramp synchronization position is shown in Figure 10.
实验时,设置阴极偏置电压V
B是-3kV。本实施例中采用短磁聚焦透镜对电子束进行成像,某一磁透镜电流只能使得具有某一能量的光电子清晰成像在MCP。根据磁透镜电流获得阴极脉冲起始后约200ps的t
1点,与光脉冲同步的阴极脉冲的电压值V
P(t
1)为120V。则由式(2)-(6)可得,V
P′(t
1)=0.37V/ps。
During the experiment, set the cathode bias voltage VB to be -3kV. In this embodiment, a short magnetic focusing lens is used to image the electron beam, and a certain magnetic lens current can only make the photoelectrons with a certain energy clearly image on the MCP. The voltage value VP (t 1 ) of the cathode pulse synchronized with the optical pulse is 120V at point t 1 about 200 ps after the onset of the cathode pulse is obtained from the magnetic lens current. Then it can be obtained from formulas (2)-(6), V P '(t 1 )=0.37V/ps.
由V
P(t
1)、T(t2)、T
MCP、式(4)和(7)可得,V
P(t
2)和V
P′(t
2)分别为199 V、1.26V/ps。由此依次可获得阴极脉冲各个斜坡位置的V
P(t)和V
P′(t),如表1所示。
From VP (t 1 ), T (t2), T MCP , equations (4) and (7), VP (t 2 ) and VP ′(t 2 ) are 199 V and 1.26 V/ ps , respectively . From this, the VP (t) and VP '(t) of each ramp position of the cathode pulse can be obtained in turn, as shown in Table 1.
表1 阴极脉冲各个斜坡同步位置的V
P(t)和V
P′(t)
Table 1 VP (t) and VP '(t) of each ramp synchronization position of cathode pulse
由表1可得,采用电子束时间放大示波器测量,获得的阴极脉冲从t1点至t12点的波形如图11中“x”所示。采用高速示波器测量获得的阴极脉冲波形如图11中“△”部分所示。由图11可得,采用两种设备测量获得的t1点至t12点之间阴极脉冲波形几乎一致,两者之间相差在6%以内。It can be seen from Table 1 that the electron beam time amplification oscilloscope is used to measure, and the waveform of the obtained cathode pulse from point t1 to point t12 is shown as "x" in Figure 11. The cathode pulse waveform obtained by high-speed oscilloscope measurement is shown in the "△" part of Figure 11. It can be seen from Fig. 11 that the cathode pulse waveforms obtained by the measurement of the two devices are almost identical between the points t1 and t12, and the difference between the two is within 6%.
电子束时间放大示波器极限时间分辨率取决于物理时间分辨率T
phys,当微带阴极101和阳极栅网102间距为1.8mm时,示波器极限时间分辨率与微带阴极101和阳极栅网102电压(阴栅极间电压)的关系如图12中红色曲线所示,微带阴极101和阳极栅网102间电压越大,电子渡越时间弥散越小,极限时间分辨率越高。电子束时间放大示波器最高理论带宽与微带阴极101和阳极栅网102间电压的关系如图12中曲线所示,阴栅极间电压越大,示波器带宽越高。当阴栅极间电压大于3.4kV时,理论带宽高于1000GHz。
The limit time resolution of the electron beam time amplification oscilloscope depends on the physical time resolution T phys . When the distance between the microstrip cathode 101 and the anode grid 102 is 1.8mm, the limit time resolution of the oscilloscope is related to the voltage of the microstrip cathode 101 and the anode grid 102 The relationship between (voltage between cathode and grid) is shown in the red curve in Figure 12. The higher the voltage between the microstrip cathode 101 and the anode grid 102, the smaller the electron transit time dispersion and the higher the limit time resolution. The relationship between the maximum theoretical bandwidth of the electron beam time amplification oscilloscope and the voltage between the microstrip cathode 101 and the anode grid 102 is shown in the curve in Figure 12. The greater the voltage between the cathode grids, the higher the oscilloscope bandwidth. When the voltage between cathode and gate is greater than 3.4kV, the theoretical bandwidth is higher than 1000GHz.
本说明书中各个实施例采用递进的方式描述,每个实施例重点说明的都是与其他实施例的不同之处,各个实施例之间相同相似部分互相参见即可。对于实施例公开的装置而言,由于其与实施例公开的方法相对应,所以描述的比较简单,相关之处参见方法部分说明即可。The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the various embodiments can be referred to each other. As for the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant part can be referred to the description of the method.
专业人员还可以进一步意识到,结合本实施例中所公开的实施例描述的各示例的单元及算法步骤,能够以电子硬件、计算机软件或者二者的结合来实现,为了清楚地说明硬件和软件的可互换性,在上述说明中已经按照功能一般性地描述了各示例的组成及步骤。这些功能究竟以硬件还是软件方式来执行,取决于技术方案的特定应用和设计约束条件。专业技术人员可以对每 个特定的应用来使用不同方法来实现所描述的功能,但是这种实现不应认为超出本发明的范围。Professionals may further realize that the units and algorithm steps of each example described in conjunction with the embodiments disclosed in this embodiment can be implemented by electronic hardware, computer software or a combination of the two, in order to clearly illustrate the hardware and software In the above description, the components and steps of each example have been generally described according to their functions. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Skilled artisans may use different methods of implementing the described functionality for each particular application, but such implementations should not be considered beyond the scope of the present invention.
结合本实施例中所公开的实施例描述的方法或算法的步骤可以直接用硬件、处理器执行的软件模块,或者二者的结合来实施。软件模块可以置于随机存储器(RAM)、内存、只读存储器(ROM)、电可编程ROM、电可擦除可编程ROM、寄存器、硬盘、可移动磁盘、CD-ROM、或技术领域内所公知的任意其它形式的存储介质中。The steps of the method or algorithm described in conjunction with the embodiments disclosed in this embodiment may be directly implemented by hardware, a software module executed by a processor, or a combination of the two. A software module can be placed in random access memory (RAM), internal memory, read only memory (ROM), electrically programmable ROM, electrically erasable programmable ROM, registers, hard disk, removable disk, CD-ROM, or any other in the technical field. in any other known form of storage medium.
以上实施例只为说明本发明的技术构思及特点,其目的在于让熟悉此项技术的人士能够了解本发明的内容并据此实施,并不能限制本发明的保护范围。凡跟本发明权利要求范围所做的均等变化与修饰,均应属于本发明权利要求的涵盖范围。The above embodiments are only intended to illustrate the technical concept and characteristics of the present invention, and the purpose is to enable those skilled in the art to understand the content of the present invention and implement accordingly, and cannot limit the protection scope of the present invention. All equivalent changes and modifications made with the scope of the claims of the present invention shall fall within the scope of the claims of the present invention.
Claims (10)
- 一种电子束时间放大示波器,其特征在于,包括微带阴极(101)、阳极栅网(102)、磁聚焦透镜(103)、MCP变像管(104)、CCD和高压脉冲发生器(105),所述高压脉冲发生器(105)的正极输出端连接所述微带阴极(101),所述高压脉冲发生器(105)的负极输出端连接所述MCP变像管(104),所述阳极栅网(102)接地;所述微带阴极(101)、所述阳极栅网(102)、所述MCP变像管(104)和所述CCD依次排列,且所述微带阴极(101)、所述阳极栅网(102)、所述MCP变像管(104)和所述CCD同轴放置;所述磁聚焦透镜(103)位于所述阳极栅网(102)和所述MCP变像管(104)之间;An electron beam time amplification oscilloscope, characterized in that it comprises a microstrip cathode (101), an anode grid (102), a magnetic focusing lens (103), an MCP picture tube (104), a CCD and a high-voltage pulse generator (105) ), the positive output terminal of the high-voltage pulse generator (105) is connected to the microstrip cathode (101), and the negative output terminal of the high-voltage pulse generator (105) is connected to the MCP image tube (104), so The anode grid (102) is grounded; the microstrip cathode (101), the anode grid (102), the MCP picture tube (104) and the CCD are arranged in sequence, and the microstrip cathode (102) 101), the anode grid (102), the MCP picture tube (104) and the CCD are coaxially disposed; the magnetic focusing lens (103) is located on the anode grid (102) and the MCP between the image changing tubes (104);所述微带阴极(101)在入射光照射下产生光电子,所述微带阴极(101)上加负直流偏置电压并叠加上高压斜坡脉冲,光脉冲同步在高压斜坡脉冲的上升沿;产生的光电子经过所述阳极栅网(102)后进入所述阳极栅网(102)和所述MCP变像管(104)之间的漂移区,所述光电子在所述磁聚焦透镜(103)磁场作用下展宽形成的电子束成像在所述MCP变像管(104)上,所述CCD记录所述MCP变像管(104)输出的可见光,再通过分析处理光点图像获得检测波形。The microstrip cathode (101) generates photoelectrons under the irradiation of incident light, a negative DC bias voltage is applied to the microstrip cathode (101) and a high-voltage ramp pulse is superimposed, and the optical pulse is synchronized on the rising edge of the high-voltage ramp pulse; The photoelectrons pass through the anode grid (102) and enter the drift region between the anode grid (102) and the MCP image tube (104), and the photoelectrons are in the magnetic field of the magnetic focusing lens (103) The electron beam formed by the expansion under the action is imaged on the MCP image tube (104), the CCD records the visible light output by the MCP image tube (104), and then obtains the detection waveform by analyzing and processing the light spot image.
- 根据权利要求1所述的电子束时间放大示波器,其特征在于,所述微带阴极(101)包括石英玻璃板和蒸镀在所述石英玻璃板上的三条黄金阴极微带线,每条所述黄金阴极微带线的厚度为80nm,宽度为8mm;三条所述黄金阴极微带线平行排列,相邻所述黄金阴极微带线的间隔为2.8mm。The electron beam time amplification oscilloscope according to claim 1, wherein the microstrip cathode (101) comprises a quartz glass plate and three gold cathode microstrip lines evaporated on the quartz glass plate, each of which is The thickness of the gold cathode microstrip line is 80nm and the width is 8mm; the three gold cathode microstrip lines are arranged in parallel, and the interval between the adjacent gold cathode microstrip lines is 2.8mm.
- 根据权利要求1所述的电子束时间放大示波器,其特征在于,所述磁聚焦透镜(103)包括软铁和1200匝铜线圈,所述磁聚焦透镜(103)的外径为256mm,所述磁聚焦透镜(103)的内径为160mm,所述磁聚焦透镜(103)的轴线方向长度为100mm;所述磁聚焦透镜(103)的圆环内侧有一圈宽度为4mm的缝隙。The electron beam time magnification oscilloscope according to claim 1, characterized in that, the magnetic focusing lens (103) comprises soft iron and 1200-turn copper coils, the outer diameter of the magnetic focusing lens (103) is 256 mm, and the The inner diameter of the magnetic focusing lens (103) is 160 mm, and the axial length of the magnetic focusing lens (103) is 100 mm; the inner ring of the magnetic focusing lens (103) has a gap with a width of 4 mm.
- 根据权利要求1所述的电子束时间放大示波器,其特征在于,所述MCP变像管(104)包括阻抗渐变线(1041)、微通道板(1042)、蒸镀在微通道板 (1042)上的三条微带线(1043)和制作在光纤面板上的荧光屏(1044),所述微带线(1043)朝向所述阳极栅网(102)侧,所述荧光屏(1044)位于所述微通道板(1042)和所述CCD之间;所述高压脉冲发生器(105)的负极输出端通过所述阻抗渐变线(1041)连接所述微带线(1043);The electron beam time amplification oscilloscope according to claim 1, characterized in that, the MCP picture tube (104) comprises an impedance gradient line (1041), a microchannel plate (1042), and is vapor-deposited on the microchannel plate (1042) three microstrip lines (1043) on the optical fiber panel and a fluorescent screen (1044) made on the optical fiber panel, the microstrip lines (1043) face the anode grid (102) side, and the fluorescent screen (1044) is located on the microstrip (1044) side. between the channel plate (1042) and the CCD; the negative output end of the high-voltage pulse generator (105) is connected to the microstrip line (1043) through the impedance gradient line (1041);所述微通道板(1042)的外径为56mm,厚度为0.5mm,通道直径为12μm,斜切角为6°;所述微带线(1043)的宽度为8mm,三条所述微带线(1043)平行排列,且相邻两条所述微带线(1043)的间隔为2.8mm;所述微通道板(1042)和所述荧光屏(1044)平行放置,所述微通道板(1042)和所述荧光屏(1044)之间的距离为0.5mm。The outer diameter of the microchannel plate (1042) is 56mm, the thickness is 0.5mm, the channel diameter is 12μm, and the chamfer angle is 6°; the width of the microstrip line (1043) is 8mm, and the three microstrip lines are (1043) are arranged in parallel, and the interval between two adjacent microstrip lines (1043) is 2.8 mm; the microchannel plate (1042) and the phosphor screen (1044) are placed in parallel, and the microchannel plate (1042) ) and the phosphor screen (1044) at a distance of 0.5 mm.
- 根据权利要求1所述的电子束时间放大示波器,其特征在于,所述高压脉冲发生器(105)包括雪崩三极管电路(1051)和二极管脉冲电路(1052),所述雪崩三极管电路(1051)产生的高压斜坡脉冲分为两部分,一部分通过阻抗渐变线(1041)输入到所述微带阴极(101),另一部分用于驱动所述二极管脉冲电路(1052)以产生MCP选通脉冲。The electron beam time amplification oscilloscope according to claim 1, wherein the high-voltage pulse generator (105) comprises an avalanche triode circuit (1051) and a diode pulse circuit (1052), and the avalanche triode circuit (1051) generates The high voltage ramp pulse is divided into two parts, one part is input to the microstrip cathode (101) through the impedance gradient line (1041), and the other part is used to drive the diode pulse circuit (1052) to generate the MCP strobe pulse.
- 根据权利要求1所述的电子束时间放大示波器,其特征在于,所述微带阴极(101)连接第一衰减器(1061),所述第一衰减器(1061)吸收掉经过所述微带阴极(101)之后的高压斜坡脉冲;所述MCP变像管(104)的微带线(1043)连接第二衰减器(1062),所述第二衰减器(1062)吸收掉经过所述微带线(1043)之后的MCP选通脉冲。The electron beam time amplification oscilloscope according to claim 1, characterized in that, the microstrip cathode (101) is connected to a first attenuator (1061), and the first attenuator (1061) absorbs the passing through the microstrip The high voltage ramp pulse after the cathode (101); the microstrip line (1043) of the MCP picture tube (104) is connected to the second attenuator (1062), and the second attenuator (1062) absorbs the MCP strobe after strip line (1043).
- 根据权利要求1所述的电子束时间放大示波器,其特征在于,所述微带阴极(101)接收入射光照后产生光电子,所述光电子在所述磁聚焦透镜(103)的磁场约束下飞行至所述MCP变像管(104);发射时间为t i的光电子到达所述MCP变像管(104)的时刻为: The electron beam time amplification oscilloscope according to claim 1, characterized in that, the microstrip cathode (101) generates photoelectrons after receiving incident light, and the photoelectrons fly to the limit of the magnetic field of the magnetic focusing lens (103). The MCP image changing tube (104); the moment when the photoelectrons whose emission time is t i arrives at the MCP image changing tube (104) is:其中,L为所述漂移区的长度,e为光电子电荷量,e=1.6×10 -19C;m为光电子质量,m=9.1×10 -31kg; 是所述微带阴极(101)和所述阳极栅网(102)之间的电压差,V B是阴极偏置电压,V P(t)是t时刻与光 脉冲同步的阴极脉冲的电压值; Wherein, L is the length of the drift region, e is the photoelectron charge, e=1.6×10 -19 C; m is the photoelectron mass, m=9.1×10 -31 kg; is the voltage difference between the microstrip cathode (101) and the anode grid (102), VB is the cathode bias voltage, and VP (t) is the voltage value of the cathode pulse synchronized with the light pulse at time t ;电子束时间放大倍率M可表示为:The electron beam time magnification M can be expressed as:则电子束时间放大示波器的技术时间分辨率为:Then the technical time resolution of the electron beam time amplification oscilloscope is:其中,T MCP为所述MCP变像管(104)的时间分辨率; Wherein, T MCP is the time resolution of the MCP picture tube (104);电子束时间放大示波器的时间分辨率为:The time resolution of the electron beam time amplification oscilloscope is:T phys为物理时间分辨率,取决于所述微带阴极(101)和所述阳极栅网(102)之间电子渡越时间弥散: T phys is the physical time resolution, which depends on the electron transit time dispersion between the microstrip cathode (101) and the anode grid (102):E=[-V B-V P(t)]/L pa (6) E=[-V B -V P (t)]/L pa (6)T phys的单位为ps,其中δε是光电子的初能量分布,单位是eV,在波长为260nm的紫外激光照射下,所述微带阴极(101)产生的光电子的初能量分布是0.5eV;E是所述微带阴极(101)和所述阳极栅网(102)之间的电场强度,单位是kV/mm;Lpa是所述微带阴极(101)和所述阳极栅网(102)之间的距离。 The unit of T phys is ps, where δε is the initial energy distribution of photoelectrons, and the unit is eV. Under the irradiation of ultraviolet laser with a wavelength of 260 nm, the initial energy distribution of photoelectrons generated by the microstrip cathode (101) is 0.5 eV; E is the electric field strength between the microstrip cathode (101) and the anode grid (102), in kV/mm; Lpa is the difference between the microstrip cathode (101) and the anode grid (102) distance between.
- 一种电子束时间放大示波器测量系统,其特征在于,包括如权利要求1至7任一项所述的电子束时间放大示波器,所述系统还包括激光光源(201)、光电探测器(202)、延时电路(203)、光纤束(204)和平行光管(205),所述光纤束(204)包括多根光纤,且多根光纤的长度呈等差数列分布;An electron beam time amplification oscilloscope measurement system, characterized in that it comprises the electron beam time amplification oscilloscope according to any one of claims 1 to 7, and the system further comprises a laser light source (201), a photodetector (202) , a delay circuit (203), an optical fiber bundle (204) and a parallel light pipe (205), the optical fiber bundle (204) includes a plurality of optical fibers, and the lengths of the multiple optical fibers are distributed in an arithmetic progression;所述激光光源(201)包括用于输出第一波长激光的第一输出端和用于输出第二波长激光的第二输出端,所述第一输出端发射的激光经过所述光纤束(204)入射所述平行光管(205),经所述平行光管(205)传输后入射至所 述电子束时间放大示波器的微带阴极(101);所述第二输出端发射的激光输入所述光电探测器(202),生成的电信号经所述延时电路(203)延时后输入所述电子束时间放大示波器的高压脉冲发生器(105)的输入端。The laser light source (201) includes a first output end for outputting a first wavelength laser light and a second output end for outputting a second wavelength laser light, and the laser light emitted by the first output end passes through the fiber bundle (204) ) is incident on the collimator (205), and after being transmitted by the collimator (205), it is incident on the microstrip cathode (101) of the electron beam time amplification oscilloscope; the laser emitted by the second output end is input to the The photodetector (202), the generated electrical signal is delayed by the delay circuit (203) and then input to the input end of the high-voltage pulse generator (105) of the electron beam time amplification oscilloscope.
- 根据权利要求8所述的电子束时间放大示波器测量系统,其特征在于,所述光纤束(204)包括30根多模光纤,30根多模光纤紧邻排列为矩形,所述矩形包含3行多模光纤,每行有10根多模光纤;30根多模光纤的长度依据排列顺序呈等差数列递增,等差数列的公差为2mm。The electron beam time amplification oscilloscope measurement system according to claim 8, wherein the optical fiber bundle (204) comprises 30 multimode optical fibers, and the 30 multimode optical fibers are arranged in a rectangle adjacent to each other, and the rectangle includes three rows of more than 30 multimode optical fibers. Mode fiber, there are 10 multimode fibers in each row; the length of 30 multimode fibers increases in arithmetic progression according to the arrangement order, and the tolerance of arithmetic progression is 2mm.
- 根据权利要求8所述的电子束时间放大示波器测量系统,其特征在于,所述第一波长激光为266nm激光,所述第二波长激光为800nm激光。The electron beam time amplification oscilloscope measurement system according to claim 8, wherein the first wavelength laser is a 266 nm laser, and the second wavelength laser is an 800 nm laser.
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