WO2022075254A1 - Differential transmission line and communication device using same - Google Patents

Differential transmission line and communication device using same Download PDF

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Publication number
WO2022075254A1
WO2022075254A1 PCT/JP2021/036608 JP2021036608W WO2022075254A1 WO 2022075254 A1 WO2022075254 A1 WO 2022075254A1 JP 2021036608 W JP2021036608 W JP 2021036608W WO 2022075254 A1 WO2022075254 A1 WO 2022075254A1
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Prior art keywords
line
signal
signal line
differential
bent portion
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PCT/JP2021/036608
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French (fr)
Japanese (ja)
Inventor
謙二 遠藤
信治 岩塚
裕貴 原
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Tdk株式会社
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Publication of WO2022075254A1 publication Critical patent/WO2022075254A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/02—Bends; Corners; Twists
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors

Definitions

  • the present invention relates to a differential transmission line and a communication device using the same, and particularly to the shape of a bent portion of the differential transmission line.
  • a differential transmission line that uses a pair of signal lines to transmit signals of opposite phases is known. According to the differential transmission line, signal transmission resistant to noise can be realized, and power consumption can be reduced by reducing the amplitude of the signal voltage.
  • the inner signal line at the bent portion is brought closer to the outer signal line immediately after being pulled out from the pad. Wiring is done to increase the length of the inner signal line.
  • Patent Document 1 a differential line including a pair of signal lines parallel to each other having a curved portion and a ground conductor layer arranged with the differential line sandwiched between the differential line and the pair of signal lines.
  • a dielectric between the inner signal line and the ground conductor layer of the pair of signal lines in the curved portion, the electric length of the inner signal line is lengthened, whereby the pair of signals is provided. It is described to reduce the line length difference of the line.
  • Patent Document 2 describes a configuration in which a differential microstrip line having a curved portion is covered with a dielectric cover.
  • the line length difference between the pair of signal lines caused by the bent portion can be reduced by the method of providing the dielectric layer as described in Patent Documents 1 and 2.
  • improvement is required since the local formation of the dielectric layer requires the addition of a manufacturing process, improvement is required.
  • the differential transmission line according to the present invention includes a differential line composed of a pair of signal lines, and the differential line includes a straight portion and a bent portion that changes the traveling direction of the straight portion.
  • the line width and line spacing of the pair of signal lines at the bent portion are narrower than the line width and line spacing of the pair of signal lines at the straight portion.
  • the present invention it is possible to reduce the difference in length between a pair of signal lines while reducing the transmission loss of the line. Further, it is possible to reduce the line length difference of the pair of signal lines caused by the bent portion without requiring a special processing step such as a dielectric layer forming step.
  • the pair of signal lines has a first signal line and a second signal line located outside the first signal line at the bent portion, and the first signal line at the bent portion is the straight line. It is preferable that the wiring is closer to the second signal line side than the first signal line in the section. According to this configuration, the line length difference between the first signal line and the second signal line constituting the differential line can be reduced.
  • the second signal line at the bent portion is wired so as not to be closer to the first signal line side than the second signal line at the straight portion. According to this configuration, only the first signal line can be lengthened without lengthening the second signal line, and the line length difference between the first signal line and the second signal line can be further reduced. Further, the distance between the first signal line and the second signal line can be narrowed without lengthening the second signal line, and the characteristic impedance of the differential line can be maintained constant.
  • the first signal line at the bent portion has a meandering portion. According to this configuration, the line length of the first signal line can be further lengthened, and the line length difference between the first and second signal lines can be further reduced.
  • the first and second signal lines are drawn from the first and second pad electrodes, respectively, and the first signal line is drawn from the first pad electrode and then moved toward the second signal line side. It is preferable that the second signal line is wired without approaching the first signal line side after being drawn from the second pad electrode.
  • the communication device includes a differential transmission line having the above-mentioned characteristics of the present invention and a differential signal supply unit for supplying a differential signal to the differential transmission line, and the differential signal supply unit is provided. , It is characterized by supplying a phase-modulated differential signal. According to the present invention, it is possible to realize a communication device having a good modulation characteristic by being configured by using a differential transmission line having a small phase difference.
  • the present invention it is possible to provide a differential transmission line capable of reducing the line length difference between a pair of signal lines while reducing the transmission loss, and a communication device using the differential transmission line.
  • FIG. 1 is a plan view partially showing the configuration of a differential transmission line according to the first embodiment of the present invention.
  • FIG. 2 is a plan view partially showing the configuration of the differential transmission line according to the second embodiment of the present invention.
  • FIG. 3 is a plan view partially showing the configuration of the differential transmission line according to the third embodiment of the present invention.
  • FIG. 4 is a plan view partially showing the configuration of the differential transmission line according to the fourth embodiment of the present invention.
  • FIG. 5 is a plan view partially showing the configuration of the differential transmission line according to the fifth embodiment of the present invention.
  • FIG. 6 is a plan view partially showing the configuration of the differential transmission line according to the sixth embodiment of the present invention.
  • FIG. 7 is a plan view partially showing an example of the configuration of a conventional differential transmission line.
  • FIG. 8 is a plan view partially showing another example of the configuration of the conventional differential transmission line.
  • FIG. 1 is a plan view showing a configuration of a differential transmission line according to the first embodiment of the present invention.
  • the differential transmission line 1 includes a differential line 10 composed of a pair of signal lines 11A and 11B formed on a substrate.
  • the differential line 10 is drawn from the pair of pad electrodes 20A and 20B, travels in the X direction, then bends 90 and extends in the Y direction. Therefore, the differential line 10 includes a straight line portion 10A (first straight line portion) extending in the X direction, a bent portion 10B that changes the traveling direction of the straight line portion 10A from the X direction to the Y direction, and a straight line portion 10C extending in the Y direction. It has (second straight line portion).
  • the pair of pad electrodes 20A and 20B are connected to the differential signal supply unit 30, and for example, a phase-modulated differential signal is supplied to the differential transmission line 1.
  • the differential transmission line 1 and the differential signal supply unit 30 form a part of the communication device. Examples of the communication device include a Mach-Zehnder modulator.
  • the first signal line 11A is a line (inner line) located inside the bending portion 10B in the radius of curvature direction
  • the second signal line 11B is a line located outside the bending portion 10B in the radius of curvature direction (outer line).
  • the differential line 10 is bent, the lengths of the pair of signal lines 11A and 11B differ, and the total length of the first signal line 11A becomes shorter than the total length of the second signal line 11B.
  • Such a line length difference basically occurs when the number of times the differential line 10 turns to the right and the number of times to turn to the left are different, and the larger the difference between the number of times to turn to the right and the number of times to turn to the left, the greater the difference in line length. Will also grow.
  • the first signal line 11A is drawn from the first pad electrode 20A and then moved to the second signal line 11B side. It is offset. That is, the second signal line 11B is drawn out in the X direction from the center position in the width direction of the second pad electrode 20B and is wired straight, but the first signal line 11A is X from the center position in the width direction of the first pad electrode 20A. Immediately after being pulled out in the direction, it bends 90 degrees to approach the second signal line 11B, and further bends 90 degrees at a position separated from the second signal line 11B by a certain interval and is wired in parallel with the second signal line 11B.
  • the differential transmission line 1 obtains the desired characteristic impedance. Needs to adjust the line spacing Da of the first and second signal lines 11A and 11B drawn from the first and second pad electrodes 20A and 20B. At this time, by providing an offset adjusting unit 13 (extended line) for moving the first signal line 11A toward the second signal line 11B and lengthening the physical length of the first signal line 11A, the first and second signals are used. The lengths of the lines 11A and 11B can be balanced.
  • the length of the first signal line 11A with respect to the second signal line 11B is set to the first pad electrode 20A.
  • the line length difference between the pair of signal lines 11A and 11B can be reduced by adjusting in advance near the root of the signal line.
  • the line width and the line spacing of the pair of signal lines 11A and 11B in the bent portion 10B are made narrower than those of the straight lines 10A and 10C in order to further reduce the line length difference.
  • the line widths of the first and second signal lines 11A and 11B are wide in the straight portions 10A and 10C of the differential line 10 and narrow in the bent portions 10B.
  • a line width transition portion 12 whose line width gradually changes toward the bent portion 10B is provided.
  • the line width Wb at the bent portions 10B of the first and second signal lines 11A and 11B is narrower than the line width Wa at the straight portions 10A and 10C (Wa> Wb).
  • the line width Wb of the first and second signal lines 11A and 11B in the bent portion 10B is 1 ⁇ 2 or less of the line width Wa of the first and second signal lines 11A and 11B in the bent portion 10B (Wb ⁇ Wa / 2). It is preferably 1/3 or less (Wb ⁇ Wa / 3), and more preferably.
  • the line spacing Db of the first and second signal lines 11A and 11B in the bent portion 10B is the first and 10C in the straight portions 10A and 10C. It is narrower than the line spacing Da of the second signal lines 11A and 11B (Da> Db).
  • the line spacing of the first and second signal lines 11A and 11B is the distance from the side surface of the first signal line 11A on the second signal line 11B side to the side surface of the second signal line 11B on the first signal line 11A side. This is the width of the insulation space between the first and second signal lines 11A and 11B.
  • the first signal line 11A is wired closer to the second signal line 11B side, and the second signal line is wired. 11B is wired closer to the first signal line 11A side. That is, by wiring both the inner line and the outer line close to each other, the line spacing Db of the pair of signal lines 11A and 11B in the bent portion 10B can be changed to the line of the pair of signal lines 11A and 11B in the straight portions 10A and 10C. It is narrower than the interval Da.
  • the first signal line 11A in the bent portion 10B is orthogonal to the traveling direction of the straight line portion from the terminal position of the straight line portions 10A and 10C and is the first. 2
  • an offset adjusting unit 14 extended line that travels in a direction approaching the signal line 11B.
  • the second signal line 11B in the bent portion 10B is an offset adjusting section 14 (extended line) traveling in a direction orthogonal to the traveling direction of the straight section and approaching the first signal line 11A from the terminal positions of the straight sections 10A and 10C. )including.
  • the line spacing can be narrowed while maintaining the characteristic impedance constant.
  • the line spacing between the first and second signal lines 11A and 11B in the bent portion 10B is narrowed in this way, the difference in radius of curvature between the inner line and the outer line becomes smaller, which reduces the line length difference.
  • the overall line length difference can be reduced.
  • the line spacing D of the first and second signal lines 11A and 11B is also narrowed. Since it is necessary, the difference in radius of curvature between the inner line and the outer line becomes smaller, the difference in line length at the bent portion 10B becomes smaller, but the transmission loss becomes larger.
  • the line widths W of the first and second signal lines 11A and 11B are uniformly wide over the entire length, the transmission loss is small, but the line length difference in the bent portion 10B is large.
  • the phase difference at 48 GHz is about 16.5 degrees.
  • the line widths and line spacings of the first and second signal lines 11A and 11B in the bent portion 10B are set to the line widths and lines of the first and second signal lines 11A and 11B in the straight portions 10A and 10C. Since it is narrower than the interval, it is possible to reduce the line length difference between the inner line and the outer line in the bent portion 10B while reducing the transmission loss in most of the differential lines 10. Therefore, the phase difference of the differential signal due to the line length difference can be reduced, and the transmission loss of the high frequency signal can be reduced.
  • FIG. 2 is a plan view showing a configuration of a differential transmission line according to a second embodiment of the present invention.
  • the characteristic of the differential transmission line 1 is that the line spacing Db of the first and second signal lines 11A and 11B is narrowed in the bent portion 10B, so that only the first signal line 11A is the second signal.
  • the second signal line 11B is wired closer to the line 11B side, and the second signal line 11B is wired without approaching the first signal line 11A side. Therefore, the first signal line 11A in the bent portion 10B is an offset adjusting portion 14 (extended line) traveling in a direction orthogonal to the traveling direction of the straight portion and approaching the second signal line 11B from the terminal position of the straight portions 10A and 10C. ), But the second signal line 11B in the bent portion 10B does not have such an offset adjusting portion 14 (extended line).
  • the second signal line 11B is centered at the boundary position between the bent portion 10B and the straight portions 10A and 10C, and the center line of the second signal line 11B in the bent portion 10B is the second signal line in the straight portions 10A and 10C. It is on the extension of the center line of 11B.
  • Other configurations are the same as those of the first embodiment.
  • the present embodiment it is possible to lengthen only the first signal line 11A without lengthening the second signal line 11B to further reduce the line length difference between the first signal line 11A and the second signal line 11B. .. Further, the distance between the first signal line 11A and the second signal line 11B can be narrowed without lengthening the second signal line 11B, and the characteristic impedance of the differential line 10 can be maintained constant.
  • FIG. 3 is a plan view showing a configuration of a differential transmission line according to a third embodiment of the present invention.
  • the characteristic of the differential transmission line 1 is that the end of the second signal line 11B in the bent portion 10B is the outer end of the second signal line 11B in the straight portions 10A and 10C in the width direction. It is at the point where it is connected to. That is, the second signal line 11B in the bent portion 10B is wired closer to the outside in the radius of curvature direction (direction away from the first signal line 11A) than the second signal line 11B in the straight lines 10A and 10C. Further, the widthwise outer edge position of the second signal line 11B in the bent portion 10B is aligned with the widthwise outer edge position of the second signal line 11B in the straight lines 10A and 10C. Since the second signal line 11B is wired slightly closer to the outside, the length of the offset adjusting portion 14 provided on the first signal line 11A in the bent portion 10B is longer than that of the second embodiment. Other configurations are the same as those of the second embodiment.
  • the length of the first signal line 11A with respect to the second signal line 11B can be further lengthened, and the line length difference between the first signal line 11A and the second signal line 11B can be further reduced. Can be done.
  • FIG. 4 is a schematic plan view showing a configuration of a differential transmission line according to a fourth embodiment of the present invention.
  • the characteristic of the differential transmission line 1 is that the first signal line 11A in the bent portion 10B has a meandering portion 15 in which the first signal line 11A travels while meandering in the traveling direction thereof.
  • the first signal line 11A in the portion 10B is formed to be longer.
  • the meandering range of the first signal line 11A in the bending portion 10B (the forming region of the meandering portion 15) is a normal bending wiring route connecting straight lines from the start end to the end of the bending portion 10B in the shortest time. It is limited to the outer offset region closer to the second signal line 11B than the broken line), and does not include the inner offset region farther from the second signal line 11B than the normal bending wiring route.
  • the electrical length difference between the first signal line 11A and the second signal line 11B can be further reduced. Further, by limiting the meandering range to the outer offset region, it is possible to suppress a large increase in the reflection loss due to the meandering portion 15.
  • FIG. 5 is a plan view showing a configuration of a differential transmission line according to a fifth embodiment of the present invention.
  • FIG. 6 is a plan view showing a configuration of a differential transmission line according to a sixth embodiment of the present invention.
  • the characteristic of these differential transmission lines 1 is that the meandering range of the first signal line 11A in the bent portion 10B is an outer offset closer to the second signal line 11B than the normal bending wiring route. Not only the region but also the inner offset region which is farther from the second signal line 11B than the normal bending wiring route is included, and the wiring is slightly protruding to the inner region in the radial direction of curvature.
  • FIG. 5 shows a case where the amount of protrusion of the meandering portion 15 is small
  • FIG. 6 shows a case where the amount of protrusion of the meandering portion 15 is large.
  • the reflection characteristics deteriorate as the meandering of the first signal line 11A increases, but since the first signal line 11A can be further lengthened, the line length difference between the first signal line 11A and the second signal line 11B can be further increased. It can be made smaller. Since the magnitude of meandering of the first signal line 11A and the deterioration of the reflection characteristics are in a trade-off relationship, the balance between the two is important. According to the fifth and sixth embodiments, the first signal line 11A can be further lengthened, so that the line length difference between the first signal line 11A and the second signal line 11B can be further reduced. ..
  • the distance between the first and second pad electrodes 20A and 20B is not so large, and immediately after being pulled out from the pad electrode, the inner signal line at the bent portion is drawn closer to the outer signal line, and the offset adjusting portion 13 is used. Even if the correction by increasing the length of is almost impossible, it can be dealt with.
  • the first and second pad electrodes 20A and 20B are drawn out from the first and second pad electrodes 20A and 20B, respectively.
  • the signal lines 11A and 11B only the first signal line 11A is wired closer to the second signal line 11B side, and the second signal line 11B is wired straight without approaching the first signal line 11A side.
  • the second signal line 11B may be closer to the first signal line 11A side for wiring.
  • the first and second signal lines 11A and 11B are used. It is also possible to wire them closer to each other.
  • Differential transmission line 10 Differential line 10A Straight line part (first straight line part) 10B Bent part 10C Straight part (second straight part) 11A 1st signal line (inner line) 11B 2nd signal line (outer line) 12 Line width transition part 13 Offset adjustment part 14 Offset adjustment part 15 Meandering part 20A 1st pad electrode 20B 2nd pad electrode 30 Differential signal supply part

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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
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Abstract

[Problem] To provide a differential transmission line that makes it possible to reduce the difference in line length between a pair of signal lines while reducing transmission loss. [Solution] This differential transmission line 1 is provided with a differential line 10 comprising a pair of signal lines 11A, 11B. The differential line 10 has a linear section 10A and a curved section 10B for changing the direction of travel of the linear section 10A. The line width Wb and the line interval Db of the pair of signal lines 11A, 11B in the curved section 10B are narrower than the line width Wa and the line interval Da of the pair of signal lines 11A, 11B in the linear section 10A.

Description

差動伝送線路及びこれを用いた通信装置Differential transmission line and communication equipment using it
　本発明は、差動伝送線路及びこれを用いた通信装置に関し、特に差動伝送線路の屈曲部の形状に関する。 The present invention relates to a differential transmission line and a communication device using the same, and particularly to the shape of a bent portion of the differential transmission line.
　高周波信号の伝送線路として、一対の信号線路を用いて互いに逆位相の信号を伝送する差動伝送線路が知られている。差動伝送線路によれば、ノイズに強い信号伝送を実現でき、また信号電圧の振幅の低下による低消費電力化を図ることができる。 As a transmission line for high-frequency signals, a differential transmission line that uses a pair of signal lines to transmit signals of opposite phases is known. According to the differential transmission line, signal transmission resistant to noise can be realized, and power consumption can be reduced by reducing the amplitude of the signal voltage.
　差動伝送線路の進行方向を変えるためにはその一部を屈曲させる必要がある。この場合、屈曲部の内側の信号線路と外側の信号線路の長さに差が生じるため、線路長差に起因して差動信号に伝送遅れの差（スキュー）を生じてしまうという問題があった。 In order to change the traveling direction of the differential transmission line, it is necessary to bend a part of it. In this case, since there is a difference in length between the signal line inside the bent portion and the signal line outside the bent portion, there is a problem that a difference in transmission delay (skew) is generated in the differential signal due to the difference in line length. rice field.
　屈曲部に起因する一対の信号線路の線路長差を縮小する方法として、例えば図７に示すように、パッドから引き出された直後に、屈曲部における内側の信号線路を外側の信号線路に寄せて配線し、内側の信号線路の長さを増加させることが行われている。 As a method of reducing the line length difference of a pair of signal lines caused by the bent portion, for example, as shown in FIG. 7, the inner signal line at the bent portion is brought closer to the outer signal line immediately after being pulled out from the pad. Wiring is done to increase the length of the inner signal line.
　また、特許文献１には、湾曲部分を有する互いに平行な一対の信号線路を含む差動線路と、該差動線路を挟んで、前記一対の信号線路と間を空けて配置された接地導体層とを備え、湾曲部分における一対の信号線路のうちの内側の信号線路と接地導体層との間に誘電体を配置することにより、内側の信号線路の電気長を長くし、これにより一対の信号線路の線路長差を小さくすることが記載されている。また、特許文献２には、曲線部を有する差動マイクロストリップ線路を誘電体カバーで覆う構成が記載されている。 Further, in Patent Document 1, a differential line including a pair of signal lines parallel to each other having a curved portion and a ground conductor layer arranged with the differential line sandwiched between the differential line and the pair of signal lines. By arranging a dielectric between the inner signal line and the ground conductor layer of the pair of signal lines in the curved portion, the electric length of the inner signal line is lengthened, whereby the pair of signals is provided. It is described to reduce the line length difference of the line. Further, Patent Document 2 describes a configuration in which a differential microstrip line having a curved portion is covered with a dielectric cover.
特開２０２０－００５０１８号公報Japanese Unexamined Patent Publication No. 2020-005018 特開２００４－３０４２３３号公報Japanese Unexamined Patent Publication No. 2004-304233
　高周波信号の伝送線路において伝送損失を低減するためには、信号線路の線幅を広げる方法が有効である。そして、伝送線路の特性インピーダンスを一定に維持するためには、線幅と共に線路間隔も広くする必要がある。しかし、線幅と線路間隔の両方を広くすると、屈曲部において内側線路と外側線路との線路長差がさらに拡大するため、スキューの抑制が困難になる。 In order to reduce the transmission loss in the transmission line of high frequency signals, it is effective to widen the line width of the signal line. In order to maintain the characteristic impedance of the transmission line constant, it is necessary to widen the line spacing as well as the line width. However, if both the line width and the line spacing are widened, the line length difference between the inner line and the outer line at the bent portion further increases, which makes it difficult to suppress skew.
　屈曲部に起因する一対の信号線路の線路長差は、特許文献１及び２に記載のように誘電体層を設ける方法により縮小可能である。しかし、誘電体層の局所的な形成には製造工程の追加が必要なことから、改善が求められている。 The line length difference between the pair of signal lines caused by the bent portion can be reduced by the method of providing the dielectric layer as described in Patent Documents 1 and 2. However, since the local formation of the dielectric layer requires the addition of a manufacturing process, improvement is required.
　したがって、本発明の目的は、製造工程の追加を伴うことなく、屈曲部に起因する一対の信号線路の線路長差を縮小することが可能な差動伝送線路を提供することにある。また本発明の目的は、そのような差動伝送線路を用いた通信装置を提供することにある。 Therefore, an object of the present invention is to provide a differential transmission line capable of reducing the line length difference of a pair of signal lines caused by a bent portion without adding a manufacturing process. Another object of the present invention is to provide a communication device using such a differential transmission line.
　上記課題を解決するため、本発明による差動伝送線路は、一対の信号線路からなる差動線路を備え、前記差動線路は、直線部と、前記直線部の進行方向を変更する屈曲部とを有し、前記屈曲部における前記一対の信号線路の線幅及び線路間隔は、前記直線部における前記一対の信号線路の線幅及び線路間隔よりも狭いことを特徴とする。 In order to solve the above problems, the differential transmission line according to the present invention includes a differential line composed of a pair of signal lines, and the differential line includes a straight portion and a bent portion that changes the traveling direction of the straight portion. The line width and line spacing of the pair of signal lines at the bent portion are narrower than the line width and line spacing of the pair of signal lines at the straight portion.
　本発明によれば、線路の伝送損失を低減しながら一対の信号線路線路長差を小さくすることができる。また、誘電体層の形成工程などの特別な加工工程を伴うことなく、屈曲部に起因する一対の信号線路の線路長差を低減することができる。 According to the present invention, it is possible to reduce the difference in length between a pair of signal lines while reducing the transmission loss of the line. Further, it is possible to reduce the line length difference of the pair of signal lines caused by the bent portion without requiring a special processing step such as a dielectric layer forming step.
　前記一対の信号線路は、第１信号線路と、前記屈曲部において前記第１信号線路よりも外側に位置する第２信号線路とを有し、前記屈曲部における前記第１信号線路は、前記直線部における前記第１信号線路よりも前記第２信号線路側に寄せて配線されていることが好ましい。この構成によれば、差動線路を構成する第１信号線路と第２信号線路との線路長差を小さくすることができる。 The pair of signal lines has a first signal line and a second signal line located outside the first signal line at the bent portion, and the first signal line at the bent portion is the straight line. It is preferable that the wiring is closer to the second signal line side than the first signal line in the section. According to this configuration, the line length difference between the first signal line and the second signal line constituting the differential line can be reduced.
　前記屈曲部における前記第２信号線路は、前記直線部における前記第２信号線路よりも前記第１信号線路側に寄ることなく配線されていることが好ましい。この構成によれば、第２信号線路を長くすることなく第１信号線路だけを長くして第１信号線路と第２信号線路との線路長差をさらに小さくすることができる。また、第２信号線路を長くすることなく第１信号線路と第２信号線路との間隔を狭くすることができ、差動線路の特性インピーダンスを一定に維持することができる。 It is preferable that the second signal line at the bent portion is wired so as not to be closer to the first signal line side than the second signal line at the straight portion. According to this configuration, only the first signal line can be lengthened without lengthening the second signal line, and the line length difference between the first signal line and the second signal line can be further reduced. Further, the distance between the first signal line and the second signal line can be narrowed without lengthening the second signal line, and the characteristic impedance of the differential line can be maintained constant.
　前記屈曲部における前記第１信号線路は蛇行部を有することが好ましい。この構成によれば、第１信号線路の線路長をさらに長くすることができ、第１及び第２信号線路の線路長差をさらに小さくすることができる。 It is preferable that the first signal line at the bent portion has a meandering portion. According to this configuration, the line length of the first signal line can be further lengthened, and the line length difference between the first and second signal lines can be further reduced.
　前記第１及び第２信号線路は第１及び第２パッド電極からそれぞれ引き出されており、前記第１信号線路は、前記第１パッド電極から引き出された後、前記第２信号線路側に寄せて配線されており、前記第２信号線路は、前記第２パッド電極から引き出された後、前記第１信号線路側に寄ることなく配線されていることが好ましい。この構成により位相差をある程度解消でき、屈曲部の位相差が小さければ全体として線路長差による損失を完全に解消できる。 The first and second signal lines are drawn from the first and second pad electrodes, respectively, and the first signal line is drawn from the first pad electrode and then moved toward the second signal line side. It is preferable that the second signal line is wired without approaching the first signal line side after being drawn from the second pad electrode. With this configuration, the phase difference can be eliminated to some extent, and if the phase difference at the bent portion is small, the loss due to the line length difference can be completely eliminated as a whole.
　また、本発明による通信装置は、本発明の上記特徴を有する差動伝送線路と、前記差動伝送線路に差動信号を供給する差動信号供給部とを備え、前記差動信号供給部は、位相変調された差動信号を供給することを特徴とする。本発明によれば、位相差の小さい差動伝送線路を用いて構成され、変調特性の良好な通信装置を実現することができる。 Further, the communication device according to the present invention includes a differential transmission line having the above-mentioned characteristics of the present invention and a differential signal supply unit for supplying a differential signal to the differential transmission line, and the differential signal supply unit is provided. , It is characterized by supplying a phase-modulated differential signal. According to the present invention, it is possible to realize a communication device having a good modulation characteristic by being configured by using a differential transmission line having a small phase difference.
　本発明によれば、伝送損失を低減しながら一対の信号線路の線路長差を小さくすることが可能な差動伝送線路及びこれを用いた通信装置を提供することができる。 According to the present invention, it is possible to provide a differential transmission line capable of reducing the line length difference between a pair of signal lines while reducing the transmission loss, and a communication device using the differential transmission line.
図１は、本発明の第１の実施の形態による差動伝送線路の構成を部分的に示す平面図である。FIG. 1 is a plan view partially showing the configuration of a differential transmission line according to the first embodiment of the present invention. 図２は、本発明の第２の実施の形態による差動伝送線路の構成を部分的に示す平面図である。FIG. 2 is a plan view partially showing the configuration of the differential transmission line according to the second embodiment of the present invention. 図３は、本発明の第３の実施の形態による差動伝送線路の構成を部分的に示す平面図である。FIG. 3 is a plan view partially showing the configuration of the differential transmission line according to the third embodiment of the present invention. 図４は、本発明の第４の実施の形態による差動伝送線路の構成を部分的に示す平面図である。FIG. 4 is a plan view partially showing the configuration of the differential transmission line according to the fourth embodiment of the present invention. 図５は、本発明の第５の実施の形態による差動伝送線路の構成を部分的に示す平面図である。FIG. 5 is a plan view partially showing the configuration of the differential transmission line according to the fifth embodiment of the present invention. 図６は、本発明の第６の実施の形態による差動伝送線路の構成を部分的に示す平面図である。FIG. 6 is a plan view partially showing the configuration of the differential transmission line according to the sixth embodiment of the present invention. 図７は、従来の差動伝送線路の構成の一例を部分的に示す平面図である。FIG. 7 is a plan view partially showing an example of the configuration of a conventional differential transmission line. 図８は、従来の差動伝送線路の構成の他の例を部分的に示す平面図である。FIG. 8 is a plan view partially showing another example of the configuration of the conventional differential transmission line.
　以下、添付図面を参照しながら、本発明の好ましい実施の形態について詳細に説明する。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
　図１は、本発明の第１の実施の形態による差動伝送線路の構成を示す平面図である。 FIG. 1 is a plan view showing a configuration of a differential transmission line according to the first embodiment of the present invention.
　図１に示すように、差動伝送線路１は、基板上に形成された一対の信号線路１１Ａ，１１Ｂからなる差動線路１０を備えている。本実施形態において、差動線路１０は、一対のパッド電極２０Ａ，２０Ｂから引き出されてＸ方向に進行した後、９０曲がってＹ方向に延びている。そのため、差動線路１０は、Ｘ方向に延びる直線部１０Ａ（第１直線部）と、直線部１０Ａの進行方向をＸ方向からＹ方向に変更する屈曲部１０Ｂと、Ｙ方向に延びる直線部１０Ｃ（第２直線部）とを有している。 As shown in FIG. 1, the differential transmission line 1 includes a differential line 10 composed of a pair of signal lines 11A and 11B formed on a substrate. In the present embodiment, the differential line 10 is drawn from the pair of pad electrodes 20A and 20B, travels in the X direction, then bends 90 and extends in the Y direction. Therefore, the differential line 10 includes a straight line portion 10A (first straight line portion) extending in the X direction, a bent portion 10B that changes the traveling direction of the straight line portion 10A from the X direction to the Y direction, and a straight line portion 10C extending in the Y direction. It has (second straight line portion).
　一対のパッド電極２０Ａ，２０Ｂは差動信号供給部３０に接続されており、差動伝送線路１には例えば位相変調された差動信号が供給される。差動伝送線路１は、差動信号供給部３０と共に通信装置の一部を構成している。通信装置としては、例えばマッハツェンダー変調器を挙げることができる。 The pair of pad electrodes 20A and 20B are connected to the differential signal supply unit 30, and for example, a phase-modulated differential signal is supplied to the differential transmission line 1. The differential transmission line 1 and the differential signal supply unit 30 form a part of the communication device. Examples of the communication device include a Mach-Zehnder modulator.
　第１信号線路１１Ａは、屈曲部１０Ｂにおいて曲率半径方向の内側に位置する線路（内側線路）であり、第２信号線路１１Ｂは、屈曲部１０Ｂにおいて曲率半径方向の外側に位置する線路（外側線路）である。差動線路１０が曲がっていると一対の信号線路１１Ａ，１１Ｂの長さに差が生じ、第１信号線路１１Ａの全長は第２信号線路１１Ｂの全長よりも短くなる。このような線路長差は、基本的には差動線路１０が右に曲がる回数と左に曲がる回数が異なる場合に生じ、右に曲がる回数と左に曲がる回数との差が大きくなるほど線路長差も大きくなる。 The first signal line 11A is a line (inner line) located inside the bending portion 10B in the radius of curvature direction, and the second signal line 11B is a line located outside the bending portion 10B in the radius of curvature direction (outer line). ). When the differential line 10 is bent, the lengths of the pair of signal lines 11A and 11B differ, and the total length of the first signal line 11A becomes shorter than the total length of the second signal line 11B. Such a line length difference basically occurs when the number of times the differential line 10 turns to the right and the number of times to turn to the left are different, and the larger the difference between the number of times to turn to the right and the number of times to turn to the left, the greater the difference in line length. Will also grow.
　このような屈曲部１０Ｂに起因する一対の信号線路１１Ａ，１１Ｂの線路長差を縮小するため、第１信号線路１１Ａは、第１パッド電極２０Ａから引き出された後、第２信号線路１１Ｂ側にオフセットされている。すなわち、第２信号線路１１Ｂは第２パッド電極２０Ｂの幅方向中央位置からＸ方向に引き出されて真っ直ぐに配線されるが、第１信号線路１１Ａは第１パッド電極２０Ａの幅方向中央位置からＸ方向に引き出された直後に９０度曲がって第２信号線路１１Ｂに近づき、さらに第２信号線路１１Ｂと一定間隔を隔てた位置で９０度曲がって第２信号線路１１Ｂと平行に配線される。 In order to reduce the line length difference between the pair of signal lines 11A and 11B caused by such a bent portion 10B, the first signal line 11A is drawn from the first pad electrode 20A and then moved to the second signal line 11B side. It is offset. That is, the second signal line 11B is drawn out in the X direction from the center position in the width direction of the second pad electrode 20B and is wired straight, but the first signal line 11A is X from the center position in the width direction of the first pad electrode 20A. Immediately after being pulled out in the direction, it bends 90 degrees to approach the second signal line 11B, and further bends 90 degrees at a position separated from the second signal line 11B by a certain interval and is wired in parallel with the second signal line 11B.
　第１パッド電極２０Ａと第２パッド電極２０Ｂの間隔が直線部１０Ａにおける第１信号線路１１Ａと第２信号線路１１Ｂの間隔よりも広い場合、差動伝送線路１が所望の特性インピーダンスを得るためには、第１及び第２パッド電極２０Ａ，２０Ｂから引き出された第１及び第２信号線路１１Ａ，１１Ｂの線路間隔Ｄａを調整する必要がある。このとき、第１信号線路１１Ａを第２信号線路１１Ｂ側に寄せるためのオフセット調整部１３（延長線路）を設けて第１信号線路１１Ａの物理長を長くすることにより、第１及び第２信号線路１１Ａ，１１Ｂの長さのバランスを取ることができる。 When the distance between the first pad electrode 20A and the second pad electrode 20B is wider than the distance between the first signal line 11A and the second signal line 11B in the straight portion 10A, the differential transmission line 1 obtains the desired characteristic impedance. Needs to adjust the line spacing Da of the first and second signal lines 11A and 11B drawn from the first and second pad electrodes 20A and 20B. At this time, by providing an offset adjusting unit 13 (extended line) for moving the first signal line 11A toward the second signal line 11B and lengthening the physical length of the first signal line 11A, the first and second signals are used. The lengths of the lines 11A and 11B can be balanced.
　このように、第１及び第２パッド電極２０Ａ，２０Ｂから第１及び第２信号線路１１Ａ，１１Ｂをそれぞれ引き出す際に第２信号線路１１Ｂに対する第１信号線路１１Ａの長さを第１パッド電極２０Ａの根元付近で予め調整することで一対の信号線路１１Ａ，１１Ｂの線路長差を小さくすることができる。しかし、屈曲部１０Ｂに起因する一対の信号線路１１Ａ，１１Ｂの線路長差が大きい場合には、線路長差の縮小効果が不十分な場合もある。そこで本実施形態では、屈曲部１０Ｂにおける一対の信号線路１１Ａ，１１Ｂの線幅及び線路間隔を直線部１０Ａ，１０Ｃよりも狭くすることで線路長差のさらなる縮小を図っている。 In this way, when the first and second signal lines 11A and 11B are pulled out from the first and second pad electrodes 20A and 20B, the length of the first signal line 11A with respect to the second signal line 11B is set to the first pad electrode 20A. The line length difference between the pair of signal lines 11A and 11B can be reduced by adjusting in advance near the root of the signal line. However, when the line length difference between the pair of signal lines 11A and 11B caused by the bent portion 10B is large, the effect of reducing the line length difference may be insufficient. Therefore, in the present embodiment, the line width and the line spacing of the pair of signal lines 11A and 11B in the bent portion 10B are made narrower than those of the straight lines 10A and 10C in order to further reduce the line length difference.
　図示のように、第１及び第２信号線路１１Ａ，１１Ｂの線幅は、差動線路１０の直線部１０Ａ，１０Ｃにおいて広く、屈曲部１０Ｂにおいて狭い。屈曲部１０Ｂとの境界位置における直線部１０Ａ，１０Ｃの端部には、屈曲部１０Ｂに向かって線幅が徐々に変化する線幅遷移部１２が設けられている。このように、差動線路１０の大部分を構成する直線部１０Ａ，１０Ｃの線幅を広くすることにより、差動線路１０を流れる高周波信号の伝送損失を低減することができる。 As shown in the figure, the line widths of the first and second signal lines 11A and 11B are wide in the straight portions 10A and 10C of the differential line 10 and narrow in the bent portions 10B. At the ends of the straight lines 10A and 10C at the boundary position with the bent portion 10B, a line width transition portion 12 whose line width gradually changes toward the bent portion 10B is provided. By widening the line widths of the linear portions 10A and 10C constituting most of the differential line 10 in this way, it is possible to reduce the transmission loss of the high frequency signal flowing through the differential line 10.
　第１及び第２信号線路１１Ａ，１１Ｂの屈曲部１０Ｂにおける線幅Ｗｂは、直線部１０Ａ，１０Ｃにおける線幅Ｗａよりも狭くなっている（Ｗａ＞Ｗｂ）。屈曲部１０Ｂにおける第１及び第２信号線路１１Ａ，１１Ｂの線幅Ｗｂは、屈曲部１０Ｂにおける第１及び第２信号線路１１Ａ，１１Ｂの線幅Ｗａの１／２以下（Ｗｂ＜Ｗａ／２）であることが好ましく、１／３以下（Ｗｂ＜Ｗａ／３）であることがさらに好ましい。 The line width Wb at the bent portions 10B of the first and second signal lines 11A and 11B is narrower than the line width Wa at the straight portions 10A and 10C (Wa> Wb). The line width Wb of the first and second signal lines 11A and 11B in the bent portion 10B is ½ or less of the line width Wa of the first and second signal lines 11A and 11B in the bent portion 10B (Wb <Wa / 2). It is preferably 1/3 or less (Wb <Wa / 3), and more preferably.
　また屈曲部１０Ｂの特性インピーダンスを直線部１０Ａ，１０Ｃの特性インピーダンスに整合させるため、屈曲部１０Ｂにおける第１及び第２信号線路１１Ａ，１１Ｂの線路間隔Ｄｂは、直線部１０Ａ，１０Ｃにおける第１及び第２信号線路１１Ａ，１１Ｂの線路間隔Ｄａよりも狭くなっている（Ｄａ＞Ｄｂ）。なお、第１及び第２信号線路１１Ａ，１１Ｂの線路間隔とは、第１信号線路１１Ａの第２信号線路１１Ｂ側の側面から第２信号線路１１Ｂの第１信号線路１１Ａ側の側面までの距離であり、第１及び第２信号線路１１Ａ，１１Ｂ間の絶縁スペース幅である。 Further, in order to match the characteristic impedance of the bent portion 10B with the characteristic impedance of the straight portions 10A and 10C, the line spacing Db of the first and second signal lines 11A and 11B in the bent portion 10B is the first and 10C in the straight portions 10A and 10C. It is narrower than the line spacing Da of the second signal lines 11A and 11B (Da> Db). The line spacing of the first and second signal lines 11A and 11B is the distance from the side surface of the first signal line 11A on the second signal line 11B side to the side surface of the second signal line 11B on the first signal line 11A side. This is the width of the insulation space between the first and second signal lines 11A and 11B.
　例えば、直線部１０Ａ，１０Ｃにおける第１及び第２信号線路１１Ａ，１１Ｂの線幅Ｗａ＝３０μｍ、線路間隔Ｄａ＝４０μｍであるのに対し、屈曲部１０Ｂにおける第１及び第２信号線路１１Ａ，１１Ｂの線幅Ｗｂ＝１０μｍ、線路間隔Ｄｂ＝２０μｍである。このように、屈曲部１０Ｂにおける第１及び第２信号線路１１Ａ，１１Ｂの線路間隔も狭くした場合、差動線路の特性インピーダンスを保ったまま屈曲部１０Ｂに起因する第１及び第２信号線路１１Ａ，１１Ｂの線路長差を小さくすることができる。 For example, the line width Wa = 30 μm and the line spacing Da = 40 μm of the first and second signal lines 11A and 11B in the straight portions 10A and 10C, whereas the first and second signal lines 11A and 11B in the bent portion 10B. The line width Wb = 10 μm and the line spacing Db = 20 μm. In this way, when the line spacing of the first and second signal lines 11A and 11B in the bent portion 10B is also narrowed, the first and second signal lines 11A caused by the bent portion 10B are maintained while maintaining the characteristic impedance of the differential line. , 11B line length difference can be reduced.
　屈曲部１０Ｂにおける第１及び第２信号線路１１Ａ，１１Ｂの線幅Ｗｂを狭くした場合、屈曲部１０Ｂにおける伝送損失は大きくなるが、差動線路１０の全長に対する屈曲部１０Ｂの長さは非常に短いので、伝送損失の増加は限定的であり、デメリットよりもメリットの方が大きい。 When the line widths Wb of the first and second signal lines 11A and 11B in the bent portion 10B are narrowed, the transmission loss in the bent portion 10B becomes large, but the length of the bent portion 10B with respect to the total length of the differential line 10 is very large. Since it is short, the increase in transmission loss is limited, and the advantages outweigh the disadvantages.
　屈曲部１０Ｂにおいて一対の信号線路１１Ａ，１１Ｂの線路間隔Ｄｂを狭くするため、本実施形態においては、第１信号線路１１Ａが第２信号線路１１Ｂ側に寄せて配線されると共に、第２信号線路１１Ｂが第１信号線路１１Ａ側に寄せて配線されている。すなわち、内側線路と外側線路の両方を相互に近づけて配線することにより、屈曲部１０Ｂにおける一対の信号線路１１Ａ，１１Ｂの線路間隔Ｄｂを直線部１０Ａ，１０Ｃにおける一対の信号線路１１Ａ，１１Ｂの線路間隔Ｄａよりも狭くしている。 In order to narrow the line spacing Db of the pair of signal lines 11A and 11B at the bent portion 10B, in the present embodiment, the first signal line 11A is wired closer to the second signal line 11B side, and the second signal line is wired. 11B is wired closer to the first signal line 11A side. That is, by wiring both the inner line and the outer line close to each other, the line spacing Db of the pair of signal lines 11A and 11B in the bent portion 10B can be changed to the line of the pair of signal lines 11A and 11B in the straight portions 10A and 10C. It is narrower than the interval Da.
　第１及び第２信号線路１１Ａ，１１Ｂを相互に寄せて配線するため、屈曲部１０Ｂにおける第１信号線路１１Ａは、直線部１０Ａ，１０Ｃの終端位置から当該直線部の進行方向と直交し且つ第２信号線路１１Ｂに近づく方向に進行するオフセット調整部１４（延長線路）を含む。また、屈曲部１０Ｂにおける第２信号線路１１Ｂは、直線部１０Ａ，１０Ｃの終端位置から当該直線部の進行方向と直交し且つ第１信号線路１１Ａに近づく方向に進行するオフセット調整部１４（延長線路）を含む。 Since the first and second signal lines 11A and 11B are wired close to each other, the first signal line 11A in the bent portion 10B is orthogonal to the traveling direction of the straight line portion from the terminal position of the straight line portions 10A and 10C and is the first. 2 Includes an offset adjusting unit 14 (extended line) that travels in a direction approaching the signal line 11B. Further, the second signal line 11B in the bent portion 10B is an offset adjusting section 14 (extended line) traveling in a direction orthogonal to the traveling direction of the straight section and approaching the first signal line 11A from the terminal positions of the straight sections 10A and 10C. )including.
　屈曲部１０Ｂにおける第１及び第２信号線路１１Ａ，１１Ｂの線幅Ｗｂを狭くした場合には、特性インピーダンスを一定に維持しながら線路間隔を狭くすることができる。こうして屈曲部１０Ｂにおける第１及び第２信号線路１１Ａ，１１Ｂの線路間隔を狭くした場合、内側線路と外側線路との曲率半径差が小さくなり、これにより線路長差が小さくなるので、差動線路全体の線路長差を小さくすることができる。 When the line widths Wb of the first and second signal lines 11A and 11B in the bent portion 10B are narrowed, the line spacing can be narrowed while maintaining the characteristic impedance constant. When the line spacing between the first and second signal lines 11A and 11B in the bent portion 10B is narrowed in this way, the difference in radius of curvature between the inner line and the outer line becomes smaller, which reduces the line length difference. The overall line length difference can be reduced.
　例えば図７に示すように、第１及び第２信号線路１１Ａ，１１Ｂの線幅Ｗがその全長に亘って一律に狭い場合、第１及び第２信号線路１１Ａ，１１Ｂの線路間隔Ｄも狭くする必要があるため、内側線路と外側線路との曲率半径差が小さくなり、屈曲部１０Ｂにおける線路長差は小さくなるが、伝送損失は大きくなる。一方、図８に示すように、第１及び第２信号線路１１Ａ，１１Ｂの線幅Ｗがその全長に亘って一律に広い場合、伝送損失は小さくなるが、屈曲部１０Ｂにおける線路長差は大きくなる。例えば、線幅Ｗ＝３０μｍ、線路間隔Ｄ＝４０μｍである一対の信号線路１１Ａ，１１Ｂからなる差動線路１０を９０度屈曲させた場合、４８ＧＨｚにおける位相差は約１６．５度となる。 For example, as shown in FIG. 7, when the line width W of the first and second signal lines 11A and 11B is uniformly narrow over the entire length thereof, the line spacing D of the first and second signal lines 11A and 11B is also narrowed. Since it is necessary, the difference in radius of curvature between the inner line and the outer line becomes smaller, the difference in line length at the bent portion 10B becomes smaller, but the transmission loss becomes larger. On the other hand, as shown in FIG. 8, when the line widths W of the first and second signal lines 11A and 11B are uniformly wide over the entire length, the transmission loss is small, but the line length difference in the bent portion 10B is large. Become. For example, when the differential line 10 composed of a pair of signal lines 11A and 11B having a line width W = 30 μm and a line spacing D = 40 μm is bent by 90 degrees, the phase difference at 48 GHz is about 16.5 degrees.
　しかし、本実施形態においては、屈曲部１０Ｂにおける第１及び第２信号線路１１Ａ，１１Ｂの線幅及び線路間隔を直線部１０Ａ，１０Ｃにおける第１及び第２信号線路１１Ａ，１１Ｂの線幅及び線路間隔よりも狭くしているので、差動線路１０の大部分において伝送損失を低減しながら屈曲部１０Ｂにおける内側線路と外側線路との線路長差を小さくすることができる。したがって、線路長差に起因する差動信号の位相差を小さくすることができ、高周波信号の伝送損失を低減することができる。 However, in the present embodiment, the line widths and line spacings of the first and second signal lines 11A and 11B in the bent portion 10B are set to the line widths and lines of the first and second signal lines 11A and 11B in the straight portions 10A and 10C. Since it is narrower than the interval, it is possible to reduce the line length difference between the inner line and the outer line in the bent portion 10B while reducing the transmission loss in most of the differential lines 10. Therefore, the phase difference of the differential signal due to the line length difference can be reduced, and the transmission loss of the high frequency signal can be reduced.
　図２は、本発明の第２の実施の形態による差動伝送線路の構成を示す平面図である。 FIG. 2 is a plan view showing a configuration of a differential transmission line according to a second embodiment of the present invention.
　図２に示すように、この差動伝送線路１の特徴は、屈曲部１０Ｂにおいて第１及び第２信号線路１１Ａ，１１Ｂの線路間隔Ｄｂを狭くするため、第１信号線路１１Ａだけが第２信号線路１１Ｂ側に寄せて配線されており、第２信号線路１１Ｂは第１信号線路１１Ａ側に寄ることなく配線されている点にある。そのため、屈曲部１０Ｂにおける第１信号線路１１Ａは、直線部１０Ａ，１０Ｃの終端位置から当該直線部の進行方向と直交し且つ第２信号線路１１Ｂに近づく方向に進行するオフセット調整部１４（延長線路）を有するが、屈曲部１０Ｂにおける第２信号線路１１Ｂは、そのようなオフセット調整部１４（延長線路）を有していない。第２信号線路１１Ｂは屈曲部１０Ｂと直線部１０Ａ，１０Ｃとの境界位置において中央揃えされており、屈曲部１０Ｂにおける第２信号線路１１Ｂの中心線は、直線部１０Ａ，１０Ｃにおける第２信号線路１１Ｂの中心線の延長線上にある。その他の構成は第１の実施の形態と同様である。 As shown in FIG. 2, the characteristic of the differential transmission line 1 is that the line spacing Db of the first and second signal lines 11A and 11B is narrowed in the bent portion 10B, so that only the first signal line 11A is the second signal. The second signal line 11B is wired closer to the line 11B side, and the second signal line 11B is wired without approaching the first signal line 11A side. Therefore, the first signal line 11A in the bent portion 10B is an offset adjusting portion 14 (extended line) traveling in a direction orthogonal to the traveling direction of the straight portion and approaching the second signal line 11B from the terminal position of the straight portions 10A and 10C. ), But the second signal line 11B in the bent portion 10B does not have such an offset adjusting portion 14 (extended line). The second signal line 11B is centered at the boundary position between the bent portion 10B and the straight portions 10A and 10C, and the center line of the second signal line 11B in the bent portion 10B is the second signal line in the straight portions 10A and 10C. It is on the extension of the center line of 11B. Other configurations are the same as those of the first embodiment.
　本実施形態によれば、第２信号線路１１Ｂを長くすることなく第１信号線路１１Ａだけを長くして第１信号線路１１Ａと第２信号線路１１Ｂとの線路長差をさらに小さくすることができる。また、第２信号線路１１Ｂを長くすることなく第１信号線路１１Ａと第２信号線路１１Ｂとの間隔を狭くすることができ、差動線路１０の特性インピーダンスを一定に維持することができる。 According to the present embodiment, it is possible to lengthen only the first signal line 11A without lengthening the second signal line 11B to further reduce the line length difference between the first signal line 11A and the second signal line 11B. .. Further, the distance between the first signal line 11A and the second signal line 11B can be narrowed without lengthening the second signal line 11B, and the characteristic impedance of the differential line 10 can be maintained constant.
　図３は、本発明の第３の実施の形態による差動伝送線路の構成を示す平面図である。 FIG. 3 is a plan view showing a configuration of a differential transmission line according to a third embodiment of the present invention.
　図３に示すように、この差動伝送線路１の特徴は、屈曲部１０Ｂにおける第２信号線路１１Ｂの端部が直線部１０Ａ，１０Ｃにおける第２信号線路１１Ｂの幅方向の外側寄りの端部に接続されている点にある。すなわち、屈曲部１０Ｂにおける第２信号線路１１Ｂは、直線部１０Ａ，１０Ｃにおける第２信号線路１１Ｂよりも曲率半径方向の外側寄り（第１信号線路１１Ａから離れる方向）に寄せて配線されている。さらに、屈曲部１０Ｂにおける第２信号線路１１Ｂの幅方向外側エッジ位置は、直線部１０Ａ，１０Ｃにおける第２信号線路１１Ｂの幅方向外側エッジ位置と揃っている。第２信号線路１１Ｂは外側に少し寄せて配線されているので、屈曲部１０Ｂにおける第１信号線路１１Ａに設けられたオフセット調整部１４の長さは第２の実施の形態よりも長い。その他の構成は第２の実施の形態と同様である。 As shown in FIG. 3, the characteristic of the differential transmission line 1 is that the end of the second signal line 11B in the bent portion 10B is the outer end of the second signal line 11B in the straight portions 10A and 10C in the width direction. It is at the point where it is connected to. That is, the second signal line 11B in the bent portion 10B is wired closer to the outside in the radius of curvature direction (direction away from the first signal line 11A) than the second signal line 11B in the straight lines 10A and 10C. Further, the widthwise outer edge position of the second signal line 11B in the bent portion 10B is aligned with the widthwise outer edge position of the second signal line 11B in the straight lines 10A and 10C. Since the second signal line 11B is wired slightly closer to the outside, the length of the offset adjusting portion 14 provided on the first signal line 11A in the bent portion 10B is longer than that of the second embodiment. Other configurations are the same as those of the second embodiment.
　本実施形態によれば、第２信号線路１１Ｂに対する第１信号線路１１Ａの長さをさらに長くすることができ、第１信号線路１１Ａと第２信号線路１１Ｂとの線路長差をさらに小さくすることができる。 According to the present embodiment, the length of the first signal line 11A with respect to the second signal line 11B can be further lengthened, and the line length difference between the first signal line 11A and the second signal line 11B can be further reduced. Can be done.
　図４は、本発明の第４の実施の形態による差動伝送線路の構成を示す略平面図である。 FIG. 4 is a schematic plan view showing a configuration of a differential transmission line according to a fourth embodiment of the present invention.
　図４に示すように、この差動伝送線路１の特徴は、屈曲部１０Ｂにおける第１信号線路１１Ａがその進行方向に対して蛇行しながら進行する蛇行部１５を有しており、これにより屈曲部１０Ｂにおける第１信号線路１１Ａがさらに長く形成されている点にある。本実施形態において、屈曲部１０Ｂにおける第１信号線路１１Ａの蛇行範囲（蛇行部１５の形成領域）は、直線配線を組み合わせて屈曲部１０Ｂの始端から終端までを最短で結ぶ通常の屈曲配線ルート（破線参照）よりも第２信号線路１１Ｂ寄りの外側オフセット領域に限定され、通常の屈曲配線ルートよりも第２信号線路１１Ｂから遠ざかる内側オフセット領域は含まれていない。 As shown in FIG. 4, the characteristic of the differential transmission line 1 is that the first signal line 11A in the bent portion 10B has a meandering portion 15 in which the first signal line 11A travels while meandering in the traveling direction thereof. The first signal line 11A in the portion 10B is formed to be longer. In the present embodiment, the meandering range of the first signal line 11A in the bending portion 10B (the forming region of the meandering portion 15) is a normal bending wiring route connecting straight lines from the start end to the end of the bending portion 10B in the shortest time. It is limited to the outer offset region closer to the second signal line 11B than the broken line), and does not include the inner offset region farther from the second signal line 11B than the normal bending wiring route.
　本実施形態によれば、第１信号線路１１Ａをさらに長くすることができるので、第１信号線路１１Ａと第２信号線路１１Ｂとの電気長差をさらに小さくすることができる。また蛇行範囲を外側オフセット領域に限定することで蛇行部１５による反射損失の大幅な増加を抑制することができる。 According to the present embodiment, since the first signal line 11A can be further lengthened, the electrical length difference between the first signal line 11A and the second signal line 11B can be further reduced. Further, by limiting the meandering range to the outer offset region, it is possible to suppress a large increase in the reflection loss due to the meandering portion 15.
　図５は、本発明の第５の実施の形態による差動伝送線路の構成を示す平面図である。また、図６は、本発明の第６の実施の形態による差動伝送路の構成を示す平面図である。 FIG. 5 is a plan view showing a configuration of a differential transmission line according to a fifth embodiment of the present invention. Further, FIG. 6 is a plan view showing a configuration of a differential transmission line according to a sixth embodiment of the present invention.
　図５及び図６に示すように、これらの差動伝送線路１の特徴は、屈曲部１０Ｂにおける第１信号線路１１Ａの蛇行範囲が通常の屈曲配線ルートよりも第２信号線路１１Ｂ寄りの外側オフセット領域のみならず、通常の屈曲配線ルートよりも第２信号線路１１Ｂから遠ざかる内側オフセット領域も含み、曲率半径方向の内側の領域に僅かにはみ出して配線されている点にある。特に、図５は蛇行部１５はみ出し量が小さい場合であり、図６は蛇行部１５のはみ出し量が大きい場合である。 As shown in FIGS. 5 and 6, the characteristic of these differential transmission lines 1 is that the meandering range of the first signal line 11A in the bent portion 10B is an outer offset closer to the second signal line 11B than the normal bending wiring route. Not only the region but also the inner offset region which is farther from the second signal line 11B than the normal bending wiring route is included, and the wiring is slightly protruding to the inner region in the radial direction of curvature. In particular, FIG. 5 shows a case where the amount of protrusion of the meandering portion 15 is small, and FIG. 6 shows a case where the amount of protrusion of the meandering portion 15 is large.
　第１信号線路１１Ａの蛇行を大きくするほど反射特性が劣化するが、第１信号線路１１Ａをさらに長くすることができるので、第１信号線路１１Ａと第２信号線路１１Ｂとの線路長差をさらに小さくすることができる。第１信号線路１１Ａの蛇行の大きさと反射特性の劣化はトレードオフの関係にあるので、両者のバランスが重要である。第５及び第６の実施の形態によれば、第１信号線路１１Ａをさらに長くすることができるので、第１信号線路１１Ａと第２信号線路１１Ｂとの線路長差をさらに小さくすることができる。第１及び第２パッド電極２０Ａ，２０Ｂ間の距離があまり大きくなくて、パッド電極から引き出された直後に、屈曲部における内側の信号線路を外側の信号線路に寄せて配線し、オフセット調整部１３の長さを増加させることによる補正が殆どできないような場合でも対応できる。 The reflection characteristics deteriorate as the meandering of the first signal line 11A increases, but since the first signal line 11A can be further lengthened, the line length difference between the first signal line 11A and the second signal line 11B can be further increased. It can be made smaller. Since the magnitude of meandering of the first signal line 11A and the deterioration of the reflection characteristics are in a trade-off relationship, the balance between the two is important. According to the fifth and sixth embodiments, the first signal line 11A can be further lengthened, so that the line length difference between the first signal line 11A and the second signal line 11B can be further reduced. .. The distance between the first and second pad electrodes 20A and 20B is not so large, and immediately after being pulled out from the pad electrode, the inner signal line at the bent portion is drawn closer to the outer signal line, and the offset adjusting portion 13 is used. Even if the correction by increasing the length of is almost impossible, it can be dealt with.
　以上、本発明の好ましい実施形態について説明したが、本発明は、上記の実施形態に限定されることなく、本発明の主旨を逸脱しない範囲で種々の変更が可能であり、それらも本発明の範囲内に包含されるものであることはいうまでもない。 Although the preferred embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the gist of the present invention, and these are also the present invention. Needless to say, it is included in the range.
　例えば、上記実施形態においては、屈曲部１０Ｂに起因する一対の信号線路１１Ａ，１１Ｂの線路長差を縮小するため、第１及び第２パッド電極２０Ａ，２０Ｂからそれぞれ引き出された第１及び第２信号線路１１Ａ，１１Ｂのうち、第１信号線路１１Ａのみを第２信号線路１１Ｂ側に寄せて配線し、第２信号線路１１Ｂは第１信号線路１１Ａ側に寄ることなく真っ直ぐに配線されているが、第２信号線路１１Ｂを第１信号線路１１Ａ側に寄せて配線しても構わない。例えば、上述した本発明による屈曲部１０Ｂの形状によって屈曲部１０Ｂに起因する一対の信号線路１１Ａ，１１Ｂの線路長差を十分に縮小できる場合には、第１及び第２信号線路１１Ａ，１１Ｂを相互に寄せて配線することも可能である。 For example, in the above embodiment, in order to reduce the line length difference between the pair of signal lines 11A and 11B caused by the bent portion 10B, the first and second pad electrodes 20A and 20B are drawn out from the first and second pad electrodes 20A and 20B, respectively. Of the signal lines 11A and 11B, only the first signal line 11A is wired closer to the second signal line 11B side, and the second signal line 11B is wired straight without approaching the first signal line 11A side. , The second signal line 11B may be closer to the first signal line 11A side for wiring. For example, when the line length difference between the pair of signal lines 11A and 11B caused by the bent portion 10B can be sufficiently reduced by the shape of the bent portion 10B according to the present invention described above, the first and second signal lines 11A and 11B are used. It is also possible to wire them closer to each other.
１　　差動伝送線路
１０　　差動線路
１０Ａ　　直線部（第１直線部）
１０Ｂ　　屈曲部
１０Ｃ　　直線部（第２直線部）
１１Ａ　　第１信号線路（内側線路）
１１Ｂ　　第２信号線路（外側線路）
１２　　線幅遷移部
１３　　オフセット調整部
１４　　オフセット調整部
１５　　蛇行部
２０Ａ　　第１パッド電極
２０Ｂ　　第２パッド電極
３０　　差動信号供給部 1 Differential transmission line 10 Differential line 10A Straight line part (first straight line part)
10B Bent part 10C Straight part (second straight part)
11A 1st signal line (inner line)
11B 2nd signal line (outer line)
12 Line width transition part 13 Offset adjustment part 14 Offset adjustment part 15 Meandering part 20A 1st pad electrode 20B 2nd pad electrode 30 Differential signal supply part

Claims (6)

  1. 　一対の信号線路からなる差動線路を備え、
    　前記差動線路は、直線部と、前記直線部の進行方向を変更する屈曲部とを有し、
    　前記屈曲部における前記一対の信号線路の線幅及び線路間隔は、前記直線部における前記一対の信号線路の線幅及び線路間隔よりも狭いことを特徴とする差動伝送線路。     Equipped with a differential line consisting of a pair of signal lines,
    The differential line has a straight line portion and a bent portion that changes the traveling direction of the straight line portion.
    A differential transmission line characterized in that the line width and line spacing of the pair of signal lines at the bent portion are narrower than the line width and line spacing of the pair of signal lines at the straight line portion.
  2. 　前記一対の信号線路は、第１信号線路と、前記屈曲部において前記第１信号線路よりも外側に位置する第２信号線路とを有し、
    　前記屈曲部における前記第１信号線路は、前記直線部における前記第１信号線路よりも前記第２信号線路側に寄せて配線されている、請求項１に記載の差動伝送線路。     The pair of signal lines has a first signal line and a second signal line located outside the first signal line at the bent portion.
    The differential transmission line according to claim 1, wherein the first signal line in the bent portion is wired closer to the second signal line side than the first signal line in the straight portion.
  3. 　前記屈曲部における前記第２信号線路は、前記直線部における前記第２信号線路よりも前記第１信号線路側に寄ることなく配線されている、請求項２に記載の差動伝送線路。 The differential transmission line according to claim 2, wherein the second signal line at the bent portion is wired so as not to be closer to the first signal line side than the second signal line at the straight portion.
  4. 　前記屈曲部における前記第１信号線路は蛇行部を有する、請求項２又は３に記載の差動伝送線路。 The differential transmission line according to claim 2 or 3, wherein the first signal line at the bent portion has a meandering portion.
  5. 　前記第１及び第２信号線路は第１及び第２パッド電極からそれぞれ引き出されており、
    　前記第１信号線路は、前記第１パッド電極から引き出された後、前記第２信号線路側に寄せて配線されており、
    　前記第２信号線路は、前記第２パッド電極から引き出された後、前記第１信号線路側に寄ることなく配線されている、請求項２乃至４のいずれか一項に記載の差動伝送線路。     The first and second signal lines are drawn from the first and second pad electrodes, respectively.
    The first signal line is drawn out from the first pad electrode and then wired closer to the second signal line side.
    The differential transmission line according to any one of claims 2 to 4, wherein the second signal line is wired without approaching the first signal line side after being drawn from the second pad electrode. ..
  6. 　請求項１乃至５のいずれか一項に記載の差動伝送線路と、
    　前記差動伝送線路に差動信号を供給する差動信号供給部とを備え、
    　前記差動信号供給部は、位相変調された差動信号を供給することを特徴とする通信装置。     The differential transmission line according to any one of claims 1 to 5.
    A differential signal supply unit that supplies a differential signal to the differential transmission line is provided.
    The differential signal supply unit is a communication device characterized by supplying a phase-modulated differential signal.
PCT/JP2021/036608 2020-10-08 2021-10-04 Differential transmission line and communication device using same WO2022075254A1 (en)

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JP2020170741 2020-10-08
JP2020-170741 2020-10-08

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007000934A1 (en) * 2005-06-28 2007-01-04 Matsushita Electric Industrial Co., Ltd. Differential transmission line
JP2012199904A (en) * 2011-03-08 2012-10-18 Japan Oclaro Inc Differential transmission circuit, optical transceiver module, and information processor
JP2018148550A (en) * 2017-03-06 2018-09-20 アンリツ株式会社 High frequency differential signal transmission line and signal transmission system comprising the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007000934A1 (en) * 2005-06-28 2007-01-04 Matsushita Electric Industrial Co., Ltd. Differential transmission line
JP2012199904A (en) * 2011-03-08 2012-10-18 Japan Oclaro Inc Differential transmission circuit, optical transceiver module, and information processor
JP2018148550A (en) * 2017-03-06 2018-09-20 アンリツ株式会社 High frequency differential signal transmission line and signal transmission system comprising the same

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