WO2022068016A1 - Preparation method for variable-focus microlens group and variable-focus microlens group - Google Patents

Preparation method for variable-focus microlens group and variable-focus microlens group Download PDF

Info

Publication number
WO2022068016A1
WO2022068016A1 PCT/CN2020/129829 CN2020129829W WO2022068016A1 WO 2022068016 A1 WO2022068016 A1 WO 2022068016A1 CN 2020129829 W CN2020129829 W CN 2020129829W WO 2022068016 A1 WO2022068016 A1 WO 2022068016A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic
photoresist
magnetic lens
lens barrel
variable
Prior art date
Application number
PCT/CN2020/129829
Other languages
French (fr)
Chinese (zh)
Inventor
廖常锐
王义平
李博哲
刘亦帆
Original Assignee
深圳大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳大学 filed Critical 深圳大学
Publication of WO2022068016A1 publication Critical patent/WO2022068016A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor

Definitions

  • the invention relates to the field of micro-motors, in particular to a preparation method of a variable-focus micro-lens group and a variable-focus micro-lens group.
  • the lens driving device is a micro-motor device, which realizes the optical zooming or focusing function by driving the relative movement between the lens and the lens or the relative movement between the lens and the image sensor.
  • Lens driving devices driven by electromagnetic principles are widely used in mobile phone cameras. This type of lens driving device needs to wrap a layer of electromagnetic coil on the periphery of the lens barrel carrying the lens. The process is complicated, which is not conducive to miniaturization and integration. At the same time, most of the lenses are made of glass or plastic, and the lens barrel is also made of plastic, which has poor biocompatibility, which affects the application in the medical field.
  • Laser micromachining technology has the advantages of non-contact, selective processing, small heat-affected zone, high precision, and easy shape control.
  • the unique "direct writing" technology of laser micromachining simplifies the process and realizes the rapid prototyping of micro components.
  • Laser micro-stereolithography technology is a processing technology derived from the application of rapid prototyping stereolithography process in the field of micro-manufacturing. The polymerization is cured to obtain micro-components. Its biggest feature is that it is not limited by the shape of micro-devices or system structures, and can process any three-dimensional structure including curved surfaces, and can form different micro-components at one time without micro-assembly.
  • femtosecond pulsed lasers in micro-stereolithography to achieve 3D micromachining has significant advantages; including "cold" machining, where the light-matter interaction process is ultrafast and power is extremely high, making the machining process maximally free from thermal effects ; High precision, because the absorption cross section of the multiphoton process is very small, so that the processing accuracy can reach several tens of nanometers. Therefore, laser micro-nano processing technology has been regarded as one of the most effective means to prepare microstructures, with huge application potential and attractive development prospects.
  • the present invention provides a method for preparing a variable-focus micro-lens group, which can directly manufacture a magnetic lens that can be driven by a magnetic field force in a non-magnetic lens barrel.
  • the present invention also provides a variable-focus micro-lens group.
  • a preparation method of a variable-focus microlens group comprising the following steps:
  • S200 Project a femtosecond laser pulse to a focal point according to the three-dimensional model of the magnetic lens, and simultaneously drive the magnetic photoresist in the non-magnetic lens barrel to move three-dimensionally, so that the polymerization and curing point of the magnetic photoresist Sequentially positioned at the focal point for polymerization and curing, so that the interior of the magnetic photoresist is polymerized and cured into the shape of the magnetic lens;
  • a variable-focus micro-lens group characterized in that it includes a non-magnetic lens barrel and a magnetic lens, the magnetic lens is arranged in the non-magnetic lens barrel, and can be attached to the non-magnetic lens barrel under the action of a magnetic field force move along the optical axis.
  • the preparation method utilizes the femtosecond laser two-photon polymerization technology to prepare the variable-focus microlens group, and the magnetic lens formed by the polymerization and curing of the magnetic photoresist has a significant induction to the magnetic field, so that it is relatively different from the non-magnetic lens. Displacement, realize the optical zoom function of the micro-nano lens group, and the polymerization and curing of the photoresist does not need to use a mask, which can realize real three-dimensional processing, high processing resolution, smooth lens surface, clearer imaging, better effect, and photolithography
  • the glue has good biocompatibility, and the prepared microlens group can be used in the medical field.
  • FIG. 1 is a schematic diagram of a preparation system of a variable-focus microlens group provided by the present invention
  • Fig. 2 is the step block diagram of the preparation method of the variable-focus microlens group provided by the present invention
  • Fig. 3 is the step block diagram of the preparation method of the non-magnetic lens barrel provided by the present invention.
  • FIG. 4 is a schematic diagram of a variable-focus micro-lens group provided by the present invention.
  • FIG. 5 is a cross-sectional view of the variable-focus micro-lens group provided by the present invention.
  • a preparation system of a variable-focus microlens group 14, based on femtosecond laser two-photon polymerization technology includes a light source system, a three-dimensional movement system 11 and a control system 12,
  • the light source system for projecting femtosecond laser pulses to a focal point
  • the three-dimensional moving system 11 is used to carry and drive the photoresist to move three-dimensionally;
  • the control system 12 is used to control the light source system to project femtosecond laser pulses to the focal point according to the three-dimensional model of the variable-focus microlens group 14, and at the same time control the three-dimensional movement system 11 to drive the photoresist to move three-dimensionally, so as to move the photoresist in three dimensions.
  • the polymerization and curing points of the photoresist are sequentially positioned to the focal point for polymerization and curing, so that the interior of the photoresist is polymerized and cured into the shape of the variable-focus microlens group 14 .
  • the preparation system is based on femtosecond laser two-photon polymerization technology.
  • the photoresist can produce two-photon polymerization effect when irradiated by femtosecond laser pulses at the focal point.
  • the femtosecond laser pulses projected by the light source system to the focal point have super energy , which can polymerize and solidify the internal fixed point of the photoresist, while the low energy of the femtosecond laser pulse elsewhere on the optical path cannot polymerize and solidify the photoresist.
  • the interior of the photoresist can be polymerized and cured into the shape of the variable focus microlens group 14, and finally the unpolymerized and cured photoresist is washed away by the developer, leaving only the polymerized and cured photoresist. of photoresist to form the variable focus microlens group 14 .
  • the control system 12 can be a terminal such as a notebook computer, a desktop PC, a tablet computer, a smart phone, etc., and the three-dimensional model of the zoom micro-lens group 14 is converted into corresponding point cloud coordinate data through the installed three-dimensional drawing software.
  • the point corresponds to one polymerization and curing point of the photoresist, and then the polymerization and curing points of the photoresist are sequentially positioned to the focal point for polymerization and curing.
  • the photoresist is scanned layer by layer from bottom to top, and within the plane, the photoresist is scanned from point to point. Line, and then scan from line to surface, the polymerization and curing point of the photoresist corresponds to the coordinate point of the three-dimensional model of the variable-focus microlens group 14 one-to-one.
  • the light source system includes a laser light source 1, an optical path module and a shutter 6,
  • the laser light source 1 is used to emit femtosecond laser pulses
  • the optical path module is used to control the optical path of the femtosecond laser pulse, so as to project the femtosecond laser pulse emitted by the laser light source 1 to the focal point;
  • the optical gate 6 is used to control the propagation of the femtosecond laser pulse in the optical circuit module.
  • the laser light source 1 and the shutter 6 are both connected to the control system 12 in communication, and are controlled by the control system 12 respectively.
  • the control system 12 mainly controls the on or off of the laser light source 1 and the femtosecond laser pulse. intensity, and also controls the opening or closing of the shutter 6 .
  • the laser light source 1 is a femtosecond laser light source.
  • the optical path module includes an attenuation unit, a polarization unit, a reflection unit and an objective lens 10,
  • the attenuation unit is used to attenuate the energy of the femtosecond laser pulse
  • the polarization unit is used to control the polarization direction of the femtosecond laser pulse
  • the reflecting unit used for controlling the propagation direction of the femtosecond laser pulse, includes at least one reflecting mirror;
  • the objective lens 10 is used for focusing the femtosecond laser pulse and projecting it to the focal point.
  • the optical path module includes a first half-wave plate 2 , a polarizer 3 , a second half-wave plate 4 , a first reflecting mirror 5 , a second reflecting mirror 7 , and a third reflecting mirror 2 , which are sequentially arranged along the optical path.
  • mirror 8 dichroic mirror 9 and objective lens 10, wherein the first half-wave plate and the polarizer 3 together constitute the attenuation unit, the second half-wave plate 4 alone constitutes the polarization unit, and the first half-wave plate 4 constitutes the polarization unit alone.
  • the reflection mirror 5, the second reflection mirror 7, the third reflection mirror 8 and the dichroic mirror 9 together constitute the reflection unit, and the first reflection mirror 5, the second reflection mirror 7, the third reflection mirror 8 and the dichroic mirror 9 are respectively Make a 90° reflection of the femtosecond laser pulse.
  • the shutter 6 is disposed between the first reflecting mirror 5 and the second reflecting mirror 7.
  • the specific position of the shutter 6 can be adjusted according to the actual situation, and is not limited to this .
  • the femtosecond laser pulses emitted by the laser light source 1 pass through the first half-wave plate 2, the polarizer 3, the second half-wave plate 4, the first mirror 5, the optical gate 6, the second mirror 7, the The three mirrors 8, the dichroic mirror 9 and the objective lens 10 finally project to the focal point.
  • the three-dimensional moving system 11 includes a moving platform that can be translated on the X-axis, the Y-axis and the Z-axis, respectively, and the photoresist used for making the variable-focus microlens group 14 is mounted on the moving platform.
  • the preparation system also includes a real-time monitoring system
  • the real-time monitoring system is used for real-time monitoring of the polymerization and curing conditions of the photoresist mounted on the three-dimensional moving system 11 .
  • the real-time monitoring system includes an imaging unit for real-time imaging of the femtosecond laser pulses reflected by the photoresist.
  • the imaging unit is located on the back of the dichroic mirror 9 .
  • the dichroic mirror 9 can reflect the short-wave laser and transmit the long-wave laser.
  • the femtosecond laser pulse has higher energy and shorter wavelength before polymerizing and curing the photoresist, and belongs to the short-wave laser.
  • the dichroic mirror 9 can be reflected by the dichroic mirror 9 into the objective lens 10. After the femtosecond laser pulse is polymerized and cured on the photoresist, most of the energy is absorbed by the photoresist, and the wavelength becomes longer, which belongs to the long-wave laser. After being reflected by the photoresist, it passes through the dichroic mirror 9 again and directly passes through the dichroic mirror 9 to perform imaging on the imaging unit on the backside.
  • the femtosecond laser pulses reflected by the photoresist pass through the objective lens 10 and the dichroic mirror 9 in sequence, and finally perform imaging on the imaging unit.
  • the photoresist has different refractive indices (or reflectances) before and after the polymerization and curing, and the polymerization and curing conditions of the photoresist can be judged according to the imaging conditions of the femtosecond laser pulse on the imaging unit.
  • the imaging unit is preferably, but not limited to, a CCD camera.
  • a method for preparing a variable-focus microlens group 14, based on a femtosecond laser two-photon polymerization technology includes the following steps:
  • S100 Provide a non-magnetic lens barrel 141 , and inject magnetic photoresist into the non-magnetic lens barrel 141 .
  • the non-magnetic lens barrel 141 is mounted on the mobile platform of the three-dimensional moving system 11 , and the magnetic photoresist injected into the non-magnetic lens barrel 141 can be combined with the non-magnetic lens
  • the barrel 141 moves three-dimensionally.
  • the magnetic photoresist is in a liquid state before polymerization and curing, its viscosity is extremely high and its surface tension is large.
  • the size of the components prepared by femtosecond laser two-photon polymerization technology is extremely small, reaching the micro-nano scale. The amount of resist used is small, so the magnetic photoresist is not easy to leak from the non-magnetic lens barrel 141 .
  • a fixed-position non-magnetic lens 143 is formed in the non-magnetic lens barrel 141, and the non-magnetic lens 143 is located at an opening of one end of the non-magnetic lens barrel 141; as a part of the non-magnetic lens barrel 141 , the non-magnetic lens 143 and the non-magnetic lens barrel 141 are integrated and fabricated together.
  • the preparation method of the non-magnetic lens barrel 141 includes the following steps:
  • S101 providing a substrate, and dropping non-magnetic photoresist on the substrate;
  • the substrate is mounted on the moving platform of the three-dimensional moving system 11, and the non-magnetic photoresist dropped on the substrate can move three-dimensionally with the substrate.
  • the substrate can be any solid, preferably a transparent substrate, such as a glass substrate, an optical fiber end face, etc.
  • a transparent substrate such as a glass substrate, an optical fiber end face, etc.
  • the surface tension is large, and the size of the prepared components reaches the micro-nano scale.
  • the amount of the non-magnetic photoresist is small, even if there is no container structure for accommodating and defining the non-magnetic photoresist on the substrate, the non-magnetic photoresist is not easy to flow away on the substrate .
  • the method further includes: covering a cover glass on the non-magnetic photoresist.
  • the purpose of covering the cover glass in this step S101 is to flatten the surface of the non-magnetic photoresist, so as to prevent the surface curvature of the non-magnetic photoresist from affecting the focusing of the femtosecond laser pulse. Therefore, the substrate is protruded to form a raised portion or provided with a raised object at the periphery (such as both sides) of the non-magnetic photoresist, so as to raise the cover glass so that the cover glass can be raised. A certain processing gap is left between the sheet and the substrate to accommodate the non-magnetic photoresist.
  • S102 Project a femtosecond laser pulse to the focal point according to the three-dimensional model of the non-magnetic lens barrel 141, and simultaneously drive the non-magnetic photoresist on the substrate to move three-dimensionally, so that the non-magnetic photoresist can be moved in three dimensions.
  • the polymerization and curing points are sequentially positioned to the focal point for polymerization and curing, so that the interior of the non-magnetic photoresist is polymerized and cured into the shape of the non-magnetic lens barrel 141 .
  • the control system 12 controls the three-dimensional movement system 11 to drive the non-magnetic photoresist on the substrate to move three-dimensionally according to the three-dimensional model of the non-magnetic lens barrel 141, so as to move the non-magnetic photoresist on the substrate in three dimensions.
  • the polymerization and curing points of the non-magnetic photoresist are sequentially positioned to the focal point for polymerization and curing, so that the interior of the non-magnetic photoresist is polymerized and cured into the shape of the non-magnetic lens barrel 141 .
  • the cover glass is removed first, and then the non-magnetic photoresist together with the substrate is immersed in a developing solution.
  • the non-polymerized and cured non-magnetic photoresist will interact with the developing solution.
  • the liquid is chemically reacted and dissolved, leaving only the non-magnetic photoresist that has been polymerized and cured to form the non-magnetic lens barrel 141, and finally the non-magnetic lens barrel 141 is cleaned with alcohol to remove the residual development on the surface. liquid.
  • S200 Project a femtosecond laser pulse to the focal point according to the three-dimensional model of the magnetic lens 142, and simultaneously drive the magnetic photoresist in the non-magnetic lens barrel 141 to move three-dimensionally, so as to polymerize and cure the magnetic photoresist
  • the dots are sequentially positioned to the focal point for polymerization and curing, so that the inner portion of the magnetic photoresist is polymerized and cured into the shape of the magnetic lens 142 .
  • the control system 12 controls the three-dimensional moving system 11 to drive the magnetic photoresist in the non-magnetic lens barrel 141 to move three-dimensionally according to the three-dimensional model of the magnetic lens 142, so as to move the
  • the polymerization and curing points of the magnetic photoresist are sequentially positioned to the focal point for polymerization and curing, so that the interior of the magnetic photoresist is polymerized and cured into the shape of the non-magnetic lens barrel 141 .
  • the magnetic photoresist and the non-magnetic lens barrel 141 are directly immersed in the developing solution, and the unpolymerized and cured magnetic photoresist will chemically react with the developing solution to dissolve, and only The magnetic photoresist that has been polymerized and cured is left to form the magnetic lens 142.
  • the non-magnetic lens barrel 141 and the magnetic lens 142 together form the variable-focus micro-lens group 14. Finally, the variable-focus micro-lens group is treated with alcohol. 14. Wash to remove residual developer on the surface.
  • At least one hollow groove 146 is formed on the side wall of the non-magnetic lens barrel 141 for the developer to flow into the non-magnetic lens barrel 141.
  • the interior of the lens barrel 141 is in contact with the magnetic photoresist to improve the development efficiency.
  • the variable-focus micro-lens group 14 prepared by the above-mentioned preparation system and preparation method can realize the optical zooming or focusing function.
  • the non-magnetic lens barrel 141 is made of non-magnetic photoresist, so it has no magnetism and will not be affected by the magnetic field. Due to the magnetic field force, the magnetic lens 142 is made of magnetic photoresist and has magnetism, and can move relative to the non-magnetic lens barrel 141 under the action of the magnetic field force in the magnetic field. When the magnetic field force and gravity are balanced, the magnetic lens 142 stays in the zooming or focusing position.
  • the movement of the magnetic lens 142 in the non-magnetic lens barrel 141 can change the relative position between the magnetic lens 142 and the image sensor, so as to realize the optical focusing function ;
  • the movement of the magnetic lens 142 in the non-magnetic lens barrel 141 can change its relationship with the non-magnetic lens 143
  • the relative position between the magnetic lens 142 and the non-magnetic lens 143 to form the optical zoom function, the imaging focal length of the variable-focus micro-lens group 14 formed by the combination of the magnetic lens 142 and the non-magnetic lens 143 satisfies the following formula:
  • f is the object-side focal length of the variable-focus microlens group 14
  • f1 is the object-side focal length of the magnetic lens 142
  • f2 is the object-side focal length of the non-magnetic lens 143
  • f' is the variable-focus microlens
  • the image-side focal length of the lens group 14, f1' is the image-side focal length of the magnetic lens 142
  • f2' is the image-side focal length of the non-magnetic lens 143
  • f1 , f2 , f1 ′ and f2 ′ are all fixed and known quantities.
  • a first locking structure 144 and a second locking structure 145 are protruded from the inner wall of the side wall of the non-magnetic lens barrel 141 .
  • the structure 144 and the second locking structure 145 are disposed opposite to each other along the optical axis direction.
  • the polymerization and curing point of the magnetic photoresist is located at the first locking structure 144 of the non-magnetic lens barrel 141 .
  • the second detent structure 145 so that the prepared magnetic lens 142 is located between the first detent structure 144 and the second detent structure 145 of the non-magnetic lens barrel 141, so as to define the magnetic lens 142 range of movement.
  • the magnetic photoresist is formed by blending a magnetic material and a photosensitive polymer material; the magnetic material is preferably zero-dimensional nanoparticles, but can also be an element, oxide, alloy or alloy oxide of iron, cobalt, nickel or manganese , or use one-dimensional magnetic nanometer or magnetic micrometer wire, etc., or use magnetic nanomaterial or magnetic ultrafine powder.
  • the magnetic particles can be ordinary magnetic particles or magnetic particles with surface active decoration, or magnetic particles with functional surface material decoration, or inorganic-organic (such as triiron tetroxide-styrene), inorganic -Inorganic (such as platinum-iron alloy-manganese oxide), inorganic-inorganic-organic (such as nickel-nickel oxide-pyrimidine) and other core-shell magnetic particles, etc.
  • the shape can be spherical, ellipsoid, cube, cuboid, elongated , triangle or rhombus, etc.
  • the photosensitive polymer material can be styrene, acrylic, acrylate, epoxy, unsaturated polyester, amide or vinyl acetate and other polymer materials, usually including monomers, Prepolymer and photoinitiator, the polymerization type can be free-radical, anionic or cationic; among them, the commonly used monomers of acrylate-based photopolymerization materials include methyl methacrylate
  • the non-magnetic photoresist is a common photoresist or a passive photoresist, as long as no magnetic material is mixed, the above-mentioned photosensitive polymer material can be used for direct production.
  • the developing solution is a solvent made of acetone and isopropanol, or other solvents such as tetrahydrofuran, chloroform or toluene.

Abstract

A preparation method for a variable-focus microlens group (14) and the variable-focus microlens group (14), the preparation method comprising the following steps: S100: providing a non-magnetic lens barrel (141) in which a non-magnetic lens (143) with a fixed position is formed, and injecting a magnetic photoresist into the non-magnetic lens barrel (141); S200: according to a three-dimensional model of a magnetic lens (142), projecting femtosecond laser pulses to a focal point while driving the magnetic photoresist in the non-magnetic lens barrel (141) to move three-dimensionally so as to position polymerization and curing points of the magnetic photoresist to the focal point for polymerization and curing, so that the interior of the magnetic photoresist is polymerized and cured into the shape of the magnetic lens (142); and S300: using a developer to remove the magnetic photoresist that are not polymerized and cured to obtain the magnetic lens (142) that may move along an optical axis in the non-magnetic lens barrel (141). The preparation method may directly fabricate, within the non-magnetic lens barrel (141), the magnetic lens (142) that may be driven by a magnetic field force.

Description

一种可变焦微透镜组的制备方法及可变焦微透镜组A kind of preparation method of variable-focus micro-lens group and variable-focus micro-lens group 技术领域technical field
本发明涉及微电机领域，尤其涉及一种可变焦微透镜组的制备方法及可变焦微透镜组。The invention relates to the field of micro-motors, in particular to a preparation method of a variable-focus micro-lens group and a variable-focus micro-lens group.
背景技术Background technique
透镜驱动装置是一种微电机装置，通过驱动透镜和透镜之间相对移动或者透镜和图像传感器之间相对移动来实现光学变焦或对焦功能。基于电磁原理进行驱动的透镜驱动装置广泛应用于手机摄像头中，这类透镜驱动装置需要在搭载透镜的镜筒外围上缠绕一层电磁线圈，工艺复杂，不利于小型化集成，更不利于做成微纳器件，同时透镜大多采用玻璃或塑料制成，而镜筒也采用塑料制成，生物兼容性不好，影响了在医学领域中的应用。The lens driving device is a micro-motor device, which realizes the optical zooming or focusing function by driving the relative movement between the lens and the lens or the relative movement between the lens and the image sensor. Lens driving devices driven by electromagnetic principles are widely used in mobile phone cameras. This type of lens driving device needs to wrap a layer of electromagnetic coil on the periphery of the lens barrel carrying the lens. The process is complicated, which is not conducive to miniaturization and integration. At the same time, most of the lenses are made of glass or plastic, and the lens barrel is also made of plastic, which has poor biocompatibility, which affects the application in the medical field.
激光微加工技术具有非接触、有选择性加工、热影响区域小、高精度、形状易于控制等优点。激光微加工独特的“直写”技术，简化了工艺，实现了微型构件的快速成型制造。激光微立体光刻技术是快速成型的立体光刻工艺应用于微制造领域中衍生出来的一种加工技术，它以树脂材料为原料，激光焦点处或树脂基底可控运动，焦点处扫描处树脂聚合固化，获得微构件。其最大特点是不受微型器件或系统结构形状的限制，可以加工包含曲面在内的任意三维结构，并且可以将不同的微构件一次成型，不需微装配环节。在微立体光刻中利用飞秒脉冲激光实现三维微加工具有显著优点；包括“冷”加工，光和物质超快相互作用过程超快、功率极高，使加工过程在最大限度上避免了热效应；高精度，由于多光子过程的吸收截面非常小，使加工精度达到几十纳米。因此，激光微纳加工技术已经被看作是制备微结构的最有效手段之一，拥有巨大的应用潜力和诱人的发展前景。Laser micromachining technology has the advantages of non-contact, selective processing, small heat-affected zone, high precision, and easy shape control. The unique "direct writing" technology of laser micromachining simplifies the process and realizes the rapid prototyping of micro components. Laser micro-stereolithography technology is a processing technology derived from the application of rapid prototyping stereolithography process in the field of micro-manufacturing. The polymerization is cured to obtain micro-components. Its biggest feature is that it is not limited by the shape of micro-devices or system structures, and can process any three-dimensional structure including curved surfaces, and can form different micro-components at one time without micro-assembly. The use of femtosecond pulsed lasers in micro-stereolithography to achieve 3D micromachining has significant advantages; including "cold" machining, where the light-matter interaction process is ultrafast and power is extremely high, making the machining process maximally free from thermal effects ; High precision, because the absorption cross section of the multiphoton process is very small, so that the processing accuracy can reach several tens of nanometers. Therefore, laser micro-nano processing technology has been regarded as one of the most effective means to prepare microstructures, with huge application potential and attractive development prospects.
技术问题technical problem
为了解决上述现有技术的不足，本发明提供一种可变焦微透镜组的制备方法，可直接在非磁性镜筒内制作可由磁场力驱动的磁性透镜。In order to solve the above-mentioned deficiencies of the prior art, the present invention provides a method for preparing a variable-focus micro-lens group, which can directly manufacture a magnetic lens that can be driven by a magnetic field force in a non-magnetic lens barrel.
本发明还提供一种可变焦微透镜组。The present invention also provides a variable-focus micro-lens group.
技术解决方案technical solutions
本发明所要解决的技术问题通过以下技术方案予以实现：The technical problem to be solved by this invention is realized through the following technical solutions:
一种可变焦微透镜组的制备方法，包括如下步骤：A preparation method of a variable-focus microlens group, comprising the following steps:
S100：提供一非磁性镜筒，将磁性光刻胶注入所述非磁性镜筒内；S100: providing a non-magnetic lens barrel, and injecting magnetic photoresist into the non-magnetic lens barrel;
S200：依据磁性透镜的三维模型向一焦点处投射飞秒激光脉冲，同时带动所述非磁性镜筒内的所述磁性光刻胶进行三维移动，以将所述磁性光刻胶的聚合固化点依次定位至焦点处进行聚合固化，使得所述磁性光刻胶的内部聚合固化成所述磁性透镜的形状；S200: Project a femtosecond laser pulse to a focal point according to the three-dimensional model of the magnetic lens, and simultaneously drive the magnetic photoresist in the non-magnetic lens barrel to move three-dimensionally, so that the polymerization and curing point of the magnetic photoresist Sequentially positioned at the focal point for polymerization and curing, so that the interior of the magnetic photoresist is polymerized and cured into the shape of the magnetic lens;
S300：采用显影液去除未聚合固化的所述磁性光刻胶，得到可在所述非磁性镜筒内沿光轴方向移动的磁性透镜。S300 : using a developer to remove the unpolymerized and cured magnetic photoresist to obtain a magnetic lens that can move along the optical axis in the non-magnetic lens barrel.
一种可变焦微透镜组，其特征在于，包括非磁性镜筒和磁性透镜，所述磁性透镜设置于所述非磁性镜筒内，且在磁场力的作用下可在所述非磁性镜筒内沿光轴方向移动。A variable-focus micro-lens group, characterized in that it includes a non-magnetic lens barrel and a magnetic lens, the magnetic lens is arranged in the non-magnetic lens barrel, and can be attached to the non-magnetic lens barrel under the action of a magnetic field force move along the optical axis.
有益效果beneficial effect
本发明具有如下有益效果：该制备方法利用飞秒激光双光子聚合技术制备可变焦微透镜组，由磁性光刻胶聚合固化形成的磁性透镜对磁场有显著的感应，从而与非磁性透镜产生相对位移，实现微纳透镜组的光学变焦功能，且光刻胶的聚合固化无需使用掩模板，可以实现真正的三维加工，加工分辨率高，透镜表面光滑，成像更清晰效果更好，且光刻胶具有良好的生物兼容性，制得的微透镜组可应用于医学领域。The invention has the following beneficial effects: the preparation method utilizes the femtosecond laser two-photon polymerization technology to prepare the variable-focus microlens group, and the magnetic lens formed by the polymerization and curing of the magnetic photoresist has a significant induction to the magnetic field, so that it is relatively different from the non-magnetic lens. Displacement, realize the optical zoom function of the micro-nano lens group, and the polymerization and curing of the photoresist does not need to use a mask, which can realize real three-dimensional processing, high processing resolution, smooth lens surface, clearer imaging, better effect, and photolithography The glue has good biocompatibility, and the prepared microlens group can be used in the medical field.
附图说明Description of drawings
图1为本发明提供的可变焦微透镜组的制备系统的示意图；1 is a schematic diagram of a preparation system of a variable-focus microlens group provided by the present invention;
图2为本发明提供的可变焦微透镜组的制备方法的步骤框图；Fig. 2 is the step block diagram of the preparation method of the variable-focus microlens group provided by the present invention;
图3为本发明提供的非磁性镜筒的制备方法的步骤框图；Fig. 3 is the step block diagram of the preparation method of the non-magnetic lens barrel provided by the present invention;
图4为本发明提供的可变焦微透镜组的示意图；4 is a schematic diagram of a variable-focus micro-lens group provided by the present invention;
图5为本发明提供的可变焦微透镜组的剖视图。FIG. 5 is a cross-sectional view of the variable-focus micro-lens group provided by the present invention.
本发明的实施方式Embodiments of the present invention
下面结合附图和实施例对本发明进行详细的说明。The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
如图1所示，一种可变焦微透镜组14的制备系统，基于飞秒激光双光子聚合技术，包括光源系统、三维移动系统11和控制系统12，As shown in FIG. 1, a preparation system of a variable-focus microlens group 14, based on femtosecond laser two-photon polymerization technology, includes a light source system, a three-dimensional movement system 11 and a control system 12,
所述光源系统，用于向一焦点处投射飞秒激光脉冲；the light source system for projecting femtosecond laser pulses to a focal point;
所述三维移动系统11，用于搭载并带动光刻胶进行三维移动；The three-dimensional moving system 11 is used to carry and drive the photoresist to move three-dimensionally;
所述控制系统12，用于依据可变焦微透镜组14的三维模型控制所述光源系统向焦点处投射飞秒激光脉冲，同时控制所述三维移动系统11带动光刻胶进行三维移动，以将光刻胶的聚合固化点依次定位至焦点处进行聚合固化，使得光刻胶的内部聚合固化成所述可变焦微透镜组14的形状。The control system 12 is used to control the light source system to project femtosecond laser pulses to the focal point according to the three-dimensional model of the variable-focus microlens group 14, and at the same time control the three-dimensional movement system 11 to drive the photoresist to move three-dimensionally, so as to move the photoresist in three dimensions. The polymerization and curing points of the photoresist are sequentially positioned to the focal point for polymerization and curing, so that the interior of the photoresist is polymerized and cured into the shape of the variable-focus microlens group 14 .
该制备系统基于飞秒激光双光子聚合技术，光刻胶在被焦点处的飞秒激光脉冲照射时可发生双光子聚合效应，所述光源系统向焦点处投射的飞秒激光脉冲具有超强能量，能够对光刻胶的内部定点进行聚合固化，而光学路径上其他地方的飞秒激光脉冲能量较低不能使光刻胶聚合固化，所述三维移动系统11通过将光刻胶的聚合固化点依次定位至焦点处进行聚合固化，可使光刻胶内部聚合固化成所述可变焦微透镜组14的形状，最后通过显影液将未聚合固化的光刻胶洗去，仅留下已聚合固化的光刻胶形成所述可变焦微透镜组14。The preparation system is based on femtosecond laser two-photon polymerization technology. The photoresist can produce two-photon polymerization effect when irradiated by femtosecond laser pulses at the focal point. The femtosecond laser pulses projected by the light source system to the focal point have super energy , which can polymerize and solidify the internal fixed point of the photoresist, while the low energy of the femtosecond laser pulse elsewhere on the optical path cannot polymerize and solidify the photoresist. Positioning to the focal point in turn for polymerization and curing, the interior of the photoresist can be polymerized and cured into the shape of the variable focus microlens group 14, and finally the unpolymerized and cured photoresist is washed away by the developer, leaving only the polymerized and cured photoresist. of photoresist to form the variable focus microlens group 14 .
所述控制系统12可以为笔记本电脑、台式PC、平板电脑、智能手机等终端，通过安装的三维绘图软件将所述可变焦微透镜组14的三维模型转换为对应的点云坐标数据，一个坐标点对应于光刻胶的一个聚合固化点，然后将光刻胶的聚合固化点依次定位至焦点处进行聚合固化。The control system 12 can be a terminal such as a notebook computer, a desktop PC, a tablet computer, a smart phone, etc., and the three-dimensional model of the zoom micro-lens group 14 is converted into corresponding point cloud coordinate data through the installed three-dimensional drawing software. The point corresponds to one polymerization and curing point of the photoresist, and then the polymerization and curing points of the photoresist are sequentially positioned to the focal point for polymerization and curing.
在利用飞秒激光脉冲对光刻胶的内部进行聚合固化时，按照所述可变焦微透镜组14的三维模型，由下至上逐层平面对光刻胶进行扫描，在平面内则由点至线、再由线至面进行扫描，光刻胶的聚合固化点与所述可变焦微透镜组14的三维模型的坐标点一一对应。When using femtosecond laser pulses to polymerize and cure the interior of the photoresist, according to the three-dimensional model of the variable-focus microlens group 14, the photoresist is scanned layer by layer from bottom to top, and within the plane, the photoresist is scanned from point to point. Line, and then scan from line to surface, the polymerization and curing point of the photoresist corresponds to the coordinate point of the three-dimensional model of the variable-focus microlens group 14 one-to-one.
所述光源系统包括激光光源1、光路模块和光闸6，The light source system includes a laser light source 1, an optical path module and a shutter 6,
所述激光光源1，用于发射飞秒激光脉冲；The laser light source 1 is used to emit femtosecond laser pulses;
所述光路模块，用于控制飞秒激光脉冲的光学路径，以将所述激光光源1发射出的飞秒激光脉冲投射至焦点处；The optical path module is used to control the optical path of the femtosecond laser pulse, so as to project the femtosecond laser pulse emitted by the laser light source 1 to the focal point;
所述光闸6，用于控制飞秒激光脉冲在所述光路模块内的传播通断。The optical gate 6 is used to control the propagation of the femtosecond laser pulse in the optical circuit module.
所述激光光源1和光闸6均通讯连接于所述控制系统12，由所述控制系统12分别进行控制，所述控制系统12主要控制所述激光光源1的开启或关闭以及飞秒激光脉冲的强度，还有控制所述光闸6的打开或关闭。The laser light source 1 and the shutter 6 are both connected to the control system 12 in communication, and are controlled by the control system 12 respectively. The control system 12 mainly controls the on or off of the laser light source 1 and the femtosecond laser pulse. intensity, and also controls the opening or closing of the shutter 6 .
所述激光光源1为飞秒激光光源。The laser light source 1 is a femtosecond laser light source.
所述光路模块包括衰减单元、偏振单元、反射单元和物镜10，The optical path module includes an attenuation unit, a polarization unit, a reflection unit and an objective lens 10,
所述衰减单元，用于减弱飞秒激光脉冲的能量；The attenuation unit is used to attenuate the energy of the femtosecond laser pulse;
所述偏振单元，用于控制飞秒激光脉冲的偏振方向；The polarization unit is used to control the polarization direction of the femtosecond laser pulse;
所述反射单元，用于控制飞秒激光脉冲的传播方向，包括至少一反射镜；The reflecting unit, used for controlling the propagation direction of the femtosecond laser pulse, includes at least one reflecting mirror;
所述物镜10，用于将飞秒激光脉冲聚焦后投射至焦点处。The objective lens 10 is used for focusing the femtosecond laser pulse and projecting it to the focal point.
本实施例中，所述光路模块包括沿光学路径依次设置的第一半波片2、起偏器3、第二半波片4、第一反射镜5、第二反射镜7、第三反射镜8、双色镜9和物镜10，其中，所述第一半坡片和起偏器3一起构成所述衰减单元，所述第二半波片4单独构成所述偏振单元，所述第一反射镜5、第二反射镜7、第三反射镜8和双色镜9一起构成所述反射单元，所述第一反射镜5、第二反射镜7、第三反射镜8和双色镜9分别使飞秒激光脉冲形成90°反射。In this embodiment, the optical path module includes a first half-wave plate 2 , a polarizer 3 , a second half-wave plate 4 , a first reflecting mirror 5 , a second reflecting mirror 7 , and a third reflecting mirror 2 , which are sequentially arranged along the optical path. mirror 8, dichroic mirror 9 and objective lens 10, wherein the first half-wave plate and the polarizer 3 together constitute the attenuation unit, the second half-wave plate 4 alone constitutes the polarization unit, and the first half-wave plate 4 constitutes the polarization unit alone. The reflection mirror 5, the second reflection mirror 7, the third reflection mirror 8 and the dichroic mirror 9 together constitute the reflection unit, and the first reflection mirror 5, the second reflection mirror 7, the third reflection mirror 8 and the dichroic mirror 9 are respectively Make a 90° reflection of the femtosecond laser pulse.
本实施例中，所述光闸6设置于所述第一反射镜5和第二反射镜7之间，当然，所述光闸6的具体位置可依据实际情况而调整，并不局限于此。In this embodiment, the shutter 6 is disposed between the first reflecting mirror 5 and the second reflecting mirror 7. Of course, the specific position of the shutter 6 can be adjusted according to the actual situation, and is not limited to this .
所述激光光源1发射出的飞秒激光脉冲依次经过第一半波片2、起偏器3、第二半波片4、第一反射镜5、光闸6、第二反射镜7、第三反射镜8、双色镜9和物镜10，最终投射至焦点处。The femtosecond laser pulses emitted by the laser light source 1 pass through the first half-wave plate 2, the polarizer 3, the second half-wave plate 4, the first mirror 5, the optical gate 6, the second mirror 7, the The three mirrors 8, the dichroic mirror 9 and the objective lens 10 finally project to the focal point.
所述三维移动系统11包括可分别在X轴、Y轴和Z轴上进行平移的移动平台，用于制作所述可变焦微透镜组14的光刻胶搭载于所述移动平台上。The three-dimensional moving system 11 includes a moving platform that can be translated on the X-axis, the Y-axis and the Z-axis, respectively, and the photoresist used for making the variable-focus microlens group 14 is mounted on the moving platform.
该制备系统还包括实时监测系统，The preparation system also includes a real-time monitoring system,
所述实时监测系统，用于对搭载于所述三维移动系统11的光刻胶的聚合固化情况进行实时监测。The real-time monitoring system is used for real-time monitoring of the polymerization and curing conditions of the photoresist mounted on the three-dimensional moving system 11 .
所述实时监测系统包括一成像单元，用于对经光刻胶反射回来的飞秒激光脉冲进行实时成像。The real-time monitoring system includes an imaging unit for real-time imaging of the femtosecond laser pulses reflected by the photoresist.
所述成像单元位于所述双色镜9的背面。所述双色镜9可对短波激光形成反射，而对长波激光形成透射，飞秒激光脉冲在对光刻胶进行聚合固化前，具有较高的能量，波长较短，属于短波激光，经过所述双色镜9时能够被所述双色镜9反射至所述物镜10内，飞秒激光脉冲在对光刻胶进行聚合固化后，大部分能量被光刻胶吸收，波长变长，属于长波激光，经光刻胶反射回来后再次经过所述双色镜9时直接穿过所述双色镜9而在背面的成像单元上进行成像。The imaging unit is located on the back of the dichroic mirror 9 . The dichroic mirror 9 can reflect the short-wave laser and transmit the long-wave laser. The femtosecond laser pulse has higher energy and shorter wavelength before polymerizing and curing the photoresist, and belongs to the short-wave laser. The dichroic mirror 9 can be reflected by the dichroic mirror 9 into the objective lens 10. After the femtosecond laser pulse is polymerized and cured on the photoresist, most of the energy is absorbed by the photoresist, and the wavelength becomes longer, which belongs to the long-wave laser. After being reflected by the photoresist, it passes through the dichroic mirror 9 again and directly passes through the dichroic mirror 9 to perform imaging on the imaging unit on the backside.
经光刻胶反射回来的飞秒激光脉冲依次经过物镜10和双色镜9，而最终在所述成像单元上进行成像。The femtosecond laser pulses reflected by the photoresist pass through the objective lens 10 and the dichroic mirror 9 in sequence, and finally perform imaging on the imaging unit.
光刻胶在聚合固化前和聚合固化后具有不同的折射率（或反射率），可依据飞秒激光脉冲在所述成像单元上的成像情况来判断光刻胶的聚合固化情况。The photoresist has different refractive indices (or reflectances) before and after the polymerization and curing, and the polymerization and curing conditions of the photoresist can be judged according to the imaging conditions of the femtosecond laser pulse on the imaging unit.
所述成像单元优选但不限于为CCD相机。The imaging unit is preferably, but not limited to, a CCD camera.
如图2、4和5所示，一种可变焦微透镜组14的制备方法，基于飞秒激光双光子聚合技术，包括如下步骤：As shown in Figures 2, 4 and 5, a method for preparing a variable-focus microlens group 14, based on a femtosecond laser two-photon polymerization technology, includes the following steps:
S100：提供一非磁性镜筒141，将磁性光刻胶注入所述非磁性镜筒141内。S100 : Provide a non-magnetic lens barrel 141 , and inject magnetic photoresist into the non-magnetic lens barrel 141 .
在该步骤S100中，将所述非磁性镜筒141搭载于所述三维移动系统11的移动平台上，注入所述非磁性镜筒141内的所述磁性光刻胶可随所述非磁性镜筒141进行三维移动。In this step S100 , the non-magnetic lens barrel 141 is mounted on the mobile platform of the three-dimensional moving system 11 , and the magnetic photoresist injected into the non-magnetic lens barrel 141 can be combined with the non-magnetic lens The barrel 141 moves three-dimensionally.
所述磁性光刻胶在聚合固化前虽然呈液态，但是其粘度极高，表面张力大，再加上飞秒激光双光子聚合技术制备的元件尺寸极小，达到微纳尺度，所述磁性光刻胶的用量少，所以所述磁性光刻胶不容易从所述非磁性镜筒141内漏出。Although the magnetic photoresist is in a liquid state before polymerization and curing, its viscosity is extremely high and its surface tension is large. In addition, the size of the components prepared by femtosecond laser two-photon polymerization technology is extremely small, reaching the micro-nano scale. The amount of resist used is small, so the magnetic photoresist is not easy to leak from the non-magnetic lens barrel 141 .
优选地，所述非磁性镜筒141内形成有位置固定的非磁性透镜143，所述非磁性透镜143位于所述非磁性镜筒141的一端开口处；作为所述非磁性镜筒141的一部分，所述非磁性透镜143与所述非磁性镜筒141为一体结构且一同制作。Preferably, a fixed-position non-magnetic lens 143 is formed in the non-magnetic lens barrel 141, and the non-magnetic lens 143 is located at an opening of one end of the non-magnetic lens barrel 141; as a part of the non-magnetic lens barrel 141 , the non-magnetic lens 143 and the non-magnetic lens barrel 141 are integrated and fabricated together.
其中，如图3所示，所述非磁性镜筒141的制备方法包括如下步骤：Wherein, as shown in FIG. 3 , the preparation method of the non-magnetic lens barrel 141 includes the following steps:
S101：提供一基底，将非磁性光刻胶滴在所述基底上；S101: providing a substrate, and dropping non-magnetic photoresist on the substrate;
在该步骤S101中，将所述基底搭载于所述三维移动系统11的移动平台上，滴在所述基底上的所述非磁性光刻胶可随所述基底进行三维移动。In this step S101, the substrate is mounted on the moving platform of the three-dimensional moving system 11, and the non-magnetic photoresist dropped on the substrate can move three-dimensionally with the substrate.
所述基底可以为任何固体，优选为透明基底，比如玻璃基板、光纤端面等，同样的，由于所述非磁性光刻胶的粘度极高，表面张力大，而制备的元件尺寸达到微纳尺度，所述非磁性光刻胶的用量少，即使所述基底上没有用于容纳限定所述非磁性光刻胶的容器结构，所述非磁性光刻胶也不容易在所述基底上流走。The substrate can be any solid, preferably a transparent substrate, such as a glass substrate, an optical fiber end face, etc. Similarly, due to the extremely high viscosity of the non-magnetic photoresist, the surface tension is large, and the size of the prepared components reaches the micro-nano scale. , the amount of the non-magnetic photoresist is small, even if there is no container structure for accommodating and defining the non-magnetic photoresist on the substrate, the non-magnetic photoresist is not easy to flow away on the substrate .
优选地，在该步骤S101中，在将所述非磁性光刻胶滴在所述基底上后，还包括：将一盖玻片盖在所述非磁性光刻胶上。Preferably, in this step S101, after the non-magnetic photoresist is dropped on the substrate, the method further includes: covering a cover glass on the non-magnetic photoresist.
在该步骤S101中盖上所述盖玻片是为了使所述非磁性光刻胶的表面平整，以避免所述非磁性光刻胶的表面弧度影响到飞秒激光脉冲的聚焦。故而，所述基底在所述非磁性光刻胶的外围（比如两侧）处凸出形成有垫高部或设置有垫高物，以将所述盖玻片垫高，使所述盖玻片和基底之间留有一定的加工空隙，以容纳所述非磁性光刻胶。The purpose of covering the cover glass in this step S101 is to flatten the surface of the non-magnetic photoresist, so as to prevent the surface curvature of the non-magnetic photoresist from affecting the focusing of the femtosecond laser pulse. Therefore, the substrate is protruded to form a raised portion or provided with a raised object at the periphery (such as both sides) of the non-magnetic photoresist, so as to raise the cover glass so that the cover glass can be raised. A certain processing gap is left between the sheet and the substrate to accommodate the non-magnetic photoresist.
S102：依据所述非磁性镜筒141的三维模型向焦点处投射飞秒激光脉冲，同时带动所述基底上的所述非磁性光刻胶进行三维移动，以将所述非磁性光刻胶的聚合固化点依次定位至焦点处进行聚合固化，使得所述非磁性光刻胶的内部聚合固化成所述非磁性镜筒141的形状。S102: Project a femtosecond laser pulse to the focal point according to the three-dimensional model of the non-magnetic lens barrel 141, and simultaneously drive the non-magnetic photoresist on the substrate to move three-dimensionally, so that the non-magnetic photoresist can be moved in three dimensions. The polymerization and curing points are sequentially positioned to the focal point for polymerization and curing, so that the interior of the non-magnetic photoresist is polymerized and cured into the shape of the non-magnetic lens barrel 141 .
在该步骤S102中，所述控制系统12依据所述非磁性镜筒141的三维模型控制所述三维移动系统11带动所述基底上的所述非磁性光刻胶进行三维移动，以将所述非磁性光刻胶的聚合固化点依次定位至焦点处进行聚合固化，使得所述非磁性光刻胶的内部聚合固化成所述非磁性镜筒141的形状。In this step S102, the control system 12 controls the three-dimensional movement system 11 to drive the non-magnetic photoresist on the substrate to move three-dimensionally according to the three-dimensional model of the non-magnetic lens barrel 141, so as to move the non-magnetic photoresist on the substrate in three dimensions. The polymerization and curing points of the non-magnetic photoresist are sequentially positioned to the focal point for polymerization and curing, so that the interior of the non-magnetic photoresist is polymerized and cured into the shape of the non-magnetic lens barrel 141 .
S103：采用显影液去除未聚合固化的所述非磁性光刻胶，得到所述非磁性镜筒141（优选包括所述非磁性透镜143）。S103: Using a developer to remove the non-polymerized and cured non-magnetic photoresist to obtain the non-magnetic lens barrel 141 (preferably including the non-magnetic lens 143).
在该步骤S103中，先拿掉所述盖玻片，然后再将所述非磁性光刻胶连同所述基底一同浸泡在显影液中，未聚合固化的所述非磁性光刻胶会与显影液发生化学反应而溶解，仅留下已聚合固化的所述非磁性光刻胶形成所述非磁性镜筒141，最后用酒精对所述非磁性镜筒141进行清洗，以去除表面残留的显影液。In this step S103, the cover glass is removed first, and then the non-magnetic photoresist together with the substrate is immersed in a developing solution. The non-polymerized and cured non-magnetic photoresist will interact with the developing solution. The liquid is chemically reacted and dissolved, leaving only the non-magnetic photoresist that has been polymerized and cured to form the non-magnetic lens barrel 141, and finally the non-magnetic lens barrel 141 is cleaned with alcohol to remove the residual development on the surface. liquid.
S200：依据磁性透镜142的三维模型向焦点处投射飞秒激光脉冲，同时带动所述非磁性镜筒141内的所述磁性光刻胶进行三维移动，以将所述磁性光刻胶的聚合固化点依次定位至焦点处进行聚合固化，使得所述磁性光刻胶的内部聚合固化成所述磁性透镜142的形状。S200: Project a femtosecond laser pulse to the focal point according to the three-dimensional model of the magnetic lens 142, and simultaneously drive the magnetic photoresist in the non-magnetic lens barrel 141 to move three-dimensionally, so as to polymerize and cure the magnetic photoresist The dots are sequentially positioned to the focal point for polymerization and curing, so that the inner portion of the magnetic photoresist is polymerized and cured into the shape of the magnetic lens 142 .
在该步骤S200中，所述控制系统12依据所述磁性透镜142的三维模型控制所述三维移动系统11带动所述非磁性镜筒141内的所述磁性光刻胶进行三维移动，以将所述磁性光刻胶的聚合固化点依次定位至焦点处进行聚合固化，使得所述磁性光刻胶的内部聚合固化成所述非磁性镜筒141的形状。In this step S200, the control system 12 controls the three-dimensional moving system 11 to drive the magnetic photoresist in the non-magnetic lens barrel 141 to move three-dimensionally according to the three-dimensional model of the magnetic lens 142, so as to move the The polymerization and curing points of the magnetic photoresist are sequentially positioned to the focal point for polymerization and curing, so that the interior of the magnetic photoresist is polymerized and cured into the shape of the non-magnetic lens barrel 141 .
S300：采用显影液去除未聚合固化的所述磁性光刻胶，得到可在所述非磁性镜筒141内沿光轴方向移动的磁性透镜142。S300 : using a developer to remove the unpolymerized and cured magnetic photoresist to obtain a magnetic lens 142 that can move along the optical axis in the non-magnetic lens barrel 141 .
在该步骤S300中，直接将所述磁性光刻胶连同所述非磁性镜筒141一同浸泡在显影液中，未聚合固化的所述磁性光刻胶会与显影液发生化学反应而溶解，仅留下已聚合固化的所述磁性光刻胶形成所述磁性透镜142，所述非磁性镜筒141和磁性透镜142共同组成可变焦微透镜组14，最后用酒精对所述可变焦微透镜组14进行清洗，以去除表面残留的显影液。In this step S300, the magnetic photoresist and the non-magnetic lens barrel 141 are directly immersed in the developing solution, and the unpolymerized and cured magnetic photoresist will chemically react with the developing solution to dissolve, and only The magnetic photoresist that has been polymerized and cured is left to form the magnetic lens 142. The non-magnetic lens barrel 141 and the magnetic lens 142 together form the variable-focus micro-lens group 14. Finally, the variable-focus micro-lens group is treated with alcohol. 14. Wash to remove residual developer on the surface.
为了便于对所述非磁性镜筒141内的所述磁性光刻胶进行显影，所述非磁性镜筒141的侧壁上开设有至少一镂空槽146，以供显影液流入到所述非磁性镜筒141的内部与所述磁性光刻胶相接触，提高显影效率。In order to facilitate the development of the magnetic photoresist in the non-magnetic lens barrel 141, at least one hollow groove 146 is formed on the side wall of the non-magnetic lens barrel 141 for the developer to flow into the non-magnetic lens barrel 141. The interior of the lens barrel 141 is in contact with the magnetic photoresist to improve the development efficiency.
通过上述制备系统和制备方法制得的可变焦微透镜组14可实现光学变焦或对焦功能，所述非磁性镜筒141由于采用非磁性光刻胶制作，不具有磁性，在磁场中不会受到磁场力的作用，而所述磁性透镜142由于采用磁性光刻胶制作，具有磁性，在磁场中受到磁场力的作用可相对于所述非磁性镜筒141移动，当所述磁性透镜142所受到的磁场力和重力相平衡时，所述磁性透镜142停留在变焦或对焦位置上。The variable-focus micro-lens group 14 prepared by the above-mentioned preparation system and preparation method can realize the optical zooming or focusing function. The non-magnetic lens barrel 141 is made of non-magnetic photoresist, so it has no magnetism and will not be affected by the magnetic field. Due to the magnetic field force, the magnetic lens 142 is made of magnetic photoresist and has magnetism, and can move relative to the non-magnetic lens barrel 141 under the action of the magnetic field force in the magnetic field. When the magnetic field force and gravity are balanced, the magnetic lens 142 stays in the zooming or focusing position.
当所述非磁性镜筒141内仅有所述磁性透镜142时，所述磁性透镜142在所述非磁性镜筒141内的移动可改变其与图像传感器之间的相对位置，实现光学对焦功能；当所述非磁性镜筒141内同时具有所述磁性透镜142和非磁性透镜143时，所述磁性透镜142在所述非磁性镜筒141内的移动可改变其与所述非磁性透镜143之间的相对位置，实现光学变焦功能，所述磁性透镜142与所述非磁性透镜143组合形成的可变焦微透镜组14的成像焦距满足以下公式：When there is only the magnetic lens 142 in the non-magnetic lens barrel 141, the movement of the magnetic lens 142 in the non-magnetic lens barrel 141 can change the relative position between the magnetic lens 142 and the image sensor, so as to realize the optical focusing function ; When the non-magnetic lens barrel 141 has both the magnetic lens 142 and the non-magnetic lens 143, the movement of the magnetic lens 142 in the non-magnetic lens barrel 141 can change its relationship with the non-magnetic lens 143 The relative position between the magnetic lens 142 and the non-magnetic lens 143 to form the optical zoom function, the imaging focal length of the variable-focus micro-lens group 14 formed by the combination of the magnetic lens 142 and the non-magnetic lens 143 satisfies the following formula:
Figure 178128dest_path_image001
，
Figure 976188dest_path_image002
，
Figure 178128dest_path_image001
,
Figure 976188dest_path_image002
,
其中f为所述可变焦微透镜组14的物方焦距，f1为所述磁性透镜142的物方焦距，f 2为所述非磁性透镜143的物方焦距，f’为所述可变焦微透镜组14的像方焦距，f1’所述磁性透镜142的像方焦距，f2’为所述非磁性透镜143的像方焦距，
Figure 267492dest_path_image003
为所述磁性透镜142的像方焦点处到所述非磁性透镜143的物方焦点处的距离，f1、f2、f1’和f2’均为固定的已知量。 where f is the object-side focal length of the variable-focus microlens group 14, f1 is the object-side focal length of the magnetic lens 142, f2 is the object-side focal length of the non-magnetic lens 143, and f' is the variable-focus microlens The image-side focal length of the lens group 14, f1' is the image-side focal length of the magnetic lens 142, f2' is the image-side focal length of the non-magnetic lens 143,
Figure 267492dest_path_image003
is the distance from the image-side focal point of the magnetic lens 142 to the object-side focal point of the non-magnetic lens 143 , f1 , f2 , f1 ′ and f2 ′ are all fixed and known quantities.
优选地，在制备所述非磁性镜筒141时，所述非磁性镜筒141的侧壁内壁上凸出形成有第一卡位结构144和第二卡位结构145，所述第一卡位结构144和第二卡位结构145沿光轴方向相对设置，在制备所述磁性透镜142时，所述磁性光刻胶的聚合固化点位于所述非磁性镜筒141的第一卡位结构144和第二卡位结构145之间，以使制备出的磁性透镜142位于所述非磁性镜筒141的第一卡位结构144和第二卡位结构145之间，以限定所述磁性透镜142的移动范围。Preferably, when preparing the non-magnetic lens barrel 141 , a first locking structure 144 and a second locking structure 145 are protruded from the inner wall of the side wall of the non-magnetic lens barrel 141 . The structure 144 and the second locking structure 145 are disposed opposite to each other along the optical axis direction. When preparing the magnetic lens 142 , the polymerization and curing point of the magnetic photoresist is located at the first locking structure 144 of the non-magnetic lens barrel 141 . and the second detent structure 145, so that the prepared magnetic lens 142 is located between the first detent structure 144 and the second detent structure 145 of the non-magnetic lens barrel 141, so as to define the magnetic lens 142 range of movement.
所述磁性光刻胶由磁性材料和光敏聚合材料共混形成；所述磁性材料优选采用零维纳米颗粒，但也可以采用铁、钴、镍或锰的单质、氧化物、合金或合金氧化物，或者采用一维的磁纳米或磁微米线等，或者采用磁性纳米材料或磁性超细粉体等。The magnetic photoresist is formed by blending a magnetic material and a photosensitive polymer material; the magnetic material is preferably zero-dimensional nanoparticles, but can also be an element, oxide, alloy or alloy oxide of iron, cobalt, nickel or manganese , or use one-dimensional magnetic nanometer or magnetic micrometer wire, etc., or use magnetic nanomaterial or magnetic ultrafine powder.
其中，所述磁粒子可以为普通磁粒子或是具有表面活性装饰的磁粒子、或是具有功能性表面材料装饰的磁粒子，或是无机-有机（如四氧化三铁-苯乙烯）、无机-无机（如铂铁合金-氧化锰）、无机-无机-有机（如镍-氧化镍-嘧啶）等核-壳结构的磁粒子等，形状可以为球形、椭球形、立方体、长方体、长条形、三角形或菱形等；所述光敏聚合材料可以是苯乙烯类、丙烯酸类、丙烯酸酯类、环氧树脂类、不饱和聚酯类、酰胺类或醋酸乙烯类等聚合材料，通常包括单体、预聚物和光引发剂，聚合类型可以为自由基型、阴离子型或阳离子形；其中，常用的丙烯酸酯类光敏聚合材料的单体包括甲基丙烯酸甲酯、甲基丙烯酸乙酯、甲基丙烯酸丁酯、丙烯酸甲酯、丙烯酸乙酯或丙烯酸丁酯，预聚物为二季戊四醇五丙烯酸酯、季戊四醇三丙烯酸酯、聚氨酯丙烯酸酯、三羟甲基丙烷三丙烯酸酯或环氧丙烯酸酯，光引发剂为苯乙酮、安息香醚、硫杂蒽酮或1-对吗啉苯基-2-二甲氨基-2-苄基-1-丁酮材料中的至少一种。Wherein, the magnetic particles can be ordinary magnetic particles or magnetic particles with surface active decoration, or magnetic particles with functional surface material decoration, or inorganic-organic (such as triiron tetroxide-styrene), inorganic -Inorganic (such as platinum-iron alloy-manganese oxide), inorganic-inorganic-organic (such as nickel-nickel oxide-pyrimidine) and other core-shell magnetic particles, etc., the shape can be spherical, ellipsoid, cube, cuboid, elongated , triangle or rhombus, etc.; the photosensitive polymer material can be styrene, acrylic, acrylate, epoxy, unsaturated polyester, amide or vinyl acetate and other polymer materials, usually including monomers, Prepolymer and photoinitiator, the polymerization type can be free-radical, anionic or cationic; among them, the commonly used monomers of acrylate-based photopolymerization materials include methyl methacrylate, ethyl methacrylate, methacrylic acid Butyl, methyl acrylate, ethyl acrylate or butyl acrylate, prepolymer as dipentaerythritol pentaacrylate, pentaerythritol triacrylate, urethane acrylate, trimethylolpropane triacrylate or epoxy acrylate, photoinitiated The agent is at least one of acetophenone, benzoin ether, thioxanthone or 1-p-morpholinephenyl-2-dimethylamino-2-benzyl-1-butanone material.
所述非磁性光刻胶为普通光刻胶或无源光刻胶，只要不混合有磁性材料即可，可采用上述的光敏聚合材料直接制作。The non-magnetic photoresist is a common photoresist or a passive photoresist, as long as no magnetic material is mixed, the above-mentioned photosensitive polymer material can be used for direct production.
所述显影液是由丙酮和异丙醇制成的溶剂，或者其他如四氢呋喃、氯仿或甲苯等溶剂。The developing solution is a solvent made of acetone and isopropanol, or other solvents such as tetrahydrofuran, chloroform or toluene.
以上所述实施例仅表达了本发明的实施方式，其描述较为具体和详细，但并不能因此而理解为对本发明专利范围的限制，但凡采用等同替换或等效变换的形式所获得的技术方案，均应落在本发明的保护范围之内。The above-mentioned embodiment only expresses the embodiment of the present invention, and its description is more specific and detailed, but it should not be construed as a limitation to the patent scope of the present invention, but any technical solution obtained in the form of equivalent replacement or equivalent transformation , should fall within the protection scope of the present invention.
序列表自由内容Sequence Listing Free Content
  

Claims (10)

  1. 一种可变焦微透镜组的制备方法，其特征在于，包括如下步骤：A preparation method of a variable-focus microlens group, characterized in that it comprises the following steps:
    S100：提供一非磁性镜筒，将磁性光刻胶注入所述非磁性镜筒内；S100: providing a non-magnetic lens barrel, and injecting magnetic photoresist into the non-magnetic lens barrel;
    S200：依据磁性透镜的三维模型向一焦点处投射飞秒激光脉冲，同时带动所述非磁性镜筒内的所述磁性光刻胶进行三维移动，以将所述磁性光刻胶的聚合固化点依次定位至焦点处进行聚合固化，使得所述磁性光刻胶的内部聚合固化成所述磁性透镜的形状；S200: Project a femtosecond laser pulse to a focal point according to the three-dimensional model of the magnetic lens, and simultaneously drive the magnetic photoresist in the non-magnetic lens barrel to move three-dimensionally, so that the polymerization and curing point of the magnetic photoresist Sequentially positioned at the focal point for polymerization and curing, so that the interior of the magnetic photoresist is polymerized and cured into the shape of the magnetic lens;
    S300：采用显影液去除未聚合固化的所述磁性光刻胶，得到可在所述非磁性镜筒内沿光轴方向移动的磁性透镜。S300 : using a developer to remove the unpolymerized and cured magnetic photoresist to obtain a magnetic lens that can move along the optical axis in the non-magnetic lens barrel.
  2. 根据权利要求1所述的可变焦微透镜组的制备方法，其特征在于，所述非磁性镜筒的制备方法包括如下步骤：The method for preparing a variable-focus microlens group according to claim 1, wherein the method for preparing the non-magnetic lens barrel comprises the following steps:
    S101：提供一基底，将非磁性光刻胶滴在所述基底上；S101: providing a substrate, and dropping non-magnetic photoresist on the substrate;
    S102：依据所述非磁性镜筒的三维模型向焦点处投射飞秒激光脉冲，同时带动所述基底上的所述非磁性光刻胶进行三维移动，以将所述非磁性光刻胶的聚合固化点依次定位至焦点处进行聚合固化，使得所述非磁性光刻胶的内部聚合固化成所述非磁性镜筒的形状；S102: Projecting a femtosecond laser pulse to the focal point according to the three-dimensional model of the non-magnetic lens barrel, and simultaneously driving the non-magnetic photoresist on the substrate to move three-dimensionally, so as to polymerize the non-magnetic photoresist The curing point is sequentially positioned to the focal point for polymerization and curing, so that the interior of the non-magnetic photoresist is polymerized and cured into the shape of the non-magnetic lens barrel;
    S103：采用显影液去除未聚合固化的所述非磁性光刻胶，得到所述非磁性镜筒。S103: Using a developer to remove the non-magnetic photoresist that has not been polymerized and cured to obtain the non-magnetic lens barrel.
  3. 根据权利要求2所述的可变焦微透镜组的制备方法，其特征在于，在步骤S101中，在将所述非磁性光刻胶滴在所述基底上后，还包括：将一盖玻片盖在所述非磁性光刻胶上。The method for preparing a variable-focus microlens group according to claim 2, wherein in step S101, after the non-magnetic photoresist is dropped on the substrate, the method further comprises: placing a cover glass on cover on the non-magnetic photoresist.
  4. 根据权利要求3所述的可变焦微透镜组的制备方法，其特征在于，在步骤S101中，所述基底在所述非磁性光刻胶的外围处凸出形成有垫高部或设置有垫高物，以将所述盖玻片垫高，使所述盖玻片和基底之间留有一定的加工空隙，以容纳所述非磁性光刻胶。The method for preparing a variable-focus microlens group according to claim 3, wherein in step S101, the substrate is formed with a raised portion or provided with a pad at the periphery of the non-magnetic photoresist The cover glass is raised so that a certain processing gap is left between the cover glass and the substrate to accommodate the non-magnetic photoresist.
  5. 根据权利要求1-4中任一所述的可变焦微透镜组的制备方法，其特征在于，所述非磁性镜筒内形成有位置固定的非磁性透镜。The method for preparing a variable-focus micro-lens group according to any one of claims 1-4, wherein a fixed-position non-magnetic lens is formed in the non-magnetic lens barrel.
  6. 一种可变焦微透镜组，其特征在于，包括非磁性镜筒和磁性透镜，所述磁性透镜设置于所述非磁性镜筒内，且在磁场力的作用下可在所述非磁性镜筒内沿光轴方向移动。A variable-focus micro-lens group, characterized in that it includes a non-magnetic lens barrel and a magnetic lens, the magnetic lens is arranged in the non-magnetic lens barrel, and can be attached to the non-magnetic lens barrel under the action of a magnetic field force move along the optical axis.
  7. 根据权利要求6所述的可变焦微透镜组，其特征在于，所述非磁性镜筒内形成有位置固定的非磁性透镜。The variable-focus micro-lens group according to claim 6, wherein a fixed-position non-magnetic lens is formed in the non-magnetic lens barrel.
  8. 根据权利要求6或7所述的可变焦微透镜组，其特征在于，所述非磁性镜筒的侧壁内壁上凸出形成有第一卡位结构和第二卡位结构，所述第一卡位结构和第二卡位结构沿光轴方向相对；所述磁性透镜位于所述第一卡位结构和第二卡位结构之间。The variable-focus micro-lens group according to claim 6 or 7, wherein a first detent structure and a second detent structure are protruded from the inner wall of the side wall of the non-magnetic lens barrel, and the first detent structure is formed. The clamping structure and the second clamping structure are opposite along the optical axis direction; the magnetic lens is located between the first clamping structure and the second clamping structure.
  9. 根据权利要求6-8中任一所述的可变焦微透镜组，其特征在于，所述非磁性镜筒的侧壁上开设有至少一镂空槽。The variable-focus micro-lens group according to any one of claims 6-8, wherein at least one hollow groove is formed on the side wall of the non-magnetic lens barrel.
  10. 根据权利要求6-9中任一所述的可变焦微透镜组，其特征在于，所述非磁性镜筒采用非磁性光刻胶制作，所述磁性透镜采用磁性光刻胶制作。The variable-focus microlens group according to any one of claims 6-9, wherein the non-magnetic lens barrel is made of non-magnetic photoresist, and the magnetic lens is made of magnetic photoresist.
PCT/CN2020/129829 2020-09-30 2020-11-18 Preparation method for variable-focus microlens group and variable-focus microlens group WO2022068016A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202011065373.9 2020-09-30
CN202011065373.9A CN112198623A (en) 2020-09-30 2020-09-30 Preparation method of variable-focus micro-lens set and variable-focus micro-lens set

Publications (1)

Publication Number Publication Date
WO2022068016A1 true WO2022068016A1 (en) 2022-04-07

Family

ID=74013840

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2020/129829 WO2022068016A1 (en) 2020-09-30 2020-11-18 Preparation method for variable-focus microlens group and variable-focus microlens group

Country Status (2)

Country Link
CN (1) CN112198623A (en)
WO (1) WO2022068016A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6052824A (en) * 1983-09-02 1985-03-26 Seiko Epson Corp Mechanism for controlling focal length
JP2004029668A (en) * 2002-06-28 2004-01-29 Mamiya Op Co Ltd Magnetic lens and lens driving device
CN101192002A (en) * 2007-12-12 2008-06-04 吉林大学 Magnetism remote-controlled drive microstructure preparation method
CN101191889A (en) * 2006-11-22 2008-06-04 鸿富锦精密工业（深圳）有限公司 Lens module group
CN101551476A (en) * 2009-05-07 2009-10-07 吉林大学 Laser three-dimensional preparing method of non-spherical micro-lens
CN103728711A (en) * 2013-12-20 2014-04-16 广州市雅江光电设备有限公司 Independent lens rapid zooming mechanism and zooming method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2831165Y (en) * 2005-04-08 2006-10-25 鸿富锦精密工业（深圳）有限公司 Focusing device
CN112567277B (en) * 2018-08-27 2022-09-23 奥林巴斯株式会社 Optical device and endoscope
CN110852238A (en) * 2019-11-06 2020-02-28 昆山丘钛微电子科技有限公司 Optical fingerprint module and fingerprint identification mobile terminal under screen

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6052824A (en) * 1983-09-02 1985-03-26 Seiko Epson Corp Mechanism for controlling focal length
JP2004029668A (en) * 2002-06-28 2004-01-29 Mamiya Op Co Ltd Magnetic lens and lens driving device
CN101191889A (en) * 2006-11-22 2008-06-04 鸿富锦精密工业（深圳）有限公司 Lens module group
CN101192002A (en) * 2007-12-12 2008-06-04 吉林大学 Magnetism remote-controlled drive microstructure preparation method
CN101551476A (en) * 2009-05-07 2009-10-07 吉林大学 Laser three-dimensional preparing method of non-spherical micro-lens
CN103728711A (en) * 2013-12-20 2014-04-16 广州市雅江光电设备有限公司 Independent lens rapid zooming mechanism and zooming method

Also Published As

Publication number Publication date
CN112198623A (en) 2021-01-08

Similar Documents

Publication Publication Date Title
Yuan et al. Ultrafast three-dimensional printing of optically smooth microlens arrays by oscillation-assisted digital light processing
US10162264B2 (en) Liquid deposition photolithography
Ha et al. Mass production of 3-D microstructures using projection microstereolithography
JPH01163027A (en) Method and device for molding optical element
WO2008063433A2 (en) Polymer object optical fabrication process
US8404173B2 (en) Polymer object optical fabrication process
CN110178058A (en) The manufacturing method of optical component and optical component
WO2022068016A1 (en) Preparation method for variable-focus microlens group and variable-focus microlens group
Luan et al. High-speed, large-area and high-precision fabrication of aspheric micro-lens array based on 12-bit direct laser writing lithography
CN214324195U (en) Preparation system of variable-focus micro lens group
Steenhusen et al. Two-photon polymerization of hybrid polymers for applications in micro-optics
KR100805674B1 (en) Micro-stereolithography apparatus and method thereof
Kang et al. Development of a compact micro-stereolithography (MSTL) system using a Blu-ray optical pickup unit
Takahashi et al. Submicrometer thickness layer fabrication for layer-by-layer microstereolithography using evanescent light
Yang et al. 3D OPC method for controlling the morphology of micro structures in laser direct writing
CN110320599A (en) A kind of space optical waveguide preparation method
Sharma et al. Fabrication of functional nanophotonic devices via multiphoton polymerization
Wang et al. Two-photon polymerization lithography for imaging optics
CN113064329B (en) Pen photoetching system based on optical fiber end superlens and preparation method
Stender et al. Industrial-Scale Fabrication of Optical Components Using High-Precision 3D Printing: Aspects-Applications-Perspectives
Bougdid et al. Direct laser writing of submicrometric voxels in two-photon photopolymerization
CN109901250B (en) Optical element containing structured nanoparticles inside and manufacturing method thereof
WO2022176313A1 (en) Optical shaping device and manufacturing method
JP4459741B2 (en) Optical 3D modeling method
Li et al. Femtosecond laser direct writing of optical component on optical fibers

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20956035

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 04.07.2023)

122 Ep: pct application non-entry in european phase

Ref document number: 20956035

Country of ref document: EP

Kind code of ref document: A1