WO2022062317A1 - 基于静电梳驱动的硅基mems光开关及n×n阵列 - Google Patents

基于静电梳驱动的硅基mems光开关及n×n阵列 Download PDF

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Publication number
WO2022062317A1
WO2022062317A1 PCT/CN2021/078381 CN2021078381W WO2022062317A1 WO 2022062317 A1 WO2022062317 A1 WO 2022062317A1 CN 2021078381 W CN2021078381 W CN 2021078381W WO 2022062317 A1 WO2022062317 A1 WO 2022062317A1
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fixed
comb
movable
transmission rod
comb teeth
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PCT/CN2021/078381
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English (en)
French (fr)
Inventor
戴道锌
孙仪
李欢
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浙江大学
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Priority to US17/795,540 priority Critical patent/US20230103616A1/en
Publication of WO2022062317A1 publication Critical patent/WO2022062317A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating

Definitions

  • the invention belongs to the field of integrated optoelectronic devices, in particular to a silicon-based waveguide MEMS optical switch and an array, and in particular to an integrated silicon-based waveguide MEMS capable of controlling the movement of a crossed waveguide mirror through electrostatic comb driving to regulate the transmission direction of light Optical switches and arrays.
  • optical burst switching is the current mainstream switching method, and its speed is required to be in the microsecond level, and it has outstanding flexibility and high efficiency.
  • a large-scale N ⁇ N optical switch array is its core. Therefore, in recent years, domestic and foreign research institutions and researchers have attached great importance to this, and gradually developed optical switch arrays with different materials, different principles and different structures.
  • silicon photonics technology has outstanding advantages such as CMOS process compatibility, high integration, low cost, and easy large-scale integration, which provides an important platform for realizing large-scale optical switch arrays.
  • silicon-based optical switches and arrays have attracted much attention and made a series of important progress due to their huge development potential.
  • MEMS have the unique ability to integrate electrical, mechanical and optical elements on a single chip, and due to the micro/nano scale of such systems, they have different properties (low loss, switching speed, reliability) compared to macro scale systems , scalability, etc.).
  • MEMS optical switches have been used in communication networks that transmit large bandwidth data over long distances.
  • MEMS-based switches can be divided into two categories: free-space switches and waveguide optical switches.
  • a free space optical switch an optical signal propagates in free space and is directed along its path to the desired output fiber.
  • the deflection of the optical path is most often achieved here using movable micromirrors with a diameter of several hundreds of micrometers.
  • the waveguide optical switch the optical signal is confined in the waveguide to propagate, and the switching of the optical path is realized by adjusting the waveguide or the coupler to a specific position.
  • MEMS-based switches have good scalability (hundreds of input/output ports), low insertion loss and low crosstalk, but long switching times (milliseconds or tens of milliseconds).
  • MEMS-based waveguide optical switches are opening new ways to build all-optical switches. They can provide fast switching times (sub-microseconds or microseconds), low insertion loss and crosstalk, and a relatively large number of input/output ports. Through special design, large bandwidth (adiabatic coupler) and polarization insensitivity can also be achieved.
  • MEMS technology is still one of the key switching technologies for all-optical communication networks, and MEMS-based waveguide optical switches may become the next generation of new optical switches.
  • the purpose of the present invention is to provide a silicon-based waveguide MEMS optical switch and an N ⁇ N array driven by an electrostatic comb.
  • the movable comb teeth are controlled to move, and the transmission rod is driven to move, so as to adjust the distance between the two cross waveguide mirrors to achieve the effect of optical path switching or light splitting.
  • the invention includes a silicon substrate, an electrostatic comb driver placed on the silicon substrate, and two phase-separated fixed crossed waveguide mirrors and movable crossed waveguide mirrors.
  • the bottom of the fixed crossed waveguide mirror is fixed on the silicon substrate through a silicon dioxide lower cladding layer.
  • the movable intersecting waveguide mirror is connected with the electrostatic comb driver, and the electrostatic comb driver drives the movable intersecting waveguide mirror to move toward or away from the fixed intersecting waveguide mirror.
  • the fixed crossed waveguide mirror and the movable crossed waveguide mirror have the same structure, and both are mainly composed of a V-shaped broad waveguide and an adiabatic tapered waveguide connected at both ends of the broad waveguide.
  • the fixed crossed waveguide mirror and the movable crossed waveguide mirror can be docked to form a complete crossed waveguide structure, and the single-mode curved waveguide and the single-mode straight waveguide are sequentially connected to each end of the wide waveguide of the fixed crossed waveguide mirror or the movable crossed waveguide mirror, so that the Connect adjacent optical switch units, and single-mode waveguides are used as input and output waveguides.
  • the electrostatic comb driver is mainly composed of a pair of electrostatic comb teeth, a first island spring structure, a second island spring structure and a transmission rod; the transmission rod is arranged along the moving direction of the movable cross waveguide mirror, and one end of the transmission rod is fixedly connected to the movable
  • the movable cross waveguide mirror is provided with a first island spring structure, a pair of electrostatic comb teeth and a second island spring structure in sequence from the movable cross waveguide mirror to the other end of the transmission rod; the structure of the first island spring structure and the second island spring structure The same, including four fixed islands and two foldable springs. Two of the four fixed islands form two groups of fixed islands. The two groups of fixed islands are symmetrically distributed on both sides of the transmission rod.
  • each side of the two groups of fixed islands is provided with a folding spring, each folding
  • the spring is mainly composed of the main rod and the branch arms fixedly connected to the two ends and the middle of the main rod respectively. It is fixedly connected to the side of the transmission rod; a pair of electrostatic comb teeth is divided into fixed comb teeth and movable comb teeth, and the fixed comb teeth and movable comb teeth are divided into two parts symmetrically arranged on both sides of the transmission rod.
  • the two parts of the movable comb teeth are fixedly connected to the two sides of the transmission rod respectively, and the comb teeth of the fixed comb teeth and the movable comb teeth are arranged oppositely and are distributed in a staggered manner;
  • the bottoms of the fixed comb teeth are fixed on the silicon substrate through a silicon dioxide undercladding.
  • Both parts of the fixed comb teeth are connected to an external circuit, and the external circuit applies a voltage to the fixed comb teeth to drive the movable comb teeth to move toward the fixed comb teeth, thereby driving the transmission rod and its connected movable cross waveguide.
  • the mirror moves close to the fixed crossed waveguide mirror until it is connected to the fixed crossed waveguide mirror, and drives the folded springs in the two island spring structures to deform flexibly.
  • the distance between the movable crossed waveguide mirror and the fixed crossed waveguide mirror is regulated, and the distance between the two separated movable crossed waveguide mirrors and the fixed crossed waveguide mirror is adjusted, so as to realize Silicon-based MEMS optical switches have functions such as switching light propagation paths or splitting light.
  • the main rod and branch arm of the folding spring are both strip-shaped silicon, and the folding spring can be bent and deformed under the push of the transmission rod.
  • the electrostatic comb driver is a bistable electrostatic comb driver, which is mainly composed of an electrostatic comb tooth group, a third island spring structure, a fourth island spring structure and a transmission rod; the transmission rod is arranged along the moving direction of the movable cross waveguide mirror, One end of the transmission rod is fixedly connected to the movable cross waveguide mirror, and from the movable cross waveguide mirror to the other end of the transmission rod, a third island spring structure, an electrostatic comb tooth group and a fourth island spring structure are sequentially arranged;
  • the structure of the four-island spring structure is the same, including two fixed islands and bistable springs. The two fixed islands are symmetrically distributed on both sides of the transmission rod.
  • the bottom of the fixed islands is fixed on the silicon substrate through the silicon dioxide lower cladding.
  • the two fixed islands and the transmission rod are connected by their respective bistable springs; the electrostatic comb components are composed of fixed comb teeth 1, bilateral movable comb teeth and fixed comb teeth 2, fixed comb teeth 1, bilateral movable comb
  • the teeth and the fixed comb teeth 2 are divided into two parts symmetrically arranged on both sides of the transmission rod.
  • the two parts of the fixed comb teeth 1 and fixed comb teeth 2 and the transmission rod are connected with a gap without contact, and the bilateral movable comb teeth
  • the two parts of the double-sided movable comb are respectively fixedly connected to the two sides of the transmission rod, and the bilateral movable comb teeth are provided with comb tooth structures at both ends of the transmission rod.
  • the tooth parts and the comb tooth parts of the second fixed comb tooth are arranged oppositely and in a staggered distribution; the bottom of the fixed comb tooth one and the fixed comb tooth two are fixed on the silicon substrate through a silicon dioxide lower cladding layer.
  • the two parts of the fixed comb tooth 1 or the fixed comb tooth 2 are both connected to an external circuit, and the external circuit applies a voltage to one of the fixed comb tooth 1 or the fixed comb tooth 2 to drive the bilateral movable comb teeth toward the fixed comb tooth.
  • One or two fixed comb teeth move, and then drive the transmission rod and its connected movable crossed waveguide mirror to move closer to the fixed crossed waveguide mirror until it is connected to the fixed crossed waveguide mirror, and drives the bistable springs in the two island spring structures Flexible deformation.
  • the distance between the movable cross-waveguide mirror and the fixed cross-waveguide mirror is regulated, and the distance between the two separated movable cross-waveguide mirrors and the fixed cross-waveguide mirror is adjusted.
  • the distance between them can realize the functions of switching the light propagation path or light splitting of the silicon-based MEMS optical switch.
  • the bistable spring is mainly composed of two curved strips of silicon arranged in parallel, one end of the two strips of silicon is fixedly connected to the side of the fixed island on one side, and the other end of the two strips of silicon is fixedly connected to the side of the transmission rod. , can be deformed under the push of the transmission rod.
  • intersection angle between the two branch parts of the V-shaped wide waveguide in the movable crossed waveguide mirror and the fixed crossed waveguide mirror satisfies the critical condition of total reflection of mode light from silicon to air.
  • the fixed crossed waveguide mirror, the movable crossed waveguide mirror and the electrostatic driver are all made of silicon material and have the same thickness.
  • the fixed crossed waveguide mirrors, fixed islands and fixed comb teeth as fixed parts are connected to the silicon substrate through the silicon dioxide lower cladding, and the rest of the electrostatic comb drivers and movable crossed waveguide mirrors are used as movable parts.
  • the silicon dioxide undercladding is etched away to form a cantilever beam structure.
  • the N ⁇ N optical switch array includes at least four cascaded silicon-based MEMS optical switches as described above.
  • the ports of the silicon-based MEMS optical switches of the adjacent front and rear stages are connected by a single-mode straight waveguide and a waveguide cross.
  • a group of two optical switches is used to divide the four optical switches into two groups.
  • One of the output waveguides of the two optical switches in the former group of optical switches and one of the two optical switches in the latter group of optical switches are respectively.
  • the input waveguides are connected, the other output waveguides of the two optical switches in the former group of optical switches are respectively connected to the two ends of the crossed side of the waveguides, and the other input waveguides of the two optical switches in the latter group of optical switches are respectively connected to The waveguide crosses both ends on the other side.
  • the optical switch array can adopt, but is not limited to, a Benes topology.
  • a Cross-bar topology can also be used to form an array.
  • All materials involved in the present invention basically have transparent properties in the optical communication band, that is, the absorption loss of the material only accounts for a very small part of the total loss.
  • the entire optical switch structure or the array optical switch structure can be fabricated by monolithic integration.
  • the structure is simple and the design is convenient, which can significantly reduce the manufacturing cost of the device;
  • the switching mechanism adopts the principle of total reflection, electrostatic force and bending deformation of materials, and the design is simple and easy to understand;
  • the insertion loss of the unit device is low, the extinction ratio is high, the wavelength sensitivity is small, the bandwidth is large, and the manufacturing tolerance is large;
  • Adopt electrostatic comb drive especially bistable optical switch, only need to add voltage when switching state, the required energy consumption is low;
  • the switch unit is in the form of 2 ⁇ 2, which can be cascaded to form an N ⁇ N optical switch array with Cross-bar, Benes or other topological structures, which has strong large-scale scalability.
  • the present invention realizes 2 ⁇ 2 optical switches and N ⁇ N optical switch arrays with low loss, high extinction ratio and large bandwidth by using the electrostatic comb structure to drive the separated cross waveguide mirrors, and has the advantages of simple structure and simple process. , superior performance and so on.
  • FIG. 1 is a top view of the structure of the present invention in an initial state (OFF).
  • Fig. 2 is a cross-sectional view taken along line A-A' of Fig. 1 .
  • Fig. 3 is a sectional view taken along line B-B' of Fig. 1 .
  • FIG. 4 is a top view of the structure of the present invention after applying a bias voltage (ON).
  • FIG. 5 is a top view of the structure of the bistable optical switch of the present invention in an OFF state.
  • FIG. 6 is a top view of the structure of the bistable optical switch of the present invention in an ON state.
  • FIG. 7 is a schematic diagram of a Benes topology structure for forming an optical switch array according to the present invention.
  • Figure 8 is a diagram of the light field transmission of the present invention in OFF and ON states.
  • the optical switch includes a silicon substrate 12 , an electrostatic comb driver placed on the silicon substrate 12 , and two phase-separated fixed crossed waveguide mirrors 1 , movable crossed waveguide mirrors 2 , and fixed crossed waveguide mirror 1
  • the bottom is fixed on the silicon substrate 12 through the silicon dioxide lower cladding layer 13, and the bottom of the movable crossed waveguide mirror 2 is suspended on the silicon substrate 12;
  • the movable crossed waveguide mirror 2 moves toward or away from the fixed crossed waveguide mirror 1 .
  • All the structures of the silicon-based MEMS optical switch of the present invention are symmetrical with the transmission rod 3 as the symmetry axis.
  • the silicon-based MEMS optical switch is a 2 ⁇ 2 optical switch.
  • the fixed crossed waveguide mirror 1 and the movable crossed waveguide mirror 2 have the same structure, and are mainly composed of a V-shaped wide waveguide and an adiabatic tapered waveguide connected at both ends of the wide waveguide.
  • the width of the wide waveguide is larger than that of the single-mode waveguide.
  • the fixed crossed waveguide mirror 1 and the movable crossed waveguide mirror 2 can be docked to form a complete crossed waveguide structure, and at each end of the wide waveguide of the fixed crossed waveguide mirror 1 or the movable crossed waveguide mirror 2, a single-mode curved waveguide and a single-mode curved waveguide are connected in turn.
  • Straight waveguides make connections between adjacent optical switch units, and single-mode waveguides are used as input and output waveguides.
  • the electrostatic comb driver is distributed on one side of the movable crossed waveguide mirror 2, and is connected with the movable crossed waveguide mirror 2 by the transmission rod 3 in the electrostatic comb driver, and the movable crossed waveguide mirror 2 is directly pushed by the transmission rod 3 to move to realize the position change .
  • the electrostatic comb driver of this embodiment is mainly composed of a pair of electrostatic comb teeth 6, 7, a first island spring structure, a second island spring structure and a transmission rod 3;
  • the moving direction of the movable crossed waveguide mirror 2 is arranged.
  • One end of the transmission rod 3 is fixedly connected to the movable crossed waveguide mirror 2, and is specifically connected to the V-shaped intersection of the wide waveguide of the movable crossed waveguide mirror 2.
  • the transmission rod 3 is connected to the movable crossed waveguide mirror.
  • the total reflection surface of 2 is vertical, and a first island spring structure, a pair of electrostatic comb teeth 6 and 7 and a second island spring structure are sequentially arranged from the movable crossed waveguide mirror 2 to the other end of the transmission rod 3 .
  • the structures of the first island spring structure and the second island spring structure are the same, and both include four fixed islands 4 and two foldable springs 5.
  • Two of the four fixed islands 4 form two groups of fixed islands 4.
  • the groups of fixed islands 4 are symmetrically distributed on both sides of the transmission rod 3, and the two fixed islands 4 in each group of fixed islands 4 are arranged at intervals along the direction of the transmission rod 3, and the two fixed islands 4 in each group of fixed islands 4 reach The distance between the transmission rods 3 is the same, and the bottom of the fixed island 4 is fixed on the silicon substrate 12 through the silicon dioxide lower cladding layer 13, as shown in FIG. 2;
  • Each folding spring 5 is mainly composed of a main rod and branch arms fixedly connected to both ends and the middle of the main rod respectively.
  • the side of the fixed island 4, the branch arm in the middle of the main rod is fixedly connected to the side of the transmission rod 3, specifically connected to the side of the transmission rod 3 between the two fixed islands 4 of a group of fixed islands 4, and the bottom of the folding spring 5 is suspended in the silicon
  • the base 12 is arranged; a pair of electrostatic comb teeth 6 and 7 are divided into fixed comb teeth 6 and movable comb teeth 7, and the fixed comb teeth 6 and movable comb teeth 7 are divided into two parts symmetrically arranged on both sides of the transmission rod 3 , the two parts of the fixed comb teeth 6 and the transmission rod 3 are connected with a gap without contact, the two parts of the movable comb teeth 7 are fixedly connected to the two sides of the transmission rod 3 respectively, the fixed comb teeth 6 and the movable comb teeth 7
  • the comb teeth are arranged oppositely and in a staggered distribution; the bottom of the fixed comb teeth 6 is fixed on the silicon substrate 12 through the silicon dioxide lower cladding layer 13, as shown in FIG
  • the fixed comb teeth 6 are connected to the external circuit, and other parts are kept in a grounded state, and the optical switch can be regulated by adding or removing a voltage to the fixed comb teeth 6.
  • Both parts of the fixed comb teeth 6 are connected to the external circuit, and other parts other than the fixed comb teeth 6 including the silicon substrate 12 are kept grounded.
  • the external circuit applies voltage to the fixed comb teeth 6, and the two parts of the fixed comb teeth 6 apply The same voltage drives the movable comb teeth 7 to move toward the fixed comb teeth 6, thereby driving the transmission rod 3 and its connected movable cross-waveguide mirror 2 to move closer to the fixed cross-waveguide mirror 1 until it is connected to the fixed cross-waveguide mirror 1, and
  • the folding springs 5 in the two island spring structures are driven to deform flexibly.
  • the distance between the movable crossed waveguide mirror 2 and the fixed crossed waveguide mirror 1 is regulated, and the distance between the two separated movable crossed waveguide mirrors 2 and the fixed crossed waveguide mirror 1 is adjusted. The distance, so as to realize the function of switching the light propagation path or splitting the light of the silicon-based MEMS optical switch.
  • the main rod and branch arm of the folding spring 5 are both strip-shaped silicon, and the folding spring 5 can bend and deform under the push of the transmission rod 3 .
  • the specifically implemented electrostatic comb teeth 6 and 7 are provided with fixed islands 4 and folding springs 5 of the same size on both sides along the direction of the transmission rod 3 , in order to make the electrostatic comb drive more stable during operation.
  • the electrostatic comb teeth 6 and 7 have a certain period and a certain duty ratio.
  • the size of the fixed comb teeth 6 and the comb teeth of the movable comb teeth 7 are generally the same, but the number is slightly different.
  • the transmission rod 3 is connected.
  • the silicon-based MEMS optical switch When the silicon-based MEMS optical switch is in the natural state, that is, in the initial state OFF, as shown in FIG. 1, there is a distance between the fixed crossed waveguide mirror 1 and the movable crossed waveguide mirror 2 along the direction of the transmission rod 3, and the adjustment The different distances in turn control the optical properties such as different losses and extinction ratios of silicon-based MEMS optical switches.
  • the silicon-based MEMS optical switch When the silicon-based MEMS optical switch is in the natural state, that is, in the initial state OFF, there is a distance between the pair of electrostatic comb teeth 6 and 7 along the transmission rod 3 , and the distance is greater than the fixed crossing waveguide mirror 1 and the movable crossing The distance between the waveguide mirrors 2 ensures that when the crossed waveguide mirrors 1 and 2 are attached together, as shown in FIG. 4 , the two electrostatic comb teeth 6 and 7 will not come into contact.
  • the fixed comb tooth 6 is applied with a voltage and is always in a pressurized state.
  • the silicon-based MEMS optical switch needs to be switched from the open state ON to the closed initial state OFF, and the voltage can be removed by fixing the comb teeth 6 .
  • the electrostatic comb driver in this embodiment is a bistable electrostatic comb driver, which is mainly composed of an electrostatic comb tooth group, a third island spring structure, a fourth island spring structure and a transmission rod 3;
  • the rod 3 is arranged along the moving direction of the movable crossed waveguide mirror 2, and one end of the transmission rod 3 is fixedly connected to the movable crossed waveguide mirror 2, specifically connected to the V-shaped intersection of the wide waveguide of the movable crossed waveguide mirror 2, and the transmission rod 3 is connected to the movable crossed waveguide mirror 2.
  • the total reflection surface of the movable cross waveguide mirror 2 is vertical, and from the movable cross waveguide mirror 2 to the other end of the transmission rod 3, a third island spring structure, an electrostatic comb tooth group and a fourth island spring structure are arranged in sequence; the third island spring structure and the The structure of the fourth island spring structure is the same, including two fixed islands 4 and bistable springs 8.
  • the two fixed islands 4 are symmetrically distributed on both sides of the transmission rod 3, and the distance between the two fixed islands 4 and the transmission rod 3 is the same.
  • the bottom of the fixed island 4 is fixed on the silicon substrate 12 through the silicon dioxide lower cladding layer 13, the two fixed islands 4 and the transmission rod 3 are connected by their respective bistable springs 8, and the bottom of the bistable springs 8 is suspended arranged on the silicon substrate 12 .
  • the electrostatic comb component is composed of fixed comb teeth 1 9, bilateral movable comb teeth 10 and fixed comb teeth 2 11.
  • the fixed comb teeth 1 9, bilateral movable comb teeth 10 and fixed comb teeth 2 11 are divided into symmetrically arranged in the transmission.
  • the two parts on both sides of the rod 3, the two parts of the fixed comb tooth 1 9 and the fixed comb tooth two 11 and the transmission rod 3 are connected with a gap without contact, and the two parts of the bilateral movable comb tooth 10 are respectively connected with the transmission rod. 3.
  • the two sides are fixedly connected, the bilateral movable comb teeth 10 are provided with comb tooth structures at both ends along the transmission rod 3, and the comb tooth structures at both ends of the bilateral movable comb teeth 10 are respectively connected with the comb teeth portion of the fixed comb teeth 1 9,
  • the comb teeth of the fixed comb teeth 2 11 are arranged oppositely and in a staggered distribution; the fixed comb teeth 9 and the fixed comb teeth 2 11 are both fixed on the silicon substrate 12 at the bottom through the silicon dioxide lower cladding layer 13, and the bilateral movable comb teeth
  • the bottom of 10 is suspended from the silicon substrate 12 and arranged.
  • the bistable silicon-based MEMS optical switch adopts a bistable electrostatic comb driver, which is different from the previous electrostatic comb driver in spring and electrostatic comb.
  • a bistable spring 8 composed of two curved strip-shaped silicon is used, and both ends of the strip-shaped silicon are connected to the transmission rod 3 and the fixed island 4 respectively.
  • Both parts of the fixed comb tooth 1 9 or the fixed comb tooth 2 11 are connected to the external circuit, and other parts other than the fixed comb tooth 9 and the fixed comb tooth 2 11, including the silicon substrate 12, are kept grounded, and the external circuit is connected to the fixed comb tooth.
  • Tooth one 9 or fixed comb tooth two 11 applies voltage, and the two parts of fixed comb tooth one 9/fixed comb tooth two 11 apply the same voltage to drive bilateral movable comb tooth 10 toward fixed comb tooth one 9 or fixed comb tooth two 11 Move, and then drive the transmission rod 3 and its connected movable crossed waveguide mirror 2 to move closer to the fixed crossed waveguide mirror 1 until it is connected to the fixed crossed waveguide mirror 1 or away from the fixed crossed waveguide mirror 1, and drives the two island spring structures.
  • the bistable spring 8 deforms flexibly.
  • the fixed comb teeth 1 9 and the fixed comb teeth 2 11 are connected to an external circuit, and a voltage is applied to one of them, and the bilateral movable comb teeth 10 will move to the side where the voltage is applied, so as to achieve the purpose of switching the optical switch state.
  • the distance that the movable crossed waveguide mirror 2 moves toward the fixed crossed waveguide mirror 1 is regulated, and the two separated movable crossed waveguide mirrors 2 and 1 are adjusted.
  • the distance between the crossed waveguide mirrors 1 is fixed, so as to realize the functions of switching the light propagation path or light splitting of the silicon-based MEMS optical switch.
  • the bistable spring 8 is mainly composed of two curved strip-shaped silicon pieces arranged in parallel, one end of the two strip-shaped silicon pieces is fixedly connected to the side surface of the fixed island 4 on one side, and the other end of the two strip-shaped silicon pieces is fixedly connected to the side surface of the transmission rod 3 , can be deformed under the push of the transmission rod 3 .
  • the silicon-based MEMS optical switch When the silicon-based MEMS optical switch is in the natural state, that is, in the initial state OFF, as shown in FIG. 5 , there is a distance between the fixed crossed waveguide mirror 1 and the movable crossed waveguide mirror 2 along the direction of the transmission rod 3 , and the adjustment The different distances in turn control the optical properties such as different losses and extinction ratios of silicon-based MEMS optical switches.
  • the bistable spring 8 When the silicon-based MEMS optical switch is in the natural state, that is, in the initial state OFF, as shown in FIG. 6 , the bistable spring 8 is bent and arranged from the fixed island 4 to the transmission rod 3 to the side away from the fixed crossed waveguide mirror 1 ; When the silicon-based MEMS optical switch is in the ON state, after the fixed crossed waveguide mirror 1 and the movable crossed waveguide mirror 2 are in contact and connected, the bistable spring 8 moves from the fixed island 4 to the transmission rod 3 toward the fixed crossed waveguide mirror. 1 is bent on one side. Since the bistable spring 8 itself is in a bent state, after switching the optical switch state, it can maintain its own shape without adding external force.
  • a voltage is applied to the fixed comb-tooth 1 9 and is always in a pressurized state, and the crossed waveguide mirror 1 and the movable crossed waveguide mirror 2 are to be fixed.
  • the contact connection and the bistable spring 8 are bent and deformed to the side close to the fixed crossed waveguide mirror 1, the voltage on the fixed comb-tooth-9 is removed, and the open state of the silicon-based MEMS optical switch is always maintained.
  • a voltage is applied to the fixed comb teeth 2 11 and is always in a pressurized state, and the crossed waveguide mirror 1 and the movable crossed waveguide mirror 2 are to be fixed.
  • the voltage on the second fixed comb tooth 11 is removed, and the off state of the silicon-based MEMS optical switch is always maintained.
  • the crossed waveguides of both embodiments and other single mode waveguides are part of the optical transmission.
  • the two crossed waveguide mirrors 1 and 2 are composed of intersecting broad waveguides and adiabatic tapered waveguides, wherein the fixed crossed waveguide 1 remains stationary, and the silicon dioxide lower cladding 13 under the movable crossed waveguide mirror 2 is completely hollowed out, and they are It can be butted into a complete cross waveguide structure, and the angle of the cross can only satisfy the condition of total reflection.
  • the fixed crossed waveguide mirror 1 , the movable crossed waveguide mirror 2 and the electrostatic driver are all made of silicon material with the same thickness. Regardless of whether the underlying silicon dioxide lower cladding layer 13 is corroded, it remains at the same level.
  • intersection angle between the two branch parts of the V-shape of the wide waveguide in the movable crossed waveguide mirror 2 and the fixed crossed waveguide mirror 1 satisfies the critical condition of total reflection of mode light from silicon to air.
  • the rest are suspended and movable, and are supported by being connected to each fixed island 4 .
  • the fixed crossed waveguide mirror 1, the fixed island 4, and the fixed comb teeth 6 as fixed parts are connected to the silicon substrate 12 through the silicon dioxide lower cladding layer 13, and the rest of the electrostatic comb driver and the movable crossed waveguide mirror 2 are used as movable parts,
  • the silicon dioxide lower cladding layer 13 is etched away by etching gas such as hydrogen fluoride, as shown in FIG. 2 and FIG. 3 , to form a cantilever beam structure.
  • all waveguides and electrostatic comb drivers are made of the same material and can be fabricated by monolithic integration.
  • the cross waveguide has four ports, and different topologies are used for different application scenarios.
  • an N ⁇ N optical switch array with more ports can be obtained.
  • Figure 7 shows a 4 ⁇ 4 optical switch array using the Benes topology.
  • the 4 ⁇ 4 optical switch array includes six 2 ⁇ 2 optical switches, and the six 2 ⁇ 2 optical switches are divided into two groups in a group of two 2 ⁇ 2 optical switches, and the multiple 2 ⁇ 2 optical switch groups are arranged in sequence. concatenate.
  • One of the respective output waveguides of the two 2 ⁇ 2 optical switches in the former group of 2 ⁇ 2 optical switches is respectively connected with one of the respective input waveguides of the two 2 ⁇ 2 optical switches in the latter group of 2 ⁇ 2 optical switches.
  • the other output waveguides of the two 2 ⁇ 2 optical switches in the group of 2 ⁇ 2 optical switches are respectively connected to two ends of one side of the cross waveguide, and the other output waveguides of the two 2 ⁇ 2 optical switches in the latter group of 2 ⁇ 2 optical switches are respectively connected to An input waveguide is connected to both ends on the other side of the crossed waveguide, respectively.
  • the critical angle of total reflection of light from the silicon wave guide to the air is about 17°.
  • the total reflection condition can be met. Because the light will be totally reflected inside the separated crossed waveguide, which changes the transmission direction of the light at the mirror surface like a mirror, so it is called a "crossed waveguide mirror".
  • Figures 1 and 4 are combined to show two states of a silicon-based MEMS optical switch.
  • the first is Figure 1, no voltage is applied to the structure, the optical switch is in the OFF state, and a long distance is maintained between the fixed comb teeth and the movable comb teeth and between the cross waveguide mirrors.
  • the incident light is injected from a single-mode straight waveguide on the left, and after passing through the single-mode curved waveguide, total reflection occurs at the V-shaped branch, changing the transmission direction, and then passes through the single-mode curved waveguide on the right, the single-mode straight waveguide Waveguide output.
  • a certain voltage is applied to the fixed comb teeth, and a capacitance is formed between the fixed comb teeth and the movable comb teeth.
  • the movable comb teeth move toward the fixed comb teeth, and the transmission rod moves in the direction of the fixed cross waveguide mirror. , and pull one end of the folding spring to deform it.
  • the electrostatic comb drive reaches equilibrium. The greater the applied voltage value, the greater the electrostatic force, the greater the deformation produced by the folded spring in equilibrium, and the greater the distance the movable crossed waveguide mirror moves.
  • the optical switch When the two crossed waveguide mirrors just fit together, the optical switch is in the ON state, as shown in Figure 4. At this time, the two waveguide mirrors can be regarded as a whole, and the incident light entering the V-shaped part will not undergo total reflection and continue to propagate forward. , the transmission direction does not change. If you want to restore the OFF state, remove the voltage applied to the fixed comb teeth, there is no electrostatic force between the electrostatic comb teeth, the folding spring no longer maintains the bending state but bounces back to the original shape, the transmission rod has a movable cross waveguide mirror pulled back to the original position. In this way, the free switching between the two states of the optical switch is completed.
  • the bistable state of Figures 5 and 6 is embodied in the bistable spring of the electrostatic comb.
  • the bistable spring uses two identical strips of silicon, and the initial shape is bending. When no voltage is applied, that is, the OFF state, the bilateral movable comb teeth are close to the second fixed comb teeth, and the cross waveguide is in a separated state. When a certain voltage is applied to the fixed comb teeth, the bilateral movable comb teeth will move to the fixed comb teeth under the action of electrostatic force, and the bistable spring will bend in the opposite direction of the initial shape. After bending to a certain extent, the voltage is removed, the bistable spring will not rebound, and it will remain in the ON state.
  • the silicon-based MEMS optical switch based on electrostatic comb drive is a 2 ⁇ 2 optical switch, which is more scalable than the previous 1 ⁇ 2 silicon-based MEMS optical switch, and can adopt a more optimized N ⁇ N optical switch array topology.
  • the previous 1 ⁇ 2 silicon-based MEMS optical switch usually only adopts a Cross-bar topology, and the required number of optical switch units is as high as N 2 .
  • the 2 ⁇ 2 silicon-based MEMS optical switch can adopt a more optimized and simpler Benes topology, as shown in Figure 7, and only needs N(log 2 N-0.5) optical switch units.
  • this is not limited to the Benes topology, and other topologies are also suitable.
  • a silicon nanowire optical waveguide based on silicon-on-insulator (SOI) material is selected: its core layer is silicon material, with a thickness of 220 nm and a refractive index of 3.4744; its lower cladding material is silicon dioxide, with a thickness of 2 ⁇ m and a refractive index of 1.4404; The upper cladding material is air with a refractive index of approximately 1. Considering the incident wavelength range from 1250 to 1650 nm, the TE polarization mode is adopted.
  • the critical angle for total reflection at the silicon-air interface is about 17°.
  • the crossed waveguide is 90°, which can easily form an array with a Cross-bar structure, or it can be similar to a 2 ⁇ 2MZI optical switch by adding four 45° curved single-mode waveguides, so Benes can be used and other topologies to form an array.
  • the parameters of the separated cross-waveguide mirror are: single-mode waveguide width of 0.5 ⁇ m, wide waveguide width of 2.53 ⁇ m, adiabatic tapered waveguide length of 8.12 ⁇ m, wide waveguide width of 7.18 ⁇ m, and cross-waveguide spacing of 500 nm.
  • the optical performance of the crossed waveguide mirror is simulated and verified by the three-dimensional finite difference method in the time domain. It is obtained that in the initial state (OFF), the incident light field is almost perfectly reflected by the crossed waveguide mirror to the straight-through end, as shown in Figure 8(a). In the 1250-1650nm band, low loss and high extinction ratio can be achieved, the loss is 0.09-0.43 dB, the extinction ratio is 36-60dB, the loss at the center wavelength of 1450nm is 0.12dB, and the extinction ratio is 58.02dB. Apply voltage to the fixed comb teeth, and the movable comb teeth push the movable cross waveguide mirror to move towards the fixed cross waveguide mirror through the transmission rod. (b).
  • the ON state of the optical switch can also obtain good performance in the 1250-1650nm band, the loss is 0.08 ⁇ 0.4dB, the extinction ratio is greater than 53dB, the loss at the center wavelength of 1450nm is 0.13dB, and the extinction ratio is 44.25dB. It can be seen that the new 2 ⁇ 2 silicon-based MEMS optical switch proposed by the present invention can achieve the effects of ultra-large bandwidth, ultra-low loss, high extinction ratio and ultra-low energy consumption.

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Abstract

一种基于静电梳驱动的硅基波导MEMS光开关及N×N阵列。光开关主要由两个分离的交叉波导镜（1，2）、静电梳驱动器两部分构成。交叉波导镜（1，2）由两个相交的宽波导和四个绝热锥型波导构成；静电梳驱动器包括静电梳、岛簧结构、传动杆（3）；静电梳是一对梳齿结构，通过给其中固定梳齿（6）加上电压，其他部分保持接地；在静电力作用下，可动梳齿（7）向固定梳齿（6）运动，弹簧（5）发生形变，并通过传动杆（3）推动可动交叉波导镜（2）向固定交叉波导镜（1）运动，分离的交叉波导镜重组为完整的交叉波导。依靠静电梳驱动器来调控光开关的输出光路，最终实现了低损耗高消光比的2×2光开关单元及N×N阵列，具有大带宽、低损耗、高消光比、低能耗且结构简洁、控制方便、工艺简便等突出优点。

Description

基于静电梳驱动的硅基MEMS光开关及N×N阵列 技术领域
本发明属于集成光电子器件领域，具体涉及一种硅基波导MEMS光开关及阵列，尤其是涉及一种能通过静电梳驱动来控制交叉波导镜的移动从而调控光的传输方向的集成硅基波导MEMS光开关及阵列。
背景技术
随着5G、物联网、大数据、人工智能等新一代信息技术加快成熟应用，数据中心网络规模不断扩大，包含数万台乃至数十万台服务器的仓库级大规模数据中心快速发展，其数据流量急剧增加，亟需发展新一代大数据中心，为数字经济发展提供有力支撑。针对这一重大需求，光互联迅速兴起并成为大规模数据中心的关键技术，在带宽及能耗方面体现出传统电互联无法比拟的天然优势，为解决数据中心带宽及能耗等瓶颈问题提供了有效途径。
随着光互联网络规模不断扩大及其架构日益复杂，如何在超大容量基础上进一步推进光互联网络路由交换成为亟需解决的关键问题。在常见的三种光路由交换方式中，光突发交换是目前的主流交换方式，其速度要求为微秒级，且具有突出的灵活性和高效性。对于光路由交换，大规模N×N光开关阵列是其核心。因此，近年来国内外研究机构和研究人员对此高度重视，逐渐发展了不同材料、不同原理和不同结构的光开关阵列。其中，硅光技术具有CMOS工艺兼容、高集成度、低成本、易于大规模集成等突出优势，为实现大规模光开关阵列提供了重要平台。近年来，硅基光开关及阵列以其巨大发展潜力而备受关注并取得系列重要进展。
MEMS具有将电、机械和光学元件集成在单个芯片上的独特能力，又由于此类系统的微/纳米尺度，与宏观尺度系统相比，它们具有不同的特性(低损耗，切换速度，可靠性，可扩展性等)。目前，MEMS光开关已用于在远距离传输大带宽数据的通信网络中。
根据开关内部的光信号传播，基于MEMS的开关可分为两类：自由空间开关和波导光开关。在自由空间光开关中，光信号在自由空间中传播，并沿其路径被导向所需的输出光纤。这里最常使用直径几百微米的可移动微镜来实现光路的偏转。另一方面，在波导光开关中，光信号束缚在波导中传播，通过将波 导或耦合器调整到特定位置来实现光路的切换。传统的基于3D MEMS的开关具有良好的可扩展性(数百个输入/输出端口)，低插入损耗和低串扰，但开关时间(几毫秒或几十毫秒)较长。当前，基于MEMS的波导光开关正在打开构建全光开关的新方式。它们可以提供较快的切换时间(亚微秒或几微秒)，较低的插入损耗和串扰，和相对大量的输入/输出端口。通过特殊的设计，也能实现大带宽(绝热型耦合器)、偏振不敏感等特性。在不久的将来，MEMS技术仍然是全光通信网络的关键交换技术之一，基于MEMS的波导光开关可能会成为下一代新型光开关。
发明内容
针对已有的背景技术，本发明的目的在于提供一种靠静电梳驱动的硅基波导MEMS光开关及N×N阵列。通过给固定静电梳齿施加电压，控制可动梳齿运动，并带动传动杆运动，以此调节两个交叉波导镜之间的距离，达到光路切换或分光的效果。
本发明采用的技术方案是：
本发明包括硅基底以及置于硅基底上的静电梳驱动器和两个相分离的固定交叉波导镜、可动交叉波导镜，固定交叉波导镜底部通过二氧化硅下包层固定置于硅基底上，可动交叉波导镜和静电梳驱动器连接，并由静电梳驱动器带动可动交叉波导镜向固定交叉波导镜靠近或者远离方向移动。
所述的固定交叉波导镜和可动交叉波导镜结构相同，均主要由V形的宽波导和连接在宽波导两端的绝热锥型波导构成。
固定交叉波导镜和可动交叉波导镜能够对接成完整的交叉波导结构，且在固定交叉波导镜或者可动交叉波导镜的宽波导每一端依次连接上单模弯曲波导与单模直波导，使得相邻光开关单元之间进行连接，单模波导作为输入输出波导。
所述静电梳驱动器主要由一对静电梳齿、第一岛簧结构、第二岛簧结构和一个传动杆构成；传动杆沿可动交叉波导镜的移动方向布置，传动杆一端固定连接到可动交叉波导镜，从可动交叉波导镜到传动杆另一端依次设有第一岛簧结构、一对静电梳齿和第二岛簧结构；第一岛簧结构和第二岛簧结构的结构相同，均包括四个固定岛和两个折叠式弹簧，四个固定岛中以两个为一组构成两组固定岛，两组固定岛对称分布于传动杆的两侧侧旁，且每组固定岛中的两个固定岛沿传动杆方向间隔布置，固定岛底部通过二氧化硅下包层固定置于硅基底上；两组固定岛各自侧方均设有一个折叠式弹簧，每个折叠式弹簧主要由主 杆以及分别固定连接在主杆两端和中部的分支臂构成，主杆两端的分支臂分别固定连接于一组固定岛中的两个固定岛侧面，主杆中部的分支臂固定连接于传动杆侧面；一对静电梳齿分为固定梳齿和可动梳齿，固定梳齿和可动梳齿均分为对称布置于传动杆两侧的两个部分，固定梳齿的两个部分和传动杆之间具有间隙不接触连接，可动梳齿的两个部分分别和传动杆两侧面固定连接，固定梳齿和可动梳齿的梳齿部相对布置且呈交错分布；固定梳齿底部通过二氧化硅下包层固定置于硅基底上。
所述的固定梳齿的两个部分均与外部电路相接，外部电路对固定梳齿施加电压，带动可动梳齿朝向固定梳齿移动，进而带动传动杆及其所连接的可动交叉波导镜向固定交叉波导镜靠近移动直到连接于固定交叉波导镜，以及带动两个岛簧结构中的折叠式弹簧柔性变形。
通过调节施加在固定梳齿上的电压大小，调控可动交叉波导镜向固定交叉波导镜靠近移动的距离，调整两个分离的可动交叉波导镜和固定交叉波导镜之间的距离，从而实现硅基MEMS光开关的切换光传播路径或分光等功能。
所述的折叠式弹簧的主杆和分支臂均是条形硅，折叠式弹簧能在传动杆的推动下发生弯曲形变。
所述静电梳驱动器为双稳态静电梳驱动器，主要由静电梳齿组、第三岛簧结构、第四岛簧结构和一个传动杆构成；传动杆沿可动交叉波导镜的移动方向布置，传动杆一端固定连接到可动交叉波导镜，从可动交叉波导镜到传动杆另一端依次设有第三岛簧结构、静电梳齿组和第四岛簧结构；第三岛簧结构和第四岛簧结构的结构相同，均包括两个固定岛和双稳态弹簧，两个固定岛对称分布于传动杆的两侧，固定岛底部通过二氧化硅下包层固定置于硅基底上，两个固定岛到传动杆之间均通过各自的双稳态弹簧连接；静电梳齿组分为固定梳齿一、双边可动梳齿和固定梳齿二，固定梳齿一、双边可动梳齿和固定梳齿二均分为对称布置于传动杆两侧的两个部分，固定梳齿一和固定梳齿二的两个部分和传动杆之间具有间隙不接触连接，双边可动梳齿的两个部分分别和传动杆两侧面固定连接，双边可动梳齿在沿传动杆的两端均设有梳齿结构，双边可动梳齿两端的梳齿结构分别和固定梳齿一的梳齿部、固定梳齿二的梳齿部相对布置且呈交错分布；固定梳齿一和固定梳齿二均底部通过二氧化硅下包层固定置于硅基底上。
所述的固定梳齿一或者固定梳齿二的两个部分均与外部电路相接，外部电路对固定梳齿一或者固定梳齿二之一施加电压，带动双边可动梳齿朝向固定梳齿一或者固定梳齿二移动，进而带动传动杆及其所连接的可动交叉波导镜向固 定交叉波导镜靠近移动直到连接于固定交叉波导镜，以及带动两个岛簧结构中的双稳态弹簧柔性变形。
通过调节施加在固定梳齿一或者固定梳齿二上的电压大小，调控可动交叉波导镜向固定交叉波导镜靠近移动的距离，调整两个分离的可动交叉波导镜和固定交叉波导镜之间的距离，从而实现硅基MEMS光开关的切换光传播路径或分光等功能。
所述的双稳态弹簧主要由两根弯曲的条形硅平行布置构成，两根条形硅的一端固定连接于一侧固定岛侧面，两根条形硅的另一端固定连接于传动杆侧面，能在传动杆的推动下发生形变。
所述的可动交叉波导镜和固定交叉波导镜中宽波导V形的两个分支部分之间的相交角度满足模式光从硅到空气发生全反射的临界条件。
所述的固定交叉波导镜、可动交叉波导镜和静电驱动器均采用硅材料，厚度一致。
作为固定部分的固定交叉波导镜、固定岛、固定梳齿通过二氧化硅下包层与硅基底相连，其余的静电梳驱动器和可动交叉波导镜均作为可动部分，采用氟化氢等腐蚀气体将二氧化硅下包层腐蚀掉，形成悬臂梁结构。
所述的N×N光开关阵列包括至少四个级联的如上所述的硅基MEMS光开关。
相邻前后级的硅基MEMS光开关的端口之间通过单模直波导和波导交叉相连接。
以两个光开关一组，将四个光开关分为两组，前一组光开关中两个光开关的各自其中一个输出波导分别和后一组光开关中两个光开关的各自其中一个输入波导连接，前一组光开关中两个光开关的各自另一个输出波导分别连接到波导交叉一侧的两端，后一组光开关中两个光开关的各自另一个输入波导分别连接到波导交叉另一侧的两端。
所述的光开关阵列可以采用但不限于Benes拓扑结构，比如Cross-bar拓扑结构也可用于阵列的形成。
本发明涉及到的所有材料，在光通信波段基本具有透明特性，即材料吸收损耗只占总损耗的极小部分。整个光开关结构或阵列光开关结构均可采用单片集成制作。
本发明具有的有益效果是：
1.结构简单、设计方便，可显著降低器件的制作成本；
2.除硅波导外并没有引入其他的材料，与CMOS工艺相兼容，可用标准平 面集成光波导工艺制作；
3.开关机制采用全反射、静电力和材料的弯曲变形原理，设计简便，通俗易懂；
4.单元器件的插入损耗低，消光比高，波长敏感性小，带宽大，制作容差大；
5.采用静电梳驱动，特别是双稳态光开关，只需要在切换状态时添加电压，所需能耗低；
6.开关单元为2×2形式，可采用Cross-bar、Benes或其他类型的拓扑结构均能级联成N×N光开关阵列，具有很强的大规模扩展性。
综合来说，本发明通过采用静电梳结构来驱动分离的交叉波导镜，实现了低损耗、高消光比、大带宽的2×2光开关及N×N光开关阵列，具有结构简单、工艺简单、性能优越等优点。
附图说明
图1是本发明在初始状态(OFF)下的结构俯视图。
图2是图1的A-A’剖视图。
图3是图1的B-B’剖视图。
图4是本发明在加上偏压(ON)后的结构俯视图。
图5是本发明的双稳态光开关在OFF状态下的结构俯视图。
图6是本发明的双稳态光开关在ON状态下的结构俯视图。
图7是本发明形成光开关阵列的Benes拓扑结构示意图。
图8是本发明在OFF和ON状态下的光场传输图。
图中：1、固定交叉波导镜，2、可动交叉波导镜，3、传动杆，4、固定岛，5、折叠式弹簧，6、固定梳齿，7、可动梳齿，8、双稳态弹簧，9、固定梳齿一，10、双边可动梳齿，11、固定梳齿二，12、硅基底，13、二氧化硅下包层。
具体实施方式
下面结合附图和实施例对本发明作进一步说明。
如图1和图5所示，光开关包括硅基底12以及置于硅基底12上的静电梳驱动器和两个相分离的固定交叉波导镜1、可动交叉波导镜2，固定交叉波导镜1底部通过二氧化硅下包层13固定置于硅基底12上，可动交叉波导镜2底部悬空于硅基底12布置；可动交叉波导镜2和静电梳驱动器连接，并由静电梳驱动器带动可动交叉波导镜2向固定交叉波导镜1靠近或者远离方向移动。本发明硅基MEMS光开关的所有结构均以传动杆3为对称轴呈对称。硅基MEMS光开 关为2×2光开关。
固定交叉波导镜1和可动交叉波导镜2结构相同，均主要由V形的宽波导和连接在宽波导两端的绝热锥型波导构成，宽波导的宽度大于单模波导的宽度。
固定交叉波导镜1和可动交叉波导镜2能够对接成完整的交叉波导结构，且在固定交叉波导镜1或者可动交叉波导镜2的宽波导每一端依次连接上单模弯曲波导与单模直波导，使得相邻光开关单元之间进行连接，单模波导作为输入输出波导。
静电梳驱动器分布在可动交叉波导镜2的一侧，靠静电梳驱动器中的传动杆3与可动交叉波导镜2相连接，由传动杆3直接推动可动交叉波导镜2移动实现位置变化。
实施例1
如图1和图4所示，本实施例的静电梳驱动器主要由一对静电梳齿6、7、第一岛簧结构、第二岛簧结构和一个传动杆3构成；传动杆3沿可动交叉波导镜2的移动方向布置，传动杆3一端固定连接到可动交叉波导镜2，具体连接到可动交叉波导镜2的宽波导V形交叉处，传动杆3与可动交叉波导镜2的全反射面垂直，从可动交叉波导镜2到传动杆3另一端依次设有第一岛簧结构、一对静电梳齿6、7和第二岛簧结构。
第一岛簧结构和第二岛簧结构的结构相同，均包括四个固定岛4和两个折叠式弹簧5，四个固定岛4中以两个为一组构成两组固定岛4，两组固定岛4对称分布于传动杆3的两侧侧旁，且每组固定岛4中的两个固定岛4沿传动杆3方向间隔布置，每组固定岛4中的两个固定岛4到传动杆3的间距相同，固定岛4底部通过二氧化硅下包层13固定置于硅基底12上，如图2所示；两组固定岛4各自侧方均设有一个折叠式弹簧5。每个折叠式弹簧5主要由主杆以及分别固定连接在主杆两端和中部的分支臂构成，主杆两端的分支臂分别固定连接于传动杆3同一侧的一组固定岛4中的两个固定岛4侧面，主杆中部的分支臂固定连接于传动杆3侧面，具体连接于一组固定岛4的两个固定岛4之间的传动杆3侧面，折叠式弹簧5底部悬空于硅基底12布置；一对静电梳齿6、7分为固定梳齿6和可动梳齿7，固定梳齿6和可动梳齿7均分为对称布置于传动杆3两侧的两个部分，固定梳齿6的两个部分和传动杆3之间具有间隙不接触连接，可动梳齿7的两个部分分别和传动杆3两侧面固定连接，固定梳齿6和可动梳齿7的梳齿部相对布置且呈交错分布；固定梳齿6底部通过二氧化硅下包层13固定置于硅基底12上，如图3所示，可动梳齿7底部悬空于硅基底12布置。
固定梳齿6与外部电路相连，其他部分一直保持接地状态，通过给固定梳 齿6添加或撤去电压可以调控光开关。
固定梳齿6的两个部分均与外部电路相接，固定梳齿6以外的其他部分包括硅基底12均保持接地，外部电路对固定梳齿6施加电压，固定梳齿6的两个部分施加相同电压，带动可动梳齿7朝向固定梳齿6移动，进而带动传动杆3及其所连接的可动交叉波导镜2向固定交叉波导镜1靠近移动直到连接于固定交叉波导镜1，以及带动两个岛簧结构中的折叠式弹簧5柔性变形。
通过调节施加在固定梳齿6上的电压大小，调控可动交叉波导镜2向固定交叉波导镜1靠近移动的距离，调整两个分离的可动交叉波导镜2和固定交叉波导镜1之间的距离，从而实现硅基MEMS光开关的切换光传播路径或分光等功能。
折叠式弹簧5的主杆和分支臂均是条形硅，折叠式弹簧5能在传动杆3的推动下发生弯曲形变。
具体实施的静电梳齿6、7在沿传动杆3方向上的两侧均布置了相同尺寸的固定岛4和折叠式弹簧5，目的是为了使静电梳驱动器在工作时更加稳定。
进一步实施中，静电梳齿6、7具有一定的周期和占空比，固定梳齿6和可动梳齿7的梳齿尺寸一般保持一致，但个数略有差异，可动梳齿7与传动杆3相连。
当硅基MEMS光开关处于自然状态下，即关闭的初始状态OFF下，如图1所示，固定交叉波导镜1和可动交叉波导镜2之间在沿传动杆3方向具有间距，且调整不同的该间距进而调控硅基MEMS光开关的不同损耗和消光比等光学性能。
当硅基MEMS光开关处于自然状态下，即关闭的初始状态OFF下一对静电梳齿6、7之间在沿传动杆3方向具有间距，且该间距大于固定交叉波导镜1和可动交叉波导镜2之间的距离，以此保证在交叉波导镜1、2贴合时，如图4所示，两个静电梳齿6、7之间不会发生接触。
硅基MEMS光开关由关闭的初始状态OFF切换到打开的状态ON过程中，固定梳齿6加上电压并且一直处于加压状态。需要将硅基MEMS光开关由打开的状态ON切换到关闭的初始状态OFF，固定梳齿6撤去电压即可。
实施例2
如图5和图6所示，本实施例的静电梳驱动器为双稳态静电梳驱动器，主要由静电梳齿组、第三岛簧结构、第四岛簧结构和一个传动杆3构成；传动杆3沿可动交叉波导镜2的移动方向布置，传动杆3一端固定连接到可动交叉波导镜2，具体连接到可动交叉波导镜2的宽波导V形交叉处，传动杆3与可动交 叉波导镜2的全反射面垂直，从可动交叉波导镜2到传动杆3另一端依次设有第三岛簧结构、静电梳齿组和第四岛簧结构；第三岛簧结构和第四岛簧结构的结构相同，均包括两个固定岛4和双稳态弹簧8，两个固定岛4对称分布于传动杆3的两侧，两个固定岛4到传动杆3的间距相同，固定岛4底部通过二氧化硅下包层13固定置于硅基底12上，两个固定岛4到传动杆3之间均通过各自的双稳态弹簧8连接，双稳态弹簧8底部悬空于硅基底12布置。
静电梳齿组分为固定梳齿一9、双边可动梳齿10和固定梳齿二11，固定梳齿一9、双边可动梳齿10和固定梳齿二11均分为对称布置于传动杆3两侧的两个部分，固定梳齿一9和固定梳齿二11的两个部分和传动杆3之间具有间隙不接触连接，双边可动梳齿10的两个部分分别和传动杆3两侧面固定连接，双边可动梳齿10在沿传动杆3的两端均设有梳齿结构，双边可动梳齿10两端的梳齿结构分别和固定梳齿一9的梳齿部、固定梳齿二11的梳齿部相对布置且呈交错分布；固定梳齿一9和固定梳齿二11均底部通过二氧化硅下包层13固定置于硅基底12上，双边可动梳齿10底部悬空于硅基底12布置。
本双稳态硅基MEMS光开关采用双稳态的静电梳驱动器，与前面的一种静电梳驱动器在弹簧和静电梳上有所不同。采用由两根弯曲的条形硅构成的双稳态弹簧8，条形硅的两端分别与传动杆3、固定岛4相连。
固定梳齿一9或者固定梳齿二11的两个部分均与外部电路相接，固定梳齿一9和固定梳齿二11以外的其他部分包括硅基底12均保持接地，外部电路对固定梳齿一9或者固定梳齿二11施加电压，固定梳齿一9/固定梳齿二11的两个部分施加相同电压，带动双边可动梳齿10朝向固定梳齿一9或者固定梳齿二11移动，进而带动传动杆3及其所连接的可动交叉波导镜2向固定交叉波导镜1靠近移动直到连接于固定交叉波导镜1或远离固定交叉波导镜1，以及带动两个岛簧结构中的双稳态弹簧8柔性变形。这样，固定梳齿一9和固定梳齿二11与外部电路相连，在其中一个上施加电压，双边可动梳齿10就会向施加电压的一方移动，以此达到切换光开关状态的目的。
通过调节施加在固定梳齿一9或者固定梳齿二11上的电压大小，调控可动交叉波导镜2向固定交叉波导镜1靠近移动的距离，调整两个分离的可动交叉波导镜2和固定交叉波导镜1之间的距离，从而实现硅基MEMS光开关的切换光传播路径或分光等功能。
双稳态弹簧8主要由两根弯曲的条形硅平行布置构成，两根条形硅的一端固定连接于一侧固定岛4侧面，两根条形硅的另一端固定连接于传动杆3侧面，能在传动杆3的推动下发生形变。
当硅基MEMS光开关处于自然状态下，即关闭的初始状态OFF下，如图5所示，固定交叉波导镜1和可动交叉波导镜2之间在沿传动杆3方向具有间距，且调整不同的该间距进而调控硅基MEMS光开关的不同损耗和消光比等光学性能。
当硅基MEMS光开关处于自然状态下，即关闭的初始状态OFF下，如图6所示，双稳态弹簧8从固定岛4到传动杆3向远离固定交叉波导镜1的一侧弯曲布置；当硅基MEMS光开关处于打开的状态ON下，固定交叉波导镜1和可动交叉波导镜2相接触连接后，双稳态弹簧8从固定岛4到传动杆3向靠近固定交叉波导镜1的一侧弯曲布置。由于双稳态弹簧8本身处于弯曲状态，在切换光开关状态后，不需要添加外力就能保持自身形态。
在硅基MEMS光开关由关闭的初始状态OFF切换到打开的状态ON过程中，在固定梳齿一9加上电压并且一直处于加压状态，待固定交叉波导镜1和可动交叉波导镜2相接触连接以及双稳态弹簧8向靠近固定交叉波导镜1的一侧弯曲形变定形后，撤去固定梳齿一9上的电压，硅基MEMS光开关的打开状态始终保持。
在硅基MEMS光开关由打开的状态ON切换到关闭的初始状态OFF过程中，在固定梳齿二11加上电压并且一直处于加压状态，待固定交叉波导镜1和可动交叉波导镜2相分离以及双稳态弹簧8向远离固定交叉波导镜1的一侧弯曲形变定形后，撤去固定梳齿二11上的电压，硅基MEMS光开关的关闭状态始终保持。
固定梳齿一9在将光开关状态由OFF切换到ON时，需要加上电压，当双稳态弹簧8向交叉波导方向形变定形后，电压即可撤去。
同理，在光开关状态由ON切换到OFF时，需要在固定梳齿二11上施加电压，待双稳态弹簧8定形后撤去。
两种实施例的交叉波导和其他单模波导是用于光学传输的部分。两个交叉波导镜1、2由相交的宽波导和绝热锥型波导构成，其中固定交叉波导1保持不动，可动交叉波导镜2下方的二氧化硅下包层13被完全掏空，它们可以对接成一个完整的交叉波导结构，且交叉的角度只要能满足发生全反射条件即可。
固定交叉波导镜1、可动交叉波导镜2和静电驱动器均采用硅材料，厚度一致。无论下方的二氧化硅下包层13是否被腐蚀，均保持在同一水平面。
可动交叉波导镜2和固定交叉波导镜1中宽波导V形的两个分支部分之间的相交角度满足模式光从硅到空气发生全反射的临界条件。
对于整个光开关结构来说，除固定交叉波导镜1、固定岛4、固定梳齿6外， 其余都是悬空可动的，靠连接到各个固定岛4进行支撑。作为固定部分的固定交叉波导镜1、固定岛4、固定梳齿6通过二氧化硅下包层13与硅基底12相连，其余的静电梳驱动器和可动交叉波导镜2均作为可动部分，采用氟化氢等腐蚀气体将二氧化硅下包层13腐蚀掉，如图2和图3所示，形成悬臂梁结构。
具体实施中，所有波导和静电梳驱动器均为同一种材料，可以采用单片集成制作。交叉波导带有四个端口，针对不同应用场景，采用不同的拓扑结构，通过级联更多的光开光单元，即可获得更多端口数的N×N光开关阵列。
图7展示了采用Benes拓扑结构的4×4光开关阵列。4×4光开关阵列包括六个2×2光开关，以两个2×2光开关一组，将六个2×2光开关分为两组，多个2×2光开关组之间依次串接。前一组2×2光开关中两个2×2光开关的各自其中一个输出波导分别和后一组2×2光开关中两个2×2光开关的各自其中一个输入波导连接，前一组2×2光开关中两个2×2光开关的各自另一个输出波导分别连接到交叉波导一侧的两端，后一组2×2光开关中两个2×2光开关的各自另一个输入波导分别连接到交叉波导另一侧的两端。
下面以本发明作为光开关阵列的工作过程：
根据光的全反射原理：光从光密介质传输到光疏介质，入射角大于临界值时会发生全反射现象，光不再入射到光疏介质中。以硅为例，光从硅波导入射到空气的全反射临界角大小约17°。如图1所示，只要两交叉波导的夹角大于等于34°就能符合全反射条件。因为光在分离的交叉波导内部会发生全反射，像反射镜一样在镜面处改变光的传输方向，所以将其称为“交叉波导镜”。
图1、图4结合起来看，是硅基MEMS光开关的两种状态。
首先是图1，未对结构施加电压，光开关处于OFF状态，固定梳齿与可动梳齿之间、交叉波导镜之间均保持较远的距离。这种状态下，入射光从左侧的一个单模直波导入射，经过单模弯曲波导后，在V形分支部分发生全反射，改变传输方向，后经右侧单模弯曲波导、单模直波导输出。给固定梳齿加上一定的电压，固定梳齿和可动梳齿之间类似形成电容，在静电力的作用下，可动梳齿向固定梳齿运动，传动杆向固定交叉波导镜方向运动，并拉动折叠式弹簧的一端使其发生形变。当折叠式弹簧发生形变所产生的形变应力与静电梳齿之间的静电力相等时，静电梳驱动器达到平衡。施加的电压值越大，静电力越大，平衡时折叠式弹簧所产生的形变越大，可动交叉波导镜移动的距离也就越大。
当两个交叉波导镜刚好贴合时，光开关处于ON状态，如图4所示，此时两个波导镜可看成一个整体，入射光进入V形部分不会发生全反射继续向前传播，传输方向不改变。如果想要恢复OFF状态，撤去施加在固定梳齿上的电压， 静电梳齿之间没有静电力，折叠式弹簧不再维持弯曲状态而是反弹回初始形态，传动杆带着可动交叉波导镜被拉回初始位置。这样就完成了光开关两种状态之间的自由切换。
相比图1、4来说，图5、6的双稳态体现在静电梳的双稳态弹簧上。双稳态弹簧采用两根完全相同的条形硅，初始形态即为弯曲。在不加任何电压，即OFF状态，双边可动梳齿靠近固定梳齿二，交叉波导处于分离状态。给固定梳齿一加上一定电压，双边可动梳齿会在静电力的作用下向固定梳齿一运动，双稳态弹簧向初始形态相反的方向发生弯曲。弯曲到一定程度后，撤去电压，双稳态弹簧不会发生反弹，就这样一直维持在ON状态。如果想要切换光开关到OFF状态，可以在固定梳齿二上加上一点电压，在形变完成之后撤去。因为整个过程只需要在切换状态时加电压，待双稳态弹簧稳定后即可撤去，不需要长期加压，所以这种光开关可以实现低能耗的效果。
基于静电梳驱动的硅基MEMS光开关属于2×2光开关，比以往的1×2硅基MEMS光开关更具可扩展性，可采用更为优化的N×N光开关阵列拓扑结构。事实上，想要实现N×N的光开关阵列结构，以往1×2硅基MEMS光开关通常只能采用Cross-bar拓扑结构，所需光开关单元数高达N 2个。而2×2硅基MEMS光开关可采用更优化更简洁的Benes拓扑结构，如图7所示，仅需N(log 2N-0.5)个光开关单元。当然，这里不限于Benes拓扑结构，其他拓扑结构也都适宜。
下面给出本发明具体实施测试情况如下：
以2×2单元光开关为例，如图1所示。
选用基于硅绝缘体(SOI)材料的硅纳米线光波导：其芯层是硅材料，厚度为220nm、折射率为3.4744；其下包层材料为二氧化硅，厚度为2μm、折射率为1.4404；上包层材料为空气，折射率近似为1。考虑入射的波长范围为1250～1650nm，采用TE偏振模式。
根据全反射原理，在硅-空气界面发生全反射的临界角大小约为17°。如图1所示的交叉波导为90°，可以很方便地采用Cross-bar结构形成阵列，也可以通过添加四根45°弯曲单模波导使其类似于2×2MZI光开关，因此可以采用Benes等拓扑结构形成阵列。分离的交叉波导镜参数为：单模波导宽度为0.5μm，宽波导宽度为2.53μm，绝热锥型波导的长度为8.12μm，宽波导宽度为7.18μm，交叉波导间距为500nm。
经三维时域有限差分方法对交叉波导镜的光学性能进行仿真验证，得到初始状态(OFF)下，入射光场被交叉波导镜几乎完美地反射至直通端，如图8(a)所示。在1250-1650nm波段上均能实现低损耗和高消光比，其损耗为0.09～0.43 dB，消光比为36～60dB，中心波长1450nm处损耗为0.12dB、消光比为58.02dB。给固定梳齿加上电压，可动梳齿通过传动杆推动可动交叉波导镜向固定交叉波导镜运动，两者贴合后的入射光场几乎可以无损耗地传输至交叉端，如图8(b)所示。光开关的ON状态也能在1250-1650nm波段获得很好的性能，其损耗为0.08～0.4dB，消光比大于53dB，中心波长1450nm处损耗为0.13dB、消光比为44.25dB。由此可见，本发明提出的全新2×2硅基MEMS光开关能达到超大带宽、超低损耗、高消光比及超低能耗等效果。
上述实施例用来解释说明本发明，而不是对本发明进行限制，在本发明的精神和权利要求的保护范围内，对本发明作出的任何修改和改变，都落入本发明的保护范围。

Claims (10)

  1. 一种基于静电梳驱动的硅基MEMS光开关，其特征在于：包括硅基底(12)以及置于硅基底(12)上的静电梳驱动器和两个相分离的固定交叉波导镜(1)、可动交叉波导镜(2)，固定交叉波导镜(1)底部通过二氧化硅下包层(13)固定置于硅基底(12)上，可动交叉波导镜(2)和静电梳驱动器连接，并由静电梳驱动器带动可动交叉波导镜(2)向固定交叉波导镜(1)靠近或者远离方向移动。
  2. 根据权利要求1所述的一种基于静电梳驱动的硅基MEMS光开关，其特征在于：所述的固定交叉波导镜(1)和可动交叉波导镜(2)结构相同，均主要由V形宽波导和连接在宽波导两端的绝热锥型波导构成。
  3. 根据权利要求1所述的基于静电梳驱动的硅基MEMS光开关，其特征在于：所述的可动交叉波导镜(2)和固定交叉波导镜(1)中V形宽波导的两个分支部分之间的相交角度满足模式光在硅-空气镜面发生全反射的临界条件。
  4. 根据权利要求1所述的基于静电梳驱动的硅基MEMS光开关，其特征在于：固定交叉波导镜(1)和可动交叉波导镜(2)能够对接成完整的交叉波导结构，且在固定交叉波导镜(1)或者可动交叉波导镜(2)的宽波导每一端依次连接上单模弯曲波导与单模直波导，使得相邻光开关单元之间进行连接，单模波导作为输入输出波导。
  5. 根据权利要求1所述的一种基于静电梳驱动的硅基MEMS光开关，其特征在于：所述静电梳驱动器主要由一对静电梳齿(6、7)、第一岛簧结构、第二岛簧结构和一个传动杆(3)构成；传动杆(3)沿可动交叉波导镜(2)的移动方向布置，传动杆(3)一端固定连接到可动交叉波导镜(2)，从可动交叉波导镜(2)到传动杆(3)另一端依次设有第一岛簧结构、一对静电梳齿(6、7)和第二岛簧结构；第一岛簧结构和第二岛簧结构的结构相同，均包括四个固定岛(4)和两个折叠式弹簧(5)，四个固定岛(4)中以两个为一组构成两组固定岛(4)，两组固定岛(4)对称分布于传动杆(3)的两侧侧旁，且每组固定岛(4)中的两个固定岛(4)沿传动杆(3)方向间隔布置，固定岛(4)底部通过二氧化硅下包层(13)固定置于硅基底(12)上；两组固定岛(4)各自侧方均设有一个折叠式弹簧(5)，每个折叠式弹簧(5)主要由主杆以及分别固定连接在主杆两端和中部的分支臂构成，主杆两端的分支臂分别固定连接于一组固定岛(4)中的两个固定岛(4)侧面，主杆中部的分支臂固定连接于传动杆(3)侧面；一对静电梳齿(6、7)分为固定梳齿(6)和可动梳齿(7)， 固定梳齿(6)和可动梳齿(7)均分为对称布置于传动杆(3)两侧的两个部分，固定梳齿(6)的两个部分和传动杆(3)之间具有间隙不接触连接，可动梳齿(7)的两个部分分别和传动杆(3)两侧面固定连接，固定梳齿(6)和可动梳齿(7)的梳齿部相对布置且呈交错分布；固定梳齿(6)底部通过二氧化硅下包层(13)固定置于硅基底(12)上。
  6. 根据权利要求4所述的一种基于静电梳驱动的硅基MEMS光开关，其特征在于：所述的固定梳齿(6)的两个部分均与外部电路相接，外部电路对固定梳齿(6)施加电压，带动可动梳齿(7)朝向固定梳齿(6)移动，进而带动传动杆(3)及其所连接的可动交叉波导镜(2)向固定交叉波导镜(1)靠近移动直到连接于固定交叉波导镜(1)，以及带动两个岛簧结构中的折叠式弹簧(5)柔性变形。
  7. 根据权利要求1所述的基于静电梳驱动的硅基MEMS光开关，其特征在于：所述静电梳驱动器为双稳态静电梳驱动器，主要由静电梳齿组、第三岛簧结构、第四岛簧结构和一个传动杆(3)构成；传动杆(3)沿可动交叉波导镜(2)的移动方向布置，传动杆(3)一端固定连接到可动交叉波导镜(2)，从可动交叉波导镜(2)到传动杆(3)另一端依次设有第三岛簧结构、静电梳齿组(9、10、11)和第四岛簧结构；第三岛簧结构和第四岛簧结构的结构相同，均包括两个固定岛(4)和双稳态弹簧(8)，两个固定岛(4)对称分布于传动杆(3)的两侧，固定岛(4)底部通过二氧化硅下包层(13)固定置于硅基底(12)上，两个固定岛(4)到传动杆(3)之间均通过各自的双稳态弹簧(8)连接；静电梳齿组分为固定梳齿一(9)、双边可动梳齿(10)和固定梳齿二(11)，固定梳齿一(9)、双边可动梳齿(10)和固定梳齿二(11)均分为对称布置于传动杆(3)两侧的两个部分，固定梳齿一(9)和固定梳齿二(11)的两个部分和传动杆(3)之间具有间隙不接触连接，双边可动梳齿(10)的两个部分分别和传动杆(3)两侧面固定连接，双边可动梳齿(10)在沿传动杆(3)的两端均设有梳齿结构，双边可动梳齿(10)两端的梳齿结构分别和固定梳齿一(9)的梳齿部、固定梳齿二(11)的梳齿部相对布置且呈交错分布；固定梳齿一(9)和固定梳齿二(11)均底部通过二氧化硅下包层(13)固定置于硅基底(12)上。
  8. 根据权利要求6所述的基于静电梳驱动的硅基MEMS光开关，其特征在于：所述的固定梳齿一(9)或者固定梳齿二(11)的两个部分均与外部电路相接，外部电路对固定梳齿一(9)或者固定梳齿二(11)施加电压，带动双边可动梳齿(10)朝向固定梳齿一(9)或者固定梳齿二(11)移动，进而带动传 动杆(3)及其所连接的可动交叉波导镜(2)向固定交叉波导镜(1)靠近移动直到连接于固定交叉波导镜(1)，以及带动两个岛簧结构中的双稳态弹簧(8)柔性变形。
  9. 根据权利要求6所述的基于静电梳驱动的硅基MEMS光开关，其特征在于：固定梳齿一(9)、固定梳齿二(11)上之一加电压，通过调节电压大小，调控可动交叉波导镜(2)向固定交叉波导镜(1)靠近移动的距离，调整可动交叉波导镜(2)和固定交叉波导镜(1)之间的距离，从而实现硅基MEMS光开关的切换光传播路径或分光等功能。
  10. 一种N×N的硅基MEMS光开关阵列，其特征在于：
    所述的N×N光开关阵列包括至少四个级联的如权利要求1～8任一所述的硅基MEMS光开关。
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115955620A (zh) * 2023-03-07 2023-04-11 之江实验室 基于Banyan网络硅基光交换芯片中开关单元的校准方法
WO2024078237A1 (zh) * 2022-10-11 2024-04-18 浙江大学 静电梳驱动的基于绝热耦合器的集成波导mems光开关

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112305676B (zh) * 2020-09-23 2021-10-08 浙江大学 基于静电梳驱动的硅基mems光开关及n×n阵列

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7054519B1 (en) * 2003-03-10 2006-05-30 Active Optical Networks, Inc. Reconfigurable optical add drop multiplexers with integrated power equalization
CN107329209A (zh) * 2017-08-18 2017-11-07 中国科学院半导体研究所 M×n多播传送光开关
CN107678096A (zh) * 2016-08-01 2018-02-09 华为技术有限公司 光开关和光交换系统
CN108732687A (zh) * 2017-04-18 2018-11-02 华为技术有限公司 一种光开关及光开关阵列
CN110658584A (zh) * 2019-10-08 2020-01-07 浙江大学 一种超大带宽硅基波导mems光开关
US20200041728A1 (en) * 2016-12-16 2020-02-06 The Charles Stark Draper Laboratory, Inc. Integrated MEMS Switches for Selectively Coupling Light In and Out of a Waveguide
CN112305676A (zh) * 2020-09-23 2021-02-02 浙江大学 基于静电梳驱动的硅基mems光开关及n×n阵列

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6303885B1 (en) * 2000-03-03 2001-10-16 Optical Coating Laboratory, Inc. Bi-stable micro switch
US7187485B2 (en) * 2003-07-31 2007-03-06 Corning Incorporated Integrated continuous spectrum spatial light modulator
CN105068190B (zh) * 2015-08-31 2018-06-01 北京航天控制仪器研究所 一种mems光开关
US10490906B2 (en) * 2017-08-22 2019-11-26 Omega Optics, Inc. Slot waveguide with structural modulation
CN109256979B (zh) * 2018-09-15 2020-01-21 西安知微传感技术有限公司 一种具有自洁功能的梳齿驱动器
CN110837149B (zh) * 2019-11-19 2020-11-03 南京邮电大学 面向可见光通信的集成式可控开关型平面波导分路器及其制备方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7054519B1 (en) * 2003-03-10 2006-05-30 Active Optical Networks, Inc. Reconfigurable optical add drop multiplexers with integrated power equalization
CN107678096A (zh) * 2016-08-01 2018-02-09 华为技术有限公司 光开关和光交换系统
US20200041728A1 (en) * 2016-12-16 2020-02-06 The Charles Stark Draper Laboratory, Inc. Integrated MEMS Switches for Selectively Coupling Light In and Out of a Waveguide
CN108732687A (zh) * 2017-04-18 2018-11-02 华为技术有限公司 一种光开关及光开关阵列
CN107329209A (zh) * 2017-08-18 2017-11-07 中国科学院半导体研究所 M×n多播传送光开关
CN110658584A (zh) * 2019-10-08 2020-01-07 浙江大学 一种超大带宽硅基波导mems光开关
CN112305676A (zh) * 2020-09-23 2021-02-02 浙江大学 基于静电梳驱动的硅基mems光开关及n×n阵列

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024078237A1 (zh) * 2022-10-11 2024-04-18 浙江大学 静电梳驱动的基于绝热耦合器的集成波导mems光开关
CN115955620A (zh) * 2023-03-07 2023-04-11 之江实验室 基于Banyan网络硅基光交换芯片中开关单元的校准方法
CN115955620B (zh) * 2023-03-07 2023-06-23 之江实验室 基于Banyan网络硅基光交换芯片中开关单元的校准方法

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