WO2022062102A1 - Diffusion-resistant high-entropy alloy coating material, heat resistant coating material, preparation method therefor, and application thereof - Google Patents
Diffusion-resistant high-entropy alloy coating material, heat resistant coating material, preparation method therefor, and application thereof Download PDFInfo
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Definitions
- the present disclosure relates to the technical field of coating preparation, and in particular, to diffusion-resistant high-entropy alloy coating materials, high-temperature resistant coating materials, and preparation methods and applications thereof.
- diffusion barrier is considered to be one of the most direct and effective methods. It usually adds a barrier layer (ie diffusion barrier) between the coating and the substrate to block the interdiffusion between elements.
- the diffusion barrier materials are mainly metals (precious metals or refractory metals) and ceramics, but the metal diffusion barrier has the problem of poor chemical matching with the coating/substrate, and its blocking effect is not good when multiple elements are interdiffused at the same time.
- the ceramic layer diffusion barrier has the problem of poor physical matching with the substrate, and is prone to thermal shock failure. It can be seen that the good physical and chemical matching between the diffusion barrier and the substrate is the key problem to be solved urgently in the current diffusion barrier research process.
- Embodiments of the present disclosure propose a diffusion-resistant high-entropy alloy coating material, which includes a substrate and a diffusion-resistant high-entropy alloy coating, and elements of the diffusion-resistant high-entropy alloy coating include Al, Co, Cr, Ni, and Mo.
- the elements of the diffusion barrier high-entropy alloy coating include Al 15%-30%, Co 15%-30%, Cr 15%-30%, Ni 15%-30% and Mo 15%-30%.
- the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 1:1:1:1:1 by atomic percentage.
- the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 1.1:1.1:1.1:1.1:0.6 in atomic percentage.
- the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 1.1:1.1:1:1:0.8 in atomic percentage.
- the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 1:1.5:0.75:1:0.75 in atomic percentage.
- the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 0.9:0.9:1:1:1.2 in atomic percentage.
- the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 0.8:1.1:0.9:1.2:1 by atomic percentage.
- the base material is a superalloy.
- the base material is an iron-based superalloy, a nickel-based superalloy or a cobalt-based superalloy.
- Embodiments of the present disclosure also provide a preparation method for preparing a diffusion-resistant high-entropy alloy coating material, including: forming a diffusion-resistant high-entropy alloy coating on the surface of the substrate.
- the forming of the diffusion-resistant high-entropy alloy coating on the surface of the substrate includes preparing Al, Co, Cr, Ni and Mo into a single alloy target, and then magnetron sputtering the single alloy target.
- the diffusion-resistant high-entropy alloy coating is formed on the surface of the substrate by means of radiation or arc ion plating.
- the single alloy target is prepared by smelting or powder metallurgy.
- the thickness of the diffusion-resistant high-entropy alloy coating is 2 ⁇ m-8 ⁇ m, preferably 2 ⁇ m-7 ⁇ m, more preferably 2 ⁇ m-6 ⁇ m, more preferably 2 ⁇ m-5 ⁇ m, and more preferably 2 ⁇ m-4 ⁇ m.
- the diffusion-resistant high-entropy alloy coating is formed by means of magnetron sputtering, it is performed under the conditions that the background vacuum degree is less than or equal to 5 ⁇ 10 -3 Pa and the substrate temperature is 100-300°C;
- the target power is 200-300W
- the DC bias of the substrate is -100--500V
- the duty cycle is 60-90%
- the target-base distance is 10-15cm
- the working argon gas pressure is 0.6-0.8Pa
- the ion source is 0.8 -1.2A.
- the diffusion-resistant high-entropy alloy coating when forming the diffusion-resistant high-entropy alloy coating by means of arc ion plating, it is performed under the conditions that the background vacuum degree is less than or equal to 5 ⁇ 10 -3 Pa and the substrate temperature is 200-400°C; preferably ground, the target current is 70-90A, the substrate DC bias is -100--500V, the duty cycle is 60-90%, the target-base distance is 20-30cm, the working argon gas pressure is 1-1.3Pa, and the permanent magnet strength is 1500- 2000Gs, solenoid voltage 20-30V.
- the preparation method of the diffusion-resistant high-entropy alloy coating material further comprises: pre-processing the substrate, the pre-treatment The treatment includes grinding and polishing the surface of the substrate, then ultrasonic cleaning with acetone, alcohol and deionized water, respectively, and drying.
- Embodiments of the present disclosure also provide a high temperature resistant coating material, comprising a material body and a high temperature resistant coating applied on the material body, wherein the material body is the above-mentioned diffusion-resistant high-entropy alloy coating material or the above-mentioned diffusion-resistant high-entropy alloy coating material.
- the anti-diffusion high-entropy alloy coating material obtained by the preparation method of the entropy alloy coating material.
- the high temperature resistant coating is PtAl coating, NiAl coating, NiAlHf coating, NiCrAlY coating, CoCrAlY coating, NiAlPtNb coating, NiAlHfRu coating, CoCrAlYSi coating, NiCoCrAlYTa coating, NiCrAlYLaB coating , any one of NiCoCrAlYHf coating and NiCoCrAlYTaRe coating.
- Embodiments of the present disclosure also provide a method for preparing a high temperature resistant coating material, which includes preparing a high temperature resistant coating on the surface of the material body.
- the method for preparing the high temperature resistant coating is selected from magnetron sputtering, electron beam physical vapor deposition, arc ion plating, flame spraying, atmospheric plasma spraying, vacuum plasma spraying, cold spraying, plasma spraying-physical vapor deposition and at least one of pulse plating.
- the embodiments of the present disclosure also propose the application of the above-mentioned high-temperature resistant coating material or the high-temperature resistant coating material obtained by the above-mentioned preparation method of the above-mentioned high temperature resistant coating material in the preparation of aero-engine or gas turbine hot-end components.
- Fig. 1 is AlCoCrNiMo high-entropy alloy coating scanning electron microscope (SEM) cross-sectional topography and X-ray diffraction pattern in this embodiment;
- Figure 2 shows the cross-sectional morphologies of the high-temperature coating (NiAlHf)/diffusion barrier (AlCoCrNiMo)/superalloy (N5) sample in the example after being oxidized at 1100°C for 0h and 50h;
- Figure 3 shows the cross-sectional morphologies of the NiAlHf/N5 sample in the comparative example after being oxidized at 1100 °C for 0 h and 50 h;
- Fig. 4 is the oxidation weight gain curve of NiAlHf/AlCoCrNiMo/N5 sample (NCN) and NiAlHf/N5 sample (NN) under the condition of 1100 °C in the embodiment;
- Figure 5 shows the cross-sectional morphologies of the NiAlHf/AlTiCrNiMo/N5 samples in the comparative example after being oxidized at 1100 °C for 0 h and 50 h.
- the beneficial effects of the diffusion-resistant high-entropy alloy coating material and the preparation method thereof provided by the embodiments of the present disclosure are: the diffusion-resistant high-entropy alloy coating is formed by using Al, Co, Cr, Ni, and Mo, and the diffusion-resistant high-entropy alloy coating is formed by using Al, Co, Cr, Ni and Mo.
- the coating has good physical and chemical matching with the substrate and other coatings (such as high temperature coatings), which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high temperature resistance of the coating. Oxidation ability, and at the same time avoid mutual diffusion to reduce the mechanical properties of the substrate, prolong the service life of the parts, and its diffusion resistance effect is significantly improved compared with traditional metal or ceramic diffusion resistance materials.
- the embodiments of the present disclosure also provide a high temperature resistant coating material and a preparation method thereof.
- a high temperature resistant coating material By forming the above-mentioned anti-diffusion high-entropy alloy coating on a substrate, and then using this as a material body to form a high-temperature resistant coating, using the high-entropy anti-diffusion alloy coating
- the alloy coating has a unique slow diffusion effect, and has good physical and chemical matching with the substrate and the high temperature resistant coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, improve the coating performance.
- high temperature oxidation resistance The high temperature resistant coating material can be used in the preparation of aero-engine or gas turbine hot-end components, so as to improve the service life and working reliability of the components.
- Embodiments of the present disclosure provide a method for preparing a high temperature resistant coating material, which comprises first forming a diffusion-resistant high-entropy alloy coating on a substrate, and using this as a material body to form a high temperature resistant coating thereon, so as to obtain a High temperature resistant coating material. details as follows:
- a diffusion-resistant high-entropy alloy coating is formed on the surface of the substrate, and the elements of the diffusion-resistant high-entropy alloy coating include Al, Co, Cr, Ni and Mo.
- the present disclosure finds that the diffusion-resistant high-entropy alloy coating formed by the above five elements can effectively inhibit the interdiffusion of alloy components and the precipitation of harmful phases at the interface between the substrate and other coatings (especially high-temperature coatings), and improve the high-temperature resistance of the coating. Oxidation ability, while avoiding interdiffusion to reduce the mechanical properties of the substrate and prolong the service life of the parts. If the elements are replaced, such as replacing Co with Ti, such a good diffusion resistance effect cannot be achieved at all.
- the elements of the diffusion-resistant high-entropy alloy coating include Al 15%-30%, Co 15%-30%, Cr 15%-30%, Ni 15%-30% and Mo 15%- 30%.
- the amount of elements in the high-entropy alloy is about the same amount.
- the inventors of the present disclosure further control the amount of each component, so that the formation of the diffusion-resistant high-entropy alloy coating can be a single-phase solid solution or an amorphous phase structure to ensure the diffusion barrier composition.
- the structure is uniform, and there is no component segregation or precipitation phase, which is beneficial to the diffusion resistance of elements.
- a single alloy target can be prepared by smelting or powder metallurgy after uniformly mixing Al, Co, Cr, Ni and Mo metal powders at a ratio of 1:1:1:1:1 atomic percentage; Al, Co, Cr, Ni and Mo metal powders are uniformly mixed in a ratio of 1.1:1.1:1.1:0.6 atomic percentage, and then a single alloy target is prepared by smelting or powder metallurgy; Al, Co, Cr can be selected , Ni and Mo metal powders are uniformly mixed in a ratio of 1.1:1.1:1:1:0.8 atomic percentage, and then a single alloy target is prepared by smelting or powder metallurgy; Al, Co, Cr, Ni and Mo metal powders can be selected.
- a single alloy target is prepared by smelting or powder metallurgy after uniform mixing in the ratio of atomic percentage of 1:1.5:0.75:1:0.75; Al, Co, Cr, Ni and Mo metal powders can be selected in atomic percentage of 0.9:
- a single alloy target is prepared by smelting or powder metallurgy after uniform mixing in a ratio of 0.9:1:1:1.2; or Al, Co, Cr, Ni and Mo metal powders can be selected in an atomic percentage of 0.8:1.1:0.9:1.2
- a single alloy target is prepared by smelting or powder metallurgy after uniform mixing in the ratio of : 1.
- Al, Co, Cr, Ni and Mo are prepared into a single alloy target, and then the single alloy target is formed on the surface of the substrate by means of magnetron sputtering or arc ion plating to form a diffusion-resistant high-entropy alloy coating.
- the specific process of magnetron sputtering or arc ion plating can refer to the existing process steps, wherein the high-entropy alloy coating with uniform composition and structure formed by the method of magnetron sputtering has more excellent diffusion resistance performance.
- the base material is a superalloy, such as a common superalloy material such as iron-based superalloy, nickel-based superalloy, or cobalt-based superalloy, which is not limited in the embodiments of the present disclosure.
- the thickness of the diffusion barrier high entropy alloy coating is 2 ⁇ m-8 ⁇ m, preferably 2 ⁇ m-7 ⁇ m, more preferably 2 ⁇ m-6 ⁇ m, more preferably 2 ⁇ m-5 ⁇ m, and more preferably 2 ⁇ m-4 ⁇ m. In the art, generally, the thicker the diffusion-resistant high-entropy alloy coating, the better its diffusion-resistant performance, but the thicker the coating, the heavier the coating will be.
- this thickness range can not only effectively suppress the interdiffusion of alloy components between the substrate and the high-temperature coating, but also ensure the applicability of the high-entropy alloy diffusion barrier layer (that is, realize the thin coating and Good diffusion resistance performance can be achieved, and the deposition time of the thin coating is not too long, and the influence on the weight gain of the component is small, that is, the effect of small weight gain is guaranteed).
- the thickness of the coating layer can also be adjusted according to requirements, which is not limited by the embodiments of the present disclosure.
- the specific parameters are as follows: the background vacuum is less than or equal to 5 ⁇ 10 -3 Pa, the substrate temperature is 100-300°C, the target power is 200-300W, and the substrate temperature is 200-300W.
- the DC bias voltage is -100--500V, the duty ratio is 60-90%, the target-base distance is 10-15cm, the working argon gas pressure is 0.6-0.8Pa, and the ion source is 0.8-1.2A.
- the specific parameters are as follows: the background vacuum is less than or equal to 5 ⁇ 10 -3 Pa, the substrate temperature is 200-400°C, the target current is 70-90A, the substrate DC The bias voltage is -100--500V, the duty ratio is 60-90%, the target base distance is 20-30cm, the working argon gas pressure is 1-1.3Pa, the permanent magnet strength is 1500-2000Gs, and the electromagnetic coil voltage is 20-30V.
- the formed coating has a dense structure, uniform composition and better high temperature oxidation resistance.
- process parameters may also be adjusted according to requirements, which are not limited in the embodiments of the present disclosure.
- a high-temperature resistant coating is prepared on the surface of the material body by using the diffusion-resistant high-entropy alloy coating material as the material body.
- the formed high-temperature resistant coating material utilizes the slow diffusion effect unique to the diffusion-resistant high-entropy alloy coating, and has good physical and chemical matching with the substrate and the high-temperature resistant coating, which can effectively inhibit the substrate and the coating.
- the interdiffusion of interlayer alloy components and the precipitation of harmful phases at the interface improve the high temperature oxidation resistance of the coating. It can be used in the preparation of aero-engine or gas turbine hot-end components to improve the service life and working reliability of components.
- the high temperature resistant coatings are PtAl coating, NiAl coating, NiAlHf coating, NiCrAlY coating, CoCrAlY coating, NiAlPtNb coating, NiAlHfRu coating, CoCrAlYSi coating, NiCoCrAlYTa coating, NiCrAlYLaB coating, NiCoCrAlYHf coating layer and NiCoCrAlYTaRe coating.
- the above coating materials are all existing high temperature resistant coatings, which are suitable for the high temperature resistant coatings of the high temperature resistant coating materials provided in the embodiments of the present disclosure, and have good physical and chemical compatibility.
- the method for preparing the high temperature resistant coating is selected from magnetron sputtering, electron beam physical vapor deposition, arc ion plating, flame spraying, atmospheric plasma spraying, vacuum plasma spraying, cold spraying, plasma spraying-physical vapor deposition and pulse electroplating at least one of them. It can be a common coating formation method such as supersonic flame spraying, low-pressure plasma spraying, etc. The specific process can refer to the prior art records, and will not be repeated here.
- the present embodiment provides a preparation method of a high temperature resistant coating material, which is prepared by the following methods:
- Target preparation Al, Co, Cr, Ni and Mo metal powders are uniformly mixed in a ratio of 1:1:1:1:1 atomic percentage, and a single alloy is prepared by powder metallurgy as a target.
- Substrate pretreatment Using nickel-based superalloy (N5) as the substrate, the surface of the substrate was ground and polished, and then ultrasonically cleaned with acetone, alcohol and deionized water, respectively, and dried.
- N5 nickel-based superalloy
- Diffusion-resistant high-entropy alloy coating deposition use magnetron sputtering to deposit the target material on the surface of the substrate after cleaning and blowing to form a diffusion-resistant high-entropy alloy coating, and the process parameters are: the background vacuum degree is less than 5 ⁇ 10 -3 Pa, substrate temperature of 200°C, target power of 250W, substrate DC bias of -100V, duty cycle of 70%, target-to-substrate distance of 12cm, working argon pressure of 0.7Pa, and ion source of 1A.
- the thickness of the control coating is about 3 ⁇ m.
- Arc ion plating is used to deposit NiAlHf high temperature resistant coating with a thickness of about 30 ⁇ m on the surface of the diffusion resistance high entropy alloy coating.
- the process parameters are: the background vacuum is less than 5 ⁇ 10 -3 Pa, the base The material temperature is 350°C, the argon gas pressure is 2Pa, the arc current is 120A, the DC bias voltage is -100V, and the duty ratio is 70%.
- the chemical composition of the NiAlHf coating is as follows: the Ni content is 68 wt.%, the Al content is 31 wt.%, and the Hf content is 1 wt.%.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- This embodiment provides a method for preparing a high temperature resistant coating material, which is different from Embodiment 1 only in that: in step (3), the magnetron sputtering process parameters for the deposition of the diffusion-resistant high-entropy alloy coating are: background The vacuum degree is less than 5 ⁇ 10 -3 Pa, the substrate temperature is 150°C, the target power is 300W, the substrate DC bias is -300V, the duty cycle is 90%, the target-base distance is 10cm, the working argon gas pressure is 0.8Pa, the ion source is 1.2A.
- the control coating thickness was 4 ⁇ m.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- This embodiment provides a method for preparing a high temperature resistant coating material, which is different from Embodiment 1 only in that: in step (3), the magnetron sputtering process parameters for the deposition of the diffusion-resistant high-entropy alloy coating are: background The vacuum degree is less than 5 ⁇ 10 -3 Pa, the substrate temperature is 250°C, the target power is 250W, the substrate DC bias is -500V, the duty cycle is 60%, the target-base distance is 15cm, the working argon gas pressure is 0.6Pa, the ion source is 0.8A.
- the control coating thickness was 2 ⁇ m.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- the present embodiment provides a method for preparing a high temperature resistant coating material, which differs from Embodiment 1 only in that: in step (3), the arc ion plating technology is used for the deposition of the diffusion-resistant high-entropy alloy coating, and the process parameters are: The background vacuum is less than 5 ⁇ 10 - 3 Pa, the substrate temperature is 300°C, the target current is 70A, the substrate pulse bias is -100V, the duty cycle is 70%, the target-to-base distance is 20cm, and the working argon gas pressure is 1.3 Pa, permanent magnet strength 2000Gs, electromagnetic coil voltage 30V.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- the present embodiment provides a method for preparing a high temperature resistant coating material, which is different from Embodiment 1 only in that in step (3), arc ion plating technology is used for coating deposition, and the process parameters are: the background vacuum degree is less than 5 ⁇ 10 -3 Pa, substrate temperature is 350°C, target current is 90A, substrate pulse bias is -300V, duty cycle is 90%, target-base distance is 30cm, working argon gas pressure is 1Pa, permanent magnet strength is 1500Gs , the solenoid voltage is 25V.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- the present embodiment provides a method for preparing a high temperature resistant coating material, which is different from the embodiment 1 only in that in step (1), the atomic percentages of the Al, Co, Cr, Ni, and Mo metal powders used are: 1.1:1.1:1.1:1.1:0.6.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- This embodiment provides a preparation method of a high temperature resistant coating material, the difference between which is different from that in Embodiment 1 is only that in step (2), the base material used is a cobalt-based superalloy (GH605).
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- This embodiment provides a method for preparing a high temperature resistant coating material, which is different from Embodiment 1 only in that in step (2), the substrate material used is an iron-based superalloy (GH706).
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- This embodiment provides a method for preparing a high temperature resistant coating material, which is different from Embodiment 1 only in that in step (4), magnetron sputtering is used to deposit a thickness of about 20 ⁇ m on the surface of the diffusion resistance high entropy alloy coating.
- the process parameters of the CoCrAlY anti-high temperature coating are as follows: the background vacuum is less than 5 ⁇ 10 -3 Pa, the substrate temperature is 150°C, the argon pressure is 0.4Pa, the target current is 2.5A, the bias voltage is -100V, and the ion source is 1.5A.
- the chemical composition of CoCrAlY coating is: Cr content is 40wt.%, Al content is 15wt.%, Y content is 3wt.%, and the rest is Co.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- This embodiment provides a method for preparing a high temperature resistant coating material, which differs from Example 1 only in that: in step (4), a CoCrAlYSi high temperature resistant coating of about 40 ⁇ m is prepared by supersonic flame spraying, and the process parameters are: : Spray gun power 3kW, gas flow rate: 50m3/h, powder feeding amount: 5g/min, spraying distance: 300mm.
- the chemical composition of CoCrAlYSi coating is: Cr content is 18wt.%, Al content is 12wt.%, Y content is 3wt.%, Si content is 1.5wt.%, and the rest is Ni.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- the present embodiment provides a method for preparing a high temperature resistant coating material, which is different from the embodiment 1 only in that in step (1), the atomic percentages of the Al, Co, Cr, Ni, and Mo metal powders used are: 1.1:1.1:1:1:0.8.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- the present embodiment provides a method for preparing a high temperature resistant coating material, which is different from the embodiment 1 only in that in step (1), the atomic percentages of the Al, Co, Cr, Ni, and Mo metal powders used are: 1:1.5:0.75:1:0.75.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- the present embodiment provides a method for preparing a high temperature resistant coating material, which is different from the embodiment 1 only in that in step (1), the atomic percentages of the Al, Co, Cr, Ni, and Mo metal powders used are: 0.9:0.9:1:1:1.2.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- the present embodiment provides a method for preparing a high temperature resistant coating material, which is different from the embodiment 1 only in that in step (1), the atomic percentages of the Al, Co, Cr, Ni, and Mo metal powders used are: 0.8:1.1:0.9:1.2:1.
- the obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
- This comparative example provides a preparation method of a high temperature resistant coating material, which differs from Example 1 only in that the NiAlHf high temperature resistant coating is directly formed on the nickel-based superalloy without depositing the diffusion-resistant high-entropy alloy coating.
- the present comparative example provides a preparation method of a high temperature resistant coating material, which is different from Example 1 only in that Co metal powder is replaced with Ti metal powder.
- the SEM image of the cross-section of the diffusion resistance high-entropy alloy coating is shown in Figure 1 (a), the coating structure is dense and the composition is uniform, and its phase structure is detected by XRD, as shown in Figure 1 (b), the coating is non- crystal phase. As shown in Fig. 1(c), the coating is a single solid solution phase (FCC structure).
- Fig. 2 show that after 50 hours of oxidation at 1100 °C, no obvious interdiffusion zone and secondary reaction zone were observed in the NiAlHf/AlCoCrNiMo/N5 coating sample, and no TCP harmful phase was precipitated. This shows that the AlCoCrNiMo high-entropy alloy coating can effectively prevent the interdiffusion of alloy elements and inhibit the precipitation of harmful phases caused by interdiffusion.
- Figure 3 shows that after 50 hours of oxidation at 1100 °C, the NiAlHf/N5 coating sample has an obvious element interdiffusion zone, a secondary reaction zone (SRZ) is formed under the interdiffusion layer, and a large number of needle-like TCP harmful phases are precipitated .
- SRZ secondary reaction zone
- the oxidation weight gain curves of the high temperature resistant coating materials prepared in Test Example 1 and Comparative Example 1 are shown in FIG. 4 , where NCN is the test result of Example 1, and NN is the test result of Comparative Example 1. It can be shown that the preparation method provided in this application can effectively form the AlCoCrNiMo high-entropy alloy diffusion barrier layer, realize the barrier diffusion between the high temperature protective coating and the high temperature substrate, and improve the high temperature oxidation resistance of the coating.
- Example 1 The high temperature interface element diffusion behavior of the high temperature resistant coating materials prepared in Example 1 and Comparative Example 2 was tested, and the high temperature coating (NiAlHf)/diffusion barrier (AlCoCrNiMo)/superalloy ( The N5) sample and the high temperature coating (NiAlHf)/diffusion barrier (AlTiCrNiMo)/superalloy (N5) sample were subjected to oxidation test at 1100 °C. , FIG. 2 is the test result in Example 1, and FIG. 5 is the test result in Comparative Example 2.
- the present disclosure provides a diffusion-resistant high-entropy alloy coating material and a preparation method thereof, which form a diffusion-resistant high-entropy alloy coating by using Al, Co, Cr, Ni and Mo, and the diffusion-resistant high-entropy alloy coating is
- the alloy coating has good physical and chemical matching with the substrate and other coatings (such as high-temperature coatings), which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the resistance of the coating.
- High temperature oxidation ability while avoiding mutual diffusion to reduce the mechanical properties of the substrate, prolonging the service life of the parts, its diffusion resistance effect is significantly improved compared to traditional metal or ceramic diffusion resistance materials.
- the present disclosure also provides a high-temperature resistant coating material and a preparation method thereof.
- a high-temperature resistant coating material By forming the above-mentioned resistance-diffusion high-entropy alloy coating on a substrate, and then using this as the material body to form a high-temperature resistant coating, the resistance-diffusion high-entropy alloy coating is formed by using the resistance-diffusion high-entropy alloy coating.
- the alloy coating has a unique slow diffusion effect, and has good physical and chemical matching with the substrate and the high temperature resistant coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, improve the coating performance.
- high temperature oxidation resistance The method is mature and reliable, has good repeatability, and is easy to realize large-scale industrial production.
- the high temperature resistant coating material can be used in the preparation of aero-engine or gas turbine hot-end components, so as to improve the service life and working reliability of the components.
- the multi-resistance-diffusion high-entropy alloy coating material and the preparation method thereof of the present disclosure are formed by using Al, Co, Cr, Ni and Mo to form the resistance-diffusion high-entropy alloy coating, the resistance-diffusion high-entropy alloy coating and the substrate and Other coatings (such as high temperature coatings) have good physical and chemical matching, which can effectively inhibit the mutual diffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, improve the high temperature oxidation resistance of the coating, and avoid mutual diffusion. Diffusion leads to a decrease in the mechanical properties of the substrate and prolongs the service life of the parts. Compared with traditional metal or ceramic anti-diffusion materials, its diffusion resistance effect is significantly improved.
- the high-temperature resistant coating material and the preparation method thereof of the present disclosure are formed by forming the above-mentioned anti-diffusion high-entropy alloy coating on the base material, and then using the high-entropy alloy coating as the material body to form the high-temperature resistant coating, using the unique properties of the anti-diffusion high entropy alloy coating It has slow diffusion effect, and has good physical and chemical matching with the substrate and high temperature resistant coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high temperature oxidation resistance of the coating. .
- the high temperature resistant coating material can be used in the preparation of aero-engine or gas turbine hot-end components, so as to improve the service life and working reliability of the components.
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Abstract
A diffusion-resistant high-entropy alloy coating material and a heat resistant coating material, comprising a substrate and a diffusion-resistant high-entropy alloy coating. The diffusion-resistant high-entropy alloy coating comprises the elements: Al, Co, Cr, Ni, and Mo. The heat resistant coating material is obtained by forming the aforementioned diffusion-resistant high-entropy alloy coating on the substrate, and then, using same as a base material, forming a heat resistant coating thereon. By utilizing a unique slow diffusion effect of the diffusion-resistant high-entropy alloy coating and good physical and chemical matching thereof with both the substrate and the heat resistant coating, it is possible to effectively inhibit mutual diffusion of alloy components and harmful phase precipitation at the contact surface between the substrate and the coating, and improve the high temperature oxidation resistance capability of the coating. The heat resistant coating material can be applied in the preparation of hot-end parts of aeronautical engines or gas turbines to improve the service life and working reliability of the parts.
Description
相关申请的交叉引用CROSS-REFERENCE TO RELATED APPLICATIONS
本申请要求于2020年9月23日提交中国专利局的申请号为202011005908.3和名称为“阻扩散高熵合金涂层材料、耐高温涂层材料及其制备方法和应用”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application requires the priority of the Chinese patent application with the application number 202011005908.3 and the title of "Diffusion-resistant high-entropy alloy coating material, high temperature resistant coating material and preparation method and application thereof" submitted to the China Patent Office on September 23, 2020 rights, the entire contents of which are incorporated herein by reference.
本公开涉及涂层制备技术领域,且特别涉及阻扩散高熵合金涂层材料、耐高温涂层材料及其制备方法和应用。The present disclosure relates to the technical field of coating preparation, and in particular, to diffusion-resistant high-entropy alloy coating materials, high-temperature resistant coating materials, and preparation methods and applications thereof.
航空发动机或燃气轮机涡轮叶片服役环境恶劣,其工作温度极高,已远超过高温合金材料所能承受的极限温度,因此必须采用高温防护涂层以满足其使用温度,以有效延长部件的服役寿命。然而,由于涂层材料与高温合金基材之间存在较大的组织成分差异,高温服役时涂层与合金基材之间必然会发生元素互扩散。其中,涂层主要抗氧化元素Al向基材的内扩散,会加速Al元素的消耗而降低叶片服役寿命;而基材材料的固溶强化元素Mo、Re、Cr、W等朝涂层方向的外扩散,容易在界面形成一些金属间化合物相及拓扑密排相,显著降低基材合金的力学性能。因此,涂层与高温合金基材之间的互扩散已经成为制约合金、涂层性能发挥的关键问题,并将严重影响涡轮叶片的服役寿命和工作可靠性。The service environment of aero-engine or gas turbine turbine blades is harsh, and its working temperature is extremely high, which has far exceeded the extreme temperature that superalloy materials can withstand. However, due to the large difference in composition between the coating material and the superalloy substrate, element interdiffusion will inevitably occur between the coating and the alloy substrate during high temperature service. Among them, the main anti-oxidant element Al of the coating diffuses into the substrate, which will accelerate the consumption of Al element and reduce the service life of the blade; while the solid solution strengthening elements Mo, Re, Cr, W, etc. of the substrate material are in the direction of the coating. Outdiffusion, it is easy to form some intermetallic compound phases and topologically densely packed phases at the interface, which significantly reduces the mechanical properties of the base alloy. Therefore, the interdiffusion between the coating and the superalloy substrate has become a key problem that restricts the performance of the alloy and coating, and will seriously affect the service life and working reliability of turbine blades.
为了解决互扩散引起的涂层寿命降低和基材力学性能退化,国内外开展了大量的研究工作,主要集中于防止再结晶、改进涂层结构和活度以及界面阻扩散等。其中,阻扩散被认为是最直接有效的方法之一,它通常在涂层与基材之间加上一层阻挡层(既扩散障)以阻滞元素间的互扩散。In order to solve the reduction of coating life and the degradation of substrate mechanical properties caused by interdiffusion, a lot of research work has been carried out at home and abroad, mainly focusing on preventing recrystallization, improving coating structure and activity, and interfacial diffusion resistance. Among them, diffusion barrier is considered to be one of the most direct and effective methods. It usually adds a barrier layer (ie diffusion barrier) between the coating and the substrate to block the interdiffusion between elements.
目前,阻扩散材料主要为金属(贵金属或难熔金属)和陶瓷,但金属扩散障存在与涂层/基材间的化学匹配性差的问题,在多元素同时互扩散时其阻滞效果不佳;而陶瓷层扩散障存在与基材的物理匹配性较差的问题,易出现热冲击失效。由此可见,扩散障与基材间良好的物理和化学匹配性是目前扩散障研究过程中亟待解决的关键问题。At present, the diffusion barrier materials are mainly metals (precious metals or refractory metals) and ceramics, but the metal diffusion barrier has the problem of poor chemical matching with the coating/substrate, and its blocking effect is not good when multiple elements are interdiffused at the same time. However, the ceramic layer diffusion barrier has the problem of poor physical matching with the substrate, and is prone to thermal shock failure. It can be seen that the good physical and chemical matching between the diffusion barrier and the substrate is the key problem to be solved urgently in the current diffusion barrier research process.
鉴于此,特提出本公开。In view of this, the present disclosure is hereby made.
发明内容SUMMARY OF THE INVENTION
本公开实施方案提出了一种阻扩散高熵合金涂层材料,其包括基材和阻扩散高熵合金涂层,阻扩散高熵合金涂层的元素包括Al、Co、Cr、Ni和Mo。Embodiments of the present disclosure propose a diffusion-resistant high-entropy alloy coating material, which includes a substrate and a diffusion-resistant high-entropy alloy coating, and elements of the diffusion-resistant high-entropy alloy coating include Al, Co, Cr, Ni, and Mo.
可选地,按原子百分比计,所述阻扩散高熵合金涂层的元素包括Al 15%-30%、Co 15%-30%、Cr 15%-30%、Ni 15%-30%和Mo 15%-30%。Optionally, in atomic percent, the elements of the diffusion barrier high-entropy alloy coating include Al 15%-30%, Co 15%-30%, Cr 15%-30%, Ni 15%-30% and Mo 15%-30%.
可选地,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为1:1:1:1:1。Optionally, the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 1:1:1:1:1 by atomic percentage.
可选地,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为1.1:1.1:1.1:1.1:0.6。Optionally, the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 1.1:1.1:1.1:1.1:0.6 in atomic percentage.
可选地,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为1.1:1.1:1:1:0.8。Optionally, the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 1.1:1.1:1:1:0.8 in atomic percentage.
可选地,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为1:1.5:0.75:1:0.75。Optionally, the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 1:1.5:0.75:1:0.75 in atomic percentage.
可选地,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为0.9:0.9:1:1:1.2。Optionally, the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 0.9:0.9:1:1:1.2 in atomic percentage.
可选地,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为0.8:1.1:0.9:1.2:1。Optionally, the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 0.8:1.1:0.9:1.2:1 by atomic percentage.
可选地,所述基材为高温合金。Optionally, the base material is a superalloy.
可选地,所述基材为铁基高温合金、镍基高温合金或钴基高温合金。Optionally, the base material is an iron-based superalloy, a nickel-based superalloy or a cobalt-based superalloy.
本公开实施方案还提出一种制备阻扩散高熵合金涂层材料的制备方法,包括:在所述基材表面形成阻扩散高熵合金涂层。Embodiments of the present disclosure also provide a preparation method for preparing a diffusion-resistant high-entropy alloy coating material, including: forming a diffusion-resistant high-entropy alloy coating on the surface of the substrate.
可选地,所述在所述基材表面形成阻扩散高熵合金涂层包括将Al、Co、Cr、Ni和Mo制备成单一合金靶材,再将所述单一合金靶材通过磁控溅射或电弧离子镀的方式在基材表面形成所述阻扩散高熵合金涂层。Optionally, the forming of the diffusion-resistant high-entropy alloy coating on the surface of the substrate includes preparing Al, Co, Cr, Ni and Mo into a single alloy target, and then magnetron sputtering the single alloy target. The diffusion-resistant high-entropy alloy coating is formed on the surface of the substrate by means of radiation or arc ion plating.
可选地,所述单一合金靶材是通过熔炼或粉末冶金的方式进行制备。Optionally, the single alloy target is prepared by smelting or powder metallurgy.
可选地,阻扩散高熵合金涂层的厚度为2μm-8μm,优选为2μm-7μm,更优选为2μm-6μm,更优选为2μm-5μm,以及更优选为2μm-4μm。Optionally, the thickness of the diffusion-resistant high-entropy alloy coating is 2 μm-8 μm, preferably 2 μm-7 μm, more preferably 2 μm-6 μm, more preferably 2 μm-5 μm, and more preferably 2 μm-4 μm.
可选地,采用磁控溅射的方式形成所述阻扩散高熵合金涂层时,是在背景真空度小于或等于5×10
-3Pa、基材温度100-300℃的条件下进行;优选地,靶功率200-300W、基材直流偏压为-100~-500V、占空比60-90%、靶基距10-15cm、工作氩气气压为0.6-0.8Pa、离子源为0.8-1.2A。
Optionally, when the diffusion-resistant high-entropy alloy coating is formed by means of magnetron sputtering, it is performed under the conditions that the background vacuum degree is less than or equal to 5×10 -3 Pa and the substrate temperature is 100-300°C; Preferably, the target power is 200-300W, the DC bias of the substrate is -100--500V, the duty cycle is 60-90%, the target-base distance is 10-15cm, the working argon gas pressure is 0.6-0.8Pa, and the ion source is 0.8 -1.2A.
可选地,采用电弧离子镀的方式形成所述阻扩散高熵合金涂层时,是在背景真空度小于或等于5×10
-3Pa、基材温度200-400℃的条件下进行;优选地,靶电流70-90A、基材直流偏压为-100~-500V、占空比60-90%、靶基距20-30cm、工作氩气气压为1-1.3Pa、永磁强度1500-2000Gs、电磁线圈电压20-30V。
Optionally, when forming the diffusion-resistant high-entropy alloy coating by means of arc ion plating, it is performed under the conditions that the background vacuum degree is less than or equal to 5×10 -3 Pa and the substrate temperature is 200-400°C; preferably ground, the target current is 70-90A, the substrate DC bias is -100--500V, the duty cycle is 60-90%, the target-base distance is 20-30cm, the working argon gas pressure is 1-1.3Pa, and the permanent magnet strength is 1500- 2000Gs, solenoid voltage 20-30V.
可选地,在所述基材表面形成所述阻扩散高熵合金涂层之前,所述阻扩散高熵合金涂层材料的制备方法还包括:对所述基材进行预处理,所述预处理包括:对基材表面进 行打磨以及抛光处理,然后分别用丙酮、酒精和去离子水超声清洗,吹干。Optionally, before forming the diffusion-resistant high-entropy alloy coating on the surface of the substrate, the preparation method of the diffusion-resistant high-entropy alloy coating material further comprises: pre-processing the substrate, the pre-treatment The treatment includes grinding and polishing the surface of the substrate, then ultrasonic cleaning with acetone, alcohol and deionized water, respectively, and drying.
本公开实施方案还提出一种耐高温涂层材料,包括材料本体和涂覆于材料本体上的抗高温涂层,其中,材料本体为上述阻扩散高熵合金涂层材料或由上述阻扩散高熵合金涂层材料的制备方法所获得的阻扩散高熵合金涂层材料。Embodiments of the present disclosure also provide a high temperature resistant coating material, comprising a material body and a high temperature resistant coating applied on the material body, wherein the material body is the above-mentioned diffusion-resistant high-entropy alloy coating material or the above-mentioned diffusion-resistant high-entropy alloy coating material. The anti-diffusion high-entropy alloy coating material obtained by the preparation method of the entropy alloy coating material.
可选地,所述抗高温涂层为PtAl涂层、NiAl涂层、NiAlHf涂层、NiCrAlY涂层、CoCrAlY涂层、NiAlPtNb涂层、NiAlHfRu涂层、CoCrAlYSi涂层、NiCoCrAlYTa涂层、NiCrAlYLaB涂层、NiCoCrAlYHf涂层和NiCoCrAlYTaRe涂层中的任意一种。Optionally, the high temperature resistant coating is PtAl coating, NiAl coating, NiAlHf coating, NiCrAlY coating, CoCrAlY coating, NiAlPtNb coating, NiAlHfRu coating, CoCrAlYSi coating, NiCoCrAlYTa coating, NiCrAlYLaB coating , any one of NiCoCrAlYHf coating and NiCoCrAlYTaRe coating.
本公开实施方案还提出一种耐高温涂层材料的制备方法,包括在材料本体表面制备抗高温涂层。Embodiments of the present disclosure also provide a method for preparing a high temperature resistant coating material, which includes preparing a high temperature resistant coating on the surface of the material body.
可选地,制备所述抗高温涂层的方法选自磁控溅射、电子束物理气相沉积、电弧离子镀、火焰喷涂、大气等离子喷涂、真空等离子喷涂、冷喷涂、等离子喷涂-物理气相沉积和脉冲电镀中的至少一种。Optionally, the method for preparing the high temperature resistant coating is selected from magnetron sputtering, electron beam physical vapor deposition, arc ion plating, flame spraying, atmospheric plasma spraying, vacuum plasma spraying, cold spraying, plasma spraying-physical vapor deposition and at least one of pulse plating.
本公开实施方案还提出上述耐高温涂层材料或上述耐高温涂层材料的制备方法所获得的耐高温涂层材料在制备航空发动机或燃气轮机热端部件中的应用。The embodiments of the present disclosure also propose the application of the above-mentioned high-temperature resistant coating material or the high-temperature resistant coating material obtained by the above-mentioned preparation method of the above-mentioned high temperature resistant coating material in the preparation of aero-engine or gas turbine hot-end components.
为了更清楚地说明本公开实施例的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,应当理解,以下附图仅示出了本公开的某些实施例,因此不应被看作是对范围的限定,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他相关的附图。In order to illustrate the technical solutions of the embodiments of the present disclosure more clearly, the following briefly introduces the accompanying drawings that need to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present disclosure, and therefore do not It should be regarded as a limitation of the scope, and for those of ordinary skill in the art, other related drawings can also be obtained according to these drawings without any creative effort.
图1为本实施例中AlCoCrNiMo高熵合金涂层扫描电子显微镜(SEM)截面形貌图与X射线衍射图;Fig. 1 is AlCoCrNiMo high-entropy alloy coating scanning electron microscope (SEM) cross-sectional topography and X-ray diffraction pattern in this embodiment;
图2为实施例中高温涂层(NiAlHf)/扩散障(AlCoCrNiMo)/高温合金(N5)样品于1100℃条件下氧化0h和50h后的截面形貌图;Figure 2 shows the cross-sectional morphologies of the high-temperature coating (NiAlHf)/diffusion barrier (AlCoCrNiMo)/superalloy (N5) sample in the example after being oxidized at 1100°C for 0h and 50h;
图3为对比例中NiAlHf/N5样品于1100℃条件下氧化0h和50h后的截面形貌图;Figure 3 shows the cross-sectional morphologies of the NiAlHf/N5 sample in the comparative example after being oxidized at 1100 °C for 0 h and 50 h;
图4为实施例中NiAlHf/AlCoCrNiMo/N5样品(NCN)和NiAlHf/N5样品(NN)于1100℃条件下氧化增重曲线;Fig. 4 is the oxidation weight gain curve of NiAlHf/AlCoCrNiMo/N5 sample (NCN) and NiAlHf/N5 sample (NN) under the condition of 1100 ℃ in the embodiment;
图5为对比例中NiAlHf/AlTiCrNiMo/N5样品于1100℃条件下氧化0h和50h后的截面形貌图。Figure 5 shows the cross-sectional morphologies of the NiAlHf/AlTiCrNiMo/N5 samples in the comparative example after being oxidized at 1100 °C for 0 h and 50 h.
为使本公开实施例的目的、技术方案和优点更加清楚,下面将对本公开实施例中的技术方案进行清楚、完整地描述。实施例中未注明具体条件者,按照常规条件或制造商建议的条件进行。所用试剂或仪器未注明生产厂商者,均为可以通过市售购买获得的常规产品。In order to make the objectives, technical solutions and advantages of the embodiments of the present disclosure more clear, the technical solutions in the embodiments of the present disclosure will be described clearly and completely below. If the specific conditions are not indicated in the examples, it is carried out according to the conventional conditions or the conditions suggested by the manufacturer. The reagents or instruments used without the manufacturer's indication are conventional products that can be purchased from the market.
本公开实施方案提供的阻扩散高熵合金涂层材料及其制备方法的有益效果是:其通过利用Al、Co、Cr、Ni和Mo形成阻扩散高熵合金涂层,该阻扩散高熵合金涂层与基材和其他涂层(如高温涂层)均具有良好的物理和化学匹配性,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力,同时避免互扩散导致基材力学性能降低,延长零件的服役寿命,其阻扩散效果相比于传统金属或陶瓷阻扩散材料有明显提升。The beneficial effects of the diffusion-resistant high-entropy alloy coating material and the preparation method thereof provided by the embodiments of the present disclosure are: the diffusion-resistant high-entropy alloy coating is formed by using Al, Co, Cr, Ni, and Mo, and the diffusion-resistant high-entropy alloy coating is formed by using Al, Co, Cr, Ni and Mo. The coating has good physical and chemical matching with the substrate and other coatings (such as high temperature coatings), which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high temperature resistance of the coating. Oxidation ability, and at the same time avoid mutual diffusion to reduce the mechanical properties of the substrate, prolong the service life of the parts, and its diffusion resistance effect is significantly improved compared with traditional metal or ceramic diffusion resistance materials.
本公开实施方案还提供的耐高温涂层材料及其制备方法,其通过在基材上形成上述阻扩散高熵合金涂层,再以此为材料本体形成抗高温涂层,利用阻扩散高熵合金涂层特有的缓慢扩散效应,并且与基材和抗高温涂层均具有良好的物理和化学匹配性,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。该耐高温涂层材料可以在制备航空发动机或燃气轮机热端部件中得到应用,提升部件服役寿命和工作可靠性。The embodiments of the present disclosure also provide a high temperature resistant coating material and a preparation method thereof. By forming the above-mentioned anti-diffusion high-entropy alloy coating on a substrate, and then using this as a material body to form a high-temperature resistant coating, using the high-entropy anti-diffusion alloy coating The alloy coating has a unique slow diffusion effect, and has good physical and chemical matching with the substrate and the high temperature resistant coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, improve the coating performance. high temperature oxidation resistance. The high temperature resistant coating material can be used in the preparation of aero-engine or gas turbine hot-end components, so as to improve the service life and working reliability of the components.
下面对本公开实施例提供的阻扩散高熵合金涂层材料、耐高温涂层材料及其制备方法和应用进行具体说明。The following will specifically describe the diffusion-resistant high-entropy alloy coating materials, the high-temperature resistant coating materials, and the preparation methods and applications thereof provided by the embodiments of the present disclosure.
本公开实施例提供了一种耐高温涂层材料的制备方法,其通过先在基材上形成阻扩散高熵合金涂层,并以此作为材料本体在其上形成抗高温涂层,以获得耐高温涂层材料。具体如下:Embodiments of the present disclosure provide a method for preparing a high temperature resistant coating material, which comprises first forming a diffusion-resistant high-entropy alloy coating on a substrate, and using this as a material body to form a high temperature resistant coating thereon, so as to obtain a High temperature resistant coating material. details as follows:
S1、阻扩散高熵合金涂层材料的制备S1. Preparation of diffusion-resistant high-entropy alloy coating materials
在基材表面形成阻扩散高熵合金涂层,阻扩散高熵合金涂层的元素包括Al、Co、Cr、Ni和Mo。本公开发现,以上五种元素形成的阻扩散高熵合金涂层能够有效抑制基材和其他涂层(特别是高温涂层)间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力,同时避免互扩散导致基材力学性能降低,延长零件的服役寿命。若替换其中的元素,如将Co替换为Ti则完全不能达到如此好的阻扩散效果。A diffusion-resistant high-entropy alloy coating is formed on the surface of the substrate, and the elements of the diffusion-resistant high-entropy alloy coating include Al, Co, Cr, Ni and Mo. The present disclosure finds that the diffusion-resistant high-entropy alloy coating formed by the above five elements can effectively inhibit the interdiffusion of alloy components and the precipitation of harmful phases at the interface between the substrate and other coatings (especially high-temperature coatings), and improve the high-temperature resistance of the coating. Oxidation ability, while avoiding interdiffusion to reduce the mechanical properties of the substrate and prolong the service life of the parts. If the elements are replaced, such as replacing Co with Ti, such a good diffusion resistance effect cannot be achieved at all.
进一步地,按原子百分比计,阻扩散高熵合金涂层的元素包括Al 15%-30%、Co 15%-30%、Cr 15%-30%、Ni 15%-30%和Mo 15%-30%。高熵合金中元素的用量约为等量,本公开的发明人进一步控制各组分的用量,能够使形成的阻扩散高熵合金涂层为单相固溶体或非晶相结构,保证扩散障成分结构均一,不存在成分偏析或析出相,有利于元素阻扩散。例如,具体地可以选择将Al、Co、Cr、Ni和Mo金属粉末按原子百分比为1:1:1:1:1的比例均匀混合后通过熔炼或粉末冶金制备得到单一合金靶材;可以选择将Al、Co、Cr、Ni和Mo金属粉末按原子百分比为1.1:1.1:1.1:1.1:0.6的比例均匀混合后通过熔炼或粉末冶金制备得到单一合金靶材;可以选择将Al、Co、Cr、Ni和Mo金属粉末按原子百分比为1.1:1.1:1:1:0.8的比例均匀混合后通过熔炼或粉末冶金制备得到单一合金靶材;可以选择将Al、Co、Cr、 Ni和Mo金属粉末按原子百分比为1:1.5:0.75:1:0.75的比例均匀混合后通过熔炼或粉末冶金制备得到单一合金靶材;可以选择将Al、Co、Cr、Ni和Mo金属粉末按原子百分比为0.9:0.9:1:1:1.2的比例均匀混合后通过熔炼或粉末冶金制备得到单一合金靶材;或可以选择将Al、Co、Cr、Ni和Mo金属粉末按原子百分比为0.8:1.1:0.9:1.2:1的比例均匀混合后通过熔炼或粉末冶金制备得到单一合金靶材。Further, in atomic percent, the elements of the diffusion-resistant high-entropy alloy coating include Al 15%-30%, Co 15%-30%, Cr 15%-30%, Ni 15%-30% and Mo 15%- 30%. The amount of elements in the high-entropy alloy is about the same amount. The inventors of the present disclosure further control the amount of each component, so that the formation of the diffusion-resistant high-entropy alloy coating can be a single-phase solid solution or an amorphous phase structure to ensure the diffusion barrier composition. The structure is uniform, and there is no component segregation or precipitation phase, which is beneficial to the diffusion resistance of elements. For example, a single alloy target can be prepared by smelting or powder metallurgy after uniformly mixing Al, Co, Cr, Ni and Mo metal powders at a ratio of 1:1:1:1:1 atomic percentage; Al, Co, Cr, Ni and Mo metal powders are uniformly mixed in a ratio of 1.1:1.1:1.1:1.1:0.6 atomic percentage, and then a single alloy target is prepared by smelting or powder metallurgy; Al, Co, Cr can be selected , Ni and Mo metal powders are uniformly mixed in a ratio of 1.1:1.1:1:1:0.8 atomic percentage, and then a single alloy target is prepared by smelting or powder metallurgy; Al, Co, Cr, Ni and Mo metal powders can be selected. A single alloy target is prepared by smelting or powder metallurgy after uniform mixing in the ratio of atomic percentage of 1:1.5:0.75:1:0.75; Al, Co, Cr, Ni and Mo metal powders can be selected in atomic percentage of 0.9: A single alloy target is prepared by smelting or powder metallurgy after uniform mixing in a ratio of 0.9:1:1:1.2; or Al, Co, Cr, Ni and Mo metal powders can be selected in an atomic percentage of 0.8:1.1:0.9:1.2 A single alloy target is prepared by smelting or powder metallurgy after uniform mixing in the ratio of : 1.
具体地,将Al、Co、Cr、Ni和Mo制备成单一合金靶材,再将单一合金靶材通过磁控溅射或电弧离子镀的方式在基材表面形成阻扩散高熵合金涂层。磁控溅射或电弧离子镀的具体工艺可以参照现有的工艺步骤,其中磁控溅射的方法所形成的成分结构均一的高熵合金涂层,具有更加优异的阻扩散性能。Specifically, Al, Co, Cr, Ni and Mo are prepared into a single alloy target, and then the single alloy target is formed on the surface of the substrate by means of magnetron sputtering or arc ion plating to form a diffusion-resistant high-entropy alloy coating. The specific process of magnetron sputtering or arc ion plating can refer to the existing process steps, wherein the high-entropy alloy coating with uniform composition and structure formed by the method of magnetron sputtering has more excellent diffusion resistance performance.
具体地,基材为高温合金,如铁基高温合金、镍基高温合金或钴基高温合金等常用高温合金材料,本公开实施例对此不做限定。阻扩散高熵合金涂层的厚度为2μm-8μm,优选为2μm-7μm,更优选为2μm-6μm,更优选为2μm-5μm,以及更优选为2μm-4μm。本领域中,通常阻扩散高熵合金涂层的厚度越厚时,其阻扩散性能越好,但越厚的涂层,其重量也会越重。而在本申请中,该厚度范围既能够有效的抑制基材与高温涂层间合金组元互扩散,而且能够保障该高熵合金阻扩散层的可应用性(即,实现了薄涂层也能够实现良好的阻扩散性能,且薄涂层沉积时间不至过长,且对部件增重影响小,即保证了增重小的效果)。当然,在本公开的其他实施例中,涂层的厚度还可以根据需求进行调整,本公开的实施例不做限定。Specifically, the base material is a superalloy, such as a common superalloy material such as iron-based superalloy, nickel-based superalloy, or cobalt-based superalloy, which is not limited in the embodiments of the present disclosure. The thickness of the diffusion barrier high entropy alloy coating is 2 μm-8 μm, preferably 2 μm-7 μm, more preferably 2 μm-6 μm, more preferably 2 μm-5 μm, and more preferably 2 μm-4 μm. In the art, generally, the thicker the diffusion-resistant high-entropy alloy coating, the better its diffusion-resistant performance, but the thicker the coating, the heavier the coating will be. In the present application, this thickness range can not only effectively suppress the interdiffusion of alloy components between the substrate and the high-temperature coating, but also ensure the applicability of the high-entropy alloy diffusion barrier layer (that is, realize the thin coating and Good diffusion resistance performance can be achieved, and the deposition time of the thin coating is not too long, and the influence on the weight gain of the component is small, that is, the effect of small weight gain is guaranteed). Of course, in other embodiments of the present disclosure, the thickness of the coating layer can also be adjusted according to requirements, which is not limited by the embodiments of the present disclosure.
采用磁控溅射的方式形成阻扩散高熵合金涂层时,具体参数如下:背景真空度小于或等于5×10
-3Pa、基材温度100-300℃、靶功率200-300W、基材直流偏压为-100~-500V、占空比60-90%、靶基距10-15cm、工作氩气气压为0.6-0.8Pa、离子源为0.8-1.2A。
When magnetron sputtering is used to form a diffusion-resistant high-entropy alloy coating, the specific parameters are as follows: the background vacuum is less than or equal to 5×10 -3 Pa, the substrate temperature is 100-300°C, the target power is 200-300W, and the substrate temperature is 200-300W. The DC bias voltage is -100--500V, the duty ratio is 60-90%, the target-base distance is 10-15cm, the working argon gas pressure is 0.6-0.8Pa, and the ion source is 0.8-1.2A.
采用电弧离子镀的方式形成阻扩散高熵合金涂层时,具体参数如下:背景真空度小于或等于5×10
-3Pa、基材温度200-400℃、靶电流70-90A、基材直流偏压为-100~-500V、占空比60-90%、靶基距20-30cm、工作氩气气压为1-1.3Pa、永磁强度1500-2000Gs、电磁线圈电压20-30V。
When arc ion plating is used to form a diffusion-resistant high-entropy alloy coating, the specific parameters are as follows: the background vacuum is less than or equal to 5×10 -3 Pa, the substrate temperature is 200-400°C, the target current is 70-90A, the substrate DC The bias voltage is -100--500V, the duty ratio is 60-90%, the target base distance is 20-30cm, the working argon gas pressure is 1-1.3Pa, the permanent magnet strength is 1500-2000Gs, and the electromagnetic coil voltage is 20-30V.
需要说明的是,通过进一步优化磁控溅射和电弧离子镀的工艺参数,使形成的涂层结构致密、成分均匀、抗高温氧化性能更好。通过在上述参数范围内进行高熵合金涂层制备能够有效的保证涂层的综合性能以及阻扩散效果。当然,在本公开的其他实施例中,工艺参数还可以根据需求进行调整,本公开的实施例不做限定。It should be noted that by further optimizing the process parameters of magnetron sputtering and arc ion plating, the formed coating has a dense structure, uniform composition and better high temperature oxidation resistance. By preparing the high-entropy alloy coating within the above parameter range, the comprehensive performance of the coating and the diffusion resistance effect can be effectively guaranteed. Of course, in other embodiments of the present disclosure, process parameters may also be adjusted according to requirements, which are not limited in the embodiments of the present disclosure.
S2、抗高温涂层的形成S2, the formation of high temperature resistant coating
以阻扩散高熵合金涂层材料作为材料本体,在材料本体表面制备抗高温涂层。所形成的耐高温涂层材料中,利用阻扩散高熵合金涂层特有的缓慢扩散效应,并且与基材和抗高 温涂层均具有良好的物理和化学匹配性,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。可以在制备航空发动机或燃气轮机热端部件中得到应用,提升部件服役寿命和工作可靠性。A high-temperature resistant coating is prepared on the surface of the material body by using the diffusion-resistant high-entropy alloy coating material as the material body. The formed high-temperature resistant coating material utilizes the slow diffusion effect unique to the diffusion-resistant high-entropy alloy coating, and has good physical and chemical matching with the substrate and the high-temperature resistant coating, which can effectively inhibit the substrate and the coating. The interdiffusion of interlayer alloy components and the precipitation of harmful phases at the interface improve the high temperature oxidation resistance of the coating. It can be used in the preparation of aero-engine or gas turbine hot-end components to improve the service life and working reliability of components.
具体地,抗高温涂层为PtAl涂层、NiAl涂层、NiAlHf涂层、NiCrAlY涂层、CoCrAlY涂层、NiAlPtNb涂层、NiAlHfRu涂层、CoCrAlYSi涂层、NiCoCrAlYTa涂层、NiCrAlYLaB涂层、NiCoCrAlYHf涂层和NiCoCrAlYTaRe涂层中的任意一种。以上涂层材料均为现有的抗高温涂层,均适合于作为本公开实施例中所提供的抗高温涂层材料的抗高温涂层,与阻扩散高熵合金涂层具有良好的物理和化学匹配性。Specifically, the high temperature resistant coatings are PtAl coating, NiAl coating, NiAlHf coating, NiCrAlY coating, CoCrAlY coating, NiAlPtNb coating, NiAlHfRu coating, CoCrAlYSi coating, NiCoCrAlYTa coating, NiCrAlYLaB coating, NiCoCrAlYHf coating layer and NiCoCrAlYTaRe coating. The above coating materials are all existing high temperature resistant coatings, which are suitable for the high temperature resistant coatings of the high temperature resistant coating materials provided in the embodiments of the present disclosure, and have good physical and chemical compatibility.
具体地,制备抗高温涂层的方法选自磁控溅射、电子束物理气相沉积、电弧离子镀、火焰喷涂、大气等离子喷涂、真空等离子喷涂、冷喷涂、等离子喷涂-物理气相沉积和脉冲电镀中的至少一种。可以为超音速火焰喷涂、低压等离子喷涂等常用涂层形成方法,具体工艺可以参照现有技术记载,在此不做过多赘述。Specifically, the method for preparing the high temperature resistant coating is selected from magnetron sputtering, electron beam physical vapor deposition, arc ion plating, flame spraying, atmospheric plasma spraying, vacuum plasma spraying, cold spraying, plasma spraying-physical vapor deposition and pulse electroplating at least one of them. It can be a common coating formation method such as supersonic flame spraying, low-pressure plasma spraying, etc. The specific process can refer to the prior art records, and will not be repeated here.
以下结合实施例对本公开的特征和性能作进一步的详细描述。The features and properties of the present disclosure will be further described in detail below with reference to the embodiments.
实施例1Example 1
本实施例提供一种耐高温涂层材料的制备方法,其通过以下方法制备得到:The present embodiment provides a preparation method of a high temperature resistant coating material, which is prepared by the following methods:
(1)靶材制备:将Al,Co,Cr,Ni和Mo金属粉末按原子百分比为1:1:1:1:1的比例均匀混合,采用粉末冶金的方法制备成单一合金作为靶材。(1) Target preparation: Al, Co, Cr, Ni and Mo metal powders are uniformly mixed in a ratio of 1:1:1:1:1 atomic percentage, and a single alloy is prepared by powder metallurgy as a target.
(2)基材预处理:以镍基高温合金(N5)为基材,对基材表面进行打磨以及抛光处理,然后分别用丙酮、酒精和去离子水超声清洗,吹干。(2) Substrate pretreatment: Using nickel-based superalloy (N5) as the substrate, the surface of the substrate was ground and polished, and then ultrasonically cleaned with acetone, alcohol and deionized water, respectively, and dried.
(3)阻扩散高熵合金涂层沉积:采用磁控溅射在清洗吹干后的基材表面沉积所述靶材以形成阻扩散高熵合金涂层,其工艺参数为:背景真空度小于5×10
-3Pa,基材温度200℃,靶功率250W,基材直流偏压为-100V、占空比70%,靶基距12cm,工作氩气气压为0.7Pa,离子源为1A。控制涂层厚度为3μm左右。
(3) Diffusion-resistant high-entropy alloy coating deposition: use magnetron sputtering to deposit the target material on the surface of the substrate after cleaning and blowing to form a diffusion-resistant high-entropy alloy coating, and the process parameters are: the background vacuum degree is less than 5×10 -3 Pa, substrate temperature of 200°C, target power of 250W, substrate DC bias of -100V, duty cycle of 70%, target-to-substrate distance of 12cm, working argon pressure of 0.7Pa, and ion source of 1A. The thickness of the control coating is about 3 μm.
(4)抗高温涂层沉积:采用电弧离子镀在阻扩散高熵合金涂层表面沉积厚度约30μm的NiAlHf抗高温涂层,其工艺参数为:背景真空度小于5×10
-3Pa,基材温度350℃,氩气压力2Pa,弧电流120A,直流偏压-100V,占空比70%。NiAlHf涂层的化学成分为:Ni含量68wt.%,Al含量为31wt.%,Hf含量为1wt.%。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。
(4) Deposition of high temperature resistant coating: Arc ion plating is used to deposit NiAlHf high temperature resistant coating with a thickness of about 30 μm on the surface of the diffusion resistance high entropy alloy coating. The process parameters are: the background vacuum is less than 5×10 -3 Pa, the base The material temperature is 350°C, the argon gas pressure is 2Pa, the arc current is 120A, the DC bias voltage is -100V, and the duty ratio is 70%. The chemical composition of the NiAlHf coating is as follows: the Ni content is 68 wt.%, the Al content is 31 wt.%, and the Hf content is 1 wt.%. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例2Example 2
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(3)中,阻扩散高熵合金涂层沉积的磁控溅射工艺参数为:背景真空度小于5×10
-3Pa,基 材温度150℃,靶功率300W,基材直流偏压为-300V、占空比90%,靶基距10cm,工作氩气气压为0.8Pa,离子源为1.2A。控制涂层厚度为4μm。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。
This embodiment provides a method for preparing a high temperature resistant coating material, which is different from Embodiment 1 only in that: in step (3), the magnetron sputtering process parameters for the deposition of the diffusion-resistant high-entropy alloy coating are: background The vacuum degree is less than 5×10 -3 Pa, the substrate temperature is 150°C, the target power is 300W, the substrate DC bias is -300V, the duty cycle is 90%, the target-base distance is 10cm, the working argon gas pressure is 0.8Pa, the ion source is 1.2A. The control coating thickness was 4 μm. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例3Example 3
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(3)中,阻扩散高熵合金涂层沉积的磁控溅射工艺参数为:背景真空度小于5×10
-3Pa,基材温度250℃,靶功率250W,基材直流偏压为-500V、占空比60%,靶基距15cm,工作氩气气压为0.6Pa,离子源为0.8A。控制涂层厚度为2μm。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。
This embodiment provides a method for preparing a high temperature resistant coating material, which is different from Embodiment 1 only in that: in step (3), the magnetron sputtering process parameters for the deposition of the diffusion-resistant high-entropy alloy coating are: background The vacuum degree is less than 5×10 -3 Pa, the substrate temperature is 250°C, the target power is 250W, the substrate DC bias is -500V, the duty cycle is 60%, the target-base distance is 15cm, the working argon gas pressure is 0.6Pa, the ion source is 0.8A. The control coating thickness was 2 μm. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例4Example 4
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(3)中,阻扩散高熵合金涂层沉积采用电弧离子镀技术,工艺参数为:背景真空度小于5×10
-
3Pa,基材温度300℃,靶电流为70A,基材脉冲偏压为-100V、占空比为70%,靶基距为20cm,工作氩气气压为1.3Pa,永磁强度2000Gs,电磁线圈电压为30V。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。
The present embodiment provides a method for preparing a high temperature resistant coating material, which differs from Embodiment 1 only in that: in step (3), the arc ion plating technology is used for the deposition of the diffusion-resistant high-entropy alloy coating, and the process parameters are: The background vacuum is less than 5×10 - 3 Pa, the substrate temperature is 300°C, the target current is 70A, the substrate pulse bias is -100V, the duty cycle is 70%, the target-to-base distance is 20cm, and the working argon gas pressure is 1.3 Pa, permanent magnet strength 2000Gs, electromagnetic coil voltage 30V. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例5Example 5
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(3)中,涂层沉积采用电弧离子镀技术,工艺参数为:背景真空度小于5×10
-3Pa,基材温度350℃,靶电流为90A,基材脉冲偏压为-300V、占空比为90%,靶基距为30cm,工作氩气气压为1Pa,永磁强度1500Gs,电磁线圈电压为25V。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。
The present embodiment provides a method for preparing a high temperature resistant coating material, which is different from Embodiment 1 only in that in step (3), arc ion plating technology is used for coating deposition, and the process parameters are: the background vacuum degree is less than 5 ×10 -3 Pa, substrate temperature is 350℃, target current is 90A, substrate pulse bias is -300V, duty cycle is 90%, target-base distance is 30cm, working argon gas pressure is 1Pa, permanent magnet strength is 1500Gs , the solenoid voltage is 25V. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例6Example 6
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(1)中,所采用的Al、Co、Cr、Ni、Mo金属粉末的原子百分比为1.1:1.1:1.1:1.1:0.6。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。The present embodiment provides a method for preparing a high temperature resistant coating material, which is different from the embodiment 1 only in that in step (1), the atomic percentages of the Al, Co, Cr, Ni, and Mo metal powders used are: 1.1:1.1:1.1:1.1:0.6. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例7Example 7
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤 (2)中,所采用基材材料为钴基高温合金(GH605)。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。This embodiment provides a preparation method of a high temperature resistant coating material, the difference between which is different from that in Embodiment 1 is only that in step (2), the base material used is a cobalt-based superalloy (GH605). The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例8Example 8
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(2)中,所采用基材材料为铁基高温合金(GH706)。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。This embodiment provides a method for preparing a high temperature resistant coating material, which is different from Embodiment 1 only in that in step (2), the substrate material used is an iron-based superalloy (GH706). The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例9Example 9
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(4)中,采用磁控溅射在阻扩散高熵合金涂层表面沉积厚度约20μm的CoCrAlY抗高温涂层,其工艺参数为:背景真空度小于5×10
-3Pa,基材温度150℃,氩气压力0.4Pa,靶电流2.5A,偏压-100V,离子源1.5A。CoCrAlY涂层的化学成分为:Cr含量40wt.%,Al含量为15wt.%,Y含量3wt.%,其余为Co。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。
This embodiment provides a method for preparing a high temperature resistant coating material, which is different from Embodiment 1 only in that in step (4), magnetron sputtering is used to deposit a thickness of about 20 μm on the surface of the diffusion resistance high entropy alloy coating. The process parameters of the CoCrAlY anti-high temperature coating are as follows: the background vacuum is less than 5×10 -3 Pa, the substrate temperature is 150°C, the argon pressure is 0.4Pa, the target current is 2.5A, the bias voltage is -100V, and the ion source is 1.5A. The chemical composition of CoCrAlY coating is: Cr content is 40wt.%, Al content is 15wt.%, Y content is 3wt.%, and the rest is Co. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例10Example 10
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(4)中,采用超音速火焰喷涂制备约40μm的CoCrAlYSi抗高温涂层,工艺参数为:喷枪功率3kW,气体流量:50m3/h,送粉量:5g/min,喷涂距离:300mm。CoCrAlYSi涂层的化学成分为:Cr含量18wt.%,Al含量为12wt.%,Y含量3wt.%,Si含量为1.5wt.%,其余为Ni。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。This embodiment provides a method for preparing a high temperature resistant coating material, which differs from Example 1 only in that: in step (4), a CoCrAlYSi high temperature resistant coating of about 40 μm is prepared by supersonic flame spraying, and the process parameters are: : Spray gun power 3kW, gas flow rate: 50m3/h, powder feeding amount: 5g/min, spraying distance: 300mm. The chemical composition of CoCrAlYSi coating is: Cr content is 18wt.%, Al content is 12wt.%, Y content is 3wt.%, Si content is 1.5wt.%, and the rest is Ni. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例11Example 11
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(1)中,所采用的Al、Co、Cr、Ni、Mo金属粉末的原子百分比为1.1:1.1:1:1:0.8。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。The present embodiment provides a method for preparing a high temperature resistant coating material, which is different from the embodiment 1 only in that in step (1), the atomic percentages of the Al, Co, Cr, Ni, and Mo metal powders used are: 1.1:1.1:1:1:0.8. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例12Example 12
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(1)中,所采用的Al、Co、Cr、Ni、Mo金属粉末的原子百分比为1:1.5:0.75:1:0.75。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层 间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。The present embodiment provides a method for preparing a high temperature resistant coating material, which is different from the embodiment 1 only in that in step (1), the atomic percentages of the Al, Co, Cr, Ni, and Mo metal powders used are: 1:1.5:0.75:1:0.75. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例13Example 13
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(1)中,所采用的Al、Co、Cr、Ni、Mo金属粉末的原子百分比为0.9:0.9:1:1:1.2。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。The present embodiment provides a method for preparing a high temperature resistant coating material, which is different from the embodiment 1 only in that in step (1), the atomic percentages of the Al, Co, Cr, Ni, and Mo metal powders used are: 0.9:0.9:1:1:1.2. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
实施例14Example 14
本实施例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:在步骤(1)中,所采用的Al、Co、Cr、Ni、Mo金属粉末的原子百分比为0.8:1.1:0.9:1.2:1。所得耐高温涂层材料利用阻扩散高熵合金涂层特有的阻扩散效应,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。The present embodiment provides a method for preparing a high temperature resistant coating material, which is different from the embodiment 1 only in that in step (1), the atomic percentages of the Al, Co, Cr, Ni, and Mo metal powders used are: 0.8:1.1:0.9:1.2:1. The obtained high-temperature resistant coating material utilizes the unique resistance-diffusion effect of the resistance-diffusion high-entropy alloy coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high-temperature oxidation resistance of the coating.
对比例1Comparative Example 1
本对比例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:不进行阻扩散高熵合金涂层沉积,直接在镍基高温合金上形成NiAlHf抗高温涂层。This comparative example provides a preparation method of a high temperature resistant coating material, which differs from Example 1 only in that the NiAlHf high temperature resistant coating is directly formed on the nickel-based superalloy without depositing the diffusion-resistant high-entropy alloy coating.
对比例2Comparative Example 2
本对比例提供一种耐高温涂层材料的制备方法,其与实施例1的区别仅在于:将Co金属粉末替换为Ti金属粉末。The present comparative example provides a preparation method of a high temperature resistant coating material, which is different from Example 1 only in that Co metal powder is replaced with Ti metal powder.
试验例1Test Example 1
对实施例1中耐高温涂层材料制备过程中所形成的阻扩散高熵合金涂层进行结构表征,包括扫面电镜和XRD检测,结果见图1中(a)和图1中(b);对实施例2中得到的阻扩散高熵合金涂层进行XRD检测其相结构,如图1中(c)所示。Structural characterization of the diffusion-resistant high-entropy alloy coating formed during the preparation of the high temperature resistant coating material in Example 1, including scanning electron microscopy and XRD detection, the results are shown in Figure 1 (a) and Figure 1 (b) ; The phase structure of the diffusion-resistant high-entropy alloy coating obtained in Example 2 was detected by XRD, as shown in (c) in Figure 1 .
阻扩散高熵合金涂层截面的SEM图如图1中(a)所示,涂层结构致密且成分均匀,采用XRD检测其相结构,如图1中(b)所示,涂层为非晶相。如图1中(c)所示,涂层为单一固溶体相(FCC结构)。The SEM image of the cross-section of the diffusion resistance high-entropy alloy coating is shown in Figure 1 (a), the coating structure is dense and the composition is uniform, and its phase structure is detected by XRD, as shown in Figure 1 (b), the coating is non- crystal phase. As shown in Fig. 1(c), the coating is a single solid solution phase (FCC structure).
试验例2Test Example 2
测试实施例1和对比例1中制备得到耐高温涂层材料的高温界面元素扩散行为,将实施例1和对比例1中得到的高温涂层(NiAlHf)/扩散障(AlCoCrNiMo)/高温合金(N5)样品于1100℃的条件下进行氧化试验,50h后该样品的截面背散射像如图2和图3所示,图2为实施例1中的测试结果,图3为对比例1中的测试结果。The high temperature interface element diffusion behavior of the high temperature resistant coating materials prepared in Example 1 and Comparative Example 1 was tested, and the high temperature coating (NiAlHf)/diffusion barrier (AlCoCrNiMo)/superalloy ( N5) The sample was subjected to an oxidation test at 1100°C. The cross-sectional backscattered images of the sample after 50 hours are shown in Figures 2 and 3. Figure 2 shows the test results in Example 1, and Figure 3 shows the results in Comparative Example 1. Test Results.
图2结果显示,在1100℃氧化50小时后,NiAlHf/AlCoCrNiMo/N5涂层样品未观察到明显的互扩散区以及二次反应区形成,并且无TCP有害相析出。这说明AlCoCrNiMo高熵合金涂层能有效阻止合金元素的互扩散,抑制了由互扩散引起的有害相析出。The results in Fig. 2 show that after 50 hours of oxidation at 1100 °C, no obvious interdiffusion zone and secondary reaction zone were observed in the NiAlHf/AlCoCrNiMo/N5 coating sample, and no TCP harmful phase was precipitated. This shows that the AlCoCrNiMo high-entropy alloy coating can effectively prevent the interdiffusion of alloy elements and inhibit the precipitation of harmful phases caused by interdiffusion.
图3结果显示,在1100℃氧化50小时后,NiAlHf/N5涂层样品存在明显的元素互扩散区,互扩散层下方有二次反应区(SRZ)形成,并析出大量的针状TCP有害相。Figure 3 shows that after 50 hours of oxidation at 1100 °C, the NiAlHf/N5 coating sample has an obvious element interdiffusion zone, a secondary reaction zone (SRZ) is formed under the interdiffusion layer, and a large number of needle-like TCP harmful phases are precipitated .
测试实施例1和对比例1中制备得到耐高温涂层材料的氧化增重曲线如图4所示,其中,NCN为实施例1的测试结果,NN为对比例1的测试结果。由此可以说明,本申请所提供的制备方法能够有效形成AlCoCrNiMo高熵合金阻扩散层,实现高温防护涂层与高温基材之间的阻扩散,提升涂层的抗高温氧化能力。The oxidation weight gain curves of the high temperature resistant coating materials prepared in Test Example 1 and Comparative Example 1 are shown in FIG. 4 , where NCN is the test result of Example 1, and NN is the test result of Comparative Example 1. It can be shown that the preparation method provided in this application can effectively form the AlCoCrNiMo high-entropy alloy diffusion barrier layer, realize the barrier diffusion between the high temperature protective coating and the high temperature substrate, and improve the high temperature oxidation resistance of the coating.
试验例3Test Example 3
测试实施例1和对比例2中制备得到耐高温涂层材料的高温界面元素扩散行为,将实施例1和对比例2中得到的高温涂层(NiAlHf)/扩散障(AlCoCrNiMo)/高温合金(N5)样品和高温涂层(NiAlHf)/扩散障(AlTiCrNiMo)/高温合金(N5)样品于1100℃的条件下进行氧化试验,50h后该样品的截面背散射像如图2和图5所示,图2为实施例1中的测试结果,图5为对比例2中的测试结果。The high temperature interface element diffusion behavior of the high temperature resistant coating materials prepared in Example 1 and Comparative Example 2 was tested, and the high temperature coating (NiAlHf)/diffusion barrier (AlCoCrNiMo)/superalloy ( The N5) sample and the high temperature coating (NiAlHf)/diffusion barrier (AlTiCrNiMo)/superalloy (N5) sample were subjected to oxidation test at 1100 ℃. , FIG. 2 is the test result in Example 1, and FIG. 5 is the test result in Comparative Example 2.
图5结果显示,在1100℃氧化50小时后,NiAlHf/AlTiCrNiMo/N5涂层样品存在明显互扩散区以及二次反应区,析出大量的TCP有害相,说明相比于实施例1,对比例2中的AlTiCrNiMo高熵合金涂层阻扩散效果并不明显。The results in Figure 5 show that after 50 hours of oxidation at 1100 °C, the NiAlHf/AlTiCrNiMo/N5 coating sample has obvious interdiffusion zone and secondary reaction zone, and a large number of TCP harmful phases are precipitated, indicating that compared with Example 1, Comparative Example 2 The AlTiCrNiMo high-entropy alloy coating in the medium has no obvious diffusion resistance effect.
综上所述,本公开提供的一种阻扩散高熵合金涂层材料及其制备方法,其通过利用Al、Co、Cr、Ni和Mo形成阻扩散高熵合金涂层,该阻扩散高熵合金涂层与基材和其他涂层(如高温涂层)均具有良好的物理和化学匹配性,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力,同时避免互扩散导致基材力学性能降低,延长零件的服役寿命,其阻扩散效果相比于传统金属或陶瓷阻扩散材料有明显提升。In summary, the present disclosure provides a diffusion-resistant high-entropy alloy coating material and a preparation method thereof, which form a diffusion-resistant high-entropy alloy coating by using Al, Co, Cr, Ni and Mo, and the diffusion-resistant high-entropy alloy coating is The alloy coating has good physical and chemical matching with the substrate and other coatings (such as high-temperature coatings), which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the resistance of the coating. High temperature oxidation ability, while avoiding mutual diffusion to reduce the mechanical properties of the substrate, prolonging the service life of the parts, its diffusion resistance effect is significantly improved compared to traditional metal or ceramic diffusion resistance materials.
本公开还提供的一种耐高温涂层材料及其制备方法,其通过在基材上形成上述阻扩散高熵合金涂层,再以此为材料本体形成抗高温涂层,利用阻扩散高熵合金涂层特有的缓慢扩散效应,并且与基材和抗高温涂层均具有良好的物理和化学匹配性,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。该方法成熟可靠,重复性好,易于实现大面积工业化生产。The present disclosure also provides a high-temperature resistant coating material and a preparation method thereof. By forming the above-mentioned resistance-diffusion high-entropy alloy coating on a substrate, and then using this as the material body to form a high-temperature resistant coating, the resistance-diffusion high-entropy alloy coating is formed by using the resistance-diffusion high-entropy alloy coating. The alloy coating has a unique slow diffusion effect, and has good physical and chemical matching with the substrate and the high temperature resistant coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, improve the coating performance. high temperature oxidation resistance. The method is mature and reliable, has good repeatability, and is easy to realize large-scale industrial production.
该耐高温涂层材料可以在制备航空发动机或燃气轮机热端部件中得到应用,提升部件服役寿命和工作可靠性。The high temperature resistant coating material can be used in the preparation of aero-engine or gas turbine hot-end components, so as to improve the service life and working reliability of the components.
以上所描述的实施例是本公开一部分实施例,而不是全部的实施例。本公开的实施例的详细描述并非旨在限制要求保护的本公开的范围,而是仅仅表示本公开的选定实施例。基于本公开中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本公开保护的范围。The embodiments described above are some, but not all, embodiments of the present disclosure. The detailed descriptions of the embodiments of the present disclosure are not intended to limit the scope of the disclosure as claimed, but are merely representative of selected embodiments of the disclosure. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present disclosure.
本公开的多阻扩散高熵合金涂层材料及其制备方法,通过利用Al、Co、Cr、Ni和Mo形成阻扩散高熵合金涂层,该该阻扩散高熵合金涂层与基材和其他涂层(如高温涂层)均具有良好的物理和化学匹配性,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力,同时避免互扩散导致基材力学性能降低,延长零件的服役寿命,其阻扩散效果相比于传统金属或陶瓷阻扩散材料有明显提升。本公开的耐高温涂层材料及其制备方法,通过在基材上形成上述阻扩散高熵合金涂层,再以此为材料本体形成抗高温涂层,利用阻扩散高熵合金涂层特有的缓慢扩散效应,并且与基材和抗高温涂层均具有良好的物理和化学匹配性,能够有效抑制基材与涂层间合金组元互扩散以及界面有害相析出,提高涂层抗高温氧化能力。该耐高温涂层材料可以在制备航空发动机或燃气轮机热端部件中得到应用,提升部件服役寿命和工作可靠性。The multi-resistance-diffusion high-entropy alloy coating material and the preparation method thereof of the present disclosure are formed by using Al, Co, Cr, Ni and Mo to form the resistance-diffusion high-entropy alloy coating, the resistance-diffusion high-entropy alloy coating and the substrate and Other coatings (such as high temperature coatings) have good physical and chemical matching, which can effectively inhibit the mutual diffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, improve the high temperature oxidation resistance of the coating, and avoid mutual diffusion. Diffusion leads to a decrease in the mechanical properties of the substrate and prolongs the service life of the parts. Compared with traditional metal or ceramic anti-diffusion materials, its diffusion resistance effect is significantly improved. The high-temperature resistant coating material and the preparation method thereof of the present disclosure are formed by forming the above-mentioned anti-diffusion high-entropy alloy coating on the base material, and then using the high-entropy alloy coating as the material body to form the high-temperature resistant coating, using the unique properties of the anti-diffusion high entropy alloy coating It has slow diffusion effect, and has good physical and chemical matching with the substrate and high temperature resistant coating, which can effectively inhibit the interdiffusion of alloy components between the substrate and the coating and the precipitation of harmful phases at the interface, and improve the high temperature oxidation resistance of the coating. . The high temperature resistant coating material can be used in the preparation of aero-engine or gas turbine hot-end components, so as to improve the service life and working reliability of the components.
Claims (20)
- 一种阻扩散高熵合金涂层材料,其特征在于,其包括基材和阻扩散高熵合金涂层,所述阻扩散高熵合金涂层的元素包括Al、Co、Cr、Ni和Mo。A diffusion-resistant high-entropy alloy coating material is characterized in that it comprises a base material and a diffusion-resistant high-entropy alloy coating, and the elements of the diffusion-resistant high-entropy alloy coating include Al, Co, Cr, Ni and Mo.
- 根据权利要求1所述的阻扩散高熵合金涂层材料,其特征在于,按原子百分比计,所述阻扩散高熵合金涂层的元素包括Al 15%-30%、Co 15%-30%、Cr 15%-30%、Ni 15%-30%和Mo 15%-30%。The diffusion-resistant high-entropy alloy coating material according to claim 1, wherein, in atomic percent, the elements of the diffusion-resistant high-entropy alloy coating include Al 15%-30%, Co 15%-30% , Cr 15%-30%, Ni 15%-30% and Mo 15%-30%.
- 权利要求1或2所述的阻扩散高熵合金涂层材料,其特征在于,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为1:1:1:1:1。The diffusion-resistant high-entropy alloy coating material according to claim 1 or 2, wherein the Al, Co, Cr, Ni and Mo of the diffusion-resistant high-entropy alloy coating are in a ratio of 1:1 by atomic percentage: 1:1:1.
- 权利要求1或2所述的阻扩散高熵合金涂层材料,其特征在于,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为1.1:1.1:1.1:1.1:0.6。The barrier-diffusion high-entropy alloy coating material of claim 1 or 2, wherein the ratio of Al, Co, Cr, Ni and Mo in the barrier-diffusion high-entropy alloy coating is 1.1:1.1: 1.1:1.1:0.6.
- 权利要求1或2所述的阻扩散高熵合金涂层材料,其特征在于,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为1.1:1.1:1:1:0.8。The barrier-diffusion high-entropy alloy coating material of claim 1 or 2, wherein the ratio of Al, Co, Cr, Ni and Mo in the barrier-diffusion high-entropy alloy coating is 1.1:1.1: 1:1:0.8.
- 权利要求1或2所述的阻扩散高熵合金涂层材料,其特征在于,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为1:1.5:0.75:1:0.75。The diffusion-resistant high-entropy alloy coating material of claim 1 or 2, wherein the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 1:1.5: 0.75:1:0.75.
- 权利要求1或2所述的阻扩散高熵合金涂层材料,其特征在于,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为0.9:0.9:1:1:1.2。The diffusion-resistant high-entropy alloy coating material according to claim 1 or 2, wherein the ratio of Al, Co, Cr, Ni and Mo in the diffusion-resistant high-entropy alloy coating is 0.9:0.9: 1:1:1.2.
- 权利要求1或2所述的阻扩散高熵合金涂层材料,其特征在于,所述阻扩散高熵合金涂层的Al、Co、Cr、Ni和Mo按原子百分比的比例为0.8:1.1:0.9:1.2:1。The diffusion-resistant high-entropy alloy coating material according to claim 1 or 2, wherein the Al, Co, Cr, Ni and Mo of the diffusion-resistant high-entropy alloy coating are in an atomic percentage ratio of 0.8:1.1: 0.9:1.2:1.
- 权利要求1-8中任一项所述的阻扩散高熵合金涂层材料,其特征在于,所述阻扩散高熵合金涂层材料为单相固溶体或非晶相结构。The diffusion-resistant high-entropy alloy coating material according to any one of claims 1 to 8, wherein the diffusion-resistant high-entropy alloy coating material is a single-phase solid solution or an amorphous phase structure.
- 权利要求1-9中任一项所述的阻扩散高熵合金涂层材料,其特征在于,所述基材为高温合金;更优选地,所述基材为铁基高温合金、镍基高温合金或钴基高温合金。The diffusion-resistant high-entropy alloy coating material according to any one of claims 1-9, wherein the base material is a superalloy; more preferably, the base material is an iron-based superalloy, a nickel-based high-temperature alloy Alloys or cobalt-based superalloys.
- 一种制备权利要求1-10中任一项所述的阻扩散高熵合金涂层材料的制备方法,其特征在于,包括:在所述基材表面形成所述阻扩散高熵合金涂层。A preparation method for preparing the diffusion-resistant high-entropy alloy coating material according to any one of claims 1-10, characterized in that, comprising: forming the diffusion-resistant high-entropy alloy coating on the surface of the substrate.
- 根据权利要求11所述的制备方法,其特征在于,所述在所述基材表面形成所述阻扩散高熵合金涂层包括将Al、Co、Cr、Ni和Mo制备成单一合金靶材,再将所述单一合金靶材通过磁控溅射或电弧离子镀的方式在基材表面形成所述阻扩散高熵合金涂层。The preparation method according to claim 11, wherein the forming the diffusion-resistant high-entropy alloy coating on the surface of the substrate comprises preparing Al, Co, Cr, Ni and Mo into a single alloy target, Then, the single alloy target is formed on the surface of the substrate by magnetron sputtering or arc ion plating to form the diffusion-resistant high-entropy alloy coating.
- 根据权利要求12所述的制备方法,其特征在于,所述单一合金靶材是通过熔炼或粉末冶金的方式进行制备。The preparation method according to claim 12, wherein the single alloy target is prepared by smelting or powder metallurgy.
- 根据权利要求11-13中任一项所述的制备方法,其特征在于,所述阻扩散高熵合金涂层的厚度为2μm-8μm,优选为2μm-7μm,更优选为2μm-6μm,更优选为2μm- 5μm,以及更优选为2μm-4μm。The preparation method according to any one of claims 11-13, wherein the thickness of the diffusion-resistant high-entropy alloy coating is 2 μm-8 μm, preferably 2 μm-7 μm, more preferably 2 μm-6 μm, and more It is preferably 2 μm to 5 μm, and more preferably 2 μm to 4 μm.
- 根据权利要求11-14中任一项所述的制备方法,其特征在于,采用磁控溅射的方式形成所述阻扩散高熵合金涂层时,是在背景真空度小于或等于5×10 -3Pa、基材温度100-300℃的条件下进行; The preparation method according to any one of claims 11-14, characterized in that, when the diffusion resistance high-entropy alloy coating is formed by means of magnetron sputtering, the background vacuum degree is less than or equal to 5×10 -3 Pa, substrate temperature 100-300℃;优选地,靶功率200-300W、基材直流偏压为-100~-500V、占空比60-90%、靶基距10-15cm、工作氩气气压为0.6-0.8Pa、离子源为0.8-1.2A。Preferably, the target power is 200-300W, the DC bias of the substrate is -100--500V, the duty cycle is 60-90%, the target-base distance is 10-15cm, the working argon gas pressure is 0.6-0.8Pa, and the ion source is 0.8 -1.2A.
- 根据权利要求11-14中任一项所述的制备方法,其特征在于,采用电弧离子镀的方式形成所述阻扩散高熵合金涂层时,是在背景真空度小于或等于5×10 -3Pa、基材温度200-400℃的条件下进行; The preparation method according to any one of claims 11-14, characterized in that, when forming the diffusion-resistant high-entropy alloy coating by means of arc ion plating, the background vacuum degree is less than or equal to 5×10 − 3 Pa, under the conditions of substrate temperature 200-400 ℃;优选地,靶电流70-90A、基材直流偏压为-100~-500V、占空比60-90%、靶基距20-30cm、工作氩气气压为1-1.3Pa、永磁强度1500-2000Gs、电磁线圈电压20-30V。Preferably, the target current is 70-90A, the DC bias of the substrate is -100--500V, the duty cycle is 60-90%, the target-base distance is 20-30cm, the working argon gas pressure is 1-1.3Pa, and the permanent magnet strength is 1500 -2000Gs, solenoid voltage 20-30V.
- 根据权利要求11-16中任一项所述的制备方法,其特征在于,还包括:在所述基材表面形成所述阻扩散高熵合金涂层之前,对所述基材进行预处理,所述预处理包括:对基材表面进行打磨以及抛光处理,然后分别用丙酮、酒精和去离子水超声清洗,吹干。The preparation method according to any one of claims 11-16, further comprising: pre-processing the substrate before forming the diffusion-resistant high-entropy alloy coating on the surface of the substrate, The pretreatment includes: grinding and polishing the surface of the substrate, then ultrasonic cleaning with acetone, alcohol and deionized water respectively, and drying.
- 一种耐高温涂层材料,其特征在于,包括材料本体和涂覆于所述材料本体上的抗高温涂层,其中,所述材料本体为权利要求1-10中任一项所述的阻扩散高熵合金涂层材料或权利要求11-17中任一项所述的制备方法制备得到的阻扩散高熵合金涂层材料;A high temperature resistant coating material, characterized in that it comprises a material body and a high temperature resistant coating applied on the material body, wherein the material body is the resistance of any one of claims 1-10 A diffusion-resistant high-entropy alloy coating material or a diffusion-resistant high-entropy alloy coating material prepared by the preparation method according to any one of claims 11-17;优选地,所述抗高温涂层为PtAl涂层、NiAl涂层、NiAlHf涂层、NiCrAlY涂层、CoCrAlY涂层、NiAlPtNb涂层、NiAlHfRu涂层、CoCrAlYSi涂层、NiCoCrAlYTa涂层、NiCrAlYLaB涂层、NiCoCrAlYHf涂层和NiCoCrAlYTaRe涂层中的任意一种。Preferably, the high temperature resistant coating is PtAl coating, NiAl coating, NiAlHf coating, NiCrAlY coating, CoCrAlY coating, NiAlPtNb coating, NiAlHfRu coating, CoCrAlYSi coating, NiCoCrAlYTa coating, NiCrAlYLaB coating, Any of NiCoCrAlYHf coating and NiCoCrAlYTaRe coating.
- 权利要求18所述耐高温涂层材料的制备方法,其特征在于,包括在所述材料本体表面制备所述抗高温涂层;The method for preparing a high temperature resistant coating material according to claim 18, characterized by comprising preparing the high temperature resistant coating on the surface of the material body;优选地,制备所述抗高温涂层的方法选自磁控溅射、电子束物理气相沉积、电弧离子镀、火焰喷涂、大气等离子喷涂、真空等离子喷涂、冷喷涂、等离子喷涂-物理气相沉积和脉冲电镀中的至少一种。Preferably, the method for preparing the high temperature resistant coating is selected from magnetron sputtering, electron beam physical vapor deposition, arc ion plating, flame spraying, atmospheric plasma spraying, vacuum plasma spraying, cold spraying, plasma spraying-physical vapor deposition and At least one of pulse plating.
- 权利要求18中所述耐高温涂层材料或权利要求19中所述制备方法制备得到的耐高温涂层材料在制备航空发动机或燃气轮机热端部件中的应用。Application of the high temperature resistant coating material described in claim 18 or the high temperature resistant coating material prepared by the preparation method described in claim 19 in the preparation of aero-engine or gas turbine hot-end components.
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