WO2022038690A1

WO2022038690A1 - Vibration transmission suppression device

Info

Publication number: WO2022038690A1
Application number: PCT/JP2020/031172
Authority: WO
Inventors: 多聞山▲崎▼
Original assignee: 三菱電機株式会社
Priority date: 2020-08-18
Filing date: 2020-08-18
Publication date: 2022-02-24
Also published as: JPWO2022038690A1; JP7321381B2

Abstract

A vibration transmission suppression device (100) comprises a plurality of unit cells (10a-10f) that are provided between a support target and a base surface, which receives forced displacement, and are connected in series in a vibration transmission direction (400). Each of the plurality of unit cells (10a-10f) has an elongated shape extending in a first direction intersecting with the vibration transmission direction (400) and includes a partition wall (20) that forms a closed cross section (11) and a fluid (30) that is filled in a space enclosed by the partition wall (20). The partition wall (20) has a structure to cause a change in the area of the closed cross section (11) in response to load applied in the vibration transmission direction (400); at least one end section (21) of the both end sections in the first direction is open; and adjacent unit cells (10a-10f) contact each other through the partitions (20).

Description

Vibration propagation suppression device

This disclosure relates to a vibration propagation suppressing device.

The vibration propagation suppression device is used for the purpose of protecting the precision equipment from vibration and impact applied from the outside when installing the precision equipment. A vibration propagation suppressing device is a device generally provided with a material or member having elasticity, and is arranged between a source of vibration or impact and a precision instrument to alleviate the vibration or impact to the precision instrument.

As one form of the vibration propagation suppressing device, it is known to utilize the band stop effect of blocking the propagation of vibration in a wide band by the periodic arrangement of fluid machine elements having inertia in addition to elasticity. This is inspired by a band-stop filter used for removing the band of electromagnetic waves, and by forming a periodic structure, it is possible to obtain a vibration propagation suppression device that suppresses the propagation of elastic waves in a wide frequency band. The performance evaluation indexes of the vibration propagation suppressing device having such a periodic structure are low frequency band, wide range, and low response in the frequency band in which the band stop effect appears. Therefore, in the preceding example, the material of the fluid machine element is selected, the shape and the periodic arrangement method are devised, and the performance improvement of these is pursued.

Patent Document 1 discloses a uniaxial vibration propagation suppressing device in which fluid mechanical elements are periodically arranged in the vibration propagation direction. In the fluid machine element, two volume chambers are coaxially arranged with an orifice provided with an intermediate mass interposed therebetween, and the inside is filled with a fluid. Further, the intermediate masses arranged on the fluid machine element are connected by an elastic body in the vibration propagation direction. When an external load is input to the vibration propagation suppression device, the volume chamber of the fluid mechanical element expands and contracts in the axial direction, and the internal fluid flows through the orifice. At this time, the fluid is accelerated because the fluid flows through the narrow orifice, and the mass of the fluid mechanical element is increased when viewed from the load side, which produces a fluid mass effect. Due to the periodic arrangement of the fluid mechanical elements including this fluid mass effect, the vibration propagation suppression device described in Patent Document 1 stops while maintaining the external dimensions of the device with respect to the vibration propagation suppression device formed only by the conventional mechanical system. It is possible to realize low frequency, wide area, and low response of the band.

International Publication No. 2019/0664669

In Patent Document 1, mechanical displacement is converted into fluid flow, and at that time, the fluid is flowed to a narrow orifice to amplify the fluid mass effect and realize low frequency, wide area, and low response of band stop. is doing. In order to realize this performance, the fluid mechanical element described in Patent Document 1 has a fluid filling region formed by upper and lower volume chambers and an orifice as a closed space, and the fluid flow is concentrated on the orifice. However, due to the requirement that the fluid filling region be a closed space, it becomes necessary to combine independent parts such as a volume chamber, a flange, and an intermediate mass to close the space, and accompanying this, the fluid machine elements also become mutually exclusive. It is necessary to connect by welding or bolting as an independent part. As a result, the vibration propagation suppressing device described in Patent Document 1 has a complicated structure, which causes a practical problem that the number of parts increases.

The present disclosure has been made in view of the above, and an object of the present disclosure is to provide a vibration propagation suppressing device having a small number of parts.

In order to achieve the above object, the vibration propagation suppressing device according to the present disclosure is a plurality of unit cells installed in series in the vibration propagation direction between the supporting object and the foundation surface subject to forced displacement. Each of the plurality of unit cells has a shape extending in a first direction intersecting the vibration propagation direction, and has a partition wall forming a closed cross section and a fluid filled in a space surrounded by the partition wall. The partition wall has a structure that causes an area change of a closed cross section with respect to a load applied in the vibration propagation direction, and at least one end of both ends in the first direction is opened, and the adjacent unit cell is , External to each other with partition walls.

According to the present disclosure, a component is provided by having a partition wall having a shape extending in a first direction intersecting the vibration propagation direction and forming a closed cross section, and a fluid filled in a space surrounded by the partition wall. It is possible to provide a vibration propagation suppressing device having a small number of points.

The figure which shows the vibration propagation suppression apparatus which concerns on Embodiment 1. A perspective view showing the vibration propagation suppressing device according to the first embodiment. A perspective view showing the vibration propagation suppressing device according to the second embodiment. A perspective view showing the vibration propagation suppressing device according to the third embodiment. The figure which shows the vibration propagation suppression apparatus which concerns on Embodiment 3. A perspective view showing the vibration propagation suppressing device according to the fourth embodiment. The figure which shows the vibration propagation suppression apparatus which concerns on Embodiment 4. A perspective view showing the vibration propagation suppressing device according to the fifth embodiment. Sectional drawing which shows the vibration propagation suppression apparatus which concerns on Embodiment 6. A perspective view showing the vibration propagation suppressing device according to the seventh embodiment. Top view showing the vibration propagation suppression device according to the seventh embodiment. FIG. 11 is a cross-sectional view taken along the line XII-XII. Cross-sectional view of XIII-XIII in FIG. The figure which shows the vibration propagation suppression apparatus which concerns on a modification.

Hereinafter, the vibration propagation suppressing device according to the embodiment for carrying out the present disclosure will be described with reference to the drawings.

(Embodiment 1)
As shown in FIG. 1, the vibration propagation suppressing device 100 according to the first embodiment includes a plurality of unit cells 10a to 10f installed in series in a vibration propagation direction 400, and is a supported object. It is placed between a precision instrument 200 and a foundation surface 300 that is subject to forced displacement. The precision instrument 200 is supported by the vibration propagation suppressing device 100 on the foundation surface 300. The vibration propagation suppression device 100, the precision equipment 200 to be supported, and the foundation surface 300 form a vibration isolation system. As shown in FIG. 2, each of the plurality of unit cells 10a to 10f has a shape extending in the first direction intersecting the vibration propagation direction 400, and forms a closed cross section 11 perpendicular to the first direction. It has 20 and a fluid 30 filled in a space surrounded by a partition wall 20. The shape extending in the first direction is a shape in which a cross section cut in a plane perpendicular to the first direction has a closed closed cross section 11, and the cross section 12 of the partition wall 20 is an ellipse, a circle, or a polygon. Includes any shape. In the first embodiment, the vibration propagation suppressing device 100 having an elliptical cross section 12 will be described. Further, the first direction intersecting the vibration propagation direction 400 will be described as a direction orthogonal to the vibration propagation direction 400, but the first direction may be a direction intersecting the vibration propagation direction 400 and is orthogonal to the direction. Not limited to. Further, FIG. 1 shows a case where the number of unit cells 10 is 6, but if vibration propagation is suppressed between the precision instrument 200 and the foundation surface 300, the number of unit cells 10 is multiple. But it may be.

To facilitate understanding, set xyz coordinates that are orthogonal to each other and refer to them as appropriate. The vibration propagation direction 400 is set as the z direction, the first direction in which the unit cells 10a to 10f extend is set as the x direction, and the directions perpendicular to the x direction and the z direction are set as the y direction.

The unit cells 10a to 10f have a partition wall 20 having a uniform cross section 12 and an elliptical cylinder shape extending in the x direction, and a fluid 30 filled in a space surrounded by the partition wall 20. The vibration propagation suppressing device 100 is a periodic structure in which a plurality of unit cells 10a to 10f are arranged in series in the vibration propagation direction 400. The unit cells 10a to 10f are connected to the adjacent unit cells 10a to 10f on the outside of the partition wall 20. That is, the adjacent unit cells 10a to 10f circumscribe each other at the partition wall 20. The unit cells 10b to 10e located in the middle stage of the periodic structure by a plurality of arrangements in series are combined with two adjacent unit cells 10a to 10f. Further, the unit cell 10a in the first stage is combined with one adjacent unit cell 10b, and the unit cell 10f in the final stage is combined with one adjacent unit cell 10e.

The partition wall 20 is made of an elastic body containing metal or resin, and causes an area change of the closed cross section 11 with respect to a load applied in the vibration propagation direction 400, and is flexible to return to its original shape when the load is removed. Has. The closed cross section 11 is a plane perpendicular to the x direction. The thickness of the partition wall 20 is uniform, and the cross-sectional shape of the partition wall 20 is uniform in the first direction. At least one end 21 of both ends of the partition wall 20 in the x direction is open.

The fluid 30 is a fluid containing water, silicone oil or superfluid helium. When an external force that causes in-plane deformation is applied to the unit cell 10, the filled fluid 30 is pushed out in the out-of-plane direction 13. As the fluid 30, it is preferable to use a fluid having a high density in order to maximize the fluid mass effect described later and realize low frequency, wide area, and low response of the stop band. Further, when the fluid 30 flows in the out-of-plane direction 13, friction damping occurs due to the relative speed with the partition wall 20, so that the friction damping is reduced and the flow of the fluid 30 is increased, so that the viscosity of the fluid 30 is small. It is preferably water or a low-viscosity fluid of water or less, and the kinematic viscosity is preferably 1 mm ² / s or less. When a liquid is used as the fluid 30, the vibration propagation suppressing device 100 may be used in a place where the fluid 30 is filled. By doing so, when the load applied to the partition wall 20 is removed from the fluid 30 extruded in the out-of-plane direction 13, the extruded fluid 30 returns to the space surrounded by the partition wall 20. Further, when air is used as the fluid 30, it is preferable to reduce the opening provided at one end 21 of the partition wall 20 in order to increase the reaction force due to the air.

Next, the operation of the vibration propagation suppression device 100 described above will be described.

The vibration propagation suppression device 100 is arranged in the load transmission path between the precision instrument 200 and the foundation surface 300 shown in FIG. Therefore, the effect that the load input to the first-stage unit cell 10a does not propagate to the final-stage unit cell 10f, and conversely the effect that the load input to the final-stage unit cell 10f does not propagate to the first-stage unit cell 10a. Have. When a dynamic forced displacement in the vibration propagation direction 400 is applied to the first-stage unit cell 10a, the area of the closed cross section 11 changes due to the flexibility of the partition wall 20 of the first-stage unit cell 10a. , The fluid 30 is extruded in the out-of-plane direction 13 of the closed cross section 11. At this time, the elastic force due to the flexibility of the partition wall 20, the inertial force due to the acceleration motion of the partition wall 20 and the fluid 30 in the vibration propagation direction 400, and the inertial force due to the acceleration motion of the fluid 30 in the out-of-plane direction 13 are three. Two forces are generated as reaction forces against forced displacement. Of these, the effect of expanding the inertial force due to the acceleration motion of the third fluid 30 in the out-of-plane direction 13 is called the fluid mass effect, and has the effect of actually producing an inertial force equal to or greater than the mass of the unit cells 10a to 10f. Have.

The vibration propagation suppressing device 100, which is a periodic structure including unit cells 10a to 10f having elasticity and inertia, has an effect of suppressing the propagation of elastic waves of a specific frequency. This effect is called the band stop effect. The frequency band of elastic waves whose propagation is suppressed is called a stop band. For the stopband, the dispersion relation between the wave number κ (rad / m) and the frequency ω (rad / s) of the elastic wave propagating in the vibration propagation suppression device 100 is derived by theoretical analysis, and prediction and design are carried out.

The vibration propagation suppression device 100 having the above configuration includes a plurality of unit cells 10a to 10f having a fluid 30 filled in the space surrounded by the partition wall 20, so that the load input to the first-stage unit cell 10a is final. It has the effect of not propagating to the unit cell 10f of the first stage, and conversely, the load input to the unit cell 10f of the final stage does not propagate to the unit cell 10a of the first stage. As a result, the vibration propagation suppressing device 100 has the effect that vibration does not propagate from the foundation surface 300 that receives the forced displacement to the precision instrument 200 that is the support target. Further, the effect of expanding the inertial force due to the acceleration motion of the fluid 30 in the out-of-plane direction 13 is called the fluid mass effect, and has an effect of actually producing an inertial force equal to or larger than the mass of the unit cells 10a to 10f. Since the unit cells 10a to 10f are periodic structures having elasticity and inertia, a band-stop effect of suppressing the propagation of elastic waves of a specific frequency can be obtained. Since the unit cells 10a to 10f have a uniform cross-section 12, the unit cells 10a to 10f have a uniform cross-sectional structure as a whole periodic structure, and thus can be manufactured as an integral structure by wire electric discharge machining. Further, the same period structure can be integrally formed by using a three-dimensional printer. By making such a fluid filling region a closed cross section, it is possible to obtain the effect of reducing the number of parts, downsizing, simplification, and manufacturing cost while obtaining the fluid mass effect.

On the other hand, in order to obtain the fluid mass effect by the structure in which the fluid filling region is a closed space, the closed space makes it impossible for external processing tools to access, and the internal shape of the closed space is integrated. It is difficult to manufacture in. Therefore, for the closed space, it is necessary to manufacture the volume chamber, the lid and the orifice as separate parts, and weld or bolt them together to form the closed space. Therefore, the structure in which the fluid filling region is a closed space has a problem that the number of parts is large, the structure is complicated, and it takes time and effort to manufacture.

(Embodiment 2)
In the vibration propagation suppression device 100 according to the first embodiment, an example including a partition wall 20 having a tubular shape having a uniform thickness has been described. As a result, the entire partition wall 20 is flexible, and the vibration propagation suppressing device 100 tends to buckle with respect to a load in the vibration propagation direction 400, so that it becomes unstable depending on the size or mass of the precision instrument 200. May be. The vibration propagation suppression device 100 according to the second embodiment solves such an unstable state, and specifically, as shown in FIG. 3, a first rigid body arranged facing each other. It comprises a partition wall 20 having a wall 22 and a second rigid wall 23, and a first flexible wall 24 and a second flexible wall 25 connecting the first rigid wall 22 and the second rigid wall 23. ..

The partition wall 20 is connected to the first rigid body wall 22, the second rigid body wall 23, the first flexible wall 24, and the second flexible wall 25, has a uniform cross section, and extends in the x direction. It has a hollow flat tubular shape. The space surrounded by the partition wall 20 is filled with the fluid 30. Further, although FIG. 3 shows a case where the number of unit cells 10 is 6, the number of unit cells 10 may be any number as long as vibration propagation is suppressed.

The first rigid body wall 22 and the second rigid body wall 23 are made of metal or resin, have a flat plate shape perpendicular to the z direction, and are arranged parallel to each other. The thickness t1 of the first rigid body wall 22 and the thickness t2 of the second rigid body wall 23 are smaller than the distance d1 between the first rigid body wall 22 and the second rigid body wall 23. The first rigid body wall 22 of the unit cells 10a to 10e is coupled to the second rigid body wall 23 of the adjacent unit cells 10b to 10f. That is, the first rigid body wall 22 of one of the adjacent unit cells 10a to 10f of the unit cells 10a to 10e and the second rigid body wall 23 of the other unit cells 10b to 10f are circumscribed. For example, the first rigid body wall 22 of one unit cell 10a and the second rigid body wall 23 of the other unit cell 10b are circumscribed. As a result, the unit cells 10a to 10e are stably combined with each other. The thickness t1 of the first rigid body wall 22 may be the same as or different from the thickness t2 of the second rigid body wall 23.

The first flexible wall 24 and the second flexible wall 25 are made of an elastic body containing metal or resin, and have a curved surface shape that is convex outward with the space formed by the partition wall 20 inside. The first flexible wall 24 and the second flexible wall 25 have the flexibility to change the area of the closed cross section 11 with respect to the applied load and return to the original shape when the load is removed. The thickness t3 of the first flexible wall 24 and the thickness t4 of the second flexible wall 25 are smaller than the thickness t1 of the first rigid body wall 22 and the thickness t2 of the second rigid body wall 23. Therefore, even if the first flexible wall 24 and the second flexible wall 25 are made of the same metal or resin as the first rigid body wall 22 and the second rigid body wall 23, the first flexible wall wall 24 and the second rigid body wall 25 are made of the same metal or resin. The flexible wall 24 and the second flexible wall 25 can have flexibility. It is preferable that the thickness t3 of the first flexible wall 24 and the thickness t4 of the second flexible wall 25 are the same. Further, the first flexible wall 24 connects one end portion 22a of the first rigid body wall 22 and one end portion 23a of the second rigid body wall 23, and the second flexible wall 25 is the first rigid body. The other end 22b of the wall 22 and the other end 23b of the second rigid wall 23 are connected. As a result, the first flexible wall 24 and the second flexible wall 25 are arranged apart from each other, so that the moment arm can be secured and the bending rigidity of the unit cells 10a to 10e is improved. Further, since the thickness t3 of the first flexible wall 24 and the thickness t4 of the second flexible wall 25 are the same, the first flexible wall 24 and the second flexible wall 25 are evenly distributed. It is possible to prevent the first rigid body wall 22 and the second rigid body wall 23 from inclining in the z direction. As a result, the bending rigidity of the vibration propagation suppressing device 100 as a whole is improved, buckling can be suppressed, and structural stability is improved.

(Embodiment 3)
In the vibration propagation suppressing device 100 according to the second embodiment, in order to improve the structural stability, the vibration propagation suppressing device 100 is arranged with the first rigid body wall 22 and the second rigid body wall 23 facing each other, and the second rigid body wall 23. An example including a partition wall 20 having a first flexible wall 24 and a second flexible wall 25 connecting the rigid body wall 22 of 1 and the second rigid body wall 23 has been described. On the other hand, the vibration propagation suppressing device 100 according to the third embodiment is formed by the partition wall 20 as shown in FIG. 4 while following the basic structure of the vibration propagation suppressing device 100 according to the second embodiment. The structure is such that the area of the closed cross section 11 is relatively small.

The partition wall 20 is connected to the first rigid body wall 22, the second rigid body wall 23, the first flexible wall 24, and the second flexible wall 25, has a uniform cross section, and extends in the x direction. It has a flat tubular shape. The space surrounded by the partition wall 20 is filled with the fluid 30. The closed cross section 11 formed by the partition wall 20 has an H shape when viewed in the x direction. Further, although FIG. 4 shows a case where the number of unit cells 10 is 6, the number of unit cells 10 may be any number as long as vibration propagation is suppressed.

The first rigid body wall 22 and the second rigid body wall 23 are made of metal or resin, have a flat plate shape perpendicular to z, and are arranged parallel to each other. As shown in FIG. 5, the thickness t5 of the first rigid body wall 22 and the thickness t6 of the second rigid body wall 23 are larger than the distance d2 between the first rigid body wall 22 and the second rigid body wall 23. The thickness t5 of the first rigid body wall 22 and the thickness t6 of the second rigid body wall 23 are preferably at least twice the interval d2. By manufacturing the partition wall 20 by wire electric discharge machining, it is possible to easily obtain a partition wall 20 having a small distance d2 between the first rigid body wall 22 and the second rigid body wall 23. As a result, the area of the closed cross section 11 shown in FIG. 4 formed by the partition wall 20 can be made relatively small. The thickness t5 of the first rigid body wall 22 may be the same as or different from the thickness t6 of the second rigid body wall 23.

The first flexible wall 24 and the second flexible wall 25 are made of an elastic body containing metal or resin, and have a curved surface shape that is convex outward with the space formed by the partition wall 20 inside. The first flexible wall 24 and the second flexible wall 25 have the flexibility to change the area of the closed cross section 11 with respect to the applied load and return to the original shape when the load is removed. The thickness t7 of the first flexible wall 24 and the thickness t8 of the second flexible wall 25 are smaller than the thickness t5 of the first rigid body wall 22 and the thickness t6 of the second rigid body wall 23. Therefore, even if the first flexible wall 24 and the second flexible wall 25 are made of the same metal or resin as the first rigid body wall 22 and the second rigid body wall 23, the first flexible wall wall 24 and the second rigid body wall 25 are made of the same metal or resin. The flexible wall 24 and the second flexible wall 25 can have flexibility. It is preferable that the thickness t5 of the first flexible wall 24 and the thickness t6 of the second flexible wall 25 are the same. Further, the first flexible wall 24 connects one end portion 22a of the first rigid body wall 22 and one end portion 23a of the second rigid body wall 23, and the second flexible wall 25 is the first rigid body. The other end 22b of the wall 22 and the other end 23b of the second rigid wall 23 are connected.

The closed cross section 11 shown in FIG. 4 is such that the thickness t5 of the first rigid body wall 22 and the thickness t6 of the second rigid body wall 23 are larger than the distance d2 between the first rigid body wall 22 and the second rigid body wall 23. The area of can be made relatively small. By making the area of the closed cross section relatively small, an external force is applied to the vibration propagation suppressing device 100 in the vibration propagation direction 400, so that the acceleration received by the fluid 30 in the x direction increases. As a result, the inertial force of the fluid 30 is increased, and the fluid mass effect can be enhanced. As a result, the stopband effect of the vibration propagation suppressing device 100 according to the third embodiment has further low frequency and wide area as compared with the vibration propagation suppressing device 100 according to the second embodiment. The unit cells 10a to 10f included in the vibration propagation suppressing device 100 according to the third embodiment have a uniform cross section 12, and the distance d2 between the first rigid body wall 22 and the second rigid body wall 23 is relative to each other. Because it is small, it can be easily manufactured by wire electric discharge machining as an integrated structure.

(Embodiment 4)
In the vibration propagation suppression device 100 according to the third embodiment, the fluid 30 is x by applying an external force to the vibration propagation suppression device 100 in the vibration propagation direction 400 by making the area of the closed cross section 11 relatively small. An example in which the acceleration received in the direction increases and a larger fluid mass effect is obtained has been described. In this case, when an external force is applied to the unit cells 10a to 10f in the vibration propagation direction 400, the first flexible wall 24 and the second flexible wall 25 exhibit a deformation that swells outward. As a result, the gap between the first flexible wall 24, one end 22a of the first rigid wall 22 and the one end 23a of the second rigid wall 23, and the second flexible wall 25, The gap between the other end 22b of the first rigid wall 22 and the other end 23b of the second rigid wall 23 is widened, the amount of fluid 30 moving in the x direction is reduced, and a sufficient fluid mass effect is obtained. It may be difficult to get rid of.

On the other hand, in the vibration propagation suppressing device 100 according to the fourth embodiment, as shown in FIGS. 6 and 7, the first flexible wall 24 and the second flexible wall 24 having a curved surface shape convex in the directions facing each other are possible. It has a flexible wall 25. In this case, when an external force is applied to the unit cells 10a to 10f in the vibration propagation direction 400, the first flexible wall 24 and the second flexible wall 25 exhibit further constricted deformation. As a result, the gap between the first flexible wall 24, one end 22a of the first rigid wall 22 and the one end 23a of the second rigid wall 23, and the second flexible wall 25, The gap between the other end 22b of the first rigid wall 22 and the other end 23b of the second rigid wall 23 is narrowed, and deformation occurs that further reduces the area of the closed cross section 11 shown in FIG. As a result, the amount of the fluid 30 moving in the x direction is relatively increased as compared with the vibration propagation suppressing device 100 according to the third embodiment, and a sufficient fluid mass effect can be easily obtained. Further, the stop band of the vibration propagation suppressing device 100 according to the fourth embodiment can further obtain low frequency and wide area as compared with the vibration propagation suppressing device 100 according to the third embodiment. Further, the vibration propagation suppressing device 100 according to the fourth embodiment has the first rigid body wall 22 and the first rigid body wall 22 by manufacturing the partition wall 20 by wire electric discharge machining, similarly to the vibration propagation suppressing device 100 according to the fourth embodiment. It is possible to easily obtain a partition wall 20 having a small distance d2 from the rigid wall 23 of 2.

(Embodiment 5)
In the vibration propagation suppression device 100 according to the first to fourth embodiments, the vibration propagation suppression device 100, which is a periodic structure in which a plurality of unit cells 10a to 10f are arranged in one direction of the vibration propagation direction 400, has been described. As a result, a band stop effect in one axis of the vibration propagation direction 400 is realized. However, there is a case where a load is applied to the vibration propagation suppressing device 100 or the precision instrument 200 which is a support target in two axes in the z direction and the y direction, and it is desired to suppress these propagations over the two axes. In order to deal with such a case, in the vibration propagation suppressing device 100 according to the fifth embodiment, the vibration propagation is a two-dimensional periodic structure in which the unit cells 10 are periodically arranged in two directions of two axes in the z direction and the y direction. The suppression device 100 is disclosed. As shown in FIG. 8, in addition to the vibration propagation direction 400, an orthogonal vibration propagation direction 410 is defined, and the unit cells 10 are periodically arranged in that direction as well. As a result, the load in the two-dimensional direction applied to the outside of the vibration propagation suppressing device 100, which is a two-dimensional periodic structure, is suppressed by the vibration propagation suppressing device 100. It should be noted that the closed cross section 11 of the unit cell 10 included in the vibration propagation suppressing device 100 according to the third and fourth embodiments is made smaller, and the first one having a curved surface shape convex in the direction facing each other as shown in the fourth embodiment. The flexible wall 24 and the second flexible wall 25 are periodically arranged in two directions of two axes in the z direction and the y direction, as shown by the vibration propagation suppressing device 100 according to the fifth embodiment. It may be applied to the vibration propagation suppression device 100 which is a two-dimensional periodic structure. By doing so, it is effective in improving the structural stability and the band stop effect.

(Embodiment 6)
In the vibration propagation suppressing device 100 according to the first to fifth embodiments, when an external load is applied to the

vibration propagation directions

400 and 410, the partition wall 20 of the unit cell 10 is deformed and the fluid 30 flows in the x direction. However, one end 21 of the unit cell 10 is not sealed, and the fluid 30 leaks to the outside when it is not used in a place filled with the fluid 30. Therefore, as shown in FIG. 9, the vibration propagation suppressing device 100 according to the sixth embodiment has a flexible sealing wall 27 at one end 21 and the other end 26 of the unit cell 10. As a result, it is possible to prevent the fluid 30 from leaking to the outside, and the vibration propagation suppressing device 100 can be used even when the fluid 30 is not used in a place where the fluid 30 is filled. Other configurations have the same configuration as the vibration propagation suppression device 100 according to the first embodiment.

However, it should be noted that the sealing wall 27 deteriorates the fluid mass effect from two viewpoints. First, since the sealing wall 27 has a finite rigidity in the vibration propagation direction 400, the in-plane deformation of the unit cell 10 with respect to an external load is suppressed, and the discharge amount of the fluid 30 in the out-of-plane direction 13 is reduced. Further, since the lid is closed in the discharge direction, there is no place for the discharged fluid 30 to go, and it is difficult for the fluid to flow. If the sealing wall 27 does not have flexibility, the fluid mass effect becomes small, and the band stop effect of the vibration propagation suppressing device 100 cannot exhibit the expected performance.

Therefore, in the sixth embodiment, the sealing wall 27 is a sealing wall 27 that is flexible with respect to the out-of-plane direction 13 in addition to the vibration propagation direction 400. The sealing wall 27 is preferably more flexible than the partition wall 20. As a result, it is possible to suppress the decrease in the fluid mass effect while removing the adverse effect on the vibration propagation suppressing device 100 or the external device due to the leakage of the fluid 30, and the vibration is compact, lightweight and easy to manufacture with a sufficiently low stop band. The propagation suppression device 100 is obtained. As a specific example of the flexible sealing wall 27, a stopper made of a viscoelastic body or a bellows structure extending in the out-of-plane direction 13 may be adopted. By doing so, the vibration propagation suppressing device 100 of the sixth embodiment can prevent the fluid 30 from leaking to the outside, so that this leak affects the performance of the vibration propagation suppressing device 100. Or, it is effective when there is a risk of causing a malfunction in the external device. Similarly, a flexible sealing wall 27 may be provided on one end 21 and the other end 26 of the unit cell 10 of the vibration propagation suppressing device 100 according to the second to fifth embodiments.

(Embodiment 7)
The vibration propagation suppression device 100 according to the sixth embodiment has a sealing wall 27 at one end 21 and the other end 26 of each unit cell 10 in order to suppress leakage of the fluid 30 in the out-of-plane direction 13. However, if the sealing wall 27 is provided in each unit cell 10, it is difficult to secure the flexibility of the sealing wall 27, the cross-sectional area change of the closed cross section 11 itself and the fluid 30 in the out-of-plane direction 13 shown in FIG. Flow is not sufficiently excited. As a result, the fluid mass effect becomes small, and the band stop effect of the vibration propagation suppressing device 100 cannot sufficiently exhibit the expected performance.

Therefore, as shown in FIGS. 10 and 11, the vibration propagation suppressing device 100 according to the seventh embodiment includes an outer shell wall 40 that collectively encloses and houses the entire unit cell 10, and the fluid 30 is a fluid 30. The space surrounded by the outer shell wall 40 is filled. This makes it possible to prevent the fluid 30 from leaking to the outside of the outer shell wall 40. Other configurations are the same as those of the vibration propagation suppressing device 100 according to the fourth embodiment.

As shown in FIG. 12, the outer shell wall 40 includes a first flange 41 connected to the unit cell 10a, a second flange 42 connected to the unit cell 10f, and a first flange 41 and a second flange. The flange 42 is connected, and the side wall 43 having at least a part of flexibility is provided, and the unit cells 10a to 10f are housed in the internal closed space 44. The first flange and the second flange are arranged so as to sandwich the plurality of unit cells 10a to 10f in the vibration propagation direction 400. The space surrounded by the closed space 44 and the partition wall 20 is filled with the fluid 30. The outer shell wall 40 has flexibility in at least a part of the side wall 43 so that the volume of the internal closed space 44 can be changed when a force is applied in the vibration propagation direction 400, and the load on the vibration propagation suppression device 100 is applied. On the other hand, the structure is such that displacement occurs in the internal unit cells 10a to 10f.

The side wall 43 may be made of a viscoelastic body or a metal film, or may have a bellows structure. As a result, the outer shell wall 40 is deformed when a force is applied to the vibration propagation direction 400, and when the first flange 41 is fixed, the second flange 42 can move in the z direction and is inside. The volume of the closed space 44 of is changed. Further, as shown in FIGS. 11 and 13, the side wall 43 is arranged with a clearance in the x direction between the unit cells 10a to 10f. The distance d3 between the side wall 43 and the unit cells 10a to 10f is preferably such that the fluid 30 filled in the unit cells 10a to 10f can be smoothly discharged. On the other hand, as shown in FIGS. 11 and 12, in the y direction, the distance d4 between the side wall 43 and the unit cells 10a to 10f is such that the unit cells 10a to 10f and the side wall 43 do not interfere with each other. Is preferable. However, in the y direction, even if the interval d4 is 0, the fluid 30 filled in the unit cells 10a to 10f cannot be discharged, so that between the side wall 43 and the unit cells 10a to 10f. It is not always necessary to provide clearance in.

Since the outer shell wall 40 is mechanically a spring element parallel to the unit cells 10a to 10f, it is necessary to flexibly design the outer shell wall 40 without having more rigidity than necessary with respect to the vibration propagation direction 400. However, when the vibration propagation suppressing device 100 is required to have the minimum strength, it is important to appropriately design the band stop effect and the strength at the same time.

Next, the operation of the vibration propagation suppression device 100 having the above configuration will be described.

When an external load is applied to the vibration propagation suppressing device 100 in the vibration propagation direction 400, the load is transmitted to the internal unit cells 10a to 10f via the first flange 41 or the second flange 42. As a result, the partition walls 20 of the respective unit cells 10a to 10f are crushed in the plane, and the fluid 30 is acceleratingly discharged in the x direction or the −x direction, resulting in a fluid mass effect.

At this time, since there is a clearance in the x direction between the side wall 43 and the unit cells 10a to 10f, the flow of the fluid 30 in the x direction is not hindered. As a result, the vibration propagation suppressing device 100 according to the seventh embodiment can obtain a vibration propagation suppressing effect in which the stopband has a low frequency and a wide range by the fluid mass effect while suppressing leakage of the fluid 30 to the outside. can. An example has been described in which the vibration propagation suppression device 100 according to the sixth embodiment includes an outer shell wall 40 that collectively encloses and houses the entire unit cell 10 of the vibration propagation suppression device 100 according to the fourth embodiment. However, the vibration propagation suppressing device 100 according to the seventh embodiment replaces the unit cell 10 of the vibration propagation suppressing device 100 according to the fourth embodiment of the vibration propagation suppressing device 100 according to the first to third and fifth embodiments. The unit cell 10 may be used.

(Modification example)
In the above-described embodiment, an example is described in which the partition wall 20 is made of a flexible member or has a first flexible wall 24 and a second flexible wall 25. The partition wall 20 may have a configuration that causes an area change of the closed cross section 11 shown in FIG. 2 with respect to an applied load, and the partition wall 20 is mechanically deformed regardless of the flexible member to change the area. May have a structure that produces. As an example, as shown in FIG. 14, the partition wall 20 has a fixed wall 51 having a plate-like shape, a pair of sliding walls 53 vertically arranged at the end 52 of the fixed wall 51, and a plate-like partition wall. The elasticity of the moving wall 54, which has the shape of the above and is arranged between the pair of sliding walls 53 and moves in the z direction along the sliding wall 53, and the elasticity arranged between the fixed wall 51 and the moving wall 54. The body 55 may be provided. The fixed wall 51 and the moving wall 54 are arranged parallel to each other. The moving wall 54 is supported by the elastic body 55, and the distance from the fixed wall 51 is maintained. The fluid 30 fills a space surrounded by a fixed wall 51, a sliding wall 53, and a moving wall 54. Due to this structure, when a load is applied, the elastic body 55 is elastically deformed, and the moving wall 54 moves in the z direction, so that the fluid 30 is pushed out. As a result, it is possible to obtain a vibration propagation suppressing effect in which the stopband has a low frequency and a wide range due to the fluid mass effect.

In the above-described embodiment, an example in which the vibration propagation suppressing device 100 is arranged between the precision instrument 200 as a support target and the foundation surface 300 subject to forced displacement has been described. The vibration propagation suppression device 100 may be arranged between the vibration generator having a mechanical configuration including a motor and the foundation surface 300. The vibration generator includes a device having a mechanical configuration including an HDD (hard disk drive) or a motor. By doing so, there is an effect that the vibration generated by the vibration generator does not propagate to the foundation surface 300. This has the effect that the vibration does not propagate to other devices installed on the foundation surface 300.

The present disclosure allows for various embodiments and variations without departing from the broad spirit and scope of the present disclosure. Moreover, the above-described embodiment is for explaining this disclosure, and does not limit the scope of the present disclosure. That is, the scope of this disclosure is indicated by the scope of claims, not by embodiments. And, various modifications made within the scope of the claims and within the scope of the equivalent disclosure are considered to be within the scope of this disclosure.

10, 10a to 10f ... Unit cell, 11 ... Closed cross section, 12 ... Cross section, 13 ... Out-of-plane direction, 20 ... Bulk partition, 21, 22a, 23a one end, 22 ... First rigid wall, 22b, 23b, 26 ... The other end, 23 ... the second rigid wall, 24 ... the first flexible wall, 25 ... the second flexible wall, 27 ... the sealing wall, 30 ... the fluid, 40 ... the outer shell wall, 41 ... the first. Flange, 42 ... second flange, 43 ... side wall, 44 ... closed space, 51 ... fixed wall, 52 ... end, 53 ... sliding wall, 54 ... moving wall, 55 ... elastic body, 100 ... vibration propagation suppression Equipment, 200 ... Precision equipment, 300 ... Foundation surface, 400, 410 ... Vibration propagation direction.

Claims

It is provided with a plurality of unit cells installed in series in the vibration propagation direction between the support object and the foundation surface subject to forced displacement.
Each of the plurality of unit cells has a shape extending in a first direction intersecting the vibration propagation direction, and has a partition wall forming a closed cross section and a fluid filled in the space surrounded by the partition wall. Have and
The partition wall has a structure that causes an area change of the closed cross section with respect to a load applied in the vibration propagation direction, and at least one end of both ends in the first direction is opened.
Adjacent unit cells circumscribe each other at the partition wall.
Vibration propagation suppression device.
The vibration propagation suppressing device according to claim 1, wherein the cross-sectional shape of the partition wall is uniform in the first direction.
The partition wall is a flexible first flexible wall that connects a first rigid body wall and a second rigid body wall arranged facing each other, and the first rigid body wall and the second rigid body wall. And a second flexible wall,
The first rigid body wall of one of the adjacent unit cells is circumscribed by the first rigid body wall of the unit cell and the second rigid body wall of the other unit cell.
The vibration propagation suppressing device according to claim 1 or 2.
The distance between the first rigid body wall and the second rigid body wall is smaller than the thickness of the first rigid body wall or the second rigid body wall.
The vibration propagation suppressing device according to claim 3.
The first flexible wall and the second flexible wall each have a curved surface shape that is convex in the direction facing each other.
The vibration propagation suppressing device according to claim 3 or 4.
Each of the plurality of unit cells is arranged side by side in a direction intersecting the vibration propagation direction and the first direction.
The vibration propagation suppressing device according to any one of claims 1 to 5.
The unit cell has flexible sealing walls at both ends in the first direction.
The vibration propagation suppressing device according to any one of claims 1 to 6.
The vibration propagation suppressing device according to claim 7, wherein the sealing wall has higher flexibility than the partition wall.
It has an outer shell wall that tightly houses the plurality of the unit cells.
The fluid is filled in a space surrounded by the outer shell wall.
The vibration propagation suppressing device according to any one of claims 1 to 6.
The outer shell wall connects the first flange and the second flange arranged so as to sandwich the plurality of unit cells in the vibration propagation direction, and the first flange and the second flange, and at least. With a side wall that is partially flexible,
The vibration propagation suppressing device according to claim 9.