WO2022035668A1

WO2022035668A1 - Transporting method of glass substrates

Info

Publication number: WO2022035668A1
Application number: PCT/US2021/044632
Authority: WO
Inventors: Soyoung CHO; Eun Yong Choi; In Bum JEON; Dongwoo Kim; Soo-von KOO; Insuk WOO; Jeongwoon YOON
Original assignee: Corning Incorporated
Priority date: 2020-08-12
Filing date: 2021-08-05
Publication date: 2022-02-17
Also published as: TW202220904A; KR20220020664A

Abstract

A method of transporting glass substrates includes: stacking a plurality of glass substrates on a cassette; surrounding the cassette with a fluid impermeable cover to create a suction hole; removing air within the fluid impermeable cover through the suction hole; and sealing the suction hole.

Description

TRANSPORTING METHOD OF GLASS SUBSTRATES

CROSS-REFERENCE TO RELATED APPLICATION

[0001] This application claims the benefit of Korean Patent Application No. 10-2020- 0101259, filed on August 12, 2020, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein in its entirety by reference.

BACKGROUND

1. Field

[0002] The disclosure relates to a method of transporting glass substrates, and more particularly, to a method of transporting glass substrates, whereby particle adsorption with respect to the glass substrates when the glass substrates are transported over a long distance over a long period of time is significantly improved.

2. Description of Related Art

[0003] Glass substrates are widely used for a variety of fields, such as display apparatuses, building structures, vehicles, solar batteries, etc. When the glass substrates are transported over a long distance over a long period of time, surface characteristics of the glass substrates may be changed and particles may be adsorbed in the glass substrates. This may subsequently cause defects when manufacturing products using the glass substrates.

SUMMARY

[0004] The disclosure provides a method of transporting glass substrates, whereby particle adsorption with respect to the glass substrates when the glass substrates are transported over a long distance for a long term is significantly improved.

[0005] Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented embodiments of the disclosure.

[0006] According to an aspect of the disclosure, there is provided a method of transporting glass substrates, the method including: stacking a plurality of glass substrates on a cassette; surrounding the cassette with a fluid impermeable coverfluid impermeable cover to create a suction hole; removing air within the fluid impermeable coverfluid impermeable cover through the suction hole; and sealing the suction hole.

[0007] The suction hole may be arranged in a lateral direction of the fluid impermeable coverfluid impermeable cover with reference to a gravity direction.

[0008] The method may further include surrounding the cassette with an external cover.

[0009] The surrounding of the cassette with the fluid impermeable coverfluid impermeable cover may include sealing the cassette within the fluid impermeable coverfluid impermeable cover. The sealing of the cassette within the fluid impermeable coverfluid impermeable cover may include sealing the fluid impermeable coverfluid impermeable cover via thermal adhesion.

[0010] The surrounding of the cassette with the fluid impermeable coverfluid impermeable cover may further include forming the suction hole in the fluid impermeable coverfluid impermeable cover, after the sealing of the cassette within the fluid impermeable coverfluid impermeable cover. The thermal adhesion may be performed to include a thermal adhesion width of about 20 mm to about 40 mm.

[0011] The surrounding of the cassette with the fluid impermeable coverfluid impermeable cover may include: arranging a lower fluid impermeable coverfluid impermeable cover; arranging the cassette on the lower fluid impermeable coverfluid impermeable cover; covering the cassette with an upper fluid impermeable coverfluid impermeable cover; and bonding the lower fluid impermeable coverfluid impermeable cover with the upper fluid impermeable coverfluid impermeable cover.

[0012] The bonding may be performed by thermal adhesion between the lower fluid impermeable coverfluid impermeable cover and the upper fluid impermeable coverfluid impermeable cover.

[0013] The fluid impermeable cover may include an aluminum layer.

[0014] According to another aspect of the disclosure, there is provided a method of transporting glass substrates, the method including: forming a first sealed glass substrate package; forming a second sealed glass substrate package; stacking the second sealed glass substrate package on the first sealed glass substrate package; and adhering the first sealed glass substrate package and the second sealed glass substrate package to each other.

[0015] The forming of the first sealed glass substrate package may include: stacking a plurality of glass substrates on a first packaging cassette having a support column at each of four corners; arranging a first lower fluid impermeable cover on a first palette; arranging the first packaging cassette on the first lower fluid impermeable cover; covering the first packaging cassette with a first upper fluid impermeable cover; bonding the first lower fluid impermeable cover with the first upper fluid impermeable cover such that a first suction hole is formed; removing air inside the first lower fluid impermeable cover and the first upper fluid impermeable cover through the first suction hole; and sealing the first suction hole.

[0016] The forming of the second sealed glass substrate package may include: stacking a plurality of glass substrates on a second packaging cassette having a support column at each of four comers; arranging a second lower fluid impermeable cover on a second palette; arranging the second packaging cassette on the second lower fluid impermeable cover; covering the second packaging cassette with a second upper fluid impermeable cover; bonding the second lower fluid impermeable cover with the second upper fluid impermeable cover such that a second suction hole is formed; removing air inside the second lower fluid impermeable cover and the second upper fluid impermeable cover through the second suction hole; and sealing the second suction hole.

[0017] An upper surface of the support column of the first packaging cassette and a lower surface of the second palette at a location corresponding to the support column of the first packing cassette may be positively combined with each other.

[0018] The adhering of the first sealed glass substrate package and the second sealed glass substrate package to each other may include: providing a fixing bar to upper surfaces of a pair of adjacent support columns of the second packaging cassette, the fixing bar horizontally extending and being configured to be positively combined with the upper surfaces of the pair of adjacent support columns of the second packaging cassette; and fixing the fixing bar to the second packaging cassette with a strap including one end combined with one end of the fixing bar and the other end combined with the other end of the fixing bar.

[0019] The strap may vertically extend from the one end of the fixing bar to the first palette, extend horizontally to penetrate through the first palette, and vertically extend to the other end of the fixing bar.

[0020] The strap may be configured to be fastened by a ratchet. The first palette may include, in each of two facing lateral surfaces, a fork hole through which a fork of a conveyor is able to pass, and the strap may pass through the fork holes of the two facing lateral surfaces.

[0021] The first suction hole and the second suction hole may be located in a lateral direction of the first packaging cassette and a lateral direction of the second packaging cassette, respectively, with reference to a gravity direction.

[0022] Each of the first lower fluid impermeable cover, the first upper fluid impermeable cover, the second lower fluid impermeable cover, and the second upper fluid impermeable cover may include a polymer layer and a metal layer laminated on the polymer layer.

[0023] The metal layer may include an aluminum layer, and a thickness of the metal layer may be from about 180 micrometers (pm) to about 800 pm.

[0024] According to another aspect of the disclosure, there is provided a method of transporting glass substrates, the method including: stacking a plurality of glass substrates on a cassette at an angle of about 5 degrees (°) to about 90° with respect to a horizontal plane; placing the cassette on which the plurality of glass substrates are stacked, on a bottom surface of an aluminum laminate cover; surrounding lateral surfaces and upper surfaces of the plurality of glass substrates with the aluminum laminate cover; and at least partially removing air inside the aluminum laminate cover in a lateral direction of the cassette. The aluminum laminate cover may include a polymer layer and an aluminum layer laminated on the polymer layer, and a thickness of the aluminum layer may be about 180 pm to about 800 pm. The polymer layer may include thermoplastic resin.

BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The above and other aspects, features, and advantages of certain embodiments of the disclosure will be more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0026] FIG. 1 is a flowchart of a method of transporting glass substrates, according to an embodiment of the disclosure;

[0027] FIGS. 2 A through 2E are schematic views showing, in detail, the method of transporting the glass substrates according to the embodiment of FIG. 1;

[0028] FIG. 3 is a schematic view of a cross-section of a fluid impermeable cover; [0029] FIG. 4 is a schematic perspective view showing a method of surrounding a cassette with a fluid impermeable cover, according to an embodiment of the disclosure;

[0030] FIGS. 5A through 5F are schematic perspective views showing, in detail, a method of packaging glass substrates, according to another embodiment of the disclosure;

[0031] FIG. 6 is a lateral view showing a state in which a second glass substrate package is stacked on a first glass substrate package;

[0032] FIG. 7A is a specific view of region A of FIG. 6, which shows, in detail, a bonding state between a support column and a second palette; and

[0033] FIG. 7B is a specific view of region B of FIG. 6, which shows a detailed bonding relationship among the support column of the second palette, a fixing bar, and a strap.

DETAILED DESCRIPTION

[0034] Reference will now be made in detail to embodiments, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout. In this regard, the present embodiments may have different forms and should not be construed as being limited to the descriptions set forth herein. Accordingly, the embodiments are merely described below, by referring to the figures, to explain aspects of the present description. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. Expressions such as "at least one of," when preceding a list of elements, modify the entire list of elements and do not modify the individual elements of the list.

[0035] Hereinafter, embodiments of the disclosure will be described in detail with reference to the accompanying drawings. The disclosure may, however, be embodied in many different forms and should not be construed as limited to the example embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to one of ordinary skill in the art. The same reference numerals denote the same member throughout. Further, various elements and areas are schematically illustrated in the drawings. Thus, the disclosure should not be construed as limited to the relative size or distance illustrated in the accompanying drawings.

[0036] Although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of example embodiments.

[0037] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments. As used herein, the singular forms "a," "an," and "the," are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises," "comprising," "includes," and/or "including," when used herein, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

[0038] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which example embodiments belong. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0039] A specific process order may be changed in another embodiment. For example, two processes which are described as being continuously performed may be simultaneously performed or may be performed in a reverse order.

[0040] As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, example embodiments should not be construed as limited to the particular shapes of regions illustrated herein but may be to include deviations in shapes that result, for example, from manufacturing. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. Also, the term "substrate" used in this specification may denote a substrate itself or a stack including the substrate and a certain layer or film formed on a surface of the substrate. Also, the term "a surface of a substrate" in this specification may denote an exposed surface itself of the substrate, or an external surface of a certain layer or film formed on the substrate.

[0041] FIG. 1 is a flowchart of a method of transporting glass substrates, according to an embodiment of the disclosure.

[0042] FIGS. 2 A through 2E are schematic views showing, in detail, the method of transporting the glass substrates according to the embodiment of FIG. 1.

[0043] Referring to FIGS. 1 and 2A, a plurality of glass substrates GS may be stacked on a cassette 110 (SI 10).

[0044] The plurality of glass substrates GS may include any glass substrates in the form of flat plates and may include, for example, sodalime glass, alkali aluminosilicate glass, alkali-containing borosilicate glass and/or alkali aluminoborosilicate glass, or glassceramics. Examples of suitable glass-ceramics may include Li2O-A12O3-SiO2-based (i.e., LAS-based) glass ceramics, MgO-ALCE-SiCh-based (i.e., MAS-based) glass ceramics, and glass ceramics including any one or more crystals from among spinel, a- quartz and P-quartz solid solutions, petalite, lithium dissilicate, P-spodumene, nepheline, and alumina. However, the disclosure is not limited thereto.

[0045] An interleaf may be arranged between adjacent glass substrates from among the plurality of glass substrates GS, in order to prevent damage caused by friction between the adjacent glass substrates.

[0046] The cassette 110 may be a structure configured to support and fix the plurality of glass substrates GS. In some embodiments, the cassette 110 may be configured such that the plurality of glass substrates GS are perpendicularly supported by and fixed to a lower surface of the cassette 110. In other embodiments, the cassette 110 may be configured such that the plurality of glass substrates GS are supported by and fixed to the lower surface of the cassette 110 at an angle between about 60 degrees (°) and about 80 °, for example, at an angle of about 70 °. In other embodiments, the cassette 110 may be configured such that the plurality of glass substrates GS are supported by and fixed to the lower surface of the cassette 110 at an angle between about 5 ° and about 15 °, for example, at an angle of about 8 °.

[0047] Referring to FIGS. 1 and 2B, the cassette 110 may be surrounded by a fluid impermeable cover 120 (S120).

[0048] FIG. 3 is a schematic view of a cross-section of the fluid impermeable cover 120.

[0049] Referring to FIG. 3, the fluid impermeable cover 120 may be a metal laminate cover and include a thin metal layer 122 and a polymer layer 124 configured to support the thin metal layer 122. In some embodiments, the fluid impermeable cover 120 may further include a bonding layer for bonding the thin metal layer 122 and the polymer layer 124. The thin metal layer 122 may include a single metal layer or a multi-layer in which two or more metal layers are laminated. Also, the polymer layer 124 may include a single layer including a single polymer material or a multi-layer in which two or more polymer materials are laminated.

[0050] In some embodiments, the fluid impermeable cover 120 may include a stack in which the thin metal layer 122 and the polymer layer 124 are alternately laminated.

[0051] The thin metal layer 122 may include any metal material having a moisture-proofing property for preventing the penetration of moisture. For example, the thin metal layer 122 may include Al, Fe, Ni, Co, Cu, Mn, Cr, Mg, Zn, or an alloy thereof.

[0052] The thin metal layer 122 may have a thickness of about 180 micrometers (JMH) to about 800 JMH, about 200 JMH to about 600 JMH, or about 250 JMH to about 450 JMH. When the thin metal layer 122 is too thin, the thin metal layer 122 may be easily damaged thereby the sealing is broken. When the thin metal layer 122 is too thick, weight and cost may be increased and adhesion with the cassette 110 may be deteriorated.

[0053] The polymer layer 124 may include thermoplastic resin. In some embodiments, the polymer layer 124 may include low-density polyethylene (LDPE), high-density polyethylene (HDPE), linear low-density polyethylene (LLDPE), polyethylene terephthalate (PET), poly vinyl chloride (PVC), polystyrene, polyvinylidene chloride, polyester, polyamide, polyacetal, EVA resins, polyphenylene oxide, acrylonitrile- butadiene-styrene (ABS), a copolymer or a blend thereof, or the like.

[0054] Referring to FIGS. 1 and 2B again, the fluid impermeable cover 120 may surround a lower surface, lateral surfaces, and an upper surface of the cassette 110 on which the plurality of glass substrates GS are stacked. Here, the fluid impermeable cover 120 may surround the cassette 110 to create a suction hole 125.

[0055] FIG. 4 is a schematic perspective view showing a method of surrounding the cassette 110 with the fluid impermeable cover 120, according to an embodiment of the disclosure.

[0056] Referring to FIG. 4, the fluid impermeable cover 120 according to an embodiment may have a shape of a large envelope. The cassette 110 on which the plurality of glass substrates GS are stacked may be provided in the fluid impermeable cover 120 through an opening 120OP of the fluid impermeable cover 120, after allowing the opening 120OP to be positioned upwardly. Then, the opening 120OP may be sealed via thermal adhesion.

[0057] In this case, the suction hole 125 may be formed before or after the opening 120OP is sealed.

[0058] The suction hole 125 may be provided in a lateral direction of the cassette 110 with reference to a gravity direction. That is, when the gravity direction is a direction from an upper portion to a lower portion of the cassette 110 (i.e., -Z direction) illustrated in FIG. 2B, the suction hole 125 may be provided in the lateral direction (i.e., +X direction) of the cassette 110. Although the suction hole 125 is provided in the +X direction of the cassette 110, those of ordinary skill in the art would clearly understand that the suction hole 125 could be provided in the -X direction, +Y direction, -Y direction, or any combination thereof of the cassette 110.

[0059] In some embodiments, the suction hole 125 may be arranged below a central portion of the cassette 110 with reference to the gravity direction (i.e., -Z direction). It is identified that, when the suction hole 125 is formed at a relatively upper position with reference to the gravity direction, that is, above the cassette 110, a considerable number of particles are adsorbed in the plurality of glass substrates GS after the plurality of glass substrates GS are transported over a long period of time.

[0060] On the contrary, when the suction hole 125 is formed at a relatively lower position with reference to the gravity direction, that is, in the lateral direction of the cassette 110, which is at a relatively lower position, a density of the particles that are adsorbed in the plurality of glass substrates GS after the transportation thereof over a long period of time is significantly reduced.

[0061] The fluid impermeable cover 120 may surround the cassette 110 such that the cassette 110 is sealed from the outside, except for the suction hole 125. Thermal adhesion may be performed on a portion of the fluid impermeable cover 120, for example, on the opening 120OP of FIG. 4, such that the fluid impermeable cover 120 surrounds the cassette 110. Thermal adhesion may be performed to seal the fluid impermeable cover 120 from the outside by having portions, which need to be bonded, contact each other and allowing the portions to be bonded to each other by applying heat to the portions by a certain width.

[0062] The bonding width based on the thermal adhesion may be, for example, about 16 mm to about 55 mm, about 18 mm to about 50 mm, about 20 mm to about 48 mm, about 22 mm to about 45 mm, about 24 mm to about 43 mm, or about 26 mm to about 40 mm, and may include all sub-ranges therebetween.

[0063] When the bonding width based on the thermal adhesion is too small, the fluid impermeable cover 120 may not be sufficiently sealed. When the bonding width based on the thermal adhesion is too large, workability may be reduced, and it may be economically disadvantageous.

[0064] The heat needs to be applied to the fluid impermeable cover 120 and the amount of heat for the thermal adhesion may depend on a type and a thickness of the thin metal layer 122 and a type and a thickness of the polymer layer 124 of FIG. 3. One of ordinary skill in the art may quantitatively determine the amount of heat to be applied to the fluid impermeable cover 120 for the thermal adhesion by taking this aspect into account.

[0065] FIG. 2B illustrates the suction hole 125 in the form of a conduit, which extends outside. However, the suction hole 125 may be a perforation formed in the fluid impermeable cover 120 and is not limited to a particular form. Also, the suction hole 125 may include a hole formed, on purpose, with respect to a portion of the fluid impermeable cover 120 and may be a portion on which thermal adhesion is intentionally not performed to leave a hole.

[0066] Referring to FIGS. 1 and 2C, air within the fluid impermeable cover 120 may be removed through the suction hole 125 (S130).

[0067] The removal of the air within the fluid impermeable cover 120 through the suction hole 125 may be achieved, for example, by connecting a vacuum source to the suction hole 125. The fluid impermeable cover 120 may be sealed except for the suction hole 125, and thus, when the vacuum source is connected to the suction hole 125, air within the fluid impermeable cover 120 may be easily removed. After removing air within the fluid impermeable cover 120, the pressure within the fluid impermeable cover 120 may be about -1 kPa to about -35 kPa, about -2 kPa to about -25 kPa, about -4 kPa to about -20 kPa with regard to the atmospheric pressure outside the fluid impermeable cover 120. When the absolute pressure within the fluid impermeable cover 120 is too low, the fluid impermeable cover 120 may be easily damaged. When the absolute pressure within the fluid impermeable cover 120 is too high, the effect of discharging the moisture may be insufficient.

[0068] By removing the air within the fluid impermeable cover 120, moisture existing in the air may also be discharged to the outside. The moisture in the air is presumed to be one major cause of particle adsorption. However, the disclosure is not limited to particular theories. Based on the above presumption, the moisture in the air may be removed together with the air, and thus, the cause of particle adsorption is greatly reduced. Accordingly, it is believed that a density of particles adsorbed in the plurality of glass substrates GS may be reduced for this reason.

[0069] Referring to FIGS. 1 and 2D, the suction hole 125 may be sealed so that external air is not introduced back to the fluid impermeable cover 120 (S140). By forming a sealed suction hole 125s by sealing the suction hole 125, the inside and the outside of the fluid impermeable cover 120 may be separated and blocked from each other. That is, ingression of air, water vapor, or any fluid is substantially prevented by the sealing.

[0070] The sealing of the sealed suction hole 125s may be performed via thermal adhesion. In some embodiments, a bonding width based on the thermal adhesion may be, for example, about 16 mm to about 55 mm, about 18 mm to about 50 mm, about 20 mm to about 48 mm, about 22 mm to about 45 mm, about 24 mm to about 43 mm, or about 26 mm to about 40 mm, and may include all sub-ranges therebetween.

[0071] Referring to FIGS. 1 and 2E, the cassette 110 may be surrounded by an external cover (SI 50). The external cover may be a external polymer bag, which is flexible. The cassette 110 is surrounded by the fluid impermeable cover 120, and thus, the external polymer bag 130 may surround the fluid impermeable cover 120. The external polymer bag 130 may protect the cassette 110 from external shocks, vibrations, etc., and may be provided to prevent damage to the fluid impermeable cover 120, which may cause destruction of sealing.

[0072] The external polymer bag 130 may include thermoplastic resin. In some embodiments, the external polymer bag 130 may include LDPE, HDPE, LLDPE, PET, PVC, polystyrene, polyvinylidene chloride, polyester, polyamide, polyacetal, EVA resins, polyphenylene oxide, ABS, a copolymer or a blend thereof, or the like.

[0073] In some embodiments, the external polymer bag 130 may include an air cap, a bubble wrap, or an air pillow packing material, which has an air bag, to better protect the cassette 110 and the fluid impermeable cover 120.

[0074] FIGS. 5A through 5F are schematic perspective views showing, in detail, a method of packaging glass substrates, according to another embodiment of the disclosure.

[0075] Referring to FIG. 5A, the plurality of glass substrates GS may be stacked on the cassette 110. The plurality of glass substrates GS may be configured to be supported by and fixed to a lower surface of the cassette 110 at an angle between about 5 ° and about 15 °, for example, at an angle of about 8 °. In other embodiments, the cassette 110 may be configured such that the plurality of glass substrates GS are perpendicularly supported by and fixed to the lower surface of the cassette 110. In other embodiments, the cassette 110 may be configured such that the plurality of glass substrates GS are supported by and fixed to the lower surface of the cassette 110 at an angle between about 60 ° and about 80 °, for example, an angle of about 70 °.

[0076] The cassette 110 may have a support column 112 at each of four comers. Lengths of the support columns 112 may be determined such that all of upper surfaces of the support columns 112 are higher than an uppermost end of the plurality of glass substrates GS, when the plurality of glass substrates GS are stacked on the cassette 110.

[0077] FIG. 5A illustrates that the cassette 110 has four support columns 112. However, it is understood by one of ordinary skill in the art that the cassette 110 may have more than four support columns 112. That is, the cassette 110 may have five or more support columns 112.

[0078] Each of the upper surfaces of the support columns 112 may have a protrusion 112p. The protrusion 112p may be provided for positive combination between the support columns 112 and a lower surface of a palette, which is to be stacked above the support columns 112, as described below. The positive combination may broadly refer to a state in which two members, which are to be coupled to each other, are coupled via shapes of the two members, rather than via friction.

[0079] Referring to FIG. 5B, a lower fluid impermeable cover 120L may be arranged on a palette 150.

[0080] The palette 150 may include, in each of two facing lateral surfaces, a fork hole through which a fork of a conveyor may pass. The palette 150 may have the fork hole 150FH in two facing lateral surfaces, so that the palette 150 may be conveyed by a fork lift truck.

[0081] The lower fluid impermeable cover 120L may be bonded to an upper fluid impermeable cover 120U to be described below to seal the cassette 110 (refer to FIG. 5A). Thus, although FIG. 5B illustrates that the lower fluid impermeable cover 120L has the form of a flat plane, the disclosure is not limited thereto. For example, the lower fluid impermeable cover 120L may have a shape including a bottom portion, a lateral portion, and an upward opening, as the fluid impermeable cover 120 of FIG. 4.

[0082] Materials of the lower fluid impermeable cover 120L are the same as described above with reference to FIG. 3, and will not be described in detail.

[0083] Referring to FIG. 5C, the cassette 110 may be arranged on the lower fluid impermeable cover 120L on the palette 150.

[0084] A flat area of the lower fluid impermeable cover 120L may be greater than a flat area of the cassette 110. In some embodiments, the lower fluid impermeable cover 120L may extend from a lateral surface of the cassette 110 in a lateral direction. Here, the lateral direction refers to +X direction, -X direction, +Y direction, -Y direction, and/or any combination thereof.

[0085] Referring to FIG. 5D, the cassette 110 may be covered by the upper fluid impermeable cover 120U. The upper fluid impermeable cover 120U may cover the entire upper portion of the cassette 110. In some embodiments, the upper fluid impermeable cover 120U may at least partially surround the lateral surface of the cassette 110.

[0086] A lower edge of the upper fluid impermeable cover 120U may be bonded to an outer edge of the lower fluid impermeable cover 120L via thermal adhesion. That is, the upper fluid impermeable cover 120U may be bonded to the lower fluid impermeable cover 120L via thermal adhesion along a bonding line TH. Thermal adhesion is described in detail with reference to FIG. 2B, and thus, will not be additionally described.

[0087] Also, the suction hole 125 may be provided in a lateral direction of the cassette 110.

[0088] In some embodiments, thermal adhesion may not be performed on a portion of the upper fluid impermeable cover 120U and a corresponding portion of the lower fluid impermeable cover 120L, and the suction hole 125 may be formed in the portion on which the thermal adhesion is not performed. That is, while corresponding edges of the upper fluid impermeable cover 120U and the lower fluid impermeable cover 120L may be bonded via thermal adhesion, the thermal adhesion may not be performed on portions in which the suction hole 125 is to be formed.

[0089] In some embodiments, the suction hole 125 may be formed in a lateral surface of the upper fluid impermeable cover 120U. In this case, all of the corresponding edges of the upper fluid impermeable cover 120U and the lower fluid impermeable cover 120L may be bonded via thermal adhesion. Thereafter, the suction hole 125 may be formed in the upper fluid impermeable cover 120U. The suction hole 125 may be provided in the lateral direction of the cassette 110 as described above with reference to FIG. 2B. That is, the suction hole 125 may be provided at a relatively lower position in the lateral direction of the cassette 110 of FIG. 5D.

[0090] As described above, the lower fluid impermeable cover 120L may have the shape including a bottom portion, a lateral portion, and an upward opening, as the fluid impermeable cover 120 of FIG. 4. In this case, the suction hole 125 may be provided in the lateral portion of the lower fluid impermeable cover 120L.

[0091] Referring to FIG. 5E, air within the fluid impermeable cover 120 may be removed through the suction hole 125.

[0092] The removal of the air within the fluid impermeable cover 120 through the suction hole 125 is described in detail with reference to FIG. 2C, and thus, will not be described in detail.

[0093] When the air is removed through the suction hole 125, the fluid impermeable cover 120 may relatively more tightly adhere to the cassette 110 on which the plurality of glass substrates GS are stacked. In some embodiments, the fluid impermeable cover 120 may cover a lateral surface and an upper surface of the support column 112. In particular, the fluid impermeable cover 120 may cover the protrusion 112p of the support column 112.

[0094] Referring to FIG. 5F, the sealed suction hole 125s may be formed by sealing the suction hole 125. This aspect is described in detail with reference to FIG. 2D, and thus, will not be described in detail.

[0095] In some embodiments, a glass substrate package packaged as described above may be stacked. FIG. 6 is a lateral view showing a state in which a second glass substrate package 200b is stacked on a first glass substrate package 200a.

[0096] Referring to FIG. 6, each of the first glass substrate package 200a and the second glass substrate package 200b may be formed. For example, each of the first glass substrate package 200a and the second glass substrate package 200b may be formed as shown in the embodiment described with reference to FIGS. 5 A through 5F.

[0097] Thereafter, the second glass substrate package 200b may be stacked on the first glass substrate package 200a. Here, the protrusion 112p (refer to FIG. 7A) of the upper surface of the support column 112 of the first glass substrate package 200a, may be positively combined with a hole formed in a lower surface of a second palette 150b, which is a palette of the second glass substrate package 200b, and thus, even if vibration, etc. occurs during transportation, stable transportation may be possible. [0098] FIG. 7A is a specific view of region A of FIG. 6, which shows, in detail, a combination between the support column 112 and the second palette 150b.

[0099] Referring to FIG. 7A, a hole 150h may be formed in a lower surface of the second palette 150b. A depth and a width of the hole 150h may be determined such that the hole 150h may accommodate the protrusion 112p of the upper surface of the support column 112 of the first glass substrate package 200a and may be positively combined with the protrusion 112p.

[00100] Also, each of the support columns 112 may have the protrusion 112p on the upper surface thereof, and the second palette 150b may have, in the lower surface thereof, the hole 150h to accommodate the protrusion 112p, at a location corresponding to each support column 112. Also, the first palette 150a (refer to FIG. 6) of the first glass substrate package 200a may be substantially the same as the second palette 150b of the second glass substrate package 200b.

[00101] As described above with reference to FIGS. 5A through 5F, the cassette 110 of each the first glass substrate package 200a and the second glass substrate package 200b may be surrounded by the fluid impermeable cover 120, and thus, the upper surface and the lateral surfaces of the support column 112 may be surrounded by the fluid impermeable cover 120. As shown in FIG. 7A, the upper surface and the lateral surfaces of the support column 112 may be positively combined with the hole 150h, in a state in which the upper surface and the lateral surfaces of the support column 112 are surrounded by the upper fluid impermeable cover 120U.

[00102] Referring to FIG. 6 again, to enhance the bonding of the first glass substrate package 200a and the second glass substrate package 200b, the first glass substrate package 200a and the second glass substrate package 200b may be allowed to adhere to each other.

[00103] A fixing bar 210 may be provided at an upper end of the support column 112 of the second glass substrate package 200b. The fixing bar 210, with a strap 220, may allow the first glass substrate package 200a and the second glass substrate package 200b to adhere to each other more tightly.

[00104] As shown in FIG. 6, the fixing bar 210 may horizontally extend to be positively combined with upper surfaces of a pair of adjacent support columns 112. Also, the strap 220 may be coupled to the support column 112, may vertically extend from an end of the fixing bar 210 to the first palette 150a and horizontally extend to penetrate through the first palette 150a, and then, may vertically extend to the other end of the fixing bar 210.

[00105] In detail, after the strap 220 is coupled to the support column 112, the strap 220 may vertically extend to a front fork hole 150FH of the first palette 150a, may extend from the front fork hole 150FH to a rear fork hole 150RH, and may vertically extend from the rear fork hole 150RH to be coupled to the other support column 112.

[00106] Tension of the strap 220 may be adjusted by a fastener 230 provided in the strap 220. In some embodiments, the faster 230 may include a ratchet.

[00107] FIG. 7B is a specific view of region B of FIG. 6, which shows, in detail, a combination relationship among the support column 112 of the second palette 150b, the fixing bar 210, and the strap 220.

[00108] Referring to FIG. 7B, the fixing bar 210 may include a fixing hole 21 Oh, and the fixing bar 210 and the support column 112 may be positively combined by inserting the protrusion 112p of the support column 112 into the fixing hole 21 Oh.

[00109] Also, the strap 220 may include fixing ends 222 and a strap body 224. The fixing ends 222 may include a strap hole 222h, and the strap hole 222h may be positively combined with the protrusion 112p. That is, the strap hole 222h may penetrate through the fixing hole 210h and may be positively combined with the protrusion 112p further protruding from the fixing hole 21 Oh.

[00110] The strap body 224 may vertically extend from a side of the fixing ends 222 toward the front fork hole 150FH (refer to FIG. 6).

[00111] FIG. 7B illustrates that the strap hole 222h and the fixing hole 21 Oh are aligned. However, the disclosure is not limited thereto.

[00112] In some embodiments, one of the two fixing ends 222, which are respectively coupled to both ends of the fixing bar 210, may be integrally formed with the fixing bar 210.

[00113] Hereinafter, the structure and the effect of the disclosure will be described in more detail by referring to a specific embodiment and a comparative embodiment. However, these embodiments do not limit the scope of the disclosure.

[00114] Table 1 shows a result obtained by forming a fluid impermeable cover around a cassette on which glass substrates are stacked, the fluid impermeable cover being sealed via thermal adhesion, and measuring a contact angle between the fluid impermeable cover with water after an interval of time. A thermal adhesion width is 40 mm, and with respect to each of the case in which air within the fluid impermeable cover is not removed and the case in which the air within the fluid impermeable cover is removed through the suction hole, results of measuring the contact angle (unit: degrees) at each location of the glass substrate, namely, an upper, lower, left, or right location, after keeping the fluid impermeable cover for 14 days and 28 days, are shown.

[00115] <Table 1>

[00116] In Table 1, "general" denotes the case in which the air within the fluid impermeable cover is not removed, and "air removed" denotes the case in which the air within the fluid impermeable cover is removed.

[00117] As shown in Table 1, the contact angles in the case in which the air within the fluid impermeable cover is removed are significantly less than the contact angles of the case in which the air within the fluid impermeable cover is not removed, with respect to all of the locations, that is, the upper, lower, left, and right locations.

[00118] The disclosure is not limited to a particular theory. However, a surface of a glass substrate is terminated with hydroxy groups (-OH), and when there is much moisture in air, the hydroxyl groups are combined with a large quantity of water vapor and adsorbs polar organic molecules in the air. Then, as time goes by, more and more organic material is adsorbed onto the polar organic molecules to form a more hydrophobic surface.

[00119] When the hydrophobic surface is formed, a subsequent cleaning operation of the glass substrate may become more difficult and the probability of particle adsorption may be increased.

[00120] Thus, a less contact angle at a specific location of the glass substrate implies that the fraction of the hydroxyl groups to which the water vapor is not adsorbed is higher, which, in turn, means a reduced probability of particle adsorption.

[00121] Table 2 summarizes defect rates when an electronic product is manufactured by using a glass product that is transported over a long period of time.

[00122] Comparative embodiment 1 corresponds to the case in which a cassette on which glass substrates are stacked is covered by a fluid impermeable cover, but air within the fluid impermeable cover is not removed. Comparative embodiments 2 and 3 correspond to the cases in which the cassette on which the glass substrates are stacked is covered by the fluid impermeable cover and air is removed from an upper direction.

[00123] Embodiments 1 through 4 correspond to the cases in which the cassette on which the glass substrates are stacked is covered by the fluid impermeable cover and air is removed from a lateral direction of the cassette.

[00124] <Table 2>

[00125] The defect rates of Table 2 indicate relative values by setting a defect rate when an electronic product is manufactured by using a glass product that is transported according to embodiment 1 to 100.

[00126] In the case in which the air within the fluid impermeable cover is not removed, a defect rate, which is as high as about 300, is identified. In the cases of comparative embodiments 2 and 3, in which the air within the fluid impermeable cover is removed from the upper direction, a large difference occurs in the defect rates.

[00127] However, in the cases of embodiments 1 through 4, in which the air within the fluid impermeable cover is removed from the lateral direction, a stable defect rate of around 100.0 is identified.

[00128] While the disclosure has been particularly shown and described with reference to embodiments thereof, numerous modifications and adaptations will be readily apparent to one of ordinary skill in the art from the detailed description and the embodiments without departing from the spirit and scope of the disclosure set forth in the claims. Therefore, it should be understood that the claims and all modifications or modified forms drawn from the concept of the claims are included in the scope of the disclosure.

[00129] According to the method of transporting the glass substrates according to the disclosure, particle adsorption with respect to the glass substrates when the glass substrates are transported over a long distance over a long period of time may be largely improved.

[00130] It should be understood that embodiments described herein should be considered in a descriptive sense only and not for purposes of limitation. Descriptions of features or aspects within each embodiment should typically be considered as available for other similar features or aspects in other embodiments. While one or more embodiments have been described with reference to the figures, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the disclosure as defined by the following claims.

Claims

WHAT IS CLAIMED IS:

1. A method of transporting glass substrates, the method comprising: stacking a plurality of glass substrates on a cassette; surrounding the cassette with a fluid impermeable cover to create a suction hole; removing air within the fluid impermeable cover through the suction hole; and sealing the suction hole.

2. The method of claim 1, wherein the suction hole is arranged in a lateral direction of the fluid impermeable cover with reference to a gravity direction.

3. The method of claim 1 , after the sealing of the suction hole, further comprising surrounding the cassette with an external cover.

4. The method of claim 1, wherein the surrounding of the cassette with the fluid impermeable cover comprises sealing the cassette within the fluid impermeable cover.

5. The method of claim 4, wherein the sealing of the cassette within the fluid impermeable cover comprises sealing the fluid impermeable cover via thermal adhesion.

6. The method of claim 5, wherein the surrounding of the cassette with the fluid impermeable cover further comprises forming the suction hole in the fluid impermeable cover, after the sealing of the cassette within the fluid impermeable cover.

7. The method of claim 5, wherein the thermal adhesion is performed to comprise a thermal adhesion width of about 20 mm to about 40 mm.

8. The method of claim 1, wherein the surrounding of the cassette with the fluid impermeable cover comprises: arranging a lower fluid impermeable cover; arranging the cassette on the lower fluid impermeable cover; covering the cassette with an upper fluid impermeable cover; and bonding the lower fluid impermeable cover with the upper fluid impermeable cover.

9. The method of claim 8, wherein the bonding is performed by thermal adhesion between the lower fluid impermeable cover and the upper fluid impermeable cover.

10. The method of claim 1, wherein the fluid impermeable cover comprises an aluminum layer.

11. A method of transporting glass substrates, the method comprising: forming a first sealed glass substrate package; forming a second sealed glass substrate package; stacking the second sealed glass substrate package on the first sealed glass substrate package; and adhering the first sealed glass substrate package and the second sealed glass substrate package to each other, wherein the forming of the first sealed glass substrate package comprises: stacking a plurality of glass substrates on a first packaging cassette comprising a support column at each of four corners; arranging a first lower fluid impermeable cover on a first palette; arranging the first packaging cassette on the first lower fluid impermeable cover; covering the first packaging cassette with a first upper fluid impermeable cover; bonding the first lower fluid impermeable cover with the first upper fluid impermeable cover such that a first suction hole is formed; removing air inside the first lower fluid impermeable cover and the first upper fluid impermeable cover through the first suction hole; and sealing the first suction hole: and the forming of the second sealed glass substrate package comprises: stacking a plurality of glass substrates on a second packaging cassette comprising a support column at each of four comers; arranging a second lower fluid impermeable cover on a second palette; arranging the second packaging cassette on the second lower fluid impermeable cover; covering the second packaging cassette with a second upper fluid impermeable cover; bonding the second lower fluid impermeable cover with the second upper fluid impermeable cover such that a second suction hole is formed; removing air inside the second lower fluid impermeable cover and the second upper fluid impermeable cover through the second suction hole; and sealing the second suction hole.

12. The method of claim 11, wherein an upper surface of the support column of the first packaging cassette and a lower surface of the second palette at a location corresponding to the support column of the first packing cassette are positively combined with each other.

13. The method of claim 12, the adhering of the first sealed glass substrate package and the second sealed glass substrate package to each other comprising: applying a fixing bar to upper surfaces of a pair of adjacent support columns of the second packaging cassette, the fixing bar horizontally extending and being configured to be positively combined with the upper surfaces of the pair of adjacent support columns of the second packaging cassette; and fixing the fixing bar to the second packaging cassette with a strap comprising one end combined with one end of the fixing bar and the other end combined with the other end of the fixing bar.

14. The method of claim 13, wherein the strap vertically extends from the one end of the fixing bar to the first palette, extends horizontally to penetrate through the first palette, and vertically extends to the other end of the fixing bar.

15. The method of claim 14, wherein the strap is configured to be fastened by a ratchet.

16. The method of claim 14, wherein the first palette comprises, in each of two facing lateral surfaces, a fork hole through which a fork of a conveyor is able to pass, and the strap passes through the fork holes of the two facing lateral surfaces.

17. The method of claim 11, wherein the first suction hole and the second suction hole are located in a lateral direction of the first packaging cassette and a lateral direction of the second packaging cassette, respectively, with reference to a gravity direction.

18. The method of claim 11, wherein each of the first lower fluid impermeable cover, the first upper fluid impermeable cover, the second lower fluid impermeable cover, and the second upper fluid impermeable cover comprises a polymer layer and a metal layer laminated on the polymer layer.

19. The method of claim 18, wherein the metal layer comprises an aluminum layer, and a thickness of the metal layer is from about 180 micrometers (pm) to about 800 pm.

20. A method of transporting glass substrates, the method comprising: stacking a plurality of glass substrates on a cassette at an angle of about 5 degrees (°) to about 90° with respect to a horizontal plane; placing the cassette on which the plurality of glass substrates are stacked, on a bottom surface of an aluminum laminate cover; surrounding lateral surfaces and upper surfaces of the plurality of glass substrates with the aluminum laminate cover; and at least partially removing air inside the aluminum laminate cover in a lateral direction of the cassette, wherein the aluminum laminate cover comprises a polymer layer and an aluminum layer laminated on the polymer layer, and a thickness of the aluminum layer is about 180 pm to about 800 pm, and the polymer layer comprises thermoplastic resin.