WO2022012371A1 - 一种半导体设备建模方法及装置 - Google Patents

一种半导体设备建模方法及装置 Download PDF

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Publication number
WO2022012371A1
WO2022012371A1 PCT/CN2021/104679 CN2021104679W WO2022012371A1 WO 2022012371 A1 WO2022012371 A1 WO 2022012371A1 CN 2021104679 W CN2021104679 W CN 2021104679W WO 2022012371 A1 WO2022012371 A1 WO 2022012371A1
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model
type
target
added
tree
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English (en)
French (fr)
Inventor
柴加加
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Beijing Naura Microelectronics Equipment Co Ltd
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Beijing Naura Microelectronics Equipment Co Ltd
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Priority to JP2022579028A priority Critical patent/JP7457168B2/ja
Priority to KR1020227044375A priority patent/KR102583241B1/ko
Priority to US18/041,120 priority patent/US20230267255A1/en
Publication of WO2022012371A1 publication Critical patent/WO2022012371A1/zh
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/36—Circuit design at the analogue level
    • G06F30/367—Design verification, e.g. using simulation, simulation program with integrated circuit emphasis [SPICE], direct methods or relaxation methods
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/20—Design optimisation, verification or simulation
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/32—Circuit design at the digital level
    • G06F30/33—Design verification, e.g. functional simulation or model checking
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/32—Circuit design at the digital level
    • G06F30/33—Design verification, e.g. functional simulation or model checking
    • G06F30/3323—Design verification, e.g. functional simulation or model checking using formal methods, e.g. equivalence checking or property checking
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F9/00—Arrangements for program control, e.g. control units
    • G06F9/06—Arrangements for program control, e.g. control units using stored programs, i.e. using an internal store of processing equipment to receive or retain programs
    • G06F9/44—Arrangements for executing specific programs
    • G06F9/445—Program loading or initiating
    • G06F9/44521—Dynamic linking or loading; Link editing at or after load time, e.g. Java class loading
    • G06F9/44526—Plug-ins; Add-ons

Definitions

  • the present application relates to the field of semiconductors, and in particular, to a semiconductor device modeling method and apparatus.
  • the main program of the equipment modeling application uses a specific type of control to display the equipment model object and the specific type of control to display the equipment model tree. Can be added to the equipment model tree to be checked as a child node of the selected model in the equipment model tree.
  • the code related to verification that is, whether the selected model in the device model object can be added to the device model tree as a child node of the selected model in the device model tree is all integrated in the main program. .
  • the verification can only be performed by the main program when the device model object is displayed with a specific type of control and the device model tree is displayed with a specific type of control.
  • the device modeling application will All verification-related codes in the main program need to be refactored, resulting in high overhead in order to meet the display requirements of device modeling.
  • the present application provides a semiconductor device modeling method and apparatus.
  • a semiconductor device modeling method including:
  • the type of the source control used to display the device model object and the type of the target control used to display the device model tree are determined, wherein the adding instruction operation is used to select the device model object to be added a model and a target model in the device model tree;
  • the verification module corresponding to the type of the source control and the type of the target control to obtain the information of the selected model to be added and the information of the selected target model; based on the preset device modeling type verification criteria a library, which verifies the information of the model to be added and the information of the target model, and determines whether the model to be added can be used as a child node of the target model in the device model tree;
  • a verification result indicating whether the model to be added can be used as a child node of the target model in the device model tree is displayed.
  • the determining the type of the source control used to display the device model object and the type of the target control used to display the device model tree includes:
  • the type of the source control used to display the device model object and the type of the target control used to display the device model tree are determined by using a pre-created generic-based function, wherein the formal parameters of the generic-based function include: Receive the formal parameters of the source control object of the source control, and the formal parameters used to receive the target control object of the target control, when the generic-based function is called, it is used to: determine the source control object through reflection and the type of the target control object to determine the type of the source control and the type of the target control.
  • the display indicates whether the to-be-added model can be used as a target model in the device model tree.
  • the verification results of the child nodes of including:
  • the method further includes:
  • the to-be-added model is added to the device model tree as a child node of the target model.
  • the display indicates whether the to-be-added model can be used as a target model in the device model tree.
  • the verification results of the child nodes of including:
  • the method further includes:
  • the operation in response to the addition indication comprises:
  • the to-be-added model is located at a position of one of the target models in the displayed model device tree.
  • the type of the source control is one of the following: TreeView type, ListView type
  • the type of the target control is one of the following: TreeView type, ListView type.
  • the device modeling type verification criteria library includes: device modeling type verification criteria based on data collection standards.
  • the data collection standard is a currently adopted version of the data collection standard among the multiple versions of the data collection standard.
  • an apparatus for modeling a semiconductor device including:
  • a determining unit configured to determine a type of source control for displaying the device model object and a type of target control for displaying the device model tree in response to an adding instruction operation, wherein the adding instruction operation is used for selecting the device model object The model to be added in and the target model in the device model tree;
  • the verification unit is configured to use the verification module corresponding to the type of the source control and the type of the target control to obtain the information of the selected model to be added and the information of the selected target model; based on the preset Device modeling type verification criteria library, verify the information of the model to be added and the information of the target model, and determine whether the model to be added can be used as a child of the target model in the device model tree node;
  • the feedback unit is configured to display a verification result indicating whether the model to be added can be used as a child node of the target model in the device model tree.
  • the semiconductor device modeling method and device realizes the use of a verification module independent of the main program to complete verification.
  • the corresponding verification module can complete the selection of the model to be added in the device model object. Can be added to the equipment model tree as a check of the child node of the selected target model in the equipment model tree.
  • the corresponding verification module can be used for verification.
  • the corresponding verification module can be used for verification. Including the verification-related code, it will not have any impact on the main program, avoiding the need to refactor all verification-related codes in the main program of the device modeling application to meet the display requirements of device modeling. The problem.
  • FIG. 1 shows a flowchart of a device modeling method provided by an embodiment of the present application
  • FIG. 2 shows a schematic diagram of the effect of displaying a device model object and a device model tree when modeling a semiconductor device
  • Figure 3 shows a schematic flow chart of equipment modeling
  • Fig. 4 shows the principle schematic diagram of equipment modeling
  • FIG. 5 shows a structural block diagram of an apparatus for modeling equipment provided by an embodiment of the present application.
  • FIG. 1 shows a flowchart of a semiconductor device modeling method provided by an embodiment of the present application, and the method includes:
  • Step 101 in response to the adding instruction operation, determine the type of the source control for displaying the device model object and the type of the target control for displaying the device model tree.
  • the source control for presenting the device model object may refer to a control currently being used for presenting the device model object.
  • the target widget for displaying the device model tree may refer to the widget currently being used for displaying the device model tree.
  • the source control is of type ListView and the target control is of type TreeView.
  • the device model object can be displayed to the user through a ListView type source control, and the device model tree can be displayed to the user through a TreeView type target control.
  • the main program in the device modeling application can call the source control to display the device model object, and call the target control to display the device model tree.
  • model in the device model object selected by the user during the modeling of the semiconductor device may be referred to as the model to be added.
  • the model in the equipment model tree selected by the user during equipment modeling can be called the target model.
  • the above-mentioned adding instruction operation in step 101 is used to select the model to be added in the device model object and the target model in the device model tree.
  • operations in response to adding an indication may include:
  • a click action may be performed first to select a model to be added in the device model object, and then a click action may be performed to select a target model in the model device tree. Drag the selected model to be added to the position of the selected target model.
  • one click to select a to-be-added model in the device model object, and then drag the selected to-be-added model to the position of the corresponding target model.
  • the above dragging action can be specifically: the user can drag an information item in the information displayed by a source control to the position of an information item in the information displayed by the target control, and after completing the dragging action, it will be The selected model to be added is dragged to the position of the selected target model.
  • the above adding instruction operation is not limited to dragging and dropping.
  • any other method can also be used to add a to-be-added model in the displayed device model objects to the displayed model device tree.
  • the position of a target model for example, you can first select a model to be added in the device model object by a click action, and then use any gesture or action to add the to-be-added model to a target model located in the displayed model device tree s position.
  • the addition instruction operation can be detected by the main program in the device modeling application.
  • the module for determining the control type in the device modeling application can determine the type of the source control used to display the device model object and the type of the target control used to display the device model tree.
  • the main program in the device modeling application does not need to consider the type of the source control, the type of the target control, and does not need to obtain the information of the selected corresponding model.
  • the information of the selected corresponding model is acquired by the corresponding verification module.
  • the user can select the corresponding model to be added in the equipment model object and the corresponding target model in the equipment model tree each time the user performs an adding instruction operation.
  • the type of source control and the type of target control may be recorded in the configuration file of the device modeling application.
  • the type of the source control used to display the device model object and the type of the target control used to display the device model tree can be obtained by reading the above configuration file.
  • a device model object includes multiple models.
  • Each model in the device model object can each be associated with a data structure related to the semiconductor device. For example, if the device is a robot, a model in the device model object is associated with a data structure that describes the robot's robotic arm. Another model in the device model object is associated with a data structure that stores parameters of a certain type for the robot.
  • the relationship between different models in the device model tree can be clearly represented by the tree structure. Since different models can each be associated with a semiconductor device-related data structure. Therefore, through the equipment model tree, the association between different data structures related to semiconductor production equipment can be clearly represented.
  • the above-mentioned equipment model tree can finally be provided to the management system and data acquisition application of the factory.
  • the data acquisition application can store the collected data related to the semiconductor equipment in the data structure associated with the corresponding model according to the SEMI InterfaceA standard, and the server of the factory management system can follow the SEMI InterfaceA standard. The corresponding data related to the semiconductor device is read.
  • each model is regarded as a node.
  • the same model in the device model object can be added to the device model tree multiple times as a child node of the corresponding target model.
  • the name of the model in the equipment model tree can be modified.
  • the equipment model tree there can be multiple models located in different positions, which are of the same type as the model but with different names.
  • FIG. 2 shows a schematic diagram of the effect of displaying a device model object and a device model tree when modeling a semiconductor device.
  • the child nodes are the models in the device model object, such as each item under “Hierarchy”, “Parameter”, “Event”, each item under “Exceptions”, “State Machines” Each of the items below, etc.
  • the equipment model tree a part of the model in the equipment model tree is displayed according to the subordinate relationship. The user clicks the "+" to the left of a model with child nodes to further display each model that is a child node of that model.
  • determining the type of source control for presenting the device model object and the type of target control for presenting the device model tree comprises: utilizing a pre-created generics-based function to determine the source for presenting the device model object
  • the type of the control and the type of the target control used to display the device model tree wherein the formal parameters of the generic-based function include: the formal parameters of the source control object used to receive the source control, the target control object used to receive the target control
  • the formal parameters of the generic-based function are used to: determine the type of the source control object and the type of the target control object through reflection to determine the type of the source control and the type of the target control.
  • a device modeling application can be developed using the C# language.
  • a predefined generic-based function can be used to determine the type of the source control and the type of the source control used to display the device model tree. The type of the target control.
  • a generic-based function has two formal parameters of the generic type, and the types of the formal parameters of the two generic types can be the T parameter type that belongs to the generic type in the C# language.
  • Each type of control that can be used to display the device object and each type of control that can be used to display the device model tree can be defined in advance as the base class of the T parameter type in the C# language.
  • one of the formal parameters of the two generic types of the generic-based function can be used as a formal parameter of the generic type that can receive an object representing the type of the source control, and the other formal parameter can be A formal parameter of the generic type of an object of type.
  • the main program can use the storage location of the code of the source control and the storage location of the code of the target control, respectively.
  • An object representing the type of the source control can be passed as an argument to a formal parameter of a generic type that can receive an object representing the type of the target control.
  • the function based on generics when called, it is used to obtain the type of the source control through the reflection mechanism of the C# language based on the object representing the type of the source control; based on the object representing the type of the target control, through the reflection mechanism of the C# language Get the type of the target control.
  • Step 102 use the verification module corresponding to the type of the source control and the type of the target control to obtain the information of the selected model to be added and the information of the selected target model; based on the preset equipment modeling type verification criterion library , check the information of the model to be added and the information of the target model, and determine whether the model to be added can be used as a child node of the target model in the device model tree.
  • a verification module corresponding to the type of the source control and the type of the target control can be used to obtain the information of the selected model to be added and the selected target information about the model.
  • the type of the source control and the type of the target control can form a control type combination.
  • the verification module corresponding to the type of the source control and the type of the target control may refer to the verification module corresponding to the combination of the control types composed of the type of the source control and the type of the target control.
  • the type of source control that can display the device model object may be referred to as the candidate control type of the device model object.
  • the type of the target control that can display the device model tree can be called the candidate control type of the device model tree.
  • the device modeling application may include multiple verification modules independent of the main program.
  • Each verification module can correspond to a control type combination.
  • each verification module it simultaneously corresponds to one control type and another control type in the control type combination corresponding to the verification module.
  • all candidate control types for device model objects include: ListView type, TreeView type.
  • All candidate control types of the device model tree include: ListView type, TreeView type.
  • Combining the candidate control types of the device model object and the candidate control types of the device model tree four combinations of control types can be obtained. Assume that the first control type combination includes: TreeView type, TreeView type. The second control type combination includes: ListView type, TreeView type. The third control type combination includes: TreeView type, ListView type.
  • the fourth control type combination includes: ListView type, ListView type.
  • the device modeling application includes four verification modules, and each verification module corresponds to a control type combination.
  • the verification module corresponding to the combination of the control types composed of the ListView type and the TreeView type , to obtain the information of the selected model to be added and the information of the selected target model.
  • each model information in the device model object corresponds to a node of the source control.
  • each model information in the device model tree corresponds to a node of the target control.
  • a model to be added in the device model object when a model to be added in the device model object is selected, for the source control used to display the device model object, it is a source control corresponding to the selected model information to be added. Node is selected. The ID of the currently selected node is recorded in the attribute information of the source control.
  • the verification module corresponding to the type of the source control and the type of the target control that is, the verification module corresponding to the combination of the control types composed of the type of the source control and the type of the target control, is obtained from the storage location of the attribute information of the source control
  • the identifier of the currently selected node to determine that the node corresponding to the selected model information to be added is selected.
  • the attribute information of the node corresponding to the selected model information to be added includes information of the model to be added, and the information of the model to be added may be a unique identifier of the model to be added that can be used to distinguish it from other models. Thus, the information of the selected model to be added can be finally obtained.
  • a target model information in the equipment model tree is selected, for the target control used to display the equipment model tree, a node in the target control corresponding to the selected target model information is selected. .
  • the verification module corresponding to the type of the source control and the type of the target control is obtained from the storage location of the attribute information of the target control Identification of the currently selected node to determine which node corresponding to the selected target model is selected.
  • the attribute information of the node corresponding to the selected target model includes information of the target model, and the information of the target model may be a unique identifier of the target model that can be distinguished from other models. Thus, the information of the selected target model can be finally acquired.
  • the type of the source control used to display the device model object is ListView type
  • the type of the target control used to display the device model tree is the type of TreeView.
  • the verification module of the combination of control types composed of types obtains the information of the selected model to be added and the selected target model information.
  • the type of the source control used to display the device model object is ListView
  • the type of the target control used to display the device model tree is TreeView.
  • the combination of control types corresponding to the TreeView type and the TreeView type can be used.
  • the verification module can be verified without changing the code of the main program.
  • the The type verification module verifies the information of the model to be added and the information of the target model based on the preset equipment modeling type verification criterion library, and determines whether the to-be-added model can be used as a child node of the target model in the equipment model tree.
  • the device modeling type verification criterion library may include: information of each model in the device model object, and device modeling type verification criteria corresponding to each model in the device model object.
  • the information of the model and the equipment modeling type verification criterion corresponding to the model are stored in the equipment modeling type verification criterion library.
  • the device modeling type verification criteria corresponding to the model may include: all types of models in the device model tree that can become parent nodes of the model.
  • model information to be added can be added to the equipment model tree as the target Child node for model information.
  • the device modeling type verification criteria library includes: device modeling type verification criteria based on data collection standards.
  • the data acquisition standard may be the SEMI InterfaceA standard.
  • the model can be defined in the SEMI InterfaceA standard as a child node of which types of models in the device model tree. Based on the SEMI InterfaceA standard, each model in the device model object can be pre-established corresponding to the device modeling type verification criteria based on the SEMI InterfaceA standard, and the device modeling type verification criteria library can be obtained.
  • the preset device modeling type verification criterion library currently used to determine whether the model to be added can be used as a child node of the target model in the device model tree the preset device modeling type verification The data acquisition standard on which the device modeling type verification criterion in the verification criterion library is based is the currently adopted version of the data acquisition standard among the multiple versions of the data acquisition standard.
  • the currently adopted version of the data acquisition standard may refer to the currently used SEMI InterfaceA standard among the multiple versions of the SEMI InterfaceA standard.
  • the 1105 version of the SEMI InterfaceA standard and the 0710 version of the SEMI InterfaceA standard are predefined, and the current version is the 0710 version of the SEMI InterfaceA standard.
  • Which version of the SEMI InterfaceA standard is currently used is determined according to the data transmission requirements of the data acquisition application and the semiconductor production equipment in the factory, and the data transmission requirements of the server of the factory management system and the semiconductor production equipment in the factory.
  • a device modeling type verification criterion library of the version of the SEMI InterfaceA standard can be established respectively.
  • the device modeling type verification criteria in the device modeling type verification criteria library of this version of the SEMI InterfaceA standard are based on the device modeling type verification of this version of the SEMI InterfaceA standard. test criteria.
  • Step 103 displaying a verification result indicating whether the model to be added can be used as a child node of the target model in the device model tree.
  • the verification result can be displayed to the user.
  • a verification result indicating that the to-be-added model can be added to the equipment model tree as a child node of the target model information is displayed to the user. For example, a marker is displayed to the user indicating that the model to be added can be added to the equipment model tree as a child node of the target model.
  • the user is shown the verification result indicating that the to-be-added model cannot be added to the equipment model tree as a child node of the target model information .
  • a marker is displayed to the user indicating that the model to be added cannot be added to the equipment model tree as a child node of the target model.
  • a verification result indicating whether the model information to be added can be used as a child node of the target model information in the device model tree is displayed, Including: displaying the verification result of the model information to be added can be used as the child node of the target model information in the equipment model tree; and displaying the verification result indicating whether the model information to be added can be used as the child node of the target model information in the equipment model tree
  • the method further includes: in response to the user's adding confirmation operation, adding the to-be-added model to the device model tree as a child node of the target model.
  • the verification result indicates that the model to be added can be used as a child node of the target model
  • the verification result indicates that the model to be added can be added to the device model tree as a child node of the target model is displayed to the user
  • the user determines to After the model to be added is added to the device model tree, the user can perform the addition confirmation operation.
  • the model to be added can be added to the device model tree as a child node of the target model in response to the user's adding confirmation operation.
  • a verification result indicating whether the model to be added can be used as a child node of the target model in the device model tree is displayed, including : display the verification result that the model to be added can be used as a child node of the target model in the equipment model tree; and after displaying the verification result indicating whether the model to be added can be used as a child node of the target model in the equipment model tree, It also includes: in response to the user's adding and abandoning operation, abandoning adding the to-be-added model to the device model tree.
  • the user After displaying to the user the verification result indicating that the to-be-added model can be added to the device model tree as a child node of the target model, if the user abandons adding the to-be-added model to the device model tree, the user may perform an add abandonment operation.
  • the to-be-added model can be discarded from being added to the device model tree in response to the user's adding and discarding operation.
  • the device modeling type validation criteria in the device modeling type validation criteria library based on the data collection criteria are modified.
  • the corresponding equipment modeling type based on the data acquisition standard in the equipment modeling type verification criterion library of the changed data acquisition standard can be verified.
  • the criteria are modified to obtain the corresponding updated equipment modeling type verification criteria library.
  • the model defined in the currently adopted version of the SEMI InterfaceA standard can become the parent of the model.
  • the type of the node changes, it will cause the current version of the SEMI InterfaceA standard to change.
  • the corresponding device modeling based on the currently adopted version of the SEMI InterfaceA standard in the device modeling type verification criterion library of the currently adopted version of the SEMI InterfaceA standard can be modeled Type verification criteria, that is, modify the device modeling type verification criteria corresponding to each model whose type of the parent node has changed, and obtain the updated, currently adopted version of the device modeling type verification of the SEMI InterfaceA standard.
  • Validation criteria library When the currently adopted version of the SEMI InterfaceA standard changes, the corresponding device modeling based on the currently adopted version of the SEMI InterfaceA standard in the device modeling type verification criterion library of the currently adopted version of the SEMI InterfaceA standard can be modeled Type verification criteria, that is, modify the device modeling type verification criteria corresponding to each model whose type of the parent node has changed, and obtain the updated, currently adopted version of the device modeling type verification of the SEMI InterfaceA standard.
  • the device modeling type of the currently adopted version of the SEMI InterfaceA standard is calibrated. Modify the device modeling type verification criteria corresponding to the model in the verification criteria library to obtain the updated, currently adopted version of the device modeling type verification criteria library of the SEMI InterfaceA standard.
  • the device modeling type verification criterion library of any version of the SEMI InterfaceA standard is independent of the main program, and at the same time, any device in the device modeling type verification criterion library of any version of the SEMI InterfaceA standard Modeling type check criteria are independent of the main program.
  • the device modeling type verification criterion library of the version of the SEMI InterfaceA standard is currently used to determine whether the model to be added can be used as the child node of the target model in the device model tree.
  • the preset device modeling type verification criterion library when the version of the SEMI InterfaceA standard changes, the updated device modeling type verification criterion library of this version of the SEMI InterfaceA standard can be generated.
  • the updated device modeling type verification criteria library of this version of the SEMI InterfaceA standard can be used as the current tool for determining whether the model to be added can be used as the target model in the device model tree.
  • the preset device modeling type verification criterion library of the child node is used to determine whether the model to be added can be used as a child node of the target model in the device model tree in the subsequent verification process.
  • the preset, preset Equipment modeling type verification criteria library in the case of changes in this version of the SEMI InterfaceA standard, since the main program does not include the code related to the verification process, there is no need to modify the code of the main program. The code is refactored, and at the same time, there is no need to modify the code related to the verification process of the verification module.
  • the device modeling application is easy to maintain, and at the same time, the operating efficiency of the device modeling code is improved, a large number of code refactorings caused by the change of the SEMI InterfaceA standard are avoided, development costs are saved, and maintenance costs are reduced.
  • FIG. 3 shows a schematic flowchart of device modeling.
  • the newly created model file includes device model objects.
  • the type verification pool integrates multiple verification modules and different versions of SEMI InterfaceA's device modeling type verification criteria library.
  • the type verification module corresponding to the type of the source control and the type of the target control in the type verification pool performs verification and comparison according to the device modeling type verification criteria based on the current version of SEMI InterfaceA, and determines the selected model to be added. Whether it can be added to the device model tree as a child node of the target model to get feedback results.
  • the type verification pool feeds back the feedback result to the main program.
  • FIG. 4 shows a schematic diagram of the principle of device modeling.
  • the type of the source control is of type TreeView and the type of the target control is of type TreeView
  • the type of source control is of type ListView and the type of the target control is of type TreeView
  • the type of source control is of type TreeView
  • the type of target control is The type is ListView type three display cases.
  • the corresponding verification module can be used for verification. Any verification module is independent of the main program.
  • the verification module corresponding to the type of the source control and the type of the target control is used, namely Corresponds to the validation module of the control type combination consisting of ListView type and TreeView type.
  • the type of the source control used to display the device model object is ListView type
  • the type of the target control used to display the device model tree is of type TreeView
  • the type of the source control used to display the device model object is changed from ListView type to TreeView type
  • the verification module corresponding to the combination of the control type composed of the TreeView type and the TreeView type without changing the main program. code.
  • the device modeling type verification criteria based on the changed version of the SEMI InterfaceA standard in the device modeling type verification criteria library of the changed version of the SEMI InterfaceA standard can be used. Make the appropriate modifications. Since the main program does not include the verification code, if any version of the SEMI InterfaceA standard changes, there is no need to modify the code of the main program, nor the code related to the verification process.
  • Validation(Type, Type) can be called by the main program, and an object representing the type of the source control and an object representing the type of the target control can be passed in as actual parameters.
  • Validation(Type, Type) is used when called: based on the object representing the type of the source control, the type of the source control is obtained through the reflection mechanism of the C# language; based on the object representing the type of the target control, it is obtained through the reflection mechanism of the C# language The type of the target control.
  • steps 101-103 exemplarily describe the operations that need to be performed once in the process of verifying whether the selected model to be added can be used as a child node of the target model in the device model tree.
  • FIG. 5 shows a structural block diagram of an apparatus for modeling a semiconductor device provided by an embodiment of the present application.
  • the semiconductor device modeling includes: a determination unit 501 , a verification unit 502 , and a feedback unit 503 .
  • the determining unit 501 is configured to, in response to the adding instruction operation, determine the type of the source control used to display the device model object and the type of the target control used to display the device model tree, wherein the adding instruction operation is used to select one of the device model objects.
  • the verification unit 502 is configured to use the verification module corresponding to the type of the source control and the type of the target control to obtain the information of the selected model to be added and the information of the selected target model; based on the preset equipment modeling Type verification criteria library, verify the information of the model to be added and the information of the target model, and determine whether the model to be added can be used as a child node of the target model in the device model tree;
  • the feedback unit 503 is configured to display a verification result indicating whether the model to be added can be used as a child node of the target model in the device model tree.
  • the determining unit 501 is further configured to: determine the type of the source control used to display the device model object and the type of the target control used to display the device model tree by using a pre-created generic-based function, wherein based on The formal parameters of the generic function include: the formal parameters of the source control object used to receive the source control, and the formal parameters of the target control object used to receive the target control.
  • the generic function is called, it is used to: determine through reflection The type of the source control object and the type of the target control object to determine the type of the source control and the type of the target control.
  • the feedback unit 503 is further configured to, when it is determined that the model to be added can be used as a child node of the target model in the equipment model tree, display a correction that the model to be added can be used as a child node of the target model in the equipment model tree test results;
  • the semiconductor device modeling apparatus also includes:
  • the adding unit is configured to add the to-be-added model to the device model in response to the user's adding confirmation operation after the feedback unit 503 displays the verification result indicating whether the to-be-added model can be used as a child node of the target model in the device model tree In the tree, as child nodes of the target model.
  • the feedback unit 503 is further configured to display that the model to be added can be a child node of the target model in the device model tree. verification results;
  • the semiconductor device modeling apparatus also includes:
  • Abandon adding unit is configured to, after the feedback unit 503 displays the verification result indicating whether the model to be added can be used as a child node of the target model in the device model tree, in response to the user's adding abandonment operation, abandon adding the model to be added to the device model tree. in the device model tree.
  • the adding instruction operation includes: dragging the selected model to be added to the position of the selected target model.
  • the type of the source control is one of the following: TreeView, ListView
  • the type of the target control is one of the following: TreeView, ListView.
  • the data collection standard is the currently adopted version of the data collection standard among the multiple versions of the data collection standard.
  • the semiconductor device modeling apparatus further includes:
  • the modifying unit is configured to modify the device modeling type verification criteria based on the data acquisition standard in the device modeling type verification criteria library in response to the change of the data acquisition standard.
  • the present application also provides an electronic device, which can be configured with one or more processors; a memory, used to store one or more programs, and the one or more programs may include steps for executing the descriptions in the foregoing embodiments. instruction of the operation.
  • One or more programs when executed by one or more processors, cause the one or more processors to perform the operations described in the above-described embodiments.
  • the present application also provides a computer-readable medium, which may be included in the electronic device; or may exist alone without being assembled into the electronic device.
  • the above-mentioned computer-readable medium carries one or more programs, and when the one or more programs are executed by the electronic device, causes the electronic device to perform the operations described in the above-mentioned embodiments.
  • Computer-readable medium described in this application may be a computer-readable signal medium or a computer-readable storage medium, or any combination of the above two.
  • Computer-readable storage media may include, but are not limited to, electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatuses, or devices, or any combination thereof, for example. More specific examples of computer readable storage media may include, but are not limited to, electrical connections with one or more wires, portable computer disks, hard disks, random access memory (RAM), read only memory (ROM), erasable Programmable read only memory (EPROM or flash memory), fiber optics, portable compact disk read only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the foregoing.
  • a computer-readable storage medium may be any tangible medium that includes or stores a program that can be used by or in conjunction with a message execution system, apparatus, or device.
  • a computer-readable signal medium may include a data signal propagated in baseband or as part of a carrier wave, carrying computer-readable program code therein. Such propagated data signals may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the foregoing.
  • a computer-readable signal medium can also be any computer-readable medium other than a computer-readable storage medium that can transmit, propagate, or transport a program for use by or in connection with a message execution system, apparatus, or device .
  • Program code embodied on a computer readable medium may be transmitted using any suitable medium including, but not limited to, wireless, wireline, optical fiber cable, RF, etc., or any suitable combination of the foregoing.
  • each block in the flowchart or block diagrams may represent a module, segment, or portion of code that includes one or more logical functions for implementing the specified functions executable message.
  • the functions noted in the blocks may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved.
  • each block of the block diagrams and/or flowchart illustrations, and combinations of blocks in the block diagrams and/or flowchart illustrations can be implemented in dedicated hardware-based systems that perform the specified functions or operations , or can be implemented with a combination of dedicated hardware and computer messages.

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Abstract

一种半导体设备建模方法及装置，该方法包括：响应于添加指示操作，确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型（101），其中，添加指示操作用于选择设备模型对象中的待添加模型和设备模型树中的目标模型；利用对应于源控件的类型和所述目标控件的类型的校验模块，获取被选择的待添加模型的信息和被选择的目标模型的信息；基于预置的设备建模类型校验准则库，对待添加模型的信息和目标模型的信息进行校验，确定所述待添加模型是否可以在所述设备模型树中作为所述目标模型的子节点（102）；显示指示待添加模型是否可以在所述设备模型树中作为目标模型的子节点的校验结果（103）。该方法具有更好的适用性。

Description

一种半导体设备建模方法及装置 技术领域
本申请涉及半导体领域，具体涉及一种半导体设备建模方法及装置。
背景技术
目前，在进行设备建模时，由设备建模应用的主程序在利用特定类型的控件展示设备模型对象和特定类型的控件展示设备模型树的情况下，对设备模型对象中的被选择的模型是否可以添加到设备模型树中以作为设备模型树中的被选择的模型的子节点进行校验。与校验相关的代码即对设备模型对象中的被选择的模型是否可以添加到设备模型树中以作为设备模型树中的被选择的模型的子节点进行校验的代码全部集成在主程序中。
一方面，只能由主程序在利用特定类型的控件展示设备模型对象和特定类型的控件展示设备模型树的情况下进行校验。另一方面，在进行设备建模时，若根据设备建模在展示方面的需求，展示设备模型对象的控件类型发生变化和/或展示设备模型树的控件类型发生变化，则设备建模应用的主程序中的与校验相关的代码全部需要重构，造成为适应设备建模在展示方面的需求，开销大。
发明内容
为克服相关技术中存在的问题，本申请提供一种半导体设备建模方法及装置。
根据本申请实施例的第一方面，提供一种半导体设备建模方法，包括：
响应于添加指示操作，确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型，其中，所述添加指示操作用于选择所 述设备模型对象中的待添加模型和所述设备模型树中的目标模型；
利用对应于所述源控件的类型和所述目标控件的类型的校验模块，获取被选择的待添加模型的信息和被选择的目标模型的信息；基于预置的设备建模类型校验准则库，对所述待添加模型的信息和所述目标模型的信息进行校验，确定所述待添加模型是否可以在所述设备模型树中作为所述目标模型的子节点；
显示指示所述待添加模型是否可以在所述设备模型树中作为所述目标模型的子节点的校验结果。
在一些实施例中，所述确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型包括：
利用预先创建的基于泛型的函数确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型，其中，所述基于泛型的函数的形式参数包括：用于接收所述源控件的源控件对象的形式参数、用于接收所述目标控件的目标控件对象的形式参数，所述基于泛型的函数在被调用时用于：通过反射确定所述源控件对象的类型和所述目标控件对象的类型，以确定所述源控件的类型和所述目标控件的类型。
在一些实施例中，在确定所述待添加模型可以在所述设备模型树中作为所述目标模型的子节点时，所述显示指示所述待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果，包括：
显示所述待添加模型可以在设备模型树中作为目标模型的子节点的校验结果；以及
在所述显示指示所述待添加模型是否可以在所述设备模型树中作为所述目标模型的子节点的校验结果之后，所述方法还包括：
响应于用户的添加确认操作，将所述待添加模型添加至所述设备模型树中，作为所述目标模型的子节点。
在一些实施例中，在确定所述待添加模型可以在所述设备模型树中作为所述目标模型的子节点时，所述显示指示所述待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果，包括：
显示所述待添加模型可以在设备模型树中作为目标模型的子节点的校验结果；以及
在所述显示指示所述待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果之后，所述方法还包括：
响应于用户的添加放弃操作，放弃将所述待添加模型添加至所述设备模型树中。
在一些实施例中，所述响应于添加指示操作包括：
响应于用户将展示的所述设备模型对象中的一个所述待添加模型拖曳至位于展示的所述模型设备树中的一个所述目标模型的位置。
在一些实施例中，源控件的类型为以下之一：TreeView类型、ListView类型，目标控件的类型为以下之一：TreeView类型、ListView类型。
在一些实施例中，所述设备建模类型校验准则库包括：基于数据采集标准的设备建模类型校验准则。
在一些实施例中，所述数据采集标准为多个版本的数据采集标准中的当前采用的版本的数据采集标准。
根据本申请实施例的第二方面，提供一种半导体设备建模装置，包括：
确定单元，被配置为响应于添加指示操作，确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型，其中，所述添加指示操作用于选择设备模型对象中的待添加模型和设备模型树中的目标模型；
校验单元，被配置为利用对应于所述源控件的类型和所述目标控件的类型的校验模块，获取被选择的待添加模型的信息和被选择的目标模型的信 息；基于预置的设备建模类型校验准则库，对所述待添加模型的信息和所述目标模型的信息进行校验，确定所述待添加模型是否可以在所述设备模型树中作为所述目标模型的子节点；
反馈单元，被配置为显示指示所述待添加模型是否可以所述在设备模型树中作为所述目标模型的子节点的校验结果。
本申请实施例提供的半导体设备建模方法及装置，一方面实现了利用独立于主程序的校验模块完成校验。针对任意一个用于展示设备模型对象的源控件的类型和任意一个用于展示设备模型树的目标控件的类型，均可以由相应的校验模块完成对设备模型对象中的被选择的待添加模型是否可以添加到设备模型树中以作为设备模型树中的被选择的目标模型的子节点的校验。可以在采用任意一个类型的控件展示设备模型对象和任意一个类型的目标控件展示设备模型树的情况下，利用相应的校验模块进行校验。
另一方面，当用于展示设备模型对象的源控件的类型和/或用于展示设备模型树的目标控件的类型发生变化时，采用相应的校验模块进行校验即可，主程序中不包括与校验相关的代码，不会对主程序产生任何影响，避免了为适应设备建模在展示方面的需求需要对设备建模应用的主程序中的与校验相关的代码全部进行重构的问题。
附图说明
此处的附图被并入说明书中并构成本说明书的一部分，示出了符合本申请的实施例，并与说明书一起用于解释本申请的原理。
图1示出了本申请实施例提供的设备建模方法的流程图；
图2示出了在半导体设备建模时展示设备模型对象和设备模型树的效果示意图；
图3示出了设备建模的流程示意图；
图4示出了设备建模的原理示意图；
图5示出了本申请实施例提供的设备建模装置的结构框图。
具体实施方式
下面结合附图和实施例对本申请作进一步的详细说明。可以理解的是，此处所描述的具体实施例仅仅用于解释相关发明，而非对该发明的限定。另外还需要说明的是，为了便于描述，附图中仅示出了与有关发明相关的部分。
需要说明的是，在不冲突的情况下，本申请中的实施例及实施例中的特征可以相互组合。下面将参考附图并结合实施例来详细说明本申请。
图1示出了本申请实施例提供的半导体设备建模方法的流程图，该方法包括：
步骤101，响应于添加指示操作，确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型。
用于展示设备模型对象的源控件可以是指当前展示设备模型对象正在使用的控件。用于展示设备模型树的目标控件可以是指当前展示设备模型树正在使用的控件。
例如，源控件的类型为ListView类型，目标控件的类型为TreeView类型。在进行设备建模时，在设备建模界面上，可以通过一个ListView类型的源控件向用户展示设备模型对象，可以通过一个TreeView类型的目标控件向用户展示设备模型树。
在进行半导体设备建模时，可以由设备建模应用中的主程序调用源控件来展示设备模型对象，调用目标控件来展示设备模型树。
在本申请中，可以将在进行半导体设备建模时，由用户选择的位于设备模型对象中的模型称之为待添加模型。
可以将在进行设备建模时，由用户选择的位于设备模型树中的模型称之 为目标模型。
步骤101中的上述添加指示操作用于选择设备模型对象中的待添加模型和设备模型树中的目标模型。
例如，在进行半导体设备建模时，响应于添加指示操作可以包括：
响应于用户将展示的所述设备模型对象中的一个待添加模型拖曳至位于展示的模型设备树中的一个所述目标模型的位置。
在一些实施例中，上述添加指示操作可以先进行一次点击动作对设备模型对象中的一个待添加模型进行选择，再进行一次点击动作对模型设备树中的一个目标模型进行选择，之后，将所选择的待添加模型拖曳至所选择的目标模型的位置。又或者，上述添加指示操作也可以仅点击一次对设备模型对象中的一个待添加模型进行选择，然后将所选择的待添加模型拖曳至相应的目标模型的位置。
上述拖拽动作具体可以为：用户可以将一个源控件展示的信息中的一个信息项拖拽至目标控件展示的信息中的一个信息项所在的位置，在完成该拖曳动作之后，即实现将被选择的待添加模型拖曳至被选择的目标模型的位置。
需要说明的是，上述添加指示操作并不局限于拖拽，在实际应用中，还可以采用其他任意方式实现将展示的设备模型对象中的一个待添加模型添加至位于展示的模型设备树中的一个目标模型的位置，例如可以先进行一次点击动作对设备模型对象中的一个待添加模型进行选择，然后采用任意手势或者动作将该待添加模型添加至位于展示的模型设备树中的一个目标模型的位置。
在进行设备建模时，可以由设备建模应用中的主程序检测添加指示操作。当检测到添加指示操作时，可以由设备建模应用中的用于确定控件类型的模块，确定用于展示设备模型对象的源控件的类型和用于展示设备模型树 的目标控件的类型。设备建模应用中的主程序无需考虑源控件的类型、目标控件的类型，也无需获取被选择的相应的模型的信息。在本申请中，由相应的校验模块获取被选择的相应的模型的信息。
在进行设备建模时，用户每一次进行添加指示操作，均可以选择设备模型对象中的相应的待添加模型、设备模型树中的相应的目标模型。
在本申请中，可以在设备建模应用的配置文件中记录源控件的类型和目标控件的类型。
当需要确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型时，可以通过读取上述配置文件获取源控件的类型和目标控件的类型。
在本申请中，设备模型对象包括多个模型。
设备模型对象中的每一个模型可以各自关联一个与半导体设备相关的数据结构。例如，设备为机器人，设备模型对象中的一个模型关联一个描述机器人的机械臂的数据结构。设备模型对象中的另一个模型关联一个用于存储机器人的某一个类型的参数的数据结构。
在设备模型树中，通过树形结构可以清晰地表示设备模型树中的不同的模型之间的关联关系。由于不同的模型可以各自关联一个与半导体设备相关的数据结构。因此，通过设备模型树，可以清晰地表示不同的与半导体生产设备相关的数据结构之间的关联关系。上述设备模型树最终可以提供给工厂的管理系统和数据采集应用。数据采集应用可以按照SEMI InterfaceA标准，将采集的与半导体设备相关的数据存储在相应的模型关联的数据结构中，工厂的管理系统的服务器可以按照SEMI InterfaceA标准，从相应的模型关联的数据结构中读取相应的与半导体设备相关的数据。
在设备模型树中，每一个模型分别作为一个节点。
对于设备模型树中每一个模型，均具有至少一个父节点和/或至少一个 子节点。
在本申请中，设备模型对象中的同一个模型可以多次被添加到设备模型树中，以作为相应的目标模型的子节点。
对于设备模型对象中的一个模型，每一次将该模型添加到设备模型树中，均可以修改该模型在设备模型树中的名称。在设备模型树中可以包括多个位于不同的位置的，与该模型的类型相同只是名称不同的模型。
请参考图2，其示出了在半导体设备建模时展示设备模型对象和设备模型树的效果示意图。
在示出的设备模型对象中，子节点为设备模型对象中的模型，例如“Hierarchy”下的每一项、“Parameter”、“Event”、“Exceptions”下的每一项、“State Machines”下的每一项等。在设备模型树中，按照从属关系展示了设备模型树中的一部分模型。用户点击一个具有子节点的模型左侧的“+”，可以进一步展示作为该模型的子节点的每一个模型。
在一些实施例中，确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型包括：利用预先创建的基于泛型的函数确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型，其中，基于泛型的函数的形式参数包括：用于接收源控件的源控件对象的形式参数、用于接收目标控件的目标控件对象的形式参数，基于泛型的函数在被调用时用于：通过反射确定源控件对象的类型和目标控件对象的类型，以确定源控件的类型和目标控件的类型。
在本申请中，可以利用C#语言开发设备建模应用。在确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型时，可以利用预先定义的基于泛型的函数确定源控件的类型和用于展示设备模型树的目标控件的类型。
基于泛型的函数具有两个泛型类型的形式参数，两个泛型类型的形式参 数的类型可以均为C#语言中的属于泛型类型的T参数类型。
可以预先将每一个可以用于展示设备对象的控件的类型和每一个可以用于展示设备模型树的控件的类型，均定义为C#语言中的T参数类型的基类。从而，基于泛型的函数的两个泛型类型的形参中的一个形式参数可以作为可以接收表示源控件的类型的对象的泛型类型的形式参数、另一个形式参数作为可以接收表示目标控件的类型的对象的泛型类型的形式参数。
在需要确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型时，可以由主程序从源控件的代码的存储位置和目标控件的代码的存储位置，分别获取表示源控件的类型的对象、表示目标控件的类型的对象，并且调用基于泛型的函数，将表示源控件的类型的对象、表示目标控件的类型的对象作为实参传入。表示源控件的类型的对象可以作为实参被传递给可以接收表示目标控件的类型的对象的泛型类型的形式参数。
从而，基于泛型的函数在被调用时用于：基于表示源控件的类型的对象，通过C#语言的反射机制得到源控件的类型；基于表示目标控件的类型的对象，通过C#语言的反射机制得到目标控件的类型。
步骤102，利用对应于源控件的类型和目标控件的类型的校验模块，获取被选择的待添加模型的信息和被选择的目标模型的信息；基于预置的设备建模类型校验准则库，对待添加模型的信息和目标模型的信息进行校验，确定待添加模型是否可以在设备模型树中作为目标模型的子节点。
在本申请中，在确定源控件的类型和目标控件的类型之后，可以利用对应于源控件的类型和目标控件的类型的校验模块，获取被选择的待添加模型的信息和被选择的目标模型的信息。
源控件的类型和目标控件的类型可以组成一个控件类型组合。
因此，对应于源控件的类型和目标控件的类型的校验模块可以是指对应于由源控件的类型和目标控件的类型组成的控件类型组合的校验模块。
在本申请中，可以将可以展示设备模型对象的源控件的类型称之为设备模型对象的候选控件类型。
可以将可以展示设备模型树的目标控件的类型称之为设备模型树的候选控件类型。
通过对设备模型对象的候选控件类型、设备模型树的候选控件类型进行组合，可以得到多个控件类型组合。
在本申请中，设备建模应用可以包括多个独立于主程序的校验模块。
每一个校验模块可以各自对应一个控件类型组合。
相应的，对于每一个校验模块，同时对应于该校验模块对应的控件类型组合中的一个控件类型和另一个控件类型。
例如，设备模型对象的所有候选控件类型包括：ListView类型、TreeView类型。设备模型树的所有候选控件类型包括：ListView类型、TreeView类型。
对设备模型对象的候选控件类型、设备模型树的候选控件类型进行组合，可以得到4个控件类型组合。假设第1个控件类型组合包括：TreeView类型、TreeView类型。第2个控件类型组合包括：ListView类型、TreeView类型。第3个控件类型组合包括：TreeView类型、ListView类型。
第4个控件类型组合包括：ListView类型、ListView类型。
相应的，设备建模应用包括4个校验模块，每一个校验模块各自对应一个控件类型组合。
假设用于展示设备模型对象的源控件的类型为ListView类型，用于展示设备模型树的目标控件的类型为TreeView类型，则由对应于由ListView类型和TreeView类型组成的控件类型组合的校验模块，获取被选择的待添加模型的信息和被选择的目标模型的信息。
对于用于展示设备模型对象的源控件，设备模型对象中的每一个模型信息各自对应源控件的一个节点。
对于用于展示设备模型树的目标控件，设备模型树中的每一个模型信息各自对应目标控件的一个节点。
在进行设备建模时，当设备模型对象中的一个待添加模型被选择时，对于用于展示设备模型对象的源控件而言，是源控件中的对应于被选择的待添加模型信息的一个节点被选择。源控件的属性信息中记录当前被选择的节点的标识。由对应于源控件的类型和目标控件的类型的校验模块，即对应于由源控件的类型和目标控件的类型组成的控件类型组合的校验模块，从源控件的属性信息的存储位置获取当前被选择的节点的标识，以确定该对应于被选择的待添加模型信息的节点被选择。该对应于被选择的待添加模型信息的节点的属性信息包括该待添加模型的信息，该待添加模型的信息可以为该待添加模型的可以用于区别于其他的模型的唯一标识。从而，可以最终获取被选择的待添加模型的信息。
在进行设备建模时，当设备模型树中的一个目标模型信息被选择时，对于用于展示设备模型树的目标控件，是目标控件中的对应于被选择的目标模型信息的一个节点被选择。
由对应于源控件的类型和目标控件的类型的校验模块，即对应于由源控件的类型和目标控件的类型组成的控件类型组合的校验模块，从目标控件的属性信息的存储位置获取当前被选择的节点的标识，以确定该对应于被选择的目标模型的节点被选择。该对应于被选择的目标模型的节点的属性信息包括该目标模型的信息，该目标模型的信息可以为该目标模型的可以区别于其他的模型的唯一标识。从而，可以最终获取被选择的目标模型的信息。
例如，用于展示设备模型对象的源控件的类型为ListView类型，用于展示设备模型树的目标控件的类型为TreeView类型，利用对应于ListView类型和TreeView类型的校验模块即由ListView类型和TreeView类型组成的控件类型组合的校验模块，获取被选择的待添加模型信息和被选择的目标模型 信息。
在本申请中，当源控件的类型发生变化和/或目标控件的类型发生变化时，无需更改主程序的代码。
例如，用于展示设备模型对象的源控件的类型为ListView，用于展示设备模型树的目标控件的类型为TreeView。
在用于展示设备模型对象的源控件的类型由ListView变为TreeView时，用于展示设备模型树的目标控件的类型依然为TreeView时，可以由对应于由TreeView类型和TreeView类型组成的控件类型组合的校验模块进行校验即可，而无需更改主程序的代码。
在本申请中，在由对应于源控件的类型和目标控件的类型的校验模块获取被选择的待添加模型信息和被选择的目标模型信息之后，由对应于源控件的类型和目标控件的类型的校验模块基于预置的设备建模类型校验准则库，对待添加模型的信息和目标模型的信息进行校验，确定待添加模型是否可以在设备模型树中作为目标模型的子节点。
设备建模类型校验准则库可以包括：设备模型对象中的每一个模型的信息、设备模型对象中的每一个模型各自对应的设备建模类型校验准则。
对于设备模型对象中的每一个模型，该模型的信息和该模型对应的设备建模类型校验准则对应存储在设备建模类型校验准则库中。
对于设备模型对象中的每一个模型，该模型对应的设备建模类型校验准则可以包括：设备模型树中的可以成为该模型的父节点的模型的所有类型。
在对待添加模型的信息和目标模型的信息进行校验，确定待添加模型是否可以在设备模型树中作为目标模型的子节点时，可以首先根据待添加模型的信息，从设备建模类型校验准则库中查找出待添加模型对应的设备建模类型校验准则。然后，进一步从待添加模型对应的设备建模类型校验准则中获取设备模型树中的、可以成为待添加模型的父节点的模型的所有类型。最后， 可以确定设备模型树中的、可以成为该待添加模型信息的父节点的模型的所有类型是否包括目标模型的信息的类型。若确定设备模型树中的、可以成为该待添加模型信息的父节点的模型的所有类型包括目标模型的信息的类型，则可以确定待添加模型信息可以被添加到设备模型树中，以作为目标模型信息的子节点。
在一些实施例中，设备建模类型校验准则库包括：基于数据采集标准的设备建模类型校验准则。
在本申请中，数据采集标准可以为SEMI InterfaceA标准。
对于设备模型对象中的每一个模型，该模型可以作为设备模型树中的哪些类型的模型的子节点可以在SEMI InterfaceA标准中进行定义。可以基于SEMI InterfaceA标准，预先建立设备模型对象中的每一个模型各自对应的基于SEMI InterfaceA标准的设备建模类型校验准则，得到设备建模类型校验准则库。
在一些实施例中，对于当前用于确定待添加模型是否可以在设备模型树中作为目标模型的子节点的、预置的设备建模类型校验准则库，该预置的设备建模类型校验准则库中的设备建模类型校验准则所基于的数据采集标准为多个版本的数据采集标准中的当前采用的版本的数据采集标准。
当前采用的版本的数据采集标准可以是指多个版本的SEMI InterfaceA标准中的当前使用的SEMI InterfaceA标准。
例如，预先定义1105版本的SEMI InterfaceA标准、0710版本的SEMI InterfaceA标准，当前版本为0710版本的SEMI InterfaceA标准。当前具体使用哪一个版本的SEMI InterfaceA标准具体根据数据采集应用与工厂中的半导体生产设备的数据传输需求、工厂管理系统的服务器与工厂中的半导体生产设备的数据传输需求确定。
在本申请中，可以预先对于每一个版本的SEMI InterfaceA标准，分别 建立该版本的SEMI InterfaceA标准的设备建模类型校验准则库。
相应的，对于每一个版本的SEMI InterfaceA标准，该版本的SEMI InterfaceA标准的设备建模类型校验准则库中的设备建模类型校验准则是基于该版本的SEMI InterfaceA标准的设备建模类型校验准则。
当前采用哪一个SEMI InterfaceA标准，就将哪一个SEMI InterfaceA标准的设备建模类型校验准则库作为当前用于确定待添加模型是否可以在设备模型树中作为目标模型的子节点的、预置的设备建模类型校验准则库。
步骤103，显示指示待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果。
在本申请中，在确定待添加模型信息是否可以被添加到设备模型树中以作为目标模型信息的子节点之后，可以向用户显示校验结果。
当确定待添加模型信息可以被添加到设备模型树中以作为目标模型信息的子节点，向用户显示指示待添加模型可以被添加到设备模型树中以作为目标模型的子节点的校验结果。例如，向用户显示指示待添加模型可以被添加到设备模型树中以作为目标模型的子节点的标记。
当确定待添加模型不可以被添加到设备模型树中以作为目标模型的子节点，向用户显示指示待添加模型不可以被添加到设备模型树中以作为目标模型信息的子节点的校验结果。例如，向用户显示指示待添加模型不可以被添加到设备模型树中以作为目标模型的子节点的标记。
在一些实施例中，在确定待添加模型可以在设备模型树中作为目标模型的子节点时，显示指示待添加模型信息是否可以在设备模型树中作为目标模型信息的子节点的校验结果，包括：显示待添加模型信息可以在设备模型树中作为目标模型信息的子节点的校验结果；以及在显示指示待添加模型信息是否可以在设备模型树中作为目标模型信息的子节点的校验结果之后，还包括：响应于用户的添加确认操作，将待添加模型添加至设备模型树中，作为 目标模型的子节点。
在校验结果指示待添加模型可以作为目标模型的子节点时，在向用户显示指示待添加模型可以被添加到设备模型树中以作为目标模型的子节点的校验结果之后，若用户确定将待添加模型添加到设备模型树，则用户可以进行添加确认操作。可以响应于用户的添加确认操作，将待添加模型添加至设备模型树中，作为目标模型的子节点。
在一些实施例中，在确定待添加模型可以在设备模型树中作为目标模型的子节点时，显示指示该待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果，包括：显示该待添加模型可以在设备模型树中作为目标模型的子节点的校验结果；以及在显示指示该待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果之后，还包括：响应于用户的添加放弃操作，放弃将该待添加模型添加至该设备模型树中。
在向用户显示指示待添加模型可以被添加到设备模型树中以作为目标模型的子节点的校验结果之后，若用户放弃将待添加模型添加到设备模型树，则用户可以进行添加放弃操作。可以响应于用户的添加放弃操作，放弃将该待添加模型添加至该设备模型树中。
在一些实施例中，响应于数据采集标准的变化，对设备建模类型校验准则库中基于该数据采集标准的设备建模类型校验准则进行修改。
在本申请中，任意一个版本的数据采集标准发生变化，均可以对发生变化的数据采集标准的设备建模类型校验准则库中的、基于该数据采集标准的相应的设备建模类型校验准则进行修改，得到相应的经过更新的设备建模类型校验准则库。
以多个版本的SEMI InterfaceA标准中的当前采用的版本的SEMI InterfaceA标准为例，对于设备建模对象中的至少一个模型，在当前采用的版本的SEMI InterfaceA标准定义的、可以成为该模型的父节点的类型发生变 化时，会导致当前采用的版本的SEMI InterfaceA标准发生变化。
在当前采用的版本的SEMI InterfaceA标准发生变化时，可以对当前采用的版本的SEMI InterfaceA标准的设备建模类型校验准则库中的、基于当前采用的版本的SEMI InterfaceA标准的相应的设备建模类型校验准则，即上述父节点的类型的发生变化的每一个模型各自对应的设备建模类型校验准则进行修改，得到经过更新的、当前采用的版本的SEMI InterfaceA标准的设备建模类型校验准则库。
换言之，对于当前采用的版本的SEMI InterfaceA标准，对于设备模型对象中的、每一个可以作为其父节点的模型的类型发生变化的模型，对当前采用的版本的SEMI InterfaceA标准的设备建模类型校验准则库中的、该模型对应的设备建模类型校验准则进行修改，以得到经过更新的、当前采用的版本的SEMI InterfaceA标准的设备建模类型校验准则库。
在本申请中，任意一个版本的SEMI InterfaceA标准的设备建模类型校验准则库均独立于主程序，同时，任意一个版本的SEMI InterfaceA标准的设备建模类型校验准则库中的任意一个设备建模类型校验准则均独立于主程序。
任意一个版本的SEMI InterfaceA标准发生变化，均可以对发生变化的版本的SEMI InterfaceA标准的设备建模类型校验准则库中的、基于发生变化的版本的SEMI InterfaceA标准的相应的设备建模类型校验准则进行相应的修改。
从而，对于任意一个版本的SEMI InterfaceA标准，若该版本的SEMI InterfaceA标准的设备建模类型校验准则库作为当前用于确定待添加模型是否可以在设备模型树中作为目标模型的子节点的、预置的设备建模类型校验准则库，在该版本的SEMI InterfaceA标准发生变化的情况下，可以生成经过更新的、该版本的SEMI InterfaceA标准的设备建模类型校验准则库。
在该版本的SEMI InterfaceA标准发生变化之后，经过更新的、该版本的SEMI InterfaceA标准的设备建模类型校验准则库可以作为当前用于确定待添加模型是否可以在设备模型树中作为目标模型的子节点的、预置的设备建模类型校验准则库，以在后续的校验过程中，确定待添加模型是否可以在设备模型树中作为目标模型的子节点。
对于任意一个版本的SEMI InterfaceA标准，若该版本的SEMI InterfaceA标准设备建模类型校验准则库作为当前用于确定待添加模型是否可以在设备模型树中作为目标模型的子节点的、预置的设备建模类型校验准则库，在该版本的SEMI InterfaceA标准发生变化的情况下，由于主程序中不包括与校验过程相关的代码，因此，无需修改主程序的代码即无需对主程序的代码进行重构，同时，也无需修改校验模块的与校验过程相关的代码。从而，使得设备建模应用容易维护，同时，提高设备建模的代码的运行效率，避免由于SEMI InterfaceA标准变化引起的大量代码重构，节约开发成本，并且减少维护成本。
请参考图3，其示出了设备建模的流程示意图。
启动设备建模应用。
新建模型文件。新建的模型文件中包括设备模型对象。
从设备模型对象中选择待添加模型信息Model Object1。
拖拽到设备模型树中的相应节点Parent Node1即目标模型。
获取源控件的类型和目标控件的类型。
类型校验池集成了多个校验模块、多个不同的版本的SEMI InterfaceA的设备建模类型校验准则库。
由类型校验池中的对应于源控件的类型和目标控件的类型校验模块，根据基于当前版本的SEMI InterfaceA的设备建模类型校验准则进行校验比对，确定被选择的待添加模型是否可以被添加到设备模型树中以作为目标模型 的子节点，得到反馈结果。
类型校验池将反馈结果反馈给主程序。
若反馈结果为待添加模型可以被添加到设备模型树中以作为目标模型的子节点，展示指示可以添加的标记。将Model Object1添加到设备模型树中，以作为Parent Node1的子节点。
若反馈结果为待添加模型不可以被添加到设备模型树中以作为目标模型的子节点，展示指示不可以添加的标记。
请参考图4，其示出了设备建模的原理示意图。
在图4中，示出了源控件的类型为TreeView类型并且目标控件的类型为TreeView类型、源控件的类型为ListView类型并且目标控件的类型为TreeView类型、源控件的类型为TreeView类型并且目标控件的类型为ListView类型三种展示情况。
无论哪一种展示情况，均采用相应的校验模块进行校验即可。任意一个校验模块均独立于主程序。
当用于展示设备模型对象的源控件的类型为ListView类型，用于展示设备模型树的目标控件的类型为TreeView类型时，则利用对应于源控件的类型和目标控件的类型的校验模块即对应于由ListView类型和TreeView类型组成的控件类型组合的校验模块。
同时，从一种展示情况变为另外一种展示情况时，无需对主程序的代码进行修改。
例如，用于展示设备模型对象的源控件的类型为ListView类型，用于展示设备模型树的目标控件的类型为TreeView类型，在用于展示设备模型对象的源控件的类型由ListView类型变为TreeView类型时，用于展示设备模型树的目标控件的类型依然为TreeView类型时，可以由对应于由TreeView类型和TreeView类型组成的控件类型组合的校验模块进行校验即可，而无需更 改主程序的代码。
任意一个版本的SEMI InterfaceA标准发生变化，均可以对发生变化的版本的SEMI InterfaceA标准的设备建模类型校验准则库中的、基于发生变化的版本的SEMI InterfaceA标准的设备建模类型校验准则进行相应的修改。由于主程序中不包括校验代码，因此，任意一个版本的SEMI InterfaceA标准发生变化，均无需修改主程序的代码，也无需修改与校验过程相关的代码。
在图4中，基于泛型的函数可以利用Validation(Type，Type)表示。
可以由主程序调用Validation(Type，Type)，将表示源控件的类型的对象、表示目标控件的类型的对象作为实参传入。Validation(Type，Type)在被调用时用于：基于表示源控件的类型的对象，通过C#语言的反射机制得到源控件的类型；基于表示目标控件的类型的对象，通过C#语言的反射机制得到目标控件的类型。
需要说明的是，上述步骤101-103示例性地描述了一次在对被选择的待添加模型是否可以作为设备模型树中的目标模型的子节点进行校验的过程中所需要进行的操作。
还需要说明的是，在进行半导体设备建模时，用户每一次期望将设备模型对象中的一个模型添加到设备模型树作为一个目标模型的子节点，均可以执行上述步骤101-103。
请参考图5，其示出了本申请实施例提供的半导体设备建模装置的结构框图。半导体设备建模包括：确定单元501，校验单元502，反馈单元503。
确定单元501，被配置为响应于添加指示操作，确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型，其中，添加指示操作用于选择设备模型对象中的待添加模型和设备模型树中的目标模型；
校验单元502，被配置为利用对应于源控件的类型和目标控件的类型的 校验模块，获取被选择的待添加模型的信息和被选择的目标模型的信息；基于预置的设备建模类型校验准则库，对待添加模型的信息和目标模型的信息进行校验，确定待添加模型是否可以在设备模型树中作为目标模型的子节点；
反馈单元503，被配置为显示指示待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果。
在一些实施例中，确定单元501进一步配置为：利用预先创建的基于泛型的函数确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型，其中，基于泛型的函数的形式参数包括：用于接收源控件的源控件对象的形式参数、用于接收目标控件的目标控件对象的形式参数，基于泛型的函数在被调用时用于：通过反射确定源控件对象的类型和目标控件对象的类型，以确定源控件的类型和目标控件的类型。
在一些实施例中，反馈单元503进一步被配置为在确定待添加模型可以在设备模型树中作为目标模型的子节点时，显示待添加模型可以在设备模型树中作为目标模型的子节点的校验结果；以及
半导体设备建模装置还包括：
添加单元，被配置为在反馈单元503显示指示待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果之后，响应于用户的添加确认操作，将待添加模型添加至设备模型树中，作为目标模型的子节点。
在一些实施例中，在确定待添加模型可以在设备模型树中作为目标模型的子节点时，反馈单元503进一步被配置为显述待添加模型可以在设备模型树中作为目标模型的子节点的校验结果；以及
半导体设备建模装置还包括：
放弃添加单元，被配置为在反馈单元503显示指示待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果之后，响应于用户的添加 放弃操作，放弃将待添加模型添加至设备模型树中。
在一些实施例中，添加指示操作包括：将被选择的待添加模型拖曳至被选择述目标模型的位置。
在一些实施例中，源控件的类型为以下之一：TreeView、ListView，目标控件的类型为以下之一：TreeView、ListView。
在一些实施例中，数据采集标准为多个版本的数据采集标准中的当前采用的版本的数据采集标准。
在一些实施例中，半导体设备建模装置还包括：
修改单元，被配置为响应于数据采集标准的变化，对设备建模类型校验准则库中基该于数据采集标准的设备建模类型校验准则进行修改。
本申请还提供了一种电子设备，该电子设备可以配置有一个或多个处理器；存储器，用于存储一个或多个程序，一个或多个程序中可以包括用以执行上述实施例中描述的操作的指令。当一个或多个程序被一个或多个处理器执行时，使得一个或多个处理器执行上述实施例中描述的操作的指令。
本申请还提供了一种计算机可读介质，该计算机可读介质可以是电子设备中所包括的；也可以是单独存在，未装配入电子设备中。上述计算机可读介质承载有一个或者多个程序，当一个或者多个程序被电子设备执行时，使得电子设备执行上述实施例中描述的操作。
需要说明的是，本申请所述的计算机可读介质可以是计算机可读信号介质或者计算机可读存储介质或者是上述两者的任意组合。计算机可读存储介质例如可以包括但不限于电、磁、光、电磁、红外线、或半导体的系统、装置或器件，或者任意以上的组合。计算机可读存储介质的更具体的例子可以包括但不限于：具有一个或多个导线的电连接、便携式计算机磁盘、硬盘、随机访问存储器(RAM)、只读存储器(ROM)、可擦式可编程只读存储器(EPROM或闪存)、光纤、便携式紧凑磁盘只读存储器(CD-ROM)、光存 储器件、磁存储器件、或者上述的任意合适的组合。在本申请中，计算机可读存储介质可以是任何包括或存储程序的有形介质，该程序可以被消息执行系统、装置或者器件使用或者与其结合使用。而在本申请中，计算机可读的信号介质可以包括在基带中或者作为载波一部分传播的数据信号，其中承载了计算机可读的程序代码。这种传播的数据信号可以采用多方面形式，包括但不限于电磁信号、光信号或上述的任意合适的组合。计算机可读的信号介质还可以是计算机可读存储介质以外的任何计算机可读介质，该计算机可读介质可以发送、传播或者传输用于由消息执行系统、装置或者器件使用或者与其结合使用的程序。计算机可读介质上包括的程序代码可以用任何适当的介质传输，包括但不限于：无线、电线、光缆、RF等等，或者上述的任意合适的组合。
附图中的流程图和框图，图示了按照本申请各种实施例的系统、方法和计算机程序产品的可能实现的体系架构、功能和操作。在这点上，流程图或框图中的每个方框可以代表一个模块、程序段、或代码的一部分，该模块、程序段、或代码的一部分包括一个或多个用于实现规定的逻辑功能的可执行消息。也应当注意，在有些作为替换的实现中，方框中所标注的功能也可以以不同于附图中所标注的顺序发生。例如，两个接连地表示的方框实际上可以基本并行地执行，它们有时也可以按相反的顺序执行，这依所涉及的功能而定。也要注意的是，框图和/或流程图中的每个方框、以及框图和/或流程图中的方框的组合，可以用执行规定的功能或操作的专用的基于硬件的系统来实现，或者可以用专用硬件与计算机消息的组合来实现。
以上描述仅为本请求的较佳实施例以及对所运用技术原理的说明。本领域技术人员应当理解，本申请中所涉及的发明范围，并不限于上述技术特征的特定组合而成的技术实施例，同时也应涵盖在不脱离所述发明构思的情况下，由上述技术特征或其等同特征进行任意组合而形成的其它技术实施例。 例如上述特征与本申请中公开的(但不限于)具有类似功能的技术特征进行互相替换而形成的技术实施例。

Claims (10)

  1. 一种半导体设备建模方法，其特征在于，所述方法包括：
    响应于添加指示操作，确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型，其中，所述添加指示操作用于选择所述设备模型对象中的待添加模型和所述设备模型树中的目标模型；
    利用对应于所述源控件的类型和所述目标控件的类型的校验模块，获取被选择的待添加模型的信息和被选择的目标模型的信息；基于预置的设备建模类型校验准则库，对所述待添加模型的信息和所述目标模型的信息进行校验，确定所述待添加模型是否可以在所述设备模型树中作为所述目标模型的子节点；
    显示指示所述待添加模型是否可以在所述设备模型树中作为所述目标模型的子节点的校验结果。
  2. 根据权利要求1所述的方法，其特征在于，所述确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型包括：
    利用预先创建的基于泛型的函数确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型，其中，所述基于泛型的函数的形式参数包括：用于接收所述源控件的源控件对象的形式参数、用于接收所述目标控件的目标控件对象的形式参数，所述基于泛型的函数在被调用时用于：通过反射确定所述源控件对象的类型和所述目标控件对象的类型，以确定所述源控件的类型和所述目标控件的类型。
  3. 根据权利要求1所述的方法，其特征在于，在确定所述待添加模型可以在所述设备模型树中作为所述目标模型的子节点时，
    所述显示指示所述待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果，包括：
    显示所述待添加模型可以在所述设备模型树中作为所述目标模型的子节点的校验结果；以及
    在所述显示指示所述待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果之后，所述方法还包括：
    响应于用户的添加确认操作，将所述待添加模型添加至所述设备模型树中，作为所述目标模型的子节点。
  4. 根据权利要求1所述的方法，其特征在于，在确定所述待添加模型可以在所述设备模型树中作为所述目标模型的子节点时，
    所述显示指示所述待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果，包括：
    显示所述待添加模型可以在所述设备模型树中作为所述目标模型的子节点的校验结果；以及
    在所述显示指示所述待添加模型是否可以在设备模型树中作为目标模型的子节点的校验结果之后，所述方法还包括：
    响应于用户的添加放弃操作，放弃将所述待添加模型添加至所述设备模型树中。
  5. 根据权利要求1-4之一所述的方法，其特征在于，所述响应于添加指示操作包括：
    响应于用户将展示的所述设备模型对象中的一个所述待添加模型拖曳至位于展示的所述模型设备树中的一个所述目标模型的位置。
  6. 根据权利要求1-4之一所述的方法，其特征在于，所述源控件的类型为以下之一：TreeView类型、ListView类型，所述目标控件的类型为以下之一：TreeView类型、ListView类型。
  7. 根据权利要求1-4之一所述的方法，其特征在于，所述设备建模类型校验准则库包括：基于数据采集标准的设备建模类型校验准则。
  8. 根据权利要求7所述的方法，其特征在于，所述数据采集标准为多个版本的数据采集标准中的当前采用的版本的数据采集标准。
  9. 根据权利要求8所述的方法，其特征在于，所述方法还包括：
    响应于所述数据采集标准的变化，对所述设备建模类型校验准则库中基于所述数据采集标准的设备建模类型校验准则进行修改。
  10. 一种半导体设备建模装置，其特征在于，所述装置包括：
    确定单元，被配置为响应于添加指示操作，确定用于展示设备模型对象的源控件的类型和用于展示设备模型树的目标控件的类型，其中，所述添加指示操作用于选择设备模型对象中的待添加模型和设备模型树中的目标模型；
    校验单元，被配置为利用对应于所述源控件的类型和所述目标控件的类型的校验模块，获取被选择的待添加模型的信息和被选择的目标模型的信息；基于预置的设备建模类型校验准则库，对所述待添加模型的信息和所述目标模型的信息进行校验，确定所述待添加模型是否可以在所述设备模型树中作为所述目标模型的子节点；
    反馈单元，被配置为显示指示所述待添加模型是否可以所述在设备模型树中作为所述目标模型的子节点的校验结果。
PCT/CN2021/104679 2020-07-15 2021-07-06 一种半导体设备建模方法及装置 Ceased WO2022012371A1 (zh)

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