WO2022007099A1 - 一种 mems 陀螺仪及电子产品 - Google Patents

一种 mems 陀螺仪及电子产品 Download PDF

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Publication number
WO2022007099A1
WO2022007099A1 PCT/CN2020/108276 CN2020108276W WO2022007099A1 WO 2022007099 A1 WO2022007099 A1 WO 2022007099A1 CN 2020108276 W CN2020108276 W CN 2020108276W WO 2022007099 A1 WO2022007099 A1 WO 2022007099A1
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Prior art keywords
electrode
wave
base
mems gyroscope
electrodes
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PCT/CN2020/108276
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English (en)
French (fr)
Inventor
马昭
占瞻
杨珊
李杨
谭秋喻
洪燕
黎家健
张睿
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瑞声声学科技(深圳)有限公司
瑞声科技（南京）有限公司
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Publication of WO2022007099A1 publication Critical patent/WO2022007099A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure

Definitions

  • the invention relates to the technical field of gyroscopes, in particular to a MEMS gyroscope and electronic products.
  • Micro mechanical gyroscope namely MEMS (Micro Electron Mechanical systems) gyroscope, which is a typical angular velocity microsensor, has a very wide range of applications in the consumer electronics market due to its advantages of small size, low power consumption and convenient processing. In recent years, with the gradual improvement of the performance of MEMS gyroscopes, they are widely used in automotive, industrial, virtual reality and other fields.
  • MEMS Micro Electron Mechanical systems
  • the geometric structure of the hemispherical gyroscope is highly symmetrical, the driving/detecting modes of the gyroscope are exactly the same, the sensitivity is high, and the structure is simple.
  • the space utilization rate of the hemispherical gyroscope is low, and the etching depth in the axial direction is large, and the process is difficult.
  • the invention mainly provides a MEMS gyroscope and an electronic product, which can improve the quality factor of the gyroscope and reduce the technological difficulty.
  • a technical solution adopted by the present invention is to provide a MEMS gyroscope
  • the MEMS gyroscope includes: a base; a fixing member fixedly connected to the base; a ring member sleeved on the fixing The outer side of the part is connected with the fixing part, and is suspended on the base; the cross-section of the annular part in the radial direction is wavy and the projection on the base is a circular shape; the electrode assembly is connected to the base.
  • the base is fixedly connected to form a capacitance with the ring member, so as to drive the ring member to vibrate along a first direction and a second direction perpendicular to each other, and detect that the ring member is 45° or 45° away from the first direction. Vibration displacement in the third direction at an included angle of 135°.
  • the electrode assembly includes at least one driving electrode and at least one detection electrode, the driving electrode and the detection electrode respectively form a capacitance with the annular member, and the driving electrode and the detection electrode have a capacitance.
  • the included angle is 45° or 135°; the driving electrode drives the ring member to vibrate along the first direction and the second direction, and the detection electrode detects the vibration displacement of the ring member along the third direction .
  • the ring member includes an upper surface away from the base, a lower surface opposite to the upper surface, and a side surface connecting the upper surface and the lower surface and away from the fixing member.
  • the electrode assembly is disposed opposite to at least one of the upper surface, the lower surface and the side surface to form a capacitor.
  • the annular member includes at least two wave trough structures connected in sequence and a wave crest connecting two adjacent wave trough structures
  • the wave trough structures include inclined extending from the fixing member toward the base. a first wave arm, a wave trough extending from the first wave arm away from the fixing member and parallel to the base, and a second wave arm extending obliquely away from the base from the wave trough, adjacent to the The first wave arm and the second wave arm are connected by the wave crest, the wave crest is parallel to the base and the vertical distance from the wave crest to the base is greater than the vertical distance from the wave trough to the base.
  • the electrode assembly includes a plurality of first electrodes arranged at equal intervals in parallel and opposite to the side surface, and a plurality of second electrodes arranged at equal intervals in parallel and opposite to the upper surface. electrodes and a plurality of third electrodes arranged in parallel and equidistantly spaced and disposed opposite to the lower surface; the second electrodes and the third electrodes are symmetrically distributed with respect to the annular member, the first electrodes, the third electrodes The second electrode and the third electrode are the driving electrode and/or the detection electrode.
  • a plurality of the second electrodes are respectively disposed opposite to the upper surface of the first wave arm and the upper surface of the second wave arm, and a plurality of the third electrodes are respectively arranged with the first wave arm.
  • the lower surface of the first wave arm and the lower surface of the second wave arm are disposed opposite to each other.
  • a plurality of the second electrodes are arranged opposite to the upper surface of the valley structure, and a plurality of the third electrodes are arranged opposite to the lower surface of the valley structure.
  • the material of the annular member is semiconductor material.
  • the electrode assembly further includes functional electrodes for frequency modulation or elimination of quadrature errors, and the first electrode, the second electrode and the third electrode are the driving electrodes and/or the detection electrode and/or the functional electrode.
  • another technical solution adopted in the present application is to provide an electronic product, and the electronic product includes the above-mentioned MEMS gyroscope.
  • the MEMS gyroscope provided by the present invention includes a base; a fixing part, which is fixedly connected to the base; Placed on the base, the cross section of the ring member in the radial direction is wavy and the projection on the base is a circular ring; the electrode assembly is fixedly connected with the base, and is used to form a capacitance with the ring member, so as to drive the ring member along mutually perpendicular directions.
  • the first direction and the second direction vibrate, and the vibration displacement of the ring member along the third direction at an angle of 45° or 135° to the first direction is detected.
  • the wave-shaped ring member reduces the difficulty of deformation, improves the quality factor of the gyroscope, and has higher space utilization compared with the hemispherical gyroscope in the prior art.
  • the wave-shaped annular part has a smaller etching depth, which reduces the difficulty of the process.
  • FIG. 1 is a schematic structural diagram of a MEMS gyroscope provided by the present invention.
  • FIG. 2 is a schematic three-dimensional structural diagram of an embodiment in which the substrate of the MEMS gyroscope shown in FIG. 1 is removed.
  • FIG. 3 is a schematic front view of the three-dimensional structure shown in FIG. 2 .
  • FIG. 4 is a cross-sectional view of the structure shown in FIG. 2 along the line A-A.
  • FIG. 5 is a schematic three-dimensional structural diagram of another embodiment of the MEMS gyroscope shown in FIG. 1 with the substrate removed.
  • FIG. 6 is a cross-sectional view of the structure shown in FIG. 5 along line B-B.
  • FIG. 7 is a schematic diagram of a driving mode simulation of the MEMS gyroscope 10 in FIG. 1 .
  • FIG. 8 is a schematic diagram of a detection mode simulation of the MEMS gyroscope 10 in FIG. 1 .
  • the MEMS gyroscope 1 in this embodiment includes a substrate 10 , a fixing member 11 , a ring member 12 and an electrode assembly 13 .
  • the base 10 is used to provide fixed support, and the fixing member 11 is fixedly connected to the base 10.
  • the outer contour of the fixing member 11 may be a circle or a regular polygonal star, and a circle is used as an example in the illustration of this embodiment.
  • the base 10 and the fixing member 11 are fixedly connected by gluing, or the two are integrally formed.
  • the material of the fixing member 11 is a semiconductor material, such as monocrystalline silicon or polycrystalline silicon.
  • the ring member 12 is sleeved on the outer side of the fixing member 11 and connected to the fixing member 11 , and is suspended on the base 10 .
  • the ring member 12 is integrally formed with the fixing member 11 .
  • the cross section of the ring member 12 in the radial direction is wavy and the projection on the base 10 is a circular ring, that is, in this embodiment, the ring member 12 is a circular ring member and is in the direction away from the fixing member 11 .
  • the section is wavy.
  • the annular member 12 includes at least two wave trough structures 121 connected in sequence and a wave crest 122 connecting two adjacent wave trough structures 121.
  • the wave trough structure 121 includes a first wave arm 1211 extending obliquely from the fixing member 11 toward the base 10, The first wave arm 1211 is toward the wave trough 1212 extending away from the fixing member 11 and parallel to the base 10 , and the second wave arm 1213 extending obliquely from the wave trough 1212 toward the base 10 , the adjacent first wave arm 1211 and the second wave arm 1213 Connected by wave crests 122 , the wave crests 122 are parallel to the substrate 10 and the vertical distance of the wave crests 122 to the substrate 10 is greater than the vertical distance of the wave troughs 1212 to the substrate 10 .
  • the ring member 12 includes an upper surface 12 a away from the base 10 , a lower surface 12 b opposite to the upper surface 12 a , and a side surface 12 c connecting the upper surface 12 a and the lower surface 12 b and away from the fixing member 11 .
  • the material of the ring member 12 is a semiconductor material, and the semiconductor material may be monocrystalline silicon, polycrystalline silicon or piezoelectric material, and of course other materials, which are not limited herein.
  • the electrode assembly 13 is fixedly connected with the base 10, and is used to form a capacitance with the ring member 12, so as to drive the ring member 12 to vibrate along the first and second directions perpendicular to each other, and detect the ring member 12 along the first direction at 45° or Vibration displacement in the third direction at an included angle of 135°.
  • the X-axis direction is the first direction and the Y-axis direction is the second direction.
  • the first direction is not limited to the X-axis direction only, and the second direction is only the X-axis direction.
  • Y-axis direction is only the X-axis direction.
  • the electrode assembly 13 includes at least one driving electrode 131 and at least one detecting electrode 132.
  • the driving electrode 131 and the detecting electrode 132 form capacitances with the annular member 12 respectively, and the included angle between the driving electrode 131 and the detecting electrode 132 is 45° or 135°,
  • an alternating current is applied to the driving electrode 131, so that the driving electrode 131 drives the ring member 12 to vibrate along the first direction X and the second direction Y, and the detection electrode 132 detects the vibration displacement of the ring member 12 along the third direction.
  • the electrode assembly 13 is disposed opposite to at least one of the upper surface 12 a , the lower surface 12 b and the side surface 12 c of the annular member 12 to form a capacitor.
  • the electrode assembly 13 includes a plurality of first electrodes 13a arranged at equal intervals in parallel and arranged opposite to the side surface 12c, a plurality of second electrodes 13b arranged at equal intervals in parallel and arranged opposite to the upper surface 12a, and a plurality of parallel electrodes 13b.
  • the third electrodes 13c are arranged at equal intervals and opposite to the lower surface 12b.
  • the second electrodes 13b and the third electrodes 13c are symmetrically distributed with respect to the ring member 12.
  • the first electrodes 13a, the second electrodes 13b and the third electrodes 13c are used for driving Electrode 131 and/or detection electrode 132.
  • a plurality of second electrodes 13b are respectively disposed opposite to the upper surface 12a of the first wave arm 1211 and the upper surface 12a of the second wave arm 1213 , and a plurality of third electrodes 13b
  • the electrodes 13c are respectively disposed opposite to the lower surface 12b of the first wave arm 1211 and the lower surface 12b of the second wave arm 1213 ; in another embodiment as shown in FIGS. 5-6 , a plurality of second electrodes 13b and the wave valley structure
  • the upper surface 12a of the 121 is arranged opposite to each other, and the plurality of third electrodes 13c are arranged opposite to the lower surface 12b of the valley structure 121 .
  • the electrode assembly 13 may also be arranged in a manner, which is not limited to this. By arranging the electrode assembly 13 on multiple surfaces, the detection capacitance can be effectively improved, thereby improving the MEMS gyroscope. 1 sensitivity.
  • FIG. 7 is a schematic diagram of a driving mode simulation of the MEMS gyroscope 1 in FIG. 1
  • FIG. 8 is a schematic diagram of a detection mode simulation of the MEMS gyroscope 1 in FIG. 1
  • the gyroscope 1 is generally used in electronic
  • the ring member 12 vibrates along the first direction X and the second direction Y under the driving force generated by the driving electrode 131, forming a vibration mode as shown in FIG. 7 .
  • S1 is a schematic diagram of a driving mode simulation of the MEMS gyroscope 1 in FIG. 1
  • FIG. 8 is a schematic diagram of a detection mode simulation of the MEMS gyroscope 1 in FIG. 1
  • the gyroscope 1 is generally used in electronic
  • the ring member 12 vibrates along the first direction X and the second direction Y under the driving force generated by the driving electrode 131, forming a vibration mode as shown in FIG. 7 .
  • the angular velocity of the electronic product rotates to generate a Coriolis force F2 along the third direction M or the third direction D
  • the Coriolis force F2 forces the ring member 12 along the third direction M or
  • the third direction D vibrates to form a detection mode as shown in FIG. 8
  • the detection electrode 132 detects the vibration displacement of the ring member 12 along the third direction M or the third direction D, that is, the vibration displacement is calculated according to the change of capacitance, and after calculation processing
  • the magnitude of the angular velocity of the rotation of the electronic product can be obtained.
  • the ring member 12 when the ring member 12 vibrates as described above, it will be deformed.
  • the cross-section of the ring member 12 in the radial direction is wavy, the deformation difficulty is reduced, the thermoelastic loss is small, and the MEMS gyroscope is improved.
  • the wavy annular member in the axial direction has a smaller etching depth, which reduces the technological difficulty.
  • the electrode assembly 13 in this embodiment also includes a functional electrode 133 for frequency modulation or elimination of quadrature error, and the first electrode 13a, the second electrode 13b and the third electrode 13c are the driving electrode 131 and/or the detection electrode 132 and/or functional electrodes 133 .
  • This embodiment also provides an electronic product, and the electronic product includes the MEMS gyroscope 1 in the above embodiment.
  • the MEMS gyroscope of this embodiment includes a base; a fixing member, which is fixedly connected to the base; The cross section in the radial direction is wavy and the projection on the substrate is circular; the electrode assembly, fixedly connected to the substrate, is used to form a capacitor with the ring member, so as to drive the ring member along the mutually perpendicular first and second directions Vibrate, and detect the vibration displacement of the ring member along the third direction at an angle of 45° or 135° with the first direction.
  • the wave-shaped ring member reduces the difficulty of deformation, improves the quality factor of the gyroscope, and has higher space utilization compared with the hemispherical gyroscope in the prior art. Small etching depth reduces process difficulty.

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Abstract

一种MEMS陀螺仪（1）及电子产品，MEMS陀螺仪（1）包括基底（10）；固定件（11），与基底（10）固定连接；环形件（12），套设于固定件（11）外侧并与固定件（11）连接，且悬置于基底（10）上，环形件（12）在径向上的截面呈波浪形且在基底（10）上的投影呈圆环形；电极组件（13），与基底（10）固定连接，用于与环形件（12）形成电容，以驱动环形件（12）沿相互垂直的第一方向（X）和第二方向（Y）振动，并检测环形件（12）沿与第一方向（X）呈45°或135°夹角的第三方向（M,D）的振动位移，一方面利用圆环形陀螺仪几何结构高度对称的特征，提高陀螺仪（1）的灵敏度，另一方面波浪形环形件（12），降低变形难度，提高陀螺仪（1）的品质因数，且相比于现有技术中的半球形陀螺仪，具有更高的空间利用率，在轴向上波浪形的环形件（12）具有更小的刻蚀深度，降低了工艺难度。

Description

一种MEMS陀螺仪及电子产品 技术领域
本发明涉及陀螺仪技术领域，特别是涉及一种MEMS陀螺仪及电子产品。
 背景技术
微机械陀螺仪，即MEMS（Micro Electro Mechanical systems）陀螺仪，是一种典型的角速度微传感器，由于其尺寸小、功耗低和加工方便等优势在消费电子市场有着非常广泛的应用。近年来随着MEMS陀螺仪性能的逐步提升，广泛应用于汽车、工业、虚拟现实等领域。
半球形陀螺仪的几何结构高度对称，陀螺仪的驱/检模态完全相同，灵敏度高，且结构简单，逐步成为实用较为广泛的高性能陀螺仪。但是，半球形陀螺仪的空间利用率较低，且在轴向上的刻蚀深度较大，工艺难度较高。
因而，有必要提供一种新的MEMS陀螺仪以解决上述的问题。
 技术问题
本发明主要是提供一种MEMS陀螺仪及电子产品，能够提高陀螺仪的品质因数，降低工艺难度。
 技术解决方案
为解决上述技术问题，本发明采用的一个技术方案是：提供一种MEMS陀螺仪，所述MEMS陀螺仪包括：基底；固定件，与所述基底固定连接；环形件，套设于所述固定件外侧并与所述固定件连接，且悬置于所述基底上，所述环形件在径向上的截面呈波浪形且在所述基底上的投影呈圆环形；电极组件，与所述基底固定连接，用于与所述环形件形成电容，以驱动所述环形件沿相互垂直的第一方向和第二方向振动，并检测所述环形件沿与所述第一方向呈45°或135°夹角的第三方向的振动位移。
在一具体实施方式中，所述电极组件包括至少一个驱动电极和至少一个检测电极，所述驱动电极和所述检测电极分别与所述环形件形成电容，所述驱动电极和所述检测电极的夹角为45°或135°；所述驱动电极驱动所述环形件沿所述第一方向和所述第二方向振动，所述检测电极检测所述环形件沿所述第三方向的振动位移。
在一具体实施方式中所述环形件包括远离所述基底的上表面、与所述上表面相对的下表面以及连接所述上表面和所述下表面且远离所述固定件一侧的侧表面，所述电极组件与所述上表面、所述下表面、所述侧表面中的至少一个相对设置形成电容。
在一具体实施方式中，所述环形件包括至少两个依次连接的波谷结构和连接相邻两所述波谷结构的波峰，所述波谷结构包括自所述固定件朝靠近所述基底倾斜延伸的第一波臂、自所述第一波臂朝远离所述固定件且平行于所述基底延伸的波谷以及自所述波谷朝远离所述基底倾斜延伸的第二波臂，相邻的所述第一波臂和所述第二波臂通过所述波峰连接，所述波峰与所述基底平行且所述波峰到所述基底的垂直距离大于所述波谷到所述基底的垂直距离。
在一具体实施方式中，所述电极组件包括多个平行等距间隔排列且与所述侧表面相对设置的第一电极、多个平行等距间隔排列且与所述上表面相对设置的第二电极以及多个平行等距间隔排列且与所述下表面相对设置的第三电极；所述第二电极和所述第三电极相对于所述环形件对称分布，所述第一电极、所述第二电极和所述第三电极为所述驱动电极和/或所述检测电极。
在一具体实施方式中，多个所述第二电极分别与所述第一波臂的上表面和所述第二波臂的上表面相对设置，多个所述第三电极分别与所述第一波臂的下表面和所述第二波臂的下表面相对设置。
在一具体实施方式中，多个所述第二电极与所述波谷结构的上表面相对设置，多个所述第三电极与所述波谷结构的下表面相对设置。
在一具体实施方式中，所述环形件的材质为半导体材质。
在一具体实施方式中，所述电极组件还包括用于调频或消除正交误差的功能电极，所述第一电极、所述第二电极和所述第三电极为所述驱动电极和/或所述检测电极和/或所述功能电极。
为解决上述技术问题，本申请采用的另一个技术方案是：提供一种电子产品，所述电子产品包括上述的MEMS陀螺仪。
 有益效果
本发明的有益效果是：区别于现有技术的情况，本发明提供的MEMS陀螺仪包括基底；固定件，与基底固定连接；环形件，套设于固定件外侧并与固定件连接，且悬置于基底上，环形件在径向上的截面呈波浪形且在基底上的投影呈圆环形；电极组件，与基底固定连接，用于与环形件形成电容，以驱动环形件沿相互垂直的第一方向和第二方向振动，并检测环形件沿与第一方向呈45°或135°夹角的第三方向的振动位移，一方面利用圆环形陀螺仪几何结构高度对称的特征，提高陀螺仪的灵敏度，另一方面波浪形环形件，降低变形难度，提高陀螺仪的品质因数，且相比于现有技术中的半球形陀螺仪，具有更高的空间利用率，在轴向上波浪形的环形件具有更小的刻蚀深度，降低了工艺难度。
 附图说明
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图，其中。
图1是本发明提供的MEMS陀螺仪的结构示意图。
图2是图1中所示的MEMS陀螺仪去除基底的一实施方式的立体结构示意图。
图3是图2所示立体结构的正面示意图。
图4是图2所示结构沿A-A线的剖视图。
图5是图1中所示的MEMS陀螺仪去除基底的另一实施方式的立体结构示意图。
图6是图5所示结构沿B-B线的剖视图。
图7是图1中MEMS陀螺仪10的驱动模态仿真示意图。
图8是图1中MEMS陀螺仪10的检测模态仿真示意图。
 本发明的实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
需要说明，本发明实施例中所有方向性指示（诸如上、下、左、右、前、后……）仅用于解释在某一特定姿态（如附图所示）下各部件之间的相对位置关系、运动情况等，如果该特定姿态发生改变时，则该方向性指示也相应地随之改变。
还需要说明的是，当元件被称为“固定于”或“设置于”另一个元件上时，它可以直接在另一个元件上或者可能同时存在居中元件。当一个元件被称为是“连接”另一个元件，它可以是直接连接另一个元件或者可能同时存在居中元件。
另外，在本发明中涉及“第一”、“第二”等的描述仅用于描述目的，而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外，各个实施例之间的技术方案可以相互结合，但是必须是以本领域普通技术人员能够实现为基础，当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在，也不在本发明要求的保护范围之内。
请一并参阅图1至图4，本实施方式中的MEMS陀螺仪1包括基底10、固定件11、环形件12及电极组件13。
其中，基底10用于提供固定支撑，固定件11与基底10固定连接，该固定件11的外轮廓可以是圆形或正多角星形，本实施方式图示中以圆形为例。基底10与固定件11通过胶粘固定连接，或，两者一体成型。
可选地，固定件11的材质为半导体材质，比如单晶硅或多晶硅。
环形件12套设于固定件11外侧并于固定件11连接，且悬置于基底10上。
可选地，环形件12与固定件11一体成型。
其中，环形件12在径向上的截面呈波浪形且在基底10上的投影呈圆环形，也即在本实施方式中，环形件12为圆形环形件且在远离固定件11的方向上的截面呈波浪形。
具体的，环形件12包括至少两个依次连接的波谷结构121及连接相邻两波谷结构121的波峰122，波谷结构121包括自固定件11朝靠近基底10倾斜延伸的第一波臂1211、自第一波臂1211朝远离固定件11且平行于基底10延伸的波谷1212以及自波谷1212朝远离基底10倾斜延伸的第二波臂1213，相邻的第一波臂1211和第二波臂1213通过波峰122连接，波峰122与基底10平行且波峰122到基底10的垂直距离大于波谷1212到基底10的垂直距离。
进一步的，环形件12包括远离基底10的上表面12a、与上表面12a相对的下表面12b及连接上表面12a和下表面12b且远离固定件11一侧的侧表面12c。
进一步的，在本实施方式中，环形件12的材质为半导体材质，该半导体材质可以为单晶硅、多晶硅或压电材料，当然也可以是其他材质，在此不做限制。
电极组件13与基底10固定连接，用于与环形件12形成电容，以驱动环形件12沿相互垂直的第一方向和第二方向振动，并检测环形件12沿与第一方向呈45°或135°夹角的第三方向的振动位移。
在本实施方式中，以如图3所示X轴方向为第一方向、Y轴方向为第二方向为例进行说明，但不局限于第一方向仅为X轴方向、第二方向仅为Y轴方向。
其中，电极组件13包括至少一个驱动电极131及至少一个检测电极132，驱动电极131和检测电极132分别与环形件12形成电容，驱动电极131和检测电极132的夹角为45°或135°，工作时，在驱动电极131上施以交流电，从而使得驱动电极131驱动环形件12沿第一方向X和第二方向Y振动，检测电极132检测环形件12沿第三方向的振动位移。
共同参阅图4及图5，电极组件13与环形件12的上表面12a、下表面12b及侧表面12c中的至少一个相对设置形成电容。
具体的，电极组件13包括多个平行等距间隔排列且与侧表面12c相对设置的第一电极13a、多个平行等距间隔排列且与上表面12a相对设置的第二电极13b以及多个平行等距间隔排列且与下表面12b相对设置的第三电极13c，第二电极13b与第三电极13c相对于环形件12对称分布，第一电极13a、第二电极13b及第三电极13c为驱动电极131和/或检测电极132。
其中，在如图2-4所示的一实施方式中，多个第二电极13b分别与第一波臂1211的上表面12a和第二波臂1213的上表面12a相对设置，多个第三电极13c分别与第一波臂1211的下表面12b和第二波臂1213的下表面12b相对设置；在如图5-6所示的另一实施方式中，多个第二电极13b与波谷结构121的上表面12a相对设置，多个第三电极13c与波谷结构121的下表面12b相对设置。
可以理解的，在其他实施例中，电极组件13还可以有排布方式，并不局限于此，通过这种多表面排布电极组件13的方式，能够有效提高检测电容，进而提高MEMS陀螺仪1的灵敏度。
共同参阅图7及图8，图7是图1中MEMS陀螺仪1的驱动模态仿真示意图，图8是图1中MEMS陀螺仪1的检测模态仿真示意图，，陀螺仪1一般应用于电子产品，在使用时，电子产品没有转动的情况下，环形件12在驱动电极131产生的驱动力的驱动下沿第一方向X及第二方向Y振动，形成如图7所示的振动模态S1。
当电子产品发生转动时，根据哥氏原理，电子产品转动的角速度产生沿第三方向M或第三方向D的哥氏力合力F2，哥氏力合力F2迫使环形件12沿第三方向M或第三方向D振动，形成如图8所示的检测模态，检测电极132检测环形件12沿第三方向M或第三方向D的振动位移，即根据电容的变化计算振动位移，经过运算处理即可获得电子产品转动的角速度的大小。
其中，当环形件12发生如上述的振动时，会产生形变，在本实施方式中，由于环形件12在径向上的截面成波浪形，降低变形难度，热弹性损失较小，提高MEMS陀螺仪1的品质因数，同时，相比于现有技术中的半球形陀螺仪，具有更高的空间利用率，在轴向上波浪形的环形件具有更小的刻蚀深度，降低了工艺难度。
进一步的，本实施方式中的电极组件13还包括用于调频或消除正交误差的功能电极133，第一电极13a、第二电极13b和第三电极13c为驱动电极131和/或检测电极132和/或功能电极133。
本实施方式还提供了一种电子产品，该电子产品包括上述实施例中的MEMS陀螺仪1。
区别于现有技术的情况，本实施方式的MEMS陀螺仪包括基底；固定件，与基底固定连接；环形件，套设于固定件外侧并与固定件连接，且悬置于基底上，环形件在径向上的截面呈波浪形且在基底上的投影呈圆环形；电极组件，与基底固定连接，用于与环形件形成电容，以驱动环形件沿相互垂直的第一方向和第二方向振动，并检测环形件沿与第一方向呈45°或135°夹角的第三方向的振动位移，一方面利用圆环形陀螺仪几何结构高度对称的特征，提高陀螺仪的灵敏度，另一方面波浪形环形件，降低变形难度，提高陀螺仪的品质因数，且相比于现有技术中的半球形陀螺仪，具有更高的空间利用率，在轴向上波浪形的环形件具有更小的刻蚀深度，降低了工艺难度。
以上所述仅为本发明的实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (10)

  1. 一种MEMS陀螺仪，其特征在于，所述MEMS陀螺仪包括：
    基底；
    固定件，与所述基底固定连接；
    环形件，套设于所述固定件外侧并与所述固定件连接，且悬置于所述基底上，所述环形件在径向上的截面呈波浪形且在所述基底上的投影呈圆环形；
    电极组件，与所述基底固定连接，用于与所述环形件形成电容，以驱动所述环形件沿相互垂直的第一方向和第二方向振动，并检测所述环形件沿与所述第一方向呈45°或135°夹角的第三方向的振动位移。
  2. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述电极组件包括至少一个驱动电极和至少一个检测电极，所述驱动电极和所述检测电极分别与所述环形件形成电容，所述驱动电极和所述检测电极的夹角为45°或135°；所述驱动电极驱动所述环形件沿所述第一方向和所述第二方向振动，所述检测电极检测所述环形件沿所述第三方向的振动位移。
  3. 根据权利要求2所述的MEMS陀螺仪，其特征在于，所述环形件包括远离所述基底的上表面、与所述上表面相对的下表面以及连接所述上表面和所述下表面且远离所述固定件一侧的侧表面，所述电极组件与所述上表面、所述下表面、所述侧表面中的至少一个相对设置形成电容。
  4. 根据权利要求3所述的MEMS陀螺仪，其特征在于，所述环形件包括至少两个依次连接的波谷结构和连接相邻两所述波谷结构的波峰，所述波谷结构包括自所述固定件朝靠近所述基底倾斜延伸的第一波臂、自所述第一波臂朝远离所述固定件且平行于所述基底延伸的波谷以及自所述波谷朝远离所述基底倾斜延伸的第二波臂，相邻的所述第一波臂和所述第二波臂通过所述波峰连接，所述波峰与所述基底平行且所述波峰到所述基底的垂直距离大于所述波谷到所述基底的垂直距离。
  5. 根据权利要求4所述的MEMS陀螺仪，其特征在于，所述电极组件包括多个平行等距间隔排列且与所述侧表面相对设置的第一电极、多个平行等距间隔排列且与所述上表面相对设置的第二电极以及多个平行等距间隔排列且与所述下表面相对设置的第三电极；所述第二电极和所述第三电极相对于所述环形件对称分布，所述第一电极、所述第二电极和所述第三电极为所述驱动电极和/或所述检测电极。
  6. 根据权利要求5所述的MEMS陀螺仪，其特征在于，多个所述第二电极分别与所述第一波臂的上表面和所述第二波臂的上表面相对设置，多个所述第三电极分别与所述第一波臂的下表面和所述第二波臂的下表面相对设置。
  7. 根据权利要求5所述的MEMS陀螺仪，其特征在于，多个所述第二电极与所述波谷结构的上表面相对设置，多个所述第三电极与所述波谷结构的下表面相对设置。
  8. 根据权利要求1所述的MEMS陀螺仪，其特征在于，所述环形件的材质为半导体材质。
  9. 根据权利要求5所述的MEMS陀螺仪，其特征在于，所述电极组件还包括用于调频或消除正交误差的功能电极，所述第一电极、所述第二电极和所述第三电极为所述驱动电极和/或所述检测电极和/或所述功能电极。
  10. 一种电子产品，其特征在于，所述电子产品包括权利要求1至9任一项所述的MEMS陀螺仪。
PCT/CN2020/108276 2020-07-09 2020-08-10 一种 mems 陀螺仪及电子产品 WO2022007099A1 (zh)

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