WO2022006815A1 - Haut-parleur piézoélectrique mems - Google Patents

Haut-parleur piézoélectrique mems Download PDF

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Publication number
WO2022006815A1
WO2022006815A1 PCT/CN2020/101093 CN2020101093W WO2022006815A1 WO 2022006815 A1 WO2022006815 A1 WO 2022006815A1 CN 2020101093 W CN2020101093 W CN 2020101093W WO 2022006815 A1 WO2022006815 A1 WO 2022006815A1
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WO
WIPO (PCT)
Prior art keywords
actuator
load plate
shaped
piezoelectric speaker
mems piezoelectric
Prior art date
Application number
PCT/CN2020/101093
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English (en)
Chinese (zh)
Inventor
庞慰
张孟伦
孙晨
Original Assignee
诺思(天津)微系统有限责任公司
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Priority to PCT/CN2020/101093 priority Critical patent/WO2022006815A1/fr
Publication of WO2022006815A1 publication Critical patent/WO2022006815A1/fr

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/06—Loudspeakers

Definitions

  • the invention relates to a MEMS piezoelectric speaker.
  • FIG. 1A is a schematic diagram of an energy conversion structure of a MEMS speaker according to the prior art, which shows four microelectromechanical system MEMS actuators 12 arranged in a frame 11 (usually made of silicon material) branches, and a load tray 13 connected to one end of the four branches.
  • the actuator 12 includes upper and lower electrodes and piezoelectric materials between them to realize the coupling of acoustic energy and electrical energy.
  • the load plate 13 is used to conduct the energy of the actuator to the diaphragm layer of the loudspeaker.
  • the miniaturization/miniaturization of speakers is one of the concerns in the industry. Due to the small size, the improvement of speaker performance (such as output sound pressure) is restricted to a certain extent. How to optimize the internal structure of the loudspeaker in a small size/small space is a key factor affecting the performance of the miniature loudspeaker.
  • the main purpose of the present invention is to propose a MEMS piezoelectric speaker with better performance.
  • the present invention provides the following technical solutions:
  • a MEMS piezoelectric speaker includes a load plate and an actuator, and the load plate and the actuator are stacked.
  • the actuator has a protruding portion, and the contact between the load plate and the actuator is the surface of the protruding portion.
  • the base of the speaker has a protruding central column, one end of the central column is connected to the center of the actuator, and the plane where the actuator as a whole is located is perpendicular to the axial direction of the central column; A plurality of strip-shaped branches or a plurality of fan-shaped branches extending radially in the plane.
  • the number of the strip-shaped branches is greater than 2.
  • the protruding portion is located at the arc-shaped edge of the fan-shaped branch of the actuator; or, the protruding portion is located at the outer end of the bar-shaped branch of the actuator.
  • the actuator includes a plurality of strip-shaped branches extending radially from the center outward along the plane; and the actuator is a two-layer structure, and the two layers are along the axial direction of the central column. superimposed.
  • the plurality of strip-shaped branches of the layer farther from the load plate in the actuator are inclined to the plane where the plurality of strip-shaped branches of another layer of the actuator are located.
  • each bar-shaped branch of a layer farther from the load plate in the actuator is greater than the length of each bar-shaped branch of another layer of the actuator.
  • the load plate has a plurality of slits extending radially from the periphery of the load plate, and a plurality of slits extending along the circumference of the load plate connected with the slits, thereby forming a plurality of slits along the circumference of the load plate
  • a plurality of arc-shaped beams extending toward the arc-shaped beam are located at the contact point between the load plate and the actuator.
  • the actuator includes a plurality of bar-shaped branches extending radially from the center outward along the plane; near the extending end of the bar-shaped branches is the contact point between the load plate and the actuator, and the arc on the load plate
  • the number of beams is the same as the number of bar branches of the actuator.
  • the slit includes first to fourth segments connected end to end from the edge of the load plate, wherein the first segment extends from the edge of the load plate in the radial direction of the load plate, and the second segment extends along the circumferential direction of the load plate. , the third segment extends radially of the load disc and towards the edge of the load disc, and the fourth segment extends circumferentially of the load disc.
  • the slit includes a plurality of slits;
  • the first slit of the slit includes a first segment and a second segment that are connected end to end, wherein the first segment extends radially from the edge of the load plate along the load plate, and the second a segment extending circumferentially of the load plate, forming the arcuate beam; a plurality of other segments of the first strip each extending radially from the second segment and towards the edge of the load plate; the other plurality of the slits Both extend radially from the edge of the load plate and do not reach the second section of the first strip; the other sections of the first strip of the slit and the other multiple strips of the slit are
  • the disks are alternately arranged in the circumferential direction, so that the structure of the arc-shaped beam extends along an arcuate shape.
  • a frame is further included, the frame enclosing the actuator; the actuator has a plurality of branches distributed symmetrically in the center, the first end of each branch is connected to the frame, and the second end has the protruding part.
  • the first ends of the plurality of branches are distributed on each side of the regular polygon, or distributed on the circumference.
  • the branch is fan-shaped, the bottom edge of the fan-shaped is connected to the frame, and the protruding part is close to the vertex of the fan-shaped; the other end of the bar.
  • the load plate has an arcuately extending region, which corresponds to a branch of the actuator in the direction of the stacking.
  • the branch is arc-shaped, one end is connected to the frame, and the other end is connected to the load plate via a connecting part; the plurality of arc-shaped branches are located on the circumference of the same circle.
  • the actuator also includes a central column protruding from the base of the speaker toward the load plate, one end of the central column is connected to the center of the actuator, and the plane on which the actuator as a whole is located is perpendicular to the axial direction of the central column; the actuator includes a self-centering column. Outwardly, a plurality of bar-shaped branches or a plurality of fan-shaped branches extending radially along the plane.
  • the diameter of the circumscribed circle accounts for more than 90% of the diameter of the speaker; or, the sum of the areas of each fan-shaped branch of the actuator It occupies more than 80% of the area of the speaker parallel to the direction of the actuator.
  • the stacking of the load plate and the actuator is achieved using a bonding process.
  • the load plate and the actuator are stacked so that the two do not occupy each other's positions in the lateral direction, so that a larger design space can be obtained.
  • FIG. 1A is a schematic diagram of an energy conversion structure of a MEMS speaker according to the prior art
  • FIG. 1B is a cross-sectional view of a speaker structure according to an embodiment of the present invention.
  • Fig. 1C is an exploded expanded view of the structure of Fig. 1B;
  • FIG. 2A is a schematic diagram of the structure of an actuator according to an embodiment of the present invention.
  • FIG. 2B is a cross-sectional view along the section ⁇ 1, ⁇ 2 in FIG. 2A;
  • 3A to 4A are schematic diagrams of structures of several actuators according to embodiments of the present invention.
  • FIG. 4B is a cross-sectional view along section ⁇ 1 in FIG. 2A;
  • 4C is a schematic diagram of the structure of an actuator according to an embodiment of the present invention.
  • 5A is a schematic diagram of the structure of another actuator according to an embodiment of the present invention.
  • FIG. 5B is a cross-sectional view along the section ⁇ 1, ⁇ 2 in FIG. 5A;
  • 5C is a schematic diagram of the structure of an actuator according to an embodiment of the present invention.
  • 6A to 6C are schematic diagrams of structures of several load trays according to embodiments of the present invention.
  • Figure 7A, Figure 7C, Figure 7D, Figure 7E are partial schematic diagrams of top views of several loudspeakers according to embodiments of the present invention.
  • Fig. 7B is A1-A2 sectional view of Fig. 7A;
  • Fig. 7F is the A1-A2 cross-sectional view of Fig. 7E;
  • FIG. 7G is a schematic diagram of the structure of the load tray in FIG. 7E;
  • 8A and 8C are partial schematic diagrams of top views of two speakers according to an embodiment of the present invention.
  • FIG. 8B is a cross-sectional view of A1-A2 of FIG. 8A;
  • FIG. 9 is a schematic diagram of an internal layer structure of an actuator according to an embodiment of the present invention.
  • the inventor proposes that if the actuator 12 and the load plate 13 are arranged laterally side by side, under the restriction of the overall lateral size of the speaker, the design freedom (such as area and length) of the actuator 12 is also restricted, so that The longitudinal vibration displacement is restricted, which in turn affects the output sound pressure. Therefore, according to the embodiment of the present invention, the load plate and the actuator are stacked, so as to increase the space available for the actuator and the load plate in the lateral direction, and to improve the degree of freedom of design, so that the output of the actuator and the load plate can be made larger. Acoustic vibration energy (such as greater longitudinal vibration displacement, or output greater force to push the air, etc.), the final output sound pressure of the speaker.
  • Acoustic vibration energy such as greater longitudinal vibration displacement, or output greater force to push the air, etc.
  • FIG. 1B is a cross-sectional view of a loudspeaker structure according to an embodiment of the present invention
  • FIG. 1C is an exploded expanded view of the structure of FIG. 1B .
  • the energy conversion structure layer of the speaker which specifically includes the following components 11 to 15.
  • the frame which supports the actuator and realizes the electrical interconnection of the actuator.
  • Actuator the coupling and mutual conversion of electric energy and acoustic energy in the speaker occurs in this part, specifically, the actuator can convert the electric energy input into it into mechanical vibration (sound energy).
  • Load plate The structure itself does not perform the coupling and mutual conversion of electric energy and sound energy, but passively accepts the vibration energy generated by the actuator, and conducts the energy of the actuator to the vibrating membrane layer.
  • First connecting part This part is used to connect the load plate 13 and the actuator 12 .
  • Second connecting part This part is used to connect the frame 11 and the actuator 12 .
  • the energy conduction block of the speaker This structure is used to conduct vibration energy. According to the specific structure design, this part can sometimes be omitted.
  • the lower limit layer including the lower peripheral portion 31 and the annular protrusion 32 inwardly.
  • Energy exchange interface layer which specifically includes:
  • the periphery with an annular arch structure specifically including: an annular overlapping portion 44 with the lower peripheral portion 31, and an elastic portion 43 with an annular arch.
  • a vibrating membrane layer which acts as an interface between the loudspeaker and the external sound medium (usually air) to exchange sound energy. Specifically, the membrane layer transmits the sound wave energy into the air through vibration.
  • Upper limit layer comprising the upper peripheral portion 51 and the annular protrusion 52 inwardly
  • PCB board It includes the main body of the PCB and the electrical links or chips such as ASICs distributed in it.
  • the basic working process of the above-mentioned loudspeaker is as follows: first, the control signal is conducted from the outside to the loudspeaker PCB board 60, and is received and processed by the signal conversion/processing chip 62 therein.
  • the electrical contacts between 60 and the frame 11 enter the actuator 12 and are converted into mechanical vibrations in the actuator 12 .
  • the vibration energy of the actuator 12 will be transmitted to the load plate 13 through the first connection part 14, and then transmitted to the diaphragm layer 42 through the energy conduction block 20 or directly from the load plate 13, and the vibration energy of the diaphragm layer 42 will finally enter the external medium of the speaker. , such as air.
  • one type is a structure with a central column
  • the other is a structure without a central column (for example, as shown in FIG. 1C ), and the two can also be combined.
  • the following descriptions are given in conjunction with the accompanying drawings.
  • terms such as “upper”, “lower”, “horizontal” and “longitudinal” are all based on the perspectives in the figures.
  • Figures 2A to 6C relate to structures having a central column, of which 11a is the central column.
  • the central post is formed on the base material, thereby forming a protrusion of the base.
  • the upper end of the central column is used as the connecting portion 15a, and the actuator is laterally connected, and the actuator has a plurality of branches, such as three as shown in the figure, and each branch equally divides the entire circumference.
  • the branches may be in the shape of bars, such as 12a, 12b shown in Figures 3A, 4A-5C, etc.
  • the branches can also be fan-shaped, such as 12a in Figures 3B and 3C. Since the branches usually vibrate synchronously, here the set of all branches is referred to as a whole, which is called an actuator, rather than each branch being called an actuator.
  • FIG. 2A is a schematic diagram of the structure of an actuator according to an embodiment of the present invention.
  • FIG. 2B is a cross-sectional view along the sections ⁇ 1 and ⁇ 2 in FIG. 2A . As can be seen in Figure 2B, the load plate 13a and the actuator 12a are stacked on top of each other.
  • the ends of the strip-shaped actuator branches have protrusions 14a, as shown in Figs. 2A, 3A, 4A, and the like.
  • Protrusions 14a may also be provided on the arcuate edges of the fan-shaped actuator branches. At this time, the protrusions 14a may fill all the arcuate edges as shown in FIG. 3B , or may only occupy the arcs as shown in FIG. 3C . part of the edge.
  • the load plate and the actuator are connected via the protruding portion 14a, that is to say, the contact surface between the load plate and the actuator is limited to such a range as the surface of the protruding portion, as shown in Figures 6A to 6C, the above-mentioned contact surface is the shaded part in the figure C1, C2, C3. This area limitation of the contact surface helps to reduce the constraints on the actuator, thereby increasing its vibration amplitude, that is, its energy conversion power.
  • FIG. 4A is a schematic diagram of the structure of another actuator according to an embodiment of the present invention.
  • FIG. 4B is a cross-sectional view along the section ⁇ 1 in FIG. 2A .
  • the actuator is a two-layer structure, which is stacked along the axial direction of the central column, that is, the upper and lower directions of the viewing angle in the figures.
  • each strip-shaped branch of the actuator and the central column have two connecting parts, 15a and 15b respectively.
  • the height of the protruding structures 14b at the ends of the branches of the actuator located below is greater than the height of the protruding structures 14a at the ends of the branches of the upper actuator.
  • FIG. 5A is a schematic diagram of the structure of another actuator according to an embodiment of the present invention.
  • FIG. 5B is a cross-sectional view along the sections ⁇ 1 and ⁇ 2 in FIG. 5A . It can be seen from FIG. 5A and FIG. 5B that the actuator is also divided into upper and lower layers, and the branches of the upper layer can be shorter.
  • the connecting portion 15a and the two protruding structures 14a and 14b may be in a line, or may not be in a line as shown in FIG. 5C .
  • the above structure provides more flexibility in the design of the actuator.
  • the actuator with the upper and lower layers can make more branches of the actuator participate in the driving of the load disk, thereby helping to increase the mechanical energy of the actuator, and finally increasing the output sound pressure of the speaker.
  • FIG. 6A to 6C are schematic diagrams of structures of several load trays according to embodiments of the present invention.
  • Fig. 6A there are three slits H1, H2, H3 on the load plate, each of which extends radially and then circumferentially from the edge of the load plate, thereby forming an arc-shaped beam located at the edge of the load plate .
  • Fig. 2B since the load plate vibrates in the vertical direction, tension in the horizontal direction will be generated, so the existence of the above-mentioned slits enables the load plate to produce a slight deformation in the horizontal direction, that is, the arc-shaped beams are separated to a certain extent.
  • the center of the load plate helps to increase the freedom of movement of the load plate, so that its longitudinal vibration amplitude is less restricted as much as possible, increases the longitudinal vibration amplitude of the load plate, and finally improves the output sound pressure of the speaker.
  • the relatively long section from the root of the curved beam in Fig. 6B is thinner than the section near the ends where the contact surfaces C1, C2, C3 are located, which helps to reduce the structural stiffness of the curved beam, thereby reducing load Movement of the disc provides greater freedom.
  • Both sides of the arc-shaped beam in FIG. 6C have short slits extending toward each other, such as H1a to H3c in the figure.
  • the load plate is driven at its own periphery to vibrate with the actuator.
  • FIG. 7A is a partial schematic view of a top view of a loudspeaker according to an embodiment of the present invention
  • FIG. 7B is a cross-sectional view along A1-A2 of FIG. 7A
  • a frame 11c is formed on the base, and the frame 11c is a surrounding structure, and each branch 12c of the actuator and the load plate 13a are surrounded by the frame 11c in a top view.
  • the frame 11c encloses a circular space, correspondingly, each branch of the actuator is in a fan shape, the bottom edge of the fan shape is connected to the inner side of the frame, and the surface of the protrusion 14c near the vertex of the fan shape is the contact surface between the actuator and the load plate 13a.
  • the frame 11c can also enclose a square space, as shown in FIG. 7D , correspondingly, the branches of the actuator are triangular.
  • the frame 11c can also enclose other shapes, such as a rectangle or a regular polygon, so as to balance the driving force output of the actuator.
  • the branches of the actuator may also be strip-shaped, as shown in FIG. 7C, for example.
  • FIG. 7E is a partial schematic diagram of a top view of another speaker according to an embodiment of the present invention
  • FIG. 7F is a cross-sectional view of A1-A2 of FIG. 7E
  • FIG. 7G is a schematic diagram of the structure of the load plate in FIG. 7E .
  • FIGS. 7E to 7G in the load plate 13a, there are three areas with a fan-shaped outer contour and an arcuate detour in the interior. These areas are in the stacking direction of the load plate and the actuator, that is, the vertical direction from the perspective of FIG. 7F . direction, aligned with the actuator. In this way, when the actuator vibrates, this area can have a small displacement in the lateral direction (viewing view of Fig. 7F), thereby helping to increase the freedom of movement of the load plate.
  • FIG. 8A is a partial schematic view of a top view of another speaker according to an embodiment of the present invention
  • FIG. 8B is a cross-sectional view along A1-A2 of FIG. 8A .
  • the central column 11a is located in the circular space surrounded by the frame 11c, and the connecting portion 15a at the top of the central column 11a is connected to the three branches 12a of the actuator.
  • the branch 12c of the actuator is arc-shaped, and the shape is adapted to the shape of the inner surface of the frame. It is close to the inner side of the frame and is arranged along the circumferential direction of the circular space. The radial direction of the shaped space extends below the load plate 13a (refer to FIG. 8B ), and the connecting portion 16c is provided with a protruding portion 14c.
  • connection portion 15c can be made of the material of the frame 11c, such as silicon, or the material of the piezoelectric layer, and can be fabricated by deposition.
  • the connecting portion 16c may be the end portion of the branch 12c of the actuator, ie both are of the same material.
  • the frame 11c can also enclose a polygonal space, for example, as shown in FIG. 8C , which is a partial schematic diagram of a top view of another speaker according to an embodiment of the present invention.
  • FIG. 8C the frame 11c encloses a square space in which the actuator branches 12c distributed around and the actuator branches 12a extending from the connecting portion 15a of the central column are arranged. The ends of the actuator branches and the load plate 13a are connected via the protrusions 14c.
  • the actuator in Fig. 8A and Fig. 8C has more branches, thereby increasing the mechanical vibration energy, increasing the driving force of the actuator, and finally helping to increase the output sound of the speaker. pressure.
  • FIG. 9 is a schematic diagram of an internal layer structure of an actuator according to an embodiment of the present invention.
  • FIG. 9 shows an enlarged view of the cross-section of the actuator branch. It can be seen that the actuator 12a includes a four-layer structure, which are the bias layer 12-1, the lower electrode 12-2, the piezoelectric layer 12-3, the upper Electrode 12-4.
  • the bias layer is used for biasing the longitudinal neutral axis of the overall actuator, so that the in-plane stress of the piezoelectric layer generates the longitudinal displacement of the actuator, and at the same time plays a supporting role for the actuator membrane structure.
  • Materials can be selected from single crystal silicon, silicon dioxide, aluminum nitride, molybdenum, aluminum, gold and other metals.
  • the material of the lower electrode of the actuator can be selected from molybdenum, aluminum, gold, tungsten, ruthenium and so on.
  • the upper electrode material of the actuator can be selected from molybdenum, aluminum, gold, tungsten, ruthenium, etc.
  • the piezoelectric layer can be made of aluminum nitride, zinc oxide, and rare earth element doped materials of the above materials (such as scandium doping with a certain atomic ratio), or lead zirconate titanate, doped lead zirconate titanate, and lithium niobate. , lithium tantalate, polyvinylidene fluoride (pvdf), etc.
  • the actuator is a thin film structure in the thickness direction, that is, the longitudinal thickness is generally not more than 100 microns. Since the actuator is a thin-film structure, its longitudinal flexural modulus is small, so it can output a large sound pressure. Electrodes and piezoelectric layers are generally obtained by a thin-film fabrication process.
  • the load plate and the actuator are superimposed, so that the two do not squeeze each other in the lateral direction, so that a larger design space can be obtained.
  • the two can be realized by a bonding process when they are stacked.
  • the diameter of the circumscribed circle at the end point (refer to FIG. 3A ) can account for more than 90% of the transverse diameter of the speaker.
  • the actuator is fan-shaped (refer to FIG. 3B )
  • the sum of the areas of each fan-shaped can account for more than 80% of the horizontal area of the lateral diameter of the speaker.
  • the actuator and the load plate under the limited lateral size of the micro-speaker, the actuator and the load plate have larger lateral area/size and longitudinal vibration displacement, so that the speaker can have a larger output sound pressure.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

L'invention concerne un haut-parleur piézoélectrique MEMS. Un disque de chargement et un actionneur du haut-parleur sont empilés, de telle sorte que le disque de chargement et l'actionneur n'occupent pas la même position dans une direction transversale, un espace de conception plus grand peut ainsi être obtenu ; et avec une taille transversale limitée du micro haut-parleur, l'actionneur et le disque de chargement ont une surface/taille transversale plus grande et un déplacement de vibration longitudinal, et par conséquent, le haut-parleur peut avoir une pression sonore de sortie supérieure.
PCT/CN2020/101093 2020-07-09 2020-07-09 Haut-parleur piézoélectrique mems WO2022006815A1 (fr)

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PCT/CN2020/101093 WO2022006815A1 (fr) 2020-07-09 2020-07-09 Haut-parleur piézoélectrique mems

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106488366A (zh) * 2015-08-27 2017-03-08 悠声股份有限公司 具有位置传感器的mems扬声器
CN108141673A (zh) * 2015-10-01 2018-06-08 悠声股份有限公司 柔性mems电路板单元以及电声换能器装置
CN207652692U (zh) * 2017-11-28 2018-07-24 歌尔科技有限公司 一种压电发声装置
CN109905824A (zh) * 2018-11-30 2019-06-18 美律电子(深圳)有限公司 扬声器结构
US20190208329A1 (en) * 2017-11-13 2019-07-04 Molex, Llc Thin and flexible loudspeaker using one or more piezoelectric diaphragms
CN111182428A (zh) * 2019-12-31 2020-05-19 瑞声科技（南京）有限公司 Mems扬声器及其制造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106488366A (zh) * 2015-08-27 2017-03-08 悠声股份有限公司 具有位置传感器的mems扬声器
CN108141673A (zh) * 2015-10-01 2018-06-08 悠声股份有限公司 柔性mems电路板单元以及电声换能器装置
US20190208329A1 (en) * 2017-11-13 2019-07-04 Molex, Llc Thin and flexible loudspeaker using one or more piezoelectric diaphragms
CN207652692U (zh) * 2017-11-28 2018-07-24 歌尔科技有限公司 一种压电发声装置
CN109905824A (zh) * 2018-11-30 2019-06-18 美律电子(深圳)有限公司 扬声器结构
CN111182428A (zh) * 2019-12-31 2020-05-19 瑞声科技（南京）有限公司 Mems扬声器及其制造方法

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