WO2021241318A1 - Method for manufacturing metal-based modified plate member - Google Patents

Abstract

The present disclosure provides a method for simply manufacturing a metal-based modified plate member having superior quality at a lower cost, without being affected by the machining precision of end surfaces of metal-based plate members to be abutted. A method for manufacturing a metal-based modified plate member according to the present invention comprises: a step A for setting a first end surface and a second end surface of metal-based plate members so as to be opposing each other with an interval therebetween, and thereby providing a gap between the first end surface and the second end surface; a step B for inserting a filler, heated to at least the melting point thereof, into the gap to fill the gap, or filling the gap with the filler and heating the filler to at least the recrystallization temperature, and then causing the filler to conform to the shapes of the first end surface and the second end surface to thereby from a filled section in which the gap is filled with the filler; and a step C for inserting, into at least the filled section, at least the probe of a friction stirring/rotating tool having the probe, and modifying at least the filled section from among the metal-based plate members and the filled section by implementing friction stir processing (FSP), and thereby obtaining a metal-based modified plate member provided with an FSP section.

Description

Manufacturing method of metal-based modified plate material

The present disclosure relates to a method for manufacturing a metal-based modified plate material using a friction stir welding process, for example, a method for manufacturing a large flat sputtering target using a modification of a metal material by a friction stir welding process.

Due to the demand for large displays, flat sputtering targets (hereinafter referred to as plate targets) are becoming larger.

Regarding the manufacturing method of the plate target, a method of manufacturing by joining has been proposed (see, for example, Patent Document 1). In particular, it is claimed that the size of crystal grains in the friction stir welding (hereinafter referred to as FSW), which is one of the solid phase welding methods, is the same in the joint portion and the base metal portion as compared with the melt welding. (See, for example, Patent Document 1). In addition, melt welding is very difficult for materials with high thermal conductivity such as Au, Cu, Al, and Ag, and the equipment is also large. Therefore, joining with FSW is more effective and does not require large equipment. There are advantages. Further, in Patent Document 2, a plurality of sputtering targets are joined and brought into contact with each other to form a sputtering target, and then the sputtered surface is rubbed and stirred to manufacture the sputtering target.

International Publication No. 2004/090194 Japanese Unexamined Patent Publication No. 2015-120975

In the manufacturing methods described in Patent Documents 1 and 2, when the end faces of the plate materials are butted against each other, if the processing accuracy of both end faces is low, a gap may occur between the end faces and a joining defect may occur. On the other hand, it takes a lot of cost and time to pre-cut the end face of a large plate so that no gap is generated. Further, even if another plate material or powder is packed between the end faces of the plate material, a gap remains between the end face of the plate material and another plate material or powder, and the modification is performed with the gap remaining. Defects occur, causing abnormal discharge and differences in film formation speed.

The present disclosure has been made against the background of such circumstances, and an object of the present invention is to provide a method for easily producing a metal-based modified plate material having excellent quality at a lower cost. More specifically, the filler is heated and the filler is deformed in the thickness direction and the end surface direction of the plate so as to follow the shapes of the first end face and the second end face of the metal-based plate. It is an object of the present invention to provide an integrated high-quality metal-based modified plate material without being affected by the processing accuracy of the end faces of the metal-based plate materials to be abutted by quality.

As a result of diligent studies to achieve the above objectives, the end faces of the plate materials face each other without contacting each other, the filler is heated without adjusting the shape of the end faces of the plate materials, and the filler is filled in the gaps existing between the end faces. Is filled, the filler is deformed in the thickness direction and the end face direction of the plate material so as to follow the shapes of the first end face and the second end face of the metal-based plate material, and then the filling part is FSP using the friction stir welding technique. We have found that the above-mentioned problems can be solved by modifying with (Friction Stir Processing), and have completed the present invention.

In the method for producing a metal-based modified plate material according to the present invention, the first end face and the second end face of the metal-based plate material are opposed to each other with a gap between the first end face and the second end face. Step A in which a gap is provided and (1) a filler heated to a temperature higher than the melting point is inserted into the gap, and the filler is deformed so as to follow the shapes of the first end face and the second end face of the metal-based plate material. Then, a filling portion is formed in which the filler is filled in the gap, or (2) the filler is fitted in the gap and the filler is heated to a recrystallized temperature or higher, and then the filler is charged in the first position. Step B of forming a filling portion in which the filler is filled in the gap by deforming to follow the shape of the end face and the second end face, and friction stir rotation having a probe in at least the filling portion. Of the tools, at least the probe is inserted and FSP (Friction Stir Processing) is applied to modify at least the filling portion of the metal plate material and the filling portion to provide a metal system having an FSP portion. It is characterized by having a step C for obtaining a modified plate material.

In the method for producing a metal-based modified plate material according to the present invention, the metal-based plate material has a flat plate shape and has the first end face, and the metal-based plate material has the second end face. May be separate. By integrating a plurality of flat plate-shaped metal-based plates, a large-sized metal-based modified plate can be manufactured.

In the method for producing a metal-based modified plate material according to the present invention, it is preferable that the interval is 0.2 mm or more and less than 5 mm. The filling material can be easily filled in the gap, and the filling portion can be modified more efficiently.

In the method for producing a metal-based modified plate material according to the present invention, the step B is a step B1 in which the filler is built up in the gap by the MIG or TIG method, and the melt is placed in the gap as the filler. Step B2 of pouring, a step of fitting a block material having a thickness equal to or greater than the wall thickness of the metal-based plate material into the gap, heating it to a recrystallized temperature or higher, and then pressing it while applying frictional heat with a friction stir rotation tool having no probe. B3-1 or the step B3-2 of pressing while heating to a recrystallized temperature or higher with a friction stir rotation tool without a probe, or at least one of wire, granules and powder is placed in the gap. Step B4-1 of heating above the recrystallization temperature and then pressing with a hammer, step B4-2 of heating above the recrystallization temperature and then pressing with a press machine, after heating above the recrystallization temperature and then friction stir welding without a probe It is one of the steps B4-3 of pressing while applying frictional heat with a rotating tool, or the step B4-4 of pressing while heating above the recrystallization temperature with a friction stir welding rotating tool without a probe. Is preferable. By heating or plastically deforming the filler in addition to heating, the deformation of the filler is promoted in the thickness direction and the end face direction of the metal plate material, and the deformation of the first end face and the second end face of the metal plate material is promoted. It is possible to more efficiently fill the filler so as to follow the shape.

In the method for manufacturing a metal-based modified plate material according to the present invention, when the wall thickness of the metal-based plate material is T _{1 (unit: mm) in the step C, the probe length Q 1} of the friction stirring rotation tool (unit: mm). Unit: mm) _{preferably satisfies 0 <Q 1} ≦ (T _{1 −} 0.2). It is possible to prevent the probe of the friction stir rotation tool from penetrating the filling part.

In the method for producing a metal-based modified plate material according to the present invention, it is preferable to have a step D in which at least the FSP portion of the metal-based modified plate material is further subjected to plastic working after the step C. By adding processing strain due to plastic working, it is possible to adjust the crystal grains and improve the uniformity of the size of the crystal grains between the FSP part and the metal-based plate material, and the metal-based modified plate material with high dimensional accuracy. Can be manufactured.

In the method for producing a metal-based modified plate material according to the present invention, between the step C and the step D, after the step D, or both between the step C and the step D and after the step D. In the above step E, it is preferable to have a step E of heat-treating the metal-based modified plate material at a temperature equal to or higher than the recrystallization temperature of the metal-based plate material. It is possible to reduce the internal stress of the metal-based modified plate material and improve the uniformity of the crystal grain size between the FSP portion and the metal-based plate material.

In the method for producing a metal-based modified plate material according to the present invention, the metal-based modified plate material is Au, Ag, Al, Cu, Zn, Au-based alloy, Ag-based alloy, Al-based alloy, Cu-based alloy, or Zn-based. It is preferably composed of any one of the alloys. A metal-based modified plate material can be produced even with a material having high thermal conductivity and / or being easily oxidized.

According to the present disclosure, it is possible to provide a method for easily producing a metal-based modified plate material having excellent quality at a lower cost. More specifically, the filler is heated and the filler is deformed in the thickness direction and the end surface direction of the plate so as to follow the shapes of the first end face and the second end face of the metal-based plate. By quality, it is possible to provide an integrated high-quality metal-based modified plate material without being affected by the processing accuracy of the end faces of the metal-based plate materials to be abutted.

It is a perspective view which shows the 1st form in the state which provided the gap in step A. It is a cross-sectional view taken along the line AA. It is a perspective view which shows the 1st form of the state which formed the filling part in step B. It is a cross-sectional view taken along the line BB. It is a perspective view which shows the 1st form in the process of forming a metal-based modified plate material in process C. It is a cross-sectional view taken along the line CC. It is a cross-sectional view taken along the line DD. It is a schematic cross-sectional view which shows an example of the state in which the filler is built up in step B1. It is a schematic cross-sectional view which shows an example of how to fit a block material in a process B3. It is a schematic cross-sectional view which shows the 1st modification of the method of fitting a block material in a process B3. It is a schematic cross-sectional view which shows the 2nd modification of the method of fitting a block material in a process B3. It is a schematic sectional drawing which shows the 3rd modification of the method of fitting a block material in a process B3. It is a schematic sectional drawing which shows the 4th modification of the method of fitting a block material in a process B3. It is a schematic cross-sectional view which shows an example of the state which the wire is installed in the process B4. It is a schematic cross-sectional view which shows an example of the state in which the granules are installed in the step B4. It is sectional drawing which shows an example of the state which simply presses a granular material by a friction stir rotation tool. It is sectional drawing which shows an example of the state which makes a granule into a plastic fluid by a friction stir rotation tool. It is a perspective view which shows an example of the metal-based modified plate material which performed plastic working in step D. FIG. 3 is a cross-sectional view taken along the line EE. It is a perspective view which shows the comparative example of a metal-based modified plate material. FIG. 5 is a sectional view taken along line FF.

Hereinafter, the present invention will be described in detail by showing embodiments with reference to the drawings, but the present invention is not construed as being limited to these descriptions. The embodiments may be modified in various ways as long as the effects of the present invention are exhibited. In addition, the components having the same reference numerals in the present specification and the drawings shall indicate the same components.

[First form]
First, regarding the method for manufacturing the metal-based modified plate material, the number of metal-based plate materials to be prepared is two, and these metal-based plate materials have a flat plate shape and have a first end face, and a first. The first embodiment, which is a separate body from the metal-based plate having the end face of 2, will be described in detail.

In the method for manufacturing a metal-based modified plate material according to the present embodiment, as shown in FIGS. 1 to 7, the first end surface 11a of the metal-based plate material 201 and the second end surface 11b of the metal-based plate material 101 are spaced apart from each other. Step A in which a gap 12 is provided between the first end surface 11a and the second end surface 11b by opening and facing each other, and (1) the filler 2 heated to a melting point or higher is inserted into the gap 12 to form the filler 2. The metal-based plates 101 and 201 are deformed to follow the shapes of the first end faces 11a and the second end faces 11b to form a filling portion 22 in which the filling material 2 is filled in the gap 12 or (2). ) The filler 2 is fitted into the gap 12, the filler 2 is heated to a recrystallized temperature or higher, and then the filler 2 is deformed so as to follow the shapes of the first end face 11a and the second end face 11b. By inserting at least the probe 53 of the friction stir rotation tool 50 having the probe 53 into the filling portion 22 at least in the step B for forming the filling portion 22 in which the gap 12 is filled with 2 and performing the FSP. Among the metal-based plate materials 101 and 201 and the filling portion 22, at least the filling portion 22 is modified to obtain the metal-based modified plate material 30 provided with the FSP portion 32.

(Step A)
In step A, first, two metal-based plates 101 and 201 are prepared. The metal-based plate materials 101 and 201 are both plate materials having a flat surface on the entire surface in FIGS. 1 and 2, but may be a plate material having at least a flat edge portion of the edge portion of the plate surface. The end faces adjacent to the flat edge portion and to be opposed to each other are the first end face 11a of the metal-based plate material 201 and the second end face 11b of the metal-based plate material 101, respectively. When the entire surface of the metal plate 101,201 is flat, the metal plate 101,201 may have, for example, a parallelogram, a rhombus, a rectangle, a square, a circle, a fan shape, or an ellipse shape in appearance of the plate surface. It is a plate material made of metal or alloy. Hereinafter, unless otherwise specified, the case where the appearance shapes of the plate surfaces of the metal-based plate materials 101 and 201 are both rectangular will be described as an example.

The composition of the metal-based plate materials 101 and 201 is, for example, Au, Ag, Al, Cu, Zn or an alloy containing these metals. The metal-based plate materials 101 and 201 are preferably made of any one of Au, Ag, Al, Cu, Zn, Au-based alloy, Ag-based alloy, Al-based alloy, Cu-based alloy and Zn-based alloy. Preferred specific examples of Au-based alloys include, for example, Au-Ag-based alloys, Au-Pd-based alloys, Au-Al-based alloys, Au-Cu-based alloys, Au-Zn-based alloys, Au-Sn-based alloys, and Au-. There are Ni-based alloys. Preferred specific examples of the Ag-based alloy include, for example, Ag-Au-based alloy, Ag-Al-based alloy, Ag-Cu-based alloy, Ag-Zn-based alloy, Ag-Pd-based alloy, Ag-Cu-Pd-based alloy, and the like. There are Ag-Cu-Pd-Ge based alloys, Ag-In based alloys, Ag-Bi based alloys and the like. Preferred specific examples of the Al-based alloy include, for example, Al-Au-based alloys, Al-Ag-based alloys, Al-Cu-based alloys, Al-Zn-based alloys, Al-Sc-based alloys, Al-Ti-based alloys, and Al-. There are Y-based alloys, Al-Zr-based alloys, Al-Hf-based alloys, Al-Nd-based alloys, Al-Si-based alloys, and the like. Preferred specific examples of the Cu-based alloy include Cu-Au-based alloys, Cu-Ag-based alloys, Cu-Al-based alloys, Cu-Zn-based alloys, Cu-Ga-based alloys, Cu-Ta-based alloys, and Cu-Cr-based alloys. There are alloys and so on. Preferred specific examples of the Zn-based alloy include Zn-Au-based alloys, Zn-Ag-based alloys, Zn-Al-based alloys, Zn-Cu-based alloys, Zn-Fe-based alloys, and the like. Here, _{when expressed as "M 1-} M ₂ alloy" (where M ₁ and M ₂ mean a metal element), M ₁ means a main component and M ₂ means a sub component. .. The “system” means that an auxiliary component or an additive component other than _{M 2 may be contained.} The principal component means that M ₁ has the maximum atomic% in the alloy. M ₂ indicates the first subcomponent and means that it has the maximum atomic% in _{the alloy except for M 1.} The additive component means, for example, a content element having a content of 1 atomic% or less. Regarding the Ag-Cu-Pd-Ge alloy, Ag _{corresponds to M 1} and Cu, Pd and Ge _{correspond to M 2} , and for example, the silver alloy disclosed in International Publication No. 2005/031016 is included. ..

It is preferable that the composition of the metal-based plate material 101 and the composition of the metal-based plate material 201 are the same. Hereinafter, unless otherwise specified, a case where the composition of the metal-based plate material 101 and the composition of the metal-based plate material 201 are the same will be described as an example.

When the wall thicknesses of the metal plates _{101 and 201} are T 101 and T 201 (unit: mm) _{, respectively, the wall thicknesses T 101} and T ₂₀₁ are preferably 2 mm or more and 25 mm or less. _{T 101} and T ₂₀₁ can be adjusted according to the wall thickness of the metal-based modified plate material 30 to be formed. The wall thickness T ₁₀₁ and the wall thickness T ₂₀₁ may be equal to or different from each other. The wall thickness ratio T ₁₀₁ / T ₂₀₁ is preferably 0.80 or more and 1.25 or less. Hereinafter, unless otherwise specified, a case where the wall thickness T ₁₀₁ and the wall thickness T ₂₀₁ are equal to each other and T ₁ as shown in FIG. 2 will be described as an example.

As the metal-based modifying plate 30 has a desired shape, it is opposed by opening the first end surface 11a of the metallic plate 201, the distance W _S and a second end surface 11b of the metallic plate 101, metal By arranging the system plates 101 and 201, a gap 12 is formed between the first end surface 11a and the second end surface 11b. In FIGS. 1 and 2, the metal-based plate materials 101 and 201 are arranged so that the flat plate-shaped metal-based modified plate material 30 in which the metal-based plate materials 101 and 201 are flush with each other can be formed.

The shapes of the first end face 11a and the second end face 11b are the same when the end face 11a and the end face 11b are butted against each other by arranging the filler 2 between the end face 11a and the end face 11b in the step B. It is not particularly limited because it is not necessary to have a contacting relationship. The shapes of the end face 11a and the end face 11b are, for example, a convex surface, a concave surface, an uneven surface, a plane perpendicular to the plate surface, or a plane having at least a part of a tapered portion formed in the depth direction with respect to the plate surface. The shape of the end face 11a and the shape of the end face 11b may be the same or different. Further, the end face 11a and the end face 11b may be a smooth surface or a rough surface. The roughness of the end face 11a and the roughness of the end face 11b may be the same or different.

Opening a gap means that the first end face 11a and the second end face 11b are not butted against each other. Referring to in Figure 2, because the entire surface of both plate surfaces metallic plate 101, 201 is a plate material thickness _{T 1} is flat, the outer挿直line in contact with the plate surface 101a (not shown), to the plate surface 101b The entire surface of the end face 11b exists between the extrapolated straight line (not shown) in contact with the external straight line. Further, the entire surface of the end surface 11a exists between the extrapolated straight line (not shown) in contact with the plate surface 201a and the extrapolated straight line (not shown) in contact with the plate surface 201b. The end face 11a and the end face 11b may or may not be parallel.

Interval _{W S} (Unit: mm) will be described. As shown in FIG. 2, it is located on a virtual reference surface 205 separated from the outer plate surface 201a of the metal-based plate material 201 toward the plate surface 201b on the opposite side by a distance KT _{1 (however, 0 ≦ K ≦ 1). Let P 1} be a point on the first end surface 11a, and on the second end surface 11b located on the virtual reference surface 105 separated by _{a distance KT 1} from the outer plate surface 101a of the metal-based plate material 101 toward the plate surface 101b on the opposite side. Let P ₂ be the point. Interval _{W S} is the length of the line segment _P 1 _{P 2.} The numerical value K is a variable. If the end face 11a and the end face 11b are parallel, the interval _{W S} is constant regardless of the variable K. As shown in FIG. 1 and FIG. 2, when the end surfaces 11a and the end face 11b facing inclined to each other, the distance W _S, decreases as the variable K increases. In the above, the case where the wall thickness T ₁₀₁ and the wall thickness T ₂₀₁ are equal and T ₁ has been described, but when the wall thickness T ₁₀₁ and T _{201 are different, the distance KT 201 is} separated from the plate surface 201a toward the plate surface 201b. _{Let P 1} be a point on the end face 11a located at _{the location, and P 2} be a point on the end face 11b located at a _{distance KT 101} from the plate surface 101a toward the plate surface 101b.

Interval _{W S} is, 0.2 mm or more and less than 5 mm. The filler 2 can be easily filled in the gap 12, and the filling portion 22 can be modified more efficiently. If it is less than 0.2 mm, it becomes difficult to insert the filler 2 heated above the melting point into the gap 12, so that the filler follows the shapes of the first end face and the second end face of the metal-based plate. It may be difficult to deform in the thickness direction and the end face direction, and it is difficult to fit the filler because the gap is narrow when fitting it, and when the filler is heated and pressed after it is fitted, it is filled. It is difficult for the material to be pressed, and the filler may be difficult to deform in the thickness direction and end face direction of the plate material so as to follow the shape of the first end face and the second end surface of the metal-based plate material, and it may be difficult to deform 5 mm or more. If this is the case, the time and effort required to modify the filling portion 22 may increase.

The gap 12 is a space sandwiched between the first end faces 11a and the second end faces 11b facing each other. For example, in FIG. 1, it is a space sandwiched between all of the first end faces 11a and all of the second end faces 11b.

It is preferable that the metal plates 101 and 201 are arranged on the backing jig 40. The metal plates 101 and 201 can be easily arranged. The backing jig 40 is preferably made of a steel material or a ceramic material such as silicon nitride.

The shape of the backing jig 40 is derived from the shape of the metal-based modified plate material 30 to be manufactured. For example, the wall thickness is integral a flat metallic plate 101, 201 is T _1, if the wall thickness to produce a flat metal-based modifying plate 30 is T _1, the backing jig 40 The shape is a flat plate. When the metal-based plate materials 101 and 201 having different wall thicknesses T ₁₀₁ and T ₂₀₁ are integrated to manufacture the metal-based modified plate material 30 in which the outer plate surface 101a and the outer plate surface 201a are flush with each other, the back surface is manufactured. The shape of the backing jig 40 is, for example, a plate shape including a first plate material arranging portion and a second plate material arranging portion having a metal-based plate material 101, 201 with a lower wall thickness difference than the first plate material arranging portion. (Not shown). In step A, of the metal-based plates 101 and 201, the thinner metal-based plate is placed in the first plate arrangement portion, and the thicker metal-based plate is placed in the second plate arrangement portion. By performing the subsequent steps (not shown), the metal-based modified plate material 30 in which the plate surface 101a and the plate surface 201a are flush with each other can be obtained.

(Step B)
In step B, the gap 12 shown in FIGS. 1 and 2 is filled with the filler 2 to form the filling portion 22 as shown in FIGS. 3 and 4. As shown in FIGS. 3 and 4, it is preferable to continue to use the backing jig 40. More specifically, in the step B, (1) the filler 2 heated to the melting point or higher is inserted into the gap 12, and the filler 2 is formed into the shapes of the first end faces 11a and the second end faces 11b of the metal-based plates 101 and 201. A form (referred to as A form) in which the filler 2 is filled in the gap 12 by being deformed to follow the above, or (2) the filler 2 is fitted in the gap 12 to fill the gap 12. After heating to a temperature equal to or higher than the recrystallization temperature, the filler 2 is deformed to follow the shapes of the first end face 11a and the second end face 11b to form the filling portion 22 in which the filler 2 is filled in the gap 12. There is a form (referred to as B form).

The filling portion 22 has a filling material 2 and a gap 12, and the filling material 2 is fixed to the gap 12.

4, a point on the first end face 11a located in the virtual reference surface 206 0.95 T ₁ away from the outer plate surface 201a toward the opposite side of the plate surface 201b of the metallic plate 201 and _{P 5,} the metal a point on the second end surface 11b located on the 0.95 T ₁ virtual reference plane 106 a distance toward the opposite side of the plate surface 101b from the outer plate surface 101a of the system plate 101 and _{P 6.} Further, in FIG. 4, the points on the boundary between the plate surface 201b and the filling unit 22 and _{P 7,} to a point on the boundary between the plate surface 101b and the filling unit 22 and the _{P 8.} The filler 2 and was allowed to fill in the gap 12 is, for example, in the cross section shown in FIG. 4, from the outer plate surface 201a of the outer plate surface 101a and a metallic plate 201 of the metallic plate 101, the thickness direction _{U B} It means that the filler 2 is filled in the gap 12 so as to reach at least the straight line P ₅ P ₆ and at most the straight line P ₇ P _8. In the filling portion 22, since the inside of the filling material 2 and between the filling material 2 and the end faces 11a and 11b are modified in the step C, voids and defects may remain if the amount is small. In the above, the case where the wall thickness T ₁₀₁ and the wall thickness T ₂₀₁ are equal and T ₁ has been described, but when the wall thickness T ₁₀₁ and the wall thickness T ₂₀₁ are different, 0 from the plate surface 201a toward the plate surface 201b. the first point to _{P 5} on the end face 11a located in the virtual reference surface 206 .95T ₂₀₁ apart, the second is located in the virtual reference plane 106 _{0.95 T 101} away toward the plate face 101a on the plate surface 101b _{Let P 6} be a point on the end face 11b of.

When the width direction of the gap 12 is the direction U _W and the traveling direction of the gap 12 is the direction _UG , when the filling material 2 is completed and the filling portion is formed, the ratio of the filling material 2 in the gap 12 is determined. in the width direction _{U W} of the gap 12, preferably 90 to 100%, and in the traveling direction _{U G} of the gap 12, preferably 90 to 100%.

Volume of _{V G} (unit: mm ³⁾ of the gap 12 shown in FIG. 1, and, _{V 2} the apparent volume of the filler 2 in the filling part 22 shown in FIG. 3 (Unit: mm ³⁾ when a, 0 <V It may be ₂ ≦ _{V G,} but in consideration of the clearance and the defect is _preferably V G _{<V 2,} and more preferably _{V G <V 2 ≦ 1.5V G} .

The filler 2 includes, for example, a welding material 102 (FIG. 8), a molten metal (not shown), a block material 202 (FIGS. 9 to 13), and a wire 302 (FIG. 14) having the same composition as that of the metal-based plate materials 101 and 201. ), Granule 402 (FIG. 15), or powder (not shown). Further, the form of the filler 2 may be a combination of members having a composition different from that of the metal-based plate members 101 and 201. For example, the form of the block material is a composite block material in which block-shaped constituent members are combined, and includes a block-shaped constituent member having a composition different from that of the metal-based plate materials 101 and 201. A composite block material (not shown) having an average composition having the same composition as that of the metal-based plate materials 101 and 201 may be used. The form of the wire is a wire bundle in which a plurality of wires are bundled and includes a wire having a composition different from that of the metal-based plate materials 101 and 201, but the average composition of the wire bundle is that of the metal-based plate materials 101 and 201. A wire bundle (not shown) having the same composition may be used. The form of the granules is a mixture of granules and contains particles having a composition different from that of the metal plates 101 and 201, but the average composition of the mixture of granules is the same as the composition of the metal plates 101 and 201. It may be a certain granular material mixture (not shown). The form of the powder is a powder mixture and contains particles having a composition different from that of the metal-based plates 101 and 201, but the average composition of the powder mixture is the same as the composition of the metal-based plates 101 and 201. It may be a certain powder mixture (not shown).

The reason for heating above the recrystallization temperature in the B form of step B is that the filler is softened so as to easily deform so as to follow the shape of the end portion of the metal-based plate material.

Step B is preferably any one of the following steps B1 to B4. It is possible to more efficiently fill the gap 12. Regarding step B, the steps classified into the A form are the steps B1 and B2, and the steps classified into the B form are the steps B3 and B4. Hereinafter, in the description of steps B1 to B4, the case where the wall thickness T ₁₀₁ and the wall thickness T ₂₀₁ are equal and T ₁ will be described, but when the wall thickness T ₁₀₁ and the wall thickness T ₂₀₁ are different, the wall thickness T ₁₀₁ And, of the wall thickness T _201, the larger one is defined as the wall thickness T ₁ .

(Step B1)
As shown in FIG. 8, the step B is preferably a step B1 in which the welding material 102 is built up inside the gap 12 by the MIG or TIG method. Overlaying is, for example, the act of filling the gap immediately after heating the filler to a temperature higher than the melting point. To build-up by inserting a welding material 102 into the gap 12 from the outer plate surface 201a of the outer plate surface 101a and a metallic plate 201 of the metallic plate 101, the metallic sheet along the direction _{U G} shown in FIG. 3 thickness of 101, 201 to _{T 1} welding material 102 can be easily filled into the gap 12. After the overlay is completed, the welding material 102 cools and is fixed in the gap 12, so that the filling portion 22 is provided.

(Step B2)
Step B is preferably step B2 in which the melt (not shown) is poured into the gap 12. In this step, the filler is heated to a temperature equal to or higher than the melting point to form a melt, and then the filler 12 is filled. The state in which the molten material (not shown) is poured into the gap 12 is the same as the state shown in FIG. 8 except that the welding material 102 is a molten material (not shown). The suitable composition of the melt (not shown) and the process after pouring are the same as those of B1.

(Step B3)
In step B, as shown in FIG. 9, _{a block material 202 having a thickness H 2 having a wall thickness T 1} or more of the metal plate materials 101 and 201 is fitted into the gap 12 and heated to a recrystallization temperature or higher, and then has a probe. It is preferable that the step B3-1 presses the material while applying frictional heat with a friction stir rotation tool. The heating method of the block material 202 in the step B3-1 is, for example, heating by a gas burner, heating by TIG, heating by a laser, heating by an electron beam (EB), energization heating, condensing heating, heating by electromagnetic induction, and the like. .. After filling the gap with a block material that is narrower than the gap but longer than the thickness of the plate material, the block material 202 is pressed in the thickness direction and end face direction of the metal-based plate material by heating in addition to heating above the recrystallization temperature. Plastic deformation is promoted, and the block material 202 is deformed so as to follow the shapes of the first end face and the second end face of the metal-based plate material. Then, the gap 23 between the metal-based plate members 101 and 201 and the block member 202 can be filled. Gap 12 is preferably a shape in which the width becomes narrower toward the bottom along the thickness direction U _B of the plate. The efficiency of the follow-up is improved.

Further, as shown in FIG. 17, it is preferable that step B is step B3-2 in which the friction stir rotation tool 70 without a probe presses while heating to a temperature equal to or higher than the recrystallization temperature. The block material 202 is made of a metal plate, as in step B3-1, by sufficiently heating the friction stir rotation tool 70 to a recrystallization temperature or higher with only the friction heat and then pressing the friction stir rotation tool 70 while rotating it. It is deformed to follow the shapes of the first end face and the second end face.

Further, in the present embodiment, in order to more efficiently perform plastic deformation due to pressing, at least the gap 12 formed by the first end face 11a and the second end face 11b or the filler 2 before pressing is performed. For one, it is preferable to form at least a part of the tapered portion in the depth direction of the gap. For example, the first modification to the fourth modification shown in FIGS. 10 to 13 can be exemplified. Also in the form shown in FIGS. 10 to 13, the block material 202 is pressed to plastically deform the metal-based plate material in the thickness direction and the end surface direction so as to follow the shapes of the first end face and the second end face. be able to. In the modes shown in FIGS. 10 to 13, since the filler is wider than the width of the bottom surface of the gap 12, plastic deformation occurs while filling.

In the form shown in FIG. 10, the width is wider than the narrowest portion of the gap 12 (in FIG. 10, the back portion (bottom portion) in the fitting direction of the block material 202 into the gap 12), and the gap 12 is widened. The block material 202, which is narrower than the entrance portion, is filled in the gap 12. It is preferred that the gap 12 also in the form a shape in which the width becomes narrower toward the bottom along the thickness direction U _B of the plate.

In the form shown in FIG. 11, a part of the end surface of the plate material is inclined so that the gap 12 is partially tapered toward the back, and the block material 202 wider than the partially tapered portion is brought into contact with the inclined surface. However, the gap 12 is filled with the block material 202.

In the form shown in FIG. 12, the tip portion of the block material 202 is partially tapered to make the width narrower than the gap 12, and the gap 12 is filled with the block material 202.

In the form shown in FIG. 13, the tip portion of the block material 202 is tapered to make the width narrower than the gap 12, and the gap 12 is filled with the block material 202.

In step B3, the portion of heating above the recrystallization temperature is not particularly limited, and is, for example, the portion to be pressed and its surroundings (at this time, partial heating of the filler), or the whole. (At this time, the overall heating of the filler is performed.).

In step B3, the interval W _S in FIG. 2 is preferably made smaller as the variable K approaches from 0 to 1. When the block material 202 is fitted into the gap 12, the block material 202 is easily fitted into the gap 12, and the end face of the plate material does not spread in the downward direction. Adhere without gaps. Further, when pressed, the pressing force acts not only in the thickness direction of the plate material but also in the end surface direction of the plate material, so that when the block material is plastically deformed, it easily adheres to the end surface of the plate material. If the wall thickness T ₁ and the thickness H ₂ are equal to each other, the friction stirring rotation tool 70 may be used to press the block material 202 including the boundary portion (not shown) between the block material 202 and the metal-based plate materials 101 and 201. When pressed, the gap 12 may be plastically deformed.

(Step B4)
FIG. 14 is a diagram showing a state in which a plurality of wires 302 are bundled and installed in the gap 12 shown in FIG. FIG. 15 is a diagram showing a state in which the granular material 402 is installed in the gap 12 in the gap 12 shown in FIG.

In step B, as shown in FIG. 14, the wire 302 is installed in the gap 12, the grain 402 is installed in the gap 12, or the powder is installed in the gap 12 as shown in FIG. 15 (. Step B4-1 of performing at least one of (not shown), heating to a recrystallization temperature or higher and then pressing with a hammer (not shown), and step B4 of heating to a recrystallization temperature or higher and then pressing with a press machine (not shown). -2, Step B4-3 of pressing while applying frictional heat with a friction stirring rotation tool that does not have a probe after heating to a recrystallization temperature or higher, or as shown in FIG. 16, a friction stirring rotation tool that does not have a probe. It is preferable that the step is any one of steps B4-4, in which the material is pressed while being heated to a temperature equal to or higher than the recrystallization temperature at 70. By pressing in addition to heating, the wire, granules or powder is plastically deformed in the thickness direction and the end face direction of the plate material so as to follow the shapes of the first end face and the second end face of the metal-based plate material. It is possible to fill the gap 23 between the metal-based plate materials 101 and 201 and the wire, granules or powder.

The method for heating the filler in steps B4-1, B4-2 and B4-3 is, for example, heating with a gas burner, heating with TIG, heating with a laser, heating with an electron beam (EB), energization heating, and light collection. Heating, heating by electromagnetic induction, etc. In step B4-4, the friction stir rotation tool 70 without a probe is sufficiently heated to a recrystallization temperature or higher only by frictional heat, and then the friction stir rotation tool 70 is pressed while being rotated. Similar to step B4-2 and step B4-3, the filler is deformed to follow the shapes of the first end face and the second end face of the metal-based plate material.

The form of the filler 2 includes wire 302 only (FIG. 14), granule 402 only (FIG. 15), powder only (not shown), a combination of wire 302 and granule 402 (not shown), and wire 302. There are a combination with powder (not shown), a combination of granule 402 and powder (not shown), or a combination of wire 302, granule 402 and powder (not shown).

Wire 302 is either linear metal or alloy member having a length L _G over the length of the traveling direction U _{G (see} FIG. 1.) Of the gap 12, or short less than the length L _G A plurality of linear metal or alloy members are arranged in the gap 12 in the column direction so that the total length is _LG or more. The granular material 402 is a member made of a particulate metal or alloy having a particle diameter of 1000 μm or more and less than 10000 μm. The powder (not shown) is a particulate metal or alloy member having a particle size of 10 μm or more and less than 1000 μm.

When the form of the filler 2 is only the wire 302, the wire 302 is installed in the gap 12. Here, there are cases where there is only one wire 302 (not shown), and there are cases where a plurality of wires 302 are bundled in a wire bundle as shown in FIG. After installation, it is heated to a temperature higher than the recrystallization temperature, and for example, the wire 302 is pressed by a hammer (not shown) or a press machine (not shown) to move from the side of the plate surface 101a to the side of the plate surface 101b and the plate surface 201a. The wire 302 is pushed from the side of the plate surface 201b to plastically deform the wire 302 to fill the gap 23 between the wire 302 and the metal-based plate members 101 and 201. After that, the wire 302 may be pressed by the friction stir rotation tool 70 to plastically deform the wire 302 to further fill the gap 23 between the metal plates 101 and 201 and the wire 302. Assuming that the installation thickness of the wire 302 is H ₂ , it is preferable that the _{thickness H 2} is a wall thickness T _{1 or more.} If the thickness H ₂ and the wall thickness T ₁ are equal, the wire is directly heated by the friction stir rotation tool 70 without using a hammer (not shown) or a press (not shown) to the recrystallization temperature or higher. The wire 302 may be plastically deformed by pressing the 302 to fill the gap 23 between the metal plates 101, 201 and the wire 302. Further, the boundary portion (not shown) between the wire 302 and the metal-based plate members 101 and 201 may be included and pressed.

When the form of the filler 2 is only the form of the granular material 402, it is the same as the form of the wire 302 except that the wire 302 is changed to the granular material 402 as shown in FIG. When the form of the filler 2 is only the powder (not shown), the step B4 is performed in the same manner as the form of the granules 402 only. When the form of the filler 2 is the form of the combination, the step B4 is performed in the same manner as the form of only the granular material 402.

In step B4, the portion of heating above the recrystallization temperature is not particularly limited, and is, for example, the portion to be pressed and its surroundings (at this time, partial heating of the filler), or the whole. (At this time, the overall heating of the filler is performed.).

When the filling portion 22 is formed in the step B, for example, the filling portion 22 shown in FIGS. 3 and 4 can be obtained. The end faces 11a and 11b of the gap 12 may be plastically deformed by being pressed by the plastic deformation of the filler 2, and in FIGS. 3 and 4, as an example, the upper portion of the end faces 11a and 11b expands the gap 12. It shows how it was deformed in the direction.

In the present embodiment, pressing with the friction stir rotation tool 70 means that, for example, the granule 402 shown in FIG. 15 is simply pressed in the pressing direction 76 as shown in FIG. 16, and the friction stirring rotation is performed as shown in FIG. The granule 402 is deformed by the rotation of the shoulder portion 72 of the tool 70 to generate a plastic fluid in the plastic region 3, and as shown in FIG. 4, after the filling portion 22 is formed, the filler in the filling portion 22 is formed. It means to reduce the gap between 2 and the end faces 11a and 11b. Specifically, as shown in FIG. 16, the friction stir rotation tool 70 is rotated in the rotation direction 75, and the shoulder portion 72 of the friction stir rotation rotation tool 70 is slowly pressed against the grain body 402 in the pressing direction 76. When the shoulder portion 72 comes into contact with the granular material 402, a high-temperature plastic region 3 is generated in the contacted granular material 402 due to frictional heat due to rotation, and the granular material 402 is heated by heat conduction, as shown in FIG. The plasticity region 3 expands. At the same time, the rotational force applied from the friction stir rotation tool 70 applies a shear force in the rotational direction 75 to the plastic fluid in the plastic region 3, the voids 23 are reduced, and the outer plate surfaces of the plastic fluid are further end faces 11a and 11b. It is filled while being deformed to follow the shape of. The same applies to other forms of the filler 2 such as the block material 202 only, the wire 302 only, the powder only (not shown), and the combination. Here, the friction stir rotation tool 70 is made of, for example, Fe, Ni, Co, W, Ir, an alloy based on them, and a ceramic material. As the friction stir rotation tool 70, a friction stir rotation tool having no probe can be used. The pressure for pressing the friction stir rotation tool 70 is adjusted in consideration of the dimensions such as the wall thickness of the filler 2 and the metal plates 101 and 201 each time. By the above pressing, as shown in FIG. 17, plastic flow may be generated up to the side of the plate surfaces 101b and 201b. The shoulder portion 72 has, for example, a flat shape, a rounded shape, or a rough surface having irregularities, and is preferably a flat shape. The end faces 11a and 11b may be deformed by pressing.

In step B, the plate surfaces 101b and 201b are pressed against the surface 40a of the backing jig 40 by using a gripping member (not shown) so as not to cover the gap 12, and the metal plate material is pressed against the backing jig 40. It is preferable to fill the gap 12 with the filler 2 while preventing the 101 and 201 from moving. It is possible to prevent the gap 12 from expanding due to the displacement of the metal plate materials 101 and 201 with respect to the backing jig 40. When the filler 2 is a welding material 102 (FIG. 8), a molten metal (not shown), a wire 302 (FIG. 14), a granule 402 (FIG. 15) or a powder (not shown), the filler 2 is It is possible to prevent the plate surfaces 101b and 201b from entering between the plate surfaces 101b and 201b and the surface 40a.

(Process C)
In step C, at least the probe 53 of the friction stir rotation tool 50 having the probe 53 is inserted into the filling portion 22 to construct the FSP, and at least the metal plate materials 101 and 201 and the filling portion 22 are provided. The filling portion 22 is modified to form the metal-based modified plate material 30 provided with the FSP portion 32. As shown in FIGS. 5 to 7, it is preferable to continue to use the backing jig 40. After the modification, the metal-based modified plate material 30 can be taken out from the backing jig 40.

As the friction stir rotation tool 50, the friction stir rotation tool used in a normal FSP can be used. As shown in FIGS. 5 and 6, the friction stir rotation tool 50 includes, for example, a columnar body portion 51, a shoulder portion 52 provided at one end of the body portion 51, and a probe 53 provided on the shoulder portion 52. Has. The friction stir rotation tool 50 is made of, for example, the same material as the friction stir rotation tool 70 without a probe.

In step C, the metal-based plate materials 101 and 201 are gripped by using a gripping member (not shown) so as not to cover the filling portion 22, so that the metal-based plate materials 101 and 201 do not move with respect to the backing jig 40. It is preferable to insert the friction stir rotation tool 50 toward the backing jig 40 to perform the modification. The surface 40a of the backing jig 40 serves as a support surface that receives the force due to pressing, prevents the metal-based plates 101 and 201 from shifting with respect to the backing jig 40, and has better quality with no space or defects inside the FSP portion 32. Modification can be achieved.

The principle of FSP will be explained. The rotating friction stir rotation tool 50 is inserted into the outer plate surfaces 101a and 201a. At this time, in the friction stir rotation tool 50, as shown in FIGS. 5 and 6, the probe 53 is buried in the filling portion 22, and the shoulder portion 52 is pressed against the filling portion 22. When the probe 53 is inserted into the filling portion 22, the filling portion 22 is rapidly heated by friction due to rotation, and as a result, the mechanical strength of the filling portion 22 is reduced. The friction stir rotation tool 50 is moved along the traveling direction 54 so that the metal plate 101 does not move relative to the metal plate 201 and passes over the filling portion 22. In the portion where the friction stir rotation tool 50 is inserted, the frictional heat generated by the rotation of the friction stir rotation tool 50 while the shoulder portion 52 and the probe 53 are in contact with the filling portion 22 is generated around the shoulder portion 52 and the probe 53. A high temperature plastic region 4 is formed in the filling portion 22 of the above. At the same time, the rotational force applied from the friction stir rotation tool 50 applies a shear force in the rotational direction 55 to the plastic fluid in the plastic region 4, and defects and voids contained in the plastic fluid are removed and reforming is performed. .. After the friction stir rotation tool 50 has passed, the plastic fluid is cooled to become a solid FSP portion 32 as shown in FIGS. 5 and 7, and a metal-based modified plate material 30 having the FSP portion 32 is formed. Will be done. All of these phenomena occur at temperatures lower than the melting points of the metal plates 101 and 201 and the melting points of the filler 2. Here, it is preferable that the movement of the friction stir rotation tool 50 in the traveling direction 54 is once one way from one end to the other end of the filling portion 22, and the formation of the FSP portion 32 is completed by the movement.

The FSP is constructed so as to include at least the filling portion 22. As a form to include at least the filling portion 22, for example, the construction is carried out not only in the filling portion 22 but also in the metal plates 101 and 201 on both sides of the filling portion 22. There is a form in which not only the filling portion 22 but also the entire metal-based plate materials 101 and 201 are applied.

The shoulder portion 52 has, for example, a concave shape, a convex shape, and a flat shape, preferably a concave shape.

When the shoulder portion 52 has a flat shape and the outer plate surfaces 101a and 201a are on the same plane, the flat surface 5 of the filling portion 22 is slightly smaller than the outer plate surfaces 101a and 201a as shown in FIG. when you are raised, pushed friction stir rotation tool 50, with the thinning amount T _W is thinning a flat surface 5 of the filling unit 22, the shoulder portion 52 is pressed to the plastic flow of the plastic region 4 It is preferable that it is hit.

_{The shoulder diameter RS} of the shoulder portion 52 is preferably 6 mm or more. The probe diameter _{R P} of the probe 53 is preferably 1.0mm or more and the gap width or more. While facilitating the integration of the metal plates 101 and 201 and the filler 2, the labor for moving the friction stir rotation tool 50 can be reduced.

As shown in FIG. 6, _{the relationship between the length Q 1 (unit: mm) of the probe 53 and the wall thickness T 1} (unit: mm) of the metal-based plates 101 and 201 _{is 0 <Q 1} ≦ (T _1). -0.2) is preferably satisfied. It is possible to stir even if Q ₁ is 0, but the stirring capacity is improved _{when Q 1> 0.} When Q ₁ is greater than (T ₁ -0.2), the range of suitable thinning min T _W, when the shoulder portion 52 is pressed against to be in contact with the plastic flow of the plastic region 4, the probe 53 may penetrate the metal plates 101 and 201. Further, when the metal-based plate materials 101 and 201 are arranged on the backing jig 40, the probe 53 penetrating the metal-based plate materials 101 and 201 may rub the backing jig 40.

The metal-based modified plate material 30 is preferably made of any one of Au, Ag, Al, Cu, Zn, Au-based alloy, Ag-based alloy, Al-based alloy, Cu-based alloy, and Zn-based alloy. The metal-based modified plate material 30 can be manufactured even with a material having high thermal conductivity and / or being easily oxidized.

The filler 2 is a grain mixture and contains particles having a composition different from that of the metal-based plates 101 and 201, but the average composition of the granule mixture is the same as the composition of the metal plates 101 and 201. In the case of a body mixture (not shown), the filler 2 in the filling portion 22 may have a bias in composition components. Since the FSP causes stirring in the plastic region 4, the filling portion 22 is modified so that the composition is not biased and the metal-based modified plate material has the same composition as the metal-based plate materials 101 and 201. 30 is obtained.

(Step D)
After the step C, it is preferable to further have a step D in which at least the FSP portion 32 of the metal-based modified plate material 30 is subjected to plastic working. By adding processing strain due to plastic working, the crystal grains in the FSP portion 32 of the metal-based modified plate material 30 and the metal-based plate materials 101 and 201 shown in FIGS. 5 and 7 are adjusted, and the uniformity of the crystal grain size is adjusted. Can be improved. Further, as shown in FIGS. 18 and 19, the appearance is beautiful, an integrated metal-based modifying plate 80 so that the metallic plate 181,281 and FSP 82 becomes uniform wall thickness _{T 80} produced can do. _{The wall thickness T 80} of the metal-based modified plate material that has undergone step D preferably has a range of ± 10% or less of the average plate thickness in order to reduce the deviation of the plate thickness. For example, after the end of step C, as shown in FIG. 7, when the wall thickness T _{1 of the metal-based plate materials 101 and 201 is smaller than the wall thickness T 32} of the FSP portion 32, it is necessary to perform plastic working on the FSP portion. Therefore, it is preferable to perform plastic working on the FSP portion and the metal-based plate material. Further, in contrast to FIG. 7, when the wall thickness T _{1 of the metal-based plate materials 101 and 201 is larger than the wall thickness T 32} of the FSP portion 32, the metal-based plate material is subjected to plastic working and then FSP as necessary. It is preferable to perform plastic working on the part and the metal-based plate material. At least, as a form in which the FSP portion 32 is subjected to plastic working, for example, it is applied not only to the FSP portion 32 but also to the metal plates 101 and 201 on both sides of the FSP portion 32. There is a form in which not only the FSP portion 32 but also the entire metal-based plate materials 101 and 201 are applied. The form of plastic working includes, for example, press working, forging or rolling.

(Step E)
Metallic reforming at a temperature equal to or higher than the recrystallization temperature of the metal-based plate materials 101, 201 between step C and step D, after step D, or both between step C and step D and after step D. It is preferable to have a step E for heat-treating the plate material 30. The internal stress of the metal-based modified plate material 30 can be reduced, the crystal grains in the FSP portion 32 and the metal-based plate materials 101 and 201 can be adjusted, and the uniformity of the crystal grain size can be improved. When the melting points of the metal _{plates 101 and 201 are S R} (temperature unit: K), it is preferable to perform heat treatment in a temperature range of _{0.5 S R} or more and 0.95 S _{R or less.} More preferably, it is 0.65S _R or more and 0.90S _R or less, and particularly preferably 0.70S _R or more and 0.80S _R or less. The heat treatment temperature is less than 0.5S _R, it may not be possible to reduce internal stress. In addition, it may not be possible to improve the uniformity of the size of the crystal grains of the FSP portion 32 and the metal-based plate materials 101 and 201. If the heat treatment temperature exceeds 0.95S _R, there is a case where the metal-based modifying plate 30 is thermally deformed. The heat treatment time is preferably 30 minutes or more, more preferably 60 minutes or more, and particularly preferably 120 minutes or more after the start of the heat treatment. If the heat treatment time is less than 30 minutes, the metal-based modified plate material 30 may not be sufficiently heated and the internal stress may not be reduced. In addition, it may not be possible to improve the uniformity of the size of the crystal grains of the FSP portion 32 and the metal-based plate materials 101 and 201. The upper limit of the heat treatment time is preferably 1440 minutes or less, more preferably 720 minutes or less. The internal stress can be confirmed by a general method such as measurement of hardness.

The length and width of the metal-based modified plate material 30 are not particularly limited. Further, the metal-based modified plate material 30 may be cut out into an arbitrary shape. Depending on the application, the metal-based modified plate material 30 of any size can be manufactured more efficiently.

(Use)
The metal-based modified plate material 30 is preferably the whole or a part of the sputtering target, or a part of the container. As a partial form of the container, there is a form forming a part of the container itself or a form of lining the container. In these devices or parts, it is possible to easily realize the large size and suppression of the variation in wall thickness at low cost.

[Second form]
Next, the second form of the method for manufacturing the metal-based modified plate material will be described in detail, focusing on the differences from the first form. The second form is the same as the first form except that the number of metal-based plate materials to be prepared is three or more.

When the number of metal-based plate materials to be prepared is three or more, the form of the gap formed between the first end face and the second end face is, for example, a streak like the gap 12 shown in FIG. There is a form in which the gaps do not intersect each other (not shown). For example, if N metal plates having a rectangular appearance on the plate surface are arranged in one direction, (N-1) streaky gaps can be formed without intersecting each other. .. In the case of this embodiment, as in the first embodiment, the filling material is filled in each gap in step B to form a filling portion, and further, FSP is applied to each filling portion in step C (N-). 1) It is possible to manufacture a metal-based modified plate material having a streak-shaped FSP portion (not shown). In addition to the above forms, there is a form in which one streak-like gap and the other streak-like gap are connected via a portion where the gaps intersect (not shown). In the case of this form, in step B, the filling material is filled in the entire gap including the intersection to form a filling portion, and in step C, FSP is applied to the entire filling portion to form a branched FSP. It is possible to manufacture a metal-based modified plate material having a portion (not shown). Here, when the FSP is constructed in step C, the portion into which the friction stir rotation tool is inserted and the portion from which the friction stir rotation tool is pulled out are preferably end portions of a branched filling portion (not shown).

[Comparative example: Technology for butting so as to eliminate the gap between the end faces]
In FIGS. 20 and 21, the first end surface 91a of the metal plate material 201 and the second end surface 91b of the metal plate material 101 are butted against each other, and the metal plate materials 101 and 201 are arranged on the backing jig 40. It is a figure which shows the state. At this time, since the end surface 91a and the end surface 91b are affected by the shape of the surface and the roughness of the surface, an open discontinuous portion 92 is generated. It is difficult to apply FSW (Friction Stir Welding) to the discontinuous portion 92 to join the discontinuous portion 92.

2 Filling material 3 Plasticity area 4 Plasticity area 5 Flat surface 11a First end surface of metal-based plate 11b Second end surface of metal-based plate 12 Gap 22 Filling part 23 Void 30 Metal-based modified plate 32 FSP part 40 Backing Tool 40a Surface of backing jig 50 Friction stirring rotation tool with probe 51 Body part 52 Shoulder part 53 Probe 54 Travel direction 55 Rotation direction 70 Friction stirring rotation tool without probe 72 Shoulder part 75 Rotation direction 76 Pressing direction 80 Metal-based modified plate material 82 FSP portion 91a First end surface of metal-based plate material 91b Second end surface of metal-based plate material 92 Discontinuous portion 101,201 Metal-based plate material 101a, 201a Outer plate surface 101b, 201b of metal-based plate material Metal Plate surface opposite to the outer plate surface of the system plate 105,205 Virtual reference surface 106,206 Virtual reference surface 181,281 Metallic plate 102 Welding material 202 Block material 302 Wire 402 Granules

Claims (8)

1. Step A in which the first end face and the second end face of the metal-based plate material are opposed to each other with a gap, and a gap is provided between the first end face and the second end face.
   (1) A filler heated to a temperature higher than the melting point is inserted into the gap, the filler is deformed so as to follow the shapes of the first end face and the second end face of the metal-based plate material, and the filler is placed in the gap. A filled portion is formed, or (2) the filler is fitted in the gap, and the filler is heated to a temperature equal to or higher than the recrystallization temperature, and then the filler is applied to the first end face and the second end face. Step B of forming a filling portion in which the filler is filled in the gap by deforming the filler so as to follow the shape.
   By inserting at least a probe of a friction stir rotation tool having a probe into the filling portion and performing FSP (Friction Stir Processing), at least the filling portion of the metal plate material and the filling portion can be inserted. Step C to obtain a metal-based modified plate material provided with an FSP unit by reforming,
   A method for producing a metal-based modified plate material, which comprises.
2. The first aspect of the present invention is characterized in that the metal-based plate material has a flat plate shape and the metal-based plate material having the first end face and the metal-based plate material having the second end face are separate bodies. The method for manufacturing a metal-based modified plate material according to the description.
3. The method for producing a metal-based modified plate material according to claim 1 or 2, wherein the interval is 0.2 mm or more and less than 5 mm.
4. The step B is
   Step B1 of overlaying the filler in the gap by the MIG or TIG method,
   Step B2, in which the melt is poured into the gap as the filler.
   Step B3-1 or step of fitting a block material having a thickness equal to or greater than the wall thickness of the metal plate material into the gap, heating it to a recrystallization temperature or higher, and then pressing it while applying frictional heat with a friction stir rotation tool having no probe. Step B3-2 of pressing while heating above the recrystallization temperature with a friction stir rotation tool that does not have a probe, or
   Step B4-1 of placing at least one of wire, granules and powder in the gap, heating it to a recrystallized temperature or higher and then pressing it with a hammer, and a step of heating it to a recrystallized temperature or higher and then pressing it with a press machine. B4-2, the process of pressing while applying frictional heat with a friction stir rotation tool that does not have a probe after heating to a recrystallization temperature or higher B4-3, or a friction stir rotation rotation tool that does not have a probe to exceed the recrystallization temperature. Step B4-4, pressing while heating,
   The method for producing a metal-based modified plate material according to any one of claims 1 to 3, wherein the process is any one of the above.
5. In the step C, when the wall thickness of the metal-based plate is T ₁ (unit: mm), the probe length Q ₁ (unit: mm) of the _{friction stir welding tool is 0 <Q 1} ≦ (T _1). The method for producing a metal-based modified plate material according to any one of claims 1 to 4, which is characterized by satisfying −0.2).
6. The metal-based modification according to any one of claims 1 to 5, further comprising a step D of subjecting at least the FSP portion of the metal-based modified plate material to plastic working after the step C. Manufacturing method of plate material.
7. Between the step C and the step D, after the step D, or both between the step C and the step D and after the step D, at a temperature equal to or higher than the recrystallization temperature of the metal-based plate material. The method for producing a metal-based modified plate material according to claim 6, further comprising a step E of heat-treating the metal-based modified plate material.
8. A claim characterized in that the metal-based modified plate material is made of any one of Au, Ag, Al, Cu, Zn, Au-based alloy, Ag-based alloy, Al-based alloy, Cu-based alloy, and Zn-based alloy. Item 6. The method for producing a metal-based modified plate material according to any one of Items 1 to 7.

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