TW202202643A - Method for manufacturing metal-based modified plate member - Google Patents

Abstract

The present disclosure provides a method for simply manufacturing a metal-based modified plate member having superior quality at a lower cost, without being affected by the machining precision of end surfaces of metal-based plate members to be abutted. A method for manufacturing a metal-based modified plate member according to the present invention comprises: a step A for setting a first end surface and a second end surface of metal-based plate members so as to be opposing each other with an interval therebetween, and thereby providing a gap between the first end surface and the second end surface; a step B for inserting a filler, heated to at least the melting point thereof, into the gap to fill the gap, or filling the gap with the filler and heating the filler to at least the recrystallization temperature, and then causing the filler to conform to the shapes of the first end surface and the second end surface to thereby from a filled section in which the gap is filled with the filler; and a step C for inserting, into at least the filled section, at least the probe of a friction stirring/rotating tool having the probe, and modifying at least the filled section from among the metal-based plate members and the filled section by implementing friction stir processing (FSP), and thereby obtaining a metal-based modified plate member provided with an FSP section.

Description

Manufacturing method of metal-based modified sheet

The present disclosure relates to a method of manufacturing a metal-based modified plate material using a friction stir process, for example, to a method of manufacturing a large-scale planar sputtering target using the modification of a metal material performed by the friction stir process.

Due to the need for large-scale displays, the flat sputtering target (hereinafter referred to as a plate target) has grown in size.

As for the manufacturing method of a board target, the method of manufacturing by bonding is proposed (for example, refer patent document 1). In particular, Friction Stir Welding (Friction Stir Welding: hereinafter referred to as FSW), which is one of the solid-phase welding methods, claims that the size of crystal grains is the same as that of fusion welding at the joint portion and the base metal portion (for example, refer to the patent Reference 1). In addition, it is very difficult to melt and weld in materials with high heat transfer properties such as Au, Cu, Al, Ag, etc., and the equipment is also large. Therefore, the bonding by FSW is more effective and does not require large-scale equipment. Moreover, in patent document 2, after joining and contacting a plurality of sputtering targets to form a sputtering target, the sputtering surface is subjected to friction stirring to manufacture a sputtering target. [Prior Art Literature] [Patent Literature]

[Patent Document 1] International Publication No. 2004/090194 [Patent Document 2] Japanese Patent Laid-Open No. 2015-120975

[The problem to be solved by the invention]

In the production methods described in Patent Documents 1 and 2, when the end faces of the plate materials are butted against each other, if the machining accuracy of the end faces is low, a gap is formed between the end faces, and there is a possibility that a joining defect may occur. On the other hand, in order to cut the end face of a large plate in advance so as not to generate a gap, a lot of cost and time are required. In addition, even if another sheet or powder is filled between the end faces of the sheet, a gap remains between the end face of the sheet and the other sheet or powder, and if the modification is carried out with the gap remaining, defects will occur, resulting in the occurrence of defects. Abnormal discharge or difference in film formation speed, etc.

The present disclosure is made against the background of such a situation, and an object thereof is to provide a method for producing a metal-based modified plate material with excellent quality at a simple and lower cost. More specifically, the purpose is to reform the filler material by deforming it in the thickness direction and the end surface direction of the plate material so as to follow the shape of the first end surface and the second end surface of the metal-based plate material by heating the filler material. , and is not affected by the machining accuracy of the end face of the butt-jointed metal-based sheet to provide an integrated high-quality metal-based modified sheet. [Technical means to solve the problem]

In order to achieve the above purpose, the result of in-depth research has found that: the end faces of the plates face each other without contact, without adjusting the shape of the end faces of the plate, heating the filler, and filling the filler in the gap between the end faces, The filler is deformed in the thickness direction and the end face direction of the sheet in a manner that follows the shape of the first end face and the second end face of the metal-based sheet, and then the filler is subjected to FSP (Friction Stir Processing, friction stirring process) using friction stirring technology. ) was modified to solve the above-mentioned problems, and the present invention was completed.

The method for producing a metal-based modified sheet material of the present invention is characterized by comprising: a step A of making the first end face and the second end face of the metal-based sheet material face each other with an interval therebetween, and forming the first end face and the second end face on the first end face and the second end face. A gap is set between them; in step B, (1) a filler heated to above the melting point is placed in the gap, so that the filler is deformed in a manner that follows the shape of the first end face and the second end face of the metal-based plate to form a The filler is filled in the filling portion of the gap, or (2) after the filler is inserted into the gap and the filler is heated to a recrystallization temperature or higher, the filler is made to follow the first end face and the second end face deformed in such a way that the shape of the above-mentioned filling material is filled in the above-mentioned gap; and in step C, at least the probe of the friction stirring rotating tool having the probe is inserted into at least the above-mentioned filling part to perform FSP ( Friction Stir Processing) construction, and at least the filling part of the metal-based plate and the filling part is modified to obtain a metal-based modified plate with an FSP part.

In the manufacturing method of the metal-based modified sheet material of the present invention, it is possible that the metal-based sheet material has a flat plate shape, and the metal-based sheet material having the first end face and the metal-based sheet material having the second end face are separate bodies . A large-scale modified metal-based plate can be produced by integrating a plurality of flat-shaped metal-based plates.

In the manufacturing method of the metal-based modified sheet material of the present invention, the interval is preferably 0.2 mm or more and less than 5 mm. The filler material can be easily filled in the gap, and the filling part can be modified more efficiently.

In the manufacturing method of the metal-based modified sheet material of the present invention, the above-mentioned step B is preferably any one of the following steps: Step B1, by MIG or TIG method, the above-mentioned filler material is surfacing inside the above-mentioned gap. ; Step B2, the melt is used as the filling material to flow into the gap; Step B3-1, the block material with a thickness greater than the wall thickness of the metal-based plate is inserted into the gap, heated to above the recrystallization temperature, by The friction stirring rotating tool without the probe is pressed while applying frictional heat, or step B3-2, the friction stirring rotating tool without the probe is heated to above the recrystallization temperature and pressed while pressing; or step B4- 1. Set at least one of the strands, granules, and powders in the aforementioned gap, and press with a hammer after heating to a recrystallization temperature or above. Step B4-2, after heating to a recrystallization temperature or more, press the Press the press, step B4-3, after heating to above the recrystallization temperature, by applying frictional heat with a friction stirring rotary tool without a probe, or step B4-4, by friction without a probe The stirring rotary tool is pressed while being heated to the recrystallization temperature or higher. By heating or heating and plastically deforming the filler, the deformation of the filler in both the thickness direction and the end face direction of the metal-based plate can be more effectively carried out, so as to follow the difference between the first end face and the second end face of the metal-based plate. Fill in the shape of the filler.

In the manufacturing method of the metal-based modified sheet material of the present invention, preferably, in the aforementioned step C, when the wall thickness of the metal-based sheet material is set as T ₁ (unit: mm), the friction stir rotating tool is The probe length Q ₁ (unit: mm) satisfies 0<Q ₁ ≦(T ₁ -0.2). The probe of the friction stir rotating tool can prevent the filling part from penetrating.

In the manufacturing method of the metal-based modified sheet material of the present invention, preferably after the aforementioned step C, there is further a step D of performing plastic working on at least the FSP portion of the aforementioned metal-based modified sheet material. By adding the processing strain generated by plastic working to adjust the crystal grains, the uniformity of the size of the crystal grains at the FSP part and the metal-based sheet can be improved, and a metal-based modified sheet with high dimensional accuracy can be produced.

In the manufacturing method of the metal-based modified sheet material of the present invention, preferably between the aforementioned step C and the aforementioned step D, after the aforementioned step D, or between the aforementioned step C and the aforementioned step D and after the aforementioned step D. Both have a step E of heat-treating the metal-based modified plate material at a temperature higher than the recrystallization temperature of the metal-based plate material. Reduce the internal stress of the metal-based modified plate, and improve the uniformity of the size of the crystal grains between the FSP part and the metal-based plate.

In the manufacturing method of the metal-based modified sheet material of the present invention, it is preferable that the aforementioned metal-based modified sheet material comprises Au, Ag, Al, Cu, Zn, Au-based alloy, Ag-based alloy, Al-based alloy, and Cu-based alloy , or any one of Zn-based alloys. Even if it is a material with high thermal conductivity and/or easy to be oxidized, it is still possible to manufacture a metal-based modified sheet. [Effect of invention]

According to the present disclosure, it is possible to provide a method for producing a metal-based modified plate material with excellent quality at a simple and lower cost. More specifically, by heating the filler material and deforming the filler material in the thickness direction and the end surface direction of the sheet metal so as to follow the shape of the first end face and the second end face of the metal-based sheet material, and then reforming, An integrated high-quality metal-based modified plate can be provided without being affected by the machining accuracy of the end face of the butted metal-based plate.

Hereinafter, the present invention will be described in detail while showing embodiments with reference to the drawings, but the present invention should not be construed as being limited to these descriptions. As long as the effect of the present invention is exhibited, the embodiment can be changed in various ways. In addition, in this specification and the drawings, the same components with the same reference numerals indicate the same components.

[1st form] First, the method for producing the modified metal-based sheet material will be described in detail with respect to the first aspect in which the number of the prepared metal-based sheet material is two, the metal-based sheet material has a flat plate shape, and The metal-based plate material having the first end face and the metal-based plate material having the second end face are separate bodies.

As shown in FIGS. 1 to 7 , the manufacturing method of the metal-based modified plate material of the present embodiment includes a step A in which the first end surface 11 a of the metal-based plate material 201 and the second end surface 11 b of the metal-based plate material 101 are separated from each other. Oppose each other at intervals, and set a gap 12 between the first end face 11a and the second end face 11b; Step B, (1) Put the filler 2 heated above the melting point into the gap 12, so that the filler 2 follows the metal The shape of the first end face 11a and the second end face 11b of the plates 101 and 201 is deformed to form the filling portion 22 for filling the gap 12 with the filler 2, or (2) the filler 2 is inserted into the gap 12, and the filling portion 22 is formed. After heating the filler 2 above the recrystallization temperature, the filler 2 is deformed to follow the shape of the first end face 11a and the second end face 11b to form the filling portion 22 for filling the gap 12 with the filler 2; and step C , by inserting at least the probe 53 of the friction stirring rotary tool 50 having the probe 53 into at least the filling part 22 to perform FSP construction, and at least the filling part 22 of the metal-based plates 101 and 201 and the filling part 22 is carried out The modified metal-based plate material 30 having the FSP portion 32 is obtained.

(step A) In step A, first, two metal-based plate materials 101 and 201 are prepared. In FIGS. 1 and 2 , the metal-based plates 101 and 201 are plates whose entire surfaces are flat, but may also be plates in which at least a part of the edges of the plate surfaces are flat edges. The end surfaces adjacent to the flat edge portion and intended to face each other are set as the first end surface 11 a of the metal-based plate material 201 and the second end surface 11 b of the metal-based plate material 101 , respectively. In the case where the entire surface of the metal-based plates 101 and 201 is flat, the appearance of the metal-based plates 101 and 201, for example, the appearance of the plate surface is a parallelogram, a rhombus, a rectangle, a square, a circle, a fan or an ellipse. Sheets of metal or alloy. Hereinafter, unless otherwise specified, the case where the external appearances of the plate surfaces of the metal-based plate materials 101 and 201 are all rectangular will be described as an example.

The composition of the metal-based plates 101 and 201 includes, for example, Au, Ag, Al, Cu, Zn, or alloys of these metals. The metal-based plates 101 and 201 preferably include any one of Au, Ag, Al, Cu, Zn, Au-based alloy, Ag-based alloy, Al-based alloy, Cu-based alloy or Zn-based alloy. Preferred specific examples of Au-based alloys include Au-Ag-based alloys, Au-Pd-based alloys, Au-Al-based alloys, Au-Cu-based alloys, Au-Zn-based alloys, Au-Sn-based alloys, Au- Ni-based alloys, etc. Preferable specific examples of Ag-based alloys include Ag-Au-based alloys, Ag-Al-based alloys, Ag-Cu-based alloys, Ag-Zn-based alloys, Ag-Pd-based alloys, Ag-Cu-Pd-based alloys, Ag-Cu-Pd-Ge-based alloy, Ag-In-based alloy, Ag-Bi-based alloy, and the like. Preferred specific examples of Al-based alloys include Al-Au-based alloys, Al-Ag-based alloys, Al-Cu-based alloys, Al-Zn-based alloys, Al-Sc-based alloys, Al-Ti-based alloys, Al- Y-based alloys, Al-Zr-based alloys, Al-Hf-based alloys, Al-Nd-based alloys, Al-Si-based alloys, and the like. Preferable specific examples of Cu-based alloys include Cu-Au-based alloys, Cu-Ag-based alloys, Cu-Al-based alloys, Cu-Zn-based alloys, Cu-Ga-based alloys, Cu-Ta-based alloys, Cu-Cr alloys Department of alloys, etc. Preferable specific examples of Zn-based alloys include Zn-Au-based alloys, Zn-Ag-based alloys, Zn-Al-based alloys, Zn-Cu-based alloys, Zn-Fe-based alloys, and the like. Here, when described as "M ₁ -M ₂ series alloy" (wherein M ₁ and M ₂ mean metal elements), M ₁ means a main component, and M ₂ means a sub-component. The term "system" means that sub-components or additional components other than M ₂ may be included. The so-called main component means that M ₁ has the largest atomic % in the alloy. M ₂ represents the first subcomponent, and means that it has the largest atomic % in the alloy other than M ₁ . The term "additional component" means, for example, an element contained in a content of 1 atomic % or less. In addition, about Ag-Cu-Pd-Ge type alloy, Ag corresponds to M ₁ , and Cu, Pd, and Ge correspond to M ₂ . For example, the silver alloy disclosed in International Publication No. WO 2005/031016 is included.

The composition of the metal-based plate 101 and the composition of the metal-based plate 201 are preferably the same. Hereinafter, unless otherwise specified, the case where the composition of the metal-based plate material 101 and the composition of the metal-based plate material 201 are the same will be described as an example.

When the wall thicknesses of the metal-based plate materials 101 and 201 are T ₁₀₁ and T ₂₀₁ (unit: mm), respectively, the wall thicknesses T ₁₀₁ and T ₂₀₁ are preferably 2 mm or more and 25 mm or less. T ₁₀₁ and T ₂₀₁ can be adjusted according to the wall thickness of the formed metal-based modified plate 30 . The wall thickness T ₁₀₁ and the wall thickness T ₂₀₁ may be equal to or different from each other. The wall thickness ratio T ₁₀₁ /T ₂₀₁ is preferably 0.80 or more and 1.25 or less. Hereinafter, unless otherwise specified, the case where the wall thickness _T101 and the wall thickness _T201 shown in FIG. ₂ are equal to each other and is T1 will be described as an example.

By making the first end face 11a of the metal-based sheet material 201 and the second end face 11b of the metal-based sheet material 101 face each other with a space _WS between them so that the metal-based modified sheet material 30 has a desired shape, the metal-based sheet material 101 and 201 are arranged, and a gap 12 is formed between the first end surface 11a and the second end surface 11b. In FIGS. 1 and 2 , the metal-based plate materials 101 and 201 are arranged so that the metal-based plate materials 101 and 201 can be formed into a flat plate-shaped metal-based modified plate material 30 on the same surface.

The shapes of the first end face 11a and the second end face 11b do not need to be in contact with each other when the end face 11a and the end face 11b are butted against each other by disposing the filler 2 between the end face 11a and the end face 11b in step B. Therefore, there is no particular limitation. The shapes of the end face 11a and the end face 11b are, for example, a convex surface, a concave surface, a concave-convex surface, a plane that is perpendicular to the board surface, or a plane that at least partially forms a tapered portion in the depth direction with respect to the board surface. The shape of the end surface 11a and the shape of the end surface 11b may be the same or different. Moreover, the end surface 11a and the end surface 11b may be a smooth surface, and may be a rough surface. The roughness of the end surface 11a and the roughness of the end surface 11b may be the same or different.

The so-called open space means that the first end face 11a and the second end face 11b are not abutted against each other. 2 , the metal-based plates 101 and 201 are all plates with a flat wall thickness T1 _on the entire surface of the plate, so a straight line (not shown) and a plate surface are inserted outside the connection with the plate surface 101a The entire surface of the end face 11b exists between the connected and extrapolated straight lines (not shown) 101b. In addition, the entire surface of the end surface 11a exists between the externally inserted straight line (not shown) in contact with the board surface 201a and the externally inserted straight line (not shown) in contact with the board surface 201b. The end surface 11a and the end surface 11b may be parallel or non-parallel.

The interval _WS (unit: mm) will be described. As shown in FIG. 2 , the first end face 11a of the virtual reference plane 205 is located on the first end face 11a of the imaginary reference plane 205 which is located at a distance KT ₁ (where, 0≦K≦1) from the outer plate surface 201a of the metal-based plate 201 to the plate surface 201b on the opposite side. The point is defined as P ₁ , and the point on the second end surface 11b of the virtual reference plane 105 separated by a distance KT ₁ from the outer plate surface 101a of the metal-based plate 101 toward the plate surface 101b on the opposite side is defined as P ₂ . The interval WS is the length of the line segment _{P 1} P ₂ . The value K is a variable. When the end face 11a and the end face 11b are parallel, the interval _WS is constant regardless of the variable K. As shown in FIGS. 1 and 2 , when the end surface 11 a and the end surface 11 b face each other obliquely, the interval _WS decreases as the variable K increases. _In the above, the case where the wall thickness _T101 and the wall thickness _T201 are equal and T1 is described, but in the case where the wall thickness _T101 and T201 are not equal, it will be located from the board surface _201a toward the board surface 201b. The point on the end face 11a of the position separated by the distance KT ₂₀₁ is referred to as P ₁ , and the point on the end face 11b of the position separated by the distance KT ₁₀₁ from the board face 101a toward the board face 101b is referred to as P ₂ .

The interval _WS is preferably 0.2 mm or more and less than 5 mm. The filling material 2 can be easily filled in the gap 12, and the filling part 22 can be modified more efficiently. If it is less than 0.2 mm, it is difficult to put the filler 2 heated above the melting point into the gap 12, so it may be difficult to make the filler to follow the shape of the first end face and the second end face of the metal-based sheet to the thickness of the sheet It deforms in the direction and end face direction, and it may be difficult to insert the filler due to the narrow gap when inserting the filler, and it is difficult to apply pressure to the filler when heating and pressing after inserting the filler, and it is difficult for the filler to follow the metal-based sheet. The shape of the first end face and the second end face is deformed in the thickness direction and the end face direction of the plate material, and if it is 5 mm or more, the time and labor for reforming the filling portion 22 may increase.

The gap 12 is sandwiched between the opposing first end surfaces 11a and the second end surfaces 11b. For example, in FIG. 1, it is sandwiched between the entire space of the first end surface 11a and the entire second end surface 11b.

The metal-based plates 101 and 201 are preferably disposed on the back pad jig 40 . The metal-based plates 101 and 201 can be easily arranged. The back pad jig 40 preferably comprises a ceramic material such as steel or silicon nitride.

The shape of the back pad jig 40 is derived from the shape of the manufactured metal-based modified plate 30 . For example, in the case of integrating the flat metal-based sheets 101 and 201 with _a thickness T1 to manufacture _a flat-shaped metal-based modified sheet 30 with a thickness T1, the shape of the back pad jig 40 Flat. In the case of integrating the metal-based plates ₁₀₁ and ₂₀₁ with different wall thicknesses T101 and T201, and manufacturing the metal-based modified plate 30 with the outer plate surface 101a and the outer plate surface 201a being the same surface, the back pad The shape with 40 is, for example, a plate shape (not shown) including a first plate arrangement portion and a second plate arrangement portion having a lower thickness difference between the metal-based plates 101 and 201 than the first plate arrangement portion. In step A, among the metal-based plate materials 101 and 201, the metal-based plate material having a thinner wall thickness is arranged in the first plate-plate arrangement portion, and the metal-based plate material with a thicker wall thickness is arranged in the second plate-plate arrangement portion. In a subsequent step (not shown), the metal-based modified plate 30 with the plate surface 101a and the plate surface 201a being the same surface can be obtained.

(step B) In step B, the filling material 2 is filled in the gap 12 shown in FIGS. 1 and 2 , and as shown in FIGS. 3 and 4 , the filling portion 22 is formed. As shown in FIGS. 3 and 4 , it is preferable to continue to use the back pad jig 40 . In step B, more specifically, there is the following form: (1) The filler 2 heated to the melting point or higher is placed in the gap 12, so that the filler 2 follows the first end faces of the metal-based plates 101 and 201 11a and the shape of the second end face 11b are deformed to form a filling portion 22 (referred to as A form) that fills the gap 12 with the filler 2, or (2) when the filler 2 is inserted into the gap 12 and filled After the material 2 is heated to a recrystallization temperature or higher, the filler 2 is deformed so as to follow the shape of the first end face 11a and the second end face 11b to form the filling portion 22 (referred to as the B form) that fills the gap 12 with the filler 2 .

The filling part 22 has the filling material 2 and the gap 12 , and the filling material 2 is fixed to the gap 12 .

In FIG. 4, the point located on the first end surface 11a of the virtual reference plane 206 that is 0.95T ₁ away from the outer plate surface 201a of the metal-based plate 201 toward the opposite side plate surface 201b is set as P ₅ , and the point located on the first end surface 11a of the self-metal The point on the second end surface 11b of the imaginary reference plane 106 at which the outer side plate surface 101a of the system plate 101 faces the opposite side plate surface 101b by 0.95T ₁ is referred to as P ₆ . In addition, in FIG. 4, the point on the boundary of the board surface 201b and the filling part 22 is set to P7, and the point _on the boundary of the board surface 101b and the filling part 22 is set to _P8 . Filling the gap 12 with the filler 2 means, for example, as shown in the cross section shown in FIG. The filler 2 is filled in the gap 12 so that _B reaches at least the straight line P ₅ P ₆ and at most the straight line P ₇ P ₈ . In the filling part 22, since the interior of the filling material 2 and between the filling material 2 and the end surfaces 11a and 11b are modified in the step C, slight voids and defects may remain. _In the above, the case where the wall thickness _T101 is equal to the wall thickness _T201 and is T1 has been described, but in the case where the wall thickness _T101 and the wall thickness T201 are not equal, it will be located from the board surface _201a toward the board. The point on the first end surface 11a of the virtual reference surface 206 of the surface 201b separated by 0.95T ₂₀₁ is set as P ₅ , and the point on the second end surface 11b of the virtual reference surface 106 separated from the virtual reference surface 101 by 0.95T ₁₀₁ from the board surface 101a toward the board surface 101b The point is set to _P6 .

When the width direction of the gap 12 is set to the direction U _W and the advancing direction of the gap 12 is set to the direction _UG , when the filling of the filling material 2 is completed and the filling portion is formed, the ratio of the filling material 2 of the gap 12 to the gap 12 The width direction U _W is preferably 90 to 100%, and the travel direction U _G of the gap 12 is preferably 90 to 100%.

Let the volume of the gap 12 shown in FIG. 1 be V _G (unit: mm ³ ), and let the apparent volume of the filler 2 at the filling portion 22 shown in FIG. 3 be V ₂ (unit: mm ³ ) When , it may be 0<V ₂ ≦V _G , but in consideration of gaps and defects, it is preferably V _G <V ₂ , more preferably V _G <V ₂ ≦1.5V _G .

The filler 2 is, for example, a welding material 102 ( FIG. 8 ), a molten metal (not shown), a bulk material 202 ( FIGS. 9 to 13 ), and a wire body 302 having the same composition as the metal-based plate materials 101 and 201 . ( FIG. 14 ), granular body 402 ( FIG. 15 ), or powder (not shown). Moreover, as the form of the filler 2, the form of the combination of the member of the composition different from the composition of the metal-based plate materials 101 and 201 may be used. For example, as the form of the block material, a composite block material is formed by combining block-shaped constituent members, and includes block-shaped constituent members of a composition different from the composition of the metal-based plate materials 101 and 201, but the composite block The average composition of the shape material may be a composite bulk material (not shown) having the same composition as that of the metal-based plate materials 101 and 201 . As the form of the wire body, a wire body bundle is formed by bundling a plurality of wire bodies, and the wire body having a composition different from the composition of the metal-based plates 101 and 201 is included, but the average composition of the wire body bundle may be: A wire bundle (not shown) having the same composition as the metal-based plates 101 and 201 . The form of the particles is a mixture of particles including particles having a composition different from the composition of the metal-based plates 101 and 201 , but the average composition of the mixture of particles may be the same as the composition of the metal-based plates 101 and 201 . Granule mixture (not shown). The form of the powder is a powder mixture containing particles of a composition different from the composition of the metal-based plates 101 and 201 , but the average composition of the powder mixture may be the same as the composition of the metal-based plates 101 and 201 . Powder mixture (not shown).

The reason for heating above the recrystallization temperature in the form B of the step B is that the filler is softened, and it is easy to deform so as to follow the shape of the end of the metal-based plate material.

Step B is preferably any one of the following steps B1 to B4. The gap 12 can be filled more efficiently. In step B, the steps of classifying into A form are step B1 and step B2, and the steps of classifying into B form are step B3 and step B4. Hereinafter, in the description _of steps B1 to B4, the case where the wall thickness _T101 and the wall thickness _T201 are equal to T1 will be described, but when the wall thickness _T101 and the wall thickness _T201 are not equal, the wall thickness T101 and the wall thickness T201 The larger _one of the thickness _T101 and the wall thickness _T201 is set to the wall thickness T1.

(Step B1 ) Step B is preferably step B1 . As shown in FIG. 8 , in step B1 , the interior of the gap 12 is surfacing and welding the welding material 102 by MIG or TIG method. The so-called build-up welding refers to, for example, the behavior of filling the gap immediately after the filler is heated above the melting point. The welding material 102 is inserted into the gap 12 for surfacing, so the welding material 102 can be easily filled from the outer surface 101a of the metal-based plate 101 and the outer surface _201a of the metal-based plate 201 along the direction UG shown in FIG. 3 . Buried in the gap ₁₂ up to the wall thickness T1 of the metal-based plates 101 and 201 . After the build-up welding is completed, the welding material 102 is cooled and fixed to the gap 12, and the filling portion 22 is provided.

(step B2) The step B is preferably a step B2 in which the melt (not shown) flows into the gap 12 . In this step, the gap 12 is filled after the filler is heated to a melting point or higher to be melted. The state in which the melt (not shown) is poured into the gap 12 is the same as the state shown in FIG. 8 except that the welding material 102 is a melt (not shown). The preferable composition of the melt (not shown) and the process after inflow are the same as in B1.

(Step B3) Step B is preferably step B3-1, in which step B3-1, as shown in FIG. 9 , embeds a bulk material 202 having a thickness _H2 greater _than the wall thickness T1 of the metal-based plates 101, 201 After the gap 12 is heated to the recrystallization temperature or higher, it is pressed by a friction stirring rotary tool without a probe while applying frictional heat. The heating method of the block material 202 in the step B3-1 is, for example, heating by a gas burner, heating by TIG, heating by a laser, heating by an electron beam (EB), heating by energization, collecting Light heating, heating by electromagnetic induction, etc. After filling the gap with a bulk material whose width is narrower than the gap but longer than the thickness of the plate, the gap is heated to a recrystallization temperature or higher and pressed, thereby promoting the thickness direction and the end face direction of the metal-based plate material. The block material 202 is plastically deformed, and the block material 202 is deformed so as to follow the shapes of the first end face and the second end face of the metal-based plate material. Then, the gaps 23 between the metal-based plates 101 and 201 and the bulk material 202 can be filled. _The gap 12 preferably has a shape in which the width gradually becomes narrower as it approaches the bottom along the wall thickness direction UB of the plate. The aforementioned follow-up results in increased efficiency.

In addition, step B is preferably step B3-2, in which step B3-2 is pressed by a friction stirring rotating tool 70 without a probe while heating to a recrystallization temperature or higher as shown in FIG. 17 . After the friction stirring rotary tool 70 is sufficiently heated to the recrystallization temperature or higher by the frictional heat alone, the friction stirring rotary tool 70 is pressed while being rotated, whereby the bulk material 202 follows the metal in the same manner as in step B3-1. The shape of the first end face and the second end face of the plate is deformed.

Furthermore, in the present embodiment, in order to perform the plastic deformation by pressing more effectively, it is preferable to fill the gap 12 formed by the first end face 11a and the second end face 11b or a filler before pressing. In at least one of 2, a tapered portion is formed at least partially toward the depth direction of the gap. For example, the first to fourth modified examples shown in FIGS. 10 to 13 can be illustrated. 10 to 13 can also be plastically deformed in the thickness direction and the end surface direction of the plate material so as to follow the shapes of the first and second end surfaces of the metal-based plate material by pressing the block material 202 . In the forms shown in FIGS. 10 to 13 , since the filler is wider than the width of the bottom surface of the gap 12 , plastic deformation occurs while filling.

In the form shown in FIG. 10 , the block 202 is filled in the gap 12 , and the width of the block 202 and the gap 12 is the narrowest part (in FIG. 10 , the block 202 is inserted into the gap 12 ). The portion deep in the direction (the portion of the bottom) is wider than the width and narrower than the portion of the entrance of the gap 12 . Also in this form, the gap 12 is preferably a shape in which the width becomes narrower as it approaches the bottom along the wall thickness direction U _B of the plate.

In the form shown in FIG. 11 , a block 202 having a wider width than a part of the tapered portion is formed by inclining a part of the end face of the plate and forming the gap 12 toward the depth. The gap 12 is filled with the block material 202 on the surface in contact with the inclined surface.

In the form shown in FIG. 12 , the front end portion of the block material 202 is partially tapered to be narrowed in width compared with the gap 12 , and the block material 202 is used to fill the gap 12 .

In the form shown in FIG. 13 , it is a form in which the front end portion of the block material 202 is tapered to narrow the width of the gap 12 , and the block material 202 fills the gap 12 .

In step B3, the heating part above the recrystallization temperature is not particularly limited, for example, the part where the pressing is performed and its periphery (in this case, the local heating of the filler), or the whole (in this case, the whole of the filler). sexual heating).

In step B3, the interval WS between FIG. 2 is preferably reduced as the variable K _approaches from 0 to 1. When the block material 202 is inserted into the gap 12, the block material 202 is easily inserted into the gap 12, and the end face of the plate does not expand in the downward direction, so when the block material 202 is pressed, it is plastically deformed and closely adhered to the plate without gap. the end face. In addition, when pressing, the pressing force acts not only in the thickness direction of the plate but also in the end face direction of the plate, so that when the block material is plastically deformed, it is easy to adhere to the end surface of the plate. If the wall thickness T ₁ and the thickness H ₂ are equal, the friction stir rotary tool 70 can be pressed including the boundary portion (not shown) of the bulk material 202 and the metal-based plate materials 101 and 201 . When pressed, the gap 12 can be plastically deformed.

(step B4) FIG. 14 is a diagram showing a state in which the wires 302 are bundled into a plurality of pieces and arranged in the gap 12 shown in FIG. 2 . FIG. 15 is a view showing a state in which granular bodies 402 are placed in the gap 12 shown in FIG. 2 .

Step B is preferably any one of Step B4-1, Step B4-2, Step B4-3, or Step B4-4. Step B4-1 is performed as shown in FIG. 14, and the wire body 302 is set in the gap. 12, or as shown in FIG. 15, the granular body 402 is placed in the gap 12, or the powder is placed in at least one of the gap 12 (not shown), after heating to the recrystallization temperature or more, by a hammer ( Not shown) to press; this step B4-2 is heated to above the recrystallization temperature and pressed by a press (not shown); this step B4-3 is heated to above the recrystallization temperature by not having a probe The friction stirring rotating tool of the needle is pressed while applying frictional heat; in this step B4-4, as shown in FIG. 16 , the friction stirring rotating tool 70 without the probe is heated to above the recrystallization temperature and pressed. By heating and pressing, the wire, granular or powder can be plastically deformed in the thickness direction and the end face direction of the sheet metal so as to follow the shape of the first end face and the second end face of the metal-based sheet, and can be buried. The gap 23 between the metal-based plate 101 and 201 and the wire, granular or powder.

The heating method of the filling material in Step B4-1, Step B4-2 and Step B4-3 is, for example, heating by gas burner, heating by TIG, heating by laser, and electron beam (EB) heating, electric heating, concentrating heating, heating by electromagnetic induction, etc. In step B4-4, after the friction stirring rotary tool 70 without the probe is sufficiently heated to the recrystallization temperature or higher only by frictional heat, the friction stirring rotary tool 70 is rotated while pressing, and the same procedure as in step B4- 1. Similarly to step B4-2 and step B4-3, the filler is deformed so as to follow the shapes of the first end face and the second end face of the metal-based plate material.

Examples of the form of the filler 2 include: only the thread body 302 ( FIG. 14 ), only the granular body 402 ( FIG. 15 ), only the powder body (not shown), and a combination of the thread body 302 and the granular body 402 (not shown) , the combination of the thread 302 and the powder (not shown), the combination of the granular 402 and the powder (not shown), or the combination of the thread 302 and the granular 402 and the powder (not shown).

The wire body 302 can be a linear metal or alloy member having a length greater than the length _LG in the traveling direction UG (refer to FIG. 1 ) of the gap 12, or a short linear metal or alloy less than the length _{LG .} A plurality of manufacturing members are arranged in the longitudinal direction in the gap 12 so as to have a length _LG or more in total. The granular body 402 is a particulate metal or alloy member with a particle size of 1000 μm or more and less than 10000 μm. The powder (not shown) is a particulate metal or alloy member with a particle size of 10 μm or more and less than 1000 μm.

When the form of the filler 2 is the form of only the wire body 302 , the wire body 302 is arranged in the gap 12 . Here, there is a case where there is only one wire body 302 (not shown), and a case where a plurality of wire bodies 302 are bundled into a wire body bundle as shown in FIG. 14 . After setting, the wire body 302 is heated to above the recrystallization temperature, for example, by means of a hammer (not shown) or a press (not shown) to press the wire body 302, from the side of the board surface 101a to the side of the board surface 101b, and from the side of the board surface 101a to the side of the board surface 101b. The side of the board surface 201a is pressed into the wire body 302 toward the side of the board surface 201b, and the wire body 302 is plastically deformed, and the gap 23 between the wire body 302 and the metal-based plates 101 and 201 is gradually filled. After that, the wire body 302 can be pressed by the friction stirring rotary tool 70 to plastically deform the wire body 302 , and further fill the gap 23 between the metal-based plates 101 and 201 and the wire body 302 . When setting the thickness of the wire body 302 as H ₂ , it is preferable that the thickness H ₂ be equal to or greater than the wall thickness T ₁ . If the thickness H ₂ is equal to the wall thickness T ₁ , without using a hammer (not shown) or a press (not shown), after heating to a temperature above the recrystallization temperature, the wire body is directly rotated by the friction stirring tool 70 302 is pressed to plastically deform the wire body 302 , thereby filling the gap 23 between the metal-based plates 101 and 201 and the wire body 302 . Moreover, it is possible to press including the boundary portion (not shown) between the wire body 302 and the metal-based plate materials 101 and 201 .

When the form of the filler 2 is only the form of the granular body 402 , as shown in FIG. 15 , the form of the wire body 302 is the same except that the wire body 302 is changed to the granular body 402 . When the form of the filler 2 is only the form of powder (not shown), step B4 is performed in the same manner as the form of only the granular body 402 . When the form of the filler 2 is the form of combination, step B4 is performed similarly to the form of only the granular body 402 .

In step B4, the heating part above the recrystallization temperature is not particularly limited, for example, the part where the pressing is performed and its periphery (in this case, the local heating of the filler), or the whole (in this case, the whole of the filler). sexual heating).

If the filling part 22 is formed in step B, the filling part 22 shown in FIG. 3 and FIG. 4 is obtained, for example. The end faces 11a, 11b of the gap 12 can be plastically deformed by being pressed along with the plastic deformation of the filler 2. In FIGS. 3 and 4, as an example, the upper parts of the end faces 11a, 11b are shown deformed in the direction of widening the gap 12. the state of.

In the present embodiment, the so-called pressing by the friction stirring rotating tool 70 refers to, for example, pressing the granular body 402 shown in FIG. 15 in the pressing direction 76 as shown in FIG. The granular body 402 is deformed by the rotation of the shoulder portion 72 of the friction stirring rotating tool 70, and a plastic fluid is generated in the plastic region 3, and as shown in FIG. 4, after the filling portion 22 is formed, the reduction is reduced. The space between the filler 2 of the filling portion 22 and the end faces 11a and 11b. Specifically, as shown in FIG. 16 , the friction stirring rotating tool 70 is rotated in the rotation direction 75 , and the shoulder portion 72 of the friction stirring rotating tool 70 is gradually pressed against the granular body 402 in the pressing direction 76 . If the shoulder portion 72 is in contact with the granular body 402, the high temperature plastic region 3 is generated in the contacted granular body 402 by the frictional heat generated by the rotation, and the granular body 402 is heated by heat transfer, as shown in FIG. 17 . As shown, the plastic region 3 expands. At the same time, the rotational force imparted from the friction stirring rotary tool 70 imparts a shear force in the rotational direction 75 to the plastic fluid in the plastic region 3, while the gap 23 decreases, and the outer plate surface of the plastic fluid follows the end surfaces 11a and 11b. The way the shape is deformed, one side is filled. The same applies to other forms of the filler 2 such as only the bulk material 202, only the wire body 302, only the powder (not shown), and a combination. Here, the friction stirring rotary tool 70 includes, for example, Fe, Ni, Co, W, Ir, and alloys based on these, and also includes ceramic materials. The friction stir rotation tool 70 may use a friction stir rotation tool without a probe. The pressing force for pressing the friction stirring rotary tool 70 can be adjusted at any time in consideration of the dimensions of the filler 2 and the wall thicknesses of the metal-based plates 101 and 201 . By the above pressing, as shown in FIG. 17 , plastic flow can be generated to the side of the plate surfaces 101b and 201b. The shoulder portion 72 is, for example, a flat shape, a shape with rounded corners, or a rough surface with concavities and convexities, preferably a flat shape. The end surfaces 11a and 11b can be deformed by pressing.

In step B, it is preferable to use a holding member (not shown) to cover the gap 12, press the board surfaces 101b, 201b against the surface 40a of the back pad fixture 40, and make the metal-based plates 101, 201 It is immovable relative to the back pad fixture 40 and fills the gap 12 with the filler 2 on one side. The expansion of the gap 12 caused by the offset of the metal-based plates 101 and 201 relative to the back pad jig 40 can be prevented. In addition, when the filler 2 is the welding material 102 (FIG. 8), molten metal (not shown), wire 302 (FIG. 14), granular body 402 (FIG. 15), or powder (not shown), The filler 2 can be prevented from entering between the board surfaces 101b, 201b and the surface 40a.

(step C) In step C, at least the probe 53 of the friction stirring rotary tool 50 having the probe 53 is inserted into at least the filling part 22, and FSP construction is performed, and at least the filling part 22 of the metal-based plates 101, 201 and the filling part 22 is inserted. The reforming is performed to form the metal-based reformed plate material 30 including the FSP portion 32 . As shown in FIGS. 5 to 7 , it is preferable to continue to use the back pad jig 40 . After the modification, the metal-based modified plate 30 can be taken out from the back pad jig 40 .

As the friction stirring rotating tool 50, a friction stirring rotating tool used in a normal FSP can be used. As shown in FIGS. 5 and 6 , the friction stir rotating tool 50 has, for example, a cylindrical body portion 51 , a shoulder portion 52 provided at one end of the body portion 51 , and a probe 53 provided at the shoulder portion 52 . The friction stir rotary tool 50 includes, for example, the same material as the friction stir rotary tool 70 having no probe.

In step C, it is preferable to use a holding member (not shown) to hold the metal-based plates 101 and 201 without covering the filling portion 22 so that the metal-based plates 101 and 201 do not move relative to the back pad jig 40 . , while inserting the friction stirring rotary tool 50 toward the back pad jig 40 and performing modification. The surface 40a of the back pad jig 40 becomes a support surface for receiving the force generated by pressing, preventing the metal-based plates 101 and 201 from being displaced relative to the back pad jig 40, so as to achieve no space inside the FSP portion 32 or a better quality modification of the defect.

The principle of FSP will be explained. The rotating friction stirring rotary tool 50 is inserted into the side of the outer plate surfaces 101a and 201a. At this time, in the friction stirring rotary tool 50 , as shown in FIGS. 5 and 6 , the probe 53 is buried in the filling portion 22 , and the shoulder portion 52 is pressed against the filling portion 22 . When the probe 53 is inserted into the filling portion 22, the filling portion 22 is rapidly heated by friction caused by rotation, and as a result, the mechanical strength of the filling portion 22 is lowered. The friction stir rotating tool 50 is moved along the traveling direction 54 so that the metal-based plate material 101 does not move relatively with respect to the metal-based plate material 201 so as to pass over the filling portion 22 . In the portion where the friction stirring rotary tool 50 is inserted, the friction heat generated by the shoulder portion 52 and the probe 53 of the friction stirring rotary tool 50 while being in contact with the filling portion 22 and rotating while the shoulder portion 52 and the probe The filling portion 22 around the 53 forms a high temperature plastic region 4 . At the same time, the rotational force imparted from the friction stirring rotary tool 50 imparts a shear force in the rotational direction 55 to the plastic fluid in the plastic region 4, thereby removing defects and voids contained in the plastic fluid for modification. After the friction stir rotary tool 50 passes through, the plastic fluid is cooled, and as shown in FIG. 5 and FIG. These phenomena occur at a temperature lower than the melting point of all the metal-based plates 101 and 201 and the melting point of the filler 2 . Here, it is preferable to make the movement of the travel direction 54 of the friction stirring rotary tool 50 as a single pass from one end of the filling part 22 to the other end, and the formation of the FSP part 32 is completed by this movement.

The construction of the FSP is performed so as to include at least the filling portion 22 . As a form to include at least the filling part 22 , for example, there is a form in which only the filling part 22 is applied, not only the filling part 22 but also the metal-based plate materials 101 and 201 exposed on both sides of the filling part 22 are applied. This form is a form of construction not only on the filling part 22 but also on the entire metal-based plate material 101 and 201 .

The shoulder portion 52 has, for example, a concave shape, a convex shape, a flat shape, and preferably a concave shape.

When the shoulder portion 52 has a flat shape and the outer plate surfaces 101a and 201a are located on the same plane, as shown in FIG. 6 , it is preferable that the flat surface 5 of the filling portion 22 is higher than the outer plate surfaces 101a and 201a. When slightly raised, the shoulder 52 is pressed against the plastic fluid in the plastic region 4 under the condition that the friction stirring rotary tool 50 is pressed in and the thinning portion _TW is thinned from the flat surface 5 of the filling portion 22 . .

The shoulder diameter R _S of the shoulder portion 52 is preferably 6 mm or more. Moreover, it is preferable that the probe diameter _RP of the probe 53 is 1.0 mm or more and the width|variety more than a clearance gap. The metal-based plates 101 and 201 and the filler 2 can be easily integrated, and the labor for moving the friction stir rotating tool 50 can be reduced.

As shown in FIG. 6 , the relationship between the length Q ₁ (unit: mm) of the probe 53 and the wall thickness T ₁ (unit: mm) of the metal-based plates 101 and 201 preferably satisfies 0<Q ₁ ≦(T ₁ -0.2). When Q ₁ is 0, stirring can be performed, but when Q ₁ >0, the stirring ability is higher. If Q ₁ exceeds (T ₁ -0.2), within the range of the preferred thinning fraction _TW , when the shoulder 52 is pressed in such a way as to contact the plastic fluid in the plastic region 4, there is a probe 53 The case where the metal-based plates 101 and 201 are penetrated. In addition, when the metal-based plate materials 101 and 201 are arranged on the back pad jig 40 , the back pad jig 40 may be scraped by the probe 53 penetrating the metal-based plate materials 101 and 201 .

The metal-based modified plate material 30 preferably contains any one of Au, Ag, Al, Cu, Zn, Au-based alloy, Ag-based alloy, Al-based alloy, Cu-based alloy or Zn-based alloy. Even if it is a material with high thermal conductivity and/or easy to be oxidized, the metal-based modified plate 30 can be produced.

Filler 2 is a granular mixture, and contains particles with a composition different from that of the metal-based plates 101 and 201, but the average composition of the granular mixture is the same as that of the metal-based plates 101 and 201. In the case shown in the figure), the filling material 2 of the filling part 22 may have an unbalanced composition. Stirring is generated in the plastic region 4 by the FSP, so that the filling portion 22 is modified, and the metal-based reformed sheet 30 is obtained which has the FSP portion 32 having the same composition as the metal-based sheet material 101 and 201 without any weighting of the composition.

(Step D) Preferably, after step C, there is a step D for performing plastic working on at least the FSP portion 32 of the metal-based modified plate material 30 . By adding the processing strain generated by plastic working, the crystal grains of the FSP portion 32 of the metal-based modified sheet 30 and the metal-based sheets 101 and 201 shown in FIGS. 5 and 7 can be adjusted to improve the uniformity of the size of the crystal grains. sex. Moreover, as shown in FIGS. 18 and 19 , it is possible to manufacture a metal-based modified plate material 80 which has a good appearance and is integrated so that the metal-based plate materials 181 and 281 and the FSP portion 82 have a uniform thickness T ₈₀ . The wall thickness T ₈₀ of the metal-based modified plate in step D is preferably within ±10% of the average plate thickness in order to reduce the deviation of the plate thickness. For example, after step C is completed, as shown in FIG. 7 , in the case where the wall thickness T1 _of the metal-based plates 101 and 201 is smaller than the wall thickness T32 of the FSP portion ₃₂ , it is preferable to apply plasticity to the FSP portion. After processing, plastic working is performed on the FSP portion and the metal-based sheet material as necessary. 7 , in the case where the thickness T1 _of the metal-based sheet material 101, 201 is larger than the wall thickness T32 of the FSP portion ₃₂ , it is preferable to perform plastic working on the metal-based sheet material as necessary to perform plastic processing on the FSP. Parts and metal-based plates are subjected to plastic working. Examples of forms of applying plastic working to at least the FSP portion 32 include a form in which only the FSP portion 32 is applied, and a form in which not only the FSP portion 32 but also the metal-based plate materials 101 and 201 exposed on both sides of the FSP portion 32 are applied. The form is a form of construction not only on the FSP part 32 but also on the metal-based plate materials 101 and 201 as a whole. Examples of the form of plastic working include press working, forging, or rolling.

(Step E) Preferably, between step C and step D, after step D, or between step C and step D and after step D, there is step E, wherein the metal-based plate 101, 201 is The metal-based modified plate material 30 is heat-treated at a temperature equal to or higher than the recrystallization temperature. The internal stress of the metal-based modified plate 30 can be reduced, the crystal grains of the FSP portion 32 and the metal-based plates 101 and 201 can be adjusted, and the uniformity of the size of the crystal grains can be improved. When the melting point of the metal-based plate materials 101 and 201 is set to _SR (unit of temperature: K), it is preferable to perform the heat treatment in a temperature range of 0.5 _SR or more and 0.95 _SR or less. More preferably, it is 0.65 S _R or more and 0.90 S _R or less, and still more preferably 0.70 S _R or more and 0.80 S _R or less. If the heat treatment temperature is less than 0.5 S _R , the internal stress may not be reduced. In addition, there are cases in which the uniformity of the size of crystal grains between the FSP portion 32 and the metal-based plate materials 101 and 201 cannot be improved. If the heat treatment temperature exceeds 0.95 S _R , the metal-based modified plate 30 may be thermally deformed. The heat treatment time is preferably 30 minutes or more after the start of the heat treatment, more preferably 60 minutes or more, and particularly preferably 120 minutes or more. If the heat treatment time is less than 30 minutes, the metal-based modified plate material 30 may not be sufficiently heated, and the internal stress may not be reduced. In addition, there are cases in which the uniformity of the size of crystal grains between the FSP portion 32 and the metal-based plate materials 101 and 201 cannot be improved. The upper limit of the heat treatment time is preferably 1440 minutes or less, more preferably 720 minutes or less. Internal stress can be confirmed by general methods such as hardness measurement.

The length and width of the metal-based modified plate material 30 are not particularly limited. In addition, the metal-based modified plate material 30 can be cut into any shape. According to the application, the metal-based modified plate 30 of any size can be produced more efficiently.

(use) The metal-based modified plate 30 is preferably the whole or a part of the sputtering target, or a part of the container. As the form of a part of the container, there is a form that forms a part of the container itself, or a form of the inner lining of the container. In these devices or parts, the suppression of large size and wall thickness variation can be achieved simply and at low cost.

[2nd form] Next, the second aspect of the method for producing the metal-based modified sheet material will be described in detail, focusing on the differences from the first aspect. The second form is the same as the first form except that the number of metal-based plate materials to be prepared is three or more.

When the number of prepared metal-based plate materials is three or more, the form of the gap formed between the first end face and the second end face is, for example, the gap 12 shown in FIG. form (not shown). For example, if the appearance of the board surface is a rectangle with N metal-based plates arranged in one direction, (N-1) rib-shaped gaps can be formed without crossing each other. In the case of this form, in the same manner as in the first form, the filling material is filled in each gap in step B to form a filling portion, and further, in step C, each filling portion is subjected to FSP construction to produce a product with (N-1 ) The metal-based modified plate (not shown) of the strip-shaped FSP part. In addition to the above-mentioned forms, there are also forms in which the rib-shaped gap of one and the rib-shaped gap of the other are connected through the intersecting portion of the gaps (not shown). In the case of this form, in step B, including the intersecting portion, the filling material is filled in the entire gap to form a filling portion, and then in step C, FSP construction is performed on the entire filling portion, and an FSP with a branch shape can be produced. Part of the metal-based modified plate (not shown). Here, when the FSP construction is performed in step C, the portion where the friction stir rotating tool is inserted and the portion where the friction stir rotating tool is pulled out is preferably the end portion (not shown) of the branch-shaped filling portion.

[Comparative example: Technology of butt joint by eliminating the gap between the end faces] 20 and 21 are diagrams showing a state in which the first end face 91a of the metal-based plate material 201 and the second end face 91b of the metal-based plate material 101 are butted together, and the metal-based plate materials 101 and 201 are arranged on the back cushion With 40 on. At this time, the end surface 91a and the end surface 91b are affected by the shape of the surface and the roughness of the surface, so that the discontinuous portion 92 of the opening is generated. It is difficult to perform FSW (Friction Stir Welding, Friction Stir Welding) construction on the discontinuous portion 92 , and the discontinuous portion 92 is joined.

2: Filler 3: Plastic region 4: Plastic region 5: Flat surface 11a: First end surface 11b of metal-based plate material 12: Gap 22: Filling portion 23: Void 30: Metal-based modification Plate 32: FSP part 40: Back pad jig 40a: Surface of back pad jig 50: Friction stirring rotary tool with probe 51: Main body part 52: Shoulder part 53: Probe 54: Travel direction 55: Rotation direction 70: Friction stirring rotary tool without probe 72: Shoulder part 75: Rotation direction 76: Pressing direction 80: Metal-based modified plate 82: FSP part 91a: First end face of metal-based plate 91b: Metal-based plate 2nd end face 92: discontinuous part 101, 201: metal-based sheet material 101a, 201a: metal-based sheet material outer surface 101b, 201b: metal-based sheet material on the opposite side to the outer sheet surface 102: welding material 105, 205: Imaginary reference planes 106, 206: Imaginary reference planes 181, 281: Metal-based plate 202: Bulk material 302: Line body 402: Granular body AA, BB, CC, DD, EE, FF: Line H ₂ : Thickness KT ₁ , KT ₁₀₁ , KT ₂₀₁ : Distance _LG : Length P ₁ , P ₂ , P ₅ , P ₆ , P ₇ , P ₈ : Point Q ₁ : Probe length R _P : Probe diameter R _S : Shoulder diameter T ₁ , T ₁₀₁ , T ₂₀₁ , T ₃₂ , T ₈₀ : Wall thickness _TW : Thinning percentage U _B : Wall thickness direction _UG : Gap advancing direction U _W : Gap width direction V ₂ : Table of fillers Observation volume V _G : volume of the gap W _S : interval

FIG. 1 is a perspective view showing a first form of a state in which a gap is provided in step A. FIG. Figure 2 is a sectional view taken along line A-A. FIG. 3 is a perspective view showing a first aspect of a state in which a filling portion is formed in step B. FIG. Figure 4 is a sectional view taken along line B-B. FIG. 5 is a perspective view showing the first form in the middle of forming the metal-based modified plate material in step C. FIG. Fig. 6 is a sectional view taken along line C-C. Fig. 7 is a sectional view taken along line D-D. FIG. 8 is a schematic cross-sectional view showing an example of the state of the overlay welding filler in step B1. FIG. 9 is a schematic cross-sectional view showing an example of the method of embedding the bulk material in step B3. FIG. 10 is a schematic cross-sectional view showing a first modification of the embedding method of the block material in step B3. FIG. 11 is a schematic cross-sectional view showing a second modification of the embedding method of the block material in step B3. FIG. 12 is a schematic cross-sectional view showing a third modification of the embedding method of the block material in step B3. FIG. 13 is a schematic cross-sectional view showing a fourth modification of the embedding method of the block material in step B3. FIG. 14 is a schematic cross-sectional view showing an example of a state in which the wire body is provided in step B4. FIG. 15 is a schematic cross-sectional view showing an example of a state in which granular bodies are provided in step B4. Fig. 16 is a cross-sectional view showing an example of a state in which only the granular body is pressed by the friction stirring rotary tool. Fig. 17 is a cross-sectional view showing an example of a state in which a granular body is made into a plastic fluid by a friction stirring rotary tool. FIG. 18 is a perspective view showing an example of the metal-based modified plate material to which plastic working is performed in step D. FIG. Fig. 19 is a sectional view taken along the line E-E. FIG. 20 is a perspective view showing a comparative example of the metal-based modified plate material. Fig. 21 is a cross-sectional view taken along line F-F.

2: Filler

22: Filling part

30: Metal-based modified sheet

32: FSP Department

40: Back pad fixture

40a: Surface of back pad jig

50: Friction Stir Rotary Tool with Probe

51: main body

53: Probe

54: Direction of travel

55: Rotation direction

101,201: Metal series sheet

101a, 201a: Outer surface of metal plate

C-C, D-D: line

U _G : The travel direction of the gap

Claims (8)

A method for manufacturing a metal-based modified plate, characterized in that it has: Step A, making the first end face and the second end face of the metal-based plate face each other with a space between them, and setting a gap between the first end face and the second end face; In step B, (1) the filler heated above the melting point is placed in the gap, and the filler is deformed to follow the shape of the first end face and the second end face of the metal-based plate, so as to form the filler in the the filling of the aforesaid gap; or (2) After inserting a filler material into the gap and heating the filler material to a recrystallization temperature or higher, the filler material is deformed so as to follow the shapes of the first end face and the second end face to form the filler material. filling the filling portion of the aforementioned gap; and Step C, by inserting at least the probe in the friction stirring rotary tool with probe into the above-mentioned filling part at least, and performing FSP (Friction stir Processing, friction stirring process) construction, and the above-mentioned metal-based plate and the above-mentioned filling part. At least the said filled part is reformed, and the metal-based reformed plate material provided with the FSP part is obtained. The method for producing a metal-based modified sheet material according to claim 1, wherein the metal-based sheet material has a flat plate shape, and the metal-based sheet material having the first end face and the metal-based sheet material having the second end face are separate bodies. The method for manufacturing a metal-based modified sheet material according to claim 1 or 2, wherein the interval is 0.2 mm or more and less than 5 mm. The method for manufacturing a metal-based modified sheet material according to any one of claims 1 to 3, wherein the aforementioned step B is any one of the following steps: Step B1, by MIG or TIG method, surfacing the aforementioned filler material inside the aforementioned gap; Step B2, flowing the melt into the aforementioned gap as the aforementioned filler; Step B3-1, inserting the bulk material with a thickness greater than the wall thickness of the metal-based plate into the gap, and heating it to a recrystallization temperature or higher, applying frictional heat with a friction-stirring rotating tool without a probe. Pressing, or step B3-2, pressing while heating to above the recrystallization temperature by a friction stirring rotary tool without a probe; In step B4-1, at least one of the strands, granules and powder is placed in the aforementioned gap, and after heating to above the recrystallization temperature, press with a hammer, and in step B4-2, after heating to above the recrystallization temperature Then press by a press, step B4-3, after heating to above the recrystallization temperature, press while applying frictional heat by a friction stirring rotating tool without a probe, or step B4-4, by not having The friction stirring rotating tool of the probe is pressed while being heated to a temperature above the recrystallization temperature. The method for producing a metal-based modified sheet material according to any one of claims 1 to 4, wherein in the step C, when the wall thickness of the metal-based sheet material is set to T ₁ (unit: mm), the friction stirring is performed. The probe length Q ₁ (unit: mm) of the rotary tool satisfies 0<Q ₁ ≦(T ₁ -0.2). The method for producing a metal-based modified sheet material according to any one of claims 1 to 5, further comprising a step D after the aforementioned step C of performing plastic working on at least the FSP portion of the aforementioned metal-based modified sheet material. The method for manufacturing a metal-based modified sheet material according to claim 6, wherein between the aforementioned step C and the aforementioned step D, after the aforementioned step D, or between the aforementioned step C and the aforementioned step D and after the aforementioned step D, There is a step E of heat-treating the metal-based modified plate material at a temperature higher than the recrystallization temperature of the metal-based plate material. The method for producing a metal-based modified sheet material according to any one of claims 1 to 7, wherein the metal-based modified sheet material comprises Au, Ag, Al, Cu, Zn, Au-based alloys, Ag-based alloys, Al-based alloys, Either a Cu-based alloy or a Zn-based alloy.

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