WO2021238751A1 - Cristaux liquides sur dispositif de silicium - Google Patents

Cristaux liquides sur dispositif de silicium Download PDF

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Publication number
WO2021238751A1
WO2021238751A1 PCT/CN2021/094760 CN2021094760W WO2021238751A1 WO 2021238751 A1 WO2021238751 A1 WO 2021238751A1 CN 2021094760 W CN2021094760 W CN 2021094760W WO 2021238751 A1 WO2021238751 A1 WO 2021238751A1
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pixel
electrode
liquid crystal
voltage
electrode layer
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PCT/CN2021/094760
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English (en)
Chinese (zh)
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贾伟
李彤
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华为技术有限公司
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133553—Reflecting elements

Definitions

  • the embodiments of the present application relate to the field of communication technology, and in particular to a liquid crystal on silicon device.
  • Optical communication is a communication method that uses light as the carrier wave.
  • the Reconfigurable Optical Add-Drop Multiplexer (ROADM) is used to upload or download light of a specific wavelength.
  • the main device that realizes this function is a wavelength selective switch. (Wavelength Selective Switch, WSS).
  • the wavelength selective switch includes a Liquid Crystal on Silicon (LCOS) chip, and the LCOS chip is used to modulate the phase of incident light so that the light is diffracted.
  • the LCOS chip includes two electrode layers and a liquid crystal layer located between the two electrode layers. One electrode layer is a common electrode, and the other electrode layer includes a plurality of pixel electrodes.
  • the liquid crystal molecules in the liquid crystal layer can modulate the phase of incident light so that the light is diffracted.
  • the voltage difference between the pixel electrode and the common electrode can change the offset angle of the liquid crystal molecules in the liquid crystal layer, and the change of the offset angle will change the refractive index of the liquid crystal molecules, thereby changing the degree of phase modulation of incident light.
  • the pixel electrode, the common electrode, and the liquid crystal layer between the two constitute a pixel, and the voltage difference between the pixel electrode and the common electrode may also be called the voltage difference of the pixel.
  • the voltage difference between two adjacent pixels is different, a lateral electric field will be formed between the two pixels, and the lateral electric field will also affect the offset angle of the liquid crystal molecules, thereby affecting the degree of phase modulation of light.
  • This phenomenon is also called fringe field effect.
  • the fringe field effect can affect the performance of the LCOS chip, which in turn affects the performance of the wavelength selection module. For example, the fringe field effect can cause the wavelength selection module to generate crosstalk.
  • the embodiment of the present application provides a liquid crystal on silicon device that can flexibly adjust the lateral electric field between two pixels to flexibly handle fringe field effects, thereby improving the performance of the LCOS chip.
  • the first aspect of the embodiments of the present application provides a liquid crystal on silicon device, including: a first electrode layer, a liquid crystal layer, and a second electrode layer.
  • the first electrode layer and the second electrode layer may be arranged in parallel, and the liquid crystal layer is located between the first electrode layer and the second electrode layer.
  • the first electrode layer includes M first electrodes, and the second electrode layer includes N second electrodes, where both M and N are positive integers greater than one.
  • M first electrodes, N second electrodes, and the liquid crystal layer between M first electrodes and N second electrodes constitute K pixels, where each pixel corresponds to a first electrode and a second electrode, K Is a positive integer greater than 1.
  • the voltage of the first electrode corresponding to any one of the K pixels is greater than the voltage of the corresponding second electrode.
  • the embodiment of the present application can flexibly adjust the lateral electric field between two pixels to flexibly handle fringe field effects, thereby improving the performance of the LCOS chip.
  • the embodiments of the present application provide the first implementation manner of the first aspect, and there are two adjacent first electrodes with unequal voltages among the M first electrodes;
  • the pixels to which two adjacent first electrodes belong can be the same as the pixels to which two adjacent second electrodes belong, and the pixels to which two adjacent first electrodes belong can also be connected to two adjacent second electrodes.
  • the pixel to which it belongs is different.
  • the voltage difference of at least two adjacent first electrodes is controlled not to be zero, and in the second electrode layer, the voltage difference of at least two adjacent second electrodes is controlled The voltage difference is not zero, so that the lateral electric field in the liquid crystal on silicon device can be adjusted.
  • the K pixels include adjacent first pixels and second pixels, and the first pixels and second pixels can be It is used to modulate the phase of light of the same wavelength, and can also be used to modulate the phase of light of different wavelengths.
  • the first electrode corresponding to the first pixel is adjacent to the first electrode corresponding to the second pixel and the voltages are not equal;
  • the second electrode corresponding to the first pixel is adjacent to the second electrode corresponding to the second pixel and the voltages are not equal.
  • the voltages of the first electrodes in the two pixels are controlled to be unequal, and the voltages of the second electrodes in the two pixels are controlled to be unequal, so as to realize the alignment.
  • the lateral electric field between the first pixel and the second pixel is adjusted.
  • an embodiment of the present application provides a third implementation manner of the first aspect.
  • the first pixel and the second pixel are used to modulate the phase of light of the same wavelength.
  • the first pixel may correspond to the same grating period, or may belong to different grating periods.
  • the two pixels that modulate the same wavelength of light The adjustment of the lateral electric field.
  • an embodiment of the present application provides the fourth implementation manner of the first aspect, and the first pixel and the second pixel correspond to the same grating period.
  • the voltage difference between the first electrode corresponding to the first pixel and the first electrode corresponding to the second pixel is controlled, and the second electrode corresponding to the first pixel and the second electrode corresponding to the second pixel are controlled.
  • the voltage difference between can adjust the lateral electric field in one grating period.
  • an embodiment of the present application provides the fifth implementation manner of the first aspect, and the first pixel and the second pixel correspond to different grating periods.
  • the voltage difference between the first electrode corresponding to the first pixel and the first electrode corresponding to the second pixel is controlled, and the second electrode corresponding to the first pixel and the second electrode corresponding to the second pixel are controlled.
  • the voltage difference between can adjust the transverse electric field at the junction of two adjacent grating periods.
  • the examples of this application provide In a sixth implementation manner of the first aspect, the voltage of the first electrode corresponding to the first pixel is greater than the voltage of the first electrode corresponding to the second pixel;
  • the voltage of the second electrode corresponding to the first pixel is smaller than the voltage of the second electrode corresponding to the second pixel.
  • the voltage difference between the first electrode corresponding to the first pixel and the first electrode corresponding to the second pixel is positive, and the second electrode corresponding to the first pixel is different from the second electrode corresponding to the second pixel.
  • the voltage difference between is negative, so it can play the role of weakening the transverse electric field, which is suitable for scenes where the transverse electric field is not conducive to phase modulation.
  • the embodiments of the present application provide the seventh implementation manner of the first aspect.
  • the voltage difference between the first electrode corresponding to the first pixel and the first electrode corresponding to the second pixel is equal to ,
  • the transverse electric field can be further weakened to further reduce the influence of the transverse electric field on the phase modulation.
  • the examples of this application provide in an eighth implementation manner of the first aspect, the voltage of the first electrode corresponding to the first pixel is less than the voltage of the first electrode corresponding to the second pixel;
  • the voltage of the second electrode corresponding to the first pixel is smaller than the voltage of the second electrode corresponding to the second pixel.
  • the voltage difference between the first electrode corresponding to the first pixel and the first electrode corresponding to the second pixel is negative, and the second electrode corresponding to the first pixel is different from the second electrode corresponding to the second pixel.
  • the voltage difference between the two is also negative, so it can strengthen the lateral electric field, which is suitable for scenarios where the lateral electric field is beneficial to phase modulation.
  • an embodiment of the present application provides a ninth implementation manner of the first aspect.
  • the voltage difference between the first electrode corresponding to the second pixel and the first electrode corresponding to the first pixel is greater than First preset value
  • the voltage difference between the second electrode corresponding to the second pixel and the second electrode corresponding to the first pixel is greater than the second preset value.
  • the embodiments of the present application provide a tenth embodiment of the first aspect.
  • the first electrode layer is a light-transmitting electrode layer
  • the second electrode layer is a light-transmitting electrode layer.
  • light can enter the liquid crystal layer from the first electrode layer, and finally exit from the second electrode layer through the liquid crystal layer.
  • the embodiments of the present application provide an eleventh embodiment of the first aspect, the first electrode layer is a light-transmitting electrode layer, and the second electrode layer is a reflective electrode layer; or
  • the first electrode layer is a reflective electrode layer
  • the second electrode layer is a light-transmitting electrode layer
  • light can enter the liquid crystal layer from the first electrode layer, after passing through the liquid crystal layer, be reflected at the second electrode layer, then pass through the liquid crystal layer again, and finally exit from the first electrode layer; or light can be emitted from the first electrode layer.
  • the two electrode layers are injected into the liquid crystal layer, and after passing through the liquid crystal layer, reflection occurs on the first electrode layer, then passes through the liquid crystal layer again, and finally exits from the second electrode layer.
  • the embodiments of the present application provide a twelfth embodiment of the first aspect.
  • the first electrode layer is a reflective electrode layer
  • the second electrode layer is a reflective electrode layer.
  • light can enter the liquid crystal layer from one side of the liquid crystal layer, and then reflect on the first electrode layer for the first time. After passing through the liquid crystal layer again, light can be reflected on the second electrode layer for a second time, and finally passes through the liquid crystal layer. Layer and shoot out from the other side of the liquid crystal layer.
  • the liquid crystal layer is located between the first electrode layer and the second electrode layer;
  • the first electrode layer includes M first electrodes, and the second electrode layer includes N second electrodes, where both M and N are Is a positive integer greater than 1;
  • M first electrodes, N second electrodes, and the liquid crystal layer between M first electrodes and N second electrodes constitute K pixels, where one pixel corresponds to one first electrode and
  • K is a positive integer greater than 1;
  • the voltage of the first electrode corresponding to any one of the K pixels is greater than the voltage of the corresponding second electrode;
  • Adjacent pixels can be adjusted by adjusting the voltage difference between the first electrodes in the two pixels to adjust the lateral electric field between the two adjacent pixels, or by adjusting the voltage difference between the second electrodes in the two pixels. To adjust the lateral electric field between the two adjacent pixels;
  • one electrode layer in the existing liquid crystal on silicon device is a common electrode, so the existing liquid crystal on silicon device can only adjust the lateral electric field between pixels by controlling the voltage difference between the electrodes in the other electrode layer;
  • the embodiment of the present application can flexibly adjust the lateral electric field between two pixels to flexibly handle the fringe field effect, thereby improving the performance of the LCOS chip.
  • Figure 1 is a top view of WSS in an embodiment of the application
  • Figure 2 is a front view of WSS in an embodiment of the application
  • FIG. 3 is a schematic cross-sectional view of the first embodiment of the liquid crystal on silicon device in the first direction in the embodiments of the application;
  • FIG. 4 is a schematic cross-sectional view in the second direction of the first embodiment of the liquid crystal on silicon device in the embodiments of the application;
  • FIG. 5 is a schematic cross-sectional view in the third direction of the first embodiment of the liquid crystal on silicon device in the embodiments of the application;
  • Fig. 6 is a schematic diagram of a first embodiment of a pixel in an embodiment of the application.
  • FIG. 7 is a schematic diagram of a second embodiment of a pixel in an embodiment of the application.
  • FIG. 8 is a schematic cross-sectional view of a second embodiment of a liquid crystal on silicon device in an embodiment of the application.
  • FIG. 9 is a schematic diagram of a first embodiment of pixel voltage distribution in an embodiment of the application.
  • FIG. 10 is a schematic diagram of a first embodiment of pixel voltage distribution in the prior art
  • Figure 11 is a schematic diagram of a first embodiment of phase modulation
  • FIG. 12 is a schematic diagram of a second embodiment of pixel voltage distribution in an embodiment of the application.
  • FIG. 13 is a schematic cross-sectional view of a third embodiment of a liquid crystal on silicon device in an embodiment of the application;
  • FIG. 14 is a schematic diagram of a third embodiment of pixel voltage distribution in an embodiment of the application.
  • 15 is a schematic diagram of a second embodiment of pixel voltage distribution in the prior art.
  • Figure 16 is a schematic diagram of a second embodiment of phase modulation
  • FIG. 17 is a schematic diagram of a fourth embodiment of pixel voltage distribution in an embodiment of the application.
  • FIG. 19 is a schematic diagram of a second embodiment of the light propagation direction in an embodiment of the application.
  • FIG. 20 is a schematic diagram of a third embodiment of the light propagation direction in an embodiment of the application.
  • the embodiments of the present application provide a liquid crystal on silicon device, which is used to flexibly adjust the lateral electric field between two pixels to flexibly handle fringe field effects, thereby improving the performance of the LCOS chip.
  • FIG. 1 is a top view of the WSS in an embodiment of the application
  • FIG. 2 is a front view of the WSS in an embodiment of the application.
  • the WSS includes a signal port, a collimator lens, a first lens, a second lens, a grating, a third lens, and the liquid crystal on silicon device in the embodiment of the present application, which are sequentially arranged from left to right.
  • the signal ports include A signal input ports and B signal output ports. Each signal input port and each signal output port is equipped with a collimating lens, that is, the number of collimating mirrors is A+B. In the WSS shown in Figure 2, A is 1, and B is 4.
  • the collimator lens is used to collimate light.
  • the first lens and the second lens are used to shape the light, for example, can be used to change the size of the light spot.
  • the grating can disperse white light of multiple wavelengths into monochromatic light of multiple wavelengths. Specifically, as shown in FIG. 1, the grating disperses the multi-wavelength light from the signal input port into single-wavelength light with wavelengths R1, R2,... Rn, respectively.
  • the third lens is used to convert the light dispersed by the grating into parallel light in the dispersion direction, and is used to convert the light processed by the liquid crystal on silicon device into parallel light in the port direction.
  • Liquid crystal on silicon devices are used to modulate the phase of light.
  • the liquid crystal on silicon device includes a liquid crystal layer and electrode layers disposed on both sides of the liquid crystal layer, wherein the electrode layers include electrodes. If different voltages are applied to the electrodes on both sides of the liquid crystal layer, a voltage difference can be formed between the two electrodes, which can cause the liquid crystal molecules in the liquid crystal layer to rotate and shift, thereby changing the refraction of light by the liquid crystal molecules. In turn, the modulation of the light phase can be achieved.
  • a beam of light enters from the signal input port, and then enters the grating through the collimator lens, the first lens, and the second lens in sequence.
  • the light passes through the grating, it is dispersed into single-wavelength light with wavelengths R1, R2, ... Rn.
  • Single-wavelength light with wavelengths R1, R2, ... Rn becomes parallel light under the action of the third lens and enters the liquid crystal on silicon device.
  • Rn passes through the silicon-based liquid crystal device, the phase changes, and is emitted from the silicon-based liquid crystal device, and then passes through the third lens, grating, second lens, first lens and collimator lens Eject from the signal output port.
  • single-wavelength light with wavelengths R1, R2, ... Rn can be combined into multi-wavelength light when it passes through the third lens after being emitted from the silicon-based liquid crystal device.
  • the fringe field effect can be dealt with by adjusting the lateral electric field to improve the performance of the LCOS chip.
  • an embodiment of the present application provides a liquid crystal on silicon device, in which a plurality of electrodes are provided on each electrode layer.
  • the lateral electric field between the two adjacent pixels can be adjusted by adjusting the voltage difference between the first electrodes in the two pixels, or the two adjacent pixels can be adjusted by adjusting the voltage difference between the first electrodes.
  • the voltage difference between the second electrodes in the pixel adjusts the lateral electric field between the two adjacent pixels. Therefore, in the embodiment of the present application, the lateral electric field between two pixels can be flexibly adjusted to deal with fringe field effects flexibly, thereby improving the performance of the LCOS chip.
  • an embodiment of the present application provides an embodiment of a liquid crystal on silicon device.
  • 3 is a schematic cross-sectional view of a liquid crystal on silicon device in a first direction in an embodiment of the application
  • FIG. 4 is a schematic cross-sectional view of a liquid crystal on silicon device in a second direction in an embodiment of the application
  • first direction, the second direction and the third direction are perpendicular to each other.
  • first direction may be the port direction shown in FIG. 2; the second direction may be the wavelength dispersion direction shown in FIG. 1.
  • the liquid crystal on silicon device includes: a first electrode layer 1, a liquid crystal layer 3, and a second electrode layer 2.
  • the liquid crystal layer 3 is located between the first electrode layer 1 and the second electrode layer 2.
  • first electrode layer 1 the liquid crystal layer 3, and the second electrode layer 2 are relatively mature technologies, they are not limited here. Generally, as shown in FIG. 1 and FIG. 2, the first electrode layer 1 and the second electrode layer 2 are arranged in parallel.
  • the liquid crystal layer 3 contains liquid crystal molecules; since the arrangement positions and offset angles of the liquid crystal molecules are different, the cross-sectional shapes of the liquid crystal molecules in the first direction and the second direction are different.
  • the first electrode layer 1 includes M first electrodes 11, and the second electrode layer 2 includes N second electrodes 21, where both M and N are positive integers greater than one.
  • the M first electrodes 11 may be arranged in an array, wherein the scale of the array may be One row and multiple columns, one column and multiple rows, or multiple rows and multiple columns.
  • the N second electrodes 21 may also be arranged in an array, wherein the scale of the array can be One row and multiple columns, one column and multiple rows, or multiple rows and multiple columns.
  • the embodiment of the present application does not specifically limit the number M of the first electrodes 11 and the number N of the second electrodes 21; specifically, the number M of the first electrodes 11 may be equal to or greater than 2; The number N can be equal to two or greater than two. The number M of the first electrodes 11 and the number N of the second electrodes 21 may be equal or not equal.
  • the embodiment of the present application also does not specifically limit the relative positions of the first electrode 11 and the second electrode 21; for example, the first electrode 11 and the second electrode 21 can be arranged in a staggered manner, that is, the first electrode 11 and the second electrode 21 are in the first electrode 11 and the second electrode 21.
  • the first electrode layer 1 includes 25 first electrodes 11
  • the second electrode layer 2 includes 25 second electrodes 21, 25 first electrodes 11 and 25 second electrodes.
  • the electrodes 21 are all arranged in an array, wherein the scale of the array is five rows and five columns; 25 first electrodes 11 and 25 second electrodes 21 are symmetrically arranged.
  • the M first electrodes 11, the N second electrodes 21, and the liquid crystal layer 3 between the M first electrodes and the N second electrodes constitute K pixels, where K is a positive integer greater than 1.
  • Each pixel corresponds to one first electrode 11 and one second electrode 21; and one first electrode 11 can correspond to one pixel or multiple pixels, and one second electrode 21 can correspond to one pixel or multiple pixels. This is related to the relative positions of the first electrode 11 and the second electrode 21.
  • the first electrode 11 and the second electrode 21 when the first electrode 11 and the second electrode 21 are symmetrically arranged, the first electrode 11 and the second electrode 21 each correspond to only one pixel; when the first electrode 11 and the second electrode 21 are arranged in a staggered manner, the first electrode 11 Corresponding to multiple pixels, the second electrode 21 also corresponds to multiple pixels.
  • FIG. 6 is a schematic diagram of a first embodiment of a pixel in an embodiment of this application.
  • Figure 6 shows two first electrodes 11 and two second electrodes 21, and the first electrode 11 and the second electrode 21 are symmetrically arranged; as can be seen from Figure 6, the two first electrodes 11 and two second electrodes
  • the electrodes 21 constitute two pixels. Specifically, one first electrode 11 and one second electrode 21 constitute one pixel, and the other first electrode 11 and the other second electrode 21 constitute another pixel. Therefore, in this example, each first electrode 11 and each second electrode 21 corresponds to only one pixel.
  • FIG. 7 is a schematic diagram of a second embodiment of a pixel in an embodiment of this application.
  • Figure 7 shows one first electrode 11 and two second electrodes 21, and the first electrode 11 and the second electrode 21 are arranged in a staggered manner; it can be seen from Figure 7 that one first electrode 11 and two second electrodes
  • the electrodes 21 constitute two pixels. Specifically, a part of the first electrode 11 and a part of a second electrode 21 constitute one pixel, and the other part of the first electrode 11 and a part of the other second electrode 21 constitute another pixel. Pixels. Therefore, in this example, the first electrode 11 corresponds to two pixels. Similarly, it can be known that each second electrode 21 also corresponds to two pixels.
  • the voltage of the first electrode 11 corresponding to any one of the K pixels is greater than the voltage of the corresponding second electrode 21.
  • the voltages of the M first electrodes 11 in the first electrode layer 1 and the N first electrodes 21 in the second electrode layer 2 can be adjusted according to actual needs, so for any two phases
  • the adjacent pixels can be adjusted by adjusting the voltage difference between the first electrodes 11 in the two pixels to adjust the lateral electric field between the two adjacent pixels, or by adjusting the second electrode 21 in the two pixels.
  • the voltage difference between the two adjacent pixels is used to adjust the lateral electric field between the two adjacent pixels; therefore, the embodiment of the present application can flexibly adjust the lateral electric field between the two pixels to flexibly handle the fringe field effect, thereby improving the performance of the LCOS chip .
  • the voltages of the M first electrodes 11 in the first electrode layer 1 and the N second electrodes 21 in the second electrode layer 2 can be adjusted according to actual needs. Therefore, the voltages of the M first electrodes 11 There are many situations for the voltage and the voltage of the N second electrodes 21. The specific introduction is given below.
  • liquid crystal on silicon device provided by the embodiment of the present application, there are two adjacent first electrodes 11 with unequal voltages among the M first electrodes 11.
  • the embodiment of the present application is not limited to only two adjacent first electrodes 11 with unequal voltages among the M first electrodes 11. Specifically, if two adjacent first electrodes 11 with unequal voltages are recorded as a pair of first electrodes 11, then there may be a pair of first electrodes 11 in the M first electrodes 11, or there may be two pairs or More than two pairs of first electrodes 11.
  • the embodiment of the present application is not limited to only two adjacent second electrodes 21 with unequal voltages among N. Specifically, if two adjacent second electrodes 21 with unequal voltages are recorded as a pair of second electrodes 21, then there may be a pair of second electrodes 21 in the N second electrodes 21, or there may be two pairs or More than two pairs of second electrodes 21.
  • the K pixels include a first pixel and a second pixel.
  • the first electrode 11 corresponding to the first pixel is adjacent to the first electrode 11 corresponding to the second pixel and the voltages are not equal;
  • the second electrode 21 corresponding to the first pixel is adjacent to the second electrode 21 corresponding to the second pixel and the voltages are not equal.
  • FIG. 8 is a schematic cross-sectional view of a second embodiment of a liquid crystal on silicon device in an embodiment of the application.
  • ten first electrodes 11 and ten second electrodes 21 constitute ten pixels, and the first pixel and the second pixel are two adjacent pixels in the ten pixels.
  • the voltages of the first electrode 11 corresponding to the first pixel and the first electrode 11 corresponding to the second pixel it is possible to control the second electrode 21 corresponding to the first pixel and the voltage corresponding to the second pixel at the same time.
  • the voltage of the second electrode 21 is not equal to adjust the lateral electric field between the first pixel and the second pixel.
  • the liquid crystal on silicon device can modulate the phase of light of multiple wavelengths. Therefore, based on the foregoing embodiment, in another embodiment of the liquid crystal on silicon device provided in the embodiment of the present application, the first pixel and the second pixel are used to modulate the phase of light of the same wavelength.
  • the first pixel and the second pixel are used to modulate the phase of light of the same wavelength, the light of the same wavelength will pass through the portion of the liquid crystal layer 3 corresponding to the first pixel during the propagation process. Pass through the 3 part of the liquid crystal layer corresponding to the second pixel.
  • first pixel and the second pixel can also be used to modulate the phase of light of different wavelengths; specifically, light of one wavelength will pass through the portion of the liquid crystal layer corresponding to the first pixel during the propagation process, but It does not pass through the portion of the liquid crystal layer corresponding to the second pixel; while the light of another wavelength passes through the portion of the liquid crystal layer 3 corresponding to the first pixel during the propagation process, it does not pass through the portion of the liquid crystal layer corresponding to the second pixel.
  • H pixels of the K pixels are used to modulate light of a certain wavelength.
  • H is an integer greater than 1.
  • the voltage difference of the H pixels is usually controlled to be periodically distributed. Specifically, the voltage difference of the H pixels arranged in sequence is periodically distributed with F pixels as a period, and the phase delay of the light of this wavelength also changes periodically with F pixels as a period.
  • the liquid crystal on silicon device includes a total of 10 pixels, and the voltage difference of these 10 pixels is periodically distributed; specifically, every 5 pixels can be a period, so the figure The voltage difference of the 10 pixels shown in 8 is periodically distributed with 5 pixels as a period.
  • the phase delay generated by these 10 pixels also changes periodically with 5 pixels as a period.
  • the grating period refers to the distance between two pixels with the same phase delay. Based on the foregoing description, it can be seen that the phase delay generated in the H pixels arranged in sequence is periodically distributed with F pixels as a period, so it can be considered that each F pixels corresponds to a grating period. As shown in Fig. 8, 5 of the pixels correspond to the first grating period, and the other 5 pixels correspond to the second grating period.
  • the first pixel and the second pixel are used to modulate the phase of light of the same wavelength, the first pixel and the second pixel may correspond to the same grating period.
  • the voltage difference between the first electrode 11 corresponding to the first pixel and the first electrode 11 corresponding to the second pixel is controlled, and the second pixel corresponding to the first pixel is controlled.
  • the voltage difference between the electrode 21 and the second electrode 21 corresponding to the second pixel can adjust the lateral electric field in one grating period.
  • the first pixel and the second pixel may also correspond to different grating periods.
  • the first pixel corresponds to the first grating period
  • the second pixel corresponds to the second grating period.
  • the voltage between the first electrode 11 corresponding to the first pixel in the first grating period and the first electrode 11 corresponding to the second pixel in the second grating period is controlled. And control the voltage difference between the second electrode 21 corresponding to the first pixel in the first grating period and the second electrode 21 corresponding to the second pixel in the second grating period.
  • the lateral electric field is adjusted.
  • the lateral electric field can change the deviation angle of the liquid crystal molecules, thereby affecting the degree of modulation of the phase of the light by the liquid crystal molecules.
  • the influence of the lateral electric field on the degree of modulation of the phase of light includes two situations: one is that the lateral electric field is beneficial to the modulation of the phase, and the other is that the lateral electric field is not conducive to the modulation of the phase.
  • the modulation that is beneficial to the phase is related to the initial arrangement of the liquid crystal molecules. If the transverse electric field is conducive to the modulation of the phase, you can strengthen the transverse electric field to better modulate the phase of the light; if the transverse electric field is not conducive to the modulation of the phase, you can reduce the influence of the transverse electric field on the phase modulation by weakening the transverse electric field .
  • the voltage of the first electrode 11 corresponding to the first pixel is greater than the voltage of the first electrode 11 corresponding to the second pixel
  • the voltage of the second electrode 21 corresponding to the first pixel is smaller than the voltage of the second electrode 21 corresponding to the second pixel.
  • the direction of the electric field between the first electrode 11 corresponding to the first pixel and the first electrode 11 corresponding to the second pixel is The first pixel points to the second pixel; since the voltage of the second electrode 21 corresponding to the first pixel is lower than the voltage of the second electrode 21 corresponding to the second pixel, the second electrode 21 corresponding to the first pixel corresponds to the second pixel.
  • the direction of the electric field between the second electrodes 21 is from the second pixel to the first pixel. It can be seen that the directions of the above two electric fields are opposite, and therefore can play a role in weakening the lateral electric field between the first pixel and the second pixel.
  • the embodiment of the present application can play a role in weakening the lateral electric field between the first pixel and the second pixel. Therefore, the embodiment of the present application is suitable for scenarios where the lateral electric field is not conducive to phase modulation, that is, by weakening the first pixel and the second pixel.
  • the transverse electric field in between reduces the influence of the transverse electric field on the phase modulation, thereby suppressing the fringe field effect.
  • the first electrode 11 corresponding to the first pixel and the first electrode corresponding to the second pixel are The voltage difference between 11 is equal to the voltage difference between the second electrode 21 corresponding to the second pixel and the second electrode 21 corresponding to the first pixel.
  • the second electrode 21 corresponding to the second pixel corresponds to the first pixel corresponding to the first pixel.
  • the voltage difference between the two electrodes 21 can further weaken the transverse electric field, thereby weakening the influence of the transverse electric field on the phase modulation.
  • the embodiment of the present application can weaken the lateral electric field between the first pixel and the second pixel.
  • FIG. 9 is a schematic diagram of a first embodiment of pixel voltage distribution in an embodiment of the application
  • FIG. 10 is a schematic diagram of a first embodiment of pixel voltage distribution in the prior art.
  • FIGS. 9 and 10 pixel positions are used to represent pixels, and the 10 pixels in FIG. 8 correspond to pixel position 1 to pixel position 10 in order from left to right. Among them, the first pixel in FIG. 8 corresponds to pixel position 5, and the second pixel in FIG. 8 corresponds to pixel position 6.
  • Figures 9 and 10 both show the voltage of the first electrode 11 and the voltage of the second electrode 21 in each pixel; it can be seen from Figures 9 and 10 that the voltage of the first electrode 11 in each pixel is both It is greater than the voltage of the second electrode 21.
  • the voltage of the first electrode 11 in the first pixel is 2.5V
  • the voltage of the first electrode 11 in the second pixel is 1.8V
  • the voltage of the first pixel is 1.8V
  • the voltage of the second electrode 21 in the middle is 0V
  • the voltage of the first electrode 11 in the second pixel is 0.7V.
  • the difference between the voltage of the first electrode 11 in the first pixel and the voltage of the first electrode 11 in the second pixel is 0.7V
  • the voltage of the second electrode 21 in the second pixel is greater than the voltage of the second electrode 21 in the first pixel. The difference is also 0.7V.
  • each pixel in FIG. 8 is set according to the voltage value shown in FIG. 10, the voltage of the first electrode 11 in the first pixel is 2.5V, and the voltage of the first electrode 11 in the second pixel is 1.1V;
  • the second electrode layer 2 is a common electrode, so the voltage of the second electrode 21 in the first pixel is 0V, and the voltage of the second electrode 21 in the second pixel is also 0V.
  • the difference between the voltage of the first electrode 11 in the first pixel and the voltage of the first electrode 11 in the second pixel is 1.4V.
  • the voltage of the second electrode 21 in the second pixel is equal to that of the second electrode 21 in the first pixel. The difference is 0V.
  • the embodiment of the present application can weaken the lateral electric field between the first pixel and the second pixel.
  • each pixel in FIG. 8 is set according to the voltage values shown in FIG. 9 and FIG. 10, and then the light of the same wavelength is phase modulated, and the modulation result is shown in FIG. 11.
  • Fig. 11 is a schematic diagram of the first embodiment of phase modulation.
  • the increment of the optical path is used to indicate the magnitude of the phase delay. Specifically, the greater the increment of the optical path, the greater the phase delay.
  • the solid curve represents the increase in the optical path length generated by setting each pixel in FIG. 8 according to the voltage value shown in FIG. The increment of the optical path generated by each pixel in the setting.
  • the pixel length is used to represent the pixel, and each pixel corresponds to a pixel length of 6.4 ⁇ m; combining the pixel positions in Figure 9 and Figure 10, in this example, the pixel length 0 to 6.4 ⁇ m corresponds to pixel position 1.
  • a length of 6.4 ⁇ m to 12.8 ⁇ m corresponds to pixel position 2, and so on, a pixel length of 25.6 ⁇ m to 32 ⁇ m corresponds to pixel position 5 (corresponding to the first pixel), and a pixel length of 32 ⁇ m to 38.4 ⁇ m corresponds to pixel position 6 (corresponding to the second pixel).
  • setting each pixel in FIG. 8 according to the voltage value shown in FIG. 9 is compared with setting each pixel in FIG. 8 according to the voltage value shown in FIG.
  • the lateral electric field between the first pixel and the second pixel shown in FIG. 11 is weakened, and the lateral electric field between the first pixel and the second pixel is weakened. It will cause the increase of the optical path to increase (indicating the increase of the phase delay), the increase of the phase modulation depth, and the narrowing of the flyback width of the conversion area; among them, the phase modulation depth is the maximum value of the phase delay and the minimum value of the phase delay.
  • the flyback width of the conversion area is the distance between the position of the maximum value of the phase delay and the position of the minimum value of the phase delay. It can be seen that, in the embodiment of the present application, weakening the lateral electric field between the first pixel and the second pixel can increase the phase modulation depth and reduce the flyback width of the conversion area, that is, the fringe field effect can be suppressed.
  • Figure 8 shows that the pixel voltage difference gradually increases during the grating period (take the first grating period as an example, the voltage difference of the pixel gradually increases from left to right, where the voltage difference of the first pixel is the largest)
  • An example of the ideal phase delay curve at this time At this time, the phase modulation depth is the largest, and the flyback width of the conversion area is the narrowest (which can be regarded as 0); comparing Fig. 11 and Fig. 8, it can be seen that the solid line curve is more than the dashed curve. Close to the ideal phase delay curve in Figure 8, it can also be seen that weakening the lateral electric field between the first pixel and the second pixel can increase the phase modulation depth and reduce the flyback width of the conversion area, that is, Can suppress fringe field effects.
  • the first pixel belongs to the first grating period, and the second pixel belongs to the second grating period.
  • the pixel voltage loaded by each pixel in FIG. 8 can be as shown in FIG. 9.
  • the pixel voltage applied to each pixel in FIG. 12 may be as shown in FIG.
  • FIG. 13 is a schematic diagram of a second embodiment of pixel voltage distribution in an embodiment of the application.
  • FIG. 13 shows the voltage of the first electrode 11 and the voltage of the second electrode 21 in each pixel; it can be seen from FIG. 13 That is, the voltage of the first electrode 11 in each pixel is greater than the voltage of the second electrode 21.
  • each pixel in FIG. 12 is set according to the voltage value shown in FIG. 13, the voltage of the first electrode 11 in the first pixel is 2.5V, and the voltage of the first electrode 11 in the second pixel is 1.8V.
  • the voltage of the second electrode 21 in the first pixel is 0V, and the voltage of the first electrode 11 in the second pixel is 0.7V.
  • the difference between the voltage of the first electrode 11 in the first pixel and the voltage of the first electrode 11 in the second pixel is 0.7V, and the voltage of the second electrode 21 in the second pixel is greater than the voltage of the second electrode 21 in the first pixel. The difference is also 0.7V.
  • the embodiment of the present application can also weaken the lateral electric field between the first pixel and the second pixel, and can suppress the fringe field effect.
  • the voltage of the first electrode 11 corresponding to the first pixel is lower than the voltage of the first electrode 11 corresponding to the second pixel ;
  • the voltage of the second electrode 21 corresponding to the first pixel is less than the voltage of the second electrode 21 corresponding to the second pixel.
  • the electric field direction between the first electrode 11 corresponding to the first pixel and the first electrode 11 corresponding to the second pixel is The second pixel points to the first pixel; since the voltage of the second electrode 21 corresponding to the first pixel is also lower than the voltage of the second electrode 21 corresponding to the second pixel, the second electrode 21 corresponding to the first pixel is The direction of the electric field between the corresponding second electrodes 21 is also directed from the second pixel to the first pixel. It can be seen that the directions of the above two electric fields are the same, and therefore can play a role in enhancing the lateral electric field between the first pixel and the second pixel.
  • the effect of the lateral electric field between the first pixel and the second pixel can be enhanced. Therefore, the embodiment of the present application is suitable for scenarios where the lateral electric field facilitates phase modulation, that is, by enhancing the effect between the first pixel and the second pixel. Lateral electric field to better modulate the phase of light.
  • the first electrode 11 and the second pixel corresponding to the second pixel are The voltage difference between the first electrode 11 corresponding to one pixel is greater than the first preset value; the voltage difference between the second electrode 21 corresponding to the second pixel and the second electrode 21 corresponding to the first pixel is greater than the second preset value .
  • the voltage difference between the first electrode 11 corresponding to the second pixel and the first electrode 11 corresponding to the first pixel is greater than the first preset value
  • the second electrode 21 corresponding to the second pixel is greater than the first electrode 11 corresponding to the first pixel.
  • the voltage difference between the second electrodes 21 corresponding to a pixel is greater than the second preset value, so that the lateral electric field is stronger, and the phase of the light is better modulated.
  • the embodiment of the present application can enhance the lateral electric field between the first pixel and the second pixel.
  • FIG. 14 is a schematic diagram of a third embodiment of pixel voltage distribution in an embodiment of this application
  • FIG. 15 is a schematic diagram of a second embodiment of pixel voltage distribution in the prior art.
  • FIGS. 14 and 15 pixel positions are used to represent pixels, and the 10 pixels in FIG. 8 correspond to pixel position 1 to pixel position 10 in order from left to right. Among them, the first pixel in FIG. 8 corresponds to pixel position 5, and the second pixel in FIG. 8 corresponds to pixel position 6.
  • FIGS. 14 and 15 both show the voltage of the first electrode 11 and the voltage of the second electrode 21 in each pixel; it can be seen from FIGS. 14 and 15 that the voltage of the first electrode 11 in each pixel is both It is greater than the voltage of the second electrode 21.
  • each pixel in FIG. 8 is set according to the voltage value shown in FIG. 14, the voltage of the first electrode 11 in the first pixel is 1.1V, the voltage of the first electrode 11 in the second pixel is 3V, and the voltage of the first pixel is 3V.
  • the voltage of the second electrode 21 in the middle is 0V, and the voltage of the first electrode 11 in the second pixel is 0.4V.
  • the difference between the voltage of the first electrode 11 in the second pixel and the voltage of the first electrode 11 in the first pixel is 1.9V, and the voltage of the second electrode 21 in the second pixel is greater than the voltage of the second electrode 21 in the first pixel. The difference is 0.4V.
  • each pixel in FIG. 8 is set according to the voltage value shown in FIG. 15, the voltage of the first electrode 11 in the first pixel is 1.1V, and the voltage of the first electrode 11 in the second pixel is 2.6V;
  • the second electrode layer 2 is a common electrode, so the voltage of the second electrode 21 in the first pixel is 0V, and the voltage of the second electrode 21 in the second pixel is also 0V.
  • the difference between the voltage of the first electrode 11 in the second pixel and the voltage of the first electrode 11 in the first pixel is 1.4V.
  • the voltage of the second electrode 21 in the second pixel is greater than the voltage of the second electrode 21 in the first pixel. The difference is 0V.
  • the embodiment of the present application can strengthen the lateral electric field between the first pixel and the second pixel.
  • each pixel in FIG. 8 is set according to the voltage values shown in FIG. 14 and FIG. 15 respectively, and then the light of the same wavelength is phase-modulated, and the modulation result is shown in FIG. 16.
  • Figure 16 is a schematic diagram of the second embodiment of phase modulation.
  • the increment of the optical path is used to indicate the magnitude of the phase delay. Specifically, the greater the increment of the optical path, the greater the phase delay.
  • the solid line represents the phase modulation result of setting each pixel in FIG. 8 according to the voltage value shown in FIG. 14, and the dotted line represents the setting of each pixel in FIG. 8 according to the voltage value shown in FIG. 15. After the phase modulation result.
  • the pixel length is used to represent the pixel, and the pixel length corresponding to each pixel is 6.4 ⁇ m; combining the pixel positions in Figure 14 and Figure 15, in this example, the pixel length 0 to 6.4 ⁇ m corresponds to the pixel position 1, and the pixel A length of 6.4 ⁇ m to 12.8 ⁇ m corresponds to pixel position 2, and so on, a pixel length of 25.6 ⁇ m to 32 ⁇ m corresponds to pixel position 5 (corresponding to the first pixel), and a pixel length of 32 ⁇ m to 38.4 ⁇ m corresponds to pixel position 6 (corresponding to the second pixel).
  • setting each pixel in FIG. 8 according to the voltage value shown in FIG. 14 is compared with setting each pixel in FIG. 8 according to the voltage value shown in FIG.
  • the horizontal electric field between the first pixel and the second pixel shown in FIG. 16 is increased, and the increase in the optical path between the first pixel and the second pixel shows that the horizontal electric field between the first pixel and the second pixel is enhanced.
  • strengthening the lateral electric field between the first pixel and the second pixel can increase the phase modulation depth and reduce the flyback width of the conversion area, so it is beneficial to modulate the phase of light.
  • the first pixel belongs to the first grating period, and the second pixel belongs to the second grating period.
  • the pixel voltage loaded by each pixel in FIG. 8 may be as shown in FIG. 14.
  • the pixel voltage applied to each pixel in FIG. 12 may be as shown in FIG. 17.
  • FIG. 17 is a schematic diagram of a fourth embodiment of pixel voltage distribution in an embodiment of the application.
  • FIG. 17 shows the voltage of the first electrode 11 and the voltage of the second electrode 21 in each pixel; it can be seen from FIG. 17 That is, the voltage of the first electrode 11 in each pixel is greater than the voltage of the second electrode 21.
  • each pixel in FIG. 8 is set according to the voltage value shown in FIG. 17, similarly, the voltage of the first electrode 11 in the first pixel is 1.1V, and the voltage of the first electrode 11 in the second pixel is 2.6V; Since the second electrode layer 2 in the existing liquid crystal on silicon device is a common electrode, the voltage of the second electrode 21 in the first pixel is 0V, and the voltage of the second electrode 21 in the second pixel is also 0V. The difference between the voltage of the first electrode 11 in the second pixel and the voltage of the first electrode 11 in the first pixel is 1.4V. The voltage of the second electrode 21 in the second pixel is greater than the voltage of the second electrode 21 in the first pixel. The difference is 0V.
  • the embodiment of the present application can also strengthen the lateral electric field between the first pixel and the second pixel, and is beneficial to modulating the phase of light.
  • the voltage distribution of the first electrode 11 in the first electrode layer 1 and the voltage distribution of the second electrode 21 in the second electrode layer 2 are described above. Optical properties are explained.
  • the first electrode layer 1 is a light-transmitting electrode layer
  • the second electrode layer 2 is a light-transmitting electrode layer
  • the light-transmitting electrode layer refers to an electrode layer that allows light to pass through, so both the first electrode 11 and the second electrode 21 need to have light-transmitting properties.
  • the first electrode layer 1 is a light-transmitting electrode layer
  • the second electrode layer 2 is a light-transmitting electrode layer
  • light can enter the liquid crystal layer from the first electrode layer 1. 3, then pass through the liquid crystal layer 3, and finally exit from the second electrode layer 2.
  • the first electrode layer 1 is a light-transmitting electrode layer
  • the second electrode layer 2 is a reflective electrode layer
  • the first electrode layer 1 is a reflective electrode layer
  • the second electrode layer 2 is a light-transmitting electrode layer.
  • the reflective electrode layer refers to an electrode layer capable of reflecting light.
  • the first electrode 11 When the first electrode layer 1 is a reflective electrode layer, the first electrode 11 needs to be reflective; specifically, a layer of reflective material can be covered on the surface of the first electrode 11 to make the first electrode 11 reflective; the reflective material can be There are many options, which are not detailed here.
  • the light-transmitting electrode layer in the embodiment of the present application can be understood with reference to the relevant description of the light-transmitting electrode layer in the foregoing embodiment.
  • the first electrode layer 1 is a light-transmitting electrode layer and the second electrode layer 2 is a reflective electrode layer
  • light can enter the liquid crystal layer 3 from the first electrode layer 1, and then pass through the liquid crystal layer 3.
  • And reflect at the second electrode layer 2 then pass through the liquid crystal layer 3 again, and finally exit from the first electrode layer 1.
  • the first electrode layer 1 is a reflective electrode layer and the second electrode layer 2 is a light-transmitting electrode layer
  • light can enter the liquid crystal layer 3 from the second electrode layer 2, and then pass through the liquid crystal layer 3, and The reflection occurs at the first electrode layer 1, and then passes through the liquid crystal layer 3 again, and finally exits from the second electrode layer 2.
  • the first electrode layer 1 is a reflective electrode layer
  • the second electrode layer 2 is a reflective electrode layer
  • the reflective electrode layer refers to an electrode layer capable of reflecting light.
  • both the first electrode 11 and the second electrode 21 need to be reflective; specifically, the surfaces of the first electrode 11 and the second electrode 21 can be covered A layer of light-reflecting material makes the first electrode 11 and the second electrode 21 have light-reflective properties. There are many options for reflective materials, which will not be detailed here.
  • the first electrode layer 1 is a reflective electrode layer and the second electrode layer 2 is a reflective electrode layer
  • light can enter the liquid crystal layer 3 from one side of the liquid crystal layer 3, and then on the first electrode layer 1.
  • the first reflection occurs, and after passing through the liquid crystal layer 3 again, a second reflection occurs on the second electrode layer 2, and finally passes through the liquid crystal layer 3 and exits from the other side of the liquid crystal layer 3.
  • the first electrode layer 1, the liquid crystal layer 3, and the second electrode layer 2 in the liquid crystal on silicon device are described above, and the other components in the liquid crystal on silicon device are described below.
  • the liquid crystal on silicon device may further include a cover plate, an alignment layer, and a substrate.
  • the second electrode layer 2 may be provided on the substrate; a calibration layer is provided between the first electrode layer 1 and the liquid crystal layer 3, and a calibration layer is also provided between the second electrode layer 2 and the liquid crystal layer 3; cover The plate is arranged on one side of the first electrode layer 1, and the first electrode layer 1 is located between the cover plate and the calibration layer.
  • the alignment layer between the first electrode layer 1 and the liquid crystal layer 3, and the alignment layer between the second electrode layer 2 and the liquid crystal layer 3, are used to make the liquid crystal molecules in the liquid crystal layer 3 follow a preset direction Offset the preset tilt angle and preset twist angle.
  • the tilt angle and the twist angle refer to the offset angle of the liquid crystal molecules in two vertical planes.
  • the twist angle refers to the angle at which the liquid crystal molecules deviate in the horizontal plane
  • the tilt angle may refer to the angle at which the liquid crystal molecules deviate in the vertical plane.
  • the liquid crystal molecules can be shifted to a preset twist angle, and the calibration layer can shift the liquid crystal molecules to a preset tilt angle.
  • the calibration layer can shift the liquid crystal molecules to a preset tilt angle.
  • a voltage difference is formed on the sides. Therefore, the offset angle mentioned in the foregoing various embodiments can be understood as the inclination angle in this embodiment.
  • the first electrode layer 1 may be a light-transmitting electrode layer or a reflective electrode layer; similarly, the second electrode layer 2 may be a light-transmitting electrode layer or a reflective electrode layer.
  • the first electrode layer 1 is a light-transmitting electrode layer and the second electrode layer 2 is a light-transmitting electrode layer, in order to ensure that light can pass through the cover plate and then enter the first electrode layer 1, and can Pass through the second electrode layer 2 and then eject from the substrate.
  • the cover plate needs to be a light-transmitting cover plate, and the substrate needs to be a light-transmitting substrate; when the first electrode layer 1 is a reflective electrode layer, and the second electrode layer 2 is a reflective electrode In order to ensure that light does not exit the cover plate from the gap between the first electrodes 11 and the substrate from the gap between the second electrodes 21, the cover plate needs to be a reflective cover plate, and the substrate needs to be reflective Substrate; when the first electrode layer 1 is a light-transmitting electrode layer, and the second electrode layer 2 is a reflective electrode layer, in order to ensure that light can pass through the cover plate and then enter the first electrode layer 1, and not from the second electrode
  • the material of the substrate when the substrate is a reflective substrate, can be silicon; when the substrate is a light-transmitting substrate, the material of the substrate can be glass; similarly, when the cover is a reflective cover, the material of the cover can be silicon ; When the cover is a transparent cover, the material of the cover can be glass.
  • FIG. 18, FIG. 19, and FIG. 20 only indicate the approximate propagation direction of light, and are not used to indicate the accurate propagation path of light.
  • FIG. 18, FIG. 19, and FIG. 20 do not show the calibration layer. Since the calibration layer is located between the electrode layer (including the first electrode layer 1 and the second electrode layer 2) and the liquid crystal layer 3, the calibration layer is shown in FIGS. In each embodiment corresponding to FIG. 20, the alignment layer is transparent.

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Abstract

Des modes de réalisation de la présente invention concernent des cristaux liquides sur un dispositif de silicium (LCOS), utilisés pour ajuster de manière flexible le champ électrique latéral entre deux pixels pour gérer de manière flexible l'effet de champ de franges, ce qui permet d'améliorer la performance de puces LCOS. Les modes de réalisation de la présente invention comprennent : une première couche d'électrode, une seconde couche d'électrode et une couche de cristaux liquides située entre M premières électrodes et N secondes électrodes ; la première couche d'électrode comprend M premières électrodes, et la seconde couche d'électrode comprend N secondes électrodes, M et N étant des entiers positifs supérieurs à un ; les M premières électrodes, les N secondes électrodes, et la couche de cristaux liquides entre celles-ci constituant K pixels, un pixel correspondant à une première électrode et à une seconde électrode, et K étant un nombre entier positif supérieur à un ; et pour l'un quelconque des K pixels, la tension de la première électrode correspondante est supérieure à la tension de la seconde électrode correspondante.
PCT/CN2021/094760 2020-05-25 2021-05-20 Cristaux liquides sur dispositif de silicium WO2021238751A1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023221802A1 (fr) * 2022-05-16 2023-11-23 华为技术有限公司 Commutateur sélectif en longueur d'onde

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020022371A (ko) * 2000-09-20 2002-03-27 김순택 반사형 액정표시장치의 전극구조
KR20030054808A (ko) * 2001-12-26 2003-07-02 삼성에스디아이 주식회사 반사형 액정 디스플레이
CN1460199A (zh) * 2001-03-30 2003-12-03 美能达株式会社 液晶显示设备
CN105954945A (zh) * 2016-06-28 2016-09-21 联想(北京)有限公司 液晶显示板和液晶显示装置
CN108681129A (zh) * 2018-07-11 2018-10-19 上海交通大学 一种偏振非依赖硅基液晶器件
CN108700768A (zh) * 2016-02-29 2018-10-23 微软技术许可有限责任公司 减少衍射图案的阶

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI536070B (zh) * 2014-05-07 2016-06-01 禾鈶股份有限公司 空間光調變模組及其系統
US10466551B2 (en) * 2016-07-13 2019-11-05 Research & Business Foundation Sungkyunkwan University Wavelength-tunable type etalon comprising LCD-layer and preparation method thereof
CN106610551B (zh) * 2017-02-22 2019-10-25 深圳市华星光电技术有限公司 阵列基板及液晶显示面板
CN110709762B (zh) * 2017-09-26 2021-04-09 华为技术有限公司 波长选择开关、配向方向获取方法、硅基液晶及制作方法
CN110955078B (zh) * 2018-09-27 2024-04-09 京东方科技集团股份有限公司 显示面板及其驱动方法、显示装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020022371A (ko) * 2000-09-20 2002-03-27 김순택 반사형 액정표시장치의 전극구조
CN1460199A (zh) * 2001-03-30 2003-12-03 美能达株式会社 液晶显示设备
KR20030054808A (ko) * 2001-12-26 2003-07-02 삼성에스디아이 주식회사 반사형 액정 디스플레이
CN108700768A (zh) * 2016-02-29 2018-10-23 微软技术许可有限责任公司 减少衍射图案的阶
CN105954945A (zh) * 2016-06-28 2016-09-21 联想(北京)有限公司 液晶显示板和液晶显示装置
CN108681129A (zh) * 2018-07-11 2018-10-19 上海交通大学 一种偏振非依赖硅基液晶器件

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023221802A1 (fr) * 2022-05-16 2023-11-23 华为技术有限公司 Commutateur sélectif en longueur d'onde

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