WO2021184743A1 - Fingerprint identification chip packaging structure and method - Google Patents

Fingerprint identification chip packaging structure and method Download PDF

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Publication number
WO2021184743A1
WO2021184743A1 PCT/CN2020/120859 CN2020120859W WO2021184743A1 WO 2021184743 A1 WO2021184743 A1 WO 2021184743A1 CN 2020120859 W CN2020120859 W CN 2020120859W WO 2021184743 A1 WO2021184743 A1 WO 2021184743A1
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WIPO (PCT)
Prior art keywords
light
packaging structure
transmitting
layer
shielding layer
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PCT/CN2020/120859
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French (fr)
Chinese (zh)
Inventor
王凯厚
王鑫琴
杨剑宏
喻琼
Original Assignee
苏州晶方半导体科技股份有限公司
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Publication of WO2021184743A1 publication Critical patent/WO2021184743A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H01L31/02164Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers, cold shields for infrared detectors
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1306Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1318Sensors therefor using electro-optical elements or layers, e.g. electroluminescent sensing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0232Optical elements or arrangements associated with the device
    • H01L31/02327Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/83986Specific sequence of steps, e.g. repetition of manufacturing steps, time sequence
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the invention belongs to the field of semiconductor technology, and specifically relates to a fingerprint identification chip packaging structure and packaging method.
  • fingerprint identification technology Due to the uniqueness and immutability of fingerprints, fingerprint identification technology has many advantages such as good security, high reliability, and simple use. Therefore, fingerprint recognition technology has become the mainstream technology for identity verification of various electronic devices.
  • the optical fingerprint recognition chip is one of the commonly used fingerprint recognition chips in existing electronic devices. It collects the user's fingerprint information through a large number of photosensitive pixels (pixels) in the fingerprint recognition area, and each photosensitive pixel serves as a detection. Specifically, during fingerprint recognition, light is irradiated on the fingerprint surface of the user and reflected to the photosensitive pixel through the fingerprint surface. The photosensitive pixel converts the optical signal of the fingerprint into an electrical signal, and fingerprint information can be obtained based on the electrical signal converted by all pixels.
  • a transparent cover is generally directly arranged on the photosensitive side.
  • the transparent cover plate is completely light-transmissive, it will cause crosstalk of the sensing results of different photosensitive pixels, which affects the accuracy of fingerprint recognition.
  • Chinese patent application CN108022904A discloses a method for packaging a fingerprint identification chip, which fixes a cover plate with a through-hole structure on the side of the wafer facing the pixels to avoid crosstalk problems.
  • the existing problems include at least: the through holes on the cover plate need to be formed in advance, and then the cover plate with the through holes is bonded to the chip surface, but this takes a long time for the operation process, and it also requires the position of the through holes and the pixel points to be calibrated. Errors are easy to occur; if the through hole is made after the cover plate and the chip are combined, there is no obstruction between the cover plate and the chip, and it is easy to cause damage to the pixels located under the through hole.
  • the packaging structure of fingerprint recognition chips in the prior art generally uses wafer-level packaging to improve packaging efficiency.
  • Wafer-level packaging is to directly perform most or all of the packaging and testing procedures on the wafer, and then perform dicing. (Singulation) is made into a single component. The problem is that when a certain packaging procedure or part of the packaging position is defective, the entire packaging structure is scrapped and the cost is high.
  • An embodiment of the present invention provides a fingerprint recognition chip packaging structure and method, which are used to solve the technical problems of high processing cost and easy pixel damage in the prior art, including:
  • the embodiment of the present application provides a packaging structure of a fingerprint identification chip, including:
  • the first light-transmitting layer has a first surface and a second surface opposite to each other;
  • the first component is pasted on the first surface of the first light-transmitting layer, the first component includes a fingerprint recognition chip, and the surface of the fingerprint recognition chip close to the first light-transmitting layer has a plurality of pixels for collecting fingerprint information;
  • the second component is pasted on the second surface of the first light-transmitting layer.
  • the second component includes a first light-shielding layer and a second light-transmitting layer.
  • the first light-shielding layer is formed between the second light-transmitting layer and the first light-transmitting layer.
  • a plurality of light-transmitting holes are formed on the first light-shielding layer, and each of the light-transmitting holes corresponds to a pixel point.
  • the first component further includes a light filter formed between the fingerprint identification chip and the first light-transmitting layer.
  • the filter is attached to the surface of the fingerprint identification chip.
  • the second component further includes a condenser lens formed on the surface of the second light-transmitting layer, and the condenser lens and the first light-shielding layer are located opposite to the second light-transmitting layer.
  • Each of the condenser lenses corresponds to one of the light-transmitting holes.
  • the material of the first light shielding layer is monocrystalline silicon, or polycrystalline silicon, or amorphous silicon, or silicon germanium, or silicon carbide.
  • the first light-transmitting layer and the second light-transmitting layer are selected from dry film, inorganic glass or organic glass.
  • the second component includes a second light-shielding layer, and the second light-shielding layer and the first light-shielding layer are formed on two opposite surfaces of the second light-transmitting layer,
  • a plurality of windows are opened on the second light-shielding layer, and each window corresponds to a light-transmitting hole.
  • the embodiment of the application also discloses a packaging method of a fingerprint identification chip, which includes:
  • the first packaging structure having a plurality of first components, and cutting the first packaging structure to obtain a plurality of single first components;
  • the second packaging structure having a plurality of second components, and cutting the second packaging structure to obtain a plurality of single second components
  • a first transparent layer is provided, and a single first component and a single second component are respectively pasted on two opposite surfaces of the first transparent layer.
  • the manufacturing method of the first packaging structure includes:
  • a filter is made on the side of the fingerprint recognition chip with pixels.
  • the manufacturing method of the second packaging structure includes:
  • the second light-transmitting layer as a support, fabricating a first light-shielding layer on one surface thereof;
  • the first light-shielding layer is etched to form a plurality of light-transmitting holes.
  • the embodiment of the application also discloses a packaging method of a fingerprint identification chip, which includes:
  • the first packaging structure having a plurality of first components
  • the second packaging structure having a plurality of second components, and cutting the second packaging structure to obtain a plurality of single second components;
  • a first light-transmitting layer is provided, and a wafer-level first packaging structure and a single second component are respectively pasted on two opposite surfaces of the first light-transmitting layer.
  • the first package structure is cut to obtain a plurality of single package structures.
  • the beneficial effects of the present invention include at least:
  • the cylindrical light-shielding body formed by the present invention better shields and absorbs excess oblique light, so that the image of the object is clearer;
  • the present invention first manufactures two important wafer-level components, and then attaches them to each other, which reduces the processing difficulty, is easy to mass produce, and has low cost.
  • FIG. 1 is a cross-sectional view of the package structure in Embodiment 1 of the present application.
  • FIG. 8 is a schematic diagram of an intermediate structure formed by the package structure in Embodiment 2 of the present application.
  • the packaging structure 10 includes a first component 11, a first light-transmitting layer 12, and a second component 13. The first component 11 and the second component 13 are attached to the first Two opposite surfaces of the light-transmitting layer 12.
  • the first component 11 includes a fingerprint recognition chip 111.
  • the fingerprint recognition chip 111 has opposite front and back sides.
  • the front of the fingerprint recognition chip 111 has a plurality of pixels 1111 for collecting fingerprint information.
  • the front side of the fingerprint identification chip 111 includes a sensing area and a non-sensing area surrounding the sensing area.
  • the pixel point 1111 is arranged in the sensing area; the non-sensing area is provided with a pad (not shown) electrically connected to the pixel point 1111, and the pad is used for electrically connecting with an external circuit.
  • the fingerprint identification chip 111 is an optical fingerprint identification chip.
  • the first component 11 further includes a filter 112 that covers the surface of the fingerprint identification chip 111 with pixels.
  • the filter 112 is used to filter out stray light outside the detection light waveband, so as to reduce the interference of stray light and improve the accuracy of fingerprint recognition.
  • the filter 112 may only cover the upper portion corresponding to the pixel point 1111, or may cover the entire surface of the fingerprint identification chip 111.
  • the first light-transmitting layer 12 covers the side of the fingerprint identification chip 111 with the pixel points 1111, and is used to protect the front surface of the fingerprint identification chip 111 to be packaged. Since light is required to pass through the first light-transmitting layer 12 to reach the pixel points 1111, the light-transmitting layer 12 has a relatively high light-transmitting property and is a light-transmitting material. Both surfaces of the light-transmitting layer 12 are flat and smooth, and will not scatter or diffuse the incident light.
  • the material of the first light-transmitting layer 12 may be dry film, inorganic glass, organic glass, or other light-transmitting materials with specific strength.
  • the thickness of the first light-transmitting layer 12 is preferably 5-20 ⁇ m.
  • the second component 13 includes a light-shielding layer 131 and a second light-transmitting layer 132, and the light-shielding layer 131 is formed between the second light-transmitting layer 132 and the first light-transmitting layer 12.
  • the light-shielding layer 131 is provided with a plurality of light-transmitting holes 1311 communicating up and down. Each light-transmitting hole 1311 corresponds to a pixel 1111. In a preferred embodiment, the axis of the light-transmitting hole 1311 coincides with the center of the pixel 1111.
  • the light-shielding layer 131 has a relatively low dielectric constant.
  • the material of the light-shielding layer 131 is preferably a silicon material, which can be monocrystalline silicon, or polycrystalline silicon, or amorphous silicon, or silicon germanium, or silicon carbide.
  • the light-shielding layer 131 may be formed on the surface of the second light-transmitting layer 132 by physical deposition.
  • the thickness of the light-shielding layer 131 is preferably 4-20 ⁇ m, and the size of the light-transmitting hole can be adjusted according to needs.
  • the aperture may be 30 ⁇ m, and the aspect ratio may be 1:1.
  • the light shielding layer 131 is made of silicon material, which can reduce the crosstalk problem between adjacent pixels 1111 on the one hand.
  • the light-shielding layer 131 made of silicon material generally has a Mohs hardness above 10, which has a high hardness and high mechanical strength. When pressed by a finger, it will not produce thickness deformation and will not affect the accuracy of fingerprint recognition.
  • the projection of the light-transmitting hole 1311 on the front surface at least overlaps with the projection of the corresponding pixel point 1111 on the front surface.
  • the projection of the transparent hole 1311 on the front can be set to completely cover the projection of the corresponding pixel 1111 on the front.
  • the projection of the transparent hole 1311 on the front side can be set to completely coincide with the projection of the corresponding pixel point 1111 on the front side.
  • the fingerprint recognition chip 111 is a capacitive fingerprint recognition chip
  • the pixel point 1111 detects the capacitance value and converts the capacitance value into an electrical signal.
  • the external circuit can obtain fingerprint information based on the electrical signal, perform identity recognition, and transmit light.
  • the holes 1311 are used to expose the pixels, and the light-shielding layer 131 has a lower dielectric constant, which can reduce the problem of crosstalk between adjacent pixels and improve the accuracy of fingerprint recognition.
  • the fingerprint identification chip 111 is an optical fingerprint identification chip
  • the pixel point 1111 collects the fingerprint information of the preset area opposite to the transparent hole 1311 through the corresponding transparent hole 1311. Since each pixel 1111 collects the fingerprint information of its own relative collection area through the corresponding light-transmitting hole 1311, the mutual crosstalk between the preset areas corresponding to different pixels is avoided, thereby avoiding the distortion of the fingerprint image, and further improving the fingerprint Accuracy of recognition.
  • the shape of the light transmission hole 1311 may be a circular through hole, a square through hole or a triangular through hole.
  • the shape of the transparent hole 1311 may be a circular hole with the same top and bottom, or a square hole with the same top and bottom, or a triangular hole with the same top and bottom, or a polygon with the same top and bottom of other structures.
  • the bottom of the light transmission hole 1311 is an opening of the light transmission hole 1311 close to the pixel point 1111, and the top of the light transmission hole 1311 is an opening of the light transmission hole 1311 away from the pixel point 1111.
  • the shape of the light-transmitting hole 1311 can also be a round hole with a different top and bottom, a square hole with a different top and bottom, or a triangular hole with a different top and bottom, or the top of other structures. A polygon that is not the same as the bottom.
  • the top of the light-transmitting hole 1311 is larger than the bottom of the light-transmitting hole 1311.
  • the bottom of the light transmission hole 1311 is the opening of the light transmission hole 1311 close to the pixel point 1111
  • the top of the light transmission hole 1311 is the opening of the light transmission hole 1311 away from the pixel point 1111.
  • the light-shielding layer 131 and the first light-transmitting layer 12 are bonded and fixed by a DAF film.
  • the second light-transmitting layer 132 covers the side of the light-shielding layer 131 facing away from the fingerprint identification chip 111, and is used for shielding the opening of the light-transmitting hole 1311. Since light needs to pass through the second light-transmitting layer 132 to reach the pixel points 1111, the second light-transmitting layer 132 has a relatively high light-transmitting property and is a light-transmitting material. Both surfaces of the second light-transmitting layer 132 are flat and smooth, and will not scatter or diffuse the incident light.
  • the material of the second light-transmitting layer 132 may be dry film, inorganic glass, organic glass, or other light-transmitting materials with specific strength.
  • the thickness of the second light-transmitting layer 132 is preferably 10-40 microns.
  • the second light-transmitting layer 132 and the light-shielding layer 131 are fixed by glue.
  • the second assembly 13 also includes a condenser lens 133, which is arranged on the side of the second light-transmitting layer 132 away from the fingerprint identification chip 111, each condenser lens 133 corresponds to a light-transmitting hole 1311, and the condenser lens 133 It is used to converge the external light to the surface of the corresponding pixel 1111.
  • the condensing lens 133 can be manufactured by photolithography and baking molding. In another embodiment, the condensing lens 133 can also be formed on the surface of the second light-transmitting layer 132 by embossing.
  • the second component further includes a light-shielding layer 134.
  • the light-shielding layer 134 and the light-shielding layer 131 are formed on two opposite surfaces of the second light-transmitting layer.
  • the condenser lens 133 is correspondingly arranged in the window.
  • the light shielding layer 134 is formed between the condenser lenses 133, so as to shield light interference from the surrounding light of the condenser lenses and optimize the imaging effect.
  • the material of the light shielding layer 134 is a black photosensitive organic material or a metal that has undergone a blackening treatment, which has the characteristics of opacity or low light transmission.
  • the light-shielding layer 134 may be vinyl; the light-shielding layer 134 may also be blackened aluminum, so that the light cannot be specularly reflected on its surface, and the light-shielding performance is good.
  • the embodiment of the present invention provides a packaging method for forming the packaging structure as shown in FIG. 1.
  • FIGS. 2 to 7 are schematic diagrams of intermediate structures formed in the packaging process of the packaging method according to the first embodiment of the present invention.
  • Step s1 Fabricate a first packaging structure at the wafer level.
  • FIG. 2 is a schematic top view of the structure of the wafer to be packaged 100
  • FIG. 3 is a cross-sectional view along A-A in FIG. 2.
  • the wafer 100 to be packaged has a front surface and a back surface opposite to the front surface.
  • the wafer 100 includes a plurality of fingerprint recognition chips 111 arranged in an array.
  • Each adjacent fingerprint identification chip 111 has a plurality of pixels 1111 for collecting fingerprint information.
  • the pixel 1111 is located on the front side.
  • the cutting channel 120 between two adjacent fingerprint identification chips 111 is only a blank area reserved between the two fingerprint identification chips 111 for cutting, and the cutting channel 120 is connected to the fingerprints on both sides. There is no actual boundary line between the identification chips 111.
  • a filter 112 is covered on the front surface of the wafer 100 to be packaged, and the filter 112 covers the entire surface of the fingerprint identification chip 111 to obtain a first packaging structure.
  • Step s2 manufacturing a single first component 11.
  • the first package structure is cut along the cutting channel 120 to obtain a plurality of single first components 11.
  • the cutting can be cut with a slicing knife or laser cutting, and the slicing knife can be cut with a metal knife or a resin knife.
  • Step s3 Fabricate a second packaging structure at the wafer level.
  • a plurality of light-transmitting holes 1311 communicating up and down are opened on the light-shielding layer 131, and then the light-shielding layer 131 is pasted on the surface of the second light-transmitting layer 132.
  • the light shielding layer 134 is formed on another surface of the second light transmitting layer 132, and a plurality of windows are formed on the light shielding layer 134 corresponding to the light transmitting holes.
  • a condenser lens 133 is installed corresponding to the window, and each condenser lens 133 corresponds to a light transmission hole 1311, thereby obtaining a second packaging structure.
  • the manufacturing sequence of the light shielding layer 134 and the condenser lens 133 in this embodiment is not limited, and the manufacturing sequence of the light shielding layer 131 and the light shielding layer 134 is also not limited in this embodiment.
  • Step s4 making a single second component.
  • the second package structure is divided correspondingly along the cutting trench 120 to obtain a single second component 13.
  • the cutting can be cut with a slicing knife or laser cutting, and the slicing knife can be cut with a metal knife or a resin knife.
  • Step s5 referring to FIG. 7, screening the first component and the second component that have passed the test, and sticking the single first component and the second component on the two opposite surfaces of the first light-transmitting layer, respectively.
  • the pasting can be sprayed, spin-coated or pasted to form an adhesive layer, and then the first component, the second component and the first light-transmitting layer are relatively pressed together, and the adhesive layer is combined.
  • the adhesive layer can not only achieve the bonding effect, but also play the role of insulation and sealing.
  • the adhesive layer may be a polymer adhesive material, such as polymer materials such as silica gel, epoxy resin, and benzocyclobutene.
  • the entire packaging process it can also include wafer thinning, solder pad production, wiring layer production and other processes, which will not be repeated in this case.
  • the chip package structure obtained by subsequent cutting can be connected to an external circuit through external bumps (not shown).
  • the difference from the first embodiment is that after the single second component 13 is cut, the second component is first bonded to the first package structure at the wafer level through the first light-transmitting layer 12; and then the first package structure is cut.
  • the packaging structure obtains a packaging structure in which a single first component and a single second component are combined.
  • the wafer 100 to be packaged is first cut into a plurality of units, and then a filter 112 is plated on the surface of each unit to form a single first component 11.
  • the first packaging structure at the wafer level and the second packaging structure at the wafer level may be manufactured first, and then the first packaging structure at the wafer level and the second packaging structure at the wafer level may be combined They are respectively pasted on the two opposite surfaces of the first light-transmitting layer, and finally cut to obtain a single package structure.
  • composition taught by the present invention is also basically The above is composed of or composed of the described components, and the process taught by the present invention is basically composed of the described process steps or a set of described process steps.
  • a single component may be replaced by multiple components and multiple components may be replaced by a single component to provide an element or structure or perform one or several given functions. This substitution is considered to be within the scope of the present invention, except where it will not operate to practice the specific embodiments of the present invention.

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  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
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Abstract

A packaging structure and a packaging method. The packaging structure (10) comprises: a first light-transmitting layer (12) having opposite first and second surfaces; a first component (11) attached to the first surface of the first light-transmitting layer (12), the first component (11) comprising a fingerprint identification chip (111), and a plurality of pixel points (1111) for acquiring fingerprint information being provided on the surface of the fingerprint identification chip (111) close to the first light-transmitting layer (12); a second component (13) attached to the second surface of the first light-transmitting layer (12), the second component (13) comprising a first light-shielding layer (131) and a second light-transmitting layer (132), the first light-shielding layer (131) being formed between the second light-transmitting layer (132) and the first light-transmitting layer (12), a plurality of light-transmitting holes (1311) being formed in the first light-shielding layer (131), and each light-transmitting hole (1311) corresponding to a pixel point (1111). By making two important wafer components at first, and then bonding same to each other, the difficulty of processing is reduced, mass production is facilitated, and costs are reduced.

Description

指纹识别芯片的封装结构和方法Packaging structure and method of fingerprint identification chip 技术领域Technical field
本发明属于半导体技术领域,具体涉及一种指纹识别芯片封装结构和封装方法。The invention belongs to the field of semiconductor technology, and specifically relates to a fingerprint identification chip packaging structure and packaging method.
背景技术Background technique
随着科学技术的不断进步,越来越多的电子设备广泛的应用于人们的日常生活以及工作当中,为人们的日常生活以及工作带来了巨大的便利,成为当今人们不可或缺的重要工具。而随着电子设备功能的不断增加,电子设备存储的重要信息也越来越多,电子设备的身份验证技术成为目前电子设备研发的一个主要方向。With the continuous advancement of science and technology, more and more electronic devices are widely used in people's daily life and work, bringing great convenience to people's daily life and work, and becoming an indispensable tool for people today . With the continuous increase of the functions of electronic devices, more and more important information is stored in electronic devices, and the identification verification technology of electronic devices has become a main direction of electronic device research and development.
由于指纹具有唯一性和不变性,使得指纹识别技术具有安全性好、可靠性高以及使用简单等诸多优点。因此,指纹识别技术成为当下各种电子设备进行身份验证的主流技术。Due to the uniqueness and immutability of fingerprints, fingerprint identification technology has many advantages such as good security, high reliability, and simple use. Therefore, fingerprint recognition technology has become the mainstream technology for identity verification of various electronic devices.
目前,光学指纹识别芯片是现有电子设备常用的指纹识别芯片之一,其通过指纹识别区的大量感光像素(pixel)来采集使用者的指纹信息,每个感光像素作为一个检测。具体的,进行指纹识别时,光线照射至使用者的指纹面并经过指纹面反射至感光像素,感光像素将指纹的光信号转换为电信号,根据所有像素转换的电信号可以获取指纹信息。At present, the optical fingerprint recognition chip is one of the commonly used fingerprint recognition chips in existing electronic devices. It collects the user's fingerprint information through a large number of photosensitive pixels (pixels) in the fingerprint recognition area, and each photosensitive pixel serves as a detection. Specifically, during fingerprint recognition, light is irradiated on the fingerprint surface of the user and reflected to the photosensitive pixel through the fingerprint surface. The photosensitive pixel converts the optical signal of the fingerprint into an electrical signal, and fingerprint information can be obtained based on the electrical signal converted by all pixels.
现有的光学指纹识别芯片在封装时,一般直接在感光侧直接设置透明盖板。但是由于透明盖板的是完全透光的,会导致不同感光像素的感测结果产生串扰,影响指纹识别精度。When the existing optical fingerprint identification chip is packaged, a transparent cover is generally directly arranged on the photosensitive side. However, since the transparent cover plate is completely light-transmissive, it will cause crosstalk of the sensing results of different photosensitive pixels, which affects the accuracy of fingerprint recognition.
为了解决该技术问题,中国专利申请CN108022904A披露了一种指纹识别芯片的封装方法,其在晶圆朝向像素点的一侧固定具有通孔结构的盖板,用于避免串扰问题。其存在的问题至少包括:盖板上通孔需要预先形成,然后再将具有通孔的盖板结合在芯片表面,但是这样操作工艺时间长,而且还需要将通孔与像素点进行位置校准,容易产生误差;若盖板与芯片结合之后再进行制作通孔,盖板与芯片之间无任何阻挡,容易对位于通孔下方的像素点造成损害。In order to solve this technical problem, Chinese patent application CN108022904A discloses a method for packaging a fingerprint identification chip, which fixes a cover plate with a through-hole structure on the side of the wafer facing the pixels to avoid crosstalk problems. The existing problems include at least: the through holes on the cover plate need to be formed in advance, and then the cover plate with the through holes is bonded to the chip surface, but this takes a long time for the operation process, and it also requires the position of the through holes and the pixel points to be calibrated. Errors are easy to occur; if the through hole is made after the cover plate and the chip are combined, there is no obstruction between the cover plate and the chip, and it is easy to cause damage to the pixels located under the through hole.
另外,现有技术中的指纹识别芯片的封装结构为提高封装效率,通常采用晶圆级封装,晶圆级封装是直接在晶圆上进行大多数或是全部的封装测试程序,之后再进行切割(singulation)制成单颗组件。其存在的问题在于,当某个封装程序或部分封装位置出现缺陷后,整个封装结构则报废,成本高。In addition, the packaging structure of fingerprint recognition chips in the prior art generally uses wafer-level packaging to improve packaging efficiency. Wafer-level packaging is to directly perform most or all of the packaging and testing procedures on the wafer, and then perform dicing. (Singulation) is made into a single component. The problem is that when a certain packaging procedure or part of the packaging position is defective, the entire packaging structure is scrapped and the cost is high.
发明内容Summary of the invention
本发明一实施例提供一种指纹识别芯片的封装结构和方法,用于解决现有技术中加工成本高、像素点容易受到损害的技术问题,包括:An embodiment of the present invention provides a fingerprint recognition chip packaging structure and method, which are used to solve the technical problems of high processing cost and easy pixel damage in the prior art, including:
本申请实施例提供一种指纹识别芯片的封装结构,包括:The embodiment of the present application provides a packaging structure of a fingerprint identification chip, including:
第一透光层,具有相对的第一表面和第二表面;The first light-transmitting layer has a first surface and a second surface opposite to each other;
第一组件,粘贴于第一透光层的第一表面,第一组件包括指纹识别芯片,指纹识别芯片贴近第一透光层的表面具有多个用于采集指纹信息的像素点;The first component is pasted on the first surface of the first light-transmitting layer, the first component includes a fingerprint recognition chip, and the surface of the fingerprint recognition chip close to the first light-transmitting layer has a plurality of pixels for collecting fingerprint information;
第二组件,粘贴于第一透光层的第二表面,第二组件包括第一遮光层和第二透光层,第一遮光层形成于第二透光层和第一透光层之间,所述第一遮光层上形成有多个透光孔,每个所述透光孔分别对应于一个所述像素点。The second component is pasted on the second surface of the first light-transmitting layer. The second component includes a first light-shielding layer and a second light-transmitting layer. The first light-shielding layer is formed between the second light-transmitting layer and the first light-transmitting layer A plurality of light-transmitting holes are formed on the first light-shielding layer, and each of the light-transmitting holes corresponds to a pixel point.
优选的,在上述的指纹识别芯片的封装结构中,所述第一组件还包括形成于指纹识别芯片和第一透光层之间的滤光片。Preferably, in the above-mentioned fingerprint identification chip packaging structure, the first component further includes a light filter formed between the fingerprint identification chip and the first light-transmitting layer.
优选的,在上述的指纹识别芯片的封装结构中,滤光片粘贴于指纹识别芯片的表面。Preferably, in the above-mentioned packaging structure of the fingerprint identification chip, the filter is attached to the surface of the fingerprint identification chip.
优选的,在上述的指纹识别芯片的封装结构中,所述第二组件还包括形成于第二透光层表面的聚光透镜,聚光透镜和第一遮光层分别位于第二透光层相对的两个表面,Preferably, in the above-mentioned fingerprint recognition chip packaging structure, the second component further includes a condenser lens formed on the surface of the second light-transmitting layer, and the condenser lens and the first light-shielding layer are located opposite to the second light-transmitting layer. Two surfaces,
每一所述聚光透镜分别对应于一个所述透光孔。Each of the condenser lenses corresponds to one of the light-transmitting holes.
优选的,在上述的指纹识别芯片的封装结构中,所述第一遮光层材质为单晶硅、或多晶硅、或非晶硅、或锗化硅、或碳化硅。Preferably, in the above-mentioned fingerprint recognition chip packaging structure, the material of the first light shielding layer is monocrystalline silicon, or polycrystalline silicon, or amorphous silicon, or silicon germanium, or silicon carbide.
优选的,在上述的指纹识别芯片的封装结构中,所述第一透光层和第二透光层选自为干膜、无机玻璃或有机玻璃。Preferably, in the aforementioned fingerprint recognition chip packaging structure, the first light-transmitting layer and the second light-transmitting layer are selected from dry film, inorganic glass or organic glass.
优选的,在上述的指纹识别芯片的封装结构中,第二组件包括第二遮光层,所述第二遮光层和第一遮光层形成于第二透光层相对的两个表面,Preferably, in the above-mentioned fingerprint recognition chip packaging structure, the second component includes a second light-shielding layer, and the second light-shielding layer and the first light-shielding layer are formed on two opposite surfaces of the second light-transmitting layer,
所述第二遮光层上开设有多个窗口,每个窗口分别对应一个所述透光孔。A plurality of windows are opened on the second light-shielding layer, and each window corresponds to a light-transmitting hole.
本申请实施例还公开了一种指纹识别芯片的封装方法,包括:The embodiment of the application also discloses a packaging method of a fingerprint identification chip, which includes:
提供第一封装结构,该第一封装结构具有多个第一组件,对第一封装结构切割获得多个单颗的第一组件;Providing a first packaging structure, the first packaging structure having a plurality of first components, and cutting the first packaging structure to obtain a plurality of single first components;
提供第二封装结构,该第二封装结构具有多个第二组件,对第二封装结构切割获得多个单颗的第二组件;Providing a second packaging structure, the second packaging structure having a plurality of second components, and cutting the second packaging structure to obtain a plurality of single second components;
提供第一透光层,将单颗的第一组件和单颗的第二组件分别粘贴于第一透光层相对的两个表面。A first transparent layer is provided, and a single first component and a single second component are respectively pasted on two opposite surfaces of the first transparent layer.
优选的,在上述的指纹识别芯片的封装方法中,第一封装结构的制作方法包括:Preferably, in the packaging method of the fingerprint identification chip described above, the manufacturing method of the first packaging structure includes:
提供一晶圆,该晶圆具有多个指纹识别芯片;Provide a wafer with a plurality of fingerprint identification chips;
在指纹识别芯片具有像素点的一面制作滤光片。A filter is made on the side of the fingerprint recognition chip with pixels.
优选的,在上述的指纹识别芯片的封装方法中,第二封装结构的制作方法包括:Preferably, in the above-mentioned fingerprint identification chip packaging method, the manufacturing method of the second packaging structure includes:
以第二透光层作为支撑,在其一个表面制作第一遮光层;Using the second light-transmitting layer as a support, fabricating a first light-shielding layer on one surface thereof;
刻蚀所述第一遮光层,形成多个透光孔。The first light-shielding layer is etched to form a plurality of light-transmitting holes.
本申请实施例还公开了一种指纹识别芯片的封装方法,包括:The embodiment of the application also discloses a packaging method of a fingerprint identification chip, which includes:
提供晶圆级的第一封装结构,该第一封装结构具有多个第一组件;Providing a wafer-level first packaging structure, the first packaging structure having a plurality of first components;
提供晶圆级的第二封装结构,该第二封装结构具有多个第二组件,对第二封装结构切割获得多个单颗的第二组件;Provide a wafer-level second packaging structure, the second packaging structure having a plurality of second components, and cutting the second packaging structure to obtain a plurality of single second components;
提供第一透光层,将晶圆级的第一封装结构和单颗的第二组件分别粘贴于第一透光层相对的两个表面。A first light-transmitting layer is provided, and a wafer-level first packaging structure and a single second component are respectively pasted on two opposite surfaces of the first light-transmitting layer.
对第一封装结构切割获得多个单颗的封装结构。The first package structure is cut to obtain a plurality of single package structures.
与现有技术相比,本发明的有益效果至少包括:Compared with the prior art, the beneficial effects of the present invention include at least:
(1)、本发明形成的柱状体遮光体更好起到遮挡和吸收多余斜射光,使物体成型图像更清晰;(1) The cylindrical light-shielding body formed by the present invention better shields and absorbs excess oblique light, so that the image of the object is clearer;
(2)、本发明先制作两个晶圆级的重要部件,然后再将其互相贴合,降低加工难度,容易量产,成本低。(2) The present invention first manufactures two important wafer-level components, and then attaches them to each other, which reduces the processing difficulty, is easy to mass produce, and has low cost.
附图说明Description of the drawings
为了更清楚地说明本申请实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请中记载的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly describe the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments described in this application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative work.
图1是本申请实施方式1中封装结构的剖视图;FIG. 1 is a cross-sectional view of the package structure in Embodiment 1 of the present application;
图2至7是本申请实施方式1中封装结构所形成的中间结构的示意图;2 to 7 are schematic diagrams of intermediate structures formed by the package structure in Embodiment 1 of the present application;
图8是本申请实施方式2中封装结构所形成的中间结构的示意图。FIG. 8 is a schematic diagram of an intermediate structure formed by the package structure in Embodiment 2 of the present application.
具体实施方式Detailed ways
通过应连同所附图式一起阅读的以下具体实施方式将更完整地理解本发明。本文中揭示本发明的详细实施例;然而,应理解,所揭示的实施例仅具本发明的示范性,本发明可以各种形式来体现。因此,本文中所揭示的特定功能细节不应解释为具有限制性,而是仅解释为权利要求书的基础且解释为用于教示所属领域的技术人员在事实上任何适当详细实施例中以不同方式采用本发明的代表性基础。The present invention will be understood more completely through the following specific embodiments that should be read together with the accompanying drawings. Detailed embodiments of the present invention are disclosed herein; however, it should be understood that the disclosed embodiments are only exemplary of the present invention, and the present invention can be embodied in various forms. Therefore, the specific functional details disclosed herein should not be construed as restrictive, but merely construed as the basis of the claims and construed as teaching those skilled in the art to differ in any appropriate detailed embodiment. The method adopts the representative basis of the present invention.
本实施例提供了一种封装结构10,参考图1,封装结构10包括第一组件11、第一透光层12和第二组件13,第一组件11和第二组件13分别粘贴于第一透光层12相对的两个表面。This embodiment provides a packaging structure 10. Referring to FIG. 1, the packaging structure 10 includes a first component 11, a first light-transmitting layer 12, and a second component 13. The first component 11 and the second component 13 are attached to the first Two opposite surfaces of the light-transmitting layer 12.
第一组件11包括指纹识别芯片111,指纹识别芯片111具有相对的正面和背面,指纹识别芯片111的正面具有多个用于采集指纹信息的像素点1111。The first component 11 includes a fingerprint recognition chip 111. The fingerprint recognition chip 111 has opposite front and back sides. The front of the fingerprint recognition chip 111 has a plurality of pixels 1111 for collecting fingerprint information.
指纹识别芯片111的正面包括感应区以及包围感应区的非感应区。其中,像素点1111设置在感应区;非感应区设置有与像素点1111电连接的焊盘(图未示),焊盘用于与外部电路电连接。The front side of the fingerprint identification chip 111 includes a sensing area and a non-sensing area surrounding the sensing area. Among them, the pixel point 1111 is arranged in the sensing area; the non-sensing area is provided with a pad (not shown) electrically connected to the pixel point 1111, and the pad is used for electrically connecting with an external circuit.
一实施例中,指纹识别芯片111为光学型指纹识别芯片。In one embodiment, the fingerprint identification chip 111 is an optical fingerprint identification chip.
在一实施例中,第一组件11还包括滤光片112,滤光片112覆盖于指纹识别芯片111具有像素点的表面。In an embodiment, the first component 11 further includes a filter 112 that covers the surface of the fingerprint identification chip 111 with pixels.
滤光片112用于滤除检测光波段之外的杂光,以降低杂光干扰,提高指纹识别的精度。The filter 112 is used to filter out stray light outside the detection light waveband, so as to reduce the interference of stray light and improve the accuracy of fingerprint recognition.
滤光片112可以仅仅覆盖像素点1111对应的上方,也可以覆盖于指纹识别芯片111的整个表面。The filter 112 may only cover the upper portion corresponding to the pixel point 1111, or may cover the entire surface of the fingerprint identification chip 111.
第一透光层12覆盖指纹识别芯片111具有像素点1111的一侧,用于对待封装指纹识别芯片111的正面进行保护。由于需要光线透过第一透光层12到达像素点1111,因此,透光层12具有较高的透光性,为透光材料。透光层12两个表面均平整、光滑,不会对入射光线产生散射、漫反射等。The first light-transmitting layer 12 covers the side of the fingerprint identification chip 111 with the pixel points 1111, and is used to protect the front surface of the fingerprint identification chip 111 to be packaged. Since light is required to pass through the first light-transmitting layer 12 to reach the pixel points 1111, the light-transmitting layer 12 has a relatively high light-transmitting property and is a light-transmitting material. Both surfaces of the light-transmitting layer 12 are flat and smooth, and will not scatter or diffuse the incident light.
具体地,第一透光层12的材料可以为干膜、无机玻璃、有机玻璃或者其他具有特定强度的透光材料。Specifically, the material of the first light-transmitting layer 12 may be dry film, inorganic glass, organic glass, or other light-transmitting materials with specific strength.
本实施例中,综合考虑第一透光层12的光学性能和粘粘性能,第一透光层12的厚度优选为5-20μm。In this embodiment, considering the optical properties and adhesion properties of the first light-transmitting layer 12, the thickness of the first light-transmitting layer 12 is preferably 5-20 μm.
第二组件13包括遮光层131和第二透光层132,遮光层131形成于第二透光层132和第一透光层12之间。The second component 13 includes a light-shielding layer 131 and a second light-transmitting layer 132, and the light-shielding layer 131 is formed between the second light-transmitting layer 132 and the first light-transmitting layer 12.
遮光层131上开设有上下相通的多个透光孔1311,每个透光孔1311分别对应一个像素点1111,在优选的实施例中,透光孔1311的轴线与像素点1111的中心重合。The light-shielding layer 131 is provided with a plurality of light-transmitting holes 1311 communicating up and down. Each light-transmitting hole 1311 corresponds to a pixel 1111. In a preferred embodiment, the axis of the light-transmitting hole 1311 coincides with the center of the pixel 1111.
遮光层131具有较低的介电常数,遮光层131材质优选为硅材料,可以为单晶硅、或多晶硅、或非晶硅、或锗化硅、或碳化硅。遮光层131可以通过物理沉积方式形成于第二透光层132表面。The light-shielding layer 131 has a relatively low dielectric constant. The material of the light-shielding layer 131 is preferably a silicon material, which can be monocrystalline silicon, or polycrystalline silicon, or amorphous silicon, or silicon germanium, or silicon carbide. The light-shielding layer 131 may be formed on the surface of the second light-transmitting layer 132 by physical deposition.
遮光层131的厚度优选为4-20μm,透光孔的尺寸可以根据需要调整,比如透光孔为圆形孔时,其口径可以为30μm,深宽比可以为1:1。The thickness of the light-shielding layer 131 is preferably 4-20 μm, and the size of the light-transmitting hole can be adjusted according to needs. For example, when the light-transmitting hole is a circular hole, the aperture may be 30 μm, and the aspect ratio may be 1:1.
遮光层131采用硅材料,一方面能够降低邻像素点1111之间的串扰问题。另一方面,硅材料制作的遮光层131的莫氏硬度一般在10以上,硬度较高,机械强度大,手指按压时,不会产生厚度形变,不会影响指纹识别的准确性。The light shielding layer 131 is made of silicon material, which can reduce the crosstalk problem between adjacent pixels 1111 on the one hand. On the other hand, the light-shielding layer 131 made of silicon material generally has a Mohs hardness above 10, which has a high hardness and high mechanical strength. When pressed by a finger, it will not produce thickness deformation and will not affect the accuracy of fingerprint recognition.
在垂直于指纹识别芯片111的正面的方向上,透光孔1311在正面的投影至少与对应的像素点1111在正面的投影部分交叠。为了保证指纹识别的准确性,可以设置透光孔1311在正面的投影完全覆盖对应的像素点1111在正面的投影。最优的,可以设置透光孔1311在正面的投影与对应的像素点1111在正面的投影完全重合。In the direction perpendicular to the front surface of the fingerprint identification chip 111, the projection of the light-transmitting hole 1311 on the front surface at least overlaps with the projection of the corresponding pixel point 1111 on the front surface. In order to ensure the accuracy of fingerprint recognition, the projection of the transparent hole 1311 on the front can be set to completely cover the projection of the corresponding pixel 1111 on the front. Optimally, the projection of the transparent hole 1311 on the front side can be set to completely coincide with the projection of the corresponding pixel point 1111 on the front side.
如果指纹识别芯片111为电容型的指纹识别芯片,进行指纹识别时,像素点1111检测电容值,将电容值转换为电信号,外部电路根据该电信号可以获取指纹信息,进行身份识别,透光孔1311用于露出所述像素点,遮光层131具有较低的介电常数,可以降低相邻像素点之间的串扰问题,提高了指纹识别的准确性。If the fingerprint recognition chip 111 is a capacitive fingerprint recognition chip, when fingerprint recognition is performed, the pixel point 1111 detects the capacitance value and converts the capacitance value into an electrical signal. The external circuit can obtain fingerprint information based on the electrical signal, perform identity recognition, and transmit light. The holes 1311 are used to expose the pixels, and the light-shielding layer 131 has a lower dielectric constant, which can reduce the problem of crosstalk between adjacent pixels and improve the accuracy of fingerprint recognition.
如果指纹识别芯片111为光学型的指纹识别芯片,进行指纹识别时,像素点1111通过对应的透光孔1311采集与所述透光孔1311相对的采集预设区 域的指纹信息。由于每个像素点1111均通过对应透光孔1311采集自身相对的采集区域的指纹信息,避免了不同像素点对应预设区域之间的相互串扰,进而避免了指纹图像的失真,进一步提高了指纹识别的准确性。If the fingerprint identification chip 111 is an optical fingerprint identification chip, when fingerprint identification is performed, the pixel point 1111 collects the fingerprint information of the preset area opposite to the transparent hole 1311 through the corresponding transparent hole 1311. Since each pixel 1111 collects the fingerprint information of its own relative collection area through the corresponding light-transmitting hole 1311, the mutual crosstalk between the preset areas corresponding to different pixels is avoided, thereby avoiding the distortion of the fingerprint image, and further improving the fingerprint Accuracy of recognition.
透光孔1311的形状可以为圆形通孔或者方形通孔或者三角形通孔。具体的,可以设置透光孔1311的形状为顶部与底部相同的圆孔、或顶部与底部相同的方孔、或顶部与底部相同的三角孔、或是其他结构的顶部与底部相同的多边形。透光孔1311的底部为透光孔1311靠近像素点1111的开口,透光孔1311的顶部为透光孔1311远离像素点1111的开口。The shape of the light transmission hole 1311 may be a circular through hole, a square through hole or a triangular through hole. Specifically, the shape of the transparent hole 1311 may be a circular hole with the same top and bottom, or a square hole with the same top and bottom, or a triangular hole with the same top and bottom, or a polygon with the same top and bottom of other structures. The bottom of the light transmission hole 1311 is an opening of the light transmission hole 1311 close to the pixel point 1111, and the top of the light transmission hole 1311 is an opening of the light transmission hole 1311 away from the pixel point 1111.
易于想到的是,也可以设置透光孔1311的形状为顶部与底部不相同的圆孔、或顶部与底部不相同的方孔、或顶部与底部不相同的三角孔、或是其他结构的顶部与底部不相同的多边形。此时,透光孔1311的顶部大于透光孔1311的底部。同样,透光孔1311的底部为透光孔1311靠近像素点1111的开口,透光孔1311的顶部为透光孔1311远离像素点1111的开口。It is easy to think that the shape of the light-transmitting hole 1311 can also be a round hole with a different top and bottom, a square hole with a different top and bottom, or a triangular hole with a different top and bottom, or the top of other structures. A polygon that is not the same as the bottom. At this time, the top of the light-transmitting hole 1311 is larger than the bottom of the light-transmitting hole 1311. Similarly, the bottom of the light transmission hole 1311 is the opening of the light transmission hole 1311 close to the pixel point 1111, and the top of the light transmission hole 1311 is the opening of the light transmission hole 1311 away from the pixel point 1111.
在一实施例中,遮光层131与第一透光层12之间通过DAF膜粘结固定。In one embodiment, the light-shielding layer 131 and the first light-transmitting layer 12 are bonded and fixed by a DAF film.
第二透光层132覆盖遮光层131背离指纹识别芯片111的一面,用于对透光孔1311的开口进行遮挡。由于需要光线透过第二透光层132到达像素点1111,因此,第二透光层132具有较高的透光性,为透光材料。第二透光层132两个表面均平整、光滑,不会对入射光线产生散射、漫反射等。The second light-transmitting layer 132 covers the side of the light-shielding layer 131 facing away from the fingerprint identification chip 111, and is used for shielding the opening of the light-transmitting hole 1311. Since light needs to pass through the second light-transmitting layer 132 to reach the pixel points 1111, the second light-transmitting layer 132 has a relatively high light-transmitting property and is a light-transmitting material. Both surfaces of the second light-transmitting layer 132 are flat and smooth, and will not scatter or diffuse the incident light.
具体地,第二透光层132的材料可以为干膜、无机玻璃、有机玻璃或者其他具有特定强度的透光材料。Specifically, the material of the second light-transmitting layer 132 may be dry film, inorganic glass, organic glass, or other light-transmitting materials with specific strength.
本实施例中,第二透光层132的厚度优选为10-40微米。In this embodiment, the thickness of the second light-transmitting layer 132 is preferably 10-40 microns.
在一实施例中,第二透光层132与遮光层131之间通过黏胶进行固定。In one embodiment, the second light-transmitting layer 132 and the light-shielding layer 131 are fixed by glue.
第二组件13还包括聚光透镜133,聚光透镜133设置于第二透光层132背离指纹识别芯片111的一侧,每个聚光透镜133分别对应一个透光孔1311,聚光透镜133用以将外部光线汇聚至对应像素点1111表面。The second assembly 13 also includes a condenser lens 133, which is arranged on the side of the second light-transmitting layer 132 away from the fingerprint identification chip 111, each condenser lens 133 corresponds to a light-transmitting hole 1311, and the condenser lens 133 It is used to converge the external light to the surface of the corresponding pixel 1111.
一实施例中,聚光透镜133可以通过光刻和烘烤成型方式制作,另一实施例中,聚光透镜133也可以采用压印方式形成于第二透光层132表面。In one embodiment, the condensing lens 133 can be manufactured by photolithography and baking molding. In another embodiment, the condensing lens 133 can also be formed on the surface of the second light-transmitting layer 132 by embossing.
第二组件还包括遮光层134,遮光层134和遮光层131形成于第二透光层相对的两个表面,第二遮光层134上开设有多个窗口,每个窗口分别对应一个所述透光孔。聚光透镜133对应设置在所述窗口内。The second component further includes a light-shielding layer 134. The light-shielding layer 134 and the light-shielding layer 131 are formed on two opposite surfaces of the second light-transmitting layer. Light hole. The condenser lens 133 is correspondingly arranged in the window.
遮光层134形成于聚光透镜133之间,从而可以遮光聚光透镜四周光的干扰,优化成像效果。The light shielding layer 134 is formed between the condenser lenses 133, so as to shield light interference from the surrounding light of the condenser lenses and optimize the imaging effect.
本实施例中,遮光层134的材料为黑色光敏有机材料或者经过黑化处理的金属,具有不透光或者低透光的特性。例如,所述遮光层134可以为黑胶;所述遮光层134还可以为经过黑化处理的铝,使得光线在其表面不能形成镜面反射,遮光性能好。In this embodiment, the material of the light shielding layer 134 is a black photosensitive organic material or a metal that has undergone a blackening treatment, which has the characteristics of opacity or low light transmission. For example, the light-shielding layer 134 may be vinyl; the light-shielding layer 134 may also be blackened aluminum, so that the light cannot be specularly reflected on its surface, and the light-shielding performance is good.
对应地,本发明实施例提供了一种封装方法,用于形成如图1所示的封装结构。Correspondingly, the embodiment of the present invention provides a packaging method for forming the packaging structure as shown in FIG. 1.
请参考图2至图7,为本发明第一实施例的封装方法的封装过程中形成的中间结构示意图。Please refer to FIGS. 2 to 7, which are schematic diagrams of intermediate structures formed in the packaging process of the packaging method according to the first embodiment of the present invention.
步骤s1:制作晶圆级的第一封装结构。Step s1: Fabricate a first packaging structure at the wafer level.
参考图2和3,提供待封装晶圆100,其中,图2为待封装晶圆100的俯视结构示意图,图3为图2沿A-A的剖视图。2 and 3, a wafer to be packaged 100 is provided, wherein FIG. 2 is a schematic top view of the structure of the wafer to be packaged 100, and FIG. 3 is a cross-sectional view along A-A in FIG. 2.
待封装晶圆100具有正面和与正面相对的背面。晶圆100包括多个阵列排布的指纹识别芯片111。每个相邻指纹识别芯片111具有多个用于采集指纹信息的像素点1111。像素点1111位于正面。相邻指纹识别芯片111之间具有切割沟道120,以便于在后续切割工艺中进行切割处理。The wafer 100 to be packaged has a front surface and a back surface opposite to the front surface. The wafer 100 includes a plurality of fingerprint recognition chips 111 arranged in an array. Each adjacent fingerprint identification chip 111 has a plurality of pixels 1111 for collecting fingerprint information. The pixel 1111 is located on the front side. There is a cutting channel 120 between adjacent fingerprint identification chips 111 to facilitate the cutting process in the subsequent cutting process.
需要说明的是,相邻两个指纹识别芯片111之间的切割沟道120仅为两个指纹识别芯片111之间预留的用于切割的留白区域,切割沟道120与两侧的指纹识别芯片111之间不具有实际的边界线。It should be noted that the cutting channel 120 between two adjacent fingerprint identification chips 111 is only a blank area reserved between the two fingerprint identification chips 111 for cutting, and the cutting channel 120 is connected to the fingerprints on both sides. There is no actual boundary line between the identification chips 111.
参考图4,在待封装晶圆100的正面上覆盖滤光片112,滤光片112覆盖于指纹识别芯片111的整个表面,获得第一封装结构。Referring to FIG. 4, a filter 112 is covered on the front surface of the wafer 100 to be packaged, and the filter 112 covers the entire surface of the fingerprint identification chip 111 to obtain a first packaging structure.
步骤s2:制作单颗的第一组件11。Step s2: manufacturing a single first component 11.
沿切割沟道120对第一封装结构切割获得多个单颗的第一组件11。切割可以采用切片刀切割或者激光切割,切片刀切割可以采用金属刀或者树脂刀。The first package structure is cut along the cutting channel 120 to obtain a plurality of single first components 11. The cutting can be cut with a slicing knife or laser cutting, and the slicing knife can be cut with a metal knife or a resin knife.
步骤s3:制作晶圆级的第二封装结构。Step s3: Fabricate a second packaging structure at the wafer level.
参考图5,在遮光层131上开设上下相通的多个透光孔1311,然后将遮光层131粘贴在第二透光层132的表面。Referring to FIG. 5, a plurality of light-transmitting holes 1311 communicating up and down are opened on the light-shielding layer 131, and then the light-shielding layer 131 is pasted on the surface of the second light-transmitting layer 132.
参考图6,将遮光层134形成在第二透光层132的另一层表面,并在遮光层134上对应透光孔制作多个窗口。Referring to FIG. 6, the light shielding layer 134 is formed on another surface of the second light transmitting layer 132, and a plurality of windows are formed on the light shielding layer 134 corresponding to the light transmitting holes.
然后对应窗口安装聚光透镜133,每个聚光透镜133分别对应一个透光孔1311,从而获得第二封装结构。Then, a condenser lens 133 is installed corresponding to the window, and each condenser lens 133 corresponds to a light transmission hole 1311, thereby obtaining a second packaging structure.
需要注意的是,本实施例中遮光层134和聚光透镜133的制作顺序并不限制,遮光层131和遮光层134的制作顺序本实施例也并不限制。It should be noted that the manufacturing sequence of the light shielding layer 134 and the condenser lens 133 in this embodiment is not limited, and the manufacturing sequence of the light shielding layer 131 and the light shielding layer 134 is also not limited in this embodiment.
步骤s4:制作单颗的第二组件。Step s4: making a single second component.
通过切割工艺,对应沿切割沟道120分割第二封装结构,获得单颗的第二组件13。切割可以采用切片刀切割或者激光切割,切片刀切割可以采用金属刀或者树脂刀。Through the cutting process, the second package structure is divided correspondingly along the cutting trench 120 to obtain a single second component 13. The cutting can be cut with a slicing knife or laser cutting, and the slicing knife can be cut with a metal knife or a resin knife.
步骤s5:参考图7,筛选测试合格的第一组件和第二组件,将单颗的第一组件和第二组件分别粘贴于第一透光层相对的两个表面。Step s5: referring to FIG. 7, screening the first component and the second component that have passed the test, and sticking the single first component and the second component on the two opposite surfaces of the first light-transmitting layer, respectively.
粘贴可以通过喷涂、旋涂或者黏贴的工艺形成粘合层,再将第一组件、第二组件和第一透光层相对压合,通过粘合层结合。粘合层既可以实现粘接作用,又可以起到绝缘和密封作用。粘合层可以为高分子粘接材料,例如硅胶、环氧树脂、苯并环丁烯等聚合物材料。The pasting can be sprayed, spin-coated or pasted to form an adhesive layer, and then the first component, the second component and the first light-transmitting layer are relatively pressed together, and the adhesive layer is combined. The adhesive layer can not only achieve the bonding effect, but also play the role of insulation and sealing. The adhesive layer may be a polymer adhesive material, such as polymer materials such as silica gel, epoxy resin, and benzocyclobutene.
在整个封装工艺中,还可以包括晶圆减薄、焊垫制作、布线层制作等工序,本案不再赘述。In the entire packaging process, it can also include wafer thinning, solder pad production, wiring layer production and other processes, which will not be repeated in this case.
另外,对待封装晶圆进行封装处理后,可以使得后续切割获得的芯片封装结构通过外接凸起(图未示)与外部电路连接。In addition, after the wafer to be packaged is packaged, the chip package structure obtained by subsequent cutting can be connected to an external circuit through external bumps (not shown).
请参考8,为本发明第二实施例的封装方法的封装过程中形成的中间结构示意图。Please refer to 8, which is a schematic diagram of an intermediate structure formed in the packaging process of the packaging method of the second embodiment of the present invention.
与第一实施例不同的是,在切割完成单颗的第二组件13后,第二组件先通过第一透光层12贴合在晶圆级的第一封装结构上;然后再切割第一封装结构,获得单颗第一组件和单颗第二组件结合的封装结构。The difference from the first embodiment is that after the single second component 13 is cut, the second component is first bonded to the first package structure at the wafer level through the first light-transmitting layer 12; and then the first package structure is cut. The packaging structure obtains a packaging structure in which a single first component and a single second component are combined.
在第三实施例的封装方法中,相较于实施例一,先将待封装晶圆100切割成多个单元,然后在每个单元表面镀上滤光片112,形成单颗的第一组件11。在第四实施例的封装方法中,可以先制作晶圆级的第一封装结构和晶圆级的第二封装结构,然后将晶圆级的第一封装结构和晶圆级的第二封装结构分别贴于第一透光层相对的两个表面,最后切割获得单颗的封装结构。In the packaging method of the third embodiment, compared with the first embodiment, the wafer 100 to be packaged is first cut into a plurality of units, and then a filter 112 is plated on the surface of each unit to form a single first component 11. In the packaging method of the fourth embodiment, the first packaging structure at the wafer level and the second packaging structure at the wafer level may be manufactured first, and then the first packaging structure at the wafer level and the second packaging structure at the wafer level may be combined They are respectively pasted on the two opposite surfaces of the first light-transmitting layer, and finally cut to obtain a single package structure.
本发明的各方面、实施例、特征及实例应视为在所有方面为说明性的且不打算限制本发明,本发明的范围仅由权利要求书界定。在不背离所主张的本发明的精神及范围的情况下,所属领域的技术人员将明了其它实施例、修改及使用。The aspects, embodiments, features, and examples of the present invention should be regarded as illustrative in all aspects and are not intended to limit the present invention. The scope of the present invention is only defined by the claims. Without departing from the spirit and scope of the claimed invention, those skilled in the art will understand other embodiments, modifications, and uses.
在本申请案中标题及章节的使用不意味着限制本发明;每一章节可应用于本发明的任何方面、实施例或特征。The use of titles and chapters in this application is not meant to limit the invention; each chapter can be applied to any aspect, embodiment or feature of the invention.
在本申请案通篇中,在将组合物描述为具有、包含或包括特定组份之处或者在将过程描述为具有、包含或包括特定过程步骤之处,预期本发明教示的组合物也基本上由所叙述组份组成或由所叙述组份组成,且本发明教示的过程也基本上由所叙述过程步骤组成或由所叙述过程步骤组组成。Throughout this application, where a composition is described as having, containing, or including specific components, or where a process is described as having, containing, or including specific process steps, it is expected that the composition taught by the present invention is also basically The above is composed of or composed of the described components, and the process taught by the present invention is basically composed of the described process steps or a set of described process steps.
在本申请案中,在将元件或组件称为包含于及/或选自所叙述元件或组件列表之处,应理解,所述元件或组件可为所叙述元件或组件中的任一者且可选自由所叙述元件或组件中的两者或两者以上组成的群组。此外,应理解,在不背离本发明教示的精神及范围的情况下,本文中所描述的组合物、设备或方法的元件及/或特征可以各种方式组合而无论本文中是明确说明还是隐含说明。In this application, where an element or component is referred to as being included in and/or selected from the list of recited elements or components, it should be understood that the element or component can be any of the recited elements or components and It can be selected from a group consisting of two or more of the described elements or components. In addition, it should be understood that, without departing from the spirit and scope of the teachings of the present invention, the elements and/or features of the compositions, devices or methods described herein can be combined in various ways, regardless of whether they are explicitly stated or implied herein. With instructions.
除非另外具体陈述,否则术语“包含(include、includes、including)”、“具有(have、has或having)”的使用通常应理解为开放式的且不具限制性。Unless specifically stated otherwise, the use of the terms "include, includes, including" and "have, has, or having" should generally be understood as open-ended and not restrictive.
除非另外具体陈述,否则本文中单数的使用包含复数(且反之亦然)。此外,除非上下文另外清楚地规定,否则单数形式“一(a、an)”及“所述(the)”包含复数形式。另外,在术语“约”的使用在量值之前之处,除非另外具体陈述,否则本发明教示还包括特定量值本身。Unless specifically stated otherwise, the use of the singular number herein includes the plural number (and vice versa). In addition, unless the context clearly dictates otherwise, the singular forms "a, an" and "the" include plural forms. In addition, where the term "about" is used before a quantity, unless specifically stated otherwise, the teachings of the present invention also include the specific quantity itself.
应理解,各步骤的次序或执行特定动作的次序并非十分重要,只要本发明教示保持可操作即可。此外,可同时进行两个或两个以上步骤或动作。It should be understood that the order of the steps or the order of performing a particular action is not very important, as long as the teachings of the present invention remain operable. In addition, two or more steps or actions can be performed simultaneously.
应理解,本发明的各图及说明已经简化以说明与对本发明的清楚理解有关的元件,而出于清晰性目的消除其它元件。然而,所属领域的技术人员将认识到,这些及其它元件可为合意的。然而,由于此类元件为此项技术中众所周知的,且由于其不促进对本发明的更好理解,因此本文中不提供对此类元件的论述。应了解,各图是出于图解说明性目的而呈现且不作为构造图式。所省略细节及修改或替代实施例在所属领域的技术人员的范围内。It should be understood that the drawings and descriptions of the present invention have been simplified to illustrate elements related to a clear understanding of the present invention, while other elements are eliminated for clarity. However, those skilled in the art will recognize that these and other elements may be desirable. However, since such elements are well known in the art and since they do not promote a better understanding of the present invention, no discussion of such elements is provided herein. It should be understood that the figures are presented for illustrative purposes and not as construction drawings. The omitted details and modified or alternative embodiments are within the scope of those skilled in the art.
可了解,在本发明的特定方面中,可由多个组件替换单个组件且可由单个组件替换多个组件以提供一元件或结构或者执行一或若干给定功能。除了 在此替代将不操作以实践本发明的特定实施例之处以外,将此替代视为在本发明的范围内。It can be understood that, in certain aspects of the present invention, a single component may be replaced by multiple components and multiple components may be replaced by a single component to provide an element or structure or perform one or several given functions. This substitution is considered to be within the scope of the present invention, except where it will not operate to practice the specific embodiments of the present invention.
尽管已参考说明性实施例描述了本发明,但所属领域的技术人员将理解,在不背离本发明的精神及范围的情况下可做出各种其它改变、省略及/或添加且可用实质等效物替代所述实施例的元件。另外,可在不背离本发明的范围的情况下做出许多修改以使特定情形或材料适应本发明的教示。因此,本文并不打算将本发明限制于用于执行本发明的所揭示特定实施例,而是打算使本发明将包含归属于所附权利要求书的范围内的所有实施例。此外,除非具体陈述,否则术语第一、第二等的任何使用不表示任何次序或重要性,而是使用术语第一、第二等来区分一个元素与另一元素。Although the present invention has been described with reference to illustrative embodiments, those skilled in the art will understand that various other changes, omissions and/or additions can be made without departing from the spirit and scope of the invention, and the essence, etc. The effector replaces the elements of the described embodiment. In addition, many modifications may be made to adapt specific situations or materials to the teachings of the present invention without departing from the scope of the present invention. Therefore, this document does not intend to limit the present invention to the specific embodiments disclosed for implementing the present invention, but intends that the present invention will include all embodiments falling within the scope of the appended claims. In addition, unless specifically stated otherwise, any use of the terms first, second, etc. does not denote any order or importance, but rather uses the terms first, second, etc. to distinguish one element from another.

Claims (10)

  1. 一种指纹识别芯片的封装结构,其特征在于,包括:A packaging structure of a fingerprint identification chip, which is characterized in that it comprises:
    第一透光层,具有相对的第一表面和第二表面;The first light-transmitting layer has a first surface and a second surface opposite to each other;
    第一组件,粘贴于第一透光层的第一表面,第一组件包括指纹识别芯片,指纹识别芯片贴近第一透光层的表面具有多个用于采集指纹信息的像素点;The first component is pasted on the first surface of the first light-transmitting layer, the first component includes a fingerprint recognition chip, and the surface of the fingerprint recognition chip close to the first light-transmitting layer has a plurality of pixels for collecting fingerprint information;
    第二组件,粘贴于第一透光层的第二表面,第二组件包括第一遮光层和第二透光层,第一遮光层形成于第二透光层和第一透光层之间,所述第一遮光层上形成有多个透光孔,每个所述透光孔分别对应于一个所述像素点。The second component is pasted on the second surface of the first light-transmitting layer. The second component includes a first light-shielding layer and a second light-transmitting layer. The first light-shielding layer is formed between the second light-transmitting layer and the first light-transmitting layer A plurality of light-transmitting holes are formed on the first light-shielding layer, and each of the light-transmitting holes corresponds to a pixel point.
  2. 根据权利要求1所述的指纹识别芯片的封装结构,其特征在于,所述第一组件还包括形成于指纹识别芯片和第一透光层之间的滤光片。The fingerprint identification chip packaging structure according to claim 1, wherein the first component further comprises a filter formed between the fingerprint identification chip and the first light-transmitting layer.
  3. 根据权利要求1所述的指纹识别芯片的封装结构,其特征在于,滤光片粘贴于指纹识别芯片的表面。The fingerprint identification chip packaging structure according to claim 1, wherein the filter is attached to the surface of the fingerprint identification chip.
  4. 根据权利要求1所述的指纹识别芯片的封装结构,其特征在于,所述第二组件还包括形成于第二透光层表面的聚光透镜,聚光透镜和第一遮光层分别位于第二透光层相对的两个表面,The fingerprint identification chip packaging structure according to claim 1, wherein the second component further comprises a condenser lens formed on the surface of the second light-transmitting layer, and the condenser lens and the first light-shielding layer are respectively located in the second light-shielding layer. The two opposite surfaces of the light-transmitting layer,
    每一所述聚光透镜分别对应于一个所述透光孔。Each of the condenser lenses corresponds to one of the light-transmitting holes.
  5. 根据权利要求1所述的指纹识别芯片的封装结构,其特征在于,所述第一遮光层材质为单晶硅、或多晶硅、或非晶硅、或锗化硅、或碳化硅。The fingerprint recognition chip packaging structure according to claim 1, wherein the first light shielding layer is made of monocrystalline silicon, or polycrystalline silicon, or amorphous silicon, or silicon germanium, or silicon carbide.
  6. 根据权利要求1所述的指纹识别芯片的封装结构,其特征在于,所述第一透光层和第二透光层选自为干膜、无机玻璃或有机玻璃。The fingerprint identification chip packaging structure according to claim 1, wherein the first light-transmitting layer and the second light-transmitting layer are selected from dry film, inorganic glass, or organic glass.
  7. 根据权利要求1所述的指纹识别芯片的封装结构,其特征在于,第二组件包括第二遮光层,所述第二遮光层和第一遮光层形成于第二透光层相对的两个表面,The fingerprint recognition chip packaging structure according to claim 1, wherein the second component comprises a second light-shielding layer, and the second light-shielding layer and the first light-shielding layer are formed on two opposite surfaces of the second light-transmitting layer ,
    所述第二遮光层上开设有多个窗口,每个窗口分别对应一个所述透光孔。A plurality of windows are opened on the second light-shielding layer, and each window corresponds to a light-transmitting hole.
  8. 权利要求1至7任一所述指纹识别芯片的封装方法,其特征在于,包括:The packaging method of the fingerprint identification chip according to any one of claims 1 to 7, characterized in that it comprises:
    提供晶圆级的第一封装结构,该第一封装结构具有多个第一组件,对第一封装结构切割获得多个单颗的第一组件;Provide a wafer-level first packaging structure, the first packaging structure having a plurality of first components, and cutting the first packaging structure to obtain a plurality of single first components;
    提供晶圆级的第二封装结构,该第二封装结构具有多个第二组件,对第二封装结构切割获得多个单颗的第二组件;Provide a wafer-level second packaging structure, the second packaging structure having a plurality of second components, and cutting the second packaging structure to obtain a plurality of single second components;
    提供第一透光层,将单颗的第一组件和单颗的第二组件分别粘贴于第一透光层相对的两个表面。A first transparent layer is provided, and a single first component and a single second component are respectively pasted on two opposite surfaces of the first transparent layer.
  9. 根据权利要求8所述的指纹识别芯片的封装方法,第二封装结构的制作方法包括:According to the packaging method of the fingerprint identification chip according to claim 8, the manufacturing method of the second packaging structure comprises:
    制作具有多个透光孔的第一遮光层;Fabricating a first light-shielding layer with a plurality of light-transmitting holes;
    将第一遮光层结合在第二透光层的一个表面第一遮光层第一遮光层。The first light-shielding layer is combined with one surface of the second light-transmitting layer, the first light-shielding layer and the first light-shielding layer.
  10. 权利要求1至7任一所述指纹识别芯片的封装方法,其特征在于,包括:The packaging method of the fingerprint identification chip according to any one of claims 1 to 7, characterized in that it comprises:
    提供晶圆级的第一封装结构,该第一封装结构具有多个第一组件;Providing a wafer-level first packaging structure, the first packaging structure having a plurality of first components;
    提供晶圆级的第二封装结构,该第二封装结构具有多个第二组件,对第二 封装结构切割获得多个单颗的第二组件;Providing a wafer-level second packaging structure, the second packaging structure having a plurality of second components, and cutting the second packaging structure to obtain a plurality of single second components;
    提供第一透光层,将晶圆级的第一封装结构和单颗的第二组件分别粘贴于第一透光层相对的两个表面。A first light-transmitting layer is provided, and a wafer-level first packaging structure and a single second component are respectively pasted on two opposite surfaces of the first light-transmitting layer.
    对第一封装结构切割获得多个单颗的封装结构。The first package structure is cut to obtain a plurality of single package structures.
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