WO2021176894A1 - 表示装置及び表示装置の製造方法、並びに、電子機器 - Google Patents

表示装置及び表示装置の製造方法、並びに、電子機器 Download PDF

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Publication number
WO2021176894A1
WO2021176894A1 PCT/JP2021/002763 JP2021002763W WO2021176894A1 WO 2021176894 A1 WO2021176894 A1 WO 2021176894A1 JP 2021002763 W JP2021002763 W JP 2021002763W WO 2021176894 A1 WO2021176894 A1 WO 2021176894A1
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Prior art keywords
display device
cathode
layer
cathode electrode
contact hole
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PCT/JP2021/002763
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English (en)
French (fr)
Japanese (ja)
Inventor
加藤　孝義
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Sony Group Corp
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Sony Group Corp
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Priority to CN202180016842.4A priority Critical patent/CN115136738A/zh
Priority to US17/802,440 priority patent/US12543476B2/en
Priority to JP2022505030A priority patent/JP7578133B2/ja
Publication of WO2021176894A1 publication Critical patent/WO2021176894A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8052—Cathodes
    • H10K59/80523—Multilayers, e.g. opaque multilayers
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional [2D] radiating surfaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional [2D] radiating surfaces
    • H05B33/26—Light sources with substantially two-dimensional [2D] radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals
    • H10K59/1315—Interconnections, e.g. wiring lines or terminals comprising structures specially adapted for lowering the resistance
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment

Definitions

  • This disclosure relates to a display device, a manufacturing method of the display device, and an electronic device.
  • flat panel type (flat type) display devices are the mainstream.
  • a display device using a so-called current-driven electro-optical element whose emission brightness changes according to the current value flowing through the device as a light emitting part (light emitting element) of a pixel.
  • an organic electroluminescence element EL: Electroluminescence
  • an organic electroluminescence element hereinafter, simply, “ (Sometimes abbreviated as "organic EL element" is known.
  • An organic electroluminescence display device (hereinafter, may be simply abbreviated as "organic EL display device") using an organic EL element as a light emitting unit of a pixel generally has a circuit unit for driving the organic EL element on a substrate.
  • An insulating film (interlayer film) is provided so as to cover the circuit portion, and organic EL elements are arranged and formed on the insulating film.
  • a cathode electrode is formed on the organic EL element as an upper electrode as an electrode common to all pixels. A predetermined potential is applied to the cathode electrode.
  • a contact electrode to which a predetermined potential is applied is provided on the outer peripheral portion of the effective pixel region, and the cathode electrode is electrically connected to the contact electrode.
  • a contact electrode is provided on the outer peripheral portion of the effective pixel region and the contact electrode is electrically connected to the cathode electrode as in the prior art described in Patent Document 1, it is provided in common for all pixels.
  • the sheet resistance of the cathode electrode to be used may increase due to various factors. When the sheet resistance of the cathode electrode increases, the larger the angle of view and the more current is tried to flow, the more the brightness decreases at the center of the effective pixel region.
  • An object of the present disclosure is to provide a display device and a method for manufacturing a display device capable of reducing the sheet resistance of the cathode electrode, and an electronic device having the display device.
  • the display device of the present disclosure for achieving the above object is Light emitting part, A multi-layered cathode electrode in which two or more layers are laminated on the light emitting portion with a protective film interposed therebetween and electrically connected to each other, and Potential supply wiring that gives a predetermined potential to the multilayer cathode electrodes, With The second or higher-layer cathode electrodes of the multilayer cathode electrodes are electrically connected to the potential supply wiring at the bottom of the first contact hole.
  • a protective film is formed on the cathode electrode of the first layer to which a predetermined potential is applied.
  • the protective film is formed with a first contact hole leading to the contact electrode to which a predetermined potential is applied.
  • the bottom of the first contact hole is electrically connected to the contact electrode, and the side wall of the first contact hole is electrically connected to the first layer of the cathode electrode to form a second or more layer of cathode electrode. do.
  • the electronic devices of the present disclosure for achieving the above objectives are Light emitting part, A multi-layered cathode electrode in which two or more layers are laminated on the light emitting portion with a protective film interposed therebetween and electrically connected to each other, and Potential supply wiring that gives a predetermined potential to the multilayer cathode electrodes, With Of the multilayer cathode electrodes, the second and higher cathode electrodes are electrically connected to the potential supply wiring through the first contact hole. It has a display device.
  • FIG. 1 is a system configuration diagram showing an outline of the configuration of an organic EL display device which is an example of a display device to which the technique of the present disclosure is applied.
  • FIG. 2 is a circuit diagram showing an example of a circuit configuration of pixels (pixel circuits) in an organic EL display device.
  • FIG. 3A is a plan view showing a plan structure of a display panel according to a conventional example, and FIG. 3B is a cross-sectional view taken along the line AA of FIG. 3A.
  • FIG. 4 is an end view of a cut portion showing the panel structure of the display device according to the first embodiment.
  • FIG. 5 is a cross-sectional view showing a cross-sectional structure of a panel structure composed of red, green, and blue organic EL elements.
  • FIG. 1 is a system configuration diagram showing an outline of the configuration of an organic EL display device which is an example of a display device to which the technique of the present disclosure is applied.
  • FIG. 2 is a circuit diagram showing an example of
  • FIG. 6 is a cross-sectional structure showing a cross-sectional structure of a main part of a panel structure composed of a combination of a white organic EL element and a color filter.
  • 7A, 7B, and 7C are process charts (No. 1) showing the flow of the manufacturing method according to the second embodiment.
  • 8A, 8B, and 8C are process charts (No. 2) showing the flow of the manufacturing method according to the second embodiment.
  • FIG. 9 is an end view of a cut portion showing the panel structure of the display device according to the third embodiment.
  • 10A, 10B, and 10C are process charts (No. 1) showing the flow of the manufacturing method according to the fourth embodiment.
  • 11A, 11B, and 11C are process charts (No. 2) showing the flow of the manufacturing method according to the fourth embodiment.
  • FIG. 1 is process charts showing the flow of the manufacturing method according to the fourth embodiment.
  • FIG. 12 is an end view of a cut portion showing the panel structure of the display device according to the fifth embodiment.
  • 13A and 13B are process charts (No. 1) showing the flow of the manufacturing method according to the sixth embodiment.
  • 14A and 14B are process charts (No. 2) showing the flow of the manufacturing method according to the sixth embodiment.
  • 15A, 15B, and 15C are plan views showing an arrangement example (No. 1), an arrangement example (No. 2), and an arrangement example (No. 3) of the cathode contact portion according to the seventh embodiment.
  • FIG. 16A is a front view of an interchangeable lens type single-lens reflex type digital still camera according to a specific example 1 of the electronic device of the present disclosure
  • FIG. 16B is a rear view thereof.
  • FIG. 17 is an external view showing an example of a head-mounted display according to Specific Example 2 of the electronic device of the present disclosure.
  • Example 1 (Example of two-layer cathode electrode: The cathode electrode of the second layer is electrically connected to the potential supply wiring at the bottom of the contact hole, and the cathode electrode of the first layer and 2 at the side wall of the contact hole. Example of electrically connecting to the cathode electrode of the layer) 3-2.
  • Example 2 (Example of manufacturing method of display device according to Example 1) 3-3.
  • Example 3 (Modification of Example 1: An example in which the cathode electrode of the first layer and the cathode electrode of the second layer are electrically connected through a contact hole formed exclusively). 3-4.
  • Example 4 (Example of manufacturing method of display device according to Example 3) 3-5.
  • Example 5 Example of three-layer cathode electrode: The cathode electrode of the third layer is electrically connected to the potential supply wiring at the bottom of the contact hole, and the cathode electrode of the third layer is connected to the side wall of the contact hole.
  • Example of electrically connecting the cathode electrodes of the first and second layers 3-6.
  • Example 6 Example of manufacturing method of display device according to Example 5) 3-7.
  • Example 7 Example of Arrangement of Electrical Connections of Cathode Electrodes of the Second Layer or More with Potential Supply Wiring and Electrical Connections Between Cathode Electrodes of Each Layer
  • Modification example 5 Electronic device of the present disclosure 5-1. Specific example 1 (example of digital still camera) 5-2. Specific example 2 (example of head-mounted display) 6. Configuration that can be taken by this disclosure
  • the cathode electrode of the first layer and the cathode electrode of the second layer or more are electrically connected to each other at the side wall portion of the first contact hole.
  • the cathode electrode of the first layer and the cathode electrode of the second layer or more can be electrically connected to each other at the bottom of the second contact hole.
  • the cathode contact portion for electrically connecting the cathode electrodes of the second layer or more to the potential supply wiring.
  • It can be configured to be provided in the effective pixel area.
  • the cathode contact portion is provided for each pixel in the effective pixel region, or is provided for each region of a predetermined size in the effective pixel region, or is provided in the center of the effective pixel region.
  • the configuration may be provided in the vicinity of the pixels of the unit.
  • the light emitting portion may be configured to include an organic electroluminescence element.
  • the organic layer is formed in pixel units with a plurality of monochromatic light emitting organic materials, or is formed in common with all pixels with a white light emitting organic material, and is formed in one stage or two or more stages. It can be configured to be laminated and provided.
  • the drive circuit portion of the light emitting unit may be configured to be formed on the semiconductor substrate. ..
  • the display device to which the technique of the present disclosure is applied is a thin film transistor (TFT) formed on a transparent insulating substrate or a MOS (Metal Oxide Semiconductor) transistor formed on a silicon semiconductor substrate. It is a so-called active matrix type display device that drives an element) to emit light.
  • TFT thin film transistor
  • MOS Metal Oxide Semiconductor
  • an organic EL element can be exemplified as a current-driven electro-optical element.
  • an active matrix type organic EL display device using an organic EL element, which is a current-driven electro-optical element, as a light emitting unit of a pixel circuit will be described as an example.
  • the "pixel circuit" may be simply referred to as a "pixel”.
  • a general form of an organic EL display device is to control a current flowing through an organic EL element by a thin film transistor formed on a transparent insulating substrate such as a glass substrate.
  • a thin film transistor formed on a transparent insulating substrate such as a glass substrate.
  • amorphous silicon or polycrystalline silicon as the channel material for the thin film transistor.
  • a MOS transistor formed on a semiconductor substrate such as a silicon substrate.
  • the current flowing through the organic EL element may be controlled.
  • a common electrode provided common to all pixels is fixed to, for example, 0 V, located on the opposite side of the common electrode across the organic EL layer, and a positive voltage is applied to individual electrodes provided for each pixel. By doing so, the organic EL element is made to emit light.
  • the individual electrodes provided for each pixel will be referred to as anode electrodes
  • the common electrodes provided for all pixels will be referred to as cathode electrodes.
  • the usage of fixing the potential of the cathode electrode (cathode potential) to 0V is a typical example, but the usage is not limited to this usage, and for example, by setting the cathode potential to a negative potential, It is also possible to set a larger potential difference from the anode electrode and increase the brightness than when fixing it at 0 V.
  • the usage of fixing the cathode potential to 0V is the basis, though not limited to the embodiment.
  • FIG. 1 is a system configuration diagram showing an outline of the configuration of an organic EL display device which is an example of a display device to which the technique of the present disclosure is applied.
  • the organic EL display device 10 according to the present application example has a pixel array unit 30 in which a plurality of pixels 20 including an organic EL element are two-dimensionally arranged in a matrix shape, and the pixels.
  • the system configuration includes peripheral circuits (peripheral drive units) arranged around the array unit 30.
  • the peripheral circuit includes, for example, a writing scanning unit 40, a driving scanning unit 50, a signal output unit 60, etc. mounted on the same display panel 70 as the pixel array unit 30, and drives each pixel 20 of the pixel array unit 30. do. It is also possible to adopt a configuration in which some or all of the writing scanning unit 40, the driving scanning unit 50, and the signal output unit 60 are provided outside the display panel 70.
  • a transparent insulating substrate such as a glass substrate can be used, or a semiconductor substrate such as a silicon substrate can be used.
  • An organic EL display device using a semiconductor substrate as the substrate of the display panel 70 is called a so-called micro display (small display), and is suitable for use as an electronic viewfinder of a digital still camera, a display unit of a head-mounted display, or the like. It is a thing.
  • the organic EL display device 10 can be configured to support monochrome (black and white) display or can be configured to support color display.
  • monochrome black and white
  • color display When the organic EL display device 10 supports color display, one pixel (unit pixel / pixel) as a unit for forming a color image is composed of a plurality of sub-pixels (sub-pixels).
  • each of the sub-pixels corresponds to the pixel 20 in FIG. More specifically, in a display device that supports color display, one pixel is, for example, a sub-pixel that emits red (Red; R) light, a sub-pixel that emits green (Green; G) light, and blue. It is composed of three sub-pixels of sub-pixels that emit the light of (Blue; B).
  • one pixel is not limited to the combination of the sub-pixels of the three primary colors of RGB, and one pixel may be formed by further adding the sub-pixels of one color or a plurality of colors to the sub-pixels of the three primary colors. It is possible. More specifically, for example, a sub-pixel that emits white (W) light to improve brightness is added to form one pixel, or at least complementary color light is emitted to expand the color reproduction range. It is also possible to add one sub-pixel to form one pixel.
  • W white
  • the scanning lines 31 (31 1 to 31 m ) are connected to the output ends of the corresponding lines of the writing scanning unit 40, respectively.
  • Drive lines 32 (32 1 ⁇ 32 m) are respectively connected to output terminals corresponding to the line of the drive scanner 50.
  • Signal lines 33 (33 1 ⁇ 33 n) are connected to the output end of the corresponding columns of the signal output unit 60.
  • the write scanning unit 40 is composed of a shift register circuit or the like.
  • the writing scanning unit 40 writes the writing scanning signal WS (WS 1 to WS m ) with respect to the scanning lines 31 (31 1 to 31 m ) when writing the signal voltage of the video signal to each pixel 20 of the pixel array unit 30.
  • WS writing scanning signal
  • 31 31 1 to 31 m
  • the drive scanning unit 50 is composed of a shift register circuit or the like.
  • the drive scanning unit 50 pixel by in synchronism with the line sequential scanning by the writing scanning unit 40, supplies the emission control signals DS (DS 1 ⁇ DS m) with respect to the drive line 32 (32 1 ⁇ 32 m) 20 light emission / non-emission (quenching) control is performed.
  • Signal output unit 60 a signal source signal voltage of a video signal corresponding to luminance information supplied from the (not shown) (hereinafter, sometimes simply described as "signal voltage") V sig and the reference voltage V ofs And are output selectively.
  • the reference voltage V ofs is a voltage corresponding to a reference voltage of the signal voltage V sig of the video signal (for example, a voltage corresponding to the black level of the video signal), or a voltage in the vicinity thereof.
  • the reference voltage V ofs is used as an initialization voltage when performing a correction operation.
  • the signal output unit 60 adopts a drive mode of line sequential writing in which the signal voltage V sig is written in pixel line units.
  • FIG. 2 is a circuit diagram showing an example of a circuit configuration of pixels (pixel circuits) in the organic EL display device 10 according to this application example.
  • the light emitting portion of the pixel 20 is composed of an organic EL element 21.
  • the organic EL element 21 is an example of a current-driven electro-optical element whose emission brightness changes according to the value of the current flowing through the device.
  • the pixel 20 is composed of an organic EL element 21 and a drive circuit unit (pixel drive circuit unit) that drives the organic EL element 21 by passing a current through the organic EL element 21. ..
  • the cathode electrode is connected to the common power supply line 34 which is commonly wired to all the pixels 20.
  • a predetermined potential for example, a reference potential
  • Cel is the equivalent capacitance of the organic EL element 21.
  • the drive circuit unit that drives the organic EL element 21 has a circuit configuration having a drive transistor 22, a sampling transistor 23, a light emission control transistor 24, a holding capacity 25, and an auxiliary capacity 26.
  • the drive transistor 22 is a P channel.
  • the configuration uses a type transistor.
  • the sampling transistor 23 and the light emission control transistor 24 also adopt a configuration in which a P-channel type transistor is used as in the drive transistor 22. Therefore, the drive transistor 22, the sampling transistor 23, and the light emission control transistor 24 have four terminals of source / gate / drain / back gate instead of three terminals of source / gate / drain. A power supply voltage V dd is applied to the back gate.
  • sampling transistor 23 and the light emission control transistor 24 are not limited to P-channel type transistors because they are switching transistors that function as switch elements. That is, the sampling transistor 23 and the light emission control transistor 24 may be an N-channel type transistor or a configuration in which a P-channel type and an N-channel type are mixed.
  • the sampling transistor 23 writes to the holding capacitance 25 by sampling the signal voltage V sig supplied from the signal output unit 60 through the signal line 33.
  • the light emission control transistor 24 is connected between the node of the power supply voltage V dd and the source electrode of the drive transistor 22, and controls the light emission / non-light emission of the organic EL element 21 under the drive of the light emission control signal DS.
  • the holding capacity 25 is connected between the gate electrode and the source electrode of the drive transistor 22.
  • the holding capacitance 25 holds the signal voltage V sig written by the sampling operation by the sampling transistor 23.
  • the drive transistor 22 drives the organic EL element 21 by passing a drive current corresponding to the holding voltage of the holding capacity 25 through the organic EL element 21.
  • the auxiliary capacitance 26 is connected between the source electrode of the drive transistor 22 and a node having a fixed potential, for example, a node having a power supply voltage V dd.
  • the auxiliary capacitance 26 suppresses the fluctuation of the source potential of the drive transistor 22 when the signal voltage V sig is written, and the gate-source voltage V gs of the drive transistor 22 is set to the threshold voltage V of the drive transistor 22. It acts to make th.
  • FIG. 3A shows a plan view of the structure of the display panel 70 according to the conventional example
  • FIG. 3B shows a cross-sectional view taken along the line AA of FIG. 3A.
  • a circuit portion (not shown) for driving the organic EL element 21 is formed on a semiconductor substrate 71 such as a silicon substrate, and an interlayer film 72, which is an insulating film, is formed so as to cover the circuit portion.
  • the organic EL element 21 is arranged and formed on the interlayer film 72.
  • a cathode electrode 73 is formed as an upper electrode on the organic EL element 21 as an electrode common to all pixels.
  • the organic EL element 21 is provided with an anode electrode 74 as a lower electrode for each pixel of the pixel array unit 30 which is an effective pixel region.
  • the anode electrode 74 is electrically connected to the circuit unit that drives the organic EL element 21 on a pixel-by-pixel basis.
  • the contact electrode 75 in which a predetermined potential is given as the cathode potential V cath is rectangular on the outer peripheral portion of the effective pixel region which is the region of the pixel array portion 30. It is provided in an annular shape so that the cathode electrode 73 is electrically connected to the contact electrode 75.
  • the sheet resistance of the cathode electrode 73 which is commonly provided for all pixels, may increase over the entire surface of the effective pixel region due to various factors.
  • the sheet resistance of the cathode electrode 73 increases, the larger the angle of view and the larger the current flow, the lower the brightness of the pixels in the center of the effective pixel region and its vicinity, which is one of the causes of shading. It becomes.
  • the contact electrode 75 since it is necessary to arrange the contact electrode 75 on the outer peripheral portion of the effective pixel region, it hinders the narrowing of the frame (reducing the chip size) of the display panel 70.
  • an example is an organic EL display device in which the display device shown in FIGS. 1 and 2, that is, the light emitting unit (light emitting element) is composed of an organic EL element which is an example of a current-driven electro-optical element. It will be explained by listing in.
  • the organic layer (organic EL layer) which is a light emitting functional layer includes a light emitting layer (for example, a light emitting layer made of an organic light emitting material).
  • the organic layer includes, for example, a laminated structure of a hole transport layer, a light emitting layer, and an electron transport layer, a laminated structure of a light emitting layer that also serves as a hole transport layer and an electron transport layer, and a hole injection layer. It can be composed of a laminated structure of a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer.
  • the organic layer when used as a tandem unit, the organic layer includes a first tandem unit, a CGL (Charge Generation Layer) as an intermediate layer, and a second tandem unit. It may have a laminated two-stage tandem structure, and may further have a three- or more-stage tandem structure in which three or more tandem units are laminated.
  • CGL Charge Generation Layer
  • a physical vapor deposition method such as a vacuum vapor deposition method
  • a printing method such as a screen printing method or an inkjet printing method
  • a lamination of a laser absorbing layer and an organic layer formed on a transfer substrate
  • PVD method physical vapor deposition method
  • a laser transfer method in which the organic layer on the laser absorbing layer is separated by irradiating the structure with a laser beam and the organic layer is transferred, and various coating methods can be exemplified.
  • an organic layer can be obtained by depositing a material that has passed through an opening provided in the metal mask using a so-called metal mask, and the organic layer can be formed. It may be formed on the entire surface without patterning.
  • the display device is, for example, an organic EL display device using an organic EL element as a light emitting unit, and sandwiches an interlayer film (protective film) on the light emitting unit and the light emitting unit. It includes a multi-layered cathode electrode that is laminated and electrically connected to each other, and a potential supply wiring that gives a predetermined potential (for example, a reference potential) to the multi-layered cathode electrode.
  • a predetermined potential for example, a reference potential
  • the second and higher layers of cathode electrodes are electrically connected to the potential supply wiring at the bottom of the first contact hole.
  • the cathode electrode and the organic layer of the first layer are formed by mask sputtering and vapor deposition, they cannot be formed with a fine structure, and when they are formed including contact holes in the subsequent photoresist processing, they are finely processed. Etc. will be realized. Since the cathode electrodes of the second layer and above can be formed with a fine structure, the cathode electrodes of the second layer and above are electrically connected to the potential supply wiring to form a cathode contact portion for a predetermined potential. This makes it possible to provide the cathode contact portion in the effective pixel region.
  • the distance between the pixel in the effective pixel region, particularly the central portion, and the cathode contact portion can be shortened, so that the sheet resistance of the cathode electrode can be reduced in combination with the reduction of the sheet resistance of the cathode electrode. Shading caused by resistance can be suppressed. Further, by providing the cathode contact portion in the effective pixel region, it is possible to narrow the frame of the display panel 70 (reduce the chip size).
  • the multilayer cathode electrode for example, a two-layer cathode electrode composed of a first cathode electrode and a second cathode electrode will be described as an example.
  • the multilayer cathode electrode is not limited to the two-layer cathode electrode, and may be a three-layer or higher-layer cathode electrode.
  • the cathode electrode is an example of two layers, and the cathode electrode of the second layer is electrically connected to the potential supply wiring at the bottom of the contact hole, and the cathode of the first layer is connected to the side wall of the contact hole. This is an example of electrically connecting the electrode and the cathode electrode of the second layer.
  • FIG. 4 is an end view of a cut portion showing the panel structure of the display device according to the first embodiment.
  • an interlayer film 72 which is an insulating film, is formed on the semiconductor substrate 71 on which the pixel circuit portion 20A for driving the organic EL element 21 is formed so as to cover the pixel circuit portion 20A. There is. Then, on the interlayer film 72, pixels (sub-pixels) 20 including the organic EL element 21 are arranged in an array.
  • the pixel 20 is composed of, for example, three sub-pixels of a pixel 20R that emits red (Red; R) light, a pixel 20G that emits green light, and a pixel 20B that emits blue light.
  • pixel 20R, 20G, and 20B forming methods there are roughly two types of pixel 20R, 20G, and 20B forming methods.
  • One of them is a method of forming an organic EL layer in pixel (sub-pixel) units by separately painting a plurality of colors, for example, R, G, and B monochromatic light emitting organic materials with a thin-film deposition mask, as shown in FIG.
  • the other is, as shown in FIG. 6, a white (W) light emitting organic material having a plurality of color emission spectra is vapor-deposited over the entire surface of the light emitting pixel region to form a white organic EL element (white organic EL layer).
  • This is a method in which 21W is formed in common for all pixels and is dispersed by color filters 90R, 90G, 90B having spectral spectra of a plurality of colors, for example, R, G, and B.
  • the organic EL display device may be an organic EL display device having a panel structure having an RGB coating structure, or an organic having a white (W) one-stage or two-stage or more tandem structure panel structure. It may be an EL display device.
  • the organic EL element (organic EL layer) 21 of the pixel 20 is formed by vacuum-depositing an organic EL material.
  • an anode electrode 74 as a lower electrode is independently formed on the interlayer film 72 for each pixel.
  • the material of the anode electrode 74 for example, aluminum (Al) or a metal material obtained by laminating indium tin oxide (ITO) and silver (Ag) can be used.
  • a contact electrode 75 is formed on the same layer as the anode electrode 74 on the interlayer film 72.
  • the material of the contact electrode 75 for example, the same material as the anode electrode 74, that is, a metal material made by laminating aluminum or indium tin oxide and silver can be exemplified.
  • a potential supply wiring 76 that supplies a predetermined potential (reference potential) is electrically connected to the contact electrode 75.
  • the potential supply wiring 76 is formed in the same layer as the wiring 77 of the pixel circuit unit 20A that drives the organic EL element 21, for example.
  • the anode electrode 74 is electrically connected to the wiring 77 of the pixel circuit unit 20A that drives the organic EL element 21.
  • the wiring 77 of the pixel circuit unit 20A corresponds to the wiring or the like connecting the organic EL element 21 and the drive transistor 22 in the case where the pixel 20 is the circuit example shown in FIG.
  • the first cathode electrode 73 1 is the cathode electrode of the first layer is formed by vacuum deposition.
  • the first cathode electrode 73 1 of the material e.g., indium zinc oxide (Indium Zink Oxide: IZO), can be used transparent material such as indium tin oxide (ITO). Further, a semi-transparent material such as magnesium silver (MgAg) can also be used.
  • ITO indium tin oxide
  • MgAg magnesium silver
  • the protective film 78 is deposited by vacuum evaporation over the entire surface of the pixel array.
  • an inorganic material such as silicon oxide (SiO), silicon nitride (SiN), silicon oxide nitride (SiNO), titanium oxide (TIO), or aluminum oxide (AlO) can be used. can.
  • a second cathode electrode 73 2 is a cathode electrode of the second layer is formed by vacuum deposition.
  • ITO indium tin oxide
  • IZO indium zinc oxide
  • the second cathode electrodes 73 2 materials necessarily, need not be the same material as the first cathode electrode 73 1, it is also possible to use different materials.
  • the first cathode electrode 73 1 and the second cathode electrode 73 2 protective film 78 is an interlayer film between the light between the first cathode electrode 73 1 and the second cathode electrode 73 2 It may be adjusted so as to form an optimum cavity structure for light extraction by utilizing the resonance effect of.
  • the protective film 78 has a first contact hole 79 connected to a contact electrode 75 electrically connected to a potential supply wiring 76 that supplies a predetermined potential through a layer of an organic EL element 21. It is formed.
  • This side wall portion of the first contact hole 79 similarly to the upper surface of the protective film 78, a second cathode electrode 73 2 is formed by vacuum deposition.
  • the second cathode electrodes 73 2, at the bottom of the contact hole 78, with respect to the potential supply line 76 are electrically connected via the contact electrode 75.
  • a predetermined potential reference potential
  • the 2 second cathode electrodes 73, the side wall portion of the first contact hole 79 consists of a first cathode electrode 73 1 to a predetermined potential is applied.
  • the second embodiment is an example of the method for manufacturing the panel structure of the display device according to the first embodiment.
  • the process diagram (No. 1) of the manufacturing method according to the second embodiment is shown in FIGS. 7A, 7B, and 7C, and the process diagram (No. 2) is shown in FIGS. 8A, 8B, and 8C.
  • the manufacturing process after the formation of the anode electrode 74 will be described.
  • step 1 shown in FIG. 7A shows a state in which a base is prepared by a general process of forming the anode electrode 74.
  • step 2 shown in FIG. 7B to form the organic EL element 21 and the first cathode electrode 73 1 is a light emitting portion by vapor deposition and sputtering.
  • step 3 shown in FIG. 7C on the first cathode electrode 73 1, the protective film 78 over the entire surface of the pixel array is formed using a material such as silicon nitride or titanium oxide.
  • step 4 shown in FIG. 8A the photoresist 81 is applied onto the protective film 78 except for the portion A forming the first contact hole 79, and then in step 5 shown in FIG. 8B, the difference is different. by isotropic etching to form a first contact hole 79 for electrically connecting the first cathode electrode 73 1 and the 2 second cathode electrode 73 in the protective film 78.
  • step 6 shown in FIG. 8C after removing the photoresist 81, including the inner wall and bottom of the first contact hole 79, the entire surface of the protective film 78, a second cathode electrode 73 2 Formed by sputtering or vapor deposition.
  • the first cathode electrode 731 can be electrically connected to the contact electrode 75, and the first contact electrode 75 can be electrically connected.
  • the first contact electrode 75 can be electrically connected.
  • it in the side wall of the contact hole 79, it can be first cathode electrode 73 1 and the 2 second cathode electrodes 73 are electrically connected to each other.
  • Example 3 is a modification of Example 1, in which the cathode electrode of the first layer and the cathode electrode of the second layer are electrically connected through a contact hole (second contact hole) formed exclusively for the first layer.
  • FIG. 9 is an end view of the cut portion showing the panel structure according to the second embodiment.
  • the first contact hole 79 for connecting the first cathode electrode 73 1 and the 2 second cathode electrodes 73, the second cathode electrode 73 2 to the contact electrode 75 It is configured to be electrically connected at the side wall of the.
  • the protective film 78 forms the second contact hole 80 connected to the first cathode electrode 731, and the second contact hole 80 is formed.
  • a second cathode electrode 73 2 is formed, at the bottom of the second contact hole 80, a second cathode electrode 73 2 the has a first cathode electrode 73 1 and the construction of electrically connecting.
  • a predetermined potential is applied to the 2 second cathode electrode 73 through the contact electrode 75 from the potential supply line 76. Then, the predetermined potential, at the sidewall portion of the first contact hole 79, together with the given first cathode electrode 73 1, through the second cathode electrodes 73 2, at the bottom of the second contact hole 80, It would be given to the first cathode electrode 73 1.
  • the electrode 73 2 has a structure for electrically connecting, not limited thereto. That is, the second only at the bottom of the contact hole 80, a configuration for electrically connecting the first cathode electrode 73 1 and the 2 second cathode electrode 73.
  • the fourth embodiment is an example of the method for manufacturing the panel structure of the display device according to the third embodiment.
  • the process diagram (No. 1) of the manufacturing method according to the fourth embodiment is shown in FIGS. 10A, 10B, and 10C, and the process diagram (No. 2) is shown in FIGS. 11A, 11B, and 11C.
  • step 1 shown in FIG. 10A shows a state in which a base is prepared by a general process of forming the anode electrode 74.
  • step 2 shown in FIG. 10B to form the organic EL element 21 and the first cathode electrode 73 1 is a light emitting portion by vapor deposition and sputtering.
  • step 3 shown in FIG. 10C on the first cathode electrode 73 1, the protective film 78 over the entire surface of the pixel array is formed using a material such as silicon nitride or titanium oxide.
  • step 4 shown in FIG. 11A the photoresist 81 is applied onto the protective film 78 except for the portion B forming the second contact hole 80, and then in step 5 shown in FIG. 11B, the difference is different. by isotropic etching, to form the second contact hole 80 for electrically connecting the first cathode electrode 73 1 and the 2 second cathode electrode 73 in the protective film 78.
  • step 6 shown in FIG. 11C after removing the photoresist 81, including the inner wall and bottom of the second contact hole 80, the entire surface of the protective film 78, a second cathode electrode 73 2 Formed by sputtering or vapor deposition.
  • the cathode electrode is an example of three layers, and the cathode electrode of the third layer is electrically connected to the potential supply wiring at the bottom of the contact hole (third contact hole), and the side wall of the contact hole. This is an example of electrically connecting the cathode electrodes of the third layer and the cathode electrodes of the first and second layers.
  • FIG. 12 is an end view of a cut portion showing the panel structure of the display device according to the fifth embodiment.
  • the protective film 82 is deposited by vacuum evaporation over the entire surface of the pixel array.
  • the same material as the protective film 78 that is, an inorganic material such as silicon oxide, silicon nitride, silicon oxide nitride, titanium oxide, or aluminum oxide can be used.
  • the third cathode electrode 73 3 is formed by vacuum deposition is a cathode electrode of the third layer.
  • a third contact hole 83 connected to the contact electrode 75 electrically connected to the potential supply wiring 76 for supplying a predetermined potential through the layer of the organic EL element 21 is formed.
  • the third cathode electrode 73 3 is at the bottom of the third contact hole 78, with respect to the potential supply line 76 are electrically connected via the contact electrode 75.
  • the first cathode electrode 73 1 and the second cathode electrode 73 2 is the side wall portion of the third contact hole 83, and is connected to the third cathode electrode 73 3 electrically.
  • the first cathode electrodes 73 1 and the second cathode electrode 73 2 and the third cathode electrode 73 3, the side wall portion of the third contact hole 83 are electrically connected to each other.
  • the first cathode electrode 73 1 and the second cathode electrodes 73 2 as in the case of the panel structure of a display device according to the third embodiment, also in the bottom of the second contact hole 80, electrically connected to each other Has been done.
  • the electrical connection at the bottom of the second contact hole 80 may be omitted.
  • the sixth embodiment is an example of the method for manufacturing the panel structure of the display device according to the fifth embodiment.
  • the process chart (No. 1) of the manufacturing method according to the fifth embodiment is shown in FIGS. 13A and 13B, and the process chart (No. 2) is shown in FIGS. 14A and 14B.
  • step 6 shown in FIG. 11 Since the steps prior to the step of forming the second cathode electrode 732 of the manufacturing method according to the fourth embodiment (step 6 shown in FIG. 11) are the same as those of the manufacturing method according to the fourth embodiment. , Here, the illustration and description of the process will be omitted.
  • Step 1 shown in FIG. 13A on the second cathode electrodes 73 2, a protective film 82 over the entire surface of the pixel array, such as silicon nitride or titanium oxide A film is formed using the material.
  • step 2 shown in FIG. 13B the photoresist 84 is applied onto the protective film 82 except for the portion C that forms the third contact hole 83.
  • step 3 shown in FIG. 14A by anisotropic etching, to form a third contact hole 83 for electrically connecting the third cathode electrode 73 3 of the contact electrode 75.
  • step 4 shown in FIG. 14B after removing the photoresist 84, including the inner wall and bottom of the third contact hole 83, the entire surface of the protective film 84, the third cathode electrode 73 3 Formed by sputtering or vapor deposition.
  • the manufacturing method according to the fourth embodiment described above at the bottom of the third contact hole 83, it is possible to electrically connect the third cathode electrode 73 3 relative to the contact electrode 75. Further, the side wall portion of the third contact hole 83, the third of the cathode electrode 73 3, a first cathode electrode 73 1 and the second cathode electrode 73 2 may be electrically connected.
  • Example 7 is an example of arranging an electrical connection portion of the cathode electrodes of the second layer or higher with respect to the potential supply wiring and an electrical connection portion between the cathode electrodes of each layer.
  • the panel structure of a display device according to Embodiment 2 the first cathode electrode 73 1 and the 2 second cathode electrodes 73 are electrically connected to each other at the bottom of the second contact hole 80.
  • the second layer or the cathode electrode (second cathode electrode 73 2 / third cathode electrode 73 3) the first contact hole 79 / the third contact hole
  • the connection portion electrically connected at the bottom of the 83 is referred to as the first cathode contact portion.
  • the connection portion where the cathode electrodes of each layer are electrically connected to each other at the side wall portion of the 79 / third contact hole 83 is referred to as the third cathode contact portion.
  • the inside, outside, or the effective pixel region is used in a white (W) one-stage or two-stage tandem structure.
  • W white
  • the inside, outside, or the effective pixel region is used in a white (W) one-stage or two-stage tandem structure.
  • It can be arranged on both sides thereof, and in a tandem structure of three or more stages or an RGB painting structure, it can be arranged inside or outside the effective pixel area.
  • the white (W) one-stage or two-stage tandem structure when the arrangement position of the first cathode contact portion is inside and outside the effective pixel region, or only inside, the bottom of the contact hole 80 is used.
  • a second cathode contact portion that utilizes the bottom of the contact hole 79 can be adopted.
  • a second cathode contact portion that utilizes the bottom of the contact hole 80 and a third cathode contact portion that utilizes the side wall portion of the first contact hole 79 / third contact hole 83 are adopted. can do.
  • the first cathode contact portion can be provided outside the effective pixel region, but the distance between the pixel 20 in the central portion in the effective pixel region and the first cathode contact portion is shortened.
  • 15A, 15B, and 15C show an arrangement example (No. 1), an arrangement example (No. 2), and an arrangement example (No. 3) of the cathode contact portion according to the seventh embodiment.
  • the most preferable form is that the first cathode contact portion 85 is set to 1 as shown in the arrangement example (No. 1) of FIG. 15A. One is arranged for each pixel 20. According to this arrangement example (No. 1), the distance between the pixel 20 and the first cathode contact portion 85 can be short and constant regardless of the position of the pixel 20 in the effective pixel region. ..
  • a region X having a predetermined size including a plurality of pixels 20 adjacent to each other is used as a unit, and one first cathode contact portion 85 is provided in the region X.
  • it can also be an arrangement example in which they are arranged one by one.
  • a case where a region X having a predetermined size is composed of four pixels adjacent to each other is illustrated, but the region X is not limited to the region consisting of four pixels, and the size of the region X is arbitrary.
  • the smaller the number of pixels forming the region X the closer to the most preferable form shown in FIG. 15A, and the distance between the pixels 20 and the first cathode contact portion 85 should be short and constant. Can be done.
  • the first cathode contact portion 85 is arranged one by one in a plurality of pixels 20 in the vicinity of the pixel 20o in the central portion of the effective pixel region. You can also do it.
  • the distance between the pixel 20 in the central portion and the first cathode contact portion 85 can be shortened, and the sheet resistance of the cathode electrode can be reduced. It is possible to suppress the occurrence of IR drops and suppress the shading caused by the sheet resistance.
  • the technique of the present disclosure has been described above based on the preferred embodiment, the technique of the present disclosure is not limited to the embodiment.
  • the configuration and structure of the display device described in the above embodiment are examples, and can be changed as appropriate.
  • the application is not limited to the organic EL display device, and for example, a display device having a configuration in which a predetermined potential is applied to a cathode electrode. Applicable to all.
  • tandem structure having one stage of white (W) has been described as an example, but two or more stages of white (W) formed by stacking tandem units with the charge generation layer (CGL) as an intermediate layer.
  • CGL charge generation layer
  • the display device of the present disclosure described above is a display unit (display device) of an electronic device in all fields that displays a video signal input to the electronic device or a video signal generated in the electronic device as an image or a video. Can be used as. Examples of electronic devices include television sets, notebook personal computers, digital still cameras, mobile terminal devices such as mobile phones, and head-mounted displays. However, it is not limited to these.
  • the following effects can be obtained by using the display device of the present disclosure as the display unit. That is, according to the display device of the present disclosure, it is possible to satisfy all of the improvement of the pixel resolution, the increase of the brightness, and the narrowing of the frame. Therefore, by using the display device of the present disclosure, it is possible to contribute to higher performance of the display unit of the electronic device and miniaturization of the main body of the electronic device.
  • the display device of the present disclosure also includes a modular device having a sealed configuration.
  • a display module formed by attaching a facing portion such as transparent glass to a pixel array portion is applicable.
  • the display module may be provided with a circuit unit for inputting / outputting a signal or the like from the outside to the pixel array unit, a flexible printed circuit (FPC), or the like.
  • FPC flexible printed circuit
  • a digital still camera and a head-mounted display will be illustrated as specific examples of the electronic device using the display device of the present disclosure. However, the specific examples illustrated here are only examples, and are not limited to these.
  • FIG. 16 is an external view of an interchangeable lens type single-lens reflex type digital still camera according to a specific example 1 of the electronic device of the present disclosure, the front view thereof is shown in FIG. 16A, and the rear view thereof is shown in FIG. 16B.
  • the interchangeable lens single-lens reflex type digital still camera has, for example, an interchangeable photographing lens unit (interchangeable lens) 212 on the front right side of the camera body (camera body) 211 and on the front left side. It has a grip portion 213 for the photographer to grip.
  • interchangeable photographing lens unit interchangeable lens
  • a monitor 214 is provided in the center of the back of the camera body 211.
  • An electronic viewfinder (eyepiece window) 215 is provided above the monitor 214. By looking into the electronic viewfinder 215, the photographer can visually recognize the light image of the subject guided by the photographing lens unit 212 and determine the composition.
  • the display device of the present disclosure can be used as the electronic viewfinder 215. That is, the interchangeable lens type single-lens reflex type digital still camera according to the first embodiment is manufactured by using the display device of the present disclosure as its electronic viewfinder 215.
  • FIG. 17 is an external view showing an example of a head-mounted display according to Specific Example 2 of the electronic device of the present disclosure.
  • the head-mounted display 300 has a transmissive head-mounted display configuration having a main body 301, an arm 302, and a lens barrel 303.
  • the main body 301 is connected to the arm 302 and the glasses 310.
  • the end portion of the main body portion 301 in the long side direction is attached to the arm portion 302.
  • one side of the side surface of the main body 301 is connected to the eyeglasses 310 via a connecting member (not shown).
  • the main body 301 may be directly attached to the head of the human body.
  • the main body 301 has a built-in control board and display for controlling the operation of the head-mounted display 300.
  • the arm portion 302 supports the lens barrel 303 with respect to the main body 301 by connecting the main body 301 and the lens barrel 303. Specifically, the arm portion 302 is coupled to the end portion of the main body portion 301 and the end portion of the lens barrel 303 to fix the lens barrel 303 to the main body 301. Further, the arm portion 302 has a built-in signal line for communicating data related to an image provided from the main body portion 301 to the lens barrel 303.
  • the lens barrel 303 projects the image light provided from the main body 301 via the arm 302 through the lens 311 of the spectacles 310 toward the eyes of the user who wears the head-mounted display 300.
  • the display device of the present disclosure can be used as the display unit built in the main body unit 301. That is, the head-mounted display 300 according to the second embodiment is manufactured by using the display device of the present disclosure as its display unit.
  • the present disclosure may also have the following configuration.
  • A. Display device ⁇ [A-1] Light emitting unit, A multi-layered cathode electrode in which two or more layers are laminated on the light emitting portion with a protective film interposed therebetween and electrically connected to each other, and Potential supply wiring that gives a predetermined potential to the multilayer cathode electrodes, With Of the multilayer cathode electrodes, the second and higher cathode electrodes are electrically connected to the potential supply wiring at the bottom of the first contact hole. Display device. [A-2] The cathode electrode of the first layer and the cathode electrode of the second layer or higher are electrically connected to each other at the side wall portion of the first contact hole. The display device according to the above [A-1].
  • [A-3] The cathode electrode of the first layer and the cathode electrode of the second layer or higher are electrically connected to each other at the bottom of the second contact hole.
  • [A-4] A cathode contact portion for electrically connecting the second and higher layers of cathode electrodes to the potential supply wiring is provided in the effective pixel region.
  • [A-5] The cathode contact portion is provided for each pixel in the effective pixel region.
  • Cathode contact portions are provided for each region of a predetermined size in the effective pixel region.
  • the cathode contact portion is provided in the vicinity of the pixel in the central portion in the effective pixel region.
  • the light emitting unit is composed of an organic electroluminescence element.
  • the organic layer of the organic electroluminescent device is formed of a plurality of colors of monochromatic light emitting organic materials on a pixel-by-pixel basis.
  • the organic layer of the organic electroluminescent element is made of a white luminescent organic material and is common to all pixels. It is provided with one stage or two or more stages stacked.
  • [A-11] The drive circuit unit of the light emitting unit is formed on the semiconductor substrate.
  • FIG. 1 A protective film is formed on the cathode electrode of the first layer to which a predetermined potential is applied. Next, the protective film is formed with a first contact hole leading to the contact electrode to which a predetermined potential is applied. Next, the bottom of the first contact hole is electrically connected to the contact electrode, and the side wall of the first contact hole is electrically connected to the first layer of the cathode electrode to form a second or more layer of cathode electrode. do, How to manufacture a display device. [B-2] A second contact hole leading to the cathode electrode of the first layer is formed on the protective film formed on the cathode electrode of the first layer. The bottom of the second contact hole then forms a second or higher layer of cathode electrodes that are electrically connected to the first layer of cathode electrodes. The method for manufacturing a display device according to the above [B-1].
  • [C-3] The cathode electrode of the first layer and the cathode electrode of the second layer or higher are electrically connected to each other at the bottom of the second contact hole.
  • [C-4] A cathode contact portion for electrically connecting the second and higher layers of cathode electrodes to the potential supply wiring is provided in the effective pixel region.
  • [C-5] The cathode contact portion is provided for each pixel in the effective pixel region.
  • Cathode contact portions are provided for each region of a predetermined size in the effective pixel region.
  • the cathode contact portion is provided in the vicinity of the pixel in the central portion in the effective pixel region.
  • the light emitting unit is composed of an organic electroluminescence element.
  • the organic layer of the organic electroluminescent device is formed of a plurality of colors of monochromatic light emitting organic materials on a pixel-by-pixel basis.
  • the organic layer of the organic electroluminescent element is made of a white luminescent organic material and is common to all pixels. It is provided with one stage or two or more stages stacked.
  • [C-11] The drive circuit unit of the light emitting unit is formed on the semiconductor substrate.
  • third cathode electrode 74 (74R, 74G, 74B), ⁇ ⁇ -Anode electrode (lower electrode), 75 ... contact electrode, 76 ... power supply wiring, 77 ... circuit section wiring, 78, 82 ... protective film, 79 ... first contact hole , 80 ... 2nd contact hole, 83 ... 3rd contact hole, 85 ... cathode contact part, 90R, 90G, 90B ... color filter

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