WO2021166379A1

WO2021166379A1 - Light control panel

Info

Publication number: WO2021166379A1
Application number: PCT/JP2020/045346
Authority: WO
Inventors: 貴広加藤; 将史平田; 崇夫今奥
Original assignee: パナソニック液晶ディスプレイ株式会社
Priority date: 2020-02-21
Filing date: 2020-12-04
Publication date: 2021-08-26

Abstract

This light control panel (1) is provided with: a first substrate (10) that has light transmitting properties; a second substrate (20) that is arranged so as to face the first substrate (10), while having light transmitting properties; an electrochromic layer (50) that is arranged between the first substrate (10) and the second substrate (20); a first electrode layer (30) that is arranged between the electrochromic layer (50) and the first substrate (10), while having light transmitting properties; a second electrode layer (40) that is arranged between the electrochromic layer (50) and the second substrate (20), while having light transmitting properties; a first auxiliary electrode (60) that is arranged between the first electrode layer (30) and the first substrate (10), while containing a metal; and a first insulating layer (80) that is arranged between the first auxiliary electrode (60) and the first electrode layer (30), while having light transmitting properties. The first insulating layer (80) has a plurality of first through holes (81). The first electrode layer (30) is electrically connected to the first auxiliary electrode (60) via the plurality of first through holes (81).

Description

Dimming panel

This disclosure relates to a dimming panel.

Patent Document 1 discloses an electrochromic element provided with a low resistance auxiliary electrode in order to suppress a voltage drop in the transparent electrode.

Japanese Unexamined Patent Publication No. 2016-133648

In the above-mentioned conventional electrochromic element, an auxiliary electrode formed by using a metal material is used. However, there is a problem that the metal contained in the auxiliary electrode dissolves when it comes into contact with the solvent contained in the electrochromic layer. Patent Document 1 discloses that an ITO film is provided between the auxiliary electrode and the electrochromic layer, but the ITO film contains crystal defects and is insufficient as a protective film for the auxiliary electrode. be. The melting of the auxiliary electrode impairs the resistance-reducing function of the transparent electrode.

Therefore, the present disclosure provides a dimming panel capable of suppressing a voltage drop in the electrode.

The dimming panel according to one aspect of the present disclosure includes a first substrate having translucency, a second substrate having translucency arranged opposite to the first substrate, the first substrate, and the above. An electrochromic layer arranged between the second substrate, a translucent first electrode layer arranged between the electrochromic layer and the first substrate, and the electrochromic layer and the first substrate. A second electrode layer having translucency arranged between the two substrates, a first auxiliary electrode containing metal arranged between the first electrode layer and the first substrate, and the first auxiliary electrode. A translucent first insulating layer arranged between the auxiliary electrode and the first electrode layer is provided, and the first insulating layer has a plurality of first through holes, and the first insulating layer has a plurality of first through holes. The electrode layer is electrically connected to the first auxiliary electrode through the plurality of first through holes.

According to the present disclosure, the voltage drop in the electrode can be suppressed.

FIG. 1 is a diagram showing a configuration of a dimming panel according to the first embodiment. FIG. 2 is a cross-sectional view of the dimming panel at the positions indicated by the lines IIA-IIA and IIB-IIB of FIG. FIG. 3A is a cross-sectional view of the dimming panel in the transparent state at the position shown by lines III-III in FIG. FIG. 3B is a cross-sectional view of the dimming panel in the reflective state at the position shown by lines III-III in FIG. FIG. 4 is a plan view showing a first example of the arrangement of the first through holes provided in the first insulating layer of the dimming panel. FIG. 5 is a plan view showing a second example of the arrangement of the first through hole provided in the first insulating layer of the dimming panel. FIG. 6 is a plan view showing a third example of the arrangement of the first through holes provided in the first insulating layer of the dimming panel. FIG. 7 is a plan view showing a fourth example of the arrangement of the first through hole provided in the first insulating layer of the dimming panel. FIG. 8 is an enlarged plan view of the first through hole and the first auxiliary electrode. FIG. 9 is a cross-sectional view of a dimming panel according to a modified example of the first embodiment. FIG. 10 is a diagram showing a configuration of a dimming panel according to a second embodiment. FIG. 11 is a cross-sectional view of the dimming panel at the positions indicated by the XIA-XIA line and the XIB-XIB line of FIG. FIG. 12A is a cross-sectional view of the dimming panel in the transparent state at the position shown by the line XII-XII in FIG. FIG. 12B is a cross-sectional view of the light control panel in the reflection state at the position shown by the line XII-XII in FIG. FIG. 13 is a plan view showing a first example of the arrangement of the first through holes provided in the first insulating layer of the dimming panel. FIG. 14 is a plan view showing a second example of the arrangement of the first through hole provided in the first insulating layer of the dimming panel. FIG. 15 is a plan view showing a third example of the arrangement of the first through holes provided in the first insulating layer of the dimming panel. FIG. 16 is a plan view showing a fourth example of the arrangement of the first through hole provided in the first insulating layer of the dimming panel. FIG. 17 is a cross-sectional view of a dimming panel according to a modified example of the second embodiment. FIG. 18 is a cross-sectional view of the dimming panel according to the third embodiment. FIG. 19 is a plan view showing an arrangement example of the first through hole provided in the first insulating layer of the light control panel according to the third embodiment.

(Summary of this disclosure)
The dimming panel according to one aspect of the present disclosure includes a first substrate having translucency, a second substrate having translucency arranged opposite to the first substrate, the first substrate, and the above. An electrochromic layer arranged between the second substrate, a translucent first electrode layer arranged between the electrochromic layer and the first substrate, and the electrochromic layer and the first substrate. A second electrode layer having translucency arranged between the two substrates, a first auxiliary electrode containing metal arranged between the first electrode layer and the first substrate, and the first auxiliary electrode. (1) A translucent first insulating layer arranged between the auxiliary electrode and the first electrode layer is provided. The first insulating layer has a plurality of first through holes. The first electrode layer is electrically connected to the first auxiliary electrode through the plurality of first through holes.

As a result, in the first auxiliary electrode, the portion other than the plurality of first through holes is covered with the first insulating layer, so that the entire surface of the first auxiliary electrode is covered with the first electrode layer, as compared with the case where the entire surface of the first auxiliary electrode is covered with the first electrode layer. , The elution of the metal of the first auxiliary electrode can be suppressed. Further, the first electrode layer is arranged between the first insulating layer and the electrochromic layer so that the first insulating layer does not come into direct contact with the electrochromic layer. Therefore, the change in the optical state of the electrochromic layer is likely to occur uniformly in the plane.

As described above, according to the dimming panel according to this aspect, the in-plane uniformity of the change in the optical state can be enhanced, and the voltage drop in the electrode can be suppressed. By suppressing the voltage drop, the reaction rate and in-plane uniformity of changes in the optical state can be improved.

Further, for example, each of the first auxiliary electrodes may include a plurality of first metal wires extending in the first direction.

As a result, the first auxiliary electrode can be formed in a striped shape, so that the first auxiliary electrode can be made inconspicuous by, for example, thinning the first metal wire.

Further, for example, the first auxiliary electrode further extends a plurality of second metal wires each extending in a second direction intersecting the first direction and intersecting at least one of the plurality of first metal wires. It may be included.

As a result, the first auxiliary electrode can be formed in a grid pattern, so that the first auxiliary electrode can be made inconspicuous by thinning the first metal wire and the second metal wire, for example. Further, even when one of the first metal wire and the second metal wire is broken, the in-plane potential uniformity can be maintained by wrapping around from the other metal wire. Therefore, the voltage drop in the electrode can be suppressed.

Further, for example, the plurality of first through holes may be provided at the intersection of the first metal wire and the second metal wire in a plan view.

As a result, the first electrode layer and the first auxiliary electrode are electrically connected at the intersection, so that even if one of the first metal wire and the second metal wire is broken, the other metal wire is connected. The uniformity of the in-plane potential can be maintained by wrapping around from. Therefore, the voltage drop in the electrode can be suppressed.

Further, for example, each of the plurality of first through holes may be arranged inside the first metal wire in a plan view.

As a result, the step of the first electrode layer provided in the plurality of first through holes is suppressed while covering the first insulating layer, so that the occurrence of film breakage of the first electrode can be suppressed.

Further, for example, the first insulating layer may be formed by using an inorganic material.

This makes it possible to form a first insulating layer having an excellent metal elution suppressing function.

Further, for example, the dimming panel according to one aspect of the present disclosure further includes a second auxiliary electrode containing metal, which is arranged between the second electrode layer and the second substrate, and the second auxiliary electrode. A second insulating layer having translucency, which is arranged between the second electrode layer and the second electrode layer, may be provided. The second insulating layer has a plurality of second through holes. The second electrode layer is electrically connected to the second auxiliary electrode via the plurality of second through holes.

Thereby, the voltage drop can be suppressed in both the first electrode layer and the second electrode layer. Therefore, the reaction rate and in-plane uniformity of changes in the optical state can be further increased.

Further, for example, the first auxiliary electrode and the second auxiliary electrode each include a plurality of first metal wires extending in the first direction, and the plurality of first metal wires included in the first auxiliary electrode and the first metal wire are included. The plurality of first metal wires included in the two auxiliary electrodes may be arranged so as not to overlap with each other in a plan view.

Current concentration is likely to occur in the portion where the first auxiliary electrode and the second auxiliary electrode overlap in a plan view. By arranging the first auxiliary electrode and the second auxiliary electrode so as not to overlap each other, current concentration can be suppressed and in-plane uniformity of the optical state can be improved. In addition, it is possible to suppress the occurrence of moire caused by the first auxiliary electrode and the second auxiliary electrode.

Further, the dimming panel according to one aspect of the present disclosure includes a first substrate having translucency, a second substrate having translucency arranged opposite to the first substrate, and the first substrate. A translucent first electrode layer arranged between the electrochromic layer and the first substrate, an electrochromic layer arranged between the electrochromic layer and the second substrate, and the electrochromic layer. A second electrode layer having translucency, which is arranged between the second substrate, and a first auxiliary electrode containing metal, which is arranged between the first electrode layer and the first substrate. It includes a translucent first insulating layer arranged between the first auxiliary electrode and the first electrode layer. The first insulating layer has a plurality of first through holes. The first electrode layer is electrically connected to the first auxiliary electrode through the plurality of first through holes. In a plan view, at least one of the arrangement densities and areas of the plurality of first through holes differs depending on the region.

Further, according to the dimming panel according to this aspect, at least one of the arrangement density and the area of the first through hole differs depending on the region in the plan view, so that the region having different resistance in the plane of the first electrode layer is formed. It is formed. Therefore, for example, by reducing the resistance in the region where the current is difficult to flow, the current flowing in the region can be increased. By making the resistance different depending on the region, the current flowing in the plane can be made uniform.

Further, for example, the areas of the plurality of first through holes are equal to each other, and the arrangement densities of the plurality of first through holes may differ depending on the region.

As a result, the contact area between the first auxiliary electrode and the first electrode layer per unit area changes depending on the arrangement density of the first through holes (the number of holes per unit area). The larger the contact area, the smaller the resistance, and the smaller the contact area, the larger the resistance. Therefore, the resistance of the region can be made different by adjusting the arrangement density, and the current flowing in the plane can be made uniform.

Further, for example, the arrangement density of the plurality of first through holes is uniform, and the areas of the plurality of first through holes may differ depending on the region.

As a result, the contact area between the first auxiliary electrode and the first electrode layer changes depending on the area of the first through hole. Therefore, the resistance of the region can be made different by adjusting the area, and the current flowing in the plane can be made uniform.

Further, for example, the dimming panel according to one aspect of the present disclosure may further include a first power feeding terminal portion connected to an end portion of the first electrode layer. At least one of the arrangement density and the area may be increased as the distance from the first power feeding terminal portion increases.

Current easily flows in the region near the first power supply terminal, and it is difficult for current to flow in the region away from the first power supply terminal. Therefore, as the distance from the first power feeding terminal portion increases, at least one of the arrangement density and the area increases, so that the current flowing in the plane can be made uniform.

Further, for example, the dimming panel according to one aspect of the present disclosure further includes a second auxiliary electrode containing metal, which is arranged between the second electrode layer and the second substrate, and the second auxiliary electrode. A second insulating layer having translucency, which is arranged between the second electrode layer and the second electrode layer, may be provided. The second insulating layer has a plurality of second through holes. The second electrode layer is electrically connected to the second auxiliary electrode via the plurality of second through holes. In a plan view, at least one of the arrangement density and the area of the plurality of second through holes may differ depending on the region.

As a result, the voltage drop can be suppressed in both the first electrode layer and the second electrode layer, and the current flowing in the plane can be brought close to uniform. Therefore, the reaction rate and in-plane uniformity of changes in the optical state can be further increased.

Hereinafter, the embodiment will be specifically described with reference to the drawings.

Note that all of the embodiments described below show comprehensive or specific examples. Numerical values, shapes, materials, components, arrangement positions and connection forms of components, steps, order of steps, etc. shown in the following embodiments are examples, and are not intended to limit the present disclosure. Further, among the components in the following embodiments, the components not described in the independent claims will be described as arbitrary components.

In addition, each figure is a schematic view and is not necessarily exactly illustrated. Therefore, for example, the scales and the like do not always match in each figure. Further, in each figure, substantially the same configuration is designated by the same reference numerals, and duplicate description will be omitted or simplified.

Further, in the present specification, terms indicating relationships between elements such as parallel or orthogonal, terms indicating the shape of elements such as rectangles or circles, and numerical ranges are not expressions expressing only strict meanings. , It is an expression meaning that a substantially equivalent range, for example, a difference of about several percent is included.

Further, in the present specification, the terms "upper" and "lower" do not refer to the upward direction (vertically upward) and the downward direction (vertically downward) in absolute spatial recognition, but are based on the stacking order in the stacking configuration. It is used as a term defined by the relative positional relationship with. Also, the terms "upper" and "lower" are used not only when the two components are spaced apart from each other and another component exists between the two components, but also when the two components It also applies when the two components are placed in close contact with each other and touch each other.

Further, in the present specification and drawings, the x-axis, y-axis, and z-axis indicate the three axes of the three-dimensional Cartesian coordinate system. The positive direction of the z-axis is vertically above. Further, in the present specification, the "thickness direction" means the thickness direction of the dimming panel, and is the direction perpendicular to the main surfaces of the first substrate and the second substrate, and the "planar view" means. It refers to a view from a direction perpendicular to the main surface of the first substrate or the second substrate.

(Embodiment 1)
[1-1. composition]
First, the configuration of the dimming panel according to the first embodiment will be described with reference to FIGS. 1 and 2.

FIG. 1 is a diagram showing a configuration of a dimming panel 1 according to the present embodiment. In FIG. 1, in order to show the shapes of the first auxiliary electrode 60 and the second auxiliary electrode 70 of the dimming panel 1, the first substrate 10 and the second substrate 20 are shown diagonally offset. In reality, the first substrate 10 and the second substrate 20 are arranged so that most of them overlap each other in a plan view. Further, in FIG. 1, the first electrode layer 30, the second electrode layer 40, the electrochromic layer 50, the first insulating layer 80, and the second insulating layer 90 (see FIG. 2) included in the dimming panel 1 are not shown. doing.

The IIA-IIA line shown in FIG. 1 is a line along the first metal wire 61 extending in the x-axis direction of the first auxiliary electrode 60. The IIB-IIB wire is a wire along the first metal wire 71 extending in the x-axis direction of the second auxiliary electrode 70. The IIA-IIA line and the IIB-IIB line are positions that do not overlap in a plan view. That is, the first metal wire 61 included in the first auxiliary electrode 60 and the first metal wire 71 included in the second auxiliary electrode 70 are arranged at positions where they do not overlap in a plan view.

FIG. 2 is a cross-sectional view of the dimming panel 1 at the positions indicated by the lines IIA-IIA and IIB-IIB of FIG. Specifically, FIG. 2A shows a cross section of the first substrate 10 side in the IIA-IIA line, and FIG. 2B shows a cross section of the second substrate 20 side in the IIB-IIB line. ing. FIG. 2 shows a combination of cross sections of the dimming panel 1 at different positions. This is to show the positional relationship between the first through hole 81 and the second through hole 91 in an easy-to-understand manner. Note that FIG. 2 shows the vicinity of the center of each of the first substrate 10 and the second substrate 20, and the end portions (near the vicinity of the first bus bar 65 and the second bus bar 75) are not shown.

As shown in FIGS. 1 and 2, the dimming panel 1 includes a first substrate 10, a second substrate 20, a first electrode layer 30, a second electrode layer 40, an electrochromic layer 50, and a second substrate. 1 Auxiliary electrode 60, a second auxiliary electrode 70, a first insulating layer 80, and a second insulating layer 90 are provided. The dimming panel 1 has a flat plate shape. As shown in FIG. 2, along the thickness direction (z-axis direction) of the dimming panel 1, the first substrate 10, the first auxiliary electrode 60, the first insulating layer 80, the first electrode layer 30, and the electrochromic layer. 50, the second electrode layer 40, the second insulating layer 90, the second auxiliary electrode 70, and the second substrate 20 are arranged side by side in this order.

The optical state of the dimming panel 1 is changed by controlling the power supply 2 by the control circuit 3 shown in FIG. In the present embodiment, the optical state of the dimming panel 1 is a translucent state (transparent state) that transmits the light incident on the dimming panel 1 and a reflective state that reflects the light incident on the dimming panel 1. It can be changed.

The translucent state means that when the dimming panel 1 is irradiated with light, the amount of light passing through the dimming panel 1 (intensity) is the amount of light reflected by the dimming panel 1 (intensity). There are more. The reflection state is a state in which the amount of light reflected by the dimming panel 1 (intensity) is larger than the amount of light passing through the dimming panel 1 (intensity) when the dimming panel 1 is irradiated with light. Is.

FIG. 3A is a cross-sectional view of the dimming panel 1 in a transparent state at the position shown by lines III-III in FIG. FIG. 3B is a cross-sectional view of the dimming panel 1 in the reflection state at the position shown by lines III-III in FIG. Hereinafter, each component of the dimming panel 1 will be described in detail with reference to FIGS. 1 to 3B as appropriate.

The first substrate 10 and the second substrate 20 are arranged so as to face each other. The first substrate 10 and the second substrate 20 are translucent plates. The first substrate 10 and the second substrate 20 are arranged in parallel so that the distance between the substrates is uniform. The distance between the substrates is, for example, 200 μm, but is not limited to this. The first substrate 10 and the second substrate 20 are formed by using an insulating and translucent material such as glass or resin.

The first substrate 10 and the second substrate 20 have substantially the same size as each other. The plan-view shape of each of the first substrate 10 and the second substrate 20 is, for example, a rectangle (rectangle or square) having a side length of 1 m or more. For example, both the vertical and horizontal lengths of the first substrate 10 in a plan view may be 2 m or more. The same applies to the second substrate 20. Area in plan view of each of the first substrate 10 and the second substrate 20 is, for example, is 1 m ² or more, it may also be 3m ² or more, may be 5 m ² or more. The plan-view shape of the first substrate 10 and the second substrate 20 may be a polygon such as a triangle, a parallelogram, a hexagon or an octagon, or a shape including a curve such as a circle or an ellipse. ..

The first electrode layer 30 and the second electrode layer 40 are conductive thin films having translucency. The first electrode layer 30 and the second electrode layer 40 are transparent conductive oxide films such as ITO (Indium Tin Oxide) or IZO (Indium Zinc Oxide). At least one of the first electrode layer 30 and the second electrode layer 40 may be a metal thin film sufficiently thin enough to transmit visible light.

The first electrode layer 30 and the second electrode layer 40 are formed by, for example, sputtering or a coating method. The first electrode layer 30 and the second electrode layer 40 are arranged so as to face each other with the electrochromic layer 50 interposed therebetween.

The first electrode layer 30 is arranged between the first substrate 10 and the electrochromic layer 50. More specifically, the first electrode layer 30 is in contact with the main surface of the electrochromic layer 50 on the first substrate 10 side. The first electrode layer 30 covers the first auxiliary electrode 60 and the first insulating layer 80. The first electrode layer 30 is electrically connected to the first auxiliary electrode 60 via a plurality of first through holes 81 provided in the first insulating layer 80. The first electrode layer 30 is in contact with the surface of the first auxiliary electrode 60 exposed in the first through hole 81 inside each of the plurality of first through holes 81.

The plan view shape of the first electrode layer 30 substantially matches the plan view shape of the first substrate 10. The film thickness of the first electrode layer 30 is, for example, 50 nm, but the film thickness is not limited to this.

The second electrode layer 40 is arranged between the second substrate 20 and the electrochromic layer 50. More specifically, the second electrode layer 40 is in contact with the main surface of the electrochromic layer 50 on the second substrate 20 side. The second electrode layer 40 covers the second auxiliary electrode 70 and the second insulating layer 90. The second electrode layer 40 is electrically connected to the second auxiliary electrode 70 via a plurality of second through holes 91 provided in the second insulating layer 90. The second electrode layer 40 is in contact with the surface of the second auxiliary electrode 70 exposed in the second through hole 91 inside each of the plurality of second through holes 91.

The plan view shape of the second electrode layer 40 substantially matches the plan view shape of the second substrate 20. The film thickness of the second electrode layer 40 is, for example, 50 nm, but the film thickness is not limited to this.

The electrochromic layer 50 is arranged between the first substrate 10 and the second substrate 20. Specifically, the electrochromic layer 50 is located between the first electrode layer 30 and the second electrode layer 40, and is provided in contact with each other.

The optical state of the electrochromic layer 50 changes due to the movement of electric charges inside the electrochromic layer 50 by applying a voltage to each of the first electrode layer 30 and the second electrode layer 40, and the chemical change caused by the transferred charges. Change. The optical state of the electrochromic layer 50 changes reversibly because the transfer of electric charge is reversibly controlled by the direction and magnitude of the voltage.

In the present embodiment, the electrochromic layer 50 contains an electrolytic solution containing an electrochromic material. An electrochromic material is a material that undergoes a redox reaction due to the transfer of electric charge. Specifically, the electrochromic material is a metal compound that is a salt containing metal ions. The electrochromic material can transmit light when it contains a metal as an ion, and can reflect light when it contains a metal as a metal atom.

As the electric charge moves in the electrochromic layer 50, as shown in FIG. 3B, metal ions are deposited as the metal thin film 52 along the surface of the first electrode layer 30. Since the metal thin film 52 has light reflectivity, the optical state of the electrochromic layer 50 becomes a reflective state. For example, when a voltage is applied between the first electrode layer 30 and the second electrode layer 40 so that the potential of the first electrode layer 30 is lower than the potential of the second electrode layer 40, the metal thin film 52 is the first. It is formed along the surface of the electrode layer 30. When a voltage of opposite polarity is applied, the metal thin film 52 is formed along the surface of the second electrode layer 40. In either case, the metal thin film 52 reflects the light incident on the dimming panel 1.

By applying a voltage having a polarity opposite to the voltage applied to form the metal thin film 52, the precipitated metal thin film 52 can be dissolved and eliminated. As a result, as shown in FIG. 3A, the optical state of the electrochromic layer 50 becomes transparent. In this case, the voltage having the opposite polarity is such that the metal thin film 52 does not deposit on the opposite electrode layer (for example, the second electrode layer 40 in the example shown in FIG. 3B).

The metal ion contained in the electrochromic layer 50 is, for example, a silver (Ag) ion. In the present embodiment, for example, a silver compound which is a salt containing silver ions is used as the electrochromic material. Silver compounds include, but are not limited to, for example, silver nitrate (AgNO ₃ ), silver perchlorate (AgClO ₄ ), silver bromide (AgBr) and silver chloride (AgCl).

For example, the metal ion may be an ion of a noble metal such as gold (Au), platinum (Pt) or palladium (Pd). Alternatively, the metal ion may be a copper (Cu) ion. Since the electrochromic layer 50 contains an electrochromic material containing ions of a metal having an ionization tendency lower than that of hydrogen, such as a noble metal, the metal thin film 52 can be stably deposited when a voltage is applied.

The electrolytic solution may further contain a supporting electrolyte, a mediator, and a solvent such as dimethyl sulfoxide (DMSO). As the supporting electrolyte, mediator, solvent and the like, for example, the materials described in Patent Document 1 can be used.

Further, the electrochromic material used for the electrochromic layer 50 may be _{tungsten oxide (WO 3).} For example, the electrochromic layer 50, a WO ₃ film disposed on the first electrode layer 30, WO ₃ film and the electrolytic solution or the electrolyte provided in contact with the WO ₃ film between the second electrode layer 40 It may include layers. The electrochromic layer 50 is, for example, in a liquid state or a solid state.

The first auxiliary electrode 60 is arranged between the first electrode layer 30 and the first substrate 10. The first auxiliary electrode 60 is formed by using a material having a lower resistance than that of the first electrode layer 30. Specifically, the first auxiliary electrode 60 contains a metal. Specifically, the first auxiliary electrode 60 contains silver (Ag), copper (Cu), aluminum (Al), or the like as a metal. The first auxiliary electrode 60 has a light-shielding property.

As shown in FIGS. 1 and 4, the first auxiliary electrode 60 includes a plurality of first metal wires 61 and a plurality of second metal wires 62. Note that FIG. 4 is a plan view showing a first example of the arrangement of the first through hole 81 provided in the first insulating layer 80 of the dimming panel 1.

Each of the plurality of first metal wires 61 extends in the x-axis direction (first direction). Each of the plurality of second metal wires 62 extends in the y-axis direction (second direction). In the present embodiment, the first metal wire 61 and the second metal wire 62 are orthogonal to each other. That is, the plan view shape of the first auxiliary electrode 60 is a grid shape having a square opening shape.

Specifically, the plurality of first metal wires 61 are arranged parallel to each other and at equal intervals. The plurality of second metal wires 62 are arranged parallel to each other and at equal intervals. The distance between the adjacent first metal wires 61 and the distance between the adjacent second metal wires 62 are equal to each other, for example, 10 μm or more. The plurality of first metal wires 61 have the same size and shape as each other. The width of the first metal wire 61 and the width of the second metal wire 62 are, for example, 4 μm or less. As a result, the first auxiliary electrode 60 can be made inconspicuous when the first substrate 10 is visually observed. Further, the thickness of the first metal wire 61 and the thickness of the second metal wire 62 are, for example, less than 1 μm. The thickness of the intersection between the first metal wire 61 and the second metal wire 62 is also the same. The thickness of the first auxiliary electrode 60 is uniform in the plane.

The first auxiliary electrode 60 is formed by, for example, forming a metal thin film on the main surface of the first substrate 10 by sputtering or vapor deposition, and patterning the formed metal thin film by photolithography and etching. Alternatively, after forming a resist pattern on the main surface of the first substrate 10, a metal thin film may be formed by sputtering or vapor deposition so as to cover the resist pattern, and a grid-like first auxiliary electrode 60 may be formed by lift-off.

The second auxiliary electrode 70 is arranged between the second electrode layer 40 and the second substrate 20. The second auxiliary electrode 70 is formed by using a material having a lower resistance than the second electrode layer 40. Specifically, the second auxiliary electrode 70 contains a metal. Specifically, the second auxiliary electrode 70 contains silver (Ag), copper (Cu), aluminum (Al), or the like as a metal. The second auxiliary electrode 70 has a light-shielding property.

The shape, size, and forming method of the second auxiliary electrode 70 are the same as, for example, the first auxiliary electrode 60. In the present embodiment, the first auxiliary electrode 60 and the second auxiliary electrode 70 are arranged so as to be offset from each other so as not to match in a plan view.

Specifically, the plurality of first metal wires 61 included in the first auxiliary electrode 60 and the plurality of first metal wires 71 included in the second auxiliary electrode 70 are arranged so as not to overlap in a plan view. For example, as shown in the cross-sectional views of FIGS. 3A and 3B, the first metal wire 61 of the first auxiliary electrode 60 is arranged between two adjacent first metal wires 71 of the second auxiliary electrode 70. There is. In the present embodiment, in a plan view, the first metal wire 61 is arranged at the center between two adjacent first metal wires 71.

The same applies to the

second metal wires

62 and 72. Specifically, the plurality of second metal wires 62 included in the first auxiliary electrode 60 and the plurality of second metal wires 72 included in the second auxiliary electrode 70 are arranged so as not to overlap in a plan view. For example, the second metal wire 62 of the first auxiliary electrode 60 is arranged between two adjacent second metal wires 72 of the second auxiliary electrode 70. In the present embodiment, in a plan view, the second metal wire 62 is arranged at the center between two adjacent second metal wires 72.

By arranging the first auxiliary electrode 60 and the second auxiliary electrode 70 so as not to overlap with each other in this way, it is possible to suppress current concentration and improve the in-plane uniformity of the optical state. Further, it is possible to suppress the occurrence of moire caused by the first auxiliary electrode 60 and the second auxiliary electrode 70.

The first insulating layer 80 is arranged between the first auxiliary electrode 60 and the first electrode layer 30. Specifically, the first insulating layer 80 is formed on the main surface of the first substrate 10 so as to cover the first auxiliary electrode 60. For example, the plan view shape of the first insulating layer 80 is substantially the same as the plan view shape of the first substrate 10.

The first insulating layer 80 is a translucent insulating film. The first insulating layer 80 is formed by using an inorganic material or an organic material. As the inorganic material, silicon nitride, silicon oxide or silicon oxynitride can be used. As the organic material, a resin material such as acrylate or epoxy can be used.

The first insulating layer 80 has a plurality of first through holes 81. Each of the plurality of first through holes 81 is a contact hole for exposing a part of the first auxiliary electrode 60 and making an electrical connection with the first electrode layer 30. In the present embodiment, the shapes and sizes of the plurality of first through holes 81 are the same as each other. In a plan view, the areas of the plurality of first through holes 81 are equal to each other. The arrangement of the plurality of first through holes 81 will be described later with reference to FIGS. 4 to 8.

The first insulating layer 80 is formed with a uniform film thickness by a CVD (Chemical Vapor Deposition) method or a coating method. A plurality of first through holes 81 are formed by removing a part of the insulating film by photolithography and etching. Alternatively, the first insulating layer 80 in which a plurality of first through holes 81 are formed may be formed by the lift-off method.

The thickness of the first insulating layer 80 is, for example, in the range of several hundred nm or more and several μm or less. The thickness of the first insulating layer 80 is thicker than that of the first auxiliary electrode 60. As a result, when the first through hole 81 smaller than the line width of the first auxiliary electrode 60 is formed, the step in the vicinity of the first through hole 81 is reduced, and the film breakage of the first electrode layer 30 is suppressed. Can be done. The thickness of the first insulating layer 80 may be equal to the thickness of the first auxiliary electrode 60, or may be thinner than the thickness of the first auxiliary electrode 60.

The second insulating layer 90 is arranged between the second auxiliary electrode 70 and the second electrode layer 40. Specifically, the second insulating layer 90 is formed on the main surface of the second substrate 20 so as to cover the second auxiliary electrode 70. For example, the plan view shape of the second insulating layer 90 is substantially the same as the plan view shape of the second substrate 20.

The second insulating layer 90 is a translucent insulating film. The second insulating layer 90 is formed by using an inorganic material or an organic material. As the inorganic material, silicon nitride, silicon oxide or silicon oxynitride can be used. As the organic material, a resin material such as acrylate or epoxy can be used.

The second insulating layer 90 has a plurality of second through holes 91. Each of the plurality of second through holes 91 is a contact hole for exposing a part of the second auxiliary electrode 70 and making an electrical connection with the second electrode layer 40. In the present embodiment, the shapes and sizes of the plurality of second through holes 91 are the same as each other. The shape and size of the second through hole 91 are the same as the shape and size of the first through hole 81. In plan view, the areas of the plurality of second through holes 91 are equal to each other. The arrangement of the plurality of second through holes 91 is the same as the arrangement of the first through holes 81, and details will be described later.

The thickness of the second insulating layer 90 is, for example, in the range of several hundred nm or more and several μm or less. The thickness of the second insulating layer 90 is thicker than that of the second auxiliary electrode 70. As a result, when the second through hole 91 smaller than the line width of the second auxiliary electrode 70 is formed, the step in the vicinity of the second through hole 91 is reduced, and the film breakage of the second electrode layer 40 is suppressed. Can be done. The thickness of the second insulating layer 90 may be equal to the thickness of the second auxiliary electrode 70, or may be thinner than the thickness of the second auxiliary electrode 70.

Although not shown, the dimming panel 1 includes an annular sealing member formed along the outer periphery of each of the first substrate 10 and the second substrate 20. The sealing member has a function of preventing the electrolytic solution of the electrochromic layer 50 from leaking and maintaining the distance between the first substrate 10 and the second substrate 20. The sealing member is formed of, for example, an ultraviolet curable resin or a thermosetting resin.

Further, as shown in FIG. 1, a first bus bar 65 for supplying power to the first electrode layer 30 is provided at the end of the first substrate 10. The first bus bar 65 is an example of a first power feeding terminal portion connected to an end portion of the first electrode layer 30. A part of the first electrode layer 30 and the first auxiliary electrode 60 is drawn out from the sealing member and is electrically connected to the first bus bar 65.

Further, at the end of the second substrate 20, a second bus bar 75 for supplying power to the second electrode layer 40 is provided. The second bus bar 75 is an example of a second power feeding terminal portion connected to the end portion of the second electrode layer 40. A part of the second electrode layer 40 is drawn out from the sealing member and is electrically connected to the second bus bar 75.

The first bus bar 65 and the second bus bar 75 are provided along the opposite sides of the respective boards. Alternatively, the first bus bar 65 and the second bus bar 75 may be provided on adjacent sides in a plan view. For example, the first bus bar 65 may be provided along two opposite sides of the first substrate 10, and the second bus bar 75 may be provided along two opposite sides of the second substrate 20. The first bus bar 65 and the second bus bar 75 may be provided along the four sides of each substrate, respectively.

As shown in FIG. 1, the power supply 2 is connected to the first bus bar 65 and the second bus bar 75. The voltage from the power supply 2 is supplied to the first electrode layer 30 and the second electrode layer 40 via the first bus bar 65 and the second bus bar 75.

The dimming panel 1 can be formed as follows, for example. First, the first auxiliary electrode 60, the first insulating layer 80, and the first electrode layer 30 are formed on the main surface of the first substrate 10 in this order. Similarly, the second auxiliary electrode 70, the second insulating layer 90, and the second electrode layer 40 are formed on the main surface of the second substrate 20 in this order. After forming a sealing member in an annular shape on at least one of the first substrate 10 and the second substrate 20, an electrolytic solution containing an electrochromic material is arranged, and the first substrate 10 and the second substrate 20 are bonded and sealed. Harden the stop member. As a result, the dimming panel 1 is formed. The method for manufacturing the dimming panel 1 is not particularly limited.

[1-2. Arrangement of through holes]
Next, an arrangement example of the first through hole 81 will be described with reference to FIGS. 4 to 7. 4 to 7 are diagrams showing first to fourth examples of arrangement of the first through hole 81 provided in the first insulating layer 80 of the dimming panel 1, respectively.

As shown in FIG. 4, the plurality of first through holes 81 are provided at the intersection of the first metal wire 61 and the second metal wire 62 in a plan view. As a result, even if one of the first metal wire 61 and the second metal wire 62 is broken, the in-plane potential uniformity can be maintained by wrapping around through the other metal wire. By providing the first through hole 81 at the intersection, the wraparound distance can be shortened, so that the uniformity of the potential can be improved.

Further, as shown in FIG. 5, the plurality of first through holes 81 may be provided so as to overlap the plurality of first metal wires 61 in a plan view, and may be provided in any of the second metal wires 62. It does not have to overlap. Alternatively, as shown in FIG. 6, the plurality of first through holes 81 may be provided so as to overlap the plurality of second metal wires 62 in a plan view, and may be provided in any of the first metal wires 61. It does not have to overlap. For example, the first through hole 81 is provided in the center of two adjacent intersections of the first metal wire 61 or the second metal wire 62, respectively.

Further, as shown in FIG. 7, the plurality of first through holes 81 may include a through hole provided at the intersection and a through hole provided at a place other than the intersection in a mixed manner. .. Although FIG. 7 shows an example in which the first through hole 81 provided other than the intersection overlaps with the second metal wire 62, it may overlap with the first metal wire 61. Alternatively, the plurality of first through holes 81 provided other than the intersection may include a through hole that overlaps the first metal wire 61 and a through hole that overlaps the second metal wire 62.

The arrangement of the second through hole 91 is the same as the arrangement of the first through hole 81. That is, as shown in FIG. 4 or 7, the plurality of second through holes 91 may be provided at the intersection of the first metal wire 71 and the second metal wire 72. Alternatively, as shown in FIG. 5 or 6, the plurality of second through holes 91 may be provided at a portion other than the intersection of the first metal wire 71 and the second metal wire 72.

In the example shown in FIG. 4, the first through hole 81 is larger than the line width of the first metal wire 61 and the line width of the second metal wire 62. Specifically, the first through hole 81 completely exposes the intersection of the first metal wire 61 and the second metal wire 62. As a result, the contact area between the first electrode layer 30 provided in the first through hole 81 and the first metal wire 61 and the second metal wire 62 can be increased, so that the contact resistance can be reduced. Further, since the size of the first through hole 81 is large, the step formed in the first electrode layer 30 becomes small, and the occurrence of film breakage can be suppressed. The same applies to the examples shown in FIGS. 5 to 7.

Alternatively, each of the plurality of first through holes 81 may be arranged inside the first metal wire 61 in a plan view. FIG. 8 is an enlarged plan view of the first through hole 81 and the first auxiliary electrode 60. As shown in FIG. 8, the first through hole 81 may be provided inside the intersection of the first metal wire 61 and the second metal wire 62. For example, since the plan view shape of the first through hole 81 is square, one side w of the opening of the first through hole 81 is larger than the line width w1 of the first metal wire 61 and the line width w2 of the second metal wire 62. short. As a result, the step difference of the first electrode layer 30 is suppressed, so that the occurrence of film breakage of the first electrode layer 30 can be suppressed.

The plan view shape of the first through hole 81 is a rectangle such as a square, but it may be a circle. In this case, the opening diameter of the first through hole 81 may be shorter than the line width w1 of the first metal wire 61 and the line width w2 of the second metal wire 62. The shape and size of the second through hole 91 in a plan view are the same as those of the first through hole 81.

[1-3. Change in optical state]
Next, a change in the optical state of the dimming panel according to the present embodiment will be described.

The optical state of the dimming panel 1 is controlled by the control circuit 3 shown in FIG. Specifically, the control circuit 3 controls the power supply 2 and changes the magnitude and polarity of the voltage applied to each of the first electrode layer 30 and the second electrode layer 40 to change the optics of the dimming panel 1. The state can be changed.

The power supply 2 is a voltage source for supplying a predetermined voltage to each of the first electrode layer 30 and the second electrode layer 40. The power supply 2 is a DC power supply that generates and supplies a pulsed pulsating voltage (DC voltage) based on power supplied from an external power source such as a commercial power supply or a storage battery. The power supply 2 can change the magnitude and polarity of the output voltage under the control of the control circuit 3.

The control circuit 3 is realized by, for example, an LSI (Large Scale Integration) which is an integrated circuit (IC: Integrated Circuit). The integrated circuit is not limited to the LSI, and may be a dedicated circuit or a general-purpose processor. For example, the control circuit 3 may be a microcontroller. The control circuit 3 may be a programmable FPGA (Field Programmable Gate Array) or a reconfigurable processor in which the connection and setting of circuit cells in the LSI can be reconfigured. The function executed by the control circuit 3 may be realized by software or hardware.

The dimming panel 1 according to the present embodiment is used by being installed in a window of a building or a moving body. The power supply 2 and the control circuit 3 are installed, for example, inside a window frame or a wall on which the dimming panel 1 is installed. Alternatively, the power supply 2 and the control circuit 3 may be provided at the end of the first substrate 10 or the second substrate 20 of the dimming panel 1.

[1-3-1. Translucent state (transparent state)]
The voltage applied by the control circuit 3 between the first electrode layer 30 and the second electrode layer 40 is set to 0V. In this case, the optical state of the dimming panel 1 is the translucent state (transparent state) shown in FIG. 3A. When the applied voltage is 0V, the metal ions contained in the electrochromic layer 50 are not precipitated. Therefore, the electrochromic layer 50 is in a translucent state in which light is transmitted. When the refractive indexes of the first substrate 10, the first insulating layer 80, the first electrode layer 30, the electrochromic layer 50, the second electrode layer 40, the second insulating layer 90, and the second substrate 20 are substantially equal. The incident light passes as it is. That is, the optical state of the dimming panel 1 becomes a transparent state.

[1-3-2. Reflection state]
Further, the control circuit 3 applies a voltage to the first electrode layer 30 and the second electrode layer 40 so that the potential of the first electrode layer 30 is lower than the potential of the second electrode layer 40. In this case, the optical state of the dimming panel 1 is the reflection state shown in FIG. 3B. Since the potential of the first electrode layer 30 is lower than the potential of the second electrode layer 40, the metal in the electrochromic layer 50 is deposited on the surface of the first electrode layer 30 as a metal thin film 52. Therefore, the dimming panel 1 is in a reflective state that reflects light.

Although the metal thin film 52 is formed on the surface of the first electrode layer 30 in FIG. 3B, the metal thin film 52 may be formed on the surface of the second electrode layer 40. For example, the control circuit 3 applies a voltage to the first electrode layer 30 and the second electrode layer 40 so that the potential of the first electrode layer 30 is higher than the potential of the second electrode layer 40, thereby forming a metal thin film. 52 is formed on the surface of the second electrode layer 40.

[1-4. Modification example]
Subsequently, a modified example of the first embodiment will be described. In the following modification, the differences from the first embodiment will be mainly described, and the common points will be omitted or simplified.

FIG. 9 is a cross-sectional view of the dimming panel 101 according to this modified example. The dimming panel 101 shown in FIG. 9 is not provided with the second auxiliary electrode 70 and the second insulating layer 90 as compared with the dimming panel 1 according to the embodiment. Specifically, the second electrode layer 40 is directly provided on the main surface of the second substrate 20.

In this case, as shown in FIG. 9, when the metal thin film 52 is formed on the surface of the first electrode layer 30, when the dimming panel 1 is viewed from the second substrate 20 side (the positive side of the z-axis). The first auxiliary electrode 60 disappears. That is, since the auxiliary electrode is not provided in front of the metal thin film 52, the appearance of the metal thin film 52 at the time of precipitation can be improved.

(Embodiment 2)
Subsequently, the second embodiment will be described.

In the second embodiment, the arrangement of the first through hole and the second through hole is different from that of the first embodiment. In the following, the differences from the first embodiment will be mainly described, and the common points will be omitted or simplified.

[2-1. Overview]
First, the outline of the dimming panel according to the second embodiment will be described with reference to FIGS. 10 and 11.

FIG. 10 is a diagram showing the configuration of the dimming panel 201 according to the present embodiment. The method of illustration in FIG. 10 is the same as that in FIG.

The XIA-XIA line shown in FIG. 10 is a line along the first metal wire 61 extending in the x-axis direction of the first auxiliary electrode 60. The XIB-XIB line is a line along the first metal wire 71 extending in the x-axis direction of the second auxiliary electrode 70. The XIA-XIA line and the XIB-XIB line are positions that do not overlap in a plan view. That is, the first metal wire 61 included in the first auxiliary electrode 60 and the first metal wire 71 included in the second auxiliary electrode 70 are arranged at positions where they do not overlap in a plan view.

FIG. 11 is a cross-sectional view of the dimming panel 201 at the positions indicated by the XIA-XIA line and the XIB-XIB line of FIG. Specifically, FIG. 11A shows a cross section of the first substrate 10 side in the XIA-XIA line, and FIG. 11B shows a cross section of the second substrate 20 side in the XIB-XIB line. ing. The method of illustration in FIG. 11 is the same as that in FIG.

As shown in FIGS. 10 and 11, the dimming panel 201 includes a first substrate 10, a second substrate 20, a first electrode layer 30, a second electrode layer 40, an electrochromic layer 50, and a first substrate. 1 Auxiliary electrode 60, a second auxiliary electrode 70, a first insulating layer 80, and a second insulating layer 90 are provided. The dimming panel 201 has a flat plate shape. As shown in FIG. 11, along the thickness direction (z-axis direction) of the dimming panel 201, the first substrate 10, the first auxiliary electrode 60, the first insulating layer 80, the first electrode layer 30, and the electrochromic layer. 50, the second electrode layer 40, the second insulating layer 90, the second auxiliary electrode 70, and the second substrate 20 are arranged side by side in this order.

As shown in FIGS. 10 and 11, in the dimming panel 201 according to the present embodiment, the first through hole 81 is formed in the first insulating layer 80 as compared with the dimming panel 1 according to the first embodiment. The difference is that the first through hole 281 is provided instead of the second through hole 281 and the second through hole 291 is provided in the second insulating layer 90 instead of the second through hole 91.

The optical state of the dimming panel 201 is changed by controlling the power supply 2 by the control circuit 3 shown in FIG. In the present embodiment, the optical state of the dimming panel 201 is a translucent state (transparent state) for transmitting the light incident on the dimming panel 201 and a reflecting state for reflecting the light incident on the dimming panel 201. It can be changed.

FIG. 12A is a cross-sectional view of the dimming panel 201 in a transparent state at the position shown by the line XII-XII in FIG. FIG. 12B is a cross-sectional view of the dimming panel 201 in the reflection state at the position shown by the line XII-XII in FIG. 12A and 12B correspond to FIGS. 3A and 3B according to the first embodiment.

[2-2. Arrangement of through holes]
Next, an arrangement example of the first through hole 281 will be described with reference to FIGS. 13 to 16. 13 to 16 are diagrams showing first to fourth examples of arrangement of the first through hole 281 provided in the first insulating layer 80 of the dimming panel 201, respectively.

As shown in FIG. 13, the plurality of first through holes 281 are provided at the intersection of the first metal wire 61 and the second metal wire 62 in a plan view. As a result, even if one of the first metal wire 61 and the second metal wire 62 is broken, the in-plane potential uniformity can be maintained by wrapping around through the other metal wire. By providing the first through hole 281 at the intersection, the wraparound distance can be shortened, so that the uniformity of the potential can be improved.

In the present embodiment, the arrangement densities of the plurality of first through holes 281 differ depending on the region in a plan view. The arrangement density is the number of first through holes 281 provided per unit area. The unit area is, for example, an area of 10% or more and 20% or less of the area of the first substrate 10 in a plan view. For example, as shown in FIG. 13, in a plan view, the number of first through holes 281 included in the first region 211 is different from the number of first through holes 281 included in the second region 212. Both the first region 211 and the second region 212 are square regions having the above unit area and do not overlap with each other. Both the first region 211 and the second region 212 include nine intersections of the first auxiliary electrode 60. The first region 211 is a region closer to the first bus bar 65 than the second region 212.

As described above, the first through hole 281 is a contact hole for electrically connecting the first auxiliary electrode 60 and the first electrode layer 30. Therefore, the arrangement density of the first through hole 281 corresponds to the connection area between the first auxiliary electrode 60 and the first electrode layer 30 per unit area. That is, as the number of the first through holes 281 increases, the connection area between the first auxiliary electrode 60 and the first electrode layer 30 increases, so that the current easily flows through the first auxiliary electrode 60. As the number of the first through holes 281 is reduced, the connection area between the first auxiliary electrode 60 and the first electrode layer 30 becomes smaller, so that it becomes difficult for current to flow.

By the way, when the first auxiliary electrode 60 is not provided, the influence of the resistance component of the first electrode layer 30 is small in the first region 211 near the first bus bar 65, so that a current easily flows. On the other hand, in the second region 212 away from the first bus bar 65, the influence of the resistance component of the first electrode layer 30 becomes large, and it is difficult for the current to flow. That is, when the first auxiliary electrode 60 is not provided, the current flowing in the plane is not uniform.

On the other hand, in the present embodiment, the arrangement density of the first through hole 281 is adjusted based on the distance from the first bus bar 65. Specifically, the arrangement density of the first through hole 281 increases as the distance from the first bus bar 65 increases. The arrangement density of the first through hole 281 is smaller as it is closer to the first bus bar 65. For example, the number of first through holes 281 included in the first region 211 near the first bus bar 65 is smaller than the number of first through holes 281 included in the second region 212 away from the first bus bar 65. In the second region 212, which has a large number of first through holes 281, the resistance becomes small and current easily flows. Since the current easily flows in the second region 212 away from the first bus bar 65, the current flowing in the plane can be made uniform.

Further, as shown in FIG. 14, the plurality of first through holes 281 may be provided so as to overlap the plurality of first metal wires 61 in a plan view, and may be provided in any of the second metal wires 62. It does not have to overlap. Alternatively, as shown in FIG. 15, the plurality of first through holes 281 may be provided so as to overlap the plurality of second metal wires 62 in a plan view, and may be provided in any of the first metal wires 61. It does not have to overlap. For example, the first through hole 281 is provided in the center of two adjacent intersections of the first metal wire 61 or the second metal wire 62, respectively.

Further, as shown in FIG. 16, the plurality of first through holes 281 may include a through hole provided at the intersection and a through hole provided at a place other than the intersection in a mixed manner. .. In FIG. 16, the plurality of first through holes 281 provided other than the intersection include a through hole overlapping the first metal wire 61 and a through hole overlapping the second metal wire 62.

The arrangement of the second through hole 291 is the same as the arrangement of the first through hole 281. That is, the plurality of second through holes 291 may be provided at the intersection of the first metal wire 71 and the second metal wire 72, as shown in FIG. 13 or FIG. Alternatively, as shown in FIG. 14 or 15, the plurality of second through holes 291 may be provided at a portion other than the intersection of the first metal wire 71 and the second metal wire 72.

Similar to the first through hole 281, in a plan view, the arrangement densities of the plurality of second through holes 291 differ depending on the region. The arrangement density of the second through hole 291 increases as the distance from the second bus bar 75 increases. As shown in FIG. 10, the first bus bar 65 is provided on the negative side in the x-axis direction, and the second bus bar 75 is provided on the positive side in the x-axis direction. Therefore, as shown in FIG. 11, the first through hole 281 is arranged so that the arrangement density increases toward the positive side in the x-axis direction. The second through hole 291 is arranged so that the arrangement density increases toward the negative side in the x-axis direction.

In the example shown in FIG. 13, the first through hole 281 is larger than the line width of the first metal wire 61 and the line width of the second metal wire 62. Specifically, the first through hole 281 completely exposes the intersection of the first metal wire 61 and the second metal wire 62. As a result, the contact area between the first electrode layer 30 provided in the first through hole 281 and the first metal wire 61 and the second metal wire 62 can be increased, so that the contact resistance can be reduced. Further, since the size of the first through hole 281 is large, the step formed in the first electrode layer 30 becomes small, and the occurrence of film breakage can be suppressed. The same applies to the examples shown in FIGS. 14 to 16.

Alternatively, each of the plurality of first through holes 281 may be arranged inside the first metal wire 61 in a plan view, as in FIG.

The plan view shape of the first through hole 281 is a rectangle such as a square, but it may be a circle. In this case, the opening diameter of the first through hole 281 may be shorter than the line width w1 of the first metal wire 61 and the line width w2 of the second metal wire 62. The shape and size of the second through hole 291 in a plan view are the same as those of the first through hole 281.

[2-3. Change in optical state]
Next, a change in the optical state of the dimming panel 201 according to the present embodiment will be described.

The optical state of the dimming panel 201 is controlled by the control circuit 3 shown in FIG. Specifically, the control circuit 3 controls the power supply 2 and changes the magnitude and polarity of the voltage applied to each of the first electrode layer 30 and the second electrode layer 40 to change the optics of the dimming panel 201. The state can be changed.

[2-3-1. Translucent state (transparent state)]
The voltage applied by the control circuit 3 between the first electrode layer 30 and the second electrode layer 40 is set to 0V. In this case, the optical state of the dimming panel 201 is the translucent state (transparent state) shown in FIG. 12A. When the applied voltage is 0V, the metal ions contained in the electrochromic layer 50 are not precipitated. Therefore, the electrochromic layer 50 is in a translucent state in which light is transmitted. When the refractive indexes of the first substrate 10, the first insulating layer 80, the first electrode layer 30, the electrochromic layer 50, the second electrode layer 40, the second insulating layer 90, and the second substrate 20 are substantially equal. The incident light passes as it is. That is, the optical state of the dimming panel 201 becomes a transparent state.

[2-3-2. Reflection state]
Further, the control circuit 3 applies a voltage to the first electrode layer 30 and the second electrode layer 40 so that the potential of the first electrode layer 30 is lower than the potential of the second electrode layer 40. In this case, the optical state of the dimming panel 201 is the reflection state shown in FIG. 12B. Since the potential of the first electrode layer 30 is lower than the potential of the second electrode layer 40, the metal in the electrochromic layer 50 is deposited on the surface of the first electrode layer 30 as a metal thin film 52. Therefore, the dimming panel 201 is in a reflective state that reflects light.

Although the metal thin film 52 is formed on the surface of the first electrode layer 30 in FIG. 12B, the metal thin film 52 may be formed on the surface of the second electrode layer 40. For example, the control circuit 3 applies a voltage to the first electrode layer 30 and the second electrode layer 40 so that the potential of the first electrode layer 30 is higher than the potential of the second electrode layer 40, thereby forming a metal thin film. 52 is formed on the surface of the second electrode layer 40.

[2-4. Modification example]
Subsequently, a modified example of the second embodiment will be described. In the following modification, the differences from the second embodiment will be mainly described, and the common points will be omitted or simplified.

FIG. 17 is a cross-sectional view of the dimming panel 301 according to this modified example. The dimming panel 101 shown in FIG. 17 is not provided with the second auxiliary electrode 70 and the second insulating layer 90 as compared with the dimming panel 201 according to the second embodiment. Specifically, the second electrode layer 40 is directly provided on the main surface of the second substrate 20.

In this case, as shown in FIG. 17, when the metal thin film 52 is formed on the surface of the first electrode layer 30, when the dimming panel 301 is viewed from the second substrate 20 side (the positive side of the z-axis). The first auxiliary electrode 60 disappears. That is, since the auxiliary electrode is not provided in front of the metal thin film 52, the appearance of the metal thin film 52 at the time of precipitation can be improved.

(Embodiment 3)
Subsequently, the third embodiment will be described.

In the third embodiment, the arrangement and size of the first through hole and the second through hole are different from those in the second embodiment. In the following, the differences from the second embodiment will be mainly described, and the common points will be omitted or simplified.

[3-1. Overview]
FIG. 18 is a cross-sectional view of the dimming panel 401 according to the present embodiment. The cross-sectional view shown in FIG. 18 is the same as that in FIG. Specifically, FIG. 18A shows a cross section of the first substrate 10 side along a line along the first metal wire 61 (corresponding to the XIA-XIA wire in FIG. 10). FIG. 18B shows a cross section of the second substrate 20 side along a line along the first metal wire 71 (corresponding to the XIB-XIB wire of FIG. 10).

As shown in FIG. 18, in the dimming panel 401 according to the present embodiment, the first insulating layer 80 is replaced with the first through hole 281 as compared with the dimming panel 201 according to the second embodiment. The difference is that the first through hole 481 is provided and the second through hole 491 is provided in the second insulating layer 90 instead of the second through hole 291.

In the present embodiment, the arrangement densities of the plurality of first through holes 481 are uniform. The area of the plurality of first through holes 481 varies depending on the region. Similarly, the placement densities of the plurality of second through holes 491 are uniform. The area of the plurality of second through holes 491 varies depending on the region.

[3-2. Arrangement and size of through holes]
Hereinafter, the arrangement and size of the first through hole 481 will be described with reference to FIG. FIG. 19 is a plan view showing an arrangement example of the first through hole 481 provided in the first insulating layer 80 of the dimming panel 401 according to the present embodiment.

As shown in FIG. 19, a plurality of first through holes 481 are provided at the intersection of the first metal wire 61 and the second metal wire 62 in a plan view. In the present embodiment, in the plan view, the plurality of first through holes 481 include through holes having different sizes in the plan view. Specifically, the area of the first through hole 481 is larger as the distance from the first bus bar 65 is larger, and is smaller as the area is closer to the first bus bar 65. In the example shown in FIG. 19, the area of the first through hole 481 gradually increases as the distance from the first bus bar 65 increases. For example, the area of the first through hole 481 overlapping the one second metal wire 62 is different from the area of the first through hole 481 overlapping the second metal wire 62 adjacent thereto. That is, in the nine first through holes 481 included in the first region 211, the area of the first through hole 481 closest to the first bus bar 65 is the area of the first through hole 481 farthest from the first bus bar 65. Smaller than

Alternatively, the plurality of first through holes 481 may include two types of through holes having different areas. For example, the first substrate 10 is divided into two by a dividing line parallel to the y-axis, and the areas of the first through holes 481 in the region on the first bus bar 65 side are equal to each other and opposite to those of the first bus bar 65. It may be smaller than the area of the first through hole 481 in the side region. In this case, the nine first through holes 481 included in the first region 211 are all the same size, and are smaller than the nine first through holes 481 included in the second region 212.

Note that the plurality of first through holes 481 may include three or more types of through holes having different areas. For example, in a plan view, the first substrate 10 may be virtually divided into a plurality of regions according to the distance from the first bus bar 65, and the areas of the first through holes 481 may be equal to each other in the divided regions. ..

The larger the area of the first through hole 481, the larger the connection area between the first electrode layer 30 and the first auxiliary electrode 60 via the first through hole 481. Therefore, in the second region 212 away from the first bus bar 65, the area of the first through hole 481 is larger than that of the first region 211 near the first bus bar 65, so that the first electrode layer 30 and the first auxiliary electrode 60 The connection area with is large. Therefore, since the current easily flows in the second region 212 away from the first bus bar 65, the current flowing in the plane can be made uniform.

The same applies to the second through hole 491. Specifically, the area of the second through hole 491 increases as the distance from the second bus bar 75 increases, and decreases as the area approaches the second bus bar 75. Therefore, as shown in FIG. 18, the first through hole 481 is provided so that the area increases toward the positive side in the x-axis direction. The second through hole 491 is arranged so that the area increases toward the negative side in the x-axis direction.

In the example shown in FIG. 19, the first through hole 481 is provided at the intersection of the first metal wire 61 and the second metal wire 62, but is not limited to this. Similar to the case shown in FIGS. 14 to 16, the first through hole 481 may be provided at a portion other than the intersection of the first metal wire 61 and the second metal wire 62. That is, at least one of the plurality of first through holes 481 does not have to overlap the first metal wire 61 and the second metal wire 62 in a plan view. Alternatively, at least one of the plurality of first through holes 481 may overlap the second metal wire 62 and not overlap the first metal wire 61 in a plan view. The same applies to the second through hole 491.

In the present embodiment, the first insulating layer 80 may be provided with a plurality of first through holes 281 having different arrangement densities depending on the region, as in the second embodiment. Alternatively, the second insulating layer 90 may be provided with a plurality of second through holes 291 having different arrangement densities depending on the region, as in the second embodiment. That is, the second embodiment and the third embodiment may be combined.

Further, for example, the plurality of first through holes 481 may differ not only in area but also in arrangement density depending on the region. Similarly, not only the area but also the arrangement density of the plurality of second through holes 491 may differ depending on the region. Alternatively, for example, one of the plurality of first through

holes

281 or 481 and the plurality of second through

holes

291 or 491 may have a uniform arrangement density and may have the same area.

(Other embodiments)
The dimming panel according to one or more embodiments has been described above based on the embodiments, but the present disclosure is not limited to these embodiments. As long as the gist of the present disclosure is not deviated, various modifications that can be conceived by those skilled in the art are applied to the present embodiment, and a form constructed by combining components in different embodiments is also included in the scope of the present disclosure. Is done.

For example, the optical state of the electrochromic layer 50 may include a transparent state having a sufficiently high transmittance and a colored state having a low transmittance (semi-transparent state). By adjusting the magnitude of the voltage applied to the first electrode layer 30 and the second electrode layer 40, the thickness of the deposited metal thin film 52 can be adjusted. A colored state can be formed by precipitating the thin metal thin film 52.

Further, for example, at least one of the first auxiliary electrode 60 and the second auxiliary electrode 70 may have a striped shape in a plan view. For example, the first auxiliary electrode 60 may include a plurality of first metal wires 61 and may not include the second metal wire 62. Alternatively, the first auxiliary electrode 60 may include a plurality of second metal wires 62 and may not include the first metal wire 61. The same applies to the second auxiliary electrode 70. When the plan view shape of the first auxiliary electrode 60 or the second auxiliary electrode 70 is striped, the first region 211 and the second region 212 may be square regions including three metal wires. ..

Further, the first auxiliary electrode 60 and the second auxiliary electrode 70 may coincide with each other in a plan view. For example, the plurality of first metal wires 61 and the plurality of first metal wires 71 may partially or completely overlap in a plan view. For example, the plurality of second metal wires 62 and the plurality of second metal wires 72 may partially or completely overlap in a plan view.

Further, for example, the first metal wire 61 and the second metal wire 62 may intersect at an angle. Further, the line width and spacing of the first metal wire 61 do not have to be uniform in the plane. The same applies to the second metal wire 62. The same applies to the first metal wire 71 and the second metal wire 72 of the second auxiliary electrode 70.

Further, for example, the first auxiliary electrode 60 and the second auxiliary electrode 70 may be made of a material having a lower resistance than the material constituting the first electrode layer 30 and the second electrode layer 40, and may be a material having translucency. It may be formed by using. In this case, the refractive indexes of the first auxiliary electrode 60 and the second auxiliary electrode 70 are the first substrate 10, the second substrate 20, the first electrode layer 30, the second electrode layer 40, the first insulating layer 80, and the first. The refractive index of each of the two insulating layers 90 may be equal to or different from each other. By making the refractive indexes of the layers equal, the transparency of the dimming panel 1 in the translucent state can be enhanced.

Further, for example, when two first bus bars 65 are provided along two sides of the first substrate 10, the larger the distance from each of the two first bus bars 65, the more the first through hole 281 is formed. The placement density may be high. For example, when two first bus bars 65 are provided on two opposite sides of the first substrate 10, the arrangement density of the first through holes 281 becomes larger toward the center of the first substrate 10. When two first bus bars 65 are provided on two adjacent sides of the first substrate 10, the area closer to the diagonal of the angle formed by the two first bus bars 65 is the arrangement density of the first through holes 281. Becomes larger. When four first bus bars 65 are provided along the four sides of the first substrate 10, the arrangement density of the first through holes 281 becomes larger toward the center of the first substrate 10. These things are the same for the second through hole 291 in relation to the second bus bar 75. The same applies to the area of the first through hole 481 and the area of the second through hole 491.

Further, for example, at least one of the arrangement density and the area of the first through hole 281 may be adjusted independently of the distance from the first bus bar 65. For example, in a region where the thickness of the first electrode layer 30 is smaller than the others, the resistance of the first electrode layer 30 increases, so that at least one of the arrangement density and the area of the first through hole 281 may be increased. The same may be applied to at least one of the arrangement density and the area of the second through hole 291.

Further, for example, one aspect of the present disclosure may be realized as a panel device including a dimming panel according to each embodiment and a control circuit 3 for controlling the power supply 2. Further, the panel device may include a power supply 2.

Further, in each of the above embodiments, various changes, replacements, additions, omissions, etc. can be made within the claims or the equivalent range thereof.

The present disclosure can be used as a dimming panel capable of suppressing a voltage drop in an electrode, and can be used, for example, as a building material such as a window of a building or a moving body.

1, 101, 201, 301, 401 Dimming panel 2 Power supply 3 Control circuit 10 1st substrate 20 2nd substrate 30 1st electrode layer 40 2nd electrode layer 50 Electrochromic layer 52 Metal thin film 60 1st

auxiliary electrode

61, 71

1st metal wire

62, 72 2nd metal wire 65 1st bus bar 70 2nd auxiliary electrode 75 2nd bus bar 80 1st insulating

layer

81, 281, 481 1st through hole 90 2nd insulating

layer

91, 291, 491 2nd Through hole 211 1st region 212 2nd region

Claims

The first substrate having translucency and
A second substrate having translucency, which is arranged to face the first substrate, and
An electrochromic layer arranged between the first substrate and the second substrate,
A translucent first electrode layer arranged between the electrochromic layer and the first substrate,
A second electrode layer having translucency, which is arranged between the electrochromic layer and the second substrate,
A first auxiliary electrode containing a metal, which is arranged between the first electrode layer and the first substrate,
A translucent first insulating layer arranged between the first auxiliary electrode and the first electrode layer is provided.
The first insulating layer has a plurality of first through holes and has a plurality of first through holes.
The first electrode layer is electrically connected to the first auxiliary electrode through the plurality of first through holes.
Dimming panel.
In plan view, at least one of the arrangement densities and areas of the plurality of first through holes differs depending on the region.
The dimming panel according to claim 1.
The areas of the plurality of first through holes are equal to each other,
The arrangement densities of the plurality of first through holes differ depending on the region.
The dimming panel according to claim 2.
The arrangement density of the plurality of first through holes is uniform,
The areas of the plurality of first through holes differ depending on the region.
The dimming panel according to claim 2.
Further, a first feeding terminal portion connected to the end portion of the first electrode layer is provided.
At least one of the arrangement density and the area increases as the distance from the first power feeding terminal portion increases.
The dimming panel according to any one of claims 2 to 4.
Each of the first auxiliary electrodes includes a plurality of first metal wires extending in the first direction.
The dimming panel according to any one of claims 1 to 5.
The first auxiliary electrode further comprises a plurality of second metal wires, each extending in a second direction intersecting the first direction and intersecting at least one of the plurality of first metal wires.
The dimming panel according to claim 6.
The plurality of first through holes are provided at the intersection of the first metal wire and the second metal wire in a plan view.
The dimming panel according to claim 7.
Each of the plurality of first through holes is arranged inside the first metal wire in a plan view.
The dimming panel according to any one of claims 6 to 8.
The first insulating layer is formed by using an inorganic material.
The dimming panel according to any one of claims 1 to 9.
Moreover,
A second auxiliary electrode containing a metal, which is arranged between the second electrode layer and the second substrate,
A second insulating layer having translucency, which is arranged between the second auxiliary electrode and the second electrode layer, is provided.
The second insulating layer has a plurality of second through holes and has a plurality of second through holes.
The second electrode layer is electrically connected to the second auxiliary electrode through the plurality of second through holes.
The dimming panel according to any one of claims 1 to 10.
In plan view, at least one of the arrangement densities and areas of the plurality of second through holes differs depending on the region.
The dimming panel according to claim 11.
The first auxiliary electrode and the second auxiliary electrode each include a plurality of first metal wires extending in the first direction.
The plurality of first metal wires included in the first auxiliary electrode and the plurality of first metal wires included in the second auxiliary electrode are arranged so as not to overlap in a plan view.
The dimming panel according to claim 11 or 12.