WO2021160082A1 - 光学元件面形的瞬态数字莫尔移相干涉测量装置和方法 - Google Patents
光学元件面形的瞬态数字莫尔移相干涉测量装置和方法 Download PDFInfo
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- 230000010363 phase shift Effects 0.000 title abstract description 8
- 230000010287 polarization Effects 0.000 claims abstract description 88
- 238000003384 imaging method Methods 0.000 claims abstract description 46
- 239000000969 carrier Substances 0.000 claims abstract description 12
- 238000005305 interferometry Methods 0.000 claims description 38
- 230000002452 interceptive effect Effects 0.000 claims description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
- G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02041—Interferometers characterised by particular imaging or detection techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Definitions
- the present invention relates to the technical field of photoelectric detection, in particular to a transient digital moiré phase-shifting interferometry device with the surface shape of an optical element, and a transient digital moiré phase-shifting interferometry device with the surface shape of the optical element. method.
- the digital moiré phase-shifting interferometry method is a kind of aspheric surface detection method, which belongs to a kind of partial compensation interferometry. It is an instantaneous anti-vibration interferometry method, which can achieve high-precision measurement without a phase-shifting mechanism.
- the digital moiré phase-shifting interferometry method requires low-pass filtering, the residual wavefront is large, or the carrier frequency is large, and the spectrum aliasing will occur, resulting in the phenomenon of solving the wrong area in the digital moiré phase-shifting interferometry method , And the location of the solution error area is related to the size of the space carrier loaded. This leads to the limitation of the remaining wavefront bandwidth when using the digital moiré phase-shifting interferometry method. As a result, the residual wavefront bandwidth of the digital moiré phase-shifting interferometry method is only 0.707 of that of the traditional multi-step phase-shifting interferometry method.
- Patent No. 201810067710.4 Title of Invention: Digital Moiré Phase-shifting Interferometry Method Based on Two-Step Carrier Splicing Method proposes a two-step carrier splicing method based on the digital Moiré Phase-shifting interferometry method.
- the interferogram of the carrier two surface errors with different solution error regions are solved. After that, the correct areas of the two surface shape errors are extracted for splicing, and the complete surface shape error is finally obtained.
- the two-step carrier splicing method expands the measurement range of the traditional digital moiré phase-shifting method and eliminates the remaining wavefront bandwidth limitation of the traditional digital moiré phase-shifting method, making the remaining wavefront bandwidth of the digital moiré phase-shifting interferometric method equal to
- the traditional phase-shifting interference method is equivalent, but the existing two-step carrier splicing method needs to sequentially load the space carrier f R1 , collect the corresponding interferogram I, load the space carrier f R2 , and collect the corresponding interferogram II, that is, two interferograms.
- the acquisition requires a period of time, which means that the two-step carrier splicing method loses the instantaneous anti-vibration characteristics of the digital moiré phase-shifting method.
- Polarization grating is a diffractive optical element that realizes selective light splitting based on the polarization state of incident light.
- the diffraction angle depends on the spatial period of the grating.
- the incident light of the polarization grating is linearly polarized light, its outgoing light is +1-order diffracted light and -1 order diffracted light, among which the +1-order diffracted light is left-handed circularly polarized light, and -1 is right-handed circularly polarized light;
- the incident light of the polarization grating is right-handed circularly polarized light, the outgoing light is +1-order diffracted light, and the polarization state of the diffracted light is left-handed circularly polarized light;
- the incident light of the polarization grating is left-handed circularly polarized light, its outgoing light It is the -1st order diffracted light, and the polarization state of the diffracted light is right-handed circularly polarized light.
- the technical problem to be solved by the present invention is to provide a transient digital moiré phase-shifting interferometry device with the surface shape of the optical element, which solves the need to sacrifice the instantaneous impedance when the two-step carrier splicing method is used.
- the vibration property is exchanged for the defect of the measurement range, which expands the measurement range of the traditional digital moiré phase-shifting method, while retaining the instantaneous anti-vibration characteristics of the digital moiré phase-shifting method.
- the transient digital Moiré phase-shifting interferometry device with the surface shape of the optical element includes: a light source (1), a beam splitter (2), a reference mirror (3), and a first polarization grating ( 4)
- the light source emits monochromatic linearly polarized light, after being split by the beam splitter, part of it is reflected to the surface of the reference mirror, and part of it is transmitted to the first polarization grating.
- the monochromatic linearly polarized light incident on the surface of the reference mirror is reflected by the reference mirror and then passes through the beam splitter.
- the monochromatic linearly polarized light incident on the first polarization grating is divided by the light splitting performance of the first polarization grating into +1 order left-handed circularly polarized diffracted light as the first beam and -1 order right-handed circularly polarized diffracted light as the second light beam.
- the beam of light and the incident light form two angles of equal magnitude and opposite directions.
- the different spatial carriers with frequencies f R1 and f R2 they enter the surface of the measured mirror and are reflected back to the first polarization grating after passing through the first polarization grating.
- the first light beam becomes right-handed circularly polarized light
- the second light beam becomes left-handed circularly polarized light, both of which return to the beam splitter, and are reflected by the beam splitter and then reflected by the reference mirror before passing through the beam splitter.
- the monochromatic linearly polarized light produces interference, where the first light beam and the right-handed circularly polarized component of the linearly polarized light produce the first interference light, and the second light beam and the left-handed circularly polarized component of the linearly polarized light produce the second interference light.
- An interference light exits to the first imaging objective lens after passing through the second polarization grating, and enters the first camera after being condensed by the first imaging objective lens to obtain a first interference pattern.
- the second interference light exits to the second imaging objective lens after passing through the second polarization grating , After being converged by the second imaging objective lens, it enters the second camera to obtain the second interferogram.
- the monochromatic linearly polarized light incident on the first polarization grating of the present invention is divided into +1 order left-handed circularly polarized diffracted light as the first light beam and -1 order right-handed circularly polarized diffracted light as the second light beam by the light splitting performance of the first polarization grating.
- the two beams of light and the incident light respectively form two angles of equal magnitude and opposite directions.
- the different spatial carriers with frequencies f R1 and f R2 respectively, they enter the surface of the measured mirror and are reflected back to the first polarization grating. After passing through the first polarization grating, the first light beam becomes right-handed circularly polarized light, and the second light beam becomes left-handed circularly polarized light.
- the monochromatic linearly polarized light of the light mirror interferes, where the first light beam and the right-handed circularly polarized component in the linearly polarized light produce the first interference light, and the second light beam and the left-handed circularly polarized component of the linearly polarized light produce the second interference light ,
- the first interference light exits to the first imaging objective lens after passing through the second polarization grating, and enters the first camera after being condensed by the first imaging objective lens to obtain the first interference pattern.
- the second interference light exits to the second imaging objective lens after passing through the second polarization grating.
- the imaging objective lens enters the second camera after being converged by the second imaging objective lens to obtain the second interferogram.
- a transient digital moiré phase-shifting interferometry method for the surface shape of an optical element is also provided, which includes the following steps:
- a polarization grating with a large spatial period is used for light splitting, and the +1-th order diffracted light is used as the first beam and the -1st-order diffracted light is used as the second light beam, respectively, as the frequencies f R1 and f
- Different space carriers of R2 and then use another polarization grating with a smaller space period to separate the two overlapping interferograms, and collect two interferograms at one time;
- the interferogram obtained by loading the space carrier f R1 is defined as the first interferogram
- the interferogram obtained by loading the space carrier f R2 is defined as the second interferogram;
- the digital moiré phase-shifting interferometry method based on the two-step carrier splicing method is used to solve the complete and error-free surface shape of the measured surface and realize the measurement of the measured surface shape.
- Fig. 1 is a schematic structural diagram of a transient digital Moiré phase-shifting interferometry device with an optical element surface shape according to the present invention.
- Fig. 2 is a flow chart of the transient digital Moiré phase-shifting interferometry method for the surface shape of the optical element according to the present invention.
- 1-light source 2-beam splitter, 3-reference mirror, 4-first polarization grating, 5-tested lens, 6-second polarization grating, 7-first imaging objective lens, 8-first camera, 9 -Second imaging objective lens, 10-Second camera.
- the transient digital Moiré phase-shifting interferometry device with the surface shape of the optical element includes: a light source 1, a beam splitter 2, a reference mirror 3, a first polarization grating 4, a tested mirror 5, and a second A two-polarization grating 6, a first imaging objective lens 7, a first camera 8, a second imaging objective lens 9 and a second camera 10;
- the light source emits monochromatic linearly polarized light, after being split by the beam splitter, part of it is reflected to the surface of the reference mirror, and part of it is transmitted to the first polarization grating.
- the monochromatic linearly polarized light incident on the surface of the reference mirror is reflected by the reference mirror and then passes through the beam splitter.
- the monochromatic linearly polarized light incident on the first polarization grating is divided by the light splitting performance of the first polarization grating into +1 order left-handed circularly polarized diffracted light as the first beam and -1 order right-handed circularly polarized diffracted light as the second light beam.
- the beam of light and the incident light form two angles of equal magnitude and opposite directions.
- the different spatial carriers with frequencies f R1 and f R2 they enter the surface of the measured mirror and are reflected back to the first polarization grating after passing through the first polarization grating.
- the first light beam becomes right-handed circularly polarized light
- the second light beam becomes left-handed circularly polarized light, both of which return to the beam splitter, and are reflected by the beam splitter and then reflected by the reference mirror before passing through the beam splitter.
- the monochromatic linearly polarized light produces interference, where the first light beam and the right-handed circularly polarized component of the linearly polarized light produce the first interference light, and the second light beam and the left-handed circularly polarized component of the linearly polarized light produce the second interference light.
- An interference light exits to the first imaging objective lens after passing through the second polarization grating, and enters the first camera after being condensed by the first imaging objective lens to obtain a first interference pattern.
- the second interference light exits to the second imaging objective lens after passing through the second polarization grating , After being converged by the second imaging objective lens, it enters the second camera to obtain the second interferogram.
- the monochromatic linearly polarized light incident on the first polarization grating of the present invention is divided into +1 order left-handed circularly polarized diffracted light as the first light beam and -1 order right-handed circularly polarized diffracted light as the second light beam by the light splitting performance of the first polarization grating.
- the two beams of light and the incident light respectively form two angles of equal magnitude and opposite directions.
- the different spatial carriers with frequencies of f R1 and f R2 respectively, they enter the surface of the measured mirror and are reflected back to the first polarization grating. After passing through the first polarization grating, the first light beam becomes right-handed circularly polarized light, and the second light beam becomes left-handed circularly polarized light.
- the monochromatic linearly polarized light of the light mirror interferes, where the first light beam and the right-handed circularly polarized component in the linearly polarized light produce the first interference light, and the second light beam and the left-handed circularly polarized component of the linearly polarized light produce the second interference light ,
- the first interference light exits to the first imaging objective lens after passing through the second polarization grating, and enters the first camera after being condensed by the first imaging objective lens to obtain the first interference pattern.
- the second interference light exits to the second imaging objective lens after passing through the second polarization grating.
- the imaging objective lens enters the second camera after being converged by the second imaging objective lens to obtain the second interferogram.
- the light source emits monochromatic linearly polarized light, the specific polarization direction and wavelength are determined according to actual measurement conditions, and the beam diameter is not less than the diameter of the measured range on the measured surface.
- the beam splitter is a non-polarizing beam splitter, the working wavelength range of which is selected according to the light source, and the aperture of the light beam is not smaller than the aperture of the range to be measured on the tested surface.
- the specific surface shape and surface flatness of the reference mirror are determined according to actual measurement conditions, and the diameter of the reference mirror is not less than the diameter of the measured range on the measured surface.
- the first polarization grating has a larger spatial period, and the angle between the two diffracted beams obtained by splitting after linearly polarized light is incident is smaller, so that the size of the carrier can ensure that the remaining wavefront bandwidth is within a limited range; its operation
- the wavelength is selected according to the light source, and its aperture is not less than the aperture of the measured range on the measured surface.
- the tested lens may be a flat surface, a spherical surface or an aspheric surface.
- the second polarization grating has a small spatial period so as to completely separate the two interfering lights within the allowable distance range, and its working wavelength is selected according to the light source, and its aperture is not smaller than the aperture of the measured range on the measured surface.
- the first imaging objective lens and the second imaging objective lens have the same parameters and indicators, the focal length is selected according to the allowable distance range, the imaging quality comprehensive measurement accuracy requirements and the camera parameters are selected, and the working wavelength is selected according to the light source, The aperture is selected according to the exit light aperture of the second polarization grating.
- the first camera and the second camera have the same parameters and indicators, their performance is selected according to the measurement accuracy requirements, their working wavelength range is selected according to the light source, and the image surface size is integrated with the exit light aperture and the second polarization grating The imaging objective parameters are selected.
- a transient digital Moiré phase-shifting interferometry method for the surface shape of an optical element includes the following steps:
- a polarization grating with a large spatial period is used for light splitting, and the +1-th order diffracted light is used as the first beam and the -1st-order diffracted light is used as the second light beam, respectively, as the frequencies f R1 and f
- Different space carriers of R2 and then use another polarization grating with a smaller space period to separate the two overlapping interferograms, and collect two interferograms at one time;
- the interferogram obtained by loading the space carrier f R1 is defined as the first interferogram
- the interferogram obtained by loading the space carrier f R2 is defined as the second interferogram;
- the digital moiré phase-shifting interferometry method based on the two-step carrier splicing method is used to solve the complete and error-free shape of the measured surface and realize the measurement of the measured surface.
- the instantaneous digital moiré phase-shifting interferometry method based on the two-step carrier splicing method is used to measure the surface error of the plane mirror.
- the measuring device is a transient digital moiré phase-shifting interferometry device based on the two-step carrier splicing method, as shown in Figure 2. , Including 1-light source, 2-splitter, 3-reference mirror, 4-first polarization grating, 5-under-test lens, 6-second polarization grating, 7-first imaging objective, 8-first camera, 9 -Second imaging objective lens, 10-Second camera.
- a polarization grating is a diffractive optical element that achieves selective light splitting based on the polarization state of the incident light, and the diffraction angle depends on the number of grating lines.
- the polarization grating can control the energy distribution between the positive first order and the negative first order.
- Polarization gratings have ultra-high diffraction efficiency compared with traditional gratings, and can be used in various applications such as spectrum correlation, beam selection and wavelength selection. It can also be used to achieve non-mechanical large-angle beam deflection, compared with traditional mechanical deflection devices , The required space is small, and the added system weight can be ignored.
- Polarization grating applications include augmented reality (AR) systems (such as AR head-mounted devices), telecommunications equipment, and beam deflection in optical systems.
- AR augmented reality
- Some mainstream manufacturers provide standard polarization gratings with a period of 5 ⁇ m and working wavelengths of 520nm, 650nm, 780nm, 850nm, 940nm.
- standard polarization gratings some manufacturers also provide a variety of customized services, including customized special sizes and design wavelengths. , Grating period, diffraction angle and other indicators.
- the test range is a circular area with a diameter of 23 mm.
- the light source emits monochromatic linearly polarized light with a center wavelength of 632.8nm, and the beam diameter is 30mm.
- the beam aperture of the beam splitter is 25.4mm.
- the reference mirror is a standard flat mirror with a surface flatness of ⁇ /10 and an aperture of 25.4mm.
- the first polarization grating has a spatial period of 363 ⁇ m, an operating wavelength of 633nm, a first-order diffraction angle of about 0.1°, and an aperture of 25.4mm.
- the second polarization grating has a spatial period of 5 ⁇ m, an operating wavelength of 633 nm, and an aperture of 25.4 mm, which can completely separate the two interfering lights after about 10 cm.
- the focal length of the first imaging objective lens and the second imaging objective lens is 50mm, the working wavelength is 350nm-700nm, and the aperture is 25mm.
- the resolution of the first camera and the second camera is 1024 ⁇ 1024, and the pixel size is 5 ⁇ m.
- the measurement steps are as follows:
- the interferogram obtained by loading the spatial carrier f R1 is defined as interferogram I
- the interferogram obtained by loading the spatial carrier f R2 is defined as interferogram II.
- two-step carrier splicing is used to solve the complete and error-free shape of the measured surface and realize the measurement of the measured surface shape.
- Steps 3 to 7 of the method proposed in the patent 201810067710.4 are as follows:
- Step 3 Use digital moiré phase-shifting interferometry to solve interferogram I and interferogram II respectively: use digital moiré phase-shifting interferometry to solve the measured surface shape SFE1 when carrier fR1 is loaded; adopt digital moiré phase-shifting interference Method to solve the measured surface shape SFE2 when the carrier fR2 is loaded;
- Step 4 Pre-mark the error area and compare whether the error area overlaps
- Step 4.1 Take the measured surface shape SFE1 obtained in step 3 as the base, and use the space carrier fR1 to pre-mark the solution error area ⁇ 1, ⁇ 1 ⁇ SFE1 of the measured surface shape SFE1;
- Step 4.2 Take the measured surface shape SFE2 solved in step 3 as the base and use the space carrier fR2 pre-marking to solve the error area of the measured surface shape SFE2 ⁇ 2, ⁇ 2 ⁇ SFE2;
- Step 4.3 Check whether the error area ⁇ 1 and the error area ⁇ 2 are completely separated and do not overlap. If there is an overlap area, you need to change the carrier loaded in step 2;
- Step 5 According to the solution error area ⁇ 1 of the measured surface shape SFE1 solved in step 4.1, extract the solved area SFE2' of the measured surface shape SFE2 without error at ⁇ 1;
- Step 7 Use the splicing vector ⁇ to adjust the relative position and tilt of the error-free surface shape SFE2' obtained in step 5; and replace the solution in the measured surface shape SFE1 with the solution-free area SFE2' Error area ⁇ 1, the final complete error-free measured surface shape SFE is obtained, and the phase of the solved error-free measured surface shape SFE is defined as Then there is
- Obtaining the final complete error-free SFE of the measured surface is to solve the problem of solving errors in the large residual wavefront using the digital moiré phase-shifting interference method, and then expand the measurement range of the traditional digital moiré phase-shifting method and eliminate the traditional
- the remaining wavefront bandwidth limitation of the digital moiré phase-shifting method makes the remaining wavefront bandwidth of the digital moiré phase-shifting interferometric method equivalent to that of the traditional phase-shifting interferometry; that is, the measurement of the measured surface shape is realized.
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Claims (10)
- 光学元件面形的瞬态数字莫尔移相干涉测量装置,其特征在于:其包括:光源(1)、分光镜(2)、参考镜(3)、第一偏振光栅(4)、被测镜(5)、第二偏振光栅(6)、第一成像物镜(7)、第一相机(8)、第二成像物镜(9)和第二相机(10);光源出射单色线偏振光,经过分光镜分光后,一部分被反射至参考镜表面,一部分透射至第一偏振光栅,入射参考镜表面的单色线偏振光经参考镜反射后透过分光镜,入射第一偏振光栅的单色线偏振光被第一偏振光栅的分光性能分为+1级左旋圆偏振衍射光作为第一光束和-1级右旋圆偏振衍射光作为第二光束,这两束光分别与入射光成大小相等方向相反的两个夹角,作为所述频率分别为f R1、f R2的不同空间载波入射被测镜表面,并被其反射回第一偏振光栅,经过第一偏振光栅后,第一光束变为右旋圆偏振光,第二光束变为左旋圆偏振光,两者均返回分光镜,经分光镜反射后分别与上述经参考镜反射后透过分光镜的单色线偏振光产生干涉,其中第一光束与线偏振光中的右旋圆偏振成分产生第一干涉光,第二光束与线偏振光中的左旋圆偏振成分产生第二干涉光,第一干涉光经过第二偏振光栅后出射至第一成像物镜,经第一成像物镜会聚后进入第一相机,得到第一干涉图,第二干涉光经过第二偏振光栅后出射至第二成像物镜,经第二成像物镜会聚后进入第二相机,得到第二干涉图。
- 根据权利要求1所述的光学元件面形的瞬态数字莫尔移相干涉测量装置,其特征在于:所述光源出射单色线偏振光,具体偏振方向及波长根据实际测量情况决定,光束口径不小于被测面上被测范围口径。
- 根据权利要求2所述的光学元件面形的瞬态数字莫尔移相干涉测量装置,其特征在于:所述分光镜为非偏振分光镜,其工作波长范围根据光源进行选择,其通光口径不小于被测面上被测范围口径。
- 根据权利要求3所述的光学元件面形的瞬态数字莫尔移相干涉测量装置,其特征在于:所述参考镜具体面形及表面平整度根据实际测量情况决定,其口径不小于被测面上被测范围口径。
- 根据权利要求4所述的光学元件面形的瞬态数字莫尔移相干涉测量装置,其特征在于:所述第一偏振光栅空间周期较大,线偏振光入射后分光得到的两束衍射光间夹角较小,使其载波大小能保证剩余波前带宽在限制范围之内;其工作波长根据光源进行选择,其口径不小于被测面上被测范围口径。
- 根据权利要求5所述的光学元件面形的瞬态数字莫尔移相干涉测量装置,其特征在于:所述被测镜可为平面、球面或非球面。
- 根据权利要求6所述的光学元件面形的瞬态数字莫尔移相干涉测量装置,其特征在于:所述第二偏振光栅空间周期较小, 以便将两束干涉光在允许距离范围内完全分离,其工作波长根据光源进行选择,其口径不小于被测面上被测范围口径。
- 根据权利要求7所述的光学元件面形的瞬态数字莫尔移相干涉测量装置,其特征在于:所述第一成像物镜及第二成像物镜具有相同的参数及指标,其焦距根据允许距离范围选择,其成像质量综合测量精度要求及相机参数进行选择,其工作波长根据光源进行选择,其口径根据第二偏振光栅的出射光口径进行选择。
- 根据权利要求8所述的光学元件面形的瞬态数字莫尔移相干涉测量装置,其特征在于:所述第一相机及第二相机具有相同参数及指标,其性能根据测量精度要求进行选择,其工作波长范围根据光源进行选择,其像面尺寸综合第二偏振光栅的出射光口径及成像物镜参数进行选择。
- 光学元件面形的瞬态数字莫尔移相干涉测量方法,其特征在于:其包括以下步骤:(2)根据虚拟干涉测量装置构建实际干涉测量装置;(3)通过偏振光栅的分光性能,使用空间周期较大的偏振光栅进行分光,将+1级衍射光作为第一光束和-1级衍射光作为第二光束,分别作为频率为f R1、f R2的不同空间载波,再使用空间周期较小的另一个偏振光栅将两束重叠的干涉光 分离,一次性采集获得两幅干涉图;加载空间载波f R1获得的干涉图定义为第一干涉图,加载空间载波f R2获得的干涉图定义为第二干涉图;(4)采用基于两步载波拼接法的数字莫尔移相干涉测量方法,求解完整的无错误的被测面形,实现对被测面形的测量。
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