WO2021151411A1 - Capteur de pression - Google Patents

Capteur de pression Download PDF

Info

Publication number
WO2021151411A1
WO2021151411A1 PCT/DE2021/000013 DE2021000013W WO2021151411A1 WO 2021151411 A1 WO2021151411 A1 WO 2021151411A1 DE 2021000013 W DE2021000013 W DE 2021000013W WO 2021151411 A1 WO2021151411 A1 WO 2021151411A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
pressure sensor
sensor according
conductor tracks
areas
Prior art date
Application number
PCT/DE2021/000013
Other languages
German (de)
English (en)
Inventor
Arne Kentner
Original Assignee
EMSU GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EMSU GmbH filed Critical EMSU GmbH
Priority to EP21710876.0A priority Critical patent/EP4133248A1/fr
Priority to DE112021000780.7T priority patent/DE112021000780A5/de
Publication of WO2021151411A1 publication Critical patent/WO2021151411A1/fr

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/205Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

L'invention concerne un capteur de pression qui présente une couche de fond et une couche de recouvrement souple, la couche de fond présentant de premières pistes conductrices, des surfaces diélectriques recouvrant au moins par endroits ces pistes conductrices et de deuxièmes pistes conductrices situées au-dessus.
PCT/DE2021/000013 2020-01-30 2021-01-29 Capteur de pression WO2021151411A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP21710876.0A EP4133248A1 (fr) 2020-01-30 2021-01-29 Capteur de pression
DE112021000780.7T DE112021000780A5 (de) 2020-01-30 2021-01-29 Drucksensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102020000604.3A DE102020000604A1 (de) 2020-01-30 2020-01-30 Drucksensor
DE102020000604.3 2020-01-30

Publications (1)

Publication Number Publication Date
WO2021151411A1 true WO2021151411A1 (fr) 2021-08-05

Family

ID=74867368

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2021/000013 WO2021151411A1 (fr) 2020-01-30 2021-01-29 Capteur de pression

Country Status (3)

Country Link
EP (1) EP4133248A1 (fr)
DE (2) DE102020000604A1 (fr)
WO (1) WO2021151411A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010008389A1 (en) * 1998-09-11 2001-07-19 Bogdan Serban Force sensor
US20050262949A1 (en) * 2004-05-31 2005-12-01 Novineon Healthcare Technology Partners Gmbh Tactile instrument
US20140076063A1 (en) * 2012-09-17 2014-03-20 Tk Holdings Inc. Single layer force sensor
US10359326B2 (en) 2015-09-24 2019-07-23 Nippon Mektron, Ltd. Pressure sensor capable of suppressing dispersion in the initial load of pressure

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4314227A (en) 1979-09-24 1982-02-02 Eventoff Franklin Neal Electronic pressure sensitive transducer apparatus
US20140374230A1 (en) 2013-06-25 2014-12-25 Microsoft Corporation Pressure sensitive keys with a single-sided direct conduction sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010008389A1 (en) * 1998-09-11 2001-07-19 Bogdan Serban Force sensor
US20050262949A1 (en) * 2004-05-31 2005-12-01 Novineon Healthcare Technology Partners Gmbh Tactile instrument
US20140076063A1 (en) * 2012-09-17 2014-03-20 Tk Holdings Inc. Single layer force sensor
US10359326B2 (en) 2015-09-24 2019-07-23 Nippon Mektron, Ltd. Pressure sensor capable of suppressing dispersion in the initial load of pressure

Also Published As

Publication number Publication date
EP4133248A1 (fr) 2023-02-15
DE112021000780A5 (de) 2022-12-01
DE102020000604A1 (de) 2021-08-05

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