WO2021149175A1

WO2021149175A1 - Electrical characteristic value acquiring device

Info

Publication number: WO2021149175A1
Application number: PCT/JP2020/002062
Authority: WO
Inventors: 将士木村; 猛史青木
Original assignee: 株式会社Ｆｕｊｉ
Priority date: 2020-01-22
Filing date: 2020-01-22
Publication date: 2021-07-29
Also published as: JP7504134B2; JPWO2021149175A1

Abstract

The present disclosure addresses the problem of enabling an electrical characteristic value of a test object to be stably acquired .　An electrical characteristic value acquiring device according to this disclosure includes an electric circuit provided with an auxiliary circuit having at least one circuit element, the electric circuit being switched by switching the auxiliary circuit on the basis of an electrical characteristic value of the test object and/or an electrical characteristic to be acquired. For example, the electric circuit can be switched to an electric circuit having a capacitor connected as a circuit element in parallel with the test object, or to an electric circuit having a resistor or a coil connected as a circuit element in series with the test object. As a result, the electrical characteristic value to be acquired at the electrical characteristic value acquiring device can be larger than a set value such that variation is suppressed and the electrical characteristic value of the test object can be stably acquired.

Description

Electrical characteristic value acquisition device

The present disclosure relates to an electrical characteristic value acquisition device that acquires an electrical characteristic value of an object.

The impedance measuring device described in Patent Document 1 includes an electric circuit including an object, an impedance detecting unit, a measuring auxiliary circuit, and the like. The measurement auxiliary circuit in the electric circuit shown in FIG. 16A of Patent Document 1 includes a capacitor provided in parallel with the object, and a resistor and a coil provided in series with the object. Further, the measurement auxiliary circuit in the electric circuit shown in FIG. 17A includes a coil and a resistor provided in parallel with the object, and a capacitor and a resistor provided in series with the object.

Japanese Unexamined Patent Publication No. 2015-25791

Summary of disclosure

Issues to be resolved by this disclosure

The object of the present disclosure is to make it possible to stably obtain an electrical characteristic value, which is a value representing the electrical characteristic of an object.

Means, actions and effects to solve problems

For example, when the electrical characteristic value, which is a value representing the electrical characteristic of the object, is smaller than the set value, the variation is large and it becomes difficult to stably acquire the electrical characteristic value.
On the other hand, the electrical characteristic value acquisition device according to the present disclosure includes an electric circuit including an auxiliary circuit having one or more circuit elements, and at least one of the electrical characteristic value of the object and the electrical characteristic to be acquired. The auxiliary circuit is switched based on. For example, the auxiliary circuit may be switched to a circuit in which a capacitor as a circuit element is connected in parallel with the object, or a circuit in which a resistor or coil as a circuit element is connected in series with the object. .. As a result, the electrical characteristic value acquired by the electrical characteristic value acquisition device can be made larger than the set value, variation can be suppressed, and the electrical characteristic value of the object can be stably acquired. ..
It should be noted that Patent Document 1 does not describe switching the measurement auxiliary circuit based on the electrical characteristic value of the component or the acquired electrical characteristic.

It is a perspective view of the mounting machine including the measuring device provided with the electrical characteristic value acquisition device which concerns on Example 1 of this disclosure. It is a perspective view of the main part of the said measuring apparatus. It is sectional drawing of the main part of the said measuring apparatus. It is an air circuit diagram included in the said measuring apparatus. It is a figure which conceptually shows the control device of the said mounting machine. It is a circuit diagram which conceptually shows the electric circuit of the said measuring apparatus. It is a flowchart which shows the LCR acquisition program stored in the storage part of the said control device. It is a circuit diagram which conceptually shows the said electric circuit after switching. It is a circuit diagram which conceptually shows the said electric circuit of another state after switching. It is a figure which shows the measurement error of the said measuring apparatus. It is a figure which conceptually shows the electric circuit different from the said electric circuit. It is a flowchart which shows the still another LCR acquisition program stored in the said storage part.

Embodiments of the present disclosure

Hereinafter, a mounting machine including an electrical characteristic value acquisition device according to an embodiment of the present disclosure will be described in detail with reference to the drawings.
The mounting machine shown in FIG. 1 mounts components on a circuit board, and includes a device main body 2, a circuit board transfer holding device 4, a component supply device 6, a head moving device 8, a measuring device 10, and the like.
The circuit board transport holding device 4 transports and holds the circuit board (hereinafter, abbreviated as substrate) P in a horizontal posture. In FIG. 1, the transport direction of the substrate P is the x direction and the width of the substrate P is wide. The direction is the y direction, and the thickness direction of the substrate P is the z direction. The y-direction and the z-direction are the front-rear direction and the up-down direction of the mounting machine, respectively. These x-direction, y-direction, and z-direction are orthogonal to each other.

The component supply device 6 supplies electronic components (hereinafter, abbreviated as components) s mounted on the substrate P, and includes a plurality of tape feeders 14 and the like. The head moving device 8 holds the head 16 and moves it in the x and y directions. The head 16 has a suction nozzle 18 as a component holder, a first camera 19 as an imaging device, and heads thereof. It has an elevating device that moves in the z direction with respect to the main body. The suction nozzle 18 sucks and holds the component s, and the first camera 19 captures a reference mark Mp or the like provided on the substrate P, and can be called a mark camera.

The measuring device 10 is an electrical characteristic value acquisition device that measures a characteristic-related value related to the electrical characteristics of a component s, which is an example of an object, and acquires an electrical characteristic value based on the measured characteristic-related value. It includes. The measuring device 10 is provided on the main body of the circuit board transfer holding device 4 via the waste box 26. The disposal box 26 and the measuring device 10 are connected by a disposal passage 28, and the component s whose electrical characteristic value has been measured is housed in the disposal box 26 via the disposal passage 28.

As shown in FIGS. 2 and 3, the measuring device 10 is a holding table for moving the main body 30, a holding table 32 capable of holding the component s, a pair of measuring elements 37 including a stator 34 and a mover 36, and a holding table 32. It includes a moving device 40, a moving device moving device 41 that brings the mover 36 closer to and away from the stator 34, an electric circuit 42 for acquiring an electrical characteristic value, an air supply device 43, and the like. In this embodiment, as shown in FIG. 6, the component s has electrodes p1 and p2 at both ends and can be clamped by a pair of stylus 37s. As the component s, for example, a so-called square chip is applicable.

In this embodiment, the main body 30 is provided so as to be movable relative to the disposal box 26, and as shown in FIG. 3, a through hole 30a communicating with the disposal passage 28 is provided at the bottom.

The holding base 32 includes a component mounting portion 44 and a mounting portion holding body 46 that holds the component mounting portion 44. A V-groove 44c is formed on the upper surface of the component mounting portion 44, and the component s is mounted.
The component mounting portion 44 can be made of a material that has conductivity and wear resistance and is difficult to oxidize. The component mounting portion 44 is electrically connected to the main body 30 via a plurality of conductive members, and when the main body 30 is grounded, the component mounting portion 44 is also grounded. In this embodiment, the component mounting portion 44 is in contact with the mounting portion holding body 46 and is fixed by the fastening portion 47, and the mounting portion holding body 46 is attached to the main body 30 with a stopper 80 (see FIG. 3). Contact through. The mounting portion holding body 46, the stopper 80, the main body 30, the fastening portion 47, and the like have conductivity. Therefore, the component mounting portion 44 is grounded.
In this way, when the component mounting portion 44 is manufactured of a conductive material and is grounded, the static elimination of the component s mounted on the component mounting portion 44 can be performed. For example, the component mounting portion 44 may be manufactured of an aluminum alloy, a stainless steel material, or the like. A cover 50 is attached to the holding base 32.

The stator 34 and the mover 36 are provided so as to be close to and separated from each other. The stator 34 is fixed to the main body 30 via the stator holder 55. The mover 36 is held by the mover holder 56 at one end (the end on the retracting side), and is made movable integrally with the mover holder 56.
The stator 34 and the mover 36 have facing

surfaces

34f and 36f facing each other, respectively, and the parts s are clamped (grasped) by the pair of facing

surfaces

34f and 36f, respectively. In this embodiment, the facing surface 36f has a generally triangular cross section and is movable along the V-groove 44c. In other words, the shape of the facing surface 36f of the mover 36 is substantially corresponding to the V-groove 44c, and the facing surface 36f of the mover 36, the facing surface 34f of the stator 34 and the V-groove 44c of the holding base 32 are , Located at almost the same height. Therefore, regardless of where the component s is in the V-groove 44c, the component s can be clamped by the pair of facing

surfaces

34f and 36f.

Further, in the present embodiment, the mover 36 is a longitudinal member extending in the y direction (moving direction), and has a front end portion 36a including the facing surface 36f and a rear portion 36b which is a portion on the rear end side of the front end portion 36a. including. The rear portion 36b has a shape in which the bottom portion of the front end portion 36a is cut out. Therefore, the holding base 32 and the mover 36 can move relative to each other.

The holding table moving device 40 moves the holding table 32, and includes an air cylinder 64 as a drive source. As shown in FIG. 4, in the air cylinder 64, the inside of the housing is partitioned into two

air chambers

64a and 64b by a piston, and the mounting portion holder 46 is connected to the piston rod 66 of the piston. A solenoid valve device 69 is provided between the two

air chambers

64a and 64b, the air source 68, the air passage 60 of the air supply device 43, and the filter (atmosphere). The solenoid valve device 69 includes a plurality of solenoid valves, and the holding base 32 is moved forward and backward under the control of the solenoid valve device 69. Specifically, the air passage 60 is communicated with the air chamber 64a, and the air source 68 is communicated with the air chamber 64b, so that the holding table 32 is advanced, the air is communicated with the air chamber 64b, and the air is communicated. By communicating the air source 68 with the chamber 64a, the holding table 32 is retracted. In this way, air is supplied to the air passage 60 when the holding base 32 advances.

The mover moving device 41 moves the mover 36, and includes an air cylinder 70 as a drive source. Similarly, in the air cylinder 70, two

air chambers

70a and 70b partitioned by a piston are formed inside the housing, and the mover holder 56 is connected to the piston rod 71 of the piston. An air source 68, an air passage 60, and a filter (atmosphere) are connected to the two

air chambers

70a and 70b via a solenoid valve device 72. The mover 36 is moved forward and backward under the control of the solenoid valve device 72. The air source 68 communicates with the air chamber 70a and the air passage 60 communicates with the air chamber 70b, so that the mover 36 is retracted, the air source 68 communicates with the air chamber 70b, and the atmosphere flows into the air chamber 70a. The mover 36 is retracted by communicating with each other. Air is supplied to the air passage 60 as the mover 36 retracts.

As shown in FIG. 4, the

solenoid valve devices

69 and 72 include, but are not limited to, a plurality of flow rate control valves, direction switching valves, and the like. For example, it may include a plurality of on-off valves.

The air supply device 43 supplies air to the facing surface 36f of the mover 36, and includes the above-mentioned

air cylinders

64 and 70, an air passage 60, an ionizer 62, and the like. The air passage 60 is provided in a member on the stator side {for example, the upper part of the stator 34 or the upper part of the stator 34 of the stator holder 55 or the main body 30}, and as shown in FIG. 3, the

air cylinder

64 , 70, an air ejection passage 60s, etc., which is communicated with the main passage 60h and the main passage 60h and has an opening 60a on the step surface of the member on the stator side, which opens facing the facing surface 36f of the stator 36. including. As shown in FIG. 3, the air ejection passage 60s generally extends in the y direction, and when the extension line k is at a position where the mover 36 is separated from the stator 34, the portion R of the facing surface 36f of the mover 36 It is extended so as to reach above or within the partial R. The portion R is a portion that frequently clamps the component s on the facing surface 36f of the mover 36, and can be referred to as a clamp portion. The air hits the portion where the extension line k of the facing surface 36f intersects from diagonally above. Further, an ionizer 62 is provided in a portion of the air passage 60 on the downstream side of the

air cylinders

64 and 70. The ionizer 62 causes a corona discharge to ionize air, and ionized air can be supplied to the facing surface 36f. The ionizer 62 is not indispensable.

As shown in FIGS. 2 and 3, a pair of

guide rods

74 and 75 extending in the y direction are provided between the main body 30 or the stator holder 55 and the mover holder 56, and are movable with the holding base 32. A pair of

guide rods

76, 77 extending in the y direction are provided between the child holding body 56 and the child holding body 56. These guide

rods

74, 75, 76, 77 enable the stator 34 and the mover 36 to move relative to each other (approach / separate) in the y direction, and the holding base 32 and the mover 36 move in the y direction. Relative movement is possible.
Further, a stopper 82 is provided on the stator side of the mover holder 56, and a stopper 80 is provided on the portion of the main body 30 that holds the stator holder 55. The stopper 82 defines the approach limit between the mover holder 56 and the holding base 32 (mounting portion holding body 46), and the stopper 80 is the stator 34 (main body 30) and the holding base 32 (mounting). It defines the limit of access to the portion holder 46).
In this embodiment, the guide rods 74 to 77 are shared by the holding base moving device 40 and the mover moving device 41, and the

stoppers

80 and 82 can be considered to be components of the holding base moving device 40.

Note that reference numeral 84 represents a second camera. The second camera 84 is provided separately from the first camera 19, and captures the component s held by the suction nozzle 18. Based on the image captured by the second camera 84, it is determined whether or not the component s is to be mounted on the circuit board P.

As shown in FIG. 6, the electric circuit 42 includes a characteristic-related value measuring unit 90, an AC signal generating unit 92, parts s gripped by a pair of stylus 37, an auxiliary circuit 94 having a plurality of circuit elements, and the like. .. The characteristic-related value measuring unit 90 acquires electrical characteristic values that represent electrical characteristics such as L (inductance), C (capacitance, capacitance), R (resistance, resistance), and Z (impedance) of the component s. This is to measure the characteristic-related value, which is a value for measuring. The characteristic-related value measuring unit 90 can, for example, measure the AC current flowing through the electric circuit 42 or the component s, measure the voltage difference generated in the component s, and the like, and is referred to as an AC signal measuring unit. be able to. Further, the AC signal generation unit 92 can generate, for example, an AC voltage having an adjusted frequency.

In this embodiment, the auxiliary circuit 94 includes coils L1, L2, resistors R1, R2, capacitors C1, C2 and the like as circuit elements, and switches SW1 located in parallel with these coils L1, L2 and resistors R1 and R2. , SW2, SW3, SW4, switches SW5, SW6 located in series with capacitors C1, C2 and the like. The coils L1 and L2 and the resistors R1 and R2 are located in series with the component s, and the capacitors C1 and C2 are located in parallel with the component s.
The resistance values R1x and R2x as the electrical characteristic values of the resistors R1 and R2 are different from each other, and the inductance values L1x and L2x as the electrical characteristic values of the coils L1 and L2 are different from each other. The magnitudes C1x and C2x of the capacitance as the respective electrical characteristic values are different from each other. The switches SW1 to SW6 may be non-contact switches or contact switches.

Reference numerals

98a and 98b in FIGS. 2 and 3 are connections of the pair of stylus 37 to the electric circuit 42.

The mounting machine includes the control device 100. As shown in FIG. 5, the control device 100 includes a controller 102 mainly composed of a computer and a plurality of drive circuits 104. The controller 102 includes an execution unit 110, a storage unit 112, an input / output unit 114, and the like. In the input / output unit 114, a board transfer holding device 4, a component supply device 6, and a head moving device 8 each have a drive circuit 104. In addition to being connected via, the holding base moving device 40, the

electromagnetic valve devices

69 and 72 of the mover moving device 41 and the like are connected. Further, the characteristic-related value measuring unit 90, the AC signal generating unit 92, the auxiliary circuit 94, etc. are connected, and the mover position sensor 118, the holding base position sensor 120, the nozzle height sensor 122, the first camera 19, the second camera, and the like are connected. A camera 84 or the like is connected. A plurality of programs such as the LCR acquisition program represented by the flowchart of FIG. 7 are stored in the storage unit 112. Further, the time is measured by the timer 124 provided in the controller 102. The mover position sensor 118 outputs an ON signal when the mover holder 56 is in the retracted end position, and the holder position sensor 120 outputs an ON signal when the holder 32 is in the forward end position. The nozzle height sensor 122 detects the height of the nozzle 18.

Although a part of the control device 100 is a component of the measuring device 10 provided with the electrical characteristic value acquisition device, the electrical characteristic value acquisition device or the measurement device 10 may be provided with a dedicated control device.

In the measuring device 10 configured as described above, the AC signal generated in the AC signal generator 92 and the characteristic-related value measurement are performed in a state where the switches SW1 to SW4 of the auxiliary circuit 94 are ON and the switches SW5 and SW6 are OFF. Based on the characteristic-related values measured by the part 90, the parts s in a state where the resistors R1 and R2, the coils L1 and L2, the capacitors C1 and C2, etc., which are the circuit elements of the auxiliary circuit 94, are not connected to the parts s. The electrical characteristic value of, that is, the true electrical characteristic value is obtained.
However, as shown in FIG. 10, for example, when the value Lt of the inductance L as the true electrical characteristic value of the component s is smaller than the set value P (for example, 0.2 μH), it is larger than the set value P. Compared with the case, the variation of the value of the inductance L (hereinafter, may be referred to as the inductance measurement value) Ls acquired based on the characteristic-related value measured by the characteristic-related value measuring unit 90 becomes large. Therefore, in the measuring device 10, it is difficult to accurately acquire the measured inductance value Ls for the component s having a small inductance L. The solid line in FIG. 10 indicates the maximum value of the measured inductance value Ls acquired for each component s, and the broken line indicates the minimum value of the measured inductance value Ls.

From the above circumstances, for example, it is conceivable to connect a coil or the like, which is a circuit element, to the component s in series so that the measured inductance value Ls becomes larger than the set value P (Ls> P). However, the variation in the electrical characteristic value of the circuit element itself such as the coil is usually about 10% of the electrical characteristic value. Therefore, when a coil having a large inductance value is connected to a component s having a small inductance value, the acquisition accuracy of the true inductance value of the component (hereinafter, may be referred to as the true inductance value) Lt is rather high. descend.
Therefore, when acquiring the true inductance value Lt of the component s having a small inductance, a coil as a circuit element is connected in series to the component s, and the value of the inductance L of the coil is determined by the measured inductance value Ls. It is desirable that the size is such that it is included in a region slightly larger than the set value P. This region can be, for example, a region determined by a lower limit value (P + α α is a very small value) and an upper limit value (P + β), and can be referred to as a setting range A.
Further, although the variation of the measured inductance value Ls is described in FIG. 10, the same applies to the measured value of capacitance (capacity), the measured value of resistance (resistance), the measured value of impedance, etc. When it is small, the variation becomes large.

For example, when the standard value of the inductance L (hereinafter, may be abbreviated as the inductance standard value) predetermined for the component s is smaller than the set value P (0.2 μH), as shown in FIG. It is possible to switch the switch SW1 to OFF, the switches SW2 to 4 to ON, and the switches SW5 and 6 to OFF. As a result, the auxiliary circuit 94 is switched from the state of FIG. 6 to the state of FIG. 8, and the electric circuit 42 is switched. A coil L1 is connected in series to the component s.
In the electric circuit shown in FIG. 8, when the inductance measurement value Ls acquired based on the characteristic-related value measured by the characteristic-related value measuring unit 90 becomes a value within the setting region A, the inductance measurement value Ls. By subtracting the inductance value L1x of the coil L1 that has been acquired and stored in advance from the above, the true inductance value Lt of the component s is acquired.
Lt = Ls-L1x

On the other hand, in the electric circuit shown in FIG. 8, when the measured inductance value Ls exceeds the upper limit value (P + β) of the setting range A, the inductance value L2x of the coil L2 is smaller than the inductance value L1x of the coil L1. The switch SW1 is switched ON and the switch SW2 is switched OFF. A coil L2 is connected in series to the component s.
In addition, there are cases where both coils L1 and L2 are connected in series to the component s, cases where neither coils L1 and L2 are connected, and the like.

Further, when the capacitance C as the electrical characteristic of the component s is acquired and the standard value of the capacitance C of the component s is smaller than the set value, for example, as shown in FIG. 9, the switches SW1 to SW4 are pressed. It is possible to switch ON, switch SW5 ON, and switch SW6 OFF. As a result, the auxiliary circuit 94 and the electric circuit 42 are switched from the state shown in FIG. 6 to the state shown in FIG. A capacitor C1 is connected in parallel to the component s.
In addition, the capacitors C1 and C2 may be connected in parallel to the component s, none of them may be connected, or the capacitor C2 may be connected to the component s.

In the mounting machine, the component s to be measured next for the electrical characteristics is predetermined, and the standard value of the electrical characteristics of the component s is known. Therefore, based on the standard value of the component s or the like, it can be known whether or not the acquired electrical characteristic value of the component s is smaller than the set value. Further, based on the standard value and the set value, the type of the circuit element connected to the component s and the electrical characteristic value of the circuit element can be acquired, and the circuit elements (coils L1, L2, The resistors R1 and R2 and the capacitors C1 and C2) can be determined.

From the above, in this embodiment, ON / OFF of switches SW1 to SW6 is controlled based on the standard value of the electrical characteristics of the component s before the characteristic-related value is measured by the characteristic-related value measuring unit 90. Then, the auxiliary circuit 94 and the electric circuit 42 are switched so that the electric characteristic value is located within the set range slightly larger than the set value.

The LCR acquisition program represented by the flowchart of FIG. 7 is executed at predetermined set times. In this embodiment, the

solenoid valve devices

69 and 72 are controlled by using the output of the holding base position sensor 120 and the mover position sensor 118, the measurement time by the timer 124, and the like, and the holding base 32 and the mover 36 are respectively. You can move forward and backward.

The measuring device 10 is always in the initial state. The mover 36 is in the retracted end position, and the holding base 32 is in the forward end position, that is, in a position in contact with the stopper 80. In this state, the component mounting portion 44 is in a state of being grounded by internal continuity or the like. The mover 36 does not exist above the V-groove 44c of the holding table 32, and the component s can be placed on it.
In step 1 (hereinafter, abbreviated as S1; the same applies to other steps), it is determined whether or not an acquisition command for the electrical characteristic value of the component s has been issued. If the determination in S1 is YES, the information of the part s (standard value of the electrical characteristic value, etc.) is acquired in S2, and the type of the acquired electrical characteristic and its electrical characteristic in S3. Each of the switches SW1 to SW6 is controlled based on the standard value of the value, and the auxiliary circuit 94 is controlled. By controlling the ON / OFF of each of the switches SW1 to SW6, a circuit element (for example, at least one of the coils L1 and L2, the resistors R1 and R2, and the capacitors C1 and C2) is connected to the component s as needed. Will be done.

Then, in S4, the head 16 is moved, and for example, the component s supplied by the predetermined tape feeder 14 is picked up by the suction nozzle 18 and placed on the V groove 44c of the holding table 32. It can be seen that the component s is placed on the V-groove 44c by lowering the suction nozzle 18 and opening the component s.

After that, when the suction nozzle 18 reaches the rising end, the mover 36 is advanced by the control of the solenoid valve device 72 in S5. The facing surface 36f at the tip of the mover 36 is advanced along the V groove 44c of the component mounting portion 44. The component s is clamped by the facing surface 36f and the facing surface 34f of the stator 34.

In S6, the holding base 32 is retracted under the control of the solenoid valve device 69, and the holding base 32 is retracted until it comes into contact with the stopper 82. By separating the holding base 32 from the component s, it is possible to reduce the measurement error of the electrical characteristics caused by the component mounting portion 44 being located in the vicinity of the component s. Further, since the holding base 32 is located behind the tip portion 36a of the mover 36, the holding base 32 can be satisfactorily separated from the mover 36.

In S7, it is awaited that the static elimination time, which is the set time, elapses from the time when the component s is placed on the V groove 44c. The electric charge charged in the component s is discharged via the holding base 32, and after the holding base 32 is retracted, it is discharged into the air. The time required for static elimination of the component s is determined in advance by the characteristics and size of the component s. When the static elimination time elapses and the determination is YES, the characteristic-related value is measured in S8, the electrical characteristic value (electrical characteristic measurement value) of the component s is acquired based on the characteristic-related value, and the component s The true electrical characteristic value (true electrical characteristic value) is acquired.

After that, in S9, the mover 36 is retracted under the control of the solenoid valve device 72, and in S10, the holding base 32 is retracted until it comes into contact with the stopper 82 under the control of the solenoid valve device 69. The holding base 32 is located behind the facing surfaces 36f of the mover 36, and does not exist below between the pair of facing

surfaces

34f and 36f. The dropped parts s are housed in the disposal box 26 through the opening 30a and the disposal passage 28.
Further, when the mover 36 is retracted, air is ejected from the opening 60a of the ejection passage 60s and hits the partial R of the mover 36. Further, the cover 50 covers the space between the pair of facing

surfaces

34f and 36f from the x direction. As a result, the component s can be satisfactorily dropped from the facing surface 36f, and the component s can be prevented from scattering.

In S11, the holding base 32 is advanced by the control of the solenoid valve device 69 and returned to the initial state. Further, as the holding base 32 advances, air is supplied to the facing surface 36f of the mover 36. As a result, static elimination of the facing surface 36f of the mover 36 can be satisfactorily achieved.

As described above, in this embodiment, the auxiliary circuit 94 is controlled before the characteristic-related value is measured based on the type and standard value of the electrical characteristic of the component s from which the electrical characteristic value is acquired next. Then, the electric circuit 42 is switched. As a result, the measurement variation caused by the small electrical characteristic value of the component s can be suppressed, the electrical characteristic value of the component s can be stably measured, and the acquisition accuracy of the electrical characteristic value can be improved. Can be done. Further, even a component whose electrical characteristic value is smaller than the set value and whose electrical characteristic value cannot be acquired by the measuring device 10 can be acquired, and the electrical characteristic value can be obtained. The range of objects that are the parts that can be acquired can be expanded.
Further, since the auxiliary circuit 94 is controlled before the measurement of the characteristic-related value, that is, in a feedforward manner, the electrical characteristic value can be appropriately acquired in a short time.

In S8, it is sufficient to measure the characteristic-related value, and it is not indispensable to acquire the true value of the electrical characteristic of the component s. The true value of the electrical property can also be obtained later.

As described above, in the present embodiment, the switch control unit or the auxiliary circuit control unit is configured by the part that stores S3 of the LCR acquisition program represented by the flowchart of FIG. 7 of the control device 100, the part that executes it, and the like, and the switch control unit. Alternatively, the auxiliary circuit switching unit is configured by the auxiliary circuit control unit and switches SW1 to 6 and the like. Further, the electric characteristic value acquisition device is configured by these auxiliary circuit switching units, the electric circuit 42, and the like.

It is not indispensable to control the auxiliary circuit 94 in a feedforward manner, and the auxiliary circuit 94 can be controlled in a feedback manner. For example, when the measured electrical characteristic of the component s is smaller than the set value P, ON / OFF of the switches SW1 to SW6 can be controlled so as to be within the set range. This embodiment is effective when the standard value of the component s is unknown.

Further, the electric circuit 42 and the auxiliary circuit 94 are not limited to the circuits shown in FIG. For example, the electric circuit 140 shown in FIG. 11 can be used. The auxiliary circuit 142 included in the electric circuit 140 includes a coil L3 and a resistor R3 provided in series with the component s as circuit elements, and a capacitor C3 in which a plurality of capacitors provided in parallel with the component s are connected. At the same time, it includes a changing mechanism LA, RA, CA, etc., which are provided corresponding to each of the coil L3, the resistor R3, and the capacitor C3 and can change the electrical characteristic values of each of them. The electrical characteristic values of the coil L3, the resistor R3, and the capacitor C3 can be changed by these changing mechanisms LA, RA, and CA. The electrical characteristic value can be set to 0 by the changing mechanism LA, RA, or CA.

An example of such a case is shown in the flowchart of FIG. In the flowchart of FIG. 12, the same execution steps as those of the flowchart of FIG. 7 are assigned the same step numbers, and the description thereof will be omitted. In this embodiment, after the execution of S1 and S1, at least one of the change mechanisms LA, RA, and CA is controlled in S31. As a result, the auxiliary circuit 142 is switched, the electric circuit 140 is switched, and at least one of the circuit element connected to the component s and the electrical characteristic value of the circuit element is changed. After that, S4 and subsequent steps are executed in the same manner.

It should be noted that the ON / OFF switching of the switches SW1 to 6 and the change by the change mechanism LA, RA, CA, etc. can be performed by the operator instead of being performed based on the command of the control device 100.

Moreover, the structure of the auxiliary circuit does not matter. For example, it is not essential to provide a switch for each of the circuit elements, with multiple coils or resistors in parallel with the component, one of which is selectively connected in series with the component. A switch can be provided so as to. Further, the auxiliary circuit may include at least one or more elements of one or more types of a capacitor, a coil, and a resistor, and does not necessarily include all of the capacitor, the coil, and the resistor.
Further, the structure of the measuring device is not limited, and the present disclosure can be carried out in a form in which various modifications and improvements are made based on the knowledge of those skilled in the art, in addition to the mode described in the above-described embodiment.

10: Measuring device 34: Stator 36:

Movable element

34f, 36f: Facing surface 42, 140: Electric circuit 90: Characteristic related value measuring unit 92: AC signal generating unit 94, 142: Auxiliary circuit 100: Control device

Claimable invention

(1) It has an object held by a pair of stylus, a characteristic-related value measuring unit that measures a characteristic-related value related to the electrical characteristics of the object, and one or more circuit elements having electrical characteristics. An electric circuit including an electric circuit including an auxiliary circuit, and an electric characteristic value that is a value representing the electric characteristic of the object based on the characteristic-related value measured by the characteristic-related value measuring unit is obtained. It is a characteristic value acquisition device
An electrical characteristic value acquisition device including an auxiliary circuit switching unit that switches the auxiliary circuit based on at least one of the electrical characteristic value of the object and the acquired electrical characteristic.

The electrical characteristic to be acquired is a type of electrical characteristic to be acquired, and is, for example, the electrical characteristic to be acquired among the inductance L, the resistance R, the capacitance C, and the impedance Z. For example, when acquiring the capacitance C as an electrical characteristic, the auxiliary circuit can be switched to a circuit in which a capacitor is connected to the object.
The switching of the auxiliary circuit corresponds to, for example, switching ON / OFF of the switch included in the auxiliary circuit, changing the electrical characteristic value of the circuit element by the changing mechanism included in the auxiliary circuit, and the like. By switching the auxiliary circuit, at least one of the circuit element connected to the object and the electrical characteristic value of the circuit element is switched.
The electrical characteristic value of the object corresponds to the electrical characteristic value of the object acquired by the electrical characteristic value acquisition device, a predetermined standard value of the electrical characteristic of the object, and the like.

(2) The auxiliary circuit switching unit makes the electrical characteristic value acquired based on the characteristic-related value measured by the characteristic-related value measuring unit within a predetermined setting range. The electrical characteristic value acquisition device according to item (1), which switches the auxiliary circuit.

(3) The auxiliary circuit switching unit switches the auxiliary circuit based on the standard value of the electrical characteristics of the object to be measured next, according to the item (1) or (2). Electrical characteristic value acquisition device.

(4) The auxiliary circuit switching unit includes a plurality of the circuit elements, and also includes one or more switches provided for each one or more of the plurality of circuit elements.
Any one of items (1) to (3) that switches the auxiliary circuit and switches the circuit element connected to the object by switching at least one of the one or more switches. The electrical characteristic value acquisition device according to one.

(5) The auxiliary circuit switching unit switches the auxiliary circuit by controlling each of the one or more switches based on at least one of the electrical characteristic value of the object and the acquired electrical characteristic. The electrical characteristic value acquisition device according to item (4), which includes a switch control unit for switching the circuit element connected to the object.

(6) The circuit element comprises one or more capacitors provided in parallel with the object.
By controlling each of the one or more switches, the switch control unit switches the auxiliary circuit to selectively connect at least one of the one or more capacitors to the object. The electrical characteristic value acquisition device according to item (5).

One or more switches can be provided in a state where one of the one or more capacitors can be selectively connected to the component s in parallel.

(7) The circuit element comprises one or more resistors provided in series with the object.
Item (5), wherein the switch control unit selectively connects at least one of the one or more resistors to the object by controlling each of the one or more switches. Or the electrical characteristic value acquisition device according to item (6).

(8) The circuit element comprises one or more coils provided in series with the object.
Item (5), wherein the switch control unit selectively connects at least one of the one or more coils to the object by controlling each of the one or more switches. The electrical characteristic value acquisition device according to any one of items (7).

The one or more switches can be provided in such a state that one of the one or more coils or resistors can be selectively connected in series with the component s.

(9) Any of items (1) to (8), wherein the auxiliary circuit switching unit includes at least one change mechanism capable of changing at least one of the one or more circuit elements. The electrical characteristic value acquisition device according to one.

The change mechanism can be provided, for example, corresponding to each of the circuit elements.

(10) The auxiliary circuit switching unit controls the at least one change mechanism based on at least one of the electrical characteristic value of the object and the acquired electrical characteristic, and connects the object to the object. The electrical characteristic acquisition device according to any one of items (1) to (9), which includes a change mechanism control unit for changing the electrical characteristic value of the circuit element.

(11) It has an object held by a pair of stylus, a characteristic-related value measuring unit that measures a characteristic-related value related to the electrical characteristics of the object, and one or more circuit elements having electrical characteristics. An electric circuit including an auxiliary circuit is included, and an electric characteristic value which is a value indicating the magnitude of the electric characteristic of the object is acquired based on the characteristic-related value measured by the characteristic-related value measuring unit. It is an electrical characteristic value acquisition device that
The auxiliary circuit control unit that switches the electric circuit by controlling the auxiliary circuit based on at least one of the electric characteristic value of the object and the electric characteristic to be acquired by the electric characteristic value acquisition device. Electrical characteristic value acquisition device including.
The technical features described in any one of paragraphs (1) to (10) can be adopted in the electrical characteristic value acquisition device described in this section.

(12) It has an object held by a pair of stylus, a characteristic-related value measuring unit that measures a characteristic-related value related to the electrical characteristics of the object, and one or more circuit elements having electrical characteristics. An electric circuit including an auxiliary circuit is included, and an electric characteristic value which is a value indicating the magnitude of the electric characteristic of the object is acquired based on the characteristic-related value measured by the characteristic-related value measuring unit. It is an electrical characteristic value acquisition device that
An electrical characteristic value acquisition device in which the auxiliary circuit can switch based on at least one of the electrical characteristic value of the object and the electrical characteristic to be acquired.
The technical features described in any one of paragraphs (1) to (10) can be adopted in the electrical characteristic value acquisition device described in this section.

Claims

An object held by a pair of stylus, a characteristic-related value measuring unit that measures a characteristic-related value related to the electrical characteristics of the object, and an auxiliary circuit having one or more circuit elements having electrical characteristics. An electrical characteristic value acquisition that acquires an electrical characteristic value that is a value representing the electrical characteristic of the object based on the characteristic-related value measured by the characteristic-related value measuring unit. It ’s a device,
An electrical characteristic value acquisition device including an auxiliary circuit switching unit that switches the auxiliary circuit based on at least one of the electrical characteristic value of the object and the electrical characteristic to be acquired by the electrical characteristic value acquisition device.
The auxiliary circuit switching unit has the auxiliary circuit so that the electrical characteristic value acquired based on the characteristic-related value measured by the characteristic-related value measuring unit is within a predetermined setting range. The electrical characteristic value acquisition device according to claim 1, which switches between.
The electrical characteristic value acquisition device according to claim 1 or 2, wherein the auxiliary circuit switching unit switches the auxiliary circuit based on a standard value of the electrical characteristics of the object to be measured next. ..
The auxiliary circuit switching unit includes a plurality of the circuit elements, and is provided with one or more switches corresponding to one or more of the plurality of circuit elements.
By controlling each of the one or more switches based on at least one of the electrical characteristic value of the object and the acquired electrical characteristic, the auxiliary circuit is switched and connected to the object. The electrical characteristic value acquisition device according to any one of claims 1 to 3, which includes a switch control unit for switching circuit elements.
The electricity according to any one of claims 1 to 4, wherein the auxiliary circuit switching unit includes at least one change mechanism capable of changing the electrical characteristic value of at least one of the one or more circuit elements. Characteristic value acquisition device.