WO2021148059A3 - 一种利用光调控硅纳米线传感器灵敏度的装置及方法 - Google Patents

一种利用光调控硅纳米线传感器灵敏度的装置及方法 Download PDF

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WO2021148059A3
WO2021148059A3 PCT/CN2021/082170 CN2021082170W WO2021148059A3 WO 2021148059 A3 WO2021148059 A3 WO 2021148059A3 CN 2021082170 W CN2021082170 W CN 2021082170W WO 2021148059 A3 WO2021148059 A3 WO 2021148059A3
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silicon nanowire
sensitivity
nanowire sensor
sensor
signal
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PCT/CN2021/082170
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French (fr)
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WO2021148059A2 (zh
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李铁
杨义
陈世兴
王跃林
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中国科学院上海微系统与信息技术研究所
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Publication of WO2021148059A2 publication Critical patent/WO2021148059A2/zh
Publication of WO2021148059A3 publication Critical patent/WO2021148059A3/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

一种利用光调控硅纳米线传感器灵敏度的装置及方法，装置包括：用于输出测试目标物的敏感信号并将敏感信号转换为电信号的硅纳米线传感器，用于为硅纳米线传感器提供预设光照强度的光源；用于调节预设光照强度的光功率调节器以及进行信号处理和反馈的信号处理器。装置通过在硅纳米线传感器的顶端设置功率可调光源，改变其周围的光照条件，实现调控其灵敏度的功能。方法利用硅纳米线传感器在不同的光照强度下具有不同的响应灵敏度，通过设定合适的光照条件来调控传感器的灵敏度。结构简单，操作方便，对器件没有损伤，可以实现对硅纳米线传感器灵敏度的便捷、有效调控。
PCT/CN2021/082170 2020-01-22 2021-03-22 一种利用光调控硅纳米线传感器灵敏度的装置及方法 WO2021148059A2 (zh)

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CN202010073580.2 2020-01-22

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CN114137254B (zh) * 2021-11-30 2023-08-04 中北大学 一种基于微纳波导倏逝场耦合的单片式光学mems加速度计

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