WO2021139618A1

WO2021139618A1 - Inductive coupling apparatus and semiconductor processing device

Info

Publication number: WO2021139618A1
Application number: PCT/CN2021/070102
Authority: WO
Inventors: 李兴存
Original assignee: 北京北方华创微电子装备有限公司
Priority date: 2020-01-07
Filing date: 2021-01-04
Publication date: 2021-07-15
Also published as: CN111192812A; TW202127505A; CN111192812B; TWI799776B

Abstract

Disclosed are an inductive coupling apparatus and a semiconductor processing device. The apparatus comprises a radio frequency power supply, a direct-current power supply, a dielectric cylinder, and at least two groups of induction coils, wherein the at least two groups of induction coils are provided around the circumferential side wall of the dielectric cylinder, and are sequentially arranged in the axial direction of the dielectric cylinder. Each group of the induction coils is provided with a direct-current input end, a direct-current output end, a radio frequency input end, and a radio frequency output end, wherein the radio frequency input end and the direct-current input end are respectively electrically connected to the radio frequency power supply and a first electrode of the direct-current power supply, the radio frequency output end is grounded, the direct-current output end is electrically connected to a second electrode of the direct-current power supply, so that an ionization region is formed in a region, corresponding to each group of the induction coils, in the dielectric cylinder. According to the inductive coupling apparatus and the semiconductor processing device disclosed in embodiments of the present invention, the occurrence of a fracture phenomenon of a dielectric window due to a thermal effect caused by high power density can not only be avoided, the thermal stability of the dielectric window can further be improved, and plasma density can also be improved.

Description

Inductive coupling device and semiconductor processing equipment

Technical field

The present invention relates to the technical field of semiconductor manufacturing, in particular to an inductive coupling device and a semiconductor processing device including the inductive coupling device.

Background technique

With the development of three-dimensional stacked packaging, Micro-Electro-Mechanical System (MEMS) packaging, vertical integrated sensor arrays, and mesa metal oxide semiconductor (MOS) power device flip-chip bonding technology, Silicon Connect Through Silicon Via (TSV) interconnection technology is receiving more and more attention and research. In order to achieve a higher etching selection ratio and etching rate, remote high density plasma (Remote High Density Plasma, Remote HDP) processing equipment is often used to etch the substrate. During the process, the substrate is located in the plasma. In the downstream area of the SR, the concentration of free radicals in the downstream area is higher, and the ion density is lower, which can reduce the loss of the mask layer caused by ion bombardment of the substrate surface, so it can achieve both high etching rate and high etching selection ratio.

In remote plasma processing equipment, an inductively coupled plasma source usually uses a solenoid coil to generate plasma, and under the action of a lower electrode bias, independent control of plasma density and energy is achieved. However, due to the skin effect, the effective power absorbed by the solenoid coil is limited, which limits the increase in plasma density. Although the plasma density can be increased by increasing the power density applied by the plasma source, the skin effect still exists, resulting in a limited increase in the plasma density. At the same time, high power density will also cause the dielectric window to crack due to thermal effects. , Resulting in poor thermal stability of the dielectric window.

Summary of the invention

The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes an inductive coupling device and semiconductor processing equipment, which can not only prevent the dielectric window from cracking due to thermal effects caused by high power density, but also Improve the thermal stability of the dielectric window, but also increase the plasma density.

In order to achieve the above objective, the first aspect of the embodiments of the present invention provides an inductive coupling device for ionizing a process gas in a process chamber of a semiconductor processing equipment to form a plasma. The inductive coupling device includes a radio frequency power supply, A DC power supply, a dielectric cylinder, and at least two groups of induction coils, wherein the at least two groups of induction coils are all arranged around the circumferential side wall of the dielectric cylinder, and are arranged in sequence along the axial direction of the dielectric cylinder;

Each group of the induction coils has a DC input terminal, a DC output terminal, a radio frequency input terminal, and a radio frequency output terminal, wherein the radio frequency input terminal and the DC input terminal are respectively connected to the first radio frequency power supply and the direct current power supply. Electrodes are electrically connected, the radio frequency output end is grounded, and the DC output end is electrically connected to the second electrode of the direct current power supply to form an ionization zone in an area in the dielectric cylinder corresponding to each group of the induction coils.

Optionally, each group of the induction coils includes a coil body, the coil body includes a first conductive layer, an insulating layer wrapping the first conductive layer, and a second conductive layer wrapping the insulating layer; wherein, Both ends of the first conductive layer are used as the direct current input end and the direct current output end, respectively; both ends of the second conductive layer are used as the radio frequency input end and the radio frequency output end respectively.

Optionally, each group of the induction coils further includes a DC input wire and a first wire insulation layer that wraps the DC input wire, and a DC output wire and a second wire insulation layer that wraps the DC output wire; wherein, Both ends of the DC input wire are electrically connected to the DC input terminal and the first pole of the DC power supply; both ends of the DC output wire are respectively connected to the DC output terminal and the second pole of the DC power supply. Extremely electrical connection.

Optionally, the inductive coupling device further includes at least one first conductive connection member and at least one second conductive connection member; wherein,

The first conductive connection piece is electrically connected with the two adjacent groups of the induction coils, the radio frequency input end of the second conductive layer is electrically connected, and the first conductive connection piece is electrically connected with the radio frequency power supply ；

The second conductive connecting member is respectively electrically connected to the radio frequency output end of the second conductive layer in two adjacent groups of the induction coils, and the second conductive connecting member is grounded.

Optionally, the directions of the currents delivered by the two adjacent groups of the induction coils are the same.

Optionally, the induction coil includes a three-dimensional spiral coil,

The winding directions of the two adjacent three-dimensional spiral coils are opposite, and the DC input end and the radio frequency input end of the two adjacent three-dimensional spiral coils are located in the respective three-dimensional spiral coils. On different sides of the dielectric cylinder in the axial direction, the direct current output terminal and the radio frequency output terminal of the two adjacent three-dimensional spiral coils are located at the positions of the respective three-dimensional spiral coils in the axial direction of the dielectric cylinder. Different side; or,

The winding directions of the two adjacent three-dimensional spiral coils are the same, and the DC input end and the radio frequency input end of the two adjacent three-dimensional spiral coils are located in the respective three-dimensional spiral coils. On the same side in the axial direction of the dielectric cylinder, the DC output end and the radio frequency output end of the two adjacent three-dimensional spiral coils are located at the same side of the three-dimensional spiral coil in the axial direction of the dielectric cylinder. Same side.

Optionally, the induction coil includes a planar coil,

The winding directions of the two adjacent planar coils are the same, and the DC input end and the radio frequency input end of the two adjacent planar coils are located in the respective plane coils of the dielectric cylinder. On the same side in the radial direction, the DC output end and the radio frequency output end of the two adjacent planar coils are located on the same side in the radial direction of the dielectric cylinder of the respective planar coils; or,

The winding directions of the two adjacent planar coils are opposite, and the DC input end and the radio frequency input end of the two adjacent planar coils are located on the respective planar coils in the dielectric cylinder. On different sides in the radial direction, the DC output ends and the radio frequency output ends of the two adjacent planar coils are located on different sides of the respective planar coils in the radial direction of the dielectric cylinder.

Optionally, the inductive coupling device further includes a first filter and a second filter, wherein the DC input terminal of each group of the induction coil is connected to the first filter of the DC power supply via the first filter. The poles are electrically connected, and the DC output end of each group of the induction coils is electrically connected to the second pole of the DC power supply via the second filter.

Optionally, the first filter and the second filter are both low-pass filters.

Optionally, the first filter includes a first inductor and a first capacitor, and the second filter includes a second inductor and a second capacitor; wherein the first end of the first inductor is connected to the DC power supply The first pole of the first capacitor and the first terminal of the first capacitor are electrically connected, the second terminal of the first inductor is electrically connected to the DC input terminal of each group of the induction coils, and the first capacitor of the first capacitor Two ends are grounded;

The first end of the second inductor is electrically connected to the DC output end of each group of the induction coils, and the second end of the second inductor is connected to the second pole of the DC power source and the second capacitor. The first ends are electrically connected, and the second end of the second capacitor is grounded.

Optionally, the inductive coupling device further includes a DC blocking capacitor, a matching device, and a grounding capacitor; wherein the first end of the DC blocking capacitor is electrically connected to the radio frequency power supply through the matching device, and the DC blocking capacitor The second end of is electrically connected to the radio frequency input end of each group of the induction coils:

The first end of the grounding capacitor is electrically connected to the radio frequency output end of each group of the induction coils, and the second end of the grounding capacitor is grounded.

In a second aspect of the embodiments of the present invention, there is provided a semiconductor processing equipment that includes a process chamber and further includes the inductive coupling device described above, and the inductive coupling device is disposed in the process chamber. The upper part of the chamber is used to ionize the process gas in the process chamber to form a plasma.

In the inductive coupling device provided by the embodiment of the present invention, at least two groups of induction coils are arranged along the circumferential side wall of the dielectric cylinder and arranged in sequence along the axial direction, and the DC input end and the DC output end of each group of induction coils It is electrically connected to the first pole and the second pole of the DC power supply, the RF input end of each group of induction coils is electrically connected to the RF power supply, and the RF output end is grounded, which can not only reduce the passage of each group of induction coils under the same RF power condition In this way, the dielectric window can be prevented from rupturing due to thermal effects caused by high power density, and the thermal stability of the dielectric window can be improved; and at least two sets of induction coils are used to form at least two in the corresponding area in the dielectric cylinder. One ionization zone can ionize the process gas multiple times during the process of sequentially passing through at least two ionization zones, thereby effectively improving the efficiency of inductive coupling power utilization, thereby increasing the plasma density. In addition, by using the RF power supply to load each group of induction coils with RF power, and using the DC power supply to load each group of induction coils with DC power, the generated static magnetic field can confine the electrons in the plasma to extend their movement path, thereby Further increase the plasma density.

The semiconductor processing equipment provided by the embodiments of the present invention, by using the inductive coupling device provided by the embodiments of the present invention, can not only prevent the dielectric window from cracking due to the thermal effect caused by high power density, but also can improve the thermal stability of the dielectric window , But also can increase the plasma density.

Description of the drawings

The accompanying drawings are used to provide a further understanding of the present invention, and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present invention, but do not constitute a limitation to the present invention. In the attached picture:

FIG. 1 is a schematic structural diagram of an inductive coupling device provided by a first embodiment of the present invention;

Figure 2 is a schematic diagram of the path of electrons making Ramor motion in a magnetic field;

Figure 3 is a comparison diagram of the effect of confining plasma with and without static magnetic field;

4 is an equivalent circuit diagram of the inductive coupling device provided by the first embodiment of the present invention;

5 is a structural diagram of two adjacent induction coils used in the first embodiment of the present invention;

6 is a cross-sectional view of the connection between the DC output wire and the DC output terminal of the induction coil used in the first embodiment of the present invention;

7 is a cross-sectional view of the first conductive connector and the DC input wire used in the first embodiment of the present invention, respectively, connected to the RF input terminal and the DC input terminal of the induction coil;

8 is a cross-sectional view of the second conductive connector and the DC output wire used in the first embodiment of the present invention, respectively, connected to the RF output terminal and the DC output terminal of the induction coil;

9 is a schematic diagram of a circuit of two adjacent induction coils used in the second embodiment of the present invention;

FIG. 10 is a schematic diagram of another circuit of two adjacent induction coils used in the second embodiment of the present invention.

Detailed ways

The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not used to limit the present invention.

As shown in FIG. 1, the first aspect of the embodiment of the present invention relates to an inductive coupling device 100, which is used to ionize a process gas in a process chamber of a semiconductor processing equipment 200 to form plasma. The semiconductor processing equipment 200 generally includes a process chamber 210, an inductive coupling device 100 disposed above the process chamber 210, an air inlet system 220 for supplying process gas into the process chamber 210, and a bias voltage located in the process chamber 210. An electrode 230, the bias electrode 230 is electrically connected to the bias RF source 250 via a bias matcher 240.

In some embodiments, the above-mentioned inductive coupling device 100 is used as a remote plasma source, and the plasma generation area of the remote plasma source is not located inside the process chamber 210, but outside the process chamber 210. This will be described in detail below. The structure of the inductive coupling device 100 and its application in the semiconductor processing equipment 200 provided by the embodiment of the invention.

The first embodiment

As shown in FIG. 1, the inductive coupling device 100 provided in this embodiment includes a radio frequency power supply 110, a direct current power supply 160, a dielectric cylinder 130, and two sets of induction coils (140, 150). Among them, the two groups of induction coils (140, 150) are arranged around the circumferential side wall of the dielectric cylinder 130, and are arranged in sequence along the axial direction of the dielectric cylinder 130; in this embodiment, the first group of induction coils 140 are arranged in The second group of induction coils 150 is above and corresponds to the upper area inside the dielectric cylinder 130; the second group of induction coils 150 corresponds to the lower area inside the dielectric cylinder 130.

Wherein, the first group of induction coils 140 and the second group of induction coils 150 both have a DC input terminal 161, a DC output terminal 162, a radio frequency input terminal 111, and a radio frequency output terminal 112. It can be understood that the DC input terminal shown in FIG. 1 The terminal 161, the DC output terminal 162, the radio frequency input terminal 111 and the radio frequency output terminal 112 are all intersection points of the end of the first group of induction coils 140 and the end of the second group of induction coils 150.

Wherein, the radio frequency input terminal 111 and the DC input terminal 161 are electrically connected to the first pole (for example, the positive electrode) of the radio frequency power supply 110 and the DC power supply 160, respectively, the radio frequency output terminal 112 is grounded, and the DC output terminal 162 is connected to the second pole of the DC power supply 160. (For example, the negative electrode) is electrically connected to form two ionization regions in the regions corresponding to the two sets of induction coils (140, 150) in the dielectric cylinder 130, that is, the first ionization region is formed in the upper region; and the first ionization region is formed in the lower region. The second ionization zone. It should be noted that FIG. 1 only exemplarily shows the DC input terminal, the DC output terminal, the radio frequency input terminal, and the radio frequency output terminal of the first group of induction coils 140, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also deemed to be within the protection scope of the present invention.

Specifically, as shown in FIG. 1, in the semiconductor processing equipment 200 using the above-mentioned inductive coupling device 100, during the process, the process gas enters the dielectric cylinder 130 through the air intake system 220, and the radio frequency power supply 110 (the frequency of which is generally (0.4MHz～60MHz) provide alternating current to the two groups of induction coils (140, 150), so that the two groups of induction coils (140, 150) generate alternating electromagnetic fields in the upper and lower regions of the dielectric cylinder 130, respectively. The first ionization zone and the second ionization zone are formed. The process gas undergoes two ionizations during the process of sequentially passing through the first ionization zone and the second ionization zone from top to bottom. Among them, the process gas undergoes the first ionization in the first ionization zone. Ionization, forming a plasma containing electrons, ions, neutral gases, etc., wherein the neutral gas is an uncharged gas including free radicals and source gases, and the content of free radicals is about 100 to 1000 times the content of ions. Then, the particles after the first ionization continue to diffuse downwards, and the second ionization occurs when they pass through the second ionization zone. The energy required for the second ionization will be lower than the energy required for the first ionization.

By ionizing the process gas multiple times, the utilization efficiency of inductive coupling power can be effectively improved, thereby increasing the plasma density. Moreover, by arranging two sets of induction coils (140, 150), the current passing through each set of induction coils can be reduced under the same radio frequency power condition, so as to avoid the dielectric window rupture due to thermal effects caused by high power density. , In turn, can improve the thermal stability of the dielectric window.

In addition, by using the RF power supply to load each group of induction coils with RF power, and using the DC power supply to load each group of induction coils with DC power, the generated static magnetic field can confine the electrons in the plasma to extend their movement path, thereby Further increase the plasma density.

Specifically, as shown in Fig. 2, the static magnetic field B generated by the two sets of induction coils (140, 150) can confine the electrons e in the plasma, so that they can make Ramol motion (spiral motion) in the direction of the magnetic line of induction. This movement mode can extend the movement path of the electron e in the plasma, thereby increasing the collision frequency of the electron e with the neutral gas and free radicals, thereby further increasing the plasma density.

As shown in Figure 3, compared to the plasma distribution area without a static magnetic field, under the confinement of a static magnetic field, the plasma will be constrained by the magnetic lines of induction in a smaller distribution area, which can reduce electron or ion recombination. As far as the number of dielectric cylinders 130 is reached, experimental studies have confirmed that the inductive coupling device 100 provided in this embodiment can increase the plasma density from the conventional 1011/cm ³ to the order of 1012/cm ³ , thereby greatly improving the plasma density. Body density.

In some embodiments, the DC current output by the DC power supply 160 is generally 0-200A, and the magnetic field strength range of the static magnetic field generated by each group of induction coils is generally less than 1000G; the RF power output by the RF power supply 110 is generally less than 10KW.

It should be noted that when the radio frequency power supply 110 provides radio frequency power to the two groups of induction coils (140, 150), the radio frequency power can be distributed through the inductance values of the two groups of induction coils (140, 150), and in order to control the dielectric barrel 130 The balance of the surface power density generally requires that the inductance values of the two sets of induction coils (140, 150) are equal, that is, the power is evenly distributed.

It should also be noted that in this embodiment, there are two groups of induction coils, but the embodiment of the present invention is not limited to this. In practical applications, the induction coils can also be three groups, four groups or more than five groups. The embodiments of the present invention are not limited in sequence.

In order to realize the isolation of DC current and radio frequency current, as shown in FIG. 1, the inductive coupling device 100 further includes a first filter 170 and a second filter 180, wherein the DC input terminals 161 of the two groups of induction coils (140, 150) The first filter 170 is electrically connected to the first pole of the DC power supply 160, and the DC output terminals 162 of the two sets of induction coils (140, 150) are electrically connected to the second pole of the DC power supply 160 via the second filter 180. The first filter 170 and the second filter 180 may both be low-pass filters, for example.

The structure of the first filter 170 and the second filter 180 may be various. For example, as shown in FIG. 4, the first filter 170 may include a first inductor L1 and a first capacitor C1, and the second filter 180 may include a first inductor L1 and a first capacitor C1. Two inductors L2 and a second capacitor C2; wherein, the first end of the first inductor L1 is electrically connected to the first pole of the DC power supply 160 and the first end of the first capacitor C1, and the second end of the first inductor L2 is connected to the two groups The DC input terminal 161 of the induction coil (140, 150) is electrically connected, and the second terminal of the first capacitor C1 is grounded. The first end of the second inductor L2 is electrically connected to the DC output terminals 162 of the two sets of induction coils (140, 150), and the second end of the second inductor L2 is connected to the second pole of the DC power supply 160 and the first pole of the second capacitor C2. The terminal is electrically connected, and the second terminal of the second capacitor C2 is grounded. In practical applications, in order to achieve isolation of high-frequency currents, the corresponding frequency inductance formed by the first inductor L1 and the second inductor L2 should be large enough, for example, greater than 2000Ω.

In some embodiments, as shown in FIG. 4, the inductive coupling device 100 further includes a DC blocking capacitor C3, a matching device 120, and a grounding capacitor C4. The first end of the DC blocking capacitor C3 is electrically connected to the radio frequency power supply 110 through the matching device 120. Connected, the second end of the DC blocking capacitor C3 is electrically connected to the radio frequency input ends 111 of the two sets of induction coils (140, 150). The DC blocking capacitor C3 is used to effectively isolate the DC current and does not affect the high frequency impedance. The capacitance value of the blocking capacitor C3 is generally 22nF.

The first end of the grounding capacitor C4 is electrically connected to the radio frequency output terminals 112 of the two sets of induction coils (140, 150); the second end of the grounding capacitor C4 is grounded. The grounding capacitor C4 is used to effectively balance the voltage between the RF input terminal 111 and the RF output terminal 112 of the induction coil. The capacitive reactance of the grounding capacitor C4 is generally 50% of the inductive reactance of the induction coil.

In some embodiments, as shown in FIGS. 5 and 6, the first group of induction coils 140 includes a coil body 141, the second group of induction coils 150 includes a coil body 151, and the coil bodies of the two groups of induction coils (140, 150) The structure is the same. Taking the coil body 141 as an example, as shown in FIG. 6, the coil body 141 includes a first conductive layer 141a, an insulating layer 141b wrapping the first conductive layer 141a, and a second conductive layer 141c wrapping the insulating layer 141b . Wherein, the two ends of the first conductive layer 141a are used as the DC input terminal 161 and the DC output terminal 162, respectively; the two ends of the second conductive layer 141c are used as the radio frequency input terminal 111 and the radio frequency output terminal 112, respectively. With the insulating layer 141b, the electric field entering the DC conduction section can be attenuated so that the first conductive layer 141a and the second conductive layer 141c can be isolated from each other. At the same time, the high-frequency current and the DC current propagate in different positions of the coil body. As a result, the mutual interference effect between the two will be reduced to a greater extent. On this basis, the anti-interference effect is better with the filtering effects of the first filter 170 and the second filter 180.

In some embodiments, taking the coil body 141 as an example, as shown in FIGS. 6 to 8, the induction coil further includes a DC input wire 193a, a first wire insulation layer 195 wrapping the DC input wire 193a, and a DC output wire 194a And the second wire insulation layer 196 wrapping the DC output wire 194a; wherein, both ends of the DC input wire 193a are electrically connected to the DC input end (ie, the input end of the first conductive layer 141a) and the first pole of the DC power supply 160, respectively The two ends of the DC output wire 194a are respectively electrically connected to the DC output terminal (ie, the output terminal of the first conductive layer 141a) and the second pole of the DC power supply. Both the DC input wire 193a and the DC output wire 194a can be electrically connected to the first conductive layer 141a by welding. The solder joint positions of the DC input wire 193a and the DC output wire 194a and the first conductive layer 141a are shown in FIGS. 7 and 8, respectively. The position shown is 141d. Same as the above-mentioned coil body 141, as shown in FIG. 5, corresponding to the coil body 151, the induction coil also includes a DC input wire 193b and a first wire insulation layer 195 wrapping the DC input wire 193b, and a DC output wire 194b and wrapping The second wire insulation layer 196 of the DC output wire 194b, since the structure and function of these components are the same as the above-mentioned coil body 141, the description will not be repeated here.

It should be noted that the specific materials of the first conductive layer 141a, the insulating layer 141b, and the second conductive layer 141c are not limited. For example, the first conductive layer 141a and the second conductive layer 141c can be copper with higher conductivity. Material, the material of the insulating layer 141b can generally be tetrafluoroethylene or the like.

In some embodiments, as shown in FIG. 5, the inductive coupling device 100 further includes at least one first conductive connection 191 and at least one second conductive connection 192; wherein the first conductive connection 191 is connected to two adjacent In the group of induction coils (140, 150), the radio frequency input terminals (111a, 111b) of the second conductive layer 141c are electrically connected. The second conductive connecting member 192 is respectively electrically connected to the two radio frequency output terminals (112a, 112b) of the second conductive layer 141c in the two adjacent groups of induction coils (140, 150). In addition, in order to improve the low-pass filtering effect of the first filter 170 and the second filter 180, according to the high-frequency surface skin effect and the principle of DC current cross-section, the axes of the induction coil and the two conductive connections can be parallel to each other. As shown in FIG. 5, that is, the first conductive connecting member 191 and the second conductive connecting member 192 are both parallel to the axes of the two coil bodies (141, 151).

In some embodiments, optionally, two adjacent groups of induction coils carry current in the same direction. For example, as shown in Figure 5, the two adjacent sets of induction coils (140, 150) are all three-dimensional spiral coils. In this case, in order to achieve the same direction of current delivery by the adjacent two sets of induction coils, two sets of induction coils can be used. Kind of connection. FIG. 5 shows the first connection method, that is, the winding directions of two adjacent three-dimensional spiral coils are opposite. From the top-down direction of FIG. 5, the winding direction of the induction coil 140 located above is Winding in a clockwise direction from top to bottom; the winding direction of the induction coil 150 located below is winding in a counterclockwise direction from top to bottom. In addition, the DC input terminal and the radio frequency input terminal of the two adjacent three-dimensional spiral coils are located on different sides of the respective three-dimensional spiral coils in the axial direction of the dielectric cylinder 130. Specifically, as shown in FIG. Group of induction coils 140, the ends of which are used as DC input terminals 161 and radio frequency input terminals 111 are located on the upper side of the first group of induction coils 140, that is, the upper end; the second group of induction coils 150 located below, which are used as direct current The ends of the input terminal 161 and the radio frequency input terminal 111 are located on the lower side of the second group of induction coils 150, that is, the lower end. In addition, the DC output terminal and the RF output terminal of the two adjacent three-dimensional spiral coils are located on different sides of the respective three-dimensional spiral coils in the axial direction of the dielectric cylinder. Specifically, as shown in FIG. 1, the first group located above The induction coil 140, which is used as the DC output terminal 162 and the radio frequency output terminal 112, is located on the lower side of the first group of induction coils 140, that is, the lower end; the second group of induction coils 150 located below is used as the DC output The ends of the end 161 and the radio frequency output end 111 are located on the upper side of the second group of induction coils 150, that is, the upper end. Therefore, viewed from the top-down direction in FIG. 5, the directions in which the first group of induction coils 140 and the second group of induction coils 150 deliver current are both clockwise.

The second connection method is: the winding directions of two adjacent three-dimensional spiral coils are the same, and the DC input end and the RF input end of the two adjacent three-dimensional spiral coils are located in the axial direction of the respective three-dimensional spiral coils. The DC output terminal and the RF output terminal of the two adjacent three-dimensional spiral coils are located on the same side of the respective three-dimensional spiral coil in the axial direction of the dielectric cylinder, which can also realize the transmission of two adjacent groups of induction coils. The direction of the current is the same.

It should be noted that, in practical applications, it is also possible to reverse the directions of the two adjacent groups of induction coils that convey currents according to specific needs.

Second embodiment

Compared with the above-mentioned first embodiment, the inductive coupling device provided by this embodiment differs only in that the spiral coil is a planar coil.

In this embodiment, the two adjacent groups of induction coils carry current in the same direction. For example, as shown in Figures 9 and 10, the two adjacent sets of induction coils (140', 150') are all planar coils, and Figures 9 and 10 only exemplarily combine the two sets of induction coils (140', 150'). ) Shows side by side, in fact, the axes of the two groups of induction coils (140', 150') are on the same straight line as the axial direction of the dielectric cylinder 130, and the second group of induction coils 150' are located in the first group of induction coils 140' The lower or second group of induction coils 150' and the first group of induction coils 140' are nested in the same plane.

In this case, in order to achieve the same direction of current delivery of the two adjacent groups of induction coils (140', 150'), two connection methods can be used. Figure 9 shows the first connection method, that is, the winding directions of two adjacent planar coils are the same. When viewed from the paper, the winding directions of the two groups of induction coils (140', 150') are both Wrap clockwise from the inside to the outside. In addition, the DC input terminals and the RF input terminals of the adjacent two groups of induction coils (140', 150') are located on the same side of the respective planar coils in the radial direction of the dielectric cylinder 130, and the DC output of the two adjacent planar coils The terminal and the RF output terminal are located on the same side of the respective planar coils in the radial direction of the dielectric cylinder. Specifically, as shown in FIG. 9, the first group of induction coils 140', which serve as the DC input terminal 161' and the radio frequency input terminal 111', are located inside the first group of induction coils 140', that is, close to the axis of the first group of induction coils 140'. The end; the end of the first group of induction coils 140' used as the DC output terminal 162' and the radio frequency output terminal 112' is located outside the first group of induction coils 140', that is, the end away from its axis. The second group of induction coils 150', the ends of which are used as the DC input terminal 161' and the radio frequency input terminal 111' are located inside the second group of induction coils 150', that is, the end close to the axis; the second group of induction coils 150 The ends used as the DC output terminal 162' and the radio frequency output terminal 112' are located outside the second group of induction coils 150', that is, the ends away from the axis thereof. Therefore, from the perspective of FIG. 9 toward the paper, the directions in which the first group of induction coils 140' and the second group of induction coils 150' deliver current are both clockwise.

FIG. 10 shows the second connection mode, that is, the winding directions of two adjacent planar coils are opposite, and the winding direction of the first group of induction coils 140' is from the inside to the outside and the opposite direction when viewed from the paper. Winding in a clockwise direction; the winding direction of the second group of induction coils 150' is clockwise from the inside to the outside. In addition, the DC input terminals and the radio frequency input terminals of the adjacent two groups of induction coils (140', 150') are located on different sides of the respective planar coils in the radial direction of the dielectric cylinder 130, and the adjacent two groups of induction coils (140' , 150') DC output terminal and RF output terminal are located on different sides of the respective planar coils in the radial direction of the dielectric cylinder 130. Specifically, as shown in FIG. 10, the first group of induction coils 140', which serve as the DC input terminal 161' and the radio frequency input terminal 111', are located outside the first group of induction coils 140', that is, far away from the axis of the first group of induction coils 140'. The end; the end of the first group of induction coils 140' used as the DC output terminal 162' and the radio frequency output terminal 112' is located inside the first group of induction coils 140', that is, the end close to its axis. The second group of induction coils 150', the ends of which are used as the DC input terminal 161' and the radio frequency input terminal 111' are located inside the second group of induction coils 150', that is, the end close to the axis; the second group of induction coils 150 The ends used as the DC output terminal 162' and the radio frequency output terminal 112' are located outside the second group of induction coils 150', that is, the ends away from the axis thereof. Therefore, from the perspective of FIG. 10 toward the paper, the directions in which the first group of induction coils 140' and the second group of induction coils 150' deliver current are both clockwise.

Of course, in practical applications, the induction coil can also adopt any other structure, as long as the two adjacent groups of induction coils can deliver currents in the same direction, and the cross section of the induction coil is in a strip, ring, or column shape, etc. .

In a second aspect of the present invention, as shown in FIG. 1, a semiconductor processing equipment 200 is provided. The semiconductor processing equipment 200 includes a process chamber 210 and the inductive coupling device 100 described above. The inductive coupling device 100 is disposed in the process chamber 210. Above, and for the specific structure of the inductive coupling device 100, please refer to the previous related records.

As shown in FIG. 1, specifically, the medium cylinder 130 is disposed above the process chamber 210 and is connected to the process chamber 210 in a sealed manner. Of course, in addition to this, the semiconductor processing equipment 200 may also include some of the aforementioned structures or some other necessary components, such as a shield 260, an exhaust system 270, and so on.

The semiconductor processing equipment 200 provided by the embodiment of the present invention has the inductive coupling device 100 described above, which can not only avoid the cracking of the dielectric window due to the thermal effect caused by high power density, thereby improving the thermal stability of the dielectric window, but also The plasma density can be increased.

It can be understood that the above implementations are merely exemplary implementations used to illustrate the principle of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also deemed to be within the protection scope of the present invention.

Claims

An inductive coupling device for ionizing process gas in a process chamber of a semiconductor processing equipment to form plasma, characterized in that the inductive coupling device includes a radio frequency power supply, a direct current power supply, a dielectric cylinder and at least two sets of induction coils, Wherein, the at least two groups of induction coils are all arranged around the circumferential side wall of the dielectric cylinder, and are arranged in sequence along the axial direction of the dielectric cylinder;

Each group of the induction coils has a DC input terminal, a DC output terminal, a radio frequency input terminal, and a radio frequency output terminal, wherein the radio frequency input terminal and the DC input terminal are respectively connected to the first radio frequency power supply and the direct current power supply. Electrodes are electrically connected, the radio frequency output end is grounded, and the DC output end is electrically connected to the second electrode of the direct current power supply to form an ionization zone in an area in the dielectric cylinder corresponding to each group of the induction coils.
The inductive coupling device according to claim 1, wherein each group of the induction coils includes a coil body, the coil body includes a first conductive layer, an insulating layer wrapping the first conductive layer, and an insulating layer wrapping the first conductive layer. The second conductive layer of the insulating layer; wherein both ends of the first conductive layer are used as the DC input terminal and the DC output terminal respectively; both ends of the second conductive layer are used as the radio frequency The input terminal and the radio frequency output terminal.
The inductive coupling device according to claim 2, wherein each group of the induction coils further comprises a DC input wire and a first wire insulation layer that wraps the DC input wire, and a DC output wire and a first wire insulation layer that wraps the DC input wire. The second wire insulation layer of the output wire; wherein, both ends of the DC input wire are electrically connected to the DC input terminal and the first pole of the DC power supply; both ends of the DC output wire are respectively connected to the The DC output terminal is electrically connected with the second pole of the DC power supply.
The inductive coupling device according to claim 2, wherein the inductive coupling device further comprises at least one first conductive connection member and at least one second conductive connection member; wherein,

The first conductive connection piece is electrically connected with the two adjacent groups of the induction coils, the radio frequency input end of the second conductive layer is electrically connected, and the first conductive connection piece is electrically connected with the radio frequency power supply ；

The second conductive connecting member is respectively electrically connected to the radio frequency output end of the second conductive layer in two adjacent groups of the induction coils, and the second conductive connecting member is grounded.
The inductive coupling device according to any one of claims 1 to 4, wherein the two adjacent groups of the induction coils carry current in the same direction.
The inductive coupling device according to claim 5, wherein the induction coil comprises a three-dimensional spiral coil,

The winding directions of the two adjacent three-dimensional spiral coils are opposite, and the DC input end and the radio frequency input end of the two adjacent three-dimensional spiral coils are located in the respective three-dimensional spiral coils. On different sides of the dielectric cylinder in the axial direction, the direct current output terminal and the radio frequency output terminal of the two adjacent three-dimensional spiral coils are located at the positions of the respective three-dimensional spiral coils in the axial direction of the dielectric cylinder. Different side; or,

The winding directions of the two adjacent three-dimensional spiral coils are the same, and the DC input end and the radio frequency input end of the two adjacent three-dimensional spiral coils are located in the respective three-dimensional spiral coils. On the same side in the axial direction of the dielectric cylinder, the DC output end and the radio frequency output end of the two adjacent three-dimensional spiral coils are located at the same side of the three-dimensional spiral coil in the axial direction of the dielectric cylinder. Same side.
The inductive coupling device according to claim 5, wherein the induction coil comprises a planar coil,

The winding directions of the two adjacent planar coils are the same, and the DC input end and the radio frequency input end of the two adjacent planar coils are located in the respective plane coils of the dielectric cylinder. On the same side in the radial direction, the DC output end and the radio frequency output end of the two adjacent planar coils are located on the same side in the radial direction of the dielectric cylinder of the respective planar coils; or,

The winding directions of the two adjacent planar coils are opposite, and the DC input end and the radio frequency input end of the two adjacent planar coils are located on the respective planar coils in the dielectric cylinder. On different sides in the radial direction, the DC output ends and the radio frequency output ends of the two adjacent planar coils are located on different sides of the respective planar coils in the radial direction of the dielectric cylinder.
The inductive coupling device according to any one of claims 1 to 4, wherein the inductive coupling device further comprises a first filter and a second filter, wherein the direct current of each group of the induction coil The input terminal is electrically connected to the first pole of the DC power supply through the first filter, and the DC output terminal of each group of the induction coil is electrically connected to the second pole of the DC power supply through the second filter. connection.
8. The inductive coupling device according to claim 8, wherein the first filter and the second filter are both low-pass filters.
8. The inductive coupling device according to claim 8, wherein the first filter includes a first inductor and a first capacitor, and the second filter includes a second inductor and a second capacitor; wherein the first filter includes a second inductor and a second capacitor; The first end of an inductor is electrically connected to the first pole of the DC power supply and the first end of the first capacitor, and the second end of the first inductor is connected to the DC input of each group of the induction coils. The terminal is electrically connected, and the second terminal of the first capacitor is grounded;

The first end of the second inductor is electrically connected to the DC output end of each group of the induction coils, and the second end of the second inductor is connected to the second pole of the DC power source and the second capacitor. The first ends are electrically connected, and the second end of the second capacitor is grounded.
The inductive coupling device according to any one of claims 1 to 4, wherein the inductive coupling device further comprises a DC blocking capacitor, a matching device and a grounding capacitor; wherein the first end of the DC blocking capacitor passes The matching device is electrically connected to the radio frequency power supply, and the second end of the DC blocking capacitor is electrically connected to the radio frequency input end of each group of the induction coils:

The first end of the grounding capacitor is electrically connected to the radio frequency output end of each group of the induction coils, and the second end of the grounding capacitor is grounded.
A semiconductor processing equipment, comprising a process chamber, characterized in that it further comprises the inductive coupling device according to any one of claims 1 to 11, the inductive coupling device is arranged above the process chamber for The process gas in the process chamber is ionized to form plasma.