WO2021129026A1 - 宽谱段大数值孔径的显微物镜 - Google Patents

宽谱段大数值孔径的显微物镜 Download PDF

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WO2021129026A1
WO2021129026A1 PCT/CN2020/118925 CN2020118925W WO2021129026A1 WO 2021129026 A1 WO2021129026 A1 WO 2021129026A1 CN 2020118925 W CN2020118925 W CN 2020118925W WO 2021129026 A1 WO2021129026 A1 WO 2021129026A1
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lens
lens group
convex
objective lens
image plane
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PCT/CN2020/118925
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French (fr)
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张新
管海军
王超
曲贺盟
张继真
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中国科学院长春光学精密机械与物理研究所
长春长光智欧科技有限公司
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Publication of WO2021129026A1 publication Critical patent/WO2021129026A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/04—Objectives involving mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
    • G02B13/002—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface
    • G02B13/0045—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface having five or more lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/0055—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element
    • G02B13/0065—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element having a beam-folding prism or mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/06—Panoramic objectives; So-called "sky lenses" including panoramic objectives having reflecting surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration

Definitions

  • the invention belongs to the technical field of high-precision optical imaging of microscopic objective lenses, and particularly relates to a microscopic objective lens with a wide spectrum band and a large numerical aperture.
  • Gene sequencing equipment as the intersection of the three major technologies of nanotechnology, biology and information, embodies the use of the most advanced science and technology to explore life information, and has become an important guarantee for sustainable economic development and national security and stability.
  • Gene sequencing is an emerging industry and is in a rapid development stage.
  • the key technology of ultra-high-throughput microscope objectives has become a bottleneck technology that limits the localization of gene sequencers (sequencing throughput refers to the amount of data output obtained by gene sequencing equipment in a certain period of time , Is one of the important indicators for evaluating the advancement of sequencing technology, higher sequencing throughput also means lower sequencing costs), the microscopic objective lens required in the ultra-high-throughput gene sequencer has a planar spatial scale and spatial resolution All aspects put forward higher requirements, which requires that the microscope objective needs to have a large field of view while taking into account high resolution. In the design of optical systems, wide-field and high-resolution are trade-offs. Wide is not precise, and precision is not wide. This is the biggest difficulty encountered by ultra-high-throughput microscope objectives.
  • the objective lens is the key to achieving high-throughput and even ultra-high-throughput gene sequencing.
  • the current popular high-throughput gene sequencing, brain neuron detection, cancer cell development in the biomedical field Research directions such as monitoring all have an urgent need for wide-field, high-resolution optical systems.
  • Patent US9304407B2 see Figure 1 for details.
  • This optical lens adopts the form of a total reflection optical system, which can image the spectrum in the full spectrum and the field of view can be 1mm.
  • the numerical aperture of the system is generally less than 0.9 .
  • the purpose of the present invention is to provide a wide-spectrum and large numerical aperture microscopic objective lens, which aims to solve the technical problem that the prior art cannot simultaneously take into account the large field of view and high resolution.
  • the present invention provides a wide-spectrum and large-numerical-aperture microscopic objective lens.
  • the microscopic objective lens includes a first lens group, a second lens group, and a third lens group in order from the object plane to the image plane along the optical path direction;
  • the first lens group is a catadioptric lens group that images light emitted from the object plane onto a primary image plane, and the first lens group is used to increase the numerical aperture and correct chromatic aberration, and has a positive light angle;
  • the second lens group and the third lens group emit light from the primary image plane as parallel light, and the second lens group and the third lens group both have a negative light angle.
  • the first lens group includes three lenses, which are a plano-convex positive lens (1), a meniscus negative lens (2), and a plano lens (3) that are convex to the image plane along the optical path from the object plane to the image plane. ).
  • the second lens group includes 4 lenses.
  • the second lens group includes 4 lenses.
  • they are a convex lens (4), a plano-convex positive lens (5) that is convex to the image plane, and a plano-convex lens that is convex to the object plane.
  • the third lens group includes 4 lenses, which are a convex lens (8), a double-concave negative lens (9), and a plano-convex positive lens (10) that is convex toward the image plane along the optical path from the object plane to the image plane.
  • the position of the object plane of the microscopic objective lens adopts an immersion method.
  • an aperture stop (15) is arranged between the second lens group and the third lens group.
  • the numerical aperture of the microscopic objective lens is greater than or equal to 1.0.
  • the length of the microscope objective lens is less than 173 mm.
  • the microscopic objective lens adopts non-fluorescent optical materials.
  • the microscopic objective lens provided by the present invention adopts the form of a catadioptric optical system, uses a double-folded optical path, and has a built-in system diaphragm, which effectively reduces the overall optical size of the objective lens, and the total length is less than 173mm.
  • the aspheric surface is effectively used to correct the advanced ball of the system. It controls the astigmatism, field curvature, and primary coma related to the field of view, so that the total length of the optical system is less than 173mm.
  • the entire optical system uses the same optical material, and the imaging spectrum can reach 300nm-800nm, combined with the back-end immersion
  • the numerical aperture of the system can reach 1.0, and the field of view of the system imaging line can reach 4.0mm, which effectively realizes the high resolution while having a large field of view.
  • Figure 1 is a schematic diagram of the optical lens structure shown in patent US9304407B2;
  • Fig. 2 is a schematic structural diagram of a microscope objective lens with a wide spectrum band and a large numerical aperture according to the first embodiment of the present invention.
  • Fig. 2 shows a wide-spectrum and large numerical aperture microscope objective provided by this embodiment.
  • the wide-spectrum and large-numerical-aperture microscopic objective lens provided by this embodiment includes a first lens group, a second lens group, and a third lens group in order from the object plane to the image plane along the optical path direction.
  • the first lens group is a catadioptric lens group that images light emitted from the object plane onto a primary image plane, and the first lens group is used to increase the numerical aperture and correct chromatic aberration, and has a positive light angle;
  • the second lens group and the third lens group emit light from the primary image plane as parallel light, and the second lens group and the third lens group both have a negative light angle.
  • the first lens group includes three lenses, which are a plano-convex positive lens (1), a meniscus negative lens (2), and a plano lens (3) that are convex toward the image plane along the optical path from the object plane to the image plane.
  • the second lens group includes 4 lenses, from the object plane to the image plane along the optical path, there are a convex lens (4), a plano-convex positive lens (5) convex to the image plane, and a plano-convex positive lens (6) convex to the object plane. , Meniscus negative lens (7).
  • the third lens group includes 4 lenses, which are convex lens (8), double concave negative lens (9), plano-convex positive lens (10) convex toward the image plane, and meniscus negative lens along the optical path from the object plane to the image plane. (11), negative meniscus lens (12), plano-convex positive lens (13) convex to the object plane.
  • the position of the object plane of the microscope objective lens adopts a liquid immersion method, for example, a liquid with a refractive index of 1.3652 is filled between the lens (1) and the object plane.
  • An aperture stop (15) is arranged between the second lens group and the third lens group.
  • the numerical aperture of the microscopic objective lens is greater than or equal to 1.0.
  • the length of the microscope objective lens is less than 173 mm.
  • the microscopic objective lens adopts non-fluorescence optical material.
  • the microscope objective provided by this embodiment adopts the form of catadioptric optical system, uses the double-folded optical path, and the system diaphragm is built-in, which effectively reduces the overall optical size of the objective lens, and the total length is less than 173mm. It is reasonable to use the aspheric surface to effectively correct the system Spherical aberration controls the astigmatism, curvature of field and primary coma related to the field of view, so that the total length of the optical system is less than 173mm.
  • the entire optical system uses the same optical material, and the imaging spectrum can reach 300nm-800nm, combined with the back end With liquid immersion, the numerical aperture of the system can reach 1.0, and the field of view of the system imaging line can reach 4.0mm, which effectively achieves high resolution while having a large field of view.
  • the microscope objective adopts a catadioptric optical scheme, and the total length of the system is 172.826mm.
  • This system will increase the numerical aperture and correct the chromatic aberration of the system, all integrated in the first lens group (by the lens group 1.
  • Lens 2 and lens 3 the second lens group (consisting of lens group 4, lens 5, lens 6 and lens 7) and the third lens group (consisting of lens group 8, lens 9, lens 10, lens 11,
  • the lens 12 and the lens 13) mainly correct the residual off-axis monochromatic aberration of the first lens group;
  • the system diaphragm is built-in to effectively reduce the size of the objective lens system; and the present invention uses a non-fluorescent optical material.
  • the object plane can be immersed in liquid (for example, the liquid with a refractive index of 1.3652 between lens 1 and the object plane is filled) to increase the numerical aperture of the system, which can make the numerical aperture of the system reach 1.0 or more, imaging
  • the first lens group can completely correct the chromatic aberration of the system; after the first lens group (composed of lens group 1, lens 2 and lens 3), the image is imaged to the primary image plane position, and the first lens group is 2 times
  • the magnification system adopts an aspheric surface to effectively correct coma and astigmatism and other off-axis aberrations, effectively reduce the relative aperture of the subsequent system, and effectively reduce the center obstruction of lens 2; the first lens group adopts catadioptric optical form, and It is positive refractive power, effectively correcting system chromatic aberration.
  • the external monochromatic aberration (coma aberration, astigmatism and curvature of field, etc.) passing through the first axis lens group increases as the field of view increases, and the geometric factor increases.
  • the first lens group by lens group 1, lens 2 and lens 3 the residual aberration is significantly reduced, so that the second lens group (consisting of lens group 4, lens 5, lens 6, and lens 7) and the third lens group (consisting of lens group 8, lens 9, lens 10,
  • the relative aperture of lens 11, lens 12 and lens 13 is reduced, and the second lens group (composed of lens group 4, lens 5, lens 6 and lens 7) reaches the aperture stop, and after the field lens (lens 4), the lens 5 ⁇ Lens 7 can effectively correct aberrations such as system astigmatism and field curvature; the system aperture stop is located between the second lens group and the third lens group, effectively reducing the size of the objective optical system.
  • the relative aperture of the image plane is increased once to reduce the light exit angle of the system and effectively witness the coma of the system. Emitted to the outside of the system with parallel light.
  • the first lens group has positive refractive power
  • the second lens group and the third lens group have negative refractive power, which can effectively correct the spherical aberration of the system.
  • the basic parameters of specific optical lenses are shown in Table 1.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
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Abstract

一种宽谱段大数值孔径的显微物镜，其从物平面到像平面沿光路方向依次包括第一透镜组、第二透镜组、第三透镜组；第一透镜组为折反射式透镜组，将物平面发出的光线成像到一次像面，第一透镜组用于增大数值孔径和矫正色差，且具有正光角度；第二透镜组、第三透镜组将一次像面的光线以平行光发射出去，第二透镜组、第三透镜组均具有负光角度。显微物镜利用2次折叠光路，合理利用非球面有效校正系统高级球差，整个光学系统采用同种光学材料，成像谱段可达到300nm-800nm，结合后端浸液，系统数值孔径可达到1.0，成像线视场可达到4.0mm，有效地实现了在具备大视场的同时兼顾高分辨率。

Description

宽谱段大数值孔径的显微物镜 技术领域
本发明属于显微物镜高精度光学成像技术领域，尤其涉及一种宽谱段大数值孔径的显微物镜。
背景技术
基因测序设备作为纳米、生物和信息三大科技的交汇点，集中体现了人们采用最先进的科学技术来探索生命信息，成为当今经济持续发展、国家安全稳定的重要保证。基因测序是一个新兴行业，处于快速发展阶段，其中关键技术超高通量显微物镜成为限制基因测序仪国产化的瓶颈技术(测序通量是指基因测序设备在一定时间内获得的数据输出量，是评价测序技术先进与否的重要指标之一，更高的测序通量也意味着测序成本的降低)，超高通量基因测序仪中所需显微物镜在平面空间尺度和空间分辨率方面均提出了较高要求，这就需要显微物镜需要在具备大视场的同时兼顾高分辨。而在光学系统的设计中宽场和高分辨是此消彼长的，宽则不精，精则不宽是目前超高通量显微物镜的遇到的最大难点。
物镜作为高通量基因测序仪的核心光学元件，是实现高通量乃至超高通量基因测序的关键，同时，目前生物医学领域热门的高通量基因测序、脑神经元检测、癌细胞发展监测等研究方向，均对宽视场、高分辨的光学系统有着迫切需求。
当前国际上可以查询到多个与本专利结构形式相近的浸液式大数值孔径基因测序镜头：
专利US9304407B2，具体见图1，此光学镜头采用全反射式光学系统形式，可以在全谱段内成像谱段，并且视场可以做到1mm，但是由于不能浸液限制，系统数值孔径一般小于0.9。
发明内容
本发明的目的在于提供一种宽谱段大数值孔径的显微物镜，旨在解决现有技术中无法同时兼顾大视场和高分辨的技术问题。
本发明提供了一种宽谱段大数值孔径的显微物镜，所述显微物镜从物平面到像平面沿光路方向依次包括第一透镜组、第二透镜组、第三透镜组；
所述第一透镜组为折反射式透镜组，将物平面发出的光线成像到一次像面，所述第一透镜组用于增大数值孔径和矫正色差，且具有正光角度；
所述第二透镜组、第三透镜组将所述一次像面的光线以平行光发射出去，所述第二透镜组、第三透镜组均具有负光角度。
优选的，所述第一透镜组包括3个透镜，从物平面到像平面沿光路方向依次为凸向像平面的平凸正透镜(1)、弯月负透镜(2)、平透镜(3)。
优选的，所述第二透镜组包括4个透镜，从物平面到像平面沿光路方向依次为凸透镜(4)、凸向像平面的平凸正透镜(5)、凸向物平面的平凸正透镜(6)、弯月负透镜(7)。
优选的，所述第三透镜组包括4个透镜，从物平面到像平面沿光路方向依次为凸透镜(8)、双凹负透镜(9)、凸向像平面的平凸正透镜(10)、弯月负透镜(11)、弯月负透镜(12)、凸向物平面的平凸正透镜(13)。
优选的，所述显微物镜的物平面位置采用浸液方式。
优选的，所述第二透镜组和第三透镜组之间设置有孔径光阑(15)。
优选的，所述显微物镜的数值孔径大于等于1.0。
优选的，所述显微物镜的长度小于173mm。
优选的，所述显微物镜采用无荧光光学材料。
本发明提供的显微物镜采用折反射式光学系统形式，利用2次折叠光路，将系统光阑内置，有效减小物镜整体光学尺寸，且总长度小于173mm，合理利用非球面有效校正系统高级球差，控制了与视场有关的像散、场曲及初高级彗差，使得光学系统总长度小于173mm，整个光学系统采用同种光学材料，成像谱段可以达到300nm-800nm，结合后端浸液，系统数值孔径可以达到1.0，系统成像线视场可以达到4.0mm，有效地实现了在具备大视场的同时兼顾高分辨率。
附图说明
为了更清楚地说明本申请实施例的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，应当理解，以下附图仅示出了本申请的某些实施例，因此不应被看作是对范围的限定，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他相关的附图。
图1是专利US9304407B2示出的光学镜头的结构示意图；
图2是本发明实施例一示出的宽谱段大数值孔径的显微物镜结构示意图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
以下结合具体实施例对本发明的具体实现进行详细描述：
实施例一：
图2示出本实施例提供的宽谱段大数值孔径的显微物镜。如图2所示，本实施例提供的宽谱段大数值孔径的显微物镜从物平面到像平面沿光路方向依次包括第一透镜组、第二透镜组、第三透镜组。
所述第一透镜组为折反射式透镜组，将物平面发出的光线成像到一次像面，所述第一透镜组用于增大数值孔径和矫正色差，且具有正光角度；
所述第二透镜组、第三透镜组将所述一次像面的光线以平行光发射出去，所述第二透镜组、第三透镜组均具有负光角度。
具体的，第一透镜组包括3个透镜，从物平面到像平面沿光路方向依次为凸向像平面的平凸正透镜(1)、弯月负透镜(2)、平透镜(3)。
第二透镜组包括4个透镜，从物平面到像平面沿光路方向依次为凸透镜(4)、凸向像平面的平凸正透镜(5)、凸向物平面的平凸正透镜(6)、弯月负透镜(7)。
第三透镜组包括4个透镜，从物平面到像平面沿光路方向依次为凸透镜(8)、双凹负透镜(9)、凸向像平面的平凸正透镜(10)、弯月负透镜(11)、弯月负透镜(12)、凸向物平面的平凸正透镜(13)。
所述显微物镜的物平面位置采用浸液方式，例如，在透镜(1)与物平面之间填充折射率为1.3652的液体。
所述第二透镜组和第三透镜组之间设置有孔径光阑(15)。
所述显微物镜的数值孔径大于等于1.0。
所述显微物镜的长度小于173mm。
所述显微物镜采用无荧光光学材料。
本实施例提供的显微物镜采用折反射式光学系统形式，利用2次折叠光路， 将系统光阑内置，有效减小物镜整体光学尺寸，且总长度小于173mm，合理利用非球面有效校正系统高级球差，控制了与视场有关的像散、场曲及初高级彗差，使得光学系统总长度小于173mm，整个光学系统采用同种光学材料，成像谱段可以达到300nm-800nm，结合后端浸液，系统数值孔径可以达到1.0，系统成像线视场可以达到4.0mm，有效地实现了在具备大视场的同时兼顾高分辨率。
在一具体的示例性实施例中，显微物镜采用折反射式光学方案，系统总长度在172.826mm，此系统将增大数值孔径与矫正系统色差功能全部集成于第一透镜组(由透镜组1、透镜2和透镜3组成)；第二透镜组(由透镜组4、透镜5、透镜6和透镜7组成)和第三透镜组(由透镜组8、透镜9、透镜10、透镜11、透镜12和透镜13组成)主要矫正第一透镜组残余轴外单色像差；将系统光阑内置，有效减小物镜系统尺寸；并且本发明采用一种无荧光光学材料。
按照正向光路设计，物平面可采用浸液方式(例如，在透镜1与物平面之间由折射率为1.3652的液体填充)，增大系统数值孔径，可以使系统数值孔径达到1.0以上，成像线视场增大到4mm后第一透镜组可以完全校正系统色差；经过第一透镜组(由透镜组1、透镜2和透镜3组成)成像到一次像面位置，第一透镜组为2倍放大系统，采用非球面可以有效矫正彗差和像散等轴外像差，可以有效减小后续系统相对孔径，并有效减小透镜2中心遮拦；第一透镜组采用折反射式光学形式，并且为正光焦度，有效矫正系统色差。
经过第一轴透镜组的外单色像差(慧差、像散和场曲等)随着视场增大称几何倍数增长，采用非球面后，第一透镜组(由透镜组1、透镜2和透镜3组成)残余像差明显降低，使得第二透镜组(由透镜组4、透镜5、透镜6和透镜7组成)和第三透镜组(由透镜组8、透镜9、透镜10、透镜11、透镜12 和透镜13组成)相对孔径减小，经过第二透镜组(由透镜组4、透镜5、透镜6和透镜7组成)到达孔径光阑，经过场镜(透镜4)后透镜5～透镜7可以有效矫正系统像散和场曲等像差；系统孔径光阑在第二透镜组和第三透镜组之间，有效降低物镜光学系统尺寸。
经过第三透镜组(由透镜组8、透镜9、透镜10、透镜11、透镜12和透镜13组成)增大一次像面后系统相对孔径，减小系统光线出射角度，有效见证系统彗差，以平行光发射到系统外。
第一透镜组为正光焦度、第二透镜组和第三透镜组具有负光焦度，可以有效矫正系统球差，具体光学镜片基本参数见表1。
表1光学镜片基本参数
表面序号 半径 厚度 材料 半口径
object infinite 0.4 1.3652 1.4
1 infinite 3 1.4585  
2 infinite 21.53 1.4585 3.9
3 -109.7894(非球面) 11.464   21.6
4 -39.480(非球面) 7.963 1.4585 27.3
5 -51.144 1.0   35.1
6 60.304 3.5 1.4585 4.1
7 infinite 12.403   3.0
8 26.18952(非球面) 11.857 1.4585 3.9
9 -26.18952 0.5   5.1
10 infinite 7.426 1.4585 6.5
11 -54.47931 0.5   6.9
12 25.52441 5 1.4585 7.3
13 infinite 16.047   5.6
14 -17.05998 4 1.4585 5.5
15 -20.84917 0.5   5.0
16 31.06304(非球面) 5.6 1.4585 6.5
17 -36.13892 9.7   7.2
18 -15.3001 4 1.4585 7.2
19 41.12862 5.56   6.7
20 -48.87965 5 1.4585 7.3
21 -25.75168 5.236   7.5
22 -18.01064 12.81 1.4585 7.7
23 37.59854 0.5   7.5
24 51.09558 7.47 1.4585 6.5
25 -30.87851 0.5   5.3
26 130.05938 9 1.4585 6.7
27 infinite     8.4
非球面系数
Figure PCTCN2020118925-appb-000001
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发 明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。

Claims (9)

  1. 一种宽谱段大数值孔径的显微物镜，其特征在于，所述显微物镜从物平面到像平面沿光路方向依次包括第一透镜组、第二透镜组、第三透镜组；
    所述第一透镜组为折反射式透镜组，将物平面发出的光线成像到一次像面，所述第一透镜组用于增大数值孔径和矫正色差，且具有正光角度；
    所述第二透镜组、第三透镜组将所述一次像面的光线以平行光发射出去，所述第二透镜组、第三透镜组均具有负光角度。
  2. 如权利要求1所述的显微物镜，其特征在于，所述第一透镜组包括3个透镜，从物平面到像平面沿光路方向依次为凸向像平面的平凸正透镜(1)、弯月负透镜(2)、平透镜(3)。
  3. 如权利要求1所述的显微物镜，其特征在于，所述第二透镜组包括4个透镜，从物平面到像平面沿光路方向依次为凸透镜(4)、凸向像平面的平凸正透镜(5)、凸向物平面的平凸正透镜(6)、弯月负透镜(7)。
  4. 如权利要求1所述的显微物镜，其特征在于，所述第三透镜组包括4个透镜，从物平面到像平面沿光路方向依次为凸透镜(8)、双凹负透镜(9)、凸向像平面的平凸正透镜(10)、弯月负透镜(11)、弯月负透镜(12)、凸向物平面的平凸正透镜(13)。
  5. 如权利要求1所述的显微物镜，其特征在于，所述显微物镜的物平面位置采用浸液方式。
  6. 如权利要求1所述的显微物镜，其特征在于，所述第二透镜组和第三透镜组之间设置有孔径光阑(15)。
  7. 如权利要求1所述的显微物镜，其特征在于，所述显微物镜的数值孔径 大于等于1.0。
  8. 如权利要求1所述的显微物镜，其特征在于，所述显微物镜的长度小于173mm。
  9. 如权利要求1所述的显微物镜，其特征在于，所述显微物镜采用无荧光光学材料。
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