WO2021124647A1 - Procédé d'inspection, dispositif d'inspection, et système d'inspection - Google Patents

Procédé d'inspection, dispositif d'inspection, et système d'inspection Download PDF

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Publication number
WO2021124647A1
WO2021124647A1 PCT/JP2020/037526 JP2020037526W WO2021124647A1 WO 2021124647 A1 WO2021124647 A1 WO 2021124647A1 JP 2020037526 W JP2020037526 W JP 2020037526W WO 2021124647 A1 WO2021124647 A1 WO 2021124647A1
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Prior art keywords
polarizing plate
retardation
film
linear polarizing
base film
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PCT/JP2020/037526
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English (en)
Japanese (ja)
Inventor
信次 小林
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住友化学株式会社
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Publication of WO2021124647A1 publication Critical patent/WO2021124647A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements

Definitions

  • the present invention relates to an inspection method, an inspection device, and an inspection system.
  • the retardation film can convert linearly polarized light into circularly polarized light or elliptically polarized light, and conversely, can convert circularly polarized light or elliptically polarized light into linearly polarized light, this retardation film and linearly polarized light are combined (elbow). Circularly polarized light is applied to an organic EL display device and a reflective liquid crystal display device.
  • the retardation film obtained by orienting and curing a polymerizable liquid crystal compound is an extremely thin film, and has been attracting attention in manufacturing a thin display device (for example, patent documents). 1).
  • a liquid composition containing a polymerizable liquid crystal compound is applied to a long base film to form a thin film, and the polymerizable liquid crystal compound in the thin film is formed. Is oriented in the desired direction and then irradiated with active energy rays. As a result, the oriented polymerizable liquid crystal compound is cured to form a retardation film.
  • an alignment film may be formed on the base film before the liquid composition is applied to the base film.
  • the orientation of the polymerizable liquid crystal compound may be disturbed at the dust portion and defects may occur.
  • the base film has an in-plane retardation, it tends to be difficult to inspect the presence or absence of defects in the retardation film formed on the base film by an optical method. Since the base film that can be inexpensively obtained from the market is generally produced by stretching, the fact is that the inexpensive base film is difficult to use for the inspection of the retardation film produced by the above method.
  • the present invention provides an inspection method, an inspection apparatus, and an inspection apparatus capable of inspecting the presence or absence of defects in a retardation film made of a cured product of a polymerizable liquid crystal compound while suppressing the influence of the in-plane retardation of the base film.
  • the purpose is to provide an inspection system.
  • the present invention is a film-like substrate comprising a base film having an in-plane retardation value of 50 nm or more at a wavelength of 550 nm and a retardation film made of a cured product of a polymerizable liquid crystal compound formed on one side of the base film.
  • This is an inspection method in which light is incident on an inspection object to determine the presence or absence of defects in the retardation film, and the first linear polarizing plate, the object to be inspected, the retardation filter, the second linear polarizing plate, and the like.
  • the surface on the base film side faces the first linear polarizing plate side, and the slow axis of the base film and the first linear polarizing plate or the first linear polarizing plate or the first
  • the polarization axes of the linear polarizing plate of No. 2 are substantially orthogonal to or substantially parallel to each other, and the slow axis of the retardation film and the slow axis of the retardation filter are substantially parallel to each other, and the retardation film of the retardation film.
  • the in-plane retardation value at a wavelength of 550 nm is 300 nm or less, and the total of the in-plane retardation value at a wavelength of 550 nm of the retardation film and the in-plane retardation value at a wavelength of 550 nm of the retardation filter is 520 nm to 600 nm.
  • the first linear polarizing plate and the second linear polarizing plate form a cross Nicol, and the optical axis is from either the first linear polarizing plate side or the second linear polarizing plate side.
  • an inspection method in which light is incident so as to pass through a predetermined inspection region on an object to be inspected, and the second linear polarizing plate or the first linear polarizing plate is observed from the other side.
  • the polarization axes of the first linear polarizing plate or the second linear polarizing plate are arranged so as to be substantially orthogonal to or substantially parallel to the slow axis of the substrate film having a retardation. Therefore, the polarization state of the light that has passed through the linear polarizing plate is not disturbed by the base film. That is, the assembled optical system functions as intended, and when there is a defect in the retardation film, the defect can be appropriately recognized in the observation field of view. Further, in this inspection method, the total of the in-plane retardation value at the wavelength of 550 nm of the retardation film and the in-plane retardation value at the wavelength of 550 nm of the retardation filter is 520 nm to 600 nm.
  • the linearly polarized light that has passed through the phase difference filter has a phase difference of about ⁇ before and after that.
  • the difference in brightness between the normal portion and the defective portion of the retardation film becomes large in the observation field of view. Therefore, according to this inspection method, it is possible to easily determine the presence or absence of defects in the retardation film while suppressing the influence of the in-plane retardation of the base film.
  • the first linear polarizing plate and the second linear polarizing plate form a cross Nicol.
  • the entire observation field of view can be made the darkest, the defective portion of the retardation film observed as a bright spot is most conspicuous in the observation field of view. Therefore, it is possible to more easily determine the presence or absence of defects in the retardation film.
  • the polarizing axis of the first linear polarizing plate or the second linear polarizing plate can be used as the slow axis of the base film. They can be arranged so as to be substantially orthogonal to each other or substantially parallel to each other.
  • a liquid composition containing a polymerizable liquid crystal compound is applied to one side of the base film and polymerized on the surface of the base film. It may have a step of forming a coating film containing a property liquid crystal compound and orienting and curing the polymerizable liquid crystal compound contained in the coating film to form a retardation film. This makes the production of the retardation film more efficient.
  • the object to be inspected is continuously inspected in the length direction while being conveyed between the first linear polarizing plate and the retardation filter in the length direction of the object to be inspected. You may. This makes the inspection of the object to be inspected more efficient.
  • a plurality of inspection areas may be provided in the width direction of the object to be inspected. Since the base film is generally produced by stretching in at least one direction, the direction of the slow axis is often different in the width direction. Therefore, by dividing the inspection area in the width direction of the object to be inspected and performing the inspection in each inspection area, the inspection in which the influence of the in-plane retardation of the base film is suppressed in each part in the width direction can be performed. It can be carried out.
  • Light is applied to a film-shaped object to be inspected having a base film having an in-plane retardation value of 50 nm or more at a wavelength of 550 nm and a retardation film made of a cured product of a polymerizable liquid crystal compound formed on one side of the base film.
  • the first linear polarizing plate and the retardation filter arranged so as to sandwich the place where the object to be inspected is arranged, and the retardation filter, which is an inspection device for determining the presence or absence of defects in the retardation film.
  • the second linear polarizing plate arranged in the region opposite to the place where the object to be inspected is arranged, and the place where the object to be inspected is arranged with respect to the first linear polarizing plate or the second linear polarizing plate.
  • the first linear polarizing plate or the second linear polarizing plate includes a light source arranged in a region on the opposite side so that its polarization axis is substantially orthogonal to or substantially parallel to the slow axis of the base film.
  • the retardation filter is arranged so that its slow axis is substantially parallel to the slow axis of the retardation film, and the in-plane retardation of the retardation filter at a wavelength of 550 nm.
  • the value is a value in which the total of the in-plane retardation value at the wavelength of 550 nm of the retardation film is 520 nm to 600 nm, and the first linear polarizing plate and the second linear polarizing plate form a cross Nicol.
  • the light source is an inspection device arranged at a position where a first linear polarizing plate, a predetermined inspection region on an object to be inspected, a retardation filter, and a second linear polarizing plate are arranged on the optical axis.
  • the polarization axes of the first linear polarizing plate or the second linear polarizing plate are arranged so as to be substantially orthogonal to or substantially parallel to the slow axis of the substrate film having a phase difference. Therefore, the polarization state of the light that has passed through the linear polarizing plate is not disturbed by the base film. That is, the assembled optical system functions as intended, and when there is a defect in the retardation film, the defect can be appropriately recognized in the observation field of view. Further, in this inspection device, the total of the in-plane retardation value at the wavelength of 550 nm of the retardation film and the in-plane retardation value at the wavelength of 550 nm of the retardation filter is 520 nm to 600 nm.
  • the linearly polarized light that has passed through the phase difference filter has a phase difference of about ⁇ before and after that.
  • the difference in brightness between the normal portion and the defective portion of the retardation film becomes large in the observation field of view. Therefore, according to this inspection apparatus, it is possible to easily determine the presence or absence of defects in the retardation film while suppressing the influence of the in-plane retardation of the base film.
  • the first linear polarizing plate and the second linear polarizing plate form a cross Nicol.
  • the entire observation field of view can be made the darkest, the defective portion of the retardation film observed as a bright spot is most conspicuous in the observation field of view. Therefore, it is possible to more easily determine the presence or absence of defects in the retardation film.
  • the present invention includes the above-mentioned inspection device, an alignment angle measuring device for determining the slow axis of the base film before the retardation film is formed, and a slow phase of the base film obtained by the alignment angle measuring device.
  • an inspection system including an angle adjusting mechanism for adjusting the angle of the first linear polarizing plate so that the axis and the polarization axis of the first linear polarizing plate are substantially orthogonal to each other or substantially parallel to each other. If the direction of the slow axis of the base film is unknown, by obtaining this in advance, the polarizing axis of the first linear polarizing plate or the second linear polarizing plate can be used as the slow axis of the base film. They can be arranged so as to be substantially orthogonal to each other or substantially parallel to each other. Further, by providing the angle adjustment mechanism, the angle adjustment can be automated.
  • an inspection method and an inspection apparatus capable of inspecting the presence or absence of defects in a retardation film made of a cured product of a polymerizable liquid crystal compound while suppressing the influence of the in-plane retardation of the base film. And an inspection system can be provided.
  • Refractive index (nx, ny, nz) “Nx" is the refractive index in the direction in which the in-plane refractive index is maximized (that is, the slow-phase axis direction), “ny” is the direction orthogonal to the slow-phase axis in the in-plane, and “nz” is the thickness direction.
  • Refractive index (Re ( ⁇ )) refers to the in-plane retardation value of the film at 23 ° C. and a wavelength of ⁇ (nm).
  • Re ( ⁇ ) (nx ⁇ ny) ⁇ d, where d (nm) is the thickness of the film.
  • Phase difference value in the thickness direction The phase difference value in the thickness direction (Rth ( ⁇ )) refers to the phase difference value in the thickness direction of the film at 23 ° C. and a wavelength of ⁇ (nm).
  • Rth ( ⁇ ) ((nx + ny) / 2-nz) ⁇ d, where d (nm) is the thickness of the film.
  • the inspection device of the present embodiment inspects the presence or absence of optical defects in the retardation film.
  • the inspection device 1A the light source 2, the first linear polarizing plate 3, the retardation filter 4, the second linear polarizing plate 5, and the camera (detecting means) 6 are arranged in this order. It is something that has been done.
  • the inspection device 1A is provided with a place for arranging the inspected object 10 to be inspected between the first linear polarizing plate 3 and the retardation filter 4, and in FIG. 1, the inspected object 10 is placed there. It depicts how it was placed in.
  • the object 10 to be inspected includes a retardation film 7A which is a main body to be inspected, and a base film 8A in which the retardation film 7A is laminated on one side.
  • the retardation film 7A it is used as a circular polarizing plate in a display device, for example, a liquid crystal display device or an organic EL display device in combination with a linear polarizing plate.
  • the term "circularly polarized light” includes a circularly polarizing plate and an elliptical polarizing plate. Further, “circularly polarized light” includes circularly polarized light and elliptically polarized light.
  • the retardation film 7A has an in-plane retardation value of 300 nm or less at a wavelength of 550 nm of the retardation film.
  • the retardation film 7A is a ⁇ / 4 plate.
  • the retardation film 7A is made of a cured product of a polymerizable liquid crystal compound.
  • the retardation film 7A made of a cured product of a polymerizable liquid crystal compound usually has a thin thickness of about 0.2 ⁇ m to 10 ⁇ m, and when foreign matter or the like is contained, the retardation value tends to decrease at that portion.
  • the polymerizable liquid crystal compounds capable of forming the retardation film 7A are described in, for example, JP-A-2009-173893, JP-A-2010-31223, WO2012 / 147904, WO2014 / 10325 and WO2017-43438. The disclosed ones can be mentioned.
  • the polymerizable liquid crystal compounds described in these publications can form a retardation film having so-called anti-wavelength dispersibility, which enables uniform polarization conversion in a wide wavelength range.
  • a solution containing the polymerizable liquid crystal compound (polymerizable liquid crystal compound solution; liquid composition) is applied (coated) on the base film 8A to form a coating film.
  • the base film 8A may be provided with an alignment film for orienting the polymerizable liquid crystal compound.
  • the alignment film may be either photo-aligned by polarization irradiation or mechanically oriented by rubbing treatment. As a specific example of such an alignment film, those described in the above publication can be used.
  • the retardation film 7A formed in this manner is bonded together with the base film 8A to another film, and then the base film 8A is peeled off to transfer the retardation film 7A onto the other film. can do.
  • the polymerizable liquid crystal compound solution When forming the retardation film 7A, if foreign matter or the like is present on the base film 8A to which the polymerizable liquid crystal compound solution is applied, or if the base film 8A itself is scratched or the like, the polymerizable liquid crystal compound solution is used. Defects may occur in the coating film itself obtained by coating. Further, when the alignment film is rubbed, debris of the rubbing cloth remains on the alignment film, which may cause a defect in the coating film of the polymerizable liquid crystal compound solution (composition for forming a liquid crystal cured film).
  • the retardation film when the retardation film is formed from the polymerizable liquid crystal compound, it is possible to form the retardation film having an extremely thin thickness, but the above-mentioned dusts and scratches cause optical defects in the retardation film. It may be a factor.
  • the base film 8A to which the polymerizable liquid crystal compound solution is applied is in a laminated state with the retardation film 7A at the time of defect inspection of the retardation film 7A, it is desirable that the retardation value is small.
  • the base film 8A has an in-plane retardation value of 50 nm or more at a wavelength of 550 nm.
  • the in-plane retardation value may be 100 nm or more, 500 nm or more, 1000 nm or more, 2000 nm or more, 5000 nm or more, 8000 nm or more. It may be. Even when the base film 8A has such a retardation, according to the inspection apparatus of the present embodiment, defects of the retardation film 7A are not affected by the retardation of the base film 8A. The presence or absence can be easily determined.
  • the material constituting the base film 8A examples include those described in the above-mentioned publication, and polyethylene terephthalate (PET) is particularly preferable.
  • the thickness of the base film 8A may be 10 to 500 ⁇ m, 30 to 300 ⁇ m, 50 to 200 ⁇ m, or 80 to 150 ⁇ m.
  • the first linear polarizing plate 3 is a film that converts the light incident from the light source 2 into linearly polarized light, and is formed by laminating a protective film on at least one surface of the polarizing film.
  • the polarizing film include a polyvinyl alcohol film in which iodine and a dichroic dye are adsorbed and oriented, and a film in which a polymerizable liquid crystal compound is oriented and polymerized and a dichroic dye is adsorbed and oriented. Be done.
  • the phase difference of the protective film used for the linear polarizing plate is preferably small.
  • Re (550) is preferably 10 nm or less, and particularly preferably 5 nm or less.
  • the protective film is for protecting the polarizing film.
  • a film widely used in the technical field of polarizing plates is used for the purpose of obtaining a polarizing plate having appropriate mechanical strength.
  • a cellulose ester film such as a triacetyl cellulose (TAC) film; a cyclic olefin film; a polyester film such as a polyethylene terephthalate (PET) film: a (meth) acrylic film such as a polymethyl methacrylate (PMMA) film.
  • PET polyethylene terephthalate
  • PMMA polymethyl methacrylate
  • an additive widely used in the technical field of the polarizing plate may be contained in the protective film.
  • the light source 2 is, for example, linear light such as laser light (including one that approximates linear light).
  • the light emitted by the light source 2 is unpolarized, passes through the first linear polarizing plate 3 to be polarized in a predetermined direction, and further passes through the retardation film 7A to be circularly polarized light. That is, unpolarized light passes through the first linear polarizing plate 3 and the retardation film 7A, resulting in circularly polarized light.
  • the retardation filter 4 includes a retardation film 7B.
  • a filter having a total of the in-plane retardation value at a wavelength of 550 nm and the in-plane retardation value of the retardation film 7A to be inspected at a wavelength of 550 nm is 520 nm to 600 nm.
  • the total is preferably 530 nm to 590 nm, more preferably 540 nm to 580 nm, and even more preferably ⁇ itself.
  • " ⁇ " is a measurement wavelength (here, 550 nm).
  • a plurality of sheets provided with a retardation film having an in-plane retardation value of about 100 to 200 nm may be laminated to form the retardation filter 4.
  • the optical defect is determined from the luminance (brightness) information ⁇ L *, it is preferable to use a film having the same configuration as that of the object 10 to be inspected for the retardation filter 4. Further, when the optical defect is determined from the color difference information ⁇ E *, it is preferable to use a film having a wavelength dispersibility opposite to that of the object 10 to be inspected for the phase difference filter 4. Further, the retardation filter 4 is arranged so that the slow axis of the retardation film 7A and the slow axis of the retardation filter 4 are parallel to each other.
  • the retardation filter 4 when inspecting the object 10 to be inspected, the retardation filter 4 is adjusted so that the polarization axis of linearly polarized light is always rotated in the same direction together with the retardation film 7A in the object 10 to be inspected. Will be done.
  • the retardation film 7A and the retardation filter 4 act as a ⁇ plate.
  • the phase difference of the retardation film 7A is ⁇ / 4
  • the phase difference of the retardation filter 4 is set to 3 ⁇ / 4.
  • the phase difference filter 4 may be configured by one 3 ⁇ / 4 plate or by stacking three ⁇ / 4 plates.
  • the phase difference filter 4 may further include a positive C plate.
  • the positive C plate may be provided on the surface facing the retardation film 7A, or may be provided on the surface opposite to the retardation film 7A.
  • the inspection area can be expanded by using the positive C plate.
  • the retardation value (Rth (550)) in the thickness direction of the positive C plate may be appropriately selected according to the retardation value in the thickness direction of the retardation film 7A to be inspected.
  • the retardation film 7A is a ⁇ / 4 plate. In the case of, the effect can be easily obtained by using a phase difference value (Rth (550)) in the thickness direction of ⁇ 50 nm to ⁇ 300 nm.
  • the retardation filter 4 may include a retardation film 7B and a base film 8B on which the retardation film 7B is laminated.
  • a film having an in-plane retardation value (Re (550)) of substantially zero is used so as not to impair the optical characteristics of the retardation film 7B.
  • the in-plane phase difference is substantially zero, it means that the in-plane phase difference value (Re (550)) is 3 nm or less.
  • Re (550) in-plane retardation value (Re (550)) and the thickness direction retardation value (Rth (550)) at a wavelength of 550 nm
  • Re (550) of this piece is measured three times, and the average value of Re (550) is obtained.
  • One piece of Re (550) can be measured at a measurement temperature of room temperature (23 ° C.) using a phase difference measuring device KOBRA-WPR (manufactured by Oji Measuring Instruments Co., Ltd.).
  • the second linear polarizing plate 5 is a film into which light that has passed through the retardation filter 4 is incident, and its configuration and material are the same as those of the first linear polarizing plate 3.
  • the second linear polarizing plate 5 is arranged so as to form a cross Nicol with the first linear polarizing plate 3.
  • a positive C plate may be arranged between the first linear polarizing plate 3 and the base film 8A.
  • the retardation value (Rth (550)) in the thickness direction of the positive C plate may be appropriately selected according to the retardation value in the thickness direction of the base film 8A.
  • the retardation value in the thickness direction of the base film 8A For example, the retardation value in the thickness direction of the base film 8A. The effect can be easily obtained by setting the phase difference value in the thickness direction to about 1/3 to 2/3 of (Rth (550)).
  • the inspection device 1A of the present embodiment in order to observe the light that has passed through the first linear polarizing plate 3, the object to be inspected 10, the retardation filter 4, and the second linear polarizing plate 5, the light is on the optical axis 9.
  • the camera (detecting means) 6 is arranged at a position on both sides of the retardation filter 4 opposite to the side where the light source 2 is located.
  • the camera 6 is, for example, a CCD camera.
  • the camera 6 is automatically detected by image processing analysis in which the CCD camera and the image processing device are combined, whereby the object 10 to be inspected can be inspected.
  • a human may visually observe the second linear polarizing plate 5 instead of the camera 6.
  • the inspection method using the inspection device 1A is as follows. First, in the inside of the inspection device 1A, the object 10 to be inspected is arranged between the first linear polarizing plate 3 and the retardation filter 4. At this time, the object 10 to be inspected has the base film 8A side facing the first linear polarizing plate 3 side, and the slow axis of the base film 8A and the polarizing axis of the first linear polarizing plate 3. Arrange so that the (transmission axis) is substantially orthogonal to or substantially parallel to each other.
  • the slow axis of the retardation film 7A and the slow axis of the retardation filter 4 are made parallel to each other, and the first linear polarizing plate 3 and the second linear polarizing plate 5 form a cross Nicol. Arrange to configure.
  • Light is emitted from the light source 2 toward the first linear polarizing plate 3.
  • the light emitted by the light source 2 is incident on the first linear polarizing plate 3, where the unpolarized light is converted into linearly polarized light.
  • the linearly polarized light is incident on the object 10 to be inspected from the base film 8A side.
  • the linearly polarized light that has passed through the base film 8A passes through the retardation film 7A and becomes circularly polarized light. This circularly polarized light is incident on the retardation filter 4 from the retardation film 7B side.
  • the slow axis of the retardation film 7A and the slow axis of the retardation filter 4 are substantially parallel to each other, and the in-plane retardation value of the retardation film 7A at a wavelength of 550 nm and the phase difference. Since the total of the in-plane retardation value at the wavelength of 550 nm of the filter 4 is 520 nm to 600 nm, the light passing through the retardation filter 4 is linearly polarized light, and the linearly polarized light is immediately before incident on the object to be inspected. This means that a phase difference of about ⁇ is generated as compared with the linearly polarized light of.
  • the second linear polarizing plate 5 has the arrangement of the first linear polarizing plate 3 and the cross Nicol, that is, the transmission axis of the first linear polarizing plate 3 and the absorption axis of the second linear polarizing plate 5 are arranged. Since they are parallel to each other, the light that has passed through the retardation filter 4 and returned to linearly polarized light is blocked by the second linear polarizing plate 5.
  • the front surface of the second linear polarizing plate 5 looks uniform black when observed by the camera 6.
  • the light passing through the defect portion is used in the retardation filter 4 in a state where the expected circularly polarized light (elliptical polarized light) cannot be obtained. Incident. Then, the circularly polarized light (elliptical polarized light) cannot return to normal linearly polarized light when it passes through the phase difference filter 4, and becomes elliptically polarized light. Therefore, the second linear polarizing plate 5 cannot perform regular blocking and light leaks, and the defective portion is observed as a bright spot in the observation by the camera 6.
  • the base film 8A has a phase difference of "the in-plane retardation value at a wavelength of 550 nm is 50 nm or more"
  • the polarized state of the light passing through the first linear polarizing plate 3 is the base film 8A. Can be disturbed by.
  • the polarization axes of the first linear polarizing plate 3 are arranged so as to be substantially orthogonal to or substantially parallel to the slow axis of the base film 8A having a phase difference. Therefore, the polarization state of the light that has passed through the first linear polarizing plate 3 is not disturbed by the base film 8A.
  • the assembled optical system functions as intended, and when the retardation film 7A has a defect, the defect can be appropriately recognized in the observation field of view.
  • the in-plane retardation value of the base film 8A is 50 nm or more
  • the light passing through the first linear polarizing plate 3 is circularly polarized (elliptical polarized light) due to the retardation of the base film 8A.
  • the amount of light leaking from the second linear polarizing plate 5 increased, which hindered the inspection. Therefore, according to the inspection method of the present embodiment, it is possible to easily determine the presence or absence of defects in the retardation film while suppressing the influence of the in-plane retardation of the base film 8A.
  • the inspection method of the present embodiment can be continuously performed on the same production line as the step of continuously forming the retardation film 7A on the base film 8A. it can.
  • the inspection system 100 shown in FIG. 2 is an orientation angle measuring device that determines the direction of the slow axis (orientation angle) of the base film 8A before the retardation film 7A is formed, in addition to the inspection device 1A described above.
  • the first straight line so that the slow axis of the base film 8A obtained by the orientation angle measuring device 12 and the polarization axis of the first linear polarizing plate 3 are substantially orthogonal to each other or substantially parallel to each other.
  • the object 10 to be inspected passes through the optical axis 9 of the inspection device 1A while being conveyed, and is inspected for defects. Then, the inspected object 10 that has been inspected is wound up.
  • the width of the base film 8A may be, for example, 0.5 to 2.0 m or 1.0 to 1.5 m.
  • a plurality of inspection devices 1A are arranged in the width direction (direction perpendicular to the transport direction) of the object 10 to be inspected.
  • the inspection device 1A is preferably arranged at 5 to 20 locations along the width direction of the object to be inspected 10. In FIG. 3, five inspection devices 1A are arranged.
  • the orientation angle measuring device 12 measures the direction of the slow axis of the base film 8A while transporting the long base film 8A. At this time, when the base film 8A is manufactured by stretching, the direction of the slow phase axis changes in the width direction as shown in FIG. In FIG. 4, the arrow indicates the direction of the slow axis at that portion. Therefore, the measurement by the orientation angle measuring device 12 is performed at a plurality of locations extending in the width direction of the base film 8A. The orientation angle measuring device 12 provides the measured information on the slow-phase axis to the angle adjusting mechanism 14.
  • a polymerizable liquid crystal compound solution is applied onto the base film 8A with the coating machine 16 to form a coating film 7a, and a dryer arranged on the downstream side of the coating machine 16
  • the coating film 7a is dried at 18.
  • the coated polymerizable liquid crystal compound is oriented on the base film 8A and cured by drying and polymerization to form a retardation film 7A.
  • the dried film is the object 10 to be inspected, and is subjected to inspection by the inspection device 1A arranged on the downstream side of the transport.
  • the angle adjusting mechanism 14 rotates the first linear polarizing plate 3 based on the information in the slow axis direction of the base film 8A provided by the orientation angle measuring instrument 12, and polarizes the first linear polarizing plate 3.
  • the axis should be substantially orthogonal or substantially parallel to the slow axis of the base film 8A.
  • the retardation filter 4 and the second linear polarizing plate 5 are also rotated so as to have the above-mentioned predetermined relationship.
  • An inspection area A (see FIG. 3) is assigned to each of the plurality of inspection devices 1A arranged in the width direction of the object 10 to be inspected, and the object 10 to be inspected is inspected over the entire area in the width direction. ..
  • the angle adjusting mechanism 14 faces the polarization axis of the first linear polarizing plate 3 for each inspection region A according to the slow axis of the base film 8A changing in the width direction. It will be in a different direction.
  • the inspection area A shown in FIG. 4 indicates a portion on the base film 8A corresponding to the inspection area A shown in FIG.
  • the retardation film 7A can be continuously and efficiently formed and inspected in the transport direction of the base film 8A, so that the production and inspection of the inspected object 10 can be made more efficient. Will be done. Further, in the inspection system 100, since a plurality of inspection devices 1A are arranged in the width direction of the object 10 to be inspected, even if the directions of the slow axes of the base film 8A are different in the width direction, the individual inspection devices are arranged. The relationship between the polarization axis of the first linear polarizing plate 3 in 1A and the slow axis in the inspection region A of the base film 8A can be adjusted to a predetermined relationship. That is, it is possible to perform an inspection in which the influence of the in-plane retardation of the base film 8A is suppressed at any position in the width direction of the base film 8A.
  • FIG. 5 depicts a state in which the object to be inspected 10 to be inspected is arranged between the first linear polarizing plate 3 and the retardation filter 4.
  • the slow axis of the base film 8A and the polarization axis of the second linear polarizing plate 5 are substantially orthogonal to each other or substantially parallel to each other. Arrange so that
  • the presence or absence of defects in the retardation film 7A can be easily inspected by the same principle as in the first embodiment.
  • the present invention can be used for an inspection for determining the presence or absence of defects in the retardation film.
  • 1A, 1B ... Inspection device 2 ... Light source, 3 ... First linear polarizing plate, 4 ... Phase difference filter, 5 ... Second linear polarizing plate, 6 ... Camera (detection means), 7A, 7B ... Phase difference film , 7a ... Coating film, 8A, 8B ... Base film, 9 ... Optical axis, 10 ... Inspected object, 12 ... Orientation angle measuring instrument, 14 ... Angle adjustment mechanism, 16 ... Coating machine, 18 ... Dryer, 100 ... Inspection system, A ... Inspection area.

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  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
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  • General Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
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  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

L'invention concerne un procédé d'inspection dans lequel une lumière est émise sur un objet (10) soumis à inspection comprenant un film de base (8A) ayant une valeur de retard dans le plan égale ou supérieure à 50 nm pour une longueur d'onde de 550 nm, et un film de retard (7A) qui est formé sur un côté du film de base (8A) et comprend un composé cristallin liquide polymérisable durci, et une détermination est effectuée afin de vérifier s'il existe ou non un défaut sur le film de retard. Une première plaque de polarisation linéaire (3), l'objet (10) soumis à inspection, un filtre de retard (4) et une deuxième plaque de polarisation linéaire (5) sont agencés. L'axe lent du film de base et l'axe de polarisation de la première ou de la deuxième plaque de polarisation linéaire sont approximativement orthogonaux ou approximativement parallèles l'un à l'autre. L'axe lent du film de retard et l'axe lent du filtre de retard sont approximativement parallèles l'un à l'autre. Le total des valeurs de retard dans le plan du film de retard et du filtre de retard va de 520 à 600 nm. La lumière pénètre depuis le côté de l'une parmi les première et deuxième plaques de polarisation linéaire et elle est observée depuis le côté de l'autre.
PCT/JP2020/037526 2019-12-16 2020-10-02 Procédé d'inspection, dispositif d'inspection, et système d'inspection WO2021124647A1 (fr)

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WO2022044951A1 (fr) * 2020-08-28 2022-03-03 住友化学株式会社 Procédé d'inspection
WO2023189090A1 (fr) * 2022-03-31 2023-10-05 住友化学株式会社 Procédé de test

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JP2006003174A (ja) * 2004-06-16 2006-01-05 Shin Nisseki Ekisho Film Kk 光学フィルムの検査方法
JP2009097915A (ja) * 2007-10-15 2009-05-07 Nippon Oil Corp 光学フィルムの検査方法
US20100157297A1 (en) * 2008-12-19 2010-06-24 Tae Man Kim Apparatus and method of testing liquid crystal display device
JP2013050393A (ja) * 2011-08-31 2013-03-14 Fujifilm Corp パターン化位相差フィルムの欠陥検出装置及び方法、並びに製造方法
WO2016105017A1 (fr) * 2014-12-23 2016-06-30 동우 화인켐 주식회사 Film optique et dispositif d'affichage à oled le comprenant
JP2019070617A (ja) * 2017-10-11 2019-05-09 住友化学株式会社 欠陥検査装置、欠陥検査方法、及び、フィルムの製造方法
JP2019151099A (ja) * 2018-03-02 2019-09-12 住友化学株式会社 積層フィルム

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Publication number Priority date Publication date Assignee Title
JP2006003174A (ja) * 2004-06-16 2006-01-05 Shin Nisseki Ekisho Film Kk 光学フィルムの検査方法
JP2009097915A (ja) * 2007-10-15 2009-05-07 Nippon Oil Corp 光学フィルムの検査方法
US20100157297A1 (en) * 2008-12-19 2010-06-24 Tae Man Kim Apparatus and method of testing liquid crystal display device
JP2013050393A (ja) * 2011-08-31 2013-03-14 Fujifilm Corp パターン化位相差フィルムの欠陥検出装置及び方法、並びに製造方法
WO2016105017A1 (fr) * 2014-12-23 2016-06-30 동우 화인켐 주식회사 Film optique et dispositif d'affichage à oled le comprenant
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JP2019151099A (ja) * 2018-03-02 2019-09-12 住友化学株式会社 積層フィルム

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022044951A1 (fr) * 2020-08-28 2022-03-03 住友化学株式会社 Procédé d'inspection
JP7413209B2 (ja) 2020-08-28 2024-01-15 住友化学株式会社 検査方法
WO2023189090A1 (fr) * 2022-03-31 2023-10-05 住友化学株式会社 Procédé de test

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