WO2021115099A1 - Système et procédé de mesure de sensibilité à une lumière ultraviolette multispectrale - Google Patents

Système et procédé de mesure de sensibilité à une lumière ultraviolette multispectrale Download PDF

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Publication number
WO2021115099A1
WO2021115099A1 PCT/CN2020/130350 CN2020130350W WO2021115099A1 WO 2021115099 A1 WO2021115099 A1 WO 2021115099A1 CN 2020130350 W CN2020130350 W CN 2020130350W WO 2021115099 A1 WO2021115099 A1 WO 2021115099A1
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light
sensitivity
detection
integrating sphere
ultraviolet
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PCT/CN2020/130350
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English (en)
Chinese (zh)
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周婷婷
李想
朱曦
魏冶
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江苏南大五维电子科技有限公司
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Publication of WO2021115099A1 publication Critical patent/WO2021115099A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties

Definitions

  • the invention belongs to the detection field, and particularly relates to a multispectral ultraviolet light sensitivity detection system and a detection method.
  • Ultraviolet sensitivity is the minimum intensity of ultraviolet light that the ultraviolet imager can respond to. Ultraviolet sensitivity is one of the important performances of UV imagers. The intensity of UV sensitivity is related to the response of the device to corona signals. Generally, the higher the UV sensitivity, the better the response of the device to corona signals. The more photons arrive.
  • Detecting the ultraviolet sensitivity of an ultraviolet imager requires a very weak signal.
  • the signal of this intensity is difficult to generate and control. Even if a signal of this intensity is generated, the current detection instrument cannot accurately measure its intensity, so that it cannot accurately measure the intensity of the ultraviolet imager. Quantitative assessment of UV sensitivity.
  • the attenuation sheet has a certain attenuation coefficient, but the attenuation amplitude cannot be adjusted, which increases the complexity of the actual operation of the scheme.
  • the attenuator reflective
  • problems such as uncertain light attenuation and uneven light intensity distribution.
  • UV sensitivity detection schemes are mostly focused on UV sensitivity detection in a certain band, but the ultraviolet detection of UV imagers in the industry is distributed between 180nm and 280nm, so the response to a certain band cannot be fully expressed The UV sensitivity of the UV imager.
  • Chinese patent CN201710744780 day-blind ultraviolet camera detection sensitivity test system and test method discloses an ultraviolet light detection sensitivity test system and test method for an ultraviolet imager.
  • the method uses a laser-pumped broadband light source to generate a high-brightness, high-stability broadband
  • the white light is incident on the dual-cascade monochromator system, and under the control of the computer, the dual-cascade monochromator system generates the required ultraviolet monochromatic light.
  • the monochromatic light output by the monochromator is converted into a monochromatic uniform light after being attenuated by the UV attenuator, and then incident on the solar-blind UV camera.
  • the optical power of the monochromatic light output by the integrating sphere can be displayed in real time by the intelligent power meter system ,
  • the number of photons output by the solar-blind UV camera is collected into the computer through the serial port. If the average photon number in the bright environment is equal to the average photon number in the dark environment, the light power density incident on the solar-blind UV camera is UV Light detection sensitivity
  • the front-end light source uses a laser-pumped broadband light source, a dual-cascade monochromator, an integrating sphere, etc. to generate a monochromatic ultraviolet light source; the light source is attenuated by an attenuator in the middle; the back-end reads the number of photons through a serial port.
  • the sensitivity calculation method of the whole system is as follows: the sensitivity of the device under test is equivalently evaluated by finding the way that the number of photons is equal in the dark environment and the bright environment.
  • the front-end system of this solution requires high equipment; three attenuation plates are used in the middle to attenuate the light source.
  • the attenuation plates have a certain attenuation coefficient, but cannot be adjusted.
  • the attenuation plates need to be combined repeatedly; secondly, look for dark environment and light
  • the balance of the environment requires repeated testing of the system, and the implementation and evaluation process of this program is relatively long.
  • ultraviolet light sensitivity detection requires the detection signal to reach the level of photons, which requires high detection light sources and measuring instruments, which are difficult to achieve with ordinary light sources and measuring instruments;
  • optical attenuators are used for signal attenuation.
  • the attenuators have a certain attenuation coefficient, but the attenuation amplitude cannot be adjusted continuously. In actual operation, the complexity of the operation and the experiment time are increased.
  • There are shortcomings such as non-quantitative light attenuation and uneven light intensity distribution after attenuation;
  • the purpose of the present invention is to provide a multi-spectral ultraviolet sensitivity detection system and detection method against the defects of the prior art.
  • a multi-spectral ultraviolet sensitivity detection system including: a light-emitting device, an attenuation device, a detection device, and a verification processing system;
  • the light-emitting device is used to emit a monochromatic light source signal, and the monochromatic light source signal enters the attenuation device;
  • the attenuation device includes n integrating spheres and n-1 iris diaphragms, n ⁇ 2, and the integrating sphere includes one light entrance hole and two light exit holes.
  • the light exit hole of is connected to the light entrance hole of the next integrating sphere through an iris diaphragm, and the UV imager to be tested is placed at the light exit hole of the last integrating sphere;
  • the detection device is arranged at the other light exit hole of the integrating sphere, and the detection situation is synchronously recorded, and the detection result is analyzed and processed by the verification processing system to obtain the sensitivity detection result of the ultraviolet imager.
  • the light-emitting device is a wavelength tunable laser for generating a light source signal with a continuously adjustable wavelength; or the light-emitting device is a light source and a filter device, and the light-emitting device is used to filter the light source signal into a monochromatic light source; the light source is Xenon lamp or LED lamp of specific wave band.
  • the filter device includes a replacement device and filters of different wavelengths, the replacement device is used to fix a plurality of filters of different wavelengths, and manually or electrically switch the filters of different wavelengths as needed On the path of light.
  • the replacement device is a turntable type replacement device or a left-right movable type replacement device.
  • the detection device includes an optical power meter and a spectrum detector; the spectrum detector is placed at the light exit hole of the first integrating sphere, and the optical power meter is placed at the light exit hole of the remaining integrating spheres.
  • the spectrum detector used at the last integrating sphere is a photon counter.
  • a small aperture diaphragm and/or an optical density sheet are also arranged between the light-emitting device and the attenuation device.
  • optical aperture of the integrating sphere is greater than or equal to 50 mm.
  • a detection method for detecting ultraviolet light sensitivity according to a detection system including the following steps:
  • the verification processing system reads the optical power count value in the photon counter, and calculates and obtains the minimum detection sensitivity value of the device under test;
  • the sensitivity spectrum curve is drawn according to the relationship between the test band and the sensitivity, and the sensitivity spectrum curve of the UV imager to be tested is generated.
  • the minimum detection sensitivity value calculated by the verification processing system in step (4) adopts the following:
  • E min is the UV detection sensitivity, expressed in watts per square centimeter; W is the luminous power detected by the photon counter, in watts; d is the diameter of the photosensitive surface of the photon counter, in mm.
  • the invention provides a solution for the sensitivity detection of the ultraviolet imager.
  • This solution can realize the accurate detection of the lowest detection sensitivity of all current ultraviolet imagers, and can form a sensitivity spectrum curve at the same time to comprehensively analyze the performance of the equipment.
  • the attenuation mode of the light source signal in the present invention is that the system greatly attenuates the signal through the integrating sphere, and the intensity of the light source signal can be accurately adjusted by controlling the iris between the integrating spheres, thereby realizing continuous adjustment of the light source intensity.
  • the integrating sphere itself has the function of a uniform light source, and the attenuated signal intensity is uniform and stable.
  • the invention uses an attenuation device composed of an integrating sphere group and an iris diaphragm to continuously attenuate the light source signal, and the attenuation amplitude is accurately adjustable.
  • the attenuation device attenuates the light source signal through the cascade of integrating sphere groups; the outgoing light source is more uniform, avoiding the shortcomings of non-quantitative and uneven light attenuation in the attenuator scheme.
  • This solution has low requirements for the experimental environment, can generate a uniform and stable UV test signal, and the signal intensity can be accurately adjusted.
  • the implementation of this program on the one hand, can perform sensitivity detection on a single device to evaluate its UV sensitivity performance, and further, it can perform sensitivity detection on different devices to uniformly calibrate the number of photons, which is conducive to the advancement of UV detection standardization. .
  • the spectrum analysis function of this solution can detect the UV sensitivity of different bands, and obtain the sensitivity spectrum curve of the device. The detection performance is more comprehensive, and it can meet the sensitivity detection needs of all UV imagers on the market.
  • Fig. 1 is a schematic diagram of the structure of the multi-spectral ultraviolet sensitivity detection system of the embodiment.
  • the invention includes a light emitting device, a filter set, an integrating sphere, an iris diaphragm, an optical power meter, a spectrum detector and a verification processing system.
  • the light emitting device is used to emit a monochromatic light source signal.
  • the light-emitting device is a wavelength tunable laser, which is used to generate a light source signal with a continuously adjustable wavelength; or the light-emitting device is a light source and a filter device, which is used to filter the light source signal into a monochromatic light source.
  • the filter set and its mechanical device constitute a filter device
  • the integrating sphere and the iris diaphragm are combined to form an attenuation device.
  • This system includes more than one level attenuation device;
  • Power meter and spectrum detector and other testing instruments constitute the testing device.
  • the working mode is as follows: the wavelength tunable laser emits a monochromatic light source or the light source signal passes through the filter device to form a monochromatic light source, the monochromatic light source enters the attenuation device; the equipment to be tested is placed at the last exit of the attenuation device, and the detection device is placed at the corresponding integral
  • the ball outlet synchronously records the detection situation, and the final result is analyzed and processed by the verification processing system, and the multi-spectral sensitivity detection result is obtained.
  • the light source of this scheme uses xenon lamp, the spectrum of xenon lamp is similar to that of daylight, which is closer to the actual environment.
  • the filter device of this system is composed of multiple filters and a rotating disc replacement device.
  • the filter is customized according to the test spectrum.
  • the turntable replacement device is a disc.
  • a snap ring for the filter is designed around the disc. Through the snap ring, the filter can be freely removed and put in. When testing, Multiple filters can be placed at one time, and filters of different wavelengths can be switched by rotating the disc.
  • the filter device can also be composed of multiple filters and a left-right movable replacement device.
  • the left-right movable type replacement device is a horizontal frame, and multiple filters are placed on the horizontal frame, and then the horizontal frame is moved left and right to achieve the function of switching the filters.
  • the filter device of this system can be adjusted manually or designed as a mechanical adjustment.
  • a small aperture diaphragm and/or optical density film may also be arranged between the light emitting device and the attenuating device.
  • the attenuation device of this system includes n integrating spheres and n-1 iris diaphragms, n ⁇ 2.
  • the integrating sphere includes a light entrance hole and two light exit holes. Between the connected integrating spheres, the light output of the previous integrating sphere The hole is connected to the light entrance hole of the next integrating sphere through an iris diaphragm, and the ultraviolet imager to be tested is placed at the light exit hole of the last integrating sphere.
  • the attenuation method is: the system greatly attenuates the signal through the integrating sphere, and the light source signal intensity can be precisely adjusted by controlling the iris between the integrating spheres, so as to realize the continuous adjustment of the light source intensity.
  • the integrating sphere itself has the function of a uniform light source, and the attenuated signal intensity is uniform and stable.
  • the iris diaphragm of the attenuation device of this system can be controlled independently, which can be adjusted by electric control, and can also be adjusted manually; by adjusting the iris, the signal strength can be precisely adjusted.
  • the detection devices of this system include optical power meter and spectrum detector.
  • the spectrum detector is placed at the light exit hole of the first integrating sphere to detect the light source spectrum; the spectrum measurement needs to ensure that the light source is monochromatic, that is to say, a narrow band filter or a monochromatic light source with adjustable wavelength is required.
  • the optical power meter is placed at the light exit hole of the remaining integrating spheres.
  • the spectrum detector used at the last integrating sphere is a photon counter.
  • the photon counter is placed in a light exit hole of the last integrating sphere of the attenuation device, and the radiation output from the output port of the integrating sphere can be controlled at 10 -14 ⁇ 10 -17 W/cm 2 , which meets the detection of signal photon magnitude.
  • the remaining optical power meters can be pW (10 -12 W) power meters, which meet the detection accuracy of current-type optical power meters on the market.
  • the entire detection process, detection results, and the response of the light source and the detector can be intuitively visible on the screen of the UV imager to be tested.
  • the diameter of the light hole (light entrance hole and light exit hole) of this scheme is greater than or equal to 50mm, which meets the detection requirements of mainstream ultraviolet imagers on the market;
  • the video detected by this system can be imported into the built-in verification processing system to directly calculate the sensitivity value.
  • Adjust the wavelength tunable laser or filter device select the wavelength band to be detected or switch the corresponding filter to the optical path;
  • the minimum detection sensitivity value calculated by the verification processing system is as follows:
  • E min is the UV detection sensitivity, expressed in watts per square centimeter; W is the luminous power detected by the photon counter, in watts; d is the diameter of the photosensitive surface of the photon counter, in mm.
  • the UV sensitivity detection system is used to detect the minimum detection sensitivity of the system. As shown in Figure 1, it includes a light source 1, a filter device 2, an attenuation device, an optical power meter and a spectrum detector 3, among which three integrating spheres are cascaded The way is connected, and there is an iris diaphragm between each pair.
  • the filter device adopts a rotating disc type replacement device and filters of different wavelengths, and manual adjustment is adopted.
  • the attenuation device contains three integrating spheres (first integrating sphere 4, second integrating sphere 5, third integrating sphere 6) and two iris diaphragms (first iris diaphragm 7, second iris diaphragm 8) .
  • the light from the light source enters the first integrating sphere through the filter, and the spectrum detector is used to detect the light source spectrum.
  • the light attenuates through the first integrating sphere and enters the second integrating sphere through the first iris diaphragm, and exits after being attenuated again by the second integrating sphere.
  • the optical power in the second integrating sphere is detected by the optical power meter 9 on the second integrating sphere.
  • the optical power meter detects the light intensity with a detection accuracy of 50nW (10 -8 W). Therefore, the light in the second integrating sphere The power can be controlled above the nW level.
  • the light is attenuated by the second integrating sphere and then enters the third integrating sphere through the second iris.
  • the radiation output obtained at the output port of the third integrating sphere can be controlled at 10 -6 to 10 -19 W/cm 2 , the output aperture It is 50mm.
  • the optical power meter corresponding to the other exit of the third integrating sphere is a photon counter 10.
  • the ultraviolet imager 11 to be detected is placed at the light exit hole of the last integrating sphere.
  • the photon counter is selected to detect the number of photons.
  • the supporting software of this module can be adapted to the mainstream UV imagers on the market. By importing the UV channel video, the UV sensitivity of the UV imager can be automatically calculated.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

L'invention concerne un système de mesure de sensibilité à une lumière ultraviolette multispectrale, comprenant : un appareil d'émission de lumière, un appareil d'atténuation, un appareil de mesure et un système de traitement de vérification. L'appareil d'atténuation comprend n sphères d'intégration et n-1 diaphragmes à iris, avec n ≥ 2 ; une sphère d'intégration comprenant un trou d'entrée de lumière et deux trous de sortie de lumière ; entre les sphères d'intégration interconnectées, le trou de sortie de lumière de la sphère d'intégration précédente est relié au trou d'entrée de lumière de la sphère d'intégration suivante au moyen d'un diaphragme à iris, et un imageur à ultraviolets (11) devant être testé est placé au niveau du trou de sortie de lumière de la dernière sphère d'intégration. Un appareil de mesure est agencé au niveau de l'autre trou de sortie de lumière de la sphère d'intégration, et enregistre de manière synchrone les conditions de mesure ; le résultat de mesure est analysé et traité par le système de traitement de vérification, et un résultat de mesure de sensibilité de l'imageur à ultraviolets (11) est obtenu. L'appareil possède de faibles exigences pour l'environnement expérimental, peut générer des signaux de test ultraviolets à une intensité de signal uniforme et stable, l'intensité de signal peut être ajustée avec précision, et les résultats de mesure peuvent être mesurés et retracés. La fonction d'analyse spectrale de l'appareil peut mesurer la sensibilité aux ultraviolets de différentes longueurs d'onde, obtenir une courbe de spectre de sensibilité de dispositif, et les performances de mesure sont plus exhaustives. L'invention concerne également un procédé de mesure de sensibilité à une lumière ultraviolette multispectrale.
PCT/CN2020/130350 2019-12-10 2020-11-20 Système et procédé de mesure de sensibilité à une lumière ultraviolette multispectrale WO2021115099A1 (fr)

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CN114527420B (zh) * 2022-04-24 2022-07-01 南京谷贝电气科技有限公司 基于多向光路切换轮的紫外成像仪校验装置及方法

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